JP2011017375A - Division type base isolation device and method for isolating base of existing apparatus or the like by using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a division type base isolation device providing high strength as a whole and enabling base isolation construction only by jacking up existing apparatus even in a small working space, and a method for isolating base of the existing apparatus or the like by using the same.SOLUTION: A pair of base isolation units 1, 2 include a lower board 3 installed on a floor, a moving board 4 installed on the lower board movably in X direction, and an upper board 5 disposed on the movable board movably in Y direction and having an object of base isolation fixed thereon, and are detachably and attachably connected by a moving board connecting member 14 disposed between opposing sides of the moving board 4 and an upper board connecting member 15 disposed between opposing sides of the upper board 5. The upper board connecting member 15 is disposed in such a manner that a lower surface thereof is positioned above an upper surface of the moving board connecting member 14.

Description

  The present invention relates to a split type seismic isolation device suitable for use in seismic isolation of existing equipment, and a seismic isolation method for existing equipment using the seismic isolation device.

  Generally, when making existing equipment installed on the floor seismic isolation, it is done by newly installing a seismic isolation device between the floor surface and the lower surface of the equipment. . At this time, if a sufficient working space can be secured around the equipment, the equipment is jacked up at the installation position, the seismic isolation device is fed into the gap formed thereby, and the floor surface What is necessary is just to attach to the said apparatuses.

  However, in a semiconductor manufacturing facility, for example, as shown in FIG. 8A, a plurality of existing equipment such as CVD and diffusion devices are arranged in parallel and continuously along a passage (work space). Yes. And since the width dimension of the said work space is usually narrower than the depth dimension of the said apparatuses, it is difficult to interpose a new seismic isolation apparatus from the said work space side.

  For this reason, in the semiconductor manufacturing facility, when the existing equipment is to be seismically isolated, as shown in FIG. 8 (b), the existing equipment is temporarily moved so as to straddle the vacant space. Then, after temporarily placing the seismic isolation device in the work space, the construction method is adopted in which the seismic isolation device is installed at a predetermined position and the devices are mounted on the seismic isolation device again.

  However, in the conventional seismic isolation method for existing equipment, it is necessary to move the existing equipment. Therefore, especially in facilities with a large number of equipment such as semiconductor manufacturing facilities, In addition to the need for extensive preparation work, it is necessary to remove and reconnect the pipes and wirings connected to each device, resulting in a problem that much labor is required.

Therefore, in the following Patent Document 1, a split-type seismic isolation device suitable for the above uses is proposed.
In this split type seismic isolation device, the seismic isolation device is divided into two seismic isolation units, and these seismic isolation units are spaced apart to form a space between the seismic isolation units. The side surfaces of the seismic isolation unit, which are positioned in a straight line with the gap between them, are detachably connected by a connecting material.

JP 2004-84917 A

  According to the split type seismic isolation device configured as described above, one seismic isolation unit is fed in advance between the floor and existing equipment, and then one end of the connecting plate is connected to the side surface of the seismic isolation unit. Then, after feeding the seismic isolation unit with the connection plate further, connect the other end of the connection plate extending from the equipment to the work space side to the side surface of the other seismic isolation unit. It is integrated and finally the other seismic isolation unit is also sent to the lower surface of the equipment, so that the above equipment can be moved without jacking up to a height that allows the split type seismic isolation device to be inserted. There is an advantage that the earthquake can be achieved.

  However, in the split type seismic isolation device and the seismic isolation method for existing equipment using the seismic isolation device, the seismic isolation units are connected and integrated by a connecting material bridged between the side surfaces. In addition, since a wide space is formed between the opposing sides, there is a problem that the strength of the entire split type seismic isolation device is poor.

  In addition, when a large number of devices are installed almost continuously as in the semiconductor manufacturing facility shown in FIG. 8, the connecting material for connecting the side surfaces of the seismic isolation unit is the side of the seismic isolation unit. Since it protrudes in the direction, there is also a problem that it becomes easy to interfere with the seismic isolation unit of the split type seismic isolation device added below the adjacent devices.

  Furthermore, since the connecting material requires a length dimension between the side surfaces of both seismic isolation units, when implementing the above-described seismic isolation method, the width of the work space is also the same as that of the connecting material. There is a restriction that a width dimension exceeding the length dimension is required.

