JP2010249764A - Barkhausen noise inspecting device - Google Patents

Barkhausen noise inspecting device Download PDF

Info

Publication number
JP2010249764A
JP2010249764A JP2009101639A JP2009101639A JP2010249764A JP 2010249764 A JP2010249764 A JP 2010249764A JP 2009101639 A JP2009101639 A JP 2009101639A JP 2009101639 A JP2009101639 A JP 2009101639A JP 2010249764 A JP2010249764 A JP 2010249764A
Authority
JP
Japan
Prior art keywords
barkhausen noise
coil
demagnetizing
inspection
detection head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009101639A
Other languages
Japanese (ja)
Inventor
Masatoshi Mizutani
政敏 水谷
Yui Masuda
唯 増田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Original Assignee
NTN Corp
NTN Toyo Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NTN Corp, NTN Toyo Bearing Co Ltd filed Critical NTN Corp
Priority to JP2009101639A priority Critical patent/JP2010249764A/en
Publication of JP2010249764A publication Critical patent/JP2010249764A/en
Pending legal-status Critical Current

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To provide a Barkhausen noise inspecting device for performing inspection of high precision receiving no effect of residual magnetism without separately providing a demagnetizer. <P>SOLUTION: The Barkhausen noise inspecting device includes an exciting coil 3 for magnetizing an inspection target 30, a detection head 1 having a detection coil 4 for detecting the Barkhausen noise emitted from the magnetized inspection target 30 and a power supply 5 for supplying an AC current, which produces an AC magnetic field for magnetization, to the exciting coil 3. In this constitution, there is provided a demagnetizing means 20, which demagnetizes the residual magnetism of the inspection target 30 by providing a demagnetizing function to the detection head 1. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

この発明は、バルクハウゼンノイズを利用して非破壊検査を行うバルクハウゼンノイズ検査装置に関する。   The present invention relates to a Barkhausen noise inspection apparatus that performs nondestructive inspection using Barkhausen noise.

研削焼け、残留応力、硬度、荷重などの非破壊検査を行う検査装置として、バルクハウゼンノイズを利用した種々のバルクハウゼンノイズ検査装置が提案されている(例えば特許文献1〜3)。   Various Barkhausen noise inspection apparatuses using Barkhausen noise have been proposed as inspection apparatuses that perform nondestructive inspections such as grinding burn, residual stress, hardness, and load (for example, Patent Documents 1 to 3).

特開平02−262958号公報Japanese Patent Laid-Open No. 02-262958 特開2001−133441号公報JP 2001-133441 A 特開2006−266686号公報JP 2006-266686 A

バルクハウゼンノイズは、検査対象物の残留磁気により変化する。軸受などの機械部品の製作の研磨工程では、マグネットチャックなどを使用するので、部品に磁気が残留する。このため、このような機械部品を検査対象物とする場合、バルクハウゼンノイズの値が機械部品の残留磁気の影響を受け、研削焼けなどの検出精度が悪くなる。この場合には、検査対象物を脱磁してから、バルクハウゼンノイズ検査装置で検査を行なえば良いが、そのために脱磁機を別途準備する必要がある。   Barkhausen noise changes due to the residual magnetism of the inspection object. In a polishing process for manufacturing a mechanical part such as a bearing, a magnet chuck is used, so that magnetism remains in the part. For this reason, when such a machine part is used as an inspection object, the value of Barkhausen noise is affected by the residual magnetism of the machine part, and detection accuracy such as grinding burn is deteriorated. In this case, the inspection object may be demagnetized and then inspected by the Barkhausen noise inspection apparatus. For this purpose, it is necessary to prepare a demagnetizer separately.

この発明の目的は、脱磁機を別途設けることなく、残留磁気の影響を受けない高精度の検査を行うことができるバルクハウゼンノイズ検査装置を提供することである。   An object of the present invention is to provide a Barkhausen noise inspection apparatus that can perform high-precision inspection without being affected by residual magnetism without separately providing a demagnetizer.

