JP2010266476A - Color tone adjusting device, light source device, and spectrum measurement device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a color tone adjusting device by which the color tone of a luminous flux is adjusted with a simple construction, to provide a light source device, and to provide a spectrum measurement device. <P>SOLUTION: The color tone adjusting device (10) includes a dispersion element (11) dispersing an input luminous flux (IL) for each wavelength, a first imaging optical system (12) imaging luminous fluxes dispersed by the dispersion element (11), a transmittance variable part (13) wherein a plurality of transmittance variable elements (132) variably changing transmittance (T) correspondingly to the plurality of luminous fluxes dispersed on an imaging surfaces by the imaging optical system are disposed and a composite optical system (14) combining the plurality of luminous fluxes which have passed through the transmittance variable part (13) and emitting an output luminous flux (OL). <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a color tone adjustment device, a light source device, and a spectrum measurement device that perform color tone adjustment of a light beam including multiple wavelength components.

  Currently, monochromatic light or light having desired spectral characteristics is required for inspection of various devices. Of these, monochromatic light can be made relatively easily by guiding light from a white light source or the like to the spectroscope. On the other hand, light having a predetermined wavelength distribution is used for inspection of a CCD (Charge Coupled Device) or the like. As a method for forming light having a predetermined wavelength distribution, a filter using a multilayer film has been conventionally used.

  However, in the case of a filter using a multilayer film, it can be made relatively inexpensively, but it is difficult to make a spectral distribution freely. Further, when many filters having a multilayer film formed by vapor deposition are produced, the cost can be reduced. However, when many kinds of filters are produced in small quantities, the cost is increased. In addition, filters having many types of spectral characteristics are required particularly in evaluation at the development stage.

  The color tone adjusting device disclosed in Patent Document 1 is for overcoming the above-mentioned problems. The color tone adjusting device is configured to separate a polarizer that separates input light into two linearly polarized lights having vibration directions orthogonal to each other and a spectrum image formed by spectrally separating each of the linearly polarized lights separated by the polarizer. A zero-dispersion spectroscope using a liquid crystal spatial modulation element that is polarization-modulated by a Q-modulation element, combines the polarization-modulated linearly polarized light, and re-enters the polarizer.

JP 2008-170850 A

  Patent Document 1 discloses a color tone adjustment device that does not use a multilayer film. However, since the color tone adjustment device uses polarization development and a polarization device such as a polarizer is arranged, the overall device becomes large. There's a problem.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a color tone adjustment device, a light source device, and a spectrum measurement device that perform color tone of a light beam with a simpler configuration.

  A color tone adjusting apparatus according to a first aspect includes a dispersive element that disperses an input light beam for each wavelength, a first image forming optical system that forms an image of the light beam dispersed by the dispersive element, and an image plane formed by the image forming optical system. A transmittance variable unit having a plurality of transmittance variable elements that change the transmittance corresponding to a plurality of light beams dispersed in step synthesizes a plurality of light beams that have passed through the transmittance variable unit and emits an output light beam. And an optical system.

  A light source device according to a second aspect includes a light source having a predetermined wavelength width and a color tone adjusting device according to the first aspect that uses a light beam emitted from the light source as an incident light beam.

  A spectrum measuring apparatus according to a third aspect is a spectrum measuring apparatus that measures a spectrum for each wavelength of a test object that emits a light beam having a predetermined wavelength width. The spectrum measuring apparatus includes a dispersive element that disperses a light beam from a test object for each wavelength, a first image forming optical system that forms an image of the light beam dispersed by the dispersive element, and a dispersion on an image forming surface by the image forming optical system. A transmittance variable section in which a plurality of transmittance variable elements that vary the transmittance corresponding to the plurality of light fluxes arranged, and a composite optical system that combines the plurality of light fluxes that have passed through the transmittance variable section and emits an output light flux And a light amount detector that detects the light amount of the output light beam, and a control unit that varies the transmittance variable element of the transmittance variable unit based on the light amount detection result of the light amount detector.

  The present invention provides a color tone adjustment device, a light source device, and a spectrum measurement device in which the light amount of the light flux after color tone adjustment is large and the color tone of the light flux is performed with a simpler configuration.