  The present invention has been made in view of the above circumstances, and as a whole, high strength can be obtained, and even in a narrow work space, it is possible to perform seismic isolation simply by jacking up without moving existing equipment. It is an object of the present invention to provide a separable seismic isolation device that enables construction work and a seismic isolation method for existing equipment using the seismic isolation device.

  In order to solve the above-mentioned problem, the invention according to claim 1 is a split type immunity comprising a pair of seismic isolation units each having a rectangular shape as a whole and a connecting part for detachably connecting these seismic isolation units. A seismic device, wherein the seismic isolation unit includes a lower board, a moving board arranged on the lower board, and an upper board arranged on the moving board. A first rail extending in the X direction of the horizontal direction is provided on one side, and a first roller that rolls on the first rail is provided on the other side. A second rail extending in the Y direction is provided, and a second roller that rolls on the second rail is provided on the other side, and the connecting portion is opposed to the pair of moving plates. It is arranged between the sides, and both end portions are detachably connected to the opposite sides of each moving board. A movable board connecting member, and an upper board connecting member disposed between the opposing sides of the pair of upper boards and having both ends removably connected to the opposing sides of each of the upper boards, And the said upper board connection member is arrange | positioned so that the lower surface may be located above the upper surface of the said moving board connection member, It is characterized by the above-mentioned.

  According to a second aspect of the present invention, in the first aspect of the present invention, the first rail is provided on the lower board, the second rail is provided on the upper board, and the movement is performed. The board is provided with the first roller and the second roller.

  Further, the invention according to claim 3 is the invention according to claim 1 or 2, wherein the upper board is integrally joined through a vertical reinforcing plate in which a square top plate and a bottom plate are disposed at least on the opposite sides. The upper board connecting member is formed into a bottomed rectangular tube shape having a flat plate portion extending between the bottom plates of the upper board and a side wall standing on the periphery of the flat plate portion. It is characterized in that it is detachably connected between opposite sides of the board via bolts.

  According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, a damper that absorbs the relative displacement in the X direction is provided between the lower plate and the movable platen. A damper that is provided in parallel with the first rail and that absorbs the relative displacement in the Y direction is provided in parallel with the second rail between the moving plate and the upper plate. Is.

  Next, the invention according to claim 5 is the seismic isolation of the existing equipment for interposing the split type seismic isolation device according to any of claims 1 to 4 between the floor surface and the existing equipment. In the chemical method, the existing equipment is jacked up to a height at which the seismic isolation unit can be inserted at the installation position, and then one of the seismic isolation units is inserted between the floor and the existing equipment. Then, one end of the upper board connecting member is connected to the opposite side of the upper board of the seismic isolation unit, and one end of the moving board connecting member is connected to the opposite side of the moving board, and then After feeding one seismic isolation unit, the upper panel connecting member and the movable panel connecting member between the floor and the existing equipment, the other end of the upper panel connecting member is connected to the other base isolation unit. Connected to the opposite side of the upper board and the other end of the moving board connecting member The split type seismic isolation device is integrated by connecting to the opposite side of the movable board of the other base isolation unit, and then the entire split type seismic isolation device is placed between the floor and the existing equipment. After the feeding, the lower board is fixed to the floor surface, the jack-up is released, and the existing devices are attached to the upper board.

  In the split type seismic isolation device according to claims 1 to 4 and the seismic isolation method for existing equipment according to claim 5 using the same, the moving panels of a pair of seismic isolation units are connected to each other on opposite sides. The upper boards are detachably connected by the upper board connecting members arranged between the opposing sides, while being detachably connected by the movable board connecting members arranged therebetween.

  Therefore, since the length dimension of the movable board connecting member and the upper board connecting member is the separation dimension of both seismic isolation units, it is shorter than the conventional one. In addition, by connecting only the opposing sides of the seismic isolation unit to the work space side from the lower surface of the existing equipment, the connecting operation of the moving board connecting member and the upper board connecting member can be performed. As a result, even in a narrow work space, it is possible to perform seismic isolation simply by jacking up the equipment without moving the existing equipment.

