JP2010059496A - Film deposition apparatus, film deposition method, program for making apparatus conduct the film deposition method and computer-readable storage medium for storing the program therein - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a film deposition apparatus which can uniformly heat a susceptor, and to provide a film deposition method for the same. <P>SOLUTION: The film deposition apparatus includes: the susceptor 2 which is rotatably placed in a container; a substrate-mounting region 24 which is placed on one face of the susceptor 2; a heating unit 7 which includes a plurality of heating units that can be independently controlled and heats the susceptor; a first reaction-gas supply part 31 for supplying a first reaction gas to the one face; a second reaction-gas supply part 32 which is separately placed from the first reaction-gas supply part 31 and supplies a second reaction gas to the one face; an isolation region D which is placed between a first treatment region P1 to which the first reaction gas is supplied and a second treatment region P2 to which the second reaction gas is supplied; a central region C which is placed at the center of the container and includes a discharge hole for discharging a first separation gas along the one face; and an outlet 62. The isolation region D includes a separation-gas supply part 41 for supplying a second separation gas, and a ceiling surface that forms a narrow space through which the second separation gas flows in both directions with respect to a rotation direction, on the susceptor 2. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention provides a film forming apparatus that supplies at least two kinds of reaction gases that react with each other to the surface of a substrate in order and forms a thin film by laminating a plurality of reaction product layers by executing this supply cycle many times. The present invention relates to a film forming method, a program for causing a film forming apparatus to execute the film forming method, and a computer-readable storage medium storing the program.

  As a film formation technique in a semiconductor manufacturing process, so-called atomic layer deposition (ALD) or molecular layer deposition (MLD) is known. In such a film formation technique, a first reaction gas is adsorbed on the surface of a semiconductor wafer (hereinafter referred to as a wafer) under vacuum, and then a second reaction gas is adsorbed on the surface of the wafer. One or more atomic or molecular layers are formed through the reaction of the first and second reaction gases on the surface of the substrate. Then, such alternate adsorption and reaction of the gas is repeated a plurality of times to deposit a film on the wafer. This technique is advantageous in that the film thickness can be controlled with high accuracy by the number of times the gas is alternately supplied, and the deposited film has excellent uniformity on the wafer. Therefore, this deposition method is considered promising as a film forming technique that can cope with further miniaturization of semiconductor devices.

As a film forming apparatus for performing such a film forming method, a film forming apparatus having a vacuum container and a susceptor that holds a plurality of substrates along a rotation direction has been proposed (Patent Document 1). In Patent Document 1, a wafer support member (susceptor) that can support and horizontally rotate a plurality of wafers, and is arranged at equal angular intervals along the rotation direction of the wafer support member, and extends in the radial direction of the wafer support member. Discloses a processing chamber having first and second gas outlet nozzles facing the wafer support member and a purge nozzle disposed between the first and second gas discharge nozzles. An evacuation apparatus is connected to a portion between the outer end of the wafer support member and the processing chamber. According to the processing chamber configured as described above, the purge gas nozzle forms a gas curtain and prevents the first reaction gas and the second reaction gas from mixing.
JP 2001-254181 A

  By the way, in the MLD (ALD) apparatus using the rotatable susceptor as described above, for example, 4 to 6 wafers having a diameter of 300 mm may be placed on the susceptor, so the diameter of the susceptor is as small as 1 m. It may reach. The susceptor is usually heated by a heater or the like disposed so as to face the back surface of the susceptor. Maintaining temperature uniformity within the wafer surface to the extent that variations in the characteristics of elements formed on the wafer surface on the susceptor can be sufficiently reduced by heating a large diameter susceptor uniformly with a heater or the like. It's not easy.

  The present invention has been made in view of such circumstances, and an object thereof is a film forming apparatus capable of uniformly heating a susceptor, a film forming method, a program for causing the film forming apparatus to execute the film forming method, and the same. It is an object of the present invention to provide a computer-readable storage medium that stores information.

  In order to achieve the above-mentioned object, the first aspect of the present invention executes a cycle in which at least two kinds of reaction gases that react with each other are sequentially supplied to a substrate in a container, and the reaction product layer is applied A deposition apparatus for depositing a film by being generated on a substrate is provided. This film forming apparatus includes a susceptor that is rotatably provided in a container, a substrate placement area on which a substrate is placed, and a plurality of heating units that can be controlled independently. A heating unit for heating the susceptor, a first reaction gas supply unit configured to supply the first reaction gas to one surface, and the first reaction gas supply unit along the rotation direction of the susceptor. In addition, a second reaction gas supply unit configured to supply the second reaction gas to one surface, a first processing region to which the first reaction gas is supplied along the rotation direction, and a second A separation region for separating the first processing region and the second processing region, a first processing region and a second processing region, which are located between the second processing region to which the reaction gas is supplied In order to separate the first separation gas, the first separation gas is discharged along the one surface, which is located at substantially the center of the container. Comprising a central region having Deana, an exhaust port provided in the container to evacuate the container, the. The separation region rotates the separation gas supply unit that supplies the second separation gas, and the narrow space in which the second separation gas can flow from the separation region to the processing region side with respect to the rotation direction. And a ceiling surface formed with respect to the one surface of the table.

  According to a second aspect of the present invention, there is provided the film forming apparatus according to the first aspect, wherein the temperatures of the portions of the susceptor that are heated by the plurality of heating units are independently set. There is provided a film forming apparatus further comprising a plurality of temperature sensors to be measured.

  According to a third aspect of the present invention, there is provided a film forming apparatus according to the second aspect, wherein the temperature sensor is a thermocouple.

  According to a fourth aspect of the present invention, there is provided the film forming apparatus according to any one of the first to third aspects, wherein the plurality of heating units are constituted by resistance heaters.

  According to a fifth aspect of the present invention, there is provided the film forming apparatus according to any one of the first to fourth aspects, wherein the film forming apparatus is provided corresponding to the plurality of temperature sensors, and the temperature is measured by the corresponding temperature sensor. Based on a plurality of temperature regulators that output signals independently, and a temperature sensor corresponding to the temperature regulator based on a signal from the corresponding temperature regulator. There is provided a film forming apparatus, further comprising: a plurality of power supply sources that supply power independently to a heating unit that heats a susceptor portion whose temperature is measured.

  According to a sixth aspect of the present invention, a film is formed by generating a reaction product layer on a substrate by executing a cycle in which at least two kinds of reaction gases that react with each other are sequentially supplied to the substrate in a container. A film forming method for depositing a film is provided. The film forming method includes a step of placing a substrate on a susceptor that is rotatably provided in a container of a film forming apparatus and has a substrate placement region on one surface, and a step of rotating the susceptor on which the substrate is placed. A step of heating the susceptor using a heating unit that heats the susceptor, and supplying the first reaction gas to the one surface from the first reaction gas supply unit. Supplying a second reaction gas to one surface from a second reaction gas supply unit that is separated from the first reaction gas supply unit along the rotation direction of the susceptor, and a first reaction gas supply unit Provided in a separation region located between the first processing region to which the first reaction gas is supplied from the second processing region to which the first reaction gas is supplied from the second reaction gas supply unit. Supply the first separation gas from the separation gas supply unit And a step of flowing a first separation gas from the separation region to the processing region side in the rotation direction in a narrow space formed between the ceiling surface of the separation region and the turntable, and a central region located at the center of the container A step of supplying the second separation gas from the discharge hole formed in the step, and a step of exhausting the inside of the container. However, it will be apparent to those skilled in the art that the above steps do not necessarily have to be performed in the order described, and may include several substeps. For example, the step of supplying the first reaction gas may be after the step of supplying the second reaction gas, or these two steps may be started simultaneously. Also, the step of heating the susceptor and the step of rotating the susceptor may be started first, or may be started simultaneously. Furthermore, after flowing the first separation gas and the second separation gas, the first reaction gas and the second reaction gas may be flowed.

  According to a seventh aspect of the present invention, there is provided a film forming method according to the sixth aspect, wherein the temperature of the portion provided corresponding to the plurality of heating units and heated by the plurality of heating units in the susceptor is independently set. There is provided a film forming method further comprising a step of measuring a temperature of a susceptor by a plurality of temperature sensors to be measured.

  An eighth aspect of the present invention is the film forming method according to the sixth or seventh aspect, wherein the temperature of the susceptor is set based on a plurality of measured values measured by a plurality of temperature sensors in the measuring step. There is provided a film forming method further comprising a step of controlling.

  According to a ninth aspect of the present invention, there is provided a program for causing a film forming apparatus according to any one of the first to fifth aspects to perform the film forming method according to any one of the fifth to seventh aspects.

  According to a tenth aspect of the present invention, there is provided a computer-readable storage medium storing a program for causing a film forming apparatus according to any one of the first to fifth aspects to perform the film forming method according to any one of the fifth to seventh aspects. provide.

  According to the embodiments of the present invention, a film forming apparatus capable of uniformly heating a susceptor, a film forming method, a program for causing the film forming apparatus to perform the film forming method, and a computer-readable storage medium storing the program are provided. Is done.

  Embodiments according to the present invention will be described below with reference to the accompanying drawings. In the accompanying drawings, the same or corresponding members or parts are denoted by the same or corresponding reference numerals, and redundant description is omitted.

