JP2010178416A - Dc high-voltage power supply device, and method of controlling the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact DC high-voltage power supply device capable of achieving superior stability in a short time, and to provide a method for controlling the same. <P>SOLUTION: In a high voltage division part 106 including a voltage dividing resistor 104 and a detection resistor 105 for detecting a voltage HV generated by a high voltage generating section 107 as a detected voltage Vs and feeding it back to an error detection circuit 102, a resistance value Rs is controlled so that a ratio between a resistance value Ra and the resistance value Rs of the detection resistor 105 becomes constant at a prescribed set value in response to the variation of the resistance value Ra of the voltage dividing resistor 104, thereby suppressing the variation of the detected voltage Vs to achieve the stabilization of voltage HV in a short time. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a direct current high voltage power supply device having a function of stabilizing an output voltage and a control method thereof.

  The specifications required for electronic circuits are highly accurate and stable year by year, and in recent years, the performance of individual components constituting the circuit is often exceeded. Also in an electron microscope, high stability is required for a DC high-voltage power supply device that applies a high voltage (several tens of kilovolts to several hundred kilovolts) to an electron beam source that affects main performance. In particular, the highest stability is required for the reference voltage source IC and the voltage dividing resistor that influence the performance.

  Among these, with respect to the voltage dividing resistor, the use of a high voltage is one of the factors that limit the stability performance. That is, in general, there are a metal thin film resistor, a winding resistor, a thick film resistor, etc., but the resistors are described in order of good stability. Metal thin film resistor> winding resistor> thick film resistor On the other hand, when describing in order of the magnitude of the resistance value that can be realized by itself, it becomes thick film resistor> winding resistor> metal thin film resistor. In order to handle high voltages, very high resistance values are required. Therefore, for voltage divider resistors for DC high-voltage power supplies, it is currently necessary to select thick film resistors with the least stable performance. is there. Note that the DC high-voltage power supply device is disclosed in, for example, Patent Document 1 and Patent Document 2.

JP 2003-284323 A JP 2006-191742 A

The following two points can be cited as countermeasures for improving the temperature stability of the voltage dividing resistor in the DC high-voltage power supply.
(1) Select and use single parts with excellent stability.
(2) Stabilize the temperature of the voltage dividing resistor section.
The above (1) is a method of preparing a large number of single parts having high stability performance, and selecting those with better stability performance from them, but in this method, extra parts must be prepared. The cost of parts increases and the time required for sorting is required separately from manufacturing. In addition, although this method can improve the stability performance, even if it is a single part that has been selected, a change in resistance value due to a temperature change during use is inevitable. Sex is not enough.

  The above (2) is a method of stabilizing the temperature of the voltage dividing resistor part. Factors that affect the stability include temperature changes in each resistor during actual use and the accompanying resistance value changes, and this method is effective in stabilizing the resistance value. Patent Document 1 discloses a technique for arranging a target circuit in a thermostatic bath. However, the present technology does not sufficiently cope with temperature fluctuations due to self-heating of the resistance component alone and changes in resistance value associated therewith. In addition, the installation of the thermostatic chamber requires a thermostatic chamber in the power supply device, which increases the size of the apparatus. Furthermore, since the heat capacity of the circuit unit increases, the time to reach the thermal equilibrium state increases and the controllability decreases. That is, there is a problem that it takes a long time of several tens of hours until the temperature drift is stabilized. There is also a technology to increase the heat capacity of the circuit part and reduce fluctuations due to temperature changes by covering the target circuit with highly insulating resin (resin mold) or installing it in insulating gas or insulating oil. However, since the heat capacity of the circuit unit is increased, the time to reach the thermal equilibrium state is increased and the controllability is lowered. Patent Document 2 proposes a control method (separate control between the initial control mode and the high-precision control mode) in consideration of the thermal time constant of the resin-molded component for increasing the time required for thermal equilibrium. In addition, all the parts that need constant temperature must be controlled, which requires a very large volume, resulting in an increase in the size of the apparatus.

  An object of the present invention is to provide a small DC high-voltage power supply device that can realize high stability in a short time and a control method thereof.

