JP2009269346A - Method for manufacturing inkjet recording head, and inkjet recording head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an inkjet recording head in which a discharge port surface can be formed with high precision while ensuring ink discharge performance at the discharge port, and to provide an inkjet recording head. <P>SOLUTION: An extension part 116 for blocking a discharge port 112 is formed in a nozzle tip part 103 cut from a substrate, and the discharge port 112 is opened by polishing the extension part 116. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for manufacturing an inkjet recording head capable of ejecting ink from an ejection port, and an inkjet recording head.

  The ink jet recording apparatus has low noise and low running cost, and it is easy to downsize the apparatus and color the recorded image. From such a viewpoint, the ink jet recording apparatus is widely used as a recording apparatus having functions such as a printer, a copying machine, and a facsimile, or an output device such as a composite electronic apparatus including a computer or a word processor, a workstation, or the like. .

  Inkjet recording apparatuses that record images on various recording media such as paper, cloth, plastic sheets, OHP sheets, and the like based on recording information are also widespread. In particular, in an industrial inkjet recording apparatus, there are a wide variety of recording media used for recording, and there are various requirements for the materials of these recording media. In recent years, development that meets these requirements has progressed, and in addition to paper and resin thin plates as ordinary recording media, recording devices that use cloth, leather, nonwoven fabric, metal, etc. as recording media are also used. It has become so.

  In an ink jet recording head used in an ink jet recording apparatus, an electrothermal conversion element (heater), a piezoelectric element, or the like is used as various ejection energy generating elements that generate energy for ejecting ink from ejection openings. In particular, a recording head using an electrothermal conversion element as an ejection energy generating element realizes high-density multi-nozzle relatively easily, and enables high-speed recording of high-resolution and high-quality images. This recording head is provided with an electrothermal conversion element in an ink flow path communicating with an ejection port, and the electrothermal conversion element generates heat when electric power corresponding to a recording signal is supplied. The ink in the ink flow path is foamed by the heat generation, and the ink can be ejected from the ejection port using the foaming energy.

  The part including the ejection opening and the ejection energy generating element of the ink jet recording head is formed in a chip shape. A plurality of chips (head chips) are formed on one substrate by a semiconductor process, and then cut out one by one. . A plurality of discharge ports in one head chip are formed in a line on the same plane (discharge port surface).

  Conventionally, when head chips are cut out one by one from one substrate on which a plurality of head chips are formed, as described in Patent Document 1, the substrates are arranged along the discharge port surface of each head chip. Is disconnected. Therefore, at the same time as the cutting, the discharge ports in the respective head chips are opened.

  In the cutting process of the substrate at the time of cutting out the head chip, the discharge port surface after cutting may be non-uniform due to the influence of the cutting teeth of the cutting device. In that case, it is necessary to polish the discharge port surface after cutting by a polishing process.

  As described in Patent Document 1, when the discharge port opens simultaneously with the cutting of the substrate, there is a possibility that foreign matters such as chips enter the discharge port in the cutting process. Further, in the polishing step after the cutting step, there is a possibility that foreign matter such as polishing residue or abrasive enters the discharge port. When foreign matter enters the discharge port in this way, the ink discharge performance from the discharge port may be impaired.

  In the polishing process, for example, the distance between the cut surface cut in the previous cutting process and the electrothermal conversion element as the discharge energy generating element is measured, and the polishing operation time is set according to the measurement result. Must be set. In addition, it is difficult to perform such measurement during the polishing operation, and it is necessary to confirm the finish by performing the measurement after the polishing process is completed. In recent years, there has been a demand for an inkjet recording apparatus capable of recording barcodes, photographs, and the like at high speeds. To this end, it is necessary to make the ink ejection conditions from a plurality of ejection ports constant with high accuracy. For example, when using an electrothermal conversion element as the discharge energy generating element, it is necessary to set the distance between the electrothermal conversion element and the discharge port surface to be constant with high accuracy. In addition, it is necessary to form the discharge port surface more smoothly and to increase the surface accuracy.

  Further, in the polishing process, since the load and resistance applied to the polishing member differ depending on the length of the recording head and the like, when the polishing amount is set according to the polishing operation time, the load corresponds to the length of the recording head and the like. It is necessary to finely set the polishing operation time based on the conditions. If the polishing operation time slightly deviates, there is a possibility that variations occur in the formation position and surface accuracy of the discharge port surface.

