JP2010031950A - Vibration damper - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration damper which allows for the improvement in the vibration damping performance without increasing the air capacity of an air spring, has even good resposiveness and an excellent vibration control performance. <P>SOLUTION: The invention relates to a vibration damper, using an air spring which blocks or inhibits vibrations by applying a pressure to both an installment structure G and an object m to be subjected to vibration damping therebetween. The damper includes: a container 1 which includes a first container element 11 connected to the installation structure G and a second container element 12 connected to the object to be subjected to vibration damping and is configured so that the first container element 11 and the second container element 12 can move relatively to each other while remaining closed; a low-pressure port 3 which is provided to the container 1 and connected to a low-pressure source at lower pressure than the pressure of the interior 13 of the container; a high-pressure port 2 which is provided to the container 1 and connected to a high-pressure source at a higher pressure than the pressure of the interior 13 of the container; and a control mechanism 4 which causes the second container element 12 to operate so that the vibrations of the object m can be blocked or inhibited by adjusting the opening amounts of the low-pressure port 3 and the high-pressure port 2 to maintain the pressure of the interior 13 of the container at a negative pressure and at the same time to control the negative pressure. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a vibration isolator using an air spring that is provided between an installation structure and a vibration isolation target such as a precision instrument and that blocks or suppresses vibration.

  In precision equipment such as semiconductor manufacturing devices, precision processing machines, and inspection devices, for example, slight vibrations from the ground greatly affect processing accuracy and inspection accuracy. In order to solve such a problem, a vibration isolator using an air spring is provided between a precision instrument and the ground to block vibration. At this time, the vibration isolator has a short vibration resistance when vibration from the ground or the like is difficult to be transmitted to the vibration isolation target, and when the vibration isolation performance is shifted from a predetermined position due to vibration as the vibration suppression performance. It must be able to settle to the original position in time.

  In order to improve the vibration isolation performance of the vibration isolation device, the spring characteristics of the air spring should be made soft so that the natural frequency is lowered. For this reason, conventionally, air springs have been provided with a large air tank to increase the air capacity and soften the spring characteristics.

However, when the air capacity of the air spring is increased, the amount of air inflow / outflow required for vibration suppression by changing the spring characteristics is increased by changing the pressure inside the air spring by air inflow / outflow. , Responsiveness worsens. That is, there is a trade-off relationship between vibration isolation performance and vibration suppression performance of a conventional vibration isolation device using an air spring, and it is difficult to improve both performances.
JP 2007-146898 A

  The present invention has been made in view of the above-described problems, and can improve the vibration isolation performance without increasing the air capacity of the air spring, and has excellent response and excellent vibration suppression performance. The object is to provide a vibration isolator.

  That is, the present invention is a vibration isolator using an air spring that blocks or suppresses vibration by applying pressure between the installation structure and the vibration isolation object, and is connected to the installation structure. 1 container element and the 2nd container element connected to the said vibration isolation object, Comprising: The said 1st container element and the said 2nd container element are comprised so that relative movement is possible, maintaining a substantially airtight state Connected to a low pressure port provided in the container and connected to a low pressure source having a pressure lower than the pressure inside the container, and connected to a high pressure source provided in the container and having a pressure higher than the pressure inside the container. Adjusting the opening of the low pressure port and the high pressure port to keep the pressure inside the container at a negative pressure and controlling the negative pressure so that the second container element vibrates the vibration isolation object. Is actuated so that it is blocked or suppressed An anti-vibration apparatus having a control mechanism.

  Here, substantially maintaining a sealed state means that there is no gap between the first container element and the second container element, and a minute gap is formed, and air is passed through the gap. This includes the case where the negative pressure inside the container can be maintained even if there is an inflow / outflow.

  If it is such, by making the pressure inside the container a negative pressure, the vibration isolation object is set by the difference between the pressure inside the container and the outside of the second container element, for example, the atmospheric pressure. While supporting the installation structure, the spring characteristics can be softened and the vibration isolation performance can be improved. Therefore, it is not necessary to increase the air capacity to soften the spring characteristics.

  Therefore, it is not necessary to prepare a large air tank, and the amount of air inflow / outflow necessary to change the position of the vibration isolation object when damping is reduced by not increasing the air capacity. Therefore, the responsiveness can be improved, and both the vibration isolation performance and the vibration suppression performance can be improved.

  In addition, by adjusting the negative pressure and the air flow rate inside the container through the high pressure port and the low pressure port provided in the container, compared with the case where the inside of the container is maintained at a positive pressure. Therefore, the vibration isolator having excellent vibration isolation performance and vibration suppression performance can be obtained.

