JP2009270758A - Box type anti-oxidation heat treat furnace - Google Patents

Box type anti-oxidation heat treat furnace Download PDF

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JP2009270758A
JP2009270758A JP2008121156A JP2008121156A JP2009270758A JP 2009270758 A JP2009270758 A JP 2009270758A JP 2008121156 A JP2008121156 A JP 2008121156A JP 2008121156 A JP2008121156 A JP 2008121156A JP 2009270758 A JP2009270758 A JP 2009270758A
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salt bath
heating furnace
heat treatment
gas
furnace
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Shushin Tei
秀 振 鄭
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TOU SURFACE TECH KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat treatment facility for performing intended heat treatment with the surface of a treated object in the anti-oxidation state, and its method. <P>SOLUTION: In a heat treatment device, a heating furnace 10 and a salt bath chamber 20 are partitioned by a door 100 and brought into contact with each other. Atomospheric gas is intensively introduced to the heating furnace, and a gas passage 110 is provided in the door between the heating furnace and the salt bath chamber so as to make the atomospheric gas introduced to the heating furnace flow into the salt bath chamber. The salt bath chamber includes a sealed structure and is shut off from the outside air. The atomospheric gas made to flow in from the heating furnace makes the atmosphere in the salt bath chamber become anti-oxidation atmosphere, and surplus gas is burned and exhausted through an exhaust port 300. The internal pressure of the heating furnace at this time is maintained at a higher level than that of the internal pressure of the salt bath chamber, to prevent the atomospheric gas from flowing back to the heating furnace by the salt bath chamber. A pressure relief valve 400 is provided in the upper part of the salt bath chamber and is opened/closed when the internal pressure of the salt bath chamber becomes higher than that of the heating furnace. The heat treatment device is further provided with a safety circuit for performing super purge during rapid decline in the furnace internal pressure generated when the door is opened/closed or when a treated object is immersed in the salt bath chamber. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は箱型無酸化熱処理炉に係り、さらに詳しくは、加熱炉本体と密閉型塩浴室が一体型で処理品を無酸化雰囲気中で加熱・塩浴冷却できる箱型無酸化熱処理炉に関する。   The present invention relates to a box-type non-oxidation heat treatment furnace, and more particularly to a box-type non-oxidation heat treatment furnace in which a heating furnace main body and a sealed salt bath are integrated and a processed product can be heated and salt-bath cooled in a non-oxidation atmosphere.

鋼部品は機械加工のままの状態で使用することは少なく、熱処理によってその材料が持つ機械特性を引き出して使用される。したがって、使用目的に合わせた熱処理が行われるが、加熱冷却を含む熱処理プロセスでも特に冷却の方法によってその機械的特性値が大きく変化する。   Steel parts are rarely used in a machined state, and are used by extracting the mechanical properties of the material by heat treatment. Therefore, heat treatment is performed in accordance with the purpose of use. However, even in a heat treatment process including heating and cooling, the mechanical characteristic value varies greatly depending on the cooling method.

鋼部品は浸炭や浸炭窒化あるいはオーステンパー処理などの熱処理加工を行うために、一旦オーステナイト領域の温度まで加熱する。その際鋼部品の酸化を避けるために無酸化雰囲気炉で所定の温度に加熱保持し、その後所定の特性値を得るために冷却装置で冷却される。冷却には油、水あるいは塩浴などが冷媒として使用される。   The steel parts are once heated to the temperature of the austenite region for heat treatment such as carburizing, carbonitriding or austempering. At that time, in order to avoid oxidation of the steel parts, the steel parts are heated and held at a predetermined temperature in a non-oxidizing atmosphere furnace, and then cooled by a cooling device to obtain predetermined characteristic values. For cooling, oil, water or a salt bath is used as a refrigerant.

図1に従来型熱処理装置の一例を示す。図1に示す熱処理装置は、処理品50を所定の温度に加熱・保持する加熱炉10と所定の冷却を行うための塩浴槽22、処理品を炉に装入するプッシャー31と炉から処理品を移動するコンベア39、処理品を冷媒に浸漬するエレベータ24、冷却終了後に処理品を取り出す引出し装置40からなり、処理品は設定されたシーケンスで熱処理加工を終了する   FIG. 1 shows an example of a conventional heat treatment apparatus. The heat treatment apparatus shown in FIG. 1 includes a heating furnace 10 that heats and holds a processed product 50 at a predetermined temperature, a salt bath 22 for performing predetermined cooling, a pusher 31 that charges the processed product into the furnace, and a processed product from the furnace. A conveyor 39 for moving the product, an elevator 24 for immersing the processed product in the refrigerant, and a drawer 40 for taking out the processed product after the cooling is completed. The processed product finishes the heat treatment in a set sequence.

加熱炉には鋼部品を所定の表面状態に維持するための雰囲気ガスが導入されて無酸化あるいは浸炭雰囲気とされる。雰囲気ガスは例えばLPGやLNGなどの炭化水素ガスと空気を混合して作られる変成ガス(RXガス)であり、配管を通じて加熱炉本体に導入される。この雰囲気中で加熱された処理品は酸化せずに表面は光輝の状態である。その後処理品は所定の冷却をするために加熱炉から取り出され冷媒中に浸漬されるが、冷媒に浸漬するまでのわずか1分以内の短時間空気中に曝されて酸化される。
冷却されるまで20秒程度酸化雰囲気にあった鋼部品の表面状態を図4に示す。
An atmosphere gas for maintaining the steel parts in a predetermined surface state is introduced into the heating furnace so as to be a non-oxidizing or carburizing atmosphere. The atmospheric gas is a modified gas (RX gas) made by mixing a hydrocarbon gas such as LPG or LNG and air, and is introduced into the main body of the heating furnace through a pipe. The treated product heated in this atmosphere is not oxidized and the surface is in a bright state. Thereafter, the treated product is taken out of the heating furnace and immersed in a refrigerant for predetermined cooling, but is oxidized by being exposed to air for a short time within one minute until it is immersed in the refrigerant.
FIG. 4 shows the surface state of a steel part that was in an oxidizing atmosphere for about 20 seconds until cooled.

