JP2010181853A - Polymer optical waveguide and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polymer optical waveguide achieving downsizing and reduction in cost of an optical device, and to provide a method for efficiently manufacturing a non-defective high polymer optical waveguide. <P>SOLUTION: The polymer optical waveguide 1A is formed of a clad film 10 and a core 20 formed integrally with the clad film. The core 20 is composed of a light guide part 21 formed on one side of the clad film 10, reflecting mirror surfaces 24 and 25 formed at both ends of the light guide part 21, an extension part 26 formed on the outside of one of the reflecting mirror surfaces, and perpendicular parts 22 and 23 formed inside through-holes 11 and 12 opened in the clad film 10. When manufacturing the polymer optical waveguide, the clad film 10 tightly adheres to a cavity-forming surface of a mold 30, and an ultraviolet-curable resin is pressure-injected into a cavity 35 through the through-hole 12 opened in the clad film 10. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a structure of a polymer optical waveguide in which a core made of a polymer material is integrally formed on a flexible clad film, and a manufacturing method thereof.

  Conventionally, as this type of polymer optical waveguide, as shown in FIG. 11, a core 102 is formed on one surface of a clad film 101, and a light incident portion 102 a and a light exit portion 102 b of the core 102 are connected to an end surface of the clad film 101. What is trimmed to the same plane is known (for example, refer to Patent Document 1).

  As shown in FIG. 12, the polymer optical waveguide includes (a) a step of producing a master 200 on which a convex portion 201 corresponding to a core to be manufactured is formed by a photolithography method, and (b) A step of transferring the formed convex portion 201 to the curable resin for mold formation to produce a cured resin layer 203 having a concave portion 202 corresponding to the convex portion 201; (c) a concave portion formed in the cured resin layer 203; Through-holes 204 and 205 are formed at the end of 202 and a mold 206 made of resin is manufactured; and (d) after the clad film 101 is brought into close contact with the recess 202 forming surface side of the mold 206, (E) filling the recess 202 with the core-forming curable resin 207 while putting the core-forming curable resin 207 under reduced pressure, and (e) Removing the rumm 101 and obtaining an intermediate product 209 in which the core 102 and the resin portion 208 cured in the through holes 204 and 205 are formed on one surface of the clad film 101; (f) the resin portion 208 of the intermediate product 209; It is manufactured through a step of obtaining a polymer optical waveguide 100 in which a core 102 is formed on one side of a clad film 101 by cutting with a dicer or the like (see, for example, Patent Document 1).

JP-A-2005-202230

  In the conventional polymer optical waveguide 100 shown in FIG. 11, since the light incident part 102a and the light outgoing part 102b of the core 102 are arranged on the end face side of the clad film 101, the alignment of the light emitting side device with respect to the light incident part 102a. In addition, it is difficult to align the light receiving side device with respect to the light output part 102b, and there is a problem that the optical device including the polymer optical waveguide 100 is increased in size and cost. That is, since the clad film 101 is made of a flexible resin film having a thickness of about 50 to 100 μm, it is practically impossible to directly set the light emitting side device and the light receiving side device on the end face, and some kind of jig is necessary. Therefore, the number of parts increases, and the optical device including the polymer optical waveguide 100 is increased in size and cost. Further, since it is necessary to provide some kind of jig between the polymer optical waveguide 100 and the light emitting side device and the light receiving side device, the light emitting side device and the light receiving side with respect to the light incident part 102a and the light emitting part 102b of the core 102 are provided. In order to accurately align the device, the light emitting side device and the light receiving side device must be moved in a three-dimensional direction with respect to the light incident portion 102a and the light emitting portion 102b of the core 102. From this point, the cost of the optical device including the polymer optical waveguide 100 is increased.

  On the other hand, the conventional polymer optical waveguide manufacturing method shown in FIG. 12 obtained an intermediate product 209 in which the core 102 and the resin portion 208 cured in the through holes 204 and 205 were formed on one surface of the clad film 101. Thereafter, since it is necessary to cut the resin portion 208 with a dicer or the like, there is a problem that the process becomes complicated and it is difficult to efficiently manufacture a good product. That is, if the core forming mold material and the exposure method are devised so that only the core forming curable resin 207 supplied to the portion to be the core 102 is selectively cured, a non-defective product can be manufactured more efficiently. Yes, there is room for improvement in this regard.

  The present invention has been made to solve such a technical problem, and the object thereof is to easily set the light emitting side device and the light receiving side device for the light incident portion and the light emitting portion of the core, and to reduce the size of the optical device. Another object of the present invention is to provide a polymer optical waveguide capable of reducing the cost, and to provide a method for producing a polymer optical waveguide capable of efficiently producing a non-defective product.

  In order to solve the above problems, the present invention relates to a polymer optical waveguide. First, in a polymer optical waveguide comprising a clad film and a core made of a polymer material, the core is formed of the clad film. A light guide part formed on one side, reflection mirror surfaces formed on both ends of the light guide part, and thinner than the light guide part formed on the outside of at least one of the reflection mirror surfaces It consists of an extended part and two vertical parts penetrating the clad film in the thickness direction, one end exposed on the other surface of the clad film, and at least one of the two vertical parts has the other end It was configured to be connected to the extension.

  According to this configuration, since the two reflection mirror surfaces are formed at both ends of the light guide portion, the light enters from the surface of the clad film facing one of the reflection mirror surfaces and the clad film facing the other reflection mirror surface. Since the light propagated through the light guide portion from the surface can be emitted, the light emitting side device and the light receiving side device can be directly attached to the surface of the clad film. Therefore, since no jig is required when attaching the light emitting side device and the light receiving side device to the polymer optical waveguide, the optical device having the polymer optical waveguide can be reduced in size and cost. Can do. In addition, since the light emitting side device and the light receiving side device can be directly attached to the surface of the clad film, the alignment of the light emitting side device and the light receiving side device with respect to the light incident part and light outgoing part of the polymer optical waveguide is along the surface of the clad film. It only needs to be performed in the two-dimensional direction, and the assembly of the optical device including the polymer optical waveguide can be facilitated. Furthermore, since the extended portion is formed outside the reflecting mirror surface, the positioning of the vertical portion with respect to the light guide portion can be facilitated, and the production of the polymer optical waveguide can be made highly efficient. In addition, since the extension part is formed thinner than the light guide part, light leakage from the extension part can be suppressed, and an optical waveguide with high light propagation efficiency can be obtained.

  The present invention secondly relates to the polymer optical waveguide, in the first polymer optical waveguide, in the first polymer optical waveguide, the extension portions are respectively formed on the outer sides of the reflecting mirror surfaces formed at both ends of the light guide portion, The ends of the two vertical portions are connected to the two extended portions one by one.

  According to such a configuration, since the extended portions are formed at both ends of the light guide portion, the formation of two vertical portions with respect to the light guide portion can be facilitated, and the production of the polymer optical waveguide can be most highly efficient.

  The present invention thirdly relates to the polymer optical waveguide, in the first polymer optical waveguide, the extension portion is formed only on the outer side of one reflection mirror surface formed at one end portion of the light guide portion, The end portions of the two vertical portions are connected to a position facing the reflection mirror surface of the light guide portion and the extension portion, respectively.

  According to such a configuration, since the extended portion is formed at one end of the light guide portion, it is possible to facilitate the formation of one vertical portion with respect to the light guide portion, and to increase the efficiency of manufacturing the polymer optical waveguide.

  The present invention relates to a polymer optical waveguide, fourthly, in the second polymer optical waveguide, the thickness of any one of the two extended portions formed on the outer side of each reflecting mirror surface is set. The thickness is larger than the thickness of the other extension.