  In order to reduce the natural frequency and reduce the response magnification with respect to the disturbance in a wide band, it is only necessary to keep gas flowing from the high pressure port to the low pressure port through the inside of the container.

  In order to apply a force to the vibration isolation target by the second container element, it is conceivable to support or suspend the vibration isolation target. What is necessary is just to be provided with the transmission mechanism which is provided in 2 container elements, passes through the inside of the said container, penetrates the said 1st container element, and is connected to the said vibration isolation object.

  In order to be able to support in the vertical direction and not to impair the vibration isolation performance and the vibration control performance, the installation structure is provided on the second container element and bypasses the outside of the first container element. May be provided with a transmission mechanism extending to the opposite side and connected to the vibration isolation object.

  In order to increase the force acting on the vibration isolation target, for example, to increase the weight that can be supported in the vertical direction, the pressure chamber wall surrounding the external pressure acting surface of the second container element in a sealed state, A pressure port provided on a second container element or a pressure chamber wall and connected to a pressure source for pressurizing an internal space formed by the second container element and the pressure chamber wall; Is raised.

  As a specific embodiment for performing vibration suppression control while keeping the inside of the container at a negative pressure, the control mechanism is such that the measurement position of the second container element or the vibration isolation target is a target position. When the deviation between the measurement position and the target position increases in the direction in which the volume inside the container decreases, the opening amount of the high pressure port is increased and at the same time the low pressure port When the deviation between the measurement position and the target position increases in the direction in which the volume inside the container increases, the opening amount of the high pressure port is decreased and at the same time the opening of the low pressure port What is necessary is just to be comprised so that quantity may be increased.

  As another embodiment for performing vibration suppression control while keeping the inside of the container at a negative pressure, the control mechanism is configured such that the measurement position of the second container element or the vibration isolation target is a target position. When the deviation between the measurement position and the target position increases in the direction in which the volume inside the container decreases, the high pressure port is opened, and at the same time, the low pressure port is closed, When the deviation between the measurement position and the target position increases in the direction in which the volume inside the container increases, the high-pressure port is closed and at the same time the low-pressure port is opened. And the low pressure port may be configured to be substantially closed.

  As an aspect of reducing the pressure fluctuation of the gas flowing in and out through the high pressure port and the low pressure port and easily adjusting the expected pressure to flow in and out, the low pressure source is a vacuum pump, and the high pressure A pressure smoothing vessel is provided between the source and the high-pressure port, and has a branch port that communicates with the atmosphere or a pressure source on the flow path connecting the low-pressure source and the high-pressure source and adjusts the pressure. Is mentioned.

  In order to increase the force that the second container element can act on the vibration isolation target, the vibration isolator is arranged in series with the direction in which the first container element and the second container element move relative to each other. What is necessary is just to set it as the multistage vibration isolator which arranges two or more and connected each 2nd container element.

  Further, in order to adjust the force that the second container element can act on the vibration isolation target to various values, the pressure inside each container is controlled independently in the multistage vibration isolation device. do it.

  In the present invention, by making the pressure inside the container negative, while supporting the object to be isolated by the differential pressure from the external pressure, the spring characteristics are softened, the natural frequency is lowered, and the response magnification is increased over a wide band. Since it can be lowered, it is not necessary to improve the vibration isolation performance by increasing the air capacity. Therefore, by not increasing the air capacity, it is possible to improve the response at the time of vibration suppression, so that both the vibration isolation performance and the vibration suppression performance can be improved.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  The vibration isolation device 100 of the present embodiment is provided between the installation structure G such as a floor and a precision device that is the vibration isolation target m, and supports the vibration isolation target m with respect to the installation structure G on the floor. It is used to block or suppress vibration.

  As shown in the conceptual diagram of FIG. 1, the vibration isolator 100 maintains the pressure in the container 1 constituting the air spring and the inside 13 of the container at a negative pressure and controls the negative pressure so that the vibration isolation object and a control mechanism 4 (see FIG. 3) that performs control so that the vibration of m is blocked or suppressed.

  The container 1 includes a first container element 11 connected to the installation structure G, and a second container element 12 connected to the vibration isolation object m, and the first container element 11 and the first container element 11 The two container elements 12 are configured to be relatively movable while maintaining a sealed state.

  As shown in FIGS. 1 and 2, the transmission mechanism 14 provided in the second container element 12 bypasses the outside of the first element and extends upward on the side opposite to the installation structure G. The vibration isolation object m is supported.

