JP2010077564A - Dust-proof garment, and method for preventing static charge in clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dust-proof garment enabling easy attachment of a static-eliminating strap, and easily and surely eliminating static electricity, and to provide a method for preventing static charge. <P>SOLUTION: This dust-proof garment is so designed that an end of a sleeve part 2 has a dual structure of an inner sleeve 3 and an outer sleeve 5, a sleeve edge 3a of the inner sleeve 3 includes a conductive part 6 made of a flat shape textile cloth, and a stretch part 7 made of a knitted fabric with stretchability, and the conductive part 6 of the inner sleeve 3, a body 3b, the outer sleeve 5, and a section excluding the end of the sleeve part 2 are made of a dust-proof textile cloth with high conductivity. Furthermore, the area of the conductive part 6 in the inner periphery of the sleeve edge 3a of the inner sleeve 3 is set to be ≥20 cm<SP>2</SP>in total, and parts from the conductive part 6 to the outer sleeve 5, or to the section excluding the end of the sleeve part 2 are electrically connected by a dust-proof textile cloth with high conductivity. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a dustproof clothing for a clean room and an antistatic method in the clean room.

  2. Description of the Related Art Conventionally, the manufacture of precision machines including semiconductors has been performed in a clean room configured so that the indoor space is always maintained at a high cleanliness. When an operator enters such a clean room, dust-proof clothing is usually worn so as to prevent dust scattering from the human body or clothes.

  Further, in a clean room used for manufacturing electronic parts and electronic devices, measures against static electricity are required in addition to measures against dust. For example, a wrist strap for static elimination formed of a conductive material is directly attached to the wrist of an operator, and a conductive cord attached to the wrist strap is grounded (ground connection) to prevent the human body and dust-proof clothing from being charged. Things are being done.

  By the way, in a clean room where high cleanliness (for example, class 1000 or so) is required, a high-performance air cleaning device is required and high dustproof performance is also required for dustproof clothing to be used. For this reason, various measures are made in each part so that dust generation for high cleanliness clean rooms can suppress dust generation as much as possible.

For example, as shown in FIG. 2 (1), the sleeve 2 has a double structure of an inner sleeve 3 and an outer sleeve 5, and as shown in FIG. 2 (2), the cuff 3 a of the inner sleeve 3. There is known a dust-proof garment 1 or the like in which a hem 4 of a rubber glove is placed on the hem 4 and a cuff 5a of an outer sleeve 5 can be placed on the hem 4 of the rubber glove.
JP 2000-178810 A JP 2001-164477 A JP 2003-171844 A JP 2004-036040 A JP 2008-133561 A

  When the dust-proof clothing 1 as shown in FIG. 2 is worn, there is a problem that it is difficult to wear a wrist strap for static elimination that is used as a countermeasure against static electricity. More specifically, the static elimination wrist strap is directly attached to the wrist of the operator, and the connected conductive cord needs to be taken out of the dust-proof clothing so that it can be connected to the ground. When wearing the dustproof garment 1 having a double cuff structure as shown in Fig. 2, the inner cuff 3a, the glove hem 4 and the outer cuff 3 It is necessary to fold back between the cuffs 5a many times, and the wearing work is very complicated, and there is a high possibility that a gap will be formed between the cuffs 3a, the hem 4 of the gloves, and the cuffs 5a. There is a problem that this gap becomes a passage for dust, and the dustproof performance is significantly lowered.

  The present invention has been made to solve the above-described problems, and provides a dust-proof clothing and an antistatic method that can be easily and surely removed from a static electricity removal strap. Objective.

The dust-proof garment of the present invention has a double structure in which the tip of the sleeve portion is composed of an inner sleeve and an outer sleeve, and the cuff of the inner sleeve has a conductive portion made of a flat-shaped woven fabric, and has elasticity. The conductive portion of the inner sleeve, the main body, the outer sleeve, and the portion other than the tip portion of the sleeve portion are formed of a highly conductive dust-proof woven fabric, The conductive area on the inner peripheral surface of the cuff is set to be 20 cm ² or more in total, and is highly conductive and dust-proof woven fabric from the conductive part to the outer sleeve or from the sleeve part other than the tip part. It is characterized by being electrically connected by cloth.

