JP2010199839A - Pulse generator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve a withstand voltage between an output terminal and a grounding surface by a simple and inexpensive configuration, and to improve the stability of wiring for supplying high voltage pulses to the output terminal by the simple and inexpensive configuration. <P>SOLUTION: The pulse generator includes: a high voltage power source for generating the high voltage pulses; the output terminal for emitting discharge by the impression of the high voltage pulses; a high voltage line for supplying the high voltage pulses from the high voltage power source to the output terminal; a grounding surface for housing the output terminal in an internal space; and a cylindrical insulator for supporting the output terminal in the state of being electrically insulated from the grounded grounding surface. The cylindrical insulator is erected by fixing one end part to the bottom surface of the grounding surface, the output terminal is provided on the other end part, and a part between the output terminal and the inner wall part of the grounding surface is insulated by a space part within the grounding surface. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a pulse generator, and more particularly to an insulating structure that prevents discharge from an output terminal of the pulse generator.

  In pulse generators used for lithography light sources, ozone generators, water treatment, etc., high voltage, large current, and narrow short pulses are required.

  The high voltage side electrode of the pulse generator used for the above application is installed on an insulating base attached to the ground plane, and the other electrode of the discharge electrodes is grounded.

  Here, the high-voltage side electrode and the ground plane are electrically insulated, and a large potential difference is generated during main discharge because a high voltage is applied to the high-voltage side electrode. For this reason, creeping discharge may occur between the electrode and the ground. When creeping discharge occurs, main discharge is not suitably performed.

  For this reason, it is known that an insulating base on which the high voltage side electrode is installed is formed with a ridge having an uneven cross section so as to surround the high voltage side electrode, and the creepage distance is increased to prevent the occurrence of creeping discharge. (Patent Document 1).

  FIG. 4 is a diagram for explaining a configuration example of a conventional pulse generator. 4A is a cross-sectional view, and FIG. 4B is a front view as viewed from the electrode side of the output terminal.

  In the pulse generator 101, an output terminal 104 is attached to the ground plane 103 via an insulator 106. A high voltage line 105 is attached to the back side of the output terminal 104 by a contact portion 108. In addition, the insulator 106 is formed so as to surround the output terminal 104, and a concentric ridge portion 106a having a concavo-convex cross section is formed. The creeping distance is increased by the flange 106a, and the occurrence of creeping discharge along the insulator 106 between the output terminal 104 and the ground plane 103 is prevented.

JP 2001-230473 A (see paragraph 0002)

  In the conventional pulse generator, in order to prevent creeping discharge, the insulator needs to have a structure with no gap, and the concentric insulator that supports the output terminal has a structure without a gap. Needs to be manufactured by cutting from a base material of one insulator. In order to obtain such a configuration, there is a problem that a great deal of cost is required.

  Also, since the conventional pulse generator has a configuration in which the output terminal is attached to a concentric insulator, the wiring for supplying a high voltage pulse from the high voltage power supply to the output terminal simply outputs one end of the wiring inside the pulse generator. Since it is only connected to the terminal, there is also a problem that physical and electrical stability is lacking.

  Therefore, the present invention aims to solve the above-described conventional problems, to improve the dielectric strength between the output terminal and the ground plane with a simple and inexpensive configuration, and to provide an output terminal with a simple and inexpensive configuration. An object of the present invention is to improve the stability of wiring for supplying a high voltage pulse to the circuit.

  The present invention includes a high-voltage power source that generates a high-voltage pulse, an output terminal that discharges a discharge when the high-voltage pulse is applied, a high-voltage wire that supplies the high-voltage pulse from the high-voltage power source to the output terminal, and the output terminal in an internal space. And a cylindrical insulator that supports the output terminal in a state of being electrically insulated from the grounded ground surface.

  The cylindrical insulator has one end fixed to the bottom surface of the grounding surface, is erected, the other end is provided with an output terminal, a high-voltage wire is wired inside, and the output terminal and the inner wall portion of the grounding surface Is insulated by a space portion in the ground plane.

