JP2009284678A - Laminated type electrostatic motor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laminated type electrostatic motor that safely continues operation even when electric abnormal conditions occur in a part of a unit motor structure. <P>SOLUTION: The laminated type electrostatic motor 10 includes a power circuit 34 for applying three-phase AC voltage to a plurality of electrodes 18, 22 that the stators 14 and movers 16 of a plurality of unit motor structures 12 have. The power circuit 34 includes a shut off part 60 individually provided to all the stator power lines 36 that are connected to a plurality of electrodes 18 of the stators 14 of the respective unit motor structures 12, and another shut off part 62 individually provided to all the mover power lines 38 that are connected to a plurality of electrodes 22 of the movers 16 of the respective unit motor structures 12. These shut off parts 60, 62 have a function to individually shut off the corresponding stator power lines 36 and mover power lines 38 relative to the overcurrent exceeding a rated current. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a laminated electrostatic motor.

  In an electrostatic motor, a configuration is known in which a stator and a mover each having a plurality of electrodes (generally belt-like or line-like electrodes) are installed so as to be relatively movable in a face-to-face arrangement in which the respective electrode groups face each other. Yes. For example, Patent Document 1 discloses a stator in which a plurality of strip electrodes are embedded in a plate-like insulator at equal intervals, and a movable element in which a plurality of strip electrodes are embedded in a plate-like insulator at equal intervals. The electrostatic motor formed by facing each other so as to be relatively movable is disclosed. Patent Document 1 further discloses a stacked electrostatic motor including a plurality of electrostatic motors (that is, unit motor structures) in which a stator and a moving element are arranged to face each other for the purpose of increasing motor output. Is disclosed.

  The electrostatic motor of the type disclosed in Patent Document 1 is driven by a three-phase alternating current from a power circuit including a power source to, for example, three parallel electrodes with respect to each electrode group of a stator and a mover arranged face to face. By applying a voltage to generate positive and negative electrostatic forces alternately between the opposing electrodes, a driving force is generated in the moving element in the alignment direction of the electrode group. In this configuration, the arrangement interval of the electrode groups and the gap between the stator and the mover are set according to the output required by the electrostatic motor, but in most cases, the arrangement interval of the electrode groups is several. The gap between the stator and the mover is about several tens of μm to several hundreds of μm. On the other hand, the drive voltage applied to these electrode groups is generally several hundred to several thousand volts. In some cases, the stator and the mover are used in a state of being immersed in an insulating liquid for the purpose of preventing discharge due to gas breakdown between the stator and the mover.

Japanese Unexamined Patent Publication No. 6-78566

  In the above-described conventional electrostatic motor, for example, if the insulator carrying the electrode group contains voids or foreign matter, or if the electrode has fine convex portions due to scratches or the like, the motor operation is continued. In addition, there is a concern that the partial discharge is repeated in the voids and foreign matter of the insulator, the fine convex portions of the electrode, and the like, causing dielectric breakdown in the insulator and short-circuiting the electrodes in different phases. In addition, when there is a defect in the insulating liquid arranged in the gap between the stator and the mover, there is a possibility that the stator electrode and the mover electrode are short-circuited due to dielectric breakdown of the insulating liquid. . Furthermore, when the housing structure including the support and the shaft that supports the stator and the mover is made of a good electrical conductor, there is a concern that a ground fault may occur due to discharge or the like.

  When such a short circuit or a ground fault occurs in the electrostatic motor, an appropriate drive voltage cannot be applied and the operation may be stopped. In particular, since a multilayer electrostatic motor has a structure in which a plurality of unit motor structures are connected to each other, even if a short circuit or a ground fault occurs in only one unit motor structure, the multilayer electrostatic motor There is a risk that the entire motor cannot continue to operate.

  An object of the present invention is to provide a laminated electrostatic motor that can continue operation safely even when an electrical abnormality such as a short circuit or a ground fault occurs in some unit motor structures. Is to provide.

  In order to achieve the above object, the invention according to claim 1 includes a plurality of unit motor structures each including a stator having a plurality of electrodes and a mover having a plurality of electrodes in a stacked state. In a stacked electrostatic motor having a power circuit for applying a plurality of phases to a plurality of electrodes of each of a plurality of unit motor structure stators and movers, the stator and mover in a unit motor structure When the total number of phases of the voltage applied to each of the plurality of electrodes is N, the power circuit is connected to the corresponding electrode to apply the N-phase voltage to the stator for each unit motor structure. A plurality of stator power lines, a plurality of mover power lines connected to corresponding electrodes to apply an N-phase voltage to the mover, and an (N-1) phase for each of the stator and the mover. Used to apply the above voltage At least one of a predetermined number of stator power lines and a predetermined number of mover power lines, and at least one of the predetermined number of stator power lines and the predetermined number of mover power lines individually with respect to an overcurrent. A laminated electrostatic motor is provided, characterized in that the laminated electrostatic motor is provided with a blocking portion for blocking.

  According to a second aspect of the present invention, in the stacked electrostatic motor according to the first aspect, the power circuit is provided for each of all the stator power lines connected to the plurality of electrodes of the stator of each unit motor structure. In addition, a laminated electrostatic motor including a blocking unit is provided.

  According to a third aspect of the present invention, in the stacked electrostatic motor according to the first or second aspect, the power circuit includes all the movable body power lines connected to the plurality of electrodes of the movable body of each unit motor structure. Each of which is provided with a blocking unit.

  According to a fourth aspect of the present invention, in the stacked electrostatic motor according to the first aspect, the power circuit is used to apply a voltage of (N-1) phase to the stator of each unit motor structure. Provided is a laminated electrostatic motor provided with a blocking portion in each of a predetermined number of stator power lines.

  According to a fifth aspect of the present invention, in the stacked electrostatic motor according to the first or fourth aspect, the power circuit applies an (N-1) phase voltage to the mover of each unit motor structure. Provided is a stacked electrostatic motor provided with a blocking portion for each of a predetermined number of moving power lines used.

  According to a sixth aspect of the present invention, in the stacked electrostatic motor according to any one of the first to fifth aspects, the stator has a plurality of power supply terminals for applying an N-phase voltage to the plurality of electrodes. Each of the stator power lines includes each of a plurality of power supply terminals, and the blocking unit includes a predetermined number of power supply terminals used for applying a voltage of (N-1) phase or higher to the stator, Provided is a stacked electrostatic motor provided separately from a power source connected to a predetermined number of stator power lines.

  A seventh aspect of the present invention is the laminated electrostatic motor according to any one of the first to sixth aspects, wherein the movable element has a plurality of power supply terminals for applying an N-phase voltage to the plurality of electrodes. Each of the mover power lines includes each of a plurality of power supply terminals, and the blocking unit includes a predetermined number of power supply terminals used to apply a voltage of (N-1) phase or more to the mover, Provided is a laminated electrostatic motor provided separately from a power source connected to a predetermined number of moving element power lines.

  According to an eighth aspect of the present invention, in the laminated electrostatic motor according to any one of the first to fifth aspects, the stator has a plurality of power supply terminals for applying an N-phase voltage to the plurality of electrodes. Each of the stator power lines includes each of a plurality of power supply terminals, and the blocking unit includes a predetermined number of power supply terminals used for applying a voltage of (N-1) phase or higher to the stator, Provided is a laminated electrostatic motor that is individually provided between a predetermined number of electrodes connected to the predetermined number of power supply terminals.

  A ninth aspect of the present invention is the laminated electrostatic motor according to any one of the first to fifth and eighth aspects, wherein the movable element includes a plurality of electrodes for applying an N-phase voltage to the plurality of electrodes. A power supply terminal is provided, each of the moving element power lines includes each of a plurality of power supply terminals, and the blocking unit is a predetermined number of power supply terminals used for applying a voltage of (N-1) phase or more to the movable element. And a predetermined number of electrodes connected to the predetermined number of power supply terminals are provided separately.

  According to a tenth aspect of the present invention, in the stacked electrostatic motor according to any one of the first to ninth aspects, each of the plurality of stator power lines provided in each unit motor structure includes a stator. A plurality of electrodes having a main line common to a plurality of same-phase electrodes to which a voltage of the same phase is applied, and a plurality of branch lines branched from the main line and connected to the same-phase electrodes, Provided is a laminated electrostatic motor provided on a main line.

  According to an eleventh aspect of the present invention, in the stacked electrostatic motor according to any one of the first to tenth aspects, each of the plurality of movable element power lines provided in each unit motor structure includes a movable element. A plurality of electrodes having a main line common to a plurality of same-phase electrodes to which a voltage of the same phase is applied, and a plurality of branch lines branched from the main line and connected to the same-phase electrodes, Provided is a laminated electrostatic motor provided on a main line.

