JP2009267247A - Method for manufacturing photoelectromotive force device, and laser processing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a method for manufacturing a photoelectromotive force device, which can perform patterning that does not require a high speed repetitive on-off operation of a laser and that does not form a texture structure at a connecting part with an optical incidence side electrode when irradiating laser when forming the texture structure. <P>SOLUTION: When forming an opening 104 for forming a texture structure in a concave potion formation area 105a on an etching-resistant film 103 by laser irradiation, during a period for one pulse of a laser beam, a laser beam irradiation position is shifted in the x-axis direction by a length of a first side of a pattern. Upon completion of scanning in the x-axis direction, the position between the laser beam and a silicon substrate 101 is shifted in the y-axis direction by a length of the concave potion formation area 105a and an electrode formation area 105b in the y-axis direction and the laser beam is scanned along the x-axis direction. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a photovoltaic device, and more particularly to a method for manufacturing a photovoltaic device having a light-receiving surface having an uneven shape. The present invention also relates to a laser processing apparatus for forming a concavo-convex shape on a light receiving surface of a photovoltaic device.

  In order to improve the performance of photovoltaic devices such as solar cells, it is important to efficiently incorporate sunlight into the substrate constituting the photoelectric conversion device. Therefore, in the conventional photovoltaic device, texture processing is performed on the substrate surface on the light incident side, and light once reflected on the surface is incident again on the surface, so that more sunlight is taken into the substrate and photoelectric The conversion efficiency is improved. Here, the texture processing refers to processing for intentionally forming fine irregularities having dimensions of several tens of nanometers to several tens of micrometers on the substrate surface.

  As a method of forming fine irregularities (texture structure) on the substrate surface in photovoltaic devices, the irradiation area during movement is detected in-process while the irradiation area of the laser light is continuously moved during laser light emission. A technique has been proposed in which a laser beam is emitted from a laser oscillator at the moment when the irradiation region reaches the processing region on the workpiece, and the processing region is processed (see, for example, Patent Document 1). .

JP-A-5-055613

  By the way, a light incident side electrode for collecting photocurrent generated by light incident on the substrate and taking it out to the outside is generally formed on the surface on the light receiving surface side of the photovoltaic device having a texture structure. Is. In such a photovoltaic device, it is possible to improve the fill factor of the photovoltaic device by not forming a texture structure only around the portion joined to the light incident side electrode. Further, the region where the texture structure is not formed is a portion that realizes good resistive bonding with the light incident side electrode, and can be used as a patterning means for selectively performing high-concentration impurity diffusion. .

  However, in order to perform patterning for forming such a texture structure by laser irradiation using the technique of Patent Document 1, it is necessary to repeatedly turn on and off the laser at high speed. As a result, there is a problem that the operation becomes complicated and unstable, and high positioning accuracy is required.

  The present invention has been made in view of the above, and does not require repetition of high-speed laser on / off operation, and a texture structure is formed at the joint portion with the light incident side electrode at the time of laser irradiation when forming the texture structure. It is an object of the present invention to provide a photovoltaic device manufacturing method and a laser processing apparatus capable of performing patterning not to be formed.

  In order to achieve the above object, a method of manufacturing a photovoltaic device according to the present invention comprises diffusing impurities of a second conductivity type over the entire surface on the light incident surface side of a semiconductor substrate of the first conductivity type. A first diffusion layer forming step of forming a first diffusion layer having a concentration of 1, an etching resistant film forming step of forming an etching resistant film having etching resistance on the first diffusion layer, and the etching resistant The recess formation region where the recess other than the electrode formation region where the electrode on the film is to be formed is formed is composed of a plurality of pulsed beam spots, and the outline of the group of the plurality of beam spots is substantially rectangular. Forming an opening while scanning a pattern of a laser beam with the first side of the pattern coinciding with the first direction being a scanning direction, and an opening forming step of exposing the first diffusion layer; Exposure position of the first diffusion layer A recess forming step of etching the first diffusion layer and the semiconductor substrate to form a recess, and a second concentration lower than the first concentration on the surface where the recess is formed. A second diffusion layer forming step of diffusing impurities of two conductivity types to form a second diffusion layer, and forming a light incident side electrode in the electrode forming region on the light incident surface side of the semiconductor substrate A surface electrode forming step, wherein in the opening forming step, the irradiation position of the laser beam is set to the length of the first side of the pattern during a period of one pulse of the laser beam. When the scanning in the first direction is completed, the second direction is the length of the recess forming region and the electrode forming region in the second direction perpendicular to the first direction. The position between the laser beam and the semiconductor substrate is shifted to the first Along the direction and performing scanning of the laser beam.

  According to this invention, during the period of one pulse of the laser beam, the irradiation position of the laser beam is set to the length of the first side of the pattern serving as one element of the periodic structure that determines the texture structure. When the scanning in the first direction is completed, the scanning direction between the laser beam and the semiconductor substrate in the second direction is the same as the length of the recess forming region and the electrode forming region in the second direction. Since the relative position is shifted and the laser beam is scanned along the first direction, the laser on-off operation and the scanning method can be simplified and efficient processing can be performed. Have. In addition, there is an effect that it is possible to manufacture a photovoltaic device that is stable and fast, has a small surface reflection loss, and has a good resistive junction with the light incident side electrode.

  Exemplary embodiments of a photovoltaic device manufacturing method and a laser processing apparatus according to the present invention will be explained below in detail with reference to the accompanying drawings. Note that the present invention is not limited to these embodiments. Moreover, sectional views of the photovoltaic devices used in the following embodiments are schematic, and the relationship between the thickness and width of the layers, the ratio of the thicknesses of the layers, and the like are different from the actual ones.

Embodiment 1 FIG.
First, the outline of the configuration of the photovoltaic device formed by using the laser processing apparatus according to Embodiment 1 of the present invention will be described. FIGS. 1-1 to 1-3 are diagrams schematically showing an example of the overall configuration of a general photovoltaic device. FIG. 1-1 is a top view of the photovoltaic device. 2 is a back view of the photovoltaic device, FIG. 1-3 is a cross-sectional view taken along the line AA of FIG. 1-2, and FIG. 2 is the photovoltaic device shown in FIGS. 1-1 to 1-3. It is sectional drawing which expands and shows a part of grid electrode periphery.

