JP2009265415A - Drive device and imaging device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drive device having high responsiveness in high precision by having compactness, large drive force, high efficiency, and self-holding characteristics. <P>SOLUTION: A vibration-proof unit 300 being a shake correction drive device moving a holder 38 mounted with CCD 31 on a flame 302 includes: a rod 330x extending in an X direction on a plane of the frame 302; a rod 330y coupled with the rod and extending in a Y direction from the coupled part on the plane of the frame 302; an X-axis drive mechanism part 310x fixed on the frame 302 and having an X-axis vibrator 320x giving elliptical vibration on the rod 330x; and a Y-axis drive mechanism part 310y fixed on the holder 38 and having a Y-axis vibrator 320y giving elliptical vibration on the rod 330y. The vibration-proof unit moves the holder 38 along an XY plane by driving the X-axis vibrator 320x and the Y-axis vibrator 320y. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention has a drive device that moves the moving frame (frame) in two directions by using the elliptical vibration of the vibrator and moves in a predetermined direction, and a shake correction function that performs shake correction by applying the drive device. The present invention relates to an image pickup apparatus.

  2. Description of the Related Art Conventionally, there is a digital camera as an image pickup apparatus having a camera shake correction function. The camera shake correction function includes camera shake vibration in the pitch direction (Y-axis direction) and camera shake in the yaw direction (X-axis direction). Vibration is detected using shake detection means such as an angular velocity sensor, and based on the detected shake signal, a part of the imaging optical system or the imaging element is in a plane perpendicular to the imaging optical axis in the direction to cancel the shake. Therefore, there is known a camera shake correction function that corrects image blur on the imaging surface of the image sensor by independently shifting in the horizontal direction (X-axis direction) and the vertical direction (Y-axis direction).

  In the camera shake correction mechanism that realizes such a camera shake correction function, a part of the photographing lens described above or a driving unit that moves the image sensor in the horizontal direction and the vertical direction is operated following the camera shake. In addition, high responsiveness, precision driveability (minute driveability), and self-maintaining characteristics that maintain the position of the moving body even when the power is turned off are required.

  In response to such a request, in Patent Document 1, the first impact actuator is fixed to the first substrate, the second substrate is driven in the yaw direction, and the second impact actuator is fixed to the second substrate. A camera shake correction mechanism for driving a third substrate on which an image sensor is mounted is disclosed.

Further, in Patent Document 2, camera shake correction is performed by connecting two actuators that operate in an orthogonal direction fixed to a fixed member to a board on which an image sensor is mounted, to the board by a link mechanism and drive the board in the pitch direction and the yaw direction. A mechanism is disclosed.
JP 2006-81348 A JP 2006-133740 A

  However, in the camera shake correction mechanism using the impact actuator shown in Patent Document 1 as a drive mechanism, high responsiveness, precision drive, and self-maintaining characteristics can be obtained. There is also a problem that it is difficult to make the shaft for transmitting a high rigidity, and it is not possible to obtain a high output with a small size. Further, when a dustproof filter or the like is integrated on the front surface of an image pickup device such as a CCD in a camera or the like and a relatively large and heavy image pickup unit is driven, a high output is required, and the camera becomes large. That is, in order to increase the driving force, it is necessary to increase the inertial mass, and the driving mechanism itself becomes large. In addition, due to the principle of driving by inertial force that overcomes frictional force, energy loss due to frictional sliding always occurs, and there is a fundamental problem that efficiency cannot be increased so much, and a small and high-output drive mechanism is Cannot be realized. Furthermore, the frame configuration is such that a frame-shaped second substrate is interposed between the fixed frame (first substrate) and the moving frame (third substrate) on which the image sensor is mounted, and the frame configuration is complicated. However, there was a problem that the mechanism was enlarged.

  On the other hand, in the camera shake correction mechanism described in Patent Document 2, two vibration actuators are coupled to a board on which an image sensor is mounted by a link mechanism, so that the frame structure is simpler than the frame structure of Patent Document 1. Yes. However, since the vibration actuator and the board are connected by a link mechanism, the mechanism is large. In addition, the link mechanism has a complicated structure, and the drive unit of the link mechanism requires a backlash for driving, and cannot be driven with high accuracy. In addition, there is a fundamental problem that deteriorates the camera shake correction performance that the drive delay due to the play of the link occurs and the responsiveness is not good.

  The present invention has been made in view of the above, and is a small-sized, large driving force, high-efficiency, high-precision driving device and an imaging device having an anti-shake function to which the driving device is applied. The purpose is to provide.

  The drive device according to claim 1 of the present invention is a drive device for moving a second frame having a predetermined area on the plane of the first frame, and in the first direction on the plane of the first frame. A first shaft member extending to the first shaft member, and a second shaft extending from the joint portion in a second direction different from the first shaft member on the plane of the first frame. The shaft member and the first shaft member are fixed to the first frame, and the first shaft member is guided by the first guide portion and pressed against the first shaft member. A first vibration unit having a first vibrator for applying a first elliptical vibration; and the second vibration member, which is fixed to the second frame, guides the second shaft member with a second guide portion, and The second shaft member is pressed against the second shaft member while being pressed by the second shaft member. A second vibration unit having a second vibrator for applying circular vibration, and when the first elliptical vibration is applied to the first shaft member, When the first shaft member moves relative to the vibration unit, the second shaft member, the second vibration unit, and the second frame move in the axial direction of the first shaft member, When the second elliptical vibration is applied to the second shaft member, the second vibration unit moves with respect to the second shaft member, whereby the second frame is moved to the second shaft member. The shaft member moves in the axial direction.

  The drive device according to claim 2 of the present invention is the drive device according to claim 1, wherein the first shaft member and the second shaft member are coupled via a shaft coupling body, and the shaft coupling is performed. The coupling site between the body and each of the shaft members becomes a node portion in the natural vibration when the first shaft member or the second shaft member vibrates.

  According to a third aspect of the present invention, there is provided the driving device according to the second aspect, wherein the urging means for urging the second frame in a direction in which the second frame is pressed against the first frame; And at least three rolling elements arranged between the frame and the second frame, and the first rolling element, which is one of the three rolling elements, The second rolling element, which is disposed in the vicinity of the shaft coupling body and the other one, is disposed on a substantially extended line of the shaft coupling body and the first rolling body, and the third rolling body is the second rolling element. It is arrange | positioned on the substantially extended line of the shaft member.

  According to a fourth aspect of the present invention, in the drive device according to the second aspect, the urging means for urging the second frame in a direction in which the second frame is pressed against the first frame; And at least two rolling elements arranged between the second frame and the second frame, wherein one of the two rolling elements is a member of the first shaft member. The other rolling element is disposed on the extended line, and is disposed on the substantially extended line of the second shaft member.

  The drive device according to claim 5 of the present invention is the drive device according to claim 1, wherein the first shaft member and the second shaft member have the same shape and are orthogonal to each other.