この発明のバルクハウゼンノイズ検査装置は、検査対象物を磁化する励磁コイル、および磁化された前記検査対象物が発するバルクハウゼンノイズを検出する検出コイルを有する検出ヘッドと、前記励磁コイルに磁化のための交流磁界を発生させる交流電流を供給する電源とを備えたバルクハウゼンノイズ検査装置において、前記検出ヘッドに脱磁機能を持たせて前記検査対象物の残留磁気を脱磁する脱磁手段を設けたことを特徴とする。
この構成のバルクハウゼンノイズ検査装置によると、前記検出ヘッドに脱磁機能を持たせて検査対象物の残留磁気を脱磁する脱磁手段を設けたたので、脱磁機を別途設けることなく、残留磁気の影響を受けない高精度の検査を行うことができる。
The Barkhausen noise inspection apparatus according to the present invention includes an excitation coil for magnetizing an inspection object, a detection head having a detection coil for detecting Barkhausen noise emitted from the magnetized inspection object, and the excitation coil for magnetization. In a Barkhausen noise inspection apparatus having a power source for supplying an alternating current for generating an alternating magnetic field, a demagnetizing means for demagnetizing residual magnetism of the inspection object by providing a demagnetizing function to the detection head is provided. It is characterized by that.
According to the Barkhausen noise inspection apparatus of this configuration, since the demagnetizing means is provided to demagnetize the residual magnetism of the inspection object by giving the detection head a demagnetization function, without providing a demagnetizer separately, High-precision inspection can be performed without being affected by residual magnetism.

この発明において、前記脱磁手段は、前記検出ヘッドに設けられ前記検査対象物を脱磁する脱磁コイルと、時間とともに振幅の減衰する交流磁界を発生させる交流電流を前記脱磁コイルに供給する脱磁用電源部とを有し、前記電源は前記脱磁用電源部と、前記励磁コイルに磁化のための交流磁界を発生させる交流電流を供給する励磁用電源部とを有するものとしても良い。このように時間とともに振幅の減衰する交流磁界を発生させることで、効果的に脱磁が行える。   In the present invention, the demagnetizing means supplies a demagnetizing coil that is provided in the detection head and demagnetizes the object to be inspected, and an alternating current that generates an alternating magnetic field whose amplitude decreases with time. A power supply unit for demagnetization, and the power source may include the power supply unit for demagnetization and an excitation power supply unit that supplies an alternating current that generates an alternating magnetic field for magnetization in the excitation coil. . In this way, demagnetization can be performed effectively by generating an alternating magnetic field whose amplitude decreases with time.

この発明において、前記励磁コイルを前記脱磁コイルに共用しても良い。このように、バルクハウゼンノイズの検出に用いる励磁コイルを、脱磁手段の脱磁コイルに共用すれば、専用の脱磁コイルを別途設ける必要がなく、それだけ検出ヘッドをコンパクトに構成できる。   In the present invention, the exciting coil may be shared by the demagnetizing coil. Thus, if the exciting coil used for detecting Barkhausen noise is shared by the demagnetizing coil of the demagnetizing means, there is no need to separately provide a dedicated demagnetizing coil, and the detection head can be made compact accordingly.

この発明において、前記検出ヘッドで検出されたバルクハウゼンノイズから、前記検査対象物の表面部の性状を検出する信号処理手段を設けても良い。この発明のバルクハウゼンノイズ検査装置は、バルクハウゼンノイズの検出を行うまでの処理のみを行うものとしても良いが、上記の信号処理手段を設けることで、さらに、検査対象物の表面部の特定の性状の検出までを行うことができる。検出する前記表面の性状は、例えば、表面の研削焼け、残留応力、欠陥等である。検出されたバルクハウゼンノイズから適宜処理して得たバルクハウゼンノイズ値を閾値と比較することなどで、上記研削焼け、残留応力、欠陥等の検出が可能となる。   In this invention, signal processing means for detecting the property of the surface portion of the inspection object from Barkhausen noise detected by the detection head may be provided. The Barkhausen noise inspection apparatus according to the present invention may perform only processing up to detection of Barkhausen noise. However, by providing the signal processing means described above, it is further possible to specify a specific surface portion of the inspection object. It is possible to detect properties. The surface properties to be detected are, for example, surface grinding burn, residual stress, defects, and the like. By comparing the Barkhausen noise value obtained by appropriately processing the detected Barkhausen noise with a threshold value, it is possible to detect the grinding burn, residual stress, defects, and the like.

この発明において、バルクハウゼンノイズ検査装置は、転動装置の表面または転動装置部品の表面の性状の検出に用いるものとしても良い。この場合に、前記転動装置の表面または転動装置部品の表面に前記検出ヘッドを摺接させることで、表面の性状を検出するものとしても良い。検出ヘッドを摺接させると、エアギャップが生じず、感度良く安定して検出が行える。検出する前記表面の性状は、表面の研削焼け、または残留応力、または欠陥であっても良い。   In the present invention, the Barkhausen noise inspection device may be used for detecting the property of the surface of the rolling device or the surface of the rolling device component. In this case, the surface property may be detected by bringing the detection head into sliding contact with the surface of the rolling device or the surface of the rolling device component. When the detection head is brought into sliding contact, an air gap does not occur and detection can be performed stably with high sensitivity. The surface property to be detected may be surface grinding burn, residual stress, or a defect.