  The polymer optical waveguide according to the present invention is formed by closely attaching a clad film to a cavity forming surface of a mold in which cavities corresponding to a light guide portion, a reflecting mirror surface, and an extended portion are formed, and between the mold and the clad film. It is formed by filling the space with a resin for forming a core from the other end side of the space while sucking air in the space from one end side of the space to be formed. In this case, the air in the space is sucked from the expansion portion side having a small thickness, and the core forming resin is filled in the space from the expansion portion side having a large thickness to guide the light from the space corresponding to the expansion portion. Since the flow of the resin into the space corresponding to the part can be made smooth, the resin can be filled into the space in a short time, and the production of the polymer optical waveguide can be made more efficient and the optical It is possible to form a core having excellent mechanical properties.

  Fifth, the present invention relates to a polymer optical waveguide. In the first to fourth polymer optical waveguides, the light guide section has a cross-sectional area when cut along a plane perpendicular to the center line in the length direction. , The structure is such that it increases or decreases uniformly from one end to the other end.

  Also in this case, by sucking the air in the space from one end side of the light guide section having a small cross-sectional area, the space is filled with the resin for forming the core from the other end side of the light guide section having a large cross-sectional area. Since the flow of the resin in the space corresponding to the light guide portion can be made smooth, it is possible to increase the efficiency and quality of the production of the polymer optical waveguide.

  The present invention relates to a polymer optical waveguide in the sixth aspect. In the fifth polymer optical waveguide, the light guide section has a taper whose bottom surface uniformly inclines from one end to the other end. It was configured to be formed on the surface.

  The present invention relates to a polymer optical waveguide in the seventh aspect. In the fifth polymer optical waveguide, the light guide portion has at least one side surface at one end with respect to a center line in the length direction. The taper surface is uniformly inclined from the first portion to the other end portion.

  As means for uniformly increasing or decreasing the cross-sectional area of the light guide unit in the length direction, there are a method of inclining the bottom surface of the light guide unit and a method of inclining the side surface of the light guide unit. In any case, the core forming resin is filled into the space from the other end side of the light guide portion having a large cross-sectional area while sucking air in the space from one end side of the light guide portion having a small cross-sectional area. As a result, the flow of the resin in the space corresponding to the light guide portion can be made smooth, so that the production efficiency and quality of the polymer optical waveguide can be improved.

  Eighth aspect of the present invention relates to a polymer optical waveguide. In the first to seventh polymer optical waveguides, the light guide portion and the two vertical portions have substantially the same cross-sectional shape and cross-sectional area. did.

  According to such a configuration, a loss of light inside the core due to a change in the cross-sectional area of each part can be avoided or suppressed, so that a polymer optical waveguide with high light propagation efficiency can be obtained. Note that “substantially the same” means that there is an unavoidable error in forming the light guide portion, the light incident portion, and the light exit portion.

  In the ninth aspect of the present invention, in the first to eighth polymer optical waveguides, the surface of the core exposed on one side of the clad film is covered with a second clad film. did.

  According to such a configuration, since the core can be completely covered with two clad films except for the light incident portion and the light exit portion, light leakage from the core is further reduced as compared with the case where only one clad film is used. It is possible to reliably suppress the light propagation efficiency, and to increase physical and chemical resistance.

  On the other hand, according to the present invention, in order to solve the above-mentioned problem, first, in the method of manufacturing a polymer optical waveguide, a cavity for forming a core having a light guide part, a reflection mirror surface, and an extension part is formed. A step of closely adhering a clad film to a cavity forming surface of a mold; and at least one of the through holes communicating with a portion corresponding to an extended portion of the cavity is formed in the clad film. Placing a pressing jig having a resin injection port and an exhaust port on the clad film, and the first and second through holes opened in the cladding film and the resin opened in the pressing jig A step of matching the inlet and the exhaust port, and after fixing the mold and the clad film using the holding jig, from the exhaust port to the exhaust port , While sucking air in the second through hole, in the cavity, in the first through hole, and in the resin inlet, from the resin inlet, into the resin inlet, into the first through hole, and to the cavity A step of pressure-filling a polymer material for forming a core into the second through hole and the exhaust port, a polymer material filled in the cavity, and the first and second through holes. Selectively curing only the filled polymer material to form the core, and leaving the polymer material filled in the resin inlet and the polymer material filled in the exhaust port uncured; And a step of removing the pressing jig from the surface of the clad film and peeling the clad film integrally formed with the core from the mold.

  The width of the light guide unit is about several μm to several tens of μm, whereas the width and length of the extension unit can be formed in an arbitrary size as necessary. Therefore, after forming a portion corresponding to the extended portion of the core in the mold and closely attaching the clad film to the cavity forming surface of the mold, at least one for forming a vertical portion at a position corresponding to the extended portion of the clad film Opening a through-hole makes it easier to open a through-hole than when opening a through-hole in the part corresponding to the reflection mirror surface of the core, making the production of the desired polymer optical waveguide more efficient can do. In addition, unlike the case where the clad film in which the first and second through holes are previously opened is closely attached to the mold, the alignment between the both ends of the cavity and the first and second through holes is not necessary. The polymer optical waveguide can be manufactured with high efficiency. Furthermore, if a pressing jig is placed on the clad film and an appropriate pressure is applied to the mold and the clad film, the misalignment between the mold and the clad film can be surely prevented in the subsequent processes. It can be manufactured efficiently. In addition, while sucking air from the exhaust port into the exhaust port, the second through hole, the cavity, the first through hole, and the resin injection port, a polymer material for core formation is added from the resin injection port into each part. When pressure-filling is performed, the high-efficiency product can be filled with high efficiency, and air bubbles can be prevented from being mixed into the high-molecular material. In addition, rather than curing all the filled polymer materials, only the polymer materials filled in the cavity and the polymer materials filled in the first and second through holes are selectively cured. Then, since it is not necessary to perform post-processing of an unnecessary hardened portion, the polymer optical waveguide can be manufactured with high efficiency.

  Secondly, the present invention relates to a method for producing a polymer optical waveguide. In the first method for producing a polymer optical waveguide, a plurality of light guide portions are formed on the mold, and formed at both ends of the light guide portions. Forming a cavity for forming the plurality of reflection mirror surfaces formed and an extended portion connecting the plurality of reflection mirror surfaces formed on at least one end side of the plurality of light guide portions; and At least one of the first and second through holes is opened in a portion corresponding to a cavity for forming the extension portion.

  According to such a configuration, one through hole can be communicated with a plurality of light guides, and a plurality of light guides can be formed simultaneously by a single resin injection. The molecular optical waveguide can be manufactured with high efficiency.

  Thirdly, the present invention relates to a method for producing a polymer optical waveguide. In the first method for producing a polymer optical waveguide, the pressing jig is formed of a transparent material, and at least the wall surface of the resin injection port and the exhaust are formed. Using a material in which a light-shielding film is selectively formed on a required part including the wall surface of the mouth, and using an ultraviolet curable resin as the polymer material for forming the core, from the resin inlet to the inside of the resin inlet After filling the ultraviolet curable resin for core formation into the first through hole, the cavity, the second through hole, and the exhaust port, the ultraviolet rays filled in the respective parts through the pressing jig It was set as the structure which irradiates resin hardening light to curable resin.

  According to such a configuration, the light shielding film can prevent the curing of the ultraviolet curable resin in the resin inlet and the exhaust port established in the holding jig, so that the post-treatment required for removing the cured ultraviolet curable resin can be performed. A large number of polymer optical waveguides can be continuously produced using one pressing jig. Moreover, since the resin curing light is irradiated to the entire surface of the ultraviolet curable resin filled in the cavity and the first and second through holes through the holding jig, the resin can be cured easily and efficiently at a necessary location. Can be done.

  Fourthly, the present invention relates to a method for manufacturing a polymer optical waveguide. In the first method for manufacturing a polymer optical waveguide, the pressing jig is formed of an opaque material, and the resin injection port and the exhaust port are opened. In addition to using a hole having an opening for exposure at a position different from the position, an ultraviolet curable resin is used as the polymer material for forming the core, and from the resin inlet to the inside of the resin inlet, the first through hole The inside of the cavity, the second through hole, and the exhaust port were filled with the UV curable resin for core formation, and then the holding jig was moved to open the exposure hole and the cladding film. The first through hole or the second through hole is matched, and through the exposure hole, the ultraviolet curable resin filled in each through hole and the ultraviolet curable resin filled in the cavity. And the configuration of irradiating the resin curing light to fat.

