JP2010145349A - Radiation detection apparatus - Google Patents

Radiation detection apparatus Download PDF

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Publication number
JP2010145349A
JP2010145349A JP2008325757A JP2008325757A JP2010145349A JP 2010145349 A JP2010145349 A JP 2010145349A JP 2008325757 A JP2008325757 A JP 2008325757A JP 2008325757 A JP2008325757 A JP 2008325757A JP 2010145349 A JP2010145349 A JP 2010145349A
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detection panel
ray detection
radiation detection
support member
panel
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Yasuaki Kawasaki
泰明 川崎
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Toshiba Corp
Canon Electron Tubes and Devices Co Ltd
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Toshiba Corp
Toshiba Electron Tubes and Devices Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an X ray detection apparatus 11 for detachably fixing an X ray detection panel 12 without generating an influence for X ray detection. <P>SOLUTION: The radiation detection apparatus fixes a support member 13 in an external enveloping unit 18, arranges an intermediate member 16 and an X ray detection panel 12 on the support member 13, and arranges a sandwiching member 17 formed in the peripheral part outside b of an effective region of the X ray detection panel 12. The intermediate member 16 and the sandwiching member 17 are formed of thermal plastic gel materials. The X ray detection panel 12 is sandwiched between the support member 13 and the sandwiching member 17 by assembling the external enveloping unit 18. When the external enveloping unit 18 is dismantled, the sandwiching of the X ray detection panel 12 is released, and the X ray detection panel 12 is removed from the support member 13. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、放射線を検出する放射線検出装置に関する。   The present invention relates to a radiation detection apparatus that detects radiation.

従来、放射線、特にX線を検出するX線検出装置は、工業用の非破壊検査や医療診断、構造解析などの科学研究用など広い分野で利用されている。   Conventionally, X-ray detectors that detect radiation, particularly X-rays, are used in a wide range of fields such as industrial nondestructive inspection, medical diagnosis, and scientific research such as structural analysis.

X線検出装置の中でも、高感度で高鮮鋭な装置として、複数のフォトセンサおよびTFT(Thin Film Transistor:薄膜トランジスタ)が2次元に配置された光電変換素子部を有する光検出器上に、X線を光電変換素子部で検出可能な光に変換する蛍光体層が直接形成され、これらにて構成されたX線検出パネルを備えたX線検出装置が知られている。   Among X-ray detection devices, as a highly sensitive and sharp device, an X-ray is formed on a photodetector having a photoelectric conversion element portion in which a plurality of photosensors and TFTs (Thin Film Transistors) are two-dimensionally arranged. There is known an X-ray detection apparatus including an X-ray detection panel in which a phosphor layer that directly converts light into light that can be detected by a photoelectric conversion element portion is formed.

X線検出パネルは、板状の支持部材の一面に配置され、この支持部材によって外囲器内に支持されている。   The X-ray detection panel is disposed on one surface of a plate-like support member, and is supported in the envelope by this support member.

従来のX線検出装置では、X線検出パネルが支持部材上に接着剤で固定されている(例えば、特許文献1参照。)。   In a conventional X-ray detection apparatus, an X-ray detection panel is fixed on a support member with an adhesive (for example, see Patent Document 1).

または、X線検出パネルの有効領域全面と外囲器との間にクッション材を圧縮状態で配置し、このクッション材の反発力によりX線検出パネルが支持部材に対して押圧固定されている。
特開2002−14168号公報(第4頁、図1)
Alternatively, the cushion material is disposed in a compressed state between the entire effective area of the X-ray detection panel and the envelope, and the X-ray detection panel is pressed and fixed to the support member by the repulsive force of the cushion material.
JP 2002-14168 (page 4, FIG. 1)

しかしながら、X線検出パネルを接着固定するX線検出装置では、接着固定するのに多くの時間を要し、また、接着固定した後にはX線検出パネルを分解したり回収することが困難になる問題がある。   However, in an X-ray detection apparatus for bonding and fixing an X-ray detection panel, it takes a long time to bond and fix the X-ray detection panel, and it becomes difficult to disassemble and collect the X-ray detection panel after bonding and fixing. There's a problem.