この発明のバルクハウゼンノイズ検査装置は、検査対象物を磁化する励磁コイル、および磁化された前記検査対象物が発するバルクハウゼンノイズを検出する検出コイルを有する検出ヘッドと、前記励磁コイルに磁化のための交流磁界を発生させる交流電流を供給する電源とを備えたバルクハウゼンノイズ検査装置において、前記検出ヘッドに脱磁機能を持たせて前記検査対象物の残留磁気を脱磁する脱磁手段を設けたため、脱磁機を別途設けることなく、残留磁気の影響を受けない高精度の検査を行うことができる。   The Barkhausen noise inspection apparatus according to the present invention includes an excitation coil that magnetizes an inspection object, a detection head that includes a detection coil that detects Barkhausen noise emitted from the magnetized inspection object, and magnetizes the excitation coil. In a Barkhausen noise inspection apparatus having a power source for supplying an alternating current for generating an alternating magnetic field, a demagnetizing means for demagnetizing residual magnetism of the inspection object by providing a demagnetizing function to the detection head is provided. Therefore, a high-accuracy inspection that is not affected by residual magnetism can be performed without separately providing a demagnetizer.

この発明の一実施形態にかかるバルクハウゼンノイズ検査装置の概略構成図である。1 is a schematic configuration diagram of a Barkhausen noise inspection apparatus according to an embodiment of the present invention. 同バルクハウゼンノイズ検査装置の脱磁手段における脱磁コイルに発生させる交流磁界の波形図である。It is a wave form diagram of the alternating current magnetic field generated in the demagnetizing coil in the demagnetizing means of the Barkhausen noise inspection apparatus. 同バルクハウゼンノイズ検査装置の具体的構成図である。It is a specific block diagram of the Barkhausen noise inspection apparatus. 同バルクハウゼンノイズ検査装置の一使用例を示す説明図である。It is explanatory drawing which shows one usage example of the Barkhausen noise inspection apparatus.

この発明の一実施形態を図1ないし図3と共に説明する。この実施形態のバルクハウゼンノイズ検査装置は、励磁コイル3と検出コイル4を含む検出ヘッド1と、前記励磁コイル3に磁化のための交流磁界を発生させる交流電流を供給する励磁用電源部6を含む電源5と、前記検出コイル4の出力信号を処理してバルクハウゼンノイズを抽出するバルクハウゼンノイズ検出回路8と、検出対象物30の残留磁気を脱磁する脱磁手段20とを備える。前記電源5およびバルクハウゼンノイズ検出回路8は、検出ヘッド1とは別体の検査装置本体2における回路基板上に実装されている。検査時には、前記検出ヘッド1が検査対象物30の表面に押し当てられる。検出ヘッド1の検査対象物30に接触させる接触面には摩擦低減用のカバーや被覆等(図示せず)を設けても良い。   An embodiment of the present invention will be described with reference to FIGS. The Barkhausen noise inspection apparatus according to this embodiment includes a detection head 1 including an excitation coil 3 and a detection coil 4, and an excitation power supply unit 6 that supplies an alternating current that generates an alternating magnetic field for magnetization to the excitation coil 3. The power supply 5 includes a Barkhausen noise detection circuit 8 that processes the output signal of the detection coil 4 to extract Barkhausen noise, and a demagnetizing unit 20 that demagnetizes the residual magnetism of the detection target 30. The power source 5 and the Barkhausen noise detection circuit 8 are mounted on a circuit board in the inspection apparatus body 2 that is separate from the detection head 1. At the time of inspection, the detection head 1 is pressed against the surface of the inspection object 30. The contact surface of the detection head 1 that is brought into contact with the inspection object 30 may be provided with a friction reducing cover, a cover, or the like (not shown).

検出ヘッド1における励磁コイル3は、検査対象物30を磁化するためのコイルであって、磁心となる鉄心13に巻かれている。また、検出ヘッド1における検出コイル4は、磁化された前記検査対象物30が発するバルクハウゼンノイズを検出するためのコイルであって、磁心となる鉄心14に巻かれている。前記各鉄心13,14は、フェライトなどの磁性酸化物や積層ケイ素鋼板などからなる。検出コイル4は鉄心14の無い空心コイルであっても良い。検出ヘッド1を検査対象物30の表面に押し当てた状態で、前記各鉄心13,14が検査対象物30の表面に押し当てられる。   The excitation coil 3 in the detection head 1 is a coil for magnetizing the inspection object 30 and is wound around an iron core 13 serving as a magnetic core. The detection coil 4 in the detection head 1 is a coil for detecting Barkhausen noise generated by the magnetized inspection object 30, and is wound around an iron core 14 serving as a magnetic core. Each of the iron cores 13 and 14 is made of a magnetic oxide such as ferrite or a laminated silicon steel plate. The detection coil 4 may be an air core coil without the iron core 14. The iron cores 13 and 14 are pressed against the surface of the inspection object 30 in a state where the detection head 1 is pressed against the surface of the inspection object 30.

