JP2010114948A - Pulse motor and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve kinematical performance in drive or power efficiency, etc. by solving the problem of an eddy current in a pulse motor. <P>SOLUTION: Stator cores 10 are stacked and they are fixed to a fixing board 3 via electric insulators 4 without grinding their end faces. Hereby, the fellow end faces of the stator cores 10 contact with each other in grinding, which can avoid the formation of an electric conductive path. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a pulse motor in which a stator is formed by laminating a magnetic body having an insulating layer provided on the surface, and a mover is driven on a plane along the stator, and a manufacturing method thereof.

  There is known a pulse motor that drives a mover horizontally on a platen (stator).

  11A is a plan view showing a stator in a conventional pulse motor, FIG. 11B is a cross-sectional view in the YZ plane of the Y-direction drive portion of the mover in the conventional pulse motor, and FIG. 12A is a cross-sectional view of the Y-direction drive unit in the XZ plane, FIG. 12A is a cross-sectional view of the X-direction drive unit of the mover in the conventional pulse motor, and FIG. 12B is a cross-sectional view of the X-direction drive unit. It is sectional drawing in a plane.

  As shown in FIGS. 11 and 12, the pulse motor includes a stator 1 installed horizontally, and a mover 2 that moves two-dimensionally in a horizontal plane (in the XY plane) along the stator 1 via a gap δg. Is provided.

  A lattice tooth 11 is formed on the stator 1, and a nonmagnetic material 12 is embedded in a tooth gap between the lattice teeth 11. The tooth gap width ratio τ is arbitrarily selected with respect to the magnetic pole tooth pitch P of the lattice teeth 11. The surfaces of the lattice teeth 11 and the nonmagnetic material 12 facing the gap δg are finished smoothly.

  As shown in FIGS. 11-12, the stator 1 is comprised by laminating | stacking the stator core 10 which makes a Y direction a longitudinal direction in a X direction. In general, a motor using electromagnetic force employs a laminated structure using an electromagnetic soft iron steel plate whose surface is insulated as the stator core 10 in order to suppress eddy current (iron loss) generated during movement. In this case, the lattice teeth 11 are formed by grooving the laminated stator core 10. The details are shown in Patent Document 1 below.

As shown in FIG. 11, the Y-direction drive unit is formed by arranging a plurality of units shown in FIG. 11B in the X-direction, and as shown in FIG. 12, the X-direction drive unit is shown in FIG. Each unit is configured by arranging a plurality of units shown in the Y direction.
Note that the arrangement of the driving units on each axis may be in either the X direction or the Y direction. Furthermore, the arrangement of the drive units for each axis may be any arrangement as long as the thrust generation directions match.

  The mover 2 has a plurality of salient poles 21 around which an exciting coil 22 is wound. As shown in FIGS. 11 and 12, a bias permanent magnet 23 is provided on the salient pole 21 of the mover 2.

  Iron core teeth 24 are formed in the portion of the salient pole 21 facing the gap δg. The tooth gap adjacent to the iron core teeth 24 is filled with a nonmagnetic material 25, and the surface facing the gap surface δg is smoothly finished. In general, the interval between the adjacent salient poles 21 is set so that the relative position of the iron core teeth 24 differs from the stator 1 in accordance with the number of excitation phases, and the movable element 2 and the stator 1 are arranged to face each other with a gap δg. Has been. The mover 2 is supported relative to the stator 1 so as to be able to move with a gap δg. FIG. 11 shows a state in which the mover 2 floats while maintaining the gap δg by the air bearing, and the air flow is indicated by arrows. Other structures that maintain this gap δg include linear bearings, magnetic bearings, and fluid bearings.

  Next, the operation of the pulse motor of this embodiment will be described.

As shown in FIG. 11B and FIG. 12B, the exciting coil magnetic flux φ _C generated by the exciting coil 22 of the mover 2 is applied to the stator core 10 from the salient poles 21 and the iron core teeth 24 via the gap δg. It passes through the lattice teeth 11, passes through the stator core 10, and returns to the mover 2 again. At this time, since the iron core teeth 24 of the salient poles 21 adjacent to each other are configured so that the positions facing the lattice teeth 11 are different, the magnetic attraction force (hereinafter referred to as thrust) F of the iron core teeth 24 and the lattice teeth 11 is reduced. The mover 2 moves in a strong direction. By controlling the excitation coil magnetic flux φ _C in this way, the mover can be moved. Further, by adding the bias permanent magnet magnetic flux φ _M , the thrust F due to the composite magnetic flux φ is influenced by the magnitude of the magnetic flux change Δφ and the input magnetomotive force while the phase Δθ of the opposing position of the iron core teeth 24 and the lattice teeth 11 changes. A linear thrust F proportional to each other is generated (see equations 1 and 2 described later). Patent Document 2 below shows such a principle of thrust generation.

