JP2010244834A5 - - Google Patents

Claims (11)

And a X-ray target convergence electron beam is obtained from the electron source and the electron source are irradiated, an X-ray generator is constituted by an X-ray tube for generating X-rays, an input Drive circuit for converting AC or DC power to be converted into high frequency AC power of 10 to 200 kHz, a piezoelectric step-up transformer for boosting the high frequency AC power converted by the drive circuit while suppressing heat generation and electromagnetic radiation noise, and the like A compact high-voltage power supply having a voltage boosting rectifier circuit that boosts and rectifies AC power boosted by a piezoelectric step-up transformer to obtain a high voltage of 30 to 100 kV and loads between the electron source and the X-ray target. An X-ray tube is installed inside the X-ray tube, and a high-voltage cable connecting the high-voltage output of the voltage boosting rectifier circuit and the load is not provided outside the X-ray tube. Line generation apparatus.   The X-ray generator according to claim 1, wherein a plurality of the piezoelectric step-up transformers in the small high-voltage power source are used in parallel.   3. The power generation unit according to claim 1, wherein each of the plurality of piezoelectric step-up transformers in the small high-voltage power source generates power by controlling and using a phase of the high-frequency power obtained from the drive circuit. X-ray generator.   4. The X-ray generator according to claim 2, wherein each of the voltage boosting rectifier circuits is connected to each of the plurality of piezoelectric step-up transformers in the compact high-voltage power supply.   5. The X-ray according to claim 2, wherein in the small high-voltage power source, the frequency of the high-frequency AC power for performing boost control in each of the plurality of piezoelectric step-up transformers is the same. Generator.   In the small high-voltage power supply, each of the plurality of piezoelectric step-up transformers has a modularized structure in which a piezoelectric transformer and a voltage step-up rectifier circuit are integrally formed on the substrate for each piezoelectric step-up transformer unit. The X-ray generator according to claim 2, wherein the X-ray generator is provided.   The power supply to be input from the primary power supply provided outside the X-ray tube to the small high-voltage power supply installed inside the X-ray tube is a low voltage of 12-100V. The X-ray generation device according to any one of 5.   An X-ray measurement apparatus comprising the X-ray generation apparatus according to claim 1. Generates X-rays from a voltage power source that converts AC or DC power input from a primary power source into a high voltage, an electron source, and an X-ray target irradiated with a focused electron beam obtained from the electron source An X-ray generator installed inside an X-ray tube for
A drive circuit that converts AC or DC power input from the primary power source into high-frequency AC power of 10-200 kHz, and the high-frequency AC power converted by the drive circuit generates heat or electromagnetic radiation noise. And a voltage boosting rectifier circuit that obtains a high voltage of 30 to 100 kV by boosting and rectifying the AC power boosted by the piezoelectric boosting transformer, and ,
An X-ray generator characterized in that a high voltage output of the voltage boosting rectifier circuit and the electron source are connected by internal high voltage wiring. Generates X-rays from a voltage power source that converts AC or DC power input from a primary power source into a high voltage, an electron source, and an X-ray target irradiated with a focused electron beam obtained from the electron source An X-ray generator installed inside an X-ray tube for
A drive circuit that converts alternating current or direct current power input from a primary power source into high frequency alternating current power of 10 to 200 kHz, and the high frequency alternating current power converted by the drive circuit generates heat and electromagnetic radiation noise. A small-sized high-voltage power supply having a piezoelectric step-up transformer that suppresses and boosts, and a voltage boosting rectifier circuit that boosts and rectifies AC power boosted by the piezoelectric step-up transformer to obtain a high voltage of 30 to 100 kV, and
The small voltage power source is installed on the X-ray target side,
An X-ray generator characterized in that a high voltage output of the voltage boosting rectifier circuit and the X-ray target are connected by an internal high voltage wiring. An X-ray measurement apparatus comprising the X-ray generation apparatus according to claim 9.