JP2009289383A - Manufacturing method of magnetic recording medium, and magnetic recording medium - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance the quality of a magnetic recording medium by devising a carrier holding a substrate included in a vacuum film-depositing device, thereby making the temperature of the substrate close to the temperature suitable for each film deposition process in a film-deposition process of the magnetic recording medium. <P>SOLUTION: In the manufacturing method of the perpendicular magnetic recording medium 100 including the film-deposition process for film-depositing at least a magnetic recording layer 122 on the disk substrate 110 using a DC magnetron sputtering device 200 as the vacuum film-depositing device, gripper 216 attached to the carrier 208 is brought into contact with the disk substrate to hold the disk substrate in the film-deposition process, the gripper has a layered structure of a plurality of metals and a metal which constitutes an upper layer 216a of the gripper has a thermal conductivity higher than that of a metal which constitutes a lower layer 216b of the gripper. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a magnetic recording medium mounted on an HDD (hard disk drive) or the like, and a magnetic recording medium.

  Various information recording techniques have been developed with the recent increase in information processing capacity. In particular, the surface recording density of HDDs using magnetic recording technology continues to increase at an annual rate of about 100%. Recently, an information recording capacity exceeding 160 GB has been required for a 2.5-inch diameter magnetic recording medium used for HDDs and the like, and in order to meet such a demand, 1 square inch is required. It is required to realize an information recording density exceeding 250 GBit per unit.

  In order to achieve a high recording density in a magnetic recording medium used for an HDD or the like, a perpendicular magnetic recording type magnetic recording medium (perpendicular magnetic recording disk) has recently been proposed. In the conventional in-plane magnetic recording method, the easy axis of magnetization of the magnetic recording layer is oriented in the plane direction of the substrate surface, but in the perpendicular magnetic recording method, the easy magnetization axis is adjusted to be oriented in the direction perpendicular to the substrate surface. ing. In the perpendicular magnetic recording method, the demagnetizing field (Hd) increases and the coercive force Hc improves as the magnetic grains become finer than the in-plane recording method, and the thermal fluctuation phenomenon can be suppressed. It is suitable for.

  In the perpendicular magnetic recording system, a single pole type perpendicular head is used to generate a magnetic field perpendicular to the magnetic recording layer. However, simply using a single magnetic pole type vertical head makes it impossible to apply a sufficiently strong magnetic field to the magnetic recording layer because the magnetic flux exiting the single magnetic pole end immediately returns to the return magnetic pole on the opposite side. Therefore, a strong magnetic field in the perpendicular direction is applied to the magnetic recording layer by providing a soft magnetic layer under the magnetic recording layer of the perpendicular magnetic recording disk and forming a magnetic path in the soft magnetic layer. That is, the soft magnetic layer is a layer in which the magnetization direction is aligned by a magnetic field when writing and dynamically forms a magnetic path.

  The soft magnetic layer is a layer used at the time of writing, and the magnetization direction is aligned along the magnetic field at the time of writing. However, since a magnetic field that aligns the magnetization direction is not applied to the soft magnetic layer when reading, the magnetization direction is scattered in an irregular direction in principle. This irregular direction is a three-dimensional direction, and if a perpendicular component is included in the magnetization direction of the soft magnetic layer, it may be picked up as noise together with the signal of the magnetic recording layer when reading by the magnetic head.

  Therefore, an AFC (Antiferromagnetic exchange coupling) structure in which a soft magnetic layer is divided into two layers and a nonmagnetic spacer layer is interposed between them is proposed (for example, Patent Document 1). Has been. In the AFC structure, the magnetization direction is reversed between the lower layer and the upper layer, and they are coupled and fixed by attracting each other (RKKY-like exchange coupling). Therefore, the magnetization directions of the soft magnetic layers when no magnetic field is applied are antiparallel to each other (parallel and opposite to each other), that is, parallel to the main surface of the substrate. As a result, the noise generated from the soft magnetic layer can be reduced because the perpendicular component of magnetization is extremely reduced.

