JP2010135105A - Cathode supporting structure in pierce electron gun - Google Patents

Cathode supporting structure in pierce electron gun Download PDF

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JP2010135105A
JP2010135105A JP2008307562A JP2008307562A JP2010135105A JP 2010135105 A JP2010135105 A JP 2010135105A JP 2008307562 A JP2008307562 A JP 2008307562A JP 2008307562 A JP2008307562 A JP 2008307562A JP 2010135105 A JP2010135105 A JP 2010135105A
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cathode
support rod
axis
support
straight line
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Toshio Kusumoto
淑郎 楠本
Masaya Watanabe
将也 渡辺
Kenichi Iwata
健一 岩田
Kokuka Chin
沈　　国華
Toru Satake
徹 佐竹
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Ulvac Inc
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Ulvac Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a cathode support structure in which a disc-shaped cathode of a pierce electron gun is supported on an outer circumferential ring larger in diameter than the cathode via three or more support rods, which prevents support rod buckling caused by the thermal expansion of the cathode and the support rods and effectively suppresses heat release from the cathode. <P>SOLUTION: In the cathode support structure, each of the support rods 22 is arranged between the cathode 2 and the outer circumferential ring 21 so that the axis of the support rod 22 is inclined toward one direction of the circumference of the cathode 2 relative to a straight line L that links the intersection of the axis of the support rod 22 and the inner circumferential surface of the circumferential ring 21 to the center of the cathode 2, and δ is identical in each support rod 22 assuming a distance between two straight lines is eccentricity δ when projecting a straight line matching the axis of the support rod 22 and a straight line being parallel with the straight line to passing through the center of the cathode 2 onto a plane perpendicular to the axis of the cathode 2. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、ピアス式電子銃の円盤状のカソードを、カソードより大径の外周リングに３本以上の支持ロッドを介して支持させるカソード支持構造に関する。   The present invention relates to a cathode support structure in which a disk-like cathode of a piercing electron gun is supported on an outer peripheral ring having a diameter larger than that of the cathode via three or more support rods.

ピアス式電子銃は、蒸着装置や溶解炉や熱処理炉の加熱源として幅広く使われている。ピアス式電子銃の主要な構成要素は、図１に示す如く、フィラメント１、カソード２、ウエルネルト３及びアノード４である(例えば、特許文献１参照)。カソード２は、円盤状であって、裏面からフィラメント１により加熱され、表面から熱電子を放出する。ウエルネルト３は、カソード２と同電位で、アノード４との間に電子がアノード４の中心に向かうような電界を形成する。アノード４はカソード２に対し正の電位にあり、カソード２から放出される熱電子を加速する。そして、アノード４の中心に形成した孔４ａを電子ビームが通過する。   Pierce-type electron guns are widely used as heating sources for vapor deposition apparatuses, melting furnaces, and heat treatment furnaces. As shown in FIG. 1, main components of the pierce-type electron gun are a filament 1, a cathode 2, a Wehnelt 3 and an anode 4 (see, for example, Patent Document 1). The cathode 2 has a disk shape and is heated by the filament 1 from the back surface and emits thermoelectrons from the surface. The Wehnelt 3 has the same potential as the cathode 2 and forms an electric field between the anode 4 and the electrons toward the center of the anode 4. The anode 4 is at a positive potential with respect to the cathode 2 and accelerates the thermal electrons emitted from the cathode 2. Then, the electron beam passes through the hole 4 a formed at the center of the anode 4.

