JP2010120809A - Method of manufacturing reactor, and reactor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a reactor, which can be suitably used for suppressing the breakage and deterioration of the reactor based on thermal expansion, while assuring the range of material choice. <P>SOLUTION: The method of manufacturing a reactor includes a reactor body preparation process of preparing a reactor body equipped with a reacting zone, a heating section preparation process of preparing a heating zone for at least heating the reacting zone, and a first arrangement process of adjusting the positions of the body of the reactor and the heating section. The heating section preparation process includes a heat insulating material provision process of preparing a heat insulating material, a flattered film formation process of forming a flattered film with a flat surface on the heat insulating material, and a heating section forming process of forming a heating section for generating heat by turning on electricity on the flattered film. The first arrangement process matches the location of the body of the reactor with the location of the heating section so that the heating section and the body of the reactor are directed to each other in a non-contact state. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for producing a reaction apparatus and a reaction apparatus.

As a microreactor in which a reaction of a substance occurs, for example, a flow path is formed on at least one metal substrate of a set of metal substrates, a catalyst is supported on the inner surface, and the set of metal substrates is joined. Are formed (see, for example, Patent Document 1). As a microreactor, a microreactor in which an insulating film and a heating element are directly formed on at least one metal substrate to form a material suitable for the insulating film and the heating element is known.
JP 2007-191333 A

However, in the above-described microreactor, since the material suitable for the insulating film and the heating element is directly formed on the metal substrate, the metal substrate and the heating element each thermally expand as the temperature of the microreactor rises. . Here, since the metal substrate and the heating element are formed of materials having different coefficients of thermal expansion, there is a difference in the amount of deformation due to the thermal expansion of both. In a use situation where the temperature rise and fall is repeated, the heating element may be damaged or deteriorated due to the difference in the deformation amount. In order to prevent this, it is conceivable to form the metal substrate and the heating element with a material having a similar coefficient of thermal expansion, but this narrows the range of material selection.
An object of the present invention is to suppress breakage and deterioration of a reactor based on thermal expansion while ensuring a range of material selection.

In order to solve the above problems, according to one aspect of the present invention,
A reactor main body preparation step of preparing a reactor main body provided with a reaction section in which a reaction of a substance occurs;
A heating part preparing step of preparing a heating part for heating the reaction part of the reactor main body;
A first arrangement step of aligning the reactor main body and the heating unit,
The heating part preparation step includes
An insulation material preparation step for preparing the insulation material;
A planarizing film forming step of forming a planarized film having a flat surface on the heat insulating material;
A heating part forming step of forming the heating part that generates heat by energization on the planarizing film;
In the first arrangement step, the reaction apparatus main body and the heating section are aligned so that the heating section and the reaction apparatus main body face each other in a non-bonded state. A method is provided.

  In the above method for producing a reactor, preferably, the heat insulating material is dense.

According to another aspect of the invention,
A reactor main body preparation step of preparing a reactor main body provided with a reaction section in which a reaction of a substance occurs;
A heating part preparing step of preparing a heating part for heating the reaction part of the reactor main body;
A first arrangement step of aligning the reactor main body and the heating unit,
The heating part preparation step includes
A first heat insulating material preparation step for preparing a dense heat insulating material;
A heating part forming step of forming the heating part that generates heat by energization on the heat insulating material;
In the first arrangement step, the reaction apparatus main body and the heating section are aligned so that the heating section and the reaction apparatus main body face each other in a non-bonded state. A method is provided.

In the above method for producing a reaction apparatus, preferably, an auxiliary heat insulating material preparing step of preparing an auxiliary heat insulating material having a thermal conductivity lower than that of the dense heat insulating material, and the heating portion in the heat insulating material are formed. A second disposing step of disposing the auxiliary heat insulating material on the side opposite to the side.
In the above method for producing a reaction apparatus, preferably, the heat insulating material has a recess or an opening, and the auxiliary heat insulating material has a protrusion that protrudes into the recess or the opening.
In the above method for producing a reaction apparatus, preferably, the heating part preparation step further includes a flattening film forming step of forming a flattening film having a flat surface on the heat insulating material, and the heating part forming step includes The heating unit is formed on the heat insulating material via the planarizing film.
In the above method for producing a reaction apparatus, preferably, the heating part preparation step further includes a protective film forming step of forming a protective film interposed between the heating part and the reaction apparatus main body on the heating part. Including.
In the above method for producing a reaction apparatus, preferably, a surface of the heat insulating material on which the heating unit is formed has a first area facing the reaction apparatus main body and a second area protruding from the reaction apparatus main body. In the heating portion forming step, the heating portion is formed in the first region, and a wiring connected to the heating portion is formed in the second region.
In the above method for producing a reaction apparatus, preferably, the second auxiliary heat insulating material preparing step of preparing a second auxiliary heat insulating material, and the side opposite to the side facing the heating unit in the reaction apparatus main body And a third arrangement step of arranging the two auxiliary heat insulating materials.

According to another aspect of the invention,
A reactor main body preparation step of preparing a reactor main body provided with a reaction section in which a reaction of a substance occurs;
A heating part preparing step of preparing a heating part for heating the reaction part of the reactor main body;
A first arrangement step of aligning the reactor main body and the heating unit,
The heating part preparation step includes
An insulation material preparation step for preparing the insulation material;
A planarizing film forming step of forming a planarized film having a flat surface on the heat insulating material;
A heating part forming step of forming the heating part that generates heat by energization on the planarizing film;
The surface of the heat insulating material on which the heating part is formed has a first region facing the reaction device main body and a second region protruding from the reaction device main body,
The heating part forming step includes
Forming the heating portion in the first region and forming a wiring connected to the heating portion in the second region;
In the first arrangement step, the reaction apparatus main body and the heating section are aligned so that the heating section and the reaction apparatus main body face each other in a non-bonded state. A method is provided.

According to another aspect of the invention,
A reactor main body preparation step of preparing a reactor main body provided with a reaction section in which a reaction of a substance occurs;
A heating part preparation step of preparing a heating part for heating at least the reaction part among the reaction apparatus main body,
A first arrangement step of aligning the reactor main body and the heating unit,
The heating part preparation step includes
A first heat insulating material preparation step for preparing a dense heat insulating material;
A heating part forming step of forming the heating part that generates heat by energization on the heat insulating material;
The surface of the heat insulating material on which the heating part is formed has a first region facing the reaction device main body and a second region protruding from the reaction device main body,
The heating part forming step includes
Forming the heating portion in the first region and forming a wiring connected to the heating portion in the second region;
In the first arrangement step, the reaction apparatus main body and the heating section are aligned so that the heating section and the reaction apparatus main body face each other in a non-bonded state. A method is provided.