JP 2007-221950 A JP 2006-353074 A

  FIG. 13 shows a general eddy current Ie. The eddy current Ie induced | guided | derived by the synthetic | combination magnetic flux (phi) of the needle | mover 2 is shown in the stator core 10 made from the electromagnetic soft iron steel plate by which the surface was insulated. FIG. 13A shows the eddy current Ie induced when the composite magnetic flux φ passes through the cross section (XZ plane) in the thickness direction of the stator core 10 having the thickness d, and FIG. FIG. 13C shows the eddy current Ie induced when the synthetic magnetic flux φ flows through the longitudinal direction surface (YZ plane) of the stator core 10, and FIG. 13C shows the stator core 10 being laminated as a unit laminate 10A. The eddy current Ie induced when the composite magnetic flux φ flows through the cross section in the plate thickness direction is shown.

  The stator cores 10 are electrically insulated by the insulating layer 16, and the eddy current Ie in the cross section in the plate thickness direction of the stator core 10 does not flow to the adjacent stator cores 10 simply by stacking. The eddy current Ie induced by the mover 2 is proportional to the product of “magnetic flux density” and “moving speed”, and inversely proportional to the total electrical resistance of the path through which the eddy current flows.

  When the stator cores 10 are stacked to form the unit stacked body 10A, the unit stacked body 10A is bent by residual stress or the like when the plurality of stator cores 10 are stacked and bonded. Highly accurate parallelism and flatness (geometric tolerance) are required for the mover 2 to move smoothly on the multiple unit laminate 10A. Therefore, in order to correct this curvature, as shown in FIG. 14A, grinding is performed on both the surface on which the lattice teeth 11 are formed and on the fixed platen 3 side. FIG. 14B shows a cross section of the unit laminated body 10A subjected to this grinding.

  As shown in FIG. 14 (b), both ground surfaces of the unit laminate 10A break the insulating layer that is electrically insulated between the stator cores 10 due to bridging (burrs) during grinding, and this bridging is the stator. The eddy current Ie in the cross section in the thickness direction of the iron core 10 becomes the electric conduction paths 15 and 17 that flow to the adjacent stator iron core 10. The relationship between the eddy current Ie ′ flowing through the bridging electrical conduction paths 15 and 17 and the eddy current Ie shown in FIG. 13 is Ie ′> Ie, which is the specific resistance value ρ of the stator core 10 made of an electromagnetic soft iron steel plate. Is large, and the region in the cross section of the plate thickness is narrow and the total resistance value of the eddy current path is large. On the other hand, the bridging electrical conduction paths 15 and 17 formed by grinding process have a large surface area. Due to the small value.

  15 and 16 show the eddy current and electromagnetic braking force induced by the X-direction mover and the Y-direction mover on the unit laminate 10A. 15A and 15B are an XZ sectional view and a YZ sectional view when moving in the X direction on the unit laminated body 10A at the speed Vx, and FIGS. 16A and 16B are It is XZ sectional drawing and YZ sectional drawing at the time of moving on 10 A of unit laminated bodies in the Y direction at speed-Vy.

First, in FIG. 15, the bias permanent magnet magnetic flux φ _{M of} the mover 2 moving at the speed Vx induces eddy currents I _emx in different directions before and after the moving direction. The eddy current I _emx becomes a current in the same direction immediately below the salient pole 21 and interacts with the bias permanent magnet magnetic flux φ _M to generate F _bmx as a force that pushes the unit laminated body 10A in the moving direction. However, since the unit laminated body 10A is fixed to the stationary platen 3, as a reaction, the mover 2 has an electromagnetic braking force −F _bmx (the electromagnetic braking force is proportional to the product of “magnetic flux density” and “eddy current” Acting in a direction that impedes movement) and is decelerated. The eddy current I _ecx induced by the excitation coil magnetic flux φ _C shown in FIG. 11 flows in the longitudinal plane of the stator core 10 as shown in FIG. 12, but excitation occurs when the mover 2 is moving. Since the coil magnetic flux φ _C is an alternating magnetic flux generated by an AC exciting current, no electromagnetic braking force is generated in a certain direction. However, due to the low electrical resistance eddy current circuit caused by the bridging electric conduction paths 15 and 17, the eddy current Ie ′ is larger than that in FIG. 13C, and the amount of heat generated in the stator core 10 is calculated as eddy current loss (iron loss). Increase.