従来、このようなピアス式電子銃におけるカソード支持構造として、図２に示すものが知られている。このものでは、カソード２を、カソード２より大径の外周リング２１に４本の支持ロッド２２を介して支持させている。より詳細には、カソード２に、外周面に開口する径方向の凹孔２３を９０°間隔で４個形成するとともに、外周リング２１に、径方向に貫通する透孔２４を９０°間隔で４個形成し、各支持ロッド２２を各透孔２４に挿通して、その先端部を各凹孔２３に挿入することにより、カソード２を外周リング２１に支持させている。   2. Description of the Related Art Conventionally, as shown in FIG. 2, a cathode support structure in such a pierce type electron gun is known. In this device, the cathode 2 is supported on an outer peripheral ring 21 having a diameter larger than that of the cathode 2 via four support rods 22. More specifically, the cathode 2 is formed with four radial concave holes 23 opened on the outer peripheral surface at intervals of 90 °, and the outer peripheral ring 21 has four through holes 24 penetrating in the radial direction at intervals of 90 °. The cathode 2 is supported by the outer peripheral ring 21 by forming the support rods 22 and inserting the support rods 22 into the through holes 24 and inserting the tips of the support rods 22 into the concave holes 23.

ここで、外周リング２１はウエルネルト３に接触しており、カソード２がウエルネルト３と同電位に保たれる。また、ウエルネルト３は、図外の支持部品を介して最終的には冷却機構と連結されている。そのため、カソード２からウエルネルト３への支持ロッド２２及び外周リング２１を介しての熱引けを生じてしまう。この熱引けを抑制するため、支持ロッド２２として断面積の小さなものを用いている。   Here, the outer peripheral ring 21 is in contact with the Wehnelt 3, and the cathode 2 is kept at the same potential as the Wehnelt 3. In addition, the Wehnelt 3 is finally connected to a cooling mechanism via a support part (not shown). For this reason, heat shrinkage from the cathode 2 to the Wehnelt 3 through the support rod 22 and the outer peripheral ring 21 occurs. In order to suppress this heat shrinkage, a support rod 22 having a small cross-sectional area is used.

然し、カソード２からウエルネルト３への熱引けを抑制すると、カソード２が例えば２５００℃に加熱されたときに外周リング２１の温度が例えば１０００℃になり、カソード２の熱膨張の方が外周リング２１の熱膨張より大きくなって、カソード２と外周リング２１との間の径方向距離が短くなる。しかも、支持ロッド２２自体が熱膨張するため、支持ロッド２２は圧縮応力を受ける。圧縮応力がある限界を超えると、支持ロッド２２が座屈し、この座屈でカソード２が不規則に変位してしまう。そして、カソード２の変位により電子ビームが本来の軌道を逸脱し、アノードや電子銃内壁に電子ビームが衝突して、電子銃に深刻な損傷を与えてしまう。   However, if the heat sink from the cathode 2 to the Wehnelt 3 is suppressed, the temperature of the outer ring 21 becomes, for example, 1000 ° C. when the cathode 2 is heated to, for example, 2500 ° C., and the thermal expansion of the cathode 2 is the outer ring 21. And the radial distance between the cathode 2 and the outer ring 21 is shortened. In addition, since the support rod 22 itself thermally expands, the support rod 22 is subjected to compressive stress. When the compressive stress exceeds a certain limit, the support rod 22 buckles, and the cathode 2 is irregularly displaced by this buckling. The electron beam deviates from the original trajectory due to the displacement of the cathode 2, and the electron beam collides with the anode and the inner wall of the electron gun, causing serious damage to the electron gun.

そこで、従来は、座屈を防止するために、透孔２４の孔径を支持ロッド２２の径に対してかなり緩めの嵌め合い公差を持つように設定し、支持ロッド２２及びカソード２の熱膨張により支持ロッド２２が外周リング２１に対し動くようにしている。然し、電気的な接触は確保する必要があるため、最も融点の高いタングステンで支持ロッド２２を形成しても、２５００℃の高温では支持ロッド２２が孔内面の接触個所で外周リング２１に溶着してしまう。そのため、座屈を完全に防止することはできない。
ＷＯ−２００８０／０５０６７０−Ａ１ Therefore, conventionally, in order to prevent buckling, the hole diameter of the through hole 24 is set so as to have a considerably loose fitting tolerance with respect to the diameter of the support rod 22, and the thermal expansion of the support rod 22 and the cathode 2 is performed. The support rod 22 moves with respect to the outer ring 21. However, since it is necessary to ensure electrical contact, even if the support rod 22 is formed of tungsten having the highest melting point, the support rod 22 is welded to the outer ring 21 at a contact point on the inner surface of the hole at a high temperature of 2500 ° C. End up. Therefore, buckling cannot be prevented completely.
WO-20080 / 050670-A1

