JP2010276711A - Tilting stage and microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tilting stage that can smoothly adjust a tilting angle during the determination of an observing condition and can hold a tilting angle during the observation, and to provide a microscope having the tilting stage. <P>SOLUTION: The tilting stage 3 includes: a base 21 provided with three magnets 45; and a stage 23 capable of tilting which has on the upper side thereof a stage plate 25 on which a specimen is placed and has on the underside a cup 27 which is slidably held with respect to the base 21, and formed of a magnetic substance. The tilting stage also includes a pulling-force adjusting means for adjusting a pulling force between the base 21 and the stage 23 by altering the position of the magnet 45 in order to adjust and hold the tilting angle of the stage 23. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a tilt stage and a microscope having the tilt stage.

  Conventionally, as a tilting stage for observing a sample with a microscope or the like tilted with respect to the optical axis of an objective lens, there is a configuration in which a stage part on which a sample is placed is tilted while sliding with respect to a base part ( For example, see Patent Document 1).

JP 2007-57519 A

  In the conventional tilt stage, if the frictional force is increased by increasing the roughness of the sliding surface in order to maintain a stable tilt angle, the movement during tilt angle adjustment becomes heavy. On the other hand, if the frictional force is reduced by reducing the roughness of the sliding surface in order to smooth the movement at the time of adjusting the tilt angle, it is difficult to maintain a stable tilt angle.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a tilt stage capable of smooth tilt angle adjustment when determining observation conditions and stable tilt angle maintenance during observation. An object of the present invention is to provide a microscope having an inclined stage.

  In order to solve the above-described problems, an inclined stage according to the present invention has a base portion on which at least one magnet is provided, a placement portion on which a sample is placed on an upper surface, and a lower surface with respect to the base portion. And a tiltable stage part having a sliding part of a magnetic body that is slidably held, and to adjust and hold the tilt angle of the stage part, by changing the position of the magnet, And an attractive force adjusting means for adjusting an attractive force between the stage portion and the stage portion.

  The microscope according to the present invention includes the tilt stage.

  ADVANTAGE OF THE INVENTION According to this invention, the tilt stage which can perform the smooth tilt angle adjustment at the time of determining observation conditions, and the stable tilt angle maintenance at the time of observation, and a microscope which has this can be provided.

It is a figure which shows the microscope provided with the inclination stage which concerns on 1st Embodiment, (a) is a front view, (b) is a side view. It is a front view of the inclination stage which concerns on 1st Embodiment. It is a longitudinal cross-sectional view of the inclination stage which concerns on 1st Embodiment. It is AA sectional drawing of the inclination stage shown by FIG. It is a longitudinal cross-sectional view of the inclination stage which concerns on 2nd Embodiment. It is BB sectional drawing of the inclination stage shown by FIG. It is CC sectional drawing of the inclination stage shown by FIG.

  Hereinafter, an inclined stage according to an embodiment of the present application and a microscope having the same will be described with reference to the drawings.

(First embodiment)
First, an overall configuration of the microscope 1 including the tilt stage 3 according to the first embodiment will be described with reference to FIG. In addition, the inclination stage 3 installed in the base 5 may be a thing of 2nd Embodiment mentioned later. Moreover, the microscope 1 shown in FIG. 1 is an example, and is not limited to this form.

  As shown in FIG. 1, a microscope (stereomicroscope) 1 includes a base 5, a support column 7, an arm 9, an objective lens 11 attached to the arm 9, a binocular tube 13, an eyepiece lens 15, and the like. The arm 9 can be moved in the vertical direction (the optical axis direction of the objective lens 11) by operating a vertical movement handle 17 provided on the support column 7. Reference numeral 19 denotes a zoom handle. The base 5 is provided with the tilt stage 3 of the first embodiment for tilting and observing a sample (not shown) placed on the upper surface.

  Next, the tilt stage 3 of the first embodiment will be described with reference to FIGS. 2 to 4 as being installed in the microscope 1.

