JP2010177419A - Gas laser oscillator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To increase the output of a gas laser oscillator, while securing airtightness of an oscillator housing. <P>SOLUTION: The gas laser oscillator includes the oscillator housing 101, which houses constituent devices of the gas laser oscillator; a lid member 200, which is used for maintaining the airtightness of the oscillator housing 101 and has a curved surface 201 that bulges toward the inside or outside of the oscillator housing 101 and a sidewall 203, formed at an end side and protruding toward the inside or outside of the oscillator housing 101; a gas passage width expansion member 300, which is disposed between the oscillator housing 101 and the lid member 200 and expands the width of a laser medium gas passage by using a formed opening 304; and a lid retainer member 400, which secures the lid member to the oscillator housing, in such a manner that the gas passage width expansion member 300 is sandwiched between the lid member 200 and the oscillator housing 101. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a housing structure of a gas laser oscillator, and more particularly to an orthogonal excitation gas laser oscillator.

A conventional orthogonally pumped gas laser oscillator (hereinafter also simply referred to as a gas laser oscillator) has a hermetically sealed oscillator housing in which a laser-mediated gas such as CO ₂ gas is enclosed. A discharge electrode for gas discharge excitation, a heat exchanger for cooling the laser-mediated gas, and a blower for circulating the laser-mediated gas are provided.
Further, mirror optical systems constituting a gas laser oscillator are arranged at both ends of the oscillator housing.
In continuous oscillation in a gas laser such as a CO ₂ gas laser, in order to excite (pump) gas molecules emitting laser light to an energy level necessary for stimulated emission, it is necessary to use discharge excitation excited by electron collision during discharge. It is common.
In this case, in order to obtain a stable discharge, the inside of the oscillator housing needs to be in a vacuum state of 30 to 60 torr.
For this reason, the structure of the oscillator housing of the gas laser oscillator needs to have an airtight performance capable of maintaining a vacuum state.

In addition, since it is necessary to periodically maintain the discharge electrode, heat exchanger, blower, and mirror optical system mounted (arranged) inside the oscillator housing, maintenance workers can easily operate from outside the oscillator housing. It needs to be accessible.
For this reason, the oscillator housing is provided with a wide opening and a removable lid member for closing the opening.
The lid member of the gas laser oscillator can withstand the load (pressure) when the inside of the oscillator housing is in a vacuum state, maintains airtight performance that can maintain the vacuum state, and easily maintains the internal equipment of the oscillator housing It is necessary to enlarge the outer area so that it can be done.

Usually, as a lid member of the oscillator casing, a plate having a thick plate or a rib structure is employed.
For example, a gas laser oscillator disclosed in Patent Document 1 (Japanese Patent Application Laid-Open No. 2007-294807) includes an oscillator housing and a lid member for keeping the oscillator housing in a vacuum state. Formed in the area between the dome-shaped part (slope part) that bulges to the inner side or the outer side and the dome-shaped part and the side wall, and bulges to the inner or outer side of the casing smaller than the dome-shaped part A triangular convex structure portion which is a protruding portion and a side wall where the end side of the lid member is bent and protruded toward the inside or outside of the housing are provided.
By adopting such a structure, the lid member can withstand the pressure received in a vacuum state even if the plate thickness is reduced.

  In the conventional gas laser oscillator disclosed in Patent Document 1, the space between the oscillator housing and the lid member (the space formed mainly by the dome-shaped portion) serves as the main flow path for the laser-mediated gas. When the “dome-shaped portion (curved surface portion)” or “protrusion portion (triangular convex structure portion)” of FIG. 2 swells toward the inside of the housing, the flow path of the laser-mediated gas is narrowed.

