JP2010262886A - Mounting structure of sheath heater, sheath heater used for the mounting structure, and mounting method of sheath heater - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technology related to mounting of a sheath heater in which heat dissipation of an extended part from the heated part to the end side can be promoted and flexibility of that part is not damaged, and superior workability can be obtained. <P>SOLUTION: This has a structure in which the sheath heater 1 that is constituted by housing an exothermic wire in at least a part inside a metallic outer cylinder 10 is mounted on a vacuum device 9 which becomes a heating objective. The exothermic portion 3 having the exothermic wire of the sheath heater 1 is fixed to a uniform hot plate 91 that is the heated part 5 of the vacuum device 9, a metallic coil spring 2 of a different member is installed along a prescribed region R in the axial direction on the outer cylinder 10 of the sheath heater 1 terminal side extended from the uniform hot plate 91 (heated part 5), and by this, the heat dissipation of the extension part 4 where reduction in the surface temperature is desired can be promoted. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention provides, for example, a mounting structure in which a sheath type heater such as a micro heater, a sheathed heater, or a cartridge heater used for heat insulation of a pipe, heating of a vacuum device, or the like is attached to a device such as a pipe to be heated, The present invention relates to a sheath type heater used for a structure and a mounting method.

  A sheath type heater such as a micro heater has a flexible structure in which a heating wire is covered with an outer tube (metal sheath) through an insulating powder such as MgO, and the end side of the heating portion having the heating wire. The non-heat generating part connected to the lead terminal is continuous and connected to an external power source or the like. Such sheath-type heaters are used for heat tracing of various pipes and film forming heaters for vacuum devices used for film formation of PDP and liquid crystal glass substrates. The heating part of the heater is fixed to a heating soaking plate (heating part) in the apparatus, and the extended part on the terminal side is arranged at an appropriate position while being bent and deformed appropriately to an external power source (see, for example, Patent Document 1). .)

  By the way, the length of the heat generating part having the heat generating wire of the sheath type heater is usually set longer than the length fixed to the heating part, and the surplus part of the heat generating part is also provided at the terminal part extending from the heating part. There is a long part. The end-side portion extending from the heating portion is a portion that does not need to be heated, but the extension portion becomes high temperature due to the presence of such an extra length portion. Therefore, it is necessary to take care to avoid the influence of heat on other devices when placing the external power supply, and there is a problem that the degree of freedom in construction is limited. Even if the length of the heat generating part is limited to the length fixed to the heating part, the same problem arises because the heat of the heat generating part is also transferred to the non-heat generating part through the outer cylinder.

  In particular, in the case of a film forming heater of a vacuum apparatus, the extra length of the heat generating part extended from the heat equalizing plate serving as a heating part rises to the control temperature or higher, which may lead to a disconnection in the worst case. Furthermore, in the case of a vacuum apparatus, there is a seal part for guiding the heater end side extending from the heat equalizing plate to the outside of the apparatus. However, since the extension part on the end side becomes high temperature, the seal part has heat resistance. It was necessary to use an expensive material having

  As a means for solving such a problem of heat in the extended portion, it is conceivable to attach a heat radiating fin to the outer surface of the outer cylinder serving as the extended portion by welding or caulking. However, it is difficult to attach such a radiating fin after fixing the heater to a heating part in the apparatus (retrofitting), and it is necessary to attach it in advance. Therefore, it becomes impossible to arrange the extended portion in an appropriate position while freely bending and deforming to the external power source. Further, instead of providing the heat radiating fins, it is also conceivable to increase the heat radiation amount by increasing the thickness of the outer cylinder of the extended portion. However, if the outer cylinder is made thicker in this way, the flexibility is lost, and the degree of freedom of arrangement work is reduced as described above. Although it is conceivable to perform coating or coating to promote heat dissipation on the surface of the outer cylinder of the extended portion, there is no material that can withstand high temperatures of several hundred degrees.

JP 2008-153151 A

  Therefore, in view of the above-mentioned situation, the present invention intends to solve the problem that it is possible to promote the heat radiation of the extended portion on the distal side from the heating portion, and the flexibility of the portion is not hindered and the work is good. It is in the point which provides the technique regarding attachment of the sheath type heater from which the property is acquired.