  According to a sixth aspect of the present invention, there is provided an image pickup apparatus having a blur correction function that moves a second frame in which an image pickup element is held on a first frame having a predetermined area in a plane perpendicular to a photographing optical axis. In the imaging apparatus having a shake correction function for correcting shake by the first shaft member extending in the first direction on the plane of the first frame, the first shaft member is coupled to the first shaft member, and A second shaft member extending in a second direction different from the first shaft member from the coupling portion on the plane of the first frame; and the first shaft fixed to the first frame A first vibration unit having a first vibrator that guides a member with a first guide portion and applies a first elliptical vibration to the first shaft member while being pressed by the first shaft member And fixed to the second frame, and The second shaft member has a second vibrator that guides the second shaft member with the second guide portion and applies a second elliptical vibration to the second shaft member while being pressed by the second shaft member. The first shaft member moves relative to the first vibration unit in a state where the first elliptical vibration is applied to the first shaft member. Accordingly, the second shaft member, the second vibration unit, and the second frame are moved in the axial direction of the first shaft member, and the second elliptical vibration is applied to the second shaft member. In the applied state, the second frame moves in the axial direction of the second shaft member by moving the second vibration unit relative to the second shaft member.

  According to a seventh aspect of the present invention, there is provided an imaging apparatus having a shake correction function according to the sixth aspect, wherein the first shaft member and the second shaft member are coupled via a shaft coupling body. The engagement portion between the shaft coupling body and each of the shaft members serves as a node portion in the natural vibration when the first shaft member or the second shaft member vibrates.

  An image pickup apparatus having a shake correction function according to claim 8 of the present invention is the image pickup apparatus according to claim 6, wherein the first shaft member and the second shaft member have the same shape. Are orthogonal to each other.

  An image pickup apparatus having a shake correction function according to a ninth aspect of the present invention is the image pickup apparatus according to the sixth aspect, wherein the biasing means biases the second frame in a direction in which the second frame is pressed against the first frame. And at least three rolling elements disposed between the first frame and the second frame, wherein the first rolling element is one of the three rolling elements. The rolling element is disposed in the vicinity of the shaft coupling body, and the second rolling element, which is the other one, is disposed on a substantially extended line of the shaft coupling body and the first rolling element, and the third rolling element is disposed. The moving body is disposed on a substantially extended line of the second shaft member.

  According to the present invention, it is possible to provide a small-sized, large driving force, high-efficiency, and high-precision driving device and an imaging device having an anti-shake function to which the driving device is applied.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  An imaging apparatus according to an embodiment of the present invention is equipped with a drive device for performing camera shake correction of an imaging unit including an imaging element that obtains an image signal by photoelectric conversion. Here, as an example, a lens can be replaced. An application example to a single-lens reflex electronic camera (digital camera) will be described.

  First, a system configuration example of a digital camera (hereinafter referred to as a camera) according to the present embodiment will be described with reference to FIG. FIG. 1 is a block diagram schematically showing the system configuration of the camera according to the present embodiment.

  The camera of the present embodiment forms a camera system with a body unit 100 having a camera body as an imaging device and a lens unit 10 as an interchangeable lens, which is one of accessory devices.

  The lens unit 10 is detachable through a lens mount (not shown) provided on the front surface of the body unit 100. The lens unit 10 is controlled by a lens control microcomputer 5 (hereinafter referred to as “Lμcom”). The body unit 100 is controlled by a body control microcomputer (hereinafter referred to as “Bμcom”) 50. These Lμcom5 and Bμcom50 are electrically connected via the communication connector 6 in a state where the lens unit 10 is mounted on the body unit 100. As a camera system, Lμcom5 is configured to operate while being dependent on Bμcom50.

  The lens unit 10 includes a photographing lens 1 and a diaphragm 3 arranged on the photographing lens optical axis OL. The taking lens 1 is driven by a DC motor (not shown) provided in the lens driving mechanism 2. The diaphragm 3 is driven by a stepping motor (not shown) provided in the diaphragm driving mechanism 4. Lμcom5 controls each of these motors based on the command of Bμcom50.

  The following structural members are arranged in the body unit 100 as shown in FIG. For example, a single-lens reflex-type constituent member (consisting of a pentaprism 12, a quick return mirror 11, an eyepiece lens 13, and a sub mirror 11a) as an optical system, a focal plane shutter 15 on the photographing lens optical axis OL, and a sub mirror 11a An AF sensor unit 16 is provided for detecting a defocus amount in response to a reflected light beam from.

  In addition, an AF sensor drive circuit 17 that drives and controls the AF sensor unit 16, a mirror drive mechanism 18 that drives and controls the quick return mirror 11, and a shutter charge mechanism 19 that charges a spring that drives the front curtain and rear curtain of the shutter 15. A shutter control circuit 20 that controls the movement of the front and rear curtains, and a photometric circuit 21 that performs photometric processing based on a photometric sensor 21a that detects the light flux from the pentaprism 12 are provided.

  An imaging unit 30 for photoelectrically converting the subject image that has passed through the optical system is provided on the photographic lens optical axis OL. The image pickup unit 30 is formed by integrating a CCD 31 that is an image pickup element having an image pickup optical axis OC, an optical low-pass filter (LPF) 32 and a dustproof filter 33 disposed in front of the CCD 31 as a unit. A piezoelectric element 34 is attached to the periphery of the dust filter 33 (FIG. 2). The piezoelectric element 34 has two electrodes, and the dust-proof filter 33 is vibrated at a predetermined frequency by the dust-proof filter control circuit 48 so that the dust-proof filter 33 can be vibrated and dust attached to the filter surface can be removed. It is configured. The imaging unit 30 is mounted on a vibration isolation unit 300 which is a camera shake correction drive device described later (FIG. 7).

  The camera system of the present embodiment also includes a CCD interface circuit 23 connected to the CCD 31, a liquid crystal monitor 24, an SDRAM 25 functioning as a storage area, a flash ROM 26, and the like, and an image processing controller 28 that performs image processing. The electronic recording display function can be provided together with the imaging function. Here, the recording medium 27 is an external recording medium such as various memory cards or an external HDD, and is mounted so as to be communicable with the camera body via a communication connector and exchangeable. Then, image data obtained by photographing is recorded on the recording medium 27. As the other storage area, a non-volatile memory 29 made of, for example, an EEPROM, which stores predetermined control parameters necessary for camera control, is provided so as to be accessible from the Bμcom 50.

  The Bμcom 50 is provided with an operation display LCD 51 and an operation display LED 51a for notifying the user of the operation state of the camera by display output, and a camera operation switch (hereinafter, the switch is described as SW) 52. . The camera operation SW 52 is a switch group including operation buttons necessary for operating the camera, such as a release SW, a mode change SW, and a power SW. Further, a battery 54 as a power source and a power circuit 53 that converts and supplies the voltage of the battery 54 to a voltage required by each circuit unit constituting the camera system are provided, and a current is supplied from an external power source via a jack. There is also provided a voltage detection circuit for detecting a voltage change when.

  Each part of the camera system configured as described above generally operates as follows. First, the image processing controller 28 takes in image data from the CCD 31 by controlling the CCD interface circuit 23 in accordance with a command of Bμcom 50. This image data is converted into a video signal by the image processing controller 28 and output and displayed on the liquid crystal monitor 24. The user can confirm the captured image from the display image on the liquid crystal monitor 24.

  The SDRAM 25 is a memory for temporarily storing image data, and is used as a work area when image data is converted. The image data is stored in the recording medium 27 after being converted into JPEG data.

  The mirror drive mechanism 18 is a mechanism for driving the quick return mirror 11 to the up position and the down position. When the quick return mirror 11 is in the down position, the light flux from the photographing lens 1 is on the AF sensor unit 16 side. And divided into the pentaprism 12 side. The output from the AF sensor in the AF sensor unit 16 is transmitted to the Bμcom 50 via the AF sensor driving circuit 17 and a known distance measurement process is performed. On the other hand, a part of the light beam that has passed through the pentaprism 12 is guided to a photometric sensor 21a in the photometric circuit 21, and a known photometric process is performed based on the amount of light detected here.

