JP2009219300A - Sliding system with onboard moving-coil linear motor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slide device having a moving coil linear motor built therein, in which a bed is formed into a hook shape with a rectangular section for reducing the sectional height and width and for minimizing the sectional dimension, and the length of the bed is set to various lengths, with a proper usage of the slide device for providing various stroke lengths, thus making the device handy. <P>SOLUTION: The bed 2 is composed of an elongated, rectangular board portion 20, a rectangular top board portion 21 which is disposed to be parallel opposite to the board portion 20 across a given gap and is smaller in width than the board portion 20, and a sidewall portion 22, which integrally forms one side of the board portion 20 and the top board portion 21; the interior surface of the top board portion 21, facing the board portion 20, is formed as a facing surface 39 facing a magnet yoke 16; and a linear motion guide unit 10 is disposed on a side 44 of the board portion 20, that extends from the facing surface 39. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a slide device incorporating a moving coil linear motor used in various devices such as a semiconductor manufacturing device, an assembly device, a measurement / inspection device, a test device, and a machine tool.

  In recent years, slide devices incorporating linear motors are increasingly used in various applications such as semiconductor manufacturing devices, assembly devices, and measuring devices. The slide device is compact and simple with a small device, high thrust, high accuracy, durability and safety, good usability, and low power consumption and low cost. There is a need to be. In addition, the linear motion guide unit incorporated in the slide device is required to achieve lubrication maintenance-free.

  The present applicant has previously developed a slide device incorporating various linear motors. However, recently, the slide device with a linear motor is smaller, but the slider stroke length is longer than that of the conventional slide device. It can be used in various applications and has a wide range of applications. Is desired.

  As a slide device incorporating a movable magnet type linear motor, there is one previously filed by the present applicant. The slide device incorporating the movable magnet type linear motor includes a long flat bed, a flat table that can be reciprocated in the longitudinal direction of the bed via a linear motion guide unit, and a table on the surface of the table facing the bed. A field magnet consisting of a large number of magnets arranged in parallel with different polarities in the moving direction of the bed, and a flat and rectangular coreless along the longitudinal direction on the facing surface of the bed table facing the field magnet It has an armature assembly in which a large number of armature coils having a shape are arranged. In the slide device described above, the bed as the coil yoke and the table as the magnet yoke are made of a magnetic material that becomes the magnetic circuit portion, and the armature assembly has an armature coil arranged on the upper surface of the substrate. The periphery of the mold is molded with an adhesive, and the substrate is fixed to the bed. The stroke length of the slider is ensured, and performance such as high speed and high response is achieved. Compact and compact. (For example, refer patent document 1).

In addition, there is one previously filed by the present applicant as a slide device incorporating a moving coil linear motor. The sliding device incorporating the moving coil type linear motor is a linear motion comprising a track rail having a U-shaped section and a slider that slides in a U-shaped groove that can be used as a structural member having high rigidity. It is composed of a guide unit and a moving coil linear motor which is a driving means for sliding the slider with respect to the track rail. The movable coil type linear motor includes a pair of field magnets provided in a magnet yoke attached to the outside of one side of the track rail, and a movable coil set attached to the slider and disposed between the pair of field magnets. The magnet yoke is attached to the side of the track rail with a U-shaped cross-section with a pair of facing parts integrally connected at the connection bottom, with the opening facing upward, and the movable coil assembly is It is attached to the protrusion of the mount fixed to the slider extending beyond the side of the track rail. Each armature coil of the movable coil assembly is composed of a flat and rectangular winding wound in a ring shape and a core member formed by resin molding inside the winding. They are securely attached to the coil substrate without being fitted (see, for example, Patent Document 2).
JP 2007-300759 A JP 2001-25229 A

  However, in the above-described slide device incorporating the movable magnet type linear motor, in order to further increase the stroke length, the length of the table on which the linear scale is disposed is increased, or, for example, the linear scale is attached to the bed. When the bed length is increased by placing the armature coil on the entire length of the bed, the armature coil other than the armature coil facing the table magnet is energized. Since extra power is required and heat generation increases, the slider stroke length is limited.

  In addition, the above-described slide device incorporating the moving coil type linear motor inevitably has a large cross-sectional height, so that a large device is required for manufacturing a small device. Furthermore, a slide device incorporating a moving coil type linear motor is required to be easy to use and can be incorporated into a small device having a small sectional height.

  The object of the present invention is to realize the above-mentioned demand by configuring the linear motor not in the moving magnet type but in the moving coil type. In particular, in order to configure a small device, the bed is configured compactly and simply. The magnet yoke function is provided, and the bed is provided with a field magnet that movably supports the armature assembly, and accordingly the armature assembly is compactly and simply configured to provide high thrust and high accuracy. Therefore, the object is to provide a slide device incorporating a moving coil linear motor that is durable, safe, easy to use, low power consumption and low in cost.