It is a figure for demonstrating the color tone adjustment apparatus 10 of this embodiment. (A) is a figure explaining the incident light beam IL as an example in the color tone adjusting apparatus 10 of this embodiment. (B) is a graph showing the relationship between the wavelength of the incident light beam IL and the light intensity (light quantity) in the color tone adjusting device 10. FIG. 6C is a cross-sectional view showing the shape of the light beam IL ′ immediately before entering the electrochromic element 13 in the color tone adjusting device 10. FIG. 4D is a cross-sectional view showing the shape of the light beam OL ′ immediately after the electrochromic element 13 is emitted in the color tone adjusting device 10. (E) is the graph which showed the relationship between the wavelength of the emitted light beam OL and light intensity (light quantity) in the color tone adjustment apparatus 10. FIG. (A) is the top view which looked at the electrochromic element 13 from the Z-axis direction. (B) is the figure which showed the correspondence of the electrochromic material 132 shown by (a), and the wavelength of a light beam. It is the figure which showed an example of color tone adjustment in the color tone adjustment apparatus 10 of 1st Example. It is the figure which showed an example of color tone adjustment in the color tone adjustment apparatus 20 of 2nd Example. It is the figure which showed the outline | summary of the optical system in the light source device 30 of a 3rd Example. It is the figure which showed the outline | summary of the optical system in the light source device 30 'of a 4th Example. It is the figure which showed the outline | summary of the optical system in the spectrum measuring apparatus 40 of the 5th Example. It is the figure which showed the outline | summary of the optical system in the spectrum measuring apparatus 40 'of a 6th Example.

<Color tone adjusting device 10>
<< Overview of Color Tone Adjustment Device 10 >>
An outline of the color tone adjusting apparatus 10 will be described with reference to FIGS. 1 and 2. FIG. 1 is a diagram for explaining a color tone adjusting apparatus 10 of the present embodiment. FIG. 1A is a diagram illustrating an incident light beam IL as an example. FIG. 1B is a graph showing the relationship between the wavelength of the incident light beam IL and the light intensity (light quantity). FIG. 1C is a cross-sectional view showing the shape of the light beam IL ′ immediately before entering the electrochromic element 13. FIG. 1D is a cross-sectional view showing the shape of the light beam OL ′ immediately after emitting the electrochromic element 13. FIG. 1E is a graph showing the relationship between the wavelength of the emitted light beam OL and the light intensity (light quantity).

  The color tone adjusting device 10 shown in FIG. 1A includes an electrochromic element 13 that is a transmittance variable unit. Further, a prism P that is a dispersion element 11 and an imaging optical system 12 are provided on the incident light beam IL side of the electrochromic element 13. Further, a synthesizing optical system 14 including a collimator 141 and a prism P that is a synthesizing element 142 is provided on the side of the emitted light beam OL of the electrochromic element 13.

  As shown in FIG. 1A, the electrochromic element 13 that is a transmittance variable portion includes a plurality of electrochromic materials 132 (132a to 132g) arranged in the Y-axis direction in the Z-axis direction. It is configured to be sandwiched between windows 131b. The electrochromic element 13 will be described later with reference to FIG. The prism P (11) and the electrochromic element 13 are provided at the focal point of the imaging optical system 12, and the electrochromic element 13 and the prism P (142) are provided at the focal point of the collimator 141.

  The imaging optical system 12 and the collimator 141 are preferably telecentric optical systems having the same shape and the same refractive index. When the imaging optical system 12 and the collimator 141 are the same convex lens, the color tone adjusting device 10 of this embodiment is arranged symmetrically with respect to the Y axis passing through the center of the electrochromic element 13. In FIG. 1A, prisms P having the same shape and the same refractive index are used as the dispersive element 11 and the combining element 142, but a diffraction grating may be used.

  As shown in FIG. 1A, the incident light beam IL enters the color tone adjusting device 10 from the incident surface S11 of the prism P (11). For example, white light having a wavelength of 450 nm to 800 nm is used as the incident light beam IL of the present embodiment.