  FIG. 1 is a cross-sectional view of a film forming apparatus according to an embodiment of the present invention. As shown in the figure, the film forming apparatus includes a vacuum container 1 having a flat cylindrical shape, and a susceptor 2 that is disposed in the vacuum container 1 and is rotatable. The vacuum container 1 includes a container body 12 and a ceiling plate 11 that can be removed from the container body 12. The ceiling plate 11 is disposed on the container main body 12 via a sealing member 13 such as an O-ring so that the inside of the vacuum container 1 can be evacuated. (Not shown).

Further, the bottom portion 14 of the container main body 12 is provided with a raised portion 14a that is annularly raised in the vicinity of the center in a two-stage shape, and a cover member 71 having a flat cylindrical shape. A space surrounded by the raised portion 14a, the cover member 71, and the susceptor 2 disposed above the cover member 71 at a predetermined interval is used as a heater storage portion, and the heater unit 7 is stored therein. The heater unit 7 is composed of, for example, an annular heater element in which a heating wire is enclosed in a quartz tube. The heating wire can be made of Fe-Cr-Al alloy, Ni-Cr alloy, and metals such as molybdenum, tungsten and tantalum. The heating wire may be sealed in a quartz tube in a vacuum, or in an atmosphere of an inert gas such as helium (He) or argon (Ar) or N ₂ gas. Furthermore, a heating wire may be inserted into the quartz tube, and the inside of the quartz tube may be purged with an inert gas such as helium (He) or argon (Ar) or N ₂ gas.

  The heater unit 7 will be described in detail with reference to FIGS. 2 and 3. FIG. 2 is a partial perspective view showing the inside of the chamber 1, in which the top plate 11, a gas supply nozzle to be described later, and the susceptor 2 are removed. As shown in the figure, the heater unit 7 can be composed of eight annular heater elements arranged substantially concentrically. An outer heater 7O is constituted by the outermost annular heater element 7a and the second annular element 7b from the outermost side, and a center heater is constituted by the third to sixth annular heater elements 7c, 7d, 7e and 7f from the outermost side. 7C is configured, and an inner heater 7I is configured by the seventh annular heater element 7g and the eighth annular heater element 7h. Thus, the heater unit 7 is divided into three along the radial direction.

  Referring to FIG. 3 which shows a part of FIG. 2 in an enlarged manner, the annular heater elements 7a to 7h are electrically connected to a current introduction terminal 14c disposed through a through hole 14b formed in the bottom 14 of the container body 12. And supported by the current introduction terminal 14c. And outside the container 1, the annular heater elements 7a and 7b constituting the outer heater 70 are connected in parallel or in series via the current introduction terminal 14c, and further connected to a power source (not shown). Similarly, the center heater 7C and the inner heater 7I are also electrically connected.

  Further, as shown only in FIG. 3, a thermocouple 8O is inserted into the chamber 1 in an airtight manner through a through hole 14d formed in the bottom portion 14 of the container body 12, and is disposed between the annular heater elements 7a and 7b. . The distance between the upper end of the thermocouple 8O and the back surface of the susceptor 2 located above the heater unit 7 may be, for example, about 1 mm to about 10 mm, about 2 mm to about 5 mm, and preferably about 3 mm. . With this arrangement, the thermocouple 8O can measure the temperature of the portion of the susceptor 2 that is heated by the outer heater 7O. The thermocouple 8O is connected to a temperature regulator (not shown). The temperature regulator generates a temperature adjustment signal based on the thermoelectromotive force generated in the thermocouple 8O due to the heat of the susceptor 2, and outputs this signal to a power source connected to the outer heater 7O (annular heater elements 7a, 7b). . The power supply supplies power to the outer heater 70 (annular heater elements 7a and 7b) according to the input signal. Thereby, the temperature of the part heated by the outer heater 7O in the susceptor 2 is controlled.

  Further, a thermocouple 8C is similarly arranged between the annular heater elements 7d and 7e, and the thermocouple 8C is also connected to a temperature regulator (not shown). With this configuration, the temperature of the portion of the susceptor 2 heated by the center heater 7C is measured, and the temperature of that portion of the susceptor 2 is controlled according to the measurement result. Further, a thermocouple 8I is similarly arranged between the annular heater elements 7g and 7h, and the thermocouple 8I is also connected to a temperature regulator (not shown). With this configuration, the temperature of the portion of the susceptor 2 that can be heated by the inner heater 7I is measured, and the temperature of that portion of the susceptor 2 is controlled according to the measurement result. In addition, each power supply corresponding to the outer heater 70, the center heater 7C, and the inner heater 7I may be replaced with one power supply device that can supply power independently to each.

  Although only shown in FIGS. 2 and 3 and omitted in other drawings, a protective plate 70 supported by a predetermined support member is disposed between the bottom 14 of the container body 12 and the heater unit 7. . The protective plate 70 is an annular disk that can be accommodated in the heater housing, and can be made of, for example, stainless steel. The protective plate 70 has a through hole through which the current introduction terminal 14c passes at a position corresponding to the current introduction terminal 14c connected to the annular heater elements 7a to 7h. The protection plate 70 protects the annular heater elements 7a to 7h, and is used to reduce the bottom 14 of the container body 12 from being heated by radiant heat from the annular heater elements 7a to 7h. The protective plate 70 can function as a so-called reflector, and is provided with a conduit through which a fluid can flow. For example, cooling water may flow therethrough.

  In this embodiment, the susceptor 2 is made of a carbon plate having a thickness of about 20 mm, and is formed in a disc shape having a diameter of about 960 mm. Further, the upper surface, the back surface, and the side surface of the susceptor 2 may be coated with SiC. Referring to FIG. 1, the susceptor 2 has a circular opening at the center, and is held by being sandwiched from above and below by a cylindrical core portion 21 around the opening. The core portion 21 is fixed to the upper end of the rotating shaft 22 extending in the vertical direction. The rotating shaft 22 passes through the bottom surface portion 14 of the container main body 12, and a lower end thereof is attached to a driving unit 23 that rotates the rotating shaft 22 around the vertical axis in the clockwise direction in this example. With this configuration, the susceptor 2 can rotate around its center. The rotating shaft 22 and the drive unit 23 are accommodated in a cylindrical case body 20 whose upper surface is open. The case body 20 is airtightly attached to the lower surface of the bottom surface portion 14 of the vacuum vessel 1 via a flange portion 20a provided on the upper surface thereof, whereby the internal atmosphere of the case body 20 is isolated from the external atmosphere. Yes.

  Referring to FIGS. 4 and 5, a plurality (five in the illustrated example) of circular recesses 24 for accommodating the wafers W are formed on the upper surface of the susceptor 2. However, FIG. 5 shows only one wafer W. The recesses 24 are arranged at equal intervals on the susceptor 2. FIG. 6A is a projected cross-sectional view along an arc extending from the first reaction gas nozzle 31 to the second reaction gas nozzle 32 shown in FIG. As shown in FIG. 6A, the recess 24 has a diameter slightly larger than the diameter of the wafer W, for example, 4 mm larger, and a depth equal to the thickness of the wafer W. Therefore, when the wafer W is placed in the recess 24, the surface of the wafer W is at the same height as the surface of the region of the susceptor 2 excluding the recess 24. If there is a relatively large step between the wafer W and its region, the step causes turbulence in the gas flow, and the film thickness uniformity on the wafer W is affected. Thus, the two surfaces are at the same height. “Same height” means here that the difference in height is about 5 mm or less, but the difference should be as close to zero as the machining accuracy allows. Three through holes (not shown) are formed in the bottom of the recess 24, and three lifting pins (see FIG. 10) are lifted and lowered through these holes. The elevating pins support the back surface of the wafer W and raise and lower the wafer W.

  The recess 24 is an accommodation region for the wafer W that positions the wafer and prevents the wafer W from jumping out due to the centrifugal force generated by the rotation of the susceptor 2. However, the accommodation area of the wafer W is not limited to the recess 24 but can be realized by a guide member that is arranged on the susceptor 2 at a predetermined angular interval and holds the end of the wafer W. For example, the accommodation area of the wafer W may be executed by an electrostatic chuck.

  4 and 5, a first reaction gas nozzle 31, a second reaction gas nozzle 32, and separation gas nozzles 41 and 42 are provided above the susceptor 2, and these extend in the radial direction at predetermined angular intervals. Exist. With this configuration, the recess 24 can pass under the nozzles 31, 32, 41, and 42. In the illustrated example, the second reaction gas nozzle 32, the separation gas nozzle 41, the first reaction gas nozzle 31, and the separation gas nozzle 42 are arranged clockwise in this order. These gas nozzles 31, 32, 41, 42 are supported by penetrating the peripheral wall portion of the container body 12 and attaching the end portions that are the gas introduction ports 31 a, 32 a, 41 a, 42 a to the outer peripheral wall of the wall. . In the illustrated example, the gas nozzles 31, 32, 41, and 42 are introduced from the peripheral wall portion of the container 1 into the container 1, but may be introduced from an annular protrusion 5 (described later). In this case, an L-shaped conduit that opens to the outer peripheral surface of the protrusion 5 and the outer surface of the top plate 11 is provided, and the gas nozzle 31 (32, 41, 42) is provided in one opening of the L-shaped conduit in the container 1. ) And the gas introduction port 31a (32a, 41a, 42a) can be connected to the other opening of the L-shaped conduit outside the container 1.