Next, in FIG. 16, the bias permanent magnet magnetic flux φ _{M of} the mover 2 moving in the Y direction at the speed −Vy similarly induces eddy current I _emy in the unit stack 10 _{</ b> A} in different directions before and after the moving direction. _Upon receiving the electromagnetic braking force F _bmy , the _vehicle is decelerated. Since this eddy current I _emy flows in the cross section in the thickness direction of the stator core 10 with high electrical resistance, the electromagnetic braking force F _bmy becomes | F _bmy | <| −F _bmx |. The eddy current I _ecy induced by the exciting coil magnetic flux φ _C is the eddy current Ie ′ flowing through the bridging electrical conduction paths 15 and 17 as shown in FIG. 14B, but the mover 2 is moving. In this case, since the exciting current of the exciting coil is alternating current, no electromagnetic braking force is generated. Due to the low electrical resistance eddy current circuit caused by the bridging electrical conduction paths 15 and 17, the eddy current Ie ′ is larger than that in FIG. 13C, and the heating value of the stator core 10 is increased as eddy current loss (iron loss). Let

Therefore, when the mover 2 moves at a constant speed, a thrust F _v (F _v = F _b ) that antagonizes the electromagnetic braking force F _b must be applied in order to maintain a constant speed V. This causes extra power loss. Further, in the case of accelerating motion, in order to maintain a constant acceleration Acc, in addition to the acceleration thrust F _acc , a thrust F _a (F _a = F _b ) that antagonizes the electromagnetic braking force F _b must be continuously applied. Furthermore, a large power loss is caused by the excitation coil magnetic flux φ _C necessary for controlling the motion.

  Thus, conventionally, the motion characteristics and power efficiency during high-speed movement deteriorate, and a large loss occurs particularly during movement in the X direction.

  An object of the present invention is to solve the eddy current problem of a pulse motor and improve the motion performance and power efficiency during driving.

The pulse motor of the present invention is a pulse motor in which a stator is formed by laminating a magnetic body having an insulating layer provided on a surface thereof, and the mover is driven on a plane along the stator. The eddy current circuit on the outer peripheral surface of the stator, through which the eddy current induced by the current flows, is cut off.
According to this pulse motor, since the eddy current circuit on the outer peripheral surface of the stator is cut off, it is possible to improve the motion performance and power efficiency during driving.

  The eddy current circuit may be interrupted at a non-ground surface of the end surface of the laminated magnetic body.

  The eddy current circuit may be interrupted by an electrical insulating layer provided on an end face of the laminated magnetic body.

  The end surface may be a surface opposite to the mover.

The method of manufacturing a pulse motor according to the present invention is a method of manufacturing a pulse motor in which a stator is formed by laminating a magnetic material having an insulating layer on the surface, and a mover is driven on a plane along the stator. The method includes the steps of laminating the magnetic bodies and assembling the stator without grinding the end faces of the laminated magnetic bodies.
According to this method for manufacturing a pulse motor, since the stator is assembled without grinding the end surfaces of the laminated magnetic bodies, it is possible to avoid the formation of an electric conduction path on the end surfaces of the magnetic bodies.

The method of manufacturing a pulse motor according to the present invention is a method of manufacturing a pulse motor in which a stator is formed by laminating a magnetic material having an insulating layer on the surface, and a mover is driven on a plane along the stator. In the method, the step of laminating the magnetic body, the step of providing an insulating layer on the end surface of the laminated magnetic body, and the step of grinding the end surface opposite to the insulating layer of the laminated magnetic body, It is characterized by providing.
According to this method of manufacturing a pulse motor, since the end face opposite to the insulating layer is ground, at least one of the end faces of the magnetic laminate is kept in an insulating state, and the entire surface of the magnetic laminate is electrically conductive. The formation of a path can be avoided.

  According to the pulse motor of the present invention, since the eddy current circuit on the outer peripheral surface of the stator is cut off, it is possible to improve the motion performance and power efficiency during driving.

  According to the method for manufacturing a pulse motor of the present invention, since the stator is assembled without grinding the end faces of the laminated magnetic bodies, it is possible to avoid the formation of an electric conduction path on the end faces of the magnetic bodies.

