JP2010169224A - Fluid controlling device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid controlling device facilitating confirmation of closing and capable of retaining visibility of opening and closing display at a given level by facilitating attachment and detachment of a handle and improving turning operability of the handle, and by automatically and positively exposing an insertion hole of a padlock or the like in a close position of the handle and improving locking nature. <P>SOLUTION: In the fluid controlling device, a stem 5 is rotated by turning operation of the handle 2 of a valve body 1 upper part to carry out opening and closing control of a valve element 3. In the fluid controlling device, a spiral face 51 and a lock groove 52 connected to the spiral face 51 are formed on an upper end of an axial attachment tube 7 provided on a valve body 1, the stem 5 is inserted in an irrotational state in an engagement hole 21 of the handle 2, a roller 32 is rotatably axially attached to a shaft 33 attached in a centripetal direction of the handle 2, the roller 32 is provided so as to freely rotate on the spiral face 51 and such that it is insertable into the lock groove 52, and an intrusion hole 16 formed in an upper end of the stem 5 than the engagement hole 21 is provided such that it can be exposed in a handle 2 upper face by the turning operation of the handle 2 from fully open to fully close. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a fluid controller that is used in, for example, a semiconductor manufacturing apparatus and controls the opening and closing of a flow path when supplying or exhausting a fluid such as a gas, and in particular, when the manual handle of the fluid controller is fully closed or The present invention relates to a lock structure of a manual handle that is locked when fully opened.

  Conventionally, various lock devices have been proposed for this type of valve handle lock device so that the handle does not rotate carelessly when the valve is fully closed. For example, in Patent Document 1, a handle member is rotatably fitted to an operation member having a plate-like protrusion at a casing upper end portion having a valve body structure therein, and a protrusion provided on the outer periphery of the casing is formed on the handle member. The guide groove is movably fitted. The handle member is provided with a pair of opposing walls having through holes. When the handle member is moved upward, a non-rotatable position is obtained, and the through hole is opened at this position. A non-rotatable position is maintained by inserting a wire or the like.

JP 2005-16599 A

  In the valve shown in Patent Document 1, since the protrusion provided on the outer periphery of the casing is fitted in the guide groove of the handle member, when the valve is assembled into the apparatus panel, the operation of removing or reassembling the handle is extremely difficult. It was cumbersome and poor in workability. Moreover, in order to reveal the through hole, it is necessary to raise the handle, and in order to check the closed state, the handle must be pulled up to check the closed state. Had. In addition, when the handle is pulled up, the distance in the height direction between the open / close display plate in the handle and the confirmation window provided on the handle increases, resulting in poor display visibility.

  The present invention has been developed in order to solve the conventional problems. The object of the present invention is to facilitate the attachment / detachment of the handle, to improve the turning operability of the handle, and to close the handle. The insertion holes such as padlocks are exposed automatically and reliably at the position to improve the lockability, making it easy to check the closure, and to keep the visibility of the open / close display constant. It is to provide a fluid controller.

  In order to achieve the above object, an invention according to claim 1 is a fluid controller that controls opening and closing of a valve body by rotating a stem by a turning operation of a handle provided on an upper part of a valve body having the valve body. A spiral groove and a lock groove connected to the spiral surface are formed at the upper end of the shaft cylinder provided in the valve body, and the stem is non-rotatably inserted into an engagement hole formed in the handle, and the centripetal point of the handle A roller is rotatably mounted on a shaft mounted in the direction, and this roller is provided so as to be rotatable along the spiral surface and can be inserted into the lock groove, so that the handle can be rotated from fully open to fully closed. Then, the fluid controller is provided with a penetration hole formed at the upper end of the stem from the engagement hole of the handle so as to be exposed on the upper surface of the handle.

  According to a second or third aspect of the present invention, the front end of the shaft is engaged with a stopper formed on the outer periphery of the stem, and the rear end of the shaft is screwed to the handle, or the front end of the shaft is connected to the stem. This is a fluid controller in which a rear end portion of a shaft is screwed onto a handle by being engaged with a stopper ring which is elastically ejected through a spring around the outer periphery of the shaft.

  The invention according to claim 4 has a valve body structure in which the diaphragm is pressed against the valve seat through the diaphragm piece and fully closed by the vertical movement of the stem screwed to the shaft-mounted cylinder.