現在では、冷媒に油を使用する多くの雰囲気熱処理設備では酸化を防ぐために加熱炉と焼入室が一体となった雰囲気中で焼入れできる雰囲気炉を使用している。しかし、塩浴や水を冷媒とする冷却槽は高温の処理品を冷却する際に発生する水蒸気や塩浴からの蒸発ガスが加熱炉内に浸入し、雰囲気を乱すこと、発生するガスが加熱炉の断熱材を早期に劣化させることなどの理由で加熱炉とは一定間隔をおいて設置し、冷却槽は上部開放型の大気雰囲気の熱処理設備で構成されていた。   At present, many atmospheric heat treatment facilities that use oil as a refrigerant use an atmospheric furnace that can be quenched in an atmosphere in which a heating furnace and a quenching chamber are integrated to prevent oxidation. However, in a cooling bath using a salt bath or water as a refrigerant, water vapor generated when cooling a high-temperature processed product or evaporated gas from the salt bath enters the heating furnace, disturbing the atmosphere, and the generated gas is heated. It was installed at a fixed interval from the heating furnace for the purpose of prematurely degrading the heat insulating material of the furnace, and the cooling tank was composed of heat treatment equipment in an open top atmosphere.

最近の自動車部品や精密機械部品はより複雑に、より軽量化、より高強度化されている。そのため熱処理(焼入れ)することにより鋼部品がより変形しやすい状況になっている。焼入れとは鋼をオーステナイト温度から急冷することでより強度の強いマルテンサイト変態を起こさせる熱処理であるがそのマルテンサイト変態は急激な体積膨張を生じさせる。そのため、マルテンサイト変態温度(Ms点と言い、鋼の材質成分で決まる)付近を出来るだけ均一な温度状態でゆっくり通過させる熱処理方法が好まれている。   Recent automobile parts and precision machine parts have become more complicated, lighter and stronger. Therefore, the steel parts are more easily deformed by heat treatment (quenching). Quenching is a heat treatment that causes a stronger martensitic transformation by quenching the steel from the austenite temperature, but the martensitic transformation causes rapid volume expansion. For this reason, a heat treatment method in which the vicinity of the martensite transformation temperature (referred to as the Ms point, which is determined by the material composition of the steel) is allowed to pass through as slowly as possible at a uniform temperature state is preferred.

このMs点は一般的浸炭熱処理では240℃近辺であり、冷媒に使用する焼入油ではその温度で通常保持することは劣化が激しく経済的でない。したがってこの温度に冷媒を加熱して使用する最適な冷媒としては硝酸系の塩浴(例えばKNO3、NaNO2など)が多く使われる。現在ではこの硝酸系塩浴を冷媒に使用した連続式ガス浸炭炉が多数使われているが、全て塩浴室が浸炭炉とは離れて設置された大気開放型の塩浴槽である。この場合、無酸化加熱処理された鋼部品が高温状態(オーステナイト温度領域でおよそ800℃以上)で極短時間であるが酸化雰囲気に曝され、表面が酸化される。   This Ms point is around 240 ° C. in a general carburizing heat treatment, and in the case of quenching oil used as a refrigerant, it is not economical to maintain normally at that temperature because the deterioration is severe. Therefore, a nitric acid salt bath (for example, KNO 3, NaNO 2, etc.) is often used as the optimum refrigerant to be used by heating the refrigerant to this temperature. Currently, many continuous gas carburizing furnaces using this nitrate salt bath as a refrigerant are used, but all salt baths are open-type salt baths installed away from the carburizing furnace. In this case, the steel part subjected to the non-oxidation heat treatment is exposed to an oxidizing atmosphere in a high temperature state (approximately 800 ° C. or higher in the austenite temperature region) for a very short time, and the surface is oxidized.

さらに、塩浴槽が加熱炉から離れて設置されているため所定の熱処理を終えて冷却工程に入る前に温度が低下する欠点もある。オーステナイト領域の温度からマルテンサイト変態を起こさせるためには鋼部品は、合金成分によって異なるが、一例として25秒以内に800℃以上から500℃以下に冷却させる必要がある。しかし、塩浴槽が加熱炉から離れている場合、搬送時間がかかりおよそ600℃〜700℃に存在するパーライト変態を起こす危険がある。一般的な浸炭された鋼部品は表面の炭素量が0.7%以上あるため、この時間ではパーライト変態は起こらないが、浸炭されていない部品の内部(芯部)では一部このパーライト変態を起こし、初析フェライトを生じる。この初析フェライトが生じた鋼部品は初期の機械的特性値が得られないため、検査結果で不良とされる場合がある。   Furthermore, since the salt bath is installed away from the heating furnace, there is a disadvantage that the temperature is lowered before the predetermined heat treatment is finished and the cooling process is started. In order to cause martensitic transformation from the temperature in the austenite region, the steel part needs to be cooled from 800 ° C. to 500 ° C. within 25 seconds as an example, although it varies depending on the alloy composition. However, when the salt bath is away from the heating furnace, there is a risk of causing a pearlite transformation existing at approximately 600 ° C. to 700 ° C. due to the time required for transportation. Since general carburized steel parts have a carbon content of 0.7% or more, pearlite transformation does not occur during this time, but some of this pearlite transformation occurs inside the uncarburized part (core part). Waking up and producing proeutectoid ferrite. Since the steel part in which the pro-eutectoid ferrite is generated cannot obtain an initial mechanical characteristic value, it may be determined to be defective in the inspection result.

このような不具合を避けるために、塩浴冷却をあきらめ、従来からの冷媒である焼入油を使用し焼入油の使用限界温度に近い上限温度(焼入油の性状により150〜200℃)に加熱し、その温度で一定時間保持して処理品の温度がそろった所を見計らって焼入油から取り出し、雰囲気中で徐冷する方法も行われるなど熱処理技術者の経験と勘でおこなわれているのが実情である。   In order to avoid such problems, the salt bath cooling is given up, and the upper limit temperature close to the use limit temperature of the quenching oil using the quenching oil that is a conventional refrigerant (150 to 200 ° C. depending on the properties of the quenching oil) This is done with the experience and intuition of heat treatment engineers, such as a method in which the temperature of the processed product is kept at that temperature for a certain period of time and then taken out from the quenching oil, and gradually cooled in the atmosphere. It is the actual situation.

以上は、浸炭焼入れの説明であるが、次に本発明の無酸化熱処理炉で処理することにより最も効果が上がるオーステンパー処理の現状と発明の背景を説明する。   The above is a description of carburizing and quenching. Next, the present state of the austempering treatment and the background of the invention, which are most effective when treated in the non-oxidizing heat treatment furnace of the present invention, will be described.

