JP2010264536A - Polishing device accompanying eccentric rotational motion - Google Patents

Polishing device accompanying eccentric rotational motion Download PDF

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JP2010264536A
JP2010264536A JP2009117274A JP2009117274A JP2010264536A JP 2010264536 A JP2010264536 A JP 2010264536A JP 2009117274 A JP2009117274 A JP 2009117274A JP 2009117274 A JP2009117274 A JP 2009117274A JP 2010264536 A JP2010264536 A JP 2010264536A
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sliding engagement
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JP5363870B2 (en
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Keiichi Murakami
慶一 村上
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Nitto Kohki Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing device in which a movement accompanying revolution and rotation, and a movement accompanying back-and-forth and swing movements are settable only by replacement of a polishing member. <P>SOLUTION: The polishing device includes a casing (48); a motor (16); a rotary support body (22) drivingly connected to the motor and rotated around a first axis (40); and at least two kinds of polishing members (14, 14-2, 14-3, 14-4) rotatable around a second axis (60) parallel to the first axis (40) and detachably attached to the rotary support body (22). The casing includes a first sliding engagement portion (86), and at least one polishing member (14-2, 14-3, 14-4) includes a second sliding engagement portion (an elongated groove 82, and a pair of protrusions 84) slidably engaged with the first sliding engagement portion. At least one other polishing member (14) is not engaged with the first sliding engagement portion (86) during attachment to the rotary support body. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、偏芯回転運動を伴う研磨装置に関する。   The present invention relates to a polishing apparatus with eccentric rotational movement.

研磨装置においては、研磨部材をモータによって直接回転駆動するのではなく、研磨部材を偏芯回転運動によって間接的に駆動するようなものがある。具体的には、第1の軸線を中心にモータからの回転駆動力によって直接回転駆動される回転支持体と、該回転支持体における該第1の軸線から離された位置において該第1の軸線に平行に延びる第2の軸線を中心に回転可能にして該回転支持体に取り付けられる研磨部材とを有し、第1の軸線の周りでの回転支持体の回転に伴って、研磨部材が第2の軸線の周りで回転力を受けて回転されるようにしたものである。この研磨装置では、基本的には、研磨部材は第1の軸線の周りでの公転とともに、第2の軸線の周りでの自転が生じる。これに対して、自転を制限して当該研磨部材の第1の軸線の周りでの向きを略一定に保ち、当該研磨部材の動きを、第1の軸線の周りでの第2の軸線の回転運動に伴った前後運動と揺動運動とに制限することが可能である。特許文献1は、研磨部材に自転及び公転を生じるようにする場合と、前後運動及び揺動運動を生じるようにする場合とを使い分けできるようにした装置を開示している。   Some polishing apparatuses do not directly drive the polishing member by a motor, but indirectly drive the polishing member by an eccentric rotational movement. Specifically, a rotation support that is directly rotated by a rotation driving force from a motor around the first axis, and the first axis at a position away from the first axis in the rotation support. And a polishing member attached to the rotary support so as to be rotatable about a second axis extending parallel to the first axis, and the polishing member is moved in accordance with the rotation of the rotary support around the first axis. It is designed to be rotated by receiving a rotational force around the second axis. In this polishing apparatus, basically, the polishing member revolves around the first axis and rotates around the second axis. On the other hand, the rotation of the polishing member is restricted to keep the direction of the polishing member around the first axis substantially constant, and the movement of the polishing member is caused to rotate around the first axis. It is possible to limit to the back-and-forth motion and the rocking motion accompanying the motion. Japanese Patent Application Laid-Open No. 2004-133260 discloses an apparatus that can selectively use a case where rotation and revolution occur in a polishing member and a case where generation and back-and-forth movement and rocking movement are caused.

特許第4061053号Patent No. 4061053

特許文献1に開示された研磨装置では、研磨部材(研磨パッド)を上記のように使い分けするために、研磨部材を支持しているフレームに連結軸を通し、その先端を研磨部材に差し込んで、該フレームと研磨部材とを連結することにより、当該研磨部材の第2の軸線の周りでの自転を阻止するようにしている。   In the polishing apparatus disclosed in Patent Document 1, in order to properly use the polishing member (polishing pad) as described above, the connecting shaft is passed through the frame supporting the polishing member, and the tip is inserted into the polishing member. By connecting the frame and the polishing member, rotation of the polishing member around the second axis is prevented.

この研磨装置では、上記連結軸によりフレームと研磨部材とを連結する作業が煩雑であり、作業効率の妨げとなる。また、高速で運動する研磨部材と静止状態のフレームとを連結する構造となっているので、その連結構造のメンテナンスをする煩わしさもある。   In this polishing apparatus, the operation of connecting the frame and the polishing member by the connecting shaft is complicated, which hinders work efficiency. Further, since the structure is such that the polishing member that moves at high speed and the stationary frame are connected, there is also a troublesome maintenance of the connection structure.

本発明は、このような従来の研磨装置でのこのような煩わしさをなくし、研磨部材の動きを簡単に変えることができるようにすることを目的としている。   An object of the present invention is to eliminate such troublesomeness in such a conventional polishing apparatus and to easily change the movement of the polishing member.

すなわち、本発明は、
ケーシング(上述の実施形態の説明においては参照番号48として示しある)と、
該ケーシングに取り付けられたモータ(16)と、
該ケーシングに取り付けられ、該モータの出力軸(18)に駆動連結され、第1の軸線を中心に回転される回転支持体(22)と、
該回転支持体における該第1の軸線(40)から離された位置において該第1の軸線に平行に延びる第2の軸線(60)を中心に回転可能にして、該回転支持体に取り外し可能に取り付けられ、該第2の軸線に直交する方向で延びる研磨面(12)を有する少なくとも2つの種類の研磨部材(14、14−2、14−3、14−4)と、
を有し、
該ケーシングは、該回転支持体の回転に伴って該第1の軸線(40)の周りで回転される該第2の軸線(60)よりも該第1の軸線(40)からの放射方向で該第1の軸線から離れた位置に設けられた第1摺動係合部(86)を有し、
該研磨部材のうちの少なくとも1つの研磨部材(14−2、14−3、14−4)が、該回転支持体に取り付けられたときに、該第1摺動係合部に摺動可能に係合する第2摺動係合部(同実施形態においては細長溝82と一対の突起84とから構成)であって、該回転支持体(22)が回転されて、該第2の軸線(60)が該第1の軸線(40)を中心に回転されるときに、該第1摺動係合部との係合部分と該第2の軸線(60)とを結ぶ線に沿って当該研磨部材が変位しながら該係合部分の周りで枢動するのを許容する第2摺動係合部(82,84)を有し、
該研磨部材のうちの少なくとも他の1つの研磨部材(14)が、該回転支持体に取り付けられたときに、該第1摺動係合部(86)に係合しないようにされている
ことを特徴とする研磨装置を提供する。
That is, the present invention
A casing (shown as reference numeral 48 in the description of the above embodiment);
A motor (16) attached to the casing;
A rotating support (22) attached to the casing, drivingly connected to the output shaft (18) of the motor, and rotated about a first axis;
The rotary support can be rotated about a second axis (60) extending parallel to the first axis at a position away from the first axis (40) in the rotary support, and can be detached from the rotary support. At least two types of polishing members (14, 14-2, 14-3, 14-4) having a polishing surface (12) extending in a direction perpendicular to the second axis;
Have
The casing is more radially directed from the first axis (40) than the second axis (60) rotated about the first axis (40) as the rotating support rotates. A first sliding engagement portion (86) provided at a position away from the first axis;
At least one of the polishing members (14-2, 14-3, 14-4) is slidable on the first sliding engagement portion when attached to the rotary support. A second sliding engagement portion (in the same embodiment, composed of an elongated groove 82 and a pair of protrusions 84) that is engaged, and the rotation support (22) is rotated to form the second axis ( 60) when rotated about the first axis (40), along the line connecting the engagement portion with the first sliding engagement portion and the second axis (60). A second sliding engagement portion (82, 84) that allows the abrasive member to pivot about the engaging portion while being displaced;
At least one other polishing member (14) of the polishing members is not engaged with the first sliding engagement portion (86) when attached to the rotary support. A polishing apparatus is provided.

