JP2010281754A - Generating apparatus, inspection apparatus, program, and generation method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the following problem that a conventional inspection apparatus has demanded substantial inspection costs since sections with unstable inspection results on picked up images have been masked on the basis of information manually specified by users. <P>SOLUTION: An inspection apparatus includes an imaging apparatus for imaging an object to be inspected and obtaining a picked up image; a generating apparatus for generating mask data including regions to be excluded from inspection in the picked up image obtained by imaging the object to be inspected by the imaging apparatus; and an inspection part for inspecting the object to be inspected on the basis of results of processing of the picked up image and the generating apparatus. The generating apparatus includes both of a storage part for storing a three-dimensional model of the object to be inspected and a generating part for projecting at least either a section excluded from inspection on the three-dimensional model of the object to be inspected or the background of the three-dimensional model of the object to be inspected to the picked up image and generating the mask data. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a generation device, an inspection device, a program, and a generation method.

  There is known an inspection apparatus that inspects the presence or absence of defects on the surface of an inspection object from a captured image obtained by imaging the inspection object (Patent Documents 1 and 2). Such an inspection apparatus inspects the presence or absence of defects on the surface of the inspection object, for example, by comparing the captured image of the inspection object with an ideal image (target image) having no defect.

Japanese Patent Laid-Open No. 11-94763 Patent No. 3960127

  By the way, the inspection result in the vicinity of the edge of the inspection object is easily affected by a positional deviation between the imaging device and the inspection object, a change in irradiation light, and the like, and is not stable. Therefore, the inspection apparatus obtains a stable inspection result by masking a portion (for example, near the edge) where the inspection result of the inspection object is not stable on the captured image.

  However, in the conventional inspection apparatus, a portion where the inspection result on the captured image is not stable is masked based on information manually designated by the user. Therefore, such an inspection apparatus has a high inspection cost.

  In order to solve the above-described problem, in the first aspect of the present invention, a generation device that generates mask data including a region to be excluded from an inspection target in a captured image obtained by capturing an inspection target with an imaging device, A storage unit that stores a three-dimensional model of the inspection object; and at least one of a non-inspection location on the three-dimensional model of the inspection object and a background of the three-dimensional model of the inspection object is projected onto the captured image. And a generation unit that generates the mask data, and an inspection apparatus, a program, and a generation method related thereto.

  Moreover, in the second aspect of the present invention, there is provided a generating device that generates weight data including a weight of inspection of each region in a captured image obtained by capturing an inspection target by an imaging device, wherein the three-dimensional of the inspection target is provided. A generation device comprising: a storage unit that stores a model; and a generation unit that projects weights of an inspection on a three-dimensional model of the inspection object onto the captured image and generates the weight data, and related items An inspection apparatus, a program, and a generation method are provided.

  The above summary of the invention does not enumerate all the necessary features of the present invention, and sub-combinations of these feature groups can also be the invention.

FIG. 1 shows an example of the configuration of an inspection apparatus 10 according to this embodiment. FIG. 2 shows a functional configuration of the control device 20 according to the present embodiment. FIG. 3 shows an example of an inspection process flow by the control device 20 of the inspection apparatus 10 according to the present embodiment. FIG. 4 shows an example of a three-dimensional model of the inspection object 200 according to the present embodiment. FIG. 5 shows an example of a non-inspection location on the three-dimensional model of the inspection object 200 according to the present embodiment. FIG. 6 shows a first example of a non-inspected part specified by the specifying unit 44 according to the present embodiment. FIG. 7 shows a second example of the non-inspected part specified by the specifying unit 44 according to the present embodiment. FIG. 8 shows an example of a captured image captured by the inspection apparatus 10 according to the present embodiment. FIG. 9 shows an example of an inspection processing procedure of the inspection apparatus 10 according to the present embodiment. FIG. 10 shows an example of a hardware configuration of a computer 1900 according to the present embodiment.

  Hereinafter, the present invention will be described through embodiments of the invention. However, the following embodiments do not limit the invention according to the scope of claims, and all combinations of features described in the embodiments are included. It is not necessarily essential for the solution of the invention.

  FIG. 1 shows an example of the configuration of an inspection apparatus 10 according to this embodiment. The inspection apparatus 10 images the inspection object 200 such as a metal part, and inspects the presence or absence of defects on the surface of the inspection object 200 from the obtained captured image at a low cost.

  The inspection device 10 includes an imaging device 12, a holding unit 14, a light emitting unit 16, and a control device 20. The imaging device 12 images the inspection target 200 and obtains a captured image.