  Next, the imaging unit 30 including the CCD 31 mounted on the image stabilization unit 300 will be described with reference to FIG. FIG. 2 is a vertical side view showing a configuration example of the imaging unit 30.

  The imaging unit 30 is disposed on the side of the photoelectric conversion surface of the CCD 31 and a CCD 31 as an imaging device that obtains an image signal corresponding to the light that is transmitted through the imaging optical system and irradiated on its own photoelectric conversion surface. An optical low-pass filter (LPF) 32 that removes a high-frequency component from a subject light beam that is transmitted through the filter, a dust-proof filter 33 that is opposed to the optical LPF 32 at a predetermined interval on the front side, and a periphery of the dust-proof filter 33 And a piezoelectric element 34 which is disposed in the part and applies predetermined vibration to the dustproof filter 33. The optical axis on the photoelectric conversion surface of the CCD 31 is defined as an imaging optical axis OC. Of course, the imaging optical axis OC is parallel to the imaging lens optical axis OL (Z direction).

  The CCD chip 31a of the CCD 31 is directly mounted on an FPC (flexible substrate) 31b disposed on the fixed plate 35, and connectors 36a provided on the main circuit board 36 with connection portions 31c and 31d extending from both ends of the FPC 31b. , 36b and the main circuit board 36 side. The protective glass 31e of the CCD 31 is fixed on the FPC 31b via a spacer 31f.

  A filter receiving member 37 made of an elastic member or the like is disposed between the CCD 31 and the optical LPF 32. The filter receiving member 37 is disposed at a position that avoids the effective range of the photoelectric conversion surface at the peripheral edge of the front surface of the CCD 31, and is in contact with the vicinity of the peripheral edge of the optical LPF 32 so that the CCD 31 and the optical LPF 32 It is comprised so that substantially airtightness may be maintained between. A holder 38 that covers the CCD 31 and the optical LPF 32 in an airtight manner is disposed. The holder 38 has a rectangular opening 38k at a substantially central portion around the imaging optical axis OC, and a step 38m having a substantially L-shaped cross section is formed on the inner peripheral edge of the opening 38k on the dustproof filter 33 side. The optical LPF 32 and the CCD 31 are disposed from the rear side of the opening 38k. By disposing the front side peripheral edge of the optical LPF 32 so as to be substantially airtightly contacted with the stepped portion 38m, the position of the optical LPF 32 in the imaging optical axis OC direction (Z direction) is regulated by the stepped portion 38m. The holder 38 is prevented from being detached from the front side from the inside.

  On the other hand, a dust-proof filter receiving portion that protrudes to the front side from the step portion 38m around the step portion 38m in order to hold the dust-proof filter 33 on the front surface of the optical LPF 32 at a predetermined interval at the peripheral portion on the front side of the holder 38. 38n is formed over the entire circumference. The dustproof filter 33 formed in a circular or polygonal plate shape as a whole is a member formed of an elastic body such as a leaf spring, and is pressed by a pressing member 40 fixed to the dustproof filter receiving portion 38n with a screw 39. In the state, it is supported by the dustproof filter receiving portion 38n. An annular seal 41 is interposed between the piezoelectric element 34 portion disposed on the outer peripheral edge portion on the back side of the dustproof filter 33 and the dustproof filter receiving portion 38n to ensure an airtight state. The imaging unit 30 has an airtight structure including the holder 38 formed in a desired size for mounting the CCD 31 in this manner.

  The camera according to the present embodiment has a camera shake correction function that moves the CCD 31 that is an image sensor in accordance with the camera shake so as to compensate for camera shake that occurs when the body unit 100 is photographed, and obtains a photographed image without camera shake. Yes. Therefore, in the camera, the direction of the photographic lens optical axis OL (or the imaging optical axis OC) is defined as the Z direction, and the first directions orthogonal to each other in a plane (XY plane) orthogonal to the Z direction are defined as X. When the second direction is the Y direction, the image stabilization unit 300 is a camera shake correction driving device for displacing and moving the CCD 31 of the image pickup unit 30 in the X direction and the Y direction. (FIG. 3) applies. In the image stabilization unit 300, the CCD 31 of the image pickup unit 30 is mounted by generating an elliptical vibration in the vibrator driver by applying a predetermined frequency voltage to the vibrator serving as a drive source of the drive device. The holder 38 as a moving object to be moved is driven to be displaced.

  Here, the operation principle of the vibrator used as a drive source in the camera shake correction drive apparatus of the present embodiment will be described with reference to FIGS. FIG. 3 is a schematic diagram of the vibrator. 4A to 4C are schematic views showing the operation principle of the vibrator. FIGS. 5A to 5D and FIGS. 6A to 6D are schematic views showing the vibration process of the vibrator.

  As shown in FIG. 3, the vibrator 200 includes a piezoelectric body 201 formed in a rectangular parallelepiped with a predetermined size, and a pair of driving regions 202 formed so as to be symmetric with respect to one side of the piezoelectric body 201 by polarization. , 203 and driver elements 204, 205 as drive units provided at the surface positions of the piezoelectric body 201 corresponding to the drive regions 202, 203.

  When a voltage of + is applied to the drive region 202 from the state (vibrator length L) in FIG. 4B where no voltage is applied to the drive region, as shown in FIG. 4A, the polarized drive region 202 portion Is deformed so as to extend, but the piezoelectric body 201 portion on the back side thereof is not deformed so as to extend, so that it deforms in an arc shape as a whole. Conversely, when a minus voltage is applied to the drive region 202, the drive region 202 portion of the polarization structure is deformed so as to shrink as shown in FIG. 4C, while the piezoelectric body 201 portion on the back side does not shrink. As a whole, it is deformed into an arc shape opposite to that in FIG. The same applies to the drive region 203 side.

  In order to generate elliptical vibrations on the surfaces of the driver elements 204 and 205, a frequency voltage based on a sine wave having a predetermined frequency is applied to one of the polarized drive areas 202 of the piezoelectric body 201 and to the other drive area 203. A frequency voltage by a sine wave having a phase shift at the same frequency as the frequency voltage applied to the drive region 202 is applied. The frequency of the applied frequency voltage is that the center of the piezoelectric body 201 is a bending vibration node N0, the driver elements 204 and 205 are antinodes of bending vibration, and the longitudinal vibration node of the piezoelectric body 201 is the bending vibration node. Set to a predetermined numerical value that matches.

  Along with the change of the applied frequency voltage +, −, the vibrator 200 generates a vibration in which the bending vibration and the longitudinal vibration shown in FIGS. 5 (A) to (D) and FIGS. 6 (A) to (D) are combined. Repeatedly, elliptical vibrations E1 and E2 are generated on the surfaces of the driver elements 204 and 205, respectively. Therefore, the moving body 207 is generated on the surface of the driving elements 204 and 205 by disposing the driving elements 204 and 205 of the vibrator 200 in contact with the moving body 207 to be driven through the holder 206. It moves according to the directions of the elliptical vibrations E1 and E2.