  According to a twelfth aspect of the present invention, in each of the stacked electrostatic motors according to any one of the first to fifth, eighth and ninth aspects, each of the plurality of stator power lines provided in each unit motor structure includes: A main line common to a plurality of same-phase electrodes to which a voltage of the same phase is applied among a plurality of electrodes of the stator, and a plurality of branch lines branched from the main line and connected to the same-phase electrodes Provided is a stacked electrostatic motor in which a blocking part is provided in each of a plurality of branch lines.

  According to a thirteenth aspect of the present invention, in the stacked electrostatic motor according to any one of the first to fifth, eighth, ninth, and twelfth aspects, a plurality of mover power lines provided in each unit motor structure are provided. Each of the plurality of electrodes of the moving element includes a main line common to a plurality of the same phase electrodes to which the same phase voltage is applied, and a plurality of branch lines branched from the main line and connected to the same phase electrodes. And a laminated electrostatic motor in which a blocking portion is provided on each of the plurality of branch lines.

  A fourteenth aspect of the present invention provides the multilayer electrostatic motor according to any one of the first to thirteenth aspects, wherein the blocking section includes a fuse structure.

  According to the laminated electrostatic motor of the present invention, a predetermined number of stator power lines used for applying a voltage of (N-1) phase or more to each of the stator and the mover of each unit motor structure. Since at least one of the predetermined number of mover power lines is individually provided with a blocking portion, an electrical abnormality such as a short circuit or a ground fault occurs in some unit motor structures, and the stator power line or the mover power Even when an overcurrent such as a short-circuit current flows through the wire, an appropriate drive voltage can be applied to the remaining electrode group by electrically disconnecting the electrode that has caused a short-circuit or ground fault from the power source. The operation of the stacked electrostatic motor can be safely continued with another normal unit motor structure.

  In particular, when all of the stator power lines and the rotor power lines connected to the individual stator and mover electrode groups are each provided with a blocking portion, electrical abnormalities such as short circuits and ground faults are caused. Regardless of the position, combination, number, etc., of the generated electrodes on the stator and moving element (ie, the phase of the drive voltage), the electrodes that have caused short circuits or ground faults are always removed from the power supply. It can be surely electrically disconnected.

  On the other hand, each of a predetermined number of stator power lines or mover power lines used for applying a voltage of the (N-1) phase to the stator or mover of each unit motor structure includes a blocking unit. In this case, there is a difference in the operational effect depending on the position (that is, the phase of the drive voltage) and the combination of the electrode that has caused an electrical abnormality such as a short circuit or a ground fault on the stator and the moving element. Since the number can be reduced, it is advantageous in terms of manufacturing cost and maintenance cost.

  If the shut-off unit is separately provided between the power supply terminal provided on the stator or the moving element and the power source connected to the stator power line or the moving element power line, the existing general configuration is provided. A laminated electrostatic motor can be manufactured using a stator or a moving element and a separate blocking part.

  On the other hand, if the interrupting part is provided separately between the power supply terminal provided on the stator or the moving element and the electrode connected to the power supply terminal, a separate part of the interrupting part becomes unnecessary, so that the power circuit The number of parts can be reduced, and it is possible to cope with a case where it is spatially difficult to install a blocking part of another part.

  If the shut-off portions are provided on the main line common to a plurality of identical-phase electrodes to which the same-phase voltage is applied in the stator power line or the mover power line, the total number of shut-off portions can be reduced. On the other hand, if the breaker is provided on the branch line that branches off from the main line, only the electrode that has caused a short circuit or ground fault can be disconnected from the power supply, so the output of the stacked electrostatic motor is normal after disconnecting the electrode. The amount of increase in drive voltage required to maintain the same level as during operation can be reduced.

  If a breaker having a fuse structure is adopted, the fuse structure is automatically blown by overcurrent by simply connecting the fuse structure directly to the stator power line or the mover power line, and the stator power line or the mover. Since the power line can be cut off, no dedicated wiring for the cut-off part is required.

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Corresponding components are denoted by common reference symbols throughout the drawings.
Referring to the drawings, FIG. 1 is a perspective view schematically showing a stacked electrostatic motor 10 according to a first embodiment of the present invention, and FIG. 2 is a diagram showing a plurality of unit motor structures 12 of the stacked electrostatic motor 10. It is a figure showing a power circuit typically. The laminated electrostatic motor 10 according to the illustrated embodiment has a configuration that operates with a three-phase AC power supply. However, the laminated electrostatic motor according to the present invention operates with a power supply of a plurality of phases other than three phases. It is also possible to have a configuration to

  As shown in FIGS. 1 and 2, the laminated electrostatic motor 10 includes a plurality of unit motor structures 12 (five in FIG. 1) each including a single stator 14 and a single mover 16. Prepare in a non-contact state. The stator 14 of each unit motor structure 12 includes a plurality of electrodes 18 and a plurality of power supply terminals 20 for applying three-phase voltages to the electrodes 18. The mover 16 of each unit motor structure 12 includes a plurality of electrodes 22 and a plurality of power supply terminals 24 for applying three-phase voltages to the electrodes 22. The laminated electrostatic motor 10 has a configuration of a rotary motor in which a plurality of moving elements 16 rotate about an axis with respect to a plurality of stators 14 (arrow α).

  The stator 14 is an annular plate-like member having a substantially circular outer peripheral edge 14 a and a substantially circular inner peripheral edge 14 b concentrically with respect to the axis 14 c, and has an annular contour insulating substrate that supports the plurality of electrodes 18 and the power supply terminals 20. 26. The insulating substrate 26 is a flexible thin plate made of glass epoxy, polyimide, or the like. For example, a plurality of (3n: n: n Is a natural number) rectangular band-shaped electrodes 18 that are radially formed around the axis line 14c at equal intervals in the circumferential direction (not shown), and three power supply terminals 20 are arranged in the radial direction of the region where the electrodes 18 are formed. It is formed by being properly dispersed in a region along the outer peripheral edge 14a of the stator 14 on the outside. Furthermore, by covering the entire surface of the insulating substrate 26 with an insulating layer such as an epoxy resin, the stator 14 having a configuration in which the electrode group 18 is embedded in the insulator in a predetermined alignment as shown in FIG. 2 is produced. .

  The moving element (that is, the rotor) 16 is an annular plate-like member having a substantially circular outer peripheral edge 16 a and a substantially circular inner peripheral edge 16 b concentrically with respect to the axis 16 c, and carries a plurality of electrodes 22 and power supply terminals 24. It has an insulating substrate 28 with an annular shape. The insulating substrate 28 is a flexible thin plate made of glass epoxy, polyimide, or the like. For example, a plurality of (3n: n: n) are formed on the surface of the insulating substrate 28 by a procedure according to a known (rigid or flexible) printed circuit board manufacturing method. Is a natural number of rectangular belt-like electrodes 22 that are radially formed around the axis 16c at equal intervals in the circumferential direction (not shown), and three power supply terminals 24 are arranged in the radial direction of the region where the electrodes 22 are formed. On the inner side, it is formed by being appropriately dispersed in a region along the inner peripheral edge 16b of the moving element 16. Furthermore, by covering the entire surface of the insulating substrate 28 with an insulating layer such as an epoxy resin, as shown in FIG. 2, the movable element 16 having a configuration in which the electrode group 22 is embedded in an insulator in a predetermined alignment arrangement is produced. .

  The outer diameter of the outer peripheral edge 16a and the inner diameter of the inner peripheral edge 16b of the mover 16 are smaller than the outer diameter of the outer peripheral edge 14a and the inner peripheral edge 14b of the stator 14, respectively. Further, each electrode 18 of the stator 14 and each electrode 22 of the movable element 16 have substantially the same shape and size, and the former electrode group 18 and the latter electrode group 22 are at the same interval. Arranged in the same arrangement form.

  In each unit motor structure 12, the stator 14 and the mover 16 are arranged so that the electrode groups 18 and 22 face each other and the axial lines 14c and 16c thereof are aligned with each other. 2) are arranged to face each other via relative movement. The plurality of unit motor structures 12 are accommodated in the housing structure 30 (FIG. 1) in a state where the axis lines 14c and 16c of the stator 14 and the mover 16 included in each unit motor structure 12 are matched with each other. Thus, the laminated electrostatic motor 10 is configured. The housing structure 30 fixedly supports the stators 14 of the plurality of unit motor structures 12, and supports the movers 16 of the plurality of unit motor structures 12 so as to be movable with respect to the stator 14. The housing structure 30 is provided with a shaft 32 connected to the plurality of moving elements 16. A plurality of unit motor structures 12 are immersed in an insulating liquid made of dimethylpolysiloxane, fluorocarbon, or the like for the purpose of preventing discharge due to gas breakdown between the stator 14 and the movable element 16 that face each other. In a state, it can be accommodated in the housing structure 30.