  As one form for achieving the above object, a high voltage generation unit, a high voltage control unit including an error detection circuit, and a voltage generated in the high voltage generation unit is detected as a detection voltage and fed back to the error detection circuit. A high voltage voltage dividing unit including a voltage dividing resistor and a detection resistor for performing a DC high voltage power supply device, wherein the resistance value and the detection according to a change in the resistance value of the voltage dividing resistor The DC high-voltage power supply apparatus further comprises means for controlling the resistance value of the detection resistor so that the ratio with the resistance value of the resistor becomes constant at a predetermined set value.

  Further, in the method for controlling the direct current high voltage power supply apparatus, a step of setting a setting voltage for generating a high voltage in the high voltage generation unit in the high voltage control unit; and Determining whether the ratio between the resistance value and the resistance value of the detection resistor is a predetermined set value; and when the ratio is not the predetermined set value, the ratio is constant at the predetermined set value. Controlling the detection resistance value, and using the set voltage and the detection voltage to stabilize the high voltage supplied by the high voltage power supply unit. Control method.

  With the above configuration, it is possible to provide a small DC high-voltage power supply device that can achieve high stability in a short time and a control method thereof.

First, the principle of this method will be described.
1. Basic Configuration of DC High Voltage Power Supply The basic configuration of the DC high voltage power supply 100 is shown in FIG. The DC high voltage power supply mainly includes a high voltage control unit 103 including a voltage setting circuit 101 and an error detection circuit 102, a high voltage voltage dividing unit 106 including a voltage dividing resistor 104 and a detection resistor 105, The high voltage generation unit 107 and the high voltage power supply unit 108 are configured. The outline of the operation is as follows.

  In accordance with the set voltage Vref supplied from the voltage setting circuit 101, the high voltage generator 107 generates a high voltage HV, and the detection voltage Vs is obtained from the voltage dividing resistor 104 and the detection resistor 105 of the high voltage divider 106. In this method, control is performed so that the difference between the detection voltage Vs and the set voltage Vref is eliminated. The schematic circuit diagram of FIG. 1 is shown in FIG. 2, and the relational expressions are shown in equations (1) to (3).

If the detection voltage Vs obtained from the resistance value of the voltage dividing resistor 104 and the resistance value of the detection resistor 105 and the set voltage Vref do not fluctuate according to the equations (1) to (3), a stable high voltage can be obtained by feedback control. It can be seen that HV can be obtained. That is, in Formula (1), achieving Vref−Vs = 0 is the basis of feedback control in the high-voltage DC power supply.
2. Temperature coefficient From the above, it has been clarified that the stability of the resistance value of the voltage dividing resistor 104 and the resistance value of the detection resistor 105 is directly related to the detection voltage Vs. Here, the temperature coefficient of the resistance value used for both the resistors is defined as an index related to the stability of the detected voltage.
The temperature coefficient is the rate of change when the resistance value is regarded as a function of temperature with the amount of change in resistance value at two temperatures, and is defined in Equation (4).

Here, it is expressed in a form including measurement times t1 and t2 assuming actual use, but when the resistance value in the thermal equilibrium state is considered, the time may be omitted. The definition is the temperature of the resistor itself, but the ambient temperature around the resistor is often substituted. Since the resistance value with respect to temperature is not a linear function, the temperature coefficient itself is strictly a function of temperature.
3. Resistor temperature coefficient, relationship between temperature change and output voltage Next, consider the case where the temperature coefficient and the temperature change for each resistance element are considered. FIG. 3 shows a circuit schematic diagram of the high voltage voltage divider. As shown in the figure, the parameters of each element are a resistance value R [Ω], a temperature coefficient ε [ppm / ° C.], and a temperature change ΔT [° C.]. Expressions (5) to (7) show relational expressions among the high voltage (HV), the detection voltage (Vs), and the resistance value of the voltage dividing resistor 104 that are inputs at this time.