  As the information recording density increases, both the circumferential linear recording density (BPI: Bit Per Inch) and the radial track recording density (TPI: Track Per Inch) are steadily increasing. . Further, a technique for improving a signal-to-noise ratio (SNR) by narrowing a gap (magnetic spacing) between a magnetic layer of a magnetic disk and a recording / reproducing element of a magnetic head has been studied. In recent years, the flying height of a magnetic head desired is 6 nm or less.

As the magnetic head has been reduced in flying height as described above, the possibility that the magnetic head comes into contact with the disk surface due to external impact or flight disturbance is increasing. Therefore, the perpendicular magnetic recording medium is provided with a medium protective layer that protects the surface of the magnetic recording layer from being damaged when the magnetic head collides with the perpendicular magnetic recording medium. The medium protective layer forms a high hardness film by a carbon overcoat (COC), that is, a carbon film. Some medium protective layers contain a mixture of hard diamond-like bonds of carbon and soft graphite bonds (for example, Patent Document 2). Also disclosed is a technique for producing a diamond-like bond protective film by a CVD (Chemical Vapor Deposition) method (for example, Patent Document 3).
JP 200345015 A Japanese Patent Laid-Open No. 10-11734 JP 2006-114182 A

  When the soft magnetic layer having the AFC structure described in Patent Document 1 described above is formed, a DC magnetron sputtering apparatus (hereinafter referred to as a sputtering apparatus) is used, and the film thickness of the nonmagnetic spacer layer is as follows: The film is formed thinner than the upper and lower layers. Therefore, when the upper layer and the lower layer are formed, the power input to the sputtering apparatus is increased as compared with the case where the spacer layer is formed.

  When the power input to the sputtering apparatus is increased, the temperature of the substrate is increased, which affects adjacent layers. In particular, in a thin film such as a spacer layer formed between soft magnetic layers, the heat generated when the upper layer to be formed next is made thick, the layer formed immediately below the upper layer ( There is a problem that the spacer layer is easily diffused and influenced.

  On the other hand, when forming a magnetic recording layer using a sputtering apparatus, it is necessary to raise the temperature of the substrate surface to the melting point of the film forming material (target) in order to promote the diffusion of the film forming material to the substrate surface. .

  Furthermore, when the medium protective layer is formed, it is necessary to increase the reactivity of the reaction gas in order to obtain a high hardness film, and thus there is a demand to increase the temperature of the substrate in advance.

  The present invention has been made in view of the problems of the film forming process of a magnetic recording medium, and the object of the present invention is to devise a carrier for holding a substrate included in a vacuum film forming apparatus such as a sputtering apparatus or a CVD apparatus. Thus, it is an object of the present invention to provide a method for manufacturing a magnetic recording medium and a magnetic recording medium capable of bringing the temperature of a substrate close to a temperature suitable for each film forming process in the film forming process of the magnetic recording medium.

  In order to solve the above-mentioned problems, the inventors of the present invention diligently studied. By paying attention to the heat capacity (thermal conductivity) of a carrier that is included in the vacuum film forming apparatus and holds the substrate, further research is performed. The present invention has been completed.

  That is, in order to solve the above-described problems, a typical configuration of the method for manufacturing a magnetic recording medium of the present invention includes a film forming process for forming at least a magnetic recording layer on a substrate using a vacuum film forming apparatus. A method of manufacturing a magnetic recording medium, wherein in a film forming step, a gripper attached to a carrier for holding a substrate included in a vacuum film forming apparatus is brought into contact with the substrate to hold the substrate, and the gripper is made of a plurality of metals. The metal which comprises the surface layer of the said gripper is higher in heat conductivity than the metal which comprises the lower layer of the said gripper.

  With the above configuration, the lower layer constituting the gripper has springiness (elasticity), and the surface layer in contact with the substrate can increase the thermal conductivity. Therefore, it is possible to provide a gripper with improved thermal conductivity while securing the spring property necessary for holding the base. As a result, it is possible to release heat generated in the substrate to the carrier through the gripper as the power input to the sputtering apparatus increases, and to minimize the influence of heat (thermal stress) on the substrate. Become.