  At this time, by changing the phase difference between the frequency voltages applied to the drive regions 202 and 203, it is possible to change the shapes of the elliptical vibrations E1 and E2 generated on the surfaces of the drive elements 204 and 205. It is possible to change the moving speed of the moving body that is driven by 200 and moves. For example, when the phase difference of the frequency voltage is 0 °, the speed is 0. However, when the phase difference is increased, the speed gradually increases, and when the phase difference is 90 °, the maximum speed is reached. On the other hand, when the phase difference exceeds 90 °, the speed gradually decreases, and when the phase difference is 180 °, the speed becomes zero again. When the phase difference is set to a negative value, the rotational directions of the elliptical vibrations E1 and E2 generated in the driver elements 204 and 205 are reversed, and the moving body can be driven in the reverse direction. Also in this case, the maximum speed is obtained when the phase difference is −90 °.

  The configuration and operation of the image stabilization unit 300 that is incorporated in the camera of the present embodiment and is a camera shake correction drive device using the above-described vibrator as a drive source will be described with reference to FIGS.

  FIG. 7 is a front view illustrating a configuration example of the image stabilization unit of the present embodiment. FIG. 8 is an exploded perspective view of the X-axis drive mechanism unit including the drive source of the image stabilization unit. 9 is a cross-sectional view taken along line AA in FIG. However, a part of the upper case is in a non-cross-sectional state. FIG. 10 is a cross-sectional view taken along the line HH in FIG. 11 is a cross-sectional view taken along the line II of FIG. 12 is a cross-sectional view taken along line JJ in FIG. 13 is a cross-sectional view taken along the line BB in FIG. 14 is a cross-sectional view taken along the line CC of FIG. FIG. 15 is a view showing a DD section or an EE section in FIG. 7. 16 is a cross-sectional view taken along line FF in FIG. 17 is a cross-sectional view taken along the line GG in FIG. Further, FIG. 18 is a view showing a rotational displacement state of the rod shown in the JJ section of FIG. FIG. 19 is a conceptual diagram in which the amplitude of the resonance state (flexural vibration) of the rod is enlarged.

  The anti-vibration unit 300 includes a holder 38 as a moving frame (second frame) in which the image pickup unit 30 (FIG. 2) including the CCD 31 as an image pickup element is mounted in the X direction and the optical LPF 32, the dustproof filter 33, and the like. This is the final moving object to be moved in the Y direction.

  The holder 38 is supported by an X-axis drive mechanism 310x and a Y-axis drive mechanism 310y, which will be described later, with respect to a frame 302 that is a fixed frame (first frame) so as to be movable in the X direction and the Y direction. Position restriction in the Z direction is performed by sandwiching a ball (A) 381, a ball (B) 382, and a ball (C) 383 that are rolling elements provided between the rollers 302 (FIGS. 14 and 15).

  The anti-vibration unit 300 includes an X-axis drive mechanism portion 310x that moves the holder 38 in the X direction relative to the frame 302, and a Y-axis drive mechanism portion 310y that moves the holder 38 in the Y direction. By operating independently in the Y direction, the CCD 31 mounted on the holder 38 is driven to be displaced so as to compensate for blurring in the X and Y directions within the XY plane.

  Here, the configuration of the X-axis drive mechanism 310x that forms the single-axis drive mechanism (first vibration unit) in the X direction will be described in detail, but the single-axis drive mechanism (second vibration unit) in the Y direction will be described. The basic structure of the Y-axis drive mechanism 310y to be formed is the same as that of the X-axis drive mechanism 310x, and the X-axis drive mechanism 310x will be described in detail below. In each drawing, each component of the X-axis drive mechanism 310x is indicated by a suffix x, and each corresponding component of the Y-axis drive mechanism 310y is denoted by the suffix y. Is shown.

  The X-axis drive mechanism 310x includes an upper case 360x, an X-axis vibrator 320x that is a first vibrator composed of a piezoelectric body 323x and driver elements 321x and 322x, an X direction composed of a rod body 331x and a sliding plate 336x. A rod 330x that is a movable body (first shaft member), a pressing mechanism 350x that is a biasing means that biases the X-axis vibrator 320x toward the sliding plate 336x, and a lower case 340x. ing.

  In the X-axis vibrator 320x, in accordance with the operation principle of the vibrator 200 described in FIGS. 4 to 6, a predetermined frequency voltage generated by the vibrator drive circuit 64 (FIG. 1) is connected to an FPC (flexible cable substrate) 326x for connection. Is applied to the piezoelectric body 323x, and elliptical vibrations are generated in the driver elements 321x and 322x which are driving units disposed on one surface of the rectangular piezoelectric body 323x. Driving force in the X direction is obtained by elliptical vibration generated in the driver elements 321x and 322x.

  A U-shaped vibrator holder 324x is fixed to the X-axis vibrator 320x at a central position on the side opposite to the driver elements 321x and 322x of the piezoelectric body 323x. As shown in FIGS. 8 and 10, the X-axis vibrator 320x is moved in the X direction by fitting both side protrusions 324xc formed on the vibrator holder 324x into a groove 340xc which is a holding portion of the lower case 340x. Furthermore, the side surface of the vibrator holder 324x is fitted into the inner wall 340xa of the lower case 340x, so that the movement in the Y direction is restricted and held by the lower case 340x.

  The rod 330x has a substantially cylindrical shape as a whole, strictly speaking, a flat plate portion 331xa formed on a rod main body 331x which is a guided portion having a D-cut circular section has a sliding plate 336x as a sliding portion. It is fixed. The driver elements 321x and 322x of the X-axis vibrator 320x are pressed toward the rod 330x and are in contact with the sliding plate 336x. The sliding plate 336x and the rod body 331x are fixed by adhesion. However, the sliding plate 336x may be fastened with a screw or the like, and if the material has both high rigidity and wear resistance, it is a material integrated with the rod body. The fixing method is not particularly limited. The rod body 331x is preferably made of hardened stainless steel or ferritic stainless steel, and the sliding plate 336x is made of a material having high wear resistance and high rigidity to increase the rigidity of the rod 330x. is there. By increasing the rigidity in this manner, it is possible to realize a rod 330x that is a small movable body capable of generating high output, and also functions as a structure as will be described later. The frame member can be made smaller.

  The rod body 331x has four balls 335x as rolling elements in two arc-shaped grooves 331xb on the outer periphery opposite to the flat surface portion 331xa to which the sliding plate 336x is fixed. The ball 335x is held and supported by the side surface and bottom surface of the U-shaped groove 340xf provided in the X direction provided in the lower case 340x, and the X vibrator 320x is pressed against the sliding plate 336x to thereby move the rod body in the X direction. 331x is positioned so as to be movable relative to the lower case 340x. On the other hand, since the lower case 340x is fixed to the upper surface 302d of the frame 302 with screws 344x, the rod 330x and the frame 302 can be relatively moved in the X direction (FIG. 9).

  The ball 335x as the rolling element is not limited to this, and may be a roller. However, in the case of a roller, instead of the U-shaped groove 340xf along the X axis provided in the lower case 340x, a slope for receiving the roller is formed at two corners, and the roller is disposed between the slope and the rod 330x. Need to be placed.

  The pressing mechanism 350x includes a plate spring 352x inserted into the upper upper portion of the upper case 360x, an adjustment screw 354x that presses the end of the plate spring 352x, an adjustment washer 353x for adjusting the adjustment screw pressing amount, and an upper case It consists of screw holes (screw screwing screw holes) 360xd arranged in 360x.