  According to the method for manufacturing a pulse motor of the present invention, since the end surface opposite to the insulating layer is ground, it is possible to avoid the formation of an electric conduction path over the entire surface of the magnetic laminate.

  Hereinafter, an embodiment of a pulse motor according to the present invention will be described.

  Unlike the conventional pulse motor, the pulse motor of this embodiment is manufactured by laminating a stator core (magnetic body) as a unit laminated body and then fixing it to a stationary platen without performing polishing. It is a feature.

  FIG. 1A is a plan view showing a stator in the pulse motor of this embodiment, FIG. 1B is a cross-sectional view in the YZ plane of the Y-direction drive portion of the mover in the pulse motor of this embodiment, and FIG. FIG. 2C is a cross-sectional view of the Y-direction drive unit in the XZ plane, FIG. 2A is a cross-sectional view of the X-direction drive unit of the mover in the pulse motor of this embodiment, and FIG. It is sectional drawing in the XZ plane of a X direction drive part.

  As shown in FIGS. 1 and 2, the pulse motor according to the present embodiment performs two-dimensional motion in the horizontal plane (in the XY plane) along the stator 1 and the stator 1 through the gap δg. A mover 2 is provided. As shown in FIG. 1, the stator 1 is fixed to the stationary platen 3 through an electric insulating layer 4.

  A lattice tooth 11 is formed on the stator 1, and a nonmagnetic material 12 is embedded in a tooth gap between the lattice teeth 11. The tooth gap width ratio τ is arbitrarily selected with respect to the magnetic pole tooth pitch P of the lattice teeth 11. The surfaces of the lattice teeth 11 and the nonmagnetic material 12 facing the gap δg are finished smoothly.

  As shown in FIGS. 1 to 2, the stator 1 is configured by laminating a stator core 10 whose longitudinal direction is the Y direction in the X direction. In general, a motor using electromagnetic force employs a laminated structure using an electromagnetic soft iron steel plate whose surface is insulated as the stator core 10 in order to suppress eddy current (iron loss) generated during movement. In this case, the lattice teeth 11 are formed by grooving the laminated stator core 10. The details are shown in Patent Document 1.

As shown in FIG. 1, the Y-direction drive unit is formed by arranging a plurality of units shown in FIG. 1B in the X direction. As shown in FIG. 2, the X-direction drive unit is shown in FIG. Each unit is configured by arranging a plurality of units shown in the Y direction.
Note that the arrangement of the driving units on each axis may be in either the X direction or the Y direction. Furthermore, the arrangement of the drive units for each axis may be any arrangement as long as the thrust generation directions match.

  The mover 2 has a plurality of salient poles 21 around which an exciting coil 22 is wound. As shown in FIGS. 1 and 2, a bias permanent magnet 23 is provided on the salient pole 21 of the mover 2. A bias permanent magnet may be provided in another part of the mover 2.

  Iron core teeth 24 are formed in the portion of the salient pole 21 facing the gap δg. The tooth gap adjacent to the iron core teeth 24 is filled with a nonmagnetic material 25, and the surface facing the gap surface δg is smoothly finished. A tooth tip magnet may be inserted into the tooth gap adjacent to the iron core tooth 24. In general, the interval between the adjacent salient poles 21 is set so that the relative position of the iron core teeth 24 differs from the stator 1 in accordance with the number of excitation phases, and the movable element 2 and the stator 1 are arranged to face each other with a gap δg. Has been. The mover 2 is supported relative to the stator 1 so as to be able to move with a gap δg. FIG. 1 shows a state in which the mover 2 floats while maintaining the gap δg by the air bearing, and the air flow is indicated by arrows. Other structures that maintain this gap δg include linear bearings, magnetic bearings, and fluid bearings.

  Next, the operation of the pulse motor of this embodiment will be described.

As shown in FIGS. 1B and 2B, the exciting coil magnetic flux φ _C generated by the exciting coil 22 of the mover 2 is applied to the stator core 10 from the salient poles 21 and the iron core teeth 24 via the gap δg. It passes through the lattice teeth 11, passes through the stator core 10, and returns to the mover 2 again. At this time, since the iron core teeth 24 of the salient poles 21 adjacent to each other are configured so that the positions facing the lattice teeth 11 are different, the magnetic attraction force (hereinafter referred to as thrust) F of the iron core teeth 24 and the lattice teeth 11 is reduced. The mover 2 moves in a strong direction. By controlling the excitation coil magnetic flux φ _C in this way, the mover can be moved. Further, by adding the bias permanent magnet magnetic flux φ _M , the thrust F due to the composite magnetic flux φ is influenced by the magnitude of the magnetic flux change Δφ and the input magnetomotive force while the phase Δθ of the opposing position of the iron core teeth 24 and the lattice teeth 11 changes. A linear thrust F proportional to each is generated (see Equations 1 and 2). Patent Document 2 discloses such a principle of thrust generation.

