JP2009231219A - Mass spectroscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mass spectroscope capable of highly-efficiently performing mass spectrometry of a material to be measured in a simple structure. <P>SOLUTION: The mass spectroscope includes: a main body of the mass spectroscope including a device support for supporting a device which has a surface on which a metallic body capable of exciting plasmon through irradiation with a laser beam is formed and attaches the material to be measured to the surface, a vacuum chamber in which the device support is fixed, a photoirradiation means which irradiates the surface of the device with a laser beam, thereby ionizing a measurement sample adhering to the surface and desorbing it from the surface, and a detecting means which detects the mass of the measurement sample from time of flight of the measurement sample, desorbed from the surface of the device and then ionized; and a plurality of front chamber units. Each front chamber unit is a vacuum system independent from the main body of the mass spectroscope and the other front chamber units; and each sets and collects the device in the main body of the mass spectroscope, thereby solving the problem. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a mass spectrometer that detects a substance to be measured.

  The mass spectrometry used for the identification of the measurement target substance includes mass spectrometry (irradiation of the measurement target substance with laser light, ionization and desorption of the measurement target substance, and detection of the desorbed substance by mass ( MS, Mass Spectrometry).

As a method for ionizing a measurement target substance in this mass spectrometry, for example, as described in Non-Patent Document 1, MALDI method (matrix-assisted laser desorption ionization), There is a SALDI method (surface-assisted laser desorption ionization).
The MALDI method irradiates a sample mixed with a measurement target substance in a matrix (eg, sinapinic acid or glycerin), absorbs the energy of the irradiated light in the matrix, vaporizes the measurement target substance together with the matrix, Furthermore, it is a method of ionizing the measurement target substance by generating proton transfer between the matrix and the measurement target substance.
In addition, the SALDI method is a method in which a sample to be measured is ionized directly on the surface of the substrate without using a matrix and having the same function as the matrix on the surface of the substrate on which the sample is placed. Non-Patent Document 1 describes a DIOS method in which a hole having a size of several hundred nm is formed as a substrate and a porous silicon plate is used.

  In Patent Document 1, at least a part of a surface (that is, a detection surface) on which a measurement target substance is placed is a rough metal surface that can excite localized plasmons by being irradiated with laser light. Using a mass spectrometry substrate, irradiate the detection surface of the mass spectrometry substrate with laser light, detach the measurement target substance from the detection surface, and capture the measurement target substance detached from the detection surface, thereby measuring the measurement target substance. A mass spectrometer for analyzing the mass of is described.

Patent Document 2 discloses an analysis apparatus for analyzing a sample such as an X-ray microanalyzer or an ion microanalyzer in a vacuum, including an analysis apparatus main body, a preliminary exhaust chamber, an analysis apparatus main body, and a preliminary exhaust chamber. An analyzer having a gate valve for partitioning is described.
When the sample is set in the analyzer body, this analyzer closes the gate valve and opens the preliminary exhaust chamber, carries the sample into the preliminary exhaust chamber, closes the preliminary exhaust chamber and exhausts, and then opens the gate valve. When transporting the sample into the analyzer main body by external operation and taking out the sample from the analyzer main body, the sample can be exchanged while keeping the inside of the analyzer main body in a vacuum by taking out the sample in the opposite procedure. It can be carried out.
Further, Patent Document 2 is provided with detection means for detecting the open / closed state of the gate valve in order to prevent the sample exchange means for moving the sample from the outside due to erroneous operation of the gate valve from being damaged. It also describes controlling the operation of the gate valve according to the result.

ANALYTILAL CHAMISTRY Volume 77 Number 16 5364-5369 Japanese Patent Laid-Open No. 2007-171003 Utility Model Registration No. 2519083

Here, since the mass spectrometer which performs mass spectrometry in the vacuum state described in Non-Patent Document 1 and Patent Document 1 needs to place the sample in the vacuum state apparatus, in order to replace the sample However, after the inside of the apparatus is opened to the atmosphere and the sample is carried into the apparatus, the inside of the apparatus is evacuated, and there is a problem that it takes time to replace the sample.
On the other hand, like the analyzer described in Patent Document 2, by providing a preliminary exhaust chamber (that is, a front chamber) connected to the analyzer main body, the vacuum state outside the analyzer main body is maintained. The sample can be exchanged. Specifically, at the time of sample replacement, only the preliminary exhaust chamber having a volume smaller than that of the analyzer main body is opened to the atmosphere, the sample is replaced, the preliminary exhaust chamber is evacuated, and the sample is then transferred from the preliminary exhaust chamber to the analyzer main body. Can be transported.
As a result, it is possible to reduce the time required to establish a predetermined vacuum state after opening to the atmosphere, and measurement can be performed in a short time.

  However, even in the apparatus described in Patent Document 2, since a certain time is required until the preliminary exhaust chamber is opened to the atmosphere and a predetermined vacuum state is set, there is a limit to time reduction, and high throughput, that is, more It is difficult to use in applications that require continuous processing in a short time.

  An object of the present invention is to provide a mass spectrometer capable of solving the problems based on the above prior art and performing mass spectrometry of a measurement target substance with a simple configuration and high efficiency.

  In order to solve the above-described problems, the present invention provides a device for mass spectrometry, which has a surface on which a metal body capable of exciting plasmons by being irradiated with laser light is formed, and attaches a measurement target substance to the surface. A device support to be supported, a vacuum chamber in which the device support is fixed, a surface of the device for mass spectrometry is irradiated with laser light to ionize a measurement sample attached to the surface, and the surface A plurality of analyzer main bodies each having a light irradiation means for desorbing from the surface, and a detection means for detecting the mass of the measurement sample from the time of flight of the measurement sample desorbed and ionized from the surface of the device for mass spectrometry, Each of the front chamber units includes a front chamber connected to the vacuum chamber, the front chamber unit having a mounting portion on which the device for mass spectrometry is mounted, and the vacuum chamber. And a gate capable of blocking the flow of air between the vacuum chamber and the front chamber, and the mass spectrometry mounted on the mounting portion. A device is set on the device support, and includes a device transport mechanism for collecting the device for mass spectrometry set on the device support in the front chamber, and an air pressure adjusting mechanism for bringing the front chamber into a vacuum state. In addition, the present invention provides a mass spectrometer characterized by being a vacuum system independent of the analyzer main body and other front chamber units.

Here, the mass spectrometer includes a control unit that controls a transport operation of the device transport mechanism and an opening / closing operation of the gate, and the control unit is configured to control the device for mass spectrometry placed on the placement unit. It is preferable to set on the device support and collect the device for mass spectrometry set on the device support in the front chamber.
The air pressure adjusting mechanism includes a vacuum pump common to the plurality of front chamber units, a valve connecting the vacuum pump and the front chamber of each front chamber unit, and an on-off valve provided for each valve. It is preferable.