  After filling the ultraviolet curable resin, the holding jig is moved so that the exposure hole opened in the holding jig and the first through hole or the second through hole opened in the clad film are matched to each other. When the resin curable light is irradiated to the ultraviolet curable resin filled in each through hole and the ultraviolet curable resin filled in the cavity through the through hole, the resin cured light incident from the one through hole becomes the one through hole. Because it propagates to the ultraviolet curable resin filled in, the ultraviolet curable resin filled in the cavity, and the ultraviolet curable resin filled in the other through hole, the ultraviolet light filled in each through hole The curable resin and the ultraviolet curable resin filled in the cavity can be reliably cured. In addition, since the resin injection port and the exhaust port opened in the holding jig are moved from the exposed part during the exposure of the UV curable resin, the UV curable resin remaining in each of these ports is reliably prevented from being cured. can do.

  Fifthly, the present invention relates to a method for manufacturing a polymer optical waveguide. In the first method for manufacturing a polymer optical waveguide, the pressing jig is formed of an opaque material, and the resin injection port and the first through hole are used. A resin injection path and exposure path switching means provided at a position communicating with the exhaust port and a position communicating with the second through hole, and an exposure hole communicating with the switching means is used. As the polymer material for forming the core, an ultraviolet curable resin is used, and the switching means includes a position where the resin injection port and the first through hole communicate with each other, and the exhaust port and the second through hole. By switching to a state of communication, an ultraviolet curable resin for forming a core is placed from the resin injection port into the resin injection port, the first through hole, the cavity, the second through hole, and the exhaust port. After filling, the switching means is switched to a state in which the exposure hole communicates with the first through hole or the second through hole, and the first and second through holes are filled through the exposure hole. The ultraviolet curable resin and the ultraviolet curable resin filled in the cavity are irradiated with resin curing light.

  According to such a configuration, by appropriately switching the switching means, the supply of the ultraviolet curable resin into the first and second through holes and the cavity, and the curing of the ultraviolet curable resin filled in each of these parts can be performed. Therefore, it becomes possible to process the clad film and the mold with pressure applied by the holding jig, and it is possible to prevent the deviation between the clad film and the mold, and the exposure hole and the clad formed in the holding jig. Alignment with the through-holes opened in the film is not necessary, and it is possible to prevent the resin from being hardened by exposing unnecessary parts, making the production of polymer optical waveguide more efficient can do.

  The present invention relates to a method for manufacturing a polymer optical waveguide, sixthly, in the first method for manufacturing a polymer optical waveguide, in the first method for manufacturing a polymer optical waveguide, the resin injection path and the exposure path switching means are inserted in a slider formed in the holding jig. It is configured to include a space and a slider configured to be insertable into the slider insertion space.

  According to such a configuration, by simply sliding the slider in the slider insertion space formed in the holding jig, the supply of the ultraviolet curable resin into the first and second through holes and the cavity, and the first In addition, since it is possible to expose the ultraviolet curable resin filled in the second through-hole and the cavity, the movement of the holding jig can be facilitated, and the production of the polymer optical waveguide is more efficient. Can be made.

  In the polymer optical waveguide of the present invention, since two reflection mirror surfaces are formed at both ends of the light guide portion, the surface side of the clad film can be used as a light entrance portion and a light exit portion. Therefore, the light emitting side device and the light receiving side device can be easily attached to the polymer optical waveguide, and the optical device including the polymer optical waveguide can be reduced in size and cost. Further, since the extended portion is formed outside the reflecting mirror surface, the positioning of the vertical portion for resin injection with respect to the light guide portion can be facilitated, and the production of the polymer optical waveguide can be made highly efficient.

  In the method for producing a polymer optical waveguide according to the present invention, a portion corresponding to an extended portion of a core is formed on a mold, and a clad film is closely attached to a cavity forming surface of the mold, and then at a position corresponding to the extended portion of the clad film. Since at least one through-hole for forming the vertical portion is opened, the opening of the through-hole can be facilitated as compared with the case where the through-hole is opened in the portion corresponding to the reflection mirror surface of the core. The production of the polymer optical waveguide can be made highly efficient. In addition, unlike the case where the clad film in which the first and second through holes are previously opened is closely attached to the mold, the alignment between the both ends of the cavity and the first and second through holes is not necessary. The polymer optical waveguide can be manufactured with high efficiency. In addition, if any one of the two extended portions formed outside each reflecting mirror surface is made larger than the thickness of the other extended portion, the core is formed in the space from the large expanded portion side. By filling the resin, the flow of the resin from the space corresponding to the extension portion to the space corresponding to the light guide portion can be made smooth. When the space is uniformly increased or decreased with respect to the length direction, the space corresponding to the light guide unit is filled by filling the space with a resin for forming a core from the other end side of the light guide unit having a large cross-sectional area. The flow of the resin inside can be made smooth, so that the resin can be filled into the space in a short time, the production of the polymer optical waveguide can be made more efficient, and the optical characteristics are more excellent. Cores can be formed.

It is sectional drawing of the polymer optical waveguide which concerns on 1st Embodiment. It is sectional drawing of the polymer optical waveguide which concerns on 2nd Embodiment. It is a top view of the polymer optical waveguide concerning a 3rd embodiment. It is sectional drawing of the polymer optical waveguide which concerns on 4th Embodiment. It is sectional drawing of the polymer optical waveguide which concerns on 5th Embodiment. It is a top view of the polymer optical waveguide concerning a 6th embodiment. It is process explanatory drawing of the polymer optical waveguide manufacturing method which concerns on 1st Embodiment. It is process explanatory drawing of the polymer optical waveguide manufacturing method which concerns on 2nd Embodiment. It is process explanatory drawing of the polymer optical waveguide manufacturing method which concerns on 3rd Embodiment. It is process explanatory drawing of the polymer optical waveguide manufacturing method which concerns on 4th Embodiment. It is process explanatory drawing of the polymer optical waveguide manufacturing method which concerns on a prior art example. It is sectional drawing which shows the other example of the polymer optical waveguide which concerns on a prior art example.

  First, an embodiment of a polymer optical waveguide according to the present invention will be described with reference to FIGS. 1 is a cross-sectional view of a polymer optical waveguide 1A according to the first embodiment, FIG. 2 is a cross-sectional view of a polymer optical waveguide 1B according to the second embodiment, and FIG. 3 is a polymer optical waveguide 1C according to the third embodiment. 4 is a cross-sectional view of a polymer optical waveguide 1D according to the fourth embodiment, FIG. 5 is a cross-sectional view of a polymer optical waveguide 1E according to the fifth embodiment, and FIG. 6 is a high view according to the sixth embodiment. It is a top view of molecular optical waveguide 1F.

<First Embodiment of Polymer Optical Waveguide>
As shown in FIG. 1, a polymer optical waveguide 1A according to the first embodiment includes a clad film 10 and a core 20 made of a polymer material formed integrally with the clad film 10, and the core 20 is clad. A light guide 21 formed on one side of the film 10, reflection mirror surfaces 24 and 25 formed on both ends of the light guide 21, and a light guide 21 formed outside one of the reflection mirror surfaces 25. And the two vertical portions 22 and 23, one end of which is exposed on the surface of the clad film 10, and one vertical portion 23 is the other. The end is connected to the extension 26. The end surface 22a of the vertical portion 22 is disposed flush with the surface of the clad film 10, and this surface 22a serves as a light entrance portion or a light exit portion. Further, the end face 23a of the vertical portion 23 is also flush with the surface of the clad film 10, but the face 23a is not involved in light input / output. In the polymer optical waveguide 1A of the present example, a portion X on the surface of the clad film 10 facing the reflection mirror surface 25 is a light incident portion or a light outgoing portion. In addition, which of the end surface 22a of the vertical part 22 and the part X facing the reflecting mirror surface 25 on the surface of the clad film 10 is set as the light incident part and the other as the light output part can be appropriately selected as necessary. In the following description, the end surface 22a of the vertical portion 22 is the light incident portion, and the portion X of the surface of the clad film 10 facing the reflection mirror surface 25 is the light exit portion.