Here, in order to obtain a stable high voltage output regardless of the operating state and temperature of the power supply, the circuit configuration of the power supply in which the absolute value of (Vs−Vs ′) is substantially zero, or control during operation It is important to do. To that end, (1) a method in which the second term on the right side of Equation (7) is made asymptotic to zero using a resistance element (εs → 0, εm → 0) having a small temperature coefficient. (2) The method of achieving constant temperature of each resistance element (ΔTs → 0, ΔTm → 0) and making the second term on the right side of Equation (7) asymptotic to zero, etc., is generally adopted as described above. (1) Select and use a single component with excellent stability. (2) Stabilize the temperature of the voltage dividing resistor section.
4). Principle of output voltage stabilization in the present application The temperature stability of the voltage dividing resistor and the method for stabilizing the high voltage in the DC high-voltage power supply apparatus in the present application differ in principle from the methods (1) and (2) above. . Rather than reducing the temperature coefficient of each resistance element or controlling the temperature change of each element during practical use, a method of bringing the second term on the right side of Equation (7) together asymptotically to zero, That is, control is performed so that the ratio (Rs / Ra) of the resistance value between the voltage dividing resistor and the detection resistor is constant. In addition, it can be considered constant if it is within ± 0.3 ppm / min with respect to the set value. ppm means 10 to the sixth power.

  When expressed by a mathematical formula, from the second term of the right side of formula (7) = 0,

Note that the temperature of the detection resistor 105 is controlled so that the ratio (Rs / Ra) of the resistance value between the voltage dividing resistor 104 and the detection resistor 105 is constant, and as a result, the resistance value of the detection resistor 105 is controlled. This is a basic idea of the present application, but it goes without saying that the ratio (Rs / Ra) can be kept constant even if the resistance value of the detection resistor 105 is directly controlled using a variable resistor or the like. Does not exclude this possibility. In addition, by determining the resistance value of the voltage dividing resistor, the resistance value of the detection resistor can be directly or indirectly controlled not only with respect to temperature change but also with respect to fluctuations in resistance value including aging. Therefore, stabilization can be achieved.
5). Method for evaluating temperature characteristics of resistance element In order to control the temperature, it is necessary to know the temperature characteristics of each resistance value in advance. When evaluating the temperature characteristics, the accuracy dealt with in the present application is very high accuracy (digits of 0.1 ppm), and some measures are required for measurement. Further, the voltage dividing resistor 104 is multistaged by combining resistance elements, and the resistance value becomes large. Therefore, the voltage is evaluated as a voltage using a highly accurate voltage source (a few ppm or less) and a reference resistor (0.1 ppm or less) as much as possible, and converted into a resistance value. If this method is used, not only the resistor alone but also the entire temperature characteristic can be obtained. In addition, by controlling the measurement environment, high-precision measurement is possible. FIG. 4 shows a schematic circuit diagram for high-accuracy temperature characteristic evaluation by itself, and FIG. 5 shows a schematic circuit diagram for high-accuracy temperature characteristic evaluation by voltage evaluation of resistors combined.

  In the method shown in FIG. 4, a resistance measuring device 401 is mounted on a first thermostat 402 maintained at a constant temperature, and a resistor to be measured 404 is added to a second thermostat 403 for separately evaluating the characteristics by changing the temperature. By inserting, the characteristic of the resistance measuring device 401 can be ignored. The constant temperature bath is controlled to a temperature within ± 0.1 ° C. with respect to the set temperature. In FIG. 5, a voltage is used to measure the resistance value increased by the plurality of resistors 501 to be measured. This is a technique for deriving a possible resistance value from the high-accuracy voltage source 502, the detection resistor 503, and the detection voltage Vs. At this time, similarly to FIG. 4, a plurality of resistors 501 to be measured are placed in the second thermostat 403, and other measurement systems are put in the first thermostat 402 for evaluation, whereby highly accurate characteristic evaluation can be performed. The temperature characteristic (temperature coefficient) thus obtained can be used for output voltage control of the DC high-voltage power supply device in the present application.