  An object of the present invention is to provide an ink jet recording head manufacturing method and an ink jet recording head capable of forming a discharge port surface with high accuracy while ensuring ink discharge performance at the discharge port.

  The inkjet recording head manufacturing method of the present invention is a method for manufacturing an inkjet recording head including a nozzle chip capable of ejecting ink from an ejection port. A forming step of forming on the substrate, a cutting step of cutting the nozzle chip from the substrate with the portion to be polished existing by cutting the substrate, and the polishing schedule of the nozzle chip cut from the substrate And a polishing step of polishing the portion to open the discharge port.

  The ink jet recording head of the present invention is an ink jet recording head in which the discharge port is opened by polishing a portion to be polished that closes the discharge port that discharges ink, and the discharge port in which the discharge port is formed A fluid passage having one end opened on the surface and the other end capable of introducing a pressurized fluid, the fluid passage depending on the degree of opening of the one end. It is possible to change at least one of the pressure and flow rate of the pressurized fluid introduced into the inside.

  According to the present invention, the discharge port is opened by polishing the portion to be polished that closes the discharge port that is the discharge port of the ink. Therefore, even if the portion to be polished is cut in the cutting step before the polishing, the discharge port Does not open. Therefore, it is possible to avoid a situation where a part of the ink enters the discharge port during the cutting process, and to manufacture a highly reliable ink jet recording head.

  In addition, a fluid flow path in which at least a part of the opening is blocked by the portion to be polished is provided, and at least one of the pressure or flow rate of the pressurized fluid in the fluid flow path is determined according to the degree of opening of the opening. By changing this, it is possible to confirm the polishing state of the portion to be polished. Accordingly, it is possible to accurately control the polishing amount and form the discharge port surface on which the discharge port is formed with high accuracy without being influenced by the ability of the cutting device or the polishing device. As a result, it is possible to suppress variations in performance of individual recording heads.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
FIG. 1 is a perspective view of an ink jet recording head 101 according to an embodiment of the present invention.

  The recording head 101 of this example is unitized as a head unit, and includes a recording head control unit 102, a nozzle chip unit 103, an ink supply unit 104, a base plate 105, and a connection component 106. A plurality of nozzles are arranged in the nozzle tip portion 103 as will be described later, and the nozzle pitch is set according to the recording resolution. The ink supply unit 104 is a part that supplies ink into the nozzle tip unit 103 and also has a function of moving bubbles generated in the nozzle. The ink supply unit 104 includes supply ports 209 and 210 that can be connected to the ink supply system of the recording apparatus main body. Ink is supplied to the nozzle tip 103 by introducing ink into the supply ports 209 and 210 from the ink supply system of the recording apparatus main body by a pump. Further, the ink supplied from the supply port 209 into the nozzle chip unit 103 can be returned from the supply port 210 to the ink supply system of the main body of the recording apparatus, whereby the ink can be circulated through the nozzle chip unit 103. . Bubbles remaining in the ink can be removed in the ink circulation path.

  The base plate 105 is a member for fixing and holding the nozzle tip portion 103, and also plays a role of releasing heat generated from the nozzle tip portion 103. The connection component 106 is a component for mounting the recording head 101 on the recording apparatus main body.

  FIG. 2 is an enlarged perspective view of a part of the nozzle tip portion 103 in the recording head 101.

  The nozzle tip portion 103 includes a base 115 on which a plurality of nozzle walls 108 are formed, and a top plate 109 joined to the upper surface of the nozzle walls 108. A plurality of ink flow paths 107 partitioned by nozzle walls 108 are formed between the base 115 and the top plate 109. Ink is supplied into the ink flow path 107 from an ink supply path 110 that forms a common liquid chamber. An electrothermal conversion element (heater) 111 is provided in the ink flow path 107, and the heater 111 generates heat when a drive signal is supplied from the control unit 102. By bubbling the ink in the ink flow path 107 by the heat generated by the heater 111, the ink can be discharged from the opening (discharge port) 112 of the ink flow path 107 using the bubbling energy. A discharge port 112 corresponding to each of the plurality of ink flow paths 107 is formed on the discharge port surface 113. The portion including the ink flow path 107, the ejection port 112, and the heater 111 is hereinafter also referred to as “nozzle”.