  The reflection mirror surface 24 is for totally reflecting the light incident from the vertical part 22 and guiding it to the light guide part 21, and is inclined at an angle of 45 ° with respect to the light guide part 21 and the vertical part 22. It is formed with a surface. On the other hand, the reflection mirror surface 25 is for totally reflecting the light propagated through the light guide portion 21 and leading it to a portion X on the surface of the clad film 10 facing the reflection mirror surface 25. It is formed with an inclined surface inclined at an angle of 45 ° with respect to the portion 23. As described above, when the reflecting mirror surfaces 24 and 25 are formed in a required portion of the core 20, the light incident from the light incident portion can be efficiently guided to the light exit portion, and thus light propagation in the polymer optical waveguide 1A. Efficiency can be increased.

  It is particularly desirable that the light guide portion 21 and the two vertical portions 22 and 23 have substantially the same cross-sectional shape and cross-sectional area. In this way, the loss of light inside the core due to the change in the cross-sectional area of each part can be avoided or suppressed, so that a polymer optical waveguide with high light propagation efficiency can be obtained.

  The extension part 26 facilitates the formation of the vertical part 23 with respect to the light guide part, and is formed to a thickness that does not affect the extraction of light from the reflection mirror surface 25, for example, about 5 μm.

<Second Embodiment of Polymer Optical Waveguide>
As shown in FIG. 2, the polymer optical waveguide 1B according to the second embodiment is characterized in that the surface of the light guide portion 21 is covered with a second clad film 10a. In the polymer optical waveguide 1B of this example, the light guide 21 is covered with the second clad film 10a, so that light leakage from the core 20 is more reliably suppressed as compared with the case where only the clad film 10 is provided. Thus, the light propagation efficiency can be increased, and the physical and chemical resistance can be increased. Others are the same as those of the polymer optical waveguide 1A according to the first embodiment, and therefore, the corresponding parts are denoted by the same reference numerals and description thereof is omitted. The second clad film 10a is particularly preferably bonded to the clad film 10 in order to prevent peeling.

<Third Embodiment of Polymer Optical Waveguide>
As shown in FIG. 3, the polymer optical waveguide 1 </ b> C according to the third embodiment has a plurality (four in the example of FIG. 3, but several tens of practical products) on one surface of one clad film 10. .)), And an extension part 26a for connecting one end of each light guide part 21 and an extension for connecting the other end of each light guide part 21 to both ends of the plurality of light guide parts 21. A portion 26b is formed, and one end of each of the vertical portions 22 and 23 is connected to each of the extended portions 26a and 26b. When a plurality of light guide portions 21 are formed on one surface of one clad film 10 and these light guide portions 21 are connected by an extension portion 26, a plurality of light guide portions are simultaneously formed by a single resin injection. Therefore, a polymer optical waveguide having a plurality of light guide portions can be manufactured with high efficiency. In addition, if the extended portions 26 are formed on both ends of the light guide portion 21, the formation of both the vertical portions 22 and 23 can be facilitated. From this point as well, the production efficiency of the polymer optical waveguide is increased. be able to. Others are the same as those of the polymer optical waveguides 1A and 1B according to the first and second embodiments.

<Fourth Embodiment of Polymer Optical Waveguide>
As shown in FIG. 4, the polymer optical waveguide 1 </ b> D according to the fourth embodiment has extended portions 26 a and 26 b formed on both end sides of the light guide portion 21, respectively, and either one (in the example of FIG. 4, the left side The thickness t1 of the extended portion 26a is larger than the thickness t2 of the other extended portion 26b. In the polymer optical waveguide 1D of this example, the thicknesses of the extended portions 26a and 26b formed on both end sides of the light guide portion 21 are made different, so that the formation of the core 20 can be facilitated and the optical characteristics are excellent. The core 20 can be formed. That is, all of the polymer optical waveguides 1A to 1F of the present invention have a cavity forming surface of a mold in which cavities corresponding to the light guide portion 21, the reflecting mirror surfaces 24 and 25, and the extended portion 26 (or 26a and 26b) are formed. The clad film 10 is in close contact with each other, and the air for forming the core is formed in the space from the other end of the space while sucking the air in the space from one end of the space formed between the mold and the clad film 10. It is formed by filling a resin. In this case, the inside of the space corresponding to the expansion portion 26a is filled by filling the space with the resin for forming the core from the expansion portion 26a side with the large thickness while sucking air in the space from the expansion portion 26b side with the small thickness. Since the resistance when the resin flows into the space corresponding to the light guide portion 21 from the inside can be reduced and the flow can be smoothed, the resin can be filled into the space in a short time, The production of the molecular optical waveguide 1D can be made efficient. In addition, bubbles are less likely to remain due to the small thickness of the flow path in the space corresponding to the expansion part 26b on the suction side. Moreover, since the volume of the space corresponding to the expansion part 26b may be small, it is not necessary to make the entire resin filling amount a problem, and the filling time is not increased accordingly. Moreover, since the flow of the resin can be smoothed, the homogeneity of the core 20 can be improved, and the core 20 having excellent optical characteristics can be formed. Others are the same as those of the polymer optical waveguide 1C according to the third embodiment, and therefore, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

<Fifth Embodiment of Polymer Optical Waveguide>
As shown in FIG. 5, in the polymer optical waveguide 1E according to the fifth embodiment, the bottom surface of the light guide portion 21 is a tapered surface that uniformly slopes from one end portion to the other end portion, The cross-sectional area of the light guide 21 when cut along a plane perpendicular to the center line in the length direction is from one end (in this example, the vertical part 22 side) to the other end (in this example). , And the vertical portion 23 side), it decreases uniformly. According to such a configuration, by sucking the air in the space from one end side of the light guide unit having a small cross-sectional area, the core forming resin is filled into the space from the other end side of the light guide unit having a large cross-sectional area. Since the flow of the resin in the space corresponding to the light guide portion 21 can be made smooth, it is possible to improve the efficiency and quality of the production of the polymer optical waveguide. Moreover, since the cross-sectional area is small at the one end side of a light guide part, it is not necessary to make the whole resin filling amount a subject, and the filling time accompanying it does not increase. In addition, bubbles are less likely to remain. Others are the same as those of the polymer optical waveguides 1A to 1D according to the first to fourth embodiments.

<Sixth Embodiment of Polymer Optical Waveguide>
As shown in FIG. 6, the polymer optical waveguide 1 </ b> F according to the sixth embodiment has tapered surfaces that uniformly incline the left and right side surfaces of the light guide portion 21 from one end portion to the other end portion. The cross-sectional area of the light guide 21 when cut along a plane orthogonal to the center line in the length direction is from one end (in this example, the vertical part 22 side) to the other end (in this example). In this case, it is characterized in that it decreases uniformly as it reaches the vertical portion 23 side). Similarly to the polymer optical waveguide 1E according to the fifth embodiment, the polymer optical waveguide 1F of the present example also guides the air having a large cross-sectional area while sucking air in the space from one end side of the light guide unit having a small cross-sectional area. By filling the core-forming resin into the space from the other end side of the optical portion, the resin flow in the space corresponding to the light guide portion 21 can be made smooth. Efficiency and quality can be improved. Moreover, since the cross-sectional area is small at the one end side of a light guide part, it is not necessary to make the whole resin filling amount a subject, and the filling time accompanying it does not increase. In addition, bubbles are less likely to remain. Others are the same as those of the polymer optical waveguides 1A to 1E according to the first to fifth embodiments.

  The clad film 10 and the second clad film 10a are described in terms of optical characteristics such as refractive index, mechanical strength, heat resistance, core 20, and the like, depending on the use of the optical device including the polymer optical waveguides 1A to 1F. The material is selected in consideration of adhesion to the mold, flexibility, water absorption, and the like. Specifically, in order to ensure a difference in refractive index with the core 20, an alicyclic acrylic resin film or an alicyclic olefin resin film having a refractive index smaller than 1.55 and a thickness of about 50 μm to 100 μm is used. be able to.

