JP2009244729A - Photosensitive resin composition, light-shielding color filter and method of producing the same, and solid-state image sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition that provides a light-shielding color filter having excellent adhesiveness to a substrate and excellent uniformity of the coating film thickness on a wafer and suppressing the generation of residue, to provide a light-shielding color filter formed from the above photosensitive resin composition and a method of producing the same, and to provide a solid-state image sensor. <P>SOLUTION: The resin composition contains at least (A) titanium black, (B) a polymerizable compound, (C) a resin, (D) a photopolymerization initiator, (E) an organic solvent and (F) a copolymer of an ethylenically unsaturated compound having a fluoroalkyl group containing ≥9 fluorine atoms and an ethylenically unsaturated compound having a carboxyl group. The light-shielding color filter formed by using the above composition, the method of producing the same and the solid-state image sensor having the above light-shielding color filter are also provided. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a photosensitive resin composition, a light-shielding color filter, a method for producing the same, and a solid-state imaging device.

A color filter used in a liquid crystal display device includes a light shielding film called a black matrix for the purpose of shielding light between colored pixels and improving contrast. In the solid-state imaging device, a light shielding film is provided for the purpose of preventing dark current (noise) due to stray light and improving image quality.
As a composition for forming a black matrix for a liquid crystal display device or a light-shielding film for a solid-state imaging device, a photosensitive resin composition containing a black color material such as carbon black or titanium black is known (for example, And Patent Documents 1 to 5).

Japanese Patent Laid-Open No. 10-246955 JP-A-9-54431 Japanese Patent Laid-Open No. 10-46042 JP 2006-36750 A JP 2007-115921 A

The black matrix for a liquid crystal display device is mainly required to have a light-shielding property in the visible region, whereas the light-shielding film for a solid-state imaging device (hereinafter, synonymous with “light-shielding color filter”) is visible region. In addition to the light-shielding property in, it is also necessary to have a light-shielding property in the infrared region.
Further, the black matrix for liquid crystal display devices is required to be miniaturized, while the light-shielding film for solid-state imaging devices is required to have the ability to uniformly shield the entire surface of the wafer. As the light-shielding film for the solid-state imaging device, the light-shielding film disposed on the periphery of the imaging unit that is the peripheral region of the imaging unit (effective pixel region) and / or the protruding electrode on the back surface facing the surface on which the imaging unit is formed A light shielding film disposed between the two is important.

However, when the above-mentioned known photosensitive resin composition is used as a light-shielding film for a solid-state imaging device and the light-shielding film is formed in a pattern having a step in the surface, the film thickness of the light-shielding film is larger at the wafer peripheral part than at the wafer central part. There is a case where the light shielding ability of the device in the peripheral portion of the wafer is lowered.
Further, when the amount of the surfactant added is increased in order to improve the coating uniformity, there is a problem that a residue is generated in the development process.

Furthermore, the adhesion between the substrate and the light-shielding film is insufficient, and the light-shielding ability is lowered as a result of chipping or peeling of the light-shielding film.
The present invention has been made in view of the above problems.

  That is, the problem to be solved by the present invention is a photosensitive resin that provides a light-shielding color filter with excellent adhesion to a substrate, excellent uniformity of the coating film thickness on the wafer, and suppressed generation of residues. It is to provide a composition. Furthermore, an object of this invention is to provide the light-shielding color filter formed with the said photosensitive resin composition, its manufacturing method, and a solid-state image sensor.

The above-described problems of the present invention have been solved by means described in the following <1> and <5> to <7>. It is described below together with <2> to <4> which are preferred embodiments.
<1> (A) Titanium black, (B) polymerizable compound, (C) resin, (D) photopolymerization initiator, (E) organic solvent, and (F) fluoroalkyl containing 9 or more fluorine atoms A photosensitive resin composition comprising at least a copolymer of an ethylenically unsaturated compound having a group and an ethylenically unsaturated compound having a carboxyl group,
<2> (F) The above <1>, wherein the copolymer is a copolymer of an ethylenically unsaturated compound represented by formula (1) and an ethylenically unsaturated compound represented by formula (2) A photosensitive resin composition according to claim 1,

式（１）中、Ｒｆは、９個以上のフッ素原子を含む、フルオロアルキル基又はパーフルオロアルキル基を含有する基であり、ｎは１又は２を表し、Ｒ¹は水素原子又はメチル基を表す。

In the formula (1), Rf is a group containing a fluoroalkyl group or a perfluoroalkyl group containing 9 or more fluorine atoms, n represents 1 or 2, and R ¹ represents a hydrogen atom or a methyl group. To express.

式（２）中、Ｒ²¹は水素原子又はメチル基を表し、Ｒ²²は炭素数３〜３０の脂肪族環状構造を有する（ｎ＋１）価の連結基を表し、Ａは酸素原子、又は−ＮＲ²³−表し、Ｒ²³は水素原子又は炭素数１〜１０の一価の炭化水素基を表し、ｎは１〜４の整数を表す。

In formula (2), R ²¹ represents a hydrogen atom or a methyl group, R ²² represents an (n + 1) -valent linking group having an aliphatic cyclic structure having 3 to 30 carbon atoms, and A represents an oxygen atom or —NR ²³ -represents, R ²³ represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms, and n represents an integer of 1 to 4.

<3> (D) The photosensitive resin composition according to <1> or <2> above, which contains an oxime-based photopolymerization initiator as a photopolymerization initiator,
<4> The photosensitive resin composition according to any one of <1> to <3> above, which is for a solid-state imaging device,
<5> A light-shielding color filter having a pattern formed using the photosensitive resin composition according to any one of <1> to <3> above,
<6> The process of apply | coating the photosensitive resin composition as described in any one of said <1> thru | or said <3> to a board | substrate, the process of image exposure, and the process of developing and patterning. A method for producing a light-shielding color filter,
<7> A solid-state imaging device having the light-shielding color filter according to <5>.

  ADVANTAGE OF THE INVENTION According to this invention, the photosensitive resin composition which can form the light-shielding color filter which was excellent in the adhesiveness with a board | substrate, was excellent in the uniformity of the coating film thickness on a wafer, and generation | occurrence | production of the residue was suppressed. Could be provided. Furthermore, according to this invention, the light-shielding color filter formed using the said photosensitive resin composition, its manufacturing method, and the solid-state image sensor could be provided.

(1) Photosensitive resin composition The photosensitive resin composition of the present invention comprises (A) titanium black, (B) a polymerizable compound, (C) a resin, (D) a photopolymerization initiator, (E) an organic solvent, And (F) a copolymer of at least an ethylenically unsaturated compound having a fluoroalkyl group containing 9 or more fluorine atoms and an ethylenically unsaturated compound having a carboxyl group. The photosensitive resin composition of the present invention may contain other components as additives in addition to the above (A) to (F).
Further, the photosensitive resin composition of the present invention can be suitably used as a photosensitive resin composition for a solid-state image sensor, and is suitable for forming a light-shielding color filter (light-shielding film) on the solid-state image sensor. Can be used.

Hereinafter, each component of the photosensitive resin composition of this invention is demonstrated.
(A) Titanium black The photosensitive resin composition of the present invention contains titanium black as a black color material.
Titanium black has a higher light blocking ability in the infrared region than conventional pigments and dyes dispersed and dissolved in photosensitive resin compositions, especially color filter photosensitive resin compositions. The infrared light region can be surely shielded, which cannot be shielded by combination. In particular, the light-shielding film obtained by curing the photosensitive resin composition of the present invention has a high light-shielding property in the infrared light region, and can suppress noise due to dark current of a solid-state imaging device having the light-shielding film.
Titanium black can be cured with less exposure because it absorbs less i-rays for pattern formation compared to carbon black, which is commonly used as a black color material, and is therefore productive. It can contribute to improvement.

Titanium black is black particles having titanium atoms. Preferred are low-order titanium oxide and titanium oxynitride. The surface of the titanium black particles can be chemically modified as necessary for the purpose of improving dispersibility and suppressing aggregation. Specifically, the surface of titanium black can be coated with silicon oxide, titanium oxide, germanium oxide, aluminum oxide, magnesium oxide, zirconium oxide, and as disclosed in Japanese Patent Application Laid-Open No. 2007-302836. Surface treatment with a water repellent material is also possible.
In addition, the titanium black is a composite oxide such as Cu, Fe, Mn, V, and Ni, and a black pigment such as cobalt oxide, iron oxide, carbon black, and aniline black for the purpose of adjusting dispersibility, colorability, and the like. You may contain 1 type or in combination of 2 or more types.
In addition, for the purpose of controlling the light-shielding property of a desired wavelength, it is also possible to add existing colorants such as pigments such as red, blue, green, yellow, cyan, magenta, violet, orange, or dyes. .

  Examples of commercially available titanium black products include Gemco Corporation (sold by Mitsubishi Materials Corporation) Titanium Black 10S, 12S, 13R, 13M, 13M-C, 13R, 13R-N, and Ako Kasei Co., Ltd. Tilac D etc. are mentioned.

  The titanium black can be produced by heating a mixture of titanium dioxide and titanium metal in a reducing atmosphere for reduction (Japanese Patent Laid-Open No. 49-5432), ultrafine obtained by high-temperature hydrolysis of titanium tetrachloride. A method of reducing titanium dioxide in a reducing atmosphere containing hydrogen (Japanese Patent Laid-Open No. 57-205322), a method of reducing titanium dioxide or titanium hydroxide at high temperature in the presence of ammonia (Japanese Patent Laid-Open No. 60-65069, No. 61-201610), a method in which a vanadium compound is attached to titanium dioxide or titanium hydroxide and reduced at high temperature in the presence of ammonia (Japanese Patent Laid-Open No. 61-201610). It is not a thing.

The particle size of the titanium black particles is not particularly limited, but the average particle size (average primary particle size) is 10 to 150 nm from the viewpoints of dispersibility and colorability and the influence on the yield in a solid-state imaging device. It is preferable that it is, and it is more preferable that it is 15-100 nm, and it is especially preferable that it is 20-80 nm.
The average particle diameter can be measured by applying titanium black to a suitable substrate and observing with a scanning electron microscope.
Although the specific surface area of the titanium black is not particularly limited, the water repellency after the surface treatment of the titanium black with a water repellent agent has a predetermined performance, and therefore the value measured by the BET method is about 5 to 150 m. it is preferably ² / g, and more preferably about 20 to 100 m ² / g.

In the present invention, titanium black and other black color materials may be used in combination, and black color materials other than titanium black may be used alone or in combination of two or more.
As the black color material that can be used in combination, various known black pigments and black dyes can be used.In particular, carbon black, iron oxide, manganese oxide, graphite and the like are preferable from the viewpoint of realizing a high optical density in a small amount, Among these, carbon black is preferable.

The carbon black is black fine particles including carbon fine particles, and preferable particles include carbon fine particles having a diameter of about 3 to 1,000 nm. Further, the surface of the fine particles can have functional groups containing various carbon atoms, hydrogen atoms, oxygen atoms, sulfur atoms, nitrogen atoms, halogens, inorganic atoms and the like.
Carbon black can be changed in its properties by variously changing the particle diameter (particle size), structure (particle connection), and surface properties (functional group) according to the intended application. It is also possible to change the blackness and affinity with the resin, or to provide conductivity.

  Specific examples of the carbon black include, for example, carbon blacks # 2400, # 2350, # 2300, # 2200, # 1000, # 980, # 970, # 960, # 950, # 900, # 850 manufactured by Mitsubishi Chemical Corporation. , MCF88, # 650, MA600, MA7, MA8, MA11, MA100, MA220, IL30B, IL31B, IL7B, IL11B, IL52B, # 4000, # 4010, # 55, # 52, # 50, # 47, # 45, # 44, # 40, # 33, # 32, # 30, # 20, # 10, # 5, CF9, # 3050, # 3150, # 3250, # 3750, # 3950, Diamond Black A, Diamond Black N220M, Diamond Black N234, Diamond Black I, Diamond Black LI, Diamond Black II, Diab N339, diamond black SH, diamond black SHA, diamond black LH, diamond black H, diamond black HA, diamond black SF, diamond black N550M, diamond black E, diamond black G, diamond black R, diamond black N760M, diamond black LP. Carbon black thermax N990, N991, N907, N908, N990, N991, N908 made by Cancarb. Carbon black Asahi # 80, Asahi # 70, Asahi # 70L, Asahi F-200, Asahi # 66, Asahi # 66HN, Asahi # 60H, Asahi # 60U, Asahi # 60, Asahi # 55, Asahi # 50H, Asahi # 51, Asahi # 50U, Asahi # 50, Asahi # 35, Asahi # 15, Asahi Thermal, Degussa's carbon black ColorBlack Fw200, ColorBlack Fw2, ColorBlack Fw2, ColorBlack Fw1, ColorBlack 170, BlackBlack, BlackBlack S160, Special Black 6, Special Black 5, Special Black 4, Special Black 4A, Printex U, Printex V, Printex 140U, Printex 140V, etc. Can be mentioned.

The carbon black may preferably have an insulating property.
The carbon black having an insulating property is a carbon black exhibiting an insulating property when the volume resistance as a powder is measured by the following method. This insulating property is based on the fact that an organic compound is present on the surface of the carbon black particle, for example, an organic substance is adsorbed, coated or chemically bonded (grafted) on the surface of the carbon black particle.
That is, carbon black was dispersed and applied in propylene glycol monomethyl ether acetate such that benzyl methacrylate and methacrylic acid had a molar ratio of 70:30 copolymer (weight average molecular weight 30,000) and 20:80 weight ratio. A liquid is prepared and applied onto a chrome substrate having a thickness of 1.1 mm and 10 cm × 10 cm to produce a coating film having a dry film thickness of 3 μm. Further, the coating film is heated in a hot plate at 220 ° C. for about 5 minutes. After that, it is applied with a high resistivity meter manufactured by Mitsubishi Chemical Corporation conforming to JISK6911 and Hirestar UP (MCP-HT450), and the volume resistance value is measured in an environment of 23 ° C. and 65% relative humidity. Carbon black having a volume resistance value of 10 ⁵ Ω · cm or more, more preferably 10 ⁶ Ω · cm or more, and particularly preferably 10 ⁷ Ω · cm or more is preferable.

  As the carbon black as described above, for example, JP-A-11-60988, JP-A-11-60989, JP-A-10-330634, JP-A-11-80583, JP-A-11-80584, Resin-coated carbon black disclosed in JP-A-9-124969 and JP-A-9-95625 can be used.

The average particle diameter (average primary particle diameter) of the black color material used in combination with titanium black is preferably small from the viewpoint of foreign matter generation and the influence on the yield in the production of a solid-state imaging device. . The average primary particle size is preferably 10 to 100 nm, more preferably 50 nm or less, and preferably 30 nm or less.
The average particle diameter can be measured by applying a black color material to a suitable substrate and observing with a scanning electron microscope.

  The content of titanium black in the photosensitive resin composition is not particularly limited, but the average transmittance in the visible region to infrared region (400 to 1,600 nm) of the light-shielding color filter to be formed is 1. % Or less is preferable. It is preferable that an optical density of 2.0 or more is obtained with substantially the same film thickness as a color separation filter such as RGB. The amount of titanium black in the solid content of the photosensitive resin composition is preferably 10 to 95% by weight, and more preferably 20 to 80% by weight.

When titanium black and another black color material are used in combination, the preferred weight ratio of titanium black: other black color material is 95: 5 to 5:95, more preferably 95: 5 to 50:50. More preferably, it is 90: 10-60: 40. In addition, when there are a plurality of black color materials to be used in combination, it is preferable that the total weight thereof is in the above range.
By making the weight ratio of titanium black and other black color materials within the above range, the dispersibility in the photosensitive resin composition becomes good and a stable coating film without unevenness can be formed, which is preferable.

