JP2009233726A - Light shielding partition - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light shielding partition capable of preventing the occurrence of clearances between a plurality of the partitions in the case of arranging the partitions so as to surround a laser beam machining apparatus, and completely shielding the invisible light laser beam having a possibility to be oscillated from the apparatus. <P>SOLUTION: The light shielding partition having a plate-shaped panel section has: an engaging part which is formed integrally with the panel part at one end of the panel part, and extends in a perpendicular direction; and a part to be engaged which is formed integrally with the panel part at the other end of the panel part. When the part to be engaged of the same shape adjacent to the part to be engaged is engaged with the engaging part, light is completely shielded of light by the engaging part and the part to be engaged. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a light shielding partition that requires a high light shielding function.

  In the semiconductor device manufacturing process, devices such as IC and LSI are formed in a plurality of regions partitioned by division lines (streets) formed in a lattice shape on the surface of a semiconductor wafer having a substantially disk shape, Individual devices are manufactured by dividing each region in which is formed along a division line.

  Cutting along the streets of a semiconductor wafer is usually performed by a cutting device called a dicer, and the wafer can be efficiently divided into individual devices. However, an optical device wafer in which an optical device such as a light emitting diode (LED) formed from a gallium nitride compound semiconductor or the like is laminated on the surface of a sapphire substrate or the like has a high Mohs hardness and is difficult to cut. There is a problem that productivity is poor.

  In recent years, as a method of dividing an optical device wafer along a street, a laser processing groove is formed by irradiating the wafer with a pulsed laser beam having a wavelength that absorbs the wafer, and the laser processing groove is formed along the laser processing groove. A method of cleaving a wafer into individual optical devices by applying an external force has been proposed (see, for example, Japanese Patent Laid-Open No. 10-305420).

In such a laser processing apparatus, for example, an ultraviolet laser beam having a wavelength of 355 nm or 266 nm or an infrared laser beam having a wavelength of 1064 nm is often used. Therefore, when maintaining such a laser processing apparatus, it is necessary to shield the periphery of the laser processing apparatus with a partition or the like so that a laser beam, which is invisible light used for processing, does not leak out of the maintenance work area.
JP-A-10-305420

  Thus, the partitions are usually arranged so that the laser processing apparatus is surrounded by a plurality of partitions. However, a gap is generated between the partitions, and the invisible light laser beam that may be oscillated from the laser processing apparatus during maintenance is completely generated. There was a problem that the light could not be shielded.

  The present invention has been made in view of these points, and the object of the present invention is to prevent a gap from being generated between partitions when a plurality of light shielding partitions are arranged so as to surround a laser processing apparatus. It is another object of the present invention to provide a light-shielding partition and a light-shielding partition assembly capable of completely shielding an invisible laser beam that may be oscillated from the apparatus.

  According to the first aspect of the present invention, there is provided a light-shielding partition having a plate-like panel portion, and an engaging portion extending in a vertical direction integrally formed with the panel portion at one end of the panel portion, and the panel portion And the engaged portion of the light-shielding partition of the same shape adjacent to the engaging portion is formed in the engaging portion. When engaged, a light shielding partition is provided in which light is completely shielded by the engaging portion and the engaged portion.

  Preferably, the engaging portion has a bent surface extending in the vertical direction, and the engaged portion has a non-bent surface extending in the vertical direction and corresponding to the bent surface. Here, the bending surface is defined as including two surfaces forming a curved surface and a right angle. In the case of a curved surface, the degree of freedom of partition installation can be improved.

  According to invention of Claim 3, it is the light-shielding partition assembly assembled so that a desired location may be enclosed using two or more light-shielding partitions of Claim 1 or 2, Comprising: The said engaging part of each light-shielding partition And the engaged portions each have a connecting portion for connecting adjacent light shielding partitions, and each of the light shielding partitions is selectively selected between a supporting position where the light shielding partition is self-supported and a non-supporting position. In the process of assembling a plurality of light-shielding partitions so as to surround the desired portion, the feet are positioned at a support position, and after the assembly of the light-shielding partition is completed, the feet A shading partition assembly is provided that is positioned in an unsupported position.