  The leaf springs 352x are elastically deformable substantially straight leaf springs extending in the X direction, as shown in FIGS. 8 and 10, and have a convex portion 352xb in the width direction at both ends and a positioning convex portion 352xc protruding in the central width direction. have. The leaf spring 352x is inserted into the upper part of the upper case 360x, and the convex portions 352xb at both ends are fitted to the inner wall 360xa of the upper case 360x, thereby restricting positioning and rotation in the Y direction. Further, the positioning convex portion 352xc is fitted into the upper notch 360xc of the upper case 360x to perform positioning in the X direction.

  The two adjustment screws 354x are screwed together with the adjustment washers 353x inserted into the screw holes 360xd of the upper case 360x, and both ends of the leaf springs 352x symmetrical in the X direction are pressed downward at the tips of the screws. Due to the pressing displacement of both ends of the leaf spring 352x, the convex shape of the vibrator holder 324x on the X-axis vibrator 320x side via the vibration-proof sheet 351x formed of a vibration absorbing material such as rubber at the leaf spring center lower face pressing portion. The pressing portion 324xb is pressed, and the X-axis vibrator 320x is pressed by the vibrator holder 324x. Due to the pressing force, the driver elements 321x and 322x of the X-axis vibrator 320x abut against the sliding plate 336x.

  The amount of pressing displacement of the leaf spring 352x changes by changing the thickness of the adjusting washer 353x, and the vibrator pressing force can be adjusted. The vibrator pressing force amount by the pressing mechanism 350x is set to a very large force of about 15N (Newton).

  Note that the upper case 360x has an inverted U shape, and two rectangular holes 360xb are provided in two places on both side surfaces of the X direction both-ends falling part. On the other hand, the lower case 340x is provided with protrusions 340xb at positions corresponding to the rectangular holes 360xb (FIGS. 8 and 9). The upper case 360x and the lower case 340x are assembled by fitting the inner wall surface and the outer surface in a state where the leaf spring 352x, the X-axis vibrator 320x, and the like are assembled, and the upper case rectangular hole 360xb and the protrusion 340xb are engaged. (FIG. 11), the relative assembly position of the upper case 360x with respect to the lower case 340x is determined.

  Further, the upper case 360x and the lower case 340x are each provided with a notch 360xe and 340xe on one side surface portion (FIG. 8). These notches are notches for inserting the connecting FPC 326x connected to the upper surface of the X-axis vibrator 320x in the assembled state of the lower case as described above.

  As described above, the basic structure of the Y-axis drive mechanism portion 310y is the same as that of the X-axis drive mechanism portion 310x (see FIG. 13), and detailed description thereof is omitted, but on the X-axis drive mechanism portion 310x side, The lower cases 360x and 340x and the X-axis vibrator 320x are fixed members with respect to the frame 302, and the rod 330x as a moving body moves in the X direction by the driving force of the X-axis vibrator 320x. On the other hand, in the Y-axis drive mechanism portion 310y, the rod 330y that is a moving body (second shaft member) is a fixed side in the Y-axis movement direction with respect to the frame 302, and the Y-axis vibration that is the second vibrator. The child 320y, the lower case 340y, the pressing mechanism 350y, and the upper case 360y serve as moving members. Therefore, the holder 38 fixed to the lower case 340y is also a moving member.

  The rod 330x and the rod 330y are fitted into the fitting holes 370a and 370b of the rod coupling body 370, which is an axial coupling body at the ends, are bonded and fixed, and are supported so that their central axes are orthogonal to each other. Accordingly, when the rod 330x is driven in the X direction by the X-axis drive mechanism 310x, the rod 330y coupled to the rod 330x by the coupling body 370 moves integrally with the rod 330x in the X direction and presses against the rod 330y. The upper cases 360y and 340y supported and the holder 38 to which the lower case 340y is fixed also move in the X direction. Furthermore, when the rod 330y is relatively driven by the Y-axis drive mechanism 310y, the holder 38 moves in the Y direction.

  The rod 330x can rotate to the center of the cylindrical surface of the groove 331xb (the axis 330xO of the rotation of the rod 330x) with respect to the lower case 360x, as indicated by the broken line (the position of the sliding plate 336x ') in FIG. The rod 330y coupled to the rod 330x by the rod coupling body 370 can also rotate integrally. The rod 330y is pressed and supported on the lower case 340y via a ball 335y, and the lower case 340y is fixed to the holder 38 with screws 344y. The holder 38 can rotate around the axis of the rod 330x in a state of being integrated with the rod 330y.

  On the other hand, as shown in FIGS. 7 and 14, the holder 38 is supported in a state where the axial center of the rod 330y and the center of the ball (A) 381 disposed on the ball receiver 302a of the frame 302 coincide with each other. ) With the rotation of the rod 330y around the axis of the rod 330x stopped by 381, the axis of the rod 330y is kept parallel to the plane of the ball receiver 302a of the frame 302.

  The Y-axis drive mechanism 310y can rotate with respect to the axis of the rod 330y. However, the rod 330y is pressed and supported by the lower case 340y via a ball 335y, and the lower case 340y is screwed to the holder 38 by a screw 344y. The holder 38 is in a state of being rotatable around the axis of the rod 330y. Therefore, the ball of the frame 302 is positioned away from the center axis of the rod 330y, for example, on the extension line of the rod coupling body 370 and the ball (C) 383 in the vicinity of the engaging body and beyond the center of the CCD 31. A receiver 302b is provided, and a ball (B) 382 that receives the holder 38 is arranged to restrict the rotation of the holder 38 around the central axis of the rod 330y (FIGS. 7 and 15).

  Since the lower case 340x for positioning the rod 330x is fixed to the frame 302, the position of the rod 330x in the Z direction relative to the frame 302 is determined, and the ball (A) 381 and the ball (B) disposed on the frame 302 are determined. By supporting the holder 38 with 382, the holder 38 is slidably supported at a precise position in the Z direction while the mounting surface of the CCD 31 is kept parallel to the XY plane.

  Further, the ball (C) 383 arranged between the ball receiver 302c of the frame 302 and the holder 38 is arranged at a position closer to the intersection of the axes of the rods 330x and 330y (position of the rod combined body 370), When the holder 38 is moved in the X direction or the Y direction, if an abnormal rotational force is applied to the holder 38 due to the occurrence of an abnormal load or the like, auxiliary support for preventing the holder 38 from tilting is performed. (FIGS. 7 and 15). However, the ball (C) 383 is not necessarily required for supporting the holder 38.

  The balls (A), (B), (B) 381, 382, 383 have the same diameter, and the receiving surfaces of the three ball receivers 302a, 302b, 302c are on the same plane. In addition, since the three concave receiving surfaces 38a of the opposing holder 38 are also on the same plane, the holder 38 is kept parallel to the frame 302.

  As shown in FIG. 16, arms are formed on the holder 38 and the frame 302 at opposite positions on the outer periphery, and spring hooks 38e and 302e, which are V-shaped cutouts, are formed at the tips of the respective arms, and are energized. A spring 384 as a means is suspended. The urging force of the spring 384 acts as a moment around the rod 330x, the force acts on the side sandwiching the ball (A) 381 and the ball (B) 382, and the holder 38 and the frame 302 are stably parallel. To be kept. Here, the amount of force of the biasing spring 384 is set to be sufficiently smaller than the pressing force of the X-axis vibrator 320x and the Y-axis vibrator 320y because it becomes a load during the driving operation, but the position where the force acts is the rod 330x and the rod 330y are located away from the central axis, so that the acting moment is sufficiently large.