The present invention relates to a long bed constituting a magnet yoke, a table reciprocally movable in the longitudinal direction of the bed via a linear motion guide unit, and magnetic poles having different polarities alternately in the longitudinal direction of the bed. And a pair of field magnets arranged in parallel on opposite surfaces on the inner side of each of the magnetic poles and opposite to each other, and supported by the table and positioned in a gap between the field magnets A movable coil linear motor having an armature assembly including an armature coil and moving the table with respect to the bed by electromagnetic interaction between magnetic flux generated in the field magnet and current flowing in the armature coil In the slide device with built-in
The bed is configured integrally with the magnet yoke and is formed in a rectangular hook shape when viewed in a cross section orthogonal to the longitudinal direction, and is a rectangular plate that is long in the longitudinal direction. And an upper plate portion formed in a rectangular plate shape having a width smaller than that of the substrate portion, and side walls constituting one side portion of the substrate portion and the upper plate portion in an integrated structure The inner surface of the magnet yoke is opposed to the opposing surface of the magnet yoke, and the linear motion is applied to the other side of the substrate portion extending from the opposing surface. The present invention relates to a slide device incorporating a moving coil type linear motor, characterized in that a mounting surface on which a guide unit is disposed is formed.

  In this slide device, the linear motion guide unit is slid through a rolling element extending over the track rail that is fixed to the mounting surface along the longitudinal direction of the bed. The table includes a plurality of movable sliders, and the table is fixed to the plurality of sliders, and a stay portion of the armature assembly is fixed to a side surface.

  Further, in this slide device, the armature assembly includes a flat printed board located in the gap between the field magnets and a plurality of flat flat boards fixed to the printed board in parallel along the longitudinal direction. A coil substrate composed of armature coils, a stay portion fixed to the table and positioned outside the gap, and a magnetic core portion fitted inside the winding of each armature coil are integrally structured. The coil stay is formed on the table, and the coil substrate is supported on the table by the coil stay.

  Further, in this slide device, the armature coil is formed by a winding wire that is wound in an oval shape, and a pair of parallel arm portions that generate thrust by the electromagnetic interaction, and ends of the arm portions, It is comprised with the circular arc part which connected these in circular arc shape.

  Further, in this slide device, the coil stays in which the core part and the stay are integrally structured are arranged such that the core parts are arranged at predetermined intervals along the longitudinal direction. One side is connected to the stay portion and configured in a comb shape.

  This slide device can be applied to an XYθ positioning device by using a plurality of slide devices that movably support the table with the beds arranged in pairs.

  Since the slide device incorporating the moving coil type linear motor is configured as described above, the magnet yoke and the bed are formed in a square hook with an integral structure, and the opposing surfaces of the substrate portion and the upper plate portion are formed. By arranging the field magnet in the bed, the bed has a small cross-sectional height, the bed width is also small, the cross-sectional dimension is the most compact, and the bed length can be varied according to the intended use. By setting it, the stroke length of the table can be configured in various ways, making it easy to use. In addition, since the stay portion and the core portion of the armature assembly are formed as an integral coil stay, the coil substrate of the armature assembly is formed thin, and the coil substrate is formed between the field magnets by the stay portion. The slide device itself can be supported at a predetermined position with a slight gap, and the cross-sectional height is small, the cross-sectional dimension is formed most compactly, and high thrust can be exhibited. In addition, the track rail is arranged on the bed substrate and the coil substrate moves through the gap formed on the side of the track rail. However, the gap can be made small and the bed width is made small and small. In addition, a magnetic core is fitted inside the winding of the armature coil to ensure high thrust, which can support high speed and high response, and reduce power consumption to obtain a predetermined thrust. it can. In addition, since the stay portion that is integral with the coil substrate is fixed to the side surface of the table, the coil substrate itself can be formed low, the height of the device itself can be reduced, and the device itself can be configured compactly and simply.

  An embodiment of a slide device incorporating a moving coil linear motor according to the present invention will be described below with reference to the drawings. The slide device incorporating the moving coil type linear motor is used in various devices such as a semiconductor manufacturing device, an assembly device, a measurement / inspection device, a test device, and a machine tool. As shown in FIGS. By making the size of the movable side the same and setting the length of the fixed side of the bed 2 in various ways, various stroke lengths, for example, strokes of 120 mm to 300 mm can be obtained. It has become.

  As shown in FIGS. 1 to 4, the slide device incorporating the moving coil type linear motor is formed in a square hook-shaped cross section when the magnet yoke 16 is formed in an integral structure and viewed in a cross section perpendicular to the longitudinal direction. Magnetic poles having different polarities alternately in the longitudinal direction of the bed 2 on the opposing surfaces inside the magnetic yoke 16 and the table 1 which can be reciprocated through the linear motion guide unit 10 in the longitudinal direction of the long bed 2 and the bed 2 Are arranged in parallel and are supported by a pair of field magnets 6 in which the polarities of the magnetic poles facing each other are opposite to each other, and the electric machine disposed in the gap 45 formed between the field magnets 6 An armature assembly 5 having a child coil 7 is provided, and the table is attached to the bed 2 by electromagnetic interaction between the magnetic flux generated in the field magnet 6 and the current flowing in the armature coil 7. It is configured to relatively move one.

  The linear motion guide unit 10 is disposed only on the side portion 44 that is one side of the bed 2 that becomes the opening side of the gap 45 of the magnet yoke 16, and extends along the longitudinal direction formed on the side portion 44 of the bed 2. The long track rail 3 fixed to the mounting surface 40 and a plurality of sliders 4 slidable via rolling elements 31 (FIG. 7) such as a large number of balls straddling the track rail 3. Has been. The table 1 is fixed to the upper mounting surface 46 of the slider 4 of the linear guide unit 10. In this embodiment, two sliders 4 straddle the track rail 3, and the table 1 is fixed across a plurality of (for example, two) sliders 4. As shown in FIGS. 5 and 6, the table 1 is formed in a substantially rectangular