本発明は、以上の点に鑑み、支持ロッドの座屈を防止できると共に、カソードからの熱引けを効果的に抑制できるようにしたピアス式電子銃におけるカソード支持構造を提供することをその課題としている。   In view of the above points, it is an object of the present invention to provide a cathode support structure in a pierce-type electron gun capable of preventing buckling of a support rod and effectively suppressing thermal contraction from the cathode. Yes.

上記課題を解決するために、本発明は、ピアス式電子銃の円盤状のカソードを、カソードより大径の外周リングに３本以上の支持ロッドを介して支持させるカソード支持構造において、各支持ロッドは、カソードと外周リングとの間に、支持ロッドの軸線が該軸線と外周リングの内周面との交点とカソードの中心とを結ぶ直線に対しカソードの周方向一方に傾むくように配置されることを特徴とする。   In order to solve the above problems, the present invention provides a cathode support structure in which a disc-shaped cathode of a piercing electron gun is supported on an outer peripheral ring having a diameter larger than that of the cathode via three or more support rods. Is arranged between the cathode and the outer ring so that the axis of the support rod is inclined to one side in the circumferential direction of the cathode with respect to a straight line connecting the intersection of the axis and the inner peripheral surface of the outer ring and the center of the cathode. It is characterized by that.

本発明によれば、カソード及び支持ロッドの熱膨張によりカソードが周方向一方に回転する。そして、熱膨張がカソードの回転で吸収されるため、支持ロッドは圧縮応力を殆ど受けず、座屈を生じない。また、座屈の心配がないため、支持ロッドを上記従来例のものより細くすることができ、更に、支持ロッドの軸線をカソードの周方向に傾斜させることで、カソードと外周リングとの間に位置するロッド部分の長さが長くなり、カソードからの熱引けが効果的に抑制される。   According to the present invention, the cathode rotates in the circumferential direction by thermal expansion of the cathode and the support rod. Since the thermal expansion is absorbed by the rotation of the cathode, the support rod is hardly subjected to compressive stress and does not buckle. In addition, since there is no risk of buckling, the support rod can be made thinner than that of the above-mentioned conventional example, and further, the axis of the support rod is inclined in the circumferential direction of the cathode, so that it is between the cathode and the outer ring. The length of the rod part located becomes long, and the heat sink from a cathode is suppressed effectively.

また、本発明においては、支持ロッドの軸線に合致する直線とこの直線に平行でカソードの中心を通る直線とをカソードの軸線に直交する平面に射影したときの２直線間の距離を偏心量として、全ての支持ロッドが等しい偏心量を持つことが望ましい。これによれば、熱膨張でカソードが回転しても中心位置は変化せず、電子ビームの軌道を正規位置に維持できる。   In the present invention, the distance between the two straight lines when the straight line that matches the axis of the support rod and the straight line that is parallel to the straight line and passes through the center of the cathode is projected onto a plane that is orthogonal to the axis of the cathode. It is desirable that all the support rods have the same amount of eccentricity. According to this, even if the cathode rotates due to thermal expansion, the center position does not change, and the trajectory of the electron beam can be maintained at the normal position.

更に、本発明において、各支持ロッドは、該各支持ロッドの軸線がカソードの軸線に直交する平面に含まれるように配置されることが望ましい。これによれば、支持ロッドの熱膨張でカソードが軸方向変位したり傾くことを防止できる。   Furthermore, in the present invention, each support rod is preferably arranged so that the axis of each support rod is included in a plane perpendicular to the axis of the cathode. According to this, it is possible to prevent the cathode from being axially displaced or inclined due to the thermal expansion of the support rod.