オーステンパー処理は、鋼部品の熱処理方法の一つで、通常の焼入れ・焼戻しを行わずにそれと同等以上の機械的特性を得る方法であり、ばね部品などで広く採用されている。そのプロセスは、焼入れと同様に一旦、鋼部品をオーステナイト温度まで加熱し、所定の時間保持した後250〜400℃に加熱された塩浴槽に浸漬して鋼の組織をオーステナイトからベイナイトの組織に変態させる。焼入れによるマルテンサイト変態を起こさせずにベイナイト組織を得ることが出来ることから、変態時の体積の急膨張や変態歪みを避けることができる。そのため、焼入れでしばしば生じる焼入れによる処理品の変形や焼割れを防止する効果は大きい。   Austempering is one of the heat treatment methods for steel parts, and is a method for obtaining mechanical properties equivalent to or higher than normal quenching and tempering, and is widely used in spring parts and the like. In the same way as quenching, the steel part is once heated to the austenite temperature, held for a predetermined time and then immersed in a salt bath heated to 250 to 400 ° C. to transform the steel structure from austenite to bainite. Let Since a bainite structure can be obtained without causing martensitic transformation by quenching, rapid expansion of volume and transformation distortion during transformation can be avoided. Therefore, the effect which prevents the deformation | transformation and quenching crack of the processed goods by quenching often generated by quenching is large.

さらに、このオーステンパー熱処理によって得られる機械的な特性値は、通常の焼入れ・焼戻しによって得られる同等の硬さのものと比較すると、鋼部品の展伸性や絞り加工性、さらに機械的な耐衝撃性などにすぐれることが既に知られている。この特徴を生かしてばね部品やワイヤーのパテンティング処理に使われている。このオーステンパー処理は鋼部品をオーステナイト温度領域からベイナイト組織に変態させるために、極短時間で400℃以下に冷却させる必要がある。この途中の温度領域およそ550〜700℃にパーライト変態を起こさせる領域があり、冷却に時間がかかるとこのパーライト変態カーブと交叉し、パーライトを起こしてしまい、初期の機械強度が得られない。   In addition, the mechanical property values obtained by this austemper heat treatment are comparable to those obtained by ordinary quenching and tempering, and have a steel part that has excellent extensibility, drawability, and mechanical resistance. It is already known that it has excellent impact properties. Taking advantage of this feature, it is used for the patenting process of spring parts and wires. This austempering treatment needs to be cooled to 400 ° C. or less in a very short time in order to transform the steel part from the austenite temperature range to the bainite structure. There is a region that causes pearlite transformation in the middle temperature range of about 550 to 700 ° C. If cooling takes time, the pearlite transformation curve is crossed and pearlite is caused, and the initial mechanical strength cannot be obtained.

また、オーステンパー処理する処理品はそのコスト低減の目的から一般に炭素鋼が使われている。この炭素鋼は焼入れ性が悪く、パーライト変態を起こしやすい材料である。したがって炭素鋼で製作された処理品は均一なベイナイト組織を得るために厚さがおよそ7〜8mm以下の部品に限定される。   In addition, carbon steel is generally used for processed products subjected to austemper treatment for the purpose of cost reduction. This carbon steel is poor in hardenability and is a material that easily causes pearlite transformation. Therefore, processed products made of carbon steel are limited to parts having a thickness of about 7-8 mm or less in order to obtain a uniform bainite structure.

現在このオーステンパー処理に使われる雰囲気熱処理炉は上述のような制約もあり、冷却のための塩浴槽が加熱炉最終端の下に設けられた雰囲気熱処理炉が使われている。その代表的な炉としてはメッシュベルト式オーステンパー炉やシェーカーハース式オーステンパー炉がある。図1に示した設備では加熱炉から塩浴槽に浸漬されるまで30秒以上の時間を要し、炭素鋼では均一なベイナイト組織を得ることは出来ない。図2にオーステンパー炉として最も代表的なメッシュベルト式雰囲気炉を示す。   Atmosphere heat treatment furnaces currently used for this austempering treatment also have the above-mentioned restrictions, and atmosphere heat treatment furnaces in which a salt bath for cooling is provided below the final end of the heating furnace are used. Typical examples of the furnace include a mesh belt type austemper furnace and a shaker hearth type austemper furnace. In the facility shown in FIG. 1, it takes 30 seconds or more to be immersed in the salt bath from the heating furnace, and a uniform bainite structure cannot be obtained with carbon steel. FIG. 2 shows the most typical mesh belt type atmospheric furnace as an austemper furnace.

図2の場合、加熱炉500、処理品を装入するメッシュベルト502、処理品を炉に入れるための準備テーブル511、処理品を塩浴槽に落下させるシュート部503、塩浴槽504、落下した処理品を引き上げるコンベア505で構成されている。加熱炉500には雰囲気ガス(RXガスなど)を導入するパイプ510を装備し、炉内を無酸化雰囲気にすることが出来る。まず、処理品を準備テーブル511から炉内を循環するメッシュベルト502の上に並べてセットする。メッシュベルトは決められた熱処理時間で炉内を循環している。加熱炉500は入口側から出口側に向かって昇温ゾーン、均熱保持ゾーンで構成されており、処理品はメッシュベルトに載せられ昇温ゾーンから均熱ゾーンを通過し、焼入れに適した温度に保持された後、加熱炉500の最終端からシュート部503を通じて塩浴槽504に落下する。落下して適当な時間冷却保持された処理品は引き上げコンベア505に乗せられ炉外に搬出されてオーステンパー処理は完了する。   In the case of FIG. 2, the heating furnace 500, the mesh belt 502 for charging the processed product, the preparation table 511 for putting the processed product into the furnace, the chute 503 for dropping the processed product into the salt bath, the salt bath 504, the dropped processing It is comprised with the conveyor 505 which pulls up goods. The heating furnace 500 is equipped with a pipe 510 for introducing atmospheric gas (such as RX gas), and the inside of the furnace can be made into a non-oxidizing atmosphere. First, the processed products are set side by side on the mesh belt 502 circulating in the furnace from the preparation table 511. The mesh belt circulates in the furnace with a predetermined heat treatment time. The heating furnace 500 is composed of a temperature raising zone and a soaking zone from the inlet side to the outlet side, and the processed product is placed on the mesh belt and passes through the soaking zone from the heating zone, and is suitable for quenching. Is held in the salt bath 504 through the chute 503 from the final end of the heating furnace 500. The processed product that has been dropped and cooled and held for an appropriate time is placed on the lifting conveyor 505 and carried out of the furnace, completing the austempering process.

このようにメッシュベルト式オーステンパー炉では処理品は雰囲気中で加熱され、直接塩浴槽に浸漬されるため表面の酸化は生じない。更に、短時間で処理品がオーステナイト温度から塩浴槽に浸漬されるため小物の鋼部品には適した設備である。   As described above, in the mesh belt type austemper furnace, the treated product is heated in the atmosphere and directly immersed in the salt bath, so that the surface is not oxidized. Furthermore, since the treated product is immersed in the salt bath from the austenite temperature in a short time, it is suitable for small steel parts.