Moreover, it is preferable that the said light irradiation means has a polarization adjustment mechanism which adjusts the polarization direction of the said laser beam.
Here, it is preferable that the light irradiation unit causes the laser light to be incident at a predetermined angle with respect to the surface of the device for mass spectrometry.
Moreover, it is preferable that the said light irradiation means injects the said laser beam perpendicularly with respect to the surface of the said device for mass spectrometry.

The polarization adjusting mechanism preferably has a λ / 2 plate, and preferably has a Babinet soleil plate.
The polarization adjustment mechanism is preferably a mechanism that rotates a light source that emits the laser light.
Moreover, it is preferable that the said light irradiation means further has an operation part which operates the said polarization adjustment mechanism remotely.

  According to the present invention, while performing mass spectrometry of the mass spectrometry device of one anterior chamber unit, the other anterior chamber units can prepare for measurement such as installation of the mass spectrometry device. Thereby, the space | interval of the measurement of the device for mass spectrometry by an analyzer main body can be shortened, and mass spectrometry can be performed with high throughput.

  A mass spectrometer according to the present invention will be described in detail based on an embodiment shown in the accompanying drawings.

FIG. 1 is a front view showing a schematic configuration of an embodiment of a mass spectrometer of the present invention, and FIG. 2 is a view taken along the line II-II in FIG.
As shown in FIGS. 1 and 2, the mass spectrometer 8 is a time-of-flight mass spectrometer (TOF) that analyzes the mass of a substance by flying the substance desorbed from the mass spectrometry device 11 by a predetermined distance. -MS), the analyzer main body 10, the first front chamber unit 50a, the second front chamber unit 50b, the third front chamber unit 50c, and the fourth front chamber unit 50d (hereinafter simply referred to as “four fronts”). And a control unit 80 that controls the operation of the four front chamber units.

Here, the device for mass spectrometry (hereinafter, also simply referred to as “device”) 11 is a plate-like member on which a metal body capable of exciting plasmons by being irradiated with measurement light is formed in the vacuum chamber 12. Has been placed. In addition, the measurement target substance M is attached (or placed) on the surface of the device 11 on which the metal body capable of inducing plasmons is formed.
The device 11 is carried into each of the four front chamber units, set from each front chamber unit to a predetermined position of the analyzer main body 10, and after the mass of the measurement target substance M is analyzed by the analyzer main body 10, To be recovered.
The detailed configuration of the metal body of the device 11 will be described in detail later.

Hereinafter, the analyzer main body 10 will be described.
The analyzer main body 10 is arranged in the vacuum chamber 12, the vacuum chamber 12, and irradiates the sample attached to the device 11 with the measurement light by irradiating the sample attached to the device 11 with the measurement light. Light irradiation means 14 for desorbing the substance M from the device 11, flight direction control means 16 for causing the desorbed measurement target substance M to fly in a predetermined direction, and the measurement target substance M detected by detecting the desorbed measurement target substance M Mass analyzing means 17 for analyzing the mass of the vacuum chamber 12 and a vacuum pump 18 for bringing the vacuum chamber 12 into a vacuum state.

The vacuum chamber 12 is a chamber in which the inside can be evacuated, and a vacuum pump 18 is connected thereto. The vacuum chamber 12 is evacuated by sucking the air inside by the vacuum pump 18 in a sealed state.
Further, the vacuum chamber 12 is provided with a window 12 a for allowing the light emitted from the light irradiation means 14 to enter the inside of the vacuum chamber 12. The window 12a is formed of a material that has high pressure resistance (can cope with a pressure difference between the outside and the inside of the vacuum chamber 12) and transmits the measurement light L with high transmittance.
Further, the vacuum chamber 12 is connected to four front chamber units described later, and an opening is formed in a portion connected to the front chamber unit.
As the vacuum pump 18, various types of pumps such as a turbo type such as a centrifugal type and an axial flow type and a volume type such as a reciprocating type and a rotary type can be used.

  The device support means 13 supports the device 11 from the surface opposite to the surface on which the measurement target substance M is placed, and fixes the device 11 at a predetermined position. More precisely, the device support means 13 supports the device 11 supported by the support plate 62a and fixes it at a predetermined position by supporting a support plate 62a of the anterior chamber unit described later.

The light irradiation means 14 includes a laser light source 19, a diffusion lens 20a, a collimator lens 20b, and a condenser lens 20c.
The laser light source 19 is a light source that emits laser light having a predetermined wavelength. Here, a pulse laser is preferably used as the laser light source 19.
The diffusion lens 20a is a lens that diffuses the laser light emitted from the laser light source 19 at a predetermined angle, and various lenses can be used.
The collimator lens 20b converts the laser light diffused by the diffusion lens 20a into parallel light.
The condensing lens 20c condenses the light converted into parallel light by the collimator lens 20b.

  The light irradiation means 14 is configured as described above, and the laser light emitted from the laser light source 19 is diffused by the diffusion lens 20a and then converted into parallel light by the collimator lens 20b. The collimated light is collected by the condenser lens 20c, and then enters the vacuum chamber 12 through the window 12a, and illuminates the surface of the device 11 on which the measurement target substance M is placed as measurement light. . Here, the measurement light is incident on the surface of the device 11 at an angle inclined by a predetermined angle.

  The flight direction control means 16 includes a lead grid 23 disposed between the device support means 13 and the mass analysis means 17, a variable voltage source 24 that applies a voltage to the device support means 13 and the lead grid 23, and a grid 23. And a cover 25 that surrounds the flight path of the measurement target substance M on the side of the mass analysis means 17, and applies a certain force to the measurement target substance M detached from the device 11 toward the mass analysis means 17. Let it fly.

The extraction grid 23 is a hollow electrode disposed between the device 11 and the mass spectrometry means 17 so as to face the surface of the device 11.
The variable voltage source 24 is connected to the device support means 13 and the extraction grid 23, and applies an arbitrary voltage to the device support means 13 and the extraction grid 23, respectively. By applying an arbitrary voltage to the device support means 13 and the extraction grid 23, a predetermined electric potential difference is formed between the device support means 13 and the extraction grid 23 to form a predetermined electric field. Thereby, a predetermined electric field is formed between the device 11 placed on the device support means 13 and the drawer grid 23.
The cover 25 is a hollow cylindrical member. The cover 25 is disposed between the drawer grid 23 and the mass analyzing means 17 so that the cylindrical axis is parallel to the flight path of the measurement target substance M and surrounds the flight path of the measurement target substance M. The end of the cover 25 on the side of the drawer grit 23 is close to the drawer grit 23, and the end on the side of the mass analyzer 17 is in contact with a detector 26 of the mass analyzer 17 described later.

  The flight direction control unit 16 forms an electric field between the device support unit 13 and the extraction grid 23 by applying a voltage from the variable voltage source 24, and applies a certain force to the measurement target substance M desorbed from the device 11. Act. The measurement target substance M to which a certain force is applied by the electric field is pulled out from the device 11 and flies at a predetermined acceleration to the grit 23 side. Further, the flying measurement target substance M passes through the hollow portion of the cover 25 and flies to the mass analysis means 17.

The mass spectrometric means 17 irradiates the measurement light, is desorbed from the surface of the device 11, detects the measurement target substance M that has passed through the extraction grid 16, and the detection value of the detector 26. An amplifier 27 to be amplified and a data processing unit 28 for processing an output signal from the amplifier 27 are provided. The detector 26 is disposed inside the vacuum chamber 12, and the amplifier 27 and the data processing unit 28 are disposed outside the vacuum chamber 12.
For example, a multi-channel plate (MCP) can be used as the detector 26.
Based on the detection result detected by the detector 26, the mass analyzer 17 detects the mass spectrum of the measurement target substance M by the data processing unit 28 and detects the mass (mass distribution) of the measurement target substance.
The analyzer main body 10 is basically configured as described above.

Next, the first front chamber unit 50a, the second front chamber unit 50b, the third front chamber unit 50c, and the fourth front chamber unit 50d will be described.
As shown in FIG. 2, the first front chamber unit 50a, the second front chamber unit 50b, the third front chamber unit 50c, and the fourth front chamber unit 50d are arranged in the chamber 12 on the side where the device support means 13 is fixed. It is connected to the outer surface. Further, the four front chamber units are arranged on a circle centering on the device support means 13 and spaced apart from each other by a predetermined distance.
Here, the four front chamber units differ only in the arrangement position with respect to the chamber 12, and the basic configuration is the same. Therefore, the first front chamber unit 50a will be described below as a representative.

FIG. 3 is a perspective view showing a schematic configuration of the first anterior chamber unit a.
As shown in FIGS. 2 and 3, the first front chamber unit 50a includes a front chamber 52a, an external gate 54a, a gate 56a, a device transport mechanism 58a, and an air pressure adjusting mechanism 60a.
The front chamber 52 a is a chamber that can be evacuated, and is connected to the chamber 12. Further, the front chamber 52 a has a first opening 72 formed on a surface facing the surface connected to the chamber 12, and a second opening 74 corresponding to the opening of the chamber 12 on the surface connected to the chamber 12. Is formed.

The external gate 54a is an open / close door that is arranged corresponding to the first opening 72 of the front chamber 52a and switches between opening and sealing of the first opening 72. By moving the external gate 54a from the first opening 72 and opening the first opening 72, the device 11 can be carried into the front chamber 52a from the outside, and the device 11 inside the front chamber 52a can be carried out from the front chamber 52a. it can. Further, by sealing the first opening 72 with the external gate 54a, the flow of air between the front chamber 52a and the outside can be blocked.
Here, as the external gate 54a, various doors such as a door rotating around one hinge, a double door, a sliding door, and the like can be used.

The gate 56a is an open / close door that is arranged corresponding to the connecting portion between the vacuum chamber 12 and the front chamber 52a, that is, the second opening 74, and switches between opening and sealing of the second opening 74. The gate 56a is an electric door or the like that can be opened and closed remotely, and can be operated from the outside of the vacuum chamber 12 and the front chamber 52a.
By moving the gate 56a from the second opening 74 and opening the second opening 74, the device 11 is carried into the vacuum chamber 12 from the front chamber 52a, and the device 11 inside the vacuum chamber 12 is moved from the vacuum chamber 12 to the front chamber. It can be carried out to 52a. Further, by sealing the second opening 74 with the gate 56a, the air flow between the vacuum chamber 12 and the front chamber 52a can be blocked.

  The front chamber 52a, the external gate 54a, and the gate 56a are configured as described above. The external gate 54a seals the first opening 72, and the gate 56a seals the second opening 74. It can be in a sealed state. Further, the external gate 54a opens the first opening 72 and the gate 56a seals the second opening 74, so that only the front chamber 52a can be opened to the atmosphere while the vacuum state of the vacuum chamber 12 is maintained. The device can be carried into the front chamber 52a from the outside. Further, the external gate 54a seals the first opening 72, and the gate 56a opens the second opening 74, so that the vacuum chamber 12 and the front chamber 52a can be connected without entering air from the outside. The device 11 can be moved from the front chamber 52 a to the vacuum chamber 12 or from the vacuum chamber 12 to the front chamber 52.

The device transport mechanism 58a includes a support plate 62a and an insertion rod 64a.
The support plate 62 a is a disk-shaped member that can pass through the second opening 72. The support plate 62a has the device 11 mounted on the surface thereof and supports the mounted device 11.
The insertion rod 64 a is a rod-like member that is inserted into the surface of the front chamber 52 in which the first opening 72 is formed in a state that allows sliding relative to the front chamber 52. A support plate 62a is fixed to the end of the insertion rod 64a on the center side of the vacuum chamber 12. Further, the insertion rod 64 a is inserted into the front chamber 52 so that air does not leak from the contact portion with the front chamber 52 even when the insertion rod 64 a is slid with respect to the front chamber 52.
The device transport mechanism 58a is configured as described above, and the support plate 62a is moved from the front chamber 52 to the device support means 13 by pushing the insertion rod 64a toward the center of the chamber 12 or pulling it out to the opposite side. Move.
Therefore, the device 11 is moved from the front chamber 52 to the device support means 13 by performing the above operation with the device 11 placed on the support plate 62a, and the device 11 is set on the device support means 13. The device 11 set on the device support means 13 can be collected in the front chamber 52.
The device transport mechanism 58a is not limited to the above configuration, and various transport mechanisms can be used. For example, a belt transport mechanism may be used.

The air pressure adjusting mechanism 60a includes a vacuum pump 66, a pipe 68a, and an air valve 70a.
The vacuum pump 66 is a pump of various types such as a centrifugal type such as a centrifugal type or an axial flow type, and a volume type such as a reciprocating type or a rotary type.
The pipe 68 a is a pipe that connects the vacuum pump 66 and the front chamber 52.
The air valve 70a is a valve disposed on the pipe 68a.
The air pressure adjusting mechanism 60a is configured as described above, and by driving the vacuum pump 66 with the air valve 70a opened, the air in the front chamber 52 can be sucked and the air pressure can be lowered. Even when the vacuum pump 66 is driven, the air in the front chamber 52 is not sucked when the air valve 70a is closed.
Here, the vacuum pump 66 is a single pump common to the four front chamber units, and the corresponding front chamber is switched by switching the opening and closing of the air valve 70a disposed on the pipe 68a of each front chamber unit. Adjust the air pressure in the unit.
The front chamber unit 52 is basically configured as described above.

Hereinafter, the operation of the analyzer apparatus 8 will be described to explain the present invention in more detail.
First, a device measurement operation by the first front chamber unit 50a and the analyzer main body 10 will be described.

In the front chamber unit 50a, the external gate 54a opens the first opening 72 in a state where the second opening 74 is sealed by the gate 56a.
Next, the device 11 is placed on the support plate 62a in the front chamber 52a, the external gate 54a is closed, and the front chamber 52 is sealed.
Next, the valve 68a is opened, and the air in the front chamber 52 is sucked into a predetermined vacuum state.
Next, when the inside of the front chamber 52 is in a predetermined vacuum state, the gate 56a is opened, the insertion rod 64a is inserted into the chamber center side, and the support plate 62a is moved onto the device support means 13.

When the support plate 62a on which the device 11 is placed is placed on the device holding unit 13 from the anterior chamber unit 50a, the analyzer main body 10 starts mass analysis of the measurement target substance M on the device 11.
At this time, the inside of the chamber 12 is in a predetermined vacuum state by the vacuum pump 18. The front chamber unit to which the device 11 is supplied is also in a predetermined vacuum state because the first opening is sealed and sealed by the external gate 54a. Therefore, the chamber 12 can maintain a predetermined vacuum state even when the gate 56a is opened and connected to the front chamber unit.

First, the analyzer main body 10 applies a predetermined voltage from the variable voltage source 24 to the device support means 13 and the extraction grid 23, emits measurement light from the light irradiation means 14 according to a predetermined start signal, and emits measurement light to the device 11. Irradiate.
By irradiating the measurement light on the surface of the device 11 on which the measurement target substance M is placed, an enhanced electric field due to plasmons is formed on the surface of the device 11, and the light of the measurement light enhanced by the enhanced electric field. The measurement target substance M is desorbed from the measurement region by energy.

The desorbed measurement target substance M is extracted and accelerated in the direction of the extraction grid 16 by the electric field formed between the device support means 13 (or the device 11) and the extraction grid 23, and the center hole of the extraction grid 23 is accelerated. The air travels through the hollow portion of the cover 25 substantially straight in the direction of the detector 26, reaches the detector 26, and is detected.
Further, the flying speed of the analyte M after desorption depends on the mass of the substance, and the smaller the mass, the higher the speed, so that the detector 26 reaches the detector 26 in order from the smallest mass.

An output signal from the detector 20 is amplified to a predetermined level by the amplifier 27 and then input to the data processing unit 28.
The data processing unit 28 receives a synchronization signal in synchronization with the start signal, and calculates the flight time of the detected substance based on this synchronization signal and the output signal from the amplifier 28.
Further, the data processing unit 28 derives mass from the flight time and calculates a mass spectrum (mass spectrum). Furthermore, the data processing unit 28 detects the mass of the measurement target substance from the calculated mass spectrum and identifies the measurement target substance.
The analyzer main body 10 detects the mass of the measurement target substance M as described above.

When the mass analysis in the analyzer main body 10 is completed, the insertion rod 64a is moved away from the center of the chamber 12, and the support plate 62a is recovered in the front chamber 52a.
When the support plate 62a is recovered in the front chamber 52a, the second opening 74 is sealed by the gate 56a.
Thereafter, after the inside of the front chamber 52a is returned to the atmospheric pressure state, the first opening 72 is opened by the external gate 54a, and the device 11 for which the mass analysis is completed is taken out.
Thereafter, a new device 11 is placed on the support plate 62a, and the above process is repeated to perform mass analysis of the measurement target substance M attached to the device 11.
One anterior chamber unit and the analyzer main body perform mass analysis of the measurement target substance placed on the device 11 as described above.

Here, the mass spectrometer 8 includes one analyzer main body 10 and four anterior chamber units. Hereinafter, the order of loading the device 12 into the four front chamber units and moving the device 11 from each front chamber unit into the chamber 12 will be described.
Here, FIGS. 4A to 4C are process diagrams showing the operation of the mass spectrometer 8, respectively. In addition, illustration of the control part 80 was abbreviate | omitted in FIG. 4 (A)-(C).

  First, as shown in FIG. 2, when the device 11a of the first anterior chamber unit 50a is supported on the device support means 13 of the analyzer main body 10 and mass spectrometry is performed, the second anterior chamber unit 50b Another device 11b before analysis is supported in the front chamber 52b, and the internal air is sucked by the vacuum pump 66. In the third front chamber unit 50c, the external gate 54c is opened, and the device is exchanged. In the fourth front chamber unit 50d, the device 11d subjected to mass analysis in the analyzer main body 10 is supported in the front chamber 52d before the device 11 of the first front chamber unit 50a, and the inside of the front chamber 52d is evacuated. The air is inhaled to return from the state to the atmospheric pressure state.

  Thereafter, when the mass analysis of the device 11a of the first front chamber unit 50a is completed, as shown in FIG. 4A, the device 11a is collected in the front chamber 52a, and the gate 54a is closed. At this time, in the second front chamber unit 50b, the suction of air by the vacuum pump 66 is finished, and the inside is in a predetermined vacuum state. In the third front chamber unit 50c, the device replacement operation is completed, the new device 11c is supported in the front chamber 52c, the external gate 56c is closed, and the vacuum pump 66 sucks the air inside the front chamber 52c. Has been started. In the fourth front chamber unit 54d, the front chamber 52d is in an atmospheric pressure state, and the external gate 56d is opened.

  Thereafter, the gate 56 of the second front chamber unit 50b is opened, the device 11b is moved onto the device support means 13, and the mass analysis of the device 11b is performed as shown in FIG. 4B. At this time, in the third front chamber unit 50c, the device 11c is supported in the front chamber 52c, and the internal air is sucked by the vacuum pump 66. In the fourth front chamber unit 50d, the external gate 54d is opened, and the device is exchanged. Moreover, in the 1st front chamber unit 50a, inhalation is carried out in order to return the inside of the front chamber 52a from a vacuum state to an atmospheric pressure state.

Thereafter, when the mass analysis of the device 11b of the second front chamber unit 50b is completed, the device 11b is collected in the front chamber 52b and the gate 54b is closed as shown in FIG. 4C. At this time, in the third front chamber unit 50c, the suction of air by the vacuum pump 66 is finished, and the inside is in a predetermined vacuum state. In the fourth front chamber unit 50d, the device replacement operation is completed, the new device 11d ′ is supported in the front chamber 52d, the external gate 56d is closed, and the air inside the front chamber 52d by the vacuum pump 66 is closed. Suction has begun. In the first front chamber unit 54a, the inside of the front chamber 52a is in an atmospheric pressure state, and the external gate 56a is opened.
Further, thereafter, similarly, the mass analysis of the device 11c of the third anterior chamber unit 50c is performed, and thereafter the mass analysis of the device 11d ′ of the fourth anterior chamber unit 50d is performed. Perform mass analysis of the newly mounted device.
The mass spectrometer 10 performs mass analysis of the measurement target substance placed on each device as described above.