脱磁手段20は、前記励磁用コイル3で代用される脱磁用コイルと、図2のように時間とともに振幅の減衰する交流磁界を発生させる交流電流を脱磁用コイル(励磁用コイル3と共用)に供給する脱磁用電源部7とを有する。脱磁用電源部7の供給する交流電流は、時間とともに減衰する交流電流である。前記電源4は、この脱磁用電源部7と前記励磁用電源部6とを有する。励磁用電源部6は振幅の減衰しない交流電流を供給するが、その交流電流の振幅、周波数および波形を変化させることができ、この交流電流に直流バイアス電流を重畳することも可能である。   The demagnetizing means 20 includes a demagnetizing coil that is substituted for the exciting coil 3 and an alternating current that generates an alternating magnetic field whose amplitude is attenuated with time as shown in FIG. And a demagnetizing power supply unit 7 for supplying to the common use. The alternating current supplied by the demagnetization power supply unit 7 is an alternating current that decays with time. The power supply 4 includes the demagnetization power supply unit 7 and the excitation power supply unit 6. The excitation power supply unit 6 supplies an alternating current whose amplitude is not attenuated, but the amplitude, frequency, and waveform of the alternating current can be changed, and a direct current bias current can be superimposed on the alternating current.

前記検出ヘッド1には、前記励磁コイル3や検出コイル4のほか、検査対象物30を励磁する磁束を検出する磁界センサ15が設けられている。前記電源5は、励磁用電源部6および脱磁用電源部7のほか、前記磁界センサ15が検出する磁束の強さに基づき励磁用電源部6の交流電流を制御して検査対象物30を励磁する磁束を一定に保つ図示しない電流制御部を有する。バルクハウゼンノイズ検出回路8は、検出コイル4の検出信号を増幅する増幅器11や、その増幅された検出信号からバルクハウゼンノイズを抽出する抽出フィルタ12などからなる。   In addition to the excitation coil 3 and the detection coil 4, the detection head 1 is provided with a magnetic field sensor 15 that detects a magnetic flux that excites the inspection object 30. In addition to the excitation power source unit 6 and the demagnetization power source unit 7, the power source 5 controls the alternating current of the excitation power source unit 6 based on the strength of the magnetic flux detected by the magnetic field sensor 15 to set the inspection object 30. A current control unit (not shown) that keeps the magnetic flux to be excited constant is provided. The Barkhausen noise detection circuit 8 includes an amplifier 11 that amplifies the detection signal of the detection coil 4, an extraction filter 12 that extracts Barkhausen noise from the amplified detection signal, and the like.

図3は、前記バルクハウゼンノイズ検査装置のより具体的な構成例を示す。検出ヘッド1は、筒状のケース16内に、励磁コイル3を巻いた鉄心13と、検出コイル4を巻いた鉄心14を設置して構成される。励磁コイル3は巻枠17を介して鉄心13に巻かれ、検出コイル4は巻枠18を介して鉄心14に巻かれる。励磁コイル3と検出コイル4は、モールド材19A,19Bにより前記ケース16内で一体化されている。   FIG. 3 shows a more specific configuration example of the Barkhausen noise inspection apparatus. The detection head 1 is configured by installing an iron core 13 around which an excitation coil 3 is wound and an iron core 14 around which a detection coil 4 is wound in a cylindrical case 16. The exciting coil 3 is wound around the iron core 13 via the winding frame 17, and the detection coil 4 is wound around the iron core 14 via the winding frame 18. The excitation coil 3 and the detection coil 4 are integrated in the case 16 by molding materials 19A and 19B.

