JP2010232405A - Support device and support program for analyzing operating history of substrate processing device, and recording medium - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To facilitate the analysis of operating history in a substrate processing device applying a predetermined treatment to a substrate with a plurality of continuous operations. <P>SOLUTION: In a support device 100 for analyzing operating history of a substrate processing device, a log showing operating history formed by the substrate processing device is acquired by a log acquisition means 151, the history of states of the substrate processing device, the states having changed in time sequence, is specified based on the log by a means 152 for creating state history information, and the state history information showing the history of the states of the substrate processing device in accordance with time in a predetermined period is created. A plurality of simulated images are displayed on a display device as moving images in time sequence by a display control means 154 based on the state history information, wherein the simulated images correspond to a plurality of states of the substrate processing device in a period after a specific time specified by specified information acquired by a means 153 for acquiring specified information. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an operation history analysis support apparatus for a substrate processing apparatus, an operation history analysis support program for a substrate processing apparatus, and a recording medium for supporting analysis of an operation history in the substrate processing apparatus.

  A substrate processing apparatus for performing predetermined processing such as etching or film formation on a substrate includes, for example, a processing system that performs processing on the substrate, and loading of the substrate into the processing system and unloading of the substrate from the processing system. And a control unit for controlling the transport system and the processing system and the transport system. The processing system has, for example, a plurality of processing units. The control unit is configured using a computer.

  In general, in the substrate processing apparatus as described above, when some kind of trouble occurs, text information is used so that the cause of the trouble can be clarified and the trouble can be appropriately dealt with. A plurality of types of history information (hereinafter also referred to as logs) are generated. The types of logs include those representing the history of operation of the substrate processing apparatus, those representing the history of operations by the operator, and those representing the history of alarms (warnings) that notify the occurrence of a failure.

  Conventionally, when a failure occurs in a substrate processing apparatus, in order to elucidate the cause of the failure or to appropriately deal with the failure, a person reads and analyzes multiple types of logs to generate the failure. The situation of the substrate processing apparatus at the time has been grasped. However, this work required specialized knowledge and great effort. Therefore, as shown below, various techniques for facilitating the analysis of the situation when a failure occurs have been proposed.

  Patent Document 1 describes a technique for recording a log related to substrate transport, a log related to a substrate processing state, and a log related to an alarm in association with the substrate.

  In Patent Document 2, a device failure list is created in the order of failure based on the error log, another device configuration related to the failed device is acquired based on the device configuration information database, and the operation of the device related to the failed device is further acquired. A technique is described in which a state is acquired, a failure part of a failed device is identified based on a device failure database in which an error definition is databased for each type of device, and the identified failure part is displayed and output.

  In Patent Document 3, a keyword used for log search is set, a log file for each type used for log analysis is set, logs of the set log files are extracted and combined, and the logs are time-series Describes a technology that creates a log file for analysis sorted in the form of a log, displays the log of the log file for analysis on the display, and searches and highlights the log containing the set keyword from the log file for analysis .

  Further, in Patent Document 4, when a failure is detected, a failure diagnosis program for notifying the occurrence of the failure to the outside via a communication line and analyzing the cause of the failure is received and executed. A technique for generating failure determination data for specifying the cause of failure and outputting the failure determination data to a communication line is described.

JP 2006-277298 A JP 2007-257581 A JP 2008-140248 A JP-A-9-297893

  In a substrate processing apparatus, for example, a predetermined process is performed on a substrate with a plurality of continuous operations, such as a series of operations related to loading or unloading of a substrate. Therefore, in order to accurately grasp the status of the substrate processing apparatus at the time of failure occurrence, it is necessary to grasp not only the state of the substrate processing apparatus at the time of failure occurrence but also the continuous operation of the substrate processing apparatus before and after the failure occurrence. Is often important. However, there has been a problem that it has been difficult to grasp the operation of the substrate processing apparatus before and after the failure because there has been no technology that makes it easy to grasp the history of the operation of the substrate processing apparatus before and after the occurrence of the failure. It was.

  Further, in the substrate processing apparatus, there is a possibility that the substrate processing amount (throughput) per time may be reduced when there is a change in the order of a plurality of continuous operations in accordance with the software upgrade of the control unit. There may be a problem that an alarm does not occur, such as a decrease in throughput. Conventionally, the elucidation of such a problem that an alarm does not occur cannot be performed by using an alarm log as a clue, but only by analyzing a huge log. For this reason, there has been a problem that a great deal of labor is required in order to elucidate the malfunction that does not generate an alarm.

  The present invention has been made in view of such problems, and an object thereof is to easily analyze an operation history in a substrate processing apparatus that performs a predetermined process on a substrate with a plurality of continuous operations. An object of the present invention is to provide an operation history analysis support apparatus for a substrate processing apparatus, an operation history analysis support program for a substrate processing apparatus, and a recording medium.

  The operation history analysis support device of the substrate processing apparatus of the present invention performs a predetermined process on a substrate with a plurality of continuous operations, and also indicates operation history information representing an operation history associated with a time in a predetermined period. Is a device that supports analysis of the history of operations in the substrate processing apparatus that generates the.

The operation history analysis support device of the substrate processing apparatus of the present invention is
Obtaining means for obtaining the operation history information generated by the substrate processing apparatus;
Based on the operation history information acquired by the acquisition unit, the history of the state of the substrate processing apparatus that has changed in time series is specified, and the history of the state of the substrate processing apparatus associated with the time in the predetermined period State history information creating means for creating state history information representing
Designation information obtaining means for obtaining designation information for designating a specific location within the predetermined period;
A plurality of substrate processing apparatuses in a period after a specific location specified by the designation information, having a function of causing a display device to display a simulated image of the substrate processing apparatus corresponding to each state based on the state history information; Display control means for displaying a plurality of the simulated images corresponding to the state as a moving image on the display device in time series.