  The metal constituting the surface layer of the gripper may be composed of a single element selected from aluminum, copper, silver, and gold, or an alloy containing the element.

  In particular, since aluminum has a high thermal conductivity and is inexpensive, heat generated in the substrate can be efficiently transmitted to the carrier.

  The metal constituting the lower layer of the gripper is preferably composed of an alloy containing nickel as a main component and an element selected from iron, chromium, niobium, and molybdenum.

  An alloy containing nickel as its main component and an element selected from iron, chromium, niobium, and molybdenum has a high melting point and can maintain spring properties (elasticity) even at high temperatures. Can be reliably and stably held.

  The vacuum film forming apparatus may be one of a group of a sputtering apparatus, a CVD apparatus, an etching apparatus, and an ion implantation apparatus.

  When a substrate is formed using a sputtering apparatus, a CVD apparatus, an etching apparatus, and an ion implantation apparatus, the optimum temperature of the substrate is different for each film forming process, and thus the present invention can be preferably used.

  Further, a typical configuration of the magnetic recording medium according to the present invention is characterized by being manufactured using the above-described method for manufacturing a magnetic recording medium.

  Since the magnetic recording medium is formed by laminating a plurality of layers, the optimum temperature of the substrate is different for each film forming process. Therefore, the present invention can be preferably used.

  The components based on the technical idea of the magnetic recording medium manufacturing method described above and the description thereof can be applied to the magnetic recording medium.

  As described above, according to the method for manufacturing a magnetic recording medium of the present invention, the temperature of the substrate can be reduced in the film forming process of the magnetic recording medium by devising the carrier for holding the substrate included in the vacuum film forming apparatus. Since it becomes possible to approach the temperature suitable for each film forming process, the quality of the magnetic recording medium can be improved.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The dimensions, materials, and other specific numerical values shown in the embodiment are merely examples for facilitating understanding of the invention, and do not limit the present invention unless otherwise specified. In the present specification and drawings, elements having substantially the same function and configuration are denoted by the same reference numerals, and redundant description is omitted, and elements not directly related to the present invention are not illustrated. To do.

(Embodiment)
An embodiment of a method for producing a perpendicular magnetic recording medium as a magnetic disk according to the present invention will be described. FIG. 1 is a diagram illustrating the configuration of a perpendicular magnetic recording medium 100 according to the present embodiment. A perpendicular magnetic recording medium 100 shown in FIG. 1 includes a disk substrate 110 as a substrate, an adhesion layer 112, a first soft magnetic layer 114a, a spacer layer 114b, a second soft magnetic layer 114c, a pre-underlayer 116, and a first underlayer 118a. , A second underlayer 118b, a nonmagnetic granular layer 120, a first magnetic recording layer 122a, a second magnetic recording layer 122b, a continuous layer 124, a medium protective layer 126, and a lubricating layer 128. The first soft magnetic layer 114a, the spacer layer 114b, and the second soft magnetic layer 114c together constitute the soft magnetic layer 114. The first base layer 118a and the second base layer 118b together constitute the base layer 118. The first magnetic recording layer 122a and the second magnetic recording layer 122b together constitute the magnetic recording layer 122.

(Substrate manufacturing process)
As the disk substrate 110, a glass disk obtained by forming amorphous aluminosilicate glass into a disk shape by direct pressing can be used. The type, size, thickness, etc. of the glass disk are not particularly limited. Examples of the material of the glass disk include aluminosilicate glass, soda lime glass, soda aluminosilicate glass, aluminoborosilicate glass, borosilicate glass, quartz glass, chain silicate glass, or glass ceramic such as crystallized glass. It is done. The glass disk is subjected to grinding, polishing, and chemical strengthening sequentially to obtain a smooth non-magnetic disk base 110 made of a chemically strengthened glass disk.

(Film formation process)
Using the DC magnetron sputtering apparatus, which is a sputtering apparatus as a vacuum film forming apparatus, on the obtained disk substrate 110, films were sequentially formed from the adhesion layer 112 to the continuous layer 124 in an Ar atmosphere. A film can be formed by a CVD apparatus as a vacuum film forming apparatus. Thereafter, the lubricating layer 128 can be formed by dip coating.