As the laser-mediated gas flow path narrows, the pressure loss increases and the laser-mediated gas flow rate decreases. When the flow rate of the laser-mediated gas is decreased, the “amount of heat carried away by the laser-mediated gas” at the discharge electrode is decreased, so that the temperature of the laser-mediated gas at the discharge electrode is increased.
When the temperature of the laser-mediated gas at the discharge electrode rises, the gas molecules are excited to a low energy level unrelated to stimulated emission, and the gas (laser-mediated gas) molecules that excite to the energy level necessary for the original stimulated emission are Decrease. Therefore, there is a problem that the output of the laser is reduced.
Stimulated emission is a phenomenon in which electromagnetic waves are emitted with the same phase and frequency as externally applied electromagnetic waves, etc., when excited electrons, atoms, molecules, etc. move to other energy levels. It is.

  In addition, the lid member of the conventional gas laser oscillator is gradually deformed by repeatedly exchanging the laser-mediated gas (hereinafter, simply referred to as “laser gas” or “gas”) and maintaining the internal equipment of the oscillator housing. As a result, there is a problem that the airtightness of the casing cannot be secured.

Japanese Patent Laying-Open No. 2007-294807 (FIG. 1)

  The present invention was made to solve the above-mentioned problems, and without changing the basic structure of the gas laser oscillator casing, the gas flow path width can be expanded to increase the laser output. An object of the present invention is to provide a gas laser oscillator that can suppress the deformation of the lid member and can ensure the confidentiality of the casing even when the laser-mediated gas is exchanged or the maintenance of the internal equipment is repeated.

  A gas laser oscillator according to the present invention includes an oscillator housing on which gas laser oscillator components are mounted, and a member for maintaining confidentiality of the oscillator housing, and bulges to the inside or outside of the oscillator housing. A lid member having a curved surface portion and a side wall formed on an end side and projecting to the inner side or the outer side of the oscillator casing, and an opening formed between the oscillator casing and the lid member And a lid holding member for fixing the lid member to the oscillator casing with the gas channel width expanding member interposed therebetween.

According to the present invention, the gas flow path width is provided between the oscillator housing and the lid member, and the gas flow path width extending member that extends the flow width of the laser-mediated gas by the formed opening is provided. The pressure loss can be expanded and the laser-mediated gas flow rate can be increased to increase the amount of heat removed from the discharge electrode.
As a result, the distribution of the gas at the discharge electrode increases the number of molecules at the energy level necessary for stimulated emission, and the laser output increases.
Furthermore, since the lid holding member that fixes the lid member to the oscillator housing with the gas flow path width expanding member interposed therebetween is provided, the lid member can be maintained even when the laser-mediated gas exchange or maintenance of the internal equipment of the oscillator housing is repeated. Deformation can be suppressed, and the confidentiality of the housing can be secured.
As a result, it is possible to ensure the hermeticity of the casing over a long period of time.

1 is a perspective view showing an overall configuration of a gas laser oscillator according to the present invention. It is a figure which shows the structure of the cover member of the gas laser oscillator in this invention. It is a figure which shows the structure of the gas flow path width expansion member in this invention. FIG. 3 is a diagram illustrating a structure of a lid pressing member according to Embodiment 1. FIG. 6 is a diagram showing a structure of a lid pressing member according to a second embodiment. It is a figure which shows a mode that the cover pressing member by Embodiment 2 is arrange | positioned at the four corners of a cover member. FIG. 10 is a diagram illustrating a structure of a lid pressing member according to a third embodiment. It is a figure which shows a mode that the cover pressing member by Embodiment 3 is arrange | positioned at the four corners of a cover member. It is a perspective view which shows the whole structure of the gas laser oscillator housing | casing in Embodiment 4 of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In the drawings, the same reference numerals indicate the same or equivalent ones.
Embodiment 1 FIG.
FIG. 1 is a perspective view showing the overall configuration of a gas laser oscillator according to the present invention.
In FIG. 1, a gas laser oscillator 100 includes an oscillator housing main structure 101, a lid member 200, a gas flow path width extending member 300 disposed between the oscillator housing main structure 101 and the lid member 200, a lid presser. It is comprised by the member 400 grade | etc.,.

