JP2010060339A - Movement detection device using magnet - Google Patents

Movement detection device using magnet Download PDF

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Publication number
JP2010060339A
JP2010060339A JP2008224218A JP2008224218A JP2010060339A JP 2010060339 A JP2010060339 A JP 2010060339A JP 2008224218 A JP2008224218 A JP 2008224218A JP 2008224218 A JP2008224218 A JP 2008224218A JP 2010060339 A JP2010060339 A JP 2010060339A
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Prior art keywords
magnet
holder
moving
magnetic detector
sliding holder
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JP4606485B2 (en
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Yuji Kodama
優司 児玉
Hirobumi Okumura
博文 奥村
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Alps Alpine Co Ltd
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Alps Electric Co Ltd
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Priority to DE102009039497A priority patent/DE102009039497B4/en
Priority to KR1020090082286A priority patent/KR101121411B1/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025Electrical or magnetic means
    • F16K37/0041Electrical or magnetic means for measuring valve parameters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02DCONTROLLING COMBUSTION ENGINES
    • F02D35/00Controlling engines, dependent on conditions exterior or interior to engines, not otherwise provided for
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02MSUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M26/00Engine-pertinent apparatus for adding exhaust gases to combustion-air, main fuel or fuel-air mixture, e.g. by exhaust gas recirculation [EGR] systems
    • F02M26/45Sensors specially adapted for EGR systems
    • F02M26/48EGR valve position sensors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02MSUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M26/00Engine-pertinent apparatus for adding exhaust gases to combustion-air, main fuel or fuel-air mixture, e.g. by exhaust gas recirculation [EGR] systems
    • F02M26/52Systems for actuating EGR valves
    • F02M26/53Systems for actuating EGR valves using electric actuators, e.g. solenoids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02MSUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M26/00Engine-pertinent apparatus for adding exhaust gases to combustion-air, main fuel or fuel-air mixture, e.g. by exhaust gas recirculation [EGR] systems
    • F02M26/65Constructional details of EGR valves
    • F02M26/66Lift valves, e.g. poppet valves
    • F02M26/67Pintles; Spindles; Springs; Bearings; Sealings; Connections to actuators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025Electrical or magnetic means
    • F16K37/0033Electrical or magnetic means using a permanent magnet, e.g. in combination with a reed relays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/20Arrangements or instruments for measuring magnetic variables involving magnetic resonance
    • G01R33/28Details of apparatus provided for in groups G01R33/44 - G01R33/64
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02DCONTROLLING COMBUSTION ENGINES
    • F02D41/00Electrical control of supply of combustible mixture or its constituents
    • F02D41/0025Controlling engines characterised by use of non-liquid fuels, pluralities of fuels, or non-fuel substances added to the combustible mixtures
    • F02D41/0047Controlling exhaust gas recirculation [EGR]
    • F02D41/0077Control of the EGR valve or actuator, e.g. duty cycle, closed loop control of position

Abstract

<P>PROBLEM TO BE SOLVED: To provide a movement detection device for detecting the moving position of a magnet by a magnetic detector wherein the magnet can move smoothly together with a movement section, and the positional relation between the magnet and the magnetic detector is stabilized. <P>SOLUTION: A sliding holder 20 which slides on a guideway 14 formed near the magnetic detector 16 is provided, and the magnet 30 is held in the sliding holder 20. The facing surface 33 facing the X1 side of the magnet 30 is a curved surface, and the facing surface 33 protrudes in the X1 direction from an opening 23 formed at the sliding holder 20 while reducing its distance from the magnetic detector 16. A flat spring 40 is provided between the sliding holder 20 and the movement section 12b, and by the flat spring 40, the sliding holder 20 is pressed against the guideway 14. Since the sliding holder 20 slides on the guideway 14 when the movement section 12b moves, the relative distance between the magnet 30 and the magnetic detector 16 can be always optimally set. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、内燃機関の排ガス再循環装置に設けられるバルブの開閉量や、各種装置の機構の移動量を検知するのに使用される移動検出装置に係り、特に、移動部に磁石が搭載され、固定部に前記磁石からの漏れ磁界を検知する磁気検知器が設けられた移動検出装置に関する。   The present invention relates to a movement detection device used to detect the opening / closing amount of a valve provided in an exhaust gas recirculation device of an internal combustion engine and the movement amount of various device mechanisms, and in particular, a magnet is mounted on a moving part. The present invention relates to a movement detection device in which a magnetic detector for detecting a leakage magnetic field from the magnet is provided in a fixed portion.

各種機器において、移動部の移動状態を検出するために、磁石とこの磁石からの漏れ磁界を検知する磁気検知器を備えた移動検出装置が使用されている。その一例として、以下の特許文献1には、内燃機関の気化器に設けられた可変バルブの開閉量を磁気センサで検出する開度検出装置が開示されている。   In various devices, a movement detection device including a magnet and a magnetic detector that detects a leakage magnetic field from the magnet is used to detect the movement state of the moving unit. As an example, Patent Document 1 below discloses an opening degree detection device that detects an opening / closing amount of a variable valve provided in a carburetor of an internal combustion engine using a magnetic sensor.

この開度検出装置は、バルブ室内に設けられたホルダが、ピストンバルブと一緒に往復移動する。ホルダにはプラスチックマグネットが固定され、ピストンバルブとホルダの移動に伴って、このプラスチックマグネットがバルブ室を移動する。バルブ室の外側にはセンサ室が一体に形成されており、このセンサ室内に、プラスチックマグネットの移動方向に並んで3個の磁気センサが設けられている。この開度検出装置は、3個の磁気センサが、プラスチックマグネットの移動位置を検知することで、ピストンバルブが第1開度、第2開度または第3開度となったことを検知するというものである。   In this opening degree detection device, a holder provided in the valve chamber reciprocates together with the piston valve. A plastic magnet is fixed to the holder, and the plastic magnet moves in the valve chamber as the piston valve and the holder move. A sensor chamber is integrally formed outside the valve chamber, and three magnetic sensors are provided in the sensor chamber side by side in the moving direction of the plastic magnet. In this opening degree detection device, three magnetic sensors detect the movement position of the plastic magnet, thereby detecting that the piston valve has reached the first opening degree, the second opening degree, or the third opening degree. Is.

特許文献1に記載された開度検出装置は、3個の磁気センサを使用してピストンバルブの開度を3段階で検知することが可能ではあるが、例えば、排気ガス再循環装置の循環経路に設けられた開閉バルブなどで必要とされるように、バルブの開閉度を細かな分解能で検知することは難しい。   Although the opening degree detection device described in Patent Document 1 can detect the opening degree of the piston valve in three stages using three magnetic sensors, for example, the circulation path of the exhaust gas recirculation device It is difficult to detect the degree of opening and closing of the valve with fine resolution, as required by the opening and closing valve provided in the.

また、前記プラスチックマグネットが、直接にバルブ室の内壁に対向して移動するものであるため、プラスチック磁石とそれぞれの磁気センサとの対向距離を高精度に確保するのが困難な構造である。よって、プラスチックマグネットが移動するときに、それぞれの磁気センサからの検出値にばらつきが生じるおそれがある。また、プラスチックマグネットがバルブ室の内壁に直接に対向して移動するために、プラスチックマグネットが移動する際に前記内壁との摺動摩擦力によって磨耗したり損傷する可能性がある。
特開平7−317574号公報
In addition, since the plastic magnet moves directly facing the inner wall of the valve chamber, it is difficult to ensure the facing distance between the plastic magnet and each magnetic sensor with high accuracy. Therefore, when the plastic magnet moves, the detection value from each magnetic sensor may vary. Further, since the plastic magnet moves directly opposite to the inner wall of the valve chamber, there is a possibility that the plastic magnet is worn or damaged by sliding frictional force with the inner wall when moving.
JP 7-317574 A

本発明は上記従来の課題を解決するものであり、移動部が案内面に沿って移動する際に、移動部に設けられた磁石と前記案内面との相対距離を常に高精度に確保でき、磁気検知器によって移動部の移動位置を高精度に検知できる移動検出装置を提供することを目的としている。   The present invention solves the above-described conventional problems, and when the moving unit moves along the guide surface, the relative distance between the magnet provided on the moving unit and the guide surface can always be ensured with high accuracy, An object of the present invention is to provide a movement detection device that can detect the movement position of a moving unit with high accuracy by a magnetic detector.