  What is important in the voltage dividing resistor part in the DC high-voltage power supply device is not the resistance value but the ratio between the resistance value of the voltage dividing resistor and the resistance value of the detection resistor. The supplied voltage does not fluctuate as long as this ratio does not collapse, and the fluctuation of the resistance value of the entire voltage dividing resistor section is not a problem as long as it is within the allowable value of the applied current. In this application, the ratio of the resistance value of the voltage divider resistor and the detection resistor is constant, not the constant temperature of the circuit part that requires stability, or the selection and use of components with excellent temperature stability in the first place. This is a method for actively stabilizing the voltage divider resistor so that the detected voltage does not fluctuate by actively responding to fluctuations in the temperature of the voltage dividing resistor. By always controlling the ratio of the resistance values of the voltage dividing resistor and the detection resistor to be constant, not only the ambient temperature change but also the drift due to self-heating can be canceled. In addition, it is possible not only to directly operate the resistor but also indirectly through temperature.

  The method of the present application is a completely independent method from the conventional method ((1) selecting and using a single component having excellent stability. (2) stabilizing the temperature of the voltage dividing resistor part). It can also be used in combination with conventional methods.

  As described above, according to the embodiment of the present invention, a method of improving stability using a resistor that is employed in a conventional high-voltage DC power supply device and has a small change in resistance value due to a temperature change, or This is not a passive stabilization method that improves the stability by reducing the amount of temperature change in the voltage dividing resistor part, but considers that the temperature change of the voltage dividing resistor part occurs and responds appropriately to that change. It is possible to provide a power supply with an active stabilization method that actively secures stability. As long as this method can follow the temperature fluctuation of the voltage dividing resistor, it is not necessary to increase the size of the device and increase the heat capacity, and it is expected to reduce the size of the entire device and shorten the operation time before measurement.

  The first embodiment will be described with reference to FIGS. The basic operation and the like are as described in the section of the basic configuration of the DC high-voltage power source.

  FIG. 6 is a block diagram of the DC high-voltage power supply apparatus according to this embodiment. In this example, 200 kV was generated as the high voltage HV. Further, the ratio of the resistance value Ra of the voltage dividing resistor 104 and the resistance value Rs of the detection resistor 105 was set to (Rs / Ra) = 1 / 20,000. Thereby, Vs becomes a voltage of about 10V. The temperature sensor 601 reads the temperature change of the voltage dividing resistor 104 and transmits it to the temperature control circuit 602. The measurement error of the used temperature sensor is within ± 0.01 ° C. The temperature sensor 601 is attached to each voltage dividing resistor. When the resistance values of the voltage dividing resistors are equal, the temperature sensor 601 need not be attached to all the voltage dividing resistors. In this temperature control circuit 602, a necessary control amount to the detection resistor 105 is calculated from the temperature coefficient ε examined in advance, and is input to the heating / cooling device 603 to obtain the resistance value of the voltage dividing resistor 104. A stable detection voltage Vs can be obtained by controlling the resistance value of the detection resistor 105 so that the ratio with the resistance value of the detection resistor is constant at the above value. The detection resistor 105 has a smaller number of parts and can be easily temperature controlled than the high voltage control unit including the voltage dividing resistor. Furthermore, the heater / cooler can be downsized. The heating / cooling device 603 may be either a heating device or a cooling device. However, by using a heating / cooling device having both functions, temperature control can be performed in a shorter time.

  In this embodiment, the ratio of the resistance value of the voltage dividing resistor 104 and the resistance value of the detection resistor 105 is a predetermined setting value in the temperature sensor 601, the temperature control circuit 602, the heating / cooling device 603, the heat radiation piece 604, and the like. A resistance ratio control unit 700 is formed to maintain a constant value.

Next, a control method of the DC high-voltage power supply device will be described with reference to the flowchart of FIG.
First, in step 1 (S1), the voltage setting circuit 101 sets the set voltage Vref, and the high voltage generator 107 generates the high voltage HV. Next, in step 2 (S 2), the temperature of the voltage dividing resistor 104 is acquired by the temperature sensor 601 and is input to the temperature control circuit 602. Next, in step 3 (S3), the control amount calculated by the temperature control circuit 602 based on the acquired temperature data is input to the heating / cooling device 603. Next, in step 4 (S4), the error detection circuit 102 determines whether or not the difference between the set voltage Vref and the detection voltage Vs is zero. If Vref−Vs = 0, the high voltage is stably controlled to a desired value, and the current high voltage HV is maintained as it is (step 6 (S6)). If Vref−Vs ≠ 0, go to Step 5.

