JP2010250955A - X-ray tube device and x-ray device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray tube device, which allows prevention of failure of the X-ray tube device, replacement of the X-ray device before it is unusable, and examination for usage improvement only by acquiring the X-ray tube device, and an X-ray device using the same. <P>SOLUTION: The X-ray tube device 10 attached to an X-ray device body 101 and configured to collide thermal electron emitted from a filament 12 to an end surface of a target 11 and to thereby release primary X-ray through an outgoing window 14a of a casing 14 includes a storage part 18 capable of communicating with a control part 50 of the X-ray device body 101. The storage part 18 stores, by communicating with the control part 50, at least one piece of information selected from the group consisting of end date and hour information for the previous use of the filament 12, information for current-carrying time to the filament 12, information showing normal interruption of the current-carrying to the filament 12, end date and hour information for the previous application of high voltage, high-voltage application time information, and information showing normal interruption of high voltage. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an X-ray tube device that emits primary X-rays and an X-ray device using the same.

FIG. 3 is a diagram showing a configuration of a general energy dispersive X-ray fluorescence analyzer (X-ray apparatus). 4 is a sectional view showing the X-ray tube apparatus 110 when attached to the fluorescent X-ray analyzer main body 101, and FIG. 5 shows an X-ray tube apparatus when detached from the fluorescent X-ray analyzer main body 101. FIG. The energy dispersive X-ray fluorescence analyzer 100 includes an X-ray tube device 110 that emits primary X-rays, and a fluorescent X-ray analyzer main body 101 that allows the X-ray tube device 110 to be attached and detached (for example, Patent Literature 1). 1).
The X-ray fluorescence analyzer main body 101 applies a high voltage to a sample stage 20 on which the sample S is arranged, a detector 30 for detecting the energy and intensity I (t) of the fluorescent X-ray (secondary X-ray). A high-voltage power supply 40 that applies low voltage, and a low-voltage power supply 90 that applies a low voltage, and a controller 150 that controls the entire fluorescent X-ray analyzer 100.

The sample stage 20 is formed with a circular opening 21 so that primary X-rays emitted from the attached X-ray tube device 110 enter the opening 21. As a result, the analysis surface of the sample S is brought into contact with the opening 21 so that the analysis surface of the sample S is irradiated with the primary X-rays. When the analysis surface of the sample S is irradiated with primary X-rays, fluorescent X-rays are generated on the analysis surface of the sample S.
The detector 30 has an introduction window 31, and is configured such that fluorescent X-rays generated on the analysis surface of the sample S enter the introduction window 31. Thereby, the detector 30 detects the energy and intensity I (t) of the fluorescent X-ray.

For example, the high voltage power supply 40 can freely select from a voltage value of about 1 kV to 50 kV and a current value of 1 μV to 1 mA, and can apply a selected voltage value to flow a current.
The low-voltage power supply 90 can apply a voltage value (for example, 2 to 3 V, etc.).
The control unit 150 includes a CPU 60 and a memory 70, and is connected to a display device 81 having a monitor screen and an input device 82 having a keyboard, a mouse, and the like. Further, the function processed by the CPU 60 will be described as a block. A detector that calculates the concentration of an element contained in the sample S based on the energy and intensity I (t) of fluorescent X-rays detected by the detector 30. A control unit 61 and a power supply control unit 62 for applying a high voltage to the target 11 by the high voltage power supply 40 and applying a low voltage to the filament 12 by the low voltage power supply 90 are provided.

The X-ray tube apparatus 110 includes a cylindrical inner casing 13 having a target 11 serving as an anode and a filament 12 serving as a cathode, a cylindrical outer casing 14 having an inner casing 13 therein, and a temperature. And a temperature sensor 17 for detecting information W (t).
A circular opening 13 a is formed on the side wall of the inner housing 13, and the end surface of the target 11 is disposed at a position facing the opening 13 a and the end of the filament 12 is positioned at a position facing the end surface of the target 11. Is arranged. As will be described in detail later, the target 11 is electrically connected to the high-voltage power supply 40 via the high-voltage cable 15, and the filament 12 is electrically connected to the low-voltage power supply 90 via the low-voltage cable 16. To be connected to.
As a result, a high voltage is applied to the target 11 by the high-voltage power supply 40 and a low voltage is applied to the filament 12 by the low-voltage power supply 90 so that the thermoelectrons emitted from the filament 12 collide with the end face of the target 11. Thus, primary X-rays generated at the end face of the target 11 are emitted from the opening 13a.