また本発明は、磁気検知器で磁石からの漏れ磁界を高精度に検知でき、移動位置の移動量を高い分解能で検知することが可能な移動検出装置を提供することを目的としている。   Another object of the present invention is to provide a movement detection device that can detect a leakage magnetic field from a magnet with high accuracy by a magnetic detector and can detect a movement amount of a movement position with high resolution.

本発明は、固定部に設けられた案内部に沿って直線的に往復移動する移動部と、前記移動部と一緒に移動する磁石と、前記固定部に設置されて前記磁石からの漏れ磁界を検知する磁気検知器とを有する移動検出装置において、
前記磁石の前記磁気検知器に対向する対向面は、前記移動部の移動方向に向く両端部よりもその中間領域が、前記磁気検知器が配置された側に向けて突出する形状であり、
前記磁石を保持して前記移動部と共に移動するホルダが設けられ、前記ホルダには、少なくとも前記対向面の中央領域に対向する部分に開口部が形成されていることを特徴とするものである。
The present invention provides a moving unit that linearly reciprocates along a guide unit provided in a fixed unit, a magnet that moves together with the moving unit, a leakage magnetic field from the magnet that is installed in the fixed unit. In a movement detection device having a magnetic detector to detect,
The opposing surface of the magnet that faces the magnetic detector has a shape in which an intermediate region protrudes toward the side where the magnetic detector is disposed, rather than both end portions of the moving portion that are directed in the moving direction.
A holder that holds the magnet and moves together with the moving portion is provided, and the holder has an opening formed at least in a portion facing the central region of the facing surface.

本発明の移動検出装置は、その対向面の中央部が磁気検知器が設けられた側に向けて突出する形状の磁石を使用しているため、ホルダが動いたときに、その移動距離と磁気検知器による検知出力との関係を一次関数に近いものにできる。そして、ホルダには磁石の中央部に対向する開口部が設けられているため、磁石の中央部をこの開口部内に配置して、磁石と磁気検知器との距離を近づけることができる。よって、磁気検知器による漏れ磁界の検知感度を高めることができる。   The movement detection device of the present invention uses a magnet having a shape in which the central portion of the opposing surface protrudes toward the side on which the magnetic detector is provided. The relationship with the detection output by the detector can be close to a linear function. And since the opening provided in the holder facing the center part of a magnet is provided, the center part of a magnet can be arrange | positioned in this opening part, and the distance of a magnet and a magnetic detector can be shortened. Therefore, the detection sensitivity of the leakage magnetic field by the magnetic detector can be increased.

本発明は、前記磁石の前記対向面は、前記両端部よりも前記中間領域が前記磁気検知器が配置された側に突出する突曲面である。   In the present invention, the facing surface of the magnet is a protruding curved surface in which the intermediate region protrudes to the side where the magnetic detector is disposed from both end portions.

また、本発明は、前記ホルダは、前記対向面が向く側と逆の側である背部で開口する保持凹部を有しており、前記磁石は、前記背部から前記保持凹部に挿入され、前記保持凹部内において、前記磁石が前記移動部の移動方向へ動かないように固定されているものである。   Further, according to the present invention, the holder has a holding recess that opens at a back portion that is the side opposite to the side to which the facing surface faces, and the magnet is inserted into the holding recess from the back portion, and the holding In the recess, the magnet is fixed so as not to move in the moving direction of the moving part.

上記構成の移動検出装置では、磁石をホルダの背部の開口部から装着することで、ホルダに磁石を保持させることができ、組み立て作業を容易にできる。   In the movement detection apparatus having the above-described configuration, the magnet can be held by the holder by attaching the magnet from the opening of the back portion of the holder, and assembly work can be facilitated.

本発明は、前記磁石には、前記対向面よりも後退した位置に当接部が設けられ、前記ホルダには、前記開口部以外の領域に位置決め部が設けられており、前記当接部が前記位置決め部に支持されて、前記ホルダ内で前記磁石が位置決めされているものが好ましい。   In the present invention, the magnet is provided with a contact portion at a position retracted from the facing surface, the holder is provided with a positioning portion in a region other than the opening, and the contact portion is It is preferable that the magnet is positioned in the holder supported by the positioning portion.

磁石には、対向面から後退する当接部が設けられ、この当接部をホルダに当接させて磁石を位置決めしているため、磁石の突形状の対向面をホルダ内において正確に位置決めすることができる。   The magnet is provided with an abutting portion that retreats from the facing surface, and the magnet is positioned by abutting the abutting portion against the holder. Therefore, the opposing surface of the projecting shape of the magnet is accurately positioned in the holder. be able to.

また、本発明は、前記移動部と前記ホルダとの間に板ばねが設けられており、前記ホルダが前記板ばねによって前記磁気検知器が配置された側に向けて押圧されているとともに、前記板ばねに設けられた補助押圧片によって、前記磁石が直接押圧されて、前記当接部が前記位置決め部に弾圧されているものとして構成できる。   In the present invention, a leaf spring is provided between the moving part and the holder, and the holder is pressed toward the side where the magnetic detector is disposed by the leaf spring, The magnet is directly pressed by an auxiliary pressing piece provided on a leaf spring, and the contact portion is elastically pressed by the positioning portion.

上記構成では、板ばねに設けられた保持押圧片で、磁石の当接部がホルダの位置決め部に押し付けられ、磁石をホルダ内で動くことなく保持させることができる。   In the above configuration, the magnet pressing portion is pressed against the positioning portion of the holder by the holding pressing piece provided on the leaf spring, and the magnet can be held without moving in the holder.

本発明の移動検出装置は、移動部と共に移動するホルダに保持されている磁石が突形状の対向面を有しており、ホルダには磁石の対向面の中央領域が対向する開口部が形成されている。そのために、磁石の対向面を磁気検知器に接近する位置に配置でき、磁気検知器による磁石の漏れ磁界の検知感度を高くできる。   In the movement detecting device of the present invention, the magnet held by the holder that moves together with the moving part has a projecting facing surface, and the holder is formed with an opening that faces the central region of the facing surface of the magnet. ing. Therefore, the opposing surface of a magnet can be arrange | positioned in the position which approaches a magnetic detector, and the detection sensitivity of the leakage magnetic field of the magnet by a magnetic detector can be made high.

また、磁石に突形状の対向面よりも後退した位置に当接部を形成し、この当接部で磁石を位置決めすることにより、磁石の磁気検知器に対向する対向面が曲面であっても、ホルダ内で磁石を確実に位置決めすることができる。   Moreover, even if the opposing surface facing the magnetism detector of the magnet is a curved surface, a contact portion is formed at a position retracted from the protruding opposing surface of the magnet, and the magnet is positioned by this contact portion. The magnet can be reliably positioned in the holder.