  Of the three balls sandwiched between the frame 302 and the holder 38 in the vibration isolation unit 300, the ball (B) 382 is spaced a predetermined distance from the rod 330y on the extension line or from the rod 330y to the CCD 31 side. It is also possible to adopt a holder support structure that is arranged at a position. In this case as well, the ball (C) 383 may be provided, but it is not always necessary. According to this support structure, the rotation of the rods 330x and 330y can be both efficiently regulated, and the holder 38 can be stably supported with respect to the frame 302.

  Next, the coupling state of the rod 330x and the rod 330y will be described. Ultrasonic elliptical vibration is directly transmitted to the rod 330x and the rod 330y by the operations of the X-axis vibrator 320x and the Y-axis vibrator 320y. The vibration transmitted to the rod 330x and the rod 330y resonates in each rod, and the vibration as shown in FIG. 19 (vibration showed intrinsic bending vibration, but other vibrations such as torsional vibration and longitudinal vibration are also included. Is generated). At this time, if the rod coupling body 370 is coupled in the vicinity of the vibration with the largest amplitude, the vibration of the entire system of the X-axis drive mechanism unit 310x or the Y-axis drive mechanism unit 310y is inhibited, and the output is reduced. It will end up. Further, unnecessary vibration is transmitted from one shaft drive mechanism to the other shaft drive mechanism, and the output of the other shaft drive mechanism is reduced.

  Therefore, in this embodiment, the vibrator is coupled with an adhesive at a portion 330xc inside the hole 370a of the rod coupling body 370 that is near the node of the resonance vibration generated in each rod when the vibrator is operated at the driving frequency. In FIG. 19, the vibration amplitude is drawn so as to be greatly enlarged, and the deformation amount of the bonded portion by the adhesive is a level smaller than 1 μm, and the loss of vibration energy does not become large.

  In FIG. 19, the amplitude of the vibration is illustrated in an enlarged manner, but the amount of displacement of the coupling portion by the actual adhesive is smaller than 1 μm. Further, since the adhesive itself is a resin or a rubber material, it is difficult to transmit vibration, and the loss of vibration energy does not become large, so that the amount of displacement of the coupling portion is not affected.

  On the other hand, stoppers 334x or 334y are fixed to the respective ends of the rods 330x and 330y so as not to be detached from the lower case 340x or 340y supporting the rods (see FIG. 7). The position where the stopper 334x or 334y is fixed to the rod main bodies 331x and 331y is also a portion 330xd near the node of the resonance vibration generated in the rods 330x and 330y, thereby suppressing a decrease in output of each drive mechanism.

  Next, each control element and its control operation in the image stabilization unit 300 will be described. The camera body unit 100 detects an X-axis gyro 62x that detects a shake around the X-axis (pitch in the pitch direction) of the body unit 100 and a shake around the Y-axis (a shake in the yaw direction) of the body unit 100. A Y-axis gyro 62y is incorporated (FIG. 1). In addition, the body unit 100 includes a position detection sensor including a hall element 392 installed on a flexible board 391 provided on the frame 302 and a magnet 393 disposed on a part of the holder 38 so as to face the hall element 392. 390 is arranged (FIGS. 1 and 7). Further, the image stabilization control circuit for controlling the vibrator driving circuit 64 for driving the X-axis vibrator 320x and the Y-axis vibrator 320y based on signals from the X-axis gyro 62x, the Y-axis gyro 62y, and the position detection sensor 390. 61 is provided. The image stabilization control circuit 61 executes a control operation in accordance with an instruction from the Bμcom 50.

  When a predetermined frequency voltage is applied to the X-axis vibrator 320x by the X-axis drive mechanism unit 310x to generate elliptical vibrations in the driver elements 321x and 322x, the driver elements 321x and 322x of the X-axis vibrator 320x are pressed by the pressing mechanism 350x. The rod 330x is driven in the rotational direction of the elliptical vibration of the driver elements 321x and 322x because it is in press contact with the sliding plate 336x with a strong urging force.

  At this time, since the pressing force applied to the X-axis vibrator 320x is strong, if the rigidity of the sliding plate 336x and the rod body 331x constituting the rod 330x is weak, the sliding plate 336x and the rod body 331x are applied by the applied pressing force. May be bent, and the drive elements 321x and 322x and the sliding plate 336x may come into contact with each other to make the operation unstable or stop the operation.

  However, in the vibration isolating unit 300 according to the present embodiment, the sliding plate 336x and the rod body 331x constituting the rod 330x have high rigidity, so that the pressing contact state between the driver 321x, 322x and the sliding plate 336x is stable. The driving force accompanying the elliptical vibration is reliably transmitted to the sliding plate 336x, and can be driven in the rotational direction of the elliptical vibration with high efficiency. Further, the rod 330x having the sliding plate 336x is not in surface contact with the lower case 340x, but is in contact with the transfer method using the ball 335x held in the groove 331xb portion of the rod body 331x. However, the rod 330x is in a state of less friction with respect to the lower case 340x, and moves reliably.

  Furthermore, since the rod body 331x has a two-row ball bearing structure along the x direction, the rod 330x moves only in the X direction when driven by the X-axis vibrator 320x. When the rod 330x moves in this way, the rod 330y fixed orthogonally to the one end of the rod 330x by the coupling body 370 also moves integrally in the X direction. The lower case 340y is pressed and positioned on the rod 330y via the balls 335y arranged in two rows in the Y direction by pressing the Y vibrator 320y with the pressing mechanism 350y, and the holder 38 is fixed to the lower case 340y with a screw 344y. Since it is fixed, when the rod 330x moves in the X direction, the holder 38 moves integrally with the rod 330x in the X direction. That is, the moving direction of the holder 38 is also guided by the engagement between the rod main body 331x and the lower case 340x having a two-row ball bearing structure along the X direction. By adopting such a structure, it is possible to reduce the size and structure of the apparatus.

  Further, as described above, the rod 330x can rotate by a small angle with respect to the lower case 340x (FIG. 18), but when the rod 330x is rotated as shown in the figure, the driver 321x, There is a possibility that the transmission efficiency of the driving force is lowered due to the contact of 322x with the sliding plate 336x. However, in the present embodiment, the leaf spring 352x side of the vibrator holder 324x on the X-axis vibrator side is a projection 324xb having a narrow contact surface, so that the X-axis vibrator 320x has a degree of freedom to be tilted, and the one-piece contact Can be prevented.

  Next, the camera shake correction operation in the image stabilization unit 300 will be described. When the main SW (not shown) is turned on while the camera shake correction SW (not shown) in the camera operation SW (switch) 52 is turned on, the vibrator driving circuit 64 performs an initial operation from the Bμcom 50 to the image stabilization control circuit 61. Is transmitted from the vibrator driving circuit 64 to the X-axis vibrator 320x and the Y-axis vibrator 320y, and the imaging optical axis OC which is the center of the CCD 31 is placed on the holder 38 with the photographing lens light. Driven in the X and Y directions to move to a neutral position coinciding with the axis OL.

  Then, the shake signal of the body unit 100 detected by the photographing holder, the X-axis gyro 62x, and the Y-axis gyro 62y is amplified by the processing circuit, A / D converted, and input to the image stabilization control circuit 61.