The inside of the outer casing 14 is filled with insulating oil, and the inner casing 13 is disposed at the center inside the outer casing 14. Thereby, the heat generated in the target 11 can be released to the outer casing 14 by the convection of the insulating oil. Further, the insulating oil plays the role of an insulating material.
A cylindrical window portion 14a connected to the opening 13a of the inner housing 13 is formed on the side wall of the outer housing 14, and a cylindrical high voltage opening portion 14b that is an insulator is formed on the end surface. And a low voltage connecting portion 14c.
The other end face of the target 11 and the metal end 14d of the high voltage opening 14b are connected via the wiring 11b, and the high voltage connected to the anode of the high voltage power source 40 is connected to the high voltage opening 14b. By inserting the conducting wire 15a of the voltage cable 15, the leading end portion of the conducting wire 15a of the high voltage cable 15 and the end portion 14d of the opening portion 14b for high voltage are electrically connected. The anode of the high voltage power supply 40 is electrically connected. Further, the lead wire 15b of the high voltage cable 15 connected to the cathode of the high voltage power supply 40 is grounded at the entrance of the high voltage opening 14b.
At this time, a high voltage is applied to the leading end portion of the conducting wire 15a and the leading end portion of the conducting wire 15b of the high voltage cable 15, and no discharge occurs between the leading end portion of the conducting wire 15a and the leading end portion of the conducting wire 15b. Thus, in order to increase the creepage distance, the end portion 14 d of the high-voltage opening 14 b extends to the inside of the outer casing 14.

  The filament 12 and the low voltage connecting portion 14c are electrically connected, and the low voltage connecting portion 14c is connected to the tip of the conducting wire 16a of the low voltage cable 16 connected to the anode of the low voltage power supply 90. So that the filament 12 and the low-voltage power supply 90 are electrically connected to each other, and as a result, the filament 12 and the low-voltage power supply 90 are electrically connected to each other. It has become. In addition, since the low voltage is applied to the front-end | tip part of the conducting wire 16a of the low voltage cable 16, and the front-end | tip part of the conducting wire 16b, since it is not dangerous, they are electrically connected on the surface of the outer side housing | casing 14. FIG.

  The temperature sensor 17 is electrically connected to the control unit 150 of the fluorescent X-ray analyzer main body 101. Such a temperature sensor 17 is, for example, a thermistor. If a high voltage is applied to the target 11 and a low voltage is continuously applied to the filament 12, the X-ray tube device 110 becomes too hot when the high voltage applied to the target 11 and the current to be applied are large. Although the pipe device 110 may break down, the temperature information W (t) is obtained by acquiring temperature information W (t) from the temperature sensor 17 at a predetermined time interval (for example, every several milliseconds) by the control unit 150. When the temperature exceeds a certain temperature, the application of the high voltage and the low voltage is stopped to prevent the X-ray tube apparatus 110 from being broken.

JP 2007-003283 A

By the way, in the energy dispersive X-ray fluorescence spectrometer 100, the target 11 of the X-ray tube apparatus 110 deteriorates due to various reasons such as frequent use under conditions where the X-ray tube apparatus 110 becomes high temperature, Since the filament 12 reaches the end of its life or fails, it is necessary to remove the failed X-ray tube device 110 from the fluorescent X-ray analyzer main body 101 and attach a new X-ray tube device 110 to the fluorescent X-ray analyzer main body 101. is there.
A guideline for replacement time of the X-ray tube apparatus 110 (for example, one year) is indicated by the manufacturer of the fluorescent X-ray analyzer main body 101. However, since it is not known when the X-ray tube apparatus 110 actually fails, suddenly When it becomes impossible to use the fluorescent X-ray analyzer 100, the control unit 150 uses the usage time information of the X-ray tube device 110 (for example, “energization time information to the filament 12” or “high voltage application time to the target 11”. It is conceivable that the information is stored in the memory 70 and displayed on the display device 81 to inform the user that the replacement time is approaching. Further, based on the usage time information of the X-ray tube apparatus 110, it is conceivable to request the manufacturer to dispatch a replacement worker and replace the X-ray tube apparatus 110.