  In step 5 (S5), Vref> Vs is determined. When “Yes”, since the high voltage HV is smaller than a desired value, the high voltage generator 107 is controlled to increase the voltage ( Step 6 (S6)). In the case of “No”, since the high voltage is larger than a desired value, the high voltage generator 107 is controlled to reduce the voltage (step 6 (S6)). Note that all these controls require circuit-like feedback control. Steps 2 to 6 are repeatedly executed while the power source of the DC high voltage power source is input. As a result, after the time required for warming up the entire apparatus is turned on (tens of digits), for example, the fluctuation of the high voltage of 200 kV can be controlled within ± 0.3 ppm / min. A prospect was obtained.

  FIG. 13 shows a control follow diagram for controlling the ratio between the resistance value of the voltage dividing resistor 104 and the resistance value of the detection resistor 105 to be constant at a predetermined set value. The difference from FIG. 7 is Step 2 (S2) and Step 3 (S3). In the case of this control, in Step 2 (S2), whether or not the ratio of the resistance value Ra to the resistance value Rs is a predetermined set value. Is determined by the resistance ratio control unit, and if it is a predetermined set value, the process proceeds to step 4 (S4). If it is different from the predetermined set value, in step 3 (S3), the detection resistance is set to be the set value. The resistance value of the device 105 is controlled by the resistance ratio control unit. Steps after Step 4 (S4) are the same as those in FIG.

  According to the present embodiment, by controlling the resistance value of the detection resistor so that the ratio between the resistance value of the voltage dividing resistor and the resistance value of the detection resistor is constant at a predetermined setting value, high stability is achieved. It has been found that a small DC high-voltage power supply device and a control method thereof can be provided in a short time. Further, by indirectly controlling the resistance value of the detection resistor according to the temperature, the apparatus and the control method thereof can be easily realized. Further, since the temperature control circuit is provided in the high voltage voltage dividing section, it is possible to quickly cope with the temperature change of the voltage dividing resistor.

  A second embodiment will be described with reference to FIGS. The basic operation of the apparatus is as described in the section of the basic configuration of the DC high-voltage power source. The matters described in the first embodiment and not described in the present embodiment are the same as those in the first embodiment.

  FIG. 8 is a block diagram of an apparatus in which an external control system 801 is incorporated in a DC high-voltage power supply apparatus with a temperature control function. The control system 801 includes an arithmetic processing unit 810 and a memory unit. The memory unit 820 stores high voltage setting data and temperature characteristic data of the voltage dividing resistor 104 and the detection resistor 105 acquired in advance. The arithmetic processing unit 810 performs arithmetic processing of a required control amount using the output data of the temperature sensor 601 and the temperature characteristic data stored in the memory unit 820, and calculates temperature control data 802. The temperature control circuit 602 converts the temperature control data 802 into a control amount of the heating / cooling device 603 so that the ratio between the resistance value of the voltage dividing resistor 104 and the resistance value of the detection resistor 105 becomes a set value. The temperature of the detection resistor 105 is controlled. As a result, a stable detection voltage Vs can be obtained, and a small DC high-voltage power supply device capable of realizing high stability in a short time can be obtained. By using the external control system 801, more complicated control is performed as compared with the method using the temperature control circuit 602 that calculates the control amount in a circuit in the apparatus described in FIG. 6 of the first embodiment. I can do it.

  In this embodiment, the ratio between the resistance value of the voltage dividing resistor 104 and the resistance value of the detection resistor 105 is predetermined in the temperature sensor 601, the temperature control circuit 602, the heating / cooling device 603, the heat radiation piece 604, the control system 801, and the like. A resistance ratio control unit for making the set value constant is configured.