In the above method for producing a reaction apparatus, preferably, a heat insulation container preparation step for preparing a heat insulation container that is hollow and has an opening communicating with the hollow portion, and the reaction apparatus main body and the heating after the first arrangement step. And a structure housing step of housing the structure aligned with the portion in the heat insulating container through the opening.
In the above method for producing a reaction apparatus, preferably, a heat insulating container preparing step for preparing a heat insulating container that is hollow and has an opening communicating with the hollow part;
A powder heat insulating material preparation step for preparing a powder heat insulating material;
After the first arrangement step, the structural body in which the reaction apparatus main body and the heating unit are aligned is accommodated in the heat insulating container through the opening, and the structure and the heat insulating container A heat insulating material filling step of filling the powder heat insulating material in between.
In the above method for producing a reaction apparatus, preferably, in the structure housing step, the structure body is housed in the heat insulating container such that a part of the heating unit protrudes outside from the opening.
In the above method for producing a reaction apparatus, preferably, after the lid preparation step of preparing a lid for sealing the opening and the structure housing step, the lid is attached to the opening and the opening is sealed. And a lid attaching step for stopping.
In the above method for producing a reaction apparatus, preferably, the heat insulating container includes an inner wall provided inside the heat insulating container and an outer wall provided outside so as to form a gap together with the inner wall. The internal pressure of the gap is lower than the atmospheric pressure.
In the above method for producing a reaction apparatus, preferably, the reaction section contains hydrogen by a reforming reaction of a gas raw fuel and water, a vaporizer that heats and vaporizes a liquid mixture of the liquid raw fuel and water. One of a reformer that generates a reformed gas and a power generation cell that generates electric power by a reaction between hydrogen and oxygen.

According to another aspect of the invention,
A heat-insulating container that is hollow and has an opening communicating with the hollow part;
A reaction device main body having a reaction part in which a reaction of a substance occurs and disposed in the heat insulating container;
Insulation,
A planarization film formed on the heat insulating material so as to have a flat surface;
A heating unit that is formed on the planarizing film so as to face the reaction apparatus main body in a non-bonded state, and generates heat when energized,
The surface of the heat insulating material on which the heating part is formed has a first region facing the reaction device main body and a second region protruding from the reaction device main body,
There is provided a reaction apparatus characterized in that the heating section is formed in the first area, and a wiring connected to the heating section is formed in the second area.

According to another aspect of the invention,
A heat-insulating container that is hollow and has an opening communicating with the hollow part;
A reaction device main body having a reaction part in which a reaction of a substance occurs and disposed in the heat insulating container;
Dense insulation,
A heating unit that is formed on the heat insulating material so as to face the reaction apparatus main body in a non-bonded state, and generates heat when energized,
The surface of the heat insulating material on which the heating part is formed has a first region facing the reaction device main body and a second region protruding from the reaction device main body,
There is provided a reaction apparatus characterized in that the heating section is formed in the first area, and a wiring connected to the heating section is formed in the second area.

  In the above method for producing a reaction apparatus, preferably, the reaction section contains hydrogen by a reforming reaction of a gas raw fuel and water, a vaporizer that heats and vaporizes a liquid mixture of the liquid raw fuel and water. One of a reformer that generates a reformed gas and a power generation cell that generates electric power by a reaction between hydrogen and oxygen.

  According to the present invention, since the heating part and the reaction apparatus main body are opposed to each other in a non-joined state, even if one of the heating part or the reaction apparatus main body is thermally expanded, The influence on the deformation amount can be suppressed. Thereby, even if the heating part and the reactor main body are formed of materials having different thermal expansion coefficients, damage and deterioration due to thermal expansion can be suppressed.

[First Embodiment]
Hereinafter, a first embodiment for carrying out the present invention will be described with reference to the drawings. However, although various technically preferable limitations for implementing the present invention are given to the embodiments described below, the scope of the invention is not limited to the following embodiments and illustrated examples.

  FIG. 1 is a block diagram showing a portable electronic device 100 equipped with a fuel cell device 1. The electronic device 100 is a portable electronic device such as a notebook personal computer, a PDA, an electronic notebook, a digital camera, a mobile phone, a wristwatch, a register, and a projector.

The electronic device 100 includes an electronic device main body 901, a DC / DC converter 902, a secondary battery 903, and the fuel cell device 1.
The electronic device main body 901 is driven by electric power supplied from the DC / DC converter 902 or the secondary battery 903. The DC / DC converter 902 converts the electrical energy generated by the fuel cell device 1 into an appropriate voltage, and then supplies it to the electronic device main body 901. Further, the DC / DC converter 902 charges the secondary battery 903 with the electrical energy generated by the fuel cell device 1, and the electrical energy stored in the secondary battery 903 is electronically stored when the fuel cell device 1 is not operating. This is supplied to the device main body 901.

  The fuel cell device 1 includes a fuel container 2, a liquid pump 31, an air pump 32, a reaction device 50 as a microreactor, and the like. The fuel container 2 of the fuel cell device 1 is detachably provided, for example, with respect to the electronic device 100, and the liquid pump 31, the air pump 32, and the reaction device 50 are incorporated in the main body of the electronic device 100, for example.

The fuel container 2 stores a mixed liquid of liquid raw fuel (for example, methanol, ethanol, dimethyl ether) and water. The liquid raw fuel and water may be stored in separate containers.
The liquid pump 31 sucks the liquid mixture in the fuel container 2 and sends it to the vaporizer 4 in the reaction apparatus 50.
The air pump 32 supplies air as an oxidant to the power generation cell 8 in the reaction device 50.

The reaction device 50 is provided with a plurality of reaction portions 50a in which a reaction occurs, and a heat insulating container 10 that houses them. Examples of the plurality of reaction units 50a include a vaporizer 4, a reformer 6, a power generation cell 8, a catalytic combustor 9, and the like.
The vaporizer 4, the reformer 6, and the catalytic combustor 9 are provided with heater and temperature sensors 4a, 6a, and 9a, respectively. Since the electric resistance values of the heater / temperature sensors 4a, 6a, 9a depend on the temperature, the heater / temperature sensors 4a, 6a, 9a measure the temperatures of the carburetor 4, the reformer 6, and the catalytic combustor 9. It also functions as a sensor.

  In the vaporizer 4, the liquid mixture sent from the liquid pump 31 is heated to about 110 to 160 ° C. by the heat of the heater / temperature sensor 4 a or the like and vaporized. The gas mixture vaporized in the vaporizer 4 is sent to the reformer 6.

A flow path is formed inside the reformer 6, and a catalyst is supported on the wall surface of the flow path. The air-fuel mixture sent from the vaporizer 4 to the reformer 6 flows through the flow path of the reformer 6, and is about 300 to about due to the heat of the heater / temperature sensor 6 a, the reaction heat of the power generation cell 8 and the heat of the catalytic combustor 9. Heating to about 400 ° C. causes a reforming reaction with the catalyst. By the reforming reaction of the raw fuel and water, a mixed gas (reformed gas) such as hydrogen, carbon dioxide as a fuel and a minute amount of carbon monoxide as a by-product is generated. When the raw fuel is methanol, the reformer 6 mainly performs a steam reforming reaction as shown in the following formula (1).
CH ₃ OH + H ₂ O → 3H ₂ + CO ₂ (1)

Carbon monoxide is by-produced in a trace amount by a reaction such as the following formula (2) that occurs sequentially following the chemical reaction formula (1).
H ₂ + CO ₂ → H ₂ O + CO (2)
The gas (reformed gas) generated by the chemical reaction formulas (1) and (2) is sent to the power generation cell 8.

  FIG. 2 is a schematic diagram of the power generation cell 8. As shown in FIG. 2, the power generation cell 8 includes a solid oxide electrolyte 811, a fuel electrode 82 (anode) and an oxygen electrode 83 (cathode) formed on both surfaces of the solid oxide electrolyte 811, and a fuel electrode 82. And a cathode collector electrode 85 joined to the oxygen electrode 83 and formed with a passage 87 on the joining surface. The power generation cell 8 is accommodated in the housing 88.