When the X-ray tube apparatus 110 that has not been used for a long time (for example, 30 days) is used, when the high voltage is applied to the target 11 and the low voltage is applied to the filament 12, the target 11 and the filament 12 are applied. Since discharge may occur in the vicinity of, it is necessary to perform aging (trial operation). When a high voltage is applied to the target 11 and a low voltage is applied to the filament 12 without performing aging even though the X-ray tube apparatus 110 has not been used for a long time, the periphery of the target 11 and the filament 12 For example, it is conceivable to cause discharge in order to shorten the life of the filament 12 and advance the replacement time of the X-ray tube apparatus 110, for example.
Therefore, the control unit 150 stores “the previous use end time information of the X-ray tube apparatus 110” in the memory 70 so that the user does not forget to perform aging. It is conceivable to prevent the X-ray tube apparatus 110 from malfunctioning by controlling the high-voltage power supply 40 so as not to apply a high voltage to the target 11 based on the “last use end time information”. For example, when the fluorescent X-ray analyzer main body 101 is activated, the control unit 150 executes the aging based on the “last use end time information of the X-ray tube device 110” stored in the memory 70. It is conceivable that a notification sentence recommended for the display is displayed on the display device 81 or aging is automatically started.

  When the control unit 150 manages the “usage time information of the X-ray tube device 110”, the “last use end date / time information of the X-ray tube device 110”, and the “temperature information W (t)” in this way, It is possible to prevent the tube apparatus 110 from failing, or to replace the X-ray tube apparatus 110 before the X-ray fluorescence analyzer 100 can no longer be used. However, when the manufacturer of the fluorescent X-ray analysis apparatus main body 101 recovers the old X-ray tube apparatus 110, it is only necessary to recover the old X-ray tube apparatus 110 such as “usage time information of the X-ray tube apparatus 110”. Information could not be obtained, and studies for improving the method of using the X-ray tube apparatus 110 could not be performed. That is, the manufacturer not only obtains the old X-ray tube apparatus 110 but also obtains information stored in the memory 70 of the fluorescent X-ray analyzer main body 101 owned by the user when the X-ray tube apparatus 110 is replaced. There was a need to do. Further, when the replacement worker dispatched from the manufacturer attaches a new X-ray tube apparatus 110 to the fluorescent X-ray analysis apparatus main body 101, information such as new “use time information of the X-ray tube apparatus 110” is old. It is necessary to reset old information such as “usage time information of the X-ray tube device 110” stored in the memory 70 so that the information such as “use time information of the X-ray tube device 110” is not accumulated.

Further, when a high voltage is applied to the target 11 and a low voltage is applied to the filament 12, the control of the high-voltage power supply 40 may be forcibly interrupted due to a power failure or an erroneous operation. If the interruption is forcibly repeated many times in this way, it is considered that the X-ray tube apparatus 110 may cause a failure.
Therefore, the control unit 150 stores “information indicating that the energization to the high-voltage power supply 40 has been normally cut off” in the memory 70, so that the failed X-ray tube apparatus 110 has experienced “to the high-voltage power supply 40. In this case, the manufacturer not only obtains the old X-ray tube device 110 but also stores the information stored in the memory 70. It was necessary to obtain it when the X-ray tube apparatus 110 was replaced.
Therefore, the present invention prevents the failure of the X-ray tube device or replaces the X-ray tube device before it can no longer be used, and only obtains the X-ray tube device. An object of the present invention is to provide an X-ray tube apparatus that can be studied for improving the method of use and an X-ray apparatus using the same.

  An X-ray tube apparatus according to the present invention, which has been made to solve the above-described problems, includes a housing in which an exit window is formed, a target that is an anode having an end face disposed inside the housing, A filament that is a cathode disposed inside, and the target and the filament are electrically connected to a power source of the X-ray apparatus main body and attached to the X-ray apparatus main body, so that the thermoelectrons emitted from the filament are emitted. An X-ray tube device that emits primary X-rays generated on the end surface of the target from the exit window of the housing by colliding with the end surface of the target, and is capable of communicating with the control unit of the X-ray device body The storage unit communicates with the control unit of the X-ray apparatus main body to thereby obtain information on the last use end date and time of the filament, energization time information on the filament, and communication with the filament. At least selected from the group consisting of information indicating that the high voltage has been normally shut off, date and time information when the previous application of the high voltage is terminated, high voltage application time information, and information indicating that the high voltage has been normally cut off One piece of information is stored.

