JP2009291805A5

JP2009291805A5 -

Info

Publication number: JP2009291805A5
Application number: JP2008146567A
Authority: JP
Filing date: 2008-06-04
Publication date: 2012-08-23
Anticipated expiration: 2028-06-04

Description

本発明は、上記課題を解決するため、下記のような構成を採用した。
すなわち、本発明の一態様によれば、本発明のレーザ加工装置は、レーザ光源から出射されたレーザビームを所望の形状で被加工物に照射するために配列された複数の微小可動素子を用いて空間変調する空間変調手段と、前記空間変調手段によって前記所望の形状に空間変調されたレーザビームの波長を、紫外波長に波長変換する非線形光学手段と、
を備えることを特徴とする。
The present invention adopts the following configuration in order to solve the above-mentioned problems.
That is, according to one aspect of the present invention, the laser processing apparatus of the present invention uses a plurality of micro movable elements arranged to irradiate the workpiece with the laser beam emitted from the laser light source in a desired shape. Spatial modulation means for spatial modulation, and nonlinear optical means for wavelength converting the wavelength of the laser beam spatially modulated to the desired shape by the spatial modulation means to an ultraviolet wavelength;
And the like.

Claims

Spatial modulation means for spatially modulating using a plurality of micro movable elements arranged to irradiate a workpiece with a laser beam emitted from a laser light source in a desired shape;
Nonlinear optical means for wavelength converting the wavelength of the laser beam spatially modulated into the desired shape by the spatial modulation means to an ultraviolet wavelength;
A laser processing apparatus comprising:

The laser beam emitted from the laser light source is a laser beam in a near infrared region or a visible region,
The nonlinear optical means wavelength-converts a laser beam in the near infrared region or visible region into a laser beam in the ultraviolet region.
The laser processing apparatus according to claim 1,

Wavelength selection means for transmitting only the laser beam that has been wavelength converted by the non-linear optical means;
The laser processing apparatus according to claim 1, further comprising:

If the shape of the laser beam spatially modulated by the spatial modulation means is different from the shape when the laser beam wavelength-converted by the non-linear optical means is irradiated to the workpiece through the illumination optical system Correction means for correcting the laser beam spatially modulated by the spatial modulation means so as to have a shape;
The laser processing apparatus according to any one of claims 1 to 3, further comprising:

A microscope apparatus for observing the workpiece;
Equipped with
The spatial modulation means is disposed at an intermediate imaging position inside the microscope,
The non-linear optical means and the wavelength selection means are disposed inside the microscope apparatus and between an imaging lens for focusing the laser beam on the workpiece and the spatial modulation means.
The laser processing apparatus according to any one of claims 1 to 4, characterized in that:

The spatial modulation means is configured by arranging a plurality of micro movable elements in the vertical and horizontal directions, and each micro movable element is inclined to any one of two predetermined angles to form a laser beam of the desired shape. ,
The laser processing apparatus according to any one of claims 1 to 5, characterized in that:

The laser processing apparatus according to any one of claims 1 to 6, wherein the spatial modulation unit further includes a cover glass that covers a plurality of micro movable elements arranged in the vertical and horizontal directions.