  More specifically, the first container element 11 has a gate-like shape in a side view by partially cutting off the side surface on the opening side of a substantially cylindrical body having one end opened as shown in the perspective view of FIG. It is a thing. The opening side is placed on the installation structure G. The side surface of the first container element 11 is connected to a low pressure port 3 connected to a low pressure source having a pressure lower than the pressure inside the container interior 13 and to a high pressure source having a pressure higher than the pressure inside the container interior 13. A high pressure port 2 is provided via an air pipe.

  As shown in the perspective view of FIG. 2, the second container element 12 and the transmission mechanism 14 are symmetrically cut off at the side surfaces of a substantially cylindrical body having both ends parallel to each other to form a generally square shape in a side view. The vibration isolation object m is placed, and the lower surface is formed so as to substantially fit the first container element 11. In other words, the substantially disk-shaped lower surface corresponds to the second container element 12, and the gate-shaped side surface and upper surface correspond to the transmission mechanism 14. A container interior 13 formed by the upper surface and the side surface of the first container element 11 and the second container element 12 is in a sealed state, and the second container element 12 is In order to enable relative movement, a gap is not generated by the diaphragm B in each gap portion. The outer surface of the second container element 12 is configured to come into contact with the atmosphere. Accordingly, the second container element 12 generates a force for supporting the vibration isolation object m by the differential pressure between the negative pressure inside the container 13 and the atmospheric pressure.

  The container interior 13 is configured such that the internal pressure is controlled at a negative pressure via the low pressure port 3 provided in the first container element 11 and the high pressure port 2. The low-pressure port 3 is connected to a vacuum pump (not shown) that is a low-pressure source, and the high-pressure port 2 is connected to a high-pressure source. The vacuum pump has a pressure lower than the negative pressure inside the container 13, and the high-pressure source has a pressure higher than the negative pressure inside the container 13.

  In this embodiment, the high-pressure source and the vacuum pump were configured to control the pressure inside the container 13 to 10 to 50 kPa. This is because when the pressure inside the container 13 is higher than 50 kPa, the weight that can be supported by the second container element 12 is reduced, and the spring rigidity is increased in proportion to the pressure (gas density). Is considered to decrease.

  In FIG. 1, for simplicity of explanation, the low pressure port 3 and the high pressure port 2 are illustrated in the first container element 11 at different locations. An air pipe K having a container side port Y through which internal air flows in and out is provided at a location (see FIG. 3).

  The control mechanism 4, which is a flow rate control valve, controls the pressure inside the container 13 by controlling the opening amounts of the low pressure port 3 and the high pressure port 2. In the first embodiment, neither the low-pressure port 3 nor the high-pressure port 2 is completely closed, and gas always flows from the high-pressure port 2 to the low-pressure port 3 through the container interior 13. It is configured to continue.

  Specifically, a three-way valve shown in FIG. 3 is connected to the air pipe as the control mechanism 4, and the opening amount of the high-pressure port 2, the low-pressure port 3, and the container interior 13 side port is controlled. is there. The three-way valve is a flapper type servo valve, and when the installation structure G and the vibration isolation object m are in a steady state, the flapper F is configured to be in the center so that half of the flow rate always flows. It is.

  Next, the operation of the vibration isolation device 100 is controlled in a case where the vibration isolation target m is controlled to be supported by the vibration isolation device 100 after being separated from the floor of the installation structure G by a fixed distance in a steady state. The operation of the mechanism 4 will be described.

  The vibration isolation object m is supported in a state of being spaced apart from the floor, which is the installation structure G, in a steady state. The inside of the container 13 is maintained at a negative pressure, and the second container element 12 is under atmospheric pressure on the outer surface of the lower surface, and therefore a force to support the vibration isolation object m is generated in the upward direction. . At this time, the flapper F of the flapper type servo valve that is the control mechanism 4 is in a neutral position, and a certain amount of gas flows from the high-pressure source into the container interior 13 and from the container interior 13 to the low-pressure source. The gas flows out so that the pressure inside the container 13 is kept constant at a negative pressure.

  When the vibration isolation object m is shifted upward from a predetermined position due to vibration from the installation structure G and the volume of the container interior 13 is reduced, the vibration isolation object m is moved downward. The control mechanism 4 operates to move the That is, in order to reduce the force exerted on the vibration isolation object m by the second container element 12 by bringing the negative pressure inside the container interior 13 close to the atmospheric pressure applied to the outer surface, the control mechanism 4 includes a flapper F is rotated to increase the opening amount of the high-pressure port 2 and decrease the opening amount of the low-pressure port 3. Since this increases the amount of high-pressure gas flowing in, the negative pressure inside the container 13 approaches the atmospheric pressure, and the force acting on the vibration isolation object m of the second container element 12 is reduced. The vibration isolation object m moves downward.