  Moreover, since the opposing sides of the seismic isolation unit are connected and integrated by the moving board connecting member and the upper board connecting member, the dimensions and shapes of the moving board connecting member and the upper board connecting member are appropriately set. Therefore, it is possible to increase the strength of the split type seismic isolation device as a whole. In addition, even when a large number of devices are installed almost continuously as in a semiconductor manufacturing facility, the split type seismic isolation devices installed below the adjacent devices do not interfere with each other. It can also be installed. At this time, if the upper panels of adjacent split-type seismic isolation devices are connected to each other, it is possible to reliably prevent the adjacent split-type seismic isolation devices from interfering with each other and install them more closely. .

  After the seismic isolation, when the floor surface is displaced in the XY direction at the time of the earthquake occurrence, both seismic isolation units connected by the moving panel connecting member to the lower panel fixed to the floor surface. The movable board is integrally displaced in the X direction, and the upper board integrated by the upper board connecting member is displaced in the Y direction with respect to the movable board. Excessive shaking can be prevented from occurring in the devices installed above.

At this time, since the moving plate connecting members are connected to each other, when different weights act on the opposite moving plate due to the eccentric load of the seismic isolation object, or the damper is unevenly arranged. Even when a large twisting force is expected to be generated, stable performance can be exhibited without twisting between the two.
In addition, although the moving board and the moving board connecting member and the upper board and the upper board connecting member of both seismic isolation units move relative to each other in the Y direction, the upper board connecting member and the moving board connecting member are respectively connected to the upper board. Since it arrange | positions so that the lower surface of a member may be located above the upper surface of a moving board connection member, it can prevent that these upper board connection members and a moving board connection member interfere.

  Further, according to the invention described in claim 3, the upper board is formed into an external thick plate shape in which a square top plate and a bottom plate are joined and integrated via a vertical reinforcing plate, and an upper board connecting member is formed. Is formed in a bottomed rectangular tube shape having a flat plate portion and a side wall extending between the bottom plates, so that a high strength can be obtained as a whole. As a result, even if the equipment mounted on the upper part is heavy, it can be supported stably.

  By the way, in the split type seismic isolation device in which the upper board is relatively displaceable relative to the lower board in the XY direction, it is desirable to increase the displacement amount in order to enhance the seismic isolation effect. In many cases, equipment that is not seismically isolated and fixed objects on the floor such as floor through pipes are arranged adjacent to the above equipment.

  In such a case, as in the invention described in claim 4, a damper for absorbing relative displacement in the X direction is provided between the lower board and the moving board in parallel with the first rail, and the moving board is provided. If a damper that absorbs the relative displacement in the Y direction is provided between the upper board and the upper board, the relative displacement of the upper board with respect to the lower board can be suppressed. At this time, in particular, since the damper is arranged in parallel with the first rail or the second rail, the relative displacement in the XY direction can be efficiently suppressed by the compact damper. In addition, the vibration caused by the earthquake can be quickly converged by the damper.

It is a top view which shows one Embodiment of the split-type seismic isolation apparatus which concerns on this invention. It is a right view of FIG. It is a front view of FIG. FIG. 3 is an enlarged assembly view illustrating a connecting portion in FIG. 2. It is a disassembled perspective view of the principal part of FIG. It is process drawing for demonstrating the seismic isolation construction method of the existing equipment which concerns on this invention. FIG. 6A shows a state in which existing equipment is jacked up, where FIG. 6A is a plan view and FIG. 6B is a front view. It is a schematic diagram for demonstrating the seismic isolation method of the existing existing equipment.

1-5 shows one Embodiment of the split-type seismic isolation apparatus based on this invention.
As shown in these figures, the split type seismic isolation device is detachable between a pair of seismic isolation units 1 and 2 each having a square shape as a whole, and opposite sides 1a and 2a of these seismic isolation units 1 and 2. It is roughly constituted by a connecting part to be connected.

Here, the seismic isolation units 1 and 2 each have a lower board 3 installed on the floor surface, a moving board 4 arranged on the lower board 3, and arranged on the moving board 4 for seismic isolation. The upper panel 5 is fixed to the lower surface of the equipment (the seismic isolation object), the horizontal damper 6 in the X direction, and the horizontal damper 7 in the Y direction.
First, the lower board 3 is a rectangular plate-like member, and two first rails 8 (a total of eight) are provided at each of the four corners of the upper surface thereof in the X direction in the horizontal direction (left and right in FIG. 1). Direction).