検査装置本体2は、前記電源5、バルクハウゼンノイズ検出回路8のほかに、同検出回路8で抽出されたバルクハウゼンノイズを信号処理する信号処理回路9を有する。具体的には、信号処理回路9は、バルクハウゼンノイズ信号の実効値、振幅の最大値や平均値、包絡線の振幅などを測定し、これをバルクハウゼンノイズ値とする。バルクハウゼンノイズ値は、交流磁界の数サイクル分のバルクハウゼンノイズの値を測定し、それらの平均値を求めたものであっても良い。この信号処理回路9では、測定したバルクハウゼンノイズ値から、検査対象物30の表面の性状を検出する。例えば、バルクハウゼンノイズ値が、予め定められたしきい値を超えたときに、検査対象物30の表面に研削焼けなどの異常があると判断する。しきい値を別の値とすることで、微細な割れや空洞等の欠陥があると判断するものとできる。また、信号処理回路9は、バルクハウゼンノイズ値から、検査対象物30の表面部の残留応力を測定するものとしても良い。検査装置本体2は表示部10に接続される。表示部10は、測定したバルクハウゼン値や、異常の有無などを表示する。   In addition to the power supply 5 and the Barkhausen noise detection circuit 8, the inspection apparatus main body 2 includes a signal processing circuit 9 that performs signal processing on the Barkhausen noise extracted by the detection circuit 8. Specifically, the signal processing circuit 9 measures the effective value, the maximum or average value of the amplitude, the amplitude of the envelope, and the like of the Barkhausen noise signal, and sets this as the Barkhausen noise value. The Barkhausen noise value may be a value obtained by measuring the value of Barkhausen noise for several cycles of the alternating magnetic field and obtaining an average value thereof. The signal processing circuit 9 detects the surface property of the inspection object 30 from the measured Barkhausen noise value. For example, when the Barkhausen noise value exceeds a predetermined threshold value, it is determined that there is an abnormality such as grinding burn on the surface of the inspection object 30. By setting the threshold value to another value, it can be determined that there are defects such as fine cracks and cavities. Further, the signal processing circuit 9 may measure the residual stress of the surface portion of the inspection object 30 from the Barkhausen noise value. The inspection apparatus body 2 is connected to the display unit 10. The display unit 10 displays the measured Barkhausen value, presence / absence of abnormality, and the like.

この構成のバルクハウゼンノイズ検査装置を用いた検査対象物30の非破壊検査では、バルクハウゼンノイズの検出に先立ち、脱磁手段20により検査対象物30の脱磁を行う。この脱磁では、検出ヘッド1を検査対象物30に押し当てて鉄心13を検査対象物30に接触させることで鉄心13と検査対象物30とで磁気回路を構成する。この状態で、励磁コイル3を脱磁コイルに代用して、検査装置本体2の電源5の脱磁用電源部7から振幅が時間とともに減衰する交流電流を前記励磁コイル3に供給する。これにより、図2のように振幅が時間とともに減衰する交流磁界を励磁コイル3に発生させ、検査対象物30を交流脱磁する。   In the non-destructive inspection of the inspection object 30 using the Barkhausen noise inspection apparatus having this configuration, the inspection object 30 is demagnetized by the demagnetizing means 20 prior to detection of the Barkhausen noise. In this demagnetization, the iron core 13 and the inspection object 30 constitute a magnetic circuit by pressing the detection head 1 against the inspection object 30 and bringing the iron core 13 into contact with the inspection object 30. In this state, the exciting coil 3 is replaced with a demagnetizing coil, and an alternating current whose amplitude is attenuated with time is supplied to the exciting coil 3 from the demagnetizing power supply unit 7 of the power source 5 of the inspection apparatus body 2. As a result, an alternating magnetic field whose amplitude decays with time is generated in the exciting coil 3 as shown in FIG. 2, and the inspection object 30 is AC demagnetized.

このように、検査対象物30の残留磁気を脱磁してから、バルクハウゼンノイズの検出を以下のように行う。脱磁の場合と同様に、検査対象物30に検出ヘッド1を押し当てると、鉄心13,14が検査対象物30に接触し、鉄心13と検査対象物30とで磁気閉回路が構成される。この状態で、検査装置本体2の電源5の励磁用電源部7から振幅が減衰しない一定の交流電流を前記励磁コイル3に供給する。これにより、励磁コイル3に一定振幅の交流磁界を発生させ、検査対象物30を磁化する。検出コイル4は、磁化された検査対象物30が発するバルクハウゼンノイズを検出する。検出コイル4が検出したバルクハウゼンノイズ信号は、検査装置本体2のバルクハウゼンノイズ検出回路8において、増幅器11で増幅され、抽出フィルタ12によりバルクハウゼンノイズ信号が抽出される。抽出されたバルクハウゼンノイズ信号は次段の信号処理回路9で処理されて、バルクハウゼンノイズ値が算出され、この値から検査対象物30の表面異常(研削焼けなど)の有無などが判断される。   Thus, after demagnetizing the residual magnetism of the inspection object 30, Barkhausen noise is detected as follows. As in the case of demagnetization, when the detection head 1 is pressed against the inspection object 30, the iron cores 13 and 14 come into contact with the inspection object 30, and the iron core 13 and the inspection object 30 constitute a magnetic closed circuit. . In this state, a constant alternating current whose amplitude is not attenuated is supplied to the excitation coil 3 from the excitation power supply unit 7 of the power supply 5 of the inspection apparatus body 2. As a result, an alternating magnetic field having a constant amplitude is generated in the exciting coil 3 and the inspection object 30 is magnetized. The detection coil 4 detects Barkhausen noise generated by the magnetized inspection object 30. The Barkhausen noise signal detected by the detection coil 4 is amplified by the amplifier 11 in the Barkhausen noise detection circuit 8 of the inspection apparatus body 2, and the Barkhausen noise signal is extracted by the extraction filter 12. The extracted Barkhausen noise signal is processed by a signal processing circuit 9 in the next stage, and a Barkhausen noise value is calculated. From this value, the presence or absence of surface abnormality (such as grinding burn) of the inspection object 30 is determined. .