  As shown in FIG. 1B, the incident light beam IL incident on the prism P (11) has a continuous distribution in which the relationship between the wavelength and the light intensity (light quantity) is a mountain shape. This incident light beam IL is dispersed for each wavelength by the dispersion action of the prism P (11) as shown in FIG. The light beams having the respective wavelengths emitted from the exit surface S12 of the prism P (11) are imaged and condensed on the electrochromic element 13 by the imaging optical system 12. In this embodiment, a dotted line indicates a light beam having a wavelength λb incident on the electrochromic material 132b, a dashed line indicates a light beam having a wavelength λd incident on the electrochromic material 132d, and a broken line enters the electrochromic material 132f. A light beam having a wavelength λf is shown. Here, the incident light beam IL is divided into three light beams, a dotted line, a one-dot chain line, and a broken line, but actually, it is divided into a plurality of light beams according to the number of wavelengths included in the incident light beam IL. That is, the arbitrary electrochromic material 132 can be irradiated in the range from the electrochromic material 132b of the electrochromic element 13 to the electrochromic material 132f. Further, the cross-sectional shape of the light beam IL ′ immediately before entering the electrochromic element 13 has a major axis extending in the Y-axis direction as shown in FIG. Here, for the sake of explanation, the cross-sectional shape of the light beam IL ′ is drawn widely, but it is actually a straight line in the Y-axis direction. Further, for example, the end A of the light beam IL ′ corresponds to red light having a wavelength of about 800 nm, and the end B of the light beam IL ′ corresponds to purple light having a wavelength of about 450 nm. In FIG. 1C, the red side is drawn in white and the purple side in black for the sake of illustration.

  The amount of light of the luminous flux IL ′ incident on the electrochromic element 13 is adjusted by changing the transmittance of the electrochromic element 13 including the sign of the voltage applied to the electrochromic material 132. For example, the electrochromic element 13 can adjust the light quantity of the light beam having the wavelength λb by changing the wavelength λb, that is, the voltage applied to the electrochromic material 132b corresponding to red, including the sign. As a result, the light quantity at the portion corresponding to the wavelength λb of the cross-sectional shape of the light beam OL ′ immediately after passing through the electrochromic element 13 is changed as shown in FIG.

The light beam OL ′ that has passed through the electrochromic element 13 passes through the collimator 141, and the light beam OL ′ that has passed through the collimator 141 enters the incident surface S21 of the prism P (142). Thereafter, as shown in FIG. 1A, the light is combined again by the combining action of the prism P (142), and is emitted from the exit surface S22 as an exit light beam OL. At this time, the relationship between the wavelength of the emitted light beam OL and the light intensity (light quantity) is as shown in the graph of FIG. That is, as for the relationship between the wavelength and the light intensity (light quantity), the light intensity (light quantity) of the wavelength λb is changed. Observing with the human eye, the emitted light beam OL is observed as a bluish white than the incident light beam IL because the light intensity (light quantity) of the red wavelength λb is changed.
As described above, the color tone adjusting device 10 can adjust the color tone of the incident light beam IL using the electrochromic element 13 and emit the emitted light beam OL having another color tone.

Next, the electrochromic element 13 will be described in detail with reference to FIG.
FIG. 2 is a diagram for explaining the correspondence between the electrochromic element 13 and the wavelength of light. FIG. 2A is a plan view of the electrochromic element 13 viewed from the Z-axis direction. FIG. 2B is a diagram showing the correspondence between the electrochromic material 132 shown in FIG. 2A and the wavelength of light.

  As shown in FIG. 2A, the electrochromic element 13 includes a plurality of electrochromic materials 132 arranged in the Y-axis direction. In this embodiment, the electrochromic element 13 is drawn with seven electrochromic materials 132 (132a to 132g). The distance between the electrochromic materials 132 in the Y-axis direction is, for example, about 10 micrometers. Each electrochromic material 132 is sandwiched between two electrodes 133 in the X-axis direction.

  The electrochromic material 132 of the electrochromic element 13 shown in FIG. 2A is a material having a characteristic that allows the light transmittance to be adjusted by applying a voltage. In this embodiment, an organic / metal hybrid polymer that exhibits electrochromic properties is used. This organic / metal hybrid polymer is a new type of material in which metal ions and organic molecules are connected in a daisy chain.