図1は本発明の実施の形態の移動検出装置を示す断面図である。図2は、板ばねと摺動ホルダとが組まれた状態を背部側から示す斜視図であり、図3は、板ばねと磁石と摺動ホルダを背部側から見た分解斜視図である。図4は磁石と摺動ホルダを対向面側から見た分解斜視図である。図5は、板ばねと摺動ホルダを示す縦断面図である。   FIG. 1 is a sectional view showing a movement detecting apparatus according to an embodiment of the present invention. FIG. 2 is a perspective view showing a state in which the leaf spring and the sliding holder are assembled from the back side, and FIG. 3 is an exploded perspective view of the leaf spring, the magnet, and the sliding holder as seen from the back side. FIG. 4 is an exploded perspective view of the magnet and the sliding holder as viewed from the facing surface side. FIG. 5 is a longitudinal sectional view showing the leaf spring and the sliding holder.

図1に示す移動検出装置10は、内燃機関の排気ガス再循環装置(EGR)において、排気ガスの循環量を制御する制御弁1の開閉度を検出するためのものである。制御弁は、自動車に設けられた制御部からの指令によりモータの動力などによって開閉する。   A movement detection device 10 shown in FIG. 1 is for detecting the degree of opening and closing of a control valve 1 that controls the circulation amount of exhaust gas in an exhaust gas recirculation device (EGR) of an internal combustion engine. The control valve is opened and closed by the power of the motor or the like according to a command from a control unit provided in the automobile.

移動検出装置10は、固定部であるハウジング11を有している。ハウジング11は合成樹脂材料で射出成型されるなどして非磁性材料で形成されている。ハウジング11の下部にスラスト軸受13が取り付けられており、このスラスト軸受13に軸部12aがY1−Y2方向へ摺動自在に保持されている。前記軸部12aは、前記制御弁1が開閉動作する際に、制御弁1の開度に応じてY1−Y2方向へ移動する。軸部12aの上部には移動部12bが一体に形成されており、軸部12aと移動部12bが、ハウジング11の内部のシリンダ11a内を上下に移動する。軸部12aと移動部12bは、合成樹脂材料などの非磁性材料で形成されている。シリンダ11a内には上方に圧縮コイルばね17が収納されており、この圧縮コイルばね17によって、軸部12aと移動部12bが常にY2方向へ付勢されている。圧縮コイルばね17は、ばね用ステンレスなどの非磁性材料で形成されている。   The movement detection device 10 includes a housing 11 that is a fixed portion. The housing 11 is formed of a non-magnetic material by injection molding with a synthetic resin material. A thrust bearing 13 is attached to the lower portion of the housing 11, and a shaft portion 12a is slidably held in the Y1-Y2 direction on the thrust bearing 13. The shaft portion 12a moves in the Y1-Y2 direction according to the opening degree of the control valve 1 when the control valve 1 opens and closes. A moving part 12 b is integrally formed on the upper part of the shaft part 12 a, and the shaft part 12 a and the moving part 12 b move up and down in the cylinder 11 a inside the housing 11. The shaft portion 12a and the moving portion 12b are formed of a nonmagnetic material such as a synthetic resin material. A compression coil spring 17 is housed in the cylinder 11a. The compression coil spring 17 constantly urges the shaft portion 12a and the moving portion 12b in the Y2 direction. The compression coil spring 17 is made of a nonmagnetic material such as stainless steel for springs.

シリンダ11a内には移動部12bをY1−Y2方向へ直線的に移動させる案内部が設けられており、軸部12aと移動部12bは、前記スラスト軸受13と前記案内部に案内されてY1−Y2方向へ直線的に移動させられる。シリンダ11aのX1側の内面に案内面14が形成されている。この案内面14は、図1の紙面に直交する方向およびY1−Y2方向へ延びる平面である。   A guide portion for linearly moving the moving portion 12b in the Y1-Y2 direction is provided in the cylinder 11a, and the shaft portion 12a and the moving portion 12b are guided by the thrust bearing 13 and the guide portion to be Y1- It is moved linearly in the Y2 direction. A guide surface 14 is formed on the inner surface of the cylinder 11a on the X1 side. The guide surface 14 is a plane extending in the direction orthogonal to the paper surface of FIG. 1 and in the Y1-Y2 direction.

ハウジング11には、前記案内面14よりもX1側に保持凹部15が形成されている。保持凹部15内に磁気検知器16が保持されている。磁気検知器16は、保持凹部15のX2側の位置決め面15aに密着して固定されている。ハウジング11を製造するときの寸法管理によって前記案内面14と位置決め面15aとのX方向の寸法が高精度に決められている。そのために、位置決め面15aに密着した磁気検知器16と、案内面14とのX方向の距離が高精度に設定されている。   A holding recess 15 is formed in the housing 11 on the X1 side of the guide surface 14. A magnetic detector 16 is held in the holding recess 15. The magnetic detector 16 is fixed in close contact with the positioning surface 15a on the X2 side of the holding recess 15. The dimension of the guide surface 14 and the positioning surface 15a in the X direction is determined with high accuracy by dimensional control when the housing 11 is manufactured. For this purpose, the distance in the X direction between the magnetic detector 16 in close contact with the positioning surface 15a and the guide surface 14 is set with high accuracy.

磁気検知器16は、磁束のX1方向とX2方向への強度の大小の変化、およびその向きの変化を検知できるものであり、ホール素子または磁気抵抗効果素子などの検知素子を有している。   The magnetic detector 16 can detect a change in strength of the magnetic flux in the X1 direction and the X2 direction and a change in the direction thereof, and includes a detection element such as a Hall element or a magnetoresistive effect element.

図1に示すように、シリンダ11a内には摺動ホルダ20が設けられ、この摺動ホルダ20に磁石30が保持されている。摺動ホルダ20と前記移動部12bとの間に板ばね40が設けられており、この板ばね40の弾性力によって、摺動ホルダ20が案内面14に押し付けられている。軸部12aと移動部12bが制御弁1の開度に応じてY1−Y2方向へ移動する際に、移動部12bと共に摺動ホルダ20が案内面14に密着しながら摺動する。   As shown in FIG. 1, a sliding holder 20 is provided in the cylinder 11 a, and a magnet 30 is held on the sliding holder 20. A leaf spring 40 is provided between the sliding holder 20 and the moving portion 12 b, and the sliding holder 20 is pressed against the guide surface 14 by the elastic force of the leaf spring 40. When the shaft portion 12a and the moving portion 12b move in the Y1-Y2 direction according to the opening degree of the control valve 1, the sliding holder 20 slides in close contact with the guide surface 14 together with the moving portion 12b.

図3、図4および図5に示すように、摺動ホルダ20は薄型の直方体形状であり、合成樹脂材料などの非磁性材料で形成されている。図4に示すように、摺動ホルダ20のX1側(案内面14に対向する側)である表側に、一対のレール面21,21が形成されている。レール面21,21は、Z1側とZ2側に離れて位置しており、且つY−Z平面と平行な平面である。また、それぞれのレール面21は、Z1−Z2方向の幅寸法よりもY1−Y2方向の縦寸法が十分に大きい帯面形状である。それぞれのレール面21,21は、Y1側の端部21a,21aに曲面が形成され、Y2側の端部21b,21bにも曲面が形成されている。   As shown in FIGS. 3, 4, and 5, the sliding holder 20 has a thin rectangular parallelepiped shape and is formed of a nonmagnetic material such as a synthetic resin material. As shown in FIG. 4, a pair of rail surfaces 21, 21 are formed on the front side, which is the X1 side (side facing the guide surface 14) of the sliding holder 20. The rail surfaces 21 and 21 are spaced apart on the Z1 side and the Z2 side, and are planes parallel to the YZ plane. Further, each rail surface 21 has a strip shape in which the vertical dimension in the Y1-Y2 direction is sufficiently larger than the width dimension in the Z1-Z2 direction. Each of the rail surfaces 21 and 21 has a curved surface at the end portions 21a and 21a on the Y1 side, and also has curved surfaces at the end portions 21b and 21b on the Y2 side.

レール面21とレール面21との間には、レール面21,21よりもX2側に後退する後退面22,22が設けられている。後退面22,22は、Y−Z平面と平行な平面である。後退面22と後退面22はY1−Y2方向に離れて設けられており、上側の後退面22と下側の後退面との間に開口部23が形成されている。開口部23は四角形状であり、摺動ホルダ20をX1−X2方向に貫通し、摺動ホルダ20の内部に形成された保持凹部24に連通している。   Between the rail surface 21 and the rail surface 21, receding surfaces 22 and 22 that recede to the X2 side from the rail surfaces 21 and 21 are provided. The receding surfaces 22 and 22 are planes parallel to the YZ plane. The receding surface 22 and the receding surface 22 are provided apart in the Y1-Y2 direction, and an opening 23 is formed between the upper receding surface 22 and the lower receding surface. The opening 23 has a rectangular shape, penetrates the sliding holder 20 in the X1-X2 direction, and communicates with a holding recess 24 formed inside the sliding holder 20.

図3と図4に示すように、前記保持凹部24は、摺動ホルダ20の内部に形成されて、背部側(X2側)に開口している。摺動ホルダ20のX2側に向く背面25は、保持凹部24の開口部の周囲を囲む枠形状となっている。背面25のうちのY1側の短辺に位置する部分が第1の支持部25aとして機能し、Y2側の短辺に位置する部分が第2の支持部25bとして機能する。そして、Z1側の長辺に位置する部分が側方支持部25cであり、Z2側の長辺に位置する部分が側方支持部25dである。   As shown in FIGS. 3 and 4, the holding recess 24 is formed inside the sliding holder 20 and opens to the back side (X2 side). A back surface 25 facing the X2 side of the sliding holder 20 has a frame shape surrounding the periphery of the opening of the holding recess 24. A portion of the back surface 25 located on the short side on the Y1 side functions as the first support portion 25a, and a portion located on the short side on the Y2 side functions as the second support portion 25b. And the part located in the long side of Z1 side is the side support part 25c, and the part located in the long side of Z2 side is the side support part 25d.

第1の支持部25aのZ1側の縁部とZ2側の縁部には、それぞれX2方向へ突出する位置決め突起26a,26aが一体に形成されており、第2の支持部25bのZ1側の縁部とZ2側の縁部には、それぞれX2方向へ突出する位置決め突起26b,26bが一体に形成されている。   Positioning protrusions 26a and 26a projecting in the X2 direction are integrally formed on the edge portion on the Z1 side and the edge portion on the Z2 side of the first support portion 25a, respectively, and on the Z1 side of the second support portion 25b. Positioning projections 26b and 26b projecting in the X2 direction are integrally formed on the edge and the edge on the Z2 side, respectively.

図3と図5に示すように、摺動ホルダ20の保持凹部24内では、一対のレール面21,21のそれぞれの背部に、Y1側に形成された第1の位置決め部27a,27aと、Y2側に形成された第2の位置決め部27b,27bが設けられている。図5に示すように、Y1側に設けられた一対の第1の位置決め部27a,27aとY2側に設けられた一対の第2の位置決め部27b,27bは、Y−Z平面と平行な平面H上に位置している。この平面Hは、前記レール面21,21と平行である。   As shown in FIGS. 3 and 5, in the holding recess 24 of the sliding holder 20, first positioning portions 27 a and 27 a formed on the Y1 side on the back portions of the pair of rail surfaces 21 and 21, and Second positioning portions 27b and 27b formed on the Y2 side are provided. As shown in FIG. 5, the pair of first positioning portions 27a and 27a provided on the Y1 side and the pair of second positioning portions 27b and 27b provided on the Y2 side are parallel to the YZ plane. Located on H. The plane H is parallel to the rail surfaces 21 and 21.

図5に示すように、保持凹部24の内部においてY1側に位置する前方内面28aは、Y1側に位置する前記後退面22の背面であり、Y2側に位置する前方内面28bは、Y2側に位置する前記後退面22の背面である。前方内面28a,28bは、前記位置決め平面HよりもX1側に形成されている。そして、Y1側の前方内面28aは、Y2方向に向かうにしたがってX1方向へ移動する傾斜曲面または傾斜平面であり、Y2側の前方内面28bは、Y1方向に向かうにしたがってX2方向へ移動する傾斜曲面または傾斜平面である。   As shown in FIG. 5, the front inner surface 28a located on the Y1 side in the holding recess 24 is the back surface of the receding surface 22 located on the Y1 side, and the front inner surface 28b located on the Y2 side is located on the Y2 side. It is the back surface of the said receding surface 22 located. The front inner surfaces 28a and 28b are formed on the X1 side with respect to the positioning plane H. The front inner surface 28a on the Y1 side is an inclined curved surface or inclined plane that moves in the X1 direction as it goes in the Y2 direction, and the front inner surface 28b on the Y2 side is an inclined curved surface that moves in the X2 direction as it goes in the Y1 direction. Or it is an inclined plane.

図5に示すように、保持凹部24の内部では、Y1側の内面に圧入面29aが形成され、Y2側の内面に圧入面29bが形成されている。圧入面29aと圧入面29bのY1−Y2方向の対向間隔は、磁石30のY1−Y2方向の長さ寸法と同じか、またはそれよりもわずかに短く形成されており、磁石30が、保持凹部24内に軽く圧入されて、磁石30と摺動ホルダ20とが位置決めされる。   As shown in FIG. 5, inside the holding recess 24, a press-fit surface 29a is formed on the inner surface on the Y1 side, and a press-fit surface 29b is formed on the inner surface on the Y2 side. The interval between the press-fitting surface 29a and the press-fitting surface 29b in the Y1-Y2 direction is the same as or slightly shorter than the length of the magnet 30 in the Y1-Y2 direction. The magnet 30 and the sliding holder 20 are positioned by being lightly press-fitted into the 24.

磁石30は、Nd−Fe−Bなどの磁性粉が焼結された磁石、または前記磁性粉と少量の合成樹脂とが焼結された磁石であって、表面にエポキシ樹脂がコーティングされたものが使用される。前述のように、磁石30は、摺動ホルダ20の保持凹部24の内部に圧入できる大きさの長方形状である。図1と図4に示すように、磁石30は、Y1側に向く上端面31と、Y2側に向く下端面32とが、互いに逆の磁極となるように着磁されている。図示されている実施の形態では、上端面31がN極で下端面32がS極に着磁されている。   The magnet 30 is a magnet in which magnetic powder such as Nd—Fe—B is sintered, or a magnet in which the magnetic powder and a small amount of synthetic resin are sintered, and the surface thereof is coated with an epoxy resin. used. As described above, the magnet 30 has a rectangular shape that can be press-fitted into the holding recess 24 of the sliding holder 20. As shown in FIGS. 1 and 4, the magnet 30 is magnetized such that the upper end surface 31 facing the Y1 side and the lower end surface 32 facing the Y2 side are opposite to each other. In the illustrated embodiment, the upper end surface 31 is magnetized with an N pole and the lower end surface 32 is magnetized with an S pole.

図4に示すように、磁石30のX1側に向く表面は対向面33である。対向面33は、そのZ1−Z2方向の幅寸法W2が、摺動ホルダ20に形成された開口部23の幅寸法W1と同じ大きさかまたはわずかに小さく形成されている。図1と図4に示すように、また図5に破線で示しているように、磁石30の対向面33は、その上端部33aと下端部33bよりも中央部33cを含む中央領域がX1方向へ突出する形状である。すなわち、対向面33は、Y1−Y2方向にのみ曲率を有し、Z1−Z2方向へ曲率を有しておらず、シリンドリカルな湾曲面である。図5に示すように、磁石30をY1−Y2方向に二分してX方向に延びる中心線をOxとしたときに、対向面33において中心線Ox上に位置する中央部33cが最もX1側へ突出している。   As shown in FIG. 4, the surface facing the X <b> 1 side of the magnet 30 is a facing surface 33. The facing surface 33 is formed such that the width dimension W2 in the Z1-Z2 direction is the same as or slightly smaller than the width dimension W1 of the opening 23 formed in the sliding holder 20. As shown in FIGS. 1 and 4 and as indicated by a broken line in FIG. 5, the opposing surface 33 of the magnet 30 has a central region including the central portion 33 c rather than the upper end portion 33 a and the lower end portion 33 b in the X1 direction. It is a shape that protrudes to. That is, the facing surface 33 has a curvature only in the Y1-Y2 direction, does not have a curvature in the Z1-Z2 direction, and is a cylindrical curved surface. As shown in FIG. 5, when the center line extending in the X direction by dividing the magnet 30 into two in the Y1-Y2 direction is defined as Ox, the central portion 33c located on the center line Ox in the facing surface 33 is furthest toward the X1 side. It protrudes.

磁石30は、Z1−Z2方向に二分してY方向に延びる中心線Oyを挟んで左右に対称形状である。前記対向面33よりもX2側に後退する位置で、Z1側の側部に鍔部34が形成され、Z2側の側部にも鍔部34が形成されており、それぞれの鍔部34,34のX1側に向く面が当接部34a,34aである。当接部34a,34aは、Y−Z平面と平行な平面である。   The magnet 30 has a symmetrical shape on the left and right with a center line Oy divided in the Z1-Z2 direction and extending in the Y direction. At a position retreating to the X2 side with respect to the facing surface 33, a collar part 34 is formed on the side part on the Z1 side, and a collar part 34 is also formed on the side part on the Z2 side. The surfaces facing the X1 side are the contact portions 34a, 34a. The contact portions 34a and 34a are planes parallel to the YZ plane.

図1に示すように、磁石30は対向面33がX1側に向けられて、摺動ホルダ20の背部から保持凹部24内に装着される。磁石30の上端面31と下端面32が、保持凹部24の圧入面29aと圧入面29bとに圧入されることで、磁石30が摺動ホルダ20にY方向へ動かないように位置決めされて保持される。   As shown in FIG. 1, the magnet 30 is mounted in the holding recess 24 from the back of the sliding holder 20 with the facing surface 33 facing the X1 side. The upper end surface 31 and the lower end surface 32 of the magnet 30 are press-fitted into the press-fitting surface 29a and the press-fitting surface 29b of the holding recess 24 so that the magnet 30 is positioned and held by the sliding holder 20 so as not to move in the Y direction. Is done.

また、磁石30の鍔部34,34に形成された当接部34a,34aが、保持凹部24内の第1の位置決め部27a,27aと第2の位置決め部27b,27bに均等に当接することで、摺動ホルダ20に対する磁石30のX1方向への相対位置が決められる。したがって、磁石30のX1側に向く対向面33は、摺動ホルダ20内の前方内面28a,28bに当接することはなく小さな隙間を介して対向する。   Further, the contact portions 34a and 34a formed on the flange portions 34 and 34 of the magnet 30 are equally contacted with the first positioning portions 27a and 27a and the second positioning portions 27b and 27b in the holding recess 24. Thus, the relative position of the magnet 30 with respect to the sliding holder 20 in the X1 direction is determined. Therefore, the facing surface 33 facing the X1 side of the magnet 30 is opposed to the front inner surfaces 28a and 28b in the sliding holder 20 via a small gap.

磁石30の対向面33は、中央部33cがX1方向へ突出する突曲面形状であるが、磁石30が保持凹部24内に位置決めされて保持された状態で、対向面33の中央部33cを含む中央領域が、摺動ホルダ20の開口部23の内部に入り込む。そのため、磁石30の対向面33の中央部33cとレール面21,21とのX1−X2方向の間隔をきわめて短くできる。図1に示すように、摺動ホルダ20のレール面21,21が、ハウジング11のシリンダ11a内の案内面14に押し付けられたときに、対向面33の中央部33cと案内面14との間隔δを、互いに当たらない範囲できわめて短くでき、磁石30から磁気検知器16に与えられる漏れ磁界の磁束密度を高くできる。   The opposing surface 33 of the magnet 30 has a projecting curved surface shape with the central portion 33c protruding in the X1 direction, and includes the central portion 33c of the opposing surface 33 with the magnet 30 positioned and held in the holding recess 24. The central region enters the inside of the opening 23 of the sliding holder 20. Therefore, the space | interval of the X1-X2 direction of the center part 33c of the opposing surface 33 of the magnet 30 and the rail surfaces 21 and 21 can be shortened very much. As shown in FIG. 1, when the rail surfaces 21 and 21 of the sliding holder 20 are pressed against the guide surface 14 in the cylinder 11 a of the housing 11, the distance between the central portion 33 c of the facing surface 33 and the guide surface 14. δ can be made extremely short as long as they do not hit each other, and the magnetic flux density of the leakage magnetic field applied from the magnet 30 to the magnetic detector 16 can be increased.

また、摺動ホルダ20の表側(X1側)に、磁石30の対向面33の中央部33cを覆う薄肉部分を設ける必要がないため、摺動ホルダ20の製造が容易である。   Moreover, since it is not necessary to provide the thin part which covers the center part 33c of the opposing surface 33 of the magnet 30 in the front side (X1 side) of the sliding holder 20, manufacture of the sliding holder 20 is easy.

なお、実施の形態の摺動ホルダ20では、開口部23の上部と下部に後退面22,22およびその裏側の前方内面28a,28bが設けられているが、後退面22,22を除去して、レール面21とレール面21とで挟まれる領域を全て開口部23にしてもよい。   In the sliding holder 20 of the embodiment, the receding surfaces 22 and 22 and the front inner surfaces 28a and 28b on the back side thereof are provided at the upper and lower portions of the opening 23, but the receding surfaces 22 and 22 are removed. All the regions sandwiched between the rail surface 21 and the rail surface 21 may be openings 23.

板ばね40は、非磁性材料であるばね用ステンレス鋼板などで形成されている。図1、図2、図3および図5に示すように、板ばね40は、X2側に向けられた取付片41を有している。取付片41はほぼ平坦である。板ばね40は、取付片41のY2側に第1の折曲部42がU字状に形成されて、中間片43が折り返されて形成されている。中間片43はほぼ平坦でありY1方向へ向かって延びている。中間片43のY1側に第2の折曲部44がU字状に形成されて、押圧片45が折り返されて形成されている。押圧片45はほぼ平坦でありY2方向に延びている。   The leaf spring 40 is made of a stainless steel plate for springs, which is a nonmagnetic material. As shown in FIGS. 1, 2, 3, and 5, the leaf spring 40 has a mounting piece 41 directed to the X2 side. The attachment piece 41 is substantially flat. The leaf spring 40 is formed by forming a first bent portion 42 in a U shape on the Y2 side of the mounting piece 41 and folding back the intermediate piece 43. The intermediate piece 43 is substantially flat and extends in the Y1 direction. A second bent portion 44 is formed in a U shape on the Y1 side of the intermediate piece 43, and a pressing piece 45 is folded back. The pressing piece 45 is substantially flat and extends in the Y2 direction.

板ばね40の押圧片45には、Y1側の端部にZ1−Z2方向に間隔を空けて一対の支持穴48a,48aが開口しており、Y2側にZ1−Z2方向に間隔を空けて一対の支持穴48b,48bが開口している。また、押圧片45には中央部に細長い切欠き45aが形成されており、この切欠き45a内に、押圧片45から一体にY2側に延びる舌片形状の補助押圧片49が形成されている。図3と図5に示すように、補助押圧片49は、押圧片45よりもX1側へやや突出するように変形されている。   The pressing piece 45 of the leaf spring 40 has a pair of support holes 48a and 48a opened at the end on the Y1 side in the Z1-Z2 direction, and spaced apart in the Z1-Z2 direction on the Y2 side. A pair of support holes 48b and 48b are opened. Further, the pressing piece 45 is formed with an elongated notch 45a at the center, and a tongue-shaped auxiliary pressing piece 49 extending integrally from the pressing piece 45 to the Y2 side is formed in the notch 45a. . As shown in FIGS. 3 and 5, the auxiliary pressing piece 49 is deformed so as to slightly protrude from the pressing piece 45 toward the X1 side.

図2に示すように、磁石30が摺動ホルダ20の保持凹部24内に装着された後に、摺動ホルダ20の背部に形成された位置決め突起26a,26aが押圧片45に開口する支持穴48a,48a内に挿入され、位置決め突起26b,26bが支持穴48b,48bに挿入される。そして、板ばね40の押圧片45からX2方向へ突出する位置決め突起26a,26a,26b,26bが溶融され押し潰されてかしめ固定される。   As shown in FIG. 2, after the magnet 30 is mounted in the holding recess 24 of the sliding holder 20, the positioning projections 26 a and 26 a formed on the back portion of the sliding holder 20 have support holes 48 a that open to the pressing piece 45. , 48a, and positioning protrusions 26b, 26b are inserted into the support holes 48b, 48b. Then, the positioning protrusions 26a, 26a, 26b, 26b protruding from the pressing piece 45 of the leaf spring 40 in the X2 direction are melted, crushed and fixed by caulking.

前記かしめ固定により、押圧片45と摺動ホルダ20の背面25とが密着した状態で互いに固定され、摺動ホルダ20と磁石30と板ばね40が一体とされた部品組立体が完成する。この部品組み立て体では、押圧片45に形成された補助押圧片49が磁石30の背面35を直接にX1方向へ付勢しており、この付勢力で、磁石30の当接部34a,34aが摺動ホルダ20の位置決め部27a,27aおよび27b,27bに押し付けられ、摺動ホルダ20内で磁石30がX1−X2方向へがたつきが生じないように保持される。   By the caulking and fixing, the pressing piece 45 and the back surface 25 of the sliding holder 20 are fixed to each other, and a component assembly in which the sliding holder 20, the magnet 30, and the leaf spring 40 are integrated is completed. In this component assembly, the auxiliary pressing piece 49 formed on the pressing piece 45 directly urges the back surface 35 of the magnet 30 in the X1 direction. With this urging force, the contact portions 34a and 34a of the magnet 30 move. The magnet 30 is pressed against the positioning portions 27a, 27a and 27b, 27b of the sliding holder 20 and is held in the sliding holder 20 so as not to rattle in the X1-X2 direction.

図2と図3に示すように、板ばね40の取付片41にはY2側に挟持片46がY1側に挟持片47がそれぞれ形成されている。一方の挟持片46はX1方向へ直角に折り曲げられており、他方の挟持片47はU字状に曲げられてY1方向へ向けて弾性変形可能である。   As shown in FIGS. 2 and 3, the attachment piece 41 of the leaf spring 40 is formed with a holding piece 46 on the Y2 side and a holding piece 47 on the Y1 side. One clamping piece 46 is bent at a right angle in the X1 direction, and the other clamping piece 47 is bent in a U shape and can be elastically deformed in the Y1 direction.

図1に示すように、移動部12bにはX1側に向く取付面12c,12dが形成されている。取付面12cと取付面12dはY1−Y2方向に間隔を空けて形成されており、取付面12cと取付面12dは、Y−Z面と平行な同一平面上に位置している。そして、取付面12cと取付面12dとの間にX1方向へ突出する挟持突部12eが一体に形成されている。   As shown in FIG. 1, attachment surfaces 12c and 12d facing the X1 side are formed on the moving portion 12b. The mounting surface 12c and the mounting surface 12d are formed with an interval in the Y1-Y2 direction, and the mounting surface 12c and the mounting surface 12d are located on the same plane parallel to the YZ plane. And the clamping protrusion 12e which protrudes to a X1 direction is integrally formed between the attachment surface 12c and the attachment surface 12d.

図2に示すように、摺動ホルダ20に板ばね40が取り付けられた後に、図1に示すように、板ばね40の取付片41が、移動部12bの取付面12c,12dに密着するように取り付けられ、このとき、挟持片46と挟持片47とで、挟持突部12eがY1−Y2方向から挟持される。挟持片47が弾性変形可能であるため、挟持突部12eは挟持片46と挟持片47とでY1−Y2方向へがたつきを生じることなく確実に挟持される。板ばね40は、取付片41が取付面12c,12dに密着することで、移動部12bに対してX1−X2方向へ位置決めされ、挟持片46,47で挟持突部12eを挟持することで、Y1−Y2方向へ位置決めされる。さらに、図示していないが、移動部12bには板ばね40の取付片41をZ1−Z2方向へ位置決めする位置決め機構が設けられている。   As shown in FIG. 2, after the leaf spring 40 is attached to the sliding holder 20, as shown in FIG. 1, the attachment piece 41 of the leaf spring 40 is brought into close contact with the attachment surfaces 12c and 12d of the moving portion 12b. At this time, the clamping protrusion 12e is clamped from the Y1-Y2 direction by the clamping piece 46 and the clamping piece 47. Since the sandwiching piece 47 can be elastically deformed, the sandwiching protrusion 12e is securely sandwiched between the sandwiching piece 46 and the sandwiching piece 47 without causing rattling in the Y1-Y2 direction. The leaf spring 40 is positioned in the X1-X2 direction with respect to the moving part 12b by the attachment piece 41 being in close contact with the attachment surfaces 12c, 12d, and the sandwiching protrusions 12e are sandwiched by the sandwiching pieces 46, 47, Positioned in the Y1-Y2 direction. Further, although not shown, the moving portion 12b is provided with a positioning mechanism for positioning the attachment piece 41 of the leaf spring 40 in the Z1-Z2 direction.

上記のようにして、摺動ホルダ20と板ばね40が移動部12bに取り付けられた後に、移動部12bと軸部12aが図1に示すハウジング11のシリンダ11a内に装着される。移動部12dには、板ばね40の押圧片45の背部に少し間隔を空けて対向するストッパ51,51がY1−Y2方向へ間隔を空けて一体に突出形成されている。したがって、移動部12dをシリンダ11a内に組み込むときに、板ばね40の押圧片45がX2方向へ押されたとしても、押圧片45がストッパ51,51に当たって、板ばね40に過大な変形応力が作用するのを防止できる。   After the sliding holder 20 and the leaf spring 40 are attached to the moving part 12b as described above, the moving part 12b and the shaft part 12a are mounted in the cylinder 11a of the housing 11 shown in FIG. Stoppers 51, 51 facing the back portion of the pressing piece 45 of the leaf spring 40 with a slight gap are integrally formed on the moving portion 12 d so as to protrude in the Y1-Y2 direction. Therefore, even when the pressing piece 45 of the leaf spring 40 is pushed in the X2 direction when the moving part 12d is assembled in the cylinder 11a, the pushing piece 45 hits the stoppers 51 and 51, and an excessive deformation stress is applied to the leaf spring 40. It can be prevented from acting.

