JP2010189739A - Evaporator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an evaporator whose maintenance can be easily performed. <P>SOLUTION: The evaporator 100 is provided with: a hopper 114 storing an evaporation material 1; a first connection tube 112 having a connection opening part 112a conically opened in such a manner that the inner diameter is expanded as it goes to the upper side, on the upper side; a communication tube 113 connecting the lower side of the first connection tube 112 and the hopper 114; a second connection tube 115 having a connection opening part 115a formed into a conical shape in such a manner that the outer diameter is made narrow as it goes to the lower side, and attachably/detachably fitted to the connection opening part 112a of the first connection tube 112, on the lower side; a crucible 116 connected to the upper edge side of the second connection tube 115; an electric heater 118 heating the crucible 116; a cooling jacket 120 surrounding the electric heater 118 together with the crucible 116; a cooling coil 121 cooling the connection opening part 112a of the first connection tube 112; and a screw shaft 122 arranged rotatably within the connection tubes 112, 115. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an evaporation apparatus that heats and evaporates an evaporation material.

  In a film forming apparatus that forms a film by evaporating an evaporation material in a reduced pressure environment and depositing it on a substrate, an evaporation apparatus that heats and evaporates the evaporation material is used.

  As such an evaporation apparatus, for example, as described in Patent Document 1 below, an evaporation material in a material storage container having an open / close lid and connected to a vacuum pump is placed in a rotating cylindrical body with a vacuum valve and The material is supplied through the material guide member and the annular connecting member, and the screw feeder inside the rotating cylindrical body is rotated while rotating the rotating cylindrical body, and the material is supplied to the heating and evaporation means via the annular connecting member. It is known that the material can be continuously heated and vaporized by allowing continuous supply.

JP 2006-307239 A

  However, in the evaporation apparatus described in Patent Document 1 and the like as described above, when the heating evaporation means is separated for maintenance management or the like, the connection structure between the heating evaporation means and the rotating cylindrical body has a connection structure. Since it is complicated, there is a problem that it takes a lot of time and effort.

  Therefore, an object of the present invention is to provide an evaporation apparatus that can easily perform maintenance management.

  In order to solve the above-described problem, an evaporation apparatus according to a first aspect of the present invention has a hopper for storing evaporation material, and a connection port portion opened in a conical shape on the upper end side so as to expand the inner diameter toward the upper side. A first connecting pipe, a connecting pipe that connects the lower side of the first connecting pipe and the hopper, and a conical shape that narrows the outer diameter toward the lower side, and the first connecting pipe A second connection tube having a connection port portion detachably fitted to the connection port portion on the lower end side, a crucible connected to the upper end side of the second connection tube, and a crucible heating means for heating the crucible And a heat shielding cooling means for surrounding the crucible heating means together with the crucible, a first connection pipe cooling means for cooling the connection port of the first connection pipe, the first connection pipe, A screw shaft rotatably disposed in the second connecting pipe; and the screw. Characterized in that a driving means for rotating the Ryu shaft.

  An evaporation apparatus according to a second invention is the evaporation device according to the first invention, wherein the first connecting pipe cooling means is wound around the outer peripheral surface of the connection port portion of the first connecting pipe and cooled inside. A cooling coil through which a fluid flows is provided.

  The evaporation apparatus according to a third aspect of the present invention is the evaporation apparatus according to the first aspect, wherein the first connecting pipe cooling means is combined with a heat shielding cooling means disposed so as to surround the crucible heating means. It is characterized by.

  An evaporation apparatus according to a fourth invention is the second connection pipe for heating the second connection pipe portion between the heat shielding cooling means and the first connection pipe in the second invention. A heating means is provided.

  The evaporation apparatus according to a fifth aspect is characterized in that, in the third aspect, a heat shield member is disposed between the crucible heating means and the second connecting pipe.

  The evaporator according to a sixth aspect is characterized in that, in the third aspect, the thickness of the second connecting pipe is smaller than the thickness of the crucible.