  In the operation history analysis support apparatus of the substrate processing apparatus of the present invention, the operation history information generated by the substrate processing apparatus is acquired by the acquisition means, and based on the operation history information, the state history information generation means generates the time history information in time series. A history of the state of the changed substrate processing apparatus is specified, and state history information representing the history of the state of the substrate processing apparatus associated with the time in a predetermined period is created. Then, based on this state history information, a plurality of simulated images corresponding to a plurality of states of the substrate processing apparatus in a period after a specific location designated by the designation information are displayed as moving images in time series by the display control means. Displayed on the display device.

  The operation history analysis support apparatus of the substrate processing apparatus of the present invention may further include an output unit that outputs the state history information.

  In the operation history analysis support apparatus for a substrate processing apparatus of the present invention, the display control unit further has a function of causing the display device to display a plurality of operations represented by the operation history information as a plurality of operation items. The specified information acquisition means has a function that allows a specific operation item to be selected from the plurality of operation items displayed on the display device, and a time corresponding to the selected specific operation item. And a function of acquiring information as the designation information. In this case, the designation information acquisition unit further includes a function that enables one or more of the plurality of action items displayed on the display device to be registered as a bookmark, and one registered as a bookmark. It may have a function that makes it possible to select the specific action item from the above action items.

  In the operation history analysis support apparatus for a substrate processing apparatus of the present invention, the substrate processing apparatus further generates alarm history information representing an alarm history associated with a time in the predetermined period, and the acquisition means The alarm history information generated by the substrate processing apparatus is acquired together with the operation history information, and the display control means further has a function of causing a display device to display a list of alarms corresponding to the alarm history information. The specified information acquisition means includes a function that enables a specific alarm to be selected from the list of alarms displayed on the display device, and time information corresponding to the selected specific alarm. It may have a function to acquire as the specified information.

  Further, in the operation history analysis support apparatus for a substrate processing apparatus of the present invention, the designation information acquisition means includes a function that enables designation of a specific time, and a function that acquires information at a designated time as the designation information. You may have.

  Further, in the operation history analysis support apparatus for a substrate processing apparatus of the present invention, the designation information acquisition means includes a function that enables designation of one of a plurality of actions represented by the action history information, and a designation. A function of acquiring time information corresponding to the performed operation as the designation information.

  In the operation history analysis support apparatus for a substrate processing apparatus of the present invention, the designation information acquisition unit inputs search information for searching for a specific operation from a plurality of operations represented by the operation history information. A function for enabling, a function for searching for the specific action based on the input search information, and a function for acquiring time information corresponding to the searched specific action as the designation information. May be.

  In the operation history analysis support apparatus for a substrate processing apparatus of the present invention, the designation information acquisition unit extracts one or more operations that match a predetermined condition from a plurality of operations represented by the operation history information. A function that enables the input of extraction information to be performed, a function that extracts one or more actions based on the input extraction information, and a specific action among the one or more extracted actions And a function of acquiring time information corresponding to a specified specific operation as the specified information.

The operation history analysis support program of the substrate processing apparatus of the present invention performs an operation history information representing an operation history associated with a time in a predetermined period while performing a predetermined process on a substrate with a plurality of continuous operations. In order to support the analysis of the history of operation in the substrate processing apparatus that generates
Obtaining means for obtaining the operation history information generated by the substrate processing apparatus;
Based on the operation history information acquired by the acquisition unit, the history of the state of the substrate processing apparatus that has changed in time series is specified, and the history of the state of the substrate processing apparatus associated with the time in the predetermined period State history information creating means for creating state history information representing
Designation information obtaining means for obtaining designation information for designating a specific location within the predetermined period, and displaying a simulated image of the substrate processing apparatus corresponding to each state on the display device based on the state history information A display that has a function and displays a plurality of simulated images corresponding to a plurality of states of the substrate processing apparatus in a period after a specific location designated by the designation information as a moving image on a display device in time series Control means,
It is intended to function as.

  The computer-readable recording medium of the present invention records the operation history analysis support program of the substrate processing apparatus of the present invention.

  According to the operation history analysis support apparatus of the substrate processing apparatus, the operation history analysis support program of the substrate processing apparatus or the recording medium of the present invention, the history of the state of the substrate processing apparatus changed in time series based on the operation history information. The state history information indicating the history of the state of the substrate processing apparatus that is specified and associated with the time in the predetermined period is created, and based on this state history information, the substrate processing apparatus in the period after the specified specific location A plurality of simulated images corresponding to a plurality of states can be displayed on the display device in time series as a moving image. Thereby, according to this invention, there exists an effect that it becomes possible to analyze the log | history of operation | movement in a substrate processing apparatus easily.

It is a top view which shows roughly the substrate processing apparatus in one embodiment of this invention. It is a block diagram which shows the hardware constitutions of the control part of the substrate processing apparatus in one embodiment of this invention. It is a block diagram which shows the hardware constitutions of the operation history analysis assistance apparatus which concerns on one embodiment of this invention. It is a functional block diagram which shows the function structure of the apparatus controller in FIG. It is a functional block diagram which shows the function structure of the operation history analysis assistance apparatus which concerns on one embodiment of this invention. It is explanatory drawing which shows one state of the display screen by the operation history analysis assistance apparatus which concerns on one embodiment of this invention. It is explanatory drawing which shows the other state of the display screen by the operation history analysis assistance apparatus which concerns on one embodiment of this invention. It is explanatory drawing which shows the example of a part of machine log. It is explanatory drawing which shows the example of a part of alarm log. It is a flowchart which shows operation | movement of the operation history analysis assistance apparatus which concerns on one embodiment of this invention.

  Embodiments of the present invention will be described below with reference to the drawings. First, the configuration of the substrate processing apparatus in one embodiment of the present invention will be described with reference to FIG. FIG. 1 is a plan view schematically showing a substrate processing apparatus in the present embodiment. As shown in FIG. 1, the substrate processing apparatus 1 according to the present embodiment includes, for example, a film forming process, a diffusion process, an etching process, etc., for a substrate W for manufacturing a semiconductor device, with a plurality of continuous operations. Is a device that performs the predetermined processing. The substrate processing apparatus 1 includes a processing system 2 that performs processing on the substrate W, a transport system 3 that carries the substrate W into and out of the processing system 2, and the processing system 2 and the transport system. 3 (see FIG. 2).

