JP2010085102A - Electronic component measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce an influence of external noise on measurement of the electrical characteristics of an electronic component. <P>SOLUTION: This electronic component measuring instrument includes a chamber 1 which has an opening 1a and houses the electronic component 4 to be measured inside; and a flange 5 which is provided with a signal transmitting means 3 having a ground potential part 3a insulated electrically from the chamber 1, and a signal potential part 3b, and enabling signal inputting/outputting between the inside and outside of the chamber 1, by being electrically connected to the electronic component 4, and stops up the opening 1a of the chamber 1 to make the inside of the chamber 1 into a sealed space. As a result, the influence of the external noise can be made small. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an electronic component measuring apparatus that measures the electrical characteristics of an electronic component, and more particularly, to an electronic component measuring apparatus that reduces external noise mixed when measuring device noise.

  When a DC voltage is applied to an electronic component such as a semiconductor device, current noise / voltage noise having a frequency component is generated in the device. The noise having the frequency component includes 1 / f noise, g-r noise (Generation-Recombination noise), and the like, and is used for evaluation of device quality (for example, see Non-Patent Document 1).

  For example, the activation energy of defects present in the device can be measured by evaluating the temperature dependence of the frequency characteristics of the gr noise. For this reason, in order to investigate the defect of the device in detail, the electrical characteristic measurement (device noise measurement) of the device is performed at a low temperature of about 10K.

  Here, in order to measure the electrical characteristics at a low temperature, it is necessary to house the device in a chamber and maintain the inside of the chamber and the device at a desired temperature. Then, a drive voltage is applied to the device cooled in the chamber, and the current and voltage of the device are measured to measure the electrical characteristics. Input / output of signals (drive voltage to the device and current / voltage from the device) between the inside and outside of the chamber is usually performed by connecting the coaxial cable via the coaxial cable terminals provided on both sides of the flange. It is done by drawing around.

  FIG. 5 shows a cross-sectional view of a main part of a conventional electronic component measuring apparatus. In FIG. 5, the opening 101a of the chamber 101 is closed with a flange 102, and the device 104 is accommodated therein. A terminal 103 is provided on the flange 102, and the terminal 103 and a terminal 112 provided on the device 104 are connected by a coaxial cable 111 inside the chamber 101, and the terminal 103 and an external signal processing are provided outside the chamber 101. A machine etc. are connected by a coaxial cable 110. The ground lines 110 a and 111 a of the coaxial cables 110 and 111 are connected to the ground potential portion 103 a of the terminal 103.

Here, a metal such as SUS having sufficient strength to withstand a vacuum is usually used for the chamber 101 and the flange 102. For this reason, the ground potential portion 103a, the flange 102, and the chamber 101 have the same potential. Therefore, the ground lines 110a and 111a of the coaxial cables 110 and 111 are also at the same potential as the conductive flange 102 and the chamber 101, and are connected to the ground potential via these.
Munekaz Takano, Yoshinobu Sugiama, Hajimeso Saga (M. Tacano, Y. Sugiyama and H. Soka), "Solid-St. Electron.", 1989, Vol. 32, no. 1, p. 49-55

  However, in the electronic component measuring apparatus shown in FIG. 5, the chamber 101 is connected to the ground potential, but the grounding is not sufficient, and it is not necessary for the device noise to be measured due to the influence of the electromagnetic field that the chamber 101 receives from the external environment. There was a problem that extraneous noise was mixed. This is because a part of the external noise due to the influence of the external electromagnetic field received by the chamber 101 does not flow to the ground potential, but mixes in the ground lines 110a and 111a of the coaxial cables 110 and 111 having the same potential as the chamber 101. This occurs because the core wires 110b and 111b of the cables 110 and 111 are also affected.

  On the other hand, a so-called insulating flange made of ceramics or the like can be used as the flange 102 in order to separate the influence of the electromagnetic field received by the chamber 101 from the terminal 103. However, ceramics used for the insulating flange are strongly influenced by an external electromagnetic field as compared with metals such as SUS, and therefore, the influence of unnecessary external noise is increased.