  In addition, a dispersant having an acid value / amine value can be used for the dispersion of the above-described titanium black or carbon black. Specifically, Solsperse 24000, Solsperse 33500, Big Chemie Japan (manufactured by Avicia Co., Ltd.) DispersBYK161 manufactured by Co., Ltd. can be used. Here, “having an acid value / amine value” means having a group having an acid value, having a group having an amine value, or having both.

In addition, as other dispersants, homopolymer polymers or copolymer polymers obtained by polymerizing monomers such as (meth) acrylic acid, (meth) acrylic acid esters, (meth) acrylamide or derivatives thereof, styrene or derivatives thereof, etc. Can be used.
Examples of the monomer include styrene, o-methylstyrene, m-methylstyrene, p-methylstyrene, α-methylstyrene, p-methoxystyrene, p-tert-butylstyrene, p-phenylstyrene, o-chlorostyrene, m- Styrene monomers such as chlorostyrene and p-chlorostyrene; acrylic acid, methyl acrylate, ethyl acrylate, propyl acrylate, n-butyl acrylate, isobutyl acrylate, dodecyl acrylate, stearyl acrylate, 2-acrylic acid 2- Ethylhexyl, hydroxyethyl acrylate, hydroxypropyl acrylate, methacrylic acid, methyl methacrylate, ethyl methacrylate, propyl methacrylate, n-butyl methacrylate, isobutyl methacrylate, n-octyl methacrylate, methacrylate (Meth) acrylic monomers such as dodecyl acid, benzyl methacrylate, 2-ethylhexyl methacrylate, stearyl methacrylate, hydroxyethyl methacrylate, hydroxypropyl methacrylate; ethylene, propylene, butylene, vinyl chloride, vinyl acetate, acrylonitrile, Examples include homopolymers or copolymers of various monomers such as acrylamide, methacrylamide, and N-vinylpyrrolidone. Of these, (meth) acrylic acid ester-based polymers are preferable.

  As other materials that can be used for dispersion, resins such as polyurethane and polyimide, and siloxane-based polymers described in JP-A Nos. 2002-241616 and 2002-234959 can also be used.

  The resin used as the dispersant is not limited in molecular weight as long as dispersibility can be ensured, but from the viewpoint of dispersibility, the weight average molecular weight is preferably 500 to 200,000, more preferably 800 to 50,000, and still more preferably 1. , 30,000 to 30,000.

  As the dispersion medium for dispersing the black color material such as titanium black or carbon black, various water-soluble or water-insoluble materials can be used as long as they can function as a solvent for dispersion. For example, methyl alcohol Alcohols such as ethyl alcohol, isopropyl alcohol, butyl alcohol, and allyl alcohol; ethylene glycol, propylene glycol, propylene glycol monomethyl ether, diethylene glycol, polyethylene glycol, polypropylene glycol, diethylene glycol monoethyl ether, polypropylene glycol monoethyl ether, polyethylene glycol mono Glycols such as allyl ether, polypropylene glycol monoallyl ether, or derivatives thereof; glycerol, glycero Monoethyl ether, glycerol or its derivatives such as glycerol monoallyl ether; ethers such as tetrahydrofuran and dioxane; ketones such as methyl ethyl ketone and methyl isobutyl ketone;

  Liquid paraffin, decane, decene, methylnaphthalene, decalin, kerosene, diphenylmethane, toluene, dimethylbenzene, ethylbenzene, diethylbenzene, propylbenzene, cyclohexane, partially hydrogenated hydrocarbons such as triphenyl, polydimethylsiloxane, and partial octyl substitution Polydimethylsiloxane, partially phenyl-substituted polydimethylsiloxane, silicone oils such as fluorosilicone oil, halogenated hydrocarbons such as chlorobenzene, dichlorobenzene, bromobenzene, chlorodiphenyl, and chlorodiphenylmethane, Dylroll (manufactured by Daikin Industries, Ltd.) , Fluorides such as demnum (manufactured by Daikin Industries, Ltd.), ethyl benzoate, octyl benzoate, dioctyl phthalate, trioctyl trimellitic acid, sebashi Ester compounds such as dibutyl acid, ethyl (meth) acrylate, butyl (meth) acrylate, dodecyl (meth) acrylate, ethyl acetate, butyl acetate, propylene glycol monomethyl ether acetate, N, N-dimethylacrylamide, N, Amide solvents such as N-dimethylacetamide and N-methylpyrrolidone are appropriately selected and used alone or in combination.

When preparing a black color material dispersion containing titanium black in the present invention, the polymer component is preferably added in an amount of 5 to 200 parts by weight, more preferably 10 to 100 parts by weight per 100 parts by weight of the black color material. To do.
When the polymer component is 5 parts by weight or more, the surface property of the black color material can be kept better, and when the polymer component is 200 parts by weight or less, the inherently required black color such as light-shielding property and coloring property The characteristics of the material can be further improved.

  The photosensitive resin composition of the present invention includes pigments such as red, blue, green, yellow, cyan, magenta, violet, orange and the like for the purpose of controlling the light-shielding property at a desired wavelength in addition to the black color material described above. Alternatively, a known colorant such as a dye can be added.

(B) Polymerizable compound The photosensitive resin composition of the present invention contains a polymerizable compound. This polymerizable compound is preferably a compound that undergoes addition polymerization by the action of a photopolymerization initiator. As the polymerizable compound, it is preferable to use an ethylenically unsaturated compound having at least one ethylenically unsaturated bond in the molecule.
As the polymerizable compound, a polyfunctional ethylenically unsaturated compound having two or more terminal ethylenically unsaturated bonds is more preferable. Such a compound group is widely known in the industrial field, and can be used without any particular limitation in the present invention. These have chemical forms such as monomers, dimers, trimers and oligomers, or mixtures thereof. The polymerizable compound preferably has a molecular weight of 70 to 2,000, and more preferably 100 to 1,000.

  Examples of monomers and copolymers thereof include unsaturated carboxylic acids (for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.), and esters and amides thereof. In this case, an ester of an unsaturated carboxylic acid and an aliphatic polyhydric alcohol compound, or an amide of an unsaturated carboxylic acid and an aliphatic polyvalent amine compound is used. In addition, an addition reaction product of an unsaturated carboxylic acid ester or amide having a nucleophilic substituent such as a hydroxyl group, amino group, mercapto group or the like with a monofunctional or polyfunctional isocyanate or epoxy, and a monofunctional or polyfunctional A dehydration condensation reaction product with carboxylic acid is also preferably used. Further, an addition reaction product of an unsaturated carboxylic acid ester or amide having an electrophilic substituent such as an epoxy group or an epoxy group with a monofunctional or polyfunctional alcohol, amine or thiol, a halogen group or In addition, a substitution reaction product of an unsaturated carboxylic acid ester or amide having a leaving substituent such as a tosyloxy group and a monofunctional or polyfunctional alcohol, amine or thiol is also suitable. As another example, it is also possible to use a group of compounds substituted with unsaturated phosphonic acid, styrene, vinyl ether or the like instead of the unsaturated carboxylic acid.

  Specific examples of the monomer of an ester of an aliphatic polyhydric alcohol compound and an unsaturated carboxylic acid include acrylic acid esters such as ethylene glycol diacrylate, triethylene glycol diacrylate, 1,3-butanediol diacrylate, and tetramethylene glycol. Diacrylate, propylene glycol diacrylate, neopentyl glycol diacrylate, trimethylolpropane triacrylate, trimethylolpropane tri (acryloyloxypropyl) ether, trimethylolethane triacrylate, hexanediol diacrylate, 1,4-cyclohexanediol diacrylate , Tetraethylene glycol diacrylate, pentaerythritol diacrylate, pentaerythritol triacrylate , Pentaerythritol tetraacrylate, dipentaerythritol diacrylate, dipentaerythritol hexaacrylate, sorbitol triacrylate, sorbitol tetraacrylate, sorbitol pentaacrylate, sorbitol hexaacrylate, tri (acryloyloxyethyl) isocyanurate, polyester acrylate oligomer, isocyanuric acid There are EO-modified triacrylate and the like.

  Methacrylic acid esters include tetramethylene glycol dimethacrylate, triethylene glycol dimethacrylate, neopentyl glycol dimethacrylate, trimethylolpropane trimethacrylate, trimethylolethane trimethacrylate, ethylene glycol dimethacrylate, 1,3-butanediol dimethacrylate, Hexanediol dimethacrylate, pentaerythritol dimethacrylate, pentaerythritol trimethacrylate, pentaerythritol tetramethacrylate, dipentaerythritol dimethacrylate, dipentaerythritol hexamethacrylate, sorbitol trimethacrylate, sorbitol tetramethacrylate, bis [p- (3-methacryloxy- 2-hydroxypro ) Phenyl] dimethyl methane, bis - [p- (methacryloxyethoxy) phenyl] dimethyl methane.

Itaconic acid esters include ethylene glycol diitaconate, propylene glycol diitaconate, 1,3-butanediol diitaconate, 1,4-butanediol diitaconate, tetramethylene glycol diitaconate, pentaerythritol diitaconate And sorbitol tetritaconate.
Examples of crotonic acid esters include ethylene glycol dicrotonate, tetramethylene glycol dicrotonate, pentaerythritol dicrotonate, and sorbitol tetradicrotonate. Examples of isocrotonic acid esters include ethylene glycol diisocrotonate, pentaerythritol diisocrotonate, and sorbitol tetraisocrotonate.
Examples of maleic acid esters include ethylene glycol dimaleate, triethylene glycol dimaleate, pentaerythritol dimaleate, and sorbitol tetramaleate.

  Examples of other esters include aliphatic alcohol esters described in JP-B-51-47334 and JP-A-57-196231, JP-A-59-5240, and JP-A-59-5241. And those having an aromatic skeleton described in JP-A-2-226149 and those containing an amino group described in JP-A-1-165613 are preferably used. Furthermore, the ester monomers described above can also be used as a mixture.

Specific examples of amide monomers of aliphatic polyvalent amine compounds and unsaturated carboxylic acids include methylene bis-acrylamide, methylene bis-methacrylamide, 1,6-hexamethylene bis-acrylamide, 1,6-hexamethylene bis. -Methacrylamide, diethylenetriamine trisacrylamide, xylylene bisacrylamide, xylylene bismethacrylamide and the like.
Examples of other preferable amide monomers include those having a cyclohexylene structure described in JP-B-54-21726.

  In addition, urethane-based addition polymerizable compounds produced by using an addition reaction of isocyanate and hydroxyl group are also suitable, and specific examples thereof include, for example, one molecule described in JP-B-48-41708. A vinylurethane compound containing two or more polymerizable vinyl groups in one molecule obtained by adding a vinyl monomer containing a hydroxyl group represented by the following formula (A) to a polyisocyanate compound having two or more isocyanate groups. Etc.

^{_{CH 2 = C (R 4)}} COOCH 2 CH (R 5) OH (A)
(In the formula (A), R ⁴ and R ⁵ each represent H or CH _3. )

  Further, urethane acrylates as described in JP-A-51-37193, JP-B-2-32293, JP-B-2-16765, JP-B-58-49860, JP-B-56-17654 And urethane compounds having an ethylene oxide skeleton described in JP-B-62-39417 and JP-B-62-39418. Furthermore, addition polymerizable compounds having an amino structure or a sulfide structure in the molecule described in JP-A-63-277653, JP-A-63-260909, and JP-A-1-105238 are used. Depending on the case, it is possible to obtain a photosensitive resin composition having an extremely excellent photosensitive speed.

  Other examples include polyester acrylates, epoxy resins and (meth) acrylic acid as described in JP-A-48-64183, JP-B-49-43191, JP-B-52-30490, and JP-A-52-30490. Mention may be made of polyfunctional acrylates and methacrylates such as reacted epoxy acrylates. Further, specific unsaturated compounds described in JP-B-46-43946, JP-B-1-40337, JP-B-1-40336, vinylphosphonic acid compounds described in JP-A-2-25493, and the like Can also be mentioned. In some cases, a structure containing a perfluoroalkyl group described in JP-A-61-22048 is preferably used. Furthermore, Journal of Japan Adhesion Association vol. 20, no. 7, pages 300 to 308 (1984), which are introduced as photocurable monomers and oligomers, can also be used.

About these polymeric compounds, the details of usage methods, such as the structure, single use, combined use, and addition amount, can be arbitrarily set according to the final performance design of the photosensitive resin composition. For example, it is selected from the following viewpoints.
From the viewpoint of sensitivity, a structure having a large unsaturated group content per molecule is preferable, and in many cases, a bifunctional or higher functionality is preferable. Further, in order to increase the strength of the cured film, those having three or more functionalities are preferable, and furthermore, different functional numbers and different polymerizable groups (for example, acrylic acid esters, methacrylic acid esters, styrene compounds, vinyl ether compounds). A method of adjusting both sensitivity and intensity by using a combination of these materials is also effective.

  In addition, the compatibility and dispersibility with other components (for example, photopolymerization initiator, titanium black, etc.) contained in the photosensitive resin composition, the selection and use method of the polymerizable compound is This is an important factor. For example, the compatibility may be improved by using a low-purity compound or using two or more kinds in combination. In addition, a specific structure may be selected for the purpose of improving adhesion to a hard surface such as a substrate.

Although there is no limitation in particular as content (two or more types of total content) of the polymeric compound in the total solid of the photosensitive resin composition of this invention, from the viewpoint of obtaining the effect of this invention more effectively. 10 to 80% by weight, preferably 15 to 75% by weight, more preferably 20 to 60% by weight.
In the present invention, it is more preferable to use ethylenically unsaturated compounds having different functional numbers selected from 2 to 6 functional groups, and 4 to 6 functional (meth) which is a complete (meth) acrylic acid ester of an aliphatic polyol. It is more preferable to use two kinds of acrylic acid esters in combination.

(C) Resin The photosensitive resin composition of the present invention contains a resin as a binder (film forming agent). This resin is preferably an alkali-soluble resin.
It is preferable to use a linear organic polymer as the resin. As such a “linear organic polymer”, a known one can be arbitrarily used. Preferably, a linear organic polymer that is soluble or swellable in water or weak alkaline water is selected in order to enable water development or weak alkaline water development. The linear organic polymer is selected and used not only as a film forming agent but also according to the use as water, weak alkaline water or an organic solvent developer. For example, when a water-soluble organic polymer is used, water development becomes possible. Examples of such linear organic polymers include radical polymers having a carboxylic acid group in the side chain, such as JP-A-59-44615, JP-B-54-34327, JP-B-58-12777, and JP-B-54-25957. , JP-A-54-92723, JP-A-59-53836, JP-A-59-71048, that is, a resin obtained by homogenizing or copolymerizing a monomer having a carboxyl group Resin in which an acid anhydride unit is hydrolyzed, half-esterified or half-amidated, or an epoxy acrylate in which an epoxy resin is modified with an unsaturated monocarboxylic acid and an acid anhydride Etc. Examples of the monomer having a carboxyl group include acrylic acid, methacrylic acid, itaconic acid, crotonic acid, maleic acid, fumaric acid, 4-carboxylstyrene, and the monomer having an acid anhydride includes maleic anhydride. It is done.
Similarly, there is an acidic cellulose derivative having a carboxylic acid group in the side chain. In addition, those obtained by adding a cyclic acid anhydride to a polymer having a hydroxyl group are useful.

  When a copolymer is used as the resin (for example, alkali-soluble resin) in the present invention, a monomer other than the above-mentioned monomers can also be used as the compound to be copolymerized. Examples of other monomers include the following compounds (1) to (12).

(1) 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, 3-hydroxypropyl acrylate, 4-hydroxybutyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, 3-hydroxypropyl methacrylate, 4-hydroxybutyl methacrylate Acrylic esters having an aliphatic hydroxyl group such as methacrylic esters.
(2) Methyl acrylate, ethyl acrylate, propyl acrylate, butyl acrylate, isobutyl acrylate, amyl acrylate, hexyl acrylate, 2-ethylhexyl acrylate, octyl acrylate, benzyl acrylate, acrylic acid-2- Acrylic acid having no aliphatic hydroxyl group such as chloroethyl, glycidyl acrylate, 3,4-epoxycyclohexylmethyl acrylate, vinyl acrylate, 2-phenylvinyl acrylate, 1-propenyl acrylate, allyl acrylate, 2-allyloxyethyl acrylate, propargyl acrylate, etc. Esters.

