JP2011013185A - Analysis processing device of composite material, analysis processing method of composite material, and program for making computer to implement the method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect the information of a phase delay even if a plurality of kinds of polymers are in rubber states, when analyzing a composite material including the plurality of kinds of polymers by using an atomic force microscope.SOLUTION: When analyzing the composite material by using the atomic force microscope, data of the phase delay of the composite material acquired by using a noncontact mode of the atomic force microscope are acquired under the condition of at least two set temperatures. Then, a phase image is generated based on data of the phase delay at each set temperature. Data of the phase delay of a second phase image generated under a condition of a second set temperature are acquired relative to a measuring position selected based on a first phase image generated under a condition of a first set temperature. The composite material is analyzed by using the acquired data of the phase delay. In this case, the first set temperature is positioned between some two glass transition temperatures among a plurality of glass transition temperatures carried by the plurality of kinds of polymers, and the second set temperature is higher than the two glass transition temperatures.

Description

  The present invention relates to a composite material analysis processing apparatus, an analysis processing method, and a program for causing a computer to execute a composite material that analyzes a composite material containing at least two types of polymers using an atomic force microscope.

  The atomic force microscope is a device that measures the uneven shape of the sample surface. While the cantilever is vibrated up and down by the piezoelectric element, the sample surface is brought close to several nanometers, and an atomic force is applied between the cantilever and the sample surface. Then, the distance between the cantilever and the sample is controlled so that the amplitude of vibration becomes constant. Thereby, the uneven | corrugated shape of the sample surface can be known. In the following Patent Document 1, a method for estimating a surface functional group by observation in liquid using an atomic force microscope is described.

  On the other hand, when an atomic force is applied between the cantilever and the sample surface in a non-contact mode, the vibration phase of the cantilever changes and phase data is obtained. Observation of a phase separation structure of a polymer blend using a phase image created from this phase data (Non-Patent Document 1). In this non-contact mode, it is said that the morphology of the polymer blend sample can be observed.

  However, in this non-contact mode, there is a problem that even if a composite material containing a plurality of types of polymers including natural rubber and butadiene rubber is measured, phase delay information of the plurality of types of polymers cannot be identified. It was.

  In addition, the phase data is likely to shift due to subtle changes in the measurement conditions such as the shape of the sample surface and temperature, so that the absolute value of the phase data cannot be taken in as information and used for analysis.

  On the other hand, a contact mode in which a cantilever is brought into contact with a sample and the frictional force and adhesive force on the sample surface are measured, and a force mode in which the bending of the cantilever is monitored and the force applied to the cantilever is measured are also used. The glass transition behavior is observed from the temperature change of these measured values. However, in the contact mode or the force mode, the surface of the measurement target needs to be smooth, and the sample surface is damaged by contact with the cantilever, so that measurement is extremely difficult.

Japanese Patent Laid-Open No. 10-206438

http://www.siint.com/products/spm/tec_gallery/data18.html (Search April 29, 2009)

  Under such circumstances, when analyzing a composite material containing at least two types of polymers using an atomic force microscope, the present invention provides an analysis processing apparatus and analysis capable of reliably detecting phase delay information of these polymers. It is an object of the present invention to provide a processing method and a program using the method.

The above object can be achieved by a composite material analysis processing apparatus described below that analyzes a composite material containing at least two types of polymers using an atomic force microscope. That is, the analysis processing device
(A) a data acquisition unit that acquires phase lag data of a composite material measured using a non-contact mode of an atomic force microscope under conditions of at least two set temperatures;
(B) A phase image is created based on phase delay data at each of the set temperatures, and a measurement position selected based on the first phase image created under the first set temperature condition among the set temperatures. A data processing unit for acquiring phase lag data of the second phase image created under the condition of the second set temperature;
(C) An analysis unit that analyzes the composite material using the acquired phase delay data.
(D) At that time, the first set temperature is located between two glass transition temperatures of the two kinds of polymers, and the second set temperature is higher than the two glass transition temperatures.