  Of the constituent parts of the dust-proof clothing, the constituent parts other than the sleeve parts are constituted by a dust-proof textile fabric having high conductivity, and the dust-proof textiles having high conductivity between the constituent parts and the conductive parts. It can also be configured such that the dough is continuous and an electrical connection is obtained.

  In addition, the antistatic method according to the present invention provides a dustproof property having high conductivity after wearing the dustproof garment, any part of the sleeve part except the inner sleeve, or other constituent parts (between the conductive part). A portion of the fabric fabric that is continuous and configured to obtain an electrical connection state) is characterized by wrapping a static elimination strap from the outside and grounding a conductive cord connected to the static elimination strap. Yes.

  In the dust-proof clothing of the present invention, the wearer's body and the dust-proof clothing can be easily grounded (ground connection) without impairing the dust-proof performance, and charging in the body and the dust-proof clothing can be suitably prevented. Moreover, according to the dust-proof clothing of the present invention, a simple and reliable antistatic method can be realized.

  The best mode for carrying out the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a cutaway perspective view of a sleeve portion 2 of a dustproof garment 1 according to the present invention. As shown in the figure, the sleeve 2 has a double structure with the inner sleeve 3 and the outer sleeve 5 at the tip.

Further, the cuff 3 a of the inner sleeve 3 is composed of conductive portions 6 and 6 and stretchable portions 7 and 7. Among these, the stretchable parts 7 and 7 are constituted by a knitted fabric having elasticity, and the conductive parts 6 and 6 are flat fabrics (smooth fabrics in which no wrinkles, flaps, irregularities or the like are formed) ) And having high conductivity (low surface resistance, specifically, 10 ⁶ to 10 ⁷ Ω). In addition, the main body 3b of the inner sleeve 3, the outer sleeve 5, and the portions other than the tip portion of the sleeve portion 2, that is, the upper arm portion 8 (portion corresponding to the wearer's upper arm), and the elbow portion 9 (of the wearer The part around the elbow and the like is also made of a dust-proof woven fabric having high conductivity, like the conductive part 6.

  The conductive portions 6, 6 are sewn in a state of physical contact with the main body 3 b of the inner sleeve 3, and the main body 3 b of the inner sleeve 3 is against the boundary portion between the elbow portion 9 and the outer sleeve 5. It is sewn in physical contact. And as above-mentioned, since all of these site | parts are comprised with the dust-proof textile fabric with high electroconductivity, the electroconductive parts 6 and 6 are the main body 3b of the inner sleeve 3, the outer sleeve 5, the elbow part 9, and The upper arm 8 and the like are electrically connected.

The cuff 3a of the inner sleeve 3 is set to have a width dimension (a dimension from a sewing portion with the main body 3b to an opening edge) of 5 cm and a diameter of about 5.7 cm. The conductive portions 6 and 6 and the stretchable portions 7 and 7 are alternately arranged in the circumferential direction, and the adjacent conductive portions 6 and the stretchable portions 7 are firmly fixed to each other by sewing. The area of the inner peripheral surface of the cuff 3a is 90 cm ² , and the ratio of the areas of the conductive portions 6 and 6 and the stretchable portions 7 and 7 on the inner peripheral surface of the cuff 3a is 4: 5 (area ratio of the conductive portions 6 and 6). Is about 44.4%). That is, in the inner peripheral surface of the cuff 3a, the total area of the conductive portions 6 and 6 is 40 cm ² , and the area of the stretchable portions 7 and 7 is 50 cm ^{2 in} total.