A control method of the DC high-voltage power supply device shown in FIG. 8 will be described with reference to the flowchart of FIG.
In step 1 (S 1), the set voltage Vref is set in the voltage setting circuit 101 based on the high voltage setting data 803 from the control system 801, and the high voltage HV is generated in the high voltage generator 107. Next, in step 2 (S2), the temperature data of the voltage dividing resistor 104 acquired by the temperature sensor 601 is input to the external control system 801. Next, in step 3 (S3), using the temperature data and the temperature characteristic data stored in the memory unit 820, the ratio between the resistance value of the voltage dividing resistor 104 and the resistance value of the detection resistor 105 becomes a set value. Thus, the control amount for controlling the temperature of the detection resistor 105 is calculated in the information processing unit 810. Next, in step 4 (S4), the calculated control amount is transmitted as temperature control data 802 to the temperature control circuit 602 and input to the heating / cooling device 603. Next, in step 5 (S5), the error detection circuit 102 determines whether or not the difference between the set voltage Vref and the detection voltage Vs is zero. If Vref−Vs = 0, the high voltage is stably controlled to a desired value, and the current high voltage HV is maintained as it is (step 7 (S7)). If Vref−Vs ≠ 0, go to Step 6.

  In step 6 (S6), Vref> Vs is determined. When “Yes”, since the high voltage HV is smaller than a desired value, the high voltage generator 107 is controlled to increase the voltage ( Step 7 (S7)). In the case of “No”, since the high voltage is larger than a desired value, the high voltage generator 107 is controlled to decrease the voltage (step 7 (S7)). Note that all these controls require circuit-like feedback control. Steps 2 to 7 are repeatedly executed while the power source of the DC high voltage power source is input.

  Also in this embodiment, the same effect as that of Embodiment 1 can be obtained. Furthermore, in this embodiment, it is possible to control the control amount processed in hardware in the first embodiment by using a more complicated algorithm by controlling it from an external system to which previously acquired data is input. It becomes.

  A third embodiment will be described with reference to FIG. The matters described in the first embodiment and the second embodiment and not described in the present embodiment are the same as those in the first embodiment and the second embodiment.

  FIG. 10 is a cross-sectional view of components constituting the temperature control method of the detection resistor. This is a method in which the temperature of the detection resistor 105 surrounded by the heat insulating material 1001 is directly controlled by the heating / cooling device 603 provided with the heat dissipating piece 604, and can be easily controlled in the case of a single component. Even when the temperature of the detection resistor 105 becomes high due to the heat dissipating piece 604, it can be dealt with. This component is applicable to both the first and second embodiments.

  According to the present embodiment, there are the same effects as in the first embodiment. Further, the temperature control surface of the heating / cooling device is brought into direct contact with the detection resistor, so that the temperature of the detection resistor can be controlled with high accuracy in a short time.

  A fourth embodiment will be described with reference to FIG. The matters described in the first embodiment and the second embodiment and not described in the present embodiment are the same as those in the first embodiment and the second embodiment.

  FIG. 11 is a cross-sectional view of another example of components constituting the temperature control method of the detection resistor. The detection resistor 105 is arranged in a box 1101 filled with a filler 1102 having good heat conductivity, and the periphery of the box 1101 is covered with a heat insulating material 1001. By controlling the temperature of the box 1101, the plurality of detection resistors 105 can be controlled together by one heating / cooling device 603, and a stable detection voltage Vs can be obtained. Even when the temperature of the detection resistor 105 becomes high due to the heat dissipating piece 604, it can be dealt with. As in the third embodiment, this component can be applied to both the first and second embodiments.

  According to the present embodiment, there are the same effects as in the first embodiment. In addition, the temperature of the plurality of detection resistors can be controlled by using a box surrounded by a heat insulating material and filled with a filler having good thermal conductivity.

  A fifth embodiment will be described with reference to FIG. In addition, it describes in Example 1- Example 4, and the matter which is not described in a present Example is the same as that of Example 1-4.

  FIG. 12 is a cross-sectional view illustrating an example of a component configuration that simplifies the temperature sensor 601 to the voltage dividing resistor 104. As shown in FIG. 12, the voltage dividing resistor 104 is two-dimensionally arranged on a substrate (heat transfer plate) 1201 that is a thermally good conductor and electrically insulating (thermal conductive rubber or the like). Distribute and arrange. As a result, the temperature control state of each voltage dividing resistor 104 can be made equal, and the temperature sensor 601 only needs to detect the temperature control of one place of the heat transfer plate 1201, and the control becomes easy.