  The processing system 2 includes, for example, four process modules 10A, 10B, 10C, and 10D, and a transfer chamber 11. The transfer system 3 includes, for example, two load lock chambers 15A and 15B, a transfer chamber 24, an orienter 25, and a plurality of (for example, three) load ports 22A, 22B, and 22C. The transfer chamber 11 has six side surfaces. The process modules 10A, 10B, 10C, 10D and the load lock chambers 15A, 15B are arranged adjacent to the respective side surfaces of the transfer chamber 11.

  The process modules 10A, 10B, 10C, and 10D are respectively disposed in the process chambers 10A1, 10B1, 10C1, and 10D1 configured so as to be able to maintain their internal spaces in a predetermined reduced pressure atmosphere (vacuum state). And a device (not shown) for processing performed in each process chamber. In each process chamber 10A1, 10B1, 10C1, 10D1, susceptors 14A, 14B, 14C, 14D as placement tables on which the substrate W is placed are arranged.

  In the process modules 10 </ b> A, 10 </ b> B, 10 </ b> C, and 10 </ b> D, various processes as described above are performed on the substrate W while the substrate W is placed on the susceptor. In the substrate processing apparatus 1, the same type of processing may be performed by the four process modules 10A, 10B, 10C, and 10D, or different types of processing may be performed for each process module. The number of process modules is not limited to four, and may be one or more.

  Similar to the process chambers 10A1, 10B1, 10C1, and 10D1, the transfer chamber 11 is configured so that it can be maintained in a predetermined reduced-pressure atmosphere. The substrate processing apparatus 1 further includes a transfer device 31 provided in the transfer chamber 11. The transfer device 31 has forks 31 a and 31 b configured to be able to advance, retreat, and turn and to transport the substrate W. The transfer device 31 transports the substrate W between the process modules 10A, 10B, 10C, 10D and the load lock chambers 15A, 15B.

  The processing system 2 further includes gate valves 12A, 12B, 12C, and 12D. The gate valve 12A is disposed between the transfer chamber 11 and the process chamber 10A1. The gate valve 12B is disposed between the transfer chamber 11 and the process chamber 10B1. The gate valve 12C is disposed between the transfer chamber 11 and the process chamber 10C1. The gate valve 12D is disposed between the transfer chamber 11 and the process chamber 10D1. Each of the gate valves 12 </ b> A to 12 </ b> D has a function of opening and closing an opening provided in a wall that partitions two adjacent spaces. The gate valves 12 </ b> A to 12 </ b> D hermetically seal each process module in the closed state and allow the substrate W to be transferred between each process module and the transfer chamber 11 in the open state.

  The load lock chambers 15A and 15B of the transfer system 3 are configured so that the internal space can be switched between an atmospheric pressure state and a vacuum state. Although not shown in the drawing, a placement table for placing the substrate W is provided in each of the load lock chambers 15A and 15B.

  The transfer chamber 24 has a rectangular shape whose cross section in the horizontal direction is long in one direction (left and right direction in FIG. 1), and is disposed so as to sandwich the load lock chambers 15 </ b> A and 15 </ b> B between the transfer chamber 11. One side surface of the transfer chamber 24 is adjacent to the load lock chambers 15A and 15B. The plurality of load ports 22A, 22B, and 22C are disposed so as to be adjacent to the side surface of the transfer chamber 24 opposite to the side surface adjacent to the load lock chambers 15A and 15B. Cassette containers 23A, 23B, and 23C can be placed on the load ports 22A, 22B, and 22C, respectively. In each cassette container 23A, 23B, 23C, the substrates W can be arranged in multiple stages at intervals in the vertical direction. The orienter 25 is connected to one end of the transfer chamber 24 in the longitudinal direction. The orienter 25 is a device that aligns the substrate W.

  The transfer system 3 further includes a transfer device 32 that is disposed in the transfer chamber 24 and is movable in the longitudinal direction of the transfer chamber 24 along a guide rail (not shown). The transport device 32 has a fork 32 a configured to be able to advance, retreat, and turn and to transport the substrate W.

  The transport system 3 further includes gate valves 16A, 16B, 17A, and 17B. The gate valve 16A is disposed between the transfer chamber 11 and the load lock chamber 15A. The gate valve 16B is disposed between the transfer chamber 11 and the load lock chamber 15B. The gate valve 17A is arranged between the load lock chamber 15A and the transfer chamber 24. The gate valve 17B is disposed between the load lock chamber 15B and the transfer chamber 24. Each of the gate valves 16A, 16B, 17A, and 17B has a function of opening and closing an opening provided in a wall that partitions two adjacent spaces. The gate valves 16A and 16B maintain the hermeticity of the transfer chamber 11 in the closed state, and enable the transfer of the substrate W between the transfer chamber 11 and the load lock chambers 15A and 15B in the open state. The gate valves 17A and 17B maintain the airtightness of the load lock chambers 15A and 15B in the closed state, and enable the transfer of the substrate W between the load lock chambers 15A and 15B and the transfer chamber 24 in the open state.

  Next, the control unit 4 of the substrate processing apparatus 1 in the present embodiment will be described with reference to FIG. FIG. 2 is a block diagram illustrating a hardware configuration of the control unit 4 of the substrate processing apparatus 1. As shown in FIG. 2, the control unit 4 of the substrate processing apparatus 1 includes an apparatus controller (Equipment Controller) 61 (denoted as EC in FIG. 2) 61 and two module controllers (Module Controllers in FIG. 2). And 71 and 81, and a switching hub (referred to as HUB in FIG. 2) 62 for connecting the device controller 61 and the module controllers 71 and 81.

  The apparatus controller 61 is a main control unit (master control unit) that controls the overall operation of the substrate processing apparatus 1 by supervising the module controllers 71 and 81. The module controllers 71 and 81 are sub-control units (slave control units) that control operations of the processing system 2 and the transport system 3 under the control of the device controller 61, respectively. The switching hub 62 switches the module controller connected to the device controller 61 in response to a control signal from the device controller 61.