図1に示すように、移動検出装置10が組み立てられた状態で、板ばね40がX2方向へやや圧縮させられた状態であり、板ばね40のX1方向への弾性復元力によって、摺動ホルダ20のレール面21,21が、シリンダ11a内の案内面14に押し付けられる。   As shown in FIG. 1, in a state where the movement detecting device 10 is assembled, the leaf spring 40 is slightly compressed in the X2 direction, and the elastic holder force of the leaf spring 40 in the X1 direction causes the sliding holder The 20 rail surfaces 21 and 21 are pressed against the guide surface 14 in the cylinder 11a.

前記板ばね40の押圧片45がX2方向へ押されて圧縮変形すると、図5に示すように、第1の折曲部42を支点として、中間片43を時計方向へ反発させようとする弾性モーメントM1が発生し、第2の折曲部44を支点として、押圧片45を反時計方向へ反発させようとする弾性モーメントM2が発生する。この相反する向きの弾性モーメントM1,M2が摺動ホルダ20に作用するため、摺動ホルダ20が案内面14に対して、圧力の大きな偏りがなく押圧される。そのために、摺動ホルダ20が案内面14をY1方向へ摺動するときと、案内面14をY2方向へ摺動するときの双方向において、摺動ホルダ20が案内面14をスムースに摺動でき、摺動ホルダ20が傾いてがたつくなどの現象が生じにくくなる。   When the pressing piece 45 of the leaf spring 40 is pressed in the X2 direction and is compressed and deformed, as shown in FIG. 5, the elastic force that repels the intermediate piece 43 clockwise with the first bent portion 42 as a fulcrum. A moment M1 is generated, and an elastic moment M2 is generated to try to repel the pressing piece 45 counterclockwise with the second bent portion 44 as a fulcrum. Since the opposing elastic moments M1 and M2 act on the sliding holder 20, the sliding holder 20 is pressed against the guide surface 14 without a large pressure bias. Therefore, the sliding holder 20 smoothly slides on the guide surface 14 in both directions when the sliding holder 20 slides on the guide surface 14 in the Y1 direction and when sliding on the guide surface 14 in the Y2 direction. And the phenomenon that the sliding holder 20 tilts and rattles is less likely to occur.

また、図1に示す組み立て状態では、板ばね40の取付片41と押圧片45とが平行になっている。またこれらはシリンダ11a内の案内面14とも平行である。押圧片45と取付片41とが案内面14と平行であるため、摺動ホルダ20がY1方向へ摺動するときとY2方向へ摺動するときとで、摺動ホルダ20に作用するX1方向への押圧力の強度分布がY方向へ大きく偏るのを避けることができる。   In the assembled state shown in FIG. 1, the attachment piece 41 and the pressing piece 45 of the leaf spring 40 are parallel to each other. They are also parallel to the guide surface 14 in the cylinder 11a. Since the pressing piece 45 and the mounting piece 41 are parallel to the guide surface 14, the X1 direction acting on the sliding holder 20 when the sliding holder 20 slides in the Y1 direction and when sliding in the Y2 direction. It can be avoided that the intensity distribution of the pressing force is greatly biased in the Y direction.

さらに、摺動ホルダ20の背面のY1側の第1の支持部25aが、板ばね40の第2の折曲部44の近傍のX1側に位置し、摺動ホルダ20のY2側の第2の支持部25bが、板ばね40の第1の折曲部42の近傍においてX2側に対向している。そのため、板ばね40の第1の折曲部42の復元弾性力が摺動ホルダ20の背部の第2の支持部25bまたはその付近でX1方向へ作用し、第2の折曲部44の復元弾性力が摺動ホルダ20の第1の支持部25aまたはその付近でX1方向へ作用するようになる。摺動ホルダ20のY1−Y2方向へ離れた第1の支持部25aと第2の支持部25bに対して、X1方向への加重が作用するために、摺動ホルダ20は、案内面14に沿って傾くことなくY1方向とY2方向の双方へ摺動しやすくなる。   Further, the first support portion 25a on the Y1 side of the back surface of the sliding holder 20 is located on the X1 side in the vicinity of the second bent portion 44 of the leaf spring 40, and the second supporting portion on the Y2 side of the sliding holder 20 is located. The support portion 25b faces the X2 side in the vicinity of the first bent portion 42 of the leaf spring 40. Therefore, the restoring elastic force of the first bent portion 42 of the leaf spring 40 acts in the X1 direction at or near the second support portion 25b of the back portion of the sliding holder 20, and the second bent portion 44 is restored. The elastic force acts in the X1 direction at or near the first support portion 25a of the sliding holder 20. Since the load in the X1 direction acts on the first support portion 25a and the second support portion 25b that are separated in the Y1-Y2 direction of the slide holder 20, the slide holder 20 is applied to the guide surface 14. It becomes easy to slide in both the Y1 direction and the Y2 direction without tilting along.

また、摺動ホルダ20は、Y1−Y2方向に延びる一対のレール面21,21が案内面14を摺動することにより、摺動時の摩擦抵抗力も小さくできる。   Moreover, the sliding holder 20 can also reduce the frictional resistance force at the time of sliding, when a pair of rail surfaces 21 and 21 extended in a Y1-Y2 direction slide on the guide surface 14. FIG.

図4に示すように、磁石30は上端面31と下端面32が逆の磁極に着磁されている。そのため、対向面33の上端部33aの前方では、磁束φのX1方向のベクトル成分が大きく、下端部33bの前方では磁束φのX2方向のベクトル成分が大きく、中央部33cでは、磁束φのX1方向またはX2方向のベクトル成分が最小になる。移動部12bと共に磁石30がY1−Y2方向へ移動する際に、磁気検知器16によって磁束φのX1方向のベクトル成分とX2方向のベクトル成分の大きさの変化が検知されて、移動部12bと磁石30の移動位置が測定される。   As shown in FIG. 4, the magnet 30 has an upper end surface 31 and a lower end surface 32 that are magnetized with opposite magnetic poles. Therefore, the vector component in the X1 direction of the magnetic flux φ is large in front of the upper end portion 33a of the opposing surface 33, the vector component in the X2 direction of the magnetic flux φ is large in front of the lower end portion 33b, and the X1 of the magnetic flux φ is in the central portion 33c. The vector component in the direction or X2 direction is minimized. When the magnet 30 moves in the Y1-Y2 direction together with the moving unit 12b, the magnetic detector 16 detects a change in the magnitude of the vector component in the X1 direction and the vector component in the X2 direction of the magnetic flux φ, and the moving unit 12b The moving position of the magnet 30 is measured.