Here, the “energization time information to the filament” may be information that can grasp the total energization time to the filament. For example, “○ year ○ month ○ day ○ hour ○ time”, “○ year ○ month ○ It may be information sequentially stored as “day o hour o time” or histogram information of power output (voltage and current) and accumulated time.
Further, the “high voltage application time information” may be information that can grasp the total energization time to the target. For example, “○ year ○ month ○ day ○ hour ○ time”, “○ year ○ month ○ day ○ It may be information sequentially stored as “time ○ time”, or may be histogram information of power output (voltage and current) and accumulated time.

According to the X-ray tube apparatus of the present invention, the storage unit that can communicate with the control unit of the X-ray apparatus body is provided. And the memory | storage part communicates with the control part of a X-ray apparatus main body, the last use end date information of a filament, the electricity supply time information to a filament, the information which shows that the electricity supply to the filament was interrupted | blocked normally, Stores at least one piece of information selected from the group consisting of date / time information when the previous application of the high voltage is terminated, high voltage application time information, and information indicating that the high voltage has been normally shut off. Thereby, the control part of the X-ray apparatus main body to which the X-ray tube apparatus is attached communicates with the storage part of the X-ray tube apparatus and manages the energization time information etc. to the filament. It is possible to prevent failure or to notify that the time for replacement of the X-ray tube apparatus is near before it can no longer be used.
In addition, since the X-ray tube device fails for various reasons, the failed X-ray tube device is removed from the X-ray device body, and a new X-ray tube device is attached to the X-ray device body. If the old X-ray tube device is recovered, the previous use end date and time information of the filament can be obtained. That is, it is not necessary to obtain information stored in the X-ray apparatus main body owned by the user when the X-ray tube apparatus is exchanged. Further, when the replacement worker dispatched from the manufacturer attaches a new X-ray tube apparatus to the X-ray apparatus main body, it is not necessary to reset the information stored in the X-ray apparatus main body.

  As described above, according to the X-ray tube device of the present invention, the X-ray tube device is prevented from being broken down, or the X-ray tube device is replaced before it can no longer be used. Only by obtaining it, it is possible to study to improve the method of using the X-ray tube apparatus.

(Means and effects for solving other problems)
Further, in the above invention, a temperature sensor for detecting temperature information of the housing is provided, and the temperature sensor is electrically connected to a control unit of the X-ray apparatus main body and attached to the X-ray apparatus main body. The temperature information may be transmitted to the control unit of the X-ray apparatus main body, and the storage unit may store the temperature information by communicating with the control unit of the X-ray apparatus main body.
Here, the “temperature information” may be information that can grasp the maximum temperature and the number of overheatings that have been used so far. For example, “○ year ○ month ○ day ○ hour ○ ° C”, “○ year The information may be sequentially stored as “month, day, day, hour, ° C.”,..., “Year, month, day, hour, overheating”,.

Furthermore, in the above invention, the storage unit may store type information for specifying the X-ray tube apparatus.
According to the X-ray tube apparatus of the present invention, the manufacturer and the like can easily obtain the type information (for example, the serial number), and therefore, studies for improving the method of using the X-ray tube apparatus are performed. Can be easily done. In addition, the control unit of the X-ray apparatus main body to which the X-ray tube apparatus is attached communicates with the storage unit of the X-ray tube apparatus, and “type information specifying the X-ray tube apparatus used last time” and “currently used By comparing with the “type information for identifying the X-ray tube apparatus being operated”, it is recognized that the X-ray tube apparatus has been replaced, and information such as the old “X-ray tube apparatus usage time information” is reset. be able to.

The X-ray apparatus of the present invention is an X-ray apparatus comprising the above-described X-ray tube apparatus and an X-ray apparatus body that allows the X-ray tube apparatus to be attached and removed, and the sample is irradiated with primary X-rays. Detected by the detector by detecting the intensity of the secondary X-rays generated in the sample, a power source for applying a voltage to the target and the filament, and controlling the power source. A control unit for acquiring the intensity of fluorescent X-rays, and the control unit of the X-ray apparatus main body has been normally cut off from the last use end date and time information of the filament, energization time information to the filament, and energization to the filament. Information indicating that, at least one information selected from the group consisting of date and time information when the application of the high voltage last time, high voltage application time information, and information indicating that the high voltage has been normally shut off, X It may also be stored in the storage unit of the tube device.
Furthermore, in the above invention, the control unit of the X-ray apparatus main body receives the last use end date / time information of the filament and / or the date / time information of the last application of the high voltage from the storage unit of the X-ray tube device. Thus, the power supply may be controlled based on the previous use end date / time information of the filament and / or the date / time information on the last application of the high voltage.