  In the pulse motor of the present embodiment, when the stator 1 is manufactured, the stator core 10 is laminated to form the unit laminated body 10A, and then the grinding process shown in FIG. Fix to board 3. At this time, a flexible electrical insulator 4 is inserted between the stator core 10 and the stationary platen 3. As shown in FIG. 3, the insulating layer 16 is present between the stator cores 10 due to the insulation treatment of the stator cores 10.

  This will be specifically described below. For the reason explained in the prior art, the unit laminate requires grinding on both sides as shown in FIG. On the other hand, in the configuration of the present embodiment, the grinding process is not performed, and the non-grinding unit laminated body 10 </ b> A is fixed on the flexible electrical insulator 4 stacked on the stationary platen 3. At this time, the flexible electrical insulator 4 absorbs the curvature caused by the residual stress of the non-grinding unit laminate 10A. Thereafter, the lattice teeth 11 are ground.

  By adopting this configuration, the insulating layer 16 of the stator core 10 is maintained on the surface of the unit laminate 10A on the side of the stationary platen 3 (the lower surface in FIG. 3) as shown in FIG. There is no electrical conduction path. On the surface on which the lattice teeth 11 are formed, a bridging electric conduction path 15 is generated due to grinding, but there is no electric conduction path on the fixed platen 3 side, so the eddy current circuit shown in FIG. 14B is not formed. Therefore, eddy current cannot circulate around the unit laminate 10A. Furthermore, the electrical insulation between the unit laminated bodies 10A in which a large number of electrical insulators 4 inserted between the fixed platen 3 and the unit laminated body 10A are adjacently arranged is performed.

  Thus, in the pulse motor of the present embodiment, the electromagnetic braking force and the iron loss due to the eddy currents of the unit laminated body 10A and the stator core 10 that are generated by the magnetic change and motion of the mover 2 can be effectively suppressed.

  4 and 5 are diagrams showing the effect of reducing the electromagnetic braking force of the present invention. FIGS. 4 (a) and 5 (a) are cross-sectional views in the XZ plane, and FIGS. 4 (b) and 5 (b). ) Respectively indicate cross sections in the XZ plane.

As shown in FIGS. 4A and 4B, there is no eddy current Iemx induced by the bias permanent magnet magnetic flux φ _M generated by the bias permanent magnet 23 of the mover 2 moving in the X direction at the speed Vx. It does not flow due to the electrical insulation effect caused by the grinding unit laminate 10A and the electrical insulator 4. Therefore, the electromagnetic braking force -Fbmx does not occur. The eddy current Iecx induced by the exciting coil magnetic flux φ _C generated by the exciting coil 22 is the eddy current Ie flowing in the longitudinal plane of the stator core 10 as shown in FIG. Is moving, the exciting coil magnetic flux φ _C is an alternating magnetic flux generated by an AC exciting current, so that no electromagnetic braking force is generated in a certain direction. This eddy current Iecx causes the stator core 10 to generate heat as an eddy current loss. However, the eddy current circuit is electrically insulated between the ungrinded unit laminated bodies 10A arranged adjacent to each other due to the electrical insulator 4. Is only in the stator core 10, and the eddy current circuit between the stator cores 10 is not formed into a parallel circuit. Therefore, the total electrical resistance of the eddy current path is larger than that of the conventional configuration, and the eddy current generated is smaller than before. Thus, the motion characteristics and power efficiency can be improved.