  Inside the ink flow path 107, a movable body 114 formed of metal or resin is provided. The distal end portion of the movable body 114 is formed in a comb-like shape, and the proximal end portion of the movable body 114 is fixed in the ink supply path 110 so that the distal end portions are located in the ink flow path 107. Yes. A plurality of holes 114 </ b> A are formed in the base end portion of the movable body 114. The free end of the movable body 114 positioned above the heater 111 is pushed upward when the ink is foamed by the heat generated by the heater 111. Accordingly, the movable body 114 can efficiently eject ink by regulating the growth direction of bubbles in the ink to the direction of the ejection port 112. In addition, fine bubbles generated in the ink flow path 107 can be discharged from the ejection port together with the ink. Thereby, it is possible to avoid an adverse effect when fine bubbles remain in the ink flow path 107, that is, an adverse effect on a recorded image due to a non-ejection of ink or a deviation in the ink ejection direction.

  FIG. 3 is a plan view of the base 115 on which the nozzle wall 108 is formed, and the movable body 114 is not shown.

  As shown in FIG. 4, a plurality of such nozzle tip portions 103 are formed on one base (substrate) 115 by a semiconductor process and then cut out one by one. In FIG. 4, the nozzle portion in the nozzle tip portion 103 is shown by a solid line. In the case of this example, the two nozzle tip portions 103 are formed so that their discharge ports face each other, the base 115 of the nozzle tip portion 103 is made common, and the top plate 109 is also common. It has become. The nozzle tip portions 103 are separated from each other by being cut by cutting teeth (not shown) of the cutting device along the cutting line L0. W0 is the cutting width of the cutting teeth. The nozzle tip portion 103 after cutting is polished to a polishing line L1 where the discharge port surface 113 is formed, as will be described later. W1 is the width between the polishing lines L1 in the two nozzle tip portions 103 before being cut out, and is larger than the cutting width W0. In the range of the width W <b> 1 between the base 115 and the top plate 109, an extended portion (planned polishing portion) 116 of the nozzle wall 108 is formed of the same material as the nozzle wall 108. Therefore, the opening is closed by the extended portion 116.

  Therefore, as shown in FIG. 5A, when the nozzle tip portion 103 is cut out along the cutting line L0, the discharge port remains blocked by the extended portion 116, and the discharge port is not formed. Therefore, in such a cutting process, there is no possibility that foreign matters such as chips enter the discharge port.

  In the case of this example, the two nozzle tip portions 103 are formed symmetrically in the vertical direction in FIG. In other words, the discharge ports are formed so as to face each other and the extended portions 116 are integrated. Therefore, in the cutting process, the extended portions 116 of the two nozzle tip portions 103 are divided.

  Thereafter, as shown in FIG. 5B, the nozzle tip portion 103 is polished to the polishing line L1, whereby the extended portion 116 is removed and the discharge port 112 is formed. That is, the discharge port surface 113 is formed and the discharge port 112 is opened. In the previous cutting process, even when the cut surface becomes non-uniform due to the influence of the undulation of the cutting teeth of the cutting device, the uniform discharge port surface 113 is formed by such a polishing process, and the discharge port 112 is formed. Can be formed accurately.

  During the polishing process of the nozzle tip portion 103, when the pressure of a fluid such as air or water is applied to the ink flow path 107 and the discharge port 112 is opened, the flow of the fluid is generated. To change. Therefore, by detecting the flow of the fluid with a flow rate sensor or detecting the change in the pressure with a pressure sensor, the time when the discharge port 112 is formed is detected, and the end time of the polishing operation is set optimally. be able to. As a result, the amount of polishing can be optimally controlled and the discharge port 112 can be formed accurately. In addition, by applying a positive pressure of the fluid in the ink flow path 107 during the polishing process, when the discharge port 112 is opened, the fluid is discharged to the outside from the discharge port 112, so that the fluid flows into the discharge port 112. It is possible to prevent foreign substances such as polishing residue and abrasives from entering.

  FIG. 6 is a perspective view for explaining an example of a polishing machine that can be used in the polishing process, and FIG. 7 is an enlarged view of a portion VII in FIG.