  The evaporation apparatus according to a seventh invention is the evaporator according to the third invention, wherein the cooling means for heat shielding is disposed so as to surround the heating means for the crucible and the connection of the first connection pipe It is characterized by comprising a cooling jacket in contact with the mouth and through which a cooling fluid flows.

  An evaporator according to an eighth aspect of the present invention is the evaporator according to any one of the first to seventh aspects, further comprising a screw shaft heating means provided inside the screw shaft for heating the upper end side of the screw shaft. It is characterized by.

  The evaporation apparatus according to a ninth invention is characterized in that, in the eighth invention, the upper end side of the screw shaft protrudes from the upper end side of the second connection pipe so as to be exposed to the inside of the crucible. And

  According to the evaporation apparatus according to the present invention, since the connection port portion of the first connection pipe and the connection port portion of the second connection pipe are detachably connected, the connection ports of the connection pipe are connected to each other. Since the crucible and the hopper can be easily separated by simply pulling them apart, the crucible can be easily cleaned and the connection port of the first connection pipe is cooled by the first connection pipe cooling means. Thus, since the cell sealing can be performed by bringing the connection port portion of the first connection pipe and the connection port portion of the second connection pipe into close contact with each other, it is possible to prevent leakage of vapor or the like of the evaporation material from the space. And contamination to the surroundings can be prevented.

It is a schematic block diagram of 1st embodiment of the evaporation apparatus which concerns on this invention. It is a schematic block diagram of 2nd embodiment of the evaporation apparatus which concerns on this invention. It is a schematic block diagram of 3rd embodiment of the evaporation apparatus which concerns on this invention. FIG. 4 is an extracted enlarged cross-sectional view of a main part of FIG. 3. It is a schematic block diagram of 4th embodiment of the evaporation apparatus which concerns on this invention.

  Although the embodiment of the evaporation device concerning the present invention is described based on a drawing, the present invention is not limited only to the following embodiments explained based on a drawing.

[First embodiment]
A first embodiment of the evaporation apparatus according to the present invention will be described with reference to FIG.

  As shown in FIG. 1, a support base 111 is attached on the lower surface 11 inside the vacuum chamber. On the support base 111, a conical (tapered) opening 112a is provided on the upper end side (front end side) so that the inner diameter increases toward the upper side, and the lower end (base end) is closed. One connecting pipe 112 is erected. On the lower side of the outer peripheral surface of the first connection pipe 112, a lower end portion of the connection pipe 113 oriented so as to be inclined in the axial direction with respect to the vertical direction communicates with the inside of the first connection pipe 112. Are integrally connected. The upper end portion of the communication tube 113 is integrally connected to the lower portion of a hopper 114 that stores the powdery evaporation material 1 (for example, an organic material such as a fluorescent material or a phosphorescent material).

  The connection port portion 112a of the first connection pipe 112 has a connection port portion 115a formed in a conical shape (tapered shape) on the lower end side (base end side) so as to narrow the outer diameter toward the lower side. The connection port 115a of the second connection pipe 115 with the upper end (tip) chamfered is detachably fitted, and the second connection pipe 115 is coaxial with the first connection pipe 112. The inner diameter portion of the connection port portion 115 a is formed in a shape corresponding to the outer diameter portion of the connection port portion 112 a of the first connection pipe 112.

  The upper end side (front end side) of the second connection pipe 115 penetrates the lower surface of the crucible 116 and is integrated with the crucible 116 so as to be positioned inside the crucible 116 provided with a delivery port 116a in the upper part. Is provided. Inside the crucible 116, a current plate 117 having a plurality of flow holes 117a is attached so as to partition the inside of the crucible 116 into an upper side and a lower side.

  Outside the wall surface and bottom surface of the crucible 116, an electric heater 118, which is a crucible heating means electrically connected to a power source (not shown), is disposed. On the outside of the electric heater 118, a plurality of (two in this embodiment) heat shielding plates 119A as heat shielding members are disposed so as to surround the wall surface side and the bottom surface side of the crucible 116, The heat shield plate 119A disposed so as to be closest to the electric heater 118 is processed so as to partition the electric heater 118 and the second connection pipe 115 from each other. On the outer side of the upper surface of the crucible 116 and the upper portion of the electric heater 118, a heat shield plate 119 </ b> B as a heat shield member is provided above the crucible 116 and the electric heater 118 without blocking the outlet 116 a of the crucible 116. It is arranged so as to cover it.