  Furthermore, as a result of the inventor's extensive studies, when precise device noise measurement is performed, noise is also mixed by connecting the coaxial cable 110, 111 with the terminal 103 provided on the flange 102, which affects the measurement result. I found out that

  The above problems are not limited to the measurement of device noise at low temperatures, but are generally problematic in measurements using a chamber such as in a nitrogen atmosphere or in a vacuum.

  The present invention has been devised in view of the above-described situation, and an object thereof is to provide an electronic component measuring apparatus in which the influence of external noise is reduced.

  An electronic component measuring apparatus according to the present invention is an electronic component measuring apparatus for measuring electrical characteristics of an electronic component, the chamber having an opening, and housing the electronic component to be measured therein, the chamber, A signal transmission means having a ground potential portion and a signal potential portion that are electrically insulated and electrically connected to the electronic component and capable of inputting and outputting a signal between the inside and the outside of the chamber And a flange that closes the opening of the chamber and makes the inside of the chamber a sealed space.

  In the electronic component measuring apparatus according to the present invention, 2) in the configuration of 1), the signal transmission means is a cable wire whose surface is covered with an insulating member, and the flange includes a flange body having a through hole; And the cable line passing through the through hole.

  In the electronic component measuring apparatus according to the present invention, 3) in the configuration of 2), the flange main body and the insulating member of the cable wire are integrally formed.

  According to the electronic component measuring apparatus of the present invention, since the ground potential portion of the signal transmission means is electrically insulated from the chamber by the configuration of 1), the ground potential portion of the signal transmission means has the same potential as the chamber. In other words, it is possible to isolate the noise that the chamber receives from the external electromagnetic field. As a result, noise can be prevented from being mixed into the signal transmission means, and the electrical characteristics of the electronic component can be measured without being affected by the external electromagnetic field.

  In addition, according to the electronic component measuring apparatus of the present invention, the flange main body does not contact the ground potential portion of the signal transmission means by the configuration of 2), so that the ground potential portion of the signal transmission means and the chamber are reliably electrically connected. Therefore, it is possible to isolate the noise that the chamber receives from the external electromagnetic field. In addition, the conventional electronic component measuring apparatus shown in FIG. 5 eliminates the need for connection terminals required to connect the inside and outside of the chamber, thereby reducing unnecessary noise that may be mixed in the connection terminal portion. can do. Thereby, the mixing of noise into the signal transmission means can be further reduced, and the electrical characteristics of the electronic component can be measured without being affected by the external electromagnetic field.

  Further, according to the electronic component measuring apparatus of the present invention, the flange main body does not contact the ground potential portion of the signal transmission means by the configuration of 3), so that the ground potential portion of the signal transmission means and the chamber are reliably electrically connected. Can be insulated. Further, since the cable wire as the signal transmission means and the flange main body are integrally formed, it is possible to prevent unnecessary gas from being mixed into the sealed space formed by the chamber and the flange. For this reason, the environment in the chamber in which the electronic component is measured can be stably maintained and can be measured with higher accuracy.

  Hereinafter, an electronic component measuring apparatus of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic diagram showing a system of an electronic component measuring apparatus that performs measurement at a low temperature. Here, an outline of a system configuration assuming that voltage noise generated in an evaluation device is measured by applying a drive voltage from a drive device to an evaluation device (hereinafter referred to as DUT) as an electronic component for measuring electrical characteristics. The figure is shown. The same applies to the following drawings, but the drawings show the main parts related to the present invention, and some systems such as a vacuum pump are omitted. Moreover, the same code | symbol is attached | subjected to the same location and the overlapping description is abbreviate | omitted.

  In FIG. 1, 1 is a chamber, 5 is a flange, 4 is a DUT that is an electronic component, 201 is a cooling device, 202 is a DUT driving device that applies a driving voltage to the DUT 4, 203 is an amplifier that amplifies the signal from the DUT 4, 204 Is a spectrum analyzer for analyzing the signal amplified by the amplifier 203.

  As shown in FIG. 1, the DUT 4 is installed in the chamber 1 and measurement is performed in a state where the DUT 4 is cooled to an extremely low temperature by the cooling device 201. At that time, the inside of the chamber 1 is kept in vacuum in order to prevent the temperature rise of the DUT 4 due to heat conduction with the outside air. The drive voltage applied from the drive voltage output terminal (+) 202o1 and the drive voltage output terminal (−) 202o2 of the DUT drive device 202 is a drive voltage input terminal (DUT4 or a drive voltage input terminal provided on a jig that holds the DUT4). It is driven by being input to (+) 4i1 and the drive voltage input terminal (−) 4i2. The device noise signal voltage, which is the electrical characteristic of the DUT 4 operated by this drive voltage, is taken out from the noise measurement terminal (+) 4o1 and the noise measurement terminal (−) 4o2 provided in the DUT 4 or the jig holding the DUT 4, The signal is input to the input terminal (+) 203 i 1 and the input terminal (−) 203 i 2 of the amplifier 203. The input signal voltage is amplified by the amplifier 203 and then output from the output terminal (+) 203o1 and the output terminal (−) 203o2, and the input terminal (+) 204i1 and the input terminal (−) 204i2 of the spectrum analyzer 204 are output. Is input. The noise signal voltage input to the spectrum analyzer 204 is decomposed into the spectrum of each frequency component by the spectrum analyzer 204, and the device noise intensity at each frequency can be measured.

  Here, in order to input and output signals between the DUT 4 and the DUT driving device 202 and the amplifier 203, it is necessary to electrically connect the inside and the outside of the chamber 1. In the present invention, the flange 5 that inputs and outputs signals between the inside and outside of the chamber 1 is configured to prevent the ground potential of the means for transmitting signals and the chamber 1 from being the same potential. Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 2 is a cross-sectional view of an essential part showing an example of an embodiment of the electronic component measuring apparatus of the present invention. In FIG. 2, 1a is an opening of the chamber 1, 2 is a flange main body, 2a is a through hole provided in the flange main body 2, 3 is a cable wire 3A, 4a as a signal transmission means 3 passing through the through hole 2a. 4 is a terminal connected to a cable line 3 </ b> A as a signal transmission means 3 provided in 4. In this example, the cable line 3A is a coaxial cable, and the signal line 3b that is a signal potential portion is covered with an internal insulator 3c, a ground line 3a that is a ground potential portion, and an insulating member 3d in this order. The cable 5 </ b> A and the flange main body 2 constitute a flange 5.

  In FIG. 2, the chamber 1 accommodates the electronic component 4 to be measured, and its opening 1a is closed by a flange 5 having a flange main body 2 and a cable wire 3A. It is said. Here, the flange main body 2 has a through hole 2a, and the cable wire 3A whose outermost surface is covered with the insulating member 3d passes through the through hole 2a, so that the flange main body 2 and the ground wire 3a of the cable wire 3A are securely connected. Is electrically insulated. With such a configuration, the ground potential portion (3a) of the signal transmission means 3 does not have the same potential as the chamber 1, and noise received by the chamber 1 from an external electromagnetic field can be separated. As a result, it is possible to eliminate the mixing of noise into the signal transmission means 3 and to measure the electrical characteristics of the electronic component 4 without being affected by the external electromagnetic field. Further, in the conventional electronic component measuring apparatus shown in FIG. 5, the connection terminal 103 necessary for connecting the inside and the outside of the chamber 101 becomes unnecessary in the configuration shown in FIG. For this reason, it is possible to reduce unnecessary noise that may be mixed in the connection terminal 103 portion. Thereby, noise can be further reduced.

  Next, each part will be described.

  The chamber 1 is made of a material having a strength that can withstand vacuum, and for example, a metal such as SUS is used. The shape of the chamber 1 has a space in which the DUT 4 is accommodated, and there is no particular limitation as long as the cable wire 3 </ b> A can be routed.

  The flange body 2 is made of a material having a strength that can withstand vacuum, and for example, a metal such as SUS is used. The outer shape of the flange main body 2 is not limited as long as the opening 1a of the chamber 1 can be closed, and can be freely designed. Further, the shape of the through hole 2a provided in the flange main body 2 is not particularly limited as long as the cable wire 3A can be passed through, but is preferably substantially the same as the diameter of the cable wire 3A.