  In the invention according to claim 5 or 6, an open / close display member is rotatably disposed on the inner peripheral surface of the handle, and an engaging piece of the open / close display member is engaged with an engaging groove formed in a shaft-mounted cylinder. The opening / closing display member is fixed to the upper end of the shaft-mounted cylinder, and the opening / closing display part of the opening / closing display member is formed in the handle so as to visually recognize the opening / closing display member.

From the above, according to the present invention, when the apparatus panel is assembled, the handle can be attached and detached very easily, so that the operation of removing and reassembling the handle is simple and the workability thereof is good.
Further, when the handle is turned to the closed state, a through-hole for applying a padlock or the like by its own weight or urging by a spring force is exposed on the upper surface of the handle, so that the operation of applying the padlock or the like is facilitated. In this case, since the upper end of the stem is exposed, it is easy to confirm the closed state regardless of the presence or absence of the through hole.

  Moreover, according to the second aspect of the present invention, the guide portion for rotating the handle relative to the valve body is not exposed to the outside, and the handle can be stably rotated. Furthermore, according to the third aspect of the invention, when the handle is closed, the handle is forcibly moved in the direction in which the through hole is exposed. It is a fluid controller that can be installed upside down.

  According to the fourth aspect of the present invention, the flow rate can be controlled while maintaining the high purity of the fluid while ensuring high airtightness, and it is suitable for the semiconductor manufacturing apparatus by preventing the process fluid and the like from remaining in the flow path.

  According to the invention of claim 5, the opening / closing display provided on the handle is kept at the same height from the opening window of the handle regardless of the vertical movement of the handle, thereby ensuring the visibility of the opening / closing display. And

  According to the invention which concerns on Claim 6, the opening-and-closing display part can be visually recognized from the upper side of a handle | steering-wheel.

(A) is the longitudinal cross-sectional view of the closed state which showed an example of the fluid controller in this invention, (b) is a top view same as the above. (A) is the longitudinal cross-sectional view of the open state which showed an example of the fluid controller in this invention, (b) is a top view same as the above. (A) is the perspective view of the open state which showed an example of the fluid controller in this invention, (b) It is a perspective view of the closed state same as the above. FIG. 3 is a right side view partially cut away showing the internal structure of FIG. 2. It is a top view of the shaft mounting cylinder of FIG. (A) is a front view which shows an example of the opening / closing display member in this invention, (b) is a top view same as the above. It is a perspective explanatory view explaining the relation between the shaft mounting cylinder and the roller of the fluid controller in the present invention. It is a partially notched sectional view showing another example of the fluid controller in the present invention.

A preferred embodiment of a fluid controller in the present invention will be described in detail with reference to the drawings. FIG. 1 is a longitudinal sectional view in a closed state showing an example of a fluid controller in the present invention, and FIG. 2 is a longitudinal sectional view in an opened state showing an example of a fluid controller in the present invention.
The fluid controller according to the present embodiment has a configuration in which a handle 2 is attached to the valve body 1 and the valve body 3 is controlled to be opened and closed by rotating the handle 2. Before describing the characteristics of the fluid controller, the configuration of the valve body 1 will be described.

  The valve body 1 has a valve body 1, a stem 5, and a shaft mounting cylinder 7. The shaft mounting cylinder 7 has a spiral surface 51 as shown in FIGS. 5 and 7 at its upper end, and a spiral surface 51. It has a form in which a continuous notched lock groove 52 is formed. In this example, the valve body 1 using the shaft mounting cylinder 7 has a structure in which the shaft mounting cylinder 7 is a cap and the cap 7 is connected to the body 8 by a nut 10. The valve 5 is moved up and down while rotating to open and close the valve body 1. Thus, in this example, the shaft-mounted cylinder 7 is used as a cap. However, the structure of the shaft-mounted cylinder is merely an example. For example, the shaft-mounted cylinder may be provided integrally with the body. As long as the stem rotates, the stem is lifted and lowered by the screwing of the stem and the body, etc., so that the valve can have any form depending on the implementation.

  Hereinafter, the structure of the valve body 1 when the shaft-mounted cylinder 7 as an example in the fluid controller of the present invention is used as a cap will be described in detail. In the valve body 1, a shaft mounting cylinder (hereinafter referred to as a cap) 7 is integrated with the body 8 by the nut 10 as described above, and a bonnet 9 is mounted between the cap 7 and the body 8. In addition, a diaphragm piece 26 and a diaphragm 27 are mounted as a valve body 3 in the valve body 1, and a valve seat 6 is provided in addition to the valve body 3 and the stem 5.