1 is a schematic configuration diagram illustrating an example of an energy dispersive X-ray fluorescence spectrometer according to an embodiment. It is sectional drawing which shows an X-ray tube apparatus when it attaches to a fluorescent X-ray-analysis apparatus main body. It is a schematic block diagram which shows an example of the conventional energy dispersion type | mold fluorescence X-ray-analysis apparatus. It is sectional drawing which shows an X-ray tube apparatus when it attaches to a fluorescent X-ray-analysis apparatus main body. It is sectional drawing which shows an X-ray tube apparatus when it removes from the fluorescent X-ray-analysis apparatus main body.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments described below, and it goes without saying that various aspects are included without departing from the spirit of the present invention.

FIG. 1 is a schematic configuration diagram showing an example of an energy dispersive X-ray fluorescence analyzer according to the embodiment, and FIG. 2 is a cross-sectional view showing the X-ray tube device when attached to the fluorescent X-ray analyzer main body. is there. In addition, the same code | symbol is attached | subjected about the thing similar to the energy dispersive X-ray fluorescence spectrometer 100.
The energy dispersive X-ray fluorescence analyzer 1 includes an X-ray tube device 10 that emits primary X-rays, and a fluorescent X-ray analyzer main body 101 that allows the X-ray tube device 10 to be attached and detached.

The X-ray tube apparatus 10 includes a cylindrical inner casing 13 having a target 11 serving as an anode and a filament 12 serving as a cathode, a cylindrical outer casing 14 having an inner casing 13 therein, a temperature It has a temperature sensor 17 for detecting information W (t) and a non-volatile storage medium substrate (storage unit) 18 bonded to the outer peripheral surface of the outer casing 14.
The nonvolatile storage medium substrate 18 has a connection connector 18f, and is connected to the control unit 50 of the fluorescent X-ray analyzer main body 101 through the connection connector 18f so as to be communicable. Further, the target 11 is electrically connected to the high-voltage power source 40 of the fluorescent X-ray analyzer main body 101 through the high-voltage cable 15, and the filament 12 is connected to the low-voltage power source of the fluorescent X-ray analyzer main body 101 through the low-voltage cable 16. 90 is electrically connected. Further, the temperature sensor 17 is electrically connected to the control unit 50 of the fluorescent X-ray analyzer main body 101.

The non-volatile storage medium substrate 18 includes a filament information storage area 18a for storing "last filament use time information of the filament 12" and "energization time information of the filament 12", and "energization of the filament 12 is normally cut off." A block information storage area 18b for storing "information indicating that the high voltage has been normally blocked", a temperature information storage area 18c for storing "temperature information", and an X-ray tube A type information storage area 18d for storing "type information" for specifying the device 10, a high voltage information storage area 18e for storing "date and time information when the previous high voltage application has been completed" and "high voltage application time information". And have.
For example, “filament 12 year end date information” and “filament 12 energization time information” include, for example, “filament ○ year ○ month ○ day ○ hour ○ hour”, “filament ○ year ○ month ○ day ○ hour “Time”,..., So that it is possible to grasp the use end date and time information when used last time and the total energization time to the filament 12. Such “last use end date / time information of the filament 12” and “energization time information to the filament 12” are stored by receiving information from the control unit 50 of the fluorescent X-ray analyzer main body 101. It has become.