  The holding unit 14 fixes and holds the inspection object 200. For example, the holding unit 14 may be a stage on which the inspection object 200 is placed or a handling device that handles the inspection object 200. Furthermore, the holding unit 14 moves the relative position between the inspection object 200 and the imaging device 12.

  The light emitting unit 16 irradiates the inspection object 200 with light. For example, the light emitting unit 16 can change the light emitting direction or the light emitting angle as the illumination condition. Moreover, the light emission part 16 may irradiate the light from which intensity | strength becomes a sinusoidal distribution as illumination conditions, for example. Moreover, the light emission part 16 may irradiate the light which adjusted the light quantity as illumination conditions, for example.

  The control device 20 controls the imaging device 12, the holding unit 14, and the light emitting unit 16, and inspects whether there is a defect on the surface of the inspection target 200 from the captured image of the inspection target 200 captured by the imaging device 12. As an example, the control device 20 images the inspection object 200 from a plurality of directions and inspects the surface of the inspection object 200 for defects. Further, as an example, when the inspection object 200 is larger than the field of view of the imaging device 12, the control device 20 divides the inspection object 200 into a plurality of regions and images each of the divided regions. The presence or absence of defects on the surface of the inspection object 200 is inspected.

  As an example, the control device 20 controls the imaging device 12 and the holding unit 14 to move the relative position between the inspection target 200 and the imaging device 12 to a designated position. More specifically, the control device 20 controls the imaging direction of the imaging device 12 with respect to the inspection target 200 and the imaging distance between the inspection target 200 and the imaging device 12. Thereby, the control device 20 can move the designated range on the surface of the inspection object 200 into the field of view of the captured image captured by the imaging device 12.

  Further, the control device 20 controls the imaging device 12 and the light emitting unit 16 to set an imaging condition by the imaging device 12 to a specified value. More specifically, the control device 20 controls the imaging device 12 to set the imaging magnification, focus, shutter speed, aperture, and the like to designated values. Thereby, the control device 20 can cause the surface of the inspection object 200 to be imaged with the designated imaging magnification and the designated image quality.

  Moreover, the control apparatus 20 controls the light emission part 16 and the imaging device 12, as an example, and sets the direction of the irradiation light to the test target object 200, a light quantity, a hue, etc. to the designated state. Thereby, the control apparatus 20 can image the surface of the inspection object 200 with the designated light quantity and hue.

  FIG. 2 shows a functional configuration of the control device 20 according to the present embodiment. The control device 20 includes a control unit 32, a generation device 34, an inspection unit 36, and a storage unit 38. The control unit 32 controls the imaging device 12, the holding unit 14, and the light emitting unit 16 and acquires a captured image captured by the imaging device 12.

  The generation device 34 generates mask data representing a region (non-inspection region) that should be excluded from the inspection target in the captured image obtained by capturing the inspection object 200 with the imaging device 12. As an example, the generation device 34 generates mask data representing a location (for example, a location with a complicated edge, curved surface, or shape) where it is difficult to detect a defect on the captured image captured by the imaging device 12. Further, as an example, the generation device 34 executes a process of generating mask data every time at least one of the relative position between the inspection target 200 and the imaging device 12 and the imaging condition by the imaging device 12 changes. The generation device 34 is not limited to the mask data representing the non-inspection area, and may be configured to generate mask data including the non-inspection area.

  The inspection unit 36 inspects the presence or absence of a defect in the inspection target 200 based on the captured image and the processing result of the generation device 34. As an example, the inspection unit 36 inspects the presence or absence of a defect on the surface of the inspection object by comparing the captured image of the inspection object with an ideal image (target image) having no defect.

  In addition, the inspection unit 36 does not inspect an area (non-inspection area) that is indicated to be excluded from the inspection target by the mask data generated by the generation device 34 among the respective areas of the captured image. For example, the inspection unit 36 masks an area of the captured image that is indicated to be excluded from the inspection target by the mask data, and performs comparison with the target image.

  The storage unit 38 stores the inspection result of the inspection object 200 by the inspection unit 36. In addition, the storage unit 38 may store both captured images determined to include a defect.

  Next, the functional configuration in the generation device 34 will be further described. The generation device 34 includes a storage unit 42, a specification unit 44, and a generation unit 46.

  The storage unit 42 stores a three-dimensional model of the inspection object 200. The storage unit 42 stores a three-dimensional model of the inspection object 200 in advance prior to inspection.

  The three-dimensional model of the inspection object 200 is data representing the ideal shape of the inspection object 200. As an example, the three-dimensional model of the inspection object 200 is generated based on the design information of the inspection object 200. Further, the three-dimensional model of the inspection object 200 may be manually generated by the user. In addition, the three-dimensional model of the inspection target 200 may be generated based on a result of three-dimensional measurement of the ideal shape inspection target 200 as an example.