  In the present embodiment, it is also preferable to use an in-line film forming method in terms of high productivity. Hereinafter, the configuration of the DC magnetron sputtering apparatus, the configuration of each layer, and the manufacturing method will be described.

  FIG. 2 is an explanatory diagram for explaining the DC magnetron sputtering apparatus according to the present embodiment. As shown in FIG. 2, the DC magnetron sputtering apparatus 200 performs vacuum evacuation from a chamber 202 that forms a vacuum chamber, a gas inlet 204 that is provided in the chamber 202 and introduces Ar as a gas from the outside, and the chamber 202. Exhaust port 206, carrier 208 for holding disk base 110, target 210 as a film forming material for forming disk base 110, and film forming material discharged from target 210 by focusing on disk base 110, the disk base It includes a shield 212 for preventing scattering to other than 110 and a magnet 214 for increasing the film formation speed and performing low-temperature film formation.

  In film formation from the adhesion layer 112 to the continuous layer 124 using the DC magnetron sputtering apparatus 200, first, a gas is introduced from the gas introduction port 204, and a plurality of gas ejection ports provided in the shield 212 through the flow path 218. Gas is ejected from 214 and the inside of the chamber 202 is maintained at a predetermined pressure. Next, plasma is generated between the target 210 and the shield 212 in the chamber 202. Then, Ar ions generated by the plasma are accelerated by an electric field and irradiated to the target 210 made of a film forming material. Ar ions repel atoms or molecules on the surface of the target 210 from the surface. The ejected atoms and / or molecules of the film forming material are deposited on the disk substrate 110 to form a thin film (layer). The target 210 in each layer will be described in detail below.

  3A and 3B are explanatory views for explaining the carrier and the gripper according to the present embodiment. In particular, FIG. 3A is a perspective view of the carrier, and FIG. 3B is an enlarged view of the gripper. As shown in FIG. 3A, the carrier 208 has a gripper 216 that is attached to the carrier 208 and contacts the disk base 110. In this embodiment, one disc base 110 is supported by two grippers 216.

  In the present embodiment, the carrier 208 is made of a material having a large heat capacity. As a result, even if a room temperature (low temperature) disk substrate 110 is newly introduced into the vacuum film formation apparatus, the chamber 202 is not cooled to about room temperature because the heat capacity of the carrier 208 is large, and film formation is not performed. The difference between the temperature and the room temperature is reduced, and the thermal stress caused by the difference in thermal expansion coefficient between the deposited layer and the disk substrate 110 can be minimized.

  As shown in FIG. 3B, in this embodiment, the gripper 216 has a three-layer laminated structure made of two kinds of metals, and the metal constituting the surface layer 216a of the gripper 216 is the metal constituting the lower layer 216b of the gripper 216. Higher thermal conductivity and coefficient of thermal expansion.

  In the present embodiment, the metal constituting the surface layer 216a of the gripper 216 (the layer in contact with the disk base 110) is aluminum, and the metal constituting the lower layer 216b of the gripper 216 is mainly composed of nickel, iron, chromium, An alloy containing niobium and molybdenum (for example, Inconel (registered trademark)).

  As a result, the lower layer 216b constituting the gripper 216 has a spring property (elasticity), and the surface layer 216a contacting the disk base 110 can increase the thermal conductivity. Therefore, it is possible to provide the gripper 216 having improved thermal conductivity while ensuring the spring property necessary for holding the disk base 110.

  That is, when a thin film such as the spacer layer 114b is formed, heat generated in the base body as the electric power input to the DC magnetron sputtering apparatus 200 is increased can be released to the carrier 208 via the gripper 216. It becomes possible to minimize the influence of heat (thermal stress) on the substrate 110.

  Further, when a layer having a certain thickness such as the magnetic recording layer 122 is formed, the temperature of the surface of the disk substrate 110 can be easily and stably raised to the melting point of the film forming material (target). Diffusion of the film material (target) to the surface of the disk substrate 110 can be promoted.