  Among these, as shown in FIG. 2A, the stem 5 is formed with an engaging portion 15 composed of two parallel surfaces on the upper side, and a penetrating hole 16 is formed at the upper end of the engaging portion 15. . On the other hand, a male screw portion 17 is formed on the lower outer peripheral side of the stem 5, and a protruding pressing portion 18 is formed on the lower side of the male screw portion 17. A sealing O-ring 19 is attached to the upper position of the male screw portion 17. The stem 5 is housed in a state where the male screw portion 17 is screwed to the female screw portion 20 formed on the inner peripheral side of the cap 7, and is provided so as to be movable up and down with respect to the cap 7. The stem 5 has an integral structure, but may have a separate structure.

  On the upper side of the stem 5, the engaging portion 15 is inserted into an engaging hole 21, which will be described later, formed in the handle 2 in a non-rotating state, and the handle 2 is attached. Further, a stopper ring 23 having a flange 22 is provided on the outer periphery of the stem 5. A spring 24 is mounted in a resilient state between the flange portion 22 and the stem 5.

  1A and 2A, as described above, the valve body 3 includes the diaphragm piece 26 and the diaphragm 27, and the diaphragm piece 26 is housed in the bonnet 9 so as to be movable up and down. . On the other hand, the diaphragm 27 is disposed at a position below the diaphragm piece 26 and is configured to open and close the flow path 11 formed in the body 8 by being deformed by the vertical movement of the diaphragm piece 26. The diaphragm piece 26, the diaphragm 27, and the bonnet 9 are housed in the body 8, and the valve seat 6 is provided at a position where the diaphragm 27 of the body 8 contacts.

  The cap 7 is integrated by screwing a female screw 29 of the nut 10 onto a male screw 28 formed on the body 8 while being placed on the body 8. With this configuration, in the fluid controller, the stem 5 screwed into the cap 7 is rotated by the turning operation of the handle 2 provided on the upper part of the valve body 1, and the stem 5 moves up and down by this rotation, so that the diaphragm piece 26 is moved. Accordingly, the diaphragm 27 is fully closed by pressing the diaphragm 27 against the valve seat 6. A male screw 30 is formed on the outer peripheral side of the cap 7, and a panel nut 39 is screwed to the male screw 30 via a female screw 31.

Next, the handle 2 attached to the fluid controller and the mounting state of the handle 2 will be described. The handle 2 is provided with the engagement hole 21, the roller 32, the shaft 33, and the open / close display member 34 described above.
As shown in FIGS. 1 and 2, the handle 2 has an engagement hole 21 on the upper end side, and the stem 5 can be rotated by inserting the stem 5 into the engagement hole 21. It has become. In the centripetal direction of the handle 2, a through-hole mounting hole 36 having a female screw 35 is formed on the insertion side, and the shaft 33 is inserted into the mounting hole 36 for mounting. In addition, an opening window 38 is formed in the handle 2 so that the open / close display portion 37 provided on the open / close display member 34 shown in FIG.

  As shown in FIGS. 2 and 7, the shaft 33 includes a mounting portion 40 and a shaft mounting portion 41, and a male screw 42 that can be screwed onto the female screw 35 of the handle 2 on the outer peripheral side of the mounting portion 40. Have. Thereby, the shaft 33 can be attached in the centripetal direction of the handle 2 via the male screw 42. As shown in FIG. 3, a hexagonal hole 43 is formed on the attachment side of the attachment portion 40, and a shaft 33 can be rotated by inserting a wrench or the like (not shown) into the hexagonal hole 43. In this example, the hexagonal hole 43 is formed on the attachment side of the attachment portion 40, but it can be provided in any manner such as a normal cross hole. The shaft mounting portion 41 is formed with a diameter smaller than that of the mounting portion 40, and the roller 32 is rotatably mounted on the shaft mounting portion 41 by a retaining ring 45 via a spacer 44.

  On the other hand, the open / close display member 34 in FIG. 6 has one locking piece 47 and a plurality of protrusions 48 (three in this example). The locking piece 47 is formed to hang substantially from the opening / closing display portion 37 of the opening / closing display member 34 and has a length that can be locked to an engaging groove 49 formed at a corresponding position of the cap 7. The protrusion 48 is substantially claw-shaped and is bent at an appropriate angle. On the other hand, on the inner peripheral surface side of the handle 2, a diameter-enlarging groove 50 on which the protrusion 48 can be hooked is formed, and the opening / closing display member 34 is temporarily fixed to the inner peripheral surface of the handle 2 so as to be rotatable. The open / close display unit 37 is visible from the opening window 38 of the handle 2.