Further, as shown in FIGS. 5A and 5B, the bias permanent magnet magnetic flux φ _{M of} the mover 2 moving in the Y direction at the speed −Vy similarly induces an eddy current Iemy and electromagnetically controls it as a reaction. Power -Fbmy is generated. However, the stator core 10 is insulated from each other due to the ungrinded unit laminate 10A and the electrical insulator 4, and the eddy current circuit is not parallelized. The eddy current Iemy is shown in FIG. Since only the eddy current circuit in the longitudinal plane of the stator core 10 having high electrical resistance flows, the total electrical resistance of the eddy current path is larger than that of the conventional configuration, and the induced eddy current Iemy is further reduced. As a result, the electromagnetic braking force -Fbmy becomes smaller than the conventional one. The eddy current Iecy induced by the exciting coil magnetic flux φ _C generated by the exciting coil 22 is the eddy current Ie flowing in the cross section in the plate thickness direction of the stator core 10 shown in FIG. When the mover 2 is moving, the exciting coil magnetic flux φ _C is an alternating magnetic flux generated by an AC exciting current, so that no electromagnetic braking force in a certain direction is generated. However, the stator core 10 is heated as eddy current loss. The stator core 10 is insulated from each other due to the ungrinded unit laminated body 10A and the electrical insulator 4, and the eddy current circuit is not parallelized. Therefore, the total electric resistance of the eddy current path is larger than in the conventional configuration, and the induced eddy current Iemy is smaller than in the conventional configuration. Thus, the motion characteristics and power efficiency can be improved. Further, the cost can be reduced by omitting a highly accurate grinding process for each unit laminate 10A.

  Based on the above, according to the pulse motor of this embodiment, it is possible to effectively improve the motion characteristics and power efficiency during high-speed movement, and to reduce the cost of a high-performance motor.

  Hereinafter, a configuration example of the stator and a manufacturing method thereof will be described.

  6A and 6B are diagrams showing the configuration of the stator, FIG. 6A is a plan view, FIG. 6B is a cross-sectional view taken along line BB in FIG. 6A, and FIG. It is CC sectional view taken on the line of a).

  As shown in FIGS. 6A to 6C, the fixed platen 3 is formed with a protrusion 31 for positioning the stator core. As shown in FIG. 6, an electrical insulator 4 is inserted between the stationary platen 3 and the stator core 10.

  FIG. 7 is an exploded perspective view showing the configuration of the stator. As shown in FIG. 7, the stator core 10 is formed with a notch 10 a that houses the protrusion 31. The stator cores 10 forming the same layer are arranged in the Y direction with the butted portion 10c interposed therebetween. By providing an appropriate gap in the butt portion 10c, thermal stress, dimensions, shape errors, etc. are dealt with. Further, the stator cores 10 forming the adjacent layers are stacked in the X direction with the connection portions 10c being alternately shifted.

  The stator core 10 is accurately positioned by the protrusion 31. That is, the stator core 10 is positioned in the X direction by abutting the contact portion 10b (FIG. 7) of the stator core 10 against the reference surface R1 (FIG. 6) of the protrusion 31. Further, the stator core 10 is positioned in the Y direction by abutting the end surface of the notch 10a (FIG. 7) of the stator core 10 against the reference surface R2 (FIG. 6) of the protrusion 31.

  As described above, in the example of FIGS. 6 and 7, the unit core is not formed, and the stator core 10 is directly stacked on the stationary platen 3.

  After the stator cores 10 are stacked, the lattice teeth 11 can be formed by grinding.

  According to this configuration, the stator iron core 10 is directly laminated on the electric insulator 4, and a bridging electric conduction path due to grinding is not generated. Therefore, the same effect as in the above embodiment can be obtained. Further, the cost can be reduced by omitting a highly accurate grinding process for each unit laminate.

  FIG. 8 is an exploded perspective view showing an example in which processing for forming lattice teeth on the stator core is performed in advance.

  As shown in FIG. 8, in this example, the stator core 10K in which the magnetic pole teeth 10d are formed and the stator core 10L without the magnetic pole teeth are combined. The height of the stator core 10L is set such that its upper end coincides with the bottom of the magnetic pole teeth 10d of the stator core 10K. The stator cores 10K and the stator cores 10L are alternately stacked after being stacked by a predetermined number corresponding to the pitch P of the lattice teeth 11. The arrangement method of the stator core 10K and the stator core 10L is the same as that of the stator core 10 (FIG. 7).

  According to this configuration, the stator iron core 10K and the stator iron core 10L made of electromagnetic soft steel sheets whose surfaces are insulated are directly laminated on the electric insulator 4, so that the bridging electric conduction path on the fixed platen 3 side is provided. Does not occur. Further, since the lattice teeth 11 are formed by repeatedly laminating a predetermined number of stator cores 10K with magnetic pole teeth 10d and stator cores 10L with no magnetic pole teeth, grinding processing for forming the lattice teeth 11 is performed. It is not necessary and no bridging electrical conduction path between the lattice teeth is generated.