  Further, the storage unit 42 stores non-inspection point data representing the position of the non-inspection point on the three-dimensional model of the inspection object 200. The non-inspected part of the inspection object 200 is, for example, a part where it is difficult to detect a defect by image processing from a captured image on the surface of the inspection object 200 (for example, a part having a complicated edge, curved surface, and shape). is there. In addition, the memory | storage part 42 may memorize | store the non-inspection location data containing the position of said non-inspection location.

  As an example, the storage unit 42 receives and stores non-inspection location data generated in advance by the user prior to the inspection of the inspection object 200 from the outside. For example, the storage unit 42 may receive and store the non-inspection location data generated by the specifying unit 44.

  The specifying unit 44 specifies a non-inspection place on the three-dimensional model of the inspection object 200. As an example, the specifying unit 44 specifies a place where it is relatively difficult to detect a defect on the three-dimensional model of the inspection object 200 (for example, a place with a complicated edge, curved surface, and shape) as a non-inspection place. . And the specific | specification part 44 produces | generates the non-inspection location data containing the position on the three-dimensional model of the specified non-inspection location.

  As an example, it is relatively difficult for the specifying unit 44 to detect a defect on the inspection target 200 based on the relative position between the inspection target 200 and the imaging device 12 or the imaging conditions of the imaging device 12. You may specify a location (for example, a shadow part and a white part). A processing example of the specifying unit 44 will be further described later.

  The generation unit 46 projects at least one of a non-inspected portion on the three-dimensional model of the inspection object 200 and a background of the three-dimensional model of the inspection object 200 onto the captured image, and generates mask data.

  For example, the generation unit 46 specifies the field of view of the inspection target 200 corresponding to the captured image with respect to the three-dimensional model based on the relative position between the inspection target 200 and the imaging device 12 and the imaging conditions of the imaging device 12. That is, the generation unit 46 generates a three-dimensional model of the inspection object 200 according to the same or corresponding condition as the relative position between the inspection object 200 and the imaging device 12 and the imaging condition of the imaging device 12 when the captured image is captured. Specify the field of view when virtually capturing images.

  Then, the generation unit 46 calculates the position of at least one of the non-inspected place and the background within the field of view specified in this way, and generates mask data including the calculated position. The mask data generated in this way includes at least one position of a non-inspection location on the inspection target 200 displayed on the captured image and a portion (background) other than the inspection target 200 displayed on the captured image. . As described above, according to the generation device 34, it is possible to generate mask data that indicates an area that is indicated to be excluded from the inspection target in each area of the captured image.

  FIG. 3 shows an example of an inspection process flow by the control device 20 of the inspection apparatus 10 according to the present embodiment. Whenever the relative position between the inspection object 200 and the imaging device 12 or the imaging condition by the imaging device 12 is changed, the control device 20 executes the processing from step S13 to step S18 at each relative position.

  First, the control unit 32 causes the imaging device 12 to image the inspection target 200 (S13). Subsequently, the generation device 34 acquires the relative position between the inspection object 200 and the imaging device 12 and the imaging conditions by the imaging device 12 from the control unit 32 (S14).

  Subsequently, the generation device 34 specifies the field of view of the inspection target 200 corresponding to the captured image with respect to the three-dimensional model based on the relative position between the inspection target 200 and the imaging device 12 and the imaging conditions of the imaging device 12 ( S15).

  For example, the generation device 34 corresponds to the inspection target 200 displayed in the captured image from the imaging direction of the imaging device 12 with respect to the inspection target 200, the distance from the inspection target 200 to the imaging device 12, and the imaging magnification. Identify the extent of the dimensional model. Accordingly, the generation unit 46 uses the same or corresponding conditions as the relative position between the inspection object 200 and the imaging device 12 and the imaging condition of the imaging device 12 at the time of capturing the captured image, and the three-dimensional model of the inspection object 200. The field of view when the image is virtually imaged can be specified.

  Subsequently, the generation device 34 generates mask data including a non-inspection location and a background position within the visual field specified in step S15 (S16). For example, the generation device 34 corresponds to the position on the captured image corresponding to the non-inspection location within the range of the three-dimensional model specified in step S15 and the background outside the range of the three-dimensional model specified in step S15. The position on the captured image is calculated. And the production | generation apparatus 34 produces | generates the mask data containing the calculated position.

  Subsequently, the inspection unit 36 inspects the presence or absence of a defect on the surface of the inspection object 200 included in the captured image by masking an area of the captured image that is indicated as not being inspected by the mask data ( S17). As an example, the inspection unit 36 inspects the presence or absence of a defect in the inspection target object 200 by comparing the captured image and the target image except for the masked area.