  The cable line 3A may be a common coaxial cable. For example, the ground line 3a and the signal line 3b are made of copper, the inner insulator 3c is made of polyethylene, and the insulating member 3d is made of PVC (polyvinyl chloride). That's fine.

  Further, as shown in FIG. 2, a sealing member 6 may be provided in order to keep the atmosphere inside the chamber 1 stable and constant. The sealing member 6 is disposed outside the flange body 2 so as to cover a portion where the inner wall portion constituting the through hole 2a of the flange body 2 and the insulating member 3d covering the outermost outermost surface of the cable wire 3A are in contact. The sealing member 6 can maintain a sealed space formed in the chamber 1. As such a sealing member 6, for example, a resin such as silicone or epoxy may be used.

  Next, the result of measuring the electrical characteristics using the electronic component measuring apparatus shown in FIG. 2 as described above is shown by a solid line in FIG. In FIG. 3, the horizontal axis represents the logarithm of frequency (unit: Hz), and the vertical axis represents the power spectrum density (unit: dBA / √Hz) of current noise obtained by converting the measured voltage noise into current noise.

  Specifically, a device having a semiconductor sheet resistance measurement pattern in which a boron-doped doped layer is formed on a Si substrate as the DUT 4 is used, and a DC voltage of 0.9 V is applied to the DUT 4 as a drive voltage, In the state where the pressure in the chamber 1 was 3 to 5 Pa, the frequency characteristics of voltage noise were measured from 1 Hz to 100,000 Hz as electrical characteristics.

  Further, as Comparative Example 1, the result of the same measurement using the conventional electronic component measuring apparatus shown in FIG. Furthermore, as Comparative Example 2, the result of the same measurement in the state where the chamber 101 and the flange 102 are electrically insulated in the conventional electronic component measuring apparatus shown in FIG. Specifically, the chamber 101 and the flange 102 were insulated by sandwiching an insulating member made of Teflon (registered trademark) between the flange 102 and the chamber 101. Note that FIG. 3 illustrates a frequency range in which there is a particular difference between the measurement results when the electronic component measuring apparatus of the present invention is used and when the comparative example 1 is used. As is apparent from FIG. 3, by measuring using the electronic component measuring apparatus of the present invention shown in FIG. 2, the vicinity of 1500 to 4000 Hz, which was confirmed when using the conventional electronic component measuring apparatus, 10,000 to It was confirmed that the external noise that was confirmed near 14000 Hz could be greatly reduced. In addition, it was confirmed that the baseline of the noise intensity could be lowered overall, and high-accuracy measurement with little noise could be performed. Here, although the noise intensity of Comparative Example 2 is slightly lower than that of Comparative Example 1, unnecessary external noise is also mixed therein. Therefore, in order to suppress the influence of external noise, the chamber 1 and the signal transmission means 3 are electrically insulated, and the signal transmission means 3 has a switching portion such as a terminal in the flange 5. It was confirmed that it was important that there was no configuration.

  From the above results, it was confirmed that the configuration shown in FIG. 2 can provide an electronic component measuring apparatus capable of measuring electrical characteristics with high accuracy and little influence of external noise.

  Note that although an example in which a double coaxial cable is used as the cable line 3A has been described with reference to FIG. 2, a triaxial cable having a triple coaxial may be used.

  Moreover, although the example which provided the sealing member 6 only in the outside air side of the flange main body 2 was demonstrated in FIG. 2, you may provide in the chamber 1 inner side and may provide in both sides.

  Next, another example of the electronic component measuring apparatus of the present invention will be described with reference to FIG.

  FIG. 4 shows a configuration in which the flange main body 2 and the cable wire 3A, which are separate bodies in FIG. 2, are integrally formed. Specifically, the insulating member 3 d of the cable wire 3 </ b> A is directly connected to the through hole 2 a of the flange body 2 via the joining member 8.