  In addition, the movable board 4 is formed in a square shape having substantially the same outer dimensions as the lower board 3, an opening is formed at the center, and two rows of belt-like openings 4a and 4b are formed along the side direction at the outer periphery. Each of the skeleton-shaped members formed at each end protrudes downward from the lower surface of the lower plate 3 to both ends of the band-like opening 4a facing the upper side of the first rail 8 fixed to the lower plate 3. A first roller 9 that rolls on the rail 8 is rotatably provided.

  Furthermore, the second roller 10 protruding upward from the upper surface of the lower plate 4 is rotatable at both ends of the band-like opening 4b extending in a direction orthogonal to the band-like opening 4a of the moving plate 4. Is provided. Thereby, the movable board 4 is provided on the first rail 8 of the lower board 3 so as to be movable in the X direction.

  Further, the upper board 5 is formed by joining and integrating the rectangular top plate 5a and the bottom plate 5b via a plurality of vertical reinforcing plates 5c arranged in a direction orthogonal to the opposing sides 1a and 2a. It is formed by a double plate structure with increased rigidity, and a connecting reinforcing plate 5d is joined to the opposing sides 1a, 2a. In the seismic isolation unit 1, two second rails 11 in total (four in total) are provided in the horizontal direction on the lower surface of the upper panel 5 and along two sides orthogonal to the opposite side 1 a. It is fixed in the direction (vertical direction in FIG. 1). In the seismic isolation unit 2, two (a total of eight) second rails 11 are fixed in the Y direction at each of the four corners of the lower surface of the upper panel 5.

  The upper board 5 is placed on the moving board 4 so that the second roller 10 of the moving board 4 rolls along the second rail 11, so that the upper board 5 moves in the Y direction with respect to the moving board 4. Is provided so as to be relatively movable.

  In addition, in this split type seismic isolation device, one end portion is fixed to the lower plate 3 and the other end portion is fixed to the moving plate 4 between the outer peripheral portions of the lower plate 3 and the moving plate 4. A horizontal damper 6 that absorbs the relative displacement in the direction is provided in parallel with the first rail 8. In addition, between the outer peripheral parts of the movable board 4 and the upper board 5, a horizontal damper that absorbs the relative displacement in the Y direction by fixing one end to the movable board 4 and the other end to the upper board 5. 7 is provided in parallel with the second rail 11.

  And these seismic isolation units 1 and 2 are detachably connected by the said connection part which consists of the moving board connecting member 14 and the upper board connecting member 15 which are arrange | positioned between mutual opposing sides 1a and 2a. Here, as shown in FIGS. 1 and 4, the movable board connecting member 14 is a rectangular tube-shaped member, and is disposed at both ends of the opposing sides 1 a and 2 a of the seismic isolation units 1 and 2, respectively. The opposite sides of the movable board 4 are connected by bolts 16.

  On the other hand, the upper board connecting member 15 is formed in a bottomed rectangular tube shape having a rectangular plate-like flat plate portion 15a extending between the bottom plates of the upper plate 5 and a side wall 15b erected on the outer peripheral edge of the flat plate portion 15a. In the upper end portion of the side wall 15b that comes into contact with the connecting reinforcing plate 5d provided on the opposite side of the upper plate 5, a flange portion 15c bent on the top plate 5a of the upper plate 5 is formed. .

  The upper board connecting member 15 is disposed between the opposing sides 1 a and 2 a of the seismic isolation units 1 and 2 and between the moving board connecting members 14, and the side wall 15 b is connected to the upper board 5 by the bolt 17. While being detachably connected to the connection reinforcing plate 5d, the flange plate 15c is detachably connected to the top plate 5a of the upper panel 5 by bolts 18. As shown in FIGS. 2 and 4, the upper panel connecting member 15 is formed such that the lower surface of the flat plate portion 15 a is positioned above the upper surface of the moving panel connecting member 14.

Next, based on FIGS. 1-7, one Embodiment of the seismic isolation construction method of the existing equipment which concerns on this invention using the split-type seismic isolation apparatus which consists of the above structure is described.
First, as shown in FIG. 7, a jig 20 for jacking up is attached to the lower part of the front and rear surfaces when viewed from the work space S side of the existing equipment M, and a claw jack disposed on both sides of the equipment M. 21 supports both ends of the jig 20. Then, by operating these four claw jacks 21, the equipment M is jacked up to a position slightly higher than the thickness dimension of the seismic isolation units 1 and 2 through the jig 20. And a gap 22 is formed between the lower surface of the devices M and the like.