  Further, the metal of the surface layer 216a has a higher coefficient of thermal expansion than the metal of the lower layer 216b, and the structure in which both sides of the lower layer 216b are sandwiched by the surface layer 216a eliminates the possibility that the gripper 216 will be deformed even when the temperature is high.

  The adhesion layer 112 is an amorphous underlayer, which is formed in contact with the disk substrate 110 and has a function of increasing the peel strength between the soft magnetic layer 114 formed on the disk substrate 110 and the disk substrate 110. It has a function of miniaturizing and homogenizing the crystal grain of each layer to be formed. When the disk substrate 110 is made of amorphous glass, the adhesion layer 112 is preferably an amorphous alloy film so as to correspond to the amorphous glass surface.

  The adhesion layer 112 can be selected from, for example, a CrTi amorphous layer, a CoW amorphous layer, a CrW amorphous layer, a CrTa amorphous layer, and a CrNb amorphous layer. Among these, a CoW alloy film is particularly preferable because it forms an amorphous metal film containing microcrystals. The adhesion layer 112 may be a single layer made of a single material, or may be formed by laminating a plurality of layers. For example, a CoW layer or a CrW layer may be formed on the CrTi layer. These adhesion layers 112 are preferably formed by sputtering with a material containing carbon dioxide, carbon monoxide, nitrogen, or oxygen, or the surface layer is exposed with these gases.

  The soft magnetic layer 114 is a layer that temporarily forms a magnetic path during recording in order to pass magnetic flux in a direction perpendicular to the recording layer in the perpendicular magnetic recording method. The soft magnetic layer 114 is provided with AFC (Antiferro-magnetic exchange coupling) by interposing a nonmagnetic spacer layer 114b between the first soft magnetic layer 114a and the second soft magnetic layer 114c. Can be configured. As a result, the magnetization direction of the soft magnetic layer 114 can be aligned along the magnetic path (magnetic circuit) with high accuracy, and the vertical component of the magnetization direction is extremely reduced, so that noise generated from the soft magnetic layer 114 is reduced. Can do. The compositions of the first soft magnetic layer 114a and the second soft magnetic layer 114c include a Co-based alloy such as CoTaZr, a Co-Fe based alloy such as CoCrFeB, and a Ni-Fe such as a [Ni-Fe / Sn] n multilayer structure. A system alloy or the like can be used.

  The pre-underlayer 116 is a non-magnetic alloy layer, and acts to protect the soft magnetic layer 114 and the easy magnetization axis of the hexagonal close packed structure (hcp structure) included in the underlayer 118 formed thereon is a disk. A function for aligning in the vertical direction is provided. The pre-underlayer 116 preferably has a (111) plane having a face-centered cubic structure (fcc structure) or a (110) plane having a body-centered cubic structure (bcc structure) parallel to the main surface of the disk substrate 110. Further, the pre-underlayer 116 may have a configuration in which these crystal structures and amorphous are mixed. The material of the front ground layer can be selected from Ni, Cu, Pt, Pd, Zr, Hf, Nb, and Ta. Furthermore, it is good also as an alloy which contains these metals as a main component and contains any one or more additional elements of Ti, V, Ta, Cr, Mo, and W. For example, NiW, CuW, CuCr as the fcc structure, and Ta as the bcc structure can be suitably selected.

  The underlayer 118 has an hcp structure, and has a function of growing a Co hcp crystal of the magnetic recording layer 122 as a granular structure. Therefore, the higher the crystal orientation of the underlayer 118, that is, the more the (0001) plane of the crystal of the underlayer 118 is parallel to the main surface of the disk substrate 110, the more the orientation of the magnetic recording layer 22 is improved. Can do. Ru is a typical material for the underlayer, but in addition, it can be selected from RuCr and RuCo. Since Ru has an hcp structure and the lattice spacing of crystals is close to Co, a magnetic recording layer containing Co as a main component can be well oriented.