また、X線検出パネルの有効領域を覆うクッション材で、X線検出パネルを支持部材に対して押圧固定するX線検出装置では、クッション材を通過したX線をX線検出パネルが受けるためにクッション材の影響が検出画像に表れたり、クッション材の押圧にてX線検出パネルの有効領域に損傷を及ぼす可能性がある問題がある。   Further, in the X-ray detection apparatus that presses and fixes the X-ray detection panel to the support member with a cushion material that covers the effective area of the X-ray detection panel, the X-ray detection panel receives the X-rays that have passed through the cushion material. There is a problem that the influence of the cushion material may appear in the detection image, or the effective area of the X-ray detection panel may be damaged by the pressing of the cushion material.

本発明は、このような点に鑑みなされたもので、放射線検出に影響が発生することなく、放射線検出パネルを着脱可能に固定できる放射線検出装置を提供することを目的とする。   The present invention has been made in view of the above points, and an object of the present invention is to provide a radiation detection apparatus capable of detachably fixing a radiation detection panel without affecting radiation detection.

本発明は、一面の中央部に放射線を検出する有効領域が形成されている放射線検出パネルと、この放射線検出パネルの他面を配置する支持部材と、この支持部材に配置された前記放射線検出パネルの有効領域外の周辺部を前記支持部材との間に挟持する挟持部材とを具備しているものである。   The present invention provides a radiation detection panel in which an effective region for detecting radiation is formed at the center of one surface, a support member for disposing the other surface of the radiation detection panel, and the radiation detection panel disposed on the support member. A clamping member that clamps a peripheral portion outside the effective region between the supporting member and the support member.

本発明によれば、支持部材に配置された放射線検出パネルの有効領域外の周辺部を、支持部材と挟持部材との間に挟持するため、放射線検出に影響が発生することなく、放射線検出パネルを着脱可能に固定できる。   According to the present invention, since the peripheral portion outside the effective area of the radiation detection panel arranged on the support member is sandwiched between the support member and the sandwiching member, the radiation detection panel does not affect radiation detection. Can be fixed detachably.

以下、本発明の一実施の形態を、図面を参照して説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

図1は放射線検出装置としてのX線検出装置の一部の断面図、図2はX線検出装置のX線検出パネルの正面図、図3はX線検出装置のX線検出パネルの一部の断面図である。   1 is a sectional view of a part of an X-ray detection apparatus as a radiation detection apparatus, FIG. 2 is a front view of an X-ray detection panel of the X-ray detection apparatus, and FIG. 3 is a part of the X-ray detection panel of the X-ray detection apparatus. FIG.

放射線検出装置としてのX線検出装置11は、放射線検出パネルとしてのX線検出パネル12、このX線検出パネル12を一面に支持する板状の支持部材13、この支持部材13の他面に支持されX線検出パネル12を電気的に駆動する回路基板14、これらX線検出パネル12と回路基板14とを電気的に接続するフレキシブル回路基板15、X線検出パネル12と支持部材13との間に配置された中間部材16、支持部材13に配置された中間部材16との間にX線検出パネル12を挟持する挟持部材17、これらを収容する外囲器18などを備えている。   An X-ray detection device 11 as a radiation detection device includes an X-ray detection panel 12 as a radiation detection panel, a plate-like support member 13 that supports the X-ray detection panel 12 on one surface, and is supported on the other surface of the support member 13. A circuit board 14 that electrically drives the X-ray detection panel 12, a flexible circuit board 15 that electrically connects the X-ray detection panel 12 and the circuit board 14, and a space between the X-ray detection panel 12 and the support member 13. An intermediate member 16 disposed between the support member 13 and the intermediate member 16 disposed on the support member 13 includes a sandwiching member 17 that sandwiches the X-ray detection panel 12, an envelope 18 that accommodates the sandwiching member 17, and the like.