なお、前記脱磁処理によっても検査対象物30に若干の残留磁気が残る場合には、バルクハウゼンノイズの検出に先立ち、例えば磁界センサ15(図1)を残留磁気検出用センサとして利用することで残留磁気を検出し、バルクハウゼンノイズ検出時に信号処理回路9でバルクハウゼンノイズ値を算出する際に、前記残留磁気の検出値に基づきバルクハウゼンノイズ値を補正するようにしても良い。   If some residual magnetism remains on the inspection object 30 even after the demagnetization process, prior to the detection of Barkhausen noise, for example, the magnetic field sensor 15 (FIG. 1) is used as a residual magnetism detection sensor. When the residual magnetism is detected and the Barkhausen noise value is calculated by the signal processing circuit 9 when the Barkhausen noise is detected, the Barkhausen noise value may be corrected based on the detected value of the residual magnetism.

このように、このバルクハウゼンノイズ検査装置では、検査対象物30の残留磁気を脱磁する脱磁手段20を設けているので、脱磁機を別途設けることなく、残留磁気の影響を受けない高精度の検査を行うことができる。   As described above, in this Barkhausen noise inspection apparatus, since the demagnetizing means 20 for demagnetizing the residual magnetism of the inspection object 30 is provided, the demagnetizer is not separately provided and the high magnetic force that is not affected by the residual magnetism. Inspection of accuracy can be performed.

また、この実施形態では、バルクハウゼンノイズの検出に用いる励磁コイル3を、脱磁手段20の脱磁コイルに共用しているので、専用の脱磁コイルを別途設ける必要がなく、それだけ検出ヘッド1をコンパクトに構成できる。   In this embodiment, since the exciting coil 3 used for detecting Barkhausen noise is shared by the demagnetizing coil of the demagnetizing means 20, it is not necessary to separately provide a dedicated demagnetizing coil. Can be configured compactly.

図4は、前記バルクハウゼンノイズ検査装置を使用して行う非破壊検査の一例を示す。ここでは、軸受の品質を検査する装置として使用しており、具体的には軸受の内輪21の転走面21aの研削焼けを検出する。バルクハウゼンノイズ検査装置の検出ヘッド1は、移動可能な支持部材22に支持され、支持部材22の移動により軸受内輪21の転走面21aの表面を摺動しながら異常箇所を検出する。軸受内輪21は回転軸23の外径面に嵌着されており、回転軸23を回転させることで、軸受内輪21の転走面21aの全周面に前記検出ヘッド1を摺動させて研削焼けを検査することができる。
オンライン上で、このようにバルクハウゼンノイズ検査装置を使用すると、軸受内輪21の転走面21aの研削焼けなどの異常を全数検査することができ、品質保証能力を高めることができる。
FIG. 4 shows an example of a nondestructive inspection performed using the Barkhausen noise inspection apparatus. Here, it is used as a device for inspecting the quality of the bearing, and specifically, the grinding burn of the rolling surface 21a of the inner ring 21 of the bearing is detected. The detection head 1 of the Barkhausen noise inspection apparatus is supported by a movable support member 22, and detects an abnormal part while sliding on the surface of the rolling surface 21 a of the bearing inner ring 21 by the movement of the support member 22. The bearing inner ring 21 is fitted on the outer diameter surface of the rotating shaft 23. By rotating the rotating shaft 23, the detection head 1 is slid on the entire circumferential surface of the rolling surface 21a of the bearing inner ring 21 and ground. Burns can be inspected.
When the Barkhausen noise inspection apparatus is used on-line in this way, it is possible to inspect all abnormalities such as grinding burn of the rolling surface 21a of the bearing inner ring 21 and improve the quality assurance capability.

