JP2009257822A - Optical sensor and interface detector - Google Patents

Optical sensor and interface detector Download PDF

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JP2009257822A
JP2009257822A JP2008104589A JP2008104589A JP2009257822A JP 2009257822 A JP2009257822 A JP 2009257822A JP 2008104589 A JP2008104589 A JP 2008104589A JP 2008104589 A JP2008104589 A JP 2008104589A JP 2009257822 A JP2009257822 A JP 2009257822A
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optical sensor
detection
interface
reciprocating
spiral
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Satoshi Ito
聡 伊藤
Kazuhiko Fujikura
和彦 藤倉
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Konica Minolta Medical and Graphic Inc
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Konica Minolta Medical and Graphic Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical sensor for cleaning a detection section, and preventing detection capability from being deteriorated even if it is used for a long time, and an interface detector having the optical sensor. <P>SOLUTION: The optical sensor has a spiral member disposed so as to surround the periphery of the detection section, and a drive means for driving the spiral member, abrades the detection section by using the spiral member driven by the drive means, and removes a deposit attached to the detection section. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

光学式センサ、特に検出部の清掃手段を有する光学式センサ、及び該光学センサを有する界面検出装置に関する。   The present invention relates to an optical sensor, and more particularly to an optical sensor having cleaning means for a detection unit, and an interface detection device having the optical sensor.

従来、物体の有無や、液体の混濁度或いは気体の汚れ具合を検出するためのセンサとして、光の通過有無や、光の通過度合いを検出する光学式センサが知られている。   2. Description of the Related Art Conventionally, optical sensors that detect the presence / absence of light and the degree of light passage are known as sensors for detecting the presence / absence of an object, the turbidity of liquid, or the degree of gas contamination.

また、この光学センサは投光面或いは受光面が汚れると光の入射量が低下してしまい誤動作の原因となることが知られている。   In addition, it is known that this optical sensor causes a malfunction due to a decrease in the amount of incident light when the light projecting surface or the light receiving surface becomes dirty.

この問題点を改善するものとして、検出部を清掃する清掃手段を有する光学式センサが知られている。   In order to improve this problem, an optical sensor having a cleaning means for cleaning the detection unit is known.

清掃手段を有する光学式センサとして、例えば、液体の懸濁度合いを検出するもので、検出部を気泡で清掃する光学式センサが知られている(例えば特許文献1参照。)。   As an optical sensor having a cleaning means, for example, an optical sensor that detects the degree of suspension of a liquid and cleans a detection unit with bubbles is known (for example, see Patent Document 1).

また、液体の水質を検出するもので、検出部をブラシで清掃する光学式センサが知られている(例えば特許文献2参照。)。
特開2005−274216号公報 特開2006−194659号公報
An optical sensor that detects the water quality of a liquid and cleans a detection unit with a brush is known (see, for example, Patent Document 2).
JP-A-2005-274216 JP 2006-194659 A

しかし、特許文献1に記載された光学式センサでは、投受光器間に気泡を吹き付け、検出部に付着した汚れを除去するために、付着力の弱い汚れに対しては効果が大きいが、付着力が強い汚れに対しては充分汚れを除去できない可能性があるという問題点があった。   However, in the optical sensor described in Patent Document 1, air bubbles are blown between the light projecting and receiving devices to remove the dirt adhering to the detection unit. There is a problem that the dirt may not be sufficiently removed against the dirt with strong adhesion.

また、特許文献2に記載された光学式センサでは、回転するブラシで検出部を擦過し、検出部に付着した汚れを除去するために、付着力が強い汚れに対しても充分汚れを除去可能と思われるが、長時間の使用に対してはブラシに汚れが付着・堆積してしまい、充分汚れを除去できなくなってしまう可能性があるという問題点があった。   Moreover, in the optical sensor described in Patent Document 2, the detection unit is rubbed with a rotating brush to remove the dirt adhering to the detection unit. However, when used for a long time, there is a problem that dirt adheres to and accumulates on the brush, and the dirt may not be sufficiently removed.

本発明は上記問題点に鑑み、検出部を清掃可能な、そして、これにより長時間の使用に対しても検出能力の低下を防止した光学式センサ、及び、該光学式センサを有する界面検出装置、を提供することを目的とする。   SUMMARY OF THE INVENTION In view of the above problems, the present invention provides an optical sensor capable of cleaning the detection unit and thereby preventing a decrease in detection capability even when used for a long time, and an interface detection apparatus having the optical sensor , To provide.

1.検出部の周囲を取り巻くように配設された螺旋部材と、該螺旋部材を駆動する駆動手段とを有し、
該駆動手段により前記検出部を前記螺旋部材で擦過させることにより、前記検出部に付着した付着物を除去することを特徴とする光学式センサ。
1. A helical member disposed so as to surround the detection unit, and a driving means for driving the helical member,
An optical sensor, characterized in that the adhering matter adhering to the detection unit is removed by rubbing the detection unit with the helical member by the driving means.

2.前記駆動手段は前記螺旋部材を回転させる回転手段を有し、
前記螺旋部材は前記回転手段により回転されることを特徴とする前記1に記載の光学式センサ。
2. The driving means has rotating means for rotating the spiral member,
2. The optical sensor according to 1 above, wherein the spiral member is rotated by the rotating means.

3.前記駆動手段は前記螺旋部材を往復させる往復手段を有し、
前記螺旋部材は前記往復手段により往復されることを特徴とする前記1または2に記載の光学式センサ。
3. The drive means has reciprocating means for reciprocating the helical member,
3. The optical sensor according to 1 or 2, wherein the spiral member is reciprocated by the reciprocating means.

4.前記螺旋部材は上端が自由端となり、下端が前記螺旋部材を保持する保持部材に固定され、
前記回転手段と前記往復手段とは磁石を有し、気密構造の筐体に内装され、
前記筐体の外部に位置する磁化された前記保持部材は、前記回転手段と前記往復手段の磁石の少なくともいずれかとの磁気カップリング作用により回転又は往復することを特徴とする前記3に記載の光学式センサ。
4). The spiral member has a free upper end, and a lower end fixed to a holding member that holds the spiral member,
The rotating means and the reciprocating means have magnets, and are housed in an airtight housing.
4. The optical device according to 3 above, wherein the magnetized holding member located outside the casing rotates or reciprocates by a magnetic coupling action between the rotating means and at least one of the magnets of the reciprocating means. Type sensor.