  The electrochromic material 132 can arbitrarily and independently change the sign and strength of the voltage by the electrodes 133 provided on both sides thereof, and the transmittance of the electrochromic material 132 is the sign of the voltage applied to the electrochromic material 132. Changes based on changes including (plus or minus).

  On the other hand, as shown in FIG. 1C or FIG. 2B, the light beam IL ′ incident on the electrochromic element 13 is dispersed from red to purple in the Y-axis direction. For this reason, the light incident on the electrochromic element 13 can be made to correspond to the electrochromic material 132 (132b to 132f) in a position where light of each wavelength passes. The transmittance of the electrochromic material 132 is adjusted by the applied voltage. For example, the electrochromic material 132b corresponds to red light having a wavelength λb of about 800 nm included in the incident light beam IL, and the amount of the red light can be adjusted. Further, the electrochromic material 132f corresponds to violet light having a wavelength λf of about 450 nm included in the incident light beam IL, and can adjust the amount of the violet light.

  Information on the wavelength range of light incident on each electrochromic material 132 and the currently set transmittance is recorded and managed by a storage device (not shown). An arithmetic unit (not shown) receives these pieces of information from the recording device, calculates how much voltage should be applied to change the transmittance to a desired transmittance, and calculates the electrode based on the calculation result. A voltage is applied to 133.

That is, the amount of light in a desired wavelength region can be adjusted by adjusting the voltage applied to the electrochromic material 132 (132a to 132g). Since the sensitivity of the transmittance change with respect to the applied voltage varies depending on the wavelength, the sensitivity information of the transmittance change in the wavelength region corresponding to each electrochromic material 132 is also recorded in the recording device, and is combined with the wavelength information by the arithmetic device. To be used when calculating the applied voltage.
Hereinafter, the color tone adjusting device 10 will be described in more detail with reference to the optical path shown in FIG.

(First embodiment)
FIG. 3 is a diagram illustrating an example of color tone adjustment in the color tone adjusting apparatus 10 according to the first embodiment.
<< Configuration of Color Tone Adjustment Device 10 >>

The color tone adjusting apparatus 10 shown in FIG. 3 includes an electrochromic element 13 that is a transmittance variable unit. In addition, a dispersion element 11 and an imaging optical system 12 are provided on the electrochromic element 13 incident light beam IL side. In addition, a synthesizing optical system 14 including a collimator 141 and a synthesizing element 142 is provided on the side of the emitted light beam OL of the electrochromic element 13. In FIG. 3, diffraction gratings are used as the dispersion element 11 and the synthesis element 142.
The color tone adjustment of the color tone adjusting device 10 will be described with reference to FIG.

<< Color adjustment of the color adjustment device 10 >>
As shown in FIG. 3, the incident light beam IL enters the dispersion element 11 of the color tone adjusting device 10 perpendicularly from the −Z side. In the first embodiment, the incident light beam IL is light having different wavelengths λ1 and λ2.

As shown in FIG. 3, since the incident light beam IL includes the wavelength λ1 and the wavelength λ2, the light L _λ1 having the wavelength λ1 and the light L having the wavelength λ2 when emitted from the dispersion element 11. _The light is divided into _λ2 and enters the imaging optical system 12. In addition, light L _λ1 having a wavelength _λ1 is indicated by a one-dot chain line, and light L _λ2 having a wavelength λ2 is indicated by a broken line. At this time, since the electrochromic element 13 is provided at the focal point of the imaging optical system 12, all the light with the wavelength λ1 is condensed on the electrochromic material 132c of the electrochromic element 13, and all the light with the wavelength λ2 is collected. Is condensed on the electrochromic material 132e.

  Then, if necessary, the voltage applied to the electrochromic materials 132c and 132e is adjusted including the sign, and the transmittance of the electrochromic materials 132c and 132e is changed, so that the amount of light with respect to the light in the corresponding wavelength region is changed. An adjusted exit beam OL is obtained.

For example, the voltage applied to the electrochromic material 132c shown in FIG. 3 by a control unit (not shown) is adjusted so that the transmittance is n%. Thereby, the intensity _| strength (light quantity) of the light L (lambda) ₁ inject | emitted from the electrochromic material 132c can be adjusted to n% at the time of incidence. Since the voltage applied to each electrochromic material can be adjusted separately, the light L _λ2 corresponding to the electrochromic material 132e is given different transmittance changes.