Although not shown, the reactive gas nozzle 31 is connected to a gas supply source of the first reactive gas, binary butylamonosilane (BTBAS), via the gas introducing port 31a, and the reactive gas nozzle 32 is connected to the gas introducing port 32a. Through a gas supply source of ozone (O ₃ ) as the second reaction gas.

In the reaction gas nozzles 31 and 32, discharge holes 33 for discharging the reaction gas are arranged on the lower side at intervals in the length direction of the nozzles. In the present embodiment, the discharge holes 33 have a diameter of about 0.5 mm and are arranged at intervals of about 10 mm along the length direction of the reaction gas nozzles 31 and 32. The reaction gas nozzles 31 and 32 are a first reaction gas supply unit and a second reaction gas supply unit, respectively. The lower region of the reactive gas nozzle 31 is a first processing region P1 for adsorbing BTBAS gas to the wafer, and the lower region of the reactive gas nozzle 32 is a second processing region P2 for adsorbing O ₃ gas to the wafer. It is.

On the other hand, the separation gas nozzles 41 and 42 are connected to a nitrogen gas (N ₂ ) gas supply source (not shown). The separation gas nozzles 41 and 42 have discharge holes 40 for discharging the separation gas on the lower side. The discharge holes 40 are arranged at predetermined intervals in the length direction. In the present embodiment, the discharge holes 40 have a diameter of about 0.5 mm and are arranged at intervals of about 10 mm along the length direction of the separation gas nozzles 41 and 42.

  The separation gas nozzles 41 and 42 are provided in a separation region D configured to separate the first processing region P1 and the second processing region P2. In each separation region D, a convex portion 4 is provided on the top plate 11 of the vacuum vessel 1 as shown in FIGS. The convex part 4 has a fan-shaped upper surface shape, the top part is located at the center of the container 1, and the arc is located along the vicinity of the inner peripheral wall of the container body 12. Moreover, the convex part 4 has the groove part 43 extended in a radial direction so that the convex part 4 may be divided into two. A separation gas nozzle 41 (42) is accommodated in the groove 43. The distance between the central axis of the separation gas nozzle 41 (42) and one side of the fan-shaped convex portion 4 is between the central axis of the separation gas nozzle 41 (42) and the other side of the fan-shaped convex portion 4. Is almost equal to the distance. In this embodiment, the groove 43 is formed so as to bisect the convex portion 4, but in other embodiments, for example, the upstream side of the convex portion 4 in the rotation direction of the susceptor 2 is widened. As described above, the groove 43 may be formed.

  According to the above configuration, as shown in FIG. 6A, the separation gas nozzle 41 (42) has flat low ceiling surfaces 44 (first ceiling surfaces) on both sides, and both sides of the low ceiling surface 44. Has a high ceiling surface 45 (second ceiling surface). The convex portion 4 (ceiling surface 44) is a narrow space for preventing the first and second reaction gases from entering between the convex portion 4 and the susceptor 2 to prevent mixing. A separation space is formed.

Referring to FIG. 6B, the O ₃ gas flowing from the reaction gas nozzle 32 toward the convex portion 4 along the rotation direction of the susceptor 2 is prevented from entering the space, and the rotation direction of the susceptor 2 is BTBAS gas flowing from the reaction gas nozzle 31 toward the convex portion 4 along the opposite direction is prevented from entering the space. “Inhibiting gas intrusion” means that the N ₂ gas, which is the separation gas discharged from the separation gas nozzle 41, diffuses between the first ceiling surface 44 and the surface of the susceptor 2. This means that the gas is blown into a space below the second ceiling surface 45 adjacent to the first ceiling surface 44, thereby preventing gas from entering the space below the second ceiling surface 45 from entering. And, “the gas cannot enter” does not mean only the case where the gas cannot enter the space below the convex portion 4 from the space below the second ceiling surface 45, but a part of the reaction gas. This means that the reaction gas cannot proceed further toward the separation gas nozzle 41 even if it enters, and therefore cannot be mixed. That is, as long as such an effect is obtained, the separation region D separates the first processing region P1 and the second processing region P2. Further, the gas adsorbed on the wafer can naturally pass through the separation region D. Therefore, prevention of gas intrusion means gas in the gas phase.

  With reference to FIGS. 1, 4, and 5, the bottom surface of the top plate 11 is provided with an annular protrusion 5 that is disposed so that the inner peripheral edge faces the outer peripheral surface of the core portion 21. The protruding portion 5 faces the susceptor 2 in a region outside the core portion 21. Further, the protruding portion 5 is formed integrally with the convex portion 4, and the lower surface of the convex portion 4 and the lower surface of the protruding portion 5 form a single plane. That is, the height of the lower surface of the protrusion 5 from the susceptor 2 is equal to the height of the lower surface (ceiling surface 44) of the convex portion 4. This height is hereinafter referred to as height h. In addition, the protrusion part 5 and the convex-shaped part 4 do not necessarily need to be integral, and may be separate. 4 and 5 show the internal configuration of the container 1 with the top plate 11 removed while leaving the convex portion 4 in the container 1.

  In the present embodiment, the separation region D is formed by forming the groove portion 43 in the fan-shaped plate to be the convex portion 4 and disposing the separation gas nozzle 41 (42) in the groove portion 43. However, these two fan-shaped plates may be attached to the lower surface of the top plate 11 with screws so that the two fan-shaped plates are arranged on both sides of the separation gas nozzle 41 (42).

  In this embodiment, when a wafer W having a diameter of about 300 mm is to be processed in the container 1, the convex portion 4 is along an inner arc li (FIG. 5) that is 140 mm away from the rotation center of the susceptor. For example, it has a circumferential length of 140 mm and a circumferential length of, for example, 502 mm along the outer arc lo (FIG. 5) corresponding to the outermost part of the recess 24 of the susceptor 2. The circumferential length from one side wall of the convex portion 4 to the side wall closest to the groove portion 43 along the outer arc lo is about 246 mm.

Further, the height h (FIG. 6A) of the lower surface of the convex portion 4, that is, the ceiling surface 44, measured from the surface of the susceptor 2 may be about 0.5 mm to about 10 mm, for example, about 4 mm. Is preferable. The rotation speed of the susceptor 2 is set to 1 rpm to 500 rpm, for example. In order to ensure the separation function of the separation region D, the size of the convex portion 4 and the lower surface of the convex portion 4 (the first ceiling surface 44) according to the pressure in the processing container 1, the rotational speed of the susceptor 2, and the like. ) And the surface of the susceptor 2 may be set through experiments, for example. The separation gas is N ₂ gas in the present embodiment, but may be an inert gas such as He or Ar gas, hydrogen gas, or the like as long as the separation gas does not affect the film formation of silicon oxide.

  FIG. 7 shows a half of the cross-sectional view along the line AA in FIG. 5, in which the convex portion 4 and the protruding portion 5 formed integrally with the convex portion 4 are shown. Referring to FIG. 7, the convex portion 4 has a bent portion 46 that bends in an L shape at the outer edge thereof. Since the convex portion 4 is attached to the top plate 11 and can be separated from the container main body 12 together with the top plate 11, there are slight gaps between the bent portion 46 and the susceptor 2 and between the bent portion 46 and the container main body 12. However, the bent portion 46 substantially fills the space between the susceptor 2 and the container body 12, and the first reaction gas (BTBAS) from the reaction gas nozzle 31a and the second reaction gas (ozone from the reaction gas nozzle 32a). ) Are prevented from mixing through this gap. The gap between the bent portion 46 and the container body 12 and the slight gap between the bent portion 46 and the susceptor 2 are substantially the same as the height h from the susceptor to the ceiling surface 44 of the convex portion 4. It is a dimension. In the illustrated example, the side wall of the bent portion 46 facing the outer peripheral surface of the susceptor 2 constitutes the inner peripheral wall of the separation region D.

  Referring again to FIG. 1, which is a cross-sectional view taken along the line BB shown in FIG. 5, the container body 12 has a recess in the inner peripheral portion of the container body 12 that faces the outer peripheral surface of the susceptor 2. . Hereinafter, this recess is referred to as an exhaust region 6. Below the exhaust region 6, an exhaust port 61 (see FIG. 5 for other exhaust ports 62) is provided, and a vacuum pump 64 is connected to these through an exhaust pipe 63 that can also be used for the other exhaust ports 62. It is connected. The exhaust pipe 63 is provided with a pressure regulator 65. A plurality of pressure regulators 65 may be provided for the corresponding exhaust ports 61 and 62.

