JP2010042651A5 - - Google Patents

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Publication number
JP2010042651A5
JP2010042651A5 JP2008258068A JP2008258068A JP2010042651A5 JP 2010042651 A5 JP2010042651 A5 JP 2010042651A5 JP 2008258068 A JP2008258068 A JP 2008258068A JP 2008258068 A JP2008258068 A JP 2008258068A JP 2010042651 A5 JP2010042651 A5 JP 2010042651A5
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JP
Japan
Prior art keywords
shutter
airtight structure
intermediate member
main body
shutter member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008258068A
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Japanese (ja)
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JP2010042651A (en
JP5177539B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2008258068A priority Critical patent/JP5177539B2/en
Priority claimed from JP2008258068A external-priority patent/JP5177539B2/en
Publication of JP2010042651A publication Critical patent/JP2010042651A/en
Publication of JP2010042651A5 publication Critical patent/JP2010042651A5/ja
Application granted granted Critical
Publication of JP5177539B2 publication Critical patent/JP5177539B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (4)

開口部を開閉するシャッタ部材が備えられた気密構造体のシャッタ装置において、
本体部材とシャッタ部材との間に設けられる中間部材と、
前記中間部材に対して摺動自在に当接されるシャッタ部材と、
前記中間部材と本体部材との間に設けられ該中間部材を該シャッタ部材に向けて押圧する押圧手段と、が備えられたことを特徴とする気密構造体のシャッタ装置。 In a shutter device of an airtight structure provided with a shutter member that opens and closes an opening,
An intermediate member provided between the main body member and the shutter member;
A shutter member slidably contacted with the intermediate member;
A shutter device for an airtight structure, comprising: a pressing unit that is provided between the intermediate member and the main body member and presses the intermediate member toward the shutter member. 射出成形機の射出装置の材料供給装置に設けられたことを特徴とする請求項１に記載の気密構造体のシャッタ装置。 The shutter device for an airtight structure according to claim 1, wherein the shutter device is provided in a material supply device of an injection device of an injection molding machine. 開口部を開閉するシャッタ部材が備えられた気密構造体のシャッタ装置の作動方法において、
本体部材とシャッタ部材との間に設けられる中間部材と、
前記中間部材に対して摺動自在に当接されるシャッタ部材とが設けられ、
シャッタ部材の両側の気圧差が同じ場合と異なる場合で前記中間部材によるシャッタ部材の押圧力が１．４倍以内に納まるようにすることを特徴とする気密構造体のシャッタ装置の作動方法。 In the operation method of the shutter device of the airtight structure provided with the shutter member for opening and closing the opening,
An intermediate member provided between the main body member and the shutter member;
A shutter member slidably contacted with the intermediate member,
A method of operating a shutter device of an airtight structure, wherein the pressure of the shutter member by the intermediate member is within 1.4 times when the pressure difference between both sides of the shutter member is the same. 開口部を開閉するシャッタ部材が備えられた気密構造体のシャッタ装置の作動方法において、本体部材とシャッタ部材との間に設けられる中間部材と、
前記中間部材に対して摺動自在に当接されるシャッタ部材とが設けられ、
前記中間部材を該シャッタ部材に向けてレギュレータにより制御された大気圧以上の低圧エアにより押圧することを特徴とする気密構造体のシャッタ装置の作動方法。 In the operation method of the shutter device of the airtight structure provided with the shutter member that opens and closes the opening, an intermediate member provided between the main body member and the shutter member;
A shutter member slidably contacted with the intermediate member,
A method of operating a shutter device of an airtight structure, wherein the intermediate member is pressed toward the shutter member by low-pressure air having an atmospheric pressure or higher controlled by a regulator.
JP2008258068A 2008-07-14 2008-10-03 Shutter device for airtight structure and method for operating the same Expired - Fee Related JP5177539B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008258068A JP5177539B2 (en) 2008-07-14 2008-10-03 Shutter device for airtight structure and method for operating the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008182480 2008-07-14
JP2008182480 2008-07-14
JP2008258068A JP5177539B2 (en) 2008-07-14 2008-10-03 Shutter device for airtight structure and method for operating the same

Publications (3)

Publication Number Publication Date
JP2010042651A JP2010042651A (en) 2010-02-25
JP2010042651A5 true JP2010042651A5 (en) 2011-01-13
JP5177539B2 JP5177539B2 (en) 2013-04-03

Family

ID=42014419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008258068A Expired - Fee Related JP5177539B2 (en) 2008-07-14 2008-10-03 Shutter device for airtight structure and method for operating the same

Country Status (1)

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JP (1) JP5177539B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5614397B2 (en) 2011-11-07 2014-10-29 信越半導体株式会社 Double-side polishing method
CN110193775B (en) * 2019-03-12 2021-09-17 上海新昇半导体科技有限公司 Chemical mechanical polishing method and chemical polishing system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48724U (en) * 1971-05-22 1973-01-08
JPS5637171Y2 (en) * 1977-06-10 1981-09-01
JPS5589865U (en) * 1978-12-13 1980-06-21
JPS59137463U (en) * 1983-03-03 1984-09-13 川崎重工業株式会社 valve
JPS63132175U (en) * 1988-01-18 1988-08-30
JPH0743556Y2 (en) * 1988-03-30 1995-10-09 株式会社クボタ Gate valve seal structure
JP2001088943A (en) * 1999-09-17 2001-04-03 Kawata Mfg Co Ltd Slide gate
JP3783205B2 (en) * 2001-05-22 2006-06-07 日精樹脂工業株式会社 Material resin supply device for injection molding machine by vacuum hopper
JP2003207057A (en) * 2002-01-11 2003-07-25 Sumitomo Heavy Ind Ltd Powder shut-off valve device
JP2003207058A (en) * 2002-01-11 2003-07-25 Sumitomo Heavy Ind Ltd Powder shut-off valve device
JP4814656B2 (en) * 2006-03-03 2011-11-16 高木産業株式会社 Shutter mechanism and resin dryer

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