  On the contrary, when the vibration isolation object m is shifted downward from a predetermined position and the volume of the container interior 13 is increased, the control mechanism 4 swings the flapper to The opening amount is reduced and the opening amount of the low pressure port 3 is increased. Then, the amount of high-pressure gas flowing into the container interior 13 decreases and the amount of gas flowing out from the container interior 13 increases, so that the negative pressure in the container interior 13 further decreases. Accordingly, the differential pressure between the negative pressure and the atmospheric pressure applied to the lower surface of the second container element 12 increases, and the force acting upward on the vibration isolation object m increases, so that the vibration isolation object m rises. .

  In this way, the vibration isolation object m can be supported at a position spaced apart from the installation structure G by a certain distance.

  Next, a theoretical model when vibration damping control is performed in the vibration isolator 100 will be described.

  A simple hanging model as shown in FIG. 4 is considered as a model of the vibration isolator 100 of the present embodiment. Assume that the pressure inside the container 13 is maintained at a negative pressure while the gas flows into the container interior 13 from the high pressure source and the gas flows out from the container interior 13 to the low pressure source.

  Expressions (1) and (2) are derived from the equation of motion, and Expression (3) is derived from an energy equation indicating a thermodynamic equilibrium condition inside the container 13. By solving these equations simultaneously, it is possible to obtain the upward displacement x, the velocity u, and the negative pressure Pa in the container interior 13 as m.

  Here, Ap is the pressure receiving area where the negative pressure of the second container element 12 is applied, Ps is the pressure of the high pressure source, m is the mass of the vibration isolation object m, g is the gravitational acceleration, c is the damping coefficient, and Va is the inside 13 of the container. The volume, κ is the specific heat ratio, R is the gas constant, Ts is the gas temperature of the high pressure source, and Ta is the gas temperature inside the container 13.

G _in is a mass flow rate of gas flowing into the container inside 13 from the high pressure source, and G _out is a mass flow rate of gas flowing _out of the container inside 13 into the negative pressure chamber. With flapper type servo valve as the control mechanism 4 as described above, in the position controlling the vibration damping subject m by controlling the opening amount of the high-pressure port 2 and the low-pressure port 3 to the target position x ₀ is The mass flow rate is controlled as expressed in equations (4) and (5).

Here, a ₀ is the opening area when the flapper is in the neutral position, X _c is the displacement of the installation structure G to install a vibration isolator 100, Kp is a proportional displacement feedback gain. That is, the target value _x deviation from _{0 ε = (x-x c} ) When -x ₀ ε → ₀ and so as to flow _{G in, G out} is controlled. Further, unlike the case where the inside of the container 13 is normally maintained at a pressure higher than the atmospheric pressure, focusing on the equation (4), the positive feedback is formed so that the larger the deviation ε is, the larger the opening amount is. It is constituted as follows.

  Next, based on these equations (1) to (5), the frequency response characteristics from the disturbance input from the installation structure G obtained by the numerical analysis simulation to the displacement of the vibration isolation object m, that is, against the ground motion disturbance. FIG. 5 shows the calculation result of the vibration isolation characteristics. In FIG. 5, for comparison, the frequency response of the vibration isolator in which the volume inside the container 13, the outer diameter of the container 1, and the mass of the vibration isolation target m are the same and the pressure inside the container is maintained at a positive pressure are also included. Is displayed.

  From this result, under the same conditions, the vibration isolator 100 that operates while keeping the container interior 13 at a negative pressure is more specific than the conventional vibration isolator that performs vibration isolation while maintaining the container interior 13 at a positive pressure. The frequency can be reduced, and excellent vibration isolation performance can be obtained in a wide frequency band.

  Further, as a simulation result in the case of controlling the position of the vibration suppression target by flowing in and out of the air inside the container 13, the frequency response from the command value commanding the position of the vibration suppression target to the displacement of the vibration suppression target was calculated. The results are shown in FIG. FIG. 6 also shows the frequency response of the vibration isolator in which the volume of the container interior 13, the outer diameter of the container 1, and the mass of the vibration isolation target m are the same, and the pressure inside the container 13 is maintained at a positive pressure. They are also displayed.

  From this result, under the same conditions, the vibration isolator 100 that operates while keeping the container interior 13 at a negative pressure is more specific than the conventional vibration isolator that performs positioning while keeping the container interior 13 at a positive pressure. It can be seen that the frequency response characteristics are improved up to the frequency. That is, it can be seen that the vibration isolator 100 in which the inside of the container is maintained at a negative pressure responds more promptly to the input command.