  As shown in FIGS. 1-1 to 1-3, the photovoltaic device 100 includes a P-type silicon substrate 101 as a semiconductor substrate, and one main surface (light-receiving surface) side of the P-type silicon substrate 101. N-type diffusion layer 102 (high-concentration N-type diffusion layer 102H, low-concentration N-type diffusion layer 102L) formed by diffusing N-type impurities formed on the surface and the other main surface (back surface) side surface are formed. And a P + layer 110 containing P-type impurities at a higher concentration than the silicon substrate 101. Further, the photovoltaic device 100 includes an antireflection film 109 that prevents reflection of incident light on the light receiving surface of the photoelectric conversion layer, and a light receiving surface for locally collecting electricity generated by the photoelectric conversion layer. The grid electrode 111 made of silver or the like provided, the bus electrode 113 made of silver or the like provided almost orthogonally to the grid electrode 111 for taking out the electricity collected by the grid electrode 111, and the photoelectric conversion layer For the purpose of taking out electricity and reflecting incident light, it is made of a back-side electrode 121 made of aluminum or the like provided on almost the entire back surface of the P-type silicon substrate 101, and silver or the like for collecting electricity generated in the back-side electrode 121. A back side collecting electrode 122.

  In addition, as shown in FIG. 2, the light receiving surface side of the photovoltaic device 100 includes a recess formation region 105 a in which a texture structure including a plurality of recesses 106 formed of a curved surface is formed, and a photovoltaic device. And an electrode forming region 105b where a light incident side electrode such as the grid electrode 111 of the power device 100 is formed. The electrode formation region 105b has a width (dimension) obtained by adding the width (dimension) of the light incident side electrode and the margin.

  The recess formation region 105 a has a texture structure formed by a plurality of recesses 106 formed at predetermined intervals on the upper surface of the silicon substrate 101, and has a predetermined depth from the upper surface of the silicon substrate 101 including the surface on which the recesses 106 are formed. A low-concentration N-type diffusion layer 102L in which N-type impurities are diffused at a low concentration is formed. 2 shows a cross-sectional view, the cross section of the recess 106 in the direction parallel to the substrate surface has a substantially circular shape. That is, the concave portion 106 has a bowl shape. In the electrode formation region 105b, the light incident side electrode such as the grid electrode 111 has a high concentration N type diffusion in which N type impurities are diffused at a high concentration so that the resistance is lower than that of the low concentration N type diffusion layer 102L. It is formed on the layer 102H through the joint portion 112. The structure of the light receiving surface and the back surface of the silicon substrate 101 is the same as that described with reference to FIGS.

  Next, a method for manufacturing the photovoltaic device 100 having such a structure will be described. FIGS. 3-1 to 3-9 are cross-sectional views schematically showing an example of the processing procedure of the method for manufacturing the photovoltaic device according to the first embodiment. The size shown below is an example.

  First, a silicon substrate 101 is prepared (FIG. 3A). Here, it is assumed that a P-type polycrystalline silicon substrate that is most frequently used for consumer photovoltaic devices is used. The silicon substrate 101 is manufactured by slicing a polycrystalline silicon ingot with a multi-wire saw and removing damage during slicing by wet etching using an acid or alkali solution. The thickness of the silicon substrate 101 after removing the damage is 250 μm, and the dimensions are 150 mm × 150 mm.

Next, the silicon substrate 101 after removing the damage is put into a thermal oxidation furnace, heated in an atmosphere of phosphorus (P) as an N-type impurity, and phosphorus is diffused at a high concentration on the surface of the silicon substrate 101 to obtain a high concentration N A mold diffusion layer 102H is formed (FIG. 3-2). Here, phosphorus oxychloride (POCl ₃ ) is used to form a phosphorus atmosphere and is diffused at 840 ° C. As a result, the high-concentration N-type diffusion layer 102H is formed on the upper surface, the lower surface, and the side surface of the silicon substrate 101. The high-concentration N-type diffusion layer 102H on the side surface is removed by etching or the like.

Thereafter, a film 103 having etching resistance (hereinafter referred to as an etching resistant film) 103 is formed on the high-concentration N type diffusion layer 102H formed on one main surface (FIG. 3-3). As the etching resistant film 103, a silicon nitride film (hereinafter referred to as SiN film), a silicon oxide (SiO ₂ , SiO) film, a silicon oxynitride (SiON) film, an amorphous silicon (а-Si) film, a diamond-like carbon film, A resin film or the like can be used. Here, an SiN film having a thickness of 240 nm formed by a plasma CVD (Chemical Vapor Deposition) method is used as the etching resistant film 103. Although the film thickness is 240 nm, an appropriate film thickness can be selected from the etching conditions at the time of texture / etching and the removability of the SiN film in the subsequent process.

  Next, a fine opening 104 is formed in the recess forming region 105a on the etching resistant film 103 (FIG. 3-3). The opening 104 is not formed in the electrode formation region 105b where the light incident side electrode of the photovoltaic device 100 is to be formed without forming the texture structure. In the first embodiment, the opening 104 is formed by a laser irradiation method. This method by laser irradiation does not require complicated steps such as resist coating, exposure / development, etching, and resist removal that are required when forming by photolithography technology used in a semiconductor process. There is an advantage that can be formed and the process can be simplified. Here, a method for forming the opening 104 by laser irradiation will be described in detail.

  FIG. 4 is a diagram schematically showing an example of the configuration of the first embodiment of the laser processing apparatus for forming the opening. The laser processing apparatus 200A includes a stage 201 on which a processing target such as a silicon substrate 101 on which an etching resistant film 103 is formed, a laser oscillation unit 202 that outputs laser light L, and an optical path while reflecting the laser light L. The reflecting mirror 203, the beam shape adjusting optical system 204 for adjusting and enlarging the beam shape of the laser beam L, and the laser beam L is branched into a plurality of laser beams and condensed at a predetermined position on the stage 201. And a control unit 230 that controls the relative position and speed between the stage 201 and the beam branching / condensing optical system 205 according to the region to be processed. Here, it is assumed that the distance between the lenses constituting the beam shape adjusting optical system 204 is fixed. The laser oscillation unit 202 corresponds to the laser oscillation unit in the claims, and the control unit 230 also corresponds to the control unit.