  For this reason, there is no electrical conduction path between the adjacent stator cores 10K and 10L, and the eddy current Ie induced in the combined magnetic flux φ of the mover 2 is minimized. Therefore, the effects described in the embodiment can be further improved. Further, the cost can be reduced by omitting a highly accurate grinding process for each unit laminate. Based on the above, the present invention can further improve the motion characteristics and power efficiency during high-speed movement, and can reduce the cost of a high-performance surface motor.

  Next, a method for manufacturing the stator will be described with reference to FIGS.

  FIG. 9 shows a manufacturing method in the configuration shown in FIGS.

  As shown in FIG. 9A, in the X-direction magnetic pole tooth machining, a bridging electric conduction path is generated due to grinding. Further, as shown in FIG. 9B, also in the Y-direction magnetic pole tooth machining, a bridging electric conduction path is generated due to the grinding process.

  However, as shown in FIG. 9C, the insulating paper 5 can be laminated in advance and the lattice teeth 11 can be formed by grinding. In this way, when the insulating paper 5 is inserted, the insulating paper 5 prevents bridging and does not generate an electric conduction path. For this reason, the eddy current Ie induced by the combined magnetic flux φ of the mover 2 further decreases. Therefore, it is possible to effectively improve the motion characteristics and power efficiency during high-speed movement.

  FIG. 10 shows a manufacturing method in the configuration shown in FIG.

  In the configuration of FIG. 8, since the lattice teeth 11 are formed only due to the lamination of the stator core 10K and the stator core 10L, errors in the dimensions of the magnetic pole teeth of the stator core 10K, the plates of the stator cores 10K, 10L Due to the thickness error and the stator core stacking error, a dimensional error occurs in the lattice teeth 11. As shown in FIGS. 10A and 10B, the dimensional error can be eliminated by forming the lattice teeth 11 by grinding after the stator cores 10K and 10L are stacked. The bridging electrical conduction path generated by this grinding process increases electromagnetic braking force and iron loss. That is, as shown in FIG. 10A, in the X-direction magnetic pole tooth machining, a slight bridging electric conduction path is generated in the magnetic pole tooth portion due to grinding. As shown in FIG. 1B, a slight bridging electric conduction path is similarly generated in the Y-direction magnetic pole tooth machining due to grinding.

  However, since the grinding amount can be suppressed in the configuration of FIG. 10, the dimensional accuracy of the magnetic pole teeth 11 is improved while minimizing the bridging electric conduction path, and the cost is reduced by minimizing the grinding amount. I can do it.

  It is also effective against magnetic property deterioration which becomes a problem when using a high saturation magnetic flux density material (CoFe system) used for obtaining a high thrust. A high saturation magnetic flux density material (CoFe type) is liable to lose its magnetic properties by machining, and conventionally, when the lattice teeth 11 are formed, the amount of grinding is large, and the magnetic properties are significantly deteriorated due to the processing effect. However, in the configuration of FIG. 10, since the amount of grinding is small, it is possible to suppress the deterioration of magnetic characteristics to the minimum. Therefore, the high-performance magnetic properties of the high saturation magnetic flux density material (CoFe series) can be utilized to the maximum.

  As shown in FIG. 10C, when the insulating paper 5 is laminated in advance and ground, the insulating paper 5 prevents bridging and does not generate an electric conduction path. In this case, the eddy current induced in the combined magnetic flux φ of the mover 2 further decreases. Therefore, the electromagnetic braking force and the iron loss can be more effectively suppressed while improving the dimensional accuracy of the magnetic pole teeth 11 due to the finish grinding.

  As described above, according to the pulse motor of the present invention, since the eddy current circuit on the outer peripheral surface of the stator is cut off, it is possible to improve the motion performance and power efficiency during driving. Further, according to the method for manufacturing a pulse motor of the present invention, the stator is assembled without grinding the end faces of the laminated magnetic bodies, so that it is possible to avoid the formation of an electric conduction path on the end faces of the magnetic bodies. Furthermore, according to the method for manufacturing a pulse motor of the present invention, since the end surface opposite to the insulating layer is ground, it is possible to avoid the formation of an electric conduction path over the entire surface of the magnetic laminate.

  The scope of application of the present invention is not limited to the above embodiment. The present invention is widely applied to a pulse motor in which a stator is formed by laminating a magnetic body having an insulating layer provided on the surface, and a movable element is driven on a plane along the stator, and a method for manufacturing the same. Can be applied.