(3) Methyl methacrylate, ethyl methacrylate, propyl methacrylate, butyl methacrylate, isobutyl methacrylate, amyl methacrylate, hexyl methacrylate, 2-ethylhexyl methacrylate, cyclohexyl methacrylate, benzyl methacrylate, methacrylic acid-2- Methacrylic acid having no aliphatic hydroxyl group such as chloroethyl, glycidyl methacrylate, 3,4-epoxycyclohexylmethyl methacrylate, vinyl methacrylate, 2-phenylvinyl methacrylate, 1-propenyl methacrylate, allyl methacrylate, 2-allyloxyethyl methacrylate, propargyl methacrylate Esters.
(4) Acrylamide, methacrylamide, N-methylolacrylamide, N-ethylacrylamide, N-hexylmethacrylamide, N-cyclohexylacrylamide, N-hydroxyethylacrylamide, N-phenylacrylamide, N-nitrophenylacrylamide, N-ethyl- Acrylamide or methacrylamide such as N-phenylacrylamide, vinylacrylamide, vinylmethacrylamide, N, N-diallylacrylamide, N, N-diallylmethacrylamide, allylacrylamide, allylmethacrylamide.

(5) Vinyl ethers such as ethyl vinyl ether, 2-chloroethyl vinyl ether, hydroxyethyl vinyl ether, propyl vinyl ether, butyl vinyl ether, octyl vinyl ether, and phenyl vinyl ether.
(6) Vinyl esters such as vinyl acetate, vinyl chloroacetate, vinyl butyrate and vinyl benzoate.
(7) Styrenes such as styrene, α-methylstyrene, methylstyrene, chloromethylstyrene, and p-acetoxystyrene.
(8) Vinyl ketones such as methyl vinyl ketone, ethyl vinyl ketone, propyl vinyl ketone, and phenyl vinyl ketone.
(9) Olefins such as ethylene, propylene, isobutylene, butadiene, and isoprene.

(10) N-vinylpyrrolidone, acrylonitrile, methacrylonitrile and the like.
(11) Unsaturated imides such as maleimide, N-acryloylacrylamide, N-acetylmethacrylamide, N-propionylmethacrylamide, N- (p-chlorobenzoyl) methacrylamide.
(12) A methacrylic acid monomer having a hetero atom bonded to the α-position. Examples thereof include compounds described in JP-A Nos. 2002-309057 and 2002-311569.

  Among these, a (meth) acrylic resin having an allyl group, a vinyl ester group, and a carboxyl group in the side chain and a side chain described in JP-A Nos. 2000-187322 and 2002-62698 are doubled. An alkali-soluble resin having a bond and an alkali-soluble resin having an amide group in the side chain described in JP-A No. 2001-242612 are preferable because of excellent balance of film strength, sensitivity, and developability.

In addition, Japanese Patent Publication No. 7-2004, Japanese Patent Publication No. 7-120041, Japanese Patent Publication No. 7-120042, Japanese Patent Publication No. 8-12424, Japanese Patent Laid-Open No. 63-287944, Japanese Patent Laid-Open No. 63-287947, Japanese Patent Laid-Open No. Urethane binder polymers containing acid groups described in each publication such as No. 271741 and urethane binder polymers having acid groups and double bonds in side chains described in JP-A-2002-107918 are Since it is very excellent in strength, it is advantageous in terms of printing durability and suitability for low exposure.
In addition, an acetal-modified polyvinyl alcohol-based binder polymer having an acid group described in European Patent 993966, European Patent 1204000, Japanese Patent Application Laid-Open No. 2001-318463, and the like is preferable because of its excellent balance of film strength and developability.
In addition, polyvinyl pyrrolidone, polyethylene oxide, and the like are useful as the water-soluble linear organic polymer. In order to increase the strength of the cured film, alcohol-soluble nylon, polyether of 2,2-bis- (4-hydroxyphenyl) -propane and epichlorohydrin, and the like are also useful.

  In the present invention, among the resins described above, a resin having a monomer unit having a polymerizable group and a monomer unit having an acidic group is preferred. The monomer unit having a polymerizable group is preferably a monomer unit having an ethylenically unsaturated group, and more preferably a monomer unit having an acryloyloxy group or a methacryloyloxy group in the side chain. As the monomer unit having an acidic group, a monomer unit having a sulfonic acid group or a carboxyl group is preferable, and a monomer unit derived from acrylic acid or methacrylic acid is preferable.

The weight average molecular weight of the resin contained in the photosensitive resin composition in the present invention is preferably 5,000 or more, more preferably 10,000 to 300,000, and the number average molecular weight is preferably 2, More than 000, more preferably in the range of 3,000 to 250,000. The polydispersity (weight average molecular weight / number average molecular weight) is preferably 1 or more, and more preferably 1.1 to 10.
These resins may be any of random polymers, block polymers, graft polymers and the like.

The resin in the present invention can be synthesized by a conventionally known method. Solvents used in the synthesis include, for example, tetrahydrofuran, ethylene dichloride, cyclohexanone, methyl ethyl ketone, acetone, methanol, ethanol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyethyl acetate, diethylene glycol dimethyl ether, 1-methoxy. Examples include 2-propanol, 1-methoxy-2-propyl acetate, N, N-dimethylformamide, N, N-dimethylacetamide, toluene, ethyl acetate, methyl lactate, ethyl lactate, dimethyl sulfoxide, and water. These solvents are used alone or in combination of two or more.
Examples of the radical polymerization initiator used when synthesizing the resin in the present invention include known compounds such as an azo initiator and a peroxide initiator.

  Although there is no limitation in particular as content (total content in the case of 2 or more) of resin in the total solid of the photosensitive resin composition of this invention, from the viewpoint of obtaining the effect of this invention more effectively. 5 to 50 wt% is preferable, 10 to 40 wt% is more preferable, and 10 to 35 wt% is particularly preferable.

(D) Photopolymerization initiator The photosensitive resin composition of the present invention contains a photopolymerization initiator.
The photopolymerization initiator is not particularly limited as long as it can photopolymerize the polymerizable compound, but is preferably selected from the viewpoints of characteristics, initiation efficiency, absorption wavelength, availability, cost, and the like.
The photopolymerization initiator that can be used in the present invention is a compound that absorbs actinic radiation (light) and generates a polymerization initiating species. Examples of the active radiation include γ rays, β rays, electron beams, ultraviolet rays, visible rays, and infrared rays.

  Examples of the photopolymerization initiator include at least one active halogen compound selected from a halomethyloxadiazole compound and a halomethyl-s-triazine compound, a 3-aryl-substituted coumarin compound, a lophine dimer, a benzophenone compound, and an acetophenone compound. And derivatives thereof, cyclopentadiene-benzene-iron complex and salts thereof, and oxime compounds.

  Examples of the halomethyloxadiazole compound include 2-halomethyl-5-vinyl-1,3,4-oxadiazole compound described in JP-B-57-6096, 2-trichloromethyl-5-styryl-1, and the like. , 3,4-oxadiazole, 2-trichloromethyl-5- (p-cyanostyryl) -1,3,4-oxadiazole, 2-trichloromethyl-5- (p-methoxystyryl) -1,3 , 4-oxadiazole and the like.

  Examples of the halomethyl-s-triazine compound include a vinyl-halomethyl-s-triazine compound described in JP-B-59-1281 and 2- (naphth-1-yl) -4 described in JP-A-53-133428. , 6-bis-halomethyl-s-triazine compound and 4- (p-aminophenyl) -2,6-di-halomethyl-s-triazine compound.

  Specific examples of the halomethyl-s-triazine compound include 2,4-bis (trichloromethyl) -6-p-methoxystyryl-s-triazine, 2,6-bis (trichloromethyl) -4- (3,4- Methylenedioxyphenyl) -1,3,5-triazine, 2,6-bis (trichloromethyl) -4- (4-methoxyphenyl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- (1-p-dimethylaminophenyl-1,3-butadienyl) -s-triazine, 2-trichloromethyl-4-amino-6-p-methoxystyryl-s-triazine, 2- (naphth-1- Yl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxynaphth-1-yl) -4,6-bis (trichloromethyl) -s-triazine, -(4-Ethoxy-naphth-1-yl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-butoxynaphth-1-yl) -4,6-bis (trichloromethyl) -s -Triazine, 2- [4- (2-methoxyethyl) naphth-1-yl] -4,6-bis (trichloromethyl) -s-triazine,

  2- [4- (2-Ethoxyethyl) naphth-1-yl] -4,6-bis (trichloromethyl) -s-triazine, 2- [4- (2-butoxyethyl) naphth-1-yl]- 4,6-bis (trichloromethyl) -s-triazine, 2- (2-methoxynaphth-1-yl) -4,6-bis (trichloromethyl) -s-triazine, 2- (6-methoxy-5- Methylnaphth-2-yl) -4,6-bis (trichloromethyl) -s-triazine, 2- (6-methoxynaphth-2-yl) -4,6-bis (trichloromethyl) -s-triazine, 2- (5-methoxynaphth-1-yl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4,7-dimethoxynaphth-1-yl) -4,6-bis (trichloromethyl)- s-triazine, 2- 6-Ethoxynaphth-2-yl) -4,6-bis-trichloromethyl-s-triazine, 2- (4,5-dimethoxynaphth-1-yl) -4,6-bis (trichloromethyl) -s- Triazine,

  4- [pN, N-di (ethoxycarbonylmethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [o-methyl-pN, N-di (ethoxycarbonyl) Methyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [pN, N-di (chloroethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine 4- [o-methyl-pN, N-di (chloroethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- (pN-chloroethylaminophenyl) -2 , 6-Di (trichloromethyl) -s-triazine, 4- (p-N-ethoxycarbonylmethylaminophenyl) -2,6-di (trichloromethyl) -s-triazine, 4- [p-N, -Di (phenyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- (pN-chloroethylcarbonylaminophenyl) -2,6-di (trichloromethyl) -s-triazine ,

  4- [pN- (p-methoxyphenyl) carbonylaminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [mN, N-di (ethoxycarbonylmethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [m-bromo-pN, N-di (ethoxycarbonylmethyl) aminophenyl] -2,6-di (trichloromethyl) -s- Triazine, 4- [m-chloro-pN, N-di (ethoxycarbonylmethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [m-fluoro-pN, N-di (ethoxycarbonylmethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [o-bromo-pN, N-di (ethoxycarbonylmethyl) Minophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [o-chloro-pN, N-di (ethoxycarbonylmethyl) aminophenyl] -2,6-di (trichloromethyl)- s-triazine,

  4- [o-fluoro-pN, N-di (ethoxycarbonylmethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [o-bromo-pN, N- Di (chloroethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [o-chloro-pN, N-di (chloroethyl) aminophenyl] -2,6-di (trichloro Methyl) -s-triazine, 4- [o-fluoro-p-N, N-di (chloroethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [m-bromo-p -N, N-di (chloroethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- [m-chloro-pN, N-di (chloroethyl) aminophenyl] -2, 6-di (tri Roromechiru) -s- triazine,

  4- [m-fluoro-pN, N-di (chloroethyl) aminophenyl] -2,6-di (trichloromethyl) -s-triazine, 4- (m-bromo-pN-ethoxycarbonylmethylamino) Phenyl) -2,6-di (trichloromethyl) -s-triazine, 4- (m-chloro-pN-ethoxycarbonylmethylaminophenyl) -2,6-di (trichloromethyl) -s-triazine, 4 -(M-fluoro-pN-ethoxycarbonylmethylaminophenyl) -2,6-di (trichloromethyl) -s-triazine, 4- (o-bromo-pN-ethoxycarbonylmethylaminophenyl) -2 , 6-Di (trichloromethyl) -s-triazine, 4- (o-chloro-pN-ethoxycarbonylmethylaminophenyl) -2,6-di (tri Roromechiru) -s- triazine,

  4- (o-fluoro-pN-ethoxycarbonylmethylaminophenyl) -2,6-di (trichloromethyl) -s-triazine, 4- (m-bromo-pN-chloroethylaminophenyl) -2 , 6-Di (trichloromethyl) -s-triazine, 4- (m-chloro-pN-chloroethylaminophenyl) -2,6-di (trichloromethyl) -s-triazine, 4- (m-fluoro -PN-chloroethylaminophenyl) -2,6-di (trichloromethyl) -s-triazine, 4- (o-bromo-pN-chloroethylaminophenyl) -2,6-di (trichloromethyl) ) -S-triazine, 4- (o-chloro-pN-chloroethylaminophenyl) -2,6-di (trichloromethyl) -s-triazine, 4- (o-fluoro-pN) Chloroethyl aminophenyl) -2,6-di (trichloromethyl) -s-triazine.

  In addition, TAZ series (for example, TAZ-107, TAZ-110, TAZ-104, TAZ-109, TAZ-140, TAZ-204, TAZ-113, TAZ-123) manufactured by Midori Chemical, T manufactured by PANCHIM Series (for example, T-OMS, T-BMP, TR, TB), Irgacure series (for example, Irgacure 651, Irgacure 184, Irgacure 500, Irgacure 1000, Irgacure 149, Ciba Specialty Chemicals) Irgacure 819, Irgacure 261), Darocur series (eg Darocur 1173), 4,4′-bis (diethylamino) benzophenone, 2- (O-benzoyloxime) -1- [4- (phenylthio) phenyl] -1,2 -Octanedione, 1- ( -Acetyloxime) -1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl] ethanone, 2-benzyl-2-dimethylamino-4-morpholinobutyrophenone, 2,2-dimethoxy 2-phenylacetophenone, 2- (o-chlorophenyl) -4,5-diphenylimidazolyl dimer, 2- (o-fluorophenyl) -4,5-diphenylimidazolyl dimer, 2- (o-methoxy) Phenyl) -4,5-diphenylimidazolyl dimer, 2- (p-methoxyphenyl) -4,5-diphenylimidazolyl dimer, 2- (p-dimethoxyphenyl) -4,5-diphenylimidazolyl dimer 2- (2,4-dimethoxyphenyl) -4,5-diphenylimidazolyl dimer, 2- (p-methylmercaptofe Nyl) -4,5-diphenylimidazolyl dimer, benzoin isopropyl ether and the like can also be suitably used.

As the photopolymerization initiator, a compound having no halogen atom is preferable, and an initiator having high sensitivity to i-line is preferable. Examples thereof include lophine dimers and oxime compounds. As the oxime compound (oxime photopolymerization initiator), an oxime ester compound (oxime ester photopolymerization initiator) is more preferable.
Among the oxime photopolymerization initiators, 2- (O-benzoyloxime) -1- [4- (phenylthio) phenyl] -1,2-octanedione, 1- (O-acetyloxime) -1- [9- Ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl] ethanone is preferred.
Further, as the oxime photopolymerization initiator, a compound represented by the following formula (1) (hereinafter also referred to as “specific oxime compound”) is preferable. The specific oxime compound is a mixture of the (E) isomer and the (Z) isomer, regardless of whether the oxime N—O bond is an (E) oxime compound or a (Z) oxime compound. It may be.

（式（１）中、Ｒ及びＢは各々独立に一価の置換基を表し、Ａは二価の有機基を表し、Ａｒはアリール基を表す。）

(In formula (1), R and B each independently represent a monovalent substituent, A represents a divalent organic group, and Ar represents an aryl group.)