  The beam branching and condensing optical system 205 also includes a diffractive optical element 206 that diffracts the laser light L from the beam shape adjusting optical system 204 into a plurality of laser lights, and a plurality of lasers diffracted by the diffractive optical element 206. A condensing lens 207 for condensing light, a beam branch condensing optical system holder 208 having a mechanism for fixing the diffractive optical element 206 and the condensing lens 207 and rotating around the optical axis of these elements; Prepare. The diffractive optical element 206 corresponds to the beam branching unit in the claims, and the condensing lens 207 corresponds to the condensing unit.

  Further, in addition to the timing of laser oscillation, the control unit 230 scans the laser beam at a predetermined speed or irradiates the laser beam at a predetermined speed in order to form the opening 104 in the region to be processed, as will be described later. The laser beam or stage 201 is moved to change the position, and the beam branching and condensing optical system holder 208 is rotated to change the width of the region to be processed.

Here, as the laser oscillation unit 202, a TEM00 mode Q-switch Nd: YAG (Yttrium Aluminum Garnet) laser that outputs a third harmonic laser (wavelength 355 nm) is used. This wavelength has a high absorption coefficient in the SiN film that is the etching resistant film 103 to be processed, and since the wavelength is short, the allowable depth of processing can be increased, and fine processing is possible. By using a laser with high beam quality, the allowable depth of processing can be increased even when the condensing diameter of the laser beam is reduced. For this reason, TEM00 mode laser light is used here. In general, the repetition frequency of the Q-switched laser is 10 Hz to several hundred kHz, but here, a laser having a repetition frequency of 10 kHz is used. In addition, it has been clarified through experiments that an opening can be formed in the SiN film at 0.4 J / cm ² or more, and a depression can be formed in the underlying silicon substrate 101 at ² J / cm ² or more. Therefore, a laser beam intensity of ³ J / cm ² is used here. Although the third harmonic of the Nd: YAG laser is used as the laser light source, the laser oscillator 202 is a fundamental wave, second harmonic, 3 Nd: YVO ₄ laser, Nd: YLF (Lithium Yttrium Fluoride) laser, or the like. A double wave and a fourth wave can also be used.

  In such a laser processing apparatus 200A, the laser beam L output from the laser oscillation unit 202 is expanded by the beam shape adjusting optical system 204 after the optical path is changed by the reflecting mirror 203, and the beam branching and condensing optical system 205. Is incident on. In the beam branching and condensing optical system 205, after being diffracted into a plurality of laser beams by the diffractive optical element 206, it is condensed by the condensing lens 207 and formed on the silicon substrate 101 disposed on the stage 201. A plurality of fine focused spots are formed on the etching film 103. As a result, the opening 104 is opened in the etching resistant film 103 at the position where the focused spot is irradiated, and the surface of the underlying silicon substrate 101 is exposed. In order to provide the opening 104 in a wide range on the surface of the silicon substrate 101, at the time of laser irradiation, the laser processing apparatus 200A applies laser light irradiated on the stage 201 on which the silicon substrate 101 is installed or the silicon substrate 101 in a predetermined direction. Scan to. In addition, the scanning speed of the laser light is controlled by the control unit 230 so that the opening 104 is formed for each period in which the laser light is output at a repetition frequency by the laser oscillation unit 202. Note that the scanning direction of the stage 201 or the laser beam L is the x axis, and the direction on the surface of the stage 201 perpendicular to the scanning direction is the y axis. Further, in this specification, in the case of scanning with laser light, the case where the laser light is moved relative to the stage 201 and the case where the stage 201 is moved relative to the laser light are included.

  FIG. 5 is a diagram schematically showing a laser beam pattern formed on the object to be processed by the beam branching and condensing optical system. This laser light pattern 300 is a pattern in which 4 rows × 100 = 400 beam spots 301 are arranged on a triangular lattice, and the pitch between the beam spots 301 is 14 μm. The light diameter φ is 5 μm. In this figure, the left-right direction in the paper plane is the x-axis direction that is the scanning direction of the laser processing apparatus 200A, and the direction perpendicular to the x-axis direction in the paper plane is the y-axis direction. The outer shape of the laser light pattern 300 has a rectangular shape, the length M in the x-axis (short axis) direction is 48 μm, and the length W in the y-axis (long axis) direction is 1.393 mm. It is. Hereinafter, the length of the pattern 300 in the direction (y-axis direction) perpendicular to the scanning direction (x-axis direction) is referred to as “width”. In the case of FIG. 5, since the major axis direction of the pattern 300 is equal to the direction perpendicular to the scanning direction, the width is 1.393 mm.

  By scanning the pattern 300 in the x-axis direction, an opening 104 is formed in the etching resistant film 103 formed on the silicon substrate 101. As shown in FIG. 5, the case where scanning is performed in a state where the short axis direction of the rectangular laser light pattern 300 coincides with the scanning direction (x-axis direction) is hereinafter referred to as optical element vertical irradiation. I will decide. At this time, the width that can be processed by one scan (the dimension in the direction perpendicular to the scan direction) is 1.393 mm, which is the length of the long side of the pattern 300. In the first embodiment, the beam branching and condensing optical system 205 that forms the laser light pattern 300 is rotated on the optical axis about a predetermined angle to be formed on the stage 201 (on the object to be processed). The pattern 300 is arranged with its short side rotated by a predetermined angle with respect to the scanning direction (x-axis direction), and the width that can be processed by one scanning is changed. At this time, the maximum value of the width that can be processed by one scan is 1.393 mm, which is the length of the long side of the pattern 300 when the short side of the laser light pattern 300 coincides with the x-axis direction. Further, the case where the laser light pattern 300 is scanned in the x-axis direction with its short side rotated by a predetermined angle with respect to the scanning direction (x-axis direction) is hereinafter referred to as optical element rotation irradiation. To do. Therefore, hereinafter, (1) when laser irradiation is performed by optical element vertical irradiation, and (2) when laser irradiation is performed by optical element rotation irradiation will be described in order.