この研磨装置では、所要の研磨部材を回転支持部材に取り付けるだけで、当該研磨部材が上述の公転及び自転を伴った動きを行うか、又は、前後運動及び揺動運動を伴った動きを行うかを決定することができる。   In this polishing apparatus, whether the polishing member moves with the above-mentioned revolution and rotation, or moves with the back-and-forth motion and the rocking motion simply by attaching the required polishing member to the rotation support member. Can be determined.

具体的には、該第1摺動係合部(86)が、該ケーシング(48)から、該回転支持体に取り付けられた研磨部材(14、14−2、14−3、14−4)に向かって突出するようにされ、該第2摺動係合部(82、84)が該第2の軸線から放射方向に直線状に延びて該第1摺動係合部(86)と摺動係合するようにすることができる。   Specifically, the first sliding engagement portion (86) is a polishing member (14, 14-2, 14-3, 14-4) attached to the rotary support from the casing (48). The second sliding engagement portion (82, 84) extends linearly in a radial direction from the second axis and slides on the first sliding engagement portion (86). Can be in dynamic engagement.

より具体的には、第2摺動係合部(82、84)が、第1摺動係合部(86)の両側を、第2の軸線(60)から略放射方向に延び、該第1摺動係合部と係合可能とされた平行な面を有するようにすることができる。   More specifically, the second sliding engagement portion (82, 84) extends substantially radially from the second axis (60) on both sides of the first sliding engagement portion (86). It is possible to have a parallel surface that can be engaged with one sliding engagement portion.

該第1摺動係合部は、第1の軸線に平行に延びる固定軸(88)と、該固定軸の周りに回転自在に取り付けられたラジアルベアリング(90)を有し、該ラジアルベアリングが該平行な面の間に受け入れられるようにすることができる。   The first sliding engagement portion has a fixed shaft (88) extending in parallel with the first axis, and a radial bearing (90) rotatably attached around the fixed shaft. It can be received between the parallel surfaces.

また、上記とは逆に、第2動係合部が、回転支持体に取り付けられた研磨部材からケーシングに向かって突出するようにされ、第1摺動係合部が第2摺動係合部の両側を第2の軸線から略放射方向に直線状に延びて第2摺動係合部と摺動係合可能とされた平行な面を有するようにすることもできる。   Contrary to the above, the second dynamic engagement portion projects from the polishing member attached to the rotating support toward the casing, and the first sliding engagement portion is the second sliding engagement. Both sides of the part may have a parallel surface extending linearly in the radial direction from the second axis so as to be slidably engaged with the second sliding engagement part.

上記少なくとも1つの研磨部材(14−3)が、第2の軸線(60)から見て前方に延びる延長支持部材(100)と、該延長支持部材の先端部分に該第2の軸線と平行でケーシングから離れる方向に延びるよう取り付けられた細長い研磨材104とを有するようにすることができる。このようにすることにより、研磨材を当該研磨装置の使用者から見やすい位置に設定できると共に、他の部分よりも凹んだ部分の面を研磨するのが容易になる。より具体的には、上記少なくとも1つの研磨部材(14−3)が、回転支持体(22)に第2の軸線(60)の周りで回転可能に取り付けられた剛性基材(72−2)を有し、延長支持部材(100)が弾性を有するシート状部材から作られ、剛性基材(72−2)の下面に固定されて、剛性基材の先端縁より前方に延出した部分を有し、細長い研磨材(104)が該延出した部分に取り外し可能に固定されるようにすることができる。   The at least one polishing member (14-3) includes an extension support member (100) extending forward as viewed from the second axis (60), and a distal end portion of the extension support member parallel to the second axis. And an elongated abrasive 104 attached to extend away from the casing. By doing in this way, while being able to set an abrasive | polishing material in the position where it is easy to see from the user of the said grinding | polishing apparatus, it becomes easy to grind | polish the surface of the recessed part rather than another part. More specifically, the rigid substrate (72-2) in which the at least one polishing member (14-3) is rotatably attached to the rotary support (22) around the second axis (60). The extended support member (100) is made of a sheet-like member having elasticity, and is fixed to the lower surface of the rigid base material (72-2). And an elongated abrasive (104) can be removably secured to the extended portion.

また、少なくとも1つの研磨部材(14−3)が、回転支持体(22)に第2の軸線(60)の周りで回転可能に取り付けられた剛性基材(72−2)と、該剛性基材に固定されて前方に延びる弾性を有する延長支持部材(100)と、該延長支持部材の下面に取り外し可能に取り付けられ、下面に上記研磨面を有する三角形状の研磨材(104−2)とを有するようにすることができる。この研磨材を使用する場合には、三角形の1つの角部分を中心に研磨作業を行い、この角部分が摩耗したときには、他の角部分を用いて研磨作業を行うことができる。   In addition, at least one abrasive member (14-3) includes a rigid substrate (72-2) attached to the rotary support (22) so as to be rotatable about the second axis (60), and the rigid base. An extension support member (100) having elasticity that is fixed to the material and extending forward, and a triangular abrasive (104-2) that is detachably attached to the lower surface of the extension support member and has the polishing surface on the lower surface; It can be made to have. When this abrasive is used, the polishing operation is performed around one corner portion of the triangle, and when this corner portion is worn, the polishing operation can be performed using the other corner portion.

この場合、延長支持部材(72−2)が、前後方向に延びるリブ部(102)を有し、研磨材(104−2)が、三角形の各頂点から対向する辺に向かって延びるリブ係合部(同実施形態においては溝126として構成)を有し、研磨材をそのリブ係合部の1つを該リブに係合するようにして延長支持部材に取り付けるようにすることができる。リブ係合部をリブと係合するようにすることにより、該リブ係合部が延びる三角形の1つの角部が当該研磨装置の前方に向けられるように設定することができる。   In this case, the extended support member (72-2) has a rib portion (102) extending in the front-rear direction, and the abrasive (104-2) is a rib engagement extending from each vertex of the triangle toward the opposite side. A portion (configured as a groove 126 in the same embodiment), and the abrasive can be attached to the extended support member with one of its rib engaging portions engaged with the rib. By engaging the rib engaging portion with the rib, it can be set so that one corner of the triangle in which the rib engaging portion extends is directed to the front of the polishing apparatus.