The monovalent substituent represented by R is preferably a monovalent nonmetallic atomic group.
Examples of the monovalent nonmetallic atomic group include an alkyl group, an aryl group, an alkenyl group, an alkynyl group, an alkylsulfinyl group, an arylsulfinyl group, an alkylsulfonyl group, an arylsulfonyl group, an acyl group, an alkoxycarbonyl group, and an aryloxycarbonyl group. Phosphinoyl group, heterocyclic group, alkylthiocarbonyl group, arylthiocarbonyl group, dialkylaminocarbonyl group, dialkylaminothiocarbonyl group and the like. Moreover, these groups may have one or more substituents. Moreover, the substituent mentioned above may be further substituted by another substituent.
Examples of the substituent include halogen atoms such as fluorine atom, chlorine atom, bromine atom and iodine atom, alkoxy groups such as methoxy group, ethoxy group and tert-butoxy group, aryloxy groups such as phenoxy group and p-tolyloxy group. , Methoxycarbonyl group, butoxycarbonyl group, alkoxycarbonyl group such as phenoxycarbonyl group or aryloxycarbonyl group, acetoxy group, propionyloxy group, acyloxy group such as benzoyloxy group, acetyl group, benzoyl group, isobutyryl group, acryloyl group, Acyl groups such as methacryloyl group and methoxalyl group, alkylsulfanyl groups such as methylsulfanyl group and tert-butylsulfanyl group, arylsulfanyl groups such as phenylsulfanyl group and p-tolylsulfanyl group, Group, alkylamino group such as cyclohexylamino group, dimethylamino group, diethylamino group, morpholino group, dialkylamino group such as piperidino group, arylamino group such as phenylamino group, p-tolylamino group, methyl group, ethyl group, In addition to alkyl groups such as tert-butyl group and dodecyl group, phenyl groups, p-tolyl groups, xylyl groups, cumenyl groups, naphthyl groups, anthryl groups, phenanthryl groups, etc., hydroxy groups, carboxy groups, formyl groups , Mercapto group, sulfo group, mesyl group, p-toluenesulfonyl group, amino group, nitro group, cyano group, trifluoromethyl group, trichloromethyl group, trimethylsilyl group, phosphono group, trimethylammonium group, dimethylsulfonium group, triphenyl Phenacylphosphonium group And the like.

  As the alkyl group which may have a substituent, an alkyl group having 1 to 30 carbon atoms is preferable, and specifically, a methyl group, an ethyl group, a propyl group, a butyl group, a hexyl group, an octyl group, a decyl group. , Dodecyl group, okdadecyl group, isopropyl group, isobutyl group, sec-butyl group, t-butyl group, 1-ethylpentyl group, cyclopentyl group, cyclohexyl group, trifluoromethyl group, 2-ethylhexyl group, phenacyl group, 1- Naphthoylmethyl group, 2-naphthoylmethyl group, 4-methylsulfanylphenacyl group, 4-phenylsulfanylphenacyl group, 4-dimethylaminophenacyl group, 4-cyanophenacyl group, 4-methylphenacyl group, 2- Methylphenacyl group, 3-fluorophenacyl group, 3-trifluoromethylphenacyl group, and , 3 Nitorofenashiru group can be exemplified.

  The aryl group which may have a substituent is preferably an aryl group having 6 to 30 carbon atoms, specifically, a phenyl group, a biphenyl group, a 1-naphthyl group, a 2-naphthyl group, or a 9-anthryl group. 9-phenanthryl group, 1-pyrenyl group, 5-naphthacenyl group, 1-indenyl group, 2-azurenyl group, 9-fluorenyl group, terphenyl group, quarterphenyl group, o-, m- and p-tolyl group, Xylyl group, o-, m- and p-cumenyl group, mesityl group, pentarenyl group, binaphthalenyl group, tarnaphthalenyl group, quarternaphthalenyl group, heptalenyl group, biphenylenyl group, indacenyl group, fluoranthenyl group, acenaphthylenyl group, ASEAN Trirenyl group, phenalenyl group, fluorenyl group, anthryl group, bianthracenyl group, ter Nthracenyl group, quarteranthracenyl group, anthraquinolyl group, phenanthryl group, triphenylenyl group, pyrenyl group, chrysenyl group, naphthacenyl group, preadenyl group, picenyl group, perylenyl group, pentaphenyl group, pentacenyl group, tetraphenylenyl group, Examples include a hexaphenyl group, a hexacenyl group, a rubicenyl group, a coronenyl group, a trinaphthylenyl group, a heptaphenyl group, a heptacenyl group, a pyranthrenyl group, and an ovalenyl group.

  The alkenyl group which may have a substituent is preferably an alkenyl group having 2 to 10 carbon atoms, and specific examples include a vinyl group, an allyl group, and a styryl group.

  The alkynyl group which may have a substituent is preferably an alkynyl group having 2 to 10 carbon atoms, and specific examples include an ethynyl group, a propynyl group, and a propargyl group.

  The alkylsulfinyl group which may have a substituent is preferably an alkylsulfinyl group having 1 to 20 carbon atoms, and specifically includes a methylsulfinyl group, an ethylsulfinyl group, a propylsulfinyl group, an isopropylsulfinyl group, and a butylsulfinyl group. Group, hexylsulfinyl group, cyclohexylsulfinyl group, octylsulfinyl group, 2-ethylhexylsulfinyl group, decanoylsulfinyl group, dodecanoylsulfinyl group, octadecanoylsulfinyl group, cyanomethylsulfinyl group, and methoxymethylsulfinyl group. .

  The arylsulfinyl group which may have a substituent is preferably an arylsulfinyl group having 6 to 30 carbon atoms, and specifically includes a phenylsulfinyl group, 1-naphthylsulfinyl group, 2-naphthylsulfinyl group, 2- Chlorophenylsulfinyl group, 2-methylphenylsulfinyl group, 2-methoxyphenylsulfinyl group, 2-butoxyphenylsulfinyl group, 3-chlorophenylsulfinyl group, 3-trifluoromethylphenylsulfinyl group, 3-cyanophenylsulfinyl group, 3-nitro Phenylsulfinyl group, 4-fluorophenylsulfinyl group, 4-cyanophenylsulfinyl group, 4-methoxyphenylsulfinyl group, 4-methylsulfanylphenylsulfinyl group, 4-phenylsulfanylphenol Rusurufiniru group, and a 4-dimethylaminophenyl sulfinyl group can be exemplified.

  The alkylsulfonyl group which may have a substituent is preferably an alkylsulfonyl group having 1 to 20 carbon atoms, and specifically includes a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, an isopropylsulfonyl group, a butylsulfonyl group. Group, hexylsulfonyl group, cyclohexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, decanoylsulfonyl group, dodecanoylsulfonyl group, octadecanoylsulfonyl group, cyanomethylsulfonyl group, methoxymethylsulfonyl group, and perfluoro An alkylsulfonyl group can be illustrated.

  The arylsulfonyl group which may have a substituent is preferably an arylsulfonyl group having 6 to 30 carbon atoms, and specifically includes a phenylsulfonyl group, a 1-naphthylsulfonyl group, a 2-naphthylsulfonyl group, 2- Chlorophenylsulfonyl group, 2-methylphenylsulfonyl group, 2-methoxyphenylsulfonyl group, 2-butoxyphenylsulfonyl group, 3-chlorophenylsulfonyl group, 3-trifluoromethylphenylsulfonyl group, 3-cyanophenylsulfonyl group, 3-nitro Phenylsulfonyl group, 4-fluorophenylsulfonyl group, 4-cyanophenylsulfonyl group, 4-methoxyphenylsulfonyl group, 4-methylsulfanylphenylsulfonyl group, 4-phenylsulfanylphenylsulfonyl group, and 4-dimethyl Aminophenyl sulfonyl group can be exemplified.

  The acyl group which may have a substituent is preferably an acyl group having 2 to 20 carbon atoms, specifically, an acetyl group, a propanoyl group, a butanoyl group, a trifluoroacetyl group, a pentanoyl group, a benzoyl group, 1-naphthoyl group, 2-naphthoyl group, 4-methylsulfanylbenzoyl group, 4-phenylsulfanylbenzoyl group, 4-dimethylaminobenzoyl group, 4-diethylaminobenzoyl group, 2-chlorobenzoyl group, 2-methylbenzoyl group, 2 -Methoxybenzoyl group, 2-butoxybenzoyl group, 3-chlorobenzoyl group, 3-trifluoromethylbenzoyl group, 3-cyanobenzoyl group, 3-nitrobenzoyl group, 4-fluorobenzoyl group, 4-cyanobenzoyl group, and And 4-methoxybenzoyl group.

  The alkoxycarbonyl group which may have a substituent is preferably an alkoxycarbonyl group having 2 to 20 carbon atoms, specifically, a methoxycarbonyl group, an ethoxycarbonyl group, a propoxycarbonyl group, a butoxycarbonyl group, or a hexyloxy group. Examples thereof include a carbonyl group, an octyloxycarbonyl group, a decyloxycarbonyl group, an octadecyloxycarbonyl group, and a trifluoromethyloxycarbonyl group.

  Specific examples of the aryloxycarbonyl group which may have a substituent include phenoxycarbonyl group, 1-naphthyloxycarbonyl group, 2-naphthyloxycarbonyl group, 4-methylsulfanylphenyloxycarbonyl group, 4-phenylsulfanyl. Phenyloxycarbonyl group, 4-dimethylaminophenyloxycarbonyl group, 4-diethylaminophenyloxycarbonyl group, 2-chlorophenyloxycarbonyl group, 2-methylphenyloxycarbonyl group, 2-methoxyphenyloxycarbonyl group, 2-butoxyphenyloxy Carbonyl group, 3-chlorophenyloxycarbonyl group, 3-trifluoromethylphenyloxycarbonyl group, 3-cyanophenyloxycarbonyl group, 3-nitrophenyloxycarbonyl , 4-fluorophenyl oxycarbonyl group, 4-cyanophenyl oxycarbonyl group, and a 4-methoxy phenyloxy carbonyl group can be exemplified.

  The phosphinoyl group which may have a substituent is preferably a phosphinoyl group having 2 to 50 carbon atoms, specifically, a dimethylphosphinoyl group, a diethylphosphinoyl group, a dipropylphosphinoyl group, or diphenyl. Examples include phosphinoyl group, dimethoxyphosphinoyl group, diethoxyphosphinoyl group, dibenzoylphosphinoyl group, and bis (2,4,6-trimethylphenyl) phosphinoyl group.

The heterocyclic group which may have a substituent is preferably an aromatic or aliphatic heterocyclic ring containing a nitrogen atom, an oxygen atom, a sulfur atom or a phosphorus atom.
Specifically, thienyl group, benzo [b] thienyl group, naphtho [2,3-b] thienyl group, thiantenyl group, furyl group, pyranyl group, isobenzofuranyl group, chromenyl group, xanthenyl group, phenoxathiyl Nyl group, 2H-pyrrolyl group, pyrrolyl group, imidazolyl group, pyrazolyl group, pyridyl group, pyrazinyl group, pyrimidinyl group, pyridazinyl group, indolizinyl group, isoindolyl group, 3H-indolyl group, indolyl group, 1H-indazolyl group, purinyl group 4H-quinolidinyl group, isoquinolyl group, quinolyl group, phthalazinyl group, naphthyridinyl group, quinoxanilyl group, quinazolinyl group, cinnolinyl group, pteridinyl group, 4aH-carbazolyl group, carbazolyl group, β-carbolinyl group, phenanthridinyl group, acridinyl group Group Midinyl group, phenanthrolinyl group, phenazinyl group, phenalsadinyl group, isothiazolyl group, phenothiazinyl group, isoxazolyl group, furazanyl group, phenoxazinyl group, isochromanyl group, chromanyl group, pyrrolidinyl group, pyrrolinyl group, imidazolidinyl group, imidazolinyl group, pyrazolidinyl group, pyrazolidinyl group Examples include a group, pyrazolinyl group, piperidyl group, piperazinyl group, indolinyl group, isoindolinyl group, quinuclidinyl group, morpholinyl group, and thioxanthryl group.

  Specific examples of the alkylthiocarbonyl group which may have a substituent include a methylthiocarbonyl group, a propylthiocarbonyl group, a butylthiocarbonyl group, a hexylthiocarbonyl group, an octylthiocarbonyl group, a decylthiocarbonyl group, and an octadecylthiocarbonyl group. Examples thereof include a group and a trifluoromethylthiocarbonyl group.

  Specific examples of the arylthiocarbonyl group which may have a substituent include a 1-naphthylthiocarbonyl group, a 2-naphthylthiocarbonyl group, a 4-methylsulfanylphenylthiocarbonyl group, and a 4-phenylsulfanylphenylthiocarbonyl group. 4-dimethylaminophenylthiocarbonyl group, 4-diethylaminophenylthiocarbonyl group, 2-chlorophenylthiocarbonyl group, 2-methylphenylthiocarbonyl group, 2-methoxyphenylthiocarbonyl group, 2-butoxyphenylthiocarbonyl group, 3 -Chlorophenylthiocarbonyl group, 3-trifluoromethylphenylthiocarbonyl group, 3-cyanophenylthiocarbonyl group, 3-nitrophenylthiocarbonyl group, 4-fluorophenylthiocarbonyl group, 4-cyanophenyl Two thiocarbonyl group, and a and a 4-methoxyphenylthiocarbonyl group.

  Specific examples of the dialkylaminocarbonyl group include a dimethylaminocarbonyl group, a dimethylaminocarbonyl group, a dipropylaminocarbonyl group, and a dibutylaminocarbonyl group.

  Examples of the dialkylaminothiocarbonyl group which may have a substituent include a dimethylaminothiocarbonyl group, a dipropylaminothiocarbonyl group, and a dibutylaminothiocarbonyl group.

  Among these, from the viewpoint of increasing sensitivity, as R, an acyl group is more preferable, and specifically, an acetyl group, a propanoyl group, a benzoyl group, and a toluoyl group are more preferable.

The monovalent substituent represented by B represents an aryl group, a heterocyclic group, an arylcarbonyl group, or a heterocyclic carbonyl group. These groups may have one or more substituents. Examples of the substituent include the above-described substituents. Moreover, the substituent mentioned above may be further substituted by another substituent.
Among them, the structure shown below is particularly preferable.
In the following structure, Y, X, and n have the same meanings as Y, X, and n in formula (2) described later, and preferred examples are also the same.

Examples of the divalent organic group represented by A include an alkylene group having 1 to 12 carbon atoms, a cyclohexylene group, and an alkynylene group. These groups may have one or more substituents. Examples of the substituent include the above-described substituents. Moreover, the substituent mentioned above may be further substituted by another substituent.
Among them, A is an alkylene substituted with an unsubstituted alkylene group or an alkyl group (for example, a methyl group, an ethyl group, a tert-butyl group, or a dodecyl group) from the viewpoint of increasing sensitivity and suppressing coloration due to heating. Group, alkylene group substituted with alkenyl group (for example, vinyl group, allyl group), aryl group (for example, phenyl group, p-tolyl group, xylyl group, cumenyl group, naphthyl group, anthryl group, phenanthryl group, styryl group) An alkylene group substituted with

The aryl group represented by Ar is preferably an aryl group having 6 to 30 carbon atoms and may have a substituent. Examples of the substituent include the above-described substituents.
Specifically, phenyl group, biphenyl group, 1-naphthyl group, 2-naphthyl group, 9-anthryl group, 9-phenanthryl group, 1-pyrenyl group, 5-naphthacenyl group, 1-indenyl group, 2-azurenyl group 9-fluorenyl group, terphenyl group, quarterphenyl group, o-, m- and p-tolyl group, xylyl group, o-, m- and p-cumenyl group, mesityl group, pentarenyl group, binaphthalenyl group, turnaphthalenyl group , Quarternaphthalenyl group, heptalenyl group, biphenylenyl group, indacenyl group, fluoranthenyl group, acenaphthylenyl group, aceanthrylenyl group, phenalenyl group, fluorenyl group, anthryl group, bianthracenyl group, teranthracenyl group, quarteranthracene Nyl group, anthraquinolyl group, phenanthryl group Triphenylenyl group, pyrenyl group, chrycenyl group, naphthacenyl group, pleiadenyl group, picenyl group, perylenyl group, pentaphenyl group, pentaphenyl group, tetraphenylenyl group, hexaphenyl group, hexacenyl group, rubicenyl group, coronenyl group, trinaphthylenyl group , A heptaphenyl group, a heptacenyl group, a pyrantrenyl group, and an oberenyl group.
Of these, a substituted or unsubstituted phenyl group is preferable from the viewpoint of increasing sensitivity and suppressing coloring due to heating.