しかし、このタイプの設備では処理品の形状が限定される場合がある。例えば、細くて長い部品などはメッシュベルトの上に並べておいた場合、変形が大きい。さらに塩浴槽に落下する場合引き上げコンベアで引っかかることが多い。また、複雑な形状ではやはり変形やメッシュベルトに絡みつくなどのトラブルの発生がある。   However, in this type of equipment, the shape of the processed product may be limited. For example, when thin and long parts are arranged on a mesh belt, the deformation is large. Furthermore, when it falls to a salt tub, it is often caught by a raising conveyor. In addition, troubles such as deformation and entanglement with the mesh belt may occur in a complicated shape.

このようにメッシュベルト式オーステンパー炉には優れた面が多いが、欠点もあり、一般に供される箱型で一体型の無酸化熱処理炉の開発が要望されていた。
特開平08−246036号公報
As described above, the mesh belt type austemper furnace has many excellent aspects, but there are also drawbacks, and there has been a demand for the development of a generally used box-type and integrated non-oxidation heat treatment furnace.
Japanese Patent Application Laid-Open No. 08-246036

本発明は、塩浴槽から発生するガスによる炉材への侵食や加熱炉内の雰囲気の乱れを起こすことがない箱型無酸化熱処理炉の提供を目的とする。   An object of the present invention is to provide a box-type non-oxidation heat treatment furnace which does not cause erosion of the furnace material by the gas generated from the salt bath and disturbance of the atmosphere in the heating furnace.

本発明は、加熱炉本体と塩浴槽を設けた箱型熱処理装置において加熱炉本体と塩浴槽を接するように一体型で構成し、塩浴槽を密閉された雰囲気状態にする塩浴室とし、それぞれを開閉自在な扉で区画し、加熱炉本体に導入された雰囲気ガスを塩浴室に流入させて無酸化雰囲気状態にし、加熱から冷却までの処理品の全熱処理工程を無酸化雰囲気の中で行うことを特徴とする。   The present invention is a box-type heat treatment apparatus provided with a heating furnace body and a salt tub, and is configured as an integral type so that the heating furnace body and the salt tub are in contact with each other. Compartment with an openable and closable door, the atmosphere gas introduced into the main body of the heating furnace flows into the salt bath to make it a non-oxidizing atmosphere, and the entire heat treatment process of the processed products from heating to cooling is performed in a non-oxidizing atmosphere It is characterized by.

また、本発明は、一端に処理品の入口を、他端に処理品の出口を有し、開閉自在の扉で区画され、入口側から出口へ向けて処理品を搬送する手段を備え、入口側から昇温、保持、降温処理を行なう加熱炉本体および冷却用塩浴室を一体で構成する箱型雰囲気熱処理炉を含み、加熱炉本体に集中して雰囲気ガスを導入して加熱炉本体の内圧を塩浴室内圧より高く維持することを特徴とする。   Further, the present invention has an inlet for a processed product at one end and an outlet for the processed product at the other end, and is partitioned by an openable / closable door, and includes means for transporting the processed product from the inlet side toward the outlet. It includes a box-type atmosphere heat treatment furnace that integrally forms a heating furnace body that heats up, holds, and cools from the side, and a salt bath for cooling, and introduces atmospheric gas in the heating furnace body to introduce the internal pressure of the heating furnace body Is maintained higher than the salt bath internal pressure.

前記塩浴室は、加熱後、所定の温度で冷却を行う熱処理炉であって、特に表面無酸化を要求されるオーステンパー処理、ガス浸炭焼入れ、ガス浸炭窒化焼入れなどの処理を行なうことを特徴とする。   The salt bath is a heat treatment furnace that cools at a predetermined temperature after heating, and is characterized by performing treatments such as austempering, gas carburizing and quenching, and gas carbonitriding and quenching that require surface non-oxidation. To do.

前記塩浴室には、連続して加熱炉から流入する雰囲気ガスの余剰のガスを排ガスとして放出する排気口を設け、さらに塩浴室内圧が加熱炉内圧を上回るときにガスを放出する内圧調整弁が備えられていることを特徴とする。   The salt bath is provided with an exhaust port for discharging excess gas of the atmospheric gas continuously flowing from the heating furnace as exhaust gas, and an internal pressure adjusting valve for discharging gas when the salt bath internal pressure exceeds the heating furnace internal pressure. It is provided.

本発明の熱処理方法は加熱炉で所定の熱処理が行われた後、高温(オーステナイト状態)に加熱された処理品が塩浴室の塩浴槽に浸漬され、そのとき高温の鋼部品の表面と冷媒の塩浴が接し、発生したガスを塩浴室から排気する熱処理用雰囲気をキャリアーガスとして一緒に排気口を通じて炉外に排出させることで加熱炉内に逆流することが防止できる。   In the heat treatment method of the present invention, after a predetermined heat treatment is performed in a heating furnace, a processed product heated to a high temperature (austenite state) is immersed in a salt bath of a salt bath, and at that time, the surface of the hot steel part and the refrigerant The heat treatment atmosphere in which the salt bath is in contact and the generated gas is exhausted from the salt bath is discharged as a carrier gas together with the carrier through the exhaust port, thereby preventing backflow into the heating furnace.

また、塩浴からの発生ガスが加熱炉内に浸入し、炉内の耐火物を劣化させる問題も解決した。
ガスの浸入防止効果により、従来のガス浸炭炉で使われる炉内耐火物と同等の寿命が確認され、ランニングコストの低減を達成することができた。
In addition, the problem of gas generated from the salt bath entering the heating furnace and degrading the refractory in the furnace was solved.
Due to the effect of preventing gas intrusion, it was confirmed that the lifetime was equivalent to the refractory in the furnace used in the conventional gas carburizing furnace, and the running cost could be reduced.

また、加熱炉から塩浴槽浸漬までの時間を10秒以内にすることができた、これにより、従来では無酸化オーステンパー処理が不可能であった炭素鋼の小物部品でも処理が可能となった。さらに、従来のメッシュベル式ではトラブルの多かった形状の複雑な鋼部品や曲がりやすい長物部品も本発明品を使うことで解決できた。   Moreover, the time from the heating furnace to the salt bath immersion could be made within 10 seconds, which enabled the treatment of small parts of carbon steel, which could not be treated with non-oxidized austempering conventionally. . Furthermore, complex steel parts with a shape that often caused troubles in the conventional mesh bell type and long parts that are easily bent could be solved by using the present invention product.