X線検出パネル12は、光電変換基板としての光検出器21を有し、この光検出器21における放射線としてのX線の入射面側である一面に、X線を光検出器21で検出可能な光に変換する蛍光体層22が直接形成されている。   The X-ray detection panel 12 has a photodetector 21 as a photoelectric conversion substrate, and X-rays can be detected by the photodetector 21 on one surface of the photodetector 21 on the incident surface side of X-rays as radiation. The phosphor layer 22 that converts light into direct light is directly formed.

光検出器21は、ガラス基板23を有し、このガラス基板23の一面でX線検出の有効領域a内には、2次元状に配置される複数の画素に対応して、CsIを用いた複数のフォトセンサおよびTFTが2次元に配置されていて、光を電気信号に変換する光電変換素子部24が形成されている。また、ガラス基板23の一面には光電変換素子部24に接続された配線部25が形成されているとともに、X線検出の有効領域外bであってガラス基板23の一面の周辺部には配線部25と接続された電荷取出部(電極パッド部)26が形成されている。   The photodetector 21 has a glass substrate 23, and CsI is used in correspondence with a plurality of pixels arranged in a two-dimensional manner in an effective region a of X-ray detection on one surface of the glass substrate 23. A plurality of photosensors and TFTs are two-dimensionally arranged, and a photoelectric conversion element unit 24 that converts light into an electric signal is formed. Further, a wiring portion 25 connected to the photoelectric conversion element portion 24 is formed on one surface of the glass substrate 23, and wiring is provided on the peripheral portion of the one surface of the glass substrate 23, which is outside the effective region of X-ray detection. A charge extraction portion (electrode pad portion) 26 connected to the portion 25 is formed.

また、支持部材13は、例えば金属製で、四角形の板状に形成され、組立時において外囲器18に連結固定される。   The support member 13 is made of, for example, metal and is formed in a square plate shape, and is connected and fixed to the envelope 18 at the time of assembly.

また、回路基板14は、X線検出パネル12を制御する図示しない制御基板と、フレキシブル回路基板15からのアナログ信号を受信、処理およびデジタル信号への変換の少なくとも1つの機能を有するアナログ回路基板31と、他の基板の制御およびX線検出装置11の外部との通信の少なくとも1つの機能を有する図示しないデジタル回路基板と、他の基板に電源を供給するための図示しない電源回路基板と、などを備えている。この回路基板14は、支持部材13の他面に対して複数のスペーサ32によって離間した状態に支持されている。   The circuit board 14 includes a control board (not shown) for controlling the X-ray detection panel 12 and an analog circuit board 31 having at least one function of receiving, processing, and converting into a digital signal an analog signal from the flexible circuit board 15. A digital circuit board (not shown) having at least one function of control of other boards and communication with the outside of the X-ray detection device 11, a power supply circuit board (not shown) for supplying power to the other boards, etc. It has. The circuit board 14 is supported in a state separated from the other surface of the support member 13 by a plurality of spacers 32.

また、フレキシブル回路基板15は、フレキシブル基板41、およびこのフレキシブル基板41の一端に接続されたIC搭載基板42を備え、IC搭載基板42には検出用集積回路43が実装されている。フレキシブル基板41の他端は、X線検出パネル12の電荷取出部26上に異方導電性接着剤44を介して配置され、熱圧着により張り合わされている。また、IC搭載基板42の一端にはコネクタ45が設けられ、このコネクタ45によってIC搭載基板42がアナログ回路基板31に接続されている。   The flexible circuit board 15 includes a flexible board 41 and an IC mounting board 42 connected to one end of the flexible board 41, and an integrated circuit 43 for detection is mounted on the IC mounting board 42. The other end of the flexible substrate 41 is disposed on the charge extraction portion 26 of the X-ray detection panel 12 via an anisotropic conductive adhesive 44 and bonded by thermocompression bonding. A connector 45 is provided at one end of the IC mounting board 42, and the IC mounting board 42 is connected to the analog circuit board 31 by this connector 45.