  The core 20 can be formed of any known polymer material as long as it has a required refractive index and light transmittance. However, by controlling the irradiation range of the resin curing light, the core 20 can be Since only the portion can be selectively cured and the core 20 and thus the polymer optical waveguides 1A to 1F can be easily manufactured, an ultraviolet curable resin is particularly preferable. The cross-sectional shape of the core 20 is rectangular, and the width and height thereof are formed to be about 15 μm to 100 μm depending on the use of the optical device including the polymer optical waveguides 1A to 1F.

  In the polymer optical waveguides 1A to 1F according to each of the above-described embodiments, the light incident portion and the light exit portion are arranged toward the surface of the clad film 10, so that a light emitting side device and a light receiving side device not shown on the surface of the clad film 10 Can be directly attached. Therefore, as compared with the case where any jig is provided between the polymer optical waveguides 1A to 1F and the light emitting side device and the light receiving side device, the optical device including the polymer optical waveguides 1A to 1F is reduced in size and cost. Can be achieved. Further, since the light emitting side device and the light receiving side device can be directly attached to the surface of the clad film 10, the alignment of the light emitting side device and the light receiving side device with respect to the light incident portion and the light emitting portion of the polymer optical waveguide 10 is facilitated. The assembly of the optical device including the polymer optical waveguides 1A to 1F can be simplified.

  Next, the manufacturing method of the polymer optical waveguide according to the present invention will be described by taking the manufacturing method of the polymer optical waveguide 1A according to the first embodiment as an example. The manufacturing procedure of the polymer optical waveguide is exactly the same for the second to sixth polymer optical waveguides 1B to 1F.

<First Embodiment of Polymer Optical Waveguide Manufacturing Method>
FIG. 7 is a diagram showing a first embodiment of a method for producing a polymer optical waveguide according to the present invention. As is apparent from this figure, the method for producing a polymer optical waveguide of this example is a transparent presser. A tool is used to cure the ultraviolet curable resin filled in the mold by irradiating the entire surface with resin curing light from outside the jig.

  First, as shown in FIG. 7A, a groove portion 31 corresponding to the light guide portion 21, inclined surfaces 32 and 33 corresponding to the reflection mirror surfaces 24 and 25, and a shallow groove portion 34 corresponding to the expansion portion 26 are provided. A mold 30 in which a groove-like cavity 35 is formed is prepared. The mold 30 is formed of, for example, nickel or a nickel alloy because the resin can be easily peeled and the required light guide 21 can be formed with high accuracy. The cavity 35 can be formed in the mold 30 by cutting the cavity 35 directly on a nickel plate or nickel alloy plate as a material by laser processing or the like, or by using a photolithography technique on the glass substrate 21. After producing a master with a photo-resist ridge corresponding to the above, using a transfer technique using electroforming, the ridge formed on the master is transferred to a nickel mold or a nickel alloy mold. It can also be done. Note that a release material for facilitating the peeling of the core 20 can be applied to the groove portion 31, the inclined surfaces 32 and 33, and the shallow groove portion 34.

  Next, as shown in FIG. 7B, after the clad film 10 is brought into close contact with the formation surface of the cavity 35 of the mold 30, the position corresponding to the inclined surface 32 of the clad film 10 and the position corresponding to the extended portion 26. In addition, the first and second through holes 11 and 12 are opened by laser processing or the like. In the manufacturing method of the polymer optical waveguide of this example, since the shallow groove portion 34 is formed on one end portion side of the groove portion 31, a laser processing machine or the like is formed at one end portion of the groove portion 31 when the second through hole 12 is opened. Therefore, the second through hole 12 can be easily opened. In the case where the shallow groove portions 34 are formed on both ends of the groove portion 31, respectively, since the positioning of the laser processing machine or the like can be facilitated when the first and second through holes 11 and 12 are opened, a higher polymer. Manufacturing of the optical waveguide can be facilitated.

  Next, as shown in FIG. 7C, the resin injection port 41 and the exhaust gas are formed at a position corresponding to the through holes 11 and 12 formed in the clad film 10 and made of a transparent material such as a glass plate or a resin plate. An opening 42 is opened, and a holding jig 40 having a light shielding film 43 formed on the wall surfaces of the resin injection port 41 and the exhaust port 42 is placed. The through hole 11 and the resin injection port 41, and the through hole 12 and the exhaust port 42 The holding jig 40 is aligned so that the two match each other. Thereafter, the head 51 of the resin supply device and the head 52 of the suction device are connected to the resin injection port 41 and the exhaust port 42, respectively, and the air in the through holes 11 and 12 and the cavity 35 is sucked by the suction device. When the pressure inside the cavity 35 is reduced and the pressure inside the cavity 35 is reduced to a predetermined value or less, an ultraviolet curable resin for core formation is injected into the through holes 11 and 12 and the cavity 35 from the resin supply device. As a result, filling of the ultraviolet curable resin into the through holes 11 and 12 and the cavity 35 is performed with high efficiency, and mixing of bubbles into the core 20 is prevented, and high-quality manufacturing is performed with high efficiency. Is possible. When the ultraviolet curable resin is filled in the through holes 11 and 12 and the cavity 35, the supply of the resin from the resin supply device is stopped, and the ultraviolet curable resin curing light L is applied from the entire outer surface of the holding jig 40. Irradiate. As described above, since the light shielding film 43 is formed on the wall surfaces of the resin injection port 41 and the exhaust port 42, even after the resin curing light L is irradiated on the entire surface, the resin injection port 41 and the exhaust port 42. The ultraviolet curable resin remaining in the resin is not cured, and only the ultraviolet curable resin injected into the through holes 11 and 12 and the cavity 35 is selectively cured.

  Finally, as shown in FIG. 7D, the pressing jig 40 is removed from the surface of the clad film 10, the interface between the mold 30 and the clad film 10 is peeled off, and the polymer optical light guide as a product is taken out ( 1 and 3 to 6). Moreover, the surface of the light guide part 21 is covered with the 2nd clad film 10a as needed (refer FIG. 2).

  Since the first and second through holes 11 and 12 are opened in the clad film 10 after the clad film 10 is brought into close contact with the cavity forming surface of the mold 30 in the manufacturing method of the polymer optical light guide in this example, Unlike the case where the clad film 10 provided with the second through holes 11 and 12 is in close contact with the mold, alignment between the both ends of the cavity 35 and the first and second through holes 11 and 12 becomes unnecessary. Therefore, the required polymer optical waveguide can be manufactured with high efficiency. In addition, if a pressing jig 40 is placed on the clad film 10 and an appropriate pressure is applied to the mold 30 and the clad film 10, it is possible to reliably prevent misalignment between the mold and the clad film in the subsequent steps. Good products can be manufactured with high efficiency. Further, the light shielding film 43 can prevent the curing of the ultraviolet curable resin in the resin injection port 41 and the exhaust port 42 provided in the holding jig 40, so that the cured ultraviolet curable resin can be removed. There is no need to perform post-processing, and a large number of polymer optical waveguides can be continuously produced using one pressing jig 40. Further, since the entire surface of the holding jig 40 is irradiated with the resin curing light L, the core 20 can be easily and efficiently cured.

<Second Embodiment of Manufacturing Method of Polymer Optical Waveguide>
FIG. 8 is a view showing a second embodiment of the method for producing a polymer optical waveguide according to the present invention. As is clear from this figure, the method for producing a polymer optical waveguide of this example comprises exposure holes. Using the opaque holding jig 40, the ultraviolet curable resin filled in the mold is cured by resin curing light transmitted to the ultraviolet curable resin through the exposure hole.

  The holding jig 40 used in the polymer optical waveguide manufacturing method of the present example is formed of an opaque material such as a metal plate, and a resin injection port 41, an exhaust port 42, and an exposure hole 44 are formed at required portions. Has been established. The mold 30 and the clad film 10 are the same as the method for manufacturing the polymer optical waveguide according to the first embodiment described above.