  The nozzle tip portion 103 is fixed to a jig 401, and the jig 401 is pressed in the direction of the arrow A1 by the cylinder 402 so as to press the nozzle tip portion 103 against the polishing sheet 406. One end and the other end of the polishing sheet 406 are wound around winding rollers 407 and 408, respectively, and an intermediate portion of the polishing sheet 406 is stretched over a backup roller 404 that can be adjusted in the vertical direction in the figure. Yes. A tension roller 405 for applying a predetermined tension to the polishing sheet 406 is provided on both sides of the backup roller 404. When one of the winding rollers 407 and 408 winds the polishing sheet 406 and the other feeds the polishing sheet 406, the polishing sheet 406 reciprocates between the two tension rollers 405 in the direction of the arrow B in the upper and lower directions in the figure. Moving. In conjunction with such reciprocation of the polishing sheet 406, the slide unit 403 reciprocates the jig 401 in the left and right arrow C directions. Along with such an operation, the polishing sheet 406 polishes the nozzle tip portion 103 while drawing a regular trajectory. When the nozzle tip portion 103 is polished to the polishing line L1 and the end of the polishing is detected, the cylinder 402 moves backward in the arrow A2 direction, and the polishing operation ends.

(Second Embodiment)
8 to 10 are diagrams for explaining the second embodiment of the present invention.

  FIG. 8 is a plan view of the base 115 on which the nozzle wall 108 is formed, and illustration of the movable body 114 is omitted. In the head chip portion 103 of this example, a fluid channel 207 different from the ink channel 107 is formed. The fluid flow path 207 is formed between the base 115 and the top plate 109, and one end thereof opens to the discharge port surface 113. 207 </ b> A is an opening of the fluid flow path 207 in the discharge port surface 113. The other end of the fluid flow path 207 can be connected to a supply path (not shown) of a fluid such as air or water. In the case of this example, the fluid flow path 207 is formed in at least one of both end portions of the head chip portion 103 in the arrangement direction (nozzle row direction) of the plurality of ejection ports 112. Further, the nozzle wall 108 and the ink channel 107 are not formed at the formation position of the fluid channel 207 in the head chip portion 103.

  In the present embodiment, as shown in FIG. 8, when the head chip portion 103 is polished to the polishing line L <b> 1, the opening 207 </ b> A of the fluid flow path 207 is formed on the discharge port surface 113. As shown in FIG. 9, an extension portion 116 of the nozzle wall 108 is formed of the same material as the nozzle wall 108 on the head chip portion 103 before being polished, and the extension portion 116 opens an opening of the fluid flow path 207. 207A is blocked. As shown in FIG. 10, when the head chip portion 103 is polished to the polishing line L1, an opening 207A of the fluid flow path 207 is formed. During such a polishing operation, a predetermined pressure of fluid (such as air or water) is applied in the fluid flow path 207. Therefore, when the head chip portion 103 is polished to the polishing line L1, the fluid in the fluid channel 207 is released from the opening 207A, and the pressure in the fluid channel 207 changes. Thereby, it can be detected that the head chip portion 103 has been polished to the polishing line L1.

  In this example, before polishing to the polishing line L1 of the head chip portion 103, that is, when the extended portion 116 is polished to a position just before the position of the discharge port surface, the discharge port 112 opens. During the polishing operation of the head chip portion 103, the position of the discharge port 112 may be set so that the discharge port 112 opens before the opening 207A of the fluid flow path 207. Further, the position of the discharge port 112 may be set so that the discharge port 112 is opened in the cutting operation before the polishing operation of the head chip portion 103. Further, the position of the discharge port 112 may be set so that the discharge port 112 opens simultaneously with the opening 207A of the fluid flow path 207 during the polishing operation of the head chip unit 103.

  In any case, the end timing of the polishing operation of the head chip portion 103 can be detected according to the set position of the opening 207A of the fluid flow path 207.

(Third embodiment)
11 and 12 are diagrams for explaining a third embodiment of the present invention.

  In the present embodiment, as shown in FIG. 11, the fluid flow path 207 has already been opened before the head chip portion 103 is polished to the polishing line L1. Then, as shown in FIG. 12, when the head chip portion 103 is polished to the polishing line L1, the opening area of the fluid flow path 207 increases. That is, the fluid flow path 207 is formed with a high resistance portion 207B having a relatively small cross-sectional area S0 and a low resistance portion 207C having a relatively large cross-sectional area D1, and the boundary between these portions 207B and 207C is formed. Located on the polishing line L1. Therefore, until the head chip portion 103 is polished to the polishing line L1, the opening area of the fluid flow path 207 is a relatively small area S0. When the head chip portion 103 is polished to the polishing line L1, the opening area is Is a relatively large area S1. In the case of this example, the cross-sectional areas S0 and S1 are set to different sizes in accordance with the width of the fluid flow path 207 in the nozzle row direction (left-right direction in the drawing).

