JP2010080675A - Substrate processing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable ranges of and restrictions on operation authorities in a substrate processing apparatus to be easily added and changed in a substrate processing system including the substrate processing apparatus and a group management device connected to the substrate processing apparatus through a communication means. <P>SOLUTION: In the substrate processing system including the substrate processing apparatus and the group management device connected to the substrate processing apparatus through the communication means, the substrate processing apparatus has a display part which displays picture components for using functions that the substrate processing apparatus has, and enables execution of functions in response to operations on picture components, and the group management device includes a control and arithmetic operation part 11 and a storage part 12. First rewritable data 21 associating picture components with job authorities and second rewritable data 22 associating operators with job authorities are stored in the storage part, and the control operation part 11 generates a picture component management list corresponding to the job authority of the operator who has logged into the system on the basis of the first data and the second data and sets functions available for the operator on the basis of the picture component management list. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a substrate processing system for manufacturing a semiconductor device by managing a plurality of substrate processing apparatuses with a group management apparatus and operating each substrate processing apparatus to process a substrate such as a silicon wafer.

  First, the outline of the substrate processing system will be described with reference to FIG.

  In FIG. 11, reference numeral 1 denotes a group management apparatus, and the group management apparatus 1 is connected to at least one substrate processing apparatus 3 via an appropriate communication means 2 such as a communication cable, the Internet, or a LAN.

  The group management apparatus 1 includes a group management control unit 5 and a group management operation unit 6 connected to the communication unit 2, and each of the substrate processing apparatuses 3 is a substrate connected to the communication unit 2. A substrate processing unit 9 including a processing control unit 7, a substrate processing operation unit 8, a substrate processing furnace, a substrate transfer unit, and the like is provided.

  The group management apparatus 1 integrates and manages a plurality of substrate processing apparatuses 3, manages processing contents (recipe) for each substrate processing apparatus 3, stops execution of substrate processing, or progresses substrate processing for each substrate processing apparatus 3. Supervise the situation.

  When the recipe to be registered in the group management apparatus 1 is changed, the operation status of the substrate processing apparatus 3 is changed, or the management status of the substrate processing apparatus 3 is changed, an operator (user) can change the group management control unit 5. Input and operate information and data. In addition, information and data are input and operated by a user displaying an operation screen (hereinafter referred to as an operation screen) corresponding to the content of the operation on the display unit, and executing a required operation from the operation screen.

  In addition, a predetermined screen part is displayed on the operation screen, and the function and work content to be executed are associated with the screen part, and the user can perform the function by clicking the screen part. Execution and work execution.

  The driving of the substrate processing unit 9 is controlled by the substrate processing control unit 7, and the user performs setting of driving conditions, control conditions, execution of functions of the substrate processing apparatus 3, and the like from the substrate processing operation unit 8. The substrate processing operation unit 8 is composed of an operation terminal such as a keyboard and a mouse, and an operation screen. Screen components such as buttons are displayed on the operation screen, and functions associated with the buttons by clicking the buttons. Is to be executed.

  As described above, the user can change and maintain the management contents set in the group management control unit 5 of the group management apparatus 1 from the group management operation unit 6 as necessary, and the substrate processing control unit. 7 is changed and maintained from the substrate processing operation unit 8.

  If there is an erroneous operation in setting or changing the management contents, processing items, and control contents, the management of the substrate processing apparatus 3 and the execution of the substrate processing by the substrate processing apparatus 3 are greatly hindered. Further, if any user can change the setting for all items uniformly, an erroneous operation is likely to occur.

  Therefore, conventionally, an operation authority corresponding to the user management level is given to each user, and an item (function) that can be operated according to the operation authority is set, and the group management control unit 5 and the substrate processing control are set. Restrictions are imposed on the use (operation) of the functions of the unit 7. Here, the functions refer to functions corresponding to operation items displayed on the display unit of the operation unit, such as a user information editing function, a device file copy function, and a device file comparison function.

  Conventionally, when an operable function corresponding to an operation authority is set, that is, when an operable function is restricted, each operation screen is associated with each user or whether the operation authority is obtained. Are set individually.

  For this reason, when adding a new function to the operation screen, it is determined whether or not all items can be used in accordance with the predetermined operation authority for each operation screen, and the user having the predetermined authority operates It was necessary to determine whether the screen could be operated.

  Therefore, even a slight change in the operation screen requires work equivalent to updating and changing the entire operation screen, requiring a large amount of work, making quick changes difficult, and making many changes and additions. Cost and time were needed.