また、本発明においては、外周リングに対し支持ロッドが動かなくても、支持ロッドの座屈を生じない。そのため、各支持ロッドを外周リングに固定して、電気的な接触をしっかりと確保することができる。また、支持ロッドを外周リングに固定すれば、支持ロッドを介しての外周リングへの熱伝導、即ち、外周リングの温度分布が一義的に決まり、外周リングの設計がしやすくなる。   In the present invention, even if the support rod does not move relative to the outer ring, the support rod does not buckle. Therefore, each support rod can be fixed to the outer ring to ensure electrical contact. If the support rod is fixed to the outer ring, the heat conduction to the outer ring via the support rod, that is, the temperature distribution of the outer ring is uniquely determined, and the design of the outer ring is facilitated.

図３は、図１に示すピアス式電子銃に適用される本発明の第１実施形態のカソード支持構造を示している。尚、図２に示した従来例と同様の部材、部位には上記と同一の符号を付している。   FIG. 3 shows a cathode support structure according to the first embodiment of the present invention applied to the piercing electron gun shown in FIG. In addition, the same code | symbol as the above is attached | subjected to the member and site | part similar to the prior art example shown in FIG.

第１実施形態では、円盤状のカソード２がそれより大径の外周リング２１に従来例と同様に４本の支持ロッド２２を介して支持されているが、各支持ロッド２２の配置が従来例とは異なる。即ち、第１実施形態では、各支持ロッド２２を、カソード２と外周リング２１との間に、支持ロッド２２の軸線が該軸線と外周リング２１の内周面との交点とカソード２の中心とを結ぶ直線Ｌに対しカソード２の周方向一方(図３(ａ)の反時計方向)に傾むくように配置されている。   In the first embodiment, the disc-shaped cathode 2 is supported on the outer peripheral ring 21 having a larger diameter via four support rods 22 as in the conventional example, but the arrangement of each support rod 22 is the conventional example. Is different. That is, in the first embodiment, each support rod 22 is arranged between the cathode 2 and the outer peripheral ring 21, and the axis of the support rod 22 is at the intersection of the axis and the inner peripheral surface of the outer peripheral ring 21 and the center of the cathode 2. Are arranged so as to be inclined in one circumferential direction of the cathode 2 (counterclockwise in FIG. 3A) with respect to a straight line L connecting the two.

尚、各支持ロッド２２は、外周リング２１に形成した各透孔２４に挿通され、その先端部がカソード２に形成した各凹孔２３に挿入されている。そして、支持ロッド２２の軸線が上記直線Ｌに対しカソード２の周方向一方に傾くように、凹孔２３及び透孔２４をカソード２及び外周リング２１の径方向に対し傾斜させて形成している。更に、外周リング２１の外周面に、透孔２４に平行な座繰り面２５を形成して、座繰り面２５に透孔２４に達するねじ孔を形成している。そして、ねじ孔にビス２６を螺入して、支持ロッド２２を外周リング２１に固定している。   Each support rod 22 is inserted into each through hole 24 formed in the outer peripheral ring 21, and its tip is inserted into each concave hole 23 formed in the cathode 2. The concave hole 23 and the through hole 24 are formed to be inclined with respect to the radial direction of the cathode 2 and the outer ring 21 so that the axis of the support rod 22 is inclined to one side in the circumferential direction of the cathode 2 with respect to the straight line L. . Further, a counterbored surface 25 parallel to the through hole 24 is formed on the outer peripheral surface of the outer peripheral ring 21, and a screw hole reaching the through hole 24 is formed in the counterbored surface 25. A screw 26 is screwed into the screw hole to fix the support rod 22 to the outer ring 21.