Further, the above object can be achieved by the following composite material analysis processing method for analyzing a composite material containing at least two types of polymers using an atomic force microscope. That is, the analysis processing method is
(E) a step of measuring data using a non-contact mode of an atomic force microscope under conditions of at least two set temperatures and acquiring phase lag data of the composite material;
(F) A phase image is created based on phase lag data at each of the set temperatures, and a measurement position selected based on a first phase image created under the first set temperature condition among the set temperatures. A step of acquiring phase lag data of the second phase image created under the condition of the second set temperature;
(G) analyzing the composite material using the acquired phase delay data.
(H) At that time, the first set temperature is located between two glass transition temperatures of the two kinds of polymers, and the second set temperature is higher than the two glass transition temperatures.

  The above object can also be achieved by a program that causes a computer to execute the analysis processing method.

  In the above-described composite material analysis processing apparatus, analysis processing method, and program, the first set temperature is located between two glass transition temperatures of at least two types of polymers. Therefore, in the first phase image created at the first set temperature, the phase delay of the two types of polymers can be distinguished. Furthermore, since the second set temperature is set to be higher than the two glass transition temperatures, the position where the polymer can be distinguished by the first set temperature is selected as the measurement position, whereby the two glass transition temperatures are set. Even at the second set temperature exceeding the temperature, information on the phase delay of the two types of polymers can be obtained with certainty.

It is a schematic block diagram of the atomic force microscope analysis system using the composite material analysis processing apparatus of this embodiment. It is a flowchart which shows the flow of the analysis processing method of the composite material implemented using the system shown in FIG. It is a flowchart which shows the flow of the alignment in the flowchart shown in FIG. (A) And (b) is a figure which shows the example of the phase image obtained by the analysis processing method shown in FIG. (A) And (b) is a figure which shows the example of the analysis processing result obtained with the analysis processing method shown in FIG.

Hereinafter, based on embodiments shown in the accompanying drawings, a composite material analysis processing apparatus, an analysis processing method, and a program for causing a computer to execute the method will be described.
(Outline of analysis processing equipment)
FIG. 1 is a schematic configuration diagram of an atomic force microscope analysis system 10 using the composite material analysis processing apparatus of the present invention. An atomic force microscope analysis system (hereinafter referred to as a system) 10 includes an atomic force microscope 12 and an analysis processing device 14.

  An atomic force microscope (hereinafter referred to as a microscope) 12 is a device that measures a sample S in a non-contact (tapping) mode and outputs data including phase delay information.

The system 10 includes a composite material in which at least two types of polymers are blended, and a first set temperature that is positioned between two glass transition temperatures of the two types of polymers and two glasses of the two types of polymers. The phase lag is measured in tapping mode at a second set temperature that is higher than the transition temperature. Further, the system 10 selects the measurement position based on the selection instruction by the user using at least the first phase image generated at the first set temperature, based on the selection instruction by the user. Using this measurement position, phase lag data is acquired from the second phase image created at the second set temperature. In the following description, a case where a composite material in which a filler is included in two types of polymers is used as the sample S will be described.
(Configuration of analysis processing device)
The microscope 12 uses a vibrator 18 with a cantilever 16 whose tip is brought close to a distance of several nm with respect to a sample S of a polymer blend containing a spherical filler such as carbon black in two types of polymers. It is operated in a vertical direction in the figure at a predetermined frequency, for example, 300 kHz. On the other hand, the oscillated cantilever 16 is irradiated with laser light L from the laser light source 20 through the mirror 26a. At that time, the reflected light L ′ reflected by the cantilever 16 is received by the photodiode 22 via the mirror 26b, and vibration data is measured. At the time of measurement, the base 24 is slightly displaced in the vertical direction so that the amplitude of the cantilever 16 is constant. The vibration data has different vibration phases depending on whether the measurement position of the sample S corresponding to the tip of the cantilever 16 is hard or soft. Normally, when the measurement site is hard, the phase delay with respect to the vibration of the vibrator 18 is small, but when the measurement position is soft, the phase delay with respect to the vibration of the vibrator 18 is large.