5.前記螺旋部材は、前記螺旋部材が検出光の光軸を遮った場合でも、該検出光の光量の50%以上が通過するような、太さ及びピッチを有していることを特徴とする前記4に記載の光学式センサ。   5). The spiral member has a thickness and a pitch such that 50% or more of the light amount of the detection light passes even when the spiral member blocks the optical axis of the detection light. 5. The optical sensor according to 4.

6.検出動作中は前記螺旋部材の原点位置に退避させておくことを特徴とする前記1〜5のいずれか1項に記載の光学式センサ。   6). 6. The optical sensor according to any one of 1 to 5, wherein the optical sensor is retracted to an origin position of the spiral member during a detection operation.

7.微粒子を含む液体中で、前記検出部の周囲に付着する付着物を除去することを特徴とする前記1〜6のいずれか1項に記載の光学式センサ。   7. 7. The optical sensor according to any one of 1 to 6, wherein an adhering substance adhering to the periphery of the detection unit is removed in a liquid containing fine particles.

8.前記1〜7のいずれか1項に記載の光学式センサを有することを特徴とする界面検出装置。   8). 8. An interface detection apparatus comprising the optical sensor according to any one of 1 to 7 above.

9.界面は、固形微粒子を含んだ液体の上層(上澄み層)と下層(沈殿層)との境界であることを特徴とする前記8に記載の界面検出装置。   9. 9. The interface detection apparatus according to 8, wherein the interface is a boundary between an upper layer (supernatant layer) and a lower layer (precipitation layer) of a liquid containing solid fine particles.

10.1台の前記光学式センサと、該光学センサを往復させる往復駆動手段と、該光学センサの往復方向の位置を検出する検出手段と、制御手段と、を有し、
該制御手段は、前記往復駆動手段により前記光学センサを往復させ、前記検出手段により前記光学センサの位置を把握させ、
前記光学センサが少なくとも上昇中の出力電圧と、予め設定された、上澄み層と沈殿層との検出電圧の中間の電圧と、を比較し、
前記出力電圧が前記中間の電圧に一致した時点の、前記光学センサの位置を界面と判断し、界面検出情報を出力することを特徴とする前記8又は9に記載の界面検出装置。
10.1 optical sensors, reciprocating driving means for reciprocating the optical sensors, detecting means for detecting the position of the optical sensors in the reciprocating direction, and control means,
The control means causes the optical sensor to reciprocate by the reciprocating drive means, causes the detection means to grasp the position of the optical sensor,
The optical sensor compares at least the rising output voltage with a preset intermediate voltage between the detected voltage of the supernatant layer and the sediment layer,
10. The interface detection device according to 8 or 9, wherein the position of the optical sensor at the time when the output voltage coincides with the intermediate voltage is determined as an interface, and interface detection information is output.

11.複数台の前記光学式センサと第2の制御手段とを有し、
第2の制御手段は、
複数台の前記光学式センサのそれぞれの出力電圧と、予め設定された、上澄み層と沈殿層との検出電圧の中間の電圧と、を読み込み、
前記出力電圧と前記中間の電圧とを比較し、
前記中間の電圧より高い出力電圧を出力する一番下側の前記光学式センサと、前記中間の電圧より低い出力電圧を出力する一番上側の前記光学式センサと、の間に界面が有ると判断し、界面検出情報を出力することを特徴とする前記8又は9に記載の界面検出装置。
11. A plurality of optical sensors and second control means;
The second control means is
Read the output voltage of each of the plurality of optical sensors and a preset intermediate voltage between the detection voltage of the supernatant layer and the precipitation layer,
Comparing the output voltage with the intermediate voltage;
There is an interface between the lowermost optical sensor that outputs an output voltage higher than the intermediate voltage and the uppermost optical sensor that outputs an output voltage lower than the intermediate voltage. 10. The interface detection apparatus according to 8 or 9, wherein the interface detection information is determined and output.

上記(課題を解決するための手段)に記載した光学式センサ、及び、該光学式センサを有する界面検出装置により、長期の使用によっても検出能力の低下を防止した光学式センサ、及び該光学式センサを有する界面検出装置、の提供が可能となる。   The optical sensor described in the above (Means for Solving the Problems), and the optical sensor in which a decrease in detection capability is prevented even after long-term use by the interface detection apparatus having the optical sensor, and the optical sensor An interface detection device having a sensor can be provided.

以下、本発明を実施するための最良の形態を図面を参照して説明する。   The best mode for carrying out the present invention will be described below with reference to the drawings.

なお、本発明の構成は以下の実施の形態に限定されるものではなく、本発明の技術的範囲内において適宜変更可能である。   In addition, the structure of this invention is not limited to the following embodiment, It can change suitably in the technical scope of this invention.

なお、同一の機能を有する部材には各図において同一の部番を付してある。   In addition, the same part number is attached | subjected in each figure to the member which has the same function.

図1は、光学式センサの概念図である。   FIG. 1 is a conceptual diagram of an optical sensor.

本発明の光学センサは液体の例えば有無、懸濁度、又、粉体の例えば有無、又、気体の例えば汚れ具合等、の検出に適応可能である。   The optical sensor of the present invention can be applied to detect the presence / absence of liquid, the degree of suspension, the presence / absence of powder, and the presence / absence of gas, for example.

そして、個体微粒子が浮遊する液体や気体は固体微粒子が検出部に付着しやすく、付着すると光学式センサとしての検出能力を著しく低下させるために、後述する検出部の清掃手段を有する光学式センサを使用することが好ましい。   In addition, the liquid or gas in which the solid particulates are suspended easily adheres to the detection unit, and if the liquid or gas adheres, an optical sensor having a cleaning unit for the detection unit, which will be described later, is used in order to significantly reduce the detection capability as an optical sensor. It is preferable to use it.

以下図1を参照して、例えば透過型の光学センサを利用して液体の有無を検出する場合について説明する。   Hereinafter, with reference to FIG. 1, for example, a case where the presence or absence of a liquid is detected using a transmission optical sensor will be described.

光学式センサ1は固体微粒子を含む被検出液Lの中に浸積してあり、投光部11から投光された光Hが受光部12で検出或いは被検出されることにより、液体Lの有無を検出している。   The optical sensor 1 is immersed in the liquid L to be detected containing solid fine particles, and the light H projected from the light projecting unit 11 is detected or detected by the light receiving unit 12, so that the liquid L The presence or absence is detected.

そして、投光部11及び受光部12にはそれぞれ清掃手段2が設けられている。   The light projecting unit 11 and the light receiving unit 12 are each provided with a cleaning means 2.