  Thus, according to the vibration isolator 100 of the present embodiment, by making the pressure inside the container 13 negative, by the pressure difference between the negative pressure applied to the lower surface of the second container element 12 and the atmospheric pressure, The vibration isolation target m can be supported and vibration isolation can be performed.

  Furthermore, by making the negative pressure inside the container 13 smaller, the spring characteristics can be made soft and the natural frequency can be lowered. In addition, the natural frequency can be reduced without increasing the capacity of the container interior 13. Therefore, it is not necessary to prepare a large air tank, and by not increasing the capacity of the air inside the container 13, it is possible to reduce the inflow / outflow amount of air necessary for controlling the position of the vibration target. The response of the vibration isolation object m to the command value can be improved.

  More specifically, as shown in FIG. 5, disturbance such as unintentional vibration from the installation structure G is not easily transmitted to the vibration isolation object m, and the vibration isolation is performed as shown in FIG. The response characteristic with respect to the command value with respect to the position of the target m can be made agile.

  In other words, by performing vibration isolation and vibration control while keeping the pressure inside the container 13 at a negative pressure, the conventional vibration isolation device that maintains the container inside at a positive pressure has a vibration isolation performance that has caused a trade-off. It is possible to achieve both vibration suppression performance.

  In addition, since the gas continues to flow from the high pressure port 2 to the low pressure port 3 through the container interior 13, the negative pressure is controlled while the container interior 13 is maintained at a negative pressure. Since the rigidity is reduced as compared with the completely sealed state, the natural frequency of the vibration isolation device 100 can be further reduced, and the vibration isolation characteristics can be improved. In addition, by increasing the gas flow rate, the natural frequency can be further reduced and the peak thereof can be suppressed.

  Next, other modified embodiments will be described. The same components as those in the above embodiment are denoted by the same reference numerals.

  Another modified embodiment of the first container element 11 and the second container element 12 will be described.

  As shown in FIG. 7, the first container element 11 is connected to the fixed structure shaft 1A connected to the installation structure G, and the second container element 12 and the container interior 13 described later are supported by the fixed center shaft 1A. It may be comprised from the umbrella part 1B which forms.

  The fixed central shaft portion 1A includes a disk member 111 connected to the installation structure G, and a central shaft member 112 protruding from the center of the disk body 111 toward the vibration isolation target m, Inside the plate member 111 and the central member 112, there is provided an air pipe K through which air for controlling and controlling the pressure inside the container 13 is kept negative. The air pipe K is provided so that one end is opened at the tip of the central shaft member and the other end is connected to the control mechanism 4.

  The umbrella portion 1B includes a disc-shaped top plate portion 113 that extends from the tip of the central shaft member 112, and a side surface portion 114 that extends from the periphery of the top plate portion 113 to the installation structure G side. It is configured.

  The second container element 12 is a disk-shaped member that is formed so as to coincide with the stop shaft member 112 and the side surface portion 114 and has a through hole into which the center shaft member is inserted at the center. The second container element 12 is provided with a transmission mechanism 14 attached to the second container element 12 and connected to the vibration isolation object m so as not to contact the first container element 11. The shape of the transmission mechanism 14 will be described in detail. A disk-shaped bottom surface that has a through hole into which the central shaft member 112 is inserted and is attached to the second container element 12, and the vibration isolation target m from the bottom surface. It has a substantially cylindrical side surface extending to the side, and the side surface bypasses the umbrella portion 1B and is connected to the vibration isolation object m.

  As shown in FIG. 8, the second container element 12 includes a transmission mechanism 14 that passes through the container interior 13, passes through the first container element 11, and is connected to the vibration isolation object m. It doesn't matter.

  In this embodiment, the second container element 12 includes a disk-shaped portion that fits into the first container element 11, a columnar shape that protrudes from the center of the disk-shaped portion and is connected to the vibration isolation object m. And a transmission mechanism 14. A diaphragm B is provided to the first container element 11 so that the air inside the container 13 does not escape from the gap where the transmission mechanism 14 is inserted.

  Even with these, the vibration isolation object m can be placed on the vibration isolation device 100 and supported in the vertical direction.

  In addition, as shown in FIG. 9, the second container element 12 may be composed of only a disk-shaped member that fits with the first container element 11. In this case, for example, the vibration isolation target m can be supported by being hung and connected to the second container element 12 for vibration isolation.