  The apparatus controller 61 sends control signals to the module controllers 71 and 81 based on a control program for realizing various processes for the substrate W executed by the substrate processing apparatus 1 and a recipe in which process condition data is recorded. The operation of the processing system 2 and the transport system 3 is controlled by sending. The device controller 61 generates and stores a plurality of types of history information (hereinafter referred to as logs) based on the information sent from the module controllers 71 and 81, and the plurality of types according to the request. Log is output externally.

  The control unit 4 further includes a sub-network 60, DIST (Distribution) boards 72 and 82, and input / output (hereinafter referred to as I / O) modules 73 and 83. The module controller 71 is connected to the I / O module 73 via the subnetwork 60 and the DIST board 72. The module controller 81 is connected to the I / O module 83 via the subnetwork 60 and the DIST board 82.

  The I / O module 73 has a plurality of I / O units 70. The I / O unit 70 is connected to each component of the processing system 2. Control signals for each component are output from the I / O unit 70, respectively. In addition, output signals from each component are input to the I / O unit 70, respectively. Examples of components connected to the I / O unit 70 include MFC (mass flow controller), pressure gauge, and APC (automatic pressure control) of various gases such as film forming source gases in the process modules 10A, 10B, 10C, and 10D. Examples thereof include a valve, a transfer device 31, and gate valves 12A, 12B, 12C, and 12D.

  Similar to the I / O module 73, the I / O module 83 has a plurality of I / O units 80. The I / O unit 80 is connected to each component of the transport system 3. Control signals for each component are output from the I / O unit 80, respectively. In addition, output signals from each component are input to the I / O unit 80, respectively. Examples of the components connected to the I / O unit 80 include the transport device 32, the orienter 25, and the gate valves 16A, 16B, 17A, and 17B.

  Although not shown, an I / O board for controlling input / output of digital signals, analog signals and serial signals in the I / O units 70 and 80 is connected to the subnetwork 60.

  The apparatus controller 61 is connected via a LAN (Local Aria Network) 50 to a computer 51 as a MES (Manufacturing Execution System) that manages the manufacturing process of the entire factory where the substrate processing apparatus 1 is installed. The computer 51 cooperates with the control unit 4 of the substrate processing apparatus 1 to feed back real-time information related to the process in the factory to the basic business system, and makes a determination related to the process in consideration of the load of the entire factory.

  The operation history analysis support device (hereinafter simply referred to as operation history analysis support device) of the substrate processing apparatus according to the present embodiment is a device that supports analysis of operation history in the substrate processing apparatus 1. As described above, the substrate processing apparatus 1 performs a predetermined process on the substrate W with a plurality of continuous operations and, as will be described later, a history of operations associated with times in a predetermined period. The operation history information representing is generated. The operation history analysis support apparatus according to the present embodiment is realized by a computer executing an operation history analysis support program (hereinafter simply referred to as an operation history analysis support program) of the substrate processing apparatus according to the present embodiment. Is done.

  The computer that realizes the operation history analysis support apparatus may be the computer 51 or the other computer 52 shown in FIG. When the operation history analysis support device is realized by the computer 51, the computer 51 acquires a plurality of types of logs from the device controller 61 via the LAN 50. When the operation history analysis support device is realized by the computer 52, the computer 52 may acquire a plurality of types of logs from the device controller 61 via the LAN 50 or a recording medium. A plurality of types of logs acquired from the computer 51 may be acquired from the computer 51 via a LAN, a communication line, a recording medium, or the like. In the following description, as an example, it is assumed that the operation history analysis support apparatus is realized by the computer 52.

  Next, an example of the hardware configuration of the operation history analysis support apparatus according to this embodiment, that is, the hardware configuration of the computer 52 will be described with reference to FIG. The operation history analysis support apparatus 100 shown in FIG. 3 includes a main control unit 101, an input device 102 such as a keyboard and a mouse, an output device 103 such as a printer, a display device 104, a storage device 105, and an external interface 106. And a bus 107 for connecting them together. The main control unit 101 includes a CPU (Central Processing Unit) 111, a RAM (Random Access Memory) 112, and a ROM (Read Only Memory) 113. The storage device 105 is not particularly limited as long as it can store information, but is, for example, a hard disk device or an optical disk device. The storage device 105 records information on a computer-readable recording medium 115 and reads information from the recording medium 115. The recording medium 115 is not particularly limited as long as it can store information, but is, for example, a hard disk or an optical disk. The recording medium 115 may be a recording medium that records the operation history analysis support program according to the present embodiment.

  In the operation history analysis support apparatus 100 illustrated in FIG. 3, the CPU 111 implements the function of the operation history analysis support apparatus 100 by executing a program stored in the ROM 113 or the storage device 105 using the RAM 112 as a work area. It is supposed to be.

  The hardware configuration of the computer 51 in FIG. 2 is also the configuration shown in FIG. 3, for example. The hardware configuration of the device controller 61 and the module controllers 71 and 81 shown in FIG. 2 is, for example, the configuration shown in FIG. 3 or the configuration shown in FIG. 3 excluding unnecessary components. Yes.

  Next, the functional configuration of the device controller 61 will be described with reference to FIG. FIG. 4 is a functional block diagram showing a functional configuration of the device controller 61. In the following description, the hardware configuration of the device controller 61 is assumed to be the configuration shown in FIG. 3, and the reference numerals in FIG. 3 are also referred to. As illustrated in FIG. 4, the apparatus controller 61 includes a processing control unit 121, a machine log recording unit 122, an alarm log recording unit 123, a log collection unit 124, and an input / output control unit 125. These are realized by the CPU 111 executing a program stored in the ROM 113 or the storage device 105 using the RAM 112 as a work area.

  The processing control unit 121 transmits a control signal to each of the module controllers 71 and 81 based on the recipe 130, the parameter 131, and the like that are stored in the storage device 105 in advance, so that the processing system 2 and the transport of the substrate processing apparatus 1 are transferred. Control system 3.