本発明はまた、
ケーシング(48)と、
該ケーシングに取り付けられたモータ(16)と、
該ケーシングに取り付けられ、該モータの出力軸(18)に駆動連結され、第1の軸線(40)を中心に回転される回転支持体(22)と、
該回転支持体(22)における該第1の軸線(40)から離された位置において該第1の軸線(40)に平行に延びる第2の軸線(60)を中心に回転可能にして、該回転支持体に取り外し可能に取り付けられ、該第2の軸線(60)に直交する方向で延びる研磨面(12)を有する研磨部材(14−2、14−3、14−4)と、
を有する研磨装置(10)であって、
該第1の軸線(40)からの放射方向で該第2の軸線(60)よりも該第1の軸線(40)から離れた所定位置において該ケーシング(48)に設けられ、該ケーシングから、該回転支持体(22)に取り付けられた研磨部材(14−2、14−3、14−4)に向かって突出するようにされた第1摺動係合部(86)を有する研磨装置(10)における該研磨部材(14−2、14−3、14−4)であって、
該回転支持体(22)に取り付けられたときに、該第1摺動係合部(86)に摺動可能に係合して、該回転支持体(22)が回転されるときに、該第1摺動係合部(86)に対し、該第1摺動係合部(86)との係合部分と該第2の軸線(60)とを結ぶ線に沿って相対的に変位する第2摺動係合部(82、84)を有する研磨部材(14−2、14−3、14−4)を提供する。
The present invention also provides
A casing (48);
A motor (16) attached to the casing;
A rotating support (22) attached to the casing, drivingly connected to the output shaft (18) of the motor, and rotated about a first axis (40);
Enabling rotation about a second axis (60) extending parallel to the first axis (40) at a position away from the first axis (40) in the rotary support (22); An abrasive member (14-2, 14-3, 14-4) having an abrasive surface (12) removably attached to the rotating support and extending in a direction perpendicular to the second axis (60);
A polishing apparatus (10) comprising:
Provided in the casing (48) at a predetermined position farther from the first axis (40) than the second axis (60) in the radial direction from the first axis (40), from the casing; A polishing apparatus having a first sliding engagement portion (86) adapted to protrude toward the polishing member (14-2, 14-3, 14-4) attached to the rotary support (22). 10) the polishing member (14-2, 14-3, 14-4),
When attached to the rotating support (22), when the rotating support (22) is rotated by slidably engaging the first sliding engagement portion (86), The first sliding engagement portion (86) is relatively displaced along a line connecting the engagement portion with the first sliding engagement portion (86) and the second axis (60). An abrasive member (14-2, 14-3, 14-4) having a second sliding engagement portion (82, 84) is provided.

第2摺動係合部(82,84)は、第1摺動係合部(86)と摺動係合する、該第2の軸線(60)から放射方向に延びる摺動係合面を有するようにすることができる。   The second sliding engagement portion (82, 84) has a sliding engagement surface extending in a radial direction from the second axis (60) and slidingly engaged with the first sliding engagement portion (86). Can have.

また、当該研磨部材は、第2の軸線から見て前方に延びる延長支持部材(100)と、該延長支持部材の先端部分に第2の軸線(60)と平行でケーシングから離れる方向に延びるよう取り付けられ、先端に該研磨面を有する細長い研磨材(104)とを有するようにすることができる。   In addition, the polishing member extends in the direction away from the casing in parallel with the second axis (60) at the distal end portion of the extension support member (100) extending forward when viewed from the second axis. And an elongated abrasive material (104) attached and having the abrasive surface at the tip.

この場合、回転支持体(22)に第2の軸線(60)の周りで回転可能に取り付けられた剛性基材(72−2)を有し、該延長支持部材(100)が弾性を有するシート状部材から作られ、剛性基材の下面に固定されて、該剛性基材の先端縁より前方に延出した部分を有し、該細長い研磨材は該延出した部分に取り外し可能に固定されるようにすることができる。   In this case, a sheet having a rigid base (72-2) rotatably attached to the rotary support (22) around the second axis (60), the extended support member (100) having elasticity. Made of a member and fixed to the lower surface of the rigid base, and has a portion extending forward from the leading edge of the rigid base, and the elongated abrasive is removably fixed to the extended portion. You can make it.

また、当該研磨部材は、回転支持体(22)に第2の軸線(60)の周りで回転可能に取り付けられた剛性基材(72−2)と、該剛性基材に固定されて前方に延びる弾性を有する延長支持部材(100)と、該延長支持部材の下面に取り外し可能に取り付けられ、下面に該研磨面を有する三角形状の研磨材(104−2)とを有するようにすることができる。   In addition, the polishing member includes a rigid base (72-2) attached to the rotary support (22) so as to be rotatable around the second axis (60), and fixed to the rigid base in front. An extended support member (100) having elasticity that extends, and a triangular abrasive (104-2) that is removably attached to the lower surface of the extended support member and has the polishing surface on the lower surface. it can.

この場合、延長支持部材が、前後方向に延びるリブ部(102)を有し、該研磨材が、三角形の各頂点から対向する辺に向かって延びるリブ係合部(126)を有し、研磨材をそのリブ係合部の1つを該リブに係合するようにして該延長支持部材に取り付けるようにすることができる。   In this case, the extended support member has a rib portion (102) extending in the front-rear direction, and the abrasive has a rib engagement portion (126) extending from each vertex of the triangle toward the opposite side, and polishing. A material may be attached to the extended support member such that one of its rib engaging portions engages the rib.

以下、本発明の実施形態につき添付図面に基づき説明する。   Embodiments of the present invention will be described below with reference to the accompanying drawings.