  Furthermore, as shown in FIGS. 10 and 11, the first container element 11 includes a pressurizing chamber wall 51 that encloses the external pressure acting surface on which the external pressure of the second container element 12 acts in a sealed state. It doesn't matter.

The pressurizing chamber wall 51 is provided with a pressurizing port 52 connected to a pressurizing source that pressurizes an internal space 53 formed by the second container element 12 and the pressurizing chamber wall.
If it is such, in the said embodiment, although the vibration isolation object m was supported by the differential pressure of the negative pressure of the container inside 13 and atmospheric pressure, from the negative pressure and atmospheric pressure of the container inside 13 Also, the vibration isolation object m can be supported by the differential pressure of the pressurized air. Therefore, the weight of the vibration isolation object m that can be supported can be increased.

  Next, another embodiment of the control mechanism 4 will be described.

  As shown in FIG. 12, the three-way valve used as the control mechanism 4 may be a spool type servo valve. The spool type servo valve has three ports, and is provided in the order of the high pressure port 2, the port opening to the container interior 13, and the low pressure port 3. The spool is provided so as to be slidable, and three valve bodies are arranged side by side, and the opening amount of each port is adjusted by moving the spool S.

  If this spool type servo valve is used, gas can always flow or be closed by adjusting the shape of the valve body in a steady state where the spool S is in the center. Further, even when the flow rate of flowing air is large, the amount of exhaust gas flowing out from the low-pressure port 3 at a low constant time can be reduced. Further, since the port is simply structured to be closed with a valve body, a large opening area can be easily obtained.

  As shown in FIG. 13, a level control three-way valve may be used as the three-way valve used as the control mechanism 4. This level control three-way valve is also provided with a high pressure port 2, a port opening to the inside of the container 13, and a low pressure port 3 in this order, and a valve body for adjusting the opening amount thereof. Unlike the above-described embodiment, the gas is not always kept flowing from the high pressure port 2 to the low pressure port 3 through the container inside 13 but is configured to take the following three states by moving the valve body. It is. The three states are: the high pressure port 2 and only the port that opens into the container interior 13 are opened, the low pressure port 3 is closed, the closed state that all ports are closed, the high pressure port 2 is closed, and the container This is an exhaust state in which the port that opens to the inside 13 and the low-pressure port 3 are opened.

  More specifically, the three-way valve for level control includes a valve body VB, a plunger P provided with a hollow P1 at the tip and an air flow path, and a valve body V guide VG for guiding the valve body VB. The valve body VB has a first fitting portion V1 that fits into the distal end opening of the plunger P, and a second fitting portion V2 that fits the valve body V guide VG. . In the intake state, the first fitting portion V1 of the valve body VB is disengaged from the plunger P, is fitted into the valve body V guide VG, and the gas flow from the high-pressure port 2 flows at the tip of the plunger P. It flows to the container side port Y through the cavity P1. In the closed state, the valve body VB has a first fitting portion V1 fitted to the tip of the plunger P, and a second fitting portion V2 is fitted to the valve body V guide VG. Does not occur. Furthermore, in the exhaust state, the second fitting portion V2 is disengaged from the valve body V guide VG while the first fitting portion V1 is fitted to the tip of the plunger P by being pushed by the plunger P. The port Y and the low pressure port 3 are communicated with each other and exhaust is performed.

  When this three-way valve for level control is used, the control operation is the same as that of the above embodiment, and positive feedback of deviation is returned to control the opening amount. As described above, even in the control mechanism 4 configured to perform intake and exhaust separately, the vibration isolation device 100 performs vibration isolation of the vibration isolation target m and also performs position control of the vibration isolation target m. be able to. Although the opening control using a three-way valve is described here, an ON / OFF type two-way valve (solenoid valve) responds quickly by applying techniques such as pulse width control as a technique that does not use a three-way valve. Here, the same effect as the opening degree control by the three-way valve can be obtained.

  In the embodiment, the vibration isolation device 100 is configured by a single container 1, but the multistage vibration isolation device 100 may be configured by using a plurality of containers 1. Specifically, a plurality of containers 1 may be arranged in series in the direction in which the first container element 11 and the second container element 12 move relative to each other, and the second container elements 12 may be connected. .

  Here, as shown in FIGS. 14 and 15, any one container 1 is provided with a high pressure port 2 and a low pressure port 3, and air flows into and out of each container interior 13 into the connected second container element 12. Air piping is provided to do this. The pressure in the space formed on the outer side of the first container element 11 and the outer side of the second container element 12 is adjusted in advance so as to be larger than the negative pressure, or a part thereof is opened to the atmosphere. is there.

