JP2009229139A - Gas analyzer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily grasp visually a change with time of a global measurement results by displaying the change with time of measurement results of sample gas over a wide range. <P>SOLUTION: An analyzer includes a sensor part 21 for ionizing the sample gas, and detection the ion; an analysis part 31 for analyzing the sample gas based on a detection signal from the sensor part 21; and a display control part 33 for displaying a three-dimensional graph using a value based on the measurement results by the analysis part 31, a time, and a value indicating a component in the sample gas respectively as each axis on a screen, and displaying the three-dimensional graph rotatably. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a gas analyzer, and more particularly to a method for displaying a measurement result of a gas analyzer using quadrupole mass spectrometry or the like.

  This type of residual gas analyzer includes a sensor unit having an ionization unit, a mass analysis unit, a detection unit, and an AC generator unit, and an apparatus main body connected to the sensor unit by a cable. Is known (see, for example, Non-Patent Document 1).

  According to the residual gas analyzer, first, the residual gas introduced into the ionization unit is ionized by being affected by the thermal electrons emitted from the high-temperature filament. The generated ions are accelerated and converged by the lens and guided to the mass analyzer. In the mass spectrometer, for example, DC and AC voltages are applied to four cylindrical electrodes (quadrupoles), and ions are screened. The separated ions are detected as a current by the Faraday cup of the detection unit. Since this ion current changes according to the amount (partial pressure) of the residual gas, the residual gas can be accurately measured.

  In the conventional residual gas analyzer, when displaying the pressure distribution for every component contained in the sample gas, one of the horizontal axis and the vertical axis is the atomic mass unit (AMU) axis indicating each component contained in the sample gas. The pressure distribution at each measurement time is displayed two-dimensionally with the other of the horizontal axis and the vertical axis as the pressure axis (see FIG. 11).

  In addition, when displaying the time change of the pressure of a certain component contained in the sample gas, it is displayed in two dimensions with one of the horizontal axis or the vertical axis as the time axis and the other of the horizontal axis or the vertical axis as the pressure axis. . In addition, when displaying the time change of the pressure of several components (for example, AMU18 and 28), the display line (for example, a color, a line type, etc.) of each component is displayed differently (refer FIG. 12).

  However, there is a problem that it is impossible to see the time change of pressure for every component contained in the sample gas. That is, there is a problem that the measurement result cannot be displayed in a graph unless the measurement time or AMU is set. In addition, as described above, when displaying the time change of the pressure of the component, the display line can be displayed differently, but there is a problem that it becomes complicated and difficult to see as the number of components increases.

  Specifically, in the two-dimensional graph display using the AMU axis and the pressure axis, only a predetermined measurement time can be displayed, and it is necessary to set one by one in order to display a graph at a certain measurement time. There is a problem. On the other hand, in the two-dimensional graph display using the time axis and the pressure axis, only a graph for a predetermined AMU can be displayed, and in order to display pressure changes for other AMUs, it is necessary to set AMUs one by one. There is a problem that there is.

Furthermore, in the case where the information can be displayed only for each measurement time or each AMU as described above, there is a problem that it is difficult to grasp the global component change of the residual gas and its pressure change.
Satoshi Ikeda, “Special Feature Paper: Miniature Residual Gas Analyzer PressureMaster RGA Series”, HORIBA Technical Reports, HORIBA, Ltd., March 2004, No. 28, p. 1214

  Therefore, the present invention has been made to solve the above-mentioned problems all at once, displaying a change over time of the measurement result of the sample gas (for example, the pressure of each component in the sample gas) over a wide range, The main intended task is to make it easy to visually grasp temporal changes in global measurement results.

  That is, the gas analyzer according to the present invention includes an ionization unit that ionizes a sample gas, a filter unit that selectively passes ions from the ionization unit, an ion detection unit that detects ions that have passed through the filter unit, An analysis unit that analyzes the sample gas based on a detection signal from the sensor unit, and a three-dimensional graph that has values, time, and values indicating components in the sample gas as axes based on measurement results obtained by the analysis unit And a display control unit that displays the three-dimensional graph in a rotatable manner.