本発明に係る研磨装置の一実施形態を示す縦断面側面図である。It is a longitudinal cross-sectional side view which shows one Embodiment of the grinding | polishing apparatus which concerns on this invention. 本発明に係る研磨装置の他の実施形態を示す縦断面側面図である。It is a longitudinal cross-sectional side view which shows other embodiment of the grinding | polishing apparatus which concerns on this invention. 図2の研磨装置のIII―III矢視から研磨部材の平面図である。FIG. 3 is a plan view of a polishing member as viewed in the direction of arrows III-III of the polishing apparatus in FIG. 2. 図2の研磨装置において研磨作業が行われるときの研磨部材の動きを示す図である。It is a figure which shows a motion of a grinding | polishing member when a grinding | polishing operation | work is performed in the grinding | polishing apparatus of FIG. 本発明に係る研磨装置の更に別の実施形態を示す図であり、(a)は縦断面側面図、(b)は同研磨装置の研磨部材を底面から見た図、(c)は同研磨部材を左方から見た図である。It is a figure which shows another embodiment of the grinding | polishing apparatus based on this invention, (a) is a longitudinal cross-sectional side view, (b) is the figure which looked at the grinding | polishing member of the grinding | polishing apparatus from the bottom face, (c) is the grinding | polishing It is the figure which looked at the member from the left. 図5の研磨装置における研磨材を示し,(a)は平面図、(b)は側面図である。The abrasive | polishing material in the grinding | polishing apparatus of FIG. 5 is shown, (a) is a top view, (b) is a side view. 本発明に係る研磨装置の更に異なる実施形態を示す図であり、(a)は縦断側面図、(b)は同研磨装置の前方部分を上から見た図である。It is a figure which shows further different embodiment of the grinding | polishing apparatus which concerns on this invention, (a) is a vertical side view, (b) is the figure which looked at the front part of the grinding | polishing apparatus from the top. 本発明に係る研磨装置の更に別の実施形態で用いられる研磨材を示す図であり、(a)は平面図、(b)は側面図である。It is a figure which shows the abrasive | polishing material used with another embodiment of the grinding | polishing apparatus based on this invention, (a) is a top view, (b) is a side view. 本発明に係る研磨装置の同実施形態を示す図であり、(a)は縦断側面図、(b)は同研磨装置の前方部分を上から見た図である。It is a figure which shows the same embodiment of the grinding | polishing apparatus which concerns on this invention, (a) is a vertical side view, (b) is the figure which looked at the front part of the grinding | polishing apparatus from the top.

図1には、本発明の一実施形態に係る研磨装置10の縦断側面図を示している。   In FIG. 1, the vertical side view of the grinding | polishing apparatus 10 which concerns on one Embodiment of this invention is shown.

この研磨装置10には、底面側から見た場合円板状の研磨面12を備えるディスク状の研磨部材14が装着されており、ベーン式エアモータ16と、該ベーン式エアモータの出力軸18に傘歯車19,20を介して駆動連結され、研磨部材14を支持するための回転支持体22とを有している。   The polishing apparatus 10 is equipped with a disk-shaped polishing member 14 having a disk-shaped polishing surface 12 when viewed from the bottom side, and a vane air motor 16 and an umbrella on an output shaft 18 of the vane air motor. A rotary support 22 for driving and connecting the gears 19 and 20 to support the polishing member 14 is provided.

ベーン式エアモータ16は、当業者には周知のものであり詳細な説明は省略するが、ラジアルベアリング24,26によって水平に回転自在に支持されたロータ及び該ロータに半径方向で変位可能に設けられた複数のベーンを備え、圧搾空気供給チューブ28を通して(図示しない)圧搾空気供給源から供給される圧搾空気により回転駆動されるようになっている。   The vane air motor 16 is well known to those skilled in the art and will not be described in detail. However, the vane air motor 16 is rotatably supported by the radial bearings 24 and 26 and is rotatably provided in the radial direction. A plurality of vanes are provided, and are driven to rotate by compressed air supplied from a compressed air supply source (not shown) through the compressed air supply tube 28.

圧搾空気供給チューブ28とベーン式エアモータ16との間には、ピボット30により枢着されたレバー32の操作により開閉操作が行なわれる開閉弁装置34が取り付けられている。この弁装置も当業者には周知のものであり、詳細な説明は省略する。   Between the compressed air supply tube 28 and the vane type air motor 16, an on-off valve device 34 that is opened and closed by an operation of a lever 32 pivotally attached by a pivot 30 is attached. This valve device is also well known to those skilled in the art and will not be described in detail.

回転支持体22は、それに固定された傘歯車20の軸線(以下、第1の軸線とする)40を中心に回転駆動されるようになっており、上下のラジアルベアリング44、46によって当該研磨装置のケーシング48内に回転自在に支持されている。   The rotary support 22 is driven to rotate around an axis (hereinafter referred to as a first axis) 40 of the bevel gear 20 fixed thereto, and the polishing apparatus is supported by upper and lower radial bearings 44 and 46. Is rotatably supported in the casing 48.

回転支持体22は、具体的には、上部のラジアルベアリング44によって支持された上部軸部50と、傘歯車20が固定された中間軸部52と、下部のラジアルベアリング46によって支持された下部軸部54と、下部軸部54に連結され研磨部材14を支持するための研磨部材支持部56とを有する。   Specifically, the rotary support 22 includes an upper shaft portion 50 supported by the upper radial bearing 44, an intermediate shaft portion 52 to which the bevel gear 20 is fixed, and a lower shaft supported by the lower radial bearing 46. And a polishing member support 56 connected to the lower shaft portion 54 and supporting the polishing member 14.

研磨部材支持部56は、全体としては円柱状とされており、その底部から上方に延びる研磨部材支持凹部58を有している。該研磨部材支持凹部58は、第1の軸線40から間隔Aをあけて平行とされた第2の軸線60を中心にした円形の断面を有し、その円筒状内壁面64にはラジアルベアリング62が取り付けられており、研磨部材14は該ラジアルベアリング62によって回転自在に支持されている。   The polishing member support portion 56 has a columnar shape as a whole, and has a polishing member support recess 58 extending upward from the bottom thereof. The polishing member support recess 58 has a circular cross section centered on a second axis 60 that is parallel to the first axis 40 with a distance A, and a radial bearing 62 is provided on the cylindrical inner wall surface 64 thereof. The polishing member 14 is rotatably supported by the radial bearing 62.

具体的には、円筒状内壁面64がラジアルベアリング62のアウターレースとされ、該ラジアルベアリングのインナーレースとしては第2の軸線60に同軸状にされた筒状レース部材66が設けられ、該筒状レース部材66の内周面にネジ68が切られており、研磨部材14はその頂面中央を通して上方に延びるボルト70を該ネジ68にネジ係合することにより回転支持部材に連結固定されるようになっている。   Specifically, the cylindrical inner wall surface 64 is used as an outer race of the radial bearing 62, and a cylindrical race member 66 coaxial with the second axis 60 is provided as the inner race of the radial bearing. A screw 68 is cut on the inner peripheral surface of the lace member 66, and the polishing member 14 is connected and fixed to the rotary support member by screwing a bolt 70 extending upward through the center of the top surface of the polishing member 14 to the screw 68. It is like that.

この研磨装置においてレバー32の操作により弁装置34が開かれ、ベーン式エアモータ16が供給される圧搾空気により回転されると、回転支持体22が第1の軸線40を中心として回転駆動される。これにより、第2の軸線60は第1の軸線40を中心に回転(公転)され、これに伴い、研磨部材14が該第2の軸線60を中心に回転(自転)されるようになる。従って、この研磨部材14の研磨面12を被研磨物の面に適度な圧力で押し付けることにより、公転及び自転を伴った研磨面の動きにより研磨が行なわれる。   In this polishing apparatus, when the valve device 34 is opened by the operation of the lever 32 and is rotated by the compressed air supplied to the vane air motor 16, the rotary support 22 is driven to rotate about the first axis 40. As a result, the second axis 60 is rotated (revolved) about the first axis 40, and the polishing member 14 is rotated (rotated) about the second axis 60 accordingly. Therefore, by pressing the polishing surface 12 of the polishing member 14 against the surface of the object to be polished with an appropriate pressure, polishing is performed by the movement of the polishing surface accompanied by revolution and rotation.