An oscillator casing main structure (hereinafter simply referred to as an oscillator casing) 101 includes “devices constituting the gas laser oscillator 100” such as a discharge electrode 102, a heat exchanger 103, a blower 104, and a mirror optical system (not shown). It is a structure to be mounted. The oscillator housing 101 is formed by welding and joining a metal plate material such as steel or stainless steel.
The optical resonator 105 is an optical mirror device for creating a standing wave of light (electromagnetic wave) so that light (electromagnetic wave) can reciprocate between two mirrors arranged in parallel. It is configured.
Further, the flange 107 in which the O-ring groove 109 and the screw hole 108 are formed, the rib 110 for suppressing deformation of the oscillator casing 101, and the opening support member 111 are formed by a method such as welding or screw fastening. It is joined to.

After the O-ring 106 is disposed in the O-ring groove 109 formed in the flange 107 of the oscillator housing 101, the gas flow path width extending member 300 is disposed so as to face the flange 107.
After disposing the gas flow path width expanding member 300 on the flange 107 of the oscillator housing 101, the O ring 305 is disposed in the O ring groove 301 of the gas flow path width expanding member 300, and then the opening of the gas laser oscillator 100 is closed. In addition, the lid member 200 is disposed.
Thereafter, the lid pressing member 400 is disposed outside the lid member 200 and is bolted to the screw hole 108 formed in the flange 107, whereby the oscillator housing 101, the gas flow path width expanding member 300, the lid member 200, The lid pressing member 400 is joined (fixed).

At this time, the O-ring 106 disposed in the O-ring groove 109 is crushed between the flange 107 and the gas flow path width expanding member 300, and further, the O-ring 305 disposed in the O-ring groove 301 is gas flowed. The gas laser oscillator 100 is hermetically sealed by being crushed between the road width expanding member 300 and the lid member 200.
Thereby, the housing of the gas laser oscillator 100 becomes a pressure vessel.
The lid pressing member 400 may be welded to the lid member 200.

Here, the structure of the lid member 200 will be described.
2A and 2B are diagrams showing the structure of the lid member 200 of the gas laser oscillator 100 according to the first embodiment. FIG. 2A is a front view and FIG. 2B is a side view.
FIG. 2B is a side view when the lid member 200 is viewed from the direction of the arrow A in FIG.
The lid member 200 closes the opening of the oscillator housing 101 and the gas flow path width expanding member 300 in order to ensure the airtightness of the gas laser oscillator 100. The lid member 200 has a substantially rectangular outer shape and has four end sides (side sides). ).
In the present embodiment, lid member 200 is formed of a single metal plate such as steel, aluminum, or stainless steel.
The lid member 200 is formed with a dome-shaped portion 201 having a quasi-partial spherical shape by a method such as pressing and a triangular convex structure portion 202 disposed at four locations around the dome-shaped portion 201.

The dome-shaped portion 201 is a curved surface portion that bulges to the inside of the oscillator housing 101.
The dome-shaped portion 201 is formed as a pressure-resistant container so that the inner side is convex, and is arranged at two locations on the left and right sides to avoid interference with the opening support member 302 of the gas flow path width expanding member 300.
The triangular convex structure portion 202 is a protruding portion that is formed in a region between the four end sides of the lid member 200 and the dome shape portion 201 that is a dome shape portion, and protrudes to the inside of the oscillator housing 101.
The triangular convex structure portion 202 is smaller than the dome shape portion 201.
Further, like the dome-shaped portion 201, the triangular convex structure portion 202 is formed so that the inner side is convex.
Note that a part of the triangular convex structure portion 202 arranged at four locations around the dome-shaped portion 201 is formed at the four corner portions of the lid member 200.