  If it is such, the value (for example, atomic mass unit (AMU)) which shows the value (for example, the pressure (partial pressure) of each component), time, and the component in sample gas based on the measurement result by an analysis part. Since the three-dimensional graph with the respective axes is displayed on the screen, the temporal change in the measurement result (for example, the pressure of each component in the sample gas) can be visually grasped. Further, by displaying the three-dimensional graph in a rotatable manner, the three-dimensional graph can be viewed from all angles, and the measurement result can be more visually grasped. For example, when it is desired to grasp the time change of the pressure of a specific component, even if it is displayed in a three-dimensional graph, it may be hidden or invisible from the display of other components only from one direction. However, by changing the display angle by rotating the three-dimensional graph, it is possible to visually grasp the temporal change in the pressure of the specific component.

  Specifically, the gas analyzer according to the present invention includes an ionization unit that ionizes a sample gas, a filter unit that selectively allows ions from the ionization unit, and ions that detect ions that have passed through the filter unit. A detection unit; and a calculation device that analyzes the sample gas based on a detection signal from the ion detection unit, wherein the calculation device has a value based on a measurement result, a time, and a component in the sample gas A three-dimensional graph generation unit that generates a three-dimensional graph with each of the values indicating the axis as an axis, a display setting unit that sets a display angle of the three-dimensional graph generated by the three-dimensional graph generation unit, and the display setting unit And a display control unit that displays the three-dimensional graph according to a set display angle.

  In addition to displaying past measurement results, the display control unit displays a scroll bar associated with the measurement results at each measurement time so that the search can be easily performed. It is desirable that the measurement result displayed on the screen is switched by the scroll operation of the scroll bar by the input means.

  In order to enable display according to the type of residual gas, measurement application, etc., and to make it easier to visually grasp, the display control unit sets a value indicating a preselected component in the sample gas. It is desirable to display the measurement result in three dimensions.

  The screen display program for a gas analyzer according to the present invention detects an ionization unit that ionizes a sample gas, a filter unit that selectively passes ions from the ionization unit, and ions that have passed through the filter unit. A gas analyzer screen display program executed by a gas analyzer comprising: an ion detector; and an arithmetic unit that analyzes the sample gas based on a detection result from the ion detector, the analyzer As a display control unit that displays on the screen a three-dimensional graph with the value, time, and the value indicating the component in the sample gas as axes, and displays the three-dimensional graph in a rotatable manner. The arithmetic unit is provided with a function.

  Furthermore, the arithmetic device for a gas analyzer according to the present invention includes an ionization unit that ionizes a sample gas, a filter unit that selectively allows ions from the ionization unit, and ions that detect ions that have passed through the filter unit. A calculation unit for a gas analyzer used in a gas analyzer having a detection unit, wherein each axis is a value based on a measurement result by the analysis unit, a time, and a value indicating a component in the sample gas A three-dimensional graph is displayed on the screen, and the three-dimensional graph is displayed in a rotatable manner.

  According to the present invention configured as described above, the time change of the measurement result of the sample gas (for example, the pressure of each component in the sample gas) is displayed over a wide range, and the time change of the global measurement result is visually observed. Can be easily grasped.

  An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic configuration diagram showing the gas analyzer 1 according to the present embodiment, and FIG. 2 is an internal configuration diagram of the sensor unit 21. FIG. 3 is a functional configuration diagram of the arithmetic device 3, and FIGS. 4 to 10 are diagrams showing display screens displayed on the screen of the display means 5.