Referring again to FIG. 5, the exhaust port 61 includes the first reaction gas nozzle 31 and the convex portion 4 positioned downstream in the clockwise direction of the susceptor 2 with respect to the first reaction gas nozzle 31 when viewed from above. It is arranged between. With this configuration, the exhaust port 61 can substantially exhaust the BTBAS gas from the first reaction gas nozzle 31 substantially. On the other hand, the exhaust port 62 is disposed between the second reaction gas nozzle 32 and the convex portion 4 located downstream of the second reaction gas nozzle 32 in the clockwise direction of the susceptor 2 when viewed from above. ing. With this configuration, the exhaust port 62 can substantially exhaust only the O ₃ gas from the second reaction gas nozzle 32. Therefore, the exhaust ports 61 and 62 configured in this way can assist in preventing the separation region D from mixing the BTBAS gas and the O ₃ gas.

  In the present embodiment, two exhaust ports are provided in the container body 12, but in other embodiments, three exhaust ports may be provided. For example, an additional exhaust port may be provided between the second reaction gas nozzle 32 and the separation region D located upstream of the second reaction gas nozzle 32 in the clockwise direction of the susceptor 2. Further, an additional exhaust port may be provided somewhere. In the illustrated example, the exhaust ports 61 and 62 are provided at a position lower than the susceptor 2 so as to exhaust from the gap between the inner peripheral wall of the vacuum vessel 1 and the peripheral edge of the susceptor 2. You may provide in a side wall. Further, when the exhaust ports 61 and 62 are provided on the side wall of the container body 12, the exhaust ports 61 and 62 may be positioned higher than the susceptor 2. In this case, the gas flows along the surface of the susceptor 2 and flows into the exhaust ports 61 and 62 positioned higher than the surface of the susceptor 2. Therefore, it is advantageous compared with the case where the exhaust port is provided, for example, in the top plate 11 in that the particles in the container 1 are not blown up.

  As shown in FIGS. 1, 4, and 8, in the space between the susceptor 2 and the bottom portion 14 of the container body 12, an annular heater unit 7 as a heating unit is provided. The wafer W is heated through the susceptor 2 to a temperature determined by the process recipe. Further, a cover member 71 is provided below the susceptor 2 and near the outer periphery of the susceptor 2 so as to surround the heater unit 7. A space in which the heater unit 7 is placed is partitioned from a region outside the heater unit 7. Has been. The cover member 71 has a flange portion 71 a at the upper end, and the flange portion 71 a maintains a slight gap between the lower surface of the susceptor 2 and the flange portion in order to prevent gas from flowing into the cover member 71. Arranged so that.

  Referring to FIG. 1 again, the bottom portion 14 has a raised portion 14 a inside the annular heater unit 7. The upper surface of the bulge 14a is close to the susceptor 2 and the bulge 14a, and close to the bulge 14a and the core 21. A slight gap is left between the back surface of the portion 21. The bottom portion 14 has a central hole through which the rotation shaft 22 passes. The inner diameter of the center hole is slightly larger than the diameter of the rotary shaft 22 and leaves a gap communicating with the case body 20 through the flange portion 20a. A purge gas supply pipe 72 is connected to the upper portion of the flange portion 20a. Further, in order to purge the area in which the heater unit 7 is accommodated, a plurality of purge gas supply pipes 73 are connected to the area below the heater unit 7 at a predetermined angular interval.

With such a configuration, the gap between the rotating shaft 22 and the center hole of the bottom portion 14, the gap between the core portion 21 and the raised portion of the bottom portion 14, and the gap between the raised portion of the bottom portion 14 and the back surface of the susceptor 2. N ₂ purge gas flows from the purge gas supply pipe 72 to the heater space through the gap. Further, N ₂ gas flows from the purge gas supply pipe 73 to the space below the heater unit 7. Then, these N ₂ purge gases flow into the exhaust port 61 through a gap between the flange portion 71 a of the cover member 71 and the back surface of the susceptor 2. Such a flow of N ₂ purge gas is indicated by arrows in FIG. The N ₂ purge gas serves as a separation gas that prevents the first (second) reaction gas from circulating in the space below the susceptor 2 and mixing with the second (first) reaction gas.

Referring to FIG. 9, a separation gas supply pipe 51 is connected to the central portion of the top plate 11 of the container 1, whereby N ₂ gas that is a separation gas is placed in a space 52 between the top plate 11 and the core portion 21. Is supplied. The separation gas supplied to the space 52 flows along the surface of the susceptor 2 through the narrow gap 50 between the protruding portion 5 and the susceptor 2 and reaches the exhaust region 6. Since the space 53 and the gap 50 are filled with the separation gas, the reaction gas (BTBAS, O ₃ ) is not mixed through the central portion of the susceptor 2. That is, the film forming apparatus of the present embodiment is defined by the rotation center portion of the susceptor 2 and the container 1 to separate the first processing region P1 and the second processing region P2, and the separation gas is supplied to the susceptor 2. A central region C configured to have a discharge port that discharges toward the upper surface of is provided. In the illustrated example, the discharge port corresponds to a narrow gap 50 between the protruding portion 5 and the susceptor 2.

Referring to FIG. 1 again, a purge gas supply pipe 72 is connected to the flange portion 20a, and purge gas (N ₂ gas) is supplied to the inside of the flange portion 20a and the case body 20 through this. This purge gas passes through the gap between the rotating shaft 22 and the raised portion 14a of the bottom portion 14, the gap between the core portion 21 and the raised portion 14a, and the gap between the raised portion 14a and the susceptor 2. The heater unit 7 is stored in the heater storage unit. On the other hand, a plurality of purge gas supply pipes 73 penetrating the bottom portion 14 of the susceptor body 12 are connected to the heater storage section at predetermined angular intervals, through which purge gas (N) is supplied from a predetermined gas supply source (not shown). ₂ gas) is supplied. The purge gas is supplied from the purge gas supply pipe 72 connected to the flange portion 20a and reaches the exhaust region 6 through the gap between the cover member 71 and the susceptor 2 together with the purge gas (N ₂ gas or the like) reaching the heater storage portion. The air is exhausted from the exhaust port 61 (62) to the exhaust device 64. Note that a flange portion 71a extending along the back surface of the susceptor 2 is provided at the upper end of the cover member 71 in the outer direction of the cover portion 71, so that gas flows from the exhaust region 6 to the heater storage portion. Is prevented. With such a configuration, the first reaction gas and the second reaction gas are prevented from being mixed through the space around the core portion 21 and the rotating shaft 22 and the heater storage portion.

  Further, as shown in FIGS. 4, 5, and 10, a transport port 15 is formed in the side wall of the container body 12. The wafer W is transferred into or out of the vacuum container 1 by the external transfer arm 10 through the transfer port 15. The transfer port 15 is provided with a gate valve (not shown), which opens and closes the transfer port 15. When the recess 24 which is the wafer accommodation area of the susceptor 2 is aligned with the transfer port 15 and the gate valve is opened, the wafer W is transferred into the vacuum container 1 by the transfer arm 10 and placed in the recess 24 from the transfer arm 10. In order to lower the wafer W from the transfer arm 10 to the concave portion 24 and to lift it from the concave portion 24, lift pins 16 (FIG. 10) are provided. The lift pins are moved by the lift mechanism (not shown) of the susceptor 2. It is lifted and lowered through a through hole formed in the recess 24.

  In addition, the film forming apparatus according to this embodiment is provided with a control unit 100 for controlling the operation of the entire apparatus. The control unit 100 includes, for example, a process controller 100a configured by a computer, a user interface unit 100b, and a memory device 100c. The user interface unit 100b includes a display for displaying an operation status of the film forming apparatus, a keyboard and a touch panel for an operator of the film forming apparatus to select a process recipe and a process administrator to change parameters of the process recipe. (Not shown). The control unit 100 is connected to a temperature regulator (not shown) that controls the temperatures of the outer heater 70, the center heater 7C, and the inner heater 7I, and controls the temperature regulator based on the process recipe. The start and stop of power supply to 70, the center heater 7C, and the inner heater 7I, and the temperature of the susceptor 2 and the wafer W are controlled.

  The memory device 100c stores a control program for causing the process controller 100a to perform various processes, a process recipe, parameters in various processes, and the like. In addition, these programs have, for example, a group of steps for causing operations to be described later. These control programs and process recipes are read and executed by the process controller 100a in accordance with instructions from the user interface unit 100b. These programs may be stored in the computer-readable storage medium 100d and installed in the memory device 100c through an input / output device (not shown) corresponding to these programs. The computer readable storage medium 100d may be a hard disk, CD, CD-R / RW, DVD-R / RW, flexible disk, semiconductor memory, or the like. The program may be downloaded to the memory device 100c through a communication line.

Next, the operation of the film forming apparatus of this embodiment will be described. First, the susceptor 2 is rotated so that the recess 24 is aligned with the transport port 15 and a gate valve (not shown) is opened. Second, the wafer W is transferred to the container 1 by the transfer arm 10 through the transfer port 15. The wafer W is received by the elevating pins 16, and after the transfer arm 10 is pulled out from the container 1, the wafer W is lowered to the concave portion 24 by the elevating pins 16 driven by an elevating mechanism (not shown). The above series of operations is repeated five times, and five wafers W are mounted on the susceptor 2. Subsequently, the inside of the vacuum container 1 is evacuated to a preset pressure by the vacuum pump 64. The susceptor 2 starts to rotate clockwise as viewed from above. Next, power supply to the heater unit 7 (outer heater 7O, center heater 7C, inner heater 7I) is started, and the wafer W placed in the recess 24 of the susceptor 2 is heated from the back surface of the susceptor 2. After it is confirmed by the thermocouples 80, 8C, 8I that the temperature of the wafer W is stabilized at a predetermined set temperature, the first reaction gas (BTBAS) is supplied to the first processing region through the first reaction gas nozzle 31. Then, the second reactive gas (O ₃ ) is supplied to the second processing region P2 through the second reactive gas nozzle 32. In addition, the separation gas (N ₂ ) is supplied from the separation gas nozzles 41 and 42, and flows in both directions of the rotation direction of the susceptor 2 through the space between the ceiling surface 44 and the upper surface of the susceptor 2.