  The stacked electrostatic motor 10 includes a power circuit 34 for applying a three-phase AC voltage to the plurality of electrodes 18 and 22 included in each of the stator 14 and the movable element 16 of the plurality of unit motor structures 12. The power circuit 34 includes, for each unit motor structure 12, three stator power lines 36 connected to the corresponding electrodes 18 to apply a three-phase voltage to the stator 14, and a three-phase to the mover 16. The three power lines 38 (only one is shown in FIG. 1) are connected to the corresponding electrodes 22 to apply the above voltage. Further, the power circuit 34 includes a stator power source (three-phase AC power source) 40 connected to a plurality of sets (five sets in FIG. 1) of stator power lines 36 provided in the plurality of unit motor structures 12, and a stator power source. The power source 42 is independent from the power source 42 and includes a power source (three-phase AC power source) 42 connected to a plurality of sets of power source power lines 38 provided in the plurality of unit motor structures 12.

  Each of the set (three) of stator power lines 36 provided in each unit motor structure 12 is patterned on the insulating substrate 26 of the stator 14 to lead out the lead wires 44 that connect the electrodes 18 of the same phase. And a power supply terminal 20 formed at the end of the lead wire 44 and a connection line 46 that connects the power supply terminal 20 and the stator power supply 40. The lead-out line 44 and the connection line 46, together with the power supply terminal 20, are a plurality of same-phase electrodes 18-1, 18-2, or 18-3 to which the same-phase voltage is applied among the plurality of electrodes 18 of the stator 14. The main line 48 common to (FIG. 2) is comprised. Each stator power line 36 further has a plurality of branch lines 50 branched from the main line 48 (lead line 44) and individually connected to the same-phase electrodes 18-1, 18-2 or 18-3.

  In addition, each of the set (three) of moving element power lines 38 provided in each unit motor structure 12 is a pattern formed on the insulating substrate 28 of the moving element 16 to connect the electrodes 22 of the same phase. The line 52 includes a power supply terminal 24 formed at the end of the lead-out line 52, and a connection line 54 that connects the power supply terminal 24 and the mover power source 42. The lead-out line 52 and the connection line 54, together with the power supply terminal 24, have a plurality of same-phase electrodes 22-1, 22-2, or 22-3 to which the same-phase voltage is applied among the plurality of electrodes 22 of the movable element 16. The main line 56 common to (FIG. 2) is comprised. Each mover power line 38 further includes a plurality of branch lines 58 branched from the main line 56 (lead line 52) and individually connected to the same-phase electrodes 22-1, 22-2, or 22-3.

  The power circuit 34 is supplied from the stator power source 40 common to the stators 14 of all the unit motor structures 12 by the stator power lines 36 laid three by three for the stators 14 of the individual unit motor structures 12. A drive voltage of three-phase alternating current is applied to the electrode group 18 of the stator 14, and all the unit motor structures 12 are provided by the mover power lines 38 laid three by three for the movers 16 of the individual unit motor structures 12. A three-phase AC drive voltage is applied to the electrode group 22 of each movable element 16 from a movable element power source 42 common to the movable elements 16.

  In the stacked electrostatic motor 10, a plurality of unit motor structures 12 are combined in the above-described relative arrangement with respect to the electrode groups 18 and 22 of the stator 14 and the mover 16 of each unit motor structure 12. By applying a three-phase AC voltage to the three electrodes 18 and 22 arranged in parallel and generating positive and negative electrostatic forces between the opposing electrodes 18 and 22 in an alternating manner, the movable member 16 has its electrode group 22. A driving force (that is, torque) in the alignment direction (that is, circumferential direction) is generated. Thereby, in the plurality of sets of unit motor structures 12, the plurality of moving elements 16 are centered on the axis 16 c with respect to the plurality of stators 14 while exhibiting the total driving force generated by the individual moving elements 16. Rotate to.

  As a characteristic configuration of the multilayer electrostatic motor 10 according to the first embodiment, the power circuit 34 includes all (three) stator powers connected to the plurality of electrodes 18 of the stator 14 of each unit motor structure 12. The interruption | blocking part 60 provided separately in the line | wire 36 is provided (FIG. 2). These interruption | blocking parts 60 have a function which interrupts | blocks the corresponding stator power line 36 individually with respect to the overcurrent exceeding a rated current. Further, the power circuit 34 includes a blocking portion 62 provided individually for all (three) mover power lines 38 connected to the plurality of electrodes 22 of the mover 16 of each unit motor structure 12 (FIG. 2). ). These interruption | blocking parts 62 have a function which interrupts | blocks the corresponding slider power line 38 individually with respect to the overcurrent exceeding a rated current.

  In the illustrated embodiment, in each unit motor structure 12, the blocking portions 60 provided individually on the three stator power lines 36 are provided between the three power supply terminals 20 of the stator 14 and the stator power supply 40. It is installed on each of the three connecting lines 46 (that is, a part of the main line 48) to be connected. Further, in each unit motor structure 12, the blocking section 62 provided individually for each of the three moving element power lines 38 connects between the three power supply terminals 24 of the moving element 16 and the moving element power supply 42. It is installed on each of the connecting lines 54 (that is, a part of the main line 56).

  In the illustrated embodiment, the interrupting portions 60 and 62 provided in the individual stator power lines 36 and the mover power lines 38 are each configured to include fuse structures 64 and 66 (FIG. 1). The fuse structures 64 and 66 function as part of the stator power line 36 and the mover power line 38, respectively, during normal operation of the multilayer electrostatic motor 10. On the other hand, when an overcurrent such as a short circuit current flows in the stator power line 36 or the mover power line 38 due to some abnormality such as a short circuit or a ground fault in the plurality of electrodes 18 and 22 of the stator 14 and the mover 16. The electrodes 18 and 22 that are automatically self-fused to cause a short circuit, a ground fault or the like are electrically disconnected from the power circuit 34 (and hence from the stator power supply 40 and the mover power supply 42).

  To explain with some specific examples, for example, in the moving element 16 of one unit motor structure 12, due to the voids and foreign matter of the insulator including the insulating substrate 28, the fine convex portion of the electrode 22, etc. When adjacent two-phase electrodes 22-1 and 22-2 are short-circuited, the blocking portions provided on the two mover power lines 38 connected to the electrodes 22-1 and 22-2, respectively. 62 fuse structures 66-1 and 66-2 are instantly blown by a short-circuit current. As a result, the two electrodes 22-1 and 22-2 that are short-circuited in the movable element 16 and the electrode group 22 in the same phase as the two electrodes 22-1, 22-2 are quickly disconnected from the movable element power source 42. The subsequent occurrence of a short circuit in 22-2 is reliably avoided. Then, the electrode group 22-1 and 22-2 of one movable element 16 that has caused an electrical abnormality due to a short circuit is quickly separated from the power circuit 34 in this manner, so that the electrode 22-1 in the movable element 16 is obtained. , 22-2, even after the occurrence of a short circuit, an appropriate drive voltage can be applied to the remaining electrode groups 18 and 22 that are not disconnected from the power circuit 34, so that the mover of another normal unit motor structure 12 can be applied. Due to the driving force (torque) that 16 continues to be generated, the laminated electrostatic motor 10 can continue to operate safely.

  Further, for example, in one unit motor structure 12, the electrodes 18-3 and 22-1 at adjacent positions are short-circuited due to dielectric breakdown in the gap G between the opposing stator 14 and the moving element 16. If this happens, the fuse structure of the interrupting portions 60 and 62 provided in one stator power line 36 and one mover power line 38 connected to the electrodes 18-3 and 22-1, respectively. 64-3 and 66-1 are instantaneously fused by a short-circuit current. As a result, the two electrodes 18-3 and 22-1 and the electrode groups 18 and 22 in the same phase as the short-circuited in the unit motor structure 12 are quickly disconnected from the stator power supply 40 and the mover power supply 42. Thus, the occurrence of a subsequent short circuit in both the electrodes 18-3 and 22-1 is reliably avoided. Then, the electrode groups 18-3 and 22-1 of one unit motor structure 12 in which an electrical abnormality has occurred due to a short circuit is quickly disconnected from the power circuit 34 in this manner, so that the electrode 18 in the unit motor structure 12 is obtained. -3, 22-1, even after the occurrence of a short circuit, it is possible to apply an appropriate drive voltage to the remaining electrode groups 18, 22 that are not disconnected from the power circuit 34, so that other normal unit motor structures 12 Due to the driving force (torque) continuously generated by the mover 16, the stacked electrostatic motor 10 can continue to operate safely.

  Further, when the housing structure 30 is made of a good electrical conductor, for example, when one electrode 22-2 is grounded with the housing structure 30 due to some factor in the moving element 16 of one unit motor structure 12. The fuse structure 66-2 of the interruption | blocking part 62 provided in the one moving element power line 38 connected to the said electrode 22-2 instantaneously fuses itself by a ground fault current. As a result, one electrode 22-2 that has caused a ground fault in the movable element 16 and the electrode group 22 in the same phase as the electrode 22-2 are quickly disconnected from the movable element power source 42, and the subsequent ground fault in the electrode group 22-2. Is reliably avoided. Then, the electrode group 22-2 of one movable element 16 that has caused an electrical abnormality due to a ground fault is quickly disconnected from the power circuit 34 in this manner, so that the ground fault of the electrode 22-2 in the movable element 16 is achieved. Even after the occurrence, an appropriate drive voltage can be applied to the remaining electrode groups 18 and 22 that are not separated from the power circuit 34, so that the drive force ( Torque), the laminated electrostatic motor 10 can continue to operate safely.

  In any of the cases described above, after the electrode groups 18 and 22 including the abnormality factor are electrically disconnected from the power circuit 34, the unit motor structure 12 including the electrode groups 18 and 22 includes the abnormality factor. When other electrode groups 18 and 22 that are not present remain, a driving voltage is applied to the remaining electrode groups 18 and 22, and the driving force of the movable element 16 (the electrostatic force generated by the remaining electrode groups 18 and 22 ( Torque). Therefore, by increasing the drive voltage of the power sources 40 and 42 by the amount to compensate for the decrease in the output of the unit motor structure 12 having the electrode groups 18 and 22 separated from the power circuit 34, the stacked electrostatic motor 10 The output can be maintained at the same level as during normal operation.

  As described above, the stacked electrostatic motor 10 includes all of the stator power lines 36 and the mover power lines 38 connected to the stator groups 14 and the electrode groups 18 and 22 of the mover 16 of each unit motor structure 12. Since each of them includes the interrupting portions 60 and 62, an electrical abnormality such as a short circuit or a ground fault occurs in some unit motor structures 12, and a short circuit current or the like is generated in the stator power line 36 or the mover power line 38. Even when an overcurrent flows, the electrodes 18 and 22 that have caused a short circuit or a ground fault are electrically disconnected from the power circuit 34 (and thus from the stator power supply 40 and the mover power supply 42), thereby remaining electrode groups. Appropriate drive voltages can be applied to 18 and 22, so that the operation of the stacked electrostatic motor 10 can be safely continued by another normal unit motor structure 12. In particular, in the laminated electrostatic motor 10, the positions (that is, the phase of the driving voltage), the combination, the number, etc., of the electrodes 18 and 22 on which the electrical abnormality such as a short circuit or a ground fault has occurred are fixed. In any case, the electrodes 18 and 22 that have caused a short circuit or a ground fault can be reliably disconnected from the power circuit 34 (power supplies 40 and 42).

  In the laminated electrostatic motor 10 described above, since the fuse structures 64 and 66 constituting the interrupting portions 60 and 62 can be configured to be small and light, for example, in a narrow space in the housing structure 30 (FIG. 1) The power line 36 and the mover power line 38 can be accommodated together. Further, since the fuse structures 64 and 66 are automatically blown by a short-circuit current only by being directly connected to the stator power line 36 and the mover power line 38, there is an advantage that no additional dedicated wiring is required. . However, the present invention is not limited to this. For example, various other configurations of the interrupting portions 60 and 62 that can interrupt the stator power line 36 and the mover power line 38 against an overcurrent, such as a semiconductor switch, are provided. Can be adopted.

  Further, in the laminated electrostatic motor 10 described above, the power circuit 34 includes one stator power source 40 and one mover power source 42 for the plurality of unit motor structures 12. However, the present invention is not limited to this, and as shown in FIG. 3 as a modified example, the power circuit 34 includes a plurality of sets of stator power lines 36 and a plurality of sets of movers provided in the plurality of unit motor structures 12. It can also be set as the structure which has the common power supply 68 connected to both the power lines 38. FIG. Also in this configuration, the blocking units 60 and 62 are provided in each of the set (three) of the stator power lines 36 and the set (three) of the mover power lines 38 provided in each unit motor structure 12. be able to.

  Further, the laminated electrostatic motor 10 described above is configured as a rotary motor in which a plurality of moving elements 16 rotate about an axis with respect to a plurality of stators 14 (arrow α). The electric motor is not limited to a rotary motor, and may be configured as a linear motion motor in which a plurality of movers move linearly with respect to a plurality of stators.

  Further, in the laminated electrostatic motor 10 described above, the blocking portions 60 and 62 are connected to the power supply terminals 20 and 24 provided on the stator 14 and the mover 16, the stator power line 36 and the mover power line 38. Since it is provided separately between the stator power source 40 and the mover power source 42, a fixed having an existing general configuration (particularly, a configuration of conductor patterns such as the electrode groups 18 and 22 and the power supply terminals 20 and 24). The stacked electrostatic motor 10 can be manufactured by using the child 14 and the moving member 16 and the blocking portions 60 and 62 made of different parts. However, the present invention is not limited to this, and as shown in FIG. 4 and FIG. 5 as modifications, the power supply terminals 20 and 24 provided with the blocking portions 60 and 62 on the stator 14 and the mover 16, and the power supply terminals It can also be set as the structure provided separately between the electrodes 18 and 22 connected to 20 and 24. FIG.

  FIG. 4 shows another modification of the multilayer electrostatic motor 10 according to the first embodiment. The laminated electrostatic motor 10A according to the illustrated modification is the same as that of the first embodiment except for the configuration related to the blocking portions 60 and 62 of the stator power line 36 and the mover power line 38 provided in each unit motor structure 12. Has substantially the same configuration as that of the stacked electrostatic motor 10 according to FIG. Accordingly, corresponding constituent elements are denoted by common reference numerals and description thereof is omitted.

  In the laminated electrostatic motor 10 </ b> A according to the illustrated modified example, in each unit motor structure 12, the blocking portions 60 provided individually on the three stator power lines 36 correspond to the three power supply terminals 20 of the stator 14. Each of the three lead wires 44 (that is, a part of the main line 48) connecting the phase electrode group 18 is installed. Further, in each unit motor structure 12, the blocking portions 62 provided individually on the three moving element power lines 38 connect between the three power supply terminals 24 of the moving element 16 and the electrode group 22 of the corresponding phase. Installed on each of the three lead wires 52 (that is, a part of the main line 56).

  In the laminated electrostatic motor 10 </ b> A, each of the blocking portions 60 and 62 provided on the individual stator power lines 36 and the mover power lines 38 includes fuse structures 64 and 66. Similar to the fuse structures 64 and 66 in the multilayer electrostatic motor 10, the fuse structures 64 and 66 are respectively part of the stator power line 36 and the mover power line 38 during the normal operation of the multilayer electrostatic motor 10 </ b> A. On the other hand, when an overcurrent such as a short-circuit current flows through the stator power line 36 and the mover power line 38, the power circuit 34 automatically disconnects the electrodes 18 and 22 that have caused the overcurrent. Acts to detach from. Such fuse structures 64, 66 are formed, for example, by forming a part of the lead lines 44, 52 patterned on the insulating substrates 26, 28 of the stator 14 and the mover 16 as local fine lines thinner than the other parts. By doing so, each can be configured.

  Also with the laminated electrostatic motor 10A having the above-described configuration, the same effects as the laminated electrostatic motor 10 according to the first embodiment described above can be obtained. In particular, in the laminated electrostatic motor 10A, since it is not necessary to prepare the fuse structures 64 and 66 as separate parts, the number of parts of the power circuit 34 can be reduced, and separate parts are provided in the space in the housing structure 30 (FIG. 1). There is an advantage that it is possible to cope with a case where it is difficult to accommodate the fuse structures 64 and 66 of the above. In the laminated electrostatic motor 10A, as with the laminated electrostatic motor 10, all of the main lines 48 and 56 of the stator power line 36 and the mover power line 38 are provided with the blocking portions 60 and 62. There is an advantage that the total number of the blocking portions 60 and 62 can be reduced as compared with the configuration in which the blocking portions are provided for the electrodes 18 and 22.

  FIG. 5 shows still another modification of the multilayer electrostatic motor 10 according to the first embodiment. The laminated electrostatic motor 10B according to the illustrated modification is the same as that of the first embodiment except for the configuration related to the blocking portions 60 and 62 of the stator power line 36 and the mover power line 38 provided in each unit motor structure 12. Has substantially the same configuration as that of the stacked electrostatic motor 10 according to FIG. Accordingly, corresponding constituent elements are denoted by common reference numerals and description thereof is omitted.