また、中間部材16は、例えば、熱可塑性ゲル材料などの樹脂材料や、ゴム材料など、弾性を有するとともに防振性を有する材料で、シート状に形成され、X線検出パネル12の有効領域aより大きい面積に形成されているものであって、X線検出パネル12のガラス基板23の外形と同形状および同面積に形成されている。   The intermediate member 16 is made of a material having elasticity and vibration resistance, such as a resin material such as a thermoplastic gel material or a rubber material. The intermediate member 16 is formed in a sheet shape and has an effective area a of the X-ray detection panel 12. It is formed in a larger area and has the same shape and the same area as the outer shape of the glass substrate 23 of the X-ray detection panel 12.

また、挟持部材17は、例えば、熱可塑性ゲル材料などの樹脂材料や、ゴム材料など、弾性を有するとともに防振性を有し、さらには熱伝導性を有する材料で、X線検出パネル12の有効領域aより外側の周辺部である有効領域外bに当接可能とする四角形の枠状に形成され、組立時において支持部材13と外囲器18との間にX線検出パネル12および中間部材16とともに挟み込まれて圧縮された状態で保持されている。挟持部材17がX線検出パネル12に当接する場所は、X線検出パネル12の有効領域外bであって、電荷取出部26上やこの電荷取出部26に接続されたフレキシブル回路基板15上としている。   The sandwiching member 17 is made of a material having elasticity, vibration proofing, and heat conductivity, such as a resin material such as a thermoplastic gel material, or a rubber material. It is formed in the shape of a quadrangular frame that can come into contact with the outside b of the effective area, which is the peripheral part outside the effective area a, and the X-ray detection panel 12 and the intermediate between the support member 13 and the envelope 18 during assembly. It is held together with the member 16 in a compressed state. The place where the clamping member 17 abuts on the X-ray detection panel 12 is outside the effective area of the X-ray detection panel 12 and is on the charge extraction unit 26 or on the flexible circuit board 15 connected to the charge extraction unit 26. Yes.

また、外囲器18は、X線検出パネル12のX線の入射面側を開口した箱状の筐体51と、X線検出パネル12の有効領域aに対応した開口部52を有していて筐体51の開口側に取り付けられる枠状のカバー53と、このカバー53の開口部52を覆うX線透過性を有する入射窓54とを備えている。筐体51の外部には、この筐体51に伝わった熱を冷却する例えばファンなどの図示しない冷却機構が配置されている。カバー53には、挟持部材17を位置決め保持する突起などの位置決め部を設けてもよいし、挟持部材17を接着剤などで接着固定してもよい。   The envelope 18 also has a box-shaped casing 51 that opens the X-ray incident surface side of the X-ray detection panel 12 and an opening 52 that corresponds to the effective area a of the X-ray detection panel 12. A frame-like cover 53 attached to the opening side of the housing 51, and an X-ray transmissive entrance window 54 covering the opening 52 of the cover 53. Outside the casing 51, a cooling mechanism (not shown) such as a fan for cooling the heat transmitted to the casing 51 is disposed. The cover 53 may be provided with a positioning portion such as a protrusion for positioning and holding the clamping member 17, or the clamping member 17 may be bonded and fixed with an adhesive or the like.

そして、X線検出装置11の組立時において、筐体51内に固定された支持部材13に中間部材を介してX線検出パネル12を配置し、このX線検出パネル12の有効領域外bの周辺部に挟持部材17を当接させて筐体51にカバー53を取り付けることにより、支持部材13とカバー53との間に中間部材16、X線検出パネル12および挟持部材17を挟み込む。これにより、例えば熱可塑性ゲル材料で形成されている挟持部材17および中間部材16がそれぞれ圧縮されてその反発力が発生し、この反発力によってX線検出パネル12を支持部材13に押圧した状態で挟持する。   When the X-ray detection device 11 is assembled, the X-ray detection panel 12 is disposed on the support member 13 fixed in the casing 51 via an intermediate member, and the X-ray detection panel 12 is located outside the effective region b. The intermediate member 16, the X-ray detection panel 12, and the sandwiching member 17 are sandwiched between the support member 13 and the cover 53 by attaching the cover 53 to the casing 51 by bringing the sandwiching member 17 into contact with the peripheral portion. Thereby, for example, the sandwiching member 17 and the intermediate member 16 formed of a thermoplastic gel material are compressed to generate a repulsive force, and the X-ray detection panel 12 is pressed against the support member 13 by the repulsive force. Hold it.