The solid oxide electrolyte 811 includes zirconia-based (Zr _1-x Y _x ) O _{2-x / 2} (YSZ), lanthanum galade-based (La _1-x Sr _x ) (Ga _1-yz Mg _y Co _z ) O ₃ or the like, and La _0.84 Sr _0.16 MnO ₃ , La (Ni, Bi) O ₃ , (La, Sr) MnO ₃ , In ₂ O ₃ is used for the fuel electrode 82.
+ SnO ₂ , LaCoO ₃ or the like, Ni, Ni + YSZ or the like for the oxygen electrode 83, LaCr (Mg) O ₃ , (La, Sr) CrO ₃ , NiAl + Al ₂ O ₃ or the like for the anode current collector 84 and the cathode current collector 85. Can be used respectively.

The power generation cell 8 is heated to about 500 to 1000 ° C. by the heat of the heater / temperature sensor 9a and the catalytic combustor 9, and the reaction described later takes place.
Air is sent to the oxygen electrode 83 through the channel 87 of the cathode collector electrode 85. In the oxygen electrode 83, oxygen ions are generated by oxygen and electrons supplied from the cathode output electrode 21b as shown in the following equation (3).
O ₂ + 4e ⁻ → 2O ²⁻ (3)
The solid oxide electrolyte 811 has oxygen ion permeability, and allows the oxygen ions generated by the chemical reaction formula (3) to pass through the oxygen electrode 83 to reach the fuel electrode 82.

The reformed gas discharged from the reformer 6 is sent to the fuel electrode 82 through the flow path 86 of the anode collector electrode 84. In the oxygen electrode 83, a reaction represented by the following equations (4) and (5) occurs between the oxygen ions that have passed through the solid oxide electrolyte 811 and the reformed gas.
H ₂ + O ²⁻ → H ₂ O + 2e ⁻ (4)
CO + O ²⁻ → CO ₂ + 2e ⁻ (5)
Electrons emitted by the chemical reaction formulas (4) and (5) are supplied to the oxygen electrode 83 from the cathode output electrode 21b through external circuits such as the fuel electrode 82, the anode output electrode 21a, and the DC / DC converter 902.

  The anode output electrode 21 a and the cathode output electrode 21 b are connected to the anode collector electrode 84 and the cathode collector electrode 85, and are drawn from the housing 88. Here, as will be described later, the casing 88 is made of, for example, a Ni-based alloy, and the anode output electrode 21a and the cathode output electrode 21b are insulated and drawn from the casing 88 by an insulating material such as glass or ceramic. . As shown in FIG. 1, the anode output electrode 21a and the cathode output electrode 21b are connected to, for example, a DC / DC converter 902.

  The reformed gas (off-gas) that has passed through the flow path 86 of the anode collector electrode 84 also contains unreacted hydrogen. The off gas is supplied to the catalytic combustor 9.

Air that has passed through the flow path 87 of the cathode collector electrode 85 is supplied to the catalytic combustor 9 together with the off-gas. A flow path is formed inside the catalytic combustor 9, and a Pt-based catalyst is supported on the wall surface of the flow path.
The catalyst combustor 9 is provided with a heater / temperature sensor 9a made of an electric heating material. Since the electric resistance value of the heater / temperature sensor 9a depends on the temperature, the heater / temperature sensor 9a also functions as a temperature sensor for measuring the temperature of the catalytic combustor 9.

  A mixed gas (combustion gas) of off gas and air flows through the flow path of the catalytic combustor 9 and is heated by the heater / temperature sensor 9a. Of the combustion gas flowing through the flow path of the catalytic combustor 9, hydrogen is combusted by the catalyst, thereby generating combustion heat. The exhaust gas after combustion is discharged from the catalytic combustor 9 to the outside of the heat insulating container 10.

  The combustion heat generated in the catalytic combustor 9 is used to maintain the temperature of the power generation cell 8 at a high temperature (about 500 to 1000 ° C.). The heat of the power generation cell 8 is conducted to the reformer 6 and the vaporizer 4 and used for evaporation in the vaporizer 4 and a steam reforming reaction in the reformer 6.

  Next, a specific configuration of the reaction apparatus 50 will be described. FIG. 3 is a side sectional view schematically showing a schematic configuration of the reaction apparatus 50. As shown in FIG. 3, the reaction device 50 is provided with a reaction device main body 51, a heat insulating portion 60 surrounding the reaction device main body 51, and a heat insulating container 10 that houses the reaction device main body 51 and the heat insulating portion 60. It has been.

  4A and 4B are diagrams showing a schematic configuration of the reaction apparatus main body 51, in which FIG. 4A is a side view, FIG. 4B is a top view, and FIG. 4C is a bottom view. As shown in FIGS. 4A and 4B, the reactor main body 51 is provided with a vaporizer 4, a reformer 6, a power generation cell 8, and a flow path substrate 52 on which these are mounted. ing. The first portion 53 on which the power generation cell 8 and the catalytic combustor 9 are mounted on the flow path substrate 52 carries a pt-based catalyst therein, and this portion 53 functions as the catalytic combustor 9. ing. Various flow paths 71 to 77 are formed in the flow path substrate 52 (see FIG. 1).

  For example, as shown in FIG. 1, the flow path 71 is a flow path for guiding the liquid mixture supplied from the liquid pump 31 to the vaporizer 4. The flow path 72 is a flow path for guiding the air-fuel mixture generated in the vaporizer 4 to the reformer 6. The flow path 73 is a flow path for guiding the reformed gas generated in the reformer 6 to the power generation cell 8. The flow path 74 is a flow path that guides the air supplied from the air pump 32. The flow path 75 is a flow path for guiding off-gas generated in the power generation cell 8 to the catalytic combustor 9. The flow path 76 is a flow path for guiding the air that has passed through the power generation cell 8 to the catalytic combustor 9. The flow path 77 is a flow path for guiding the exhaust gas generated in the catalytic combustor 9 to the outside of the heat insulating container 10.

  Further, as shown in FIG. 4, the first portion 53 of the flow path substrate 52, the second portion 54 on which the reformer 6 is mounted, and the third portion 55 on which the vaporizer 4 is mounted respectively correspond to the load. It is formed in size. The two connecting portions 511 that connect the first portion 53 and the second portion 54, and the second portion 54 and the third portion 55, respectively, have a width (one in a plane perpendicular to the arrangement direction of the portions 53, 54, and 55). The length in the direction) is shorter than the length in the width direction of each of the portions 53, 54, and 55.

  Moreover, as shown in FIG. 3, the heat insulation part 60 is provided with the lower heat insulating material 61 which covers the downward direction of the reaction apparatus main body 51, and the upper heat insulating material 62 which covers upper direction. Examples of the upper heat insulating material 62 and the lower heat insulating material 61 include Microtherm (registered trademark), Macor (registered trademark), and glass. Here, both Macor (registered trademark) and glass are dense heat insulating materials. In the present specification, a heat insulating material whose surface flatness has local unevenness of several nanometers to tens of nanometers or less is called a dense heat insulating material. The thermal conductivity of Microtherm (registered trademark) is about 0.02 W / (m · K), and the thermal conductivity of Macor (registered trademark) is about 1.67 W / (m · K). The thermal conductivity of the glass is about 1.13 to 0.546 W / (m · K).

  The lower heat insulating material 61 is a heat insulating material according to the present invention. The lower heat insulating material 61 is formed in a rectangular shape. An insulating planarizing film 81 is formed on the upper surface of the lower heat insulating material 61 so as to cover at least a region where the reactor main body 51 is mounted (see FIG. 5).