  Outside the heat shield plate 119A, a cooling jacket 120 through which the cooling water 101 as a cooling fluid flows is disposed so as to surround the wall surface side and the bottom surface side of the crucible 116. A cooling coil 121 that circulates the cooling water 101 is wound around the outer peripheral surface of the connection port portion 112 a of the first connection pipe 112. The cooling jacket 120 and the cooling coil 121 are connected to a cooling water temperature adjusting / circulating device (chiller) (not shown).

  Inside the connection pipes 112 and 115, a screw shaft 122 is arranged so as to be coaxial with the connection pipes 112 and 115, and the screw shaft 122 has a lower end side (base end side) that is The lower end (base end) of the first connection pipe 112, the support base 111, and the lower surface 11 of the vacuum chamber pass through and protrude to the outside of the vacuum chamber. It is located to the upper end (tip) of the connecting pipe 115.

  Between the screw shaft 122 and the lower surface 11 of the vacuum chamber, a bearing 123 is provided so as to be coaxial with the screw shaft 122, and the screw shaft 122 is interposed via the bearing 123. It is rotatably supported with respect to the lower surface 11 of the vacuum chamber. The lower end (base end) of the screw shaft 122 is coaxially connected to the drive shaft of the drive motor 124. The drive motor 124 is supported on the lower surface 11 of the vacuum chamber via a support base 125.

  In the present embodiment, the cooling jacket 120, the chiller, etc. constitute a heat insulation cooling means, the cooling coil 121, the chiller, etc. constitute a first connecting pipe cooling means, and the drive motor 124. The drive means is configured by the above.

  Next, the operation of the evaporator 100 according to this embodiment will be described.

  First, the evaporative material 1 is placed in the hopper 114 and a substrate is disposed above the crucible 116. Then, the inside of the vacuum chamber is placed under a reduced pressure environment, the power supply is operated, and the heater 118 is operated. The inside of the crucible 116 is heated to a predetermined temperature (temperature at which the evaporation material 1 evaporates (sublimates), for example, about 200 to 350 ° C.), while the chiller is operated to supply cooling water to the cooling jacket 120 and the cooling coil 121. 101 (for example, about room temperature) is circulated and cooled (for example, about 100 to 250 ° C. (a temperature about 100 ° C. lower than the vaporization (sublimation) temperature)).

  When the drive motor 124 is operated to rotate the screw shaft 122, the evaporation material 1 in the hopper 114 is moved under the inside of the first connection pipe 112 through the communication pipe 113 by its own weight. Supplied and conveyed through the first connection pipe 112 and the second connection pipe 115 upward from below by the rotation of the screw shaft 122, and from the upper end (tip) of the second connection pipe 115. It is supplied to the inside of the crucible 116 and is vaporized (sublimated) by being heated and vaporized (sublimated) on the upper end portion (tip portion) of the screw shaft 122 and the bottom surface of the crucible 116.

  The vaporized evaporation material 1 is rectified by flowing through the flow hole 117a of the flow straightening plate 117, sent out from the feed port 116a of the crucible 116 to the outside of the crucible 116, and deposited on the surface of the substrate. To do.

  At this time, the connection port portion 115a of the second connection tube 115 is thermally expanded in the radial direction by heat transfer from the crucible 116, while the connection port portion 112a of the first connection tube 112 is Since the thermal expansion in the radial direction is suppressed by the cooling by the cooling coil 121, the gap between the connection port 112a of the first connection tube 112 and the connection port 115a of the second connection tube 115 is between , Comes to be tightly sealed (self-sealing).

  For this reason, when the evaporating material 1 passes through the connection port portions 112a and 115a of the connecting pipes 112 and 115 that are simply detachably fitted, the evaporating material 1 should be used by heat transfer from the crucible 116 or the like. Even if vaporized (sublimated) and vaporized, the vapor of the evaporating material 1 can be largely prevented from entering the gaps of the connection port portions 112a and 115a of the connection pipes 112 and 115. .