It is a figure which shows the structure of a pulse motor, (a) is a top view which shows the stator in a pulse motor, (b) is sectional drawing in the YZ plane of the Y direction drive part of the needle | mover in a pulse motor, (c) is a figure. It is sectional drawing in the XZ plane of a Y direction drive part. It is a figure which shows the structure of a pulse motor, (a) is sectional drawing in the YZ plane of the X direction drive part of the needle | mover in a pulse motor, (b) is sectional drawing in the XZ plane of an X direction drive part. Sectional drawing which shows the state which laminated | stacked the stator core. It is a figure which shows the reduction effect of electromagnetic braking force, (a) is sectional drawing which shows the cross section in a XZ plane, (b) is a cross section which shows the cross section in a XZ plane, respectively. It is a figure which shows the reduction effect of electromagnetic braking force, (a) is sectional drawing which shows the cross section in a XZ plane, (b) is a cross section which shows the cross section in a XZ plane, respectively. It is a figure which shows the structure of a stator, (a) is a top view, (b) is the BB sectional view taken on the line (a), (c) is the CC sectional view taken on the line (a). The disassembled perspective view which shows the structure of a stator. The disassembled perspective view which shows the structure of a stator. It is a figure which shows the manufacturing method of a stator, (a) is a figure which shows X direction magnetic pole tooth processing, (b) is a figure which shows Y direction magnetic pole tooth processing, (c) is a lattice tooth after laminating | stacking insulating paper. The figure which shows the example formed by grinding. It is a figure which shows the manufacturing method of a stator, (a) is a figure which shows X direction magnetic pole tooth processing, (b) is a figure which shows Y direction magnetic pole tooth processing, (c) is a lattice tooth after laminating | stacking insulating paper. The figure which shows the example formed by grinding. It is a figure which shows the conventional pulse motor, (a) is a top view which shows the stator in the conventional pulse motor, (b) is sectional drawing in the YZ plane of the Y direction drive part of the needle | mover in the conventional pulse motor, (C) is sectional drawing in the XZ plane of a Y direction drive part. It is a figure which shows the structure of the conventional pulse motor, (a) is sectional drawing in the YZ plane of the X direction drive part of the needle | mover in the conventional pulse motor, (b) is sectional drawing in the XZ plane of an X direction drive part. It is a figure which shows the general eddy current Ie, (a) is a figure which shows the eddy current Ie in the cross section of the thickness direction of a stator core, (b) is the figure which shows the eddy current Ie in the longitudinal direction surface of a stator core. The figure to show, (c) is a figure which shows the eddy current Ie in a unit laminated body. It is a figure which shows a grinding process etc., (a) is a figure which shows the mode of a grinding process, (b) is sectional drawing of the unit laminated body to which grinding was given. It is a figure which shows an eddy current and electromagnetic braking force, (a) is XZ sectional drawing, (b) is YZ sectional drawing. It is a figure which shows an eddy current and electromagnetic braking force, (a) is XZ sectional drawing, (b) is YZ sectional drawing.

Explanation of symbols

1 Stator 2 Movable Element 4 Electric Insulator (Insulating Layer)
5 Insulating paper (insulating layer)
10 Stator core (magnetic material)

Claims (6)

In a pulse motor in which a stator is formed by laminating a magnetic body provided with an insulating layer on the surface, and a mover is driven on a plane along the stator.
A pulse motor characterized in that an eddy current circuit on an outer peripheral surface of the stator through which an eddy current induced by the mover flows is cut off. 2. The pulse motor according to claim 1, wherein the eddy current circuit is cut off at a non-ground surface of an end face of the laminated magnetic body. 2. The pulse motor according to claim 1, wherein the eddy current circuit is interrupted by an electrical insulating layer provided on an end face of the laminated magnetic body. The pulse motor according to claim 2, wherein the end surface is a surface opposite to the movable element. In the method of manufacturing a pulse motor, a stator is formed by laminating a magnetic body provided with an insulating layer on the surface, and a mover is driven on a plane along the stator.
Laminating the magnetic material;
Assembling the stator without grinding the end faces of the laminated magnetic bodies;
A method for manufacturing a pulse motor, comprising: In the method of manufacturing a pulse motor, a stator is formed by laminating a magnetic body provided with an insulating layer on the surface, and a mover is driven on a plane along the stator.
Laminating the magnetic material;
Providing an insulating layer on the end face of the laminated magnetic body;
Grinding the end surface of the laminated magnetic body opposite to the insulating layer;
A method for manufacturing a pulse motor, comprising: