JP2010096509A - Servo type accelerometer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve assembly working efficiency of the pendulum of a servo type accelerometer and a coil bobbin wound by a Toluca coil. <P>SOLUTION: The servo type accelerometer includes: a Toluca coil; the pendulum having two pendulum conductors for connecting the Toluca coil; and a coil bobbin for fixing the Toluca coil to the pendulum. The coil bobbin includes: an end plate; a projection having an outer shape smaller than that of the end plate on one surface of the end plate; and a bobbin conductor formed in the direction of an outer edge of the end plate from two different places of the projection. Two bobbin conductors formed at the projection and two pendulum conductors are formed at respective contacting positions. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a servo accelerometer having an improved joint structure between a pendulum and a torquer coil.

  As a structural example of a conventional servo-type accelerometer, for example, one shown in FIG. 9 is known. In FIG. 9, 90a is a pendulum and is located in the frame of the disk-shaped frame 90. FIG. The pendulum 90a has a tongue-like shape with a part of its periphery cut out, and is connected to the frame body 90 via a hinge 90b and supported by the frame body 90. These frame body 90, pendulum 90a, and hinge 90b are integrally formed of, for example, quartz glass. The hinge 90b is thin and elastically deformable, and the pendulum 90a can be displaced in the vertical direction of FIG. 9 by input acceleration.

  A pair of magnetic yokes 91 and 92 are in contact with both plate surfaces of the frame 90, and the frame 90 is sandwiched between the magnetic yokes 91 and 92. Each of the magnetic yokes 91 and 92 has a cylindrical shape in which one end side is opened and the other end side is closed, and the open end surface of the one end side is in contact with the frame body 90. The magnetic yokes 91 and 92 and the frame body 90 are fixed by adhesion.

  A pole piece bottom 96, a permanent magnet 97, and a pole piece top 98 are accommodated in the magnetic yokes 91 and 92, respectively. Each of the pole piece bottom 96, the permanent magnet 97, and the pole piece top 98 has a disk shape, the center axis of which coincides with the center axis of the magnetic yokes 91 and 92, and closes the other end of the magnetic yokes 91 and 92. The blocking plate portions 91a and 92a are sequentially stacked on the inner surface. The periphery of the pole piece top 98 is thick as shown in FIG.

  For example, a samarium-based rare earth cobalt magnet is used for the permanent magnet 97, and the pole piece bottom 96 and the pole piece top 98 are made of, for example, an electromagnetic soft iron material. The permanent magnet 97, the pole piece bottom 96, and the pole piece top 98 are bonded and fixed, and the pole piece bottom 96 and the magnetic yokes 91 and 92 are bonded and fixed by laser welding.

  The permanent magnet 97 is magnetized in the plate thickness direction, and annular magnetic gaps 99 are formed between the inner peripheral surfaces of the open ends of the magnetic yokes 91 and 92 and the outer peripheral surface of the pole piece top 98, respectively. Coil bobbins 94 around which torquer coils 93 are wound so as to be positioned in the annular magnetic gaps 99 are respectively attached to both plate surfaces of the pendulum 90a. The coil bobbin 94 includes an end plate 94a on the end surface on the side of the pendulum 90a, and a cylindrical mounting portion 94b is formed at the center of the end plate 94a.

  On both plate surfaces of the pendulum 90a, electrostatic capacitance electrodes 90c are formed in an arc shape along the outer periphery of the tongue-shaped tip, and the electrodes facing the electrostatic capacitance electrodes 90c are magnetic yokes 91, 92. As shown in FIG. 9, frame contact surfaces 91c and 92c, reliefs 91d and 92d, and electrode surfaces 91e and 92e are formed on the open end surfaces of the magnetic yokes 91 and 92, respectively. It faces the capacitance electrode 90c of the pendulum 90a with a predetermined interval.

  In the servo accelerometer having such a configuration, the displacement of the pendulum 90a due to acceleration input is detected as a change in capacitance between the capacitance electrode 90c and the electrode surfaces 91e and 92e. The electrode surfaces 91e and 92e are set to a common potential, and the detection signals of the capacitance electrodes 90c on both plate surfaces of the pendulum 90a are differentially amplified by a servo amplifier (not shown), and a pair of ToruCa coils 93 are subjected to Toluca based on the capacitance difference. A current flows. Due to the interaction between the torquer current and the magnetic field generated by the permanent magnet 97, the displaced pendulum 90a returns to its original position and balances at the neutral point. Since the ToruCa current at this time is proportional to the acceleration applied to the pendulum 90a, the input acceleration is obtained from this current (see, for example, Patent Document 1).

  By the way, the attachment of the coil bobbin 94 around which the ToruCa coil 93 is wound to the pendulum 90a is performed by fitting to a cylindrical holder 95 which is bonded and fixed to both plate surfaces of the pendulum 90a, and further bonded and fixed. Thereafter, the coil terminals 93a and 93b of the ToruCa coil 93 are bonded and electrically joined to a metal conductor (not shown) on the pendulum 90a.

  As described above, the assembly of the pendulum 90a, the bobbin 94 and the ToruCa coil 93 of the conventional servo type accelerometer is performed by mechanically joining the bobbin 94 around which the ToruCa coil 93 is wound to the pendulum 90a and the coil terminals 93a and 93b of the ToruCa coil 93. The electrical joining and the process of taking were separate. In addition, since electrical joining is performed from a slight gap between the end plate 94a of the coil bobbin 94 and the pendulum 90a, workability is poor and the yield is reduced.

Therefore, methods for improving the workability of this part have been studied conventionally. As an example, a servo-type accelerometer disclosed in Patent Document 2 is known. The coil bobbin disclosed in Patent Document 2 is shown in FIG. FIG. 10A is a cross-sectional view of the coil bobbin 13. FIG. 10B is a perspective view of the coil bobbin 13 to which the ToruCa coil 15 is joined as seen from the pendulum side. The coil bobbin 13 is integrally formed by insert molding two terminal tongue pieces 18 made of a synthetic resin material such as a liquid crystal polymer and made of an elastic conductive material such as phosphor bronze at a position on the pendulum side. Ends 181 on the outer peripheral side of the coil bobbin 13 of the two terminal tongue pieces 18 protrude outward from the side surface of the coil bobbin 13 as a winding part for winding and fixing the coil terminal 151 of the torquer coil 15. The other cylindrical inner end is slightly bent to the pendulum side as a contact end 182. The contact end 182 is electrically connected to the metal conductor on the pendulum by mechanically joining the coil bobbin 13 to the pendulum. Therefore, the operation of connecting the contact portion 182 to the metal conductor on the pendulum is easy.
Japanese Patent Laid-Open No. 11-281670 Japanese Patent Laid-Open No. 2000-235045 (FIG. 2)

However, in the method of Patent Document 2, the two terminal tongue pieces 18 that are insert-molded may be floated with respect to the pendulum side surface of the coil bobbin 13 due to deformation. In this case, the number of man-hours for the operator to manually correct the deformation of the contact portion 182 is increased, and workability is deteriorated.
This invention is made in view of such a point, and it aims at providing the servo-type accelerometer which improved the workability | operativity of the assembly with the pendulum and the coil bobbin around which the ToruCa coil was wound.

The servo accelerometer of the present invention includes a torquer coil, a pendulum having a pendulum conductor for connection with the torquer coil, and a coil bobbin for fixing the torquer coil to the pendulum. The coil bobbin includes an end plate, a convex portion having an outer shape smaller than the outer shape on one surface of the end plate, and a bobbin conductor formed from two different portions of the convex portion toward the outer edge of the end plate. Both ends of the ToruCa coil are connected to the bobbin conductor. And it forms in the position which at least one of the bobbin conductor and pendulum conductor formed in the convex part contact | abuts.

  According to the present invention, the mechanical and electrical connection between the pendulum and the ToruCa coil can be performed only by adhering and fixing the pendulum and the coil bobbin so that the bobbin conductor of the convex portion of the ToruCa coil is connected to the pendulum conductor. Therefore, the workability of assembling the coil bobbin around which the pendulum and the ToruCa coil are wound is good.

  Embodiments of the present invention will be described below with reference to the drawings. In the following embodiment, a pendulum and a coil bobbin around which a ToruCa coil is wound will be illustrated and described. Since the configuration of the other parts is the same as that of the servo accelerometer described in the background art, the description thereof is omitted. The same reference numerals are given to the same components in a plurality of drawings, and the description will not be repeated.