さらに、本発明の箱型無酸化熱処理炉では処理品が塩浴槽に浸漬された際や加熱炉と塩浴室を仕切る中間扉が閉の際に生じる瞬間的炉内の負圧に対応するため、スーパーパージ回路を設け、大量の雰囲気ガスを流すことで早期に加熱炉の内圧を回復させることができた。これにより安定した雰囲気熱処理を行うことが可能になった。   Furthermore, in the box-type non-oxidizing heat treatment furnace of the present invention, to cope with the instantaneous negative pressure in the furnace that occurs when the processed product is immersed in a salt bath or when the intermediate door that partitions the heating furnace and the salt bath is closed, A super purge circuit was provided, and the internal pressure of the heating furnace could be recovered quickly by flowing a large amount of atmospheric gas. This makes it possible to perform stable atmospheric heat treatment.

以下、図を参照して本発明をさらに詳しく説明する。   Hereinafter, the present invention will be described in more detail with reference to the drawings.

図3は密閉型の塩浴室を加熱本体と一体化した箱型無酸化熱処理炉を示す図である。加熱炉10、密閉型塩浴室20を一体で構成し、加熱炉10の入口には入口扉11を設け、加熱炉10と塩浴室20の間は中間扉100で区画し、密閉型塩浴室の後方には出口扉を設けた。   FIG. 3 is a view showing a box-type non-oxidizing heat treatment furnace in which a sealed salt bath is integrated with a heating body. The heating furnace 10 and the sealed salt bath 20 are integrally configured, an entrance door 11 is provided at the entrance of the heating furnace 10, and the intermediate door 100 divides between the heating furnace 10 and the salt bath 20, and the sealed salt bath 20 An exit door was provided at the rear.

ここで加熱炉10は、処理品50を装入する際に開閉する入口扉11と処理品を加熱終了後に抽出する際に開閉する中間扉100で区画された密閉空間となっている。電気加熱またはその他のエネルギーを燃焼して加熱炉内部の雰囲気や炉材を加熱する構造とし、そこに装入された処理品を所定の温度に速やかに昇温させる。本実施例では、電気加熱式ラジアントチューブ加熱ヒータ15が炉体側面に設置され、炉体上部には雰囲気をガスを撹拌させる撹拌ファン16を、その撹拌ファン16の周囲に炉内を無酸化雰囲気にしたりあるいは浸炭雰囲気にする雰囲気ガス(RXガスなど)を導入する導入管17が設けられている。
図3では装入する処理品が一つの箱型炉を示しているが、連続して多数の処理品を挿入することが出来る連続式箱型無酸化熱処理炉でも同様に一体型塩浴室を構成することが出来る。したがって図示した加熱炉に限定されない。
Here, the heating furnace 10 is a sealed space defined by an entrance door 11 that opens and closes when the processed product 50 is loaded and an intermediate door 100 that opens and closes when the processed product is extracted after the heating is completed. Electric heating or other energy is burned to heat the atmosphere and furnace material inside the heating furnace, and the treated product charged therein is quickly heated to a predetermined temperature. In the present embodiment, an electric heating type radiant tube heater 15 is installed on the side of the furnace body, an agitation fan 16 for stirring the gas at the upper part of the furnace body, and a non-oxidizing atmosphere around the agitation fan 16 in the furnace. Or an introduction pipe 17 for introducing an atmospheric gas (such as RX gas) to be carburized.
Although FIG. 3 shows a single box furnace for processing products to be charged, a continuous box-type non-oxidizing heat treatment furnace in which a large number of processing products can be continuously inserted constitutes an integrated salt bath. I can do it. Therefore, it is not limited to the illustrated heating furnace.

塩浴室20は、塩浴を渦流させる塩浴撹拌機21、ここでは図示していないが塩浴を所定の温度に加熱保持するための電気あるいは燃焼式ヒータおよび処理品を塩浴に浸漬した際に塩浴温度が上昇することを抑える冷却装置を備えた塩浴槽22を設け、さらに所定の熱処理を終えた処理品を塩浴槽に投入するためのエレベータ24を備えている。さらに塩浴室上部には雰囲気ガスを連続して排出させる排気口300を設け、この排気口には排気量を規定する調節装置310を設けている。さらに塩浴室の内圧が規定以上に上昇した際に開閉する圧力逃がし弁を設けた。加熱炉10と塩浴室20を区画する中間扉100は加熱炉10の熱を遮断するように耐火煉瓦あるいはセラミックファイバーで構築されている。さらに雰囲気ガスを加熱炉10から塩浴室20にあるいはその逆に移動するのを防ぐように密着構造の中間扉構造とした。ここで加熱炉に集中導入された雰囲気ガスは中間扉100に設けたガス通路だけを通って塩浴室に流れるようになる。   The salt bath 20 is a salt bath stirrer 21 for swirling the salt bath, although not shown here, when an electric or combustion heater for heating and holding the salt bath at a predetermined temperature and a processed product are immersed in the salt bath. In addition, a salt bath 22 provided with a cooling device that suppresses the rise in the salt bath temperature is provided, and an elevator 24 is also provided for throwing the processed product that has undergone predetermined heat treatment into the salt bath. Further, an exhaust port 300 for continuously discharging atmospheric gas is provided at the upper part of the salt bath, and an adjusting device 310 for regulating the exhaust amount is provided at this exhaust port. In addition, a pressure relief valve that opens and closes when the internal pressure of the salt bath rises above a specified level is provided. The intermediate door 100 that partitions the heating furnace 10 and the salt bath 20 is constructed of refractory bricks or ceramic fibers so as to block the heat of the heating furnace 10. Further, an intermediate door structure with a close contact structure is used to prevent the atmospheric gas from moving from the heating furnace 10 to the salt bath 20 or vice versa. Here, the atmospheric gas intensively introduced into the heating furnace flows into the salt bath through only the gas passage provided in the intermediate door 100.

図3では加熱炉10と塩浴室20が接するように一体構成された箱型無酸化炉の前後に、即ち入口側には加熱炉10の入口扉11と接するように処理品装入プッシャ31を配置し、入口扉11を開にして処理品を加熱炉内に装入させるようにし、塩浴室後方には処理品を取り出す際に使用する引き出し装置の付いた架台40を設けている。ここではこの処理品を装入したり、取り出したりする方法は規定しない。   In FIG. 3, before and after the box-type non-oxidizing furnace configured integrally so that the heating furnace 10 and the salt bath 20 are in contact with each other, that is, on the inlet side, the processed product charging pusher 31 is in contact with the inlet door 11 of the heating furnace 10. Arrangement is made so that the entrance door 11 is opened and the processed product is charged into the heating furnace, and a gantry 40 with a drawer device used for taking out the processed product is provided behind the salt bath. Here, the method for loading and unloading this processed product is not defined.