  In the laminated electrostatic motor 10B according to the illustrated modification, in each unit motor structure 12, a plurality of (n pieces) of interrupting portions 60 provided individually for the three stator power lines 36 are provided in each stator power line 36. : N is a natural number). Further, in each unit motor structure 12, the blocking portions 62 individually provided for the three moving element power lines 38 are formed of a plurality (n: n is a natural number) of branch lines 58 included in each moving element power line 38. Installed in each.

  In the laminated electrostatic motor 10 </ b> B, the blocking portions 60 and 62 provided on the individual stator power lines 36 and the mover power lines 38 are each configured to include fuse structures 64 and 66. Similar to the fuse structures 64 and 66 in the multilayer electrostatic motor 10, the fuse structures 64 and 66 are respectively part of the stator power line 36 and the mover power line 38 during the normal operation of the multilayer electrostatic motor 10B. On the other hand, when an overcurrent such as a short-circuit current flows through the stator power line 36 and the mover power line 38 (particularly, the branch lines 50 and 58), it is automatically blown and becomes an overcurrent generation factor. The electrodes 18 and 22 act so as to be disconnected from the power circuit 34. Such fuse structures 64, 66 are formed, for example, by forming a part of the branch lines 50, 58 patterned on the insulating substrates 26, 28 of the stator 14 and the moving element 16 as local fine lines thinner than the other parts. By doing so, each can be configured.

  The laminated electrostatic motor 10 </ b> B having the above configuration also provides the same operational effects as the laminated electrostatic motor 10 according to the first embodiment described above. In particular, in the laminated electrostatic motor 10B, since it is not necessary to prepare the fuse structures 64 and 66 as separate parts, it is possible to reduce the number of parts of the power circuit 34 and separate parts in the space in the housing structure 30 (FIG. 1). There is an advantage that it is possible to cope with a case where it is difficult to accommodate the fuse structures 64 and 66 of the above. Furthermore, in the laminated electrostatic motor 10B, the blocking portions 60 and 62 are not branched lines but the main lines 48 and 56 (leading lines 44 and 52 and connecting lines 46 and 52) of the stator power line 36 and the mover power line 38. 50 and 58 are provided, it is possible to disconnect only the electrodes 18 and 22 that have caused the abnormality when the abnormality such as a short circuit occurs. Therefore, the drive voltage can be continuously applied to the remaining electrode groups 18 and 22 in the same phase as the electrodes 18 and 22 that cause abnormality in one unit motor structure 12, so that the electrodes that cause abnormality in one unit motor structure 12. Compared with the configuration of the stacked electrostatic motors 10 and 10A in which all of the electrodes 18 and 22 and the electrode groups 18 and 22 having the same phase as the power circuit 34 are separated from each other, the output of the stacked electrostatic motor 10B is the same level as that during normal operation. It is possible to reduce the amount of increase in drive voltage required for maintaining.

  FIG. 6 shows a laminated electrostatic motor 100 according to a second embodiment of the present invention. The laminated electrostatic motor 100 according to the second embodiment has a configuration other than the configuration of the power circuit 102 for applying voltages of a plurality of phases to a plurality of electrodes of each of a stator and a mover having a plurality of unit motor structures. The multilayer electrostatic motor 10 according to the first embodiment has substantially the same configuration. Accordingly, corresponding constituent elements are denoted by common reference numerals and description thereof is omitted as appropriate. Note that the laminated electrostatic motor 100 according to the illustrated embodiment has a configuration that operates with a three-phase AC power supply, but may also have a configuration that operates with a power supply of a plurality of phases other than three phases. In addition, the laminated electrostatic motor 100 according to the illustrated embodiment is configured as a rotary motor in which the plurality of moving elements 16 rotate about the axis with respect to the plurality of stators 14 (arrow α). Similar to the electric motor 10, it can also be configured as a linear motor in which a plurality of moving elements move linearly with respect to a plurality of stators.

  The power circuit 102 of the stacked electrostatic motor 100 includes three stator power lines 36 connected to corresponding electrodes 18 to apply a three-phase voltage to the stator 14 for each unit motor structure 12. , And three mover power lines 38 connected to the corresponding electrodes 22 to apply a three-phase voltage to the mover 16. Further, the power circuit 102 includes a stator power source (three-phase AC power source) 40 connected to a plurality of sets of stator power lines 36 provided in the plurality of unit motor structures 12, and a mobile power source independent of the stator power source 40. 42, and a mover power source (three-phase AC power source) 42 connected to a plurality of sets of mover power lines 38 provided in the plurality of unit motor structures 12.

  Each stator power line 36 is patterned on the insulating substrate 26 of the stator 14 to lead out the lead wires 44 that connect the electrodes 18 of the same phase to each other, the power supply terminal 20 formed at the end of the lead wire 44, A connection line 46 that connects the terminal 20 and the stator power supply 40, and a plurality that are branched from the lead line 44 (that is, a part of the main line 48) and individually connected to a plurality (n: n is a natural number) of electrodes 18 (N lines: n is a natural number) branch lines 50. Further, each moving element power line 38 is patterned on the insulating substrate 28 of the moving element 16 to connect the electrodes 22 of the same phase to each other, and the feeding terminal 24 formed at the end of the leading line 52. The connection line 54 that connects the power supply terminal 24 and the mover power source 42 and the lead wire 52 (that is, a part of the main line 56) are branched and individually connected to a plurality (n: n is a natural number) of the electrodes 22. And a plurality of (n: n is a natural number) branch lines 58.

  The power circuit 102 is connected to each of the stators 14 of each unit motor structure 12 from the stator power source 40 common to the stators 14 of all the unit motor structures 12 by three stator power lines 36 laid on the stator 14 of each unit motor structure 12. A drive voltage of three-phase alternating current is applied to the electrode group 18 of the stator 14, and all the unit motor structures 12 are provided by the mover power lines 38 laid three by three for the movers 16 of the individual unit motor structures 12. A three-phase AC drive voltage is applied to the electrode group 22 of each movable element 16 from a movable element power source 42 common to the movable elements 16.

  As a characteristic configuration of the laminated electrostatic motor 100 according to the second embodiment, the power circuit 102 includes a set (three) of stators connected to the plurality of electrodes 18 of the stator 14 of each unit motor structure 12. Any one of the power lines 36 (that is, used for applying any two-phase driving voltage of three-phase driving voltages to the stator 14) is provided with a cutoff provided individually for the stator power lines 36. The unit 60 is provided. These interruption | blocking parts 60 have a function which interrupts | blocks the corresponding stator power line 36 individually with respect to the overcurrent exceeding a rated current. In addition, the power circuit 102 includes any two (that is, three-phase) of a set (three) of the mover power lines 38 connected to the plurality of electrodes 22 of the mover 16 of each unit motor structure 12. (Which is used to apply one of the two driving voltages to the moving element 16). The blocking unit 62 is provided individually on the moving element power line 38. These interruption | blocking parts 62 have a function which interrupts | blocks the corresponding slider power line 38 individually with respect to the overcurrent exceeding a rated current. Note that the stator power line 36 and the mover power line 38 that are not provided with the blocking portions 60 and 62 permanently connect the corresponding electrodes 18 and 22 to the stator power supply 40 and the mover power supply 42.

  In the illustrated embodiment, in each unit motor structure 12, the blocking portions 60 that are individually provided on the two stator power lines 36 are the power supply terminals 20 of the electrode groups 18-1 and 18-2 of the stator 14. And the stator power supply 40 are installed on each of two connection lines 46 (that is, a part of the main line 48). Further, in each unit motor structure 12, the blocking unit 62 provided separately for each of the two moving element power lines 38 includes the feeding terminals 24 and the moving elements of the electrode groups 22-1 and 22-2 of the moving element 16. It is installed on each of two connection lines 54 (that is, a part of the main line 56) connecting the power source 42.

  In the illustrated embodiment, the interrupting portions 60 and 62 provided in the individual stator power lines 36 and the mover power lines 38 are each configured to include fuse structures 64 and 66 (FIG. 1). The fuse structures 64 and 66 function as part of the stator power line 36 and the mover power line 38, respectively, during normal operation of the multilayer electrostatic motor 10. On the other hand, when an overcurrent such as a short circuit current flows in the stator power line 36 or the mover power line 38 due to some abnormality such as a short circuit or a ground fault in the plurality of electrodes 18 and 22 of the stator 14 and the mover 16. The electrodes 18 and 22 that have automatically self-fused to cause a short circuit, a ground fault, and the like are electrically disconnected from the power circuit 102 (and thus from the stator power supply 40 and the mover power supply 42).

  To explain with some specific examples, for example, in the stator 14 of one unit motor structure 12, due to the voids and foreign matter of the insulator including the insulating substrate 26, the fine convex portion of the electrode 18, etc., When adjacent different-phase electrodes 18-2 and 18-3 are short-circuited, the fuse structure of the blocking portion 60 provided in one stator power line 36 connected to one electrode 18-2. 64-2 is instantaneously fused by a short-circuit current. As a result, the one electrode 18-2 that has caused a short circuit in the stator 14 and the electrode group 18 in the same phase as the electrode 18-2 are quickly disconnected from the stator power source 40, and the subsequent electrodes in both the electrodes 18-2 and 18-3 The occurrence of a short circuit is reliably avoided. Then, the electrode group 18-2 of one stator 14 that has caused an electrical abnormality due to a short circuit is quickly separated from the power circuit 102 in this manner, so that the electrodes 18-2 and 18-3 in the stator 14 are separated. Even after the occurrence of a short circuit between them, an appropriate driving voltage can be applied to the remaining electrode groups 18 and 22 that are not separated from the power circuit 102, and thus the mover 16 of another normal unit motor structure 12 continues to be generated. With the driving force (torque), the multilayer electrostatic motor 100 can continue to operate safely.

  Similarly, in the stator 14 of one unit motor structure 12, when adjacent different-phase electrodes 18-1 and 18-3 are short-circuited, one connected to one electrode 18-1. The fuse structure 64-1 of the interrupting portion 60 provided in the stator power line 36 is instantaneously self-blown by a short-circuit current, so that the electrode 18-1 and the electrode group 18 in the same phase as the electrode 18-1 are fed from the stator power source 40. Since it is separated quickly, the occurrence of a subsequent short circuit in both electrodes 18-1 and 18-3 is reliably avoided. Moreover, in the stator 14 of one unit motor structure 12, when adjacent different-phase electrodes 18-1 and 18-2 are short-circuited, they are connected to these electrodes 18-1 and 18-2. The fuse structures 64-1 and 64-2 of the interrupting portion 60 provided on the two stator power lines 36 are instantaneously self-blown by a short-circuit current, and the same as the electrodes 18-1 and 18-2 and the like. Since the phase electrode group 18 is quickly disconnected from the stator power supply 40, the occurrence of a subsequent short circuit in both the electrodes 18-1 and 18-2 is reliably avoided. In any case, after the occurrence of a short circuit, an appropriate drive voltage can be applied to the remaining electrode groups 18 and 22 that are not disconnected from the power circuit 102, so that the mover 16 of another normal unit motor structure 12 can be applied. Due to the driving force (torque) that continuously occurs, the multilayer electrostatic motor 100 can continue to operate safely. The same applies to the mover 16.

  Further, for example, in one unit motor structure 12, the electrodes 18-3 and 22-1 at adjacent positions are short-circuited due to dielectric breakdown in the gap G between the opposing stator 14 and the moving element 16. If this happens, the fuse structure 66-1 of the interrupting section 62 provided on one moving element power line 38 connected to the one electrode 22-1 is instantaneously blown by a short-circuit current. As a result, one of the electrodes 22-1 and the electrode group 22 in the same phase as the short-circuited electrode in the unit motor structure 12 are quickly disconnected from the mover power source 42, and thereafter the two electrodes 18-3 and 22-1. The occurrence of short circuit is reliably avoided. Then, the electrode group 22-1 of one unit motor structure 12 that has caused an electrical abnormality due to a short circuit is quickly separated from the power circuit 102 in this manner, so that the electrodes 18-3 and 22 in the unit motor structure 12 are obtained. Even after the occurrence of a short circuit between −1, an appropriate drive voltage can be applied to the remaining electrode groups 18 and 22 that are not disconnected from the power circuit 102, so that the mover 16 of another normal unit motor structure 12 can be applied. With the driving force (torque) that continues to occur, the multilayer electrostatic motor 100 can continue to operate safely.

  Similarly, in one unit motor structure 12, the electrodes 18-1, 22-3, 18-2, 22-3, 18-, 3 and 22-2, when one of them is short-circuited, one stator power line 36 or mover power line connected to one of the electrodes 18-1, 18-2 or 22-2 38, the fuse structure 64-1, 64-2, or 66-2 of the interrupting section 60 or 62 is instantaneously self-blown by a short circuit current, and the electrode 18-1, 18-2 or 22-2 and Since the same-phase electrode group 18 or 22 is quickly disconnected from the stator power source 40 or the mover power source 42, the occurrence of a subsequent short circuit in both the electrodes 18 and 22 is reliably avoided. Further, in one unit motor structure 12, electrodes 18-1, 22-2, 18-2, 22-2, 18-1, 18-1, When either 22-1 or 18-2 or 22-1 is short-circuited, one connected to both electrodes 18-1 or 18-2 and 22-1 or 22-2 The fuse structures 64-1 or 64-2 and 66-1 or 66-2 of the interrupting portions 60 and 62 provided on the stator power line 36 and the single rotor power line 38 are instantly blown by a short-circuit current. Then, since the electrodes 18-1 or 18-2 and 22-1 or 22-2 and the electrode groups 18 and 22 in the same phase as the electrodes 18-1 or 18-2 and 22-1 or 22-2 are quickly disconnected from the stator power supply 40 and the mover power supply 42, The subsequent occurrence of short circuit in the electrodes 18 and 22 is certain It is avoided. In any case, after the occurrence of a short circuit, an appropriate drive voltage can be applied to the remaining electrode groups 18 and 22 that are not disconnected from the power circuit 102, so that the mover 16 of another normal unit motor structure 12 can be applied. Due to the driving force (torque) that continuously occurs, the multilayer electrostatic motor 100 can continue to operate safely.

  In the laminated electrostatic motor 100, in one unit motor structure 12, the electrodes 18-3 and 22-3 located at close positions between the opposed stator 14 and the moving element 16 are short-circuited. In this case, since the stator power line 36 and the moving element power line 38 connected to the electrodes 18-3 and 22-3 are not provided with the blocking portions 60 and 62, the electrodes 18-3 and 22-2 It is difficult to remove 3 from the power circuit 102 and eliminate the short circuit. However, in particular, in a configuration in which a plurality of unit motor structures 12 are used by being immersed in an insulating liquid, the probability of short-circuiting between electrodes between the stator 14 and the movable element 16 facing each other is the stator 14 or the movement. Since it is significantly lower than the probability of occurrence of a short circuit between adjacent electrodes in the child 16, the laminated electrostatic motor 100 can provide a practically sufficient effect.

  Further, when the housing structure 30 (FIG. 1) of the multilayer electrostatic motor 100 is made of a good electric conductor, for example, in the moving element 16 of one unit motor structure 12, one electrode 22-2 is formed by the housing for some reason. In the case of a ground fault with the structure 30, the fuse structure 66-2 of the interrupting portion 62 provided in one moving element power line 38 connected to the electrode 22-2 is instantaneously caused by the ground fault current. Self-blown. As a result, one electrode 22-2 that has caused a ground fault in the movable element 16 and the electrode group 22 in the same phase as the electrode 22-2 are quickly disconnected from the movable element power source 42, and the subsequent ground fault in the electrode group 22-2. Is reliably avoided. Then, the electrode group 22-2 of one mover 16 that has caused an electrical abnormality due to a ground fault is quickly disconnected from the power circuit 102 in this manner, so that the ground fault of the electrode 22-2 in the mover 16 is achieved. Even after the occurrence, an appropriate driving voltage can be applied to the remaining electrode groups 18 and 22 that are not separated from the power circuit 102, and thus the driving force (moving force 16 generated by the mover 16 of another normal unit motor structure 12) ( Torque) allows the stacked electrostatic motor 100 to continue operation safely.

  Similarly, when one electrode 18-1, 18-2, or 22-1 in the stator 14 or the mover 16 of one unit motor structure 12 has a ground fault with the housing structure 30, the electrode Fuse structure 64-1, 64-2 or 66- of the interrupting section 60 or 62 provided in one stator power line 36 or the movable body power line 38 connected to 18-1, 18-2 or 22-1. 1 is instantaneously fused by the ground fault current, and the electrode 18-1, 18-2 or 22-1 and the electrode group 18 or 22 in the same phase as the electrode 18-1, 18-2 or 22-1 are quickly supplied from the stator power supply 40 or the mover power supply 42. Therefore, the subsequent occurrence of a ground fault in the electrode group 18 or 22 is reliably avoided. Also in this case, after the occurrence of the ground fault, an appropriate driving voltage can be applied to the remaining electrode groups 18 and 22 that are not separated from the power circuit 102, and thus the movable element 16 of another normal unit motor structure 12 can be applied. Due to the driving force (torque) that continuously occurs, the multilayer electrostatic motor 100 can continue to operate safely.