  FIG. 5 is a top view showing the lower heat insulating material 61 and the planarizing film 81. In the drawing, the dotted line portion indicates the first region 611 facing the reaction device main body 51, and the region outside the dotted line portion indicates the second region 612 protruding from the reaction device main body 51.

  As shown in FIG. 5, the heating unit 90 and the wiring 91 connected to the heating unit 90 are formed on the upper surface of the planarizing film 81 as shown in FIG. 5. The heating unit 90 and the wiring 91 are formed of a metal film made of Pt, W / Au / W, or the like, for example. The heating unit 90 constitutes the heater / temperature sensors 4a, 6a, and 9a. The heater / temperature sensor 4a is formed in a zigzag pattern on the portion of the first region 611 facing the third portion 55 where the vaporizer 4 is mounted. The heater / temperature sensor 6a is formed in a zigzag pattern on the portion of the first region 611 facing the second portion 54 on which the reformer 6 is mounted. The heater / temperature sensor 9a is formed in a zigzag pattern on the portion of the first region 611 facing the first portion 53 on which the power generation cell 8 and the catalytic combustor 9 are mounted. That is, all the heater / temperature sensors 4 a, 6 a, and 9 a are formed in the first region 611.

  On the other hand, the wiring 91 is formed on the upper surface of the planarizing film 81 in the second region 612 so as to be individually connected to each of the heater / temperature sensors 4a, 6a, 9a. Each wiring 91 extends toward one end of the lower heat insulating material 61, and this tip becomes a terminal and is electrically connected to, for example, a control unit (not shown).

  Further, as shown in FIG. 3, a protective film 92 is formed on the upper surface of the heating unit 90, the upper surface of the wiring 91, and the upper surface of the planarizing film 81 so as to cover the heating unit 90 and the wiring 91. The protective film 92 is an insulating oxide film.

  The reaction apparatus main body 51 is positioned and overlapped with the lower heat insulating material 61 so that the first region 611 and the reaction apparatus main body 51 face each other. Here, although the heating part 90 and the reaction apparatus main body 51 are aligned, they are not fixed at that position, but are simply overlapped, that is, not joined.

  The upper heat insulating material 62 is formed with a recessed portion 65 that is recessed corresponding to the upper shape of the reaction device main body 51. When the reactor main body 51 is fitted into the recess 65, both are in close contact with each other and the heat insulation is improved. By this fitting, the upper heat insulating material 62 is arranged on the side opposite to the side facing the heating unit 90 in the reaction apparatus main body 51. The upper heat insulating material 62 is a second auxiliary heat insulating material according to the present invention. At the time of fitting, the front end surface 51 a on the power generation cell 8 side in the reaction device main body 51 is covered with the upper heat insulating material 62. As a result, the planarizing film 81 and the protective film 92 are separated from the inner wall surface of the heat insulating container 10 via the upper heat insulating material 62.

  The heat insulating container 10 is hollow and includes an opening 102 communicating with the hollow portion 101. The hollow portion 101 is formed in a size to which the heat insulating portion 60 surrounding the reaction device main body 51 is fitted. The heat insulating container 10 includes an inner wall portion 103 provided on the inner side of the heat insulating container 10 and an outer wall portion 105 provided on the outer side so as to form a gap 104 together with the inner wall portion 103. The gap 104 is closed from the outside, and the internal pressure of the gap 104 is kept at a pressure lower than atmospheric pressure (for example, 100 Pa or less).

  Next, the manufacturing method of the reaction apparatus 50 is demonstrated. FIG. 6 is a diagram schematically showing each step of the method for manufacturing the reaction device 50, (a) is a side view showing the reaction device main body preparation step, and (b) is a side view showing the lower heat insulating material preparation step. (C) is a side view showing a planarization film forming step, (d) is a side view showing a heating part forming step, (e) is a side view showing a protective film forming step, (F) is a side view which shows an upper heat insulating material preparation process, (g) is a side view which shows an arrangement | positioning process, (h) is a side view which shows an accommodation process.

  First, in the reactor main body preparation step, a reactor main body 51 is prepared as shown in FIG. On the other hand, in the lower heat insulating material preparation step, a lower heat insulating material 61 is prepared as shown in FIG. This lower heat insulating material preparation step is a heat insulating material preparation step according to the present invention.

  In the planarization film forming step, a planarization film 81 is formed on the first region 611 on the upper surface of the lower heat insulating material 61 as shown in FIG. Here, the planarizing film 81 can be formed by SOG which is a kind of CVD or coating method, but the lower heat insulating material 61 which is the film formation target of the planarizing film 81 is a heat insulating material having a high porosity. In addition, among the application methods, a method of applying a liquid material having a high viscosity is desirable. Therefore, it is desirable to use a nitrate pyrolysis method in which a plurality of specific types of nitrates are dissolved in 1-methyl-2-pyrrolidone, which is a highly viscous solvent, and after coating and drying, the temperature is raised to form a target oxide film.

A method for forming an SmFeO ₃ (or GdFeO ₃ ) film by the nitrate pyrolysis method will be described below.
First, Fe (NO ₃ ) ₃ · 9H ₂ O and Sm (NO ₃ ) ₃ · 6H ₂ O are dissolved in 1 methyl-2 pyrrolidone at a molar ratio of 1: 1. The concentration is about 1.0 mol / l in the case of spin coating. Moreover, in the case of a dip method etc., it is about 0.3 mol / l.

  Next, a solvent is uniformly applied to the lower heat insulating material 61 with a spinner. In the case of the dip method or the like, after the solution is applied onto the lower heat insulating material 61, the lower heat insulating material 61 may be tilted for a certain period of time to take a step of removing excess solution.

Then, a vacuum is drawn with a rotary pump to evaporate 1-methyl-2-pyrrolidone as a solvent. Then placed under a heat insulating material 61 to an electric furnace, to form a SmFeO ₃ warmed to a specified temperature. As a result, the SmFeO ₃ film as the planarizing film 81 is formed on the lower heat insulating material 61. Next, the planarization film 81 is removed by etching so as to leave a region where the reaction apparatus main body 51 is mounted.

  In the heating part forming step, a metal film to be the heating part 90 and the wiring 91 is formed on the planarizing film 81, and the metal film is etched, as shown in FIGS. 5 and 6D. Then, the wiring pattern of the heating unit 90 and the wiring 91 is formed.

  In the protective film forming step, an oxide film to be the protective film 92 is formed on the upper surface of the heating unit 90, the upper surface of the wiring 91, and the upper surface of the planarizing film 81 by CVD, SOG, or the above-described nitrate pyrolysis method. Thus, the heating unit 90 and the wiring 91 are covered with the protective film 92. Next, the protective film 92 is etched and removed so as to leave the region where the reaction apparatus main body 51 is mounted, thereby forming the protective film 92 as shown in FIG.

  In the upper heat insulating material preparation step, as shown in FIG. 6 (f), an upper heat insulating material 62 having a recessed portion 65 that is recessed corresponding to the upper portion of the reactor main body 51 is prepared. This upper heat insulating material preparing step is the second auxiliary heat insulating material preparing step according to the present invention.