As the “information indicating that the energization to the filament 12 is normally cut off”, for example, when energization to the filament 12 is started, “energization start” is received, and the energization to the filament 12 is normally cut off. When the power supply to the filament 12 is started, the control unit 50 of the fluorescent X-ray analyzer main body 101 receives the cutoff information storage area of the nonvolatile storage medium substrate 18 before starting to supply power to the filament 12. The information recorded in 18b is read, and it can be determined whether or not the information has been normally cut off depending on whether the information is “start of energization” or “normally cut off of energization”. Such “information indicating that the current supply to the filament 12 is normally cut off” is obtained from the control unit 50 of the fluorescent X-ray analyzer main body 101 when the current supply to the filament 12 is normally cut off. The information is stored by receiving the “energized normal interruption” information. On the other hand, when the energization to the filament 12 is not normally cut off, the “energization normal cut-off” information is not received from the control unit 50 of the fluorescent X-ray analyzer main body 101.
As “temperature information”, for example, “○ year ○ month ○ day ○ hour ○ ° C.”, “○ year ○ month ○ day ○ hour ○ ° C.”,. The maximum temperature and overheating when used at that time are stored, and as a result, the maximum temperature and the number of overheatings that have been used so far can be grasped. Such “temperature information” is stored by receiving information from the control unit 50 of the fluorescent X-ray analysis apparatus main body 101.
The “type information” is, for example, “serial number (ID) XXX”, and the type of the X-ray tube apparatus 10 can be grasped. Such “type information” is stored in advance so that a manufacturer or the like can easily study to improve the method of using the X-ray tube apparatus 10.

For example, “high voltage ○ year ○ month ○ day ○ hour ○ hour”, “high voltage ○ year ○ month ○ day ○” The time when the high voltage power supply 40 was used last time can be grasped, and the total high voltage application time to the target 11 can be grasped. Such “date and time information when the previous application of high voltage is completed” and “high voltage application time information” are stored by receiving information from the control unit 50 of the fluorescent X-ray analyzer main body 101. ing.
As “information indicating that the high voltage has been normally cut off”, for example, “application start” is received when the application to the target 11 is started, and “application start” is received when the application to the target 11 is cut off normally. The control unit 50 of the X-ray fluorescence spectrometer main body 101 records in the cutoff information storage area 18b of the nonvolatile storage medium substrate 18 before starting the application to the target 11. The read information is read, and it can be determined whether or not the information is normally cut off depending on whether the information is “application start” or “normal application cut-off”. Such “information indicating that the high voltage has been normally cut off” is received from the control unit 50 of the fluorescent X-ray analyzer main body 101 when the application to the target 11 is normally cut off. It is stored by receiving the information. On the other hand, when the application to the target 11 is not normally cut off, the “applied normal cut-off” information is not received from the control unit 50 of the fluorescent X-ray analyzer main body 101.

The X-ray fluorescence analyzer main body 101 includes a sample stage 20 on which the sample S is arranged, a detector 30 that detects the energy and intensity I (t) of the fluorescent X-ray, a high-voltage power supply 40 that applies a high voltage, A low-voltage power supply 90 that applies a low voltage and a control unit 50 that controls the entire fluorescent X-ray analyzer 100 are provided.
The control unit 50 includes a CPU 60 and a memory 70, and a display device 81 having a monitor screen and an input device 82 having a keyboard, a mouse, and the like are connected to each other. Further, the function processed by the CPU 60 will be described as a block. A detector that calculates the concentration of an element contained in the sample S based on the energy and intensity I (t) of fluorescent X-rays detected by the detector 30. A control unit 61, a high-voltage power supply 40 to apply a high voltage to the target 11, a low-voltage power supply 90 to apply a low voltage to the filament 12, and the nonvolatile storage medium substrate 18 of the X-ray tube device 10 It has the communication control part 63 which communicates, and the temperature information acquisition part 64 which acquires the temperature information W (t) from the temperature sensor 17 of the X-ray tube apparatus 10.
The memory 70 includes a filament information storage area 70 a for storing “last filament use time information of the filament 12” and “energization time information of the filament 12”, and “the filament 12 is normally de-energized. "Information indicating" and "information indicating that the high voltage has been normally blocked", a temperature information storage area 70c for storing "temperature information", and "type information" are stored. It has a type information storage area 70d and a high voltage information storage area 70e for storing "date and time information when a high voltage is applied" and "high voltage application time information".