図2は、図1の研磨装置10において、ディスク状の研磨部材14を別の研磨部材14−2に取り替えた状態を示している。この研磨部材14−2は、図2のIII-III線に沿って見た場合、図3に示すように長方形状で、全体としてはソリ状に形成されている。   FIG. 2 shows a state in which the disk-shaped polishing member 14 is replaced with another polishing member 14-2 in the polishing apparatus 10 of FIG. When viewed along the line III-III in FIG. 2, the polishing member 14-2 has a rectangular shape as shown in FIG.

この研磨部材14−2は、具体的には、ボルト70によって筒状レース部材66に固定された長方形状の剛性基材72と、該剛性基材の底面に取り付けられたスポンジ材などからなる緩衝部材74と、該緩衝部材74の底面に面ファスナによって取り外し可能に取り付けられたシート状研磨材76とからなる。   Specifically, the polishing member 14-2 includes a rectangular rigid base material 72 fixed to the cylindrical lace member 66 with bolts 70, and a shock absorber made of a sponge material attached to the bottom surface of the rigid base material. It consists of a member 74 and a sheet-like abrasive 76 removably attached to the bottom surface of the buffer member 74 with a surface fastener.

図3に示すように、剛性基材72には、ボルト70を通す挿通孔78が形成されており、当該剛性基材72がボルト70によって回転支持部材22に固定された状態では、該ボルト70の長手方向軸線、従って挿通孔78の長手方向軸線78−1は上述の第2の軸線60と整合されるようになる。また、該剛性基材72の上面には挿通孔78の長手方向軸線78−1(従って第2の軸線)から放射状に延びる1つの線80に沿って形成された細長溝82が形成されており、該細長溝82の両側縁に沿って一対の突起84が設けられている。   As shown in FIG. 3, an insertion hole 78 through which the bolt 70 is passed is formed in the rigid base material 72. When the rigid base material 72 is fixed to the rotation support member 22 by the bolt 70, the bolt 70. , And thus the longitudinal axis 78-1 of the insertion hole 78 is aligned with the second axis 60 described above. Further, an elongated groove 82 formed along one line 80 extending radially from the longitudinal axis 78-1 (and hence the second axis) of the insertion hole 78 is formed on the upper surface of the rigid base 72. A pair of protrusions 84 are provided along both side edges of the elongated groove 82.

これら細長溝82及び一対の突起84は、研磨部材14、14−2を支持するラジアルベアリング62に隣接して研磨装置10のケーシング48に取り付けられた第1摺動係合部材86と摺動係合されるようになっている。該摺動係合部材86は、具体的には、研磨部材14-2に面するケーシングの底面から上方に挿入固定されたボルト状の固定軸88の下端部にラジアルベアリング90を取り付けて形成されており、この固定軸の下端部が一対の突起84の間を延びて細長溝82内に挿入された状態とされている。   The elongated groove 82 and the pair of protrusions 84 are in sliding contact with a first sliding engagement member 86 attached to the casing 48 of the polishing apparatus 10 adjacent to the radial bearing 62 that supports the polishing members 14 and 14-2. It is supposed to be combined. Specifically, the sliding engagement member 86 is formed by attaching a radial bearing 90 to a lower end portion of a bolt-shaped fixed shaft 88 inserted and fixed upward from the bottom surface of the casing facing the polishing member 14-2. The lower end portion of the fixed shaft extends between the pair of protrusions 84 and is inserted into the elongated groove 82.

この状態でベーン型エアモータが作動され、回転支持体22が回転されると、ボルト70,従って、その長手軸線と整合されている第2の軸線60は、回転支持体22の回転軸線と整合されている第1の軸線40の周りを回転(公転)されることになる。図4は、それに伴う研磨部材14-2の動きを示している。図1に示した如きディスク状の研磨部材14が取り付けられている場合には、前述したごとく、研磨部材14は上記公転と共に、第2の軸線の周りで回転(自転)することになるが、研磨部材14-2は細長溝82及び一対の突起84を備えており、これが当該研磨装置のケーシング48から突出する摺動係合部材86のラジアルベアリング90と係合しているために、第2の軸線60の周りでの回転(自転)が阻止される。この場合、第2の軸線60は第1の軸線40の周りで公転するので、該第2の軸線は180度回転したときに(図4のd)、回転が始まる前のときの位置(図4のa)から第2の軸線60の第1の軸線40からの偏芯量Aの2倍の2Aだけ変位し、360度回転したときに2Aだけ戻る動きを生じる。図2及び図3に示す例では、第1の軸線40と摺動係合部材86とは当該研磨装置の前後方向(図1及び図2における左右方向)で整合されているので、研磨部材14-2は2Aの距離を前後動することになる。更に、第2の軸線60は公転に伴い、前後方向に対して横方向にも変位することにもなるので、研磨部材14-2は、摺動係合部材86が細長溝82及び一対の突起84と係合している部分を中心に揺動されることになる。   When the vane type air motor is operated in this state and the rotary support 22 is rotated, the bolt 70, and therefore the second axis 60 aligned with the longitudinal axis thereof, is aligned with the rotary axis of the rotary support 22. The first axis 40 is rotated (revolved). FIG. 4 shows the movement of the polishing member 14-2. When the disk-shaped polishing member 14 as shown in FIG. 1 is attached, as described above, the polishing member 14 rotates (rotates) around the second axis along with the above revolution. The polishing member 14-2 includes an elongated groove 82 and a pair of protrusions 84, which are engaged with the radial bearing 90 of the sliding engagement member 86 protruding from the casing 48 of the polishing apparatus. Rotation around the axis 60 (rotation) is prevented. In this case, since the second axis 60 revolves around the first axis 40, when the second axis rotates 180 degrees (d in FIG. 4), the position before the rotation starts (FIG. 4a), the second axis 60 is displaced by 2A, which is twice the eccentric amount A from the first axis 40, and moves back by 2A when rotated 360 degrees. In the example shown in FIGS. 2 and 3, the first axis 40 and the sliding engagement member 86 are aligned in the front-rear direction of the polishing apparatus (the left-right direction in FIGS. 1 and 2). -2 moves back and forth a distance of 2A. Further, since the second axis 60 is displaced in the lateral direction with respect to the front-rear direction as it revolves, the polishing member 14-2 has the sliding engagement member 86 formed of the elongated groove 82 and the pair of protrusions. It is swung around the part engaged with 84.

図1に示した研磨部材14を自転公転させるようにした場合には、被研磨面が広い場合の研磨に適しており、図2に示した如き研磨部材14−2を前後動及び揺動させるようにした場合は、研磨面の動きは小さく、従って、狭い部分や角隅部分での平面の研磨を好適に行うことができる。   When the polishing member 14 shown in FIG. 1 is rotated and revolved, it is suitable for polishing when the surface to be polished is wide, and the polishing member 14-2 as shown in FIG. In such a case, the movement of the polishing surface is small, and therefore it is possible to suitably perform polishing of a flat surface in a narrow portion or a corner portion.