このように、支持部材13に配置されたX線検出パネル12の有効領域外bの周辺部を、支持部材13と挟持部材17との間に挟持するため、X線検出パネル12のX線検出に影響が発生することなく、X線検出パネル12を着脱可能に固定できる。そのため、筐体51からカバー53を外せば、X線検出パネル12の挟持を解除し、そのX線検出パネル12を支持部材13から容易に取り外すことができる。   In this way, the X-ray detection panel 12 detects X-rays in order to sandwich the peripheral portion outside the effective region b of the X-ray detection panel 12 disposed on the support member 13 between the support member 13 and the sandwiching member 17. The X-ray detection panel 12 can be detachably fixed without causing an influence on the above. Therefore, if the cover 53 is removed from the casing 51, the holding of the X-ray detection panel 12 can be released, and the X-ray detection panel 12 can be easily detached from the support member 13.

また、支持部材13とX線検出パネル12との間に中間部材16を配置しているため、この中間部材16と挟持部材17との間でX線検出パネル12を挟持でき、X線検出パネル12の防振機能を得ることができる。   Further, since the intermediate member 16 is disposed between the support member 13 and the X-ray detection panel 12, the X-ray detection panel 12 can be held between the intermediate member 16 and the holding member 17, and the X-ray detection panel can be held. 12 anti-vibration functions can be obtained.

また、挟持部材17および中間部材16を、熱可塑性ゲル材料で形成すれば、X線検出パネル12の防振性を向上できる。   Further, if the sandwiching member 17 and the intermediate member 16 are formed of a thermoplastic gel material, the vibration isolating property of the X-ray detection panel 12 can be improved.

また、挟持部材17は、フレキシブル回路基板15の接続部分をX線検出パネル12に対して押圧するため、フレキシブル回路基板15がX線検出パネル12から剥がれるのを防止でき、接続の信頼性を向上できる。   In addition, since the clamping member 17 presses the connection portion of the flexible circuit board 15 against the X-ray detection panel 12, the flexible circuit board 15 can be prevented from peeling off from the X-ray detection panel 12, and the connection reliability is improved. it can.

また、挟持部材17は、外囲器18に接触されているため、X線検出パネル12の熱を挟持部材17から外囲器18に伝導して放熱させることができ、X線検出パネル12の動作温度が高くなるのを低減でき、画像むらの発生を抑制できる。   Further, since the sandwiching member 17 is in contact with the envelope 18, the heat of the X-ray detection panel 12 can be conducted from the sandwiching member 17 to the envelope 18 to be dissipated, and the X-ray detection panel 12 The increase in operating temperature can be reduced, and the occurrence of image unevenness can be suppressed.

また、中間部材16は、X線検出パネル12の有効領域aより大きい面積を有しているため、確実に支持できる。   Further, since the intermediate member 16 has an area larger than the effective area a of the X-ray detection panel 12, it can be reliably supported.

なお、挟持部材17は、外囲器18のカバー53との接触によってX線検出パネル12を挟持するようにしたが、これに限らず、筐体51や入射窓54との接触によってX線検出パネル12を挟持するようにしてもよい。   The clamping member 17 clamps the X-ray detection panel 12 by contact with the cover 53 of the envelope 18. However, the present invention is not limited to this, and X-ray detection is performed by contact with the housing 51 and the incident window 54. The panel 12 may be sandwiched.

本発明の一実施の形態を示す放射線検出装置としてのX線検出装置の一部の断面図である。1 is a partial cross-sectional view of an X-ray detection apparatus as a radiation detection apparatus showing an embodiment of the present invention. 同上X線検出装置のX線検出パネルの正面図である。It is a front view of the X-ray detection panel of an X-ray detection apparatus same as the above. 同上X線検出装置のX線検出パネルの一部の断面図である。It is sectional drawing of a part of X-ray detection panel of an X-ray detection apparatus same as the above.