  In view of such circumstances, the present invention makes it possible to easily add or change the scope and limitation of the operation authority in the group management apparatus and the substrate processing apparatus.

  The present invention is a substrate processing system including a plurality of substrate processing apparatuses for processing a substrate and a group management apparatus connected to the plurality of substrate processing apparatuses by communication means, wherein the substrate processing apparatus includes the substrate processing apparatus. A screen part for using the function of the device is displayed, and a display unit that can execute the function by operating the screen part is included.The group management device includes a control arithmetic unit and a storage unit. The storage unit stores rewritable first data for associating the screen component with work authority, and rewritable second data for associating an operator with work authority, and the control arithmetic unit stores the board A screen component management list corresponding to the work authority of the logged-in worker is created based on the first data and the second data based on the login information of the worker from the processing device, and work is performed based on the screen component management list. Available Those of the substrate processing system configured as to set the capacity.

  According to the present invention, there is provided a substrate processing system including a plurality of substrate processing apparatuses for processing a substrate and a group management apparatus connected to the plurality of substrate processing apparatuses by communication means, wherein the substrate processing apparatus includes the substrate processing apparatus. A screen part for using a function of the substrate processing apparatus is displayed, and a display part that enables the function to be executed by operating the screen part is provided. The group management apparatus has a control arithmetic part and a storage part. The storage unit stores rewritable first data for associating the screen component with work authority, and rewritable second data for associating the worker with work authority, and the control arithmetic unit stores A screen component management list corresponding to the work authority of the logged-in worker is created based on the first data and the second data based on the login information of the worker from the substrate processing apparatus. Based on worker use Since the screen function of the first data is associated with the work authority, or the worker of the second data is associated with the work authority, the work can be easily performed. It is possible to change the setting of functions that can be used by the user, and it is possible to reduce the time required for the change and to achieve an excellent effect that the cost can be reduced.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  The basic configuration of the substrate processing system in which the present invention is implemented has the same configuration as that shown in FIG. 11, and will be described below with reference to FIG.

  FIG. 1 is a configuration diagram showing an outline of a group management control unit 5 in the group management apparatus 1, and FIG. 2 is a configuration diagram showing an outline of a substrate processing control unit 7 in the substrate processing apparatus 3. .

  First, the group management control unit 5 will be described.

  The group management control unit 5 is mainly connected to the control calculation unit 11 via a control calculation unit 11 represented by a CPU, a storage unit 12 connected to the control calculation unit 11, and an input / output control unit 13. It comprises an operation unit 14 and a display unit 15.

  The storage unit 12 has a substrate processing apparatus control program 17 for overall control of the plurality of substrate processing apparatuses 3, an authority management program 18 for setting and controlling user operation authority, operation authority content, etc., and a screen illustrated in FIG. A program such as a screen component management list program for creating and deleting the component management lists 28 and 29 is stored, and authority management data 19 relating to the authority content, for example, the authority name / screen component association file 21 shown in FIG. 3 and FIG. Data such as a user-authority association table 22 shown is stored. The authority management program 18 includes an ID discrimination program for registering and deleting user IDs and further discriminating IDs.

  Next, the substrate processing control unit 7 of the substrate processing apparatus 3 includes a display screen 25, a control calculation unit 26, a storage unit 27, and the like. The storage unit 27 stores images and screen components on the display screen 25. A display program for displaying, a user ID determination program similar to the ID determination program, a command program for generating a command for executing a function associated with the screen component when the screen component is operated, and the substrate processing apparatus 3 stores a program such as a communication program for communicating data such as transmitting login information to the group management control unit 5 when an operator logs in.

  Next, the association between authority names and screen components will be described with reference to FIG.

  An authority name corresponding to an arbitrary function A (here, authority name A) is given, and screen parts X, A1, A2, and A3 necessary for using the function A are associated with the authority name A.

  Similarly, an authority name corresponding to function B (here, authority name B) is given, and screen components X, B1, and B2 necessary for using function B are associated with authority name B.

  The association between the user and the authority name will be described with reference to FIG.

  For example, the user α and the user β are assigned to the user α and the user β in the state where the user α and the user β have obtained the use right. User α is given authority A, and user β is given authority A and authority B. As a result, the user α can use the function A but cannot use the function B. Further, the user β can use the function A and the function B.

  FIG. 6 shows a flow of operations when function A and function B are executed by operating screen components.