図4では、前記バルクハウゼンノイズ検査装置を軸受内輪21の転走面21aにおける研削焼けの検査に用いた例を示したが、検出する表面情報は残留応力や欠陥であっても良い。また、検査対象物は軸受部品である内輪21に限らず、例えば軸受そのものの表面情報を検出するものとしても良い。また、検査対象物は軸受に限らず他の転動装置や転動装置部品であっても良く、この場合にもその転動装置や転動装置部品の表面情報を精度良く検出することができる。   Although FIG. 4 shows an example in which the Barkhausen noise inspection device is used for inspection of grinding burn on the rolling surface 21a of the bearing inner ring 21, surface information to be detected may be residual stress or a defect. Further, the inspection object is not limited to the inner ring 21 that is a bearing component, and may be, for example, one that detects surface information of the bearing itself. Further, the inspection object is not limited to the bearing, and may be another rolling device or rolling device component. In this case, the surface information of the rolling device or rolling device component can be detected with high accuracy. .

1…検出ヘッド
3…励磁コイル(脱磁コイル兼用)
4…検出コイル
5…電源
6…励磁用電源部
7…脱磁用電源部
20…脱磁手段
21…軸受内輪(転動装置部品)
30…検査対象物
1 ... detection head 3 ... excitation coil (also used as demagnetizing coil)
DESCRIPTION OF SYMBOLS 4 ... Detection coil 5 ... Power supply 6 ... Excitation power supply part 7 ... Demagnetization power supply part 20 ... Demagnetizing means 21 ... Bearing inner ring (rolling device components)
30 ... Inspection object

Claims (7)

検査対象物を磁化する励磁コイル、および磁化された前記検査対象物が発するバルクハウゼンノイズを検出する検出コイルを有する検出ヘッドと、前記励磁コイルに磁化のための交流磁界を発生させる交流電流を供給する電源とを備えたバルクハウゼンノイズ検査装置において、
前記検出ヘッドに脱磁機能を持たせて前記検査対象物の残留磁気を脱磁する脱磁手段を設けたことを特徴とするバルクハウゼンノイズ検査装置。
An excitation coil that magnetizes the inspection object, a detection head having a detection coil that detects Barkhausen noise generated by the magnetized inspection object, and an alternating current that generates an alternating magnetic field for magnetization is supplied to the excitation coil In a Barkhausen noise inspection device equipped with a power supply
A Barkhausen noise inspection apparatus comprising a demagnetizing means for demagnetizing residual magnetism of the inspection object by providing the detection head with a demagnetization function.
請求項1において、前記脱磁手段は、前記検出ヘッドに設けられ前記検査対象物を脱磁する脱磁コイルと、時間とともに振幅の減衰する交流磁界を発生させる交流電流を前記脱磁コイルに供給する脱磁用電源部とを有し、前記電源は前記脱磁用電源部と、前記励磁コイルに磁化のための交流磁界を発生させる交流電流を供給する励磁用電源部とを有するバルクハウゼンノイズ検査装置。   2. The demagnetizing unit according to claim 1, wherein the demagnetizing means supplies the demagnetizing coil that is provided in the detection head and demagnetizes the object to be inspected, and an alternating current that generates an alternating magnetic field whose amplitude decreases with time. Barkhausen noise having a power supply unit for demagnetization, and the power supply includes a power supply unit for demagnetization and an excitation power supply unit that supplies an alternating current that generates an alternating magnetic field for magnetization in the excitation coil Inspection device. 請求項1または請求項2において、前記励磁コイルを前記脱磁コイルに共用したバルクハウゼンノイズ検査装置。   3. The Barkhausen noise inspection apparatus according to claim 1, wherein the exciting coil is shared with the demagnetizing coil. 請求項1ないし請求項3のいずれか1項において、前記検出ヘッドで検出されたバルクハウゼンノイズから、前記検査対象物の表面部の性状を検出する信号処理手段を設けたバルクハウゼンノイズ検査装置。   4. The Barkhausen noise inspection apparatus according to claim 1, further comprising a signal processing unit configured to detect a property of a surface portion of the inspection target object from Barkhausen noise detected by the detection head. 5. 請求項1ないし請求項4のいずれか1項において、転動装置の表面または転動装置部品の表面の性状の検出に用いられるバルクハウゼンノイズ検査装置。   The Barkhausen noise inspection apparatus according to any one of claims 1 to 4, wherein the Barkhausen noise inspection apparatus is used for detecting a property of a surface of a rolling device or a surface of a rolling device component. 請求項5において、前記転動装置の表面または転動装置部品の表面に前記検出ヘッドを摺接させることで、表面の性状を検出するものとしたバルクハウゼンノイズ検査装置。   6. The Barkhausen noise inspection apparatus according to claim 5, wherein the property of the surface is detected by sliding the detection head on the surface of the rolling device or the surface of a rolling device component. 請求項4ないし請求項6のいずれか1項において、検出する前記表面の性状が、表面の研削焼け、または残留応力、または欠陥であるバルクハウゼンノイズ検査装置。   7. The Barkhausen noise inspection device according to claim 4, wherein the surface property to be detected is surface grinding burn, residual stress, or a defect.
JP2009101639A 2009-04-20 2009-04-20 Barkhausen noise inspecting device Pending JP2010249764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009101639A JP2010249764A (en) 2009-04-20 2009-04-20 Barkhausen noise inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009101639A JP2010249764A (en) 2009-04-20 2009-04-20 Barkhausen noise inspecting device