  In order to solve the above-mentioned problem, the present invention is an attachment structure in which a sheath type heater in which a heating wire is housed in at least a part of a metal outer cylinder is attached to a device to be heated, The heat generating part having the heat generating wire of the sheath type heater is fixed to the heating part of the device, and the outer cylinder on the sheath type heater terminal side extended from the heating part is provided with a metal as a separate member over a predetermined region in the axial direction. Provided is a sheath type heater mounting structure characterized in that a coil spring is provided.

  Here, it is preferable that the inner surface of the metal coil spring is in close contact with the outer cylinder of the sheath type heater.

  The present invention also provides a sheath-type heater in which a metal coil spring as a separate member is provided on the outer cylinder on the terminal side that will be extended from the heating portion of the apparatus as a sheath-type heater used in the mounting structure. .

  Further, the present invention is an attachment method for attaching a sheath type heater in which a heating wire is housed in at least a part of a metal outer cylinder to a device to be heated, the heating type wire having the heating wire of the sheath type heater. A heat generating part is fixed to the heating part of the device, and a metal coil spring for promoting heat dissipation, which is a separate member over a predetermined region in the axial direction, is attached to the outer cylinder on the distal end side of the sheath type heater extending from the heating part. There is also provided a method for attaching a sheath type heater, characterized by being provided.

  Here, it is preferable that the metal coil spring is provided in the outer cylinder on the end side in advance before fixing the heat generating portion to the heating portion.

  In this case, the inner diameter of the metal coil spring in the free state is set smaller than the outer diameter of the outer cylinder of the sheath type heater, and the coil spring is compressed so that the inner diameter is smaller than the outer diameter of the sheath type heater outer cylinder. It is preferable that the sheath-type heater is covered with the outer cylinder in an expanded state, and the compression is released in the predetermined region so that the inner surface of the metal coil spring is in close contact with the outer cylinder of the sheath-type heater.

  It is also preferable that the metal coil spring is provided to the outer cylinder on the distal end side of the sheath type heater drawn out from the heating part after the heating part is fixed to the heating part.

  In this case, it is preferable that the metal coil spring is a coil spring in which a metal wire is formed in advance in a spiral shape, and is externally mounted on the outer cylinder while being spirally rotated from an end thereof.

  Alternatively, it is also preferable to attach the metal coil spring while forming the metal coil spring by spirally winding the metal wire around the outer cylinder.

  In the present invention as described above, a metal coil spring as a separate member is provided on the outer cylinder on the sheath type heater terminal side that is extended from the heating portion of the apparatus over a predetermined axial direction region. It is possible to reduce the surface temperature of the outer cylinder by accelerating the heat radiation of the part, and when placing the extended part up to the external power supply, it is not necessary to pay attention to the influence of heat on other equipment, so construction is free The degree is improved. In particular, even in the case of a film forming heater of a vacuum apparatus, heat can be dissipated from the portion extending from the soaking plate, which is a heating part, and disconnection can be avoided in advance, and the seal part is made of a less expensive material. Can be used. In addition, the material selection range is wider than conventional radiating fins, and long linear members wound in a spiral form are in continuous contact, so the contact area and heat capacity with the outer cylinder can be set large, and the heat dissipation effect can be increased. It is possible to increase it further. Furthermore, material and mounting costs can be significantly reduced.

  Further, since the inner surface of the metal coil spring is in close contact with the outer cylinder of the sheath type heater, more heat can be transferred from the outer surface of the outer cylinder to the metal coil spring side, and the above-described heat dissipation effect can be further improved. Can be increased.

  Further, since the metal coil spring follows the bending deformation of the outer cylinder in a state of being provided in the outer cylinder and does not hinder the deformation, the metal coil spring is preliminarily made of metal before fixing the heating portion to the heating part. A coil spring can be provided on the outer cylinder on the end side. This eliminates the need to perform a metal coil spring mounting operation in a narrow apparatus or near the apparatus after the heat generating portion is fixed. In addition, the metal coil spring does not interfere with the bending operation of the outer cylinder on the sheathed heater terminal side after being fixed. Therefore, the efficiency of attachment work can be improved.