  In the pulse generator of the present invention, the output terminal is insulated and supported from the ground plane. Instead of a concentric insulator extending in a plane from the periphery of the ground plane in the conventional configuration to the output terminal, A structure using a cylindrical insulator standing on the bottom surface is used.

  With this insulator configuration, the dielectric strength between the output terminal and the ground plane can be improved with a simple configuration. The concentric insulator of the conventional configuration prevents creeping discharge that occurs along the surface of the insulator and insulates in the concentric direction, whereas the cylindrical insulator of the configuration of the present invention has an output terminal. The space between the ground plane is used. In general, since the dielectric strength of space discharge is higher than the dielectric strength of creeping discharge, the dielectric strength can be improved by using the cylindrical insulator of the present invention.

  Further, with this insulator structure, the amount of insulator used to form the insulator can be reduced. The cylindrical insulator of the present invention can reduce the amount of the insulator used as compared with the concentric insulator of the conventional configuration. In addition, the concentric insulator having the conventional configuration requires a cost to form the flange portion having an uneven cross-sectional shape, but the cylindrical insulator of the present invention is easy to manufacture because of its simple shape. . The cost for manufacturing the insulator can be reduced by the reduction in the amount of the insulator used and the simple shape.

  Moreover, by accommodating the high-voltage electric wire for supplying the high-voltage pulse to the output terminal in the cylindrical insulator, the high-voltage electric wire can be stably guided to the output terminal.

  Moreover, according to the aspect of the present invention, since the high-voltage electric wire is accommodated in the insulator, the insulation measures for the high-voltage electric wire itself can be reduced, and the cost can be reduced.

  As described above, according to the pulse generator of the present invention, the withstand voltage between the output terminal and the ground plane can be improved with a simple and inexpensive configuration.

  Further, according to the pulse generator of the present invention, the stability of the wiring for supplying the high voltage pulse to the output terminal can be improved with a simple and inexpensive configuration.

It is sectional drawing and the front view for demonstrating the structural example of the pulse generator of this invention. It is a perspective view for demonstrating the structural example of the pulse generator of this invention. It is a figure for demonstrating the structural example of the insulator of the pulse generator of this invention, and the structural example of attachment to the ground-plane bottom face 3a. It is a figure for demonstrating the structural example of the conventional pulse generator.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Hereinafter, a configuration example of the pulse generator of the present invention will be described with reference to FIGS.

[Configuration example of pulse generator]
First, a configuration example of the pulse generator of the present invention will be described with reference to FIGS. 1A is a cross-sectional view of the pulse generator 1, and FIG. 1B is a plan view of the pulse generator 1 viewed from the output terminal side. FIG. 2 is a perspective view of the pulse generator 1.

  The pulse generator 1 of the present invention supplies the high voltage pulse generated by the high voltage power source 2 to the output terminal 4 and emits the high voltage pulse from the output terminal 4.

  The output terminal 4 of the pulse generator 1 is disposed in a space formed by an electrically grounded ground plane 3, insulated from the inner wall surface 3 b of the ground plane 3 by the space, and a bottom surface 3 a of the ground plane 3. Is insulated by a cylindrical insulator 6.

  The output terminal 4 is arranged symmetrically from any surface of the inner wall surface 3b of the ground plane, and an electric field generated between the output terminal 4 to which a high voltage is applied and the inner wall surface 3b of the ground plane is It is formed so as to be within the breakdown electric field, and the deviation of the electric field strength due to the arrangement position of the output terminal 4 is reduced. 1 and 2, the inner wall surface 3b of the ground contact surface 3 is formed in a rectangular shape, but may be formed in a circular shape.

  The output terminal 4 is insulated from the inner wall surface 3b of the ground plane in place of the dielectric strength of the electric field strength of the conventional creeping discharge, and the space discharge between the electrodes (here, the output terminal 4 and the inner wall surface 3b of the ground plane 3). The dielectric strength is increased by using the dielectric strength of the electric field strength.