符号の説明Explanation of symbols

11 放射線検出装置としてのX線検出装置
12 放射線検出パネルとしてのX線検出パネル
13 支持部材
14 回路基板
15 フレキシブル回路基板
16 中間部材
17 挟持部材
18 外囲器
a 有効領域
b 有効領域外
11 X-ray detector as a radiation detector
12 X-ray detection panel as a radiation detection panel
13 Support member
14 Circuit board
15 Flexible circuit board
16 Intermediate member
17 Holding member
18 Enclosure a Effective area b Outside effective area

Claims (6)

一面の中央部に放射線を検出する有効領域が形成されている放射線検出パネルと、
この放射線検出パネルの他面を配置する支持部材と、
この支持部材に配置された前記放射線検出パネルの有効領域外の周辺部を前記支持部材との間に挟持する挟持部材と
を具備していることを特徴とする放射線検出装置。
A radiation detection panel in which an effective area for detecting radiation is formed in the center of one surface;
A support member for disposing the other surface of the radiation detection panel;
A radiation detection apparatus comprising: a holding member that holds a peripheral portion outside the effective area of the radiation detection panel disposed on the support member between the support member and the support member.
前記支持部材と前記放射線検出パネルの他面との間に配置された中間部材を具備している
ことを特徴とする請求項1に記載の放射線検出装置。
The radiation detection apparatus according to claim 1, further comprising an intermediate member disposed between the support member and the other surface of the radiation detection panel.
前記挟持部材および前記中間部材は、熱可塑性ゲル材料によって形成されている
ことを特徴とする請求項2に記載の放射線検出装置。
The radiation detecting apparatus according to claim 2, wherein the sandwiching member and the intermediate member are made of a thermoplastic gel material.
前記放射線検出パネルを駆動する回路基板と、
前記放射線検出パネルに有効領域外の周辺部にて接続され、前記放射線検出パネルと前記回路基板とを電気的に接続するフレキシブル回路基板とを具備し、
前記挟持部材は、前記フレキシブル回路基板の接続部分を前記放射線検出パネルに対して押圧する
ことを特徴とする請求項1ないし3いずれかに記載の放射線検出装置。
A circuit board for driving the radiation detection panel;
A flexible circuit board connected to the radiation detection panel at a peripheral portion outside an effective area, and electrically connecting the radiation detection panel and the circuit board;
The radiation detection apparatus according to claim 1, wherein the clamping member presses a connection portion of the flexible circuit board against the radiation detection panel.
前記放射線検出パネルを収容する外囲器を具備し、
前記挟持部材は、前記外囲器に接触されている
ことを特徴とする請求項1ないし4いずれかに記載の放射線検出装置。
An envelope containing the radiation detection panel;
The radiation detection apparatus according to claim 1, wherein the clamping member is in contact with the envelope.
前記中間部材は、前記放射線検出パネルの有効領域より大きい面積を有している
ことを特徴とする請求項1ないし5いずれかに記載の放射線検出装置。
The radiation detection apparatus according to claim 1, wherein the intermediate member has an area larger than an effective area of the radiation detection panel.
JP2008325757A 2008-12-22 2008-12-22 Radiation detection apparatus Pending JP2010145349A (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012095708A (en) * 2010-10-29 2012-05-24 Canon Inc Radiation imaging apparatus
JP2012231825A (en) * 2011-04-28 2012-11-29 Fujifilm Corp Radiation imaging apparatus
WO2016009815A1 (en) * 2014-07-14 2016-01-21 株式会社 東芝 Radiation detector and scintillator panel
JP2016033516A (en) * 2015-10-20 2016-03-10 富士フイルム株式会社 Cassette
US9535165B2 (en) 2012-09-25 2017-01-03 Toshiba Electron Tubes & Devices Co., Ltd. Radiation detection device
JP2017026327A (en) * 2015-07-15 2017-02-02 キヤノン株式会社 Radioactive ray detection device and radioactive ray imaging system
WO2020080232A1 (en) 2018-10-18 2020-04-23 浜松ホトニクス株式会社 Radiation imaging device
WO2020080233A1 (en) 2018-10-18 2020-04-23 浜松ホトニクス株式会社 Radiation imaging device, production method for radiation imaging device, and repair method for radiation imaging device
WO2020080231A1 (en) 2018-10-18 2020-04-23 浜松ホトニクス株式会社 Radiation imaging device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001063321A1 (en) * 2000-02-25 2001-08-30 Hamamatsu Photonics K.K. X-ray imaging device and method of manufacture thereof
JP2002181943A (en) * 2000-12-18 2002-06-26 Canon Inc X-ray image pickup device
JP2003279654A (en) * 2002-03-26 2003-10-02 Canon Inc Fluorescent plate
JP2004061116A (en) * 2002-07-24 2004-02-26 Canon Inc Radiation detector and system
JP2005000370A (en) * 2003-06-11 2005-01-06 Canon Inc Roentgenographic equipment
JP2008510960A (en) * 2004-08-20 2008-04-10 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Microelectronic system with protective layer