  Furthermore, since the connection port portion 112a of the first connection tube 112 is cooled by the cooling coil 121 (for example, about 200 to 350 ° C. to 100 ° C.), the connection ports of the connection tubes 112 and 115 are used. Even if the vapor of the evaporating material 1 gets into the gaps of the portions 112a and 115a, the vapor is cooled and solidified, so that the vapor is surely leaked from the gap to the outside. Can be prevented.

  Thereby, it can prevent that the vapor | steam of the evaporation material 1 adheres to outer surfaces, such as the said cooling jacket 120 and the said hopper 114, and the outer surfaces, such as the said cooling jacket 120 and the said hopper 114, become dirty.

  Then, after maintenance of the crucible 116 is performed after the evaporation material 1 is deposited on the substrate, the heat shield plate 119B is removed from above the crucible 116 and then the crucible 116 is removed. The second connecting pipe 115 is detached from the first connecting pipe 112, and the crucible 116 can be easily separated together with the second connecting pipe 115. Can be done easily.

  When cleaning of the crucible 116 is completed in this manner, the connection port 115a of the second connection pipe 115 is connected to the first connection pipe 112 while the crucible 116 is positioned inside the heater 118. The crucible 116 is easily assembled, and the heat shield plate 119B is disposed above the crucible 116, thereby completing maintenance management of the crucible 116.

  Therefore, according to the evaporation apparatus 100 according to the present embodiment, maintenance management can be easily performed, so that work efficiency can be greatly improved.

[Second Embodiment]
A second embodiment of the evaporation apparatus according to the present invention will be described with reference to FIG. However, for the same parts as in the case of the first embodiment described above, the same reference numerals as those used in the description of the first embodiment described above are attached to the drawings, so that the first A description overlapping with the description in the embodiment is omitted.

  As shown in FIG. 2, a flange portion 212b is formed on the outer peripheral surface on the upper end side (tip end side) of the connection port portion 112a of the first connection pipe 212 standing on the support base 111. . The upper surface of the flange portion 212 b of the first connection pipe 212 is in contact with the lower portion of the cooling jacket 120.

  The second connection pipe 215, in which the connection port 115a is detachably fitted to the connection port 112a of the first connection pipe 212, is a portion of the crucible 116 except for the connection port 115a. The outer diameter of the first connecting pipe 212 is smaller than that of the second connecting pipe 115 of the first embodiment described above so that the thickness is thinner (for example, less than half). The length in the axial direction is shorter than the second connecting pipe 115 of the first embodiment described above so that the flange 212b and the cooling jacket 120 can be contacted. In accordance with this, the length of the screw shaft 122 is also shorter than that of the first embodiment described above.

  Further, all of the heat shield plates 119A provided in a plurality are processed so as to partition the electric heater 118 and the second connection pipe 115.

  That is, the evaporator 200 according to this embodiment omits the cooling coil 121 of the evaporator 100 according to the first embodiment described above, and brings the cooling jacket 120 and the first connection pipe 212 into contact with each other. I did it.

  In the evaporator 200 according to the present embodiment, the evaporator according to the first embodiment described above is operated in the same manner as the evaporator 100 according to the first embodiment described above. As in the case of 100, the evaporation material 1 can be deposited on the surface of the substrate.

  The connection port portion 115a of the second connection tube 215 is thermally expanded in the radial direction by heat transfer from the crucible 116, while the connection port portion 112a of the first connection tube 212 is the flange. Since the thermal expansion in the radial direction is suppressed by cooling by the cooling jacket 120 via the portion 212b, the connection port of the first connection pipe 212 is the same as in the case of the first embodiment described above. The portion 112a and the connection port 115a of the second connection pipe 215 are tightly sealed (self-sealed).