  The manufacturing method of the polymer optical waveguide of this example is similar to that of the first embodiment until the ultraviolet curable resin for core formation is injected into the first and second through holes 11 and 12 and the cavity 35. The operation is performed in the same procedure as the method of manufacturing the molecular optical waveguide. FIG. 8A shows a state when the ultraviolet curable resin for forming the core is injected into the first and second through holes 11 and 12 and the cavity 35. As is apparent from this figure, in this state, the exposure hole 44 and the through holes 11 and 12 are arranged at positions shifted from each other in the surface direction.

  Then, from this state, as shown in FIG. 8B, the holding jig 40 is moved in the surface direction, and the exposure hole 44 is moved to the first through hole 11 or the second through hole 12 (FIG. 8B). In the example, it is matched with the second through hole 12). Thereafter, an exposure means (not shown) such as an optical fiber having one end connected to the light source is inserted into the exposure hole 44, and the second through hole 12 is irradiated with the resin curing light L through the exposure hole 44. . The resin curing light irradiated to the second through hole 12 propagates in the order of the second through hole 12, the cavity 35 including the shallow groove portion 34, and the first through hole 11, and cures the ultraviolet curable resin filled therein. To do. Thereby, the required core 20 is formed. Hereinafter, similarly to the method of manufacturing the polymer optical waveguide according to the first embodiment, after removing the pressing jig 40 from the surface of the clad film 10, the interface between the mold 30 and the clad film 10 is peeled off to obtain a product. The polymer light guide is taken out (see FIGS. 1, 3 to 6). Moreover, the surface of the light guide part 21 is covered with the 2nd clad film 10a as needed (refer FIG. 2).

  The method of manufacturing the polymer optical waveguide of this example has the same effect as the method of manufacturing the polymer optical waveguide according to the first embodiment. In addition, since the opaque holding jig 40 is used, the formation of the light shielding film 43 is unnecessary. Thus, the manufacturing cost of the holding jig 40 and the polymer optical waveguides 1A, 1B, and 1C can be reduced.

<Third Embodiment of Polymer Optical Waveguide Manufacturing Method>
FIG. 9 is a view showing a third embodiment of a method for producing a polymer optical waveguide according to the present invention. As is apparent from this figure, the method for producing a polymer optical waveguide of this example comprises a slider insertion space 45. , 46 and sliders 47, 48 inserted into the spaces 45, 46, an opaque pressing jig having a resin injection path and exposure path switching means is used.

  The holding jig 40 used in the method of manufacturing the polymer optical waveguide of this example is formed of an opaque material such as a metal plate, and a first portion communicating with the resin injection port 41 and the first through hole 11 at a required portion. One of the first slider insertion space 45, the second slider insertion space 46 communicating with the exhaust port 42 and the second through hole 12, and the first and second slider insertion spaces 45, 46 (in the example of FIG. A first resin passage hole 47a that has an exposure hole 44 communicating with the slider insertion space 46) and that communicates the resin injection port 41 and the first through hole 11 in the first slider insertion space 45. The slider 47 is slidably inserted, and the second slider 48 in which the second resin passage hole 48a that connects the exhaust port 42 and the second through hole 12 is opened in the second slider insertion space 46 is slidable. Has been inserted. The mold 30 and the clad film 10 are the same as the method for manufacturing the polymer optical waveguide according to the first embodiment described above.

  In the method for manufacturing the polymer optical waveguide of this example, as shown in FIG. 9A, after the first and second through holes 11 and 12 are opened in the clad film 10 in close contact with the cavity forming surface of the mold 30. In addition, a pressing jig 40 is placed on the surface of the clad film 10 so that the first through hole and the resin injection port 41 coincide with each other, and the second through hole 12 and the exhaust port 42 coincide with each other. While the holding jig 40 is aligned, the first resin passage hole 47a is aligned with the resin injection port 41 and the first through hole 11, and the second resin passage hole 48a is the exhaust port 42 and the second through hole 12. The first and second sliders 47 and 48 are aligned with respect to the holding jig 40 so as to match. In this state, as in the polymer optical waveguide manufacturing method according to the first embodiment, ultraviolet rays are injected into the first and second through holes 11 and 12 and the cavity 35 from the resin supply device (not shown) through the resin injection port 41. Inject curable resin.

  Next, from this state, as shown in FIG. 9B, the first and second sliders 47 and 48 are respectively placed at predetermined positions in the first and second slider insertion spaces 45 and 46, ie, resin injection. A holding jig is moved to a position where the first slider 47 is not interposed between the inlet 41 and the first through hole 11 and the second slider 48 is not interposed between the exhaust port 42 and the second through hole 12. The exposure hole 44 opened at 40 is communicated with the second slider insertion space 46. From this state, an exposure means (not shown) such as an optical fiber having one end connected to the light source is inserted into the second slider insertion space 46 through the exposure hole 44, and the exposure hole 44 and the second slider insertion space 46 are inserted. The second through hole 12 is irradiated with resin curing light L through the through hole. The resin curing light irradiated on the second through hole 12 propagates in the order of the second through hole 12, the cavity 35, and the first through hole 11, and cures the ultraviolet curable resin filled therein. Thereby, the required core 20 is formed. Hereinafter, similarly to the method of manufacturing the polymer optical waveguide according to the first embodiment, after removing the pressing jig 40 from the surface of the clad film 10, the interface between the mold 30 and the clad film 10 is peeled off to obtain a product. The polymer light guide is taken out (see FIGS. 1, 3 to 6). Moreover, the surface of the light guide part 21 is covered with the 2nd clad film 10a as needed (refer FIG. 2).

  In the polymer optical waveguide manufacturing method of this example, first and second slider insertion spaces 45 and 46 are formed, and the first and second sliders 47 and 48 can slide in the spaces 45 and 46. The first and second sliders 47 and 48 are appropriately switched within the first and second slider insertion spaces 45 and 46 using the holding jig 40 inserted into the first and second slider insertion spaces 45 and 46. Supply of the ultraviolet curable resin into the through holes 11 and 12 and the cavity 35, and the first and second through holes 11 and 12 through the exposure hole 44 and the first or second slider insertion spaces 45 and 46. Since it is possible to expose the ultraviolet curable resin filled in the inside and the cavity 35, the exposure hole 44 formed in the holding jig 40 and the first or second through hole formed in the clad film 10 are provided. A with 11 and 12 Imento becomes unnecessary, it is possible to manufacture a polymer optical waveguide more efficient.

<Fourth Embodiment of Polymer Optical Waveguide Manufacturing Method>
FIG. 10 is a view showing a fourth embodiment of a method for producing a polymer optical waveguide according to the present invention. As is apparent from this figure, the method for producing a polymer optical waveguide of this example also includes a slider insertion space 45. , 46 and sliders 47, 48 inserted into the spaces 45, 46, an opaque pressing jig having a resin injection path and exposure path switching means is used.

  The holding jig 40 used in the method of manufacturing the polymer optical waveguide of this example is formed of an opaque material such as a metal plate, and a first portion communicating with the resin injection port 41 and the first through hole 11 at a required portion. One of the first slider insertion space 45, the second slider insertion space 46 communicating with the exhaust port 42 and the second through hole 12, and the first and second slider insertion spaces 45, 46 (in the example of FIG. A first resin passage hole 47a that has an exposure hole 44 communicating with the slider insertion space 46) and that communicates the resin injection port 41 and the first through hole 11 in the first slider insertion space 45. A slider 47 is slidably inserted, and a second resin passage hole 48 a that communicates the exhaust port 42 and the second through hole 12 in the second slider insertion space 46 and a second exposure hole 44 that communicates with the exposure hole 44. 2nd hole 49 was opened Rider 48 is inserted slidably. The mold 30 and the clad film 10 are the same as the method for manufacturing the polymer optical waveguide according to the first embodiment described above.