  The microscope 12 is provided with a heater and a temperature control device (not shown) so that the phase delay of the sample S can be obtained under the conditions of at least two set temperatures.

  Data including information on the phase delay measured by the photodiode 22 is transferred to the analysis processing device 14. The analysis processing device 14 is configured by a computer including a CPU 30 and a memory 32. The analysis processing device 14 functionally forms a data acquisition unit 34, a data processing unit 36, and an analysis unit 38 by executing a program stored in the memory 32. The analysis processing device 14 is connected to a display 40 that displays data such as data processing results and images and further sets measurement conditions for controlling the measurement of the microscope 12 and conditions for performing data processing and analysis. It is connected to an input operation system 42 including a mouse and a keyboard for assisting operator input. The display 40 and the input operation system 42 are connected to the analysis processing device 14 via the input / output port 44.

The data acquisition unit 34 is a part that acquires data including phase delay information output from the microscope 12 and transferred. Specifically, the data acquisition unit 34 extracts phase lag data with respect to the vibration of the vibrator 18 using the vibration signal of the vibrator 18 and measurement data including information on the phase lag of the cantilever 16. The microscope 12 performs measurement at a preset temperature. Each time measurement is performed at each set temperature, data including phase delay information is transferred to and acquired by the analysis processing device 14. Therefore, phase delay data is obtained for each set temperature and stored in the memory 32. Here, the at least two set temperatures include a first set temperature T ₁ and a second set temperature T ₂ . The first set temperature T ₁ is set to be lower than the glass transition temperature T _g1 of any _one of the two types of polymers and higher than the glass transition temperature T _{g2 of} the other polymer. The second set temperature T ₂ is set higher than these glass transition temperatures T _g1 and T _g2 . That is, the first set temperature T ₁ is located between the two glass transition temperatures of the two types of polymers, and the second set temperature T ₂ is higher than the two glass transition temperatures.

The data processing unit 36 creates a first phase image and a second phase image based on the phase lag data at each of the first set temperature T ₁ and the second set temperature T _2. And the second phase image are aligned. Further, the data processing unit 36 displays the aligned first phase image and second phase image on the display 40 and waits for a measurement position selection instruction from the user. The reason for performing the alignment between the first phase image and the second phase image is that even if the same sample S is measured, the measurement is not performed at the same time, so the position of the sample S moves slightly. .

Furthermore, the data processing unit 36 acquires information on the phase delay of the second phase image created under the condition of the _second set temperature T ₂ at the measurement position selected based on the first phase image.

  Here, the first phase image and the second phase image include the phase data of the spherical filler in addition to the phase data of the polymer. The filler is a hard material having the smallest phase lag in the sample S, and the change in the phase lag is small at the first set temperature and the second set temperature. Therefore, the filler is displayed in the first phase image and the second phase image. It is scattered as a particulate region having the highest concentration. The data processing device 36 uses the threshold value set so that the region having the highest particulate display density in the first phase image and the other region are separated, and uses the first phase image and the second phase image. By performing the binarization process on the phase image, a region having a granular display density is extracted.

In the first phase image and the second phase image that have been subjected to the binarization process described above, dispersed spherical filler regions are shown. Therefore, in the alignment processing of the data processing unit 36, the correlation coefficient between the binarized first phase image and second phase image (correlation coefficient between the image data of the two images). Of the second phase image with respect to the first phase image (the amount of positional deviation in the vertical and horizontal directions of the phase image) is obtained. The data processing unit 36 corrects the position of the second phase image using the obtained positional deviation amount.
The data processing unit 36 displays the first phase image and the corrected second phase image on the display 40. Therefore, as described later, the measurement position of the second phase image can be determined using the position coordinates of the measurement position selected and instructed by the user with reference to the first phase image.

  The user instructs the selection of the measurement position as the region of the polymer and filler while viewing the displayed first phase image and secondly the phase image as necessary. The data processing unit 36 acquires information on the phase delay at the measurement position selected using the first phase image as described above. The measurement position selection instruction by the user is performed by moving the cursor on the image displayed on the display 40 and clicking the input operation system 42 such as a mouse.