  <Device configuration>

  The gas analyzer 1 according to the present embodiment is used for, for example, a gas monitor in the vacuum chamber 100 during the semiconductor manufacturing process or after the apparatus cleaning, and as shown in FIG. A sensor unit 2 having a sensor unit 21 for detecting a sample gas such as a gas, and an arithmetic unit 3 that controls the sensor unit 21 and performs an analysis process of residual gas based on the output of the sensor unit 21. I have.

  Hereinafter, the sensor unit 2 and the arithmetic unit 3 will be described.

  As shown in FIG. 1, the sensor unit 2 includes a sensor unit 21 and an AC generator unit 22 provided at the rear end of the sensor unit 21. Further, a cable CA for connecting the arithmetic device 3 and the sensor unit 2 is connected to the rear end of the AC generator unit 22.

  As shown in FIG. 2, the sensor unit 21 includes a gas introduction port (not shown) for introducing residual gas in the vacuum chamber 100 when attached to the vacuum chamber 100, and the sensor unit is provided from the gas introduction port. 21 between the ionization unit 211 and the ion detection unit 212, the ionization unit 211 that ionizes the residual gas that is the sample gas introduced into the gas 21, the ion detection unit 212 that detects the ions ionized by the ionization unit 211, And a quadrupole part 213 as a filter part that selectively allows ions from the ionization part 211 to pass therethrough.

  The ionization unit 211 includes, for example, a filament inside, and ionizes the sample gas by thermoelectrons emitted from the filament. Then, the ions generated by the ionization unit 211 are extracted by the extraction electrode 214. The extraction electrode 214 is composed of a single electrode or a plurality of electrodes. The extraction electrode 214 is provided between the ionization unit 211 and the quadrupole unit 213, extracts ions generated by the ionization unit 211 to the quadrupole unit 213 and the ion detection unit 212, and accelerates the ions. To converge.

  The quadrupole part 213 separates the ion beam accelerated and converged by the extraction electrode 214 according to the charge-to-mass ratio of ions. Specifically, the quadrupole part 213 is composed of two sets of counter electrodes (cylindrical electrodes) arranged at intervals of 90 °, and each set facing each other has the same potential, and each set different by 90 °. A voltage in which a DC voltage U and a high-frequency voltage Vcos ωt are superimposed is applied between them, and the U / V ratio is made constant and V is changed. Depending on the ratio, it is selectively passed. The gas analyzer 1 of the present embodiment has functions of a full mass scan mode and a selected mass scan mode. In the full mass scan mode, the voltage applied to the electrodes of the quadrupole part 213 is within a predetermined range during one scan. Sweep at (for example, 0V to 30V). On the other hand, in the selected mass scan mode, a voltage for selecting a specified component (AMU in this embodiment, for example, 8, 15, 18, 40) is switched and applied during one scan. In the present embodiment, a case where measurement is performed in the full mass scan mode will be described below.

  The ion detection unit 212 is a Faraday cup that captures ions separated by the quadrupole unit 213 and detects them as an ion current. Specifically, the ion detection unit 212 detects ions of a specific component separated during scanning by the quadrupole unit 213 and detects a partial pressure in the sample gas of the specific component. Moreover, all the ions of the sample gas ionized by the ionization part 211 are detected, and the total pressure of the sample gas is detected.

  The AC generator unit 22 converts the ion current detected by the ion detection unit 212 into a digital voltage signal indicating a voltage value, and outputs the voltage signal to the arithmetic device 3.

  The arithmetic device 3 has a built-in circuit unit (not shown) equipped with a CPU, an internal memory, etc., and operates the CPU and peripheral devices according to a program stored in the internal memory. The sample gas is analyzed based on the output of the sensor unit 21. Specifically, as shown in FIG. 3, the calculation device 3 includes a pressure calculation unit 31 that is an analysis unit, a measurement data storage unit D1, a three-dimensional graph generation unit 32, a display control unit 33, a display setting unit 34, and the like. Function.

  Hereinafter, the pressure calculation unit 31, the measurement data storage unit D1, the three-dimensional graph generation unit 32, the display control unit 33, and the display setting unit 34 will be described in detail.

  The pressure calculation unit 31 receives an ion current from the sensor unit 21, more specifically, a voltage signal converted from the ion current, from the AC generator, and receives each component contained in the sample gas for each scan. The pressure (partial pressure) is calculated. Then, the pressure calculation unit 31 transmits measurement data (pressure data) indicating the measurement result to the measurement data storage unit D1.

  The measurement data storage unit D1 receives measurement data from the pressure calculation unit 31 and stores the measurement data in association with measurement time data indicating the measurement time.

  The three-dimensional graph generation unit 32 acquires the measurement data and the measurement time data stored in the measurement data storage unit D1, and from the measurement result indicated by the measurement data, the value based on the measurement result, the time, and the sample gas A three-dimensional graph is generated with each value indicating the component in the axis as an axis. As shown in FIG. 4, the three-dimensional graph generation unit 32 of the present embodiment uses the pressure value of each component as a value based on the measurement result, and the atomic mass unit (AMU) as a value indicating the component in the sample gas, A graph is generated with a pressure axis (Pa), a time axis (s), and an atomic mass unit axis (AMU, hereinafter simply referred to as an AMU axis) as three axes.

  The display control unit 33 acquires 3D graph data from the 3D graph generation unit 32 and displays the 3D graph on the screen of the display unit 5. Specifically, as shown in FIG. 4, the display control unit 33 displays the pressure axis as a vertical axis, the AMU axis as a horizontal axis, and the time axis as a depth axis, for example. The display means 5 has a display screen such as a CRT display, a liquid crystal display, or a plasma display.

  Hereinafter, a specific display function (method) of the display control unit 33 will be described.

    << Update display function >>

  The display control unit 33 of the present embodiment displays the measurement results from the start of measurement to the end of measurement on a three-dimensional graph while sequentially updating each scan every time. For example, the measurement result for every second is displayed with time. For example, as shown in FIG. 4, the latest measurement result is displayed in the forefront (frontmost row) of the three-dimensional graph. Then, a measurement time column TC for indicating the measurement time of the latest measurement result is displayed in the vicinity of the graph display area (lower left side in FIG. 4), and the measurement time is displayed in the column TC. That is, the measurement result at the measurement time displayed in the measurement time column TC is displayed in the front row of the three-dimensional graph. In addition, the measurement results in the front row are displayed in different colors so that it is easy to understand that the measurement results correspond to the measurement time. For example, the measurement result in the front row is displayed in red, and the other measurement results are displayed in blue.

    << Scroll search function >>

  Further, as shown in FIG. 4, the display control unit 33 displays a scroll bar SB1 associated with the measurement result for each measurement time in the vicinity (specifically, the lower side) of the three-dimensional graph. The sliding direction of the scroll bar SB1 extends in the horizontal direction of the screen, and by sliding it to the left, the measurement result can be displayed retroactively to the past measurement time. Note that the sliding direction of the scroll bar SB1 is not limited to the horizontal direction, and may be the vertical direction.

  And the display control part 33 switches the measurement result represented on a screen by the slide operation (scroll operation) of scroll bar SB1 by the operator's input means 4. FIG. At this time, the display control unit 33 displays the measurement time corresponding to the slide position of the scroll bar SB1 in the measurement time column TC and the past measurement result corresponding to the measurement time in the front row on the three-dimensional graph. At this time, a series of measurement results are displayed in the depth direction from the front row so that the measurement time goes back from the past measurement results.

For example, as shown in FIG. 5, if the most recent measurement time is T _1, the (see upper part of FIG. 5) that the measurement results are displayed in the measurement time T ₁ is in the front row of three-dimensional graph. At this time, the scroll bar SB1 is displayed on the rightmost side. When one scan is newly completed, the scroll bar SB1 remains displayed on the rightmost side, the measurement time displayed in the measurement time column TC, and the measurement displayed in the front row on the three-dimensional graph. The result is updated.