  The light beam that has passed through the electrochromic element 13 is incident on the collimator 141. Since the electrochromic element 13 is provided at the focal point of the collimator 141, the light beam that has passed through the electrochromic element 13 becomes parallel light again by the collimator 141.

  Finally, the light beam incident on the synthesis element 142 as parallel light is emitted from the color tone adjusting apparatus 10 as an emitted light beam OL by the synthesis element 142.

  As described above, the color tone adjusting device 10 individually adjusts the voltage applied to each electrochromic material 132 through which light having different wavelengths included in the incident light beam IL passes, thereby allowing the transmittance of each electrochromic material 132 to be transmitted. Can be changed individually. That is, the intensity (light quantity) of light in the wavelength region that passes through each electrochromic material 132 can be individually adjusted. Thereby, the emitted light beam OL having a desired color tone can be formed.

(Second embodiment)
A color tone adjusting apparatus 20 according to the second embodiment will be described with reference to FIG.
Note that the same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

<< Configuration of Color Tone Adjustment Device 20 >>
FIG. 4 is a diagram illustrating an example of the color tone adjusting apparatus 20 according to the second embodiment. The color tone adjusting apparatus 20 of the second embodiment includes a dispersive element 11 and an imaging optical system 12 having the same configuration as that of the first embodiment as shown in FIG. The disposition position of the dispersive element 11 is also the focal point of the imaging optical system 12 as in the first embodiment. A half mirror 15 is provided on the incident light beam IL side of the dispersive element 11, and a reflective electrochromic element 16 that is a transmittance variable portion is provided on the outgoing light beam OL side of the imaging optical system 12. The reflective electrochromic element 16 is provided at the focal position of the imaging optical system 12 as in the first embodiment, but the configuration is different from that of the electrochromic element 13 in the first embodiment. . Therefore, the configuration of the reflective electrochromic element 16 will be described in detail below.

  As shown in FIG. 4, the reflective electrochromic element 16 includes seven electrochromic materials 132 (132 a to 132 g) arranged in the Y-axis direction as an optical window 131 a and a plane mirror 134 that is a reflective element in the Z-axis direction. It is comprised between. The plane mirror 134 is, for example, aluminum deposited on glass. In addition, each electrochromic material 132 of the reflective electrochromic element 16 of the second embodiment is sandwiched between two electrodes 133 in the X-axis direction on the XY plane (see FIG. 2A).

  According to such a configuration, each wavelength light beam that has passed through the imaging optical system 12 and entered the reflective electrochromic element 16 is electrochromic material 132 (132a to 132g) at the position where the light beam is imaged. Is adjusted by changing the applied voltage in consideration of the influence before and after reflection by the plane mirror, and the amount of light is adjusted with respect to the incident light beam IL of the reflective electrochromic element 16. As a result, the emitted light beam OL having a desired color tone can be formed also in the second embodiment.

  Further, the color tone adjusting device 20 of the second embodiment is shortened in the Z-axis direction as compared with the color tone adjusting device 10 of the first embodiment. Hereinafter, the color tone adjustment of the color tone adjusting device 20 will be described in detail with reference to the optical path.

<< Color adjustment of the color adjustment device 20 >>
In the color tone adjustment of the color tone adjusting device 20 of the second embodiment, the incident light beam IL is incident on the half mirror 15 of the color tone adjusting device 20 along the + Z axis direction as shown in FIG. Also in the second embodiment, the incident light beam IL includes the wavelength λ1 and the wavelength λ2.

As shown in FIG. 4, the light beam that has passed through the half mirror 15 enters the dispersion element 11 vertically. Since the incident light beam IL is containing the different wavelengths .lambda.1 and wavelength .lambda.2 each other, the light beam is divided into light L _.lambda.2 a light L _.lambda.1 and wavelength .lambda.2 is .lambda.1 wavelength when emitted from the dispersive element 11 imaged The light enters the optical system 12. In addition, light L _λ1 having a wavelength _λ1 is indicated by a one-dot chain line, and light L _λ2 having a wavelength λ2 is indicated by a broken line. At this time, since the reflective electrochromic element 16 is provided at the focal point of the imaging optical system 12, all the light of wavelength λ1 is condensed on the electrochromic material 132c of the reflective electrochromic element 16, and all of the light of wavelength λ2 is collected. The light is condensed on the electrochromic material 132 e of the reflective electrochromic element 16.