  Next, as shown in FIG. 6A, one seismic isolation unit 1 is disposed at a position facing the gap 22 in the work space S, and as shown in FIG. Insert into the gap 22 below the equipment M. At this time, the lower board 3, the moving board 4 and the upper board 5 in the seismic isolation unit 1 are fixed to each other so that the lower board 3, the moving board 4 and the upper board 5 do not move relative to each other. The second rollers 9 and 10 are locked. When the seismic isolation unit 1 is sent into the gap 22, a part of the seismic isolation unit 1 is exposed to the work space S side.

  Then, as shown in FIG. 6 (c), one end of a moving board connecting member 14 and an upper board connecting member 15 (not shown in FIG. 6) is provided on the moving board 4 and the upper board 5 of the seismic isolation unit 1. Are connected by the bolts 16, 17, and 18, and the integrated seismic isolation unit 1, the moving panel connecting member 14, and the upper panel connecting member 15 are further connected to the devices M as shown in FIG. 6 (d). Into the gap 22. Also at this time, the other end portions of the movable board connecting member 14 and the upper board connecting member 15 are exposed to the work space S side.

  Next, as shown in FIG. 6 (e), the other ends of the moving board connecting member 14 and the upper board connecting member 15 are respectively connected to the moving board 4 and the upper board 5 of the other seismic isolation unit 2 with the bolts 16, 17 described above. , 18 and then, as shown in FIG. 6 (f), by sending the seismic isolation unit 2 into the gap 22, the integrated split type seismic isolation device is placed at a predetermined position below the equipment M. It arranges in.

  Finally, after fixing the lower board 3 at a predetermined position on the floor F, the equipment M is lowered onto the upper board 5 by the claw jack 21 and attached to the upper board 5, and the upper board 5 is moved. By releasing the lock between the board 4 and the lower board 3 so as to be relatively movable, the seismic isolation of the equipment M is completed. In addition, when the split-type seismic isolation devices are arranged adjacent to each other as in this embodiment, as shown in FIG. 1 and FIG. It is preferable to connect by the connecting plate 30.

  As described above, according to the separable seismic isolation device having the above-described configuration and the seismic isolation method for existing equipment using the seismic isolation device, the movement of the pair of seismic isolation units 1 and 2 is detachably connected. Since the board connecting member 14 and the upper board connecting member 15 are disposed between the opposing sides 1a and 2a, the length of the movable board connecting member 14 and the upper board connecting member 15 can be shortened. . In addition, by connecting only the opposite side 1a of the seismic isolation unit 1 to the work space S side from the lower surface of the existing equipment M, it is possible to perform the connecting work of the moving board connecting member 14 and the upper board connecting member 15. . For this reason, even in a facility where the width of the work space S is narrow, it is possible to perform seismic isolation simply by jacking up the equipment M without moving the existing equipment M.

  Moreover, since the opposing sides 1a and 2a of the seismic isolation units 1 and 2 are connected and integrated by the moving board connecting member 14 and the upper board connecting member 15, the moving board connecting member 14 and the upper board connecting member are integrated. 15 can be designed in a suitable shape. In this embodiment, the upper board connecting member 15 is formed in a bottomed rectangular tube shape having a flat plate portion 15a and a side wall 15b, and the upper board is connected. The member 15 is connected to the vertical reinforcing plate 5b and the top plate 5a of the upper panel 5 via bolts 17 and 18 from the two directions of the side wall 15b and the flange plate 15c, respectively.

  For this reason, while the intensity | strength as a whole split-type seismic isolation apparatus can be raised, since there is nothing protruding from the side surface of the seismic isolation units 1 and 2, many apparatuses M like a semiconductor manufacturing facility are substantially continuous. Even if installed separately, the split type seismic isolation devices added below the adjacent devices M do not interfere with each other and can be installed densely.

  In addition, when an earthquake occurs after the seismic isolation is completed, the moving board 4 and the moving board connecting member 14, the upper board 5 and the upper board connecting member 15 of the both seismic isolation units 1 and 2 are respectively The upper board connecting member 15 and the moving board connecting member 14 are arranged so that the lower surface of the upper board connecting member 15 is located above the upper surface of the moving board connecting member 14 although they move relative to each other in the Y direction. Therefore, they can be prevented from interfering with each other.