  According to the first aspect of the present invention, by engaging the engaged portion of the light shielding partition adjacent to the engaging portion of the light shielding partition, it is possible to completely prevent a gap from being formed between the adjacent light shielding partitions. Can do.

  According to the invention described in claim 3, when the light-shielding partition assembly is assembled, the light-shielding partition can stand alone, and the protrusion of the foot does not interfere with the work when performing the maintenance work. Can be completely shielded from light.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1A, a perspective view of the light shielding partition 2 of the first embodiment of the present invention is shown. The light-shielding partition 2 includes a plate-like panel portion 4, an engagement portion 6 that is formed integrally with the panel portion 4 at one end of the panel portion 4, and that is integrated with the panel portion 4 at the other end of the panel portion 4. It has the engaged part 8 extended in the perpendicular direction formed like this. The engaging portion 6 has a substantially U-shaped cross section, and the engaged portion 8 has a substantially L-shaped cross section.

  The engaging portion 6 has two round holes 10, and the engaged portion 8 has four screw holes 12, 14 corresponding to the round hole 10 as shown in FIG. 3 shows only two). As shown in FIG. 3C, the screw hole 12 is a blind hole without penetrating the plate material of the engaged portion 8. The same applies to the screw hole 14. Thereby, it is possible to reliably prevent the non-visible light laser beam from leaking from the connecting portion between the engaging portion 6 and the engaged portion 8.

  Two notches 16 are formed in the lower end portion of the panel portion 4 of the light-shielding partition 2, and the foot portion 18 is provided in the notch 16 portion as shown in FIG. 1 (A) and in FIG. 1 (B). It is attached so as to be rotatable around the axis 20 between the non-supporting position (storage position).

  A plurality of light shielding partitions 2 configured as described above are used, and the light shielding partition assembly is assembled so as to surround the laser processing apparatus 2 during the maintenance of the laser processing apparatus 22. In the process of assembling the plurality of light shielding partitions 2, the foot 18 is positioned at the support position so that the light shielding partitions 2 are self-supporting as shown in FIG.

  FIG. 3A shows an enlarged view of a portion A in FIG. 2. As shown in FIG. 3C, the bolt 14 is passed through the round hole 10 in the engaging portion 6 and the screw hole 12 in the engaged portion 8. By engaging with each other, the engaging portion 6 and the engaged portion 8 between the adjacent light shielding partitions 2 are fixed.

  FIG. 3B shows an enlarged view of a portion B in FIG. 2, and the bolt 15 is screwed into the screw hole 14 of the engaged portion 8 through the round hole 10 of the engaging portion 6, thereby the corner portion. Thus, the engaging portion 6 and the engaged portion 8 between the adjacent light shielding partitions 2 are fixed.

  After the assembly of the light shielding partition is completed, the foot 18 is stored in the non-supporting position in FIG. Thereby, when performing the maintenance work of the laser processing apparatus 22, it can prevent that the leg | foot part 18 protrudes and obstructs work.

  As shown in FIG. 2, since the laser processing apparatus 22 is completely surrounded by the assembly of the light shielding partition 2, the invisible light laser beam that may be oscillated from the laser processing apparatus 22 is completely shielded during the maintenance operation. be able to.

  Thereby, it is possible to reliably prevent the invisible light laser beam from being accidentally incident on the human eyes existing in the vicinity. An operator who performs maintenance work of the laser processing apparatus performs work by wearing goggles that shield the invisible laser beam.

  The light shielding partition 2 is preferably formed of, for example, aluminum having a thickness of about 2 mm, black alumite, or the like. Although it can be formed by resin molding, in this case, it is preferable to insert mold metal screws into the screw holes 12 and 14.

  Referring to FIG. 4, a perspective view of the light shielding partition 2A according to the second embodiment of the present invention is shown. In the description of this embodiment and other embodiments, the same components as those of the first embodiment shown in FIG. 1 are denoted by the same reference numerals, and the description thereof is omitted to avoid duplication.

  The light shielding partition 2A is made of the same material as the light shielding partition 2 of the first embodiment, and has a plate-like panel portion 4 and an engagement extending in the vertical direction integrally formed with the panel portion 4 at one end of the panel portion 4. And an engaged portion 28 that is formed integrally with the panel portion 4 and extends in the vertical direction.