  In addition, as an example, the inspection unit 36 inspects the presence or absence of a defect in the inspection object 200 based on the difference or ratio between the color or brightness for each region in the captured image and the color or brightness for each region of the target image. May be. Further, as an example, the inspection unit 36 may inspect the presence / absence of a defect in the inspection object 200 from the captured image using the defect detection method described in Patent Document 1. Further, as an example, the inspection unit 36 inspects the presence or absence of a defect in the inspection target 200 based on the position, shape, size, color, brightness, and the like of the unevenness of the surface of the inspection target 200 detected from the captured image. May be.

  Subsequently, the inspection unit 36 records the inspection result in the storage unit 38 (S18). Further, the inspection unit 36 may record the captured image determined to include a defect in the storage unit 38. In addition, the inspection unit 36 may record both the relative position between the inspection object 200 and the imaging device 12 and the imaging conditions by the imaging device 12 in the storage unit 38 when the captured image determined to include a defect is captured. Good.

  And the control apparatus 20 will complete | finish a process through the said flow, if the process of step S13 to step S18 is complete | finished about all the conditions (S19).

  As described above, according to the inspection apparatus 10 according to the present embodiment, the generation apparatus 34 automatically generates mask data including a region to be excluded from the inspection target on the captured image based on the three-dimensional model of the inspection target 200. . Thereby, according to the inspection apparatus 10, when the inspection target 200 has a complicated shape or the inspection target 200 is larger than the camera field of view, complicated or large amount of mask data must be generated. Even so, the inspection cost can be reduced. Moreover, according to the inspection apparatus 10, the throughput for inspection can be improved.

  FIG. 4 shows an example of a three-dimensional model of the inspection object 200 according to the present embodiment. The three-dimensional model of the inspection target 200 is data representing the external shape of the inspection target 200, and may be, for example, design data (for example, CAD data) of the three-dimensional shape of the inspection target 200. For example, as shown in FIG. 4, the three-dimensional model of the inspection target 200 may be shape data 300 that represents the surface position of the inspection target 200 with three-dimensional coordinates.

  FIG. 5 shows an example of a non-inspection location on the three-dimensional model of the inspection object 200 according to the present embodiment. The non-inspection location data is data representing an area on the surface of the inspection object 200 that is not to be inspected on the three-dimensional model of the inspection object 200, and design data (for example, CAD) of the inspection object 200 Data). The non-inspection location data may be, for example, data 310 representing a region to be excluded from the inspection target of the inspection target 200 by three-dimensional coordinates, as indicated by the hatched portion in FIG.

  FIG. 6 shows a first example of a non-inspected part specified by the specifying unit 44 according to the present embodiment. For example, the specifying unit 44 may specify a location where the surface curvature of the three-dimensional model of the inspection target 200 is equal to or greater than a reference value as a non-inspection location on the three-dimensional model of the inspection target 200.

  When the three-dimensional model of the inspection object 200 is given from the outside, the specifying unit 44 has a surface curvature in the three-dimensional model of the inspection object 200 that is greater than or equal to a reference value, for example, as indicated by the hatched portion in FIG. The curved surface 320 is specified by calculation. Thereby, the specifying unit 44 can specify the curved surface 320 in which it is difficult to detect a defect as a non-inspected portion.

  FIG. 7 shows a second example of the non-inspected part specified by the specifying unit 44 according to the present embodiment. As an example, the specifying unit 44 determines the 3 of the inspection object 200 based on a position where the angle formed by the optical axis of the imaging device 12 and the normal of the surface of the inspection object 200 is larger than the reference value under the condition where the captured image is captured. You may specify the non-inspection location on a dimension model.

  For example, the specifying unit 44 acquires a relative position between the inspection target 200 and the imaging device 12 and an imaging condition by the imaging device 12 when the inspection target 200 is inspected. Subsequently, the specifying unit 44 has a visual field when the three-dimensional model of the inspection target 200 is virtually imaged under the same conditions as the acquired relative position and imaging conditions, and the virtual optical axis of the imaging device 12. Is identified.

  Subsequently, the specifying unit 44 includes a virtual optical axis and a surface normal of the surface of the three-dimensional model of the inspection target 200 within a field of view when the three-dimensional model of the inspection target 200 is virtually imaged. Calculate the angle. Then, the specifying unit 44 specifies a part where the calculated angle is larger than the reference value as a non-inspection part on the three-dimensional model of the inspection target 200.

  By such processing, the specifying unit 44 can specify, for example, a surface that is relatively parallel to the virtual optical axis as indicated by the hatched portion in FIG. Thereby, the specifying unit 44 can specify a portion that cannot be clearly imaged by the imaging device 12 as a non-inspected portion.

  Further, as an example, the specifying unit 44 determines a location that is a shadow of the inspection target 200 on the three-dimensional model of the inspection target 200 based on illumination conditions such as the direction of irradiation light or the irradiation angle with respect to the inspection target 200. The inspection location may be specified. For example, the specifying unit 44 acquires a relative position between the inspection target 200 and the imaging device 12 and an imaging condition by the imaging device 12 when the inspection target 200 is inspected. Subsequently, the specifying unit 44 specifies the field of view and the direction of the virtual irradiation light when the three-dimensional model of the inspection target 200 is virtually imaged under the same conditions as the acquired relative position and imaging conditions. To do.

  Subsequently, the specifying unit 44 detects a portion where the virtual irradiation light is not irradiated in the visual field when the three-dimensional model of the inspection target 200 is virtually imaged. And the specific | specification part 44 specifies the location detected in this way as a non-inspection location on the three-dimensional model of the test object 200. Thereby, the specific | specification part 44 can specify the location used as a shadow as a non-inspection location.

  Further, as an example, the specifying unit 44 is based on the direction of the irradiation light with respect to the inspection target 200, and the angle formed by the optical axis of the imaging device 12 and the direction of the reflected light from the inspection target 200 is within a predetermined range. The non-inspected part on the three-dimensional model of the inspection object 200 may be specified. For example, the specifying unit 44 acquires a relative position between the inspection target 200 and the imaging device 12 and an imaging condition by the imaging device 12 when the inspection target 200 is inspected. Subsequently, the specifying unit 44 has a field of view when a three-dimensional model of the inspection target 200 is virtually imaged under the same conditions as the acquired relative position and imaging conditions, a virtual optical axis of the imaging device 12, and The direction of virtual reflected light from the surface of the inspection object 200 is specified.

  Subsequently, the specifying unit 44 includes a virtual optical axis of the imaging device 12 and a virtual view from the surface of the inspection target 200 within the field of view when the three-dimensional model of the inspection target 200 is virtually captured. A location where the angle with the direction of the reflected light is within a predetermined range (for example, a range from 0 degrees to a predetermined angle) is detected. And the specific | specification part 44 specifies the location detected in this way as a non-inspection location on the three-dimensional model of the test object 200. Thereby, the specific | specification part 44 can pinpoint the location where an image becomes white as a non-inspection location.

  FIG. 8 shows an example of a captured image captured by the inspection apparatus 10 according to the present embodiment. When the shape of the inspection object 200 is larger than the field of view of the imaging apparatus 12, the inspection apparatus 10 divides the entire surface of the inspection object 200 into a plurality of areas, acquires a captured image for each of the divided areas, and performs an inspection. Execute.

  Here, a plurality of captured images obtained by imaging a plurality of adjacent regions may include one defect. In such a case, there is a possibility that the defect included in each captured image is recognized as an individual defect and the defect cannot be analyzed with high accuracy.

  Therefore, the control device 20 of the inspection apparatus 10 first includes a defect in each of a plurality of captured images captured under conditions where the relative positions of the inspection target 200 and the imaging device 12 are different from each other after the first inspection. Determine whether or not. And the control apparatus 20 performs a 2nd test | inspection, when a defect is included in each of the some captured image imaged on the conditions from which the relative position of the test target object 200 and the imaging device 12 differs mutually.

  In the second inspection, the control device 20 moves the relative position between the inspection object 200 and the imaging device 12 and images each of the defects included in the plurality of captured images in the field of view. Take an image. Then, the inspection unit 36 of the inspection apparatus 10 further executes a defect detection process on the captured image thus captured. Thereby, according to the inspection apparatus 10, the defect detected using the mask data can be analyzed with high accuracy.

  FIG. 9 shows an example of an inspection processing procedure of the inspection apparatus 10 according to the present embodiment. The inspection apparatus 10 may perform the inspection process by changing the imaging magnification of the imaging apparatus 12 in stages.

  First, the inspection apparatus 10 sets the imaging magnification to a predetermined magnification (first magnification) and executes inspection processing (S31). Specifically, the control device 20 of the inspection apparatus 10 executes the processing from step S12 to step S19 shown in FIG. 3 under the imaging condition in which the imaging magnification is set to the first magnification.

  Subsequently, the inspection apparatus 10 determines whether or not a defect is detected in the inspection process of step S31 (S32). When no defect is detected (No in S32), the inspection apparatus 10 ends the process.

  When a defect is detected in the inspection process of step S31 (Yes in S32), the inspection apparatus 10 sets the imaging magnification to a second magnification larger than the first magnification, and further inspects the position where the defect is detected. The process is executed (S33).