When the wafer W passes through the first processing region P1 below the first reaction gas nozzle 31, BTBAS molecules are adsorbed on the surface of the wafer W, and the second processing region P2 below the second reaction gas nozzle 32 is absorbed. , O ₃ molecules are adsorbed on the surface of the wafer W, and the BTBAS molecules are oxidized by O ₃ . Therefore, when the wafer W passes through both the regions P1 and P2 once by the rotation of the susceptor 2, a monomolecular layer of silicon oxide is formed on the surface of the wafer W. Next, the wafer W alternately passes through the regions P1 and P2 a plurality of times, and a silicon oxide film having a predetermined thickness is deposited on the surface of the wafer W. After the silicon oxide film having a predetermined thickness is deposited, the BTBAS gas and the ozone gas are stopped, and the rotation of the susceptor 2 is stopped. Then, the wafers W are sequentially unloaded from the container 1 by the transfer arm 10 by an operation reverse to the loading operation.

Further, during the above film forming operation, the separation gas supply pipe 51 is also supplied with N ₂ gas, which is a separation gas, and thereby, from the central region C, that is, from the gap 50 between the protrusion 5 and the susceptor 2. N ₂ gas is discharged along the surface of the susceptor 2. In this embodiment, the space below the second ceiling surface 45 where the reactive gas nozzle 31 (32) is disposed is between the central region C and between the first ceiling surface 44 and the susceptor 2. It has a lower pressure than the narrow space. This is because the exhaust region 6 is provided adjacent to the space below the ceiling surface 45 and the space is directly exhausted through the exhaust region 6. Further, the narrow space is maintained by the height h so that the pressure difference between the space in which the reactive gas nozzle 31 (32) is disposed or the first (second) processing region P1 (P2) and the narrow space is small. It is also because it is formed so that it can be done.

Next, the flow pattern of the gas supplied from the gas nozzles 31, 32, 41, and 42 into the container 1 will be described with reference to FIG. FIG. 11 is a diagram schematically showing a flow pattern. As shown in the figure, a part of the O ₃ gas discharged from the second reaction gas nozzle 32 hits the surface of the susceptor 2 (and the surface of the wafer W), and in the direction opposite to the rotation direction of the susceptor 2 along the surface. Flowing. Next, the O ₃ gas is pushed back by the N ₂ gas flowing from the upstream side in the rotation direction of the susceptor 2, and changes its direction toward the periphery of the susceptor 2 (inner peripheral wall of the vacuum vessel 1). The O ₃ gas flows into the exhaust region 6 and is exhausted from the container 1 through the exhaust port 62.

The other part of the O ₃ gas discharged from the second reaction gas nozzle 32 hits the surface of the susceptor 2 (and the surface of the wafer W) and flows along the surface in the same direction as the rotation direction of the susceptor 2. The O ₃ gas in this portion flows toward the exhaust region 6 mainly by the N ₂ gas flowing from the central region C and the suction force through the exhaust port 62. On the other hand, a small amount of O ₃ gas in this portion flows toward the separation region D located downstream in the rotation direction of the susceptor 2 with respect to the second reaction gas nozzle 32, and between the ceiling surface 44 and the susceptor 2. There is a possibility of entering the gap. However, since the height h of the gap is set to a height that prevents inflow into the gap under the intended film formation conditions, O ₃ gas is prevented from entering the gap. In other words, even if a small amount of O ₃ gas flows into the gap, the O ₃ gas cannot flow deep into the separation region D. A small amount of the O ₃ gas flowing into the gap is pushed back by the separation gas discharged from the separation gas nozzle 41. Therefore, as shown in FIG. 9, substantially all the O ₃ gas flowing along the rotation direction on the upper surface of the susceptor 2 flows to the exhaust region 6 and is exhausted by the exhaust port 62.

Similarly, a part of the BTBAS gas discharged from the first reaction gas nozzle 31 and flowing along the surface of the susceptor 2 in the direction opposite to the rotation direction of the susceptor 2 is upstream in the rotation direction with respect to the first reaction gas nozzle 31. It is prevented that it flows into the clearance gap between the ceiling surface 44 of the convex part 4 located in and the susceptor 2. FIG. Even if a small amount of BTBAS gas flows, it is pushed back by the N ₂ gas discharged from the separation gas nozzle 41. Pushed back the BTBAS gas, with N ₂ gas and the center N ₂ gas is ejected from the region C from the separation gas nozzle 41, flows into the inner peripheral wall of the outer peripheral edge and the container 1 of the susceptor 2, an exhaust region 6 Through the exhaust port 61.

The other part of the BTBAS gas discharged from the first reaction gas nozzle 31 and flowing along the surface of the susceptor 2 (and the surface of the wafer W) in the same direction as the rotation direction of the susceptor 2 is the first reaction gas nozzle. 31 cannot flow between the susceptor 2 and the ceiling surface 44 of the convex portion 4 located downstream in the rotational direction. Even if a small amount of BTBAS gas flows in, it is pushed back by the N ₂ gas discharged from the separation gas nozzle 42. Pushed back the BTBAS gas, with N ₂ gas and the center N ₂ gas is ejected from the region C from the separation gas nozzle 42 in the separation area D, it flows toward the exhaust region 6 is exhausted by the exhaust port 61.

As described above, the separation area D, or BTBAS gas and the O ₃ gas is prevented from flowing into the separation area D, or to sufficiently reduce the amount of BTBAS gas and the O ₃ gas flowing into the separation area D, or, BTBAS gas and O ₃ gas can be pushed back. BTBAS molecules and O ₃ molecules adsorbed on the wafer W are allowed to pass through the separation region D and contribute to film deposition.

Further, as shown in FIGS. 9 and 11, since the separation gas is discharged from the central region C toward the outer peripheral edge of the susceptor 2, the BTBAS gas (second processing region) in the first processing region P1 is used. P2 O ₃ gas) cannot flow into the central region C. In other words, even if a small amount of BTBAS in the first processing region P1 (O ₃ gas in the second processing region P2) flows into the central region C, the BTBAS gas (O ₃ gas) is pushed back by the N ₂ gas, The BTBAS gas in the first processing region P1 (O ₃ gas in the second processing region P2) is prevented from flowing into the second processing region P2 (first processing region P1) through the central region C. Is done.

In addition, the BTBAS gas in the first processing region P1 (O ₃ gas in the second processing region P2) passes through the space between the susceptor 2 and the inner peripheral wall of the container main body 12 to form the second processing region P2 (the first processing region P1). Inflow into the processing region P1) is also prevented. This is because the bent portion 46 is formed downward from the convex portion 4, and the gap between the bent portion 46 and the susceptor 2 and the gap between the bent portion 46 and the inner peripheral wall of the container body 12 are This is because the communication between the two processing areas is substantially avoided because the height h of the ceiling surface 44 is as small as the height h from the susceptor 2. Therefore, the BTBAS gas is exhausted from the exhaust port 61, and the O ₃ gas is exhausted from the exhaust port 62, so that these two reaction gases are not mixed. The space below the susceptor 2 is purged with N ₂ gas supplied from purge gas supply pipes 72 and 73. Therefore, the BTBAS gas cannot flow into the process region P2 through the lower part of the susceptor 2.

  When the wafer W has a diameter of 300 mm, suitable process parameters in the film forming apparatus according to this embodiment are listed below.

・ Rotational speed of susceptor 2: 1 to 500 revolutions per minute (rpm)
・ Pressure of the vacuum vessel 1: 1067 Pa (8 Torr)
・ Wafer temperature: about 350 ℃
・ Flow rate of BTBAS gas: Approximately 100 sccm (standard cubic centimeter per minute)
・ Flow rate of O ₃ gas: about 10,000 sccm
-Flow rate of N ₂ gas from the separation gas 41, 42: about 20000 sccm
-Flow rate of N ₂ gas from the gas supply pipe 51: about 5000 sccm
-Number of rotations of susceptor 2: 600 times (depends on film thickness)
<Experimental example>
Next, the result of an experiment conducted for verifying the effect of temperature control by the heater unit 7 will be described. FIGS. 22A and 22B are graphs showing the temperature distribution of the susceptor 2 and the wafer placed thereon. In both figures, the left vertical axis indicates the temperature of the susceptor 2 or the wafer, the right vertical axis indicates the ratio (%) of the power supplied to the heater unit 7 to the rating, and the horizontal axis indicates the distance from the center of the susceptor 2. ing. Below the horizontal axis, the susceptor 2, the wafer W placed thereon, and the annular heater elements 7 a to 7 h of the heater unit 7 are schematically shown.