Thus, according to the mass spectrometer 10, one analyzer main body 10 and four front chamber units are provided, and each front chamber unit is set to an independent vacuum system (that is, each front chamber unit has a vacuum state and a large vacuum state). By adopting a configuration capable of switching between the atmospheric pressure state), the other anterior chamber unit can prepare for measurement while performing the mass analysis of the device mounted on the one anterior chamber unit.
Thereby, when the measurement of the device of one anterior chamber unit is completed, the measurement of the device of the next anterior chamber unit can be started. In addition, since any of the front chamber units is connected to the chamber after being in a vacuum state, the chamber can always maintain a vacuum state.
As a result, as soon as the measurement of one device is completed, the next device can be set immediately, and further, since the inside of the chamber can be maintained in a vacuum state, the interval between the measurements can be shortened. It is possible to perform mass spectrometry of devices well. That is, mass spectrometry can be performed with high throughput.

  Here, in the mass spectrometer 10, four front chamber units are provided for one analyzer main body 10. However, the number of front chamber units is not particularly limited. Five may be sufficient.

  Further, in the mass spectrometer 10, only one device is placed in the anterior chamber of one anterior chamber unit, but the present invention is not limited to this, and a plurality of devices are placed in the anterior chamber of one anterior chamber unit. It may be arranged. When a plurality of devices are placed in the front chamber of one front chamber unit, the device in the front chamber is set on the device support means by the device transport mechanism, and when the measurement is completed, the device is placed in the front chamber. It may be repeated to collect and then set another device on the device support.

Here, it is preferable that the mass spectrometer 10 automatically controls the transport operation of the device transport mechanism and the gate opening / closing operation by the control unit 80, and automatically transports the device and opens / closes the gate by the device transport mechanism. Here, when the device is automatically transported, a drive mechanism for inserting and withdrawing the insertion rod of the device transport mechanism is provided, and the operation is controlled by the control unit 80 so that the device is supported from the front chamber by the device support. Can be moved to.
In this way, the device transport mechanism and the gate are automatically transported to open and close the gate, reducing the work performed by the operator, and the external operation unit and vacuum required for manual operation. Since a connecting member that connects the inside of the apparatus to the outside of the apparatus is necessary, it is possible to prevent air leakage from the portion where the connecting member is disposed, and to easily maintain the pressure in the chamber and the front chamber be able to.

  Further, in the mass spectrometer 10, the support plate of the device transport mechanism serves as both the placement unit in the front chamber and the transport mechanism, and the device 11 is placed on the support plate, and the entire support plate is placed on the device support. However, the present invention is not limited to this, and the transport mechanism and the placement unit are separately provided, and only the device placed on the placement unit is transported by the transport mechanism and placed on the device support means. You may do it.

The front chamber unit 50 preferably further includes a drying mechanism for drying the device. Here, examples of the drying mechanism include an ultrasonic vibrator and a heating mechanism.
By promoting the drying of the device by the drying mechanism, the degree of vacuum in the front chamber can be increased in a shorter time.

  Further, like the mass spectrometer 10, as a device, a plate-like member on which a metal body that can excite plasmon by being irradiated with measurement light is used, and the device to be measured is excited while plasmon is excited in the device. In the case of the ionization method, it is preferable to provide a polarization adjustment mechanism in the light irradiation means so that the polarization direction of the measurement light can be adjusted.

FIG. 5 is a front view showing a schematic configuration of another embodiment of the analyzer main body of the mass spectrometer of the present invention. In FIG. 5, the illustration of the control unit 80 is omitted.
Here, since the other configuration is the same as that of the analyzer main body 10 except that the polarization adjusting mechanism 106 is provided in the light irradiation means 104 of the analyzer main body 102 shown in FIG. The same reference numerals are given and description thereof is omitted.
As shown in FIG. 5, the analyzer main body 102 includes a vacuum chamber 12, device support means 13, light irradiation means 104, flight direction control means 16, and mass analysis means 17. In addition, illustration of the control part 80 was abbreviate | omitted in FIG.

  The light irradiation means 104 includes a laser light source 19, a diffusion lens 20 a, a collimator lens 20 b, a condenser lens 20 c, and a polarization adjustment mechanism 106. Here, the laser light source 19, the diffusing lens 20a, the collimator lens 20b, and the condenser lens 20c are the same as those of the light irradiation means 14 shown in FIG.

The polarization adjusting mechanism 106 includes a λ / 2 plate (or “half-wave plate”) 108 and a polarizing plate rotating unit 110, and is disposed between the collimator lens 20b and the condenser lens 20c.
The λ / 2 plate 108 is a polarizing plate that linearly polarizes parallel light. The polarizing plate rotating unit 110 is a rotating unit that rotates the λ / 2 plate 108 about a straight line parallel to the parallel light.
The polarization adjusting mechanism 106 can change the polarization direction of the parallel light to an arbitrary direction by rotating the λ / 2 plate 108 by the polarizing plate rotating unit 110.

  The light irradiation means 104 is configured as described above, and the laser light emitted from the laser light source 19 is diffused by the diffusion lens 20a and then converted into parallel light by the collimator lens 20b. Two plates 108 are polarized. The polarized light is collected by the condenser lens 20c, and then enters the vacuum chamber 12 through the window 12a, and illuminates the surface of the device 11 on which the measurement target substance M is placed as measurement light.

  Like the mass spectrometer 100, the polarization adjustment mechanism 106 is provided, the polarization direction of the measurement light can be adjusted, and the energy generated on the device 11 (for the ionization of the measurement target substance by changing the polarization direction of the measurement light). (Contributing energy) can be changed.

For example, in the case of using a fine structure in which metal protrusions are closely arranged as a device, by setting the polarization direction of the measurement light in a direction parallel to the surface of the substrate, a place with a strong plasmon enhancement (hot spot) on the surface of the device. ) Can be generated.
Here, the hot spot is a phenomenon in which the plasmon enhancement is strong and a very enhanced electric field is formed in a region where metals generating localized plasmons are close to several tens of nm or less. By making the direction parallel to the surface of the substrate, localized plasmons can be suitably generated at the adjacent protrusions.
Thus, by increasing the intensity of the enhanced electric field, the energy generated on the device can be increased, and the measurement target substance can be ionized with measurement light having a low intensity.

  In addition, for example, by making the polarization direction of the measurement light perpendicular to the substrate, more heat energy can be generated than energy generated due to plasmons, and measurement is performed using thermal energy as the dominant energy. The target substance can be ionized.

As described above, it is possible to perform mass analysis under various conditions (thermal energy, energy type such as energy caused by plasmons, and amount of energy generated) only by adjusting the polarization direction. Thus, by being able to perform mass spectrometry under various conditions, it is possible to change the type of ions generated in the measurement target substance. That is, the substances constituting the measurement target substance can be changed in different structural units (that is, molecules of different units). In other words, detection is possible, and mass spectrometry can be performed with higher accuracy.
Further, by adjusting the polarization direction according to the type, shape, etc. of the device, excitation efficiency by the measurement light (efficiency for converting the measurement light into energy generated on the device 11) regardless of the type, shape, etc. of the device Can be maximized.