以下、本発明の熱処理設備による熱処理方法について説明する。
予め加熱炉10内を所定の温度に加熱保持し、雰囲気ガスを導入して加熱炉10内の雰囲気を所定の雰囲気状態に維持しておく。さらに加熱炉10に集中導入した雰囲気ガスを中間扉100の雰囲気通過口を通過させて塩浴室20に導入して塩浴室20の内部を無酸化状態にし、加熱炉内の内圧を5〜20mmAqに調整する。炉内圧をこれ以上に設定しても良いが、過度に高めると雰囲気ガスを密閉している炉体各部のシール部からガスがリークしやすく、炉体構造を簡素化して安価にすることが出来ない。したがって経済的な構造とするために規定したものである。次に、塩浴室20の内圧は加熱炉10の内圧より1mmAq以上低く設定する。塩浴室20の上部に設けた排気口300の排ガス量調整装置310で排出ガス量を調整し塩浴室20の内圧を調整する。
Hereinafter, a heat treatment method using the heat treatment facility of the present invention will be described.
The inside of the heating furnace 10 is heated and held at a predetermined temperature in advance, and atmospheric gas is introduced to maintain the atmosphere in the heating furnace 10 in a predetermined atmosphere state. Furthermore, the atmospheric gas concentratedly introduced into the heating furnace 10 is introduced into the salt bath 20 through the atmosphere passage port of the intermediate door 100 to make the inside of the salt bath 20 non-oxidized, and the internal pressure in the heating furnace is set to 5 to 20 mmAq. adjust. The pressure inside the furnace may be set higher than this, but if it is excessively increased, the gas tends to leak from the seal part of each part of the furnace body that seals the atmospheric gas, and the furnace structure can be simplified and made inexpensive. Absent. Therefore, it is specified to make it an economic structure. Next, the internal pressure of the salt bath 20 is set to be lower than the internal pressure of the heating furnace 10 by 1 mmAq or more. The amount of exhaust gas is adjusted by the exhaust gas amount adjusting device 310 of the exhaust port 300 provided in the upper part of the salt bathroom 20 to adjust the internal pressure of the salt bathroom 20.

油焼入れ槽を設けた従来型の雰囲気熱処理設備では、加熱炉の内圧と冷却室の内圧を調整しないため、冷却室のガスが加熱炉に逆流することがよく見受けられた。焼入れに使用する冷媒が油の場合は蒸発ガスが特に雰囲気を乱すことは無く、この点を考慮する必要はなかった。しかし、冷媒に塩浴を使用する場合、蒸発ガスは酸化性ガスであり、さらに炉材を侵食する場合があるため加熱炉10に逆流することは避けなければならない。従って、圧力逃がし弁を設け、中間扉100の開閉や処理品50の移動や塩浴槽22に浸漬する際の炉内圧の急変動の際に冷却室20の内圧がおよそ100mmAqを超える場合に作動するように設定する。
さらに、扉11,100,200の開閉や処理品50の移動で生ずる急激な炉内の負圧の際、炉圧を瞬時に回復させるためのスーパーパージ機構を設けることが好ましいが絶対条件では無い。
In a conventional atmospheric heat treatment facility provided with an oil quenching tank, the internal pressure of the heating furnace and the internal pressure of the cooling chamber are not adjusted, so that it is often seen that the gas in the cooling chamber flows back to the heating furnace. When the refrigerant used for quenching is oil, the evaporation gas does not particularly disturb the atmosphere, and it is not necessary to consider this point. However, when a salt bath is used as the refrigerant, the evaporating gas is an oxidizing gas and may further erode the furnace material, so that it must be avoided to flow back to the heating furnace 10. Accordingly, a pressure relief valve is provided, which operates when the internal pressure of the cooling chamber 20 exceeds approximately 100 mmAq when the intermediate door 100 is opened / closed, the processed product 50 is moved, or the furnace pressure is rapidly changed when immersed in the salt bath 22. Set as follows.
Furthermore, it is preferable to provide a super purge mechanism for instantaneously recovering the furnace pressure in the event of a sudden negative pressure in the furnace caused by opening / closing of the doors 11, 100, 200 or movement of the processed product 50, but this is not an absolute condition. .

熱処理品は、加熱炉10の入口扉11を開き、熱処理する処理品50を装入プッシャー31を使って加熱炉10に装入する。加熱炉10に装入された処理品50は必要な温度、必要な雰囲気に設定されたパターンで加熱、保持される。浸炭処理の場合は必要な浸炭深さと必要な炭素濃度を処理品に与える。オーステンパー処理の場合は無酸化雰囲気の状態で必要な温度と時間で保持される。この間、加熱炉10内には継続してRXガスのような雰囲気ガスが導入管17を経由して導入される。導入ガス量は加熱炉10の内容積に準拠したガス量が決められている。このガスは中間扉100のガス通路110を通って塩浴室に流れ込んでいる。   The heat treatment product opens the entrance door 11 of the heating furnace 10, and the treatment product 50 to be heat treated is charged into the heating furnace 10 using the charging pusher 31. The processed product 50 charged in the heating furnace 10 is heated and held in a pattern set to a necessary temperature and a necessary atmosphere. In the case of carburizing treatment, the necessary carburizing depth and the necessary carbon concentration are given to the treated product. In the case of austempering, the temperature and time are maintained in a non-oxidizing atmosphere. During this time, atmospheric gas such as RX gas is continuously introduced into the heating furnace 10 via the introduction pipe 17. The amount of gas introduced is determined according to the internal volume of the heating furnace 10. This gas flows into the salt bath through the gas passage 110 of the intermediate door 100.

加熱炉10で所定の熱処理プロセスが終了すると中間扉100が開き、短時間で塩浴室20のエレベータ24の上に任意の方式で設置された方法で処理品50を移動させる。この移動は処理品50の温度を冷却させないようにするために素早く作動するプッシャー31方式が適している。このプッシャー31で押し出された処理品50がエレベーター24上に移動すると直ちに塩浴槽に下降し塩浴槽22に処理品50が浸漬される。このエレベーター下降と同時に中間扉100が閉められる。したがって、エレベーター下降後塩浴槽から発生するガスは、既に中間扉100が閉まっているため加熱炉10から流れ込んだ雰囲気ガスをキャリアーガスとして塩浴室20に設けた排気口300を通じて炉外に排出される。   When a predetermined heat treatment process is completed in the heating furnace 10, the intermediate door 100 is opened, and the processed product 50 is moved by an arbitrary method on the elevator 24 of the salt bath 20 in a short time. For this movement, a pusher 31 system that operates quickly is suitable for preventing the temperature of the processed product 50 from being cooled. As soon as the processed product 50 pushed out by the pusher 31 moves onto the elevator 24, the processed product 50 descends to the salt bath and the processed product 50 is immersed in the salt bath 22. At the same time when the elevator is lowered, the intermediate door 100 is closed. Therefore, the gas generated from the salt tub after the elevator descends is discharged out of the furnace through the exhaust port 300 provided in the salt bathroom 20 using the atmospheric gas flowing from the heating furnace 10 as the carrier gas because the intermediate door 100 is already closed. .