  Specifically, the control device 20 of the inspection apparatus 10 determines the defect on the inspection object 200 from the relative position and the imaging conditions of the inspection object 200 and the imaging apparatus 12 that acquired the captured image captured at the first magnification. Identify the location. Subsequently, the control device 20 moves the relative position between the inspection target 200 and the imaging device 12 so that the defect position is imaged, and sets the imaging magnification to the second magnification. And the control apparatus 20 performs the process of step S13 to step S18 shown by FIG.

  By executing the above processing, the inspection apparatus 10 can detect defects by changing the imaging magnification stepwise. Thereby, according to the inspection apparatus 10, a defect can be efficiently analyzed using mask data.

  Although the inspection apparatus 10 according to the present embodiment has been described above, such an inspection apparatus 10 can be modified. For example, the generation device 34 according to the modification of the present embodiment is configured to generate weight data including the inspection weight of each region in the captured image obtained by capturing the inspection object 200 with the imaging device 12 instead of the mask data. It may be. Here, as an example, the weight data may be two-dimensional data (image data, array data, etc.) having the same or corresponding data configuration as the pixel configuration of the captured image.

  The storage unit 42 according to the modification stores a three-dimensional model of the inspection object 200 and data including inspection weights for each surface on the three-dimensional model of the inspection object 200. For example, the storage unit 42 stores data in which weights are reduced for edges, curved surfaces, and complex shapes on the three-dimensional model of the inspection target 200, and weights are increased for planar regions and the like.

  In addition, the generation unit 46 according to the modification projects weights of inspection on the three-dimensional model of the inspection object 200 onto the captured image to generate weight data. For example, the generation unit 46 specifies the field of view for the three-dimensional model of the inspection target 200 corresponding to the captured image based on the relative position between the inspection target 200 and the imaging device 12 and the imaging conditions of the imaging device 12. Weight data including the weight of each region in the visual field is generated.

  Then, the inspection unit 36 inspects the inspection object 200 by weighting the captured image for each region (for example, for each pixel) with weight data. As an example, the inspection unit 36 increases the accuracy of inspection for a region where the corresponding weight data is large in the captured image, and decreases the inspection accuracy for a region where the corresponding weight data is small.

  Thereby, according to the control apparatus 20 which concerns on a modification, the weight of the test | inspection of the part where it is difficult to detect defects, such as the edge of the test object 200, is made low, and the test | inspection weight of another part is made high. Such weight data can be automatically generated from the three-dimensional model of the inspection object 200. Thereby, according to the control apparatus 20, even if it is a case where the test target object 200 has a complicated shape or the test target object 200 is larger than the camera field of view, the test cost can be reduced.

  FIG. 10 shows an example of a hardware configuration of a computer 1900 according to the present embodiment. A computer 1900 according to this embodiment is connected to a CPU peripheral unit having a CPU 2000, a RAM 2020, a graphic controller 2075, and a display device 2080 that are connected to each other by a host controller 2082, and to the host controller 2082 by an input / output controller 2084. Input / output unit having communication interface 2030, hard disk drive 2040, and CD-ROM drive 2060, and legacy input / output unit having ROM 2010, flexible disk drive 2050, and input / output chip 2070 connected to input / output controller 2084 With.

  The host controller 2082 connects the RAM 2020 to the CPU 2000 and the graphic controller 2075 that access the RAM 2020 at a high transfer rate. The CPU 2000 operates based on programs stored in the ROM 2010 and the RAM 2020 and controls each unit. The graphic controller 2075 acquires image data generated by the CPU 2000 or the like on a frame buffer provided in the RAM 2020 and displays it on the display device 2080. Instead of this, the graphic controller 2075 may include a frame buffer for storing image data generated by the CPU 2000 or the like.

  The input / output controller 2084 connects the host controller 2082 to the communication interface 2030, the hard disk drive 2040, and the CD-ROM drive 2060, which are relatively high-speed input / output devices. The communication interface 2030 communicates with other devices via a network. The hard disk drive 2040 stores programs and data used by the CPU 2000 in the computer 1900. The CD-ROM drive 2060 reads a program or data from the CD-ROM 2095 and provides it to the hard disk drive 2040 via the RAM 2020.

  The input / output controller 2084 is connected to the ROM 2010, the flexible disk drive 2050, and the relatively low-speed input / output device of the input / output chip 2070. The ROM 2010 stores a boot program that the computer 1900 executes at startup and / or a program that depends on the hardware of the computer 1900. The flexible disk drive 2050 reads a program or data from the flexible disk 2090 and provides it to the hard disk drive 2040 via the RAM 2020. The input / output chip 2070 connects the flexible disk drive 2050 to the input / output controller 2084 and inputs / outputs various input / output devices via, for example, a parallel port, a serial port, a keyboard port, a mouse port, and the like. Connect to controller 2084.