FIG. 1 shows a state where a pendulum used in the servo accelerometer of the present invention and a coil bobbin around which a torquer coil is wound are assembled mechanically and electrically. FIG. 1A is a plan view, and FIG. 1B is a cross-sectional view. A tongue-shaped pendulum 10a is integrally formed in the annular frame 10 by being connected by a pair of hinges 10b ₁ and 10b ₂ . The first coil bobbin 14 around which the ToruCa coil 11 is wound and the second coil bobbin 16 around which the ToruCa coil 11 'is wound are provided with end plates 14a, 16a on the side of the pendulum 10a, and convex portions 14b, 16b are formed at the center. Has been. The convex portions 14a and 16b are bonded to the front and back of the central portion of the pendulum 10a so that the first coil bobbin 14 and the second coil bobbin 16 are integrated.

  The first coil bobbin 14 and the second coil bobbin 16 are made of an insulating material such as a liquid crystal polymer. Bobbin conductors 14c and 14d are formed from two different locations of the convex portion 14b to the outer edge of the end plate 14a. A coil terminal 11a of the ToruCa coil 11 is connected to the bobbin conductor 14c, and a coil terminal 11b of the ToruCa coil 11 is connected to the bobbin conductor 14d by a conductive adhesive. Similarly, two bobbin conductors are formed on the second coil bobbin 16 side, and both ends of the coil terminal of the ToruCa coil 11 'are connected to the bobbin conductor by a conductive adhesive.

  Pendulum conductors A and B are formed on one surface of the pendulum 10a, and pendulum conductors B and C are formed on the other surface (not shown in FIG. 1). By adhering and fixing the convex portion 14b of the first coil bobbin 14 to the pendulum 10a, the pendulum conductors A and B and the bobbin conductors 14c and 14d are joined to each other. Similarly, the pendulum conductors B and C and the two bobbin conductors are connected to each other by bonding and fixing the convex portion 16b of the second coil bobbin 16 to the other surface of the pendulum 10a. As described above, the mechanical joint and the electrical joint between the pendulum 10a and the first coil bobbin 14, and the pendulum 10a and the second coil bobbin 16 can be realized by bonding and fixing the convex portions 14b and 16b to the pendulum 10a. Good workability when assembling the ToruCa coil. Hereinafter, the structures of the pendulum and the coil bobbin will be described in detail.

〔pendulum〕
FIG. 2 shows a plan view of the pendulum 10a. FIG. 2A shows one side, and FIG. 2B shows the other side. The pendulum 10a is positioned within the frame of the annular frame 10, and is connected to the frame 10 by a pair of hinges 10b ₁ and 10b ₂ and is formed in a tongue shape. The frame 10, the pendulum 10a, and the hinges 10b ₁ and 10b ₂ are formed, for example, by etching from a single quartz glass disk. The hinges 10b ₁ and 10b ₂ are thin and elastically deformable.

The pendulum conductor A is formed in an arc shape on the frame body 10 on one surface and having a width approximately half the width of the frame body 10, and one end of the arc-shaped metal conductor extends on the _one hinge 10b1 in the extending direction. The pendulum 10a is stretched toward the center of the pendulum 10a. The arc-shaped pendulum conductor A constitutes one input / output end portion of the torquer current.

From a position where the pendulum conductor B is spaced substantially equal to the interval between bobbin conductors, which will be described later, with the center of the pendulum 10a from the end of the pendulum conductor A located at the center of the pendulum 10a on one surface. It is formed with the same width as the pendulum conductor A toward the outer edge of the pendulum 10a. Furthermore, the pendulum conductor B is continuously formed to the other surface through the side surface of the outer edge portion of the pendulum 10a at a position between the pair of hinges 10b ₁ and 10b ₂ . The shape of the pendulum conductor B on the other surface is the same as the shape on the one surface described above. The pendulum conductor B connects the ToruCa coil 11 of the first coil bobbin 14 and the ToruCa coil 11 'of the second coil bobbin 16 in series.

  A pendulum conductor C is formed on the other surface in substantially the same shape as the pendulum conductor A described above. An end portion of the pendulum conductor C is formed in an arc shape with a width substantially equal to that of the frame body 10 on the frame body 10 on one surface. The end portion of the pendulum conductor C on one surface and the pendulum conductor C on the other surface are continuously formed along the side surface on the inner diameter side of the frame body 10. The arc-shaped pendulum conductor C constitutes the other input / output end of the torquer current.

Electrostatic capacitance detecting electrodes D are formed in an arc shape on one side of the pendulum 10a along the outer edge of the pendulum 10a, further transmitted over the hinge 10b _2, the outer periphery of the frame body 10 on the frame 10 An end portion is formed in an arc shape with a width approximately half the width of the frame body 10 along.