At this time, as described above, the first set temperature T ₁ is set to be lower than the glass transition temperature T _{g1 of} one polymer and higher than the glass transition temperature T _{g2 of} the other polymer. Yes. For this reason, in the first phase image created under the condition of the first set temperature T _1, a region having a high display density indicating that one polymer is in a glass state and the phase lag is small, and the other polymer has A region with a low display density indicating that it is in a rubber state and has a large phase lag appears in an identifiable manner. Therefore, the user can identify one polymer region and the other polymer region in the first phase image by using the input operation system 42 in the one polymer region and the other polymer region. A measurement position selection instruction can be given. Further, in the first phase image, dispersed spherical fillers are scattered so as to be identifiable as a region having the highest display density, and thus the user designates this region as a measurement position using the input operation system 42. can do.

  The data processing unit 36 acquires information on the phase delay at the measurement position selected from the first phase image as described above. Further, the data processing unit 36 acquires information on the phase delay at the selected measurement position from the second phase image. The acquired phase delay information is stored in the memory 32.

  On the two-dimensional scatter diagram in which the analysis unit 38 represents the phase lag information acquired from the first phase image and the phase lag information acquired from the second phase image on the vertical axis and the horizontal axis, respectively. The phase delay information read from the memory 32 is plotted, and the plot result is displayed on the display 40.

Furthermore, the analysis unit 38 corrects the information on the phase delay of the polymer with reference to the phase delay at the position where the change in the phase delay is the smallest at the first set temperature T ₁ and the second set temperature T ₂ . In the present embodiment, the measurement position where the change in phase lag is smallest is the filler contained in the sample S. Therefore, the analysis unit 38 corrects the information on the phase delay of the polymer with reference to the phase delay of the filler. On the two-dimensional scatter diagram in which the analysis unit 38 represents the phase lag information acquired from the first phase image and the phase lag information acquired from the second phase image on the vertical axis and the horizontal axis, respectively. The corrected phase delay information is plotted, and the plot result is displayed on the display 40.

Such an analysis processing device 14 is realized by causing a computer to execute the following program. That is, the program
(A) Under the condition of a set temperature including a first set temperature located between the glass transition temperatures of two kinds of polymers and a second set temperature higher than the glass transition temperature, the atomic force microscope A procedure for acquiring phase lag data of a composite material obtained using the non-contact mode;
(B) A phase image is created based on phase delay data at each set temperature, and the measurement position selected based on the first phase image created under the first set temperature condition among the set temperatures, A procedure for acquiring phase lag data of the second phase image created under the condition of the second set temperature;
(C) using the acquired phase delay data, and a procedure for analyzing the composite material.
(Analysis processing method)
Next, the analysis processing method performed by the analysis processing device 14 will be described more specifically.

  FIG. 2 is a diagram illustrating a flow of an analysis processing method performed in the analysis processing apparatus 14.

First, the data acquisition unit 34 acquires phase delay data at the first set temperature T ₁ of the sample S obtained using the non-contact mode of the microscope 12 (step S10). The phase delay data is data on the phase delay of the vibration of the cantilever 16 with respect to the vibration of the vibrator 18. Then, the temperature conditions of the microscope 12 is pulled up to the second predetermined temperature T _2, and acquires the data of the phase lag at the second set temperature T ₂ (step S12). The acquired data is stored in the memory 32.

Next, a phase image (first phase image) G ₁ created from phase lag data at the first set temperature T _{1 and} a phase image (second phase created from phase lag data at the second set temperature T ₂ ). Of the phase image) G ₂ is performed by the data processing unit 36 (step S14).

  FIG. 3 is a flowchart illustrating an exemplary flow of the alignment process.