  In the laminated electrostatic motor 100, when the grounding fault occurs in the electrode 18-3 or 22-3 in the stator 14 or the moving member 16 of one unit motor structure 12, the electrode 18- Since the stator power line 36 or the mover power line 38 connected to 3 or 22-3 is not provided with the blocking portions 60 and 62, the electrode 18-3 or 22-3 is disconnected from the power circuit 102 and grounded. It is difficult to eliminate the tangle. However, in particular, in a configuration in which a plurality of unit motor structures 12 are used by being immersed in an insulating liquid, the probability that a ground fault will occur between the electrode of the stator 14 or the movable element 16 and an external good electric conductor is low. 14 or the mover 16 is significantly lower than the probability of occurrence of a short circuit between adjacent electrodes. Therefore, the stacked electrostatic motor 100 can provide a practically sufficient effect.

  As described above, the stacked electrostatic motor 100 includes a stator power line 36 and a mover power line 38 connected to the stator 14 of each unit motor structure 12 and the electrode groups 18 and 22 of the mover 16. Since any two of the stator power lines 36 and the mover power lines 38 are each provided with the blocking portions 60 and 62, they are adjacent to each other in the stator 14 or the mover 16 of some unit motor structures 12. Even when an electrical abnormality such as a short circuit occurs between the electrodes 18 and 22 and an overcurrent such as a short circuit current flows through the stator power line 36 or the mover power line 38, the electrodes 18 and 22 that have caused the short circuit or the like By electrically disconnecting from the power circuit 102 (and hence from the stator power supply 40 and the mover power supply 42), an appropriate drive voltage can be applied to the remaining electrode groups 18 and 22, so that other normal unit motors can be applied. Stacking type electrostatic by structure 12 It is possible to safely continue the operation of the over data 100.

  On the other hand, in the laminated electrostatic motor 100, in some unit motor structures 12, an overcurrent such as a short-circuit current flows only in the stator power line 36 or the mover power line 38 that is not provided with the blocking portions 60 and 62. Sometimes, the electrodes 18 and 22 including the cause of such an overcurrent cannot be separated from the power circuit 102, so that the stator 14 and the mover of the electrodes 18 and 22 in which an electrical abnormality such as a short circuit or a ground fault has occurred. The effect is different depending on the position on 16 (that is, the phase of the driving voltage) and the combination. That is, for electrical abnormalities such as a short circuit between the adjacent electrodes 18 and 22 in the stator 14 or the moving element 16 as described above, the position is not affected by the position of the electrodes 18 and 22 that have caused the short circuit. The electrodes 18 and 22 can be reliably disconnected from the power circuit 102. On the other hand, with respect to an electrical abnormality such as a short circuit between the electrodes 18 and 22 between the opposed stator 14 and the moving element 16, there are 8 combinations out of 9 combinations related to the positions of the electrodes 18 and 22. The electrodes 18 and 22 that have caused a short circuit or the like can be disconnected from the power circuit 102. Further, with respect to the ground fault between the electrodes 18 and 22 of the stator 14 or the mover 16 and the housing structure 30 or the like, two thirds of the electrodes 18 and 22 can be separated from the power circuit 102.

  As described above, the laminated electrostatic motor 100 is particularly effective in the ground fault between the electrodes 18 and 22 of the stator 14 or the mover 16 and the housing structure 30, etc. The laminated electrostatic motor 10 according to the first embodiment. It is inferior to. Therefore, when using the stacked electrostatic motor 100, it is advantageous to make at least the housing structure 30 from an electrically insulating material. On the other hand, the multilayer electrostatic motor 100 is advantageous in terms of manufacturing cost and maintenance cost because the number of blocking portions 60 and 62 can be reduced as compared with the multilayer electrostatic motor 10.

  Note that the multilayer electrostatic motor 100 according to the second embodiment can be modified and modified in the same manner as the multilayer electrostatic motor 10 according to the first embodiment. For example, as shown in FIG. 7, the power circuit 102 is connected to both a plurality of sets of stator power lines 36 and a plurality of sets of mover power lines 38 provided in the plurality of unit motor structures 12. 68 may be configured. Further, the blocking portions 60 and 62 can be provided on the lead wires 44 and 52 and the branch lines 50 and 58 of the stator power line 36 and the mover power line 38 (not shown, but these modified examples are stacked electrostatics). Referred to as motors 100A, 100B). The laminated electrostatic motor 100 can also be configured as a direct acting motor.

When the multilayer electrostatic motor according to the present invention is operated by a power supply of a plurality of phases other than three phases, the characteristic configuration of the multilayer electrostatic motor 10 according to the first and second embodiments described above is described. , 100 will be described with reference to the various constituent elements.
That is, the multilayer electrostatic motor according to the present invention includes a plurality of unit motor structures 12 each including a stator 14 having a plurality of electrodes 18 and a mover 16 having a plurality of electrodes 22 in a stacked state. In the stacked electrostatic motor including power circuits 34 and 102 for applying a plurality of phases to the plurality of electrodes 18 and 22 included in the stator 14 and the movable body 16 of the plurality of unit motor structures 12, respectively. When the total number of phases of the voltages applied to the plurality of electrodes 18 and 22 of each of the stator 14 and the mover 16 in the unit motor structure 12 is N, the power circuits 34 and 102 are each unit motor structure. 12, a plurality of stator power lines 36 connected to the corresponding electrodes 18 to apply the N-phase voltage to the stator 14, and the corresponding electrodes 22 to apply the N-phase voltage to the mover 16. A predetermined number of stator power lines 36 and a predetermined number of stator power lines 36 used for applying a voltage of (N-1) phase or higher to the plurality of connected rotor power lines 38 and the stator 14 and the movable element 16 respectively. Breakers 60 and 64, which are individually provided on at least one of the mover power lines 38 and individually block at least one of the predetermined number of stator power lines 36 and the predetermined number of mover power lines 38 against overcurrent; It is characterized by providing.

  Here, the relationship between the total number of phases N of the voltages applied to the unit motor structure 12 and the total number of stator power lines 36 and the total number of mover power lines 38 provided in the unit motor structure 12 is as follows. 14 and the electrode groups 18 and 22 of the mover 16 are determined depending on how many stator power lines 36 and mover power lines 38 are connected for each phase. In other words, when one stator power line 36 and mover power line 38 are used for each phase (in this case, one feed terminal 20, 24 for each phase for each of the stator 14 and the mover 16). Is provided), the total number of stator power lines 36 and the total number of mover power lines 38 are both N, and the stator power used for applying a voltage of (N-1) phase or higher. The number of the wires 36 and the mover power lines 38 is (N-1) or more (corresponding to the configuration of the stacked electrostatic motors 10 and 100). The present invention does not limit the number of power lines for each phase. When two or more stator power lines 36 and mover power lines 38 are used for each phase (in this case, the stator 14 and Each of the movers 16 is provided with two or more feeding terminals 20 and 24 for each phase).

  Further, the present invention provides a blocking unit for one or both of a predetermined number of stator power lines 36 and a predetermined number of mover power lines 38 used for applying a voltage of (N-1) phase or higher. The structure which provides 60 and 64 is included. Whether the shut-off portions 60 and 64 are provided on the stator power line 36 or the mover power line 38 depends on the safety level required according to the use of the laminated electrostatic motor, the allowable manufacturing and maintenance costs, etc. It can be selected as appropriate.

  In the laminated electrostatic motor described above, the power circuit 34 includes a blocking portion 60 in each of all the stator power lines 36 connected to the plurality of electrodes 18 of the stator 14 of each unit motor structure 12. (Corresponding to the configuration of the laminated electrostatic motor 10). In addition, the power circuit 34 can include a blocking unit 62 in each of all the moving element power lines 38 connected to the plurality of electrodes 22 of the moving element 16 of each unit motor structure 12 (stacked electrostatic capacity). Equivalent to the configuration of the motor 10).

  In the laminated electrostatic motor described above, the power circuit 102 includes each of a predetermined number of stator power lines 36 used to apply the (N-1) phase voltage to the stator 14 of each unit motor structure 12. In addition, a blocking unit 60 can be provided (corresponding to the configuration of the laminated electrostatic motor 100). In addition, the power circuit 102 includes a blocking unit 62 in each of a predetermined number of moving power lines 38 used to apply the (N−1) phase voltage to the moving elements 16 of the individual unit motor structures 12. (Corresponding to the configuration of the laminated electrostatic motor 100).