  Moreover, in both figures, the solid line Tw in a graph shows the temperature distribution of the wafer W mounted on the susceptor. Specifically, as indicated by ♦ in the graph, the temperature of the wafer W on the susceptor 2 is measured at the left edge portion, the center portion, and the right edge portion. These temperatures were measured using a test wafer on which a thermocouple was placed in order to directly measure the wafer temperature.

  On the other hand, a broken line Ts in the graph represents the temperature of the upper surface of the susceptor 2 measured without placing the wafer W on the susceptor. Three of the four measured values (■) indicate the temperatures at the left edge portion, the central portion, and the right edge portion at which the temperature of the wafer W was measured. The temperature at the 50 mm position was also measured. In addition, these measured values were obtained with the radiation thermometer which prepared the top plate 11 which provided the viewing port in each measurement position for a measurement, and passed through these viewing ports.

  Further, a solid line P indicates power supplied to the outer heater 70 (annular heater elements 7a and 7b), the center heater 7C (annular heater elements 7c to 7f), and the inner heater 7I (annular heater elements 7g and 7h) (annular heater elements). Average value of power supplied to

  Referring to FIG. 22A, when the power supplied to the outer heater 7O, the center heater 7C, and the inner heater 7I is substantially constant at about 10 to 12% of the rating, the temperature of the wafer W and the temperature of the upper surface of the susceptor 2 are The susceptor 2 tends to decrease along the direction from the outer peripheral portion toward the central portion. In particular, the temperature of the upper surface of the susceptor 2 is reduced by about 80 ° C. at a position about 50 mm from the rotation center of the susceptor 2. This is presumably because the temperature of the susceptor 2 dissipates through the core portion 21 (FIG. 1) that holds the susceptor 2.

  On the other hand, as shown in FIG. 22 (b), when the power supplied to the inner heater 7I (annular heater elements 7g, 7h) is increased to provide a temperature gradient, the temperature of the wafer W is changed within the wafer W plane. It turns out that it is equalized. Further, the temperature of the upper surface of the susceptor 2 is also uniform within the range where the wafer W is placed. Thus, by controlling the outer heater 7O, the center heater 7C, and the inner heater 7I independently, the temperature uniformity within the wafer W surface can be improved.

  As described above, in the film forming apparatus according to the present embodiment, the heater unit 7 is divided into the outer heater 70, the center heater 7C, and the inner heater 7I in the radial direction, and each is controlled independently. 2 can be made uniform, so that the in-plane uniformity of the temperature of the wafer placed on the susceptor 2 can be improved.

  In the above experiment, a test wafer on which a thermocouple was arranged was used. However, the temperature uniformity shown in FIG. 23A is controlled by controlling the temperature using the thermocouples 8O, 8C, and 8I. It is clear that this is also realized.

In addition, according to the film forming apparatus of this embodiment, the film forming apparatus has a low ceiling between the first processing region to which the BTBAS gas is supplied and the second processing region to which the O ₃ gas is supplied. Since the separation region D including the surface 44 is provided, the BTBAS gas (O ₃ gas) is prevented from flowing into the second processing region P2 (first processing region P1), and the O ₃ gas (BTBAS gas). Is prevented from mixing with. Therefore, by rotating the susceptor 2 on which the wafer W is placed, the wafer W is passed through the first processing region P1, the separation region D, the second processing region P2, and the separation region D, so that MLD (ALD The silicon oxide film is reliably deposited in the mode). Further, in order to prevent mixing with BTBAS gas _{(O 3} gas) flows into the second process area P2 (the first process area P1) _{O 3} gas (BTBAS gas) more reliably, the separation area D is Separation gas nozzles 41 and 42 for discharging N ₂ gas are further included. Furthermore, since the vacuum container 1 of the film forming apparatus according to this embodiment has the central region C having the discharge hole through which N ₂ gas is discharged, the BTBAS gas (O ₃ gas) passes through the central region C. ) Flows into the second processing region P2 (first processing region P1) and can be prevented from being mixed with O ₃ gas (BTBAS gas). Furthermore, since the BTBAS gas and the O ₃ gas are not mixed, silicon oxide is hardly deposited on the susceptor 2, so that the problem of particles can be reduced.

  In the film forming apparatus according to the present embodiment, the susceptor 2 has five recesses 24, and the five wafers W placed in the corresponding five recesses 24 can be processed in one run. However, one wafer W may be placed in one of the five recesses 24, or only one recess 24 may be formed in the susceptor 2.

  The reaction gas used in the film forming apparatus according to the embodiment of the present invention is DCS [dichlorosilane] HCD [hexachlorodisilane], TMA [trimethylaluminum], 3DMAS [trisdimethylaminosilane], TEMAZ [tetrakisethylmethylaminozirconium], With TEMHF [tetraakisethylmethylaminohafnium], Sr (THD) 2 [strontium bistetramethylheptanedionato], Ti (MPD) (THD) [titanium methylpentanedionatobistetramethylheptandionato], monoaminosilane, etc. It may be.

  Since the greater centrifugal force acts closer to the outer peripheral edge of the susceptor 2, for example, the BTBAS gas moves toward the separation region D at a higher speed in a portion closer to the outer peripheral edge of the susceptor 2. Therefore, there is a high possibility that the BTBAS gas flows into the gap between the ceiling surface 44 and the susceptor 2 at a portion near the outer peripheral edge of the susceptor 2. Therefore, if the width (length along the rotation direction) of the convex portion 4 is increased toward the outer peripheral edge, the BTBAS gas can be prevented from entering the gap. From this point of view, as described above in the present embodiment, it is preferable that the convex portion 4 has a fan-shaped top surface shape.

  Below, the size of the convex-shaped part 4 (or ceiling surface 44) is illustrated again. Referring to FIGS. 12A and 12B, the ceiling surface 44 that forms a narrow space on both sides of the separation gas nozzle 41 (42) has an arc length L corresponding to the path through which the wafer center WO passes. The length may be about 1/10 to about 1/1 of the diameter of the wafer W, and is preferably about 1/6 or more. Specifically, when the wafer W has a diameter of 300 mm, the length L is preferably about 50 mm or more. When this length L is short, the height h of the narrow space between the ceiling surface 44 and the susceptor 2 must be lowered in order to effectively prevent the reaction gas from flowing into the narrow space. However, if the length L becomes too short and the height h becomes extremely low, the susceptor 2 may collide with the ceiling surface 44, and particles may be generated to contaminate the wafer or damage the wafer. There is. Therefore, in order to avoid colliding with the ceiling surface 44 of the susceptor 2, a measure for suppressing the vibration of the susceptor 2 or rotating the susceptor 2 stably is required. On the other hand, when the height h of the narrow space is kept relatively large while the length L is shortened, in order to prevent the reaction gas from flowing into the narrow space between the ceiling surface 44 and the susceptor 2, The rotational speed of the susceptor 2 must be lowered, which is rather disadvantageous in terms of manufacturing throughput. From these considerations, the length L of the ceiling surface 44 along the arc corresponding to the path of the wafer center WO is preferably about 50 mm or more. However, the size of the convex portion 4 or the ceiling surface 44 is not limited to the above-described size, and may be adjusted according to the process parameters used and the wafer size. In addition, as long as the narrow space is high enough to form the flow of the separation gas from the separation region D to the processing region P1 (P2), as is clear from the above description, the narrow space is narrow. The height h of the space may also be adjusted according to, for example, the area of the ceiling surface 44 in addition to the process parameters and wafer size used.

Moreover, in said embodiment, the separation gas nozzle 41 (42) is arrange | positioned in the groove part 43 provided in the convex-shaped part 4, and the low ceiling surface 44 is arrange | positioned at the both sides of the separation gas nozzle 41 (42). However, in another embodiment, instead of the separation gas nozzle 41, a channel 47 extending in the diameter direction of the susceptor 2 is formed inside the convex portion 4 as shown in FIG. A plurality of gas discharge holes 40 may be formed along the direction, and a separation gas (N ₂ gas) may be discharged from these gas discharge holes 40.

  The ceiling surface 44 of the separation region D is not limited to a flat surface, and may be curved in a concave shape as shown in FIG. 14 (a), or may be a convex shape as shown in FIG. 14 (b). Further, as shown in FIG. 14C, it may be configured in a wave shape.

  Further, the convex portion 4 may be hollow, and the separation gas may be introduced into the hollow. In this case, the plurality of gas discharge holes 33 may be arranged as shown in FIGS. 15 (a), 15 (b), and 15 (c).

  Referring to FIG. 15A, each of the plurality of gas discharge holes 33 has an inclined slit shape. These inclined slits (the plurality of gas discharge holes 33) partially overlap with adjacent slits along the radial direction of the susceptor 2. In FIG. 15B, each of the plurality of gas discharge holes 33 is circular. These circular holes (the plurality of gas discharge holes 33) are arranged along a winding line extending along the radial direction of the susceptor 2 as a whole. In FIG. 15C, each of the plurality of gas ejection holes 33 has an arcuate slit shape. These arc-shaped slits (the plurality of gas discharge holes 33) are arranged at a predetermined interval in the radial direction of the susceptor 2.