Here, in the mass spectrometer 100, the λ / 2 plate is used as the polarizing element, but the present invention is not limited to this, and various polarizing elements can be used.
Here, it is preferable to use a Babinet Soleil plate as the polarizing element. By using the Babinet Soleil plate, polarization can be performed even when the wavelength of the laser light emitted from the laser light source is changed.
When the polarizing element is a λ / 2 plate and a different laser light wavelength is used, the λ / 2 plate may be replaced according to the wavelength of the laser light. In this case, since a switching mechanism is required, the apparatus configuration is complicated.

  In addition, the polarization adjustment mechanism is not limited to disposing a polarizing element between the collimator lens and the condenser lens, and rotates the laser light source that emits polarized light to adjust the polarization direction of the measurement light. May be.

Here, FIG. 6 is a front view showing a schematic configuration of another embodiment of the analyzer main body of the mass spectrometer of the present invention. In FIG. 6, the control unit 80 is not shown.
Here, since the analyzer main body 122 of the mass spectrometer 120 shown in FIG. 6 is the same as the analyzer main body 102 except for the configuration of the polarization adjusting mechanism 1126 of the light irradiation means 124, the same members are used. The same reference numerals are given to the components, and the description thereof is omitted.
As shown in FIG. 6, the analyzer main body 122 includes a vacuum chamber 12, a device 11, a device support unit 13, a light irradiation unit 124, a flight direction control unit 16, and a mass analysis unit 17.

The light irradiation unit 124 includes a laser light source 19, a diffusion lens 20 a, a collimator lens 20 b, a condenser lens 20 c, and a polarization adjustment mechanism 126. Here, the laser light source 19, the diffusing lens 20a, the collimator lens 20b, and the condenser lens 20c are the same as those of the light irradiation means 104 shown in FIG. The laser light source 19 is a light source that emits laser light polarized in a predetermined direction.
The polarization adjustment mechanism 126 includes a light source support unit 128 and a light source rotation unit 130.
The light source support unit 128 is a support unit that supports the laser light source 19 from the surface opposite to the surface from which the laser light source 19 emits light.
The light source rotating unit 130 is rotatably connected to the light source support unit 128, and is a mechanism that rotates the light source support unit 128 and rotates the laser light source 19 around the optical axis of the laser light emitted from the laser light source 19. is there.

As described above, the polarization direction of the laser light emitted from the laser light source 19 can also be changed by rotating the laser light source 19 by the polarization adjusting mechanism 126, and the polarization direction of the measurement light irradiating the device 11 can be changed. be able to.
Thus, the analyzer main body 122 can also adjust the polarization direction of the measurement light that irradiates the device 11, and can obtain the same effects as the analyzer main body 102 described above.

Here, in any of the analysis apparatus main body 102 and the analysis apparatus main body 122 described above, it is preferable that the polarization adjustment mechanisms 106 and 126 adjust the polarization direction by remote operation (remote control).
That is, it is preferable that the polarization adjustment mechanism 106 remotely performs the rotation operation of the λ / 2 plate 108 by the polarizing plate rotation unit 110, and the polarization adjustment mechanism 126 remotely performs the rotation operation of the laser light source 19 by the light source rotation unit 128. It is preferable to carry out by operation.
Thus, by adjusting the polarization direction by remote control, the polarization direction can be adjusted without touching the inside of the apparatus.

Further, in any of the analysis apparatus main body 10 and the analysis apparatus main body 100 described above, the measurement light is irradiated (incident) with an inclination to the device 11 by a predetermined angle. However, the present invention is not limited to this, and measurement is performed. Light may be incident on the device 11 perpendicularly.
As described above, when the measurement light is incident on the device 11 perpendicularly, mass spectrometry can be performed under various conditions by adjusting the polarization in the direction parallel to the device surface by the polarization control mechanism.
When the measurement light is incident on the device 11 perpendicularly, the extraction grit is disposed at a predetermined angle with respect to the surface of the device, so that the measurement target substance desorbed from the device is not directly above the device. Can fly in the direction.

Next, a metal body that can excite plasmons formed on one surface of the device will be described in detail.
In a region where the measurement target substance M of the device 11 is placed, a fine structure 29 that forms an enhanced electric field when irradiated with measurement light is provided as a metal body that can excite plasmons.
FIG. 7 is a perspective view showing a schematic configuration of the fine structure 29 placed on the surface of the device 11.
As shown in FIG. 7, the fine structure 29 includes a dielectric substrate 32 and a substrate 30 composed of a conductor 34 disposed on one surface of the dielectric substrate 32, and a conductor 34 of the dielectric substrate 32. And a metal body 36 disposed on the surface opposite to the surface on which is disposed.

The substrate 30 includes a dielectric base material 32 formed of a metal oxide body (Al ₂ O ₃ ), and a conductor formed of a non-anodized metal (Al) provided on one surface of the dielectric base material 32. 34. Here, the dielectric substrate 32 and the conductor 34 are integrally formed.
The dielectric base material 32 has a plurality of fine holes 40 having a substantially straight shape (straight tube shape) extending from the surface opposite to the surface on which the conductor 34 is disposed toward the surface on the conductor 34 side. The holes are open.
In the plurality of micro holes 40, the end on the surface opposite to the surface on which the conductor 34 is disposed penetrates to the surface of the dielectric base material 32, and an opening is formed. Does not penetrate to the surface of the dielectric substrate 32. That is, the fine hole 40 is a hole that does not reach the conductor 34. Further, the plurality of micro holes 40 are substantially regularly arranged with a diameter and a pitch smaller than the wavelength of the measurement light.
Here, when using visible light as measurement light, it is preferable that the arrangement pitch of the micropores 40 be 200 nm or less.

The metal body 36 is formed with a filling portion 45 filled in the micro holes 40 of the dielectric base material 32, and protrudes from the surface 20 s of the dielectric base material 32 on the micro holes 40, and has an outer diameter of the filling portion 45. It is composed of a plurality of rod portions 44 each having a protruding portion (that is, a protruding portion) 46 having a larger outer diameter. Here, as a material for forming the metal body 36, various metals that generate localized plasmons can be used, and examples thereof include Au, Ag, Cu, Al, Pt, Ni, Ti, and alloys thereof. . Moreover, you may form the metal body 36 by including 2 or more types of these metals. Moreover, since the electric field enhancing effect can be further increased, the metal body 36 is more preferably formed using Au, Ag, or the like.
The microstructure 29 is configured as described above, and the surface on which the protrusions 46 of the plurality of rod portions 44 of the metal body 36 are disposed is the surface on which the measurement light is irradiated.