The communication control unit 63 performs control to communicate with the nonvolatile storage medium substrate 18 of the X-ray tube apparatus 10.
Specifically, when an operation signal for executing X-ray emission is input by the input device 82, the input device 82 communicates with the nonvolatile storage medium substrate 18 of the X-ray tube device 10 to transfer the filament information from the filament information storage area 18 a to the filament 12. The total energization time and the use end date / time information at the previous use are acquired and stored in the filament information storage area 70a. Then, the total energization time for the filament 12 is displayed on the display device 81 as an image. Further, the total application time and the use end date / time information at the previous use are acquired from the high voltage information storage area 18e and stored in the high voltage information storage area 70e. Then, the total application time is displayed on the display device 81 as an image.
Then, “energization normal cutoff” information or “energization start” information and “application normal cutoff” information or “application start” information are acquired from the cutoff information storage area 18b and stored in the cutoff information storage area 70b. Further, “type information” is acquired from the type information storage area 18d and stored in the type information storage area 70d.
Further, “energization start” information and “application start” information are stored in the cutoff information storage area 18b.
On the other hand, when the emission of X-rays is stopped, communication with the nonvolatile storage medium substrate 18 of the X-ray tube device 10 is performed, and the current date / time information as “last previous use date / time information of filament 12” is changed to “filament 12”. The energizing time or the total energizing time for the filament 12 measured as “the energizing time information” is stored in the filament information storage area 18a. Also, the current date and time information as “date and time information when the previous high voltage application was completed” and the application time or total application time to the target 11 when measured as “high voltage application time information” are stored in the high voltage information storage area. 18e is stored.
Further, the maximum temperature at the time of measurement as “temperature information” or overheating is stored in the temperature information storage area 18c.
Furthermore, when the X-ray emission is stopped, the “energization normal cutoff” information and the “applied normal cutoff” information are stored in the cutoff information storage area 18b. On the other hand, when the X-ray emission is not normally stopped, The “energized normal cutoff” information and / or the “applied normal cutoff” information is not stored in the cutoff information storage area 18b.

The power supply control unit 62 stores “the previous use end date and time information of the filament 12” stored in the filament information storage area 70a and “the date and time information when the previous high voltage application was completed” stored in the high voltage information storage area 70e. Based on the above, a control for applying a voltage to the target 11 and the filament 12 is performed.
Specifically, the use end date and time information when used last time stored in the filament information storage area 70a and the use end date information when used last time stored in the high voltage information storage area 70e are the current date and time. When there is a gap between the information and the high voltage power supply 40, a high voltage is applied to the target 11, and the low voltage power supply 90 applies aging to apply a low voltage to the filament 12. The aging is performed by the power supply control unit 62 controlling the high voltage of the target 11 and the low voltage of the filament 12 to predetermined values for a predetermined time. This prevents the X-ray tube apparatus 10 from being broken due to not performing aging even though the X-ray tube apparatus 10 has not been used for a long time.
On the other hand, when the use end date / time information at the previous use is not different from the current date / time information, a high voltage is applied to the target 11 by the high voltage power source 40 and a low voltage is applied to the filament 12 by the low voltage power source 90. Apply. That is, measurement is performed without performing aging.

Based on the “temperature information” detected by the temperature sensor 17, the temperature information acquisition unit 64 is configured to stop the application of the high voltage and the low voltage when the temperature information W (t) exceeds a certain temperature. A control signal is output to 62, and “temperature information” is controlled to be stored in the temperature information storage area 70c.
The detector control unit 61 performs control to calculate the concentration of an element contained in the sample S based on the energy of the fluorescent X-ray detected by the detector 30 and the intensity I (t).

When the X-ray tube apparatus 10 breaks down while the X-ray fluorescence analyzer 1 is being used, an exchange worker dispatched from the manufacturer replaces the broken X-ray tube apparatus 10 with the fluorescent X-ray analyzer. The new X-ray tube device 10 is attached to the fluorescent X-ray analyzer main body 101 after being detached from the main body 101.
After that, the manufacturer collects the old X-ray tube device 10, but if the old X-ray tube device 10 is collected, the nonvolatile storage medium substrate 18 stores “the previous use end date / time information of the filament 12”, “Energization time information to the filament 12”, “Information indicating that the energization to the filament 12 has been normally cut off”, “Temperature information”, “Type information”, “Date and time information when the previous high voltage application was completed” Since “high voltage application time information” and “information indicating that the high voltage has been normally shut off” are stored, “last use end date and time information of the filament 12” and the like can also be obtained. Therefore, it is not necessary for the exchange worker dispatched from the manufacturer to obtain the information stored in the fluorescent X-ray analysis apparatus main body 101 owned by the user when the X-ray tube apparatus 10 is exchanged. Further, when the replacement worker dispatched from the manufacturer attaches a new X-ray tube apparatus 110 to the fluorescent X-ray analyzer main body 101, information such as new “usage time information of the X-ray tube apparatus 110” is old. It is not necessary to reset old information such as “usage time information of the X-ray tube apparatus 110” stored in the memory 70 so that the information such as “use time information of the X-ray tube apparatus 110” is not accumulated.