  Further, the inner diameter of the metal coil spring in a free state is set smaller than the outer diameter of the outer cylinder of the sheath type heater, and the coil spring is compressed to expand the inner diameter from the outer diameter of the sheath type heater outer cylinder. In such a state, the outer sheath of the sheath type heater is sheathed, the compression is released in the predetermined region, and the inner surface of the metal coil spring is brought into close contact with the outer sleeve of the sheath type heater. The metal coil spring can be easily attached to the outer cylinder of the mold heater, and after installation, it can be brought into close contact with the outer cylinder simply by releasing the compression, and the heat radiation effect can be enhanced and the installation position can be easily adjusted. .

  In addition, a metal coil spring can be provided after fixing the heat generating part to the heating part. In this case, the metal coil spring is a coil spring in which a metal wire is formed in a spiral shape, and the spiral gap is formed. The outer coil can be wrapped around the outer cylinder, and the metal coil spring can be attached while being molded by spirally winding a metal wire around the outer cylinder.

Explanatory drawing which shows the attachment structure of the sheath type heater which concerns on typical embodiment of this invention. Explanatory drawing which similarly shows the state which fixed the heat-emitting part of the sheath type heater to the heating site | part. (A)-(d) is explanatory drawing which shows the example of the cross-sectional shape of a coil spring. (A)-(d) is simple explanatory drawing which shows the attachment structure to the vacuum apparatus of a sheath type heater. (A), (b) is explanatory drawing which shows the modification of the attachment structure to the vacuum apparatus of a sheath type heater similarly. Explanatory drawing which shows a mode that a coil spring is retrofitted to an outer cylinder.

  Next, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a diagram showing an overall configuration of a sheath type heater mounting structure S according to the present invention, in which FIGS. 1 to 6 show typical embodiments, in which 1 is a sheath type heater, 2 is a coil spring, Reference numeral 3 denotes a heat generating portion, and 4 denotes an extended portion. In the following description, an attachment structure attached to a vacuum device as a film formation heater is illustrated, but the present invention can be applied to a structure attached to an outer wall of various pipes or a heating part of another device.

  The attachment structure S is a structure in which a sheath type heater 1 in which a heating wire is housed in at least a part of the metal outer cylinder 10 is attached to a vacuum device 9 to be heated, and the heating wire of the sheath type heater 1 is attached. Is fixed to a soaking plate 91 that is a heating part 5 of the vacuum device 9 and the outer cylinder 10 on the end side of the sheath type heater 1 that extends from the soaking plate 91 (heating part 5). In addition, a metal coil spring 2 as a separate member is provided over a predetermined region R in the axial direction, thereby promoting heat dissipation of the extended portion 4 where the surface temperature is desired to be lowered.

  FIG. 2 is a view showing a state where the heat generating portion 3 of the sheath type heater 1 is fixed to the soaking plate 91 which is the heating portion 5. In this example, the heat generating portion 3 is fixed in a spiral shape from the central portion, and the distal end side is extended from the central portion. However, for fixing the heat generating portion 3, there are other known methods such as a folded wavy pattern. The arrangement form can be adopted. As shown in FIG. 1, the distal end extending from the heat equalizing plate 91 extends from the insertion hole 90 formed in the wall surface of the vacuum device 9 to the outside of the device through a seal 92 and is connected to an external power source (not shown). .

  The sheath type heater 1 has a stainless steel outer cylinder 10 (metal sheath) inserted with a pair of resistance heating wires made of nickel-chromium alloy, tantalum or the like connected to each other at the tip, and a magnesia powder (MgO) in the gap. ) Or the like is used, and a two-core type microheater configured to be insulated by filling with an inorganic insulating material such as) is used. Is connected to the stainless steel outer cylinders 11 and 12 and the lead wires 6 and 6 are energized so that the resistance heating wires generate heat to heat the heating part 5. In this example, heating lines exist in all areas of the outer cylinder 10, the heating part 3 extends to the extension part 4, and the coil spring 2 is provided in the extra length part of this heating part. A non-heat generating line is connected to the portion 4 so that the extra length of the heat generating portion does not exist in the extended portion 4, and the coil spring 2 is provided only in the non-heat generating portion, or the extra length portion of the heat generating portion is not A coil spring 2 may be provided over both of the heat generating portions.