塩浴槽22に浸漬した処理品は焼入れあるいはオーステンパーに必要な時間(5〜60分)塩浴の中で保持される。この間、塩浴槽では熱交換された所定の温度で塩浴撹拌機21を稼動させ均一に冷却保持される。   The treated product immersed in the salt bath 22 is held in a salt bath for a time required for quenching or austemper (5 to 60 minutes). During this time, the salt bath stirrer 21 is operated at a predetermined temperature in which heat is exchanged in the salt bath, and is uniformly cooled and held.

一方、処理品が塩浴室20に移動し、空炉になった加熱炉10には連続して新しい処理品が入口扉11を通して装入される。したがって加熱炉10はまた、新たな熱処理パターンで連続して熱処理することが出来、大変効率的である。
所定の時間、塩浴槽22に浸漬していた処理品50は、時間とともにエレベーター24で上昇し、その状態で一定時間処理品50や治工具に付いた塩浴を塩浴槽22に落とし、塩浴室20の後部に付設した出口扉200を開にして、後部に設けられた架台を含む処理品引出し装置40で引き出される。
On the other hand, the processed product moves to the salt bath 20, and new processed products are continuously charged into the heating furnace 10 which has become an empty furnace through the entrance door 11. Therefore, the heating furnace 10 can also be continuously heat-treated with a new heat-treatment pattern, and is very efficient.
The treated product 50 that has been immersed in the salt bath 22 for a predetermined time rises with the elevator 24 over time, and the salt bath attached to the treated product 50 and the jig for a certain time is dropped in the salt bath 22 in that state, and the salt bath The outlet door 200 attached to the rear part 20 is opened, and the processed product withdrawing apparatus 40 including a gantry provided at the rear part is pulled out.

この出口扉200が開くと同時に出口扉200の下部に設けたカーテンフレーム201が燃焼して、炉外から塩浴室に空気が浸入しないようにし、出口扉200が開いている間中燃焼を続け、処理品50が引き出されると同時に出口扉200が閉められカーテンフレーム201も消火される。出口扉200が開いた際に一部侵入した空気や燃焼ガスは、加熱炉10からの雰囲気ガスと一緒に排気口300から炉外に出される。このようにして最初の熱処理は完成し、熱処理炉は最初のステップにもどる。取り出された処理品50は洗浄などの次の工程に移される。   At the same time that the exit door 200 is opened, the curtain frame 201 provided at the lower part of the exit door 200 burns so that air does not enter the salt bath from the outside of the furnace, and the combustion continues while the exit door 200 is open, As soon as the processed product 50 is pulled out, the exit door 200 is closed and the curtain frame 201 is extinguished. Air or combustion gas that partially enters when the outlet door 200 is opened is discharged from the exhaust port 300 to the outside of the furnace together with the atmospheric gas from the heating furnace 10. Thus, the first heat treatment is completed, and the heat treatment furnace returns to the first step. The removed processed product 50 is moved to the next step such as cleaning.

このように加熱炉の内圧や塩浴室の内圧は最初の炉の立ち上げ時に設定するだけで、通常は管理する必要がない。定められた時間のサイクルで炉圧測定をし、記録するだけでよい。長い時間、炉を継続稼動させると加熱炉10の内圧と塩浴室20の内圧に変化が生じる場合があるが、そのときは加熱炉10と塩浴室20を区画する中間扉100の状態やガス通路を点検する。これは一般の雰囲気熱処理炉で行う定期点検と同じである。このようにして長期間安定した完全無酸化の状態で本発明設備を稼動することが出来る。   As described above, the internal pressure of the heating furnace and the internal pressure of the salt bath are only set when the furnace is started up for the first time, and usually do not need to be managed. It is only necessary to measure and record the furnace pressure in a defined time cycle. If the furnace is continuously operated for a long time, the internal pressure of the heating furnace 10 and the internal pressure of the salt bath 20 may change. In this case, the state of the intermediate door 100 that partitions the heating furnace 10 and the salt bath 20 and the gas passage Check. This is the same as the periodic inspection performed in a general atmospheric heat treatment furnace. In this way, the facility of the present invention can be operated in a completely non-oxidized state that is stable for a long period of time.

本発明は塩浴を冷媒にする鋼部品の熱処理に好適に利用することが出来る。その代表的な熱処理としてガス浸炭焼入れやガス浸炭窒化焼入れのマルクェンチ、マルテンパー処理がある。また、炭素鋼や合金鋼のオーステンパー処理やマルテンパー処理にも好適である。   The present invention can be suitably used for heat treatment of steel parts using a salt bath as a refrigerant. Typical heat treatment includes gas quenching and gas carbonitriding quenching and martempering. It is also suitable for austempering and martempering of carbon steel and alloy steel.

従来の塩浴冷却装置を使用した熱処理装置例である。It is an example of the heat processing apparatus using the conventional salt bath cooling device. メッシュベルト式オーステンパー炉の代表例である。This is a representative example of a mesh belt type austemper furnace. 本発明の実施形態の一例を示す箱型バッチ式雰囲気炉である。It is a box type batch type atmosphere furnace showing an example of an embodiment of the present invention. 従来の塩浴室を大気開放型で熱処理した場合の表面酸化状態を示す写真である。It is a photograph which shows the surface oxidation state at the time of heat-processing the conventional salt bathroom by an open air type.