  The engaging portion 26 has a semicylindrical shape, and the engaged portion 28 also has a semicylindrical shape. An engagement piece 30 having a round hole 32 is fixed to the panel portion 4 so as to protrude into the engagement portion 26. On the other hand, two fixing pieces 34 are fixed to the panel portion 4 adjacent to the engaged portion 28 by fixing portions 36, and each fixing piece 34 has a screw hole 42 through a hinge 38. A piece 40 is attached.

  A plurality of light shielding partitions 2A configured as described above are used to surround the laser processing apparatus 22 as shown in FIG. 5 during the maintenance of the laser processing apparatus 22. An enlarged view of a C portion in FIG. 5 is shown in FIG. 6A, an enlarged view of a D portion is shown in FIG. 6B, and an enlarged view of an E portion is shown in FIG. 6C.

  As shown in FIG. 6 (A), the light shielding partitions 2A in the portion C are joined to each other by overlapping the engaging portion 26 and the engaged portion 28 and passing the bolt through the round hole 32 of the engaging piece 30. The engaging portion 26 and the engaged portion 28 are fixed by screwing into the 40 screw holes 42.

  As shown in FIG. 6 (B), the light shielding partitions 2A in the D portion are arranged so that the adjacent light shielding partitions 2A are arranged at substantially right angles, and the engaging portion 26 and the engaged portion 28 are partially overlapped. . The engaged piece 40 is bent at a substantially right angle with respect to the fixed piece 34, and the bolt is screwed into the screw hole 42 of the engaged piece 40 through the round hole 32 of the engaging portion 30. The engaging part 28 is fixed.

  As shown in FIG. 6C, the light shielding partitions 2A in the E portion are arranged so that the adjacent light shielding partitions 2A form an obtuse angle, and the engaging portion 26 and the engaged portion 28 are partially connected. The engaging portion 26 and the engaged portion 28 are fixed by overlapping and screwing the bolt into the screw hole 42 of the engaged piece 40 through the round hole 32 of the engaging piece 30.

  When assembling, the fixing portion 36 is loosened so that the fixing piece 34, the hinge 38, and the engaged piece 40 are rotated to a position that does not interfere with the assembly with the fixing portion 36 as a rotation axis. Is preferred.

  Even when a plurality of light-shielding partitions 2A of this embodiment are used and assembled so as to surround the periphery of the laser processing apparatus 22 as shown in FIG. Can be realized.

  Referring to FIG. 7, a perspective view of a light shielding partition 2B according to a third embodiment of the present invention is shown. The light shielding partition 2B of the present embodiment is formed from an iron plate. The light-shielding partition 2 </ b> B includes a plate-like panel portion 4, a cylindrical engagement portion 46 formed integrally with the panel portion 4 at one end of the panel portion 4, and a panel portion at the other end of the panel portion 4. 4 has a semi-cylindrical engaged portion 48 that is formed integrally with 4 and extends in the vertical direction.

  The cylindrical engaging portion 46 is magnetized at a plurality of locations. Alternatively, a magnet (not shown) is disposed in the cylindrical engagement portion 46. Cutouts 50 are formed on both sides of the lower end portion of the panel portion 4, and the non-supporting position (storage position) shown in FIG. A foot 52 is attached so as to be rotatable between the supporting position shown in FIG.

  In order to surround the laser processing apparatus 22 using a plurality of light shielding partitions 2B of the present embodiment, the engaging portion 46 of the light shielding partition 2B is engaged with the engaged portion 48 of the adjacent light shielding partition 2B, The engaging part 46 and the engaged part 48 are coupled by magnetic force.

  In the light-shielding partition 2B of this embodiment, the engaging portion 46 and the engaged portion 48 can be coupled by magnetic force, so that the assembly is very easy. Further, since the engaging portion 46 is cylindrical and the engaged portion 48 is semicylindrical, any shape can be used to surround the laser processing apparatus 22 using the plurality of light shielding partitions 2B. Can be taken to.

  As a modification of the present embodiment, the engaging portion 46 may be formed in a semi-cylindrical shape, and the engaged portion 48 may be formed in a cylindrical shape. Further, the semi-cylindrical engaging portion 48 may be magnetized without magnetizing the cylindrical engaging portion 46.