Specifically, the phase image G ₁ and the phase image G ₂ are dotted with spherical filler regions. Therefore, the data processing unit 36 performs a binarization process on the phase image G ₁ by setting a display density threshold so that the filler area and the other areas are distinguished. Thereby, the area | region of a filler is distinguished from other area | regions other than that (step S14a). Next, using the same threshold, the same binarization process is performed on the phase image G ₂ (step S14b). As the correlation coefficient between the image in the binarized phase image G ₁ and the phase image G ₂ (correlation coefficient between the image data of the two images) is maximized, the phase image G ₁ positional shift amount of the phase image G ₂ is (vertical direction and the positional deviation amount in the lateral direction of the phase image) is determined, alignment is performed by using the position displacement amount (step S14c). The phase image G ₁ and the phase image G _{2 that} has been aligned are displayed on the display 40.

Next, the measurement position is selected using the phase image G ₁ displayed on the display 40. The selected measurement position is a position instructed to be selected when the user moves the cursor on the screen of the phase image to a desired position by using the input operation system 42 such as a mouse and clicks it. The phase image G ₁ is used to select and instruct the measurement position. In the phase image G ₁ , the hardest filler region is indicated by the darkest display density, and the rubbery polymer region is the thinnest as the softest region. It is indicated by the display density, and the region of the polymer in the glass state is indicated by the intermediate display concentration as a region having an intermediate hardness, and the user can identify each polymer region and the filler region on the display 40. Because it can. Of course, the user can also instruct the selection of the measurement position using the phase image G ₂ in addition to the phase image G ₁ .

4 (a) and 4 (b), as sample S, carbon black (50 phr) was dispersed in a polymer blend of NR (natural rubber) and BR (butadiene rubber) (weight ratio: NR: BR = 60: 40). the composite material shows a phase image G ₁ and the phase image G ₂ obtained when measured by a microscope 12. 4A shows an example of the phase image G ₁ , and FIG. 4B shows an example of the phase image G ₂ .

The phase image G ₁ is an image under a temperature condition of −20 ° C., and the phase image G ₂ is an image under a temperature condition of 20 ° C. The measurement frequency is about 300 KHz. The glass transition temperature depends on the measurement speed, particularly the measurement frequency. In the non-contact mode of the microscope 12, the glass transition temperature when the measurement frequency of the cantilever is about 300 KHz is 0 ° C., but the glass transition temperature (about 300 KHz) obtained by the microscope 12 as this atomic force microscope is It is higher than the glass transition temperature (−63 ° C.) measured by ordinary dynamic viscoelasticity measurement (10 Hz). This frequency dependence is an unpublished patent document and is described in the specification of Japanese Patent Application No. 2008-192493 filed by the same applicant.

Accordingly, the NR is in a glass state at −20 ° C. of the phase image G ₁ . On the other hand, the glass transition temperature (about 300 KHz) of BR is −42 ° C. in the microscope 12. Therefore, −20 ° C. is higher than the glass transition temperature of BR (about 300 KHz), and at −20 ° C., BR is in a rubber state. Accordingly, −20 ° C. corresponds to the first set temperature T ₁ described above. On the other hand, since 20 ° C. is higher than the glass transition temperature of both NR and BR (about 300 KHz), both NR and BR are in a rubber state. Accordingly, 20 ° C. corresponds to the second set temperature T ₂ .

  Note that the glass transition temperature measured by the microscope 12 is NR and BR measured at every 5 ° C. from −70 ° C. to 30 ° C., and the midpoint of the range where the phase changes rapidly (the phase changes rapidly). The average value of the start temperature and the end temperature of the temperature range to be performed). The glass transition temperature in the dynamic viscoelasticity measurement was the peak maximum temperature of the loss elastic modulus E ″ obtained at a temperature increase rate of 5 ° C./min.

As shown in FIG. 4A, the phase image G ₁ shows a region with a low display density by BR, a region with a relatively high display density by NR, and a region with the highest display density by carbon black. Yes. Thus, the user can identify the NR region, the BR region, and the carbon black region. On the other hand, under the condition of 20 ° C. shown in FIG. 4B, both NR and BR are regions with low display density and cannot be identified. On the other hand, the carbon black region dispersed in the image is shown to be identifiable as the darkest region. Accordingly, when it is difficult to identify the carbon black region in the phase image G ₁ , the carbon black region can be identified using the phase image G ₂ shown in FIG. 4B in addition to the phase image G ₁ . .