符号の説明Explanation of symbols

10 加熱炉
11 入口扉
15 加熱ヒータ
16 雰囲気撹拌ファン
17 雰囲気導入管
20 塩浴室
21 塩浴撹拌機
22 塩浴槽
24 エレベーター
31 装入プッシャー
39 コンベア
40 処理品引出し装置
50 処理品
100 中間扉
110 ガス通路
200 出口扉
201 カーテンフレーム
300 排気口
310 排ガス量調節装置
400 圧力逃がし弁
500 メッシュベルト式加熱炉
502 メッシュベルト
503 シュート
504 塩浴槽
505 引き上げコンベア
510 雰囲気ガス導入パイプ
511 準備テーブル
DESCRIPTION OF SYMBOLS 10 Heating furnace 11 Inlet door 15 Heater 16 Atmosphere stirring fan 17 Atmosphere introduction pipe 20 Salt bath 21 Salt bath stirrer 22 Salt bath 24 Elevator 31 Charge pusher 39 Conveyor 40 Processed product drawing-out device 50 Processed product 100 Intermediate door 110 Gas passage 200 Exit door 201 Curtain frame 300 Exhaust port 310 Exhaust gas amount adjusting device 400 Pressure relief valve 500 Mesh belt type heating furnace 502 Mesh belt 503 Chute 504 Salt bath 505 Lifting conveyor 510 Atmospheric gas introduction pipe 511 Preparation table

Claims (4)

加熱炉本体と塩浴槽を設けた箱型熱処理装置において加熱炉本体と塩浴槽を接するように一体型で構成し、塩浴槽を密閉された雰囲気状態にする塩浴室とし、それぞれを開閉自在な扉で区画し、加熱炉本体に導入された雰囲気ガスを塩浴室に流入させて無酸化雰囲気状態にし、加熱から冷却までの処理品の全熱処理工程を無酸化雰囲気の中で行うことを特徴とする箱型無酸化熱処理炉。 In a box-type heat treatment device with a heating furnace body and salt tub, the heating furnace body and the salt tub are integrated so as to be in contact with each other, and the salt bath is in a sealed atmosphere, and each can be opened and closed freely. The atmosphere gas introduced into the heating furnace body flows into the salt bath to be in a non-oxidizing atmosphere state, and the entire heat treatment process of the processed product from heating to cooling is performed in a non-oxidizing atmosphere. Box-type non-oxidizing heat treatment furnace. 一端に処理品の入口を、他端に処理品の出口を有し、開閉自在の扉で区画され、入口側から出口へ向けて処理品を搬送する手段を備え、入口側から昇温、保持、降温処理を行なう加熱炉本体および冷却用塩浴室を一体で構成する箱型雰囲気熱処理炉を含み、加熱炉本体に集中して雰囲気ガスを導入し加熱炉本体の内圧を塩浴室内圧より高く維持することを特徴とする箱型無酸化熱処理炉。   Processed product inlet at one end, treated product outlet at the other end, partitioned by an openable / closable door, equipped with means to convey the processed product from the inlet side to the outlet, temperature rising and holding from the inlet side Including a box-type atmosphere heat treatment furnace that integrally constitutes a heating furnace body that cools the temperature and a salt bath for cooling, the atmosphere gas is concentrated in the heating furnace body to maintain the internal pressure of the heating furnace body higher than the salt bath internal pressure. A box-type non-oxidizing heat treatment furnace. 前記塩浴室は、加熱後、所定の温度で冷却を行う熱処理炉であって、特に表面無酸化を要求されるオーステンパー処理、ガス浸炭焼入れ、ガス浸炭窒化焼入れなどの処理を行なうことを特徴とする請求項1または2に記載の箱型無酸化熱処理炉。   The salt bath is a heat treatment furnace that cools at a predetermined temperature after heating, and is characterized by performing treatments such as austempering, gas carburizing and quenching, and gas carbonitriding and quenching that require surface non-oxidation. The box-type non-oxidizing heat treatment furnace according to claim 1 or 2. 前記塩浴室には、連続して加熱炉から流入する雰囲気ガスの余剰のガスを排ガスとして放出する排気口を設け、さらに塩浴室内圧が加熱炉内圧を上回るときにガスを放出する内圧調整弁が備えられていることを特徴とする請求項1または2に記載の箱型無酸化熱処理炉。




The salt bath is provided with an exhaust port for discharging excess gas of the atmospheric gas continuously flowing from the heating furnace as exhaust gas, and an internal pressure adjusting valve for discharging gas when the salt bath internal pressure exceeds the heating furnace internal pressure. The box-type non-oxidizing heat treatment furnace according to claim 1, wherein the box-type non-oxidizing heat treatment furnace is provided.




JP2008121156A 2008-05-07 2008-05-07 Box type anti-oxidation heat treat furnace Pending JP2009270758A (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101854645B1 (en) * 2017-11-24 2018-05-09 (주)청호열처리 Test device for austempering
RU186172U1 (en) * 2018-03-29 2019-01-11 Федеральное государственное бюджетное образовательное учреждение высшего образования "Курганский государственный университет" DIFFUSION ALLOYING DEVICE
CN110004277A (en) * 2019-04-09 2019-07-12 沈阳东博热工科技有限公司 A kind of high pressure gas quenching salt bath austempering three-chamber vacuum furnace and application method
US10388553B2 (en) 2015-12-28 2019-08-20 Asm Ip Holding B.V. Substrate processing system
CN110846479A (en) * 2019-12-20 2020-02-28 南京天马轴承有限公司 Novel salt steam discharging device for ferrule isothermal quenching salt bath
CN111893282A (en) * 2020-08-04 2020-11-06 刘根 Pre-oxidation heat treatment furnace
CN114150143A (en) * 2021-12-22 2022-03-08 青岛特殊钢铁有限公司 Salt bath heat treatment comprehensive experiment platform and method for high-speed wire rod
CN115522160A (en) * 2022-10-12 2022-12-27 济源市丰泽特钢实业有限公司 QPQ treatment production line

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10388553B2 (en) 2015-12-28 2019-08-20 Asm Ip Holding B.V. Substrate processing system
KR101854645B1 (en) * 2017-11-24 2018-05-09 (주)청호열처리 Test device for austempering
RU186172U1 (en) * 2018-03-29 2019-01-11 Федеральное государственное бюджетное образовательное учреждение высшего образования "Курганский государственный университет" DIFFUSION ALLOYING DEVICE
CN110004277A (en) * 2019-04-09 2019-07-12 沈阳东博热工科技有限公司 A kind of high pressure gas quenching salt bath austempering three-chamber vacuum furnace and application method
CN110004277B (en) * 2019-04-09 2024-01-19 沈阳东博热工科技有限公司 Three-chamber vacuum furnace for high-pressure gas quenching salt bath isothermal quenching and use method thereof
CN110846479A (en) * 2019-12-20 2020-02-28 南京天马轴承有限公司 Novel salt steam discharging device for ferrule isothermal quenching salt bath
CN111893282A (en) * 2020-08-04 2020-11-06 刘根 Pre-oxidation heat treatment furnace
CN111893282B (en) * 2020-08-04 2022-01-14 江苏维尔炉业有限公司 Pre-oxidation heat treatment furnace
CN114150143A (en) * 2021-12-22 2022-03-08 青岛特殊钢铁有限公司 Salt bath heat treatment comprehensive experiment platform and method for high-speed wire rod
CN115522160A (en) * 2022-10-12 2022-12-27 济源市丰泽特钢实业有限公司 QPQ treatment production line

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