In the present embodiment, two dome-shaped portions 201 are formed on the lid member 200, and a triangular convex structure portion 202 is also formed on a peripheral flat portion where the dome-shaped portion 201 is not formed.
As shown in FIG. 2, in the lid member 200 according to the present embodiment, triangular convex structure portions 202 are formed at eight locations.
In addition, you may form the triangular convex structure part 202 so that an outer side may become convex.
Side walls 203 are formed on the four end sides of the lid member 200 so as to protrude to the side opposite to the housing side of the oscillator housing 101.
By providing such side walls 203 on the four end sides of the lid member 200, even if the rigidity of the lid member 200 is increased and the area of the lid member 200 is increased, the stress applied to the oscillator housing 101 when it is in a vacuum state. Can be relaxed.

The side wall 203 is formed by bending the four end sides of the lid member 200 90 degrees toward the opposite side of the oscillator casing 101 (outside the oscillator casing).
The side wall 203 may be formed by screwing or welding and joining metal members to the four end sides.
The side wall 203 may be formed by bending the four end sides of the lid member 200 toward the oscillator housing 101.
A through hole 204 is formed in the outer peripheral portion of the lid member 200 so as to pass through bolts for bolt fastening at the same pitch as the screw holes 108 provided in the flange 107.

Next, the structure of the gas flow path width extending member 300 inserted between the oscillator housing 101 and the lid member 200 will be described.
FIGS. 3A and 3B are views for explaining the structure of the gas flow path width expanding member 300 according to the present invention. FIG. 3A is a front view and FIG. 3B is a side view.
FIG. 3B is a side view of the gas flow path width expanding member 300 viewed from the direction of arrow B in FIG.
The gas flow path width expanding member 300 is inserted (arranged) between the opening of the oscillator housing 101 and the lid member 200, and the outer shape thereof is substantially rectangular, like the flange 107 and the lid member 200. It has 4 edges.
In the present embodiment, the gas flow path width expanding member 300 is formed of a single metal material such as steel, aluminum, or stainless steel.

The gas flow path width expanding member 300 has an O-ring groove 301 formed by a method such as machining only on one side of a plate material having a predetermined thickness manufactured by a method such as rolling, Alternatively, the opening 304 is formed by a method such as machining.
The gas flow channel is expanded by the space formed by the opening 304 of the gas flow channel width expanding member 300.
An opening support member 302 is provided at the center of the gas flow path width expanding member 300, and the opening support member 302 opens when the gas flow path width expanding member 300 is installed on the flange 107 of the oscillator housing 101. Provided at a position overlapping the part support member 111.
Further, through holes 303 for fastening bolts are formed on the outer peripheral portion of the gas flow path width expanding member 300 at the same pitch as the screw holes 108 provided in the flange 107.

Finally, the structure of the lid pressing member 400 in the present embodiment will be described.
4A and 4B are diagrams showing the structure of the lid pressing member 400, in which FIG. 4A is a front view and FIG. 4B is a side view.
FIG. 4B is a side view when the lid pressing member 400 is viewed from the direction of arrow C in FIG.
The outer shape of the lid pressing member 400 is substantially rectangular, like the outer diameter of the lid member 200, and has four end sides.
In the present embodiment, lid pressing member 400 is a plate made of a single metal material such as steel, aluminum, or stainless steel.

On the outer periphery of the lid pressing member 400, through holes 401 for fastening bolts are formed at the same pitch as the screw holes 108 provided in the flange 107.
In addition, an opening 402 is provided at the center of the lid pressing member 400 by a method such as machining.
The lid pressing member 400 has substantially the same shape as the gas flow path width expanding member 300, but an O-ring formed on the gas flow path width expanding member 300 on the surface (both sides) of the lid pressing member 400. There is no groove like the groove 301.
The lid pressing member 400 according to the present embodiment is an integral structure member that fixes the outer peripheral portion of the lid member 200 to the oscillator housing 101.
The lid pressing member 400 may be fixed to the lid member 200 by a method such as welding.