図5乃至図7は、更に異なる形態の研磨部材14−3を取り付けた例を示している。この研磨部材では図2に示した研磨部材における剛性基材72と同様の剛性基材72−2を有している。この剛性基材72−2は、ボルト70によって筒状レース部材66に固定されており、細長溝82及び該細長溝の両側縁に沿って形成された一対の突起84を有しており、これら細長溝82及び一対の突起84に研磨装置のケーシングから延びた摺動係合部材86のラジアルベアリング90が係合するようにされている。従って、回転支持体が回転されたときの剛性基材72−2の動きは、上述の剛性基材72と同じである。該剛性基材72−2は、底面から見た場合、図5の(b)に示しように、前方に向かって先細りとなっている。   FIGS. 5 to 7 show examples in which different types of polishing members 14-3 are attached. This polishing member has a rigid base material 72-2 similar to the rigid base material 72 in the polishing member shown in FIG. The rigid base material 72-2 is fixed to the cylindrical race member 66 by bolts 70, and has a long and narrow groove 82 and a pair of protrusions 84 formed along both side edges of the long and narrow groove. A radial bearing 90 of a sliding engagement member 86 extending from the casing of the polishing apparatus is engaged with the elongated groove 82 and the pair of protrusions 84. Therefore, the movement of the rigid base material 72-2 when the rotary support is rotated is the same as that of the rigid base material 72 described above. When viewed from the bottom, the rigid base material 72-2 is tapered toward the front as shown in FIG.

剛性基材72−2の下面には、ボルト70のヘッドによって板状の延長支持部材100が固定されている。具体的には、この延長支持部材100は、弾性を有するシート状材から構成され、剛性基材72−2の下面に前後方向で延びるように形成されている浅い溝103内に嵌合されて、剛性基材72−2の先端縁から前方に延びている。延長支持部材100の幅方向中央に沿って、下方に湾曲して形成されたリブ部102が設けられている。また、このリブ部102の先端に近い部分には、研磨材104(図6、図7)を取り付けるためのネジ114を通すための穴108が形成されている。研磨材104は、図6に示すごとく、剛性円柱部材106と、該剛性円柱部材106の下面に取り付けられたスポンジ等からなる緩衝部材109と、該緩衝部材の下面に面ファスナによって取り外し可能に取り付けられた研磨シート110とからなり、剛性円柱部材106の上面には直径方向で延びる溝112が形成されており、該溝112が延長支持部材100のリブ部102と嵌合するようにし、図7に示すようにネジ114を延長支持部材100に形成した穴108を通して研磨部材の剛性円柱部材106の上面に設けたネジ穴120にネジ係合して固定されている。図7の(b)から分かるように、延長支持部材100もその先端部分が先細りとされており、当該研磨装置を手に持って作業する作業者が上方から研磨材104を確認できるようになっている。   A plate-like extended support member 100 is fixed to the lower surface of the rigid base material 72-2 by a head of a bolt 70. Specifically, the extended support member 100 is formed of a sheet material having elasticity, and is fitted into a shallow groove 103 formed on the lower surface of the rigid base material 72-2 so as to extend in the front-rear direction. The front end of the rigid base material 72-2 extends forward. A rib portion 102 that is curved downward is provided along the center in the width direction of the extended support member 100. Further, a hole 108 for passing a screw 114 for attaching the abrasive 104 (FIGS. 6 and 7) is formed in a portion near the tip of the rib portion 102. As shown in FIG. 6, the abrasive 104 is detachably attached to the lower surface of the rigid cylindrical member 106, a shock absorbing member 109 made of a sponge or the like attached to the lower surface of the rigid cylindrical member 106, and a surface fastener. A groove 112 extending in the diametrical direction is formed on the upper surface of the rigid cylindrical member 106, and the groove 112 is fitted to the rib portion 102 of the extension support member 100. FIG. As shown in FIG. 4, the screw 114 is fixed by being screwed into a screw hole 120 provided on the upper surface of the rigid cylindrical member 106 of the polishing member through a hole 108 formed in the extended support member 100. As can be seen from FIG. 7 (b), the extended support member 100 also has a tapered tip so that an operator who holds the polishing apparatus in his hand can check the abrasive 104 from above. ing.

図5乃至図7に示す研磨部材14−3は、被研磨面が他の部分よりも凹んだ狭い部分を研磨することに適している。   The polishing member 14-3 shown in FIGS. 5 to 7 is suitable for polishing a narrow portion where the surface to be polished is recessed more than other portions.

図8及び図9には、図5乃至図7に示したものとは異なる形態の研磨材104−2が取り付けられる場合を示している。すなわち、この研磨材は、剛性三角形部材121と、該剛性三角形部材121の下面に取り付けられたスポンジ等からなる緩衝部材122と、該緩衝部材122の下面に面ファスナで取り外し可能に取り付けられたシート状研磨材124とを有している。剛性三角形部材121の上面には、三角形の各頂点から対向する辺に向かって延びる溝126が相互に交差するように設けられており、各溝126の端部近くにはネジ穴128が形成されている。この研磨材104−2の取付けは上述の研磨材104と同じく、1つの溝126を延長支持部材100のリブ部102に嵌合するようにしてネジ114で固定する。   8 and 9 show a case where an abrasive 104-2 having a different form from that shown in FIGS. 5 to 7 is attached. That is, the abrasive is a rigid triangular member 121, a cushioning member 122 made of sponge or the like attached to the lower surface of the rigid triangular member 121, and a sheet removably attached to the lower surface of the cushioning member 122 with a surface fastener. Shaped abrasive 124. On the upper surface of the rigid triangular member 121, grooves 126 extending from each vertex of the triangle toward the opposite side are provided so as to intersect each other, and screw holes 128 are formed near the ends of the respective grooves 126. ing. As with the above-described abrasive material 104, the abrasive material 104-2 is fixed by screws 114 so that one groove 126 is fitted to the rib portion 102 of the extended support member 100.

この三角形の研磨材104-2は、角隅部の平面など、狭い部分での研磨に適している。研磨作業によってシート状研磨材124の1つの角部分が摩耗したときには、ネジ114を外し、他の角部分が前端となるように付け替える。   This triangular abrasive 104-2 is suitable for polishing in a narrow portion such as a flat corner surface. When one corner portion of the sheet-like abrasive 124 is worn by the polishing operation, the screw 114 is removed and replaced so that the other corner portion becomes the front end.

以上、本発明に係る研磨装置の実施形態につき説明したが、本発明はこれらに限定されるものではなく、例えば、上述の実施形態では、摺動係合部材86をケーシング48の方に取り付けたが、研磨部材の方に取り付け、ケーシングの方に細長溝などをもうけるようにすることができる。また、第2摺動係合部材として細長溝と一対の突起とから構成されるものを示したが、細長溝だけで構成したり、一対の突起だけから構成したりすることができる。   Although the embodiments of the polishing apparatus according to the present invention have been described above, the present invention is not limited to these embodiments. For example, in the above-described embodiment, the sliding engagement member 86 is attached toward the casing 48. However, it can be attached to the polishing member and provided with an elongated groove or the like on the casing. Moreover, although what comprised the elongate groove | channel and a pair of protrusion was shown as a 2nd sliding engagement member, it can comprise only an elongate groove, or can comprise only a pair of protrusion.