(1) When laser irradiation is performed by optical element vertical irradiation As described above, optical element vertical irradiation is performed by setting the scanning direction of the laser light and the short axis of the rectangular laser light pattern 300 in the same direction. This is a case where light irradiation is performed. Here, the size in the scanning direction (x-axis direction) at one point on the long side of the laser light pattern 300 on the silicon substrate 101 is δx, the repetition frequency of the laser is F, and the scanning speed of the laser light is V. At this time, the control unit 230 controls the scanning speed V of the processing target (stage 201) or the laser light L so that the speed becomes V = δx · F, thereby utilizing the pulse oscillation from the laser oscillation unit 202. Thus, the openings 104 having a predetermined period can be continuously formed in the etching resistant film 103. As a result, it is possible to perform processing without stopping laser oscillation or performing scanning positioning operation.

  For example, in the above example, since δx = 48 μm and F = 10 kHz, the stage 201 or the laser beam L is scanned in the x-axis direction with V = 480 mm / sec. As a result, the same opening 104 as the laser light pattern 300 shown in FIG. 5 is formed in the etching resistant film 103 on the stage 201 in one cycle of the repetition frequency F of the laser oscillation unit 202. Such an opening 104 is formed at a different position for each period of the laser output from the laser oscillation unit 202.

  When the scanning in the x-axis direction of the laser light is completed within a predetermined region having a width that matches the width of the laser light pattern 300 with the position in the y-axis direction fixed, the control unit 230 moves the stage 201 to the y-axis. After moving 1.393 mm in the direction, scan in the x-axis direction at a speed of −V (scan in the −x-axis direction at a speed of V). The movement in the y-axis direction is performed in a region where the laser beam does not hit the silicon substrate 101. By repeating this operation a predetermined number of times, a wide range of the surface of the silicon substrate 101 can be processed.

  By the way, in the formation of the light incident side electrode on the texture structure forming side of the photovoltaic device in which the texture structure is formed, the light incident side for the purpose of preventing the fill factor from being deteriorated and for the purpose of good resistive bonding It is required to pattern the high-concentration diffusion layer at the electrode formation position. For this reason, in the first embodiment, the opening 104 formed by laser irradiation is not provided around the portion of the silicon substrate 101 joined to the light incident side electrode, that is, in the electrode forming region 105b. As shown in FIG. 1A, the light incident side electrode is formed by a grid electrode 111 composed of a plurality of parallel line segments with a predetermined interval, and a bus electrode 113 composed of line segments orthogonal to the grid electrodes 111. Is done. Therefore, in this laser irradiation step, laser light is scanned along the extending direction of the grid electrode 111, and a gap having a predetermined value in consideration of the sum of the thickness of the grid electrode 111 and the margin is provided at the interval of the grid electrode 111. It is assumed that the electrode forming region 105b that is included is processed.

  For example, in FIG. 5, when 0.2 mm in consideration of the sum of the thickness of the grid electrode 111 and the margin is added to the width W of the laser light pattern 300 = about 1.4 mm (˜1.393 mm), it is about 1.6 mm. become. Therefore, after scanning at a certain position in the y-axis direction, the laser beam pattern moves in the y-axis direction with a value (1.4 mm) considering the sum of the grid electrode 111 thickness and margin (0.2 mm). By performing scanning again at that position, it is possible to form an opening pattern having a predetermined gap at a predetermined cycle without requiring complicated scanning or high-speed laser on / off operation. That is, the interval between the light incident side electrodes coincides with the period obtained by adding the width (thickness) of the grid electrode 111 and the margin to the width in the direction (y-axis direction) perpendicular to the scanning direction of the laser light pattern 300. Then, the on / off operation of the laser and the scanning method can be simplified to enable efficient and accurate processing. The distance moved in the y-axis direction is equal to the length in the y-axis direction of the recess forming region 105a and the electrode forming region 105b.

  As described above, when laser irradiation is performed by vertical irradiation of the optical element, the control unit 230 performs scanning in the x-axis direction by using the repetition frequency F of the laser oscillation unit 202 and the size δx of the laser light pattern 300 in the scanning direction. Scanning in a predetermined range at the scanning speed of the laser light in consideration of the above, and in the y-axis direction, the position is shifted at a period in consideration of the sum of the width of the grid electrode 111 and the margin to the width of the laser light pattern 300 . Accordingly, it is possible to prevent the opening 104 from being formed in the electrode formation region 105b where the grid electrode 111 is disposed.

(2) When performing laser irradiation by optical element rotation irradiation In (1), the interval between the light incident side electrodes is such that the width in the direction perpendicular to the scanning direction of the laser light pattern 300 (y-axis direction) and the grid electrode A pattern including the electrode formation region 105b in which the opening 104 is not formed can be formed only when the period and the period in consideration of the sum of the width and the margin coincide with each other. For example, grid electrodes 111 are formed at intervals of 2.2 mm in FIG. 1-1, and a rectangular pattern having a long side length of 1.393 mm shown in FIG. In the case of forming the opening 104 using 300, the pattern of the opening 104 cannot be formed because the interval between the grid electrodes 111 and the length of the long side of the pattern 300 do not coincide with each other when the optical element is vertically irradiated. Therefore, even when the interval between the grid electrodes 111 does not coincide with the period considering the width of the laser light pattern 300 and the sum of the width and the margin of the grid electrode 111, the laser light pattern 300 is not changed. A method by which the opening 104 can be formed will be described.

  Here, the light incident side electrodes in FIG. 1-1 are formed at an interval of 2.2 mm, and the sum of the thickness and the margin of the grid electrode 111 (that is, the length in the y-axis direction of the electrode formation region 105b) is 0.2 mm. It shall be processed. That is, the length in the y-axis direction of the recess forming region 105a is 2.0 mm, and the length in the y-axis direction of the electrode forming region 105b is 0.2 mm. In order to form a pattern having a gap of 0.2 mm with a period of 2.2 mm between the grid electrodes 111, the beam branching and condensing optical system 205 can be rotated around the optical axis as shown below. It is installed in a beam branching / condensing optical system holder 208 having a mechanism, and rotated around the optical axis to adjust the width that can be processed by one scan. The control of the rotation of the beam branching and condensing optical system 205 is performed by the control unit 230. In addition, since this structure can finely adjust the width of the gap, it is also effective when the optical element is designed and manufactured by adjusting the beam branching and condensing optical system 205 to the interval.