  Based on the information sent from the module controllers 71 and 81, the machine log recording unit 122 generates a machine log 132 that is operation history information indicating the operation history of the substrate processing apparatus 1 associated with the time. Is recorded by the storage device 105.

  Based on the information sent from the module controllers 71 and 81, the alarm log recording unit 123 generates an alarm log 133 that is alarm history information indicating an alarm history associated with the time, and stores the alarm log 133 by the storage device 105. Record. The alarm notifies the occurrence of a failure or the like in the substrate processing apparatus 1.

  Although not shown, the apparatus controller 61 also has a function of generating a log related to the substrate processing apparatus 1 other than the machine log and the alarm log and recording the log by the storage device 105. As logs other than the machine log and the alarm log, there are a log representing the history of program operations in the device controller 61, a log representing the history of operations by the operator, a log representing the history of activation processing of the device controller 61, and the like. .

  The input / output control unit 125 controls input from the input device 102, controls output to the output device 103, controls display on the display device 104, and inputs / outputs data such as external data via the external interface 106. Control.

  The log collection unit 124 collects logs such as the machine log 132 and the alarm log 133 in a predetermined period according to an instruction given from the outside via the input / output control unit 125. The predetermined period is an arbitrary period starting from an arbitrary time when the substrate processing apparatus 1 is in the initial state. The operator can arbitrarily specify the predetermined period. Examples of the predetermined period include a period of processing executed by the substrate processing apparatus 1 based on one recipe and a period after the software of the apparatus is upgraded. The log collected by the log collection unit 124 can be output to the outside via the input / output control unit 125 in accordance with an instruction given from the outside.

  Next, the functional configuration of the operation history analysis support apparatus 100 according to the present embodiment will be described with reference to FIG. FIG. 5 is a functional block diagram showing a functional configuration of the operation history analysis support apparatus 100. As shown in FIG. 5, the operation history analysis support apparatus 100 includes a log acquisition unit 151, a state history information creation unit 152, a designation information acquisition unit 153, a display control unit 154, a reproduction instruction unit 155, an image A data storage unit 156 and an output unit 157 are provided. The log acquisition unit 151, the state history information generation unit 152, the designation information acquisition unit 153, the display control unit 154, the reproduction instruction unit 155, and the output unit 157 are stored in the ROM 113 by the CPU 111 shown in FIG. Alternatively, it is realized by executing a program stored in the storage device 105. The image data storage unit 156 is realized by the storage device 105.

  The log acquisition unit 151 includes at least a machine log that is operation history information and an alarm log that is alarm history information among a plurality of types of logs generated by the apparatus controller 61 of the substrate processing apparatus 1 over a LAN, communication Obtained via line, recording medium, etc. The log acquisition unit 151 corresponds to the acquisition unit in the present invention.

  The state history information creating unit 152 specifies the history of the state of the substrate processing apparatus 1 that has changed in time series based on the machine log acquired by the log acquisition unit 151, and the substrate processing associated with the time in a predetermined period. State history information representing the state history of the device 1 is created. In the present embodiment, the process of creating state history information based on the machine log is called log analysis. For specifying the history of the state of the substrate processing apparatus 1 that has changed in time series, the state of the substrate processing apparatus 1 after each operation represented by the machine log is sequentially specified from the initial state of the substrate processing apparatus 1. Is done by. The state history information includes information representing an initial state of the substrate processing apparatus 1 and a state after each operation, each associated with time. According to this state history information, the state of the substrate processing apparatus 1 at an arbitrary time within a predetermined period can be specified. The state history information creation unit 152 creates a log analysis file 160 including the created state history information and stores it in the storage device 105. The log analysis file 160 includes at least a machine log and an alarm log acquired by the log acquisition unit 151 in addition to the state history information.

  The designation information acquisition unit 153 has a function of acquiring designation information for designating a specific portion, that is, a specific time within the predetermined period corresponding to the log acquired by the log acquisition unit 151. The designation information acquisition unit 153 includes an action item selection unit 153A, a bookmark registration / selection unit 153B, an alarm selection unit 153C, a time designation unit 153D, an operation designation unit 153E, a search unit 153F, and an extraction unit 153G. These means 153A to 153G will be described in detail later.

  The display control unit 154 has a function of causing the display device 104 to display a simulated image of the substrate processing apparatus 1 corresponding to each state based on the state history information in the log analysis file 160. In addition, the display control unit 154 uses, as moving images, a plurality of simulated images corresponding to a plurality of states of the substrate processing apparatus 1 in a period after a specific location designated by the designation information obtained by the designation information obtaining unit 153. The display device 104 has a function of displaying in series. In the present embodiment, displaying a plurality of simulated images as moving images in time series is called reproduction. Note that the speed of passage of time in the moving image may be different from the speed of passage of actual time, for example, greater than the speed of passage of actual time. Alternatively, a plurality of simulated images may be displayed in time series at regular time intervals so as to be later than the actual passage of time.

  The reproduction instruction unit 155 has a function of instructing the display control unit 154 to start reproduction or stop reproduction in accordance with an instruction from the operator. The image data storage unit 156 stores image data used when the display control unit 154 displays a simulated image or the like on the display device 104. The output unit 157 has a function of outputting the log analysis file 160 including the state history information to the outside in accordance with an instruction from the operator.

  Next, the display screen of the display device 104 controlled by the display control unit 154 will be described with reference to FIGS. FIG. 6 is an explanatory diagram showing one state of the display screen 200 of the display device 104. FIG. 7 is an explanatory diagram showing another state of the display screen 200 of the display device 104. 6 and 7, the display screen 200 includes a status display unit 201, a log display unit 202, a bookmark display unit 203, an alarm list display unit 204, an alarm details display unit 205, a playback / display And a stop instruction unit 206. The display control means 154 has a function of causing the display device 104 to display the display screen 200 including these.

  The status display unit 201 includes a simulated image 201a of the substrate processing apparatus, a log number display unit 201b that displays a log number, a date and time display unit 201c that displays a date and time corresponding to the simulated image 201a, and process modules 10A and 10B, respectively. , 10C, 10D, display units 201d, 201e, 201f, 201g, 201h, 201i for displaying information about the load lock chambers 15A, 15B, and a display unit 201j for displaying information about the operation history analysis support program being used. Contains.