清掃手段2は、検出部即ち投光部11及び受光部12を清掃する螺旋部3と、螺旋部3を駆動する螺旋駆動部4と、を有している。   The cleaning unit 2 includes a spiral unit 3 that cleans the detection unit, that is, the light projecting unit 11 and the light receiving unit 12, and a spiral drive unit 4 that drives the spiral unit 3.

螺旋部3は、検出部即ち投光部11及び受光部12の周囲を取り巻くように配設されており、投光窓111又は受光窓121の表面を擦過して清掃する螺旋部材31と螺旋部材31の下端が固定されたリング状の螺旋保持部材32とを有している。   The spiral portion 3 is arranged so as to surround the detection portion, that is, the periphery of the light projecting portion 11 and the light receiving portion 12, and the spiral member 31 and the spiral member that scrape and clean the surface of the light projecting window 111 or the light receiving window 121. And a ring-shaped spiral holding member 32 to which the lower end of 31 is fixed.

そして螺旋部3は、通常は重力により付勢されて螺旋保持部材32が螺旋部ストッパ33に接している(図示)。   The spiral portion 3 is normally biased by gravity, and the spiral holding member 32 is in contact with the spiral portion stopper 33 (shown).

以下、螺旋保持部材32が螺旋部ストッパ33に接している、螺旋部3の位置を原点位置とも記す。   Hereinafter, the position of the spiral portion 3 where the spiral holding member 32 is in contact with the spiral portion stopper 33 is also referred to as an origin position.

また、螺旋部材31は螺旋駆動部4により付勢され、矢印a方向に回転又は、矢印a方向に回転しながら矢印b方向に往復することにより、投光窓111又は受光窓121の表面を擦過して、投光窓111又は受光窓121の表面に付着した付着物を除去(清掃)する。   Further, the spiral member 31 is urged by the spiral drive unit 4 and rubs the surface of the light projection window 111 or the light receiving window 121 by rotating in the direction of arrow a or reciprocating in the direction of arrow b while rotating in the direction of arrow a. Then, the adhering matter adhering to the surface of the light projection window 111 or the light receiving window 121 is removed (cleaned).

なお、図示では螺旋部材31が投光窓111又は受光窓121に懸かっていないが、回転のみの場合は螺旋部ストッパ33は、図示の状態より上部に位置して、螺旋部材31が常に投光窓111又は受光窓121に懸かかるようになっている(不図示)。   In the drawing, the spiral member 31 does not hang over the light projection window 111 or the light receiving window 121. However, in the case of only rotation, the spiral portion stopper 33 is positioned above the state shown in the figure so that the spiral member 31 is always projected. It hangs on the window 111 or the light receiving window 121 (not shown).

また、回転しながら往復する場合は螺旋部ストッパ33は図示の位置に位置し、螺旋部材31が往復することにより投光窓111又は受光窓121に懸かかるようになっている。   Further, when reciprocating while rotating, the spiral stopper 33 is positioned at the illustrated position, and the spiral member 31 reciprocates so as to be hung on the light projection window 111 or the light receiving window 121.

また、螺旋部ストッパ33は螺旋部3が落下しないためのストッパの機能、及び螺旋部3の原点位置としての機能を持っている。   Further, the spiral portion stopper 33 has a function of a stopper for preventing the spiral portion 3 from dropping and a function as an origin position of the spiral portion 3.

光学式センサ1は後述するコントローラ6に接続されている。   The optical sensor 1 is connected to a controller 6 described later.

そして、被検出液Lに応じた、液の有無を検出するスレショルド電圧が予め記憶されており、被検出液Lの有無検出時に該スレショルド電圧を読み出して、受光部材122による検出電圧と比較し、被検出液Lの有無を判定する。   Then, a threshold voltage for detecting the presence / absence of the liquid corresponding to the liquid to be detected L is stored in advance, the threshold voltage is read when the presence / absence of the liquid to be detected L is detected, and compared with the detection voltage by the light receiving member 122; The presence or absence of the liquid L to be detected is determined.

なお、液の有無を検出するスレショルド電圧は、液がない場合を検出した時の出力電圧と液がある場合を検出した時の出力電圧との中間の電圧を設定(記憶)する。   The threshold voltage for detecting the presence or absence of liquid sets (stores) an intermediate voltage between the output voltage when detecting the absence of liquid and the output voltage when detecting the presence of liquid.

図2は、光学式センサの部分断面図である。   FIG. 2 is a partial cross-sectional view of the optical sensor.

図は図1の投光部11側を示す断面図で、例えば透過型の検出方法を利用したものである。   The figure is a cross-sectional view showing the light projecting unit 11 side in FIG. 1 and uses, for example, a transmission type detection method.

10はセンサ筐体で、被検出液Lの浸入を防止するように密閉構造となっている。   A sensor housing 10 has a sealed structure so as to prevent the liquid L to be detected from entering.

そして、投光部11には投光部材112から発せられる光Hを通す投光窓111が配設され、受光部12には小型で光Hを受光部材122で受光するための受光窓121が配設されている。   The light projecting unit 11 is provided with a light projecting window 111 through which the light H emitted from the light projecting member 112 passes, and the light receiving unit 12 is provided with a light receiving window 121 for receiving the light H with the light receiving member 122 in a small size. It is arranged.

投光部材112としては光を発するもので有れば良いが、被検出液Lの光(具体的には光の波長)に対する性質により選択される。   The light projecting member 112 only needs to emit light, but is selected depending on the property of the liquid L to be detected (specifically, the wavelength of the light).

例えば、光により変性しない液体の場合は例えば可視光(例えば赤、緑、青色)を発するLED等を用いることが可能で、可視光で変性してしまうような液体の場合(感光性が有るような液体の場合)は非可視波長領域の光を発する、例えば赤外線や近赤外線を発するLED等が好適に用いられる。   For example, in the case of a liquid that is not denatured by light, for example, an LED that emits visible light (for example, red, green, and blue) can be used. In the case of a liquid that is denatured by visible light (it seems to have photosensitivity). For example, an LED that emits light in a non-visible wavelength region, such as an LED that emits infrared rays or near infrared rays, is preferably used.

また、受光部材122は投光部材112の発する光に応じた感光領域を有する小型のセンサが用いられる。   The light receiving member 122 is a small sensor having a photosensitive area corresponding to the light emitted from the light projecting member 112.