研磨装置10;研磨面12;研磨部材14;研磨部材14−2;研磨部材14−3;出力軸18;傘歯車19,20;回転支持体22;ラジアルベアリング24,26;圧搾空気供給チューブ28;ピボット30;レバー32;開閉弁装置34;第1の軸線40;ラジアルベアリング44、46;ケーシング48;上部軸部50;中間軸部52;下部軸部54;研磨部材支持部56;研磨部材支持凹部58;間隔A;第2の軸線60;;ラジアルベアリング62;円筒状内壁面64;筒状レース部材66;ネジ68;ボルト70;剛性基材72;剛性基材72−2;緩衝部材74;シート状研磨材76;挿通孔78;長手方向軸線78−1;線80;細長溝82;突起84;摺動係合部材86;固定軸88;ラジアルベアリング90;延長支持部材100;リブ部102;溝103;研磨材104;研磨材104−2;剛性円柱部材106;穴108;緩衝部材109;研磨シート110;溝112;ネジ114;ネジ穴120;剛性三角形部材121;緩衝部材122;シート状研磨材124;溝126;ネジ穴128   Polishing device 10; Polishing surface 12; Polishing member 14; Polishing member 14-2; Polishing member 14-3; Output shaft 18; Bevel gears 19 and 20; Rotating support 22; Radial bearings 24 and 26; Pivot 30; lever 32; on-off valve device 34; first axis 40; radial bearings 44 and 46; casing 48; upper shaft portion 50; intermediate shaft portion 52; lower shaft portion 54; polishing member support portion 56; Support recess 58; spacing A; second axis 60 ;; radial bearing 62; cylindrical inner wall surface 64; cylindrical race member 66; screw 68; bolt 70; rigid substrate 72; 74; sheet abrasive 76; insertion hole 78; longitudinal axis 78-1; line 80; elongate groove 82; projection 84; sliding engagement member 86; fixed shaft 88; Rib 102; Groove 103; Abrasive material 104; Abrasive material 104-2; Rigid cylindrical member 106; Hole 108; Buffer member 109; Polishing sheet 110; Groove 112; Screw 114; Screw hole 120; Buffer member 122; sheet-like abrasive 124; groove 126; screw hole 128;

Claims (15)