Here, a method for manufacturing the fine structure 29 will be described.
8A to 8C are process diagrams illustrating an example of a method for manufacturing the fine structure 29.
First, anodization is performed on a rectangular metal object 48 having a rectangular parallelepiped shape as shown in FIG. Specifically, the anodized metal body 48 is used as an anode, immersed in an electrolyte together with a cathode, and anodized by applying a voltage between the anode and cathode.
Here, carbon, aluminum, or the like is used as the cathode. The electrolytic solution is not limited, and an acidic electrolytic solution containing one or more acids such as sulfuric acid, phosphoric acid, chromic acid, oxalic acid, sulfamic acid, benzenesulfonic acid, and amidosulfonic acid is preferably used.
In the present embodiment, the anodized metal body 48 has a rectangular parallelepiped shape, but the shape is not limited and can be various shapes. Further, it can be used in a form with a support, such as a layer in which a metal body 48 to be anodized is formed on a support.

When the anodized metal body 48 is anodized, as shown in FIG. 8B, an oxidation reaction proceeds in a direction substantially perpendicular to the surface from the surface of the anodized metal body. A metal oxide body (Al ₂ O ₃ ) is formed. The metal oxide body (that is, the dielectric base material 32) generated by anodization has a structure in which a large number of fine columnar bodies 42 having a substantially regular hexagonal shape in a plan view are arranged without gaps.
Each of the fine columnar bodies 42 has a rounded bottom surface, and further has a fine hole 40 extending substantially straight from the surface in the depth direction (that is, the axial direction of the fine columnar body 42) at the substantially central portion. Is opened. The structure of the metal oxide body produced by anodization is Hideki Masuda, “Preparation of mesoporous alumina by anodization and application as a functional material”, Material Technology Vol.15, No.10, 1997, p.34, etc. It is described in.

  Moreover, as an example of suitable anodic oxidation conditions in the case of producing a metal oxide body having an ordered arrangement structure, when oxalic acid is used as an electrolytic solution, an electrolytic solution concentration of 0.5 M, a liquid temperature of 14 to 16 ° C., and an applied voltage of 40 to 40 ± 0.5V or the like. The micropores 40 generated under these conditions have, for example, a diameter of about 30 nm and a pitch of about 100 nm.

Next, the fine hole 40 of the dielectric base material 32 is subjected to electroplating, thereby forming the rod portion 44 including the filling portion 45 and the protruding portion 46 as shown in FIG. 8C.
Here, when electroplating is performed, the conductor 34 functions as an electrode, and the metal is preferentially deposited from the bottom of the fine hole 40 where the electric field is strong. By continuing this electroplating process, the fine holes 40 are filled with metal, and the filling portion 45 of the rod portion 44 is formed. If the electroplating process is continued after the filling portion 45 is formed, the filling metal overflows from the fine holes 40. However, since the electric field near the fine holes 40 is strong, the metal is continuously deposited around the fine holes 40. Then, a protruding portion 46 that protrudes from the surface of the dielectric substrate 32 on the filling portion 45 and has a diameter larger than the diameter of the filling portion 45 is formed.
The fine structure 29 is produced as described above.

In any of the mass spectrometers described above, the device 11 can capture the measurement target substance, and can perform surface modification (capturing member) that can desorb the measurement target substance by irradiation with the measurement light. preferable.
For example, when the measurement target substance is an antigen, the amount of the measurement target substance attached to the surface can be increased by modifying the surface of the fine structure with an antibody that can specifically bind to the antigen. It is possible to improve the sensitivity of mass spectrometry measurement.

FIG. 9A is a cross-sectional view showing a schematic configuration of a microstructure having a surface modification, and FIG. 9B shows a substance to be measured detached from the microstructure shown in FIG. 9A. It is sectional drawing which shows the state which carried out. In FIGS. 9A and 9B, the surface modification R and the components of the surface modification R are enlarged to facilitate visual recognition.
As shown in FIG. 9A, the surface modification R has a first linker function part A that binds to the surface of the fine structure 29 and a second substance that binds to the measurement target substance M on the surface of the fine structure 29. A linker function unit C, and a decomposition function unit B that is interposed between the first linker function unit A and the second linker function unit C and decomposes in an electric field generated by irradiation with measurement light. In the illustrated example, the measurement target substance M is arranged in the vicinity of the measurement region of the device for mass spectrometry via the surface modification R.

  The surface modification R may be one substance that includes all of the first linker function part A, the decomposition function part B, and the second linker function part C, and each of them is made of a different substance. It may be. Further, the first linker function part A and the decomposition function part B, or the decomposition function part B and the second linker function part C may be one substance.

Here, when the device 11 is irradiated with measurement light, localized plasmons are generated on the surface of the fine structure, and an enhanced electric field is generated on the surface of the measurement region. Further, the optical energy of the measurement light is increased in the vicinity of the surface by an enhanced electric field generated on the surface of the measurement region.
The decomposition function part B of the surface modification R is decomposed by this increased energy, and as shown in FIG. 9B, the measurement target surface M is bonded to the second linker function part C, which is the surface of the measurement region. Is desorbed from.

By using surface modification in this way, the measurement target substance can be detached from the surface of the fine structure.
Further, since the measurement target substance M and the fine structure 29 are bonded via the surface modification R, the measurement target substance M can be present away from the surface of the fine structure in the measurement region.
Here, the electric field enhancement effect obtained on the surface of the fine structure is an electric field enhancement effect due to near-field light generated by the localized plasmon, and therefore decreases exponentially with respect to the distance from the surface. . Therefore, as shown in FIG. 9A, when the measurement target substance M exists relatively far from the surface 1s, the optical energy of the measurement light applied to the measurement target substance M is less affected by the electric field enhancement. Can be. That is, the measurement target substance M can be prevented from being damaged by the increased light energy, and highly accurate mass spectrometry can be performed.

  Further, the shape of the fine structure is not limited to the shape of the fine structure 29, and it is sufficient that a convex portion having a size capable of inducing localized plasmon is formed on the substrate. it can.

FIG. 10A is a perspective view illustrating a schematic configuration of another example of the microstructure, and FIG. 10B is a top view of FIG.
A microstructure 80 shown in FIGS. 10A and 10B includes a base 82 and a large number of metal fine particles 84 arranged on the base 82.
The base 82 is a plate-like substrate. The substrate 82 may be formed of a material that can electrically support and support the metal fine particles 84. Examples of the material include silicon, glass, yttrium-stabilized zirconia (YSZ), sapphire, and silicon carbide. It is done.

The large number of fine metal particles 84 are fine particles having a size capable of inducing localized plasmons, and are fixed in a dispersed state on one surface of the substrate 82.
The metal fine particles 84 can be formed of various metals exemplified for the metal body 36 described above. The shape of the metal fine particles is not particularly limited, and may be, for example, a round shape or a rectangular parallelepiped shape.
The fine structure 80 having such a configuration can also generate an enhanced electric field by irradiating the detection surface on which the metal fine particles are arranged with excitation light.