  The simulated image 201a is an image simulating the substrate processing apparatus 1 in an arbitrary state. As shown in FIGS. 6 and 7, in the simulated image 201a, the number of the substrate W is entered in a circular figure representing the substrate W. FIG. 7 shows a state after the substrate numbered 224, which is accommodated in the process chamber 10C1 in the state shown in FIG. 6, is moved into the process chamber 10B1 using the transfer device 31. ing.

  The log display unit 202 is a part that displays all machine logs within a predetermined period. FIG. 8 shows an example of a part of the machine log. Each line in FIG. 8 represents the date and time and the contents of the operation at that date and time. The log display unit 202 displays a plurality of operations represented by the machine log as shown in FIG. 8 as a plurality of operation items. Each line in the log display unit 202 is an operation item. The log display unit 202 includes scroll buttons. Even if not all the machine logs can be displayed on the log display unit 202 at once, all the machine logs are displayed on the log display unit 202 by scrolling the display contents by operating the scroll buttons and the keyboard. It is possible to do.

  The bookmark display unit 203 is a part that displays one or more operation items that the operator has selected from a plurality of operation items displayed on the log display unit 202 and registered as bookmarks.

  The alarm list display unit 204 is a part that displays all alarm logs within a predetermined period. FIG. 9 shows an example of a part of the alarm log. Each line in FIG. 9 represents the date and time and the contents of the alarm at that date and time. The alarm list display unit 204 displays one or more alarms represented by an alarm log as shown in FIG. 9 as one or more alarm items. Each line in the alarm list display unit 204 is an alarm item. The alarm list display unit 204 includes scroll buttons. Even if not all alarm logs can be displayed on the alarm list display unit 204 at one time, all the alarm logs can be displayed on the alarm list display unit 204 by scrolling the display contents by operating the scroll buttons and the keyboard. Can be displayed.

  The alarm details display unit 205 is a part that displays detailed contents of alarms corresponding to one alarm item selected by the operator from one or more alarm items displayed on the alarm list display unit 204. The detailed contents of the alarm may be acquired from a database connected to the operation history analysis support apparatus 100 via the Internet or the like.

  The reproduction / stop instruction unit 206 is controlled by the reproduction instruction unit 155 and allows the operator to issue a reproduction instruction and a reproduction stop instruction. For example, the playback / stop instruction unit 206 displays an icon button indicating a playback instruction in the playback stop state, and displays an icon button indicating a playback stop instruction in the playback state. When the operator presses an icon button representing a reproduction instruction (with the cursor and clicking the mouse), the reproduction instruction unit 155 instructs the display control unit 154 to start reproduction and also displays an icon button representing the reproduction instruction. Is changed to an icon button indicating a playback stop instruction. When the operator presses an icon button representing a playback stop instruction, the playback instruction means 155 instructs the display control means 154 to stop playback, and the icon button representing the playback stop instruction is replaced with an icon button representing a playback instruction. Change to Note that the reproduction instruction and the reproduction stop instruction can be performed by operating the keyboard.

  The contents displayed on the log display unit 202 and the alarm list display unit 204 are the date and time displayed on the date and time display unit 201c when the reproduction process is performed according to the instruction from the reproduction / stop instruction unit 206, respectively. Scrolled in conjunction with. When stop processing is performed in response to an instruction from the playback / stop instruction unit 206, the log display unit 202 and the alarm list display unit 204 each include items corresponding to the date and time displayed on the date and time display unit 201c. Make sure that the containing part is displayed. After the stop, the log display unit 202 and the alarm list display unit 204 can each display an arbitrary place by a scroll operation.

  Although not shown, the display screen 200 also displays a plurality of icon buttons and a plurality of menu items that enable various operations. The operator's instructions can be given by operating these icon buttons, menu items, or the keyboard.

  Next, the means 153A to 153G included in the designation information acquisition means 153 shown in FIG. 5 will be described in detail.

  The action item selection unit 153A has a function that allows a specific action item to be selected from a plurality of action items displayed on the log display unit 202, and information on time corresponding to the selected action item. As a designation information. The action item can be selected by placing the cursor on the desired action item and clicking the mouse or operating the keyboard. The same applies to the operation of selecting other items in the following description.

  The bookmark registration / selection means 153B includes a function that enables one or more of the plurality of action items displayed on the log display unit 202 to be registered as a bookmark, and one or more action items registered as a bookmark. And a function that makes it possible to select the specific operation item. The operation of registering a desired operation item among a plurality of operation items displayed on the log display unit 202 as a bookmark is performed by, for example, operating a bookmark registration icon button or menu item after selecting the desired operation item. Can be done. The registered action item is displayed on the bookmark display unit 203. The operation of selecting a specific action item from one or more action items registered as bookmarks is to select a desired action item from one or more action items displayed on the bookmark display unit 203. Can be done by.

  The alarm selection means 153C has a function that allows a specific alarm to be selected from the list of alarms displayed on the alarm list display unit 204, and information on the time corresponding to the selected specific alarm. It has the function to acquire as. A specific alarm can be selected by selecting a desired alarm item from one or more alarm items displayed on the alarm list display unit 204. In addition, when the cursor is placed on the selected alarm item and the mouse is right-clicked, a menu for selecting either an alarm occurrence or an alarm release is displayed. In this menu, if the operator selects the alarm occurrence time, the alarm time will be specified information. If the operator selects the alarm release time, the alarm release time will be specified information. It becomes.

  The time designation unit 153D has a function that enables designation of a specific time, and a function that acquires information on the designated time as designation information. Designation of a specific time can be performed by inputting the date and time into the date and time display unit 201c.