  In the formula (1), it is preferable in terms of sensitivity that the structure of “SAr” formed by Ar and adjacent S is the following structure. Me represents a methyl group, and Et represents an ethyl group.

  The specific oxime compound in the present invention is preferably a compound represented by the following formula (2).

（式（２）中、Ｒ及びＸは各々独立に一価の置換基を表し、Ａ及びＹは各々独立に二価の有機基を表し、Ａｒはアリール基を表し、ｎは０〜５の整数である。）

(In formula (2), R and X each independently represent a monovalent substituent, A and Y each independently represent a divalent organic group, Ar represents an aryl group, and n represents 0-5. (It is an integer.)

  R, A, and Ar in formula (2) have the same meanings as R, A, and Ar in formula (1), and preferred examples are also the same.

  Examples of the monovalent substituent represented by X include an alkyl group, an aryl group, an alkenyl group, an alkynyl group, an alkoxy group, an aryloxy group, an acyloxy group, an alkylsulfanyl group, an arylsulfanyl group, an alkylsulfinyl group, and an arylsulfinyl group. Group, alkylsulfonyl group, arylsulfonyl group, acyl group, alkoxycarbonyl group, carbamoyl group, sulfamoyl group, amino group, phosphinoyl group, heterocyclic group and halogen atom. These groups may have one or more substituents. Examples of the substituent include the above-described substituents. Moreover, the substituent mentioned above may be further substituted by another substituent.

  The alkyl group, aryl group, alkenyl group, alkynyl group, alkylsulfinyl group, arylsulfinyl group, alkylsulfonyl group, arylsulfonyl group, acyl group, alkoxycarbonyl group, aryloxycarbonyl group, phosphinoyl group, and heterocyclic ring in X The group is an alkyl group, an aryl group, an alkenyl group, an alkynyl group, an alkylsulfinyl group, an arylsulfinyl group, an alkylsulfonyl group, an arylsulfonyl group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group of R in the formula (1). , Phosphinoyl group and heterocyclic group, and the preferred range is also the same.

  The alkoxy group is preferably an alkoxy group having 1 to 30 carbon atoms, specifically, a methoxy group, an ethoxy group, a propyloxy group, an isopropyloxy group, a butoxy group, an isobutoxy group, a sec-butoxy group, or a tert-butoxy group. Pentyloxy, isopentyloxy, hexyloxy, heptyloxy, octyloxy, 2-ethylhexyloxy, decyloxy, dodecyloxy, octadecyloxy, ethoxycarbonylmethyl, 2-ethylhexyloxycarbonylmethyl Oxy group, aminocarbonylmethyloxy group, N, N-dibutylaminocarbonylmethyloxy group, N-methylaminocarbonylmethyloxy group, N-ethylaminocarbonylmethyloxy group, N-octylaminocarbonylmethyloxy group Group, N- methyl -N- benzylaminocarbonyl methyl group, a benzyl group, and a cyano methyl group can be exemplified.

  The aryloxy group is preferably an aryloxy group having 6 to 30 carbon atoms, and specifically includes a phenyloxy group, a 1-naphthyloxy group, a 2-naphthyloxy group, a 2-chlorophenyloxy group, and 2-methylphenyloxy. Group, 2-methoxyphenyloxy group, 2-butoxyphenyloxy group, 3-chlorophenyloxy group, 3-trifluoromethylphenyloxy group, 3-cyanophenyloxy group, 3-nitrophenyloxy group, 4-fluorophenyloxy Group, 4-cyanophenyloxy group, 4-methoxyphenyloxy group, 4-dimethylaminophenyloxy group, 4-methylsulfanylphenyloxy group, and 4-phenylsulfanylphenyloxy group.

  As the acyloxy group, an acyloxy group having 2 to 20 carbon atoms is preferable. Specifically, an acetyloxy group, a propanoyloxy group, a butanoyloxy group, a pentanoyloxy group, a trifluoromethylcarbonyloxy group, a benzoyloxy group , 1-naphthylcarbonyloxy group, and 2-naphthylcarbonyloxy group.

  As the alkylsulfanyl group, an alkylsulfanyl group having 1 to 20 carbon atoms is preferable. Specifically, a methylsulfanyl group, an ethylsulfanyl group, a propylsulfanyl group, an isopropylsulfanyl group, a butylsulfanyl group, a hexylsulfanyl group, a cyclohexylsulfanyl group. Octylsulfanyl group, 2-ethylhexylsulfanyl group, decanoylsulfanyl group, dodecanoylsulfanyl group, octadecanoylsulfanyl group, cyanomethylsulfanyl group, and methoxymethylsulfanyl group.

  The arylsulfanyl group is preferably an arylsulfanyl group having 6 to 30 carbon atoms, and specifically includes a phenylsulfanyl group, a 1-naphthylsulfanyl group, a 2-naphthylsulfanyl group, a 2-chlorophenylsulfanyl group, and 2-methylphenylsulfanyl. Group, 2-methoxyphenylsulfanyl group, 2-butoxyphenylsulfanyl group, 3-chlorophenylsulfanyl group, 3-trifluoromethylphenylsulfanyl group, 3-cyanophenylsulfanyl group, 3-nitrophenylsulfanyl group, 4-fluorophenylsulfanyl group A group, 4-cyanophenylsulfanyl group, 4-methoxyphenylsulfanyl group, 4-methylsulfanylphenylsulfanyl group, 4-phenylsulfanylphenylsulfanyl group, and 4-dimethylamino-phenylsulfanyl group can be exemplified.

  The carbamoyl group is preferably a carbamoyl group having 1 to 30 carbon atoms, specifically, an N-methylcarbamoyl group, an N-ethylcarbamoyl group, an N-propylcarbamoyl group, an N-butylcarbamoyl group, or an N-hexylcarbamoyl group. Group, N-cyclohexylcarbamoyl group, N-octylcarbamoyl group, N-decylcarbamoyl group, N-octadecylcarbamoyl group, N-phenylcarbamoyl group, N-2-methylphenylcarbamoyl group, N-2-chlorophenylcarbamoyl group, N 2-isopropoxyphenylcarbamoyl group, N-2- (2-ethylhexyl) phenylcarbamoyl group, N-3-chlorophenylcarbamoyl group, N-3-nitrophenylcarbamoyl group, N-3-cyanophenylcarbamoyl group, N- 4-metoki Phenylcarbamoyl group, N-4-cyanophenylcarbamoyl group, N-4-methylsulfanylphenylcarbamoyl group, N-4-phenylsulfanylphenylcarbamoyl group, N-methyl-N-phenylcarbamoyl group, N, N-dimethylcarbamoyl group N, N-dibutylcarbamoyl group, N, N-diphenylcarbamoyl group.

  As the sulfamoyl group, a sulfamoyl group having 0 to 30 carbon atoms is preferable, and specifically, a sulfamoyl group, an N-alkylsulfamoyl group, an N-arylsulfamoyl group, an N, N-dialkylsulfamoyl group. , N, N-diarylsulfamoyl group and N-alkyl-N-arylsulfamoyl group. More specifically, N-methylsulfamoyl group, N-ethylsulfamoyl group, N-propylsulfamoyl group, N-butylsulfamoyl group, N-hexylsulfamoyl group, N-cyclohexylsulfur group. Famoyl group, N-octylsulfamoyl group, N-2-ethylhexylsulfamoyl group, N-decylsulfamoyl group, N-octadecylsulfamoyl group, N-phenylsulfamoyl group, N-2- Methylphenylsulfamoyl group, N-2-chlorophenylsulfamoyl group, N-2-methoxyphenylsulfamoyl group, N-2-isopropoxyphenylsulfamoyl group, N-3-chlorophenylsulfamoyl group, N-3-nitrophenylsulfamoyl group, N-3-cyanophenylsulfamoyl group, N-4-methoxyphenyl Nylsulfamoyl group, N-4-cyanophenylsulfamoyl group, N-4-dimethylaminophenylsulfamoyl group, N-4-methylsulfanylphenylsulfamoyl group, N-4-phenylsulfanylphenylsulfamoyl Preferred examples include a group, N-methyl-N-phenylsulfamoyl group, N, N-dimethylsulfamoyl group, N, N-dibutylsulfamoyl group, and N, N-diphenylsulfamoyl group.

The amino group is preferably an amino group having 0 to 50 carbon atoms, and specifically includes an amino group (—NH ₂ ), an N-alkylamino group, an N-arylamino group, an N-acylamino group, and an N-sulfonyl group. Examples include an amino group, an N, N-dialkylamino group, an N, N-diarylamino group, an N-alkyl-N-arylamino group, and an N, N-disulfonylamino group. More specifically, N-methylamino group, N-ethylamino group, N-propylamino group, N-isopropylamino group, N-butylamino group, N-tert-butylamino group, N-hexylamino group, N-cyclohexylamino group, N-octylamino group, N-2-ethylhexylamino group, N-decylamino group, N-octadecylamino group, N-benzylamino group, N-phenylamino group, N-2-methylphenylamino Group, N-2-chlorophenylamino group, N-2-methoxyphenylamino group, N-2-isopropoxyphenylamino group, N-2- (2-ethylhexyl) phenylamino group, N-3-chlorophenylamino group, N-3-nitrophenylamino group, N-3-cyanophenylamino group, N-3-trifluoromethylphenyla Group, N-4-methoxyphenylamino group, N-4-cyanophenylamino group, N-4-trifluoromethylphenylamino group, N-4-methylsulfanylphenylamino group, N-4-phenylsulfanylphenylamino Group, N-4-dimethylaminophenylamino group, N-methyl-N-phenylamino group, N, N-dimethylamino group, N, N-diethylamino group, N, N-dibutylamino group, N, N-diphenyl Amino group, N, N-diacetylamino group, N, N-dibenzoylamino group, N, N- (dibutylcarbonyl) amino group, N, N- (dimethylsulfonyl) amino group, N, N- (diethylsulfonyl) An amino group, an N, N- (dibutylsulfonyl) amino group, an N, N- (diphenylsulfonyl) amino group, a morpholino group, and 3,5-dimethyl-morpholino group, a carbazole group can be preferably exemplified.

  Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

Among these, X is an alkyl group, an aryl group, an alkenyl group, an alkynyl group, an alkoxy group, an aryloxy group, an alkylsulfanyl group, an arylsulfanyl group, from the viewpoint of improving solvent solubility and absorption efficiency in the long wavelength region, An amino group is preferred.
Moreover, n in Formula (2) represents the integer of 0-5, and the integer of 0-2 is preferable.

  Examples of the divalent organic group represented by Y include the structures shown below. In the groups shown below, “*” represents a bonding position between Y and an adjacent carbon atom in the formula (2).

  Among these, from the viewpoint of increasing sensitivity, the following structures are preferable.

  The specific oxime compound in the present invention is preferably a compound represented by the following formula (3).

（式（３）中、Ｒ及びＸは各々独立に一価の置換基を表し、Ａは二価の有機基を表し、Ａｒはアリール基を表し、ｎは０〜５の整数である。）

(In formula (3), R and X each independently represent a monovalent substituent, A represents a divalent organic group, Ar represents an aryl group, and n is an integer of 0 to 5.)

  R, X, A, Ar, and n in Formula (3) have the same meanings as R, X, A, Ar, and n in Formula (2), respectively, and preferred examples are also the same.

  Specific examples (K-1) to (K-88) of the specific oxime compound in the present invention are shown below, but the present invention is not limited thereto.

  The specific oxime compound in the present invention has a maximum absorption wavelength in a wavelength region of 350 nm to 500 nm, preferably has an absorption wavelength in a wavelength region of 360 nm to 480 nm, and has high absorbance at 365 nm and 455 nm. Is particularly preferred. In particular, since the specific oxime compound has an absorption in a long wavelength region as compared with a conventional oxime compound, it exhibits excellent sensitivity when exposed to a light source of 365 nm or 405 nm.

The specific oxime compound in the present invention preferably has a molar extinction coefficient at 365 nm or 405 nm of 10,000 to 300,000, more preferably 15,000 to 300,000, from the viewpoint of sensitivity. 000 to 200,000 is particularly preferable.
In the present invention, a known method can be used for the molar extinction coefficient of the compound. Specifically, for example, in an ultraviolet-visible spectrophotometer (Vary Inc., Carry-5 spectrophotometer), an ethyl acetate solvent is used. Is preferably measured at a concentration of 0.01 g / L.

  Although the specific oxime compound in this invention is compoundable by the method shown below, for example, it is not limited to this method.

Moreover, the photosensitive resin composition of this invention can use a sensitizer and a light stabilizer together.
Specific examples thereof include benzoin, benzoin methyl ether, 9-fluorenone, 2-chloro-9-fluorenone, 2-methyl-9-fluorenone, 9-anthrone, 2-bromo-9-anthrone, and 2-ethyl-9-anthrone. 9,10-anthraquinone, 2-ethyl-9,10-anthraquinone, 2-t-butyl-9,10-anthraquinone, 2,6-dichloro-9,10-anthraquinone, xanthone, 2-methylxanthone, 2- Methoxyxanthone, 2-ethoxyxanthone, thioxanthone, 2,4-diethylthioxanthone, acridone, 10-butyl-2-chloroacridone, benzyl, dibenzylacetone, p- (dimethylamino) phenylstyryl ketone, p- (dimethylamino) ) Phenyl-p-methylstyryl ketone Examples include benzophenone, p- (dimethylamino) benzophenone (or Michler's ketone), p- (diethylamino) benzophenone, benzoanthrone, benzothiazole compounds described in Japanese Patent Publication No. 51-48516, and tinuvin 1130, 400. .

In addition to the above-mentioned photopolymerization initiator, other known initiators can be used for the photosensitive resin composition of the present invention.
Specifically, the vicinal polykettle aldonyl compound disclosed in US Pat. No. 2,367,660, disclosed in US Pat. Nos. 2,367,661 and 2,367,670. Substituted α-carbonyl compounds, acyloin ethers disclosed in US Pat. No. 2,448,828, α-hydrocarbons disclosed in US Pat. No. 2,722,512 Aromatic acyloin compounds, polynuclear quinone compounds disclosed in US Pat. Nos. 3,046,127 and 2,951,758, disclosed in US Pat. No. 3,549,367. Triarylimidazole dimer / p-aminophenyl ketone combination, benzothiazole compound / trihalome disclosed in Japanese Patent Publication No. 51-48516 Examples thereof include a teal-s-triazine compound.

The photosensitive resin composition of this invention may contain only 1 type of photoinitiators, or may contain 2 or more types.
From the viewpoint of more effectively obtaining the effects of the present invention, the content of the photopolymerization initiator in the total solid content of the photosensitive resin composition of the present invention (the total content in the case of two or more) is 1 to 30% by weight is preferable, 2 to 25% by weight is more preferable, and 3 to 20% by weight is particularly preferable.

(E) Organic solvent The photosensitive resin composition of the present invention contains an organic solvent. An organic solvent can also be used individually by 1 type, and may be used in combination of 2 or more type.
The organic solvent used in the present invention is not particularly limited as long as the solubility of each component of (A) to (D) and (F) and the coating characteristics of the photosensitive resin composition are satisfied, but in particular (A) titanium black It is preferable to select in consideration of the dispersibility of (C), the solubility of the resin, the coatability, and the safety.