  When the underlayer 118 is made of Ru, a two-layer structure made of Ru can be obtained by changing the gas pressure during sputtering. Specifically, when forming the second base layer 118b on the upper layer side, the Ar gas pressure is set higher than when forming the first base layer 118a on the lower layer side. When the gas pressure is increased, the free movement distance (mean free process) of the plasma ions to be sputtered is shortened, so that the film formation rate is reduced and the crystal orientation can be improved. Further, by increasing the pressure, the size of the crystal lattice is reduced. Since the size of the Ru crystal lattice is larger than that of the Co crystal lattice, if the Ru crystal lattice is made smaller, it approaches that of Co, and the crystal orientation of the Co granular layer can be further improved.

The nonmagnetic granular layer 120 is a nonmagnetic granular layer. A nonmagnetic granular layer is formed on the hcp crystal structure of the underlayer 118, and the granular layer of the first magnetic recording layer 122a is grown thereon, so that the magnetic granular layer can be grown from the initial growth stage (rise). Has the effect of separating. The composition of the nonmagnetic granular layer 120 can be a granular structure by forming a grain boundary by segregating a nonmagnetic substance between nonmagnetic crystal grains made of a Co-based alloy. In particular, CoCr—SiO ₂ and CoCrRu—SiO ₂ can be preferably used, and Rh (rhodium), Pd (palladium), Ag (silver), Os (osmium), Ir (iridium), Au (in addition to Ru) Gold) can also be used. A nonmagnetic substance is a substance that can form a grain boundary around magnetic grains so that exchange interaction between magnetic grains (magnetic grains) is suppressed or blocked, and is cobalt (Co). Any non-magnetic substance that does not dissolve in solution can be used. Examples thereof include silicon oxide (SiOx), chromium (Cr), chromium oxide (CrO ₂ ), titanium oxide (TiO ₂ ), zircon oxide (ZrO ₂ ), and tantalum oxide (Ta ₂ O ₅ ).

The magnetic recording layer 122 has a columnar granular structure in which a nonmagnetic substance is segregated around magnetic grains of a hard magnetic material selected from a Co-based alloy, an Fe-based alloy, and a Ni-based alloy to form a grain boundary. It is a magnetic layer. By providing the nonmagnetic granular layer 120, the magnetic grains can be continuously epitaxially grown from the granular structure. In the present embodiment, the first magnetic recording layer 122a and the second magnetic recording layer 122b having different compositions and film thicknesses are used. The first magnetic recording layer 122a and the second magnetic recording layer 122b are all non-magnetic materials such as oxides such as SiO ₂ , Cr ₂ O ₃ , TiO ₂ , B ₂ O ₃ , Fe ₂ O ₃ , BN, etc. Nitride and carbides such as B ₄ C ₃ can be preferably used.

  The continuous layer 124 is a layer (also referred to as a continuous layer) that is magnetically continuous in the in-plane direction on the magnetic recording layer 122 having a granular structure. The continuous layer 124 is not always necessary, but by providing it, in addition to the high density recording property and low noise property of the magnetic recording layer 122, the reverse domain nucleation magnetic field Hn is improved, the heat-resistant fluctuation property is improved, and the overwrite property is improved. Can be improved.

  The continuous layer 124 may not be a single layer but may be a CGC structure (Coupled Granular Continuous) that forms a thin film (continuous layer) exhibiting high perpendicular magnetic anisotropy and high saturation magnetization MS. The CGC structure is an exchange energy control layer comprising a magnetic recording layer having a granular structure, a thin film coupling control layer made of a nonmagnetic material such as Pd or Pt, and an alternating laminated film in which thin films of CoB and Pd are laminated. It can consist of.

  The medium protective layer 126 can be formed by forming a carbon film by a CVD method while maintaining a vacuum. The medium protective layer 126 is a protective layer for protecting the perpendicular magnetic recording layer from the impact of the magnetic head. In general, carbon deposited by the CVD method has improved film hardness as compared with that deposited by the sputtering method, so that the magnetic recording layer 122 can be more effectively protected against the impact from the magnetic head.

  In the present embodiment, the gripper included in the carrier constituting the CVD apparatus is a laminated structure made of a plurality of metals, like the DC magnetron sputtering apparatus 200 described above, and the metal constituting the surface layer of the gripper is the gripper of the gripper. A configuration having higher thermal conductivity than the metal constituting the lower layer can be employed.