On the other hand, when the slide moving the scroll bar SB1 left by the scroll operation by the input unit 4, together with the measurement time T _2, corresponding to the position of the scroll bar SB1 is displayed in the measurement time column TC, measured at the measurement time T2 The result is displayed in the front row of the three-dimensional graph (see the lower diagram in FIG. 5). If the scroll bar SB1 is not on the rightmost side, the three-dimensional graph is not updated even if one scan is completed.

Thus, the most recent measurement result if it is displayed, the most recent measurement time including T ₁ for example the last 10 scans a series of measurements of the displays in the front row of three-dimensional graph, past the front row If the measurement result of the measurement time T ₂ with is displayed, the measurement time T set of measurements, for example, previous 10 scans including ₂ is displayed. The number of measurement results displayed is determined by the time axis range.

  Even if the past measurement results are displayed in the front row, the 3D graph generation unit 32 always generates 3D graph data based on the latest measurement results if measurement is in progress. . Even during scanning, past measurement results can be viewed freely and seamlessly (without the operator being aware of switching from the current measurement result browsing mode to the past measurement result browsing mode). For example, such a function can be realized by ensuring data consistency by event-driven design. Thereby, the operator of the gas analyzer 1 can easily see the current measurement result and the past measurement result without feeling stress.

  Further, as shown in FIG. 6, the display control unit 33 displays one or a plurality of two-dimensional graphs and / or three-dimensional graphs selected by various graph display buttons B2 described later on the screen. When displaying a two-dimensional graph, the display control unit 33 displays the two-dimensional graph on the screen by converting the three-dimensional graph data acquired from the three-dimensional graph generation unit 32 into two-dimensional graph data. To do. The plurality of graphs displayed on the screen are synchronized and updated simultaneously.

  Specific display contents in FIG. 6 are, for example, a trend graph, a bar graph, a three-dimensional graph (tower display), and a three-dimensional graph (surface display).

  Here, the trend graph displays the time change of the pressure of the predetermined component contained in the sample gas. In this embodiment, the trend graph is a two-dimensional graph in which the horizontal axis is the time axis and the vertical axis is the pressure axis. is there. In FIG. 6, the time change of the pressure of the component of atomic mass unit 18 and the component of atomic mass unit 28 is displayed as a predetermined component.

  The bar graph displays the pressure distribution for every component contained in the sample gas. In this embodiment, the bar graph is a two-dimensional graph in which the horizontal axis is the AMU axis and the vertical axis is the pressure axis. In FIG. 6, the pressure distribution at 14:54:08 on Feb. 4, 2008 is displayed.

  A three-dimensional graph (tower display) is a bar-like representation of the pressure value of each component (each AMU) at each measurement time.

  A three-dimensional graph (surface display) is formed by connecting adjacent objects with lines in the pressure value of each component (each AMU) at each measurement time and hatching the surface formed by the lines. It is.

  Further, the display control unit 33 displays a button group BG in order to perform display settings on the screen in the vicinity of these graph display areas (in the vicinity of the upper side in FIGS. 4 and 6 and the like).

  As shown in FIG. 7, the button group BG includes icons such as a start / stop button B1, various graph display buttons B2, a graph setting button B3, a background button B4, a graph alignment button B5, and a graph range change button B6. The The buttons included in the button group BG are not limited to these, and the displayed buttons can be changed (increased / decreased) by setting.

  The function of each button B1 to B6 will be described together with the function of the display control unit 33.

  Of the start / stop button B1, the start button is for starting to display a series of measurement data. The stop button is for stopping display of measurement data. When the start button is selected (clicked), the display control unit 33 displays the measurement result while updating it to the latest data over time. Further, when the stop button is selected (clicked), the display control unit 33 stops displaying the measurement result.