  According to the present embodiment, there are the same effects as in the first embodiment. Moreover, the number of temperature sensors can be reduced by installing the voltage dividing resistor on the heat transfer plate.

It is a block diagram which shows the structure of direct-current high voltage power supply. It is a circuit schematic diagram of a DC high-voltage power supply. It is a circuit schematic diagram of a high voltage voltage dividing part. It is a circuit schematic diagram for highly accurate temperature characteristic evaluation of a single resistor. It is a circuit schematic diagram for highly accurate temperature characteristic evaluation of a plurality of resistors connected in series. It is a block diagram which shows the structure of the direct current | flow high voltage power supply device with a temperature control function which concerns on 1st Example. It is a high voltage stabilization control flowchart according to the first embodiment. It is a block diagram which shows the direct-current high voltage power supply device with a temperature control function and control system which concern on 2nd Example. It is a high voltage stabilization control flow figure at the time of using the external control system which concerns on 2nd Example. It is sectional drawing which shows a structure when carrying out direct temperature control of the detection resistor which concerns on 3rd Example. It is sectional drawing which shows a structure when temperature-controlling the some detection resistor which concerns on 4th Example. It is sectional drawing which shows a structure when measuring the temperature of the voltage dividing resistor which concerns on 5th Example. It is a high voltage stabilization control flowchart which controls the ratio of the resistance value of a voltage dividing resistor, and the resistance value of a detection resistor.

DESCRIPTION OF SYMBOLS 100 ... DC high voltage power supply, 101 ... Voltage setting circuit, 102 ... Error detection circuit, 103 ... High voltage control part, 104 ... Voltage dividing resistor, 105, 503 ... Detection resistor, 106 ... High voltage voltage dividing part, 107 ... High voltage generator 108, High voltage power supply, Vref ... Set voltage, HV ... High voltage, Vs ... Detection voltage, γ ... Boosting gain, β ... Error detection circuit gain, Ra ... Ratio of resistance of voltage dividing resistor, Rs Reference resistor resistance value, 401 ... Resistance measuring device, 402 ... First thermostat, 403 ... Second thermostat, 404 ... Resistor to be measured, 501 ... Multiple resistors to be measured, 502 ... High precision voltage source, 505 ... Voltage measuring device, 601 ... Temperature sensor, 602 ... Temperature control circuit, 603 ... Heating / cooling device, 604 ... Heat radiation piece, VG ... Ground potential, 700 ... Resistance ratio control unit, 801 ... External control system, 802 ... Temperature Control data, 803 ... high voltage setting data, 810 ... information processing section, 820 ... memory section, 1001 ... heat insulating material, 1101 ... box attached around, 1102 ... filler, 1201 ... heat transfer plate.

Claims (11)