また、支持ロッド２２の軸線に合致する直線とこの直線に平行でカソード２の中心を通る直線とをカソード２の軸線に直交する平面に射影したときの２直線間の距離を偏心量δとして、全ての支持ロッド２２の偏心量δを互いに等しくしている。また、各支持ロッド２２は、図３(ｂ)に示す如く、各支持ロッド２２の軸線がカソード２の軸線に直交する平面に含まれるように配置されている。   Further, the distance between the two straight lines when a straight line that matches the axis of the support rod 22 and a straight line that passes through the center of the cathode 2 and is parallel to the straight line is projected onto a plane perpendicular to the axis of the cathode 2 is defined as an eccentricity δ. The eccentric amounts δ of all the support rods 22 are made equal to each other. Each support rod 22 is arranged so that the axis of each support rod 22 is included in a plane perpendicular to the axis of the cathode 2 as shown in FIG.

以上のカソード支持構造によれば、カソード２及び支持ロッド２２が熱膨張したとき、図４に示す如く、カソード２が周方向一方(反時計方向)に回転する。ここで、カソード２の外周面と支持ロッド２２の軸線との交点における回転角をΔθ、支持ロッド２２のカソード２と外周リング２１との間の部分の熱膨張による伸びをａとして、Δθ≒ａ／δになる。そして、δは全ての支持ロッド２２で等しいため、Δθも全て等しくなり、カソード２が回転しても中心位置は変化しない。更に、各支持ロッド２２の軸線がカソード２の軸線に直交する平面に含まれるため、支持ロッド２２の熱膨張でカソード２が軸方向変位したり傾くことを防止できる。その結果、電子ビームの軌道は正規位置に維持される。   According to the above cathode support structure, when the cathode 2 and the support rod 22 are thermally expanded, the cathode 2 rotates in one circumferential direction (counterclockwise) as shown in FIG. Here, assuming that the rotation angle at the intersection of the outer peripheral surface of the cathode 2 and the axis of the support rod 22 is Δθ, and the elongation due to thermal expansion of the portion between the cathode 2 of the support rod 22 and the outer ring 21 is a, Δθ≈a / Δ. Since δ is the same for all the support rods 22, Δθ is all the same, and the center position does not change even when the cathode 2 rotates. Further, since the axis of each support rod 22 is included in a plane orthogonal to the axis of the cathode 2, it is possible to prevent the cathode 2 from being axially displaced or inclined due to thermal expansion of the support rod 22. As a result, the trajectory of the electron beam is maintained at the normal position.

また、カソード２の回転で熱膨張が吸収されるため、支持ロッド２２は圧縮応力を殆ど受けず、座屈を生じない。このことを確かめるため、コンピュータによる座屈解析を行った。計算条件は、カソード２及び支持ロッド２２の材質をタングステン、外周リング２１の材質をモリブデン、カソード２の径をφ２０ｍｍ、外周リング２１の内径と外径を夫々φ３６ｍｍ、φ５０ｍｍ、支持ロッド２２の径をφ１．２ｍｍ、カソード２の温度を２５００℃、外周リング２１の温度を１０００℃とした。そして、偏心量δが夫々０、１ｍｍ、３ｍｍ、５ｍｍ、７ｍｍ、９ｍｍである場合、即ち、カソード２の半径をｒ(＝１０ｍｍ)として、δ／ｒが０、０．１、０．３、０．５、０．７、０．９である場合の支持ロッド２２が受ける圧縮応力を求めた。   Further, since the thermal expansion is absorbed by the rotation of the cathode 2, the support rod 22 is hardly subjected to compressive stress and does not buckle. In order to confirm this, a buckling analysis by a computer was performed. The calculation condition is that the material of the cathode 2 and the support rod 22 is tungsten, the material of the outer ring 21 is molybdenum, the diameter of the cathode 2 is φ20 mm, the inner and outer diameters of the outer ring 21 are φ36 mm, φ50 mm, and the diameter of the support rod 22, respectively. φ1.2 mm, the temperature of the cathode 2 was 2500 ° C., and the temperature of the outer ring 21 was 1000 ° C. When the eccentricity δ is 0, 1 mm, 3 mm, 5 mm, 7 mm, and 9 mm, respectively, that is, when the radius of the cathode 2 is r (= 10 mm), δ / r is 0, 0.1, 0.3, The compressive stress which the support rod 22 receives in the case of 0.5, 0.7 and 0.9 was determined.