  In addition, a horizontal damper 6 that absorbs relative displacement in the X direction is provided between the lower board 3 and the moving board 4 in parallel with the first rail 8, and the Y direction is provided between the moving board 4 and the upper board 5. Since the horizontal damper 7 that absorbs the relative displacement is provided in parallel with the second rail 11, the relative displacement amount of the upper panel 5 with respect to the lower panel 3 can be efficiently suppressed. As a result, even when equipment that is not seismically isolated or on-floor fixed objects such as floor through pipes are arranged adjacent to the equipment M, the relative displacement of the equipment M causes these fixed objects on the floor. Interference can be prevented from occurring.

  It can be used suitably when making existing equipment seismic isolation.

1, 2 Seismic isolation unit 1a, 2a Opposite side 3 Lower panel 4 Moving panel 4a, 4b Strip opening 5 Upper panel 5a Top plate 5b Bottom plate 5c Vertical reinforcement plate 5d Connection reinforcement plate 6 X direction horizontal damper 7 Y direction horizontal Damper 8 First rail 9 First roller 10 Second roller 11 Second rail 14 Moving plate connecting member 15 Upper plate connecting member 15a Flat plate portion 15b Side wall 15c Hook portion 16, 17, 18 Bolt 20 For jack-up Jig 21 Claw jack 22 Gap 30 Connecting plate F Floor M Existing equipment S Work space

Claims (5)

A split-type seismic isolation device comprising a pair of seismic isolation units each having a rectangular shape as a whole, and a connecting part for detachably connecting these seismic isolation units,
The seismic isolation unit has a lower board, a moving board arranged on the lower board, and an upper board arranged on the moving board. One of the lower board and the moving board has a horizontal X A first rail extending in the direction is provided, a first roller rolling on the first rail is provided on the other side, and one of the moving board and the upper board extends in the horizontal Y direction. A second rail is provided, and the other is provided with a second roller that rolls on the second rail,
The connecting part is disposed between opposing sides of the pair of moving boards, and both ends are detachably connected to the opposing sides of the moving boards, and a pair of the upper boards An upper plate connecting member disposed between the opposite sides and having both ends removably connected to the opposite sides of each upper plate, and the lower surface of the upper plate connecting member has the lower surface thereof A split-type seismic isolation device, wherein the seismic isolation device is disposed so as to be positioned above an upper surface of a connecting member.   The first rail is provided on the lower board, the second rail is provided on the upper board, and the first roller and the second roller are provided on the movable board. The split type seismic isolation device according to claim 1.   The upper plate is formed by joining and integrating a square top plate and a bottom plate via at least a vertical reinforcing plate arranged on the opposite side, and the upper plate connecting member is a flat plate between the bottom plates of the upper plate. And a side wall standing on the peripheral edge of the flat plate portion, and is detachably connected between opposing sides of the upper board via bolts. Item 3. The split type seismic isolation device according to item 1 or 2.   A damper that absorbs the relative displacement in the X direction is provided between the lower board and the moving board in parallel with the first rail, and the Y direction is provided between the moving board and the upper board. The split type seismic isolation device according to any one of claims 1 to 3, wherein a damper that absorbs the relative displacement is provided in parallel with the second rail. A seismic isolation method for existing equipment for interposing the split type seismic isolation device according to any one of claims 1 to 4 between a floor surface and existing equipment,
Jack up the existing equipment to a height where the seismic isolation unit can be inserted at the installation position, and then insert one of the seismic isolation units between the floor and the existing equipment, and then Connecting one end of the upper board connecting member to the opposite side of the upper board of the unit, and connecting one end of the moving board connecting member to the opposite side of the moving board, and then the one seismic isolation unit, After the upper panel connecting member and the movable panel connecting member are fed between the floor surface and the existing devices, the other end of the upper panel connecting member is connected to the opposite side of the upper panel of the other seismic isolation unit. And connecting the other end of the moving plate connecting member to the opposite side of the moving plate of the other seismic isolation unit to integrate the split type seismic isolation device, and then the split type seismic isolation device The entire floor and the existing equipment The lower base is fixed to the floor after being fed in between, and the jack-up is released to attach the existing equipment to the upper panel. Seismic isolation method for equipment.

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