The capacitance detection electrode E is formed in the same manner as the capacitance detection electrode D on the other surface of the pendulum 10a. Further, the electrostatic capacitance detection electrode E continues to one side of the frame body 10 through the side surface on the inner diameter side of the frame body 10, and is circular with a width substantially equal to that of the frame body 10 on one surface of the frame body 10. An end portion is formed in an arc shape. Each end of the capacitance detection electrodes D and E on one surface of the frame 10 is connected to a servo amplifier (not shown).
Each of the pendulum conductors described above is formed of a thin film in which gold (Au) is sputtered or vacuum-deposited on the surfaces of the frame body 10 made of quartz glass, the pendulum 10a, and the hinges 10b ₁ and 10b ₂ .

[Coil bobbin]
The first coil bobbin 14 and the second coil bobbin 16 shown in FIG. 1 have the same structure. Therefore, the structure of the first coil bobbin 14 will be described with reference to FIG. 3A is a plan view of the first coil bobbin 14 viewed from the end plate 14a side, FIG. 3B is a cross-sectional view taken along the center line α, and FIG. 3C is a front view.

  The first coil bobbin 14 has an end plate 14a, and a convex portion 14b is formed at the center of the end plate 14a. Bobbin conductors 14c and 14d are formed on the center line α of the end plate 14a from two locations of the convex portion 14b to the outer edge portion of the end plate 14a through the side surface of the convex portion 14b. The outer edge portions of the end plate 14a where the bobbin conductors 14c and 14d are formed are notched to a width corresponding to the thickness of the torquer coil 11, and notched portions 14e and 14f are formed. The ToruCa coil 11 is wound around the first coil bobbin 14. The notches 14e and 14f position the coil terminals 11a and 11b. The coil terminals 11a and 11b are bonded and fixed to the bobbin conductors 14c and 14d near the notches 14e and 14f with a conductive adhesive, respectively.

  The first coil bobbin 14 is made of an insulating material as described above, and the bobbin conductors 14c and 14d are formed by, for example, gold plating. The distance between the bobbin conductors 14c and 14d on the upper surface of the convex portion 14b is substantially equal to the distance between the pendulum conductors A and B and the distance between the pendulum conductors B and C on the pendulum 10a. The bobbin conductors 14c and 14d on the upper surface of the convex portion 14b are brought into contact with the pendulum conductors A and B on the pendulum 10a, and the upper surface of the convex portion 14b and the pendulum 10a are bonded and fixed with, for example, an epoxy-based adhesive. To do.

  Next, a structure with improved workability will be described as a second embodiment.

  Example 2 is shown in FIG. FIG. 4 is a view showing a cross section in which the first coil bobbin 40, the second coil bobbin 42, and the pendulum 41 are assembled. The pendulum 41 includes a through hole 43 through which the convex portions 40b and 42b of the first coil bobbin 40 and the second coil bobbin 42 are inserted. The convex portion 40 b of the first coil bobbin 40 and the convex portion 42 b of the second coil bobbin 42 are connected in a fitting structure within the through hole 43. The tips of the convex portions 40b, 42b are open and have a pipe shape. The outer diameters of the pipe-shaped convex portions 40b and 42b are equal to each other, and in this example, the convex portion 42b is thick, the outer diameter of the tip portion is a small diameter, and the outer wall of the small diameter portion is the convex portion 40b. It is a structure that fits in contact with the inner surface of the inner diameter. The outer diameter surfaces of the convex portions 40b and the convex portions 42b connected by the fitting structure and the through holes 43 are bonded and fixed with, for example, an epoxy adhesive.

  The bobbin conductors 40d and 40c formed on the side surface portion of the convex portion 40b and the end portions of the pendulum conductors A and B of the pendulum 41 are connected by the conductive adhesive 44, respectively. The same applies to the second coil bobbin 42 side, and the bobbin conductors 42c and 42d and the end portions of the pendulum conductors B and C are connected by the conductive adhesive 44, respectively. The structure of other parts of the second embodiment is the same as that of the first embodiment.

  According to the structure of the second embodiment, the convex portion 40b of the first coil bobbin 40 and the convex portion 42b of the second coil bobbin 42 are connected with a fitting structure and are adhesively fixed to the through hole 43 of the pendulum 41. Compared with Example 1, the workability can be further improved.