  At this time, the transmittance of the electrochromic materials 132c and 132e can be arbitrarily changed by adjusting the voltage applied to the electrochromic materials 132c and 132e by a control unit (not shown). Therefore, the light amount of the light having the wavelength λ1 collected on the electrochromic material 132c and the light beam having the wavelength λ2 collected on the electrochromic material 132e is adjusted by the reflective electrochromic element 16.

  However, in the reflective electrochromic element 16, the light having the wavelength λ 1 and the light having the wavelength λ 2 are reflected by the plane mirror 134 and pass twice. Therefore, for example, when the transmittance of the electrochromic material 132c is set to 50%, the light having the wavelength λ1 is attenuated by 50% before reaching the plane mirror 134, and the light having the wavelength λ1 reflected by the reflecting mirror 134 is emitted. Attenuated by 50%, and reciprocated to 25%.

Then, the light beam whose light amount is adjusted by the electrochromic material 132 is reflected by the plane mirror 134 and is incident on the imaging optical system 12 again. Further, since the reflected light of the plane mirror 134 enters the imaging optical system 12 from the opposite side of the original lights L _λ1 and L _λ2 , the reflected light again enters the dispersion element 11 as parallel light by the imaging optical system 12. Since the incident light at this time is incident on the dispersion element 11 from the opposite side of the first incident light beam IL, the dispersion element 11 serves as the synthesis element 142 (see FIG. 3) described in the first embodiment. Therefore, light beams having different wavelengths are combined by the dispersive element 11 and emitted from the dispersive element 11 along the −Z-axis direction.

  Thereafter, the light beam emitted from the dispersive element 11 is reflected by the half mirror 15 and emerges from the color tone adjusting device 20 as an emitted light beam OL directed in the + Y-axis direction.

  According to the above description, the color tone adjusting device 20 adjusts the voltage applied to each electrochromic material 132 through which light having different wavelengths included in the incident light beam IL passes, thereby transmitting light in the corresponding wavelength region. The rate can be changed. Accordingly, an emitted light beam OL having a necessary color tone can be obtained.

<Light source device 30>
(Third embodiment)
A light source device 30 according to a third embodiment will be described with reference to FIG.
FIG. 5 is a diagram showing an outline of the optical system in the light source device 30 of the third embodiment. In the following description of FIG. 5, the same components as those shown in FIGS.

  In the light source device 30 shown in FIG. 5, a light source 31 is attached to the color tone adjusting device 10 of the first embodiment shown in FIG. For this reason, the description of the same part as the color tone adjusting apparatus 10 is omitted, and only a different part will be described.

  Although not shown, the incident light beam IL emitted from the light source 31 is collimated by a collimator and enters the color tone adjusting device 20 in the + Z-axis direction. Since the optical path in the color tone adjusting device 20 is the same as the optical path described in the color tone adjustment of the color tone adjusting device 20 of the first embodiment, the description thereof is omitted here. The light source 31 of the light source device 30 may be a white light source having a continuous spectrum. When a white light source is used, various light contained in white light corresponds to the electrochromic element 13 electrochromic material 132 (132a to 132g). For example, red light having a wavelength λb corresponds to the electrochromic material 132b, and violet light having a wavelength λf corresponds to the electrochromic material 132f (see FIG. 2B).

(Fourth embodiment)
A light source device 30 ′ according to a fourth embodiment will be described with reference to FIG.
FIG. 6 is a diagram showing an outline of an optical system in the light source device 30 ′ of the fourth embodiment. In the following description of FIG. 6, the same components as those shown in FIG.