  As described above, according to the energy dispersive X-ray fluorescence spectrometer 1 of the present invention, the X-ray tube device 10 is prevented from being damaged or the X-ray tube device 10 is replaced before it can no longer be used. At the same time, by obtaining the X-ray tube apparatus 10, it is possible to study to improve the method of using the X-ray tube apparatus 10.

(Other embodiments)
(1) In the energy dispersive X-ray fluorescence spectrometer 1 described above, the nonvolatile storage medium substrate 18 is configured to have the connection connector 18f, but does not have the connection connector 18f, and wirelessly fluoresces. It is good also as a structure which communicates with the control part 50 of the X-ray analyzer main body 101. FIG.
(2) In the energy dispersive X-ray fluorescence spectrometer 1 described above, the configuration in which the display device 81 and the input device 82 are formed separately is shown. Also good.
(3) Further, the X-ray tube apparatus 10 may be used not only for the energy dispersive X-ray fluorescence analyzer 1 but also for an X-ray diffractometer or the like.

  The present invention can be used in an X-ray apparatus using an X-ray tube apparatus that emits primary X-rays.

DESCRIPTION OF SYMBOLS 1,100 X-ray fluorescence analyzer 10, 110 X-ray tube apparatus 11 Target 12 Filament 14 Outer housing | casing 14a Window part (output window)
15 High-voltage cable 16 Low-voltage cable 18 Non-volatile storage medium substrate (storage unit)
20 Sample stage 30 Detector 40 High-voltage power supply 50, 150 Control unit 82 Input device 90 Low-voltage power supply 101 Fluorescent X-ray analyzer main body

Claims (5)

A housing in which an exit window is formed;
A target that is an anode having an end face disposed inside the housing;
A filament that is a cathode disposed inside the housing;
The target and the filament are electrically connected to the power source of the X-ray apparatus main body and attached to the X-ray apparatus main body, so that the thermoelectrons emitted from the filament collide with the end face of the target, so that the end face of the target An X-ray tube device that emits the primary X-rays generated at the exit from the exit window of the housing,
A storage unit capable of communicating with the control unit of the X-ray apparatus body;
The storage unit communicates with the control unit of the X-ray apparatus main body, whereby the previous use end date and time information of the filament, the energization time information to the filament, information indicating that the energization to the filament has been normally cut off, It stores at least one piece of information selected from the group consisting of date and time information when the previous high voltage application was terminated, high voltage application time information, and information indicating that the high voltage has been normally shut off. X-ray tube device. A temperature sensor for detecting temperature information of the housing;
The temperature sensor is electrically connected to the control unit of the X-ray apparatus main body and attached to the X-ray apparatus main body, thereby transmitting temperature information to the control unit of the X-ray apparatus main body,
The X-ray tube apparatus according to claim 1, wherein the storage unit stores temperature information by communicating with a control unit of the X-ray apparatus main body.   The X-ray tube apparatus according to claim 1, wherein the storage unit stores type information for specifying a type of the X-ray tube apparatus. The X-ray tube device according to any one of claims 1 to 3,
An X-ray apparatus comprising an X-ray apparatus main body that enables the X-ray tube apparatus to be attached and detached,
A detector that detects the intensity of secondary X-rays generated in the sample by irradiating the sample with primary X-rays;
A power source for applying a voltage to the target and the filament;
A controller that acquires the intensity of secondary X-rays detected by the detector by controlling the power source;
The control unit of the X-ray apparatus main body uses the filament last use end date / time information, the filament energization time information, the information indicating that the filament energization has been normally interrupted, and the last application of the high voltage. Storing at least one information selected from the group consisting of information, high voltage application time information, and information indicating that the high voltage has been normally shut down in the storage unit of the X-ray tube device X-ray equipment. The control unit of the X-ray apparatus main body receives the previous use end date and time information and / or date and time information on the last application of the high voltage from the storage unit of the X-ray tube device, thereby receiving the previous filament end time. 5. The X-ray apparatus according to claim 4, wherein the power source is controlled based on end-of-use date / time information and / or date / time information of the previous application of high voltage.