JP2009532581A5

JP2009532581A5 -

Info

Publication number: JP2009532581A5
Application number: JP2009503387A
Authority: JP
Filing date: 2007-04-02
Publication date: 2010-05-13

Claims

From the sub-group metals of the periodic system of chemical elements or their alloys, preferably Cr, W, Ti, V, Zr, Nb, Mo, Ta, and a single metalloid belonging to the group of C, Si, B and S A multiphase component wear protection layer comprising:
i) The component wear protection layer substantially consists of the metal, the metalloid, and the metalloid compound,
ii) the component wear protection layer is substantially free of hydrogen;
iii) the component wear protection layer is substantially free of a distinct layer of metal, except for an adhesion layer optionally present on the workpiece surface or component surface;
iv) The component wear protection layer is substantially free of a continuous layer of metalloid.

The multiphase component wear protection layer according to claim 1, wherein the ratio of the metalloid concentration to the total metal concentration varies periodically from the layer surface toward the workpiece surface or component surface.

i) Carbon is used as the metalloid,
ii) Cr, W, Ti, Zr, Nb, Mo or Ta is used as the metal,
iii) Multi-phase component wear protection layer according to claim 1 or 2, characterized in that the carbon concentration is 20-85%, preferably 40-70%.

4. A multi-phase component wear protection layer according to claim 3, characterized in that the layer additionally contains nitrogen.

The multi-phase component wear protection layer according to claim 4, wherein the nitrogen concentration does not exceed the carbon concentration.

The period of the change in the ratio of the metalloid to metal concentration from the layer surface towards the workpiece surface or the component surface does not exceed 5 nm, preferably does not exceed 2 nm. The multiphase component wear protective layer according to any one of the preceding claims.

i) It is composed of multiple layers,
The multiphase component wear protection layer according to any one of claims 1 to 6, characterized in that ii) the individual layers are distinguished substantially only in terms of the particle size of the metal and metalloid compounds.

PVD component wear protection coating method,
i) using at least one physical evaporation source to generate metal vapor;
ii) using at least one physical evaporation source to generate metalloid vapor;
iii) A PVD component wear protective coating method characterized in that a metal vapor and a metalloid vapor react with each other to strike a workpiece surface so as to form a compound.

The metal vapor is a subgroup metal of the periodic system of chemical elements, preferably Cr, W, Ti, V, Zr, Nb, Mo, Ta, or an alloy in which these metals form the main alloy component, PVD component wear protective coating method according to claim 8, characterized in that it is a vapor of the elements C, Si, B and S, preferably C.

i) Metalloid vapor is carbon,
ii) The temporal average of the ratio of the molar flow of carbon and the molar flow of metal impinging on the workpiece and component surfaces is greater than 0.2 and less than 4.5, preferably greater than 0.4. 10. PVD component wear protection coating method according to claim 9, characterized in that it is smaller than 5.

i) The ratio of the molar flow of metal vapor and metalloid vapor impinging on the workpiece and component surfaces varies periodically with a time period Δt;
ii) The time period Δt is smaller than 5 × 10 ⁻⁹ times the coating rate expressed in units of m / sec, preferably smaller than 2 × 10 ⁻⁹ times. The PVD component wear protection coating method according to claim 1.

12. PVD component wear protection coating method according to any one of claims 8 to 11, characterized in that a cathodic arc evaporator is used as one of both physical evaporation sources.

13. PVD component wear protection coating method according to any one of claims 8 to 12, characterized in that the coating is carried out in an atmosphere containing nitrogen.

14. PVD component wear protection coating method according to any one of claims 8 to 13, characterized in that the coating is carried out in an atmosphere substantially free of hydrogen or hydrogen containing compounds.

A component comprising a vacuum chamber (1), a physical evaporation source (3), (4), (5) and (6), a rotating device (7), and a component rotating support (9) An apparatus for performing a wear protective coating method,
i) the device comprises at least two physical evaporation sources;
ii) At least two physical said evaporation sources are loaded with different materials to be transferred to the vapor phase by a physical process;
iii) the at least one physical evaporation source is suitable for producing carbon vapor, sulfur vapor, silicon vapor or boron vapor;
iv) each of the two physical evaporation sources and the rotating device are arranged such that all components are periodically exposed to both physical evaporation sources;
v) Time period delta t to the component support has reached the same position again less than 5 × 10 ^-9 × reverse coating rate in units m / sec, even more preferably 2 × 10 ^-9 × A device for carrying out the component wear protection coating process, characterized in that it is small.

The apparatus for carrying out the component wear protection coating method according to claim 15, characterized in that the rotational speed of the rotating device is at least 10 revolutions / minute, preferably at least 50 revolutions / minute.

16. Component according to claim 15, characterized in that the rotational speed of the rotating device is 5 x ^10-9 times, preferably 2 x ^10-9 times the reverse coating rate in units of m / sec. Equipment that implements the wear protection coating method.

i) The average spacing transverse to the direction of rotation of the target plates (30) of both physical vapor sources is shorter than the average diameter of the target plates (32) of both physical vapor sources,
ii) the average spacing transverse to the direction of rotation of the target plates (30) of both physical evaporation sources, respectively, from the surface of the target plate (31) of both physical evaporation sources to the component support (9 The apparatus for carrying out the component wear protection coating method according to any one of claims 15 to 17, characterized in that it is shorter than the average interval between.

Component according to any one of claims 15 to 18, characterized in that the average distance transverse to the direction of rotation of the evaporation material plates (30) of both physical evaporation sources is shorter than 150 mm. Equipment that implements the wear protection coating method.

The time required for the component support to reach from the center of one of the two physical evaporators to the center of the other physical evaporator is less than 6 seconds, preferably less than 1 second. An apparatus for carrying out the component wear protection coating method according to claim 15, characterized in that:

The apparatus for carrying out the component wear protective coating method according to claim 15, characterized in that both physical vaporizers are cathodic arc evaporators.

i) Cathodic arc evaporator has a magnetic cathode foot guide for carbon,
ii) The magnetic cathode foot point guide is configured such that the cathode foot point performs an oscillating motion with a time period δt in a direction transverse to the rotational motion (21),
The component wear protection coating according to claim 21, characterized in that the time period δt of the oscillating movement of the cathode foot point is at least 10 to 100 times the time period Δt at which the component support reaches the same position again. A device that implements the law.