  Further, in the present embodiment, the convex portion 4 has a substantially fan-shaped top surface shape, but in other embodiments, it may have a rectangular or square top surface shape shown in FIG. Moreover, as shown in FIG.16 (b), as for the convex part 4, the upper surface is fan-shaped as a whole, and may have the side surface 4Sc curved in the concave shape. In addition, as shown in FIG. 16C, the convex portion 4 has a fan-shaped upper surface as a whole and may have a side surface 4Sv curved in a convex shape. Furthermore, as shown in FIG. 16 (d), the upstream portion of the rotating table 2 (FIG. 1) of the convex portion 4 in the rotational direction d has a concave side surface 4 Sc, and the rotary table 2 of the convex portion 4. The downstream portion in the rotation direction d in FIG. 1 may have a planar side surface 4Sf. In FIG. 16A to FIG. 16D, the dotted line indicates the groove 43 (FIGS. 6A and 6B) formed in the convex portion 4. In these cases, the separation gas nozzle 41 (42) accommodated in the groove 43 extends from the central portion of the container 1, for example, the protruding portion 5.

Further, the heater unit 7 for heating the wafer may be constituted by a spiral heater element instead of the annular heater element. In this case, instead of the outer heater 7O constituted by the annular heater elements 7a and 7b, one spiral heater element wound in a spiral manner can be used, and the spiral heater element can be used instead of the center heater 7C. One spiral heater element wound in quadruple form can be used, and instead of the inner heater 7I, one spiral heater element wound in a spiral form is used. Can do. It goes without saying that the number of turns of each helical heater element may be changed as appropriate. Moreover, you may comprise the heater unit 7 with a heating lamp. In this case, for example, a plurality of annular lamps are arranged along three concentric circles centered on the rotation center of the susceptor 2, and three zones such as an outer zone, a center zone, and an inner zone are provided in the radial direction. The temperature of the susceptor 2 can be made uniform by controlling the temperature. Further, the heater unit 7 may be provided above the susceptor 2 instead of being provided below the susceptor 2, or may be provided both above and below. Further, it is obvious that the heater unit 7 may be divided into two or four or more along the radial direction.
Furthermore, instead of the thermocouples 80, 8C, 8I, platinum resistance thermometers or thermistors may be used.

The processing areas P1, P2 and the separation area D may be arranged as shown in FIG. 17 in other embodiments. Referring to FIG. 17, the second reactive gas nozzle 32 that supplies the second reactive gas (for example, O ₃ gas) is upstream of the conveyance port 15 in the rotation direction of the susceptor 2 and separated from the conveyance port 15. It is installed between the gas supply nozzle 42. Even in such an arrangement, the gas discharged from each nozzle and the central region C generally flows as indicated by arrows in the figure, and mixing of both reaction gases is prevented. Therefore, even with such an arrangement, it is possible to realize deposition in an appropriate MLD (ALD) mode.

  Further, as described above, the separation region D may be configured by attaching the two fan-shaped plates to the lower surface of the top plate 11 with screws so that the two fan-shaped plates are positioned on both sides of the separation gas nozzle 41 (42). . FIG. 18 is a plan view showing such a configuration. In this case, since the distance between the convex portion 4 and the separation gas nozzle 41 (42) and the size of the convex portion 4 efficiently exhibit the separation action of the separation region D, the discharge rate of the separation gas and the reactive gas is increased. You may decide in consideration of.

In the above-described embodiment, the first processing region P1 and the second processing region P2 correspond to regions having a ceiling surface 45 higher than the ceiling surface 44 of the separation region D. However, at least one of the first processing region P1 and the second processing region P2 faces the susceptor 2 on both sides of the reactive gas supply nozzle 31 (32) and has another ceiling surface lower than the ceiling surface 45. May be. This is to prevent gas from flowing into the gap between the ceiling surface and the susceptor 2. This ceiling surface may be lower than the ceiling surface 45 and may be as low as the ceiling surface 44 of the separation region D. FIG. 19 shows an example of such a configuration. As shown in the figure, the fan-shaped convex portion 30 is arranged in the second processing region P2 to which O ₃ gas is supplied, and the convex portion 30 so that the reaction gas nozzle 32 bisects the ceiling surface 30a of the convex portion 30. It arrange | positions in the groove part (not shown) formed in this. In other words, the second processing region P2 is configured in the same manner as the separation region D, although the gas nozzle is used for supplying the reaction gas. In addition, the convex part 30 may be comprised similarly to the hollow convex part which shows an example in FIG.15 (a) to FIG.15 (c).

  In addition, as long as the low ceiling surface (first ceiling surface) 44 is provided to form a narrow space on both sides of the separation gas nozzle 41 (42), in the other embodiments, the above-described ceiling surface, that is, the ceiling A ceiling surface lower than the surface 45 and as low as the ceiling surface 44 of the separation region D may be provided in both of the reaction gas nozzles 31 and 32 and extend until reaching the ceiling surface 44. In other words, as shown in FIG. 20, another convex portion 400 may be attached to the lower surface of the top plate 11 instead of the convex portion 4. The convex portion 400 has a substantially disk shape, faces substantially the entire upper surface of the susceptor 2, and has four slots 400a in which the gas nozzles 31, 32, 41, 42 are respectively accommodated and extend in the radial direction. In addition, a narrow space for the susceptor 2 is left under the convex portion 400. The height of the narrow space may be approximately the same as the height h described above. When the convex portion 400 is used, the reactive gas discharged from the reactive gas nozzle 31 (32) diffuses to both sides of the reactive gas nozzle 31 (32) under the convex portion 400 (or in a narrow space), and the separation gas nozzle The separation gas discharged from 41 (42) diffuses to both sides of the separation gas nozzle 41 (42) under the convex portion 400 (or in a narrow space). The reaction gas and the separation gas merge in a narrow space and are exhausted through the exhaust port 61 (62). Even in this case, the reaction gas discharged from the reaction gas nozzle 31 is not mixed with the reaction gas discharged from the reaction gas nozzle 32, and appropriate ALD (or MLD) mode deposition can be realized.

  The convex portion 400 is configured by combining the hollow convex portion 4 shown in any of FIGS. 15A to 15C, and the gas nozzles 31, 32, 33, and 34 and the slit 400a are used. Instead, the reaction gas and the separation gas may be discharged from the discharge holes 33 of the corresponding hollow convex portions 4, respectively.

In the above embodiment, the rotating shaft 22 that rotates the susceptor 2 is located in the center of the container 1. The space 52 between the core portion 21 and the top plate 11 is purged with a separation gas in order to prevent the reaction gas from mixing through the central portion. However, the container 1 may be configured as shown in FIG. 21 in other embodiments. Referring to FIG. 21, the bottom 14 of the container body 12 has a central opening, to which a storage case 80 is attached in an airtight manner. Moreover, the top plate 11 has a central recess 80a. The support column 81 is placed on the bottom surface of the housing case 80, and the end portion of the support column 81 reaches the bottom surface of the central recess 80a. The support column 81 is configured so that the first reaction gas (BTBAS) discharged from the first reaction gas nozzle 31 and the second reaction gas (O ₃ ) discharged from the second reaction gas nozzle 32 pass through the central portion of the container 1. Prevent mixing with each other.

  A rotating sleeve 82 is provided so as to surround the column 81 coaxially. The rotating sleeve 82 is supported by bearings 86 and 88 attached to the outer surface of the support column 81 and a bearing 87 attached to the inner surface of the housing case 80. Further, the rotating sleeve 82 has a gear portion 85 attached to the outer surface thereof. The inner peripheral surface of the annular susceptor 2 is attached to the outer surface of the rotating sleeve 82. The drive unit 83 is housed in the housing case 80, and a gear 84 is attached to a shaft extending from the drive unit 83. The gear 84 meshes with the gear portion 85. With such a configuration, the rotating sleeve 82 and thus the susceptor 2 are rotated by the driving unit 83. That is, in the film forming apparatus of FIG. 21, a support column 81 provided between the inner upper surface of the container 1 and the bottom surface of the container 1 in the central region, and a rotating sleeve 82 provided to position the support column 81 inside. The rotation sleeve 82 functions as the rotation axis of the susceptor 2.

A purge gas supply pipe 74 is connected to the bottom of the storage case 80, and purge gas is supplied to the storage case 80. Accordingly, the internal space of the storage case 80 can be maintained at a higher pressure than the internal space of the container 1 in order to prevent the reaction gas from flowing into the storage case 80. Therefore, film formation does not occur in the housing case 80, and the frequency of maintenance can be reduced. A purge gas supply pipe 75 is connected to each of the conduits 75 a extending from the upper outer surface of the container 1 to the inner wall of the recess 80 a, and purge gas is supplied toward the upper end portion of the rotating sleeve 82. Because of this purge gas, BTBAS gas and O ₃ gas cannot be mixed through the space between the inner wall of the recess 80 a and the outer surface of the rotating sleeve 82. Figure 21 is two purge gas supplying pipe 75 and the conduit 75a are shown, the number of supply pipe 75 and the conduit 75a, the mixing of the BTBAS gas and the _{O 3} gas recess 80a inner wall of the rotary sleeve 82 You may determine so that it may prevent reliably in the space vicinity between outer surfaces.