投光窓111と受光窓121は少なくとも投光部材112が発する光を効率よく透過する材料であれば良く、且つ螺旋部材31の擦過により摩耗しない材質が選択される。例えば透明なガラス、プラスチック材料(例えばフッ素係樹脂)、が挙げられる。   The light projecting window 111 and the light receiving window 121 may be made of a material that efficiently transmits at least light emitted from the light projecting member 112, and a material that is not worn by rubbing the spiral member 31 is selected. For example, transparent glass and plastic material (for example, fluorine-based resin) can be used.

螺旋部材31は、被検出液Lに浸食されず、付着物に対して離形性が良い材質〔金属例えばSUS等、又はプラスチック材料(例えばフッ素係樹脂)〕で構成され、螺旋状(弦巻状)をなしており、その下端部が螺旋保持部材32の上面に固定され、上端部は自由端となっている。   The spiral member 31 is made of a material [metal such as SUS or plastic material (such as fluorine-based resin)] that is not eroded by the liquid L to be detected and has good releasability with respect to the deposit, and is spiral (string wound) The lower end portion is fixed to the upper surface of the spiral holding member 32, and the upper end portion is a free end.

螺旋部材31の内径は投光部11或いは受光部12の外径より僅かに大きくなっており、回転或いは往復する時に投光窓111又は受光窓121の表面を擦過する。   The inner diameter of the spiral member 31 is slightly larger than the outer diameter of the light projecting unit 11 or the light receiving unit 12, and scratches the surface of the light projecting window 111 or the light receiving window 121 when rotating or reciprocating.

ここで、僅かに大きくなっているとは、投光窓111又は受光窓121の外径と螺旋部材31の内径との間隙が、投光窓111又は受光窓に付着した、除去したい汚れの厚さより小さい距離を言う。   Here, being slightly larger means that the gap between the outer diameter of the light projecting window 111 or the light receiving window 121 and the inner diameter of the spiral member 31 is attached to the light projecting window 111 or the light receiving window, and the thickness of the dirt to be removed. Say a smaller distance.

例えば投光部11又は受光部12の外径が20mmとすると螺旋部材31の内径は20.1〜20.5mm程度が好ましい。   For example, when the outer diameter of the light projecting unit 11 or the light receiving unit 12 is 20 mm, the inner diameter of the spiral member 31 is preferably about 20.1 to 20.5 mm.

なお、回転及び往復動が可能で有れば間隙は0でも良い。   If the rotation and reciprocation are possible, the gap may be zero.

また、螺旋部材31の断面形状は円形が好ましいが、四角形、三角形でも良い。   Further, the cross-sectional shape of the spiral member 31 is preferably a circle, but may be a rectangle or a triangle.

また、螺旋部材31は、螺旋部材31が光Hの光軸を遮った場合でも光量の50%以上が通過するようになっている。   Further, even when the spiral member 31 blocks the optical axis of the light H, 50% or more of the light amount passes through the spiral member 31.

また、螺旋部材31の巻き方向は、螺旋部材31が矢印a方向に回転した場合に、付着物を投光部11及び受光部12の先端方向に向けて付勢し、先端部(自由端側)から付着物を排出(除去)する方向に巻かれている。   Further, the winding direction of the spiral member 31 is such that, when the spiral member 31 rotates in the direction of arrow a, the adhering matter is urged toward the distal end direction of the light projecting unit 11 and the light receiving unit 12, and the distal end portion (free end side) ) In the direction of discharging (removing) deposits.

螺旋保持部材32は上述したように螺旋部材31の下端部が固定されたリング状をなし、強磁性体で構成されており、着磁されて磁石となっている。   As described above, the spiral holding member 32 has a ring shape in which the lower end portion of the spiral member 31 is fixed, is made of a ferromagnetic material, and is magnetized to become a magnet.

螺旋駆動部4は、螺旋保持部材32と磁気カップリングをなす磁石41と、磁石41を矢印a方向に回転させる回転駆動部42と、磁石41を矢印b方向に往復させる往復駆動部43とを有している。   The spiral drive unit 4 includes a magnet 41 that forms a magnetic coupling with the spiral holding member 32, a rotation drive unit 42 that rotates the magnet 41 in the direction of arrow a, and a reciprocation drive unit 43 that reciprocates the magnet 41 in the direction of arrow b. Have.

往復駆動部43はモータ431とモータ431の出力軸から延びるネジ部432とネジ部432に嵌合して回転駆動部42を往復させる回転駆動部保持部材433とを有している。   The reciprocating drive unit 43 includes a motor 431, a screw part 432 extending from the output shaft of the motor 431, and a rotation drive part holding member 433 that fits the screw part 432 and reciprocates the rotation drive part 42.

そして、モータ431は前述のコントローラ6に接続され、モータ431の作動によりネジ部432等を介して回転駆動部42を往復させる。   The motor 431 is connected to the above-described controller 6 and reciprocates the rotation drive unit 42 via the screw portion 432 and the like by the operation of the motor 431.

回転駆動部42はモータ421とモータ421の出力軸422に固定された磁石41とを有している。   The rotation drive unit 42 includes a motor 421 and a magnet 41 fixed to the output shaft 422 of the motor 421.

そして、モータ421は前述のコントローラ6に接続され、モータ421の作動により出力軸422を介して磁石41を回転させる。   The motor 421 is connected to the controller 6 described above, and rotates the magnet 41 via the output shaft 422 by the operation of the motor 421.

螺旋保持部材32と磁石41とは磁気カップリングを形成し、磁石41の回転及び往復動に応じて螺旋保持部材32も回転及び往復動を行う。   The spiral holding member 32 and the magnet 41 form a magnetic coupling, and the spiral holding member 32 also rotates and reciprocates according to the rotation and reciprocation of the magnet 41.

そしてその結果、螺旋保持部材32に固定された螺旋部材31が、磁気カップリング作用により回転及び往復動を行い、前述したように、投光窓111又は受光窓121の表面を擦過し、投光窓111又は受光窓に付着した付着物を除去する。   As a result, the spiral member 31 fixed to the spiral holding member 32 rotates and reciprocates by the magnetic coupling action, and as described above, the surface of the light projection window 111 or the light reception window 121 is abraded, and the light projection is performed. Deposits adhered to the window 111 or the light receiving window are removed.

なお、コントローラ6は、電源投入時、又は電源投入時と所定時間毎と、に清掃手段2を作動させ、上述した、回転或いは往復動作による投光窓111又は受光窓121の清掃(表面の擦過)を行なわせる。   The controller 6 activates the cleaning means 2 when the power is turned on or every predetermined time after the power is turned on, and cleans the light projection window 111 or the light receiving window 121 by the rotation or reciprocation described above (surface rubbing). ).