  Usable solvents include esters such as ethyl acetate, n-butyl acetate, isobutyl acetate, amyl formate, isoamyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, alkyl esters, Methyl lactate, ethyl lactate, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate, etc .;

  3-oxypropionic acid alkyl esters such as methyl 3-oxypropionate and ethyl 3-oxypropionate, such as methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, 3-ethoxy Ethyl propionate, etc .; 2-oxypropionic acid alkyl esters such as methyl 2-oxypropionate, ethyl 2-oxypropionate, propyl 2-oxypropionate, such as methyl 2-methoxypropionate, 2-methoxypropion Acid ethyl, propyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, methyl 2-oxy-2-methylpropionate, ethyl 2-oxy-2-methylpropionate, 2-methoxy- 2-methylpropio Methyl acid, 2-ethoxy-2-methylpropionic acid ethyl, etc; methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, methyl 2-oxobutanoate, ethyl 2-oxobutanoate, etc .;

  Ethers such as diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve acetate, ethyl cellosolve acetate, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monomethyl Ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, etc .;

Ketones such as methyl ethyl ketone, cyclohexanone, 2-heptanone, and 3-heptanone are preferred; aromatic hydrocarbons such as toluene and xylene are preferred.
The photosensitive resin composition of the present invention can further contain other organic solvents.

(F) Copolymer of an ethylenically unsaturated compound having a fluoroalkyl group containing 9 or more fluorine atoms and an ethylenically unsaturated compound having a carboxyl group The photosensitive resin composition of the present invention has 9 or more A copolymer of an ethylenically unsaturated compound having a fluoroalkyl group containing a fluorine atom and an ethylenically unsaturated compound having a carboxyl group (hereinafter also referred to as “specific copolymer”).
Conventionally, a photosensitive resin composition is often applied on an inorganic film or an organic film, but the structure of the object to be applied is complicated and applied to a substrate having a step (for example, an organic film and a metal film are mixed). Application to the underlying substrate) may be required. In such a case, it is necessary to increase the amount of the surfactant in order to improve the coating uniformity. However, when the amount of the surfactant is increased, there is a problem that a residue is generated in the development process.
The photosensitive resin composition of the present invention has excellent coating uniformity due to the surface-active effect derived from the specific copolymer. In particular, since an ethylenically unsaturated compound having a fluoroalkyl group containing 9 or more fluorine atoms is used as a copolymerization component, a surface active effect is exhibited.
On the other hand, an ethylenically unsaturated compound having a carboxyl group increases alkali developability and suppresses the generation of residues.

  The ethylenically unsaturated compound having a fluoroalkyl group containing 9 or more fluorine atoms, which is one of the copolymer components of the specific copolymer, is preferably a compound represented by the following formula (1). .

In the formula (1), Rf is a group containing a fluoroalkyl group or a perfluoroalkyl group containing 9 or more fluorine atoms, n represents 1 or 2, and R ¹ represents a hydrogen atom or a methyl group. To express.
Specific examples of the compound represented by the formula (1) include the following fluoroalkyl (meth) acrylates.
CH ₂ = CRCO ₂ (CH ₂ ) _m C _n F _{2n + 1}
(M represents 1 or 2, n represents an integer of 4 to 12, and R represents a hydrogen atom or a methyl group.)
CH ₂ = CRCO ₂ (CH ₂ ) _m (CF ₂ ) _n H
(M represents 1 or 2, n represents an integer of 4 to 12. R represents a hydrogen atom or a methyl group.)

Here, in the fluoroalkyl group or the perfluoroalkyl group containing 9 or more fluorine atoms represented by Rf, the fluorine atom concentration distribution in the film thickness direction can be obtained by using the fluorine atom number of 9 or more. As the concentration distribution, a phenomenon occurs in which the fluorine concentration in the vicinity of the coating film surface is high and the fluorine concentration decreases in the depth direction of the coating film. Among these, those having 9 to 30 fluorine atoms per monomer unit are particularly preferable, and 13 to 25 are more preferable. Within this range, the effect of orienting the specific copolymer on the surface is exhibited well, and excellent coating uniformity can be obtained. When the number of fluorine atoms contained in one unit is too large, coating uniformity based on fluorine atoms may be reduced.
In addition, the fluorine atom content contained in the specific copolymer is preferably 5 to 30 mmol / g, and preferably 8 to 25 mmol / g from the viewpoint of balance between reduction of residue by the specific copolymer and coating uniformity. The thing of the range of is more preferable. In addition, even when there are too many fluorine atoms contained in a specific copolymer, the adhesiveness based on the oil repellency of a fluorine atom may be reduced.

  The ethylenically unsaturated compound having a carboxyl group, which is one copolymer component, is preferably a compound represented by the following formula (2).

In formula (2), R ²¹ represents a hydrogen atom or a methyl group, R ²² represents an (n + 1) -valent linking group having an aliphatic cyclic structure having 3 to 30 carbon atoms, and A represents an oxygen atom or —NR ²³ -represents, R ²³ represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms, and n represents an integer of 1 to 4.
R ²¹ in Formula (2) represents a hydrogen atom or a methyl group, and a methyl group is particularly preferable.
As the aliphatic cyclic structure represented by R ²² in the formula (2), one or more optionally substituted cyclopropane, cyclopentane, cyclohexane, cycloheptane, cyclooctane, cyclodecane, dicyclohexyl, tercyclohexyl, Norbornane, decahydronaphthalene, perhydrofluorene, tricyclo [5.2.1.0 ^2.6 ] decane, adamantane, quadricyclane, congressant, cubane, spiro [4.4] octane, cyclopentene, cyclohexene, cycloheptene, cyclooctene, Cyclodecene, bicyclo [2.2.2] oct-2-ene, cyclohexadiene, cycloheptadiene, cyclooctadiene, cycloheptatriene, cyclodecatriene, cyclooctatetraene, norbol Mention of aliphatic cyclic structures such as len, octahydronaphthalene, bicyclo [2.2.1] heptadiene, bicyclo [4.3.0] nonadiene, dicyclopentadiene, hexahydroanthracene, spiro [4.5] decadiene Can do. R ²² preferably has 3 to 30 carbon atoms including a substituent.

  n represents an integer of 1 to 4, preferably 1 to 3, more preferably 1 or 2, and still more preferably 1.

Among the compounds represented by the formula (2), the aliphatic cyclic structure represented by R ²² and the carboxyl group bonded thereto characterize the reduction of residues during development of the photosensitive resin composition containing the specific copolymer. Yes. That is, since the hydrophilic carboxyl group is sterically protected by the aliphatic cyclic structure, alkali developability can be improved and residues during development can be reduced. Since the aliphatic cyclic structure has a three-dimensional structure as compared with the aromatic cyclic structure, the distance between the carboxyl group and the ring structure is closer and is considered to be effective.

Examples of the substituent that can be introduced into the (n + 1) -valent hydrocarbon group having an aliphatic cyclic structure represented by R ²² include a monovalent nonmetallic atomic group excluding hydrogen, and a halogen atom (—F , -Br, -Cl, -I), hydroxyl group, alkoxy group, aryloxy group, amino group, N-alkylamino group, N, N-dialkylamino group, N-arylamino group, N, N-diarylamino group N-alkyl-N-arylamino group, acyloxy group, carbamoyloxy group, N-alkylcarbamoyloxy group, N-arylcarbamoyloxy group, N, N-dialkylcarbamoyloxy group, N, N-diarylcarbamoyloxy group, N-alkyl-N-arylcarbamoyloxy group, alkylsulfoxy group, arylsulfoxy group, acylthio group, Arylamino group, N- alkylacylamino group, N- arylacylamino group, an aryl group, an alkyl group, an alkenyl group, an alkynyl group and the like.
Hydrophobic substituents such as halogen atoms, hydrocarbon groups (alkyl groups, aryl groups, alkenyl groups, alkynyl groups), alkoxy groups, aryloxy groups and the like are more preferable because they tend to improve coating uniformity. If possible, these substituents may be bonded to each other or with a substituted hydrocarbon group to form a ring, and the substituent may be further substituted.

When A in Formula (2) is —NR ²³ —, R ²³ represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms. Examples of the monovalent hydrocarbon group having 1 to 10 carbon atoms represented by R ²³ include an alkyl group, an aryl group, an alkenyl group, and an alkynyl group.
Specific examples of the alkyl group include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, isopropyl group, isobutyl group, sec-butyl group, 1 carbon number such as tert-butyl group, isopentyl group, neopentyl group, 1-methylbutyl group, isohexyl group, 2-ethylhexyl group, 2-methylhexyl group, cyclopentyl group, cyclohexyl group, 1-adamantyl group, 2-norbornyl group Up to 10 linear, branched or cyclic alkyl groups.
Specific examples of the aryl group include carbon having one heteroatom selected from the group consisting of an aryl group having 1 to 10 carbon atoms such as a phenyl group, a naphthyl group, and an indenyl group, a nitrogen atom, an oxygen atom, and a sulfur atom. Examples include heteroaryl groups of 1 to 10, such as furyl, thienyl, pyrrolyl, pyridyl, and quinolyl groups.
Specific examples of the alkenyl group include those having 1 to 10 carbon atoms such as vinyl group, 1-propenyl group, 1-butenyl group, 1-methyl-1-propenyl group, 1-cyclopentenyl group, 1-cyclohexenyl group and the like. A linear, branched, or cyclic alkenyl group is mentioned.
Specific examples of the alkynyl group include alkynyl groups having 1 to 10 carbon atoms such as ethynyl group, 1-propynyl group, 1-butynyl group, and 1-octynyl group. Examples of the substituent that R ²³ may have are the same as those described as the substituent that R ²² can introduce. The number of carbon atoms of R ²³ is 1 to 10 including the carbon number of the substituent.
A in Formula (2) is preferably an oxygen atom or —NH— because synthesis is easy.

The aliphatic cyclic structure and R in R ²² may be directly bonded, or a linking group may be further provided between the aliphatic cyclic structure and A. The linking group can be bonded to any position of the aliphatic cyclic structure. That is, the linking group is not particularly limited as long as it is a divalent linking group, but examples include an alkyleneoxy group, a polyalkyleneoxy group, an alkyleneoxycarbonyl group, and a poly (alkyleneoxy) carbonyl group. Further, it may be substituted with a halogen atom. The alkylene group may be any linear or branched alkylene group, preferably having 1 to 20 carbon atoms, more preferably 1 to 10 carbon atoms, and still more preferably 2 to 6 carbon atoms. It is.
Moreover, it is preferable that the aliphatic cyclic structure and carboxyl group in R ²² are directly bonded.

  The compound represented by the formula (2) is preferably a compound represented by the following formula (3).

In the above formula (3), R ^21, A and n are as defined R ^21, A and n in each formula (2), thereof are also the same preferable ranges.
R ²⁴ is an (n + 1) -valent alicyclic hydrocarbon group, and (n + 1) hydrogen atoms on the aliphatic cyclic structure of the compound having an aliphatic cyclic structure which may have a substituent are removed; n + 1) valent linking group. R ²⁴ is cyclopropane, cyclopentane, cyclohexane, cycloheptane, cyclooctane, cyclodecane, dicyclohexyl, tercyclohexyl, norbornane, decahydronaphthalene, perhydrofluorene, tricyclo which may be substituted by one or more arbitrary substituents. [5.2.1.0 ^2.6 ] Decane, adamantane, quadricyclane, congressan, cubane, spiro [4.4] octane, cyclopentene, cyclohexene, cycloheptene, cyclooctene, cyclodecene, bicyclo [2.2.2] octa -2-ene, cyclohexadiene, cycloheptadiene, cyclooctadiene, cycloheptatriene, cyclodecatriene, cyclooctatetraene, norbornylene, octahydronaphthalene, bicycl Arbitrary carbon atoms constituting a compound having an aliphatic cyclic structure such as [2.2.1] heptadiene, bicyclo [4.3.0] nonadiene, dicyclopentadiene, hexahydroanthracene, spiro [4.5] decadiene Examples include (n + 1) -valent alicyclic hydrocarbon groups by removing (n + 1) hydrogen atoms above.
Among these, preferred examples of the aliphatic cyclic structure of R ²⁴ include cyclopropane, cyclopentane, cyclohexane, norbornane, cyclopentene, cyclohexene, norbornene, and bicyclo [2.2.2] oct-2-ene.
The substituent that R ²⁴ may have is the same as the substituent that can be introduced into the (n + 1) -valent hydrocarbon group having an aliphatic cyclic structure represented by R ²² in the formula (2). The preferred range is also the same.

In the formula (3), R ²³ represents a divalent linking group, and examples thereof include an alkylene group, —O—, — (C═O) —, and a group in which these are arbitrarily combined. The bond with R ²⁴ preferably has a structure represented by —O—C═O) —R ²⁴ .
Moreover, as an alkylene group, a C1-C4 alkylene group is preferable, More preferably, it is C1-C3, More preferably, it is an ethylene group.
R23 is preferably a monoalkyleneoxycarbonyl group or a poly (alkyleneoxy) carbonyl group, and more preferably an ethyleneoxycarbonyl group or a poly (ethyleneoxy) carbonyl group.
Although the preferable specific example of the repeating unit derived from the monomer represented by Formula (2) below is shown, this invention is not limited to these.

One type of repeating unit derived from the monomer represented by the formula (2) may be contained in the specific copolymer, or two or more types may be contained. The total content of the repeating unit derived from the monomer represented by formula (2) in the specific copolymer is appropriately determined depending on its structure, the design of the photosensitive resin composition, etc., but preferably constitutes the specific copolymer. It is contained in the range of 0.1 to 99 mol%, more preferably 1 to 80 mol%, and still more preferably 5 to 60 mol%, based on the total molar amount of the monomer units.
If the carboxyl group of the specific copolymer is too small, a residue may be generated in the development process. If the carboxyl group of the specific copolymer is too large, the desired excellent coating film uniformity cannot be obtained. Therefore, the acid value of the specific copolymer is 0. 0.01-3.0 mmol / g is preferable, 0.1-2.5 mmol / g is more preferable, and 0.2-2.0 mmol / g is more preferable.

In the specific copolymer, in addition to the monomer unit derived from the two types of monomers of the compound represented by the formula (1) and the compound represented by the formula (2), the effects of the present invention are not impaired. In the above, other monomers may be copolymerized for various purposes such as improvement of coating properties.
Examples of other monomers that can be used in combination here include known acrylic esters, methacrylic esters, acrylamides, methacrylamides, vinyl esters, styrenes, acrylonitrile, maleic anhydride, maleic imide, and the like. Monomer.

  Examples of the acrylic esters include methyl acrylate, ethyl acrylate, (n- or i-) propyl acrylate, (n-, i-, sec- or t-) butyl acrylate, amyl acrylate, 2-ethylhexyl acrylate, Dodecyl acrylate, chloroethyl acrylate, 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, 5-hydroxypentyl acrylate, cyclohexyl acrylate, allyl acrylate, trimethylolpropane monoacrylate, pentaerythritol monoacrylate, glycidyl acrylate, benzyl acrylate, methoxybenzyl Acrylate, chlorobenzyl acrylate, 2- (p-hydroxyphenyl) ethyl acrylate, full-free Acrylate, tetrahydrofurfuryl acrylate, phenyl acrylate, chlorophenyl acrylate, sulfamoylphenyl acrylate and the like.

  Examples of methacrylic acid esters include methyl methacrylate, ethyl methacrylate, (n- or i-) propyl methacrylate, (n-, i-, sec- or t-) butyl methacrylate, amyl methacrylate, 2-ethylhexyl methacrylate, dodecyl. Methacrylate, chloroethyl methacrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, 5-hydroxypentyl methacrylate, cyclohexyl methacrylate, allyl methacrylate, trimethylolpropane monomethacrylate, pentaerythritol monomethacrylate, glycidyl methacrylate, methoxybenzyl methacrylate, chlorobenzyl Methacrylate, 2- (p-hydroxyphenyl) ethyl methacrylate DOO, furfuryl methacrylate, tetrahydrofurfuryl methacrylate, phenyl methacrylate, chlorophenyl methacrylate, sulfamoylphenyl methacrylate and the like.