  FIG. 6 is a diagram for explaining how the width that can be processed in one scan is adjusted by the rotation of the beam branching and condensing optical system. In order to form a pattern having a gap of 0.2 mm at a cycle of 2.2 mm, processing with a width of 2.0 mm may be performed at a cycle of 2.2 mm. Therefore, the width that can be processed by one irradiation is set to 1.0 mm, and scanning is performed twice to process a region having a total width of 2.0 mm. In other words, when the region through which the laser beam pattern passes in one scan is defined as the scan region, the 2.0 mm recess formation region 105a is divided into two 1.0 mm width scan regions. Here, the 1.0 mm wide scanning region corresponds to the sub-region in the claims. Further, by moving the pattern in the direction (y-axis direction) perpendicular to the scanning direction of this pattern at a period of 2.2 mm, a 0.2 mm interval is provided between the 2.0 mm wide opening patterns (the electrode formation region 105b is formed). Provided).

  In order to set the width that can be processed by one irradiation to 1.0 mm by using the laser light pattern 300 shown in FIG. 5, the beam branching and condensing optical system 205 is used as a light beam as shown in FIG. What is necessary is just to rotate 53.7 degrees counterclockwise around an axis | shaft. The angle shown here is the short side a of the laser beam pattern 300 with respect to the x axis that is the scanning direction, where a is the short side of the rectangular laser light pattern 300 and b is the long side. Or the angle formed by the long side b of the laser light pattern 300 with respect to the y-axis perpendicular to the scanning direction. At this time, the size δx in the scanning direction (x-axis direction) at the position on the long side b of the laser light pattern 300 is 48 μm / cos 53.7 ° = 81 μm, and therefore the scanning speed of the stage 201 or the laser light. V is set to V = F · δx = 10 kHz × 81 μm = 810 mm / second. As a result, patterning of the light incident side electrode becomes possible only by turning on / off the laser twice in the course of one scan.

  FIG. 6 illustrates the case where the 1.393 mm × 48 μm pattern 300 is rotated counterclockwise by 53.7 ° in order to form a scanning area having a width of 1.0 mm. Thus, the method described above can be applied. FIG. 7 is a diagram for explaining a method for obtaining a rotation angle of a pattern for forming a scanning region having an arbitrary width. Here, in order to set the width of the scanning region to A, it is assumed that the pattern 300 is rotated so that the short side a of the pattern 300 is inclined by θ with respect to the scanning direction (x-axis direction). In this state, lines B1 and B2 passing through the two vertices C1 and C2 located at the opposite corners of the rectangular pattern 300 and parallel to the x axis are drawn, and the long side b passing through the vertex C1 of the pattern 300 is directed to the vertex C3. The point that extends and intersects with the straight line B2 is defined as D, and the point that the straight line drawn from the point D perpendicular to the straight line B1 intersects with the straight line B1 is defined as E. The length of the line segment C3 · D is S. From FIG. 7, the relationship of the following expressions (1) and (2) is established.

cos θ = A / (W + S) (1)
S = M · tan θ (2)

From these equations (1) and (2),
cos θ = A / (W + M · tan θ)
Thus, the following expression (3) is derived.
W · cos θ + M · sin θ = A (3)

  As described above, since the lengths M and W of the short side a and the long side b of the pattern 300 and the width A of the scanning region are known, the angle θ satisfying the expression (3) is obtained by numerical calculation. be able to.

  When the width of the region in which the opening 104 is formed is equal to or smaller than the length of the long side b of the pattern 300, the opening 104 can be formed in the region by one scan, but the width of the region in which the opening 104 is formed Is longer than the length of the long side b of the pattern 300, the width of the scanning region is adjusted to 1 / integer of a value obtained by subtracting the width and the margin of the grid electrode 111 from the interval of the grid electrode 111, and this scanning is performed. The pattern 300 may be rotated so as to match the width of the region, and scanning may be performed a plurality of times. However, in this case, the movement distance in the y-axis direction within the recess formation region 105a is only the width of the scanning region, and the movement distance in the y-axis direction between adjacent recess formation regions 105a is the scanning distance. This is a value obtained by adding the sum of the width of the grid electrode 111 and the margin to the width of the region.

  As described above, when laser irradiation is performed by rotating the optical element, the control unit 230 determines that the short side a of the laser light pattern 300 has a predetermined angle θ with respect to the x-axis so as to have the set width of the scanning region. The pattern 300 is rotated so as to be tilted, and the scanning in the x-axis direction takes into account the repetition frequency of the laser oscillation unit 202 and the length in the scanning direction at each position of the long side b of the rotated pattern 300. A predetermined range is scanned at the scanning speed of the laser beam, and in the y-axis direction, the position is shifted with a period in consideration of the sum of the width of the grid electrode 111 and the margin to the width of the laser beam pattern 300. Accordingly, it is possible to prevent the opening 104 from being formed in the electrode formation region where the grid electrode 111 is disposed.

  As described above, the recess forming region 105a in which the opening 104 is formed and the electrode forming region 105b in which the opening 104 is not formed are formed.

  Next, the vicinity of the surface of the silicon substrate 101 including the high-concentration N-type diffusion layer 102H is etched through the fine opening 104 opened in the etching resistant film 103 to form the recess 106 (FIG. 3-5). In this etching, since the silicon substrate 101 is etched through the opening 104, a recess 106 is formed on the surface of the silicon substrate 101 at the concentric position with the opening 104 as a center. When etching is performed with a mixed acid etching solution, a uniform texture is formed without being affected by the crystal plane orientation of the surface of the silicon substrate 101, and the photovoltaic device 100 with less surface reflection loss can be manufactured. Here, a mixed solution of hydrofluoric acid and nitric acid is used as an etching solution. The mixing ratio is hydrofluoric acid 1: nitric acid 20: water 10. The mixing ratio of the etching liquid can be changed to an appropriate mixing ratio depending on the desired etching rate and etching shape. Here, etching is performed so that the high-concentration N-type diffusion layer 102H is removed in the recess formation region 105a.

Next, after removing the etching resistant film 103 using hydrofluoric acid or the like (FIGS. 3-6), the silicon substrate 101 is again put into a thermal oxidation furnace and heated in the presence of phosphorus oxychloride (POCl ₃ ) vapor. Then, a low concentration N-type diffusion layer 102L in which phosphorus is diffused at a low concentration is formed on the surface of the recess 106 (FIGS. 3-7). The diffusion temperature at this time is 840 ° C. Here, since the electrode forming region 105b is a portion where the high-concentration N-type diffusion layer 102H remains at the time of etching, the resistance remains low even if low-concentration diffusion is performed again from above. Further, the inner surface of the recess 106 in the recess formation region 105a is in a state where the high-concentration N-type diffusion layer 102H is removed during the etching, but the low-concentration N-type diffusion layer 102L is formed by this diffusion treatment.