  On the first menu screen 25 a displayed on the display screen 25 of the substrate processing control unit 7, predetermined screen components including the screen component X are displayed, and the screen component X is displayed via the substrate processing operation unit 8. When an operation (for example, click) is performed, the menu screen 25b including the screen components A1 and B1 is displayed. When the screen component A1 is further clicked, the menu screen 25c including the screen components A2 and A3 is displayed, and the screen components A2 and A3 are clicked. Thus, the function A can be executed. Further, by clicking on the screen component B1, a menu screen 25d including the screen component B2 is displayed, and by clicking on the screen component B2, the function B can be executed.

  In order to use the function A and the function B, the user needs to obtain necessary authority as described above.

  The granting of authority and the restriction of authority are managed by the authority management program 18.

  To operate from the substrate processing apparatus 3, the user logs in by entering an ID. When the ID is input, the ID determination program determines the user and determines whether the logged-in user is the user α or the user β. The determination of the user may be performed by the ID determination program of the substrate processing apparatus 3 or by the ID determination program of the group management apparatus 1.

  When the login information is transmitted from the substrate processing apparatus 3, the authority management program 18 reads the user α, user based on the authority name / screen component association file 21 and the user / authority association table 22 shown in FIGS. 3 and 4. The screen component management list 28 and the screen component management list 29 are created for each β, and permission and restriction of operations of the user α and the user β are managed based on the screen component management lists 28 and 29. The screen component management list 28 and the screen component management list 29 are transmitted to the substrate processing apparatus 3 and displayed on the display screen 25 so that each user can confirm the authority contents. The screen component management list 28 and the screen component management list 29 are deleted when the user logs out.

  FIG. 7 shows a case where the operation is permitted or restricted depending on the authority content.

  In the case where the authority is not given, that is, the general user who is not given the special authority, as shown in FIG. 7A, the operation of the screen component X is not permitted. Accordingly, the menu screens after the menu screen 25b are not expanded, and the functions A and B cannot be used.

  Next, when the user α who is given authority A logs in, the operation authority is specified in accordance with the screen part management list 28, and as shown in FIG. 7B, the screen part X in the menu screen 25a, and further, Since the use of the screen component A1 in the menu screen 25b is permitted, the function A can be used. Further, since the use of the screen component B1 in the menu screen 25b is restricted, the function B cannot be used.

  When the user β who is given authority B logs in, the operation authority is specified according to the screen parts management list 29, and as shown in FIG. 7C, the screen parts X in the menu screen 25a, Since use of the screen components A1 and B1 in the menu screen 25b is permitted, both the function A and the function B can be used.

  Thus, the authority management program 18 confirms the authority contents by the user and restricts usable functions.

  Next, in FIG. 8 and FIG. 9, a case where a screen component is registered in order to execute a new function C will be described. The registration of the screen parts can be operated from the group management control unit 5 or the substrate processing control unit 7.

  Screen parts C 1 and C 2 for executing a new function C are created and registered in the authority name / screen part association file 21 via the authority management program 18. Further, the authority management program 18 determines whether the association between the function C and the screen components C1 and C2, the validity between the screen components X, C1 and C2, and the like, whether the association is successful, the screen components C1 and C2. It is determined whether or not the function C can be executed by the operation of C2. If it is appropriate, it is determined that the registration is valid and the registration valid is displayed on the display screen 25.

  If there is no legitimacy and the association is invalid, a registration invalidity decision is made and a registration invalidity indication is displayed on the display unit 15 or the display screen 25.

  Further, when it is determined that the registration is valid, the authority management program 18 adds authority C to the authority name / screen part association file 21 and adds a screen part C1 to the menu screen 25b as a screen part. A menu screen 25e is created.

  When the screen part C1 is clicked in the menu screen 25b, the menu screen 25e including the screen part C2 is expanded, and when the screen part C2 is clicked, the file is updated so that the function C is executed.

  A case where the authority is changed will be described with reference to FIG.

  To change the authority, the authority management program 18 changes the contents of the authority name / screen component association file 21 or the contents of the user / authority association table 22.

  For example, when the authority content itself is changed, the authority name / screen component association file 21 is changed. For example, the screen component A3 is deleted from the authority A so that the screen component A3 cannot be operated by the authority A.

  The authority name / screen component association file 21 deletes the A3 of the screen component, thereby confirming the relevance between the screen component and the function A, the validity of the association between the screen components, and whether the association is successful. If it is judged and valid, it is judged that the registration is valid, and the registration valid is displayed on the display screen 25. If there is no legitimacy and the association is invalid, registration invalidity is judged and registration invalidity is displayed on the display screen 25.