Publications (1)

Publication Number Publication Date
JP2010249764A true JP2010249764A (en) 2010-11-04

Family

ID=43312256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009101639A Pending JP2010249764A (en) 2009-04-20 2009-04-20 Barkhausen noise inspecting device

Country Status (1)

Country Link
JP (1) JP2010249764A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012046682A1 (en) 2010-10-04 2012-04-12 株式会社エヌ・ティ・ティ・ドコモ Radio base station apparatus, mobile terminal apparatus and wireless communication method
JP2013160647A (en) * 2012-02-06 2013-08-19 Tokyo Energy & Systems Inc Magnetizing apparatus for magnetic flaw detection
JP2018171356A (en) * 2017-03-31 2018-11-08 Hoya株式会社 Endoscope insertion shape detection device, endoscope system, and endoscope manufacturing method
CN113670483A (en) * 2021-08-25 2021-11-19 南昌航空大学 Method and device for measuring dynamic Barkhausen noise stress
CN115032577A (en) * 2022-08-10 2022-09-09 之江实验室 Low-noise residual magnetism detection device and method for annular ferrite material

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012046682A1 (en) 2010-10-04 2012-04-12 株式会社エヌ・ティ・ティ・ドコモ Radio base station apparatus, mobile terminal apparatus and wireless communication method
JP2013160647A (en) * 2012-02-06 2013-08-19 Tokyo Energy & Systems Inc Magnetizing apparatus for magnetic flaw detection
JP2018171356A (en) * 2017-03-31 2018-11-08 Hoya株式会社 Endoscope insertion shape detection device, endoscope system, and endoscope manufacturing method
CN113670483A (en) * 2021-08-25 2021-11-19 南昌航空大学 Method and device for measuring dynamic Barkhausen noise stress
CN115032577A (en) * 2022-08-10 2022-09-09 之江实验室 Low-noise residual magnetism detection device and method for annular ferrite material

Similar Documents

Publication Publication Date Title
WO2010050155A1 (en) Barkhausen noise inspection apparatus and inspection method
JP2010230485A (en) Barkhausen noise test apparatus and barkhausen noise test method
JP2010249764A (en) Barkhausen noise inspecting device
JP5269564B2 (en) Tubular Defect Evaluation Method and Tubular Defect Evaluation Apparatus
RU2442151C2 (en) Method for subsurface flaw detection in ferromagnetic objects
JP2012063296A (en) Barkhausen noise inspection device
JP2006189347A (en) Flaw detection probe and flaw detector
JP2011069654A (en) Barkhausen noise inspection system and barkhausen noise inspection method
JP2013160739A (en) Method and apparatus for detecting flaws in magnetic materials
KR101150486B1 (en) Apparatus and Method for detecting the wall thinning of pipeline using pulse magnetic field
JP5557645B2 (en) Barkhausen noise inspection system
Li et al. Numerical simulation and experiments of magnetic flux leakage inspection in pipeline steel
JP5579471B2 (en) Barkhausen noise inspection system
JP2010243175A (en) Barkhausen noise inspecting device
RU2493561C1 (en) Eddy current magnetic method of failure detection of ferrous objects
JP2012008057A (en) Barkhausen noise inspection device
JP2010243174A (en) Barkhausen noise inspecting device
JP2010169509A (en) Barkhausen noise inspection system
JPH0560510A (en) Flatness measurement and magnetic particle inspection method for metallic component
JP2006084225A (en) Eddy current flaw detection method
JP2010091493A (en) Barkhausen noise inspection system
JP2012154660A (en) Grinding burning detection device
JP2010145308A (en) Magnetic measuring apparatus
IE900319L (en) Measuring flux density
Fukuoka Development of ECT probe for flaw detection of microcrack in spring steel material