  For this reason, when the evaporating material 1 passes through the connection port portions 112a and 115a of the connecting pipes 212 and 215 that are simply detachably fitted, the evaporating material 1 should be used by heat transfer from the crucible 116 or the like. Even if the vaporization (sublimation) has caused the vaporization, the vapor of the evaporation material 1 is generated in the connection ports 112a and 115a of the connection pipes 212 and 215 as in the case of the first embodiment described above. The entry into the gap can be greatly suppressed.

  Further, since the connection port portion 112a of the first connection pipe 112 is cooled by the cooling jacket 120 via the flange portion 212b, the connection port portions 112a and 115a of the connection pipes 212 and 215 are provided. Even if the vapor of the evaporating material 1 enters the gap, the vapor is cooled and solidified as in the case of the first embodiment described above. It is possible to reliably prevent leakage to the outside.

  Thereby, it can prevent that the vapor | steam of the evaporation material 1 adheres to outer surfaces, such as the said cooling jacket 120 and the said heat insulation board 119A, and the outer surfaces, such as the said cooling jacket 120, the said heat insulation board 119A, etc. become dirty. .

  By performing the same operation as in the first embodiment described above, maintenance management such as cleaning of the crucible 116 can be easily performed.

  That is, in the evaporation apparatus 100 according to the first embodiment described above, the connection port portion 112a of the first connection pipe 112 is cooled by the cooling coil 121, but the evaporation apparatus according to the present embodiment. In 200, instead of the cooling coil 121, the cooling jacket 120 can also be used to cool the connection port portion 112a of the first connection pipe 112.

  Therefore, according to the evaporation apparatus 200 according to the present embodiment, it is possible to obtain the same effect as that of the evaporation apparatus 100 according to the first embodiment described above, as well as the first embodiment described above. Since the number of parts can be reduced as compared with the case of the embodiment, the structure can be made simpler than the case of the first embodiment described above, and the product cost can be reduced.

  Further, since the axial length of the second connection pipe 215 is shorter than the second connection pipe 115 of the evaporator 100 according to the first embodiment described above, the second connection pipe Since the residence time of the evaporating material 1 inside 215 can be made shorter than in the case of the first embodiment described above, the thermal deterioration of the evaporating material 1 is more than in the case of the first embodiment described above. Can also be suppressed.

  In addition, the portion of the second connection pipe 215 excluding the connection port portion 115a has a thickness that is thinner than the thickness of the crucible 116, and all the heat shield plates 119A provided in a plurality. Is processed so as to partition the electric heater 118 and the second connection pipe 115, the first connection with the shortening of the axial length of the second connection pipe 215. Since an increase in the amount of heat transfer to the connecting pipe 212 can be suppressed, the connecting port portion 212a of the first connecting pipe 212 can be sufficiently provided even if the cooling capacity of the cooling jacket 120 is hardly increased. Can be cooled.

[Third embodiment]
A third embodiment of the evaporation apparatus according to the present invention will be described with reference to FIGS. However, the same parts as those in the first and second embodiments described above are denoted by the same reference numerals as those used in the description of the first and second embodiments described above. Descriptions overlapping with those in the first and second embodiments are omitted.

  As shown in FIGS. 3 and 4, the screw shaft 322 disposed inside the connection pipes 212 and 215 is hollow inside, and the upper end side (tip side) is the second connection pipe. It protrudes from the upper end side (front end side) of 215 so as to be exposed to the inside of the crucible 116.

  At the lower end (base end) of the screw shaft 322, a driven gear 326 having a through hole in the axial center portion is provided so as to be coaxial with the screw shaft 322. A driving gear 327 is engaged with the driven gear 326. The drive gear 327 is provided coaxially with the drive shaft of the drive motor 124. The drive motor 124 is supported by a support base 325 attached to the lower surface of the vacuum chamber.

  Inside the screw shaft 322, a sheath heater 328, which is a heating means for a screw shaft having a heat generating portion 328a only on the tip side, positions the tip side on the upper end side (tip side) of the screw shaft 322. The screw shaft 322 is inserted from the lower end side (base end side) of the drive gear 327 through the through hole. The base end side of the sheath heater 328 is connected to a power source (not shown).

  In this embodiment, the drive motor 124, the gears 326, 327, and the like constitute drive means.