座屈を生じる最小応力を支持ロッド２２が受ける圧縮応力で除した比は、δ／ｒ＝０の場合に０．９２、δ／ｒ＝０．１の場合に１．１３、δ／ｒ＝０．３の場合に２．９２、δ／ｒ＝０．５の場合に６．６１、δ／ｒ＝０．７の場合に１３．４、δ／ｒ＝０．９の場合に２５．４になった。この比が１より大きければ座屈は生じない。従って、偏心量δを０．１ｒ以上にすることで座屈を防止できることが分かる。   The ratio of the minimum stress causing buckling divided by the compressive stress received by the support rod 22 is 0.92 when δ / r = 0, 1.13 when δ / r = 0.1, and δ / r = 2.92 for 0.3, 6.61 for δ / r = 0.5, 13.4 for δ / r = 0.7, 25 for δ / r = 0.9. It became four. If this ratio is greater than 1, no buckling will occur. Therefore, it can be seen that buckling can be prevented by setting the amount of eccentricity δ to 0.1 r or more.

また、座屈の心配がないため、支持ロッド２２を上記従来例のものより細くすることができる。更に、支持ロッド２２の軸線を上記直線Ｌに対しカソードの周方向に傾斜させることで、カソード２と外周リング２１との間に位置する支持ロッド２２の部分の長さが長くなる。このように支持ロッド２２を細く長くすることができるため、カソード２からの支持ロッド２２を介しての熱引けが効果的に抑制される。   Further, since there is no concern about buckling, the support rod 22 can be made thinner than that of the conventional example. Further, by inclining the axis of the support rod 22 in the circumferential direction of the cathode with respect to the straight line L, the length of the portion of the support rod 22 positioned between the cathode 2 and the outer peripheral ring 21 becomes longer. Thus, since the support rod 22 can be made thin and long, the heat sink from the cathode 2 via the support rod 22 is effectively suppressed.

更に、熱引けを抑制する上で従来困難であった外周リング２１の内径とカソード２の外径との径差の縮小が可能になり、カソード２の設計の自由度が増す。   Furthermore, it becomes possible to reduce the difference in diameter between the inner diameter of the outer peripheral ring 21 and the outer diameter of the cathode 2, which has been difficult in the past in suppressing heat shrinkage, and the degree of freedom in designing the cathode 2 is increased.

また、座屈の心配がないため、支持ロッド２２を外周リング２１に固定して、電気的な接触をしっかりと確保することができる。また、支持ロッド２２を外周リング２１に固定すれば、支持ロッド２２を介しての外周リング２１への熱伝導、即ち、外周リング２１の温度分布が一義的に決まり、外周リング２１の設計がしやすくなる。   Further, since there is no concern about buckling, the support rod 22 can be fixed to the outer peripheral ring 21 to ensure electrical contact. Further, if the support rod 22 is fixed to the outer ring 21, the heat conduction to the outer ring 21 via the support rod 22, that is, the temperature distribution of the outer ring 21 is uniquely determined, and the outer ring 21 is designed. It becomes easy.

ところで、上記第１実施形態では、全ての支持ロッド２２の軸線がカソード２の軸線に直交する同一平面に含まれているが、図５に示す第２実施形態の如く、各支持ロッド２２の軸線がカソード２の軸線に直交する互いに異なる平面に含まれていてもよい。この場合、各支持ロッド２２の熱膨張でカソード２に傾きを生ずることが懸念されるが、実際には、支持ロッド２２の熱膨張がカソード２の回転で吸収されるため、カソード２が傾くことはない。   By the way, in the said 1st Embodiment, although the axis line of all the support rods 22 is contained in the same plane orthogonal to the axis line of the cathode 2, the axis line of each support rod 22 like 2nd Embodiment shown in FIG. May be included in different planes orthogonal to the axis of the cathode 2. In this case, there is a concern that the thermal expansion of each support rod 22 may cause the cathode 2 to tilt, but in reality, the thermal expansion of the support rod 22 is absorbed by the rotation of the cathode 2 and thus the cathode 2 tilts. There is no.