  Examples of acrylamides include acrylamide, N-methylacrylamide, N-ethylacrylamide, N-propylacrylamide, N-butylacrylamide, N-benzylacrylamide, N-hydroxyethylacrylamide, N-phenylacrylamide, N-tolylacrylamide, N- (p-hydroxyphenyl) acrylamide, N- (sulfamoylphenyl) acrylamide, N- (phenylsulfonyl) acrylamide, N- (tolylsulfonyl) acrylamide, N, N-dimethylacrylamide, N-methyl-N-phenyl Examples include acrylamide and N-hydroxyethyl-N-methylacrylamide.

  Examples of methacrylamides include methacrylamide, N-methylmethacrylamide, N-ethylmethacrylamide, N-propylmethacrylamide, N-butylmethacrylamide, N-benzylmethacrylamide, N-hydroxyethylmethacrylamide, N- Phenylmethacrylamide, N-tolylmethacrylamide, N- (p-hydroxyphenyl) methacrylamide, N- (sulfamoylphenyl) methacrylamide, N- (phenylsulfonyl) methacrylamide, N- (tolylsulfonyl) methacrylamide, N, N-dimethylmethacrylamide, N-methyl-N-phenylmethacrylamide, N-hydroxyethyl-N-methylmethacrylamide and the like can be mentioned.

Examples of vinyl esters include vinyl acetate, vinyl butyrate, vinyl benzoate, and the like.
Examples of styrenes include styrene, methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, propyl styrene, cyclohexyl styrene, chloromethyl styrene, trifluoromethyl styrene, ethoxymethyl styrene, acetoxymethyl styrene, methoxy styrene, dimethoxy styrene, Examples include chlorostyrene, dichlorostyrene, bromostyrene, iodostyrene, fluorostyrene, carboxystyrene, and the like.

  Among these monomers, acrylic acid esters, methacrylic acid esters, vinyl esters, styrenes, and acrylonitrile having 20 or less carbon atoms are preferable.

Moreover, the photosensitive resin composition of the present invention may contain only one kind of the specific copolymer, or may be a mixture of two or more kinds. As long as the effects of the present invention are not impaired, one or more fluorine-containing polymer compounds outside the scope of the present invention may be used in combination with the specific copolymer of the present invention as a mixture.
The fluorine-containing polymer compound used in combination is used in an amount of 0.01 to 300% by weight, preferably 0.1 to 250% by weight, more preferably 1 to 200% by weight, based on the total weight of the specific copolymer. . As the fluorine-containing polymer compound that can be used in combination, commercially available ones can be used without limitation. Specifically, fluorine-based surfactants often used in the industry, JP-A-2002-311577, JP-A-2002-72474, Fluoropolymers described in JP-A Nos. 2004-101893 are preferably used.

The weight average molecular weight of the specific copolymer in the present invention is appropriately determined from the viewpoint of reducing residue in the developing process and coating film uniformity. Usually, when the molecular weight increases, development residues are likely to occur. Conversely, when the molecular weight is low, the coating film uniformity tends to deteriorate. The molecular weight is preferably 1,000 to 1,000,000, more preferably 2,000 to 500,000, and still more preferably 3,000 to 300,000.
The specific copolymer may be linear, branched or have a block structure.

  Hereinafter, the structures of the specific copolymers [(P-1) to (P-21)] suitable for the present invention will be exemplified together with their weight average molecular weights (Mw), but the present invention is not limited thereto. Absent. In addition, each copolymerization ratio is shown by molar ratio.

  The content of the specific copolymer in the photosensitive resin composition is preferably 0.00001 to 10% by weight, more preferably 0.00003 to 5% by weight, further based on the total weight of the solid content. Preferably it is 0.00005 to 1 weight%.

(G) Other components In addition to said (A)-(F), the photosensitive resin composition of this invention may contain (G) other components. (G) Examples of other components include sensitizers, strong sensitizers, thermal polymerization inhibitors, adhesion improvers, and other additives.

<Sensitizer>
The photosensitive resin composition of the present invention may contain a sensitizer.
As the sensitizer, one that sensitizes the above-described photopolymerization initiator by an electron transfer mechanism or an energy transfer mechanism is preferable.

Examples of the sensitizer include those belonging to the compounds listed below and having an absorption wavelength in a wavelength region of 300 nm to 450 nm.
That is, for example, polynuclear aromatics (for example, phenanthrene, anthracene, pyrene, perylene, triphenylene, 9,10-dialkoxyanthracene), xanthenes (for example, fluorescein, eosin, erythrosine, rhodamine B, rose bengal), Thioxanthones (isopropylthioxanthone, diethylthioxanthone, chlorothioxanthone), cyanines (eg thiacarbocyanine, oxacarbocyanine), merocyanines (eg merocyanine, carbomerocyanine), phthalocyanines, thiazines (eg thionine, methylene blue, Toluidine blue), acridines (eg, acridine orange, chloroflavin, acriflavine), anthraquinones (eg, anthraquinone), square Ums (eg, squalium), acridine orange, coumarins (eg, 7-diethylamino-4-methylcoumarin), ketocoumarins, phenothiazines, phenazines, styrylbenzenes, azo compounds, diphenylmethane, triphenylmethane, distyrylbenzene , Carbazoles, porphyrins, spiro compounds, quinacridone, indigo, styryl, pyrylium compounds, pyromethene compounds, pyrazolotriazole compounds, benzothiazole compounds, barbituric acid derivatives, thiobarbituric acid derivatives, acetophenone, benzophenone, thioxanthone, Michler's ketone, etc. And aromatic ketone compounds, and heterocyclic compounds such as N-aryloxazolidinones.

  When the photosensitive resin composition of the present invention contains a sensitizer, the content of the sensitizer in the photosensitive resin composition is the total solid content from the viewpoint of light absorption efficiency to the deep part and starting decomposition efficiency. It is preferable that it is 0.1-20 weight% with respect to a weight, and 0.5-15 weight% is more preferable.

<Co-sensitizer>
The photosensitive resin composition of the present invention may contain a co-sensitizer.
The co-sensitizer has effects such as further improving the sensitivity of the photopolymerization initiator and the sensitizer to actinic radiation or suppressing inhibition of polymerization of the polymerizable compound by oxygen.

  Examples of such cosensitizers include amines such as M.I. R. Sander et al., “Journal of Polymer Society”, Vol. 10, 3173 (1972), Japanese Patent Publication No. 44-20189, Japanese Patent Publication No. 51-82102, Japanese Patent Publication No. 52-134692, Japanese Patent Publication No. 59-138205. No. 60-84305, JP-A 62-18537, JP-A 64-33104, Research Disclosure 33825, and the like. Specific examples include triethanolamine. P-dimethylaminobenzoic acid ethyl ester, p-formyldimethylaniline, p-methylthiodimethylaniline and the like.

  Other examples of co-sensitizers include thiols and sulfides such as thiol compounds described in JP-A-53-702, JP-B-55-500806, JP-A-5-142772, No. 56-75643, such as 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2-mercaptobenzimidazole, 2-mercapto-4 (3H) -quinazoline, β-mercapto. And naphthalene.

  Other examples of the co-sensitizer include amino acid compounds (eg, N-phenylglycine), organometallic compounds described in JP-B-48-42965 (eg, tributyltin acetate), JP-B 55- Examples include a hydrogen donor described in Japanese Patent No. 34414, a sulfur compound (eg, trithiane) described in Japanese Patent Laid-Open No. 6-308727, and the like.

  When the photosensitive resin composition of the present invention contains a co-sensitizer, the content of the co-sensitizer is selected from the viewpoint of improving the curing rate due to the balance between polymerization growth rate and chain transfer. Is preferably in the range of 0.1 to 30% by weight, more preferably in the range of 1 to 25% by weight, and still more preferably in the range of 0.5 to 20% by weight.

<Thermal polymerization inhibitor>
In the photosensitive resin composition of the present invention, a small amount of a thermal polymerization inhibitor can be added to prevent unnecessary thermal polymerization of the polymerizable compound during the production or storage of the composition.
Examples of the thermal polymerization inhibitor that can be used in the present invention include hydroquinone, p-methoxyphenol, di-t-butyl-p-cresol, pyrogallol, t-butylcatechol, benzoquinone, 4,4′-thiobis (3-methyl-6). -T-butylphenol), 2,2'-methylenebis (4-methyl-6-t-butylphenol), N-nitrosophenylhydroxyamine primary cerium salt and the like.

When the photosensitive resin composition of the present invention contains a thermal polymerization inhibitor, the addition amount of the thermal polymerization inhibitor is preferably about 0.01 to about 5% by weight with respect to the total solid content of the photosensitive resin composition.
If necessary, higher fatty acid derivatives such as behenic acid and behenic acid amide may be added to prevent polymerization inhibition due to oxygen, and may be unevenly distributed on the surface of the coating film during the drying process after coating. . The amount of the higher fatty acid derivative added is preferably about 0.5 to about 10% by weight of the total composition.

<Adhesion improver>
In the photosensitive resin composition of this invention, in order to improve adhesiveness with hard surfaces, such as a board | substrate, an adhesive improvement agent can be added. Examples of the adhesion improver include a silane coupling agent and a titanium coupling agent.

Examples of the silane coupling agent include γ- (2-aminoethyl) aminopropyltrimethoxysilane, γ- (2-aminoethyl) aminopropyldimethoxysilane, β- (3,4-epoxycyclohexyl) ethyltrimethoxy. Silane, γ-aminopropyltrimethoxysilane, γ-aminopropyltriethoxysilane, γ-methacryloxypropyltrimethoxysilane, γ-methacryloxypropyltriethoxysilane, γ-acryloxypropyltrimethoxysilane, γ-acryloxypropyl Triethoxysilane, γ-isocyanatopropyltrimethoxysilane, γ-isocyanatopropyltriethoxysilane, N-β- (N-vinylbenzylaminoethyl) -γ-aminopropyltrimethoxysilane / hydrochloride, γ-glycidoxypro Pyrtrimethoxysilane, γ-glycidoxypropyltriethoxysilane, aminosilane, γ-mercaptopropyltrimethoxysilane, γ-mercaptopropyltriethoxysilane, methyltrimethoxysilane, methyltriethoxysilane, vinyltriacetoxysilane, γ- Chloropropyltrimethoxysilane, hexamethyldisilazane, γ-anilinopropyltrimethoxysilane, vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris (β-methoxyethoxy) silane, octadecyldimethyl [3- (trimethoxysilyl) propyl ] Ammonium chloride, γ-chloropropylmethyldimethoxysilane, γ-mercaptopropylmethyldimethoxysilane, methyltrichlorosilane, dimethyldichlorosilane, trimethyl Chlorosilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, bisallyltrimethoxysilane, tetraethoxysilane, bis (trimethoxysilyl) hexane, phenyltrimethoxysilane, N- (3-acryloxy-2-hydroxy Propyl) -3-aminopropyltriethoxysilane, N- (3-methacryloxy-2-hydroxypropyl) -3-aminopropyltriethoxysilane, (methacryloxymethyl) methyldiethoxysilane, (acryloxymethyl) methyldimethoxysilane , Etc.
Among them, γ-methacryloxypropyltrimethoxysilane, γ-methacryloxypropyltriethoxysilane, γ-acryloxypropyltrimethoxysilane, γ-acryloxypropyltriethoxysilane, γ-mercaptopropyltrimethoxysilane, γ-aminopropyl Triethoxysilane and phenyltrimethoxysilane are preferable, and γ-methacryloxypropyltrimethoxysilane is most preferable.

  When the photosensitive resin composition of the present invention contains an adhesion improver, the addition amount of the adhesion improver is preferably 0.5 to 30% by weight in the total solid content of the photosensitive resin composition, and 0.7 to 20 Weight percent is more preferred.

<Other additives>
Furthermore, in order to improve the physical properties of the cured film, known additives such as an inorganic filler, a plasticizer, and a sensitizer may be added to the photosensitive resin composition of the present invention.
Examples of the plasticizer include dioctyl phthalate, didodecyl phthalate, triethylene glycol dicaprylate, dimethyl glycol phthalate, tricresyl phosphate, dioctyl adipate, dibutyl sebacate, triacetyl glycerin, and the like. 10% by weight or less can be added.

(Method for producing photosensitive resin composition)
The photosensitive resin composition of this invention can be prepared by mixing said (A)-(F) and other components (G) as needed, and disperse | distributing titanium black uniformly.
Titanium black is preferably dispersed in advance in the resin solution in the presence of a dispersion aid. The step of dispersing titanium black is preferably performed in two stages: a step of kneading in a highly viscous resin solution and a step of dispersing the media using a medium.

In the kneading step of titanium black in the production of the photosensitive resin composition of the present invention, first, titanium black and other combined black color material, a dispersant and / or a surface treatment agent, an alkali-soluble resin, and a solvent are kneaded. . The machine used for the kneading is not particularly limited, but examples include a two-roll, a three-roll, a ball mill, a tron mill, a disper, a kneader, a kneader, a homogenizer, a blender, and a single-screw or twin-screw extruder, and a strong shearing force. It is preferable to disperse while giving.
Next, an organic solvent and a resin (the remainder used in the kneading step) are added. Examples of the machine used in the dispersion process include vertical or horizontal sand grinders, pin mills, slit mills, and ultrasonic dispersers. Media (beads) such as glass and zirconia having a particle diameter of 0.1 to 1 mm It is preferable to disperse using.
It is possible to omit the kneading step. In that case, it is preferable to disperse the pigment, the dispersant and / or the surface treatment agent, the resin, and the solvent in a medium. In this case, it is preferable to add the remaining resin in the kneading step during the dispersion.
Details of the kneading step and the dispersing step are described in TC Patton, “Paint Flow and Pigment Dispersion” (1964, John Wiley and Sons) and the like.

(2) Light-shielding color filter The photosensitive resin composition of this invention can be preferably used for manufacture of a light-shielding color filter.
In the present invention, the “light-shielding color filter” means that a photosensitive resin composition containing at least a black color material, a photopolymerizable compound, a resin, a photopolymerization initiator, and two or more organic solvents is applied and exposed. A light-shielding pattern obtained by development. The color of the “light-shielding color filter” in the present invention may be an achromatic color such as black or gray, or a black or gray color mixed with a chromatic color.
The “light-shielding color filter” is a photosensitive resin composition containing at least a black color material, a photopolymerizable compound, a resin, a photopolymerization initiator, and two or more organic solvents, and is exposed to light and developed. Therefore, it may be rephrased as a light shielding film or a light shielding filter.
Here, the light-shielding color filter preferably has an average transmittance of 10% or less and more preferably an average transmittance of 1% or less in the visible region and the infrared region (400 to 1,600 nm). .
It is preferable that the light-shielding color filter is provided in the light-shielding portion on the back surface facing the surface where the imaging unit periphery of the solid-state imaging device is located and / or the surface where the imaging unit is located.
By increasing the light shielding property of the imaging unit peripheral edge light shielding unit and / or the imaging surface back surface, the dark current generated outside the imaging unit is reduced, and the photoelectric conversion function through the color filter arranged in the imaging device is improved. be able to.