  Further, in the example shown in FIG. 1, a two-core type microheater having the heat generating portion 3 on the tip side is used. However, as shown in FIGS. 4 (c) and 4 (d), a single core type, that is, a single resistance heating is used. The wire is housed in a metal outer tube 10 (metal sheath) and filled with an inorganic insulator, and a heat generating portion is formed in the middle instead of the tip, and the end of the resistance heating wire led out from both ends of the outer tube 10 Of course, these may be connected to the lead wire 6 in the metal outer cylinders 11 and 12, respectively. In addition, a sheathed heater or a cartridge heater may be used.

  As long as the coil spring 2 is made of metal, its shape and material are not particularly limited. Unlike fins that require brazing, the material can be selected relatively freely, such as stainless steel and Inconel. There is no limit to the range. As shown in FIG. 3, the inner surface 20 of the coil spring 2 is in close contact with the outer cylinder 10 of the sheath type heater 1 to ensure heat conduction and maintain a high heat dissipation effect. In order to make such a close contact, the inner diameter of the coil spring 2 in the free state can be easily achieved by setting it smaller than the outer diameter of the outer cylinder 10 to which the coil spring 2 is attached. On the contrary, it is preferable that the inner diameter is set to be larger than the outer diameter of the outer cylinder 10 in a compressed state. As a result, the inner surface 20 of the coil spring 2 can be easily brought into close contact with the sheath-type heater outer cylinder 10 simply by covering the outer cylinder 10 with the diameter expanded and releasing the compression in the predetermined region R.

  However, if the inner surface 20 of the coil spring 2 is in contact with the outer cylinder 10, a high heat radiation effect can be obtained. But you can. In addition to those that directly contact / adhere to the outer cylinder 10, a third metal member (for example, a metal sheet) is interposed between the coil spring inner surface 20 and the outer cylinder 10 outer surface to indirectly conduct heat. Also good. As a result, the apparent heat capacity increases as in the case where the thickness of the outer cylinder 10 increases, and the heat dissipation effect can be enhanced. If this third metal member is made of a metal material that is softer than the outer tube 10 and easily bent and deformed, the hindrance to flexibility can be reduced.

  The cross-sectional shape of the wire of the coil spring 2 is circular as shown in FIG. 3 (a), but for the purpose of increasing the contact area with the outer cylinder 10, the inner surface 20 as shown in FIG. 3 (b). It is also preferable to form a substantially semicircular shape having a flat surface on the side. In addition, for the same purpose and the purpose of increasing the surface area and enhancing the heat dissipation effect, it is also preferable to form a square, a polygon, or the like as shown in FIGS. 3 (c) and 3 (d). About the magnitude | size of a cross-sectional area, the heat dissipation effect will increase, but the bending deformability after attachment will be inhibited, but what is necessary is just to set suitably according to the magnitude | size of the outer cylinder 10, etc. Further, the contact / contact state with the outer cylinder 10 does not have to be constant in the axial direction, and the tip end side of the coil spring 2 is closely attached to the outer cylinder 10 or both ends of the coil spring 2 are attached to the outer cylinder 10. It is also preferable that the middle part is lifted and the middle part is floated so as not to hinder the bending deformability of the outer cylinder 10.

  Since the coil spring 2 itself has excellent flexibility and bending deformability, the outer cylinder 10 can be bent even after being attached to the outer cylinder 10 and can be freely arranged up to the external power supply while being bent and deformed. It is possible to make it. 4A, the heat generating portion 3 of the sheath type heater 1 is fixed to the heat equalizing plate 91 of the vacuum device 9, the coil spring 2 is provided in the outer cylinder 10 of the extended portion 4, and is drawn out from the insertion hole 90 to the outside. However, as shown in FIG. 4 (b), inside the vacuum device 9, the extended portion 4 with the coil spring 2 attached can be freely bent and deformed so that it can be placed at an appropriate position. it can.

  FIG. 4C shows a heat generating portion 3 in the middle of the single-core type sheathed heater 1 fixed to a heat equalizing plate 91 of a vacuum device 9 and outer cylinders of extended portions 4 and 4 extending from both ends. 10 are provided with coil springs 2 respectively, and are pulled out to the outside through the insertion holes 90 and 90, respectively, but as shown in FIG. It becomes easy to bend 4 and 4 and to pull out from the common insertion hole 90 to the outside.

