JP2010235339A5 - - Google Patents
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- JP2010235339A5 JP2010235339A5 JP2009082730A JP2009082730A JP2010235339A5 JP 2010235339 A5 JP2010235339 A5 JP 2010235339A5 JP 2009082730 A JP2009082730 A JP 2009082730A JP 2009082730 A JP2009082730 A JP 2009082730A JP 2010235339 A5 JP2010235339 A5 JP 2010235339A5
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Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009082730A JP5589294B2 (en) | 2009-03-30 | 2009-03-30 | Nitrogen-containing silane compound powder and method for producing the same |
EP10758906.1A EP2415708B1 (en) | 2009-03-30 | 2010-03-30 | Nitrogen-containing silane compound powder and method for producing same |
PCT/JP2010/056115 WO2010114141A1 (en) | 2009-03-30 | 2010-03-30 | Nitrogen-containing silane compound powder and method for producing same |
CN201080015350.5A CN102365232B (en) | 2009-03-30 | 2010-03-30 | Nitrogen-containing silane compound powder and method for producing same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009082730A JP5589294B2 (en) | 2009-03-30 | 2009-03-30 | Nitrogen-containing silane compound powder and method for producing the same |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010235339A JP2010235339A (en) | 2010-10-21 |
JP2010235339A5 true JP2010235339A5 (en) | 2012-02-23 |
JP5589294B2 JP5589294B2 (en) | 2014-09-17 |
Family
ID=43090053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009082730A Expired - Fee Related JP5589294B2 (en) | 2009-03-30 | 2009-03-30 | Nitrogen-containing silane compound powder and method for producing the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5589294B2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5413209B2 (en) * | 2010-01-14 | 2014-02-12 | 宇部興産株式会社 | Non-blocking nozzle and method for producing a solid product using the same |
EP2554629B1 (en) | 2010-03-31 | 2016-03-09 | Ube Industries, Ltd. | Method for producing sialon-based acid nitride phosphor, and sialon-based acid nitride phosphor |
KR101479876B1 (en) * | 2013-12-23 | 2015-01-06 | 오씨아이 주식회사 | Method of manufacturing silicon nitride powder |
KR101574888B1 (en) * | 2014-04-14 | 2015-12-07 | 오씨아이 주식회사 | Method of continuous manufacturing silicon nitride powder having uniform in size |
KR101766957B1 (en) * | 2015-05-29 | 2017-08-10 | 오씨아이 주식회사 | Method of manufacturing silicon nitride powder |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5855316A (en) * | 1981-09-24 | 1983-04-01 | Toyo Soda Mfg Co Ltd | Manufacture of silicon nitride powder |
US4686095A (en) * | 1985-12-23 | 1987-08-11 | Ford Motor Company | Method of making ultrapure silicon nitride precursor |
DE3924361A1 (en) * | 1989-07-22 | 1991-01-24 | Huels Chemische Werke Ag | METHOD FOR PRODUCING SILICON DIIMIDE WITH A LOW CARBON CONTENT |
JP3475614B2 (en) * | 1995-12-05 | 2003-12-08 | 宇部興産株式会社 | Silicon diimide |
JP3550919B2 (en) * | 1995-12-12 | 2004-08-04 | 宇部興産株式会社 | Nitrogen-containing silane compounds |
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2009
- 2009-03-30 JP JP2009082730A patent/JP5589294B2/en not_active Expired - Fee Related