  The operation designation unit 153E acquires, as designation information, a function that enables designation of one of a plurality of operations represented by a machine log that is operation history information, and time information corresponding to the designated operation. It has the function to do. The designation of one of a plurality of operations represented by the machine log can be performed as follows using the display units 201d to 201i, for example. The display units 201d to 201i include items for displaying the operations of the corresponding devices (process modules 10A, 10B, 10C, and 10D, load lock chambers 15A and 15B), respectively. The operations displayed in this item are device activation or termination, device status (processing, maintenance, alarm generation), recipe initiation or termination, substrate loading / unloading, and the like. When the cursor is placed on this item and the mouse is right-clicked, a menu for selecting a desired operation from a plurality of operations of the apparatus performed during a predetermined period is displayed. The operator can specify one of a plurality of operations by selecting a desired operation from this menu.

  The search unit 153F has a function that enables input of search information for searching for a specific operation from a plurality of operations represented by a machine log that is operation history information, and is specified based on the input search information. And a function of acquiring time information corresponding to the searched specific operation as designated information. The search information is, for example, a keyword. The search information can be input by operating a search icon button or a menu item to display the search information input form on the display screen 200 and inputting the search information in the search information input form.

  The extraction unit 153G has a function that enables input of extraction information for extracting one or more operations that meet a predetermined condition from a plurality of operations represented by a machine log that is operation history information. A function for extracting one or more actions based on the extracted extraction information, a function for allowing a specific action to be specified from the extracted one or more actions, and a specified specific action. A function of acquiring corresponding time information as designated information. The extraction information can be input by, for example, operating the extraction icon button or menu item so that the extraction information can be input and then inputting the extraction information. The extraction information is input by displaying a pull-down menu for displaying a plurality of extraction information selectable in the corresponding column for each column heading in the log display unit 202, and selecting desired extraction information from the pull-down menu. You may make it perform by.

  The operation history analysis support program according to the present embodiment causes a computer to function as each unit shown in FIG. 5 in order to support analysis of operation history in the substrate processing apparatus 1. The operation history analysis support program is recorded in the recording medium 115 or the ROM 113 in FIG.

  Next, the operation of the operation history analysis support apparatus 100 will be described with reference to the flowchart of FIG. First, in step S101, the operation history analysis support apparatus 100 stores at least a machine log and an alarm log among a plurality of types of logs generated by the apparatus controller 61 of the substrate processing apparatus 1 by a log acquisition unit 151 in a predetermined period. get.

  Next, the operation history analysis support apparatus 100 analyzes the acquired log in step S102. More specifically, in step S102, based on the acquired machine log, the state history information creation unit 152 identifies the history of the state of the substrate processing apparatus 1 that has changed in time series, and associates it with the time in a predetermined period. State history information indicating the history of the state of the substrate processing apparatus 1 is created, and further, a log analysis file 160 including the state history information is created, and the log analysis file 160 is stored in the storage device 105.

  Next, in step S <b> 103, the operation history analysis support device 100 causes the display control unit 154 to display an initial screen on the display screen 200 of the display device 104. The screen in the initial state represents the initial state of the substrate processing apparatus 1 in a predetermined period. At this time, the simulated image 201a is a still image that represents an initial state of the substrate processing apparatus 1 in a predetermined period.

  Next, in step S104, the motion history analysis support apparatus 100 determines whether or not the operator has instructed the end of the motion history analysis support program. When the end of the operation history analysis support program is instructed (Y), the operation history analysis support device 100 ends the operation. When the end of the operation history analysis support program is not instructed (N), the process proceeds to step S105.

  In step S105, the operation history analysis support apparatus 100 determines whether the designation information acquisition unit 153 has acquired the designation information. When the designation information acquisition unit 153 acquires the designation information (Y), in step S106, the display control unit 154 displays the substrate at the specific location (time) designated by the designation information on the display screen 200 of the display device 104. The status of the processing apparatus 1 is displayed, and the process proceeds to step S107. In step S105, when the designation information acquisition unit 153 has not acquired the designation information (N), the process proceeds to step S107 without changing the display screen 200 of the display device 104.

  In step S107, the operation history analysis support apparatus 100 determines whether or not the reproduction instruction unit 155 has instructed reproduction. If there is no instruction for reproduction (N), the process returns to step S104. If there is an instruction for reproduction (Y), reproduction is started by the display control means 154 in step S108. At this time, the location (time) at which playback is started is the specific location (time) last specified by the specification information when the specific location (time) is specified more than once by the specification information. If there is no specific location (time) specified by the specification information, it is the first location (time) in a predetermined period.

  Next, in step S109, the operation history analysis support apparatus 100 determines whether or not the reproduction instruction unit 155 has instructed the reproduction stop. If there is an instruction to stop reproduction (Y), in step S111, the display control unit 154 stops reproduction, and the process returns to step S104. If there is no instruction to stop playback in step S109 (N), the operation history analysis support apparatus 100 determines in step S110 whether the location (time) for displaying the simulated image 201a has reached the last point in the predetermined period. Judge whether or not. If the location (time) at which the simulated image 201a is displayed has reached the last time (Y), the process proceeds to step S111 to stop reproduction, and the process returns to step S104. In step S110, when the location (time) for displaying the simulated image 201a has not reached the last time (N), the process returns to step S109.

  As described above, according to the present embodiment, the state history of the substrate processing apparatus 1 that has changed in time series is specified based on the machine log that is the operation history information, and is associated with the time in a predetermined period. State history information representing the history of the state of the substrate processing apparatus 1 is created, and based on the state history information, a plurality of states corresponding to a plurality of states of the substrate processing apparatus 1 in a period after a specified specific location are created. The simulated image can be displayed on the display device 104 in time series as a moving image. Thereby, according to this Embodiment, it becomes possible to grasp | ascertain the past operation | movement in the substrate processing apparatus 1 easily. Therefore, according to the present embodiment, the operation history in the substrate processing apparatus 1 is not required without requiring specialized knowledge and a great amount of labor required by a conventional method in which a person reads and analyzes a log. Can be easily analyzed.

  Further, according to the present embodiment, when the substrate processing apparatus 1 has a problem in which an alarm does not occur, such as when the throughput of the substrate processing apparatus 1 is reduced due to the software upgrade of the control unit 4. However, by displaying a plurality of simulated images as moving images on the display device 104 in time series as described above, it becomes possible to easily solve the problem.