  The dust-proof garment 1 of the present invention has the above-described configuration, and the body of the wearer and the dust-proof garment 1 can be easily grounded (ground connection). 1 can be prevented from being charged. When this point is explained concretely, when the person who is going to wear this dustproof garment 1 puts his hand through the cuff 3a of the inner sleeve 3 shown in FIG. The inner peripheral surface is in close contact with the wearer's wrist (skin).

  As described above, since the conductive portions 6 and 6 are electrically connected to the main body 3b of the inner sleeve 3, the outer sleeve 5, the elbow portion 9, the upper arm portion 8, and the like, the wearer's wrist And the inner peripheral surface of the cuff 3a come into contact with the wearer's body, the main body 3b of the inner sleeve 3, the outer sleeve 5 and the elbow 9 through the conductive portions 6 and 6 constituting the inner peripheral surface of the cuff 3a. Then, the upper arm portion 8 and the like are electrically connected, and energization is performed within the range of the surface resistance of the dust-proof woven fabric constituting the conductive portion 6 and the main body 3b of the inner sleeve 3 and the like. Therefore, after the wearer wears the dust proof clothing 1, as shown in FIG. 1, any part of the sleeve portion 2 (excluding the inner sleeve 3), that is, the outer sleeve 5, the upper arm portion 8, or The wrist strap 10 for static elimination is wound around the elbow portion 9 from the outside and fixed, and the conductive cord 11 connected to the wrist strap 10 for static elimination is connected to a ground terminal or the like, so that the wearer's body and dust-proof clothing 1 can be easily grounded, and charging can be suitably prevented.

  In the present embodiment, since the conductive portions 6 and 6 are formed of a flat cloth, the surface contacts the wearer's wrist, and the wrist and the conductive portions 6 and 6 are in contact with each other. A stable contact state and energized state can be ensured in between.

  Further, among the constituent parts of the dust-proof clothing 1, constituent parts other than the sleeve part 2 (for example, the front body, the back body, the waistline part, the upper knee part of the trousers, the lower knee part, etc.) are also highly dustproof. It is also configured by a woven fabric and configured so that a highly conductive dust-proof woven fabric is continuous between those components and the conductive portion 6 of the cuff 3a and an electrically connected state is obtained. it can. In this case, for example, instead of the wrist strap for static elimination, the ankle strap for static elimination is wrapped and fixed on the fabric material of the dust-proof clothing 1 in the lower knee part (ankle part), and the connected conductive cord is connected to the ground terminal or the like. By connecting, the wearer's body and the dust-proof clothing 1 can be easily grounded.

  As a result of tests conducted by the inventors of the present invention, it was proved that the dust-proof clothing according to the present invention has sufficient antistatic performance. Hereinafter, the results of tests conducted by the inventors will be described as examples of the present invention.

First, the dust-proof garment 1 of FIG. 1 described as “the best mode for carrying out the present invention” (almost all parts other than the stretchable part 7 are made of highly conductive dust-proof woven fabric, and the cuff 3a is electrically conductive. A dust-proof garment 1) is prepared between the portion 6 and the bottom of the pants so that a highly conductive dust-proof woven fabric is continuous and an electrically connected state is obtained. In addition, a pipe made of vinyl chloride wrapped around copper foil over a predetermined width (12cm width) (resembling the wearer's "hand"), resistance meter, wrist strap for static elimination, conductive cord for wrist strap (1MΩ resistance) Insulation tape was prepared. Then, a vinyl chloride pipe is passed through the inner sleeve 3 (see FIG. 1) of the dust proof clothing 1, and the cuff 3a is put on the central portion in the width direction of the wound copper foil, and the entire inner peripheral surface of the cuff 3a is covered with the copper foil. Close contact (contact area to the copper foil of the conductive portion 6 on the inner peripheral surface of the cuff 3a: 40 cm ² ), and, similar to FIG. I wrapped it.