The user selects and instructs the measurement position using the input operation system 42 such as a mouse while viewing the phase image G ₁ displayed on the display 40 and, if necessary, the phase image G ₁ and the phase image G _2. Can do. Measurement positions corresponding to at least NR and BR are selected using the phase image G ₁ .

Next, the data processing unit 36 extracts information on the phase delay of the rubber A (for example, BR), the rubber B (for example, NR), and the filler F (for example, carbon black) at the selected measurement position from the phase image G ₁ ( Step S16). Furthermore, the data processing unit 36, the information of the phase delay of the rubber A and the rubber B and the filler F in the selected measurement position, taken from the phase image G ₂ (step S18). Since the phase image G ₁ and the phase image G ₂ are aligned in step S14, the rubber A and the rubber B at the second set temperature T ₂ are read by reading the phase delay data at the position coordinates of the measurement position. Further, information on the phase delay of the filler F can be acquired. The acquired phase delay information is stored in the memory 32.

In the present embodiment, the phase image G ₁ and the phase image G ₂ are displayed on the screen, and the measurement position is selected by the user's selection instruction. However, the measurement position displays only the phase image G ₁ on the screen, and the user It may be selected by the selection instruction.

  Next, the analysis unit 38 reads phase delay information from the memory 32 and corrects the phase delay of the rubber A and the rubber B with reference to the phase delay of the filler F (step S20). Specifically, when there are a plurality of filler measurement positions and a plurality of filler phase lags are taken out, the average value of the phase lag of the filler F is used as a reference value, and from the phase lag values of the rubber A and the rubber B, Correct by subtracting the reference value. Information on the phase delay of the corrected rubber A and rubber B is displayed on the display 40.

FIG. 5A is a diagram showing a result when the phase delay is measured using the sample S including the above-described NR, BR, and carbon black CB. Carbon black CB is a filler. The phase lag read from the memory 32 on the two-dimensional scatter diagram in which the information on the phase lag acquired from the phase image G ₁ and the information on the phase lag acquired from the phase image G ₂ are represented on the vertical axis and the horizontal axis, respectively. The result of plotting the information is shown. As can be seen from FIG. 5A, NR, BR, and CB are clearly separated and plotted.

  FIG. 5B shows the result of correcting the phase delay of NR and the phase delay of BR on the basis of the phase delay of carbon black CB. The average value of the phase delay of the carbon black CB is obtained, and the phase delay is corrected by subtracting the average value from the values of the phase delays of NR and BR.

As described above, in the present embodiment, the polymers are in a state where they can be distinguished from each other at the _first set temperature T ₁ (rubber state and glass state). The region can be specified and the measurement position can be selected. For this reason, it is possible to reliably acquire information on the phase delay of a plurality of polymers that could not be identified only by the second set temperature T ₂ at room temperature or the like.

  In the above embodiment, the measurement position of each polymer region is determined for the sample S including two types of polymers, but the present invention can also be applied to a composite material including three or more types of polymers. In the case of a composite material containing three types of polymers, when the glass transition temperature of each polymer is the first glass transition temperature, the second glass transition temperature, and the third glass transition temperature in order of increasing temperature, A first set temperature is defined between the glass transition temperature and the second glass transition temperature, a third set temperature is defined between the second glass transition temperature and the third glass transition temperature, and the second Is set higher than the third glass transition temperature. By measuring the first set temperature and the third set temperature, it is possible to identify three polymer regions and select measurement positions. Thereby, the phase delay of the three types of polymers that are in the rubber state at the second set temperature can be acquired based on the measurement position.

  The composite material analysis processing apparatus, analysis processing method, and program of the present invention have been described above. However, the present invention is not limited to the above-described embodiment, and various improvements and modifications can be made without departing from the spirit of the present invention. Of course.

