JP2010000728A5 - - Google Patents
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- Publication number
- JP2010000728A5 JP2010000728A5 JP2008162447A JP2008162447A JP2010000728A5 JP 2010000728 A5 JP2010000728 A5 JP 2010000728A5 JP 2008162447 A JP2008162447 A JP 2008162447A JP 2008162447 A JP2008162447 A JP 2008162447A JP 2010000728 A5 JP2010000728 A5 JP 2010000728A5
- Authority
- JP
- Japan
- Prior art keywords
- pressure generating
- region
- compressive stress
- main component
- liquid ejecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000007788 liquid Substances 0.000 claims 11
- 239000012528 membrane Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052791 calcium Inorganic materials 0.000 claims 1
- 239000011575 calcium Substances 0.000 claims 1
- 229910017052 cobalt Inorganic materials 0.000 claims 1
- 239000010941 cobalt Substances 0.000 claims 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008162447A JP2010000728A (ja) | 2008-06-20 | 2008-06-20 | 液体噴射ヘッド、液体噴射装置及びアクチュエータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008162447A JP2010000728A (ja) | 2008-06-20 | 2008-06-20 | 液体噴射ヘッド、液体噴射装置及びアクチュエータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010000728A JP2010000728A (ja) | 2010-01-07 |
| JP2010000728A5 true JP2010000728A5 (https=) | 2011-06-30 |
Family
ID=41582834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008162447A Withdrawn JP2010000728A (ja) | 2008-06-20 | 2008-06-20 | 液体噴射ヘッド、液体噴射装置及びアクチュエータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2010000728A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7567325B2 (ja) * | 2020-09-29 | 2024-10-16 | セイコーエプソン株式会社 | 液体吐出ヘッド、および、液体吐出装置 |
| JP7533078B2 (ja) * | 2020-09-29 | 2024-08-14 | セイコーエプソン株式会社 | 液体吐出ヘッド、液体吐出装置、アクチュエーター |
| JP7639541B2 (ja) * | 2021-05-13 | 2025-03-05 | セイコーエプソン株式会社 | 圧電デバイス、液体噴射ヘッド、液体噴射装置および圧電デバイスの製造方法 |
| CN121467294B (zh) * | 2026-01-07 | 2026-03-27 | 苏州众行汇创科技有限公司 | 一种振动结构、包含该振动结构的振动器和喷墨装置 |
-
2008
- 2008-06-20 JP JP2008162447A patent/JP2010000728A/ja not_active Withdrawn
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