なお、検出動作中、例えば液体Lの有無を検出中は清掃手段2の作動を遅らせ、清掃手段2を原点位置に退避させておく。   During the detection operation, for example, during detection of the presence or absence of the liquid L, the operation of the cleaning unit 2 is delayed and the cleaning unit 2 is retracted to the origin position.

また、清掃を完了すると、モータ421を停止させ、且つ螺旋部3が原点位置に来るまでモータ431を逆転して停止させ、次の清掃に備える。   When the cleaning is completed, the motor 421 is stopped, and the motor 431 is reversely stopped until the spiral portion 3 comes to the origin position to prepare for the next cleaning.

以上、光学式センサ1或いは反射型の光学式センサ5と、コントローラ6と、を別体として説明したが、コントローラ6の構成・機能を光学式センサ1或いは反射型の光学式センサ5内部に持たせることが可能であることは言うまでもない。   The optical sensor 1 or the reflective optical sensor 5 and the controller 6 have been described as separate units. However, the configuration and function of the controller 6 are included in the optical sensor 1 or the reflective optical sensor 5. It goes without saying that it is possible.

以上、図1及び2を参照して説明したように、螺旋部材31を回転或いは往復させ、投光窓111又は受光窓121の表面を擦過することで、付着物の除去が可能となり、これにより付着物による検出能力の低下を防止した光学式センサの提供が可能となる。   As described above with reference to FIGS. 1 and 2, the adhered member can be removed by rotating or reciprocating the spiral member 31 and rubbing the surface of the light projection window 111 or the light reception window 121. It is possible to provide an optical sensor that prevents the detection ability from being deteriorated due to adhered matter.

図3は、反射型の光学式センサの部分断面図である。   FIG. 3 is a partial cross-sectional view of a reflective optical sensor.

反射型の光学式センサ5は投光部11及び受光部12に対し、これらに相当する投受光部13が異なるのみである。   The reflective optical sensor 5 differs from the light projecting unit 11 and the light receiving unit 12 only in the light projecting / receiving unit 13 corresponding thereto.

このため、投受光部13以外の説明を省略する。   For this reason, descriptions other than the light projecting / receiving unit 13 are omitted.

投受光部13は、投受光部材132を有し、投光器から発射された光Hは、投受光窓131を通過して被検出物(被検出液L)に反射されて受光器に戻り、被検出液Lの有無を検出する。   The light projecting / receiving unit 13 has a light projecting / receiving member 132, and the light H emitted from the light projector passes through the light projecting / receiving window 131 and is reflected by the object to be detected (detected liquid L) to return to the light receiver. The presence or absence of the detection liquid L is detected.

投受光部材132としては投光器と受光器が一体となったフォトカプラ形式のセンサが好ましいが、個別の投光器と受光器とを組み合わせても良い。   As the light projecting / receiving member 132, a photocoupler type sensor in which a light projector and a light receiver are integrated is preferable, but an individual light projector and light receiver may be combined.

以上説明したように、投光器と受光器とを一体として纏めることが出来るので図2に示した透過型の光電式センサに比べて、光学式センサを小型に出来、更に投光部と受光部とを個々に設ける必要がないためコストダウンが図れる。   As described above, since the projector and the light receiver can be integrated, the optical sensor can be made smaller than the transmission type photoelectric sensor shown in FIG. Since it is not necessary to provide each individually, the cost can be reduced.

以下に界面を検出する界面検出装置について説明するが、界面検出装置は、固形微粒子を含んだ気体又は液体であって、当初は固形微粒子が浮遊した状態で懸濁していても、時間の経過と共に固形微粒子が次第に沈下して上層と下層とに分離するもので有れば、好適に使用可能である。   The interface detection device for detecting the interface will be described below. The interface detection device is a gas or liquid containing solid fine particles, and even if the solid fine particles are initially suspended in a suspended state, If the solid fine particles gradually sink and separate into an upper layer and a lower layer, it can be suitably used.

また、このような個体微粒子が浮遊する液体や気体は固体微粒子が検出部に付着しやすく、付着すると光学式センサとしての検出能力を著しく低下させるために、検出部の清掃手段を有する光学式センサを使用することが好ましい。   In addition, the liquid or gas in which such solid particles are suspended easily adheres to the detection unit, and the optical sensor having cleaning means for the detection unit significantly reduces the detection capability as an optical sensor when the solid particles adhere to the liquid or gas. Is preferably used.

図4は、1式の光学式センサを有する界面検出装置の概念図である。   FIG. 4 is a conceptual diagram of an interface detection device having a set of optical sensors.

以下、固形微粒子を含んだ液体の上層(上澄み層)と下層(沈殿層)との境界の検出について図4を参照して説明する。   Hereinafter, detection of the boundary between the upper layer (supernatant layer) and the lower layer (precipitation layer) of the liquid containing solid fine particles will be described with reference to FIG.

固形微粒子を含んだ液体は、当初は固形微粒子が液体中に浮遊した状態で懸濁した液体L’となっている。   The liquid containing the solid fine particles is initially a liquid L ′ suspended in a state where the solid fine particles are suspended in the liquid.

しかし、時間の経過と共に固形微粒子は次第に沈下して上澄み層L’1と沈殿層L’2とに分離する。   However, as time passes, the solid fine particles gradually sink and separate into a supernatant layer L′ 1 and a precipitate layer L′ 2.

ここで、分離した上澄み層L’1と沈殿層L’2との境界を界面Zと記す。   Here, the boundary between the separated supernatant layer L′ 1 and precipitation layer L′ 2 is referred to as an interface Z.

又、図は懸濁した液体が上澄み層L’1と沈殿層L’2とに分離した状態を示している。   Further, the figure shows a state in which the suspended liquid is separated into a supernatant layer L'1 and a precipitation layer L'2.

なお、使用する光学式センサは透過型の上述した光学式センサ1でも反射型の光学式センサ5でも良いが、以下光学式センサ1を用いた場合について説明する。   The optical sensor to be used may be the transmission type optical sensor 1 or the reflection type optical sensor 5 described above, but the case where the optical sensor 1 is used will be described below.

1式の光学式センサを有する界面検出装置8は、1式の光学式センサ1と光学式センサ1を矢印c方向に往復させるセンサ往復装置7とコントローラ6とを有している。   The interface detection device 8 having a set of optical sensors includes a set of optical sensors 1, a sensor reciprocation device 7 for reciprocating the optical sensor 1 in the direction of arrow c, and a controller 6.