  In the arranging step, the upper heat insulating material 62 and the lower heat insulating material 61 are aligned with respect to the reaction device main body 51 as shown in FIG. First, in the arranging step, the upper heat insulating material 62 is arranged on the opposite side of the reaction device main body 51 from the side facing the heating unit 90, and the reaction device main body 51 and the upper heat insulating material 62 are fitted (third arrangement). Process). Next, the reactor main body 51 and the lower heat insulating material 61 are overlapped so that the reactor main body 51 is disposed in the first region 611. Thereby, while the reaction apparatus main body 51 and the heating part 90 are aligned, the heating part 90 and the wiring 91 and the reaction apparatus main body 51 face each other in a non-joined state (first arrangement step). In addition, if the width | variety and depth (the length of the direction parallel to the arrangement direction of each part 53,54,55) of the upper heat insulating material 62 and the lower heat insulating material 61 are respectively the same, the circumference | surroundings of each heat insulating material 62,61 will be located. By matching, the reactor main body 51 and the heating unit 90 can be aligned, and alignment becomes easy.

  In the housing step, as shown in FIG. 6 (h), the structure (reactor body 51, heat insulating part 60, planarization film 81, protective film) in which the reaction apparatus body 51, the heating unit 90, and the wiring 91 are aligned. 92, the heating unit 90 and the wiring 91) are accommodated in the heat insulating container 10. First, in the accommodation step, the heat insulating container 10 is prepared (insulating container preparation step). Then, a structure is accommodated in the heat insulation container 10 through the opening part 102 (structure accommodating process). Here, each of the heat insulating materials 61 and 62 includes the height of the upper heat insulating material 62 (the length in the direction perpendicular to the width direction in the plane perpendicular to the arrangement direction of the portions 53, 54, and 55), The total height of the material 61 is formed to be the height of the hollow portion 101 and the opening 102. Thereby, since the heat insulation part 60 fits in the hollow part 101, even if the reaction apparatus main body 51 and the lower heat insulating material 61 are a non-joined state, both will be positioned. The reactor 50 is assembled by these steps.

  As described above, according to the first embodiment, since the heating unit 90 and the reaction device main body 51 are opposed to each other in a non-joined state, one of the heating unit 90 or the reaction device main body 51 is thermally expanded. However, since it is in a non-joined state, it is possible to suppress the influence of the other deformation amount. In particular, when the temperatures of the heating unit 90 and the reaction device main body 51 are increased, an increase in stress generated between the heating unit 90 and the reaction device main body 51 can be suppressed.

  Further, since the heating unit 90 and the wiring 91 are formed on the lower heat insulating material 61 via the flattening film 81, even if the surface of the lower heat insulating material 61 has irregularities, it is flattened by the flattening film 81. In this state, the heating unit 90 and the wiring 91 can be formed. Thereby, the heating part 90 and the wiring 91 can be firmly fixed to the lower heat insulating material 61.

  Moreover, since the deformation amount of the heating unit 90 and the reaction device main body 51 is different, both of them are rubbed during thermal expansion. However, since the protective film 92 is interposed therebetween, the heating unit 90 is It is possible to suppress damage or disconnection.

Here, in the reactor 50 of the present embodiment, the widths of the two connecting portions 511 connecting the first portion 53, the second portion 54, and the third portion 55 are shorter than the widths of the respective portions 53, 54, and 55, respectively. Since it is formed, it is possible to suppress the amount of heat transfer between the respective reaction units 50a while suppressing an increase in the heat transfer path between the vaporizer 4 and the reformer 6. Similarly, the amount of heat transfer between the reaction units 50a can be suppressed while suppressing an increase in the heat transfer path between the reformer 6, the power generation cell 8, and the catalytic combustor 9. Further, in the above conventional technique, when the heating element and the heating element as the wiring are formed in the reaction apparatus main body 51, the heating element is formed on the metal substrate that forms the reaction apparatus main body 51 and is detached from the metal substrate. A heating element cannot be formed at the outer position. For this reason, in the said conventional technique, the freedom degree regarding the position which forms a heat generating body was low. On the other hand, since the reaction apparatus 50 of the present embodiment forms the wiring on the flow path substrate 52, the wiring 91 can be formed regardless of the shape of the reaction apparatus 50. For this reason, there is a high degree of freedom regarding the position where the wiring 91 is formed.
In particular, when the width of each connecting portion 511 is shortened as in the present embodiment, a heating element is inevitably formed on each connecting portion 511 in the above conventional technique. The wiring 91 cannot be formed thick, and the amount of heat generated in the wiring 91 may increase. On the other hand, in the reaction device 50 of the present embodiment, the heating unit 90 is provided in the first region 611 facing the reaction device main body 51 in the lower heat insulating material 61 even if the width of each connecting portion 511 is shorter than the width of each reaction portion 50a. Since the wiring 91 can be formed in the second region 612 that protrudes from the reaction device main body 51 in the lower heat insulating material 61, the wiring 91 can be formed in a portion that does not correspond to the reaction portion 50a. Thereby, the area | region which does not need to be heated like each connection part 511 can be prevented from heating. Furthermore, the wiring 91 can be formed thicker independently of the size of the connecting portion 511. As a result, the resistance of the wiring 91 can be reduced, and as a result, the heat generation efficiency can be increased.

  Moreover, since the upper heat insulating material 62 is arrange | positioned on the opposite side to the side which opposes the heating part 90 in the reaction apparatus main body 51, compared with the thing of only the lower heat insulating material 61, heat insulation can be improved.

  Furthermore, since the structure in which the reactor main body 51 and the heating unit 90 are aligned is accommodated in the heat insulating container 10, it is higher than the case where the reactor main body 51 is covered only by the heat insulating portion 60. Thermal insulation can be ensured.

And if the heat insulating material filling process of filling a powdery heat insulating material between the structure and the heat insulating container 10 is further performed after the structure housing process, the heat insulating property can be further improved. Here, the powder-like heat insulating material is obtained by processing the above-described microtherm into a powder form, for example.
The pulverization in the present invention is not particularly affected by the shape as long as the heat insulating material can be used as a filler, and the powder is about several tens of microns to several hundreds of microns.

  Moreover, since the internal pressure of the clearance gap 104 of the heat insulation container 10 is lower than atmospheric pressure, higher heat insulation can be obtained.

  In addition, on the upper surface of the lower heat insulating material 61, a dummy wiring that is not energized may be formed in a region corresponding to the first portion 53, the second portion 54, and the third portion 55 in the reaction device main body 51, in addition to the wiring 91. Good. At this time, the planarizing film 81 is formed so as to cover the dummy wiring. Thereby, by rubbing with the reactor main body 51, it is possible to suppress the breakage of the protective film 92, the damage of the heating unit 90 and the wiring 91, the occurrence of disconnection, and the like.

[Second Embodiment]
Next, a second embodiment of the reaction apparatus manufacturing method according to the present invention will be described. In the following description, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  FIG. 7 is a diagram schematically showing each step of the manufacturing method of the reaction device 50A, (a) is a side view showing the reaction device main body preparation step, and (b) is a side view showing the lower heat insulating material preparation step. (C) is a side view showing a planarization film forming step, (d) is a side view showing a heating portion forming step, (e) is a side view showing a protection step, (f (A) is a side view which shows an upper heat insulating material preparation process, (g) is a side view which shows an arrangement | positioning process, (h) is a side view which shows an accommodation process.

  First, in the reactor main body preparation step, a reactor main body 51 is prepared as shown in FIG. On the other hand, in the lower heat insulating material preparing step, the lower heat insulating material 61a is prepared as shown in FIG. The lower heat insulating material 61a is the above-described dense heat insulating material, and for example, the above-mentioned Macor (registered trademark) can be used.

  In the flattening film forming step, as shown in FIG. 7C, the flattening film 81 is formed on the first region 611 on the upper surface of the lower heat insulating material 61a by the film forming method described above.