  During the polishing operation of the head chip portion 103, a predetermined pressure of fluid (air, water, etc.) is applied to the fluid flow path 207. Therefore, when the head chip portion 103 is polished to the polishing line L1, the opening area of the fluid channel 207 increases from S0 to S1, and the pressure in the fluid channel 207 and the fluid flow rate change. By detecting the change in pressure or flow rate, it is possible to detect that the head chip portion 103 has been polished to the polishing line L1.

  In this example, the discharge port 112 is opened before the head chip portion 103 is polished to the polishing line L1. During the polishing operation of the head chip portion 103, the position of the discharge port 112 may be set so that the discharge port 112 opens before the fluid flow path 207. Further, the position of the discharge port 112 may be set so that the discharge port 112 is opened in the cutting operation before the polishing operation of the head chip portion 103. Further, during the polishing operation of the head chip portion 103, the position of the discharge port 112 is set on the polishing line L1 so that the discharge port 112 is opened when the opening area of the fluid flow path 207 increases from S0 to S1. May be.

  In any case, based on the change in the opening area of the fluid flow path 207, the change in the pressure in the fluid flow path 207 and the flow rate of the fluid is used to determine the end timing of the polishing operation of the head chip portion 103. Can be detected.

  Further, the pressure in the fluid flow path 207 may be not only a positive pressure for discharging the fluid from the opening, but also a negative pressure for introducing air or the like from the opening. Based on the change in pressure in 207, the end time of the polishing operation can be detected. Further, when detecting a change in the flow rate of the fluid in the fluid flow path 207, the flow direction of the fluid is not limited to the direction in which the fluid flows from the fluid flow path 207 toward the opening, but air or the like from the opening. May be introduced into the fluid flow path 207. Further, the sectional shape of the fluid channel 207 is changed continuously or in a plurality of steps so that the opening area of the fluid channel 207 changes continuously or in a plurality of steps as the head chip portion 103 is polished. It is good also as a shape which changes to. In these cases, the progress of the polishing operation can be grasped based on the change in the pressure in the fluid flow path 207 or the flow rate of the fluid.

(Other embodiments)
The present invention can be widely applied as a manufacturing method of various ink jet recording heads including a nozzle chip capable of ejecting ink from an ejection port. For example, the recording head may be a recording head used in a so-called serial scan type ink jet recording apparatus, or a long recording head used in a so-called full line type ink jet recording apparatus.

  In addition, the formation process for forming the nozzle chips on the substrate is not limited as long as the nozzle chips can be formed so that there is a portion to be polished that closes the discharge port. Is optional. That is, the number of nozzle chips formed on the substrate may be one or more, and the formation form of the plurality of nozzle chips is not limited to the symmetrically facing form as shown in FIG.

  In addition, the cutting process for cutting the substrate only needs to be able to cut out the nozzle chip from the substrate while at least the portion to be polished is present, and the polishing step for polishing the portion to be polished is polished so as to open the discharge port. It is only necessary that the planned portion can be polished.

  Further, the fluid flow path formed in the nozzle tip has one end opened on the discharge port surface and the other end capable of introducing the pressurized fluid, depending on the degree of opening of the one end, It is sufficient that at least one of the pressure and flow rate of the pressurized fluid introduced into the fluid flow path can be changed. The fluid flow path formed in the nozzle tip on the substrate may have an opening that is at least partially closed by the portion to be polished and whose opening degree changes as the polishing of the portion to be polished progresses. . In the polishing step, the progress of polishing can be confirmed by detecting a change in at least one of the pressure or flow rate of the pressurized fluid introduced into the fluid flow path.

  The fluid channel may be an ink channel communicating with the ejection port, or may be a channel different from the ink channel. Further, the opening of the fluid flow path may have a form in which the degree of opening increases stepwise or continuously as the polishing of the portion to be polished by the polishing process proceeds.

  In addition, the discharge port surface on which the discharge port is formed is a plane orthogonal to the ink discharge direction, and the ink discharge direction in consideration of the landing accuracy of the ink discharged toward the ink recording medium. It is good also as a plane which inclines with respect to.