With such a configuration, in the gas laser oscillator 100 according to the present embodiment, the gas flow path width can be expanded to increase the gas flow rate, the gas temperature at the discharge electrode 102 can be decreased, and the excitation distribution of gas molecules can be induced. An inversion distribution that is easy to emit can be obtained.
As a result, the laser output increases.
In addition, since the lid member 200 is fastened together with the oscillator housing 101 by the lid pressing member 400, the deformation of the lid member 200 is suppressed, so that the exchange of the laser-mediated gas and the maintenance of the internal equipment of the oscillator housing are repeated. However, the confidentiality of the oscillator housing 101 can be ensured.
In addition, when the lid member 200 is new (that is, the number of times of exchanging the laser-mediated gas and the maintenance of the internal equipment of the oscillator housing is small) and the lid member 200 is not deformed, the lid pressing member 400 is attached. The gas laser oscillator can be operated without it.

As described above, the gas laser oscillator according to the present embodiment is an oscillator casing 101 on which components of the gas laser oscillator are mounted, and a member for maintaining the confidentiality of the oscillator casing 101. A lid member 200 having a curved surface portion 201 that bulges inwardly or externally and a side wall 203 that is formed at an end and protrudes toward the internal side or the external side of the oscillator housing 101, and the oscillator housing 101 and the lid member 200. The gas channel width expanding member 300 that expands the channel width of the laser-mediated gas through the formed opening 304 and the lid member 200 with the gas channel width expanding member 300 interposed therebetween are connected to the oscillator housing 101. And a lid pressing member 400 that is fixed to the lid.
Therefore, according to the present embodiment, the gas flow path width extending member that is disposed between the oscillator housing and the lid member and extends the flow path width of the laser-mediated gas by the formed opening is provided. The gas flow path width can be expanded to reduce pressure loss, the laser-mediated gas flow rate is increased, and the amount of heat removed from the discharge electrode is increased.
As a result, the distribution of the gas at the discharge electrode increases the number of molecules at the energy level necessary for stimulated emission, and the laser output increases.
Furthermore, a lid pressing member is provided for fixing the lid member to the oscillator housing with the gas flow path width extending member interposed therebetween, and the inside of the housing is repeatedly evacuated for laser-mediated gas replacement or maintenance. The deformation of the lid member can be suppressed, and the airtightness of the housing can be ensured over a long period of time.

Embodiment 2. FIG.
FIGS. 5A and 5B are diagrams showing the structure of the lid pressing member 500 of the gas laser oscillator according to the second embodiment. FIG. 5A is a front view of the lid pressing member 500, and FIG.
FIG. 5B is a side view when the lid pressing member 500 is viewed from the direction of the arrow D in FIG.
In the first embodiment described above, the lid pressing member 400 is formed in an integral structure, but in the present embodiment, the lid pressing member is not in an integral structure but is divided. .
FIG. 6 shows a state in which the lid pressing member 500 in the present embodiment is disposed at the four corners of the lid member 200.

Since the lid member 400 used in the first embodiment is repeatedly used in a vacuum state for exchanging the laser-mediated gas or performing maintenance, the lid member 400 is deformed symmetrically with respect to the diagonal or centerline of the lid member. . Therefore, the deformation of the four corners of the lid member 200 is the largest.
Therefore, in the present embodiment, the lid pressing member is not an integral structure, but is divided and provided only at the four corners of the lid member 200.

A method for using the lid pressing member 500 will be described.
As in the first embodiment, first, the O-ring 106 is disposed in the O-ring groove 109 of the oscillator housing 101, and then the gas flow path width extending member 300 is disposed on the flange 107 of the oscillator housing 101.
After disposing the gas flow path width expanding member 300, the O ring 305 is disposed in the O ring groove 301 of the gas flow path width expanding member 300, and then the lid member 200 so as to close the opening 304 of the gas flow path width expanding member 300. Place.
After the lid member 200 is disposed, the lid pressing members 500 are disposed at the four corners of the lid member 200 and fastened together with bolts.