  In the heating portion forming step, a metal film to be the heating portion 90 and the wiring 91 is formed on the planarizing film 81, and the metal film is etched, as shown in FIGS. 5 and 7D. Then, the wiring pattern of the heating unit 90 and the wiring 91 is formed.

In a protection process, a protective film formation process, an auxiliary heat insulating material preparation process, and a second arrangement process are performed.
In the protective film forming step, an oxide film to be the protective film 92 is formed on the upper surface of the heating unit 90, the upper surface of the wiring 91, and the upper surface of the planarizing film 81 by the above-described film formation method. As shown in e), the heating unit 90 and the wiring 91 are covered with a protective film 92.

  In the auxiliary heat insulating material preparation step, an auxiliary heat insulating material 95 having a large number of fine holes of 0.1 microns or less is prepared. The auxiliary heat insulating material 95 is a heat insulating material whose thermal conductivity is lower than that of the lower heat insulating material 61a, and for example, the above-described Microtherm (registered trademark) can be used. The auxiliary heat insulating material 95 is formed to have a shorter depth than the lower heat insulating material 61a.

  In the second arrangement step, the auxiliary heat insulating material 95 is disposed on the side of the lower heat insulating material 61a opposite to the side on which the heating unit 90 is formed. At this time, the auxiliary heat insulating material 95 and the lower heat insulating material 61a are aligned so that the end surface 951 located on the power generation cell 8 side of the auxiliary heat insulating material 95 is flush with the end surface 613 of the lower heat insulating material 61a. Yes.

  In the upper heat insulating material preparation step, as shown in FIG. 7 (f), an upper heat insulating material 62 a having a concave portion 65 a corresponding to the upper portion of the reactor main body 51 is prepared. The recess 65a in the upper heat insulating material 62a is formed such that the end surfaces 613 and 951 of the auxiliary heat insulating material 95 and the lower heat insulating material 61a are exposed.

  In the arranging step, as shown in FIG. 7G, the upper heat insulating material 62a and the lower heat insulating material 61a are aligned with respect to the reaction device main body 51. First, in the arranging step, the upper heat insulating material 62a is arranged on the opposite side of the reaction device main body 51 from the side facing the heating unit 90, and the reaction device main body 51 and the upper heat insulating material 62a are fitted (third arrangement). Process). Next, the reaction apparatus main body 51 and the lower heat insulating material 61 a are overlapped so that the reaction apparatus main body 51 is disposed in the first region 611. Thereby, while the reaction apparatus main body 51 and the heating part 90 are aligned, the heating part 90 and the wiring 91 and the reaction apparatus main body 51 face each other in a non-joined state (first arrangement step).

  In the housing step, as shown in FIG. 7 (h), the structure (reactor body 51, heat insulating portion 60a, auxiliary heat insulating material 95, flat structure) in which the reaction device main body 51, the heating unit 90, and the wiring 91 are aligned. The chemical film 81, the protective film 92, the heating part 90, and the wiring 91) are accommodated in the heat insulating container 10a. First, in the accommodation step, the heat insulating container 10a is prepared (heat insulating container preparation step). The heat insulating container 10 a is formed so that the depth of the hollow portion 101 a is shorter than the depth of the reaction apparatus main body 51.

Then, a structure is accommodated in the heat insulation container 10a through the opening part 102a (structure accommodation process). Thereby, since the heat insulation part 60a fits in the hollow part 101a, even if the reactor main body 51 and the lower heat insulating material 61a are in a non-joined state, both are positioned.
At this time, the reactor main body 51 and the lower heat insulating material on the opening 102 side of the heat insulating container 10a are brought into contact with the inner surface 601 of the heat insulating container 10a by bringing the end surfaces 613 and 951 of the auxiliary heat insulating material 95 and the lower heat insulating material 61a into contact with each other. Each end of 61a will protrude outside.
FIG. 8 is a top view of the heat insulating container 10a after housing. As shown in FIG. 8, the wiring 91 as a part of the heating unit 90 formed on the lower heat insulating material 61a is exposed to the outside of the heat insulating container 10a.

  On the other hand, in the housing step, a lid 97 for sealing the opening 102a is prepared (lid preparation step). The lid 97 is formed with a through hole 98 through which the reaction apparatus main body 51 and the lower heat insulating material 61a project from the heat insulating container 10a. Then, after the structure housing step, the lid 97 is attached to the opening 102a and the opening 102a is sealed (lid attachment step). Thereby, the reaction apparatus 50A of the second embodiment is assembled.

  As described above, according to the second embodiment, since the wiring 91 protrudes from the heat insulating container 10a, it is possible to facilitate electrical connection work with other components.

  Moreover, since the lid | cover 97 which seals the opening part 102a of the heat insulation container 10a is provided, higher heat insulation can be ensured.

In the second embodiment, the case where the joint surfaces of the lower heat insulating material 61a and the auxiliary heat insulating material 95 are flat is described as an example. A part may be formed and a part of the joint surface of the auxiliary heat insulating material 95 corresponding to the concave portion or the opening may be protruded toward the lower heat insulating material 61a. Specific examples are shown in FIGS. FIG. 9 is a top view showing a modification of the lower heat insulating material in the second embodiment, and FIG. 10 is a sectional view taken along line XX in FIG. As shown in FIGS. 9 and 10, the opening 616 of the lower heat insulating material 61 b is formed at a location corresponding to the connecting portion 511 in the reaction device main body 51. On the other hand, the protruding portion 952 of the auxiliary heat insulating material 95 b is formed to protrude toward the opening 616. The protruding portion 952 is formed in a shape such that the upper end surface thereof is flush with the upper surface of the lower heat insulating material 61 b and fits into the opening 616.
Here, since the auxiliary heat insulating material 95b has a lower thermal conductivity than the lower heat insulating material 61b as described above, it is possible to more effectively insulate the heat conduction in the vicinity of the connecting portion 511. That is, the heat conduction between the vaporizer 4 and the reformer 6 and the heat transfer amount between the reformer 6 and the power generation cell 8 can be effectively suppressed.

[Third Embodiment]
Next, a third embodiment of the method for producing a reactor according to the present invention will be described. In the following description, the same parts as those of the second embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  FIG. 11 is a diagram schematically showing each step of the method for manufacturing the reactor 50C, (a) is a side view showing the reactor main body preparation step, and (b) is a side view showing the lower heat insulating material preparation step. (C) is a side view showing a heating part forming step, (d) is a side view showing a protection step, (e) is a side view showing an upper heat insulating material preparation step, (f) ) Is a side view showing an arrangement step, and (g) is a side view showing an accommodation step.

  First, in the reactor main body preparation step, a reactor main body 51 is prepared as shown in FIG. On the other hand, in the lower heat insulating material preparing step, as shown in FIG. 11B, a lower heat insulating material 61c having a dense and flat surface is prepared. Here, FIG. 12 is a top view showing the lower heat insulating material 61c. As apparent from FIG. 12, the planarizing film is omitted from the lower heat insulating material 61c of the reactor 50C. As described above, when a dense heat insulating material is used as the lower heat insulating material 61c, the surface flatness is as high as several nanometers to several tens of nanometers or less, so that a planarization film is not formed. Good.

  In the heating part forming step, a metal film to be the heating part 90 and the wiring 91 is formed on the lower heat insulating material 61c, and the metal film is etched, as shown in FIGS. 12 and 11C. Then, the wiring pattern of the heating unit 90 and the wiring 91 is formed.