センサ往復装置7は不図示のモータ等により光学式センサ1を矢印c方向往復させる。   The sensor reciprocating device 7 reciprocates the optical sensor 1 in the direction of arrow c by a motor (not shown) or the like.

コントローラ6は、例えばCPUや記憶手段等を有する制御手段(不図示)と、光学式センサ1の往復方向の位置を検出する不図示の位置検出手段と、を有し、界面検出装置8をコントロールしている。   The controller 6 includes, for example, control means (not shown) having a CPU, storage means, and the like, and position detection means (not shown) that detects the position of the optical sensor 1 in the reciprocating direction, and controls the interface detection device 8. is doing.

コントローラ6の記憶手段には、各種の固形微粒子毎の懸濁した液体L’に応じた界面Zを検出するスレショルド電圧が予め記憶されている。   The storage means of the controller 6 stores in advance a threshold voltage for detecting the interface Z corresponding to the suspended liquid L ′ for each of various solid fine particles.

ここで、界面を検出するスレショルド電圧は、上澄み層L’1を検出した時の出力電圧と沈殿層L’2を検出した時の出力電圧との中間の電圧を設定(記憶)する。   Here, the threshold voltage for detecting the interface sets (stores) an intermediate voltage between the output voltage when the supernatant layer L'1 is detected and the output voltage when the precipitation layer L'2 is detected.

オペレータが検出開始操作を行うと、制御手段(不図示)はセンサ往復装置7を作動させて、光学式センサ1を下端の原点位置(実線)から上昇端(破線)まで上昇させる。   When the operator performs a detection start operation, the control means (not shown) operates the sensor reciprocating device 7 to raise the optical sensor 1 from the origin position (solid line) at the lower end to the ascending end (broken line).

そして、上昇中に検出した受光部材122(図2)の出力電圧を取り込み、取り込んだ出力電圧と予め記憶された界面Zを検出するスレショルド電圧とを読み出して、該出力電圧とスレショルド電圧とを比較する。   Then, the output voltage of the light receiving member 122 (FIG. 2) detected during the rise is captured, the captured output voltage and the threshold voltage for detecting the interface Z stored in advance are read, and the output voltage is compared with the threshold voltage. To do.

なお、一般的に沈殿層L’2より上澄み層L’1における光の透過率が高いので、上澄み層L’1における出力電圧E1は、沈殿層L’2における出力電圧E2より高い。   In general, since the light transmittance in the supernatant layer L′ 1 is higher than that in the precipitation layer L′ 2, the output voltage E1 in the supernatant layer L′ 1 is higher than the output voltage E2 in the precipitation layer L′ 2.

また、制御手段(不図示)は上昇中に位置検出手段(不図示)により光学式センサ1の位置を読み出し、光学式センサ1の位置を把握する。   Further, the control means (not shown) reads the position of the optical sensor 1 by the position detection means (not shown) during ascending, and grasps the position of the optical sensor 1.

そして、出力電圧がスレショルド電圧と一致すると、一致した時点に位置検出手段(不図示)で読み込んだ位置を、界面Zと判断して界面検出情報を出力する。   When the output voltage matches the threshold voltage, the position read by the position detecting means (not shown) at the time of matching is determined as the interface Z, and the interface detection information is output.

なお、コントローラ6は、電源投入時、又は電源投入時と所定時間毎、又は被検出液を投入後所定時間経過後に、前述した清掃手段2を作動させ、回転或いは往復動作による投光窓111又は受光窓121の清掃(表面の擦過)を行なわせる。   The controller 6 operates the cleaning means 2 described above when the power is turned on, every time when the power is turned on, or after a predetermined time has elapsed after the liquid to be detected is turned on, and the projection window 111 or The light receiving window 121 is cleaned (the surface is scratched).

以上説明したように、1つの光学式センサを往復方向に移動させることにより小型の界面検出装置の提供が可能となる。   As described above, a small interface detection device can be provided by moving one optical sensor in the reciprocating direction.

そして、付着物による検出能力の低下を防止した界面検出装置の提供が可能となる。   And it becomes possible to provide the interface detection apparatus which prevented the fall of the detection capability by the deposit | attachment.

図5は、複数式の光学式センサを有する界面検出装置の概念図である。   FIG. 5 is a conceptual diagram of an interface detection device having a plurality of optical sensors.

以下、固形微粒子を含んだ液体の上層(上澄み層)と下層(沈殿層)との境界の検出について図5を参照して説明する。   Hereinafter, detection of the boundary between the upper layer (supernatant layer) and the lower layer (precipitation layer) of the liquid containing solid fine particles will be described with reference to FIG.

図は懸濁した液体が、上澄み層L’1と沈殿層L’2とに分離した状態を示している。   The figure shows a state in which the suspended liquid is separated into a supernatant layer L'1 and a precipitation layer L'2.

なお、使用する光学式センサは上述した光学式センサ1でも反射型の光学式センサ5でも良いが、以下光学式センサ1を用いた場合について説明する。   The optical sensor to be used may be the optical sensor 1 described above or the reflective optical sensor 5, but the case where the optical sensor 1 is used will be described below.

複数式の光学式センサを有する界面検出装置9は、複数式の光学式センサ1(1a〜1f)とコントローラ6とを有している。   The interface detection device 9 having a plurality of optical sensors includes a plurality of optical sensors 1 (1 a to 1 f) and a controller 6.

コントローラ6は、例えばCPUや記憶手段等を有する制御手段(不図示)を有し、界面検出装置9をコントロールしている。   The controller 6 includes control means (not shown) having, for example, a CPU and storage means, and controls the interface detection device 9.

コントローラ6の記憶手段には、前述したように各種の固形微粒子毎の懸濁した液体L’に応じた界面Zを検出するスレショルド電圧が予め記憶されている。   As described above, the threshold voltage for detecting the interface Z corresponding to the suspended liquid L ′ for each of the various solid fine particles is stored in the storage unit of the controller 6 in advance.

オペレータが検出開始操作を行うと、制御手段(不図示)は複数式の光学式センサ1(1a〜1f)の受光部材122(図2)の出力電圧を読み込み、読み込んだ出力電圧と、予め記憶された界面Zを検出するスレショルド電圧を読み出して、該出力電圧とスレショルド電圧とを比較する。   When the operator performs a detection start operation, the control means (not shown) reads the output voltage of the light receiving member 122 (FIG. 2) of the plurality of optical sensors 1 (1a to 1f), and stores the read output voltage in advance. The threshold voltage for detecting the interface Z is read, and the output voltage is compared with the threshold voltage.