  A basic configuration will be described. As shown in FIG. 2, the inclined stage 3 includes a base portion 21 installed on the base 5 and a stage portion 23 placed thereon. The stage unit 23 includes a disk-shaped stage plate (mounting unit) 25 on which a sample is mounted on an upper surface, and a substantially hemispherical cup (sliding unit) 27 provided on the back surface of the stage plate 25. . The cup 27 is a magnetic metal.

  As shown by a two-dot chain line in FIG. 2, the stage portion 23 can tilt while sliding with respect to the base portion 21. That is, the upper end portion of the fixed base portion 21 is a receiving seat 29 that comes into contact with the cup (sliding portion) 27. By rotating the cup 27 while sliding with respect to the receiving seat 29, the sample The upper surface of the stage plate 25 on which is mounted is inclined from the horizontal state, and the inclination angle (inclination angle) is maintained by the friction between the seat 29 and the cup 27.

  The stage unit 23 can tilt in all directions when the tilt stage 3 is viewed from above. As will be described later, the tilt stage 3 of the first embodiment has an attractive force (magnetic force) between the base unit 21 provided with the magnet and the stage unit 23 in order to adjust and maintain the tilt angle of the stage unit 23. Attracting force adjusting means for adjusting By adjusting the attractive force (magnetic force), the frictional force between the seat 29 and the cup 27 described above is adjusted, and the stage portion 23 can be smoothly and stably tilted.

  The configuration of the base portion 21 and the attractive force adjusting means will be described. As shown in FIG. 3, the base portion 21 includes a fixed portion 31 and a disk-shaped rotating plate (moving portion) 33 that can rotate around a central axis that extends in the vertical direction with respect to the fixed portion 31. The fixing portion 31 is fixed to the rotating plate 33 with a disk-shaped fixing plate 35 having a central axis and an outer diameter that coincides with each other, and to the fixing plate 35 with two screws 37, and receives the cup 27 of a substantially hemispherical magnetic body. Part 39. The rotating plate 33 has a circular hole 41 in the center, and is fitted around a downwardly projecting cylindrical portion 43 formed in the center of the receiving portion 39, so that it can rotate between the receiving portion 39 and the fixed plate 35. Is retained. The upper end portion of the receiving portion 39 constitutes the above-described receiving seat (tapered surface) 29 that contacts the magnetic cup 27 in a circular shape. The receiving portion 39 is a non-magnetic material, and is made of plastic or the like so that the stage portion 23 moves smoothly when adjusting the tilt angle. The rotating plate 33 is also a nonmagnetic material. The above configuration is the same in the second embodiment described later.

  As shown in FIGS. 3 and 4, three magnets 45 are embedded around the circular hole 41 of the rotating plate 33. The vertical positions of the upper surfaces of the three magnets 45 and the upper surface of the rotating plate 33 coincide with each other. The three magnets 45 are arranged at equal intervals along the circle on one circle centered on the central axis of the rotating plate 33 when the rotating plate 33 is viewed from above.

  The receiving portion 39 is provided with three magnetic metal rods (magnetic members) 47 between the rotating plate 33 and the cup 27 (only one is shown in FIG. 3). The metal rod 47 is inserted into a through hole penetrating the receiving portion 39 vertically. The metal rod 47 has a length that just fills the through hole, but the upper end surface of the metal rod 47 may be slightly lower than the receiving seat 29 in order to prevent the cup 27 from being damaged when sliding. The three metal rods 47 made of magnetic material are arranged at equal intervals along the circle on the one circle described above centered on the central axis of the rotating plate 33 when the receiving portion 39 is viewed from above. That is, the magnet 45 and the metal rod 47 are arranged on the same circle when the tilt stage 3 is viewed from above. The number of magnets 45 and metal bars 47 is not particularly limited to three. The through hole and the metal rod 47 may be a screw.