  A program provided to the hard disk drive 2040 via the RAM 2020 is stored in a recording medium such as the flexible disk 2090, the CD-ROM 2095, or an IC card and provided by the user. The program is read from the recording medium, installed in the hard disk drive 2040 in the computer 1900 via the RAM 2020, and executed by the CPU 2000.

  A program that is installed in the computer 1900 and causes the computer 1900 to function as the generation device 34 includes a storage module, a specific module, and a generation module. These programs or modules work on the CPU 2000 or the like to cause the computer 1900 to function as the storage unit 42, the specification unit 44, and the generation unit 46, respectively.

  The information processing described in these programs is read into the computer 1900, whereby the storage unit 42, the identification unit 44, and the generation unit 46, which are specific means in which the software and the various hardware resources described above cooperate. Function as. And the specific production | generation apparatus 34 according to the intended purpose is constructed | assembled by implement | achieving the calculation or processing of the information according to the intended purpose of the computer 1900 in this embodiment by these specific means.

  As an example, when communication is performed between the computer 1900 and an external device or the like, the CPU 2000 executes a communication program loaded on the RAM 2020 and executes a communication interface based on the processing content described in the communication program. A communication process is instructed to 2030. Under the control of the CPU 2000, the communication interface 2030 reads transmission data stored in a transmission buffer area or the like provided on a storage device such as the RAM 2020, the hard disk drive 2040, the flexible disk 2090, or the CD-ROM 2095, and sends it to the network. The reception data transmitted or received from the network is written into a reception buffer area or the like provided on the storage device. As described above, the communication interface 2030 may transfer transmission / reception data to / from the storage device by a DMA (direct memory access) method. Instead, the CPU 2000 transfers the storage device or the communication interface 2030 as a transfer source. The transmission / reception data may be transferred by reading the data from the data and writing the data to the communication interface 2030 or the storage device of the transfer destination.

  The CPU 2000 is all or necessary from among files or databases stored in an external storage device such as a hard disk drive 2040, a CD-ROM drive 2060 (CD-ROM 2095), and a flexible disk drive 2050 (flexible disk 2090). This portion is read into the RAM 2020 by DMA transfer or the like, and various processes are performed on the data on the RAM 2020. Then, CPU 2000 writes the processed data back to the external storage device by DMA transfer or the like. In such processing, since the RAM 2020 can be regarded as temporarily holding the contents of the external storage device, in the present embodiment, the RAM 2020 and the external storage device are collectively referred to as a memory, a storage unit, or a storage device. Various types of information such as various programs, data, tables, and databases in the present embodiment are stored on such a storage device and are subjected to information processing. Note that the CPU 2000 can also store a part of the RAM 2020 in the cache memory and perform reading and writing on the cache memory. Even in such a form, the cache memory bears a part of the function of the RAM 2020. Therefore, in the present embodiment, the cache memory is also included in the RAM 2020, the memory, and / or the storage device unless otherwise indicated. To do.

  In addition, the CPU 2000 performs various operations, such as various operations, information processing, condition determination, information search / replacement, etc., described in the present embodiment, specified for the data read from the RAM 2020 by the instruction sequence of the program. Is written back to the RAM 2020. For example, when performing the condition determination, the CPU 2000 determines whether the various variables shown in the present embodiment satisfy the conditions such as large, small, above, below, equal, etc., compared to other variables or constants. When the condition is satisfied (or not satisfied), the program branches to a different instruction sequence or calls a subroutine.

  Further, the CPU 2000 can search for information stored in a file or database in the storage device. For example, in the case where a plurality of entries in which the attribute value of the second attribute is associated with the attribute value of the first attribute are stored in the storage device, the CPU 2000 displays the plurality of entries stored in the storage device. The entry that matches the condition in which the attribute value of the first attribute is specified is retrieved, and the attribute value of the second attribute that is stored in the entry is read, thereby associating with the first attribute that satisfies the predetermined condition The attribute value of the specified second attribute can be obtained.

  The program or module shown above may be stored in an external recording medium. As the recording medium, in addition to the flexible disk 2090 and the CD-ROM 2095, an optical recording medium such as DVD or CD, a magneto-optical recording medium such as MO, a tape medium, a semiconductor memory such as an IC card, and the like can be used. Further, a storage device such as a hard disk or RAM provided in a server system connected to a dedicated communication network or the Internet may be used as a recording medium, and the program may be provided to the computer 1900 via the network.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

  The order of execution of each process such as operations, procedures, steps, and stages in the apparatus, system, program, and method shown in the claims, the description, and the drawings is particularly “before” or “prior to”. It should be noted that the output can be realized in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flow in the claims, the description, and the drawings, even if it is described using “first”, “next”, etc. for convenience, it means that it is essential to carry out in this order. It is not a thing.