なお、界面Zを検出するスレショルド電圧は、上澄み層L’1を検出した時の出力電圧と沈殿層L’2を検出した時の出力電圧との中間の電圧を設定(記憶)する。   The threshold voltage for detecting the interface Z sets (stores) an intermediate voltage between the output voltage when the supernatant layer L'1 is detected and the output voltage when the precipitation layer L'2 is detected.

そして、出力電圧がスレショルド電圧より高い一番下側の光学式センサ1と、出力電圧がスレショルド電圧より低い一番上側の光学式センサ1と、の間に界面Zが有ると判断し、界面検出情報を出力する。   Then, it is determined that there is an interface Z between the lowermost optical sensor 1 whose output voltage is higher than the threshold voltage and the uppermost optical sensor 1 whose output voltage is lower than the threshold voltage. Output information.

なお、コントローラ6は、電源投入時、又は電源投入時と所定時間毎、又は被検出液を投入後所定時間経過後に、前述した、清掃手段2を作動させ、回転或いは往復動作による投光窓111又は受光窓121の清掃(表面の擦過)を行なわせる。   The controller 6 operates the cleaning means 2 described above to turn on or turn off the light projecting window 111 when the power is turned on, at every predetermined time after the power is turned on, or after a predetermined time has elapsed after the liquid to be detected is turned on. Alternatively, the light receiving window 121 is cleaned (rubbed surface).

以上説明したように、複数の光学式センサを設けることにより、可動部分の無い界面検出装置の提供が可能となる。   As described above, by providing a plurality of optical sensors, it is possible to provide an interface detection device having no movable part.

そして、これにより故障の発生が少ない、且つ付着物による検出能力の低下を防止した界面検出装置の提供が可能となる。   As a result, it is possible to provide an interface detection apparatus that is less likely to fail and that prevents a decrease in detection capability due to adhered matter.

以上、回転駆動部42と往復駆動部43とにより機械的に螺旋部材31を往復・回転させながら投光窓111又は受光窓121の表面を擦過して付着物を除去(清掃)する構成について説明したが、被検出液Lの粘性が低く付着物の付着力が低いような場合は、螺旋部材31に例えば斜めに傾いたタービン状の羽根を配設し、被検出液Lの流動を利用してタービン状の羽根を往復・回転方向に付勢させ、螺旋部材31を往復・回転させることにより投光窓111又は受光窓121の表面を擦過して付着物を除去(清掃)するようにしても良い。   The configuration for removing (cleaning) the deposits by rubbing the surface of the light projection window 111 or the light receiving window 121 while mechanically reciprocating and rotating the spiral member 31 by the rotation drive unit 42 and the reciprocation drive unit 43 has been described. However, in the case where the viscosity of the liquid to be detected L is low and the adhesion force of the deposit is low, for example, a turbine-like blade inclined obliquely is disposed on the spiral member 31 and the flow of the liquid to be detected L is used. The turbine blades are urged in the reciprocating / rotating direction, and the spiral member 31 is reciprocated / rotated to rub the surface of the light projection window 111 or the light receiving window 121 to remove (clean) the deposits. Also good.

また、タービン状の羽根でなく垂直及び水平方向の2種類の羽根を配設して、螺旋部材31を往復・回転させるようにしても良い。   Further, two types of blades in the vertical and horizontal directions may be disposed instead of the turbine blades, and the spiral member 31 may be reciprocated and rotated.

これにより、より簡単な構造の安価な光学式センサを得ることができる。   Thereby, an inexpensive optical sensor having a simpler structure can be obtained.

また、上述した光学式センサ及び界面検出装置は、特開2007−218953に記載された水系微粒子の有機溶媒等の界面検出に応用可能である。   Further, the optical sensor and the interface detection device described above can be applied to interface detection of an organic solvent or the like of water-based fine particles described in JP-A-2007-218953.

光学式センサの概念図である。It is a conceptual diagram of an optical sensor. 光学式センサの部分断面図である。It is a fragmentary sectional view of an optical sensor. 反射型の光学式センサの部分断面図である。It is a fragmentary sectional view of a reflection type optical sensor. 1式の光学式センサを有する界面検出装置の概念図である。It is a conceptual diagram of the interface detection apparatus which has 1 type of optical sensors. 複数式の光学式センサを有する界面検出装置の概念図である。It is a conceptual diagram of the interface detection apparatus which has multiple types of optical sensors.

符号の説明Explanation of symbols

1 光学式センサ
2 清掃手段
3 螺旋部
4 螺旋駆動部
5 反射型の光学式センサ
8 1式の光学式センサを有する界面検出装置
9 複数式の光学式センサを有する界面検出装置
11 投光部
12 受光部
31 螺旋部材
32 螺旋保持部材
41 磁石
42 回転駆動部
43 往復駆動部
112 投光部材
122 受光部材
L 被検出液
L’ 懸濁液
L’1 上澄み層
L’2 沈殿層
Z 界面(境界)
DESCRIPTION OF SYMBOLS 1 Optical sensor 2 Cleaning means 3 Spiral part 4 Spiral drive part 5 Reflective optical sensor 8 Interface detection apparatus which has 1 type of optical sensor 9 Interface detection apparatus which has multiple types of optical sensor 11 Light projection part 12 Light receiving unit 31 Spiral member 32 Spiral holding member 41 Magnet 42 Rotation driving unit 43 Reciprocating driving unit 112 Light projecting member 122 Light receiving member L Detected liquid L 'Suspension L'1 Supernatant layer L'2 Precipitation layer Z Interface (boundary)

Claims (11)