  The open / close display member 34 is fixed to the upper end of the cap 7 by engaging the engaging piece 49 of the open / close display member 34 in the engagement groove 49 of the cap 7. When the handle 2 is attached to the stem 5, the above-described roller 32 is rotatably mounted along the spiral surface 51 and can be inserted into the lock groove 52 in FIG. 4. . When the handle 2 is rotated from fully open to fully closed, the penetrating hole 16 of the stem 5 is moved from the engagement hole 21 of the handle 2 to the handle 2 by the vertical movement from the spiral surface 51 of the roller 32 to the lock groove 52. 2 The upper surface can be exposed.

  Further, when the roller 32 is positioned on the spiral surface 51 or the lock groove 52, the front end portion 53 of the shaft 33 is engaged with the flange portion 22 of the stopper ring 23 in a resilient state toward the lower side, The rear end portion 54 of the shaft 33 is pivotally attached to the handle 2. As a result, the handle 2 is attached to the stem 5 while being prevented from coming off, and the shaft 33 is always pushed by the stopper ring 23 urged downward by the spring force of the spring 24. The handle 2 integrated with the shaft 33 is applied with a force to move downward with respect to the stem 5. For this reason, the handle 2 does not move with respect to the stem 5 due to its own weight regardless of the mounting direction of the valve body 1, and the valve body 1 as will be described later is attached to the vertical panel 55 sideways. Even in a state of being mounted upside down, the positional relationship with the stem 5 can be secured.

  The mounting structure of the shaft 33 and the handle 2 may be as shown in FIG. In FIG. 8, a stopper portion 57 having an enlarged diameter is formed around the outer periphery of the stem 56, and the shaft 33 is attached to the stopper portion 57. In that case, the tip end portion 53 of the shaft 33 may be engaged with the lower end surface 58 of the stopper portion 57, while the rear end portion 54 of the shaft 33 may be screwed to the handle 2. In this case, the structure is simplified and the number of parts is reduced as compared with the case where the stopper ring 23 is provided. In addition, in this example, the same part as the example mentioned above is represented by the same code | symbol, and the description is abbreviate | omitted.

  The panel nut 39 can be screwed to the cap 7 with the panel 55 sandwiched between the cap 7 and plays a role of mounting the valve body 1 to the panel 55. When mounting the valve body 1 to the panel 55, first, the cap 7 is inserted from below the mounting hole 59 formed in the panel 55 with the handle 2 and the panel nut 39 removed, and in this state the cap The panel nut 39 is screwed from the upper side of 7. Since the valve main body 1 is fixed to the panel 55 by such an attachment structure, the valve main body 1 can be firmly attached even when the panel 55 is arranged in the vertical direction or on the back side of the equipment, etc. The valve body 1 can be installed in a narrow place.

Next, the operation of the fluid controller of the present invention in the above embodiment will be described.
As described above, when the valve body 1 of the fluid controller is fixed to the panel, the handle is first removed. In this case, the handle 2 can be detached by rotating the shaft 33 in the loosening direction to disengage the hook portion 23 (stopper portion 57) of the stopper ring 23 on the distal end side. As described above, the handle 2 can be easily detached and reassembled, so that the workability is excellent.

  Further, when the valve body is changed from the fully open state of FIG. 2 to the valve closed state of FIG. 1, the handle 2 is rotated clockwise from the state of FIG. 2B to the state of FIG. . At that time, the stem 5 also rotates to the right, and the diaphragm piece 26 is urged downward by screwing the stem 5 and the cap 7 together. Due to this urging, the diaphragm 27 is deformed in a direction in which it is pressed against the valve seat 6.

  At this time, the roller 32 rotatably mounted on the shaft 33 rolls on the spiral surface 51 in the direction of the lock groove 52 with the rotation of the handle 2, and the diaphragm 27 until the flow path 11 is fully closed. When the valve seat 6 is brought into close contact with the valve seat 6, it moves to the upper side of the lock groove 52. In this case, the angle θ at which the roller 32 moves with respect to the center is approximately 90 °. When the roller 32 reaches the position of the lock groove 52, the roller 32 is separated from the spiral surface 51, so that the support from the lower side is lost and the roller 32 moves to the lower side of the lock groove 52. Accordingly, the handle 2 integral with the shaft 33 on which the roller 32 is mounted moves so as to be lowered with respect to the cap 7, and the penetration hole 16 at the upper end of the stem is exposed on the upper surface of the handle 2. In this way, the through hole 16 can be automatically exposed by simply rotating the handle 2 without pulling up the handle 2, and the valve closed state of the valve body 1 can be determined by viewing the through hole 16. It becomes possible to confirm.