  In the present invention, the optical density of the light-shielding color filter formed using the photosensitive resin composition is preferably 2 or more, 10 or less, more preferably 3 or more, and 10 or less, and more preferably 4 or more, 9. It is particularly preferred that

The film thickness of the light-shielding color filter is not particularly limited, but is preferably 0.1 μm to 10 μm, more preferably 0.3 μm to 5.0 μm, from the viewpoint of more effectively obtaining the effects of the present invention. 5 μm to 3.0 μm is particularly preferable.
The size (length of one side) of the light-shielding color filter is not particularly limited, but is preferably 200 μm or more, more preferably 500 μm or more, and more preferably 1,000 μm or more from the viewpoint of obtaining the effect of the present invention more effectively. Particularly preferred. The upper limit is not particularly limited, but is preferably 10,000 μm.
Further, the area of the light-shielding color filter is not particularly limited, but from the viewpoint of obtaining the effect of the present invention more effectively, it is more preferably 0.05 mm ² or more, more preferably 0.2 mm ² or more, and 1 mm ^2. The above is particularly preferable. Although there is no limitation in particular about an upper limit, it is preferable that it is 9 mm < ² > or less.

  The light-shielding color filter of the present invention can be suitably used for, for example, a solid-state image sensor such as a CCD or CMOS, and is particularly suitable for a solid-state image sensor such as a CCD or CMOS having more than 1 million pixels.

(3) Manufacturing method of light-shielding color filter Although the manufacturing method of the light-shielding color filter of this invention is not specifically limited, (a) The process (photosensitive layer formation) of apply | coating the photosensitive resin composition of this invention to a board | substrate. It is preferable to include a step), (b) a step of image exposure (exposure step), and (c) a step of developing and patterning (development step).
Hereinafter, each process in the manufacturing method of the light-shielding color filter of this invention is demonstrated.

(A) Photosensitive layer forming step In the photosensitive layer forming step, the photosensitive resin composition of the present invention is applied onto a substrate to form a photosensitive layer.
Examples of the substrate that can be used in this step include a photoelectric conversion element substrate used for a solid-state imaging element or the like, such as a silicon substrate, a complementary metal oxide semiconductor (CMOS), or the like.
Further, on these substrates, if necessary, an undercoat layer may be provided in order to improve adhesion to the upper layer, prevent diffusion of substances, or planarize the substrate surface.

As a coating method of the photosensitive resin composition of the present invention on the substrate, various coating methods such as slit coating, ink jet method, spin coating, cast coating, roll coating, screen printing method and the like can be applied.
The coating thickness of the photosensitive resin composition is preferably 0.35 μm to 3.0 μm and more preferably 0.50 μm to 2.5 μm from the viewpoint of resolution and developability.

  The photosensitive resin composition coated on the substrate is usually dried at 70 ° C. to 110 ° C. for about 2 minutes to 4 minutes to form a photosensitive layer.

(B) Exposure process In an exposure process, the photosensitive layer formed in the said photosensitive layer formation process is exposed and hardened. In the present invention, the exposure step is preferably a step of exposing through a mask, and more preferably a step of exposing through a photomask. In addition, when exposing through a mask, it is preferable to harden only the coating film part irradiated with light.
The exposure is preferably performed by irradiation with radiation, and as radiation that can be used for the exposure, ultraviolet rays such as g-line (436 nm) and i-line (365 nm) are particularly preferably used, and i-line is more preferably used. A high pressure mercury lamp is more preferred as the light source. The irradiation intensity is preferably 5 mJ to 1,500 mJ, more preferably 10 mJ to 1,000 mJ, and most preferably 10 mJ to 800 mJ.

(C) Development process An alkali development process (development process) may be performed after the exposure process.
In the development step, the non-light-irradiated part in the exposure step is eluted in the alkaline aqueous solution. Thereby, only the photocured part remains.
As the developer, an organic alkali developer that does not damage the underlying circuit or the like is desirable. The development temperature is usually 20 ° C. to 30 ° C., and the development time is 20 to 90 seconds.

  Examples of the alkali used in the developer include ammonia water, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, choline, pyrrole, piperidine, 1,8-diazabicyclo- [5,4,0. ] An alkaline aqueous solution obtained by diluting an organic alkaline compound such as -7-undecene with pure water so as to have a concentration of 0.001 to 10% by weight, preferably 0.01 to 1% by weight. In the case where a developer composed of such an alkaline aqueous solution is used, it is generally washed (rinsed) with pure water after development.

In the method for producing a light-shielding color filter for a solid-state imaging device according to the present invention, after the above-described photosensitive layer forming step, exposure step, and development step, the formed pattern is heated and necessary as necessary. A curing step of curing by exposure may be included.
The heating step (post-baking treatment) after the development step is heating after development for complete curing, and it is preferable to perform heating (hard baking) at 180 ° C. to 250 ° C. This post-bake treatment is performed continuously or batchwise using a heating means such as a hot plate, a convection oven (hot air circulation dryer), a high-frequency heater or the like so that the coating solution after development is in the above temperature condition. be able to.
In addition to the post-baking treatment or independently, the colored pattern may be cured by irradiating ultraviolet rays with a high-pressure mercury lamp or the like (post-cure treatment).

(4) Solid-state image sensor The photosensitive resin composition of this invention can be preferably used for solid-state image sensors. Specifically, after coating the photosensitive resin composition of the present invention as a thin film on a substrate, image exposure with i-line or the like, development and patterning make it a light-shielding color having a desired shape A filter can be manufactured.
As already described, the light-shielding color filter was obtained by exposing and developing a photosensitive resin composition containing at least a black color material, a photopolymerizable compound, a resin, a photopolymerization initiator, and a solvent. A light-shielding pattern. The color of the “light-shielding color filter” in the present invention may be an achromatic color such as black or gray, or a black or gray color mixed with a chromatic color. Moreover, in the visible region and the infrared region (400 to 1,600 nm), a filter having an average transmittance of 10% or less is preferable, and an average transmittance is more preferably 1% or less.
A solid-state imaging device according to the present invention includes the light-shielding color filter described above.
Hereinafter, the solid-state imaging device will be described with reference to the drawings.

FIG. 1 is a cross-sectional view illustrating an example of an imaging unit of a solid-state imaging device according to the present invention and a light shielding unit arranged at the periphery thereof. FIG. 1 shows an example of a solid-state imaging device having a light-shielding color filter obtained by photocuring the solid content of the photosensitive resin composition of the present invention at the periphery of the color filter constituting the three primary color pixels.
In FIG. 1, the solid-state imaging device 1 includes a photoelectric conversion element (light receiving sensor unit) 12 on a silicon substrate 10. Further, transfer electrodes (14 a, 14 b) for transferring the generated charges are provided adjacent to the photoelectric conversion element 12. The transfer electrodes 14 a and 14 b are covered with an insulating film 16.
A color filter (4R, 4G, 4B) in which three primary color pixels composed of the three primary colors of R (red), G (green), and B (blue) are regularly arranged is disposed on the photoelectric conversion element 12. Part 2 is formed. On the periphery of the imaging unit 2, a light shielding unit 3 including a light shielding color filter 5 formed by photocuring the photosensitive resin composition of the present invention is formed.

  In FIG. 1, a photoelectric conversion element 12, such as a CCD or CMOS, transfer electrodes 14a and 14b, a planarization layer 18a, and the like necessary for the solid-state imaging device 1 can be formed according to a known IC manufacturing method. The color filters (4R, 4G, 4B) and the light-shielding color filter 5 can be formed by a photoresist technique. The planarizing layer 18b may also be formed on the color filters (4R, 4G, 4B). Furthermore, it is preferable to provide a microlens 17 on the color filters (4R, 4G, 4B) for condensing light.

A photosensitive resin composition containing titanium black as a visible light and infrared light shielding agent is uniformly applied on the silicon substrate 10 on which the color filter (4R, 4G, 4B) is formed, heated, and dried. A film is formed. Subsequently, a commercially available i is passed through the dry coating film through a mask in which a mask pattern is formed so as to open the imaging unit 2 and cover a photoelectric conversion element used for dark current measurement. The pattern of the light-shielding color filter 5 can be obtained by exposure with a line stepper or the like, alkali development, washing with water and drying.
Furthermore, after the planarization layer 18b and the microlens 17 are formed on the obtained substrate as necessary, dicing and packaging are performed to obtain the solid-state imaging device 1.
At this time, the film thickness of the optical functional layer from the silicon substrate surface to the lower surface of the microlens is preferably 5 μm or less, more preferably 4.5 μm or less, and particularly preferably 4 μm or less.

In the solid-state imaging device of the present invention, in addition to disposing a light-shielding color filter on the periphery of the imaging unit on the front side as described above, a light-shielding color filter is also disposed on the back surface facing the surface with the imaging unit. Is preferred.
Specifically, in the solid-state imaging device having a plurality of protruding electrodes for connecting to the wiring substrate on the back surface of the solid-state imaging device, it is preferable to provide a light-shielding color filter in a region other than the protruding electrodes on the back surface.

  Conventionally, in a solid-state imaging device having a protruding electrode on the back surface, stray light enters the solid-state imaging device from between the solid-state imaging device and the solid-state imaging device wiring board, and the captured image tends to deteriorate due to generation of dark current. is there. The solid-state imaging device of the present invention can prevent the stray light from entering by providing a light-shielding color filter on the back surface. Therefore, even if the conventional injection of the light-shielding underfill resin for preventing the intrusion of stray light is omitted, the generation of dark current due to the stray light from the back side can be suppressed and the color reproducibility can be improved. it can.

  A preferred embodiment of the solid-state imaging device of the present invention will be described with reference to FIGS. FIG. 2 is a block diagram showing an example of the solid-state imaging device of the present invention. FIG. 3 is a cross-sectional view taken along the line A-A ′ in FIG. 2.

As illustrated in FIG. 2, the solid-state imaging device 20 includes a solid-state imaging device 24 having an imaging unit 2, a light shielding unit 3, and a bonding pad 30.
FIG. 3 is a cross-sectional view of the solid-state imaging device 20 including the solid-state imaging device 24 and the wiring board 21 shown in FIG. The solid-state imaging device 24 includes an imaging unit 2 and a light shielding unit 3 on the front surface, and further includes a light shielding color filter 23 and a protruding electrode 26 on the back surface. Furthermore, an underfill resin 25 may be provided between the solid-state imaging device 24 and the wiring board 21 for the purpose of improving durability and preventing stray light.

A through electrode 27 is formed under the bonding pad 30 formed on the solid-state image sensor 24, and is connected to the protruding electrode 26 provided on the back surface of the solid-state image sensor 24.
The solid-state imaging device 24 can be connected to the wiring board 21 via a plurality of protruding electrodes 26 formed. As the protruding electrode 26, a known one can be used and is not limited. Examples thereof include a solder ball, a gold stud bump, and a gold plating bump.

  When the light-shielding color filter 23 is disposed on the back surface of the solid-state imaging device 24 of the present invention, dark current generated when the imaging light enters the solid-state imaging device as stray light can be reduced.

  EXAMPLES Hereinafter, although an Example demonstrates this invention further more concretely, this invention is not limited to a following example. Unless otherwise specified, “part” and “percentage (%)” are based on weight.

(1) Preparation of titanium black dispersion <Preparation of titanium black crude dispersion>
A titanium black coarse dispersion was prepared by subjecting the following composition to a high viscosity dispersion treatment using two rolls. The viscosity of the obtained coarse dispersion was 40,000 mPa · s.
In addition, you may knead | mix for 30 minutes with a kneader before a high-viscosity dispersion process.

[Titanium black crude dispersion composition]
Gemco Titanium Black 13M-T: 40 parts Solpers 5000 (manufactured by Zeneca): 1 part

  145 parts of propylene glycol monomethyl ether acetate was added to the obtained titanium black crude dispersion, and the titanium black dispersion was subjected to a dispersion treatment for 4 hours with a disperser (Dispermat GETZMANN) using 0.5 mm zirconia beads. Got. The viscosity of this dispersion was 4.0 mPa · s.

Example 1
(2) Preparation of photosensitive resin composition Each component shown below was mixed and the photosensitive resin composition was prepared.
Methacrylate / acrylic acid ternary copolymer (J-1 below): 4.4 parts Dipentaerythritol hexaacrylate (T-1): 0.5 part Ethoxylated pentaerythritol tetraacrylate (T-2): 1.4 Part Titanium black dispersion: 23 parts Propylene glycol monomethyl ether acetate (PGMEA): 2 parts Ethyl-3-ethoxypropionate (EEP): 0.3 part Oxime-based initiator (K-1 below): 0. 6 parts Surfactant (Exemplary Compound P-1): 800 ppm

(Examples 2 to 5 and Comparative Examples 1 to 3)
A photosensitive resin composition was prepared in the same manner as in Example 1 except that the surfactant and the amount of surfactant used were changed.
However, the surfactant W-1 shown in Table 1 has the following structure.

(3) Production of light-shielding color filter and evaluation thereof The obtained photosensitive resin composition was applied to an 8-inch silicon wafer by spin coating, and then heated at 120 ° C. for 2 minutes on a hot plate.
Then a pattern of 3mm square at i-line stepper and exposure from 100 mJ / cm ² in 100 mJ / cm ² steps until 1,000 mJ / cm ^2.
After irradiation, paddle development was performed at 23 ° C. for 60 seconds using a tetramethylammonium hydroxide 0.3% aqueous solution (CD-2060 manufactured by FFEM). Thereafter, it was rinsed and washed with a spin shower.
The obtained pattern was observed with an optical microscope and a length measurement SEM, and the presence or absence of a residue was evaluated.
A: No residue was found in the unexposed area, or there was no practical problem.
X: Residue was confirmed in the unexposed part.

  As shown in Table 1, when the specific copolymer was added, a photocurable resin composition with little residue after development could be obtained.

It is sectional drawing which shows an example of the imaging part of the solid-state image sensor of this invention, and the light-shielding part arrange | positioned at the periphery. It is a schematic plan view which shows an example of the solid-state imaging device provided with the solid-state imaging element of this invention. It is sectional drawing of an example of the solid-state imaging device provided with the solid-state image sensor of this invention.

Explanation of symbols

1: solid-state imaging device 2: imaging unit 3: light shielding unit 4R, 4G, 4B: color filter 5: light shielding color filter 10: silicon substrate 12: photoelectric conversion element (light receiving sensor unit)
14a, 14b: Transfer electrode 16: Insulating film 17: Microlens 18a, 18b: Flattening layer 20: Solid-state imaging device 21: Wiring substrate 22: Solid-state imaging chip 23: Light-shielding color filter 24: Solid-state imaging device 25: Underfill Resin 26: Projection electrode 27: Through electrode 30: Bonding pad 50: Solder ball

Claims (7)

(A) Titanium black,
(B) a polymerizable compound,
(C) resin,
(D) a photopolymerization initiator,
(E) an organic solvent, and
(F) A photosensitive resin comprising at least a copolymer of an ethylenically unsaturated compound having a fluoroalkyl group containing 9 or more fluorine atoms and an ethylenically unsaturated compound having a carboxyl group Composition. The photosensitive of Claim 1 whose (F) copolymer is a copolymer of the ethylenically unsaturated compound represented by Formula (1), and the ethylenically unsaturated compound represented by Formula (2). Resin composition.

In the formula (1), Rf is a group containing a fluoroalkyl group or a perfluoroalkyl group containing 9 or more fluorine atoms, n represents 1 or 2, and R ¹ represents a hydrogen atom or a methyl group. To express.

In formula (2), R ²¹ represents a hydrogen atom or a methyl group, R ²² represents an (n + 1) -valent linking group having an aliphatic cyclic structure having 3 to 30 carbon atoms, and A represents an oxygen atom or —NR ²³ -represents, R ²³ represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms, and n represents an integer of 1 to 4.   (D) The photosensitive resin composition of Claim 1 or 2 containing an oxime system photoinitiator as a photoinitiator.   The photosensitive resin composition of any one of Claims 1 thru | or 3 which is an object for solid-state image sensors.   A light-shielding color filter having a pattern formed using the photosensitive resin composition according to claim 1. Applying the photosensitive resin composition according to any one of claims 1 to 3 to a substrate;
An image exposure step; and
A process for producing a light-shielding color filter, comprising a step of developing and patterning.   A solid-state imaging device comprising the light-shielding color filter according to claim 5.

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