  The various graph display buttons B2 are used to set the type of two-dimensional graph and / or three-dimensional graph displayed on the screen. FIG. 6 shows a case where a trend graph, a bar graph, a three-dimensional graph (tower display), and a three-dimensional graph (surface display) are selected. Thus, the display control unit 33 displays all the graphs selected by the various graph display buttons B2. Thus, by displaying a two-dimensional graph together with a three-dimensional graph, it is possible not only to grasp the global component distribution and the time change of the pressure distribution of each component by the three-dimensional graph, but also simultaneously by the two-dimensional graph, Detailed time changes can be grasped. Further, even if it is difficult to grasp only the measurement result displayed in the three-dimensional graph, the grasp can be facilitated by displaying the measurement result displayed in the two-dimensional graph.

  The graph setting button B3 is a button for performing detailed setting of the graph such as the length of the axis of the graph to be displayed. When the graph setting button B3 is selected, the display control unit 33 displays another detailed setting screen (not shown), and displays each graph based on the detailed setting performed on the detailed setting screen. Display above.

    << Difference display function >>

  The background button B4 is for displaying a two-dimensional graph or a three-dimensional graph displayed on the screen by subtracting reference data (background data) that is a measurement result at the reference time. As an application of this background display, we want to set the background at the time when the gas pressure inside the vacuum chamber becomes stable, and want to grasp the increase or decrease in pressure (partial pressure of each component) from that time at a glance. Used in cases. When the background button B4 is selected, the display control unit 33 displays the background setting screen W1 shown in FIG. From this background setting screen W1, for example, three types of “not used (no background display)” W11, “subtract from current graph” W12, and “subtract from saved data” W13 can be selected.

  In addition, when “subtract from current graph” W12 is selected, background data can be selected from the measurement data stored in the measurement data storage unit D1 by the scroll bar SB2. . The measurement data selected by the scroll bar SB2 is displayed on the graph display area W14 provided on the same screen and the measurement time display area W15 provided in the vicinity of the graph display area W14. The measurement time is displayed. Note that the graph to be displayed is not limited to the bar graph. FIG. 8 shows a case where measurement data at a measurement time of February 4, 2008, 15:37:15 is selected as background data. When the background data is determined and the OK button W16 is selected (clicked), the measurement result obtained by subtracting the selected background data is displayed on the three-dimensional graph. The background data stored in the past can be read out by selecting (clicking) the read button W17, and the background data stored in the past can also be used. Also, the selected background data can be saved by selecting (clicking) the save button W18.

  FIG. 9B is a three-dimensional graph display when the background correction is performed using the measurement result at the measurement time of 15:37:15 as background data (reference data) on the background setting screen W1. At this time, the pressure axis, which is the vertical axis, indicates the differential pressure with respect to the pressure indicated by the background data. Note that FIG. 9A is a three-dimensional graph display before background correction. In FIG. 9B, the measurement time of the latest data is 15:37:20, and 15:37:15 is the measurement time near the center of the time axis of the three-dimensional graph, and the differential pressure is 0. It can be seen that this is the standard.

  The graph alignment button B5 is for setting a display area of a graph to be displayed on the screen. When the graph alignment button B5 is selected (clicked), the display control unit 33 changes the arrangement of the display area of the graph displayed on the screen. For example, a plurality of graph display areas are arranged side by side in one window screen, a plurality of graph display areas are arranged vertically in one window screen, or different for displaying respective graphs. Or display a window. In FIG. 6, a total of four graph display areas are displayed, two on each of the top, bottom, left, and right.

    << Range change display function >>

  The graph range change button B6 is a button for changing the range of each axis (pressure axis, time axis, AMU axis). By selecting the graph range change button B6, the display control unit 33 displays an enlarged or reduced range of one or more axes of the graph displayed on the screen. Thereby, it is possible to make it easier to grasp the change of each measurement result.