  The light source device 30 'shown in FIG. 6 has a light source 31 attached to the color tone adjusting device 20 of the second embodiment shown in FIG. Further, the light source 31 used in the fourth embodiment has the same configuration as the light source 31 described in the third embodiment, and although not shown in the same manner as the third embodiment, the light beam emitted from the light source is used. After collimated light by a collimator, the light enters the color tone adjusting device 20.

<Spectrum measuring device 40>
(Fifth embodiment)
A spectrum measuring apparatus 40 of the fifth embodiment will be described with reference to FIG.
FIG. 7 is a diagram showing an outline of the optical system in the spectrum measuring apparatus 40 of the fifth embodiment. In the description of FIG. 7 below, the same components as those shown in FIGS. 1 to 3 and 5 are denoted by the same reference numerals.

  In the spectrum measuring apparatus 40 shown in FIG. 7, a light amount detector 42 and a control unit 43 are attached to the color tone adjusting apparatus 10 shown in FIG. The spectrum test object 41 is an inspection object that emits light of a certain wavelength. The spectrum test object 41 is arranged on the −Z side of the color tone adjustment device 10, and the light beam emitted from the spectrum test object 41 is collimated by a collimator (not shown) but then enters the color tone adjustment device 10. . The light beam from the spectrum test object 41 may pass through a bending mirror, an optical fiber, or the like, but is finally converted into parallel light and made incident on the color tone adjusting device 10. The light amount detector 42 is provided on the emitted light beam OL side of the color tone adjusting device 20. The light quantity detector 42 is constituted by a CCD, a CMOS, or the like. The control unit 43 includes an arithmetic device and a storage device, and is connected to the electrochromic element 13 and the light amount detector 42. The controller 43 adjusts the voltage applied to the electrochromic material 132 of the electrochromic element 13 based on the output result of the light quantity detector 42. That is, the transmittance of the electrochromic material 132 can be adjusted.

  Moreover, since the structure of another part is the same as the color tone adjustment apparatus 10 shown by FIG. 3, description is abbreviate | omitted. Hereinafter, the principle of measuring the spectrum by the spectrum measuring apparatus 40 will be described.

First, the incident light beam IL emitted from the spectrum test object 41 enters the color tone adjusting device 10. At this time, the luminous flux that has passed through the color tone adjusting device 10 and whose amount of light has been changed is synthesized by the synthesizing element 142 and emitted from the color tone adjusting device 10 (see the color tone adjustment in the fifth embodiment). The emitted light beam OL emitted from the combining element 14 enters the light amount detector 42, and the light amount detector 42 measures the light amount _Itotal of the emitted light beam OL. At this time, if the light quantity of the light beam having the wavelength λ is I _λ and the transmittance of the electrochromic material 132 (132a to 132g) disposed at the position of the wavelength λ is T _λ on the spectrum dispersed by the dispersive element 11, the color tone is adjusted. The amount of light I _total of the light beam synthesized later can be obtained by Expression (1).
... (1)

Then, changing only the transmittance T _lambda electrochromic material 132 at a position corresponding to the wavelength lambda to be measured on the electrochromic device 13 (132a~132g) to T _'lambda. The light amount detector 42 measures the light amount I ′ _total of the emitted light beam OL after the transmittance of the electrochromic material 132 is adjusted to T ′ _λ . The amount of light I ′ _total can be expressed by Equation (2).
... (2)

Combining Equation (1) and Equation (2) yields Equation (3),
... (3)

Finally, In summary Equation (3), the light amount I _lambda of the light beam is obtained which corresponds to the wavelength lambda to be determined as shown in equation (4).
... (4)

(Sixth embodiment)
A spectrum measurement apparatus 40 ′ according to the sixth embodiment will be described with reference to FIG.
FIG. 8 is a diagram showing an outline of an optical system in the spectrum measuring apparatus 40 ′ of the sixth embodiment. In the spectrum measuring apparatus 40 ′ shown in FIG. 8, a light amount detector 42 and a control unit 43 are attached to the color tone adjusting apparatus 20 shown in FIG. Although not shown in the figure, it is the same as in the fifth embodiment that the light beam from the test object is collimated by the collimator and then incident on the color tone adjusting device 20.