検出部の周囲を取り巻くように配設された螺旋部材と、該螺旋部材を駆動する駆動手段とを有し、
該駆動手段により前記検出部を前記螺旋部材で擦過させることにより、前記検出部に付着した付着物を除去することを特徴とする光学式センサ。
A helical member disposed so as to surround the detection unit, and a driving means for driving the helical member,
An optical sensor characterized in that the adhering matter adhering to the detection unit is removed by rubbing the detection unit with the helical member by the driving means.
前記駆動手段は前記螺旋部材を回転させる回転手段を有し、
前記螺旋部材は前記回転手段により回転されることを特徴とする請求項1に記載の光学式センサ。
The driving means has rotating means for rotating the spiral member,
The optical sensor according to claim 1, wherein the spiral member is rotated by the rotating means.
前記駆動手段は前記螺旋部材を往復動させる往復手段を有し、
前記螺旋部材は前記往復手段により往復されることを特徴とする請求項1または2に記載の光学式センサ。
The drive means has reciprocating means for reciprocating the helical member,
The optical sensor according to claim 1, wherein the spiral member is reciprocated by the reciprocating means.
前記螺旋部材は上端が自由端となり、下端が前記螺旋部材を保持する保持部材に固定され、
前記回転手段と前記往復手段とは磁石を有し、気密構造の筐体に内装され、
前記筐体の外部に位置する磁化された前記保持部材は、前記回転手段と前記往復手段の磁石の少なくともいずれかとの磁気カップリング作用により回転又は往復することを特徴とする請求項3に記載の光学式センサ。
The spiral member has a free upper end, and a lower end fixed to a holding member that holds the spiral member,
The rotating means and the reciprocating means have a magnet, and are housed in an airtight housing.
The magnetized holding member located outside the casing is rotated or reciprocated by a magnetic coupling action between the rotating means and at least one of the magnets of the reciprocating means. Optical sensor.
前記螺旋部材は、前記螺旋部材が検出光の光軸を遮った場合でも、該検出光の光量の50%以上が通過するような、太さ及びピッチを有していることを特徴とする請求項4に記載の光学式センサ。 The spiral member has a thickness and a pitch such that 50% or more of the light amount of the detection light passes even when the spiral member blocks the optical axis of the detection light. Item 5. The optical sensor according to Item 4. 検出動作中は前記螺旋部材の原点位置に退避させておくことを特徴とする請求項1〜5のいずれか1項に記載の光学式センサ。 The optical sensor according to claim 1, wherein the optical sensor is retracted to an origin position of the spiral member during a detection operation. 微粒子を含む液体中で、前記検出部の周囲に付着する付着物を除去することを特徴とする請求項1〜6のいずれか1項に記載の光学式センサ。 The optical sensor according to any one of claims 1 to 6, wherein deposits adhering to the periphery of the detection unit are removed from a liquid containing fine particles. 請求項1〜7のいずれか1項に記載の光学式センサを有することを特徴とする界面検出装置。 An interface detection apparatus comprising the optical sensor according to claim 1. 界面は、固形微粒子を含んだ液体の上層(上澄み層)と下層(沈殿層)との境界であることを特徴とする請求項8に記載の界面検出装置。 The interface detection apparatus according to claim 8, wherein the interface is a boundary between an upper layer (supernatant layer) and a lower layer (precipitation layer) of liquid containing solid fine particles. 1台の前記光学式センサと、該光学センサを往復させる往復駆動手段と、該光学センサの往復方向の位置を検出する検出手段と、制御手段と、を有し、
該制御手段は、前記往復駆動手段により前記光学センサを往復させ、前記検出手段により前記光学センサの位置を把握させ、
前記光学センサが少なくとも上昇中の出力電圧と、予め設定された、上澄み層と沈殿層との検出電圧の中間の電圧と、を比較し、
前記出力電圧が前記中間の電圧に一致した時点の、前記光学センサの位置を界面と判断し、界面検出情報を出力することを特徴とする請求項8又は9に記載の界面検出装置。
One optical sensor, reciprocating drive means for reciprocating the optical sensor, detection means for detecting the position of the optical sensor in the reciprocating direction, and control means,
The control means causes the optical sensor to reciprocate by the reciprocating drive means, causes the detection means to grasp the position of the optical sensor,
Comparing the output voltage at which the optical sensor is rising at least with a preset intermediate voltage between the detection voltage of the supernatant layer and the precipitation layer,
The interface detection apparatus according to claim 8 or 9, wherein the interface detection information is output by determining the position of the optical sensor as an interface when the output voltage coincides with the intermediate voltage.
複数台の前記光学式センサと第2の制御手段とを有し、
第2の制御手段は、
複数台の前記光学式センサのそれぞれの出力電圧と、予め設定された、上澄み層と沈殿層との検出電圧の中間の電圧と、を読み込み、
前記出力電圧と前記中間の電圧とを比較し、
前記中間の電圧より高い出力電圧を出力する一番下側の前記光学式センサと、前記中間の電圧より低い出力電圧を出力する一番上側の前記光学式センサと、の間に界面が有ると判断し、界面検出情報を出力することを特徴とする請求項8又は9に記載の界面検出装置。
A plurality of optical sensors and second control means;
The second control means is
Read the output voltage of each of the plurality of optical sensors and a preset intermediate voltage between the detection voltage of the supernatant layer and the precipitation layer,
Comparing the output voltage with the intermediate voltage;
When there is an interface between the lowermost optical sensor that outputs an output voltage higher than the intermediate voltage and the uppermost optical sensor that outputs an output voltage lower than the intermediate voltage. 10. The interface detection apparatus according to claim 8, wherein the interface detection information is determined and the interface detection information is output.
JP2008104589A 2008-04-14 2008-04-14 Optical sensor and interface detector Pending JP2009257822A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012063329A (en) * 2010-09-17 2012-03-29 Welco Co Ltd Liquid sensor
JP2017013006A (en) * 2015-07-01 2017-01-19 オルガノ株式会社 Carrier interface detection device, carrier interface detection method and waste water treatment equipment

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54145574A (en) * 1978-05-06 1979-11-13 Mitsubishi Electric Corp Sludge interface measuring apparatus
JPS5756202Y2 (en) * 1977-03-01 1982-12-03
JP2000241230A (en) * 1999-02-25 2000-09-08 Shin Meiwa Ind Co Ltd Liquid surface and interface measuring apparatus
JP2007216219A (en) * 2006-01-20 2007-08-30 Safety World:Kk Wiper apparatus and purifying facility using this

Patent Citations (4)

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JPS5756202Y2 (en) * 1977-03-01 1982-12-03
JPS54145574A (en) * 1978-05-06 1979-11-13 Mitsubishi Electric Corp Sludge interface measuring apparatus
JP2000241230A (en) * 1999-02-25 2000-09-08 Shin Meiwa Ind Co Ltd Liquid surface and interface measuring apparatus
JP2007216219A (en) * 2006-01-20 2007-08-30 Safety World:Kk Wiper apparatus and purifying facility using this

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012063329A (en) * 2010-09-17 2012-03-29 Welco Co Ltd Liquid sensor
JP2017013006A (en) * 2015-07-01 2017-01-19 オルガノ株式会社 Carrier interface detection device, carrier interface detection method and waste water treatment equipment

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