  In the embodiment of FIG. 21, the space between the side surface of the recess 80a and the upper end of the rotary sleeve 82 corresponds to a discharge hole for discharging the separation gas, and the separation gas discharge hole, the rotation sleeve 82 and the support column 81. Thus, a central region located in the central portion of the vacuum vessel 1 is configured.

  Also in FIG. 21, as described with reference to FIGS. 1 to 3, the heater unit 7 includes an outer heater 7 </ b> O, a center heater 7 </ b> C, and an inner heater 7 </ b> I, as described with reference to FIG. 3. Thermocouples 80, 8C, 8I are provided. Therefore, also in the film forming apparatus shown in FIG. 21, as verified by the above experiment, the temperature uniformity of the susceptor 2 and the wafer W placed thereon can be improved.

  Moreover, in embodiment of this invention, it is not restricted to using 2 types of reaction gas, It can apply also when supplying 3 or more types of reaction gas on a board | substrate in order. In that case, for example, the gas nozzles are arranged in the circumferential direction of the vacuum vessel 1 in the order of the first reaction gas nozzle, the separation gas nozzle, the second reaction gas nozzle, the separation gas nozzle, the third reaction gas nozzle, and the separation gas nozzle. What is necessary is just to comprise the isolation | separation area | region containing a gas nozzle like the above-mentioned embodiment.

  A substrate processing apparatus using the film forming apparatus described above is shown in FIG. In FIG. 22, 101 is a sealed transfer container called a hoop for storing, for example, 25 wafers, 102 is an atmospheric transfer chamber in which a transfer arm 103 is arranged, and 104 and 105 are atmospheres between an air atmosphere and a vacuum atmosphere. Is a load-lock chamber (preliminary vacuum chamber) that can be switched, 106 is a vacuum transfer chamber in which two transfer arms 107 are arranged, and 108 and 109 are film forming apparatuses according to an embodiment of the present invention. The transfer container 101 is transferred from the outside to a loading / unloading port equipped with a mounting table (not shown), connected to the atmospheric transfer chamber 102, then opened by an opening / closing mechanism (not shown), and transferred from the transfer container 101 by the transfer arm 103. The wafer is removed. Next, the load lock chamber 104 (105) is loaded and the chamber is switched from the atmospheric atmosphere to the vacuum atmosphere. Thereafter, the wafer is taken out by the transfer arm 107 and loaded into one of the film deposition apparatuses 108 and 109, and the film formation described above is performed. Processed. Thus, for example, by providing a plurality of, for example, two film forming apparatuses of the present invention for processing five sheets, so-called ALD (MLD) can be performed with high throughput.

It is sectional drawing of the film-forming apparatus which concerns on embodiment of this invention. It is a fragmentary perspective view which shows the heater unit of the film-forming apparatus of FIG. It is a fragmentary perspective view which expands and shows the heater unit of FIG. It is a perspective view of the film-forming apparatus of FIG. It is a top view of the film-forming apparatus of FIG. (A) And 4 (b) is an expanded sectional view showing a separation field and a processing field. It is a fragmentary sectional view of the film-forming apparatus of FIG. It is a perspective view of the film-forming apparatus of FIG. It is a fragmentary sectional view of the film-forming apparatus of FIG. FIG. 2 is a cutaway sectional view of the film forming apparatus of FIG. 1. It is a figure which shows the flow pattern of the gas supplied to the container of the film-forming apparatus of FIG. It is a partial top view explaining the size of the ceiling surface (convex part) of the film-forming apparatus of FIG. It is a fragmentary sectional view which shows the modification of the convex part of the film-forming apparatus of FIG. (A) to (c) is a cross-sectional view showing a modification of the convex portion of the film forming apparatus of FIG. (A) to (c) is a diagram showing a modification of the arrangement of the discharge holes of the film forming apparatus of FIG. (A) to (d) are other modifications of the convex portion of the film forming apparatus of FIG. It is a top view of other composition of a gas supply nozzle. It is a top view of the modification of the convex part of the film-forming apparatus of FIG. It is a perspective view of the other modification of the convex part of the film-forming apparatus of FIG. It is a top view of the other modification of the convex part of the film-forming apparatus of FIG. It is sectional drawing of the film-forming apparatus by other embodiment of this invention. It is the schematic of the substrate processing apparatus with which the film-forming apparatus of FIG. 1 or FIG. 21 was integrated. (A) is a graph which shows the temperature distribution of the wafer on a susceptor and a susceptor, (b) is another graph which shows the temperature distribution of the wafer on a susceptor and a susceptor.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container 2 Susceptor 4, 30, 400 Convex part 5 Protrusion part 6 Exhaust area 7 Heater unit 7a-7h Annular heater element 7O Outer heater 7C Center heater 7I Inner heater 8O, 8C, 8I Thermocouple 11 Top plate 12 Container body 14 Bottom portion 14a Raised portion 14b Through hole 14c Introducing port 14d Through hole 15 Transport port 21 Core portion 22 Rotating shaft 31 First reaction gas nozzle 32 Second reaction gas nozzle 41, 42 Separation gas nozzle 51 Separation gas supply pipe 72, 73 Purge gas supply pipe 81 Strut 82 Rotating sleeve W Wafer P1 First processing region P2 Second processing region C Central region

Claims (10)

A film forming apparatus for depositing a film by executing a cycle in which at least two kinds of reaction gases that react with each other are sequentially supplied to a substrate in a container to generate a reaction product layer on the substrate. ,
A susceptor rotatably provided in the container;
A substrate mounting region provided on one surface of the susceptor and on which the substrate is mounted;
A heating unit that includes a plurality of independently controllable heating units and that heats the susceptor;
A first reactive gas supply unit configured to supply a first reactive gas to the one surface;
A second reaction gas supply unit configured to supply a second reaction gas to the one surface, which is separated from the first reaction gas supply unit along a rotation direction of the susceptor;
Along the rotation direction, the first processing region is located between a first processing region to which the first reaction gas is supplied and a second processing region to which the second reaction gas is supplied. A separation region that separates the region and the second processing region;
In order to separate the first processing region and the second processing region, a central region having a discharge hole that is positioned substantially at the center of the container and discharges the first separation gas along the one surface. When,
An exhaust port provided in the container for exhausting the container;
With
The separation region includes a separation gas supply unit that supplies a second separation gas, and a narrow space in which the second separation gas can flow from the separation region to the processing region side with respect to the rotation direction. And a ceiling surface formed with respect to the one surface of the turntable.   The film forming apparatus according to claim 1, further comprising a plurality of temperature sensors that are provided corresponding to the plurality of heating units and that independently measure temperatures of the susceptor portions that are heated by the corresponding heating units.   The film forming apparatus according to claim 2, wherein the temperature sensor is a thermocouple.   The film-forming apparatus as described in any one of Claim 1 to 3 with which these heating parts are comprised with a resistance heating body. A plurality of temperature regulators provided corresponding to the plurality of temperature sensors and independently outputting signals based on the temperatures measured by the corresponding temperature sensors;
Heating that heats a portion of the susceptor that is provided corresponding to the plurality of temperature regulators, and whose temperature is measured by a temperature sensor corresponding to the temperature regulator based on the signal from the corresponding temperature regulator. A plurality of power supply sources that independently supply power to the unit;
The film forming apparatus according to claim 1, further comprising: A film forming method for depositing a film by executing a cycle in which at least two kinds of reaction gases that react with each other are sequentially supplied to a substrate in a container to generate a reaction product layer on the substrate. ,
Placing the substrate on a susceptor which is rotatably provided in a container of the film forming apparatus and has a substrate placement region on one surface;
Rotating a susceptor on which the substrate is mounted;
Heating the susceptor using a heating unit that includes a plurality of independently controllable heating units to heat the susceptor;
Supplying a first reactive gas from the first reactive gas supply unit to the one surface;
Supplying a second reaction gas to the one surface from a second reaction gas supply unit separated from the first reaction gas supply unit along a rotation direction of the susceptor;
A first processing region to which the first reaction gas is supplied from the first reaction gas supply unit; and a second processing region to which the first reaction gas is supplied from the second reaction gas supply unit; The first separation gas is supplied from the separation gas supply unit provided in the separation region located between the two, and the rotation direction in a narrow space formed between the ceiling surface of the separation region and the turntable Flowing the first separation gas from the separation region to the processing region side,
Supplying a second separation gas from a discharge hole formed in a central region located in the central portion of the container;
Evacuating the container;
A film forming method comprising:   The method further comprises the step of measuring the temperature of the susceptor with a plurality of temperature sensors provided corresponding to the plurality of heating units and independently measuring the temperature of the portion of the susceptor heated by the plurality of heating units. Item 7. The film forming method according to Item 6.   The film forming method according to claim 6, further comprising a step of controlling the temperature of the susceptor based on a plurality of measured values measured by the plurality of temperature sensors in the measuring step.   The program which makes the film-forming apparatus as described in any one of Claims 1-5 implement the film-forming method as described in any one of Claims 6-8.   A computer readable storage medium storing a program for causing the film forming apparatus according to any one of claims 1 to 5 to perform the film forming method according to any one of claims 6 to 8.

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