In a protection process, a protective film formation process, an auxiliary heat insulating material preparation process, and a second arrangement process are performed.
In the protective film forming step, an oxide film to be the protective film 92 is formed on the upper surface of the heating unit 90, the upper surface of the wiring 91, and the upper surface of the lower heat insulating material 61c by the above-described film formation method, thereby forming the structure shown in FIG. The heating unit 90 and the wiring 91 are covered with a protective film 92 as shown in FIG.

In the auxiliary heat insulating material preparation step, an auxiliary heat insulating material 95 is prepared.
In the second arrangement step, the auxiliary heat insulating material 95 is disposed on the side of the lower heat insulating material 61c opposite to the side where the heating unit 90 is formed. At this time, the auxiliary heat insulating material 95 and the lower heat insulating material 61a are aligned so that the end surface 951 located on the power generation cell 8 side of the auxiliary heat insulating material 95 is flush with the end surface 613 of the lower heat insulating material 61c. Yes.

  In the upper heat insulating material preparation step, as shown in FIG. 11 (e), an upper heat insulating material 62 a having a concave portion 65 a corresponding to the upper portion of the reactor main body 51 is prepared.

  In the arranging step, as shown in FIG. 11 (f), the upper heat insulating material 62 a and the lower heat insulating material 61 c are aligned with respect to the reaction device main body 51. First, in the arranging step, the upper heat insulating material 62a is arranged on the opposite side of the reaction device main body 51 from the side facing the heating unit 90, and the reaction device main body 51 and the upper heat insulating material 62a are fitted (third arrangement). Process). Next, the reaction apparatus main body 51 and the lower heat insulating material 61 a are overlapped so that the reaction apparatus main body 51 is disposed in the first region 611. Thereby, while the reaction apparatus main body 51 and the heating part 90 are aligned, the heating part 90 and the wiring 91 and the reaction apparatus main body 51 face each other in a non-joined state (first arrangement step).

  In the housing step, as shown in FIG. 11 (g), a structure (reactor body 51, heat insulating portion 60c, auxiliary heat insulating material 95, protection structure) in which the reaction device main body 51, the heating unit 90, and the wiring 91 are aligned is provided. The film 92, the heating unit 90, and the wiring 91) are accommodated in the heat insulating container 10a. First, in the accommodation step, the heat insulating container 10a is prepared (heat insulating container preparation step). Then, a structure is accommodated in the heat insulation container 10a through the opening part 102a (structure accommodation process). Thereby, since the heat insulation part 60c fits in the hollow part 101a, even if the reactor main body 51 and the lower heat insulating material 61a are in a non-joined state, both are positioned.

  Further, in the housing step, a lid 97 for sealing the opening 102a is prepared (lid preparing step), and after the structure housing step, the lid 97 is attached to the opening 102a and the opening 102a is sealed (lid) Installation process). Thereby, the reactor 50C of the third embodiment is assembled.

As described above, according to the third embodiment, since the lower heat insulating material 61c is a dense heat insulating material, the flatness is such that the heating unit 90 and the wiring 91 can be formed without the flattening film 81. Can be secured.
Also in the third embodiment, the heating unit 90 is formed in the first region 611 of the lower heat insulating material 61c that faces the reaction device main body 51, and the second heat insulating material 61 protrudes from the reaction device main body 51. Since the wiring 91 is formed in the region 612, the wiring 91 can be formed in a portion not corresponding to the reaction part 50a. Thereby, the area | region which does not need to be heated like each connection part 511 can be prevented from heating. Furthermore, the wiring 91 can be formed thicker independently of the size of the connecting portion 511. As a result, the resistance of the wiring 91 can be reduced, and as a result, the heat generation efficiency can be increased.
Note that the present invention is not limited to the above embodiment, and can be modified as appropriate.

It is a block diagram which shows the portable electronic device carrying the fuel cell apparatus of this embodiment. It is a schematic diagram of the power generation cell with which the fuel cell apparatus of FIG. 1 is equipped. It is the sectional side view which showed typically the schematic structure of the reaction apparatus which concerns on 1st Embodiment. It is a figure which shows schematic structure of the reaction apparatus main body with which the reaction apparatus of FIG. 3 is equipped, (a) is a side view, (b) is a top view, (c) is a bottom view. It is a top view which shows the lower heat insulating material and planarization film | membrane in the reaction apparatus of FIG. It is a figure which shows typically each process of the manufacturing method of the reaction apparatus in 1st Embodiment, (a) is a side view which shows the reaction apparatus main body preparation process, (b) is a lower heat insulating material preparation process. (C) is a side view showing a planarization film forming step, (d) is a side view showing a heating part forming step, and (e) is a side view showing a protective film forming step. And (f) is a side view showing the upper heat insulating material preparation step, (g) is a side view showing the arrangement step, and (h) is a side view showing the accommodation step. It is a figure which shows typically each process of the manufacturing method of the reaction apparatus in 2nd Embodiment, (a) is a side view which shows the reaction apparatus main body preparation process, (b) is a lower heat insulating material preparation process. (C) is a side view showing a planarization film forming process, (d) is a side view showing a heating part forming process, (e) is a side view showing a protection process, (F) is a side view which shows an upper heat insulating material preparation process, (g) is a side view which shows an arrangement | positioning process, (h) is a side view which shows an accommodation process. It is a top view of the heat insulation container after the accommodation in 2nd Embodiment. It is a top view which shows the modification of the lower heat insulating material in 2nd Embodiment. It is XX sectional drawing in FIG. It is a figure which shows typically each process of the manufacturing method of the reaction apparatus in 3rd Embodiment, (a) is a side view which shows the reaction apparatus main body preparation process, (b) is a lower heat insulating material preparation process. (C) is a side view showing a heating part forming step, (d) is a side view showing a protection step, (e) is a side view showing an upper heat insulating material preparation step, (F) is a side view which shows an arrangement | positioning process, (g) is a side view which shows an accommodation process. It is a top view which shows the lower heat insulating material in 3rd Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fuel cell apparatus 2 Fuel container 4 Vaporizer (reaction part)
6 Reformer (reaction unit)
8 Power generation cell (reaction part)
9 Catalytic combustor (reaction section)
DESCRIPTION OF SYMBOLS 10 Heat insulation container 50 Reaction apparatus 51 Reaction apparatus main body 52 Flow path board 60 Heat insulation part 61 Lower heat insulation material (heat insulation material)
62 Upper insulation (second auxiliary insulation)
81 flattening film 90 heating part 91 wiring 92 protective film 95 auxiliary heat insulating material 97 lid 101 hollow part 102 opening part 103 inner wall part 104 gap 105 outer wall part 611 first area 612 second area 616 opening part 952 protruding part

Claims (20)