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001063321A1 (en) * 2000-02-25 2001-08-30 Hamamatsu Photonics K.K. X-ray imaging device and method of manufacture thereof
JP2002181943A (en) * 2000-12-18 2002-06-26 Canon Inc X-ray image pickup device
JP2003279654A (en) * 2002-03-26 2003-10-02 Canon Inc Fluorescent plate
JP2004061116A (en) * 2002-07-24 2004-02-26 Canon Inc Radiation detector and system
JP2005000370A (en) * 2003-06-11 2005-01-06 Canon Inc Roentgenographic equipment
JP2008510960A (en) * 2004-08-20 2008-04-10 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Microelectronic system with protective layer

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9046617B2 (en) 2010-10-29 2015-06-02 Canon Kabushiki Kaisha Radiation imaging apparatus
JP2012095708A (en) * 2010-10-29 2012-05-24 Canon Inc Radiation imaging apparatus
JP2012231825A (en) * 2011-04-28 2012-11-29 Fujifilm Corp Radiation imaging apparatus
US9535165B2 (en) 2012-09-25 2017-01-03 Toshiba Electron Tubes & Devices Co., Ltd. Radiation detection device
KR101903268B1 (en) 2014-07-14 2018-10-01 도시바 덴시칸 디바이스 가부시키가이샤 Radiation detector and scintillator panel
WO2016009815A1 (en) * 2014-07-14 2016-01-21 株式会社 東芝 Radiation detector and scintillator panel
CN106796299A (en) * 2014-07-14 2017-05-31 东芝电子管器件株式会社 Radiation detector and scintillator panel
JP2017026327A (en) * 2015-07-15 2017-02-02 キヤノン株式会社 Radioactive ray detection device and radioactive ray imaging system
JP2016033516A (en) * 2015-10-20 2016-03-10 富士フイルム株式会社 Cassette
WO2020080232A1 (en) 2018-10-18 2020-04-23 浜松ホトニクス株式会社 Radiation imaging device
WO2020080233A1 (en) 2018-10-18 2020-04-23 浜松ホトニクス株式会社 Radiation imaging device, production method for radiation imaging device, and repair method for radiation imaging device
WO2020080231A1 (en) 2018-10-18 2020-04-23 浜松ホトニクス株式会社 Radiation imaging device
KR20210076092A (en) 2018-10-18 2021-06-23 하마마츠 포토닉스 가부시키가이샤 radiation imaging device
KR20210076085A (en) 2018-10-18 2021-06-23 하마마츠 포토닉스 가부시키가이샤 radiation imaging device
KR20210076091A (en) 2018-10-18 2021-06-23 하마마츠 포토닉스 가부시키가이샤 A radiation imaging device, a manufacturing method of the radiation imaging device, and a repair method of the radiation imaging device
US11520061B2 (en) 2018-10-18 2022-12-06 Hamamatsu Photonics K.K. Radiation imaging device
EP4215950A1 (en) 2018-10-18 2023-07-26 Hamamatsu Photonics K.K. Radiation imaging device
US11860323B2 (en) 2018-10-18 2024-01-02 Hamamatsu Photonics K.K. Radiation imaging device

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