  By rotating the rotating plate 33, the three magnets 45 can be positioned immediately below the three metal rods 47, and the upper surfaces of the three magnets 45 can be brought into contact with the lower surfaces of the three metal rods 47, respectively. FIG. 3 is a diagram illustrating a state in which the magnet 45 and the metal rod 47 are in contact with each other. Further, by rotating the rotating plate 33, the positions of the three magnets 45 are shifted in the rotation direction from directly below the three metal bars 47, and the upper surfaces of the three magnets 45 are separated from the lower surfaces of the three metal bars 47, respectively. Can do.

  The rotating plate 33 having the magnet 45 and the metal rod 47 constitute attraction adjusting means. In a state where the magnet 45 and the metal rod 47 are not in contact, the magnetic force of the magnet 45 is not transmitted to the cup 27, and no magnetic attractive force acts between the base portion 21 and the stage portion 23. In this state, the user can smoothly tilt the stage unit 23. The stage portion 23 is tilted to adjust the tilt angle to a desired angle, and then the rotating plate 33 is rotated clockwise or counterclockwise as shown in FIG. 4 to bring the magnet 45 into contact with the metal rod 47. Then, the magnetic force of the magnet 45 is transmitted to the magnetic cup 27 through the metal rod 47, a magnetic attractive force acts between the base portion 21 and the stage portion 23, and a frictional force between the seat 29 and the cup 27 is generated. By increasing, the tilt angle is reliably fixed.

  Further, from this state, if the rotating plate 33 is rotated clockwise or counterclockwise as shown in FIG. 4 and the magnet 45 is separated from the metal rod 47, the magnetic force of the magnet 45 is not transmitted to the cup 27, and the base portion 21 and Returning to a state where no magnetic attractive force acts between the stage portion 23 and the tilt angle of the stage portion 23 is released, the smooth tilt angle adjustment can be performed again.

  As described above, according to the first embodiment, it is possible to provide a tilt stage capable of smoothly adjusting a tilt angle and maintaining a stable tilt angle, and a microscope having the tilt stage. Since the tilt angle can be reliably fixed and released, it is easy to observe the sample by tilting it with a microscope. In addition, the tilt stage of the first embodiment does not need to increase the roughness of the sliding surface in order to maintain a stable tilt angle, so there is no wear and excellent durability.

(Second Embodiment)
Next, the tilt stage 49 of the second embodiment will be described with reference to FIGS. 5 to 7 as being installed in the microscope 1. Since the basic configuration of the second embodiment is the same as that of the first embodiment, the same parts as those of the first embodiment are denoted by the same reference numerals in FIGS. 5 to 7, and redundant descriptions are omitted.

  As shown in FIG. 5, in the tilt stage 49 of the second embodiment, a disk-shaped magnetic shielding member 55 is provided on the back surface of the disk-shaped stage plate 53 of the stage portion 51. By providing the magnetic-shielding member 55 between the stage plate 53 and the magnetic cup 27, the sample is placed even when magnetic force is transmitted from the magnets 61, 63, 65 described later to the cup 27 via the metal rod 47. Magnetic force is not transmitted to the upper surface of the stage plate 53, and even when the sample is weak against magnetic force, the tilted stage 49 can be used for observation without problems. In addition, although the magnetic-shielding member 55 can be manufactured, for example from a light magnetic material (Silicon steel, permalloy, Sendust, etc.), you may use a commercially available magnetic-shielding sheet.

  As shown in FIGS. 5 and 6, in the base portion 57 of the tilt stage 49 of the second embodiment, a total of nine magnets 61, 63, 65 are arranged around the circular hole 41 of the nonmagnetic rotating plate 59. Buried. The vertical positions of the upper surfaces of the nine magnets 61, 63, 65 and the upper surface of the rotating plate 59 coincide with each other. The nine magnets 61, 63, 65 are arranged on one circle centered on the central axis (rotating axis) of the rotating plate 59 when the rotating plate 59 is viewed from above. Nine magnets 61, 63, 65 are arranged at equal intervals along the circle and three magnets 61 having the largest magnetic force among the nine magnets are arranged at equal intervals along the circle; and Three magnets 63 having a medium magnetic force among nine magnets and three magnets 65 arranged at equal intervals along the circle and having the smallest magnetic force among the nine magnets.