  In the manufacturing method of the polymer optical waveguide of the present example, the first and second through holes 11 and 12 are opened in the clad film 10 that is in close contact with the cavity forming surface of the mold 30, and then pressed on the surface of the clad film 10. While the tool 40 is placed, the pressing jig 40 is aligned with the clad film 10 so that the first through hole and the resin injection port 41 match, and the second through hole 12 and the exhaust port 42 match, The first resin passage hole 47a is aligned with the resin injection port 41 and the first through hole 11, and the second resin passage hole 48a is aligned with the exhaust port 42 and the second through hole 12, so that the The first and second sliders 47 and 48 are aligned. As shown in FIG. 10A, the sliders 47 and 48 are aligned with one end of the first and second sliders 47 and 48 on one wall surface of the first and second slider insertion spaces 45 and 46, respectively. This can be done automatically by hitting. In this state, as in the polymer optical waveguide manufacturing method according to the first embodiment, ultraviolet rays are injected into the first and second through holes 11 and 12 and the cavity 35 from the resin supply device (not shown) through the resin injection port 41. Inject curable resin.

  Next, from this state, as shown in FIG. 10 (b), the other one end of the first and second sliders 47, 48 is the other one of the first and second slider insertion spaces 45, 46, respectively. The first and second sliders 47 and 48 are moved to a position where they are abutted against the wall surface. Accordingly, the resin injection port 41 and the first through hole 11 are blocked by the first slider 47, and the exhaust port 42 and the second through hole 12 are blocked by the second slider 48. Also in this case, the communication between the exposure hole 44 and the second exposure hole 49 formed in the second slider 48 is maintained through the second slider insertion space 46.

  From this state, exposure means (not shown) such as an optical fiber having one end connected to the light source is inserted into the exposure hole 44, the second slider insertion space 46, and the second exposure hole 49, and each of these holes is inserted. The resin curing light L is irradiated to the second through hole 12 through 44, 46 and 49. The resin curing light irradiated on the second through hole 12 propagates in the order of the second through hole 12, the cavity 35, and the first through hole 11, and cures the ultraviolet curable resin filled therein. Thereby, the required core 20 is formed. Hereinafter, similarly to the method of manufacturing the polymer optical waveguide according to the first embodiment, after removing the pressing jig 40 from the surface of the clad film 10, the interface between the mold 30 and the clad film 10 is peeled off to obtain a product. The polymer light guide is taken out (see FIGS. 1, 3 to 6). Moreover, the surface of the light guide part 21 is covered with the 2nd clad film 10a as needed (refer FIG. 2).

  The manufacturing method of the polymer optical waveguide of this example has the same effect as the manufacturing method of the polymer optical waveguide according to the third embodiment, and the required one side end of the first and second sliders 47 and 48 is provided. Since the sliders 47 and 48 are aligned at the time of resin injection and resin curing by abutting against required one wall surfaces of the first and second slider insertion spaces 45 and 46, respectively, The alignment operation of 48 can be facilitated, and the production of the polymer optical waveguide can be made efficient.

  Hereinafter, more specific examples of the polymer optical waveguide according to the present invention will be given.

<Example 1>
Twelve grooves having a width of 50 μm, a depth of 50 μm, and a length of 50 mm are formed at a pitch of 250 μm using a mold forming technique utilizing electroforming, and inclined surfaces are formed at both ends of each groove at an angle of 45 °. The formed nickel mold was produced. In addition, a shallow groove portion having a width equal to or narrower than the width of the groove portion, a depth of 5 μm or less, and a length of 1 mm was formed at the end of each groove portion of the nickel mold. Separately from this, a transparent pressing jig in which a resin injection port and an exhaust port were opened at a required portion and each port was covered with a light shielding film was produced using a glass plate. A fluorine mold release material “OPTOOL” manufactured by Daikin Industries was applied to the groove forming surface of the nickel mold. As the clad film, an “Arton film” having a thickness of 100 μm and a refractive index of about 1.51 was used as the clad film, and the surface was subjected to oxygen plasma cleaning before use. After the clad film was brought into close contact with the groove forming surface of the nickel mold, the first and second through holes were opened by laser processing in a portion corresponding to the inclined surface of the clad film. In a state where a pressing jig is placed on the clad film and appropriate pressure is applied to the mold and the clad film, the refractive index after curing is about 1.55 in the first and second through holes and in the groove. An ultraviolet curable resin for core formation having a viscosity of 150 mPa · s was filled. Thereafter, using a high-pressure mercury lamp, the UV curable resin filled from the outside of the pressing jig was irradiated with a light amount of 2400 mJ / cm ² .

<Example 2>
Twelve grooves having a width of 50 μm, a depth of 50 μm, and a length of 50 mm are formed at a pitch of 250 μm using a mold forming technique utilizing electroforming, and inclined surfaces are formed at both ends of each groove at an angle of 45 °. The formed nickel mold was produced. In addition, a shallow groove portion having a width equal to or narrower than the width of the groove portion, a depth of 5 μm or less, and a length of 1 mm was formed at the end of each groove portion of the nickel mold. Separately from this, a pressing jig having a resin injection port, an exhaust port, and an exposure hole opened in a required portion using a metal plate was produced. A fluorine mold release material “OPTOOL” manufactured by Daikin Industries was applied to the groove forming surface of the nickel mold. As the clad film, an “Arton film” having a thickness of 100 μm and a refractive index of about 1.51 was used as the clad film, and the surface was subjected to oxygen plasma cleaning before use. After the clad film was brought into close contact with the groove forming surface of the nickel mold, the first and second through holes were opened by laser processing in a portion corresponding to the inclined surface of the clad film. In a state where a pressing jig is placed on the clad film and appropriate pressure is applied to the mold and the clad film, the refractive index after curing is about 1.55 in the first and second through holes and in the groove. An ultraviolet curable resin for core formation having a viscosity of 150 mPa · s was filled. After that, the holding jig is moved so that the exposure hole and the second through hole formed in the cladding film are matched, and the tip of the optical fiber is inserted into the exposure hole, and the filled ultraviolet curable resin is filled. 2400 mJ / cm ^{2 was} irradiated with light from an ultraviolet light emitting diode having a wavelength of 375 nm.

<Example 3>
Twelve grooves having a width of 50 μm, a depth of 50 μm, and a length of 50 mm are formed at a pitch of 250 μm using a mold forming technique utilizing electroforming, and inclined surfaces are formed at both ends of each groove at an angle of 45 °. The formed nickel mold was produced. In addition, at one end of the nickel mold, a shallow groove having a width equal to or narrower than the width of the groove, a depth of 10 μm and a length of 1 mm is formed. A shallow groove portion having a width equal to or narrower than the width of the groove portion, a depth of 5 μm, and a length of 1 mm was formed at the end portion. An ultraviolet curable resin for core formation was filled from the shallow groove portion side having a depth of 10 μm, and a polymer optical waveguide was formed in the same manner as in Example 1.

<Example 4>
Twelve grooves having a width of 50 μm, a depth of 50 μm, and a length of 50 mm are formed at a pitch of 250 μm using a mold forming technique utilizing electroforming, and inclined surfaces are formed at both ends of each groove at an angle of 45 °. The formed nickel mold was produced. At this time, the bottom surface of the groove was a tapered surface that uniformly inclined, the depth of one end of the groove was 60 μm, and the depth of the other end of the groove was 50 μm. In addition, a shallow groove portion having a width equal to or narrower than the width of the groove portion, a depth of 5 μm or less, and a length of 1 mm was formed at the end of each groove portion of the nickel mold. An ultraviolet curable resin for core formation was filled from one end side of the groove having a depth of 60 μm, and a polymer optical waveguide was formed in the same manner as in Example 1.