Next, FIG. 11 is a top view illustrating a schematic configuration of another example of the fine structure.
A microstructure 90 shown in FIG. 11 includes a base 92 and a large number of metal nanorods 94 disposed on the base 92.
Here, since the base 92 has the same configuration as the base 82 described above, a detailed description thereof will be omitted.

The metal nanorod 94 has a size capable of inducing localized plasmons, and is a rod-shaped metal nanoparticle having a different minor axis length and a major axis length, and is fixed to one surface of the substrate 92 in a dispersed state. . The metal nanorod 94 has a minor axis length of about 3 nm to 50 nm and a major axis length of about 25 nm to 1000 nm, and the major axis length is smaller than the wavelength of the excitation light. The metal nanorods 94 can be made of the same metal as the metal fine particles described above. In addition, about the detailed structure of a metal nanorod, it describes in Unexamined-Japanese-Patent No. 2007-139612, for example.
Here, the fine structure 90 can be manufactured by the same method as the fine structure 80 described above.
The fine structure 90 having such a configuration can also generate an enhanced electric field by irradiating the detection surface on which the metal nanorods are arranged with excitation light.

Next, FIG. 12A is a perspective view illustrating a schematic configuration of another example of the fine structure, and FIG. 12B is a cross-sectional view of FIG.
A fine structure 95 shown in FIG. 12 includes a base 96 and a large number of fine metal wires 98 arranged on the base 96.
Here, since the base 96 has the same configuration as the base 82 described above, a detailed description thereof will be omitted.

The thin metal wires 98 are linear members having a line width capable of inducing localized plasmons, and are arranged in a lattice pattern on one surface of the base 96. The fine metal wire 98 can be made of the same metal as the metal fine particles and metal bodies described above. The method for producing the metal thin wire 98 is not particularly limited, and can be produced by various methods for producing metal wiring such as vapor deposition and plating.
Here, the line width of the fine metal wire 98 is preferably, for example, 50 nm or less, particularly 30 nm or less. Further, the arrangement pattern of the fine metal wires 98 is not particularly limited. For example, a plurality of fine metal wires may be arranged parallel to each other without intersecting. Further, the shape of the fine metal wire is not limited to a straight line, and may be a curved line.

  The fine structure 95 having such a configuration can also generate an enhanced electric field caused by localized plasmons by irradiating the detection surface on which the fine metal wires are arranged with excitation light.

  Further, the fine structure is not limited to the fine structure 29, the fine structure 80, the fine structure 90, and the fine structure 95 described above, and a combination of protrusions that can induce local plasmons. It is good also as a structure.

  As described above, the mass spectrometer according to the present invention has been described in detail. However, the present invention is not limited to the above embodiment, and various improvements and modifications can be made without departing from the gist of the present invention. Also good.

It is a front view which shows schematic structure of one Embodiment of the mass spectrometer of this invention. It is an II-II arrow directional view of the mass spectrometer shown in FIG. It is a perspective view which shows schematic structure of a front chamber unit. (A)-(C) is process drawing which shows operation | movement of a mass spectrometer, respectively. It is a front view which shows schematic structure of other embodiment of the analyzer main body of the mass spectrometer of this invention. It is a front view which shows schematic structure of other embodiment of the analyzer main body of the mass spectrometer of this invention. It is a perspective view which shows schematic structure of one Embodiment of the microstructure of the device for mass spectrometry of the mass spectrometer shown in FIG. (A)-(C) is process drawing which shows the preparation methods of a fine structure, respectively. (A) is sectional drawing which shows schematic structure of the microstructure with which surface modification was given, (B) is sectional drawing which shows the state which the to-be-measured substance detach | desorbed from the microstructure shown to (A) It is. (A) is a perspective view which shows schematic structure of the other example of a microstructure, (B) is a partial top view of (A). It is a top view which shows schematic structure of the other example of a microstructure. (A) is a perspective view which shows schematic structure of the other example of a microstructure, (B) is sectional drawing of (A).

Explanation of symbols

8, 100, 120 Mass spectrometer 10, 102, 122 Analyzing device body 11 Device for mass analysis 12 Vacuum chamber 12a Window 13 Device support means 14, 104, 124 Light irradiation means 16 Flight direction control means 17 Mass analysis means 18, 66 Vacuum pump 19 Laser light source 20a Diffuse lens 20b Collimator lens 20c Condensing lens 23 Drawer grid 24 Variable voltage source 25 Cover 26 Detector 27 Amplifier 28 Data processing unit 29, 80, 90, 95 Fine structure 30, 82, 92, 96 Base 32 Alumina layer (dielectric base)
34 Conductor 36 Metal body 40 Fine hole 42 Fine columnar body 44 Rod part 45 Filling part 46 Projection part 48 Anodized metal body 50a, 50b, 50c, 50d Front chamber unit 52a Front chamber 54a External gate 56a Gate 58a Device transport mechanism 60a Air pressure adjustment mechanism 62a Support plate 64a Insertion rod 66 Vacuum pump 68a Pipe 70a Air valve 80 Control unit 84 Metal fine particle 94 Metal nanorod 98 Metal fine wire 106, 126 Polarization adjustment mechanism 108 λ / 2 plate 110 Polarizing plate rotation unit 128 Light source support unit 130 Light source rotating part M Substance to be measured

Claims (3)

A device support for supporting a device for mass spectrometry having a surface on which a metal body capable of exciting plasmons by irradiation with laser light is formed, and attaching a measurement target substance to the surface;
A vacuum chamber in which the device support is fixed;
Light irradiation means for irradiating the surface of the device for mass spectrometry with laser light to ionize the measurement sample adhering to the surface and desorb from the surface; and
An analysis apparatus main body having detection means for detecting the mass of the measurement sample from the time of flight of the measurement sample desorbed and ionized from the surface of the device for mass spectrometry;
A plurality of anterior chamber units,
Each anterior chamber unit includes an anterior chamber connected to the vacuum chamber including a placement portion for placing the device for mass spectrometry,
A gate that is installed at a connection portion between the vacuum chamber and the front chamber, and that can block an air flow between the vacuum chamber and the front chamber;
A device transport mechanism for setting the device for mass spectrometry placed on the placement unit on the device support, and collecting the device for mass analysis set on the device support in the front chamber;
A mass spectrometer comprising: an air pressure adjusting mechanism for bringing the front chamber into a vacuum state, and being a vacuum system independent of the analyzer main body and other front chamber units. A control unit that controls a transport operation of the device transport mechanism and an opening / closing operation of the gate;
The said control part sets the said device for mass spectrometry mounted in the mounting part on the said device support body, and collect | recovers the said device for mass spectrometry set in the said device support body to the said front chamber. Item 2. The mass spectrometer according to Item 1.   The air pressure adjusting mechanism includes a vacuum pump common to a plurality of the front chamber units, a valve connecting the vacuum pump and the front chamber of each front chamber unit, and an on-off valve provided for each valve. The mass spectrometer according to 1 or 2.

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