  Also, when the authority to be assigned to the user is changed by adding a screen component as described above, for example, when the authority C is assigned in addition to the authority A and authority B to the user β, the user β in the user-authority association table 22 is assigned. Authority C is added.

  By adding the authority C to the user β in the user-authority association table 22, the screen parts C1 and C2 can be used as screen parts that can be used at the time of exercising the privileges of the screen part list created when the user β logs in. Further, the authority management program 18 permits the user β to execute the function C by operating the screen components C1 and C2 based on the screen component list.

  Therefore, it is possible to restrict the use of related functions simply by registering screen parts related to the functions, and to restrict the functions that can be used by the user by simply assigning the authority to the user. The assignment of the user can be easily changed, and the restriction on the functions available to the user can be changed.

  In the above embodiment, the case where the group management control unit 5 of the group management apparatus 1 includes the authority management program 18 has been described. However, the substrate processing control unit 7 of the substrate processing apparatus 3 executes the authority management program 18. It is also possible to manage user authority for each substrate processing apparatus 3.

  Furthermore, the substrate processing system that is the subject of the present invention can be implemented in a semiconductor manufacturing apparatus and an LCD manufacturing apparatus. The substrate processing can be performed by CVD, PVD, oxide film processing, nitride film processing, metal film processing, or the like. Needless to say, the present invention can be applied to all substrate processing such as film processing, annealing processing, etching processing, and diffusion processing.

(Appendix)
The present invention includes the following embodiments.

  (Appendix 1) A substrate processing system comprising a plurality of substrate processing apparatuses for performing substrate processing, and a group management apparatus connected to the plurality of substrate processing apparatuses via a communication line, wherein the group management apparatus has functions and The first data associated with the screen necessary for using the function and the second data associated with the function that can be used by the worker and the worker are stored in the login information or the worker from the substrate processing apparatus. When the change information is transmitted, a screen to be used on the operation screen of the substrate processing apparatus is set according to an operator who has acquired the authority to use the function of the substrate processing apparatus.

  (Supplementary Note 2) A group management apparatus in which a plurality of substrate processing apparatuses are connected via a communication line, and the group management apparatus includes first data in which a function and a screen necessary for using the function are associated with each other. The second data that associates the operator with the function that can be used by the worker is stored, and when login information or worker change information is transmitted from the substrate processing apparatus, the function of the substrate processing apparatus is used. A group management apparatus configured to set a function operable on an operation screen of the substrate processing apparatus based on the first data and the second data for an operator who has acquired the right to perform .

It is a schematic block diagram of the group management control part of the group management apparatus which comprises the substrate processing system which concerns on embodiment of this invention. It is a schematic block diagram of the substrate processing control part of the substrate processing apparatus which comprises the substrate processing system which concerns on embodiment of this invention. It is a figure which shows correlation with an authority name and screen components. It is a figure which shows the correlation of a user and authority. It is a figure which shows the screen components management list corresponding to a user. It is explanatory drawing in the case of operating a screen component and performing the function A and the function B. (A) (B) (C) is explanatory drawing which shows the flow which can be operated by a user's authority. It is explanatory drawing in the case of registering a screen component. It is explanatory drawing which shows the flow of operation at the time of registering a screen component. It is explanatory drawing in the case of changing the state of a screen component. It is a block diagram which shows schematic structure of a substrate processing system.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Group management apparatus 2 Communication means 3 Substrate processing apparatus 5 Group management control part 7 Substrate processing control part 11 Control operation part 12 Storage part 18 Authority management program 21 Authority name and screen component correlation file 22 User and authority correlation table 25 Display screen 26 Control Calculation Unit 27 Storage Unit 28 Screen Component Management List 29 Screen Component Management List

Claims (1)

  A substrate processing system including a plurality of substrate processing apparatuses for processing a substrate and a group management apparatus connected to the plurality of substrate processing apparatuses by communication means, wherein the substrate processing apparatus has a function of the substrate processing apparatus A display unit that displays a screen component for using the screen, and can execute a function by operating the screen component. The group management device includes a control calculation unit and a storage unit. Stores rewritable first data for associating the screen part with work authority, and rewritable second data for associating the worker with work authority, and the control arithmetic unit is supplied from the substrate processing apparatus. A screen component management list corresponding to the work authority of the logged-in worker is created based on the first data and the second data based on the login information of the worker, and the worker can use the screen based on the screen component management list. Function settings The substrate processing system characterized by being configured as to perform.

Images