  The image stabilization control circuit 61 calculates a shake correction amount based on the output signals of the X-axis gyro 62x and the Y-axis gyro 62y, and outputs a signal corresponding to the calculated shake correction amount to the vibrator drive circuit 64. The holder 38 on which the CCD 31 is mounted is driven by a Y-axis vibrator 320y and an X-axis vibrator 320x that are operated by an electric signal generated by the vibrator drive circuit 64. The drive position of the holder 38 on which the CCD 31 is mounted is detected by the position detection sensor 390, sent to the image stabilization control circuit 61, and feedback control is performed.

  That is, the image stabilization control circuit 61 calculates a reference value based on the input signals from the X-axis gyro 62x and the Y-axis gyro 62y (hereinafter referred to as “blurring signal” or “blur angular velocity signal”). To do. The calculation of the reference value is performed between the time when the main power of the camera is turned on and the exposure for still surface shooting is performed. As this calculation, there are a method of calculating a moving average value of a blur signal for a relatively long time, a method of obtaining a DC component by a low-pass filter having a relatively low cut-off frequency, etc., and any method may be used. . By subtracting the reference value obtained by the above calculation from the shake signal, a signal from which the low frequency component of the shake signal is removed is obtained. Based on this signal and the output signal of the position detection sensor 390, the vibrator driving circuit 64 is controlled to move the position of the holder 38 on which the CCD 31 is mounted so as to compensate for the shake.

  Here, a shooting processing operation at the time of still image shooting including the above-described camera shake correction operation will be described with reference to a flowchart of FIG. FIG. 20 is a schematic flowchart including a blur correction operation during still image shooting. This processing operation is performed under the control of Bμcom 50, and is performed before the start of shooting preparation is instructed by the release SW (before 1R-ON, which is the release first-stage on operation). If the start of shooting preparation is instructed by the release SW (after 1R-ON), it is started.

  When this processing operation is started by a 1R-ON operation by the release SW, a correction amount is calculated using the above-described reference value, and shake correction driving is started according to the calculated correction amount (step S11). Subsequently, it is determined whether or not the shooting preparation start instruction by the release SW has been released (1R-OFF has been set) (step S12). If released (YES in step S12), the process starts in step S11. The camera shake correction drive is stopped and the CCD 31 is centered (step S17), and the camera waits for an instruction to start photographing preparation (1R wait state).

  On the other hand, when the shooting preparation start instruction by the release SW is not canceled (NO in step S12), it is subsequently determined whether or not the shooting start has been instructed by the release SW (2R-ON has been set) (step S13). ). If the start of shooting is not instructed (NO in step S13), the process returns to step S12 and waits in the instruction waiting state.

  On the other hand, when the start of shooting is instructed by the release SW (YES in step S13), the blur correction driving started in step S11 is stopped and the CCD 31 is centered (step S14). Subsequently, a correction amount is calculated using the held reference value, and shake correction driving is started according to the correction amount (step S15).

  Then, exposure is performed (step S16), and when the exposure is completed, the blur correction drive is stopped and the CCD 31 is centered (step S17), and a waiting state for waiting for an instruction to start photographing (1R waiting state) is entered.

  As described above, according to the camera vibration-proof unit 300 of the present embodiment, the vibrators 320x and 320y that generate elliptical vibrations that are highly efficient and easily obtain a large driving force are used as a driving source, while a highly rigid moving body is used. The X-axis drive mechanism unit and the Y-axis drive mechanism unit having the rods 330x and 330y, respectively, are coupled to each other so as to be orthogonal to each other by means of a rod combined body. A two-dimensional drive device that can be driven at a high speed is constructed, and as a whole, the driving force is large, and the size and weight can be reduced with high efficiency. In addition, since the above-described X-axis drive mechanism and Y-axis drive mechanism are applied, there are self-maintaining characteristics, high accuracy and high responsiveness can be obtained, and furthermore, the holder 38 that holds the CCD 31 can be orthogonally crossed. Since a mechanism for moving through a rod is employed, the space occupied by the unit in the Z direction is small compared to a mechanism using a link mechanism, and a reduction in thickness can be realized.

  Next, a modified example of the lower case applied to the drive mechanism of the image stabilization unit 300 in the above-described embodiment will be described with reference to FIGS. FIG. 21 is a cross-sectional view of the X-axis drive mechanism corresponding to FIG. 9 when the lower case of the present modification is applied. 22 is a cross-sectional view taken along line LL in FIG. FIG. 23 is a view on arrow M in FIG.

  The lower case 340Ax of the present modification is provided with wall portions 340Axf at both ends in the X direction that is the driving direction. The wall portion 340Axf is provided with a through hole 340Ag slightly larger than the rod body through which the rod body 331x of the rod 330x passes.

  The X-axis vibrator 320x and the pressing mechanism unit 350x incorporated in the X-axis drive mechanism unit 310Ax to which the lower case 340Ax is applied, and the upper case 360x are the same as those applied to the above-described embodiment. The operation is the same as in the case of the shaft drive mechanism 310x. In the figure, those members having the same configuration are denoted by the same reference numerals.

  Since the lower case 340Ax of this modification has the wall portion 340Axf, the rigidity is improved, the driving force transmission of the vibrator is transmitted more efficiently, and the lower case 340Ax can be made thinner and lighter. Become.

  The lower case having the same structure is also applicable to the Y-axis drive mechanism portion 310y, and the rod coupling body 370 is applied to connect the rods 330x and 330y in the same manner as in the above embodiment, which is efficient. A small anti-vibration unit can be realized.

  Next, modified examples of the rod of the drive mechanism of the image stabilization unit 300 in the above-described embodiment will be described with reference to FIGS. FIG. 24 is a cross-sectional view of the X-axis drive mechanism corresponding to FIG. 9 when the rod of this modification is applied. FIG. 25 is a view of the bottom surface portion of the lower case of the X-axis drive mechanism to which the present modification is applied, as viewed from the PP side in FIG. 26 is a cross-sectional view taken along the line QQ in FIG. 27 is an RR cross-sectional view of FIG. 28 is a cross-sectional view taken along the line SS of FIG. FIG. 29 is an enlarged view of the rod section of FIG. 26 and shows a state in which a rotational force is applied to the rod.

  As shown in FIG. 26, the rod 330Bx of this modification has a substantially isosceles triangle cross section, and two rows in the X direction so as to contact the isosceles surface 330Bxh. A total of four balls 335x support the rod 330Bx. ing. The ball 335x is held in a groove 340Bxi provided perpendicular to the X direction of the lower case 340Bx. Furthermore, unlike the embodiment described above, the rod 330Bx is not provided with a sliding plate. Instead of the sliding plate, the surface where the driver elements 331x and 332x are in contact with each other is subjected to wear resistance treatment such as ceramic coating, and has sufficient durability. Further, the rotation of the lower case 340Bx within a certain range of the rod 330Bx can be restricted (FIG. 29).

  Further, as in the case of the rod 330x in the above-described embodiment, the rod combined body 370B or the stopper 334Bx is bonded and fixed to the end portions 330Bxj and 330Bxk of the rod 330Bx (FIGS. 27 and 28). Similarly, a rod having the same shape as the rod 330Bx can be applied to the Y-axis drive mechanism.

  When the rod 330Bx of this modification is applied, the configuration of the rod is simple and easy to assemble, and the durability of the drive mechanism is improved.