  Further, according to the operation history analysis support apparatus 100 according to the present embodiment, the designation information acquisition unit 153 can easily designate a desired reproduction start location by various methods.

  Further, the operation history analysis support apparatus 100 according to the present embodiment can output the created log analysis file 160 to the outside. Therefore, the log analysis file is recorded by the computer in which the operation history analysis support program according to the present embodiment or the program that omits the function for realizing the log acquisition unit 151 and the state history information creation unit 152 from the operation history analysis support program is installed. 160, it is possible to perform the same processing as the operation history analysis support apparatus 100 except for the creation of the log analysis file 160.

  In addition, this invention is not limited to the said embodiment, A various change is possible. For example, the present invention is not limited to the substrate processing apparatus 1 having the configuration shown in FIG. 1, but can be applied to substrate processing apparatuses having various configurations. In addition, the substrate W to be processed by the substrate processing apparatus is not limited to a substrate for manufacturing a semiconductor device, but may be a glass substrate for manufacturing a flat panel display, a substrate for manufacturing a solar cell panel, or the like.

  DESCRIPTION OF SYMBOLS 1 ... Substrate processing apparatus, 2 ... Processing system, 3 ... Transfer system, 100 ... Operation history analysis support device, 101 ... Main control part, 102 ... Input device, 103 ... Output device, 104 ... Display device, 105 ... Storage device, 106 ... external interface, 115 ... recording medium, 151 ... log acquisition means, 152 ... status history information creation means, 153 ... designated information acquisition means, 154 ... display control means, 155 ... reproduction instruction means, 156 ... image data storage section, 157: Output means.

Claims (11)

Supports analysis of operation history in a substrate processing apparatus that performs predetermined processing on a substrate with a plurality of continuous operations and generates operation history information representing operation history associated with time in a predetermined period A device to perform
Obtaining means for obtaining the operation history information generated by the substrate processing apparatus;
Based on the operation history information acquired by the acquisition unit, the history of the state of the substrate processing apparatus that has changed in time series is specified, and the history of the state of the substrate processing apparatus associated with the time in the predetermined period State history information creating means for creating state history information representing
Designation information obtaining means for obtaining designation information for designating a specific location within the predetermined period;
A plurality of substrate processing apparatuses in a period after a specific location specified by the designation information, having a function of causing a display device to display a simulated image of the substrate processing apparatus corresponding to each state based on the state history information; An operation history analysis support apparatus for a substrate processing apparatus, comprising: a display control unit that displays a plurality of the simulated images corresponding to the state of the display on a display device in a time series as a moving image.   2. The operation history analysis support apparatus for a substrate processing apparatus according to claim 1, further comprising output means for outputting the state history information. The display control means further has a function of causing a display device to display a plurality of operations represented by the operation history information as a plurality of operation items.
The designation information acquisition means includes a function that enables a specific operation item to be selected from the plurality of operation items displayed on the display device, and time information corresponding to the selected specific operation item. 3. The operation history analysis support apparatus for a substrate processing apparatus according to claim 1, further comprising:   The designation information acquisition means further includes a function that enables one or more of the plurality of operation items displayed on the display device to be registered as a bookmark, and one or more operations registered as a bookmark. 4. The operation history analysis support apparatus for a substrate processing apparatus according to claim 3, further comprising a function that makes it possible to select the specific operation item from among the items. The substrate processing apparatus further generates alarm history information representing an alarm history associated with a time in the predetermined period,
The acquisition means acquires the alarm history information generated by the substrate processing apparatus together with the operation history information,
The display control means further has a function of causing a display device to display a list of alarms corresponding to the alarm history information,
The designation information acquisition means includes a function that allows a specific alarm to be selected from the list of alarms displayed on the display device, and information on time corresponding to the selected specific alarm. 5. The operation history analysis support apparatus for a substrate processing apparatus according to claim 1, further comprising a function of acquiring the information as information.   6. The specified information acquisition unit has a function of enabling specification of a specific time and a function of acquiring information of a specified time as the specified information. An operation history analysis support apparatus for a substrate processing apparatus according to the item.   The designation information acquisition unit acquires, as the designation information, a function that enables designation of one of a plurality of actions represented by the action history information and time information corresponding to the designated action. 7. The operation history analysis support apparatus for a substrate processing apparatus according to claim 1, wherein the apparatus has a function.   The specified information acquisition means includes a function that enables input of search information for searching for a specific operation from a plurality of operations represented by the operation history information, and the specification based on the input search information. 8. The function according to claim 1, further comprising: a function of searching for an operation of the first time; and a function of acquiring time information corresponding to the searched specific operation as the specified information. An operation history analysis support device for a substrate processing apparatus.   The specified information acquisition means is input with a function that allows input of extraction information for extracting one or more operations that match a predetermined condition from a plurality of operations represented by the operation history information. A function that extracts one or more actions based on the extracted information, a function that enables a specific action to be specified from one or more extracted actions, and a specified specific action 9. The operation history analysis support apparatus for a substrate processing apparatus according to claim 1, further comprising a function of acquiring information on a time to be performed as the designation information. Supports analysis of operation history in a substrate processing apparatus that performs predetermined processing on a substrate with a plurality of continuous operations and generates operation history information representing operation history associated with time in a predetermined period Computer to
Obtaining means for obtaining the operation history information generated by the substrate processing apparatus;
Based on the operation history information acquired by the acquisition unit, the history of the state of the substrate processing apparatus that has changed in time series is specified, and the history of the state of the substrate processing apparatus associated with the time in the predetermined period State history information creating means for creating state history information representing
Designation information obtaining means for obtaining designation information for designating a specific location within the predetermined period, and displaying a simulated image of the substrate processing apparatus corresponding to each state on the display device based on the state history information A display that has a function and displays a plurality of simulated images corresponding to a plurality of states of the substrate processing apparatus in a period after a specific location designated by the designation information as a moving image on a display device in time series Control means,
Operation history analysis support program of substrate processing apparatus for functioning as   The computer-readable recording medium which recorded the program of Claim 10.

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