  The receiving portion 39 is provided with the same three magnetic metal rods (magnetic members) 47 as in the first embodiment (only one is shown in FIG. 5). The nine magnets 61, 63, 65 and the metal rod 47 are arranged on the same circle when the inclined stage 49 is viewed from above. The number of magnets is not particularly limited to nine.

  By rotating the rotating plate 59, among the nine magnets, the three magnets 61 having the largest magnetic force, the three magnets 63 having the medium magnetic force, or the three magnets 65 having the smallest magnetic force are changed to the three metal rods 47. The upper surfaces of the three magnets positioned can be brought into contact with the lower surfaces of the three metal bars 47, respectively. FIG. 5 is a diagram illustrating a state in which the three magnets 65 having the smallest magnetic force and the metal rod 47 are in contact with each other. Further, by rotating the rotating plate 59, a set of three magnets to be brought into contact with the metal rod 47 can be switched.

  As shown in FIGS. 5 and 7, in the base portion 57 of the tilt stage 49 of the second embodiment, a torsion spring 71 is provided between the fixed plate 69 and the rotating plate 59 of the fixed portion 67. The torsion spring 71 is accommodated in an annular groove 73 formed on the upper surface of the fixing plate 69, and one end of the torsion spring 71 is bent downward and fixed in a state of being stuck in the fixing plate 69. The other end is bent upward and fixed in a state where it is stuck in the rotating plate 59. By providing the torsion spring 71, a resistance force acts from the torsion spring 71 when the user rotates the rotating plate 59.

  As an example of the configuration of the base portion 57, a load is not applied to the torsion spring 71 in a state where the three magnets 65 having the smallest magnetic force are in contact with the metal rod 47 (the state shown in FIG. 5). From this state, the resistance force is applied from the torsion spring 71 to the rotating plate 59 only clockwise as shown in FIG. 6 and by a predetermined angle (until the three magnets 61 having the largest magnetic force contact the metal rod 47). It can be rotated while receiving.

  The rotating plate 59 having nine magnets 61, 63 and 65 and the metal rod 47 constitute attraction adjusting means. In a state where the three magnets 65 having the smallest magnetic force and the metal rod 47 are in contact, the small magnetic forces of the three magnets 65 are transmitted to the magnetic cup 27 through the metal rod 47, and the base portion 57, the stage portion 51, Although a small magnetic attractive force acts between the seat 29 and the cup 27, the user can smoothly tilt the stage 51 because the frictional force between the seat 29 and the cup 27 is small.

  The stage 51 is tilted to adjust the tilt angle to the desired angle, and then the rotating plate 59 is rotated clockwise as shown in FIG. 6 so that the three magnets 63 having a medium magnetic force are brought into contact with the metal rod 47. Let Then, the medium magnetic force of the three magnets 63 is transmitted to the magnetic cup 27 through the metal rod 47, and a medium magnetic attractive force acts between the base portion 57 and the stage portion 51. The frictional force between the cups 27 is medium, and the tilt angle is maintained with such a strength that fine adjustment is possible.

  When it is desired to securely fix the tilt angle of the stage portion 51, the rotating plate 59 is further rotated clockwise from the state where the three magnets 63 having a medium magnetic force and the metal rod 47 are in contact with each other, and the magnetic force having the largest magnetic force 3 Two magnets 61 are brought into contact with the metal rod 47. Then, a large magnetic force of the three magnets 61 is transmitted to the magnetic cup 27 through the metal rod 47, and a large magnetic attractive force acts between the base portion 57 and the stage portion 51. As the frictional force increases, the tilt angle is reliably fixed.

  If the rotating plate 59 is rotated counterclockwise from this state, the three magnets 63 having a medium magnetic force and the metal rod 47 are in contact with each other, and the three magnets 65 and the metal rod 47 having the smallest magnetic force are in contact. Can be brought back into contact.

  The effect similar to 1st Embodiment can be acquired also by the above 2nd Embodiment.