FIG. 2 is a perspective view of a recording head in the first embodiment of the present invention. FIG. 2 is an enlarged perspective view of a partially cutout nozzle tip portion in FIG. 1. It is a schematic plan view of the principal part of the nozzle tip part of FIG. It is a schematic plan view of the principal part before the cutting operation | work of the nozzle tip part of FIG. (A) is a schematic plan view of the principal part after the cutting operation | work of the nozzle tip part of FIG. 2, (b) is a schematic plan view of the principal part after the grinding | polishing operation | work of the nozzle chip part. It is a schematic perspective view for demonstrating an example of the polisher for grind | polishing a nozzle tip part. It is an expansion perspective view of the VII part of FIG. It is a schematic plan view of the principal part of the nozzle tip part in the 2nd Embodiment of this invention. It is a perspective view of the principal part before the grinding | polishing operation | work of the nozzle tip part of FIG. It is a perspective view of the principal part after the grinding | polishing operation | work of the nozzle tip part of FIG. It is a schematic plan view of the principal part before the grinding | polishing operation | work of the nozzle tip part in the 3rd Embodiment of this invention. It is a schematic plan view of the principal part after the grinding | polishing operation | work of the nozzle tip part in the 3rd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 Recording head 103 Nozzle tip part 107 Ink flow path 108 Nozzle wall 109 Top plate 111 Electrothermal conversion element (heater)
112 Discharge port 113 Discharge port surface 115 Base (substrate)
116 Extension (planned polishing part)
207 Fluid flow path 207A Opening 207B High resistance part 207C Low resistance part L0 Cutting line L1 Polishing line

Claims (10)

In a manufacturing method of an ink jet recording head including a nozzle chip capable of discharging ink from an outlet,
Forming the nozzle tip on the substrate so that there is a portion to be polished that closes the discharge port; and
A cutting step of cutting the nozzle chip from the substrate with the portion to be polished still existing by cutting the substrate;
Polishing the planned portion of the nozzle chip cut out from the substrate to open the discharge port; and
A method of manufacturing an ink jet recording head, comprising:   2. The inkjet recording head according to claim 1, wherein when the portion to be polished is polished to the position of the discharge port surface where the discharge port is formed by the polishing step, the discharge port is opened. 3. Production method.   2. The inkjet recording according to claim 1, wherein when the portion to be polished is polished to a position before the position of the discharge port surface where the discharge port is formed by the polishing step, the discharge port opens. 3. Manufacturing method of the head. The forming step includes forming a fluid flow path in the nozzle tip on the substrate,
The fluid flow path has an opening portion that is at least partially closed by the planned polishing portion and whose opening degree changes with the progress of polishing of the planned polishing portion by the polishing step,
The polishing step includes a step of detecting a change in at least one of a pressure and a flow rate of a pressurized fluid introduced into the fluid flow path in order to confirm the progress of the polishing step. 4. A method for producing an ink jet recording head according to any one of 1 to 3.   The method of manufacturing an ink jet recording head according to claim 4, wherein the fluid flow path is an ink flow path communicating with the ejection port. The fluid flow path is a flow path different from the ink flow path communicating with the ejection port,
The method of manufacturing an ink jet recording head according to claim 4, wherein the opening of the fluid channel has a larger degree of opening as the polishing of the portion to be polished is progressed by the polishing step. 7. The ink jet recording head according to claim 6, wherein the opening of the fluid flow path has a degree of opening that increases stepwise as the polishing of the portion to be polished by the polishing process progresses. Production method. The forming step forms at least two nozzle tips on the substrate,
The two nozzle tips are formed such that the discharge ports face each other and the portions to be polished are integrated,
The method of manufacturing an ink jet recording head according to claim 1, wherein the cutting step includes a step of dividing the portion to be polished of the two nozzle chips. In the forming step, an ink channel communicating with the ejection port is formed by bonding a top plate to the upper surface of the nozzle wall formed on the substrate,
The method for manufacturing an ink jet recording head according to claim 1, wherein the portion to be polished is formed of the same material as the nozzle wall. An inkjet recording head in which the discharge port is opened by polishing a portion to be polished that closes the discharge port that discharges ink,
A fluid flow path having one end opening on the discharge port surface where the discharge port is formed and the other end capable of introducing pressurized fluid;
The fluid channel is capable of changing at least one of the pressure and the flow rate of the pressurized fluid introduced into the fluid channel according to the degree of opening of the one end. Recording head.

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