  On the other hand, insulation between the output terminal 4 and the bottom surface 3 a of the ground plane 3 is performed by the insulator 6. In addition to electrically insulating the output terminal 4 and the bottom surface 3a of the ground plane 3 to prevent discharge, the insulator 6 holds the output terminal 4 in the space formed by the ground plane 3 and outputs A high voltage pulse generated by the high voltage power source 2 is supplied to the terminal 4.

  The insulator 6 has a cylindrical shape, and a hole 6a penetrating in the axial direction is formed in the central portion. The high-voltage electric wire 5 from the high-voltage power supply 2 is passed through the through hole 6 a and connected to the output terminal 4 attached to one end of the insulator 6. As a result, a high-voltage pulse can be supplied from the high-voltage power supply 2 to the output terminal 4 and the insulation between the high-voltage electric wire 5 and the ground plane 3 can be facilitated. The length of the cylinder of the cylindrical insulator 6 defines the distance between the output terminal 4 and the bottom surface 3 a of the ground plane 3.

  In order to improve the dielectric strength of creeping discharge along the axial direction of the cylindrical insulator 6 between the output terminal 4 and the bottom surface 3a of the ground plane 3, simply increasing the length of the insulator 6 is effective. Since it is difficult to obtain, it is good also as a structure which provides a brim part, an electrostatic shielding part, etc., and orients an electric force line in a creeping direction.

  The insulator constituting the insulator 6 can be selected from solid insulators such as porcelain, glass, and synthetic resin based on dielectric strength, ease of processing, cost, and the like.

  FIG. 3 is a diagram for explaining a configuration example of the insulator 6 and a configuration example of mounting the grounding surface 3 to the bottom surface 3a.

  In the cylindrical body of the insulator 6 having the configuration example shown in FIG. 3, the output terminal 4 is attached to one end 6 </ b> A, and the other end 6 </ b> B is fixed to the bottom surface 3 a of the ground plane 3.

  At the end portion 6 </ b> A, the contact portion 8 of the high voltage electric wire 5 is connected to the back surface of the output terminal 4 in the space of one outlet portion of the through hole 6 a, and a high voltage pulse is supplied to the output terminal 4.

  At the end portion 6B, a step portion is formed at the other outlet portion of the through hole 6a, and the flange 9 is passed through the step portion and an opening portion formed in the bottom surface 3a of the ground surface 3. As a result, the insulator 6 is fixed to the bottom surface 3 a of the ground plane 3. Here, the bottom surface 3a is grounded. Note that the configuration example shown in FIG. 3 is an example, and the present invention is not limited to this configuration. Various modifications can be made based on the spirit of the present invention, and these are not excluded from the scope of the present invention.

  The pulse generator of the present invention can be applied to fields such as a lithography light source, an ozone generator, and water treatment.

DESCRIPTION OF SYMBOLS 1 Pulse generator 2 High voltage power source 3 Ground surface 3a Bottom surface 3b Inner wall surface 4 Output terminal 5 High voltage electric wire 6 Insulator 6A End part 6B End part 6a Through-hole 7 Space insulation part 8 Contact part 9 Flange 101 Pulse generator 102 High voltage power supply 103 Ground plane 104 Output terminal 105 High voltage line 106 Insulator 106a Eave part 108 Contact part

Claims (1)

A high voltage power supply that generates high voltage pulses;
An output terminal for discharging discharge by application of the high voltage pulse;
A high voltage electric wire for supplying a high voltage pulse from the high voltage power source to the output terminal;
A ground plane for storing the output terminal in an internal space;
A cylindrical insulator that supports the output terminal in a state of being electrically insulated from the grounded ground plane;
The cylindrical insulator has one end fixed to the bottom surface of the grounding surface and is erected, providing an output terminal at the other end, wiring a high-voltage wire inside,
The pulse generator is characterized in that the output terminal and an inner wall portion of the ground plane are insulated by a space portion in the ground plane.