Next, the phosphorus glass layer formed by heating in the presence of phosphorus oxychloride (POCl ₃ ) vapor is removed in a hydrofluoric acid solution. Thereafter, an antireflection film 109 made of a SiN film or the like is formed on the cell surface by plasma CVD (FIGS. 3-8). The film thickness and refractive index of the antireflection film 109 are set to values that most suppress light reflection. Note that two or more layers having different refractive indexes may be stacked. Further, it may be formed by a different film forming method such as a sputtering method.

  Thereafter, a light incident side electrode (grid electrode 111, bus electrode 113) and a back electrode (back side electrode 121, back side current collecting electrode 122) are formed on the front and back surfaces of the silicon substrate 101, respectively (FIG. 3-9). Here, first, a paste mixed with aluminum is formed on the entire back surface of the silicon substrate 101 by screen printing as the back electrode 121. Next, a paste mixed with silver is formed as a grid electrode 111 (bus electrode 113) on the antireflection film 109 on the surface of the silicon substrate 101 in a comb shape by screen printing. And a baking process is implemented. Note that the paste serving as the base of the grid electrode 111 is formed on the electrode formation region 105b. In addition, the firing process is performed at 760 ° C. in an air atmosphere. At this time, the grid electrode 111 penetrates through the antireflection film 109 and contacts the high-concentration N-type diffusion layer 102H at the joint 112. As a result, the high-concentration N-type diffusion layer 102H can obtain a good resistive junction with the light incident side electrode (grid electrode 111, bus electrode 113). Further, the aluminum of the back electrode 121 is diffused into the silicon substrate 101 by firing, and the P + layer 110 is formed in a predetermined range from the back surface of the silicon substrate 101. As described above, the photovoltaic device 100 is manufactured.

  According to the first embodiment, the product of the repetition frequency of the laser oscillation of the laser oscillation unit 202 and the length of the laser light pattern 300 in the scanning direction is used as the scanning speed of the laser light or the stage 201. One opening 104 can be formed on the etching-resistant film 103 in one cycle of the laser without performing the laser on-off operation and without performing accurate alignment. Further, since the opening 104 can be formed without performing complicated and numerous laser on-off operations and without performing accurate alignment, the production process can be simplified and the yield can be reduced as compared with the prior art. Can be improved. Further, with respect to the scanning width of the laser beam, the diffractive optical element 206 that forms the laser beam in a shape that becomes one element of the periodic structure that determines the texture structure is configured to be rotatable around the optical axis. The opening 104 can be formed with a width of.

  Further, since the electrode is moved in a direction perpendicular to the scanning direction with a period in consideration of the distance between the grid electrodes 111 and the thickness and margin of the grid electrode 111, an electrode in which the opening 104 is not formed between the adjacent recess formation regions 105a. The formation region 105b can be formed. Since no texture structure is formed in the electrode formation region 105b, it is possible to obtain a photovoltaic device having a light incident side electrode with improved fill factor and good resistance bonding.

Embodiment 2. FIG.
The photovoltaic device manufacturing method according to the second embodiment is the same as the photovoltaic device manufacturing method according to the first embodiment, except that the laser beam branching is performed in the step of forming an opening in the etching resistant film using the laser beam. Only the method of condensing is different. Therefore, only the parts different from the first embodiment will be described below, and the description of the same parts as those of the first embodiment will be omitted.

  FIG. 8 is a diagram schematically showing an example of the configuration of the second embodiment of the laser processing apparatus for forming an opening. This laser processing apparatus 200B is different from the laser processing apparatus 200A according to the first embodiment in that a plurality of apertures 210 and apertures 210 are used instead of the beam branching condensing optical system 205 including the diffractive optical element 206 and the condensing lens 207. And a transfer optical system 213 that transfers an image onto a processing target. Further, the control unit 230 controls the stage 201 and the aperture 210 in accordance with the region to be processed. The aperture 210 corresponds to the beam branching means in the claims.

  In this laser processing apparatus 200B, the laser beam L emitted from the laser oscillation unit 202 is changed in optical path by the reflecting mirror 203, and then is expanded by the beam shape adjusting optical system 204 to the aperture 210 having a plurality of openings. Incident. An image of the aperture 210 having a plurality of openings is transferred onto the etching resistant film 103 formed on the silicon substrate by the transfer optical system 213, and a plurality of openings 104 are formed in the etching resistant film 103.

  FIG. 9 is a diagram illustrating an example of an aperture. As shown in this figure, the aperture 210 has a configuration in which openings 211 of 4 rows × 4 points = 16 points are arranged in a triangular lattice shape. An opening pattern 212 having a substantially rectangular outer shape is formed by the openings 211 arranged in a triangular lattice pattern. At this time, the width that can be processed by one scan can be adjusted by rotating the aperture 210 having a plurality of apertures around the optical axis as in the first embodiment.

  That is, during vertical irradiation of the optical element, the side a of the rectangular opening pattern 212 is arranged in the scanning direction (x-axis direction), and the side b is arranged in the direction perpendicular to the scanning direction (y-axis direction). If the length of the opening pattern 212 in the y-axis direction is called a width, the width of the scanning region can be changed by changing the angle formed by the side a of the opening pattern 212 with the x-axis direction.

  Note that the method for forming the opening 104 in the etching resistant film 103 using the laser processing apparatus 200B is the same as that described in the first embodiment, and thus the description thereof is omitted.

  Also in the second embodiment, when the opening 104 is formed in the etching resistant film 103, the light incident side electrode is patterned only by turning on / off the laser twice during one scanning. It has the effect of being able to.

Embodiment 3 FIG.
The manufacturing method of the photovoltaic device of the third embodiment is the same as the manufacturing method of the photovoltaic device of the first embodiment, in one scan in the step of forming an opening in the etching resistant film using laser light. Only the width adjustment method that can be processed is different. Since other than that is the same, the same code | symbol is attached | subjected to the same part and the description is abbreviate | omitted.