  If this is the case, the second container element 12 adds the negative pressure inside the container 13 and the force for supporting the vibration isolation object m by the differential pressure between, for example, atmospheric pressure, in the same direction. Therefore, a larger weight can be supported with a small footprint (footprint).

  As shown in FIGS. 16 and 17, each container 1 may be provided with a high pressure port 2 and a low pressure port 3 so that the pressure inside each container 13 can be independently controlled in the multistage vibration isolator 100. Moreover, you may enable it to adjust the pressure of the space formed in the outer side of the 1st container element 11 and the 2nd container element 12. FIG.

  As shown in FIG. 16, the upper container interior 13 is always kept at a negative pressure, and the pressure in the space formed outside the first container element 11 and the second container element 12 is the opening of the low pressure port 3. In the state where the amount is increased, the pressure in the upper container interior 13 is set to a negative pressure, and in the state where the opening amounts of the high pressure port 2 and the low pressure port 3 are the same, the pressure in the lower container interior 13 is set. Is a negative pressure higher than the pressure in the upper container interior 13.

  As shown in FIG. 17, when the load increases, the opening amounts of the high-pressure port 2 and the low-pressure port 3 connected to the space formed outside the first container element 11 and the second container element 12 are the same. In the same manner as the pressure in the lower container interior 13, a differential pressure is generated and the load that can be supported is increased.

  If it is such, since the force with which each second container element 12 supports the vibration isolation object m can be adjusted, the vibration isolation device 100 outputs while increasing the weight of the vibration isolation object m that can be supported. It becomes possible to finely control the power to do.

  As shown in FIG. 18, the vibration isolation device 100 further includes an elastic element k and a damping element c between the vibration isolation object m and the installation structure G, and detects the position of the vibration isolation object m from the installation structure G. The position detector di and the acceleration detector A for detecting the acceleration of the vibration isolation object m may be provided.

  The control mechanism 4 is configured to control the opening amounts of the high pressure port 2 and the low pressure port 3 by positive feedback of the detected position and acceleration.

  If this is the case, the frequency response characteristics relating to vibration isolation and vibration suppression of the entire system can be adjusted by the elastic element k and the damping element c, and vibration isolation and vibration suppression can be performed by position feedback and acceleration feedback. Both controls can be performed more precisely.

  In order to prevent the pressure fluctuation of the high pressure source from being transmitted to the inside of the container, a pressure smoothing container may be provided between the high pressure port and the high pressure source. As a pressure smoothing container, an air tank etc. can be considered, for example.

  In order to be able to adjust an abnormal pressure or the like in the control mechanism, it is sufficient if a branch port that is released to atmospheric pressure is provided in the control mechanism or an air pipe connected to the control mechanism. Further, the branch port may be connected to a pressure source.

  In the above-described embodiments and modified embodiments, the description has been given of placing the vibration isolation target on the vibration isolation device, or performing vibration isolation by suspending the vibration isolation device. It does not matter if you do.

  The control mechanism may mechanically move the flapper and the spool in conjunction with the movement of the vibration isolation target. The control mechanism calculates a deviation using a processing device such as a computer, and based on the deviation, calculates the position of the flapper and the spool. You may control it.

  In the flapper type three-way valve shown in FIG. 3, if the position of the flapper F in the steady state is set not to be in the center of each port but to be close to the high pressure port side, the container interior 13 has a lower vacuum pressure. It can be maintained as an operating point. Therefore, the vibration isolator can obtain better vibration isolation performance.

  By changing the pressure receiving area of the actuator, it is possible to set the support load of the vibration isolator according to the target while keeping the vacuum pressure inside the container 13 constant. For example, referring to the embodiment of FIG. 8, a cylindrical member is attached to the opening of the first container element 11, and a disk-shaped second container element is attached to the cylindrical member via the diaphragm B. 12 is installed. If only a few types of cylindrical members and diaphragms B with different outer diameters and disk-shaped second element container members are prepared, the other parts of the vibration isolator are not changed, and the support load is adjusted to the target. Can be set easily.

  In the above-described embodiment, a gap is not formed between the first container element and the second container element by the diaphragm so that the negative pressure inside the container does not fluctuate. A minute gap may be formed between the container element and the second container element so that the pressure inside the container hardly fluctuates.

  In addition, some or all of the above-described embodiments and modified embodiments may be combined as appropriate, and the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention. .