The lid pressing member 500 will be described. The lid pressing member 500 is made of a metal material such as aluminum or stainless steel.
The four lid holding members 500 have shapes as shown in FIG. 5 corresponding to the shapes of the four corners of the lid member 200, respectively, and are used for fastening bolts at the same pitch as the screw holes 108 provided in the flange 107. A through hole 501 is formed.
However, the through hole 501 is provided at the same position as the screw hole 108 of the flange 107 at least at one place on each side at the four corners of the flange 107.
The lid pressing member 500 is arranged at four corners (that is, four corners) of the lid member 200 so that the corners of the lid member 200 can be fixed to the oscillator housing 101.
The method of fixing the lid pressing member 500 to the lid member 200 may be a method of welding in addition to a method of fastening together with a bolt.

As described above, the lid pressing member in the present embodiment is divided into a plurality of parts, and the corners of the lid member 200 are fixed to the oscillator housing 101 by the plurality of divided lid pressing members 500.
Therefore, according to the present embodiment, the divided lid pressing member 500 is disposed only at the four corners (that is, the four corners) of the lid member 200, so that the integral lid pressing member in the first embodiment is used. Compared to 400, the amount of material used for the lid pressing member can be reduced.

Embodiment 3 FIG.
FIG. 7 is a view showing an overview of the lid pressing member 600 of the gas laser oscillator according to the third embodiment. FIG. 7 (a) is a front view of the lid pressing member 600, and FIG. 7 (b) and FIG. It is a side view.
7B is a side view when the lid pressing member 600 is viewed from the direction of arrow E in FIG. 7A, and FIG. 7C is from the direction of arrow F in FIG. 7A. It is a side view when the lid pressing member 600 is viewed.
In the figure, reference numeral 601 denotes a through hole for fastening the lid pressing member 600 to the lid member 200.
FIG. 8 shows a state in which the lid pressing member 600 according to the present embodiment is disposed at the four corners of the lid member 200.

As described above, since the conventional lid member is not joined at the four corners, the lid member gradually deforms symmetrically with respect to the diagonal line or symmetrically with respect to the center line of the lid member. The gas laser oscillator cannot be secured.
However, in the present embodiment, the lid pressing member 600 is arranged at the joint portion between the side walls 203, thereby providing an integrated structure in which the four side walls 203 are continuous on the outer periphery of the lid member 200. On the other hand, it has a rib structure.
As shown in FIG. 7, the pressing member 600 has a structure having a U-shaped groove bent at 90 degrees, and the end of the side wall 203 is fitted into the U-shaped groove, The four side walls 203 have a continuous integrated structure.

A method for using the lid pressing member 600 will be described.
After the O-ring 106 is disposed in the O-ring groove 109 of the oscillator housing 101, the gas flow path width expanding member 300 is disposed on the flange 107 of the oscillator housing 101.
After disposing the gas flow path width expanding member 300, the O ring 305 is disposed in the O ring groove 301 of the gas flow path width expanding member 300, and then the lid member 200 so as to close the opening 304 of the gas flow path width expanding member 300. And is joined to the housing 101 with bolts.
After placing the lid member 200, lid holding members 600 having U-shaped grooves bent at 90 degrees are attached to the four corners of the lid member 200.
At that time, the side wall 203 at the end of the lid member 200 is fitted into the U-shaped groove of the lid pressing member 600 and is fixed to the lid member 200 with a fastener such as a bolt. Thereby, the four side walls 203 formed at the end of the lid member 200 have an integral structure.
With such a configuration, the rigidity of the lid member 200 can be increased and deformation of the lid member 200 can be suppressed. As can be seen from FIG. 8, the lid pressing member 600 is compared with the lid pressing members 400 and 500. The amount of material used can be further reduced.