  FIG. 10 is a diagram schematically showing an example of the configuration of the third embodiment of the laser processing apparatus for forming an opening. In the laser processing apparatus 200C, in the laser processing apparatus 200A of the first embodiment, the beam shape adjusting optical system 204 is configured by a plurality of lenses 204a to 204c movable in the optical axis direction, and the beam branching and condensing optics. Instead of the beam branching and condensing optical system holder 208 having the rotation mechanism of the system 205, the beam branching and condensing optical system holder 208C without the rotation mechanism and the beam branching and condensing optical system holder 208 are mounted on the processing target of the stage 201. A z-axis stage 220 that is movable in a direction perpendicular to the placement surface (hereinafter referred to as z-axis direction), and the control unit 230 replaces the function of rotating the beam branching and condensing optical system around the optical axis. , The function of moving the beam branching and focusing optical system holder 208C in the z-axis direction using the z-axis stage 220, and the lenses 204a to 204a of the beam shape adjusting optical system 204. That it has a, a function of changing the distance between 04c is different. The z-axis stage 220 corresponds to the moving means in the claims.

  Here, by adjusting the interval between the lenses 204a to 204c constituting the beam shape adjusting optical system 204 and adjusting the divergence angle of the laser light incident on the condensing lens 207 (beam branching condensing optical system 205), The width that can be processed by one scan is adjusted. Specifically, by adjusting the distance between the plurality of lenses 204a to 204c constituting the beam shape adjusting optical system 204, the divergence angle and the condensing diameter of the laser light incident on the beam branching condensing optical system 205 can be adjusted. adjust.

  Further, the z-axis stage 220 adjusts the height of the beam branching and condensing optical system 205 from the stage 201 so that the focal point is formed on the silicon substrate placed on the stage 201. Although the height of the beam branching and condensing optical system 205 is adjusted here, the height of the stage 201 may be adjusted.

  Here, a specific method of adjusting the width that can be processed by one scanning at the time of laser irradiation will be described. As described in the first embodiment, the beam branching and condensing optical system 205 includes a diffractive optical element 206 for forming apertures of 4 rows × 100 points = 400 points in a triangular lattice shape with a pitch of 14 μm, and for beam condensing. The condensing lens 207. This pitch varies depending on the distance from the diffractive optical element 206 to be processed. For example, in this example, it is assumed that the pitch at a point 200 mm from the diffractive optical element 206 is 14 μm. The distance from the diffractive optical element 206 is proportional to the pitch of the branch pattern. For example, in the above example, the pitch is 7 μm at a point where the distance from the diffractive optical element 206 is 100 mm.

  On the other hand, it is desirable that the aperture 104 formed in the etching resistant film 103 with a laser has a smaller hole diameter because a texture with a large aspect ratio can be formed. That is, it is desirable to perform processing at a point where the light collected by the condensing lens 207 of the beam branching condensing optical system 205 has the smallest beam diameter. The distance between the condensing lens 207 and this condensing point depends on the divergence angle of the incident light to the condensing lens 207 (and hence the beam branching condensing optical system 205). Increasing the divergence angle increases the distance between the condensing point and the condensing lens 207, and reducing the divergence angle reduces the distance between the condensing point and the condensing lens 207.

  As described above, by adjusting the divergence angle of the incident light to the beam branching condensing optical system 205, the pitch of the pattern at the condensing point of the pattern formed by the beam branching condensing optical system 205 can be adjusted. . Note that the z-axis stage 220 was used so that the focal point was formed on the silicon substrate 101.

  For example, in order to adjust the width that can be processed by one scanning to 2.0 mm, the pattern pitch may be set to 20 μm (= 14 μm × 2.0 mm / 1.4 mm). Further, when the divergence angle of incident light is adjusted to a radius of curvature of 700 mm and the distance from the diffractive optical element 206 to the silicon substrate 101 is 280 mm, the pattern size δx in the x-axis direction is enlarged at the same rate, and δx = 48 μm × 20 μm / 14 μm = 68.6 μm. When the repetition frequency F of the laser oscillation unit 202 is 10 kHz, the scanning speed V of the laser beam is V = F · δx = 686 mm / sec. As a result, the opening 104 can be formed in a region having a width of 2.0 mm by scanning under the conditions as shown here.

  Also in the third embodiment, the opening 104 for forming the texture structure on the light incident side electrode can be patterned only by turning on / off the laser twice during one scanning.

  In the above description, the case where the laser beam is irradiated onto the object to be processed in a triangular lattice shape is described as an example. However, the present invention is not limited to this, and the laser light such as a square lattice shape may be in other arrangement states. Irradiation may be performed as follows.

  As described above, the laser processing apparatus according to the present invention is useful for manufacturing a photovoltaic device having a texture structure on the light incident surface side.

It is a top view of a photovoltaic device. It is a reverse view of a photovoltaic apparatus. It is AA sectional drawing of FIGS. 1-2. It is sectional drawing which expands and shows a part of grid electrode periphery of the photovoltaic apparatus shown by FIGS. 1-1 to 1-3. It is sectional drawing which shows typically an example of the process sequence of the manufacturing method of the photovoltaic apparatus by this Embodiment 1 (the 1). It is sectional drawing which shows typically an example of the process sequence of the manufacturing method of the photovoltaic apparatus by this Embodiment 1 (the 2). It is sectional drawing which shows typically an example of the process sequence of the manufacturing method of the photovoltaic apparatus by this Embodiment 1 (the 3). It is sectional drawing which shows typically an example of the process sequence of the manufacturing method of the photovoltaic apparatus by this Embodiment 1 (the 4). It is sectional drawing which shows typically an example of the process sequence of the manufacturing method of the photovoltaic apparatus by this Embodiment 1 (the 5). It is sectional drawing which shows typically an example of the process sequence of the manufacturing method of the photovoltaic apparatus by this Embodiment 1 (the 6). It is sectional drawing which shows typically an example of the process sequence of the manufacturing method of the photovoltaic apparatus by this Embodiment 1 (the 7). It is sectional drawing which shows typically an example of the process sequence of the manufacturing method of the photovoltaic apparatus by this Embodiment 1 (the 8). It is sectional drawing which shows typically an example of the process sequence of the manufacturing method of the photovoltaic apparatus by this Embodiment 1 (the 9). It is a figure which shows typically an example of a structure of Embodiment 1 of the laser processing apparatus which forms opening. It is a figure which shows typically the pattern of the laser beam formed on a process target by a beam branching condensing optical system. It is a figure for demonstrating a mode that the width | variety which can be processed by one scan is adjusted by rotation of a beam branch condensing optical system. It is a figure for demonstrating the method of calculating | requiring the rotation angle of the pattern for forming the scanning area | region of arbitrary widths. It is a figure which shows typically an example of a structure of Embodiment 2 of the laser processing apparatus which forms opening. It is a figure which shows an example of an aperture. It is a figure which shows typically an example of a structure of Embodiment 3 of the laser processing apparatus which forms opening.