  The evaporator 300 according to this embodiment is operated in the same manner as in the first and second embodiments described above, and generates heat (for example, 200 to 350) in the heat generating portion 328a of the sheath heater 328. The evaporation material 1 is allowed to move from the screw shaft 322 to the upper end (tip) of the second connection pipe 215 in the same manner as in the first and second embodiments described above. To the inside of the crucible 116 and heated on the upper end portion (tip portion) of the screw shaft 322 and the bottom surface of the crucible 116 to vaporize (sublimate), thereby becoming steam.

  At this time, the upper end side (front end side) of the screw shaft 322 protrudes from the upper end side (front end side) of the second connection pipe 215 so as to be exposed to the inside of the crucible 116, and the sheath heater 328 Since the heat generated by the heat generating portion 328a is heated to about the vaporization (sublimation) temperature of the evaporating material 1, it is significantly higher than the vaporization (sublimation) temperature of the evaporating material 1 through the first connection pipe 212 and the like. Since it can be surely prevented that the temperature drops to a low temperature, the evaporating material is formed around the upper end side (tip side) of the screw shaft 322 and the upper end side (tip side) of the second connection pipe 215. 1 can be reliably prevented from sticking.

  Therefore, according to the evaporator 300 according to the present embodiment, it is possible to obtain the same effects as those of the evaporators 100 and 200 according to the first and second embodiments described above. Since the evaporating material 1 can be reliably prevented from adhering around the upper end side (front end side) of the shaft 322 and the upper end side (front end side) of the second connecting pipe 215, the generation of steam is further stabilized. Can be done.

[Other Embodiments]
In addition, as another embodiment (fourth embodiment) of the first embodiment described above, for example, as shown in FIG. 5, between the cooling jacket 120 and the first connection pipe 112. An electric heater 429 that is a second connecting pipe heating means is disposed near the connection port portion 115a of the outer peripheral surface portion of the second connection pipe 115, and a heat shielding member is provided so as to surround the electric heater 429. A plurality of heat shield plates 430 are disposed, and the electric heater 429 causes the temperature of the second connection pipe 115 close to the connection port 115a to be lower than the vaporization (sublimation) temperature of the evaporation material 1 by a predetermined temperature ( For example, by using the evaporator 400 that can be heated to about 200 to 350 ° C. to about 100 ° C., the cooling coil 121 cools the connection port portion 115a of the first connection pipe 112. Accordingly, it is possible to reliably prevent the second connecting pipe 115 from being excessively cooled, and further improve the sealing performance between the connecting port portions 112a and 115a of the connecting pipes 112 and 115. In addition, it is possible to further stabilize the generation of steam.

  The third embodiment described above replaces the screw shaft 122 of the evaporation apparatus 200 according to the second embodiment described above with the upper end side (front end side) being the upper end side of the second connecting pipe 215. While the case of the evaporation apparatus 300 in which the screw shaft 322 provided with a sheath heater 328 in a hollow interior is applied while projecting so as to be exposed from the (front end side) inside the crucible 116, as another embodiment, For example, instead of the screw shaft 122 of the evaporators 100 and 400 according to the first and fourth embodiments described above, the upper end side (front end side) is crucible from the upper end side (front end side) of the second connection pipe 115. 116 is an evaporation device that uses a screw shaft 322 that protrudes so as to be exposed inside 116 and that is provided with a sheath heater 328 in a hollow interior. Possible it is.

  As another embodiment, for example, the first connection pipes 112 and 212 are made of a material having a low coefficient of thermal expansion (for example, SUS430 system) and the second connection pipes 115 and 215 are made. It is very preferable to use a material having a high thermal expansion coefficient (for example, SUS304) because the above-described self-sealing function can be further improved.

  Moreover, in each embodiment mentioned above, although the case of the evaporation apparatus 100,200,300,400 by the supply type of what is called a uniaxial form using one screw shaft 122,322 was demonstrated, as other embodiment, For example, it is possible to adopt a biaxial supply type in which two screw shafts having different screw spiral directions are arranged in parallel so as to mesh with each other.