  In the laminated electrostatic motor described above, the stator 14 has a plurality of power supply terminals 20 for applying N-phase voltages to the plurality of electrodes 18, and each of the stator power lines 36 has a plurality of power supply terminals 20. Each of which can be configured. In this configuration, the interrupting unit 60 is connected to a predetermined number of power supply terminals 20 and a predetermined number of stator power lines 36 used to apply a voltage of (N-1) phase or more to the stator 14. 40 and 68 can be provided separately (corresponding to the configuration of the laminated electrostatic motors 10 and 100). Alternatively, a predetermined number of power supply terminals 20 that are used to apply a voltage of (N-1) phase or higher to the stator 14 and the predetermined number of electrodes connected to the predetermined number of power supply terminals 20 are used as the blocking unit 60. 18 can be provided separately (corresponding to the configuration of the laminated electrostatic motors 10A, 10B, 100A, 100B).

  Further, the movable element 16 has a plurality of power supply terminals 24 for applying N-phase voltages to the plurality of electrodes 22, and each of the mover power lines 38 includes each of the plurality of power supply terminals 24. it can. In this configuration, the interrupting unit 62 is connected to a predetermined number of power supply terminals 22 used to apply a voltage of (N-1) phase or more to the moving element 16 and a power source connected to a predetermined number of moving element power lines 38. 42 and 68 (corresponding to the configuration of the stacked electrostatic motors 10 and 100). Or the interruption | blocking part 62 is used for applying the voltage more than an (N-1) phase to the moving element 16, and the predetermined number of electrodes connected to these predetermined number of power supply terminals 24 22 can be provided separately (corresponding to the configuration of the laminated electrostatic motors 10A, 10B, 100A, 100B).

  In the laminated electrostatic motor described above, each of the plurality of stator power lines 36 provided in each unit motor structure 12 has a plurality of electrodes to which the same phase voltage is applied among the plurality of electrodes 18 of the stator 14. A main line 48 common to the same-phase electrodes 18 (18-1, 18-2 or 18-3) and a plurality of branch lines 50 branched from the main line 48 and connected to the same-phase electrodes 18 Can be configured. In this configuration, the blocking portion 60 can be provided on the main line 48 (corresponding to the configuration of the stacked electrostatic motors 10, 10A, 100, 100A). Or the interruption | blocking part 60 can be provided in each of several branch line 50 (equivalent to the structure of the laminated electrostatic motors 10B and 100B).

  In addition, each of the plurality of moving element power lines 38 provided in each unit motor structure 12 includes a plurality of identical phase electrodes 22 (22) to which the same phase voltage is applied among the plurality of electrodes 22 included in the moving element 16. -1, 22-2, or 22-3), and a plurality of branch lines 58 branched from the main line 56 and connected to the same-phase electrode 22. In this configuration, the blocking portion 62 can be provided on the main line 56 (corresponding to the configuration of the stacked electrostatic motors 10, 10A, 100, 100A). Or the interruption | blocking part 62 can be provided in each of several branch line 58 (equivalent to the structure of laminated type electrostatic motor 10B, 100B).

1 is a perspective view schematically showing a stacked electrostatic motor according to a first embodiment of the present invention. It is a figure which shows typically the power circuit with respect to the several unit motor structure of the laminated | stacked electrostatic motor of FIG. It is a figure which shows typically the modification of the power circuit of FIG. It is a figure which shows typically the other modification of the power circuit of FIG. FIG. 10 is a diagram schematically showing still another modification of the power circuit of FIG. 2. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows schematically the lamination type electrostatic motor by the 1st Embodiment of this invention, and is a figure which shows typically the power circuit with respect to several unit motor structure. It is a figure which shows typically the modification of the power circuit of FIG.

Explanation of symbols

10, 10A, 10B, 100, 100A, 100B Laminated electrostatic motor 12 Unit motor structure 14 Stator 16 Movable element 18, 22 Electrode 20, 24 Feed terminal 34, 102 Power circuit 36 Stator power line 38 Movable power line 40 Stator power supply 42 Movable power supply 44, 52 Lead line 46, 54 Connection line 48, 56 Main line 50, 58 Branch line 60, 62 Breaking section 64, 66 Fuse structure 68 Power supply

Claims (14)

A plurality of unit motor structures each including a stator having a plurality of electrodes and a mover having a plurality of electrodes are provided in a stacked state, and each of the plurality of stators and the movers of the unit motor structure. In a laminated electrostatic motor comprising a power circuit for applying a plurality of phase voltages to the plurality of electrodes
When the total number of phases of the voltage applied to the plurality of electrodes of each of the stator and the mover in the unit motor structure is N,
The power circuit includes, for each unit motor structure, a plurality of stator power lines connected to the corresponding electrodes to apply an N-phase voltage to the stator, and an N-phase voltage to the movable element. A plurality of mover power lines connected to the corresponding electrodes to be applied, and a predetermined number of the power lines used to apply a voltage of (N-1) phase or higher to each of the stator and the mover. At least one of the stator power line and the predetermined number of the mover power lines is individually provided, and at least one of the predetermined number of the stator power lines and the predetermined number of the mover power lines is individually connected to the overcurrent. Providing a blocking part for blocking,
A laminated electrostatic motor characterized by   2. The laminated static electricity circuit according to claim 1, wherein the power circuit includes the blocking portion in each of the stator power lines connected to the plurality of electrodes of the stator of the individual unit motor structure. Electric motor.   The laminated structure according to claim 1, wherein the power circuit includes the blocking portion in each of all of the moving element power lines connected to the plurality of electrodes of the moving element of the individual unit motor structure. Type electrostatic motor.   The power circuit includes the shut-off unit in each of a predetermined number of the stator power lines used for applying a voltage of (N-1) phase to the stator of the individual unit motor structure. Item 2. A laminated electrostatic motor according to Item 1.   The power circuit includes the blocking unit in each of a predetermined number of the power lines of the power used for applying an (N-1) phase voltage to the mobile elements of the individual unit motor structures. Item 5. The laminated electrostatic motor according to Item 1 or 4.   The stator has a plurality of power supply terminals for applying an N-phase voltage to the plurality of electrodes, each of the stator power lines includes each of the plurality of power supply terminals, Provided individually between a predetermined number of the power supply terminals used to apply a voltage of the (N-1) phase or higher to the stator and a power source connected to the predetermined number of stator power lines. The laminated electrostatic motor according to any one of claims 1 to 5.   The movable element has a plurality of power supply terminals for applying an N-phase voltage to the plurality of electrodes, each of the movable element power lines includes each of the plurality of power supply terminals, Provided individually between a predetermined number of the power supply terminals used for applying a voltage of the (N-1) phase or more to the moving element and a power source connected to the predetermined number of moving element power lines. The laminated electrostatic motor according to claim 1, wherein the laminated electrostatic motor is used.   The stator has a plurality of power supply terminals for applying an N-phase voltage to the plurality of electrodes, each of the stator power lines includes each of the plurality of power supply terminals, Individually between a predetermined number of the power supply terminals used to apply a voltage of the (N-1) phase or more to the stator and a predetermined number of the electrodes connected to the predetermined number of power supply terminals The laminated electrostatic motor according to any one of claims 1 to 5, wherein   The movable element has a plurality of power supply terminals for applying an N-phase voltage to the plurality of electrodes, each of the movable element power lines includes each of the plurality of power supply terminals, Individually between a predetermined number of the power supply terminals used to apply a voltage of the (N-1) phase or more to the movable element and a predetermined number of the electrodes connected to the predetermined number of power supply terminals. The laminated electrostatic motor according to any one of claims 1 to 5 and 8, wherein   Each of the plurality of stator power lines provided in the individual unit motor structure includes a main line common to a plurality of the same phase electrodes to which the same phase voltage is applied among the plurality of electrodes of the stator. And a plurality of branch lines that branch from the main line and are connected to the same phase electrode, wherein the blocking portion is provided on the main line. motor.   Each of the plurality of mover power lines provided in the individual unit motor structure includes a main line common to a plurality of same-phase electrodes to which the same-phase voltage is applied among the plurality of electrodes of the mover. And a plurality of branch lines branched from the main line and connected to the same-phase electrodes, and the blocking portion is provided on the main line. motor.   Each of the plurality of stator power lines provided in the individual unit motor structure includes a main line common to a plurality of the same phase electrodes to which the same phase voltage is applied among the plurality of electrodes of the stator. And a plurality of branch lines branched from the main line and connected to the same-phase electrodes, and the blocking section is provided in each of the plurality of branch lines. 2. A laminated electrostatic motor according to item 1.   Each of the plurality of mover power lines provided in the individual unit motor structure includes a main line common to a plurality of same-phase electrodes to which the same-phase voltage is applied among the plurality of electrodes of the mover. A plurality of branch lines branched from the main line and connected to the same-phase electrodes, and the blocking portion is provided in each of the plurality of branch lines. The laminated electrostatic motor according to any one of the above.   The multilayer electrostatic motor according to claim 1, wherein the interrupting portion has a fuse structure.

Images