A high voltage generation unit, a high voltage control unit including an error detection circuit, a voltage dividing resistor and a detection resistor for detecting a voltage generated by the high voltage generation unit as a detection voltage and feeding back to the error detection circuit A DC high voltage power supply device having a high voltage voltage dividing unit equipped with a device,
Means for controlling the resistance value of the detection resistor so that a ratio between the resistance value and the resistance value of the detection resistor is constant at a predetermined set value in accordance with a change in the resistance value of the voltage dividing resistor; A direct-current high-voltage power supply device further comprising: The DC high-voltage power supply device according to claim 1,
The means for controlling the resistance value of the detection resistor so that the ratio of the resistance value and the resistance value of the detection resistor is constant at a predetermined setting value is for measuring the temperature of the voltage dividing resistor. A direct current high voltage power supply apparatus comprising: a temperature sensor; and means for controlling the temperature of the detection resistor based on an output from the temperature sensor. The DC high-voltage power supply device according to claim 2,
The means for controlling the temperature of the detection resistor has a function of the heater and / or cooler, or both, and the function of the heater and / or cooler based on the output from the temperature sensor. A DC high-voltage power supply device comprising a temperature control circuit for controlling the temperature of the heating / cooling device. In the DC high-voltage power supply device according to claim 3,
The direct current high voltage power supply apparatus characterized by the said detection resistor being directly attached to the heating / cooling device which has the function of the said heating device, a cooling device, or both, and the other part being covered with the heat insulating material. In the DC high-voltage power supply device according to claim 3,
The detection resistor is installed in a box filled with a filler having good thermal conductivity,
A direct current high voltage power supply apparatus, wherein the box is directly attached to the heater and / or the cooler having the functions of both, and the other part is covered with a heat insulating material. The DC high-voltage power supply device according to claim 2,
The DC high-voltage power supply apparatus, wherein the voltage dividing resistor is installed on a thermally conductive and electrically insulating substrate, and the temperature sensor is attached to the substrate. A high voltage generation unit, a high voltage control unit including an error detection circuit, a voltage dividing resistor and a detection resistor for detecting a voltage generated in the high voltage generation unit as a detection voltage and feeding back to the error detection circuit A DC high voltage power supply device having a high voltage voltage dividing unit equipped with a device,
A temperature sensor for measuring the temperature of the voltage dividing resistor;
A heater / cooler for controlling the temperature of the detection resistor, or a heater / cooler having a function of both,
Based on the temperature data from the temperature sensor, the ratio of the resistance value of the voltage dividing resistor and the resistance value of the detection resistor is constant at a predetermined set value so that the heater and / or the cooler are A direct-current high-voltage power supply device further comprising a temperature control circuit for controlling a heating / cooling device having a function. A high voltage generation unit, a high voltage control unit including an error detection circuit, a voltage dividing resistor and a detection resistor for detecting a voltage generated in the high voltage generation unit as a detection voltage and feeding back to the error detection circuit A DC high voltage power supply device having a high voltage voltage dividing unit equipped with a device,
A temperature sensor for measuring the temperature of the voltage dividing resistor;
A heater / cooler for controlling the temperature of the detection resistor, or a heater / cooler having a function of both,
A memory unit storing temperature characteristic data of the voltage dividing resistor and the detection resistor acquired in advance, output data from the temperature sensor, and the resistance value of the voltage dividing resistor using the temperature characteristic data A control system including an arithmetic processing unit that calculates a control amount for controlling the temperature of the detection resistor so that a ratio with the resistance value of the detection resistor is constant at a predetermined setting value;
A DC high-voltage power supply apparatus further comprising: a temperature control circuit that controls the heating / cooling device having the functions of the heating device and / or the cooling device based on the control amount from the control system. A control method for a DC high-voltage power supply device according to claim 1,
Setting a setting voltage for generating a high voltage in the high voltage generation unit in the high voltage control unit;
Determining whether a ratio of a resistance value of the voltage dividing resistor and a resistance value of the detection resistor is a predetermined set value;
Controlling the detection resistance value so that the ratio is constant at a predetermined set value when the ratio is not a predetermined set value;
A control method for a DC high voltage, wherein the high voltage supplied from the high voltage power supply unit is stabilized using the set voltage and the detection voltage. A control method for a DC high-voltage power supply device according to claim 7,
Setting a setting voltage for generating a high voltage in the high voltage generation unit in the high voltage control unit;
Inputting temperature data from the temperature sensor into the temperature control circuit;
Based on the temperature data, a temperature control amount is calculated such that a ratio between the resistance value of the voltage dividing resistor and the resistance value of the detection resistor is constant at a predetermined set value, and the heater or cooler is calculated. Or a step of inputting to a heating / cooling device having both functions,
A control method for a DC high voltage, wherein the high voltage supplied from the high voltage power supply unit is stabilized using the set voltage and the detection voltage. A method for controlling a DC high-voltage power supply device according to claim 8,
Based on the high voltage setting data from the control system, setting a setting voltage for generating a high voltage in the high voltage generation unit in the high voltage control unit;
Inputting temperature data from the temperature sensor into the control system;
Using the temperature data and the temperature characteristic data, the temperature of the detection resistor is controlled so that the ratio between the resistance value of the voltage dividing resistor and the resistance value of the detection resistor is constant at a predetermined setting value. Calculating a control amount for
The calculated control amount is transmitted to the temperature control circuit as temperature control data, and input to the heating / cooling device having the functions of the heating device and / or the cooling device,
A method for controlling a DC high voltage, wherein the high voltage supplied from the high voltage power supply unit is stabilized using the set voltage and the detection voltage.

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