  In particular, according to the second embodiment configured as described above, since the nine magnets 61, 63, 65 are provided on the rotating plate 59, the strength of the attractive force (magnetic force) between the base portion 57 and the stage portion 51 is increased. It can be adjusted in 3 stages.

  In addition, since the torsion spring 71 is provided between the fixed plate 69 and the rotating plate 59, the user can sensuously know the rotational position of the rotating plate 59 when rotating the rotating plate 59. For example, when the user rotates the rotating plate 59 clockwise from the state where the magnet 65 having the smallest magnetic force and the metal rod 47 are in contact with each other, the user gradually receives a strong resistance force from the torsion spring 71. It can be sensibly understood how many turns the magnet 63 having a medium magnetic force or the magnet 61 having the largest magnetic force contact the metal rod 47. In addition, in a state where the magnet 63 having the medium magnetic force or the magnet 61 having the largest magnetic force and the metal rod 47 are in contact with each other, the magnet and the metal rod 47 attract each other, and the upper surface of the rotating plate 59 and the contact portion 39 are in contact with each other. Since the surface friction increases, the rotating plate 59 is prevented from returning naturally to the original position by the resistance force of the torsion spring 71.

  The above-described embodiment is merely an example, and is not limited to the above-described configuration, and can be appropriately modified and changed within the scope of the present invention. For example, the configuration of the first embodiment with three magnets can be combined with the magnetic shielding member of the second embodiment and a torsion spring. In the second embodiment, a total of nine magnets 61, 63, and 65 having different magnetic forces are provided on the rotating plate 59, but nine magnets having the same magnetic force can also be used. In this case, for example, by changing the depth of the hole of the rotating plate 59 in which three sets of three magnets arranged at equal intervals along the above-mentioned circle are embedded, the three sets of magnets from the metal rod 47 If the distances in the vertical direction are changed from each other, the attractive force (magnetic force) between the base portion 57 and the stage portion 51 is the same as when three types of magnets 61, 63, 65 having large, medium, and small magnetic forces are provided. Can be adjusted in three stages.

DESCRIPTION OF SYMBOLS 1 Microscope 3,49 Inclination stage 21,57 Base part 23,51 Stage part 25,53 Stage plate 27 Cup 31,67 Fixing part 33,59 Rotating plate 35,69 Fixed plate 39 Reception part 45 Magnet 47 Metal rod 55 Magnetic-shield member 61, 63, 65 Magnet 71 Torsion spring

Claims (8)

A base portion provided with at least one magnet;
It has a mounting part on which the sample is placed on the upper surface, and a tiltable stage part having a sliding part of a magnetic material that is slidably held with respect to the base part on the lower surface,
An inclination stage comprising: an attractive force adjusting means for adjusting an attractive force between the base portion and the stage portion by changing a position of the magnet in order to adjust and maintain an inclination angle of the stage portion. .   The tilt stage according to claim 1, wherein the base portion includes a fixed portion and a moving portion that is movable with respect to the fixed portion and provided with the magnet.   The tilt stage according to claim 2, wherein the attractive force adjusting means includes the moving part and at least one magnetic member provided between the moving part and the sliding part.   The tilt stage according to claim 2 or 3, wherein a plurality of magnets having different magnetic forces are provided in the moving part. The moving unit is a rotating plate that is rotatable about a central axis extending in a vertical direction with respect to the sample mounting surface of the stage unit, and the magnet is on a circle centering on the central axis of the rotating plate. Arranged,
The fixed portion has a receiving portion that receives the substantially hemispherical sliding portion, and the magnetic member is disposed on the circle of the receiving portion,
The tilt stage according to claim 3 or 4, wherein the magnet is positioned in the vicinity of a lower end of the magnetic member by the rotation of the rotating plate.   The tilt stage according to claim 5, wherein a torsion spring is provided between the fixed portion and the rotating plate.   The tilt stage according to any one of claims 1 to 6, wherein the stage portion includes a magnetic shielding member on the upper side of the sliding portion.   A microscope having the tilt stage according to any one of claims 1 to 7.

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