  In this example, the coil spring 2 is externally mounted on the region R of the outer cylinder 10 that is the extra length of the heat generating portion in the extended portion 4, and this region R may be a non-heat generating portion or a part of the non-heat generating portion. Although the points that can be done are as described above, the coil spring 2 is extended to the predetermined region R1 also in the outer cylinders 11 and 12 to which the non-heating lines are connected as shown in FIG. It is also preferable to provide a separate coil spring 2A. Further, as shown in FIG. 5B, it is also preferable to provide a coil spring 2B in a predetermined region R2 of the outer cylinder extending outside the vacuum device 9.

  The coil spring 2 can be provided in a predetermined region R on the distal end side by attaching the coil spring 2 from the front end side of the heat generating portion before fixing the heat generating portion 3 to the soaking plate 91 (heating portion 5). . Or after fixing the heat generating part 3 to a heating part, as shown in FIG. 6, it is also possible to wrap around the predetermined region R of the outer cylinder 10 on the end side by winding it from the spiral gap of the coil spring 2. It is. In this case, it is also preferable that only the end portion of the coil spring 2 be spaced apart from others so that it can be easily mounted later. Furthermore, it is also a preferred embodiment that a linear metal wire is spirally wound around a predetermined region R of the outer cylinder 10, thereby forming the coil spring 2 on the outer cylinder 10 as a result.

  Although the embodiments of the present invention have been described above, the present invention is not limited to these embodiments, and can of course be implemented in various forms without departing from the gist of the present invention.

DESCRIPTION OF SYMBOLS 1 Sheath type heater 2, 2A, 2B Coil spring 3 Heat generating part 4 Extension part 5 Heating part 6 Lead wire 9 Vacuum apparatus 10, 11, 12 Outer cylinder 20 Inner surface 90 Insertion hole 91 Heat equalizing plate 92 Seal R, R1, R2 Area S Mounting structure

Claims (9)

A sheath type heater in which a heating wire is housed in at least a part of a metal outer cylinder is an attachment structure that is attached to a device to be heated,
The heat generating part having the heat generating line of the sheath type heater is fixed to the heating part of the device, and the outer cylinder on the sheath type heater terminal side extended from the heating part is provided with another member over a predetermined region in the axial direction. A sheathed heater mounting structure comprising a metal coil spring.   The sheath type heater mounting structure according to claim 1, wherein an inner surface of the metal coil spring is in close contact with an outer cylinder of the sheath type heater.   The sheath type heater used for the attachment structure of Claim 1 or 2 which provides the metal coil spring of another member in the outer cylinder of the terminal side extended from the heating site | part of the said apparatus. An attachment method for attaching a sheath type heater containing a heating wire in at least a part of a metal outer cylinder to a device to be heated,
The heat generating part having the heat generating wire of the sheath type heater is fixed to the heating part of the device, and the outer cylinder on the end side of the sheath type heater extended from the heating part is provided with a separate member over a predetermined region in the axial direction. A method for attaching a sheath type heater, comprising a metal coil spring for promoting heat dissipation.   The method of attaching a sheath type heater according to claim 4, wherein the metal coil spring is provided in advance on the outer cylinder on the end side before the heat generating portion is fixed to the heating portion.   The inner diameter of the metal coil spring in a free state is set to be smaller than the outer diameter of the outer cylinder of the sheath type heater, and the coil spring is compressed to expand the inner diameter from the outer diameter of the sheath type heater outer cylinder. 6. The sheath-type heater according to claim 5, wherein the sheath-type heater is sheathed on the outer cylinder of the sheath-type heater in a state of being released, and is compressed in the predetermined region so that the inner surface of the metal coil spring is brought into close contact with the outer cylinder of the sheath-type heater. Mounting method.   The sheath type heater attachment according to claim 4, wherein the metal coil spring is provided to an outer cylinder on the distal end side of the sheath type heater drawn out from the heating portion after the heat generating portion is fixed to the heating portion. Method.   8. The method for mounting a sheath type heater according to claim 7, wherein the metal coil spring is a coil spring in which a metal wire is formed in advance in a spiral shape, and is wound around the outer cylinder from the spiral gap. .   The method of attaching a sheath type heater according to any one of claims 4 to 8, wherein the metal coil spring is attached while forming a metal wire by spirally winding the metal wire rod around the outer cylinder.

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