  Referring to FIG. 9, there is shown a perspective view of the light shielding partition 2C according to the fourth embodiment of the present invention. The light shielding partition 2C of the present embodiment is formed of aluminum or black alumite having a thickness of about 2 mm. Alternatively, it is molded with a synthetic resin having a thickness of about 5 mm.

  The light shielding partition 2 </ b> C has a plate-like panel portion 4, and the engaging portion 56 uses one end portion of the panel portion 4 as it is. An engaged portion 58 that extends integrally with the panel portion 4 in the vertical direction is formed at the other end portion of the panel portion 4. As shown in the enlarged view of the portion F, the engaged portion 58 has three engagement grooves 60, 62, 64 having a U-shaped cross section extending in the vertical direction.

  In order to surround the laser processing apparatus 22 by using a plurality of light shielding partitions 2C, the engaging grooves 56 of either of the engaged portions 58 of the adjacent light shielding partitions 2C are used as the engaging portions 56 of the light shielding partitions 2C. , 64 to assemble.

  Since the engaging portion 56 is inserted into any of the engaging grooves 60, 62, 64 of the engaged portion 58, an invisible light laser beam that may be oscillated from the laser processing apparatus outside the light shielding partition assembly. The risk of leakage is completely prevented. Since the light-shielding partition 2C of this embodiment can also be assembled with one touch, the assembly is very easy.

FIG. 1A is a perspective view of a light-shielding partition according to the first embodiment of the present invention, and FIG. 1B is a view showing a state in which a foot is stored. It is a top view which shows the state which assembled the light-shielding partition of 1st Embodiment, and enclosed the laser processing apparatus. 3A is an enlarged view of a portion A in FIG. 2, FIG. 3B is an enlarged view of a portion B in FIG. 2, and FIG. 3C is an enlarged view of a bolt connecting portion. It is a perspective view of the light-shielding partition of 2nd Embodiment of this invention. It is a top view which shows the state which assembled the light-shielding partition of 2nd Embodiment, and surrounded the circumference | surroundings of the laser processing apparatus. 6A is an enlarged view of a C portion in FIG. 5, FIG. 6B is an enlarged view of a D portion in FIG. 5, and FIG. 6C is an enlarged view of an E portion in FIG. It is a perspective view of the light-shielding partition of 3rd Embodiment of this invention. FIG. 8 (A) is a diagram showing the foot in the stowed state, and FIG. 8 (B) is a diagram showing the foot support position. It is a perspective view of the light-shielding partition of 4th Embodiment of this invention.

Explanation of symbols

2, 2A, 2B, 2C Light-shielding partition 4 Panel portion 6 Engagement portion 8 Engagement portion 18 Foot portion 22 Laser processing device 26 Engagement portion 28 Engagement portion 30 Engagement piece 40 Engagement piece 46 Engagement portion 48 engaged portion 56 engaging portion 58 engaged portion 60, 62, 64 engaging groove

Claims (4)

A light-shielding partition having a plate-like panel portion,
A vertically extending engagement portion formed integrally with the panel portion at one end of the panel portion, and a vertically engaged portion formed integrally with the panel portion at the other end of the panel portion. And
When the engaged portion of the light shielding partition having the same shape adjacent to the engaging portion is engaged with the engaging portion, the light is completely blocked by the engaging portion and the engaged portion. A shading partition.   The light shielding partition according to claim 1, wherein the engaging portion has a bent surface extending in a vertical direction, and the engaged portion has a bent surface extending in the vertical direction and corresponding to the bent surface. A light-shielding partition assembly assembled so as to surround a desired location using a plurality of light-shielding partitions according to claim 1 or 2,
The engaging portion and the engaged portion of each light shielding partition each have a connecting portion that connects adjacent light shielding partitions;
Each of the light shielding partitions has a foot portion that is disposed so as to be selectively movable between a supporting position for allowing the light shielding partition to stand on its own and a non-supporting position,
In the process of assembling a plurality of light shielding partitions so as to surround the desired portion, the foot is positioned at a support position, and after the assembly of the light shielding partition is completed, the foot is positioned at an unsupported position.   The light shielding partition assembly according to claim 3, wherein the connecting portion connects the engaging portion and the engaged portion by magnetic force.

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