A reactor main body preparation step of preparing a reactor main body provided with a reaction section in which a reaction of a substance occurs;
A heating part preparing step of preparing a heating part for heating the reaction part of the reactor main body;
A first arrangement step of aligning the reactor main body and the heating unit,
The heating part preparation step includes
An insulation material preparation step for preparing the insulation material;
A planarizing film forming step of forming a planarized film having a flat surface on the heat insulating material;
A heating part forming step of forming the heating part that generates heat by energization on the planarizing film;
In the first arrangement step, the reaction apparatus main body and the heating section are aligned so that the heating section and the reaction apparatus main body face each other in a non-bonded state. Method. In the manufacturing method of the reactor of Claim 1,
The method for manufacturing a reaction apparatus, wherein the heat insulating material is dense. A reactor main body preparation step of preparing a reactor main body provided with a reaction section in which a reaction of a substance occurs;
A heating part preparing step of preparing a heating part for heating the reaction part of the reactor main body;
A first arrangement step of aligning the reactor main body and the heating unit,
The heating part preparation step includes
A first heat insulating material preparation step for preparing a dense heat insulating material;
A heating part forming step of forming the heating part that generates heat by energization on the heat insulating material;
In the first arrangement step, the reaction apparatus main body and the heating section are aligned so that the heating section and the reaction apparatus main body face each other in a non-bonded state. Method. In the manufacturing method of the reactor of Claim 3,
An auxiliary heat insulating material preparing step of preparing an auxiliary heat insulating material having a lower thermal conductivity than the dense heat insulating material;
And a second disposing step of disposing the auxiliary heat insulating material on the side of the heat insulating material opposite to the side on which the heating section is formed. In the manufacturing method of the reactor of Claim 4,
The heat insulating material has a recess or an opening,
The method for manufacturing a reaction apparatus, wherein the auxiliary heat insulating material has a protruding portion that protrudes into the recess or the opening. In the manufacturing method of the reaction device according to any one of claims 3 to 5,
The heating part preparation step includes
A flattening film forming step of forming a flattening film having a flat surface on the heat insulating material;
The said heating part formation process forms the said heating part on the said heat insulating material through the said planarization film | membrane, The manufacturing method of the reaction apparatus characterized by the above-mentioned. In the manufacturing method of the reaction device according to any one of claims 1 to 6,
The heating part preparation step includes
A method for producing a reaction apparatus, further comprising a protective film forming step of forming a protective film interposed between the heating section and the reaction apparatus main body on the heating section. In the reaction apparatus according to any one of claims 1 to 7,
The surface of the heat insulating material on which the heating part is formed has a first region facing the reaction device main body and a second region protruding from the reaction device main body,
The heating part forming step includes
A method of manufacturing a reaction apparatus, wherein the heating section is formed in the first area, and a wiring connected to the heating section is formed in the second area. In the manufacturing method of the reaction device according to any one of claims 1 to 8,
A second auxiliary heat insulating material preparation step of preparing a second auxiliary heat insulating material;
The manufacturing method of the reaction apparatus further including the 3rd arrangement | positioning process which arrange | positions said 2nd auxiliary heat insulating material on the opposite side to the side facing the said heating part in the said reaction apparatus main body. A reactor main body preparation step of preparing a reactor main body provided with a reaction section in which a reaction of a substance occurs;
A heating part preparing step of preparing a heating part for heating the reaction part of the reactor main body;
A first arrangement step of aligning the reactor main body and the heating unit,
The heating part preparation step includes
An insulation material preparation step for preparing the insulation material;
A planarizing film forming step of forming a planarized film having a flat surface on the heat insulating material;
A heating part forming step of forming the heating part that generates heat by energization on the planarizing film;
The surface of the heat insulating material on which the heating part is formed has a first region facing the reaction device main body and a second region protruding from the reaction device main body,
The heating part forming step includes
Forming the heating portion in the first region and forming a wiring connected to the heating portion in the second region;
In the first arrangement step, the reaction apparatus main body and the heating section are aligned so that the heating section and the reaction apparatus main body face each other in a non-bonded state. Method. A reactor main body preparation step of preparing a reactor main body provided with a reaction section in which a reaction of a substance occurs;
A heating part preparing step of preparing a heating part for heating the reaction part of the reactor main body;
A first arrangement step of aligning the reactor main body and the heating unit,
The heating part preparation step includes
A first heat insulating material preparation step for preparing a dense heat insulating material;
A heating part forming step of forming the heating part that generates heat by energization on the heat insulating material;
The surface of the heat insulating material on which the heating part is formed has a first region facing the reaction device main body and a second region protruding from the reaction device main body,
The heating part forming step includes
Forming the heating portion in the first region and forming a wiring connected to the heating portion in the second region;
In the first arrangement step, the reaction apparatus main body and the heating section are aligned so that the heating section and the reaction apparatus main body face each other in a non-bonded state. Method. In the manufacturing method of the reaction device according to any one of claims 1 to 11,
Insulating container preparing step for preparing a heat insulating container having an opening communicating with the hollow part in a hollow,
And a structure housing step of housing the structure in which the reaction apparatus main body and the heating unit are aligned in the heat insulating container through the opening after the first arrangement step. A method for producing a reaction apparatus. In the manufacturing method of the reaction device according to any one of claims 1 to 12,
Insulating container preparing step for preparing a heat insulating container having an opening communicating with the hollow part in a hollow,
A powder heat insulating material preparation step for preparing a powder heat insulating material;
After the first arrangement step, the structural body in which the reaction apparatus main body and the heating unit are aligned is accommodated in the heat insulating container through the opening, and the structure and the heat insulating container And a heat insulating material filling step of filling the powdery heat insulating material in between. In the manufacturing method of the reaction device according to any one of claims 12 and 13,
The structure housing step includes
The method for producing a reaction apparatus, wherein the structural body is accommodated in the heat insulating container so that a part of the heating unit protrudes outside from the opening. In the manufacturing method of the reaction device according to any one of claims 12 to 14,
A lid preparation step of preparing a lid for sealing the opening;
A method of manufacturing a reaction apparatus, further comprising a lid attaching step of attaching the lid to the opening and sealing the opening after the structure housing step. In the manufacturing method of the reaction device according to any one of claims 12 to 15,
The heat insulating container includes an inner wall provided inside the heat insulating container and an outer wall provided outside so as to form a gap together with the inner wall, and the internal pressure of the gap is lower than the atmospheric pressure. A method for producing a reactor characterized by the above. In the manufacturing method of the reaction device according to any one of claims 1 to 16,
The reaction unit includes a vaporizer that heats and vaporizes a liquid mixture of a raw fuel and water, a reformer that generates a reformed gas containing hydrogen by a reforming reaction of the gaseous raw fuel and water, and hydrogen. A method of manufacturing a reaction apparatus, wherein the reaction apparatus is any one of power generation cells that generate electric power by reaction with oxygen. A heat-insulating container that is hollow and has an opening communicating with the hollow part;
A reaction device main body having a reaction part in which a reaction of a substance occurs and disposed in the heat insulating container;
Insulation,
A planarization film formed on the heat insulating material so as to have a flat surface;
A heating unit that is formed on the planarizing film so as to face the reaction apparatus main body in a non-bonded state, and generates heat when energized,
The surface of the heat insulating material on which the heating part is formed has a first region facing the reaction device main body and a second region protruding from the reaction device main body,
The reaction apparatus, wherein the heating section is formed in the first area, and a wiring connected to the heating section is formed in the second area. A heat-insulating container that is hollow and has an opening communicating with the hollow part;
A reaction device main body having a reaction part in which a reaction of a substance occurs and disposed in the heat insulating container;
Dense insulation,
A heating unit that is formed on the heat insulating material so as to face the reaction apparatus main body in a non-bonded state, and generates heat when energized,
The surface of the heat insulating material on which the heating part is formed has a first region facing the reaction device main body and a second region protruding from the reaction device main body,
The reaction apparatus, wherein the heating section is formed in the first area, and a wiring connected to the heating section is formed in the second area. The reactor according to claim 18 or 19,
The reaction unit includes a vaporizer that heats and vaporizes a liquid mixture of a raw fuel and water, a reformer that generates a reformed gas containing hydrogen by a reforming reaction of the gaseous raw fuel and water, and hydrogen. A reaction apparatus, which is any one of power generation cells that generate electric power by reaction with oxygen.

Images