DESCRIPTION OF SYMBOLS 10 Inspection apparatus, 12 Imaging apparatus, 14 Holding part, 16 Light emission part, 20 Control apparatus, 32 Control part, 34 Generation apparatus, 36 Inspection part, 38 Storage part, 42 Storage part, 44 Identification part, 46 Generation part, 200 Inspection Object, 300 shape data, 310 data, 320 curved surface, 1900 computer, 2000 CPU, 2010 ROM, 2020 RAM, 2030 communication interface, 2040 hard disk drive, 2050 flexible disk drive, 2060 CD-ROM drive, 2070 input / output chip, 2075 graphic controller, 2080 display device, 2082 host controller, 2084 input / output controller, 2090 flexible disk, 2095 CD-ROM

Claims (15)

A generation device that generates mask data including a region to be excluded from an inspection target in a captured image obtained by capturing an inspection target with an imaging device,
A storage unit for storing a three-dimensional model of the inspection object;
A generation unit configured to project the non-inspected portion on the three-dimensional model of the inspection object and the background of the three-dimensional model of the inspection object onto the captured image to generate the mask data;
A generating device comprising: The generation unit specifies a field of view for the three-dimensional model of the inspection object corresponding to the captured image based on a relative position between the inspection object and the imaging apparatus and an imaging condition by the imaging apparatus, and the field of view The generation device according to claim 1, wherein the mask data representing the position of at least one of the non-inspected portion and the background is generated. The generation device according to claim 1, further comprising: a specifying unit that specifies the non-inspection point on the three-dimensional model of the inspection object and generates non-inspection point data representing a position of the specified non-inspection point. . The generation device according to claim 3, wherein the specifying unit specifies, as the non-inspection portion on the three-dimensional model of the inspection object, a portion having a surface curvature in the three-dimensional model of the inspection object that is greater than or equal to a reference value. The specifying unit is configured on a three-dimensional model of the inspection object based on a location where an angle formed by an optical axis of the imaging apparatus and a normal of the surface of the inspection object is larger than a reference value in an imaging condition of the captured image. The generation device according to claim 3, wherein the non-inspection portion is identified. The generation device according to claim 3, wherein the specifying unit specifies the non-inspection location on a three-dimensional model of the inspection object based on an illumination condition for the inspection object. The generation apparatus according to claim 6, wherein the specifying unit specifies the non-inspected portion on a three-dimensional model of the inspection target object as a shadow of the inspection target object. The specifying unit is configured to determine a position within a predetermined range of an angle formed by an optical axis of the imaging apparatus and a direction of reflected light from the inspection target on the three-dimensional model of the inspection target on the non-inspection The generation device according to claim 6 or 7, wherein a location is specified. A generation device that generates weight data including an inspection weight of each region in a captured image obtained by capturing an inspection target with an imaging device,
A storage unit for storing a three-dimensional model of the inspection object;
A weighting unit configured to project the weight of inspection on the three-dimensional model of the inspection object onto the captured image, and to generate the weight data;
A generating device comprising: An imaging device that images a test object and obtains a captured image;
The generation device according to any one of claims 1 to 9,
An inspection unit that inspects the inspection object based on the captured image and the processing result of the generation device;
An inspection apparatus comprising: The inspection apparatus according to claim 10, wherein the generation apparatus executes processing each time at least one of a relative position between the inspection object and the imaging apparatus and an imaging condition by the imaging apparatus change. When a relative position between the inspection object and the imaging device includes a defect in each of the plurality of captured images captured under different conditions, the relative position between the inspection object and the imaging device is moved, The inspection apparatus according to claim 11, further comprising a control device that includes each defect included in the plurality of captured images in a field of view and causes the imaging device to capture the captured image.   A program that causes a computer to function as the generation device according to claim 1. A generation method for generating mask data including a region to be excluded from an inspection target in a captured image obtained by capturing an inspection target with an imaging device,
Storing a three-dimensional model of the inspection object in a storage unit;
A generation method of generating the mask data by projecting at least one of a non-inspection location on the three-dimensional model of the inspection object and a background of the three-dimensional model of the inspection object onto the captured image. A generation method for generating weight data including an inspection weight of each region in a captured image obtained by imaging an inspection object by an imaging device,
Storing a three-dimensional model of the inspection object in a storage unit;
A generation method of generating weight data by projecting an inspection weight on a three-dimensional model of the inspection object onto the captured image.

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