  The joining member 8 fills the gap between the through hole 2a and the cable wire 3A, and fixes the cable wire 3A in a state where it passes through the through hole 2a of the flange body 2. In the example shown in FIG. 4, the ring shape has a thickness equal to the thickness of the flange body 2. By setting it as such a structure, the airtightness of the sealed space in the chamber 1 can be maintained. The joining member 8 is made of a material that can join the flange body 2 and the insulating member 3d of the cable wire 3A and can maintain airtightness. For example, an epoxy resin or the like can be used.

  By setting it as such a structure, mixing of unnecessary gas etc. to the sealed space formed with the chamber 1 and the flange 5 can be prevented. For this reason, the environment in the chamber 1 in which the electronic component 4 is measured can be stably held constant, and more accurate measurement can be performed.

  In the example shown in FIG. 4, an example of a single member as the joining member 8 is shown, but a multilayer structure may be used. For example, in order to keep the atmosphere in the chamber 1 clean on the sealed space side of the chamber 1 in the portion where the insulating member 3d of the cable wire 3A and the inner wall portion constituting the through hole 2a of the flange body 2 are joined, A material with low outgas (for example, ceramic bond) may be used, and the outside air side may be laminated so as to be covered with a highly airtight material (for example, silicone resin or epoxy resin). With such a configuration, since the atmosphere in the sealed space can be kept stable and constant in a clean state, an electronic component measuring apparatus that can stably measure in a state with little noise is provided. be able to. Further, the outside may be coated with a material having high mechanical strength.

  In the example shown in FIG. 4, the joining member 8 is configured to be in contact with only the inner wall portion of the through hole 2 a of the flange main body 2, but on the outside air side of the flange main body 2 and the inner surface of the chamber 1. It is good also as a structure extended to. By setting it as such a structure, since the connection strength of 3 A of cable wires and the flange main body 2 can be raised, a reliable electronic component measuring apparatus can be provided.

  Further, the configuration shown in FIG. 4 may further include the sealing member 6 shown in FIG. In such a configuration, if a material with low outgas is used as the bonding member 8 and a highly airtight material is used as the sealing member 6, the atmosphere in the sealed space in the chamber 1 can be kept clean at a desired degree of vacuum. it can.

  Note that the electronic component measuring apparatus of the present invention is not limited to the above-described embodiment, and various modifications and improvements can be made without departing from the scope of the present invention.

  For example, in the example shown in FIGS. 2 and 4, the chamber and the flange are separate bodies, but they may be formed integrally.

  Moreover, it is good also as a structure which electrically insulates the signal transmission means 3 and the chamber 1 by using ceramics etc. which are insulating materials as a part of material which comprises the flange main body 2. FIG. However, in order to reduce the influence of an external electromagnetic wave, it is preferable that the portion made of ceramics in the flange body 2 has a minimum size.

It is the schematic which shows the system of the electronic component measuring apparatus which performs the measurement at low temperature. It is principal part sectional drawing which shows an example of embodiment of the electronic component measuring apparatus of this invention. It is a graph which shows the electrical property result of the electronic component measuring apparatus of this invention. It is principal part sectional drawing which shows the other example of embodiment of the electronic component measuring apparatus of this invention. It is principal part sectional drawing of the conventional electronic component measuring apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Chamber 2 Flange main body 2a Through hole 3 Signal transmission means 4 Electronic component 5 Flange 6 Sealing material 8 Joining member

Claims (3)

An electronic component measuring apparatus for measuring electrical characteristics of an electronic component,
A chamber having an opening and containing the electronic component to be measured;
It has a ground potential portion electrically insulated from the chamber and a signal potential portion, and is electrically connected to the electronic component to enable signal input / output between the inside and outside of the chamber. An electronic component measuring apparatus comprising: a signal transmission means; and a flange that closes the opening of the chamber and makes the inside of the chamber a sealed space. The signal transmission means is a cable wire whose surface is covered with an insulating member,
The electronic part measuring apparatus according to claim 1, wherein the flange includes a flange main body having a through hole and the cable line passing through the through hole. The electronic component measuring apparatus according to claim 2, wherein the flange main body and the insulating member of the cable wire are integrally formed.

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