  The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the invention at the stage of implementation. Further, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements.

  A driving device according to the present invention and an imaging device to which the driving device is applied are small, have a large driving force, have high efficiency, and are used as a highly accurate driving device and a shake prevention function to which the driving device is applied. Can do.

It is a block diagram which shows roughly the system configuration | structure of the camera provided with the anti-vibration unit of embodiment of this invention. It is a vertical side view which shows the structural example of the imaging unit applied to the camera of FIG. It is a schematic diagram of the vibrator | oscillator used as the drive source of the vibration proof unit applied to the camera of FIG. It is a schematic diagram which shows the state of the vibration of the vibrator | oscillator of FIG. It is a schematic diagram which shows the vibration process of the vibrator | oscillator of FIG. It is a schematic diagram which shows the vibration process of the vibrator | oscillator of FIG. It is a front view which shows the structural example of the anti-vibration unit applied to the camera of FIG. It is a disassembled perspective view of the X-axis drive mechanism part containing the drive source of the vibration proof unit of FIG. It is AA sectional drawing of FIG. However, a part of the upper case is in a non-cross-sectional state. It is HH sectional drawing of FIG. It is II sectional drawing of FIG. It is JJ sectional drawing of FIG. It is BB sectional drawing of FIG. It is CC sectional drawing of FIG. It is a figure which shows the DD cross section or EE cross section of FIG. It is FF sectional drawing of FIG. It is GG sectional drawing of FIG. It is a figure which shows the rotational displacement state of the rod of the X-axis drive mechanism part shown by the JJ cross section of FIG. It is the conceptual diagram which expanded and showed the amplitude of the resonance state of a rod. 2 is a schematic flow chart including a shake correction operation at the time of still image shooting in the camera of FIG. 1. It is sectional drawing of the X-axis drive mechanism part corresponding to FIG. 9 at the time of applying the modification of the lower case in the X-axis drive mechanism part of the vibration proof unit of the said embodiment. It is LL sectional drawing of FIG. It is M arrow line view of FIG. It is sectional drawing of the X-axis drive mechanism part corresponding to FIG. 9 at the time of applying the modification of the rod in the X-axis drive mechanism part of the vibration proof unit of the said embodiment. It is the figure which looked at the bottom face part of the lower case of the X-axis drive mechanism part to which the modification of the rod of FIG. 24 was applied from the PP side of FIG. It is QQ sectional drawing of FIG. It is RR sectional drawing of FIG. It is SS sectional drawing of FIG. It is the figure which expanded and showed the rod part cross section of FIG. 26, Comprising: The state which the rotational force acted on the rod is shown.

Explanation of symbols

31 ... CCD (imaging device)
38 ... Holder (second frame)
302 ... frame (first frame)
310x X-axis drive mechanism (first vibration unit)
310y ... Y-axis drive mechanism (second vibration unit)
320x ... X-axis vibrator (first vibrator)
320y ... Y-axis vibrator (second vibrator)
330x ... Rod (first shaft member)
330y ... Rod (second shaft member)
370, 370B ... Rod coupling body (shaft coupling body)
381, 382, 383 ... Ball (rolling element)
384 ... biasing spring (biasing means)
X direction ... 1st direction Y direction ... 2nd direction

Claims (9)

In the driving device for moving the second frame having a predetermined area on the plane of the first frame,
A first shaft member extending in a first direction on the plane of the first frame;
A second shaft member coupled to the first shaft member and extending in a second direction different from the first shaft member from the coupling portion on the plane of the first frame;
The first shaft member is fixed to the first frame, and the first shaft member is guided by the first guide portion and pressed by the first shaft member. A first vibration unit having a first vibrator for imparting vibration;
The second shaft member is fixed to the second frame, and the second shaft member is guided by the second guide portion and is pressed by the second shaft member, and the second shaft member has a second ellipse. A second vibration unit having a second vibrator for imparting vibration;
And when the first elliptical vibration is applied to the first shaft member, the first shaft member moves with respect to the first vibration unit. When the second shaft member, the second vibration unit, and the second frame move in the axial direction of the first shaft member, and the second elliptical vibration is applied to the second shaft member The second drive unit is characterized in that the second frame moves in the axial direction of the second shaft member by moving the second vibration unit relative to the second shaft member.   The first shaft member and the second shaft member are coupled via a shaft coupling body, and a coupling site between the shaft coupling body and each of the shaft members is the first shaft member or the second shaft. The drive device according to claim 1, wherein the drive device is a node portion in the natural vibration when the member vibrates. An urging means for urging the second frame in a direction in which the second frame is pressed against the first frame;
At least three rolling elements disposed between the first frame and the second frame;
The one of the three rolling elements is disposed in the vicinity of the shaft coupling body, and the other one of the rolling elements includes the shaft coupling body and the one rolling element. The drive device according to claim 2, wherein the driving device is disposed on a substantially extended line, and the other rolling elements are disposed on a substantially extended line of the second shaft member. An urging means for urging the second frame in a direction in which the second frame is pressed against the first frame;
At least two rolling elements disposed between the first frame and the second frame;
The one rolling element of the two rolling elements is disposed on an extension line of the first shaft member, and the other rolling element is substantially an extension of the second shaft member. The drive device according to claim 2, wherein the drive device is arranged on a line.   The drive device according to claim 1, wherein the first shaft member and the second shaft member have the same shape and are orthogonal to each other. In an imaging apparatus having a blur correction function,
In an image pickup apparatus having a shake correction function for correcting a shake by moving a second frame in which an image pickup element is held on a first frame having a predetermined area in a plane perpendicular to a shooting optical axis,
A first shaft member extending in a first direction on the plane of the first frame;
A second shaft member coupled to the first shaft member and extending from the coupling portion in a second direction different from the first shaft member on the plane of the first frame;
The first shaft member is fixed to the first frame, and the first shaft member is guided by the first guide portion and pressed by the first shaft member. A first vibration unit having a first vibrator for imparting vibration;
The second shaft member is fixed to the second frame, and the second shaft member is guided by the second guide portion and is pressed by the second shaft member, and the second shaft member has a second ellipse. A second vibration unit having a second vibrator for imparting vibration;
In the state where the first elliptical vibration is applied to the first shaft member, the second shaft is moved by moving the first shaft member relative to the first vibration unit. The shaft member, the second vibration unit, and the second frame move in the axial direction of the first shaft member, and the second elliptic vibration is applied to the second shaft member. Then, when the second vibration unit moves with respect to the second shaft member, the second frame moves in the axial direction of the second shaft member.   The first shaft member and the second shaft member are coupled via a shaft coupling body, and the engagement site between the shaft coupling body and each shaft member is the first shaft member or the second shaft. The imaging apparatus according to claim 6, wherein the imaging apparatus is a node portion in natural vibration when the member vibrates.   The imaging apparatus according to claim 6, wherein the first shaft member and the second shaft member have the same shape and are orthogonal to each other. An urging means for urging the second frame in a direction in which the second frame is pressed against the first frame;
At least three rolling elements disposed between the first frame and the second frame;
The one rolling element of the three rolling elements is disposed in the vicinity of the shaft coupling body, and the other rolling element includes the shaft coupling body and the first rolling element. The imaging apparatus according to claim 6, wherein the imaging device is disposed on a substantially extended line of the second shaft member, and the other rolling element is disposed on a substantially extended line of the second shaft member.

Images