[Modification 1]
FIG. 5 shows a first modification obtained by further improving the second embodiment. FIG. 5 is a view showing a cross section in which the pendulum 41, the first coil bobbin 50, and the second coil bobbin 52 are assembled. In the first modification, the electrical connection between the bobbin conductor 50c of the first coil bobbin 50 and the bobbin conductor 52c of the second coil bobbin 52 can be directly made for the purpose of reducing the number of connection portions between the bobbin conductor and the pendulum conductor. It is. Cutout portions 50e and 52e are provided on the first coil bobbin 50 and the second coil bobbin 52 at positions opposite to the end plates for connecting the coil terminals 11a and 11a ′. Bobbin conductors 50c and 52e are formed continuously from the cutout portions 50e and 52e to the inner diameter surfaces of the first coil bobbin 50 and the second coil bobbin 52 and the inner diameter surfaces of the convex portions 50b and 52b. The coil terminals 11a and 11a 'are bonded and fixed to the bobbin conductors 50e and 52e in the vicinity of the notches 50e and 52e with a conductive adhesive, respectively.

  The electrical connection between the bobbin conductors 50c and 52c is performed by adhesively connecting with the conductive adhesive 44 on the inner surfaces of the convex portions 50b and 52b. By electrically joining the bobbin conductors 50c and 52c without the pendulum conductor B, one electrical joint can be reduced. Since the number of electrical junctions is small, reliability can be increased.

Further, edges 50g and 52g are formed at the bases of the convex portions 50b and 52b, respectively. The first coil bobbin 50 and the second coil bobbin 52 are fixed by abutting the edge portions 50 g and 52 g against the pendulum 41. Since the edge portions 50g and 52g are abutted against the pendulum 41 and assembled, the positions of the first coil bobbin 50 and the second coil bobbin 52 with respect to the pendulum 41 can be easily determined. Therefore, the modified example 1 can improve the workability compared to the first or second embodiment.
The structure of other parts of the first modification is the same as that of the second embodiment. The pendulum conductor B of the pendulum 41 may not be provided.

  In the embodiment described above, the structure using the coil bobbin around which the ToruCa coil is wound is shown and described. However, the structure of the coil bobbin also has a holding base. A structure in which the rotated torquer coil is fixed to the holding table is also conceivable. A structure using the holding table will be described with reference to FIG. FIG. 6 is a view showing a cross section in which the first holding stand 60, the second holding stand 62 and the pendulum 41 are assembled. The 1st holding stand 60 is disk shape, and the convex part 60a is formed in the center part of the surface at the side of the pendulum 41. As shown in FIG.

  The ToruCa coil 61 is fixed to the first holding stand 60 with, for example, an adhesive. Holding base conductors 60c and 60d similar to the bobbin conductors 14c and 14d of the first embodiment are formed on the pendulum side surface of the holding base 60 and the convex portion 60a. The pendulum 41 and the convex portion 60a are bonded and fixed by aligning the position of the pendulum conductor at the center of the pendulum 41 and the holding base conductors 60d and 60c. The structure of other parts of the third embodiment is the same as that of the first embodiment. The structure using the holding table can simultaneously obtain mechanical joining and electrical joining as in the first embodiment.

  FIG. 7 shows an example 4 in which the above-described example 2 is configured using a holding table and a wound torquer coil. The fourth embodiment uses the same pendulum 41 as in the second embodiment, and the first coil bobbin 40 around which the ToruCa coil 11 is wound, the second coil bobbin 42 around which the ToruCa coil 11 'is wound around the first holding base 70 and the ToruCa coil 61. Is replaced with the second holding base 72 and the ToruCa coil 61 '. The first holding stand 70 has a disk shape, and a convex portion 70b having the same shape as the convex portion 40b of the second embodiment is formed at the center of the surface on the pendulum 41 side. Holding base conductors 70c and 70d similar to the bobbin conductors 14c and 14d of the first embodiment are formed on the pendulum side surface of the first holding base 70 and the convex portion 70a. The ToruCa coil 61 is fixed to the first holding stand 70 with, for example, an adhesive. The same applies to the second holding stand 72 side. The configuration of other parts of the fourth embodiment is the same as that of the second embodiment.