In this state, one electrode of the ohmmeter was connected and fixed to the copper foil, the other electrode was connected and fixed to the wrist strap for static elimination, and the point-to-point resistance between both electrodes was measured 10 times. The results are as follows.
Minimum value: 1.67E + 06Ω
Maximum value: 1.78E + 06Ω
Average value: 1.73E + 06Ω

Next, an insulating tape is partially attached to the inner peripheral surface of the cuff 3a, and a part of the conductive portion 6 is masked to reduce the area of the conductive portion 6 on the inner peripheral surface of the cuff 3a to the original half. (Contact area: 20 cm ² ), the resistance between the copper foil and the wrist strap for static elimination was measured 10 times. The results are as follows.
Minimum value: 1.80E + 06Ω
Maximum value: 2.01E + 06Ω
Average value: 1.86E + 06Ω

Next, the insulating tape that masked the conductive portion 6 was peeled off last time, and a wrist strap conductive cord having a resistance of 1 MΩ was interposed between the electrode on the wrist strap for static elimination and the wrist strap for static elimination. The point resistance was measured 10 times. The results are as follows.
Minimum value: 2.73E + 06Ω
Maximum value: 2.80E + 06Ω
Average value: 2.76E + 06Ω

Next, 50% masking of the conductive portion 6 with insulating tape is performed again, and a wrist strap conductive cord containing a resistance of 1 MΩ is interposed between the electrode for the static elimination wrist strap and the wrist strap for static elimination. In this state, the resistance between points was measured 10 times. The results are as follows.
Minimum value: 2.85E + 06Ω
Maximum value: 3.11E + 06Ω
Average value: 2.96E + 06Ω

  From the above experimental results, it is proved that the body of the dust proof wearer, the dust proof clothing, and the wrist strap for static elimination are electrically connected, and even if a problem occurs that 50% of the conductive part cannot contact the wrist, It was found that the resistance value did not change greatly. As a result, it was demonstrated that the dust-proof clothing according to the present invention has sufficient antistatic performance.

1 is a partially cutaway perspective view showing the structure of a sleeve 2 of a dustproof garment 1 according to the present invention. Sectional drawing which shows the structure of the sleeve part 2 of the conventional dustproof clothing 1. FIG.

Explanation of symbols

1: Dust-proof clothing,
2: Sleeve,
3: Inner sleeve,
3a: cuffs,
3b: body,
4: Hem of rubber gloves,
5: Outer sleeve,
6: Conductive part,
7: stretchable part,
8: Upper arm,
9: Elbow,
10: wrist strap for static elimination,
11: Conductive cord

Claims (4)

The tip of the sleeve has a double structure with an inner sleeve and an outer sleeve,
The cuff of the inner sleeve is composed of a conductive portion made of a flat woven fabric and a stretchable portion made of a knitted fabric having elasticity,
The conductive portion of the inner sleeve, the main body, the outer sleeve, and the portion other than the tip portion in the sleeve portion are constituted by a highly conductive dustproof textile fabric,
The total area of the conductive portion on the inner peripheral surface of the cuff of the inner sleeve is set to be 20 cm ² or more in total,
A dust-proof garment characterized in that the conductive part is electrically connected to the outer sleeve or to a part other than the tip part of the sleeve part by the highly conductive dust-proof woven fabric.   Of the constituent parts of the dust proof clothing, constituent parts other than the sleeve parts are also constituted by a dust-proof woven fabric having high conductivity, and between the constituent parts and the conductive part, highly conductive dustproof property. 2. The dustproof garment according to claim 1, wherein the woven fabric is continuous and an electrically connected state is obtained.   After wearing the dustproof garment according to claim 1, a static elimination strap is wound from the outside around any part of the sleeve portion except the inner sleeve, and the conductive cord connected to the static elimination strap is grounded An antistatic method for use in a clean room.   After wearing the dustproof garment according to claim 2, among the constituent parts of the dustproof garment, a highly conductive dustproof woven fabric is continuous with the conductive part so that an electrically connected state can be obtained. An antistatic method in a clean room, characterized in that a static elimination strap is wound from the outside to a component that has been formed, and a conductive cord connected to the static elimination strap is grounded.

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