10 Atomic Force Microscope Analysis System 12 Atomic Force Microscope 14 Analysis Processing Device 16 Cantilever 18 Vibrator 20 Laser Light Source 22 Photodiode 24 Base 26a, 26b Mirror 30 CPU
32 Memory 34 Data Acquisition Unit 36 Data Processing Unit 38 Analysis Unit 40 Display 42 Input Operation System 44 Input / Output Port

Claims (10)

A composite material analysis processing apparatus for analyzing a composite material containing at least two types of polymers using an atomic force microscope,
A data acquisition unit that acquires phase lag data of a composite material measured using a non-contact mode of an atomic force microscope under conditions of at least two set temperatures;
A phase image is created based on phase lag data at each of the set temperatures, and at the measurement position selected based on the first phase image created under the first set temperature condition among the set temperatures, A data processing unit for acquiring phase delay data of the second phase image created under the condition of the set temperature of 2;
Using the obtained phase delay data, and an analysis unit for analyzing the composite material,
The first set temperature is located between two glass transition temperatures of the two kinds of polymers, and the second set temperature is higher than the two glass transition temperatures. Analysis processing device.   2. The composite material analysis according to claim 1, wherein the data processing unit acquires phase lag data at the measurement position from the first phase image in addition to phase lag data of the second phase image. Processing equipment. The measurement position includes the position of the region of the two types of polymer, and the position where the change in phase lag is smallest at the first set temperature and the second set temperature,
3. The composite material analysis processing apparatus according to claim 1, wherein the analysis unit corrects the phase lag data of the plurality of types of polymers with reference to a phase lag at a position where the change in the phase lag is smallest. The composite material includes a particulate filler,
The measurement position includes the position of the polymer region and the position of the filler region,
The composite analysis apparatus according to claim 1, wherein the analysis unit corrects the phase delay data of the polymer with reference to the phase delay of the filler. The composite material includes a particulate filler,
The data processing unit uses a plurality of regions of the dispersed filler specified in the first phase image and the second phase image before the measurement position is selected, to the first phase image. The composite processing analysis apparatus according to claim 1, wherein the second phase image is aligned.   The data processing unit performs alignment based on a correlation coefficient of a processed image obtained by binarizing the first phase image and the second phase image so that the filler region is distinguished from other regions. The analysis processing device according to claim 5, wherein:   The composite material analysis processing apparatus according to claim 4, wherein the filler is carbon black.   The composite processing analysis apparatus according to claim 1, wherein the plurality of polymers include natural rubber and butadiene rubber. A composite material analysis processing method for analyzing a composite material containing at least two types of polymers using an atomic force microscope,
Measuring at least two preset temperature conditions using a non-contact mode of an atomic force microscope and obtaining phase lag data of the composite material;
A phase image is created based on phase lag data at each of the set temperatures, and at the measurement position selected based on the first phase image created under the first set temperature condition among the set temperatures, Obtaining phase lag data of the second phase image created under the condition of the set temperature of 2;
Analyzing the composite material using the acquired phase lag data; and
The first set temperature includes a step of analyzing a composite material using the acquired phase delay data,
The first set temperature is located between two glass transition temperatures of the two kinds of polymers, and the second set temperature is higher than the two glass transition temperatures. Analysis processing method. A program for causing a computer to execute a composite material analysis process for analyzing a composite material containing at least two types of polymers using an atomic force microscope,
An atomic force microscope under a condition of a set temperature including a first set temperature located between two glass transition temperatures of the two types of polymers and a second set temperature higher than the two glass transition temperatures. A procedure for acquiring phase lag data of a composite material obtained using the non-contact mode of
A phase image is created based on phase lag data at each of the set temperatures, and at the measurement position selected based on the first phase image created under the condition of the first set temperature among the set temperatures, A procedure for acquiring phase delay data of the second phase image created under the condition of the set temperature of 2;
A program for generating a command for causing a computer to execute a procedure for analyzing a composite material using the acquired phase delay data.