[Modification 2]
FIG. 8 shows a second modification obtained by further improving the fourth embodiment. In the second modification, the first coil bobbin 50 around which the ToruCa coil 11 of the first modification shown in FIG. 5 is wound is provided on the first holding base 80 and the ToruCa coil 61, and the second coil bobbin 52 around which the ToruCa coil 11 ′ is wound. The second holding base 82 and the ToruCa coil 61 'are replaced. The first holding stand 80 has a disc shape, and a convex portion 70b having the same shape as the convex portion 50b of the first modification is formed at the center of the surface on the pendulum 41 side. The holding base conductors 80c and 82c similar to the bobbin conductors 50c and 52c are formed from the outer edge of the surface opposite to the pendulum 41 of the holding bases 80 and 82 to the inner diameter inner surface of the convex portions 80b and 82b. The ToruCa coil 61 is fixed to the first holding stand 80 with an adhesive, for example. The same applies to the second holding stand 82 side. The coil terminals are bonded and fixed to the outer edge portions of the holding base conductors 80c and 82c with a conductive adhesive. The configuration of the other parts of the second modification is the same as that of the first modification.

  In the servo accelerometer, the coil bobbin or the holding base is not necessarily provided on both sides of the pendulum. Servo accelerometers can be configured on only one side. Moreover, although the shape of the coil bobbin around which the ToruCa coil is wound has been described by taking a cylindrical shape as an example, the shape is not limited to a cylindrical shape, for example, the planar shape may be a quadrangle.

  The material of the coil bobbin and the holding table may be a non-metallic inorganic material such as ceramics or glass. Ceramics can be plated. A bobbin conductor can be formed on glass by sputtering or vacuum evaporation. By using a non-metallic inorganic material having a small coefficient of thermal expansion for the coil bobbin or holding table, it becomes strong against temperature changes.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the state of Example 1 with which the pendulum used for the servo type accelerometer of this invention and the coil bobbin around which the ToruCa coil was wound were assembled mechanically and electrically, Fig.1 (a) is a top view FIG. 1B is a cross-sectional view. It is a figure which shows the top view of the pendulum 10a of FIG. 1, FIG. 2 (a) is a figure which shows one surface and FIG.2 (b) is the other surface. It is a figure which shows the 1st coil bobbin 14 by which the ToruCa coil 11 of FIG. 1 was wound, FIG. 3 (a) is a top view, FIG.3 (b) is sectional drawing, FIG.3 (c) is a front view. The figure which shows the cross section of Example 2 which assembled the 1st coil bobbin 40, the 2nd coil bobbin 42, and the pendulum 41. FIG. The figure which shows the cross section of the modification 1 which assembled the 1st coil bobbin 50, the 2nd coil bobbin 52, and the pendulum 41. As shown in FIG. The figure which shows the cross section of Example 3 which assembled the 1st holding stand 60, the 2nd holding stand 62, and the pendulum 41. The figure which shows the cross section of Example 4 which assembled the 1st holding stand 70, the 2nd holding stand 72, and the pendulum 41. The figure which shows the cross section of the modification 2 which assembled the 1st holding stand 80, the 2nd holding stand 82, and the pendulum 41. The figure which shows the structural example of the conventional servo-type accelerometer. FIG. 10A is a sectional view of the coil bobbin 13 disclosed in Patent Document 2, and FIG. 10B is a perspective view of the coil bobbin 13 to which the ToruCa coil 15 is bonded as viewed from the pendulum side.

Claims (2)

ToruCa coil,
A pendulum having a pendulum conductor for connection with the ToruCa coil;
A coil bobbin for fixing the ToruCa coil to the pendulum;
Servo accelerometer with
The coil bobbin
End plates,
A convex portion having an outer shape smaller than the outer shape on one surface of the end plate;
A bobbin conductor formed in the direction of the outer edge of the end plate from two different locations of the convex part,
Comprising
Both ends of the ToruCa coil are connected to the bobbin conductor,
A servo-type accelerometer, wherein at least one of the bobbin conductor and the pendulum conductor formed on the convex portion is in contact. The servo accelerometer according to claim 1,
Two each of the coil bobbin and the ToruCa coil,
The pendulum includes a through hole that penetrates the convex portion of the coil bobbin,
The first coil bobbin of the two coil bobbins and the second coil bobbin of the other are respectively disposed on both sides of the pendulum, and the convex portions are connected to each other in the through hole so as to fit with each other.
One of the bobbin conductors of the first coil bobbin and one of the bobbin conductors of the second coil bobbin are formed on the respective end plates opposite to the pendulum, and one of the bobbin conductors of the first coil bobbin and the second One of the bobbin conductors of a coil bobbin is connected on the internal diameter surface of the convex part of the said 1st and 2nd coil bobbin, The servo-type accelerometer characterized by the above-mentioned.

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