    << Rotation display function >>

  Therefore, the arithmetic device 3 of the present embodiment further includes a display setting unit 34, and the display control unit 33 displays a three-dimensional graph according to the display angle set by the display setting unit 34.

  The display setting unit 34 acquires an input signal from the input unit 4 such as a keyboard or a mouse, and outputs an angle setting signal indicating a display angle of a graph obtained from the input signal to the display control unit 33. Based on the angle setting signal, the display control unit 33 rotates and displays a three-dimensional graph as shown in the upper part of FIG. FIG. 10 shows a state in which a rotation is displayed in a schematic two-dimensional graph in which the vertical axis is the pressure axis and the horizontal axis is the AMU axis.

  Specifically, for example, by a drag operation using a mouse, the display setting unit 34 outputs an angle setting signal to the display control unit 33, and the display control unit 33 rotates and displays the three-dimensional graph. Various rotation methods are conceivable, such as rotation around each axis and rotation around the origin and center of the graph. As a result, the operator can rotate the 3D graph to an angle that is easy to see by a drag operation using the mouse.

    << Enlarged display function >>

  The display setting unit 34 acquires an input signal from the input unit 4 such as a keyboard or a mouse, and outputs an enlargement / reduction setting signal indicating enlargement / reduction of the graph obtained from the input signal to the display control unit 33. To do. The display control unit 33 acquires an enlargement / reduction setting signal from the display setting unit 34, and enlarges or reduces the two-dimensional graph or three-dimensional graph on the screen as shown in the lower part of FIG. is there. For example, it is conceivable to enlarge by designating an area to be enlarged with a mouse.

    <Effect of this embodiment>

  According to the gas analyzer 1 according to the present embodiment configured as described above, a three-dimensional graph including a pressure axis, a time axis, and an AMU axis is displayed on the screen. It is possible to visually grasp temporal changes in component pressure and the like. Further, by displaying the three-dimensional graph in a rotatable manner, the three-dimensional graph can be viewed from all angles, and the measurement result (pressure distribution) can be more visually grasped. Furthermore, since the display control unit 33 has an update display function, a scroll search function, a difference display function, a range change function, or an enlarged display function, the operator can display the three-dimensional graph by any method. It becomes possible to more visually grasp the time change of the pressure distribution of each component in the gas.

  <Other modified embodiments>

  The present invention is not limited to the above embodiment.

  For example, in the above-described embodiment, the entire mass scan mode is used, and the AMU axis range is set to 1 to 46, and all the graphs are displayed. However, only predetermined components (predetermined AMU) contained in the sample gas are displayed. You may make it do. In this case, by inputting in advance the component (AMU) to be displayed on the display control unit by the input means 4, the display control unit displays the measurement result of the component from the measurement results obtained in the full mass scan mode. To do. As a result, the measurement result of only the designated component (AMU) can be displayed three-dimensionally and useless information can be omitted, so that the operator can easily see the measurement result.

  On the other hand, when only the designated AMU (for example, AMU 8, 15, 18, 40, 45) is measured in the selected mass scan mode, the display control unit may display the measurement result three-dimensionally.

  Moreover, although the analysis part of the said embodiment was a pressure calculation part which calculates the pressure of each component in sample gas, you may calculate the density | concentration of each component, etc. in addition to this.

  Furthermore, although the three-dimensional graph of the above-described embodiment is such that the vertical axis, the horizontal axis, and the depth axis are the pressure axis, time axis, and AMU axis, respectively, these axes may be interchanged.

  In addition, the reference measurement result may be displayed, for example, in the front row on the three-dimensional graph. Here, the reference measurement result is a measurement result (pressure distribution) at a specific gas concentration and pressure. Thus, by displaying the reference measurement result on the same graph, comparison with the reference measurement result can be easily performed.

  In addition, in the above-described embodiment, the display control unit converts the three-dimensional graph data from the three-dimensional graph generation unit 32 into the two-dimensional graph data, so that the two-dimensional graph is also displayed on the screen. In addition, the three-dimensional graph generation unit 32 may generate two-dimensional graph data, or a separate two-dimensional graph generation unit may be provided.