  Further, the evaporation apparatus according to the present invention vaporizes the evaporation material 1 made of an organic material such as a fluorescent material or a phosphorescent material as described in each of the above-described embodiments, and deposits it on the substrate. A so-called point type evaporator having a cylindrical crucible or a so-called linear type evaporator having a rectangular box crucible in a film forming apparatus or the like for producing an electroluminescence (EL) element (in this case, As a matter of course, the apparatus can be applied as a plurality of supply mechanisms provided along the longitudinal direction with respect to the crucible), and an apparatus that continuously supplies the evaporation material into the crucible and continuously generates the vapor of the evaporation material If so, it can be applied in the same manner as in each of the above-described embodiments, and the same effect as in each of the above-described embodiments can be obtained.

  Since the evaporation apparatus according to the present invention can be easily maintained and managed, it can be used very effectively in various industries.

DESCRIPTION OF SYMBOLS 1 Evaporation material 11 Lower surface 100 Evaporating apparatus 101 Cooling water 111 Support stand 112 1st connection pipe 112a Connection port part 113 Connection pipe 114 Hopper 115 2nd connection pipe 115a Connection port part 116 Crucible 116a Outlet 117 Current plate 117a Flow hole 118 Electric Heater 119A, 119B Heat-shielding Plate 120 Cooling Jacket 121 Cooling Coil 122 Screw Shaft 123 Bearing 124 Drive Motor 125 Supporting Base 200 Evaporating Device 212 First Connecting Tube 212b Flange 215 Second Connecting Tube 300 Evaporating Device 322 Screw Shaft 325 Support base 326 Drive gear 327 Drive gear 328 Sheath heater 328a Heat generating part 400 Evaporating device 429 Electric heater 430 Heat shield plate

Claims (9)

A hopper for storing the evaporation material;
A first connection pipe having a connection port portion opened in a conical shape on the upper end side so as to expand the inner diameter toward the upper side;
A connecting pipe connecting the lower side of the first connecting pipe and the hopper;
A second connection pipe having a connection port portion on the lower end side, which is formed in a conical shape so as to narrow the outer diameter toward the lower side and is detachably fitted to the connection port portion of the first connection tube;
A crucible connected to the upper end side of the second connection pipe;
Heating means for the crucible for heating the crucible;
A cooling means for heat shielding that surrounds the crucible heating means together with the crucible;
First connecting pipe cooling means for cooling the connection port of the first connecting pipe;
A screw shaft rotatably disposed inside the first connection pipe and the second connection pipe;
An evaporating apparatus comprising: drive means for rotating the screw shaft. The evaporation apparatus according to claim 1,
The evaporator according to the first aspect, wherein the first connecting pipe cooling means includes a cooling coil wound around an outer peripheral surface of the connection port portion of the first connecting pipe and through which a cooling fluid flows. The evaporation apparatus according to claim 1,
The first connecting pipe cooling means also serves as a heat shielding cooling means arranged so as to surround the crucible heating means. The evaporator according to claim 2.
An evaporation apparatus comprising: a second connecting pipe heating means for heating the second connecting pipe portion between the heat shielding cooling means and the first connecting pipe. The evaporator according to claim 3.
An evaporation apparatus, wherein a heat shield member is disposed between the crucible heating means and the second connecting pipe. The evaporator according to claim 3.
The evaporation apparatus, wherein the thickness of the second connecting pipe is thinner than the thickness of the crucible. The evaporator according to claim 3.
The cooling means for heat shielding is disposed so as to surround the heating means for the crucible, and includes a cooling jacket in contact with the connection port portion of the first connection pipe and through which a cooling fluid flows. An evaporation apparatus characterized by In the evaporation apparatus according to any one of claims 1 to 7,
An evaporating apparatus comprising: a screw shaft heating means provided inside the screw shaft for heating the upper end side of the screw shaft. The evaporator according to claim 8.
The evaporation apparatus, wherein an upper end side of the screw shaft protrudes from the upper end side of the second connection pipe so as to be exposed to the inside of the crucible.

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