The schematic diagram which concerns on one Embodiment of this invention. The typical perspective view of the container in the embodiment. The schematic diagram of the control mechanism in the embodiment. The schematic diagram showing the theoretical model of this invention. The simulation result which shows the frequency response characteristic with respect to the disturbance in the same embodiment. The simulation result which shows the frequency response characteristic with respect to the position input value in the same embodiment. The schematic diagram which shows another embodiment about a container. The schematic diagram which shows another embodiment about a container. The schematic diagram which shows different embodiment about a container. The schematic diagram which shows another embodiment based on the container of FIG. The schematic diagram which shows another embodiment based on the container of FIG. The schematic diagram which shows another embodiment of a control mechanism. The schematic diagram which shows another embodiment of a control mechanism. The schematic diagram which shows embodiment regarding the multistage vibration isolator which arranged the container in series. The schematic diagram which shows another embodiment of the said multistage vibration isolator. The schematic diagram which shows the steady state of further another embodiment of the said multistage vibration isolator. The schematic diagram which shows the load state of further another embodiment of the said multistage vibration isolator. The schematic diagram which shows further another embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Vibration isolator 1 ... Container 11 ... 1st container element 12 ... 2nd container element 13 ... Inside container 14 ... Transmission mechanism 2 ... High pressure port 3 ... Low pressure port 4 ··· Control mechanism 51 ··· Pressure wall 52 ··· Pressure port m · · · Vibration isolation object G · · · Installation structure

Claims (10)

An anti-vibration device using an air spring that blocks or suppresses vibration by applying pressure between the installation structure and the object of vibration isolation,
A first container element connected to the installation structure; and a second container element connected to the vibration isolation object, wherein the first container element and the second container element are substantially sealed. A container configured to be relatively movable while being maintained;
A low pressure port provided in the container and connected to a low pressure source having a pressure lower than the pressure inside the container;
A high-pressure port provided in the container and connected to a high-pressure source having a pressure higher than the pressure inside the container;
The opening amount of the low-pressure port and the high-pressure port is adjusted, the pressure inside the container is kept at a negative pressure, and the negative pressure is controlled, so that the vibration of the vibration isolation target is blocked or suppressed in the second container element. A vibration isolator having a control mechanism that operates in a manner as described above.   The vibration isolator according to claim 1, wherein a gas is continuously supplied from the high pressure port to the low pressure port through the inside of the container.   2. A transmission mechanism that is provided in the second container element, passes through the first container element and the inside of the container, passes through the first container element, and is connected to the vibration isolation target. 2. The vibration isolator according to 2.   2. A transmission mechanism that is provided in the second container element, extends around the outside of the first container element, extends to the opposite side of the installation structure, and is connected to the vibration isolation target. 2. The vibration isolator according to 2 or 3. A pressurizing chamber wall surrounding the external pressure acting surface of the second container element in a sealed state;
A pressurizing port provided on the second container element or the pressurizing chamber wall and connected to a pressurizing source for pressurizing an internal space formed by the second container element and the pressurizing chamber wall; The vibration isolator according to claim 1, 2, 3 or 4. The control mechanism controls the measurement position of the second container element or the vibration isolation target to be a target position,
When the deviation between the measurement position and the target position increases in the direction of decreasing the volume inside the container, increase the opening amount of the high pressure port, and simultaneously decrease the opening amount of the low pressure port,
When the deviation between the measurement position and the target position increases in the direction in which the volume inside the container increases, the opening amount of the high pressure port is decreased and at the same time the opening amount of the low pressure port is increased. The vibration isolator according to claim 1, 2, 3, 4 or 5. The control mechanism controls the second container element or the vibration isolation target so that a measurement position becomes a target position,
When the deviation between the measurement position and the target position increases in the direction in which the volume inside the container decreases, the high pressure port is opened, and the low pressure port is closed at the same time,
When the deviation between the measurement position and the target position increases in the direction in which the volume inside the container increases, close the high pressure port, and simultaneously open the low pressure port,
The vibration isolator according to claim 1, 3, 4, or 5, wherein the high pressure port and the low pressure port are substantially closed near a target position.   The low-pressure source is a vacuum pump, a pressure smoothing container is provided between the high-pressure source and the high-pressure port, and communicates with the atmosphere or a pressure source on a flow path connecting the low-pressure source and the high-pressure source; The vibration isolator according to claim 5, 6 or 7, further comprising a branch port for adjusting pressure.   A multistage vibration damping device according to any one of claims 1 to 8, wherein a plurality of the vibration isolation devices are arranged in series with the direction in which the first container element and the second container element move relative to each other and connected to each other. Shaker.   The multistage vibration isolator according to claim 9, wherein the pressure inside each container is controlled independently.