<Example 5>
Twelve grooves having a width of 50 μm, a depth of 50 μm, and a length of 50 mm are formed at a pitch of 250 μm using a mold forming technique utilizing electroforming, and inclined surfaces are formed at both ends of each groove at an angle of 45 °. The formed nickel mold was produced. At this time, both the left and right side surfaces of the groove were tapered surfaces that were uniformly inclined, the width of one end of the groove was 60 μm, and the width of the other end of the groove was 50 μm. In addition, a shallow groove portion having a width equal to or narrower than the width of the groove portion, a depth of 5 μm or less, and a length of 1 mm was formed at the end of each groove portion of the nickel mold. An ultraviolet curable resin for core formation was filled from one end side of the groove having a depth of 60 μm, and a polymer optical waveguide was formed in the same manner as in Example 1.

<Example 6>
Twelve grooves having a width of 50 μm, a depth of 50 μm, and a length of 50 mm are formed at a pitch of 250 μm using a mold forming technique utilizing electroforming, and inclined surfaces are formed at both ends of each groove at an angle of 45 °. The formed nickel mold was produced. At this time, the bottom surface of the groove is a tapered surface that is uniformly inclined, the depth of one end of the groove is 60 μm, the depth of the other end of the groove is 50 μm, and the right and left side surfaces of the groove are uniformly inclined. The width of one end of the groove was 60 μm, and the width of the other end of the groove was 50 μm. In addition, a shallow groove portion having a width equal to or narrower than the width of the groove portion, a depth of 5 μm or less, and a length of 1 mm was formed at the end of each groove portion of the nickel mold. An ultraviolet curable resin for core formation was filled from one end side of the groove having a depth of 60 μm, and a polymer optical waveguide was formed in the same manner as in Example 1.

  In the third and fourth embodiments, the resin injection path and the exposure path are switched using a slider insertion space and a slider inserted into the space. However, the present invention is not limited to this, and it is of course possible to use other switching means. As an example, a rotating piece having a resin injection path and an exposure path and a space portion that rotatably stores the rotating piece can be used.

DESCRIPTION OF SYMBOLS 1A-1F Polymer optical waveguide 10 Clad film 11,12 Through-hole 20 Core 21 Light guide part 22,23 Vertical part 24,25 Reflective mirror surface 26 Expansion part 30 Mold 34 Shallow groove part 35 Cavity 40 Holding jig 41 Resin injection port 42 Exhaust port 43 Light shielding film 44 Exposure hole 45, 46 Slider insertion space (switching means)
47, 48 Slider (switching means)
47a, 48a Resin passage hole

Claims (15)

In a polymer optical waveguide comprising a clad film and a core made of a polymer material,
The core is formed outside the light guide part formed on one side of the clad film, the reflection mirror surface formed on both ends of the light guide part, and at least one of the reflection mirror surfaces. The extension part which is thinner than the light guide part, and two vertical parts penetrating the clad film in the thickness direction and having one end exposed on the other surface of the clad film. At least one of the polymer optical waveguides is characterized in that the other end is connected to the extended portion.   The extension part is formed outside each reflection mirror surface formed at both ends of the light guide part, and the end parts of the two vertical parts are connected to the two extension parts one by one. The polymer optical waveguide according to claim 1, wherein   The extension portion is formed only outside one reflection mirror surface formed at one end portion of the light guide portion, and ends of the two vertical portions are opposed to the reflection mirror surface of the light guide portion. The polymer optical waveguide according to claim 1, wherein the polymer optical waveguide is connected to a position and the extension portion.   The thickness of any one of the two extended portions formed outside the reflecting mirror surfaces is made larger than the thickness of the other extended portion. Polymer optical waveguide.   The light guide part has a shape in which a cross-sectional area when cut along a plane orthogonal to the center line in the length direction is uniformly increased or decreased from one end part to the other end part. The polymer optical waveguide according to any one of claims 1 to 4, wherein the polymer optical waveguide is characterized in that:   6. The polymer optical waveguide according to claim 5, wherein a bottom surface of the light guide portion is formed into a tapered surface that uniformly inclines from one end portion to the other end portion.   The light guide portion is formed to have a tapered surface in which at least one of the side surfaces is uniformly inclined from one end portion to the other end portion with respect to the center line in the length direction. The polymer optical waveguide according to claim 5, wherein:   8. The polymer optical waveguide according to claim 1, wherein the light guide portion and the two vertical portions have substantially the same cross-sectional shape and cross-sectional area.   The polymer optical waveguide according to any one of claims 1 to 8, wherein a surface of the core exposed on one side of the clad film is covered with a second clad film. A step of closely attaching a clad film to a cavity forming surface of a mold in which a cavity for forming a core having a light guide part, a reflecting mirror surface and an extended part is formed;
Opening the first and second through-holes in the clad film so that at least one of the through-holes communicates with a portion corresponding to the extended portion of the cavity; and
A holding jig having a resin injection port and an exhaust port is placed on the cladding film, and the first and second through holes opened in the cladding film and the resin injection port opened in the pressing jig and A step of matching each of the exhaust ports;
After fixing the mold and the clad film using the holding jig, from the exhaust port, into the exhaust port, into the second through hole, into the cavity, into the first through hole, and into the resin injection port While the air is sucked, the polymer material for core formation is pressurized from the resin injection port into the resin injection port, the first through hole, the cavity, the second through hole, and the exhaust port. Filling, and
Only the polymer material filled in the cavity and the polymer material filled in the first and second through holes are selectively cured to form the core, and the resin injection port is filled. Leaving the polymer material and the polymer material filled in the exhaust port uncured;
Removing the holding jig from the surface of the clad film, and peeling the clad film integrally formed with the core from the mold.   The mold includes a plurality of light guides, a plurality of reflection mirror surfaces formed at both ends of the plurality of light guides, and a plurality of reflection mirrors formed on at least one end of the plurality of light guides. Forming a cavity for forming an extension for connecting the surfaces, and at least one of the first and second through holes in a portion of the cladding film corresponding to the cavity for forming the extension. The method for producing a polymer optical waveguide according to claim 10, wherein the method is established.   The pressing jig is made of a transparent material and has a light shielding film selectively formed on a required portion including at least a wall surface of the resin inlet and a wall surface of the exhaust port, and is used for forming the core. An ultraviolet curable resin is used as the polymer material, and an ultraviolet ray for forming a core is formed from the resin injection port into the resin injection port, the first through hole, the cavity, the second through hole, and the exhaust port. The method for producing a polymer optical waveguide according to claim 10, wherein after the curable resin is filled, the ultraviolet curable resin filled in each part is irradiated with the resin curable light through the pressing jig. .   As the pressing jig, an opaque material is used, and an exposure hole is opened at a position different from the opening position of the resin injection port and the exhaust port, and as the polymer material for forming the core, Using an ultraviolet curable resin, an ultraviolet curable resin for forming a core was filled from the resin injection port into the resin injection port, the first through hole, the cavity, the second through hole, and the exhaust port. Thereafter, the holding jig is moved so that the exposure hole and the first through hole or the second through hole formed in the clad film are matched, and the exposure hole is inserted into each through hole. The method for producing a polymer optical waveguide according to claim 10, wherein the ultraviolet curing resin filled and the ultraviolet curing resin filled in the cavity are irradiated with resin curing light. Resin injection path and exposure path switching means formed of an opaque material as the pressing jig, at a position communicating with the resin injection port and the first through hole, and at a position communicating with the exhaust port and the second through hole. And having an exposure hole communicating with the switching means,
As the polymer material for forming the core, an ultraviolet curable resin is used,
The switching means is switched to a position where the resin injection port and the first through hole communicate with each other and a state where the exhaust port and the second through hole communicate with each other, from the resin injection port to the resin injection port, After filling the ultraviolet curable resin for core formation into the first through hole, the cavity, the second through hole, and the exhaust port,
The switching means is switched to a state in which the exposure hole and the first through-hole or the second through-hole are communicated with each other, and the ultraviolet curing is filled in the first and second through-holes through the exposure hole. The method for producing a polymer optical waveguide according to claim 10, wherein the resin curing light is irradiated to the curable resin and the ultraviolet curable resin filled in the cavity. 15. The resin injection path and exposure path switching means comprises a slider insertion space formed in the holding jig and a slider configured to be insertable into the slider insertion space. The manufacturing method of the polymer optical waveguide of description.

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