  Further, at this time, since the roller 32 is fitted in the lock groove 52, the handle 2 cannot be rotated in the valve opening direction from the valve closed state. When the handle 2 is operated in the valve opening direction, the handle 2 can be rotated by pulling it up until the penetration hole 16 is hidden again. Further, since the handle 2 is structured to rotate by vertical movement in this way, the valve main body 1 has excellent footprint characteristics, and the protruding portion in the left-right direction is minimized.

  Further, in any of the valve open / closed states, the open / close display member 34 maintains the state in which the locking piece 47 is locked in the engagement groove 49 of the cap 7, and from the rotation of the handle 2. It is fixed to the upper end of the cap 7 in a separated state. The opening / closing display member 34 is maintained at the same height with respect to the opening window 38 regardless of the vertical and rotational operations of the handle 2 by this mounting structure, and rotates relative to the opening / closing display member 34 integrally with the stem 5. Since the handle 2 is always maintained in a state that is easily visible, the visibility of the open / close display is increased.

  Further, when it is necessary to prevent the rotation operation in the valve opening direction in the valve closed state, the lock is made in a state where the lock member 60 such as a padlock, a wire, or a lock bar of any length is passed through the through hole 16. To do. As a result, the handle 2 cannot be pulled up to a height at which it can be rotated, and rotation in the valve opening direction can be prevented. In this case, as shown in FIG. 1, the effect is the same when the lock member 60 is a thin wire or the like. On the other hand, in the state in which the rotation operation as shown in FIG. 2 is possible, the penetrating hole 16 is hidden by the handle 2, so that a padlock, a wire, or the like cannot be passed.

DESCRIPTION OF SYMBOLS 1 Valve body 2 Handle 3 Valve body 5 Stem 6 Valve seat 7 Cap (shaft mounting cylinder)
DESCRIPTION OF SYMBOLS 16 Through-hole 21 Engagement hole 23 Stopper ring 24 Spring 26 Diaphragm piece 27 Diaphragm 32 Roller 33 Shaft 34 Opening / closing display member 37 Opening / closing display part 38 Opening window 47 Locking piece 49 Engaging groove 51 Helical surface 52 Locking groove 53 Tip part 54 Rear end 57 Stopper

Claims (6)

  A fluid controller that controls the opening and closing of the valve body by rotating a stem by a turning operation of a handle provided on an upper part of the valve body having a valve body, and a spiral surface on an upper end of a shaft-mounted cylinder provided in the valve body. A lock groove connected to the spiral surface is formed, the stem is inserted non-rotatably into an engagement hole formed in the handle, and a roller is rotatably mounted on a shaft attached in the centripetal direction of the handle. A roller is provided so as to be rotatable along the spiral surface, and is provided so that it can be inserted into the lock groove, and is formed at the upper end of the stem from the engagement hole of the handle by a rotation operation from the fully open to the fully closed handle. A fluid controller characterized in that a penetration hole is provided on an upper surface of the handle so as to be exposed.   The fluid controller according to claim 1, wherein a front end portion of the shaft is engaged with a stopper portion formed on an outer periphery of the stem, and a rear end portion of the shaft is screwed to the handle.   The fluid controller according to claim 1, wherein a front end portion of the shaft is engaged with a stopper ring which is elastically ejected around a stem via a spring, and a rear end portion of the shaft is screwed to a handle.   The fluid controller according to any one of claims 1 to 3, wherein the fluid controller has a valve body structure in which the diaphragm is pressed against the valve seat seat through the diaphragm piece and is fully closed by the vertical movement of the stem screwed into the shaft mounting cylinder.   An opening / closing display member is rotatably disposed on the inner peripheral surface of the handle, and an engagement piece of the opening / closing display member is engaged with an engagement groove formed on the shaft-mounted cylinder so that the opening / closing display member is positioned at the upper end of the shaft-mounted cylinder. The fluid controller according to claim 1, wherein the fluid controller is fixed to the fluid controller.   6. The flow path controller according to claim 5, wherein an opening window is formed on the handle so that an open / close display portion of the open / close display member can be visually recognized.

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