また、上記第１実施形態では、カソード２を外周リング２１に４本の支持ロッド２２を介して支持しているが、支持ロッド２２の本数は、図６に示す第３実施形態の如く３本であっても、また、図７に示す第４実施形態の如く５本であってもよい。即ち、支持ロッド２２の本数は３本以上であれば特に制限はない。   In the first embodiment, the cathode 2 is supported on the outer ring 21 via the four support rods 22. The number of the support rods 22 is three as in the third embodiment shown in FIG. Alternatively, there may be five as in the fourth embodiment shown in FIG. That is, there is no particular limitation as long as the number of support rods 22 is three or more.

また、第１実施形態、第３実施形態及び第４実施形態では、複数の支持ロッド２２をその軸線を含む直線が成す図形が正多角形（正四角形、正三角形及び正五角形）になるように配置しているが、全ての支持ロッド２２の偏心量δが同一である限り、上記図形は正多角形でなくてもよい。例えば、図８に示す第５実施形態の如く、４本の支持ロッド２２をその軸線を含む直線が成す図形が平行四辺形になるように配置してもよい。   Moreover, in 1st Embodiment, 3rd Embodiment, and 4th Embodiment, the figure which the straight line containing the axis line of the some support rod 22 comprises is a regular polygon (a regular square, a regular triangle, and a regular pentagon). However, as long as the eccentricity δ of all the support rods 22 is the same, the figure need not be a regular polygon. For example, as in the fifth embodiment shown in FIG. 8, the four support rods 22 may be arranged so that the figure formed by the straight line including the axis thereof is a parallelogram.

ところで、上記実施形態では、カソード２の外周面に、支持ロッド２２の先端部を挿入する凹孔２３をかなりの傾斜角を付けて穿孔することが必要になり、ドリルが滑って凹孔２３の加工が難しくなる。そのため、図９に示す第６実施形態の如く、カソード２の外周に支持ロッド２２の本数分の突起２ａを突設し、各突起２ａに形成した孔２３´に支持ロッド２２の先端部を挿入してもよい。これによれば、突起２ａの側面に対する孔２３´の傾斜角が小さくなり、孔２３´の加工が容易になる。   By the way, in the said embodiment, it becomes necessary to drill the concave hole 23 which inserts the front-end | tip part of the support rod 22 in the outer peripheral surface of the cathode 2 with a considerable inclination angle, and a drill slips and the concave hole 23 is formed. Processing becomes difficult. Therefore, as in the sixth embodiment shown in FIG. 9, protrusions 2a corresponding to the number of the support rods 22 are provided on the outer periphery of the cathode 2, and the tips of the support rods 22 are inserted into the holes 23 'formed in the protrusions 2a. May be. According to this, the inclination angle of the hole 23 ′ with respect to the side surface of the protrusion 2 a becomes small, and the processing of the hole 23 ′ becomes easy.

以上、本発明の実施形態について図面を参照して説明したが、本発明はこれに限定されない。例えば、上記実施形態では、外周リング２１に形成した透孔２４に支持ロッド２２を挿通しているが、外周リング２１を軸方向一方のリング半部と他方のリング半部とに２分割し、両リング半部間に支持ロッド２２を挟み込んで固定することも可能である。   As mentioned above, although embodiment of this invention was described with reference to drawings, this invention is not limited to this. For example, in the above embodiment, the support rod 22 is inserted into the through hole 24 formed in the outer ring 21, but the outer ring 21 is divided into two in the axial direction, one ring half and the other ring half, It is also possible to fix the support rod 22 between both ring halves.