Explanation of symbols

100 Photovoltaic device 101 Silicon substrate 102 N-type diffusion layer 102H High-concentration N-type diffusion layer 102L Low-concentration N-type diffusion layer 103 Etch-resistant film 104 Opening 105a Recess formation area 105b Electrode formation area 106 Recess 109 Antireflection film 110 P + layer 111 Grid electrode 112 Joint part 113 Bus electrode 121 Back side electrode 122 Back side current collection electrode 200A, 200B, 200C Laser processing apparatus 201 Stage 202 Laser oscillation part 203 Reflection mirror 204 Beam shape adjustment optical system 204a-204c Lens 205 Beam branching condensing optics System 206 Diffractive optical element 207 Condensing lens 208, 208C Beam branching condensing optical system holder 210 Aperture 211 Aperture 212 Aperture pattern 213 Transfer optical system 220 z-axis stage 230 Controller 300 Pattern 301 Beams Tsu door

Claims (7)

A first diffusion layer forming step of forming a first diffusion layer having a first concentration by diffusing impurities of a second conductivity type over the entire surface on the light incident surface side of the first conductivity type semiconductor substrate; ,
An etching resistant film forming step of forming an etching resistant film having etching resistance on the first diffusion layer;
The recess formation region where the recess other than the electrode formation region where the electrode on the etching resistant film is to be formed is formed of a plurality of pulsed beam spots, and the outline of the group consisting of the plurality of beam spots is substantially Forming an opening that exposes the first diffusion layer while scanning a rectangular laser beam pattern with the first side of the pattern aligned with the first direction that is the scanning direction Process,
A recess forming step for forming a recess by etching the first diffusion layer and the semiconductor substrate around the exposed position of the first diffusion layer;
A second diffusion layer forming step of diffusing a second conductivity type impurity having a second concentration lower than the first concentration to form a second diffusion layer on the surface on which the recess is formed;
A surface electrode forming step of forming a light incident side electrode in the electrode forming region on the light incident surface side of the semiconductor substrate;
Including
In the opening forming step,
During the period of one pulse of the laser beam, the irradiation position of the laser beam is moved in the first direction by the length of the first side of the pattern,
When the scanning in the first direction is completed, the laser beam and the semiconductor in the second direction are equal to the length of the recess forming region and the electrode forming region in the second direction perpendicular to the first direction. A method of manufacturing a photovoltaic device, wherein the laser beam is scanned along the first direction by shifting a position between the substrate and the substrate.   In the opening forming step, a laser beam from a laser oscillator that oscillates a pulsed laser is branched into a beam spot group included in the pattern by a diffractive optical element, and a second of the pattern in the second direction is split. When the side length is larger than the width in the second direction of the recess formation region, the diffraction is performed so that the width of the pattern in the second direction is equal to the width of the recess formation region. 2. The method of manufacturing a photovoltaic device according to claim 1, wherein the laser beam is scanned in a state where the optical element is rotated around an optical axis.   In the opening forming step, laser light from a laser oscillator that oscillates a pulsed laser is branched into a beam spot group included in the pattern by a diffractive optical element, and a first perpendicular to the first side of the pattern is formed. When the length of the two sides is smaller than the width of the concave portion forming region in the second direction, the width in the second direction that can be processed by one scan is equal to or smaller than the second side of the pattern. The recess forming region is divided into sub-regions having the same width in the second direction so that the width in the second direction of the pattern is equal to the width in the second direction of the sub-region. 2. The method of manufacturing a photovoltaic device according to claim 1, wherein the laser light is scanned while the diffractive optical element is rotated by a predetermined angle around an optical axis so as to be equal. 3.   In the opening forming step, a laser beam from a laser oscillator that oscillates a pulsed laser is branched into a beam spot group included in the pattern by a diffractive optical element, and includes a plurality of lenses that can move in the optical axis direction. The beam shape adjusting optical system is used to adjust a divergence angle of incident light to the diffractive optical element to adjust a pitch at a condensing point between the beam spots. Photovoltaic device manufacturing method. A stage on which the workpiece is placed;
Laser oscillation means for oscillating pulsed laser light;
A beam shape adjusting optical system for expanding and adjusting the beam shape of the laser light oscillated from the laser oscillating means;
Beam branching means for branching the laser beam from the beam shape adjusting optical system into a plurality of beams, and forming a pattern in which the outline of the group of the plurality of beams arranged at a predetermined interval is substantially rectangular;
Condensing means for condensing the plurality of beams branched by the beam branching means and irradiating the object to be processed;
The first side of the pattern is made to coincide with the first direction which is the scanning direction, and the irradiation position of the laser beam is set to the first side of the pattern during a period of one pulse of the laser beam. When the scanning in the first direction is completed, the laser beam and the semiconductor substrate are moved by a predetermined distance in a second direction perpendicular to the first direction. Control means for scanning the laser beam along the first direction by shifting the position between
A laser processing apparatus comprising: Beam splitting means holding means for holding the beam splitting means rotatably around the optical axis,
In the control means, the length of the pattern forming region for forming the pattern in the second direction is different from the length of the second side perpendicular to the first side of the pattern formed by the beam branching means. In this case, the beam branching unit has a function of rotating around the optical axis so that the width of the pattern in the second direction is equal to the width of the pattern formation region. The laser processing apparatus as described in. The beam shape adjusting optical system has a plurality of lenses capable of adjusting the distance to each other in the optical axis direction,
The beam branching means is composed of a diffractive optical element,
The laser processing apparatus according to claim 5, wherein the control unit has a function of adjusting a divergence angle of incident light to the diffractive optical element.

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