  Further, the light amount detector 42 and the control unit 43 in the sixth embodiment are the same as the light amount detector 42 and the control unit 43 described in the spectrum measuring apparatus 40 in the fifth embodiment. Furthermore, the principle of measuring the spectrum by the spectrum measuring apparatus 40 'of the sixth embodiment is the same as the spectrum measuring principle described in the fifth embodiment.

  The optimum embodiment of the present invention has been described in detail above. However, as will be apparent to those skilled in the art, the present invention can be implemented with various modifications and variations within the technical scope thereof.

DESCRIPTION OF SYMBOLS 10, 20 ... Color tone adjusting device 11 ... Dispersion element 12 ... Imaging optical system 13 ... Electrochromic element 131a, 131b ... Optical window 132, 132a-132g ... Electrochromic material 133 ... Electrode 134 ... Plane mirror 14 ... Synthetic optical system 141 ... Collimator 142 ... Synthesis element 15 ... Half mirror 16 ... Reflective electrochromic element 30, 30 '... Light source device 31 ... Light source 40, 40' ... Spectrum measuring device 41 ... Light quantity test object 42 ... Light quantity detector 43 ... Control unit IL ... incident light beam I _λ ... light amount of light beam of wavelength λ I _total , I ' _total ... light amount of emitted light beam OL L _λ1 ... light of wavelength λ1 L _λ2 ... light of wavelength λ2 T _λ , T' _λ ... transmittance OL ... Emission light beam P ... Prism λ1, λ2 ... Wavelength

Claims (11)

A dispersive element that disperses the input light flux for each wavelength;
A first imaging optical system for imaging the light beam dispersed by the dispersion element;
A transmittance variable portion in which a plurality of transmittance variable elements that vary the transmittance are arranged in correspondence with a plurality of light beams dispersed on the imaging surface by the imaging optical system;
A combining optical system that combines a plurality of light beams that have passed through the transmittance variable unit and emits an output light beam;
A color tone adjusting device. The synthetic optical system is
A second imaging optical system that is arranged at a different position from the first imaging optical system and collimates the light beam that has passed through the transmittance variable unit;
A synthesis element having the same configuration as the dispersion element, and synthesizing the plurality of light beams;
The color tone adjusting apparatus according to claim 1, comprising: The synthetic optical system is
A reflective element that reflects the light beam that has passed through the transmittance variable portion;
The plurality of light beams reflected by the reflection element pass through the transmittance variable unit, are collimated by the first imaging optical system, combine the plurality of light beams by the dispersion element, and emit an output light beam. The color tone adjusting device described.   The color tone adjusting apparatus according to claim 3, further comprising means for branching the input light beam and the output light beam by a half mirror or the like.   5. The color tone adjusting apparatus according to claim 1, wherein the dispersive element includes an optical prism or a diffraction grating.   6. The color tone adjusting apparatus according to claim 1, wherein the transmittance variable unit includes an electrochromic element that varies the transmittance of the transmittance variable element by applying an electric field.   The color adjustment device according to any one of claims 1 to 6, wherein the first imaging optical system is telecentric on a transmittance variable unit side. A light source having a predetermined wavelength width;
The color adjustment device according to any one of claims 1 to 7, wherein a light beam emitted from the light source is an incident light beam;
A light source device comprising: In a spectrum measuring apparatus that measures a spectrum for each wavelength of an object that emits a light beam having a predetermined wavelength width,
A dispersion element that disperses the light flux from the test object for each wavelength;
A first imaging optical system for imaging the light beam dispersed by the dispersion element;
A transmittance variable portion in which a plurality of transmittance variable elements that vary the transmittance are arranged in correspondence with a plurality of light beams dispersed on the imaging surface by the imaging optical system;
A combining optical system that combines a plurality of light beams that have passed through the transmittance variable unit and emits an output light beam;
A light amount detector for detecting the light amount of the output light beam;
A control unit that varies a transmittance variable element of the transmittance variable unit based on a light amount detection result of the light amount detector;
A spectrum measuring apparatus comprising:   The spectrum measuring apparatus according to claim 9, wherein the dispersive element includes an optical prism or a diffraction grating.   The spectrum measurement device according to claim 9 or 10, wherein the transmittance variable unit includes an electrochromic element that varies the transmittance of the transmittance variable element by applying an electric field.