  In addition, the display control unit may have the function of the three-dimensional graph generation unit.

  In addition, some or all of the above-described embodiments and modified embodiments may be combined as appropriate, and the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention. .

The typical block diagram of the gas analyzer which concerns on one Embodiment of this invention. The internal block diagram of the sensor part in the embodiment. The functional block diagram of the arithmetic unit in the embodiment. The figure which shows a display screen (three-dimensional graph). The figure which shows a scroll search function. The figure which shows a display screen (multiple graph display). Explanatory drawing of a button group. The figure which shows a display screen (background setting screen). The figure which shows a display screen (before and after background correction | amendment). The figure which shows a display screen (rotation / enlargement). The figure which shows the display screen (trend graph) of the conventional gas analyzer. The figure which shows the display screen (bar graph) of the conventional gas analyzer.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Gas analyzer 211 ... Ionization part 212 ... Ion detection part 213 ... Filter part (quadrupole part)
3 ... arithmetic device 31 ... analysis part (pressure calculation part)
32 ... 3D graph generation unit 33 ... Display control unit 34 ... Display setting unit SB1 ... Scroll bar 4 ... Input means 5 ... Display means

Claims (6)

An ionization section for ionizing the sample gas;
A filter unit that selectively allows ions from the ionization unit to pass through;
An ion detector that detects ions that have passed through the filter unit;
An analysis unit for analyzing the sample gas based on a detection signal from the sensor unit;
Display control for displaying on the screen a three-dimensional graph centered on a value based on a measurement result by the analyzer, a time, and a value indicating a component in the sample gas, and displaying the three-dimensional graph in a rotatable manner And a gas analyzer. An ionization section for ionizing the sample gas;
A filter unit that selectively allows ions from the ionization unit to pass through;
An ion detector that detects ions that have passed through the filter unit;
Based on a detection signal from the ion detection unit, comprising an arithmetic unit that analyzes the sample gas,
A three-dimensional graph generation unit that generates a three-dimensional graph with the calculation device as a axis based on a value based on a measurement result, a time, and a value indicating a component in the sample gas;
A display setting unit for setting a display angle of the three-dimensional graph generated by the three-dimensional graph generation unit;
A gas analyzer comprising: a display control unit configured to display the three-dimensional graph on a screen at a display angle set by the display setting unit.   The display control unit displays a scroll bar associated with the measurement result at each measurement time, and switches the measurement result displayed on the screen by a sliding operation of the scroll bar by an input unit. The gas analyzer according to claim 1 or 2.   The gas analyzer according to claim 1, 2, or 3, wherein the display control unit is configured to three-dimensionally display a measurement result of a value indicating a preselected component in the sample gas. Based on an ionization unit that ionizes the sample gas, a filter unit that selectively allows ions from the ionization unit to pass through, an ion detection unit that detects ions that have passed through the filter unit, and a detection result from the ion detection unit A gas analyzer screen display program to be executed by a gas analyzer equipped with an arithmetic device for analyzing the sample gas,
Display control for displaying on the screen a three-dimensional graph centered on a value based on a measurement result by the analyzer, a time, and a value indicating a component in the sample gas, and displaying the three-dimensional graph in a rotatable manner A screen display program for a gas analyzer, wherein the arithmetic device is provided with a function as a unit. A gas used in a gas analyzer comprising: an ionization unit that ionizes a sample gas; a filter unit that selectively passes ions from the ionization unit; and an ion detection unit that detects ions that have passed through the filter unit An arithmetic unit for an analyzer,
A gas analysis that displays a three-dimensional graph on the screen with a value, a time, and a value indicating a component in the sample gas based on the measurement result by the analysis unit, and displays the three-dimensional graph rotatably. Instrument for calculation.