As described above, the lid pressing member 600 in the present embodiment is divided into a plurality of parts, and each of the divided lid pressing members has a structure having U-shaped grooves bent at 90 degrees. The end portions of the side walls 203 are fitted into the groove portions and fastened to the lid member 200 with fasteners, so that the four side walls 203 have an integral structure.
Therefore, according to the present embodiment, since the rigidity of the lid member 200 is further increased, deformation of the lid member 200 can be reliably suppressed, and the plurality of lid pressing members 600 can be used as the lid pressing member in the second embodiment. The amount of material used can be further reduced as compared with the member 500.

Embodiment 4 FIG.
FIG. 9 is a perspective view showing the overall configuration of the gas laser oscillator according to the fourth embodiment.
Although the basic configuration is substantially the same as that of the first embodiment, the fourth embodiment is different from the first embodiment in that gas is provided between the oscillator housing 101 and the lid member 200 that closes the opening of the oscillator housing 101. The difference is that a plurality of channel width expanding members 300 are inserted.
Note that any of the lid pressing members 400, 500, and 600 described in the first, second, and third embodiments may be used as the lid pressing member.

With this configuration, in this embodiment, the gas flow path can be further expanded as compared with the case of Embodiment 1, and the gas flow rate at the discharge electrode 102 is further increased.
When the gas flow rate is further increased, the amount of heat removed from the discharge electrode 102 is further increased and the gas temperature is lowered.
When the gas temperature further decreases, the laser output is further increased because an inversion distribution is formed in which the number of molecules having a high energy level in the molecular distribution is further increased.
Alternatively, since the pressure loss is further reduced, even if the rotational frequency of the blower is lowered, it is possible to obtain the same gas flow rate as when one gas flow path width expanding member 300 is inserted.
As a result, input power to the blower can be reduced.

As described above, in the gas laser oscillator according to the present embodiment, a plurality of gas flow path width expanding members 300 are inserted between the opening of the oscillator housing 101 and the lid member 200.
Therefore, it is possible to further expand the flow path of the laser-mediated gas and increase the gas flow rate, thereby increasing the laser output.

  The present invention is useful for realizing a gas laser oscillator that can increase the output and secure the hermeticity of the oscillator housing.

DESCRIPTION OF SYMBOLS 100 Gas laser oscillator 101 Oscillator housing 102 Discharge electrode 103 Heat exchanger 104 Blower 105 Optical resonator 106,305 O-ring 107 Flange 108 Screw hole 109, 301 O-ring groove 110 Rib 111, 302 Opening support member 200 Lid member 201 Curved surface Part (dome-shaped part 202 triangular convex structure part 203 side wall 204, 203, 303, 401, 501, 601 through hole 300 gas flow path width expanding member 304, 402 opening 400, 500, 600 lid holding member

Claims (5)

An oscillator housing on which gas laser oscillator components are mounted;
A member for maintaining confidentiality of the oscillator casing, wherein the oscillator casing is formed on the inner side or the outer side of the oscillator casing, and the inner side or the outer side of the oscillator casing. A lid member having a side wall protruding to
A gas channel width expanding member that is disposed between the oscillator housing and the lid member and expands the channel width of the laser-mediated gas by the formed opening;
A gas laser oscillator comprising a lid pressing member for fixing the lid member to the oscillator casing with the gas flow path width extending member interposed therebetween.   2. The gas laser oscillator according to claim 1, wherein the lid pressing member is an integral member that fixes an outer peripheral portion of the lid member to the oscillator housing.   2. The gas laser oscillator according to claim 1, wherein the lid pressing member is divided into a plurality of parts, and a corner portion of the lid member is fixed to the oscillator casing by the plurality of divided lid pressing members. .   The lid pressing member is divided into a plurality of parts, and the divided lid pressing member has a U-shaped groove part bent at 90 degrees, and the end of the side wall is fitted into the groove part. 2. The gas laser oscillator according to claim 1, wherein the four side walls are integrated with each other by being fastened to the lid member.   2. The gas laser oscillator according to claim 1, wherein the gas flow path width extending member includes a plurality of the gas flow path width extending members disposed between the oscillator housing and the lid member.

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