ケーシングと、
該ケーシングに取り付けられたモータと、
該ケーシングに取り付けられ、該モータの出力軸に駆動連結され、第1の軸線を中心に回転される回転支持体と、
該回転支持体における該第1の軸線から離された位置において該第1の軸線に平行に延びる第2の軸線を中心に回転可能にして、該回転支持体に選択的に取り外し可能に取り付けられる少なくとも2つの種類の研磨部材であって、該回転支持体に取り付けられた状態において、該第2の軸線に直交する方向で延びる研磨面を有する少なくとも2つの種類の研磨部材と、
を有し、
該ケーシングは、該回転支持体の回転に伴って該第1の軸線の周りで回転される該第2の軸線よりも該第1の軸線からの放射方向で該第1の軸線から離れた位置に設けられた第1摺動係合部を有し、
該研磨部材のうちの少なくとも1つの研磨部材が、該回転支持体に取り付けられたときに、該第1摺動係合部に摺動可能に係合する第2摺動係合部であって、該回転支持体が回転されて、該第2の軸線が該第1の軸線を中心に回転されるときに、該第1摺動係合部との係合部分と該第2の軸線とを結ぶ線に沿って当該研磨部材が変位しながら該係合部分の周りで枢動するのを許容する第2摺動係合部を有し、
該研磨部材のうちの少なくとも他の1つの研磨部材が、該回転支持体に取り付けられたときに、該第1摺動係合部に係合しないようにされている
ことを特徴とする研磨装置。
A casing,
A motor attached to the casing;
A rotating support attached to the casing, drivingly connected to the output shaft of the motor, and rotated about a first axis;
The rotary support is rotatable about a second axis extending parallel to the first axis at a position away from the first axis, and is selectively removably attached to the rotary support. At least two types of polishing members having at least two types of polishing members having a polishing surface extending in a direction perpendicular to the second axis when attached to the rotary support;
Have
The casing is located farther from the first axis in a radial direction from the first axis than the second axis rotated around the first axis as the rotary support rotates. A first sliding engagement portion provided on the
A second sliding engagement portion that slidably engages with the first sliding engagement portion when at least one of the polishing members is attached to the rotary support; When the rotation support is rotated and the second axis is rotated about the first axis, the engagement portion with the first sliding engagement portion and the second axis are A second sliding engagement portion that allows the abrasive member to pivot about the engagement portion while being displaced along a line connecting
A polishing apparatus, wherein at least one other polishing member of the polishing members is not engaged with the first sliding engagement portion when attached to the rotary support. .
該第1摺動係合部が、該ケーシングから、該回転支持体に取り付けられた研磨部材に向かって突出するようにされ、該第2摺動係合部が該第2の軸線から放射方向に直線状に延びて該第1摺動係合部と摺動係合するようにされている請求項1に記載の研磨装置。   The first sliding engagement portion protrudes from the casing toward an abrasive member attached to the rotary support, and the second sliding engagement portion is radial from the second axis. The polishing apparatus according to claim 1, wherein the polishing apparatus is linearly extended to slide-engage with the first sliding engagement portion. 該第2摺動係合部が、該第1摺動係合部の両側を、該第2の軸線から略放射方向に延び、該第1摺動係合部と係合可能とされた平行な面を有している請求項2に記載の研磨装置。   The second sliding engagement portion extends on both sides of the first sliding engagement portion in a substantially radial direction from the second axis, and is parallel to be engageable with the first sliding engagement portion. The polishing apparatus according to claim 2, wherein the polishing apparatus has a smooth surface. 該第1摺動係合部が、該第1の軸線に平行に延びる固定軸と、該固定軸の周りに回転自在に取り付けられたラジアルベアリングを有し、該ラジアルベアリングが該平行な面の間に受け入れられている請求項3に記載の研磨装置。   The first sliding engagement portion has a fixed shaft extending in parallel with the first axis, and a radial bearing rotatably mounted around the fixed shaft, and the radial bearing is disposed on the parallel surface. 4. A polishing apparatus according to claim 3, which is received in between. 該第2摺動係合部が、該回転支持体に取り付けられた研磨部材から該ケーシングに向かって突出するようにされ、該第1摺動係合部が該第2摺動係合部の両側を該第2の軸線から略放射方向に直線状に延びて該第2摺動係合部と摺動係合可能とされた平行な面を有している請求項1に記載の研磨装置。   The second sliding engagement portion protrudes from the polishing member attached to the rotary support toward the casing, and the first sliding engagement portion is formed on the second sliding engagement portion. 2. The polishing apparatus according to claim 1, wherein both sides have parallel surfaces extending linearly in a radial direction from the second axis so as to be slidably engaged with the second sliding engagement portion. . 該少なくとも1つの研磨部材が、該第2の軸線から見て前方に延びる延長支持部材と、該延長支持部材の先端部分に該第2の軸線と平行で該ケーシングから離れる方向に延びるよう取り付けられた細長い研磨材とを有する請求項1乃至5のいずれかに記載の研磨装置。   The at least one polishing member is attached to an extension support member extending forward as viewed from the second axis, and attached to a distal end portion of the extension support member so as to extend in a direction away from the casing in parallel to the second axis. The polishing apparatus according to claim 1, further comprising an elongated abrasive. 該少なくとも1つの研磨部材が、該回転支持体に該第2の軸線の周りで回転可能に取り付けられた剛性基材を有し、該延長支持部材が弾性を有するシート状部材から作られ、該剛性基材の下面に固定されて、該剛性基材の先端縁より前方に延出した部分を有し、該細長い研磨材は該延出した部分に取り外し可能に固定されるようにした請求項6に記載の研磨装置。   The at least one abrasive member has a rigid substrate rotatably attached to the rotary support about the second axis, and the extended support member is made of an elastic sheet-like member; The thin abrasive is fixed to the lower surface of the rigid base and extends forward from the leading edge of the rigid base, and the elongated abrasive is detachably fixed to the extended part. 6. The polishing apparatus according to 6. 該少なくとも1つの研磨部材が、該回転支持体に該第2の軸線の周りで回転可能に取り付けられた剛性基材と、該剛性基材に固定されて前方に延びる弾性を有する延長支持部材と、該延長支持部材の下面に取り外し可能に取り付けられ、下面に該研磨面を有する三角形状の研磨材とを有する請求項1乃至5のいずれかに記載の研磨装置。   A rigid base member rotatably attached to the rotary supporter about the second axis; and an extended support member having elasticity that is fixed to the rigid base member and extends forward. The polishing apparatus according to claim 1, further comprising a triangular abrasive that is removably attached to the lower surface of the extended support member and has the polishing surface on the lower surface. 該延長支持部材が、前後方向に延びるリブを有し、該研磨材が、三角形の各頂点から対向する辺に向かって延びるリブ係合部を有し、研磨材をそのリブ係合部の1つを該リブに係合するようにして該延長支持部材に取り付けるようにした請求項8に記載の研磨装置。   The extended support member has a rib extending in the front-rear direction, the abrasive has a rib engaging portion extending from each vertex of the triangle toward the opposite side, and the abrasive is attached to one of the rib engaging portions. 9. The polishing apparatus according to claim 8, wherein one is attached to the extended support member so as to engage with the rib. ケーシングと、
該ケーシングに取り付けられたモータと、
該ケーシングに取り付けられ、該モータの出力軸に駆動連結され、第1の軸線を中心に回転される回転支持体と、
該回転支持体における該第1の軸線から離された位置において該第1の軸線に平行に延びる第2の軸線を中心に回転可能にして、該回転支持体に選択的に取り外し可能に取り付けられ、該第2の軸線に直交する方向で延びる研磨面を有する研磨部材と、
を有する研磨装置であって、
該第1の軸線からの放射方向で該第2の軸線よりも該第1の軸線から離れた所定位置において該ケーシングに設けられ、該ケーシングから、該回転支持体に取り付けられた研磨部材に向かって突出するようにされた第1摺動係合部を有する研磨装置における該研磨部材であって、
該回転支持体に取り付けられたときに、該第1摺動係合部に摺動可能に係合して、該回転支持体が回転されるときに、該第1摺動係合部に対し、該第1摺動係合部との係合部分と該第2の軸線とを結ぶ線に沿って相対的に変位する第2摺動係合部を有する研磨部材。
A casing,
A motor attached to the casing;
A rotating support attached to the casing, drivingly connected to the output shaft of the motor, and rotated about a first axis;
The rotary support is rotatable about a second axis extending parallel to the first axis at a position away from the first axis, and is selectively removably attached to the rotary support. A polishing member having a polishing surface extending in a direction perpendicular to the second axis;
A polishing apparatus comprising:
A radial direction from the first axis is provided in the casing at a predetermined position farther from the first axis than the second axis, and from the casing toward the polishing member attached to the rotary support. A polishing member in a polishing apparatus having a first sliding engagement portion which is adapted to protrude,
When attached to the rotary support, it is slidably engaged with the first sliding engagement portion, and when the rotary support is rotated, A polishing member having a second sliding engagement portion that is relatively displaced along a line connecting the engagement portion with the first sliding engagement portion and the second axis.
該第2摺動係合部が、該第1摺動係合部と摺動係合する、該第2の軸線から放射方向に延びる摺動係合面を有する請求項10に記載の研磨部材。   The abrasive member according to claim 10, wherein the second sliding engagement portion has a sliding engagement surface extending in a radial direction from the second axis, and is in sliding engagement with the first sliding engagement portion. . 該第2の軸線から見て前方に延びる延長支持部材と、該延長支持部材の先端部分に該第2の軸線と平行で該ケーシングから離れる方向に延びるよう取り付けられ、先端に該研磨面を有する細長い研磨材とを有する請求項10又は11に記載の研磨部材。   An extension support member extending forward as viewed from the second axis, and attached to a tip portion of the extension support member so as to extend in a direction away from the casing in parallel to the second axis, and having the polishing surface at the tip The abrasive member according to claim 10 or 11, comprising an elongated abrasive. 該回転支持体に該第2の軸線の周りで回転可能に取り付けられた剛性基材を有し、該延長支持部材が弾性を有するシート状部材から作られ、該剛性基材の下面に固定されて、該剛性基材の先端縁より前方に延出した部分を有し、該細長い研磨材は該延出した部分に取り外し可能に固定されるようにした請求項12に記載の研磨部材。   The rotating support has a rigid base mounted rotatably around the second axis, and the extended supporting member is made of a sheet-like member having elasticity, and is fixed to the lower surface of the rigid base The abrasive member according to claim 12, further comprising a portion extending forward from a leading edge of the rigid base material, wherein the elongated abrasive material is detachably fixed to the extended portion. 該回転支持体に該第2の軸線の周りで回転可能に取り付けられた剛性基材と、該剛性基材に固定されて前方に延びる弾性を有する延長支持部材と、該延長支持部材の下面に取り外し可能に取り付けられ、下面に該研磨面を有する三角形状の研磨材とを有する請求項1又は11に記載の研磨部材。   A rigid base member rotatably attached to the rotary support member about the second axis; an extension support member fixed to the rigid base member and having elasticity extending forward; and a lower surface of the extension support member. The abrasive member according to claim 1 or 11, further comprising a triangular abrasive having a polishing surface attached to a lower surface of the abrasive member. 該延長支持部材が、前後方向に延びるリブを有し、該研磨材が、三角形の各頂点から対向する辺に向かって延びるリブ係合部を有し、研磨材をそのリブ係合部の1つを該リブに係合するようにして該延長支持部材に取り付けるようにした請求項14に記載の研磨部材。   The extended support member has a rib extending in the front-rear direction, the abrasive has a rib engaging portion extending from each vertex of the triangle toward the opposite side, and the abrasive is attached to one of the rib engaging portions. 15. The polishing member according to claim 14, wherein one is attached to the extended support member so as to engage with the rib.
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