  As a result, the lower layer constituting the gripper has springiness (elasticity), and the surface layer in contact with the disk base 110 can increase the thermal conductivity. Therefore, it is possible to provide a gripper with improved thermal conductivity while ensuring the spring property necessary for holding the disk base 110. As a result, the temperature of the disk substrate 110 can be easily raised in advance, the reactivity of the reaction gas can be increased, and the medium protective layer 126 with high hardness can be obtained.

  The lubricating layer 128 can be formed of PFPE (perfluoropolyether) by dip coating. PFPE has a long chain molecular structure and binds with high affinity to N atoms on the surface of the medium protective layer 126. Due to the action of the lubricating layer 128, even if the magnetic head comes into contact with the surface of the perpendicular magnetic recording medium 100, damage or loss of the medium protective layer 126 can be prevented.

  Through the above manufacturing process, the temperature of the disk substrate 110 can be brought close to a temperature suitable for each film forming process in the film forming process of the perpendicular magnetic recording medium 100, and a high quality perpendicular magnetic recording medium 100 can be obtained. it can.

  Although the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, it goes without saying that the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Understood.

  For example, in the above embodiment, the perpendicular magnetic recording medium 100 is used as the magnetic disk, but an in-plane magnetic disk may be used.

  Moreover, in the said embodiment, although the sputtering apparatus 200 and CVD apparatus are used as a vacuum film-forming apparatus, it is not limited to this, You may use an etching apparatus and an ion implantation apparatus.

  The present invention can be used as a method of manufacturing a magnetic recording medium mounted on an HDD or the like and as a magnetic recording medium.

It is a figure explaining the structure of a perpendicular magnetic recording medium. It is explanatory drawing for demonstrating the DC magnetron sputtering apparatus concerning this embodiment. It is explanatory drawing for demonstrating the carrier and gripper concerning this embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Perpendicular magnetic recording medium 110 ... Disk base | substrate 112 ... Adhesion layer 114 ... Soft magnetic layer 114a ... First soft magnetic layer 114b ... Spacer layer 114c ... Second soft magnetic layer 116 ... Pre-underlayer 118 ... Underlayer 118a ... First Underlayer 118b ... second underlayer 120 ... nonmagnetic granular layer 122 ... magnetic recording layer 122a ... first magnetic recording layer 122b ... second magnetic recording layer 124 ... continuous layer 126 ... medium protective layer 128 ... lubricating layer 200 ... DC magnetron Sputtering apparatus 202 ... Chamber 204 ... Gas inlet 206 ... Exhaust outlet 208 ... Carrier 210 ... Target 212 ... Shield 214 ... Magnet 216 ... Gripper 216a ... Gripper surface layer 216b ... Gripper lower layer

Claims (5)

A method of manufacturing a magnetic recording medium including a film forming step of forming at least a magnetic recording layer on a substrate using a vacuum film forming apparatus,
In the film forming step,
A gripper attached to a carrier for holding the substrate of the vacuum film forming apparatus is brought into contact with the substrate to hold the substrate;
The method of manufacturing a magnetic recording medium, wherein the gripper has a laminated structure composed of a plurality of metals, and the metal constituting the surface layer of the gripper has higher thermal conductivity than the metal constituting the lower layer of the gripper.   2. The magnetic recording medium according to claim 1, wherein the metal constituting the surface layer of the gripper is composed of a single element selected from aluminum, copper, silver, and gold, or an alloy containing the element. Production method. The metal constituting the lower layer of the gripper is nickel as a main component,
3. The method of manufacturing a magnetic recording medium according to claim 1, wherein the magnetic recording medium is made of an alloy containing an element selected from iron, chromium, niobium, and molybdenum.   4. The manufacturing of a magnetic recording medium according to claim 1, wherein the vacuum film forming apparatus is one of a group of a sputtering apparatus, a CVD apparatus, an etching apparatus, and an ion implantation apparatus. Method.   A magnetic recording medium manufactured using the method for manufacturing a magnetic recording medium according to claim 1.

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