このような検知方式では、磁石30が案内面14と常に同じ距離を保ちながら、Y1−Y2方向へ傾くことなく安定してスムースに移動することが必要である。本発明の実施の形態の移動検出装置10では、前記構造の板ばね40を使用することで、摺動ホルダ20が案内面14を安定して摺動できるようになり、板ばね40に設けられた補助押圧片49によって、摺動ホルダ20内で磁石30がX1方向へ押圧されて位置決めされている。よって、摺動ホルダ20がY1−Y2方向へ摺動する際に、磁石30の対向面33と磁気検知器16との対向距離を常に設計値通りに実現できるようになる。   In such a detection method, it is necessary for the magnet 30 to move stably and smoothly without tilting in the Y1-Y2 direction while always maintaining the same distance as the guide surface 14. In the movement detection device 10 according to the embodiment of the present invention, by using the leaf spring 40 having the above structure, the sliding holder 20 can slide on the guide surface 14 stably and is provided on the leaf spring 40. By the auxiliary pressing piece 49, the magnet 30 is pressed and positioned in the X1 direction in the sliding holder 20. Therefore, when the sliding holder 20 slides in the Y1-Y2 direction, the facing distance between the facing surface 33 of the magnet 30 and the magnetic detector 16 can always be realized as designed.

また、磁石30の対向面33を、中央部33cがX1方向へ最も突出した突曲面形状にすると、磁石30がY1−Y2方向へ直線的に移動したときの、移動距離に対する、磁気検知器16に作用するX1−X2方向の磁束密度の変化が、一次関数に近い変化を示すようになる。そのために、磁気検知器16の検知出力によって、移動部12bの移動量、すなわち制御弁1の開度をリニアに検知できるようになる。   Further, when the opposing surface 33 of the magnet 30 is formed into a protruding curved surface shape in which the central portion 33c protrudes most in the X1 direction, the magnetic detector 16 with respect to the moving distance when the magnet 30 moves linearly in the Y1-Y2 direction. The change in the magnetic flux density in the X1-X2 direction acting on the curve shows a change close to a linear function. Therefore, the movement amount of the moving part 12b, that is, the opening degree of the control valve 1 can be detected linearly by the detection output of the magnetic detector 16.

そして、磁石30の対向面33が突曲面形状であっても、その中央部33cを含む中央領域に対向する部分で、摺動ホルダ20に開口部23が形成されているため、対向面33の中央部33cを案内面14に当たることなく対向面14に接近させることができる。よって、磁気検知器16による漏れ磁界の検知感度を高めることが可能である。   Even if the facing surface 33 of the magnet 30 has a projecting curved surface shape, the opening 23 is formed in the sliding holder 20 at a portion facing the central region including the central portion 33c. The central portion 33c can be brought close to the facing surface 14 without hitting the guide surface 14. Therefore, it is possible to increase the detection sensitivity of the leakage magnetic field by the magnetic detector 16.

本発明の実施の形態の移動検出装置を示す断面図、Sectional drawing which shows the movement detection apparatus of embodiment of this invention, 摺動ホルダと磁石と板ばねが組み込まれた状態を背部側から示す斜視図、The perspective view which shows the state by which the sliding holder, the magnet, and the leaf | plate spring were integrated from the back part side, 摺動ホルダと磁石および板ばねを背部側から示す分解斜視図、An exploded perspective view showing the sliding holder, the magnet and the leaf spring from the back side, 摺動ホルダと磁石を表側から示す分解斜視図、An exploded perspective view showing the sliding holder and the magnet from the front side, 摺動ホルダと板ばねの断面図、Cross section of sliding holder and leaf spring,

符号の説明Explanation of symbols

1 制御弁
10 移動検出装置
11 固定部であるハウジング
12b 移動部
12e,12d 取付面
14 案内面
16 磁気検知器
20 摺動ホルダ
21 レール面
23 開口部
24 保持凹部
25a 第1の支持部
25b 第2の支持部
26a 第1の位置決め突起
26b 第2の位置決め突起
27a 第1の位置決め部
27b 第1の位置決め部
30 磁石
33 対向面
34a 当接部
40 板ばね
41 取付片
42 第1の折曲部
43 中間片
44 第2の折曲部
45 押圧片
49 補助押圧片
DESCRIPTION OF SYMBOLS 1 Control valve 10 Movement detection apparatus 11 Housing 12b which is a fixed part Moving part 12e, 12d Mounting surface 14 Guide surface 16 Magnetic detector 20 Slide holder 21 Rail surface 23 Opening part 24 Holding recessed part 25a 1st support part 25b 2nd Support portion 26a first positioning projection 26b second positioning projection 27a first positioning portion 27b first positioning portion 30 magnet 33 facing surface 34a abutting portion 40 leaf spring 41 mounting piece 42 first bent portion 43 Intermediate piece 44 Second bent portion 45 Pressing piece 49 Auxiliary pressing piece

Claims (5)

固定部に設けられた案内部に沿って直線的に往復移動する移動部と、前記移動部と一緒に移動する磁石と、前記固定部に設置されて前記磁石からの漏れ磁界を検知する磁気検知器とを有する移動検出装置において、
前記磁石の前記磁気検知器に対向する対向面は、前記移動部の移動方向に向く両端部よりもその中間領域が、前記磁気検知器が配置された側に向けて突出する形状であり、
前記磁石を保持して前記移動部と共に移動するホルダが設けられ、前記ホルダには、少なくとも前記対向面の中央領域に対向する部分に開口部が形成されていることを特徴とする移動検出装置。
A moving part that linearly reciprocates along a guide part provided in the fixed part, a magnet that moves together with the moving part, and a magnetic sensor that is installed in the fixed part and detects a leakage magnetic field from the magnet In a movement detection device having a device,
The opposing surface of the magnet that faces the magnetic detector has a shape in which an intermediate region protrudes toward the side where the magnetic detector is disposed, rather than both end portions of the moving portion that are directed in the moving direction.
A movement detection apparatus comprising: a holder that holds the magnet and moves together with the moving unit, and the holder has an opening formed at least in a portion facing the central region of the facing surface.
前記磁石の前記対向面は、前記両端部よりも前記中間領域が前記磁気検知器が配置された側に突出する突曲面である請求項1記載の移動検出装置。   2. The movement detection device according to claim 1, wherein the facing surface of the magnet is a protruding curved surface in which the intermediate region protrudes toward the side where the magnetic detector is disposed from the both end portions. 前記ホルダは、前記対向面が向く側と逆の側である背部で開口する保持凹部を有しており、前記磁石は、前記背部から前記保持凹部に挿入され、前記保持凹部内において、前記磁石が前記移動部の移動方向へ動かないように固定されている請求項1または2記載の移動検出装置。   The holder has a holding recess that opens at a back portion that is a side opposite to the side to which the facing surface faces, and the magnet is inserted into the holding recess from the back portion, and the magnet is inserted into the holding recess. The movement detecting device according to claim 1, wherein the movement detecting device is fixed so as not to move in a moving direction of the moving unit. 前記磁石には、前記対向面よりも後退した位置に当接部が設けられ、前記ホルダには、前記開口部以外の領域に位置決め部が設けられており、前記当接部が前記位置決め部に支持されて、前記ホルダ内で前記磁石が位置決めされている請求項1ないし3のいずれかに記載の移動検出装置。   The magnet is provided with an abutting portion at a position retracted from the facing surface, the holder is provided with a positioning portion in a region other than the opening, and the abutting portion serves as the positioning portion. The movement detection device according to claim 1, wherein the movement detection device is supported and the magnet is positioned in the holder. 前記移動部と前記ホルダとの間に板ばねが設けられており、前記ホルダが前記板ばねによって前記磁気検知器が配置された側に向けて押圧されているとともに、前記板ばねに設けられた補助押圧片によって、前記磁石が直接押圧されて、前記当接部が前記位置決め部に弾圧されている請求項4記載の移動検出装置。   A leaf spring is provided between the moving part and the holder, and the holder is pressed toward the side where the magnetic detector is disposed by the leaf spring, and is provided on the leaf spring. The movement detection device according to claim 4, wherein the magnet is directly pressed by an auxiliary pressing piece, and the contact portion is elastically pressed by the positioning portion.
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