ピアス式電子銃を示す模式的断面図。A typical sectional view showing a piercing type electron gun. 従来のカソード支持構造を示す平面図。The top view which shows the conventional cathode support structure. (ａ)本発明の第１実施形態のカソード支持構造を示す平面図、(ｂ)図３(ａ)のｂ−ｂ線で切断した断面図。(a) The top view which shows the cathode support structure of 1st Embodiment of this invention, (b) Sectional drawing cut | disconnected by the bb line of Fig.3 (a). 第１実施形態のカソード支持構造の熱膨張時の状態を示す平面図。The top view which shows the state at the time of the thermal expansion of the cathode support structure of 1st Embodiment. 第２実施形態のカソード支持構造の図３(ｂ)に相当する断面図。Sectional drawing equivalent to FIG.3 (b) of the cathode support structure of 2nd Embodiment. 第３実施形態のカソード支持構造の平面図。The top view of the cathode support structure of 3rd Embodiment. 第４実施形態のカソード支持構造の平面図。The top view of the cathode support structure of 4th Embodiment. 第５実施形態のカソード支持構造の平面図。The top view of the cathode support structure of 5th Embodiment. 第６実施形態のカソード支持構造の平面図。The top view of the cathode support structure of 6th Embodiment.

符号の説明Explanation of symbols

２…カソード、２１…外周リング、２２…支持ロッド、Ｌ…支持ロッドの軸線と外周リングの内周面との交点とカソードの中心とを結ぶ直線、δ…偏心量。   2 ... cathode, 21 ... outer ring, 22 ... support rod, L ... straight line connecting the intersection of the axis of the support rod and the inner peripheral surface of the outer ring and the center of the cathode, δ ... eccentricity.

Claims (4)

ピアス式電子銃の円盤状のカソードを、カソードより大径の外周リングに３本以上の支持ロッドを介して支持させるカソード支持構造において、
各支持ロッドは、カソードと外周リングとの間に、支持ロッドの軸線が該軸線と外周リングの内周面との交点とカソードの中心とを結ぶ直線に対しカソードの周方向一方に傾むくように配置されることを特徴とするピアス式電子銃におけるカソード支持構造。 In the cathode support structure in which the disc-shaped cathode of the pierce-type electron gun is supported on the outer peripheral ring having a diameter larger than that of the cathode via three or more support rods,
Each support rod is inclined between the cathode and the outer peripheral ring so that the axis of the support rod is inclined in one of the circumferential directions of the cathode with respect to a straight line connecting the intersection of the axis and the inner peripheral surface of the outer peripheral ring and the center of the cathode. A cathode support structure in a pierce-type electron gun, wherein 前記支持ロッドの軸線に合致する直線とこの直線に平行で前記カソードの中心を通る直線とをカソードの軸線に直交する平面に射影したときの２直線間の距離を偏心量として、全ての支持ロッドが等しい偏心量を持つことを特徴とする請求項１記載のピアス式電子銃におけるカソード支持構造。   All the support rods are obtained by taking the distance between the two straight lines when the straight line matching the axis of the support rod and the straight line parallel to the straight line and passing through the center of the cathode are projected on a plane perpendicular to the axis of the cathode as an eccentric amount. 2. The cathode support structure in a pierce-type electron gun according to claim 1, wherein the two have equal eccentric amounts. 前記各支持ロッドは、該各支持ロッドの軸線が前記カソードの軸線に直交する平面に含まれるように配置されることを特徴とする請求項１又は２記載のピアス式電子銃におけるカソード支持構造。   3. The cathode support structure for a pierce-type electron gun according to claim 1, wherein each of the support rods is disposed so that an axis of each of the support rods is included in a plane perpendicular to the axis of the cathode. 前記各支持ロッドは前記外周リングに固定されることを特徴とする請求項１〜３の何れか１項記載のピアス式電子銃におけるカソード支持構造。   The cathode support structure for a pierce-type electron gun according to claim 1, wherein each of the support rods is fixed to the outer peripheral ring.
JP2008307562A 2008-12-02 2008-12-02 Cathode supporting structure in pierce electron gun Pending JP2010135105A (en)

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CN108766858A (en) * 2018-08-07 2018-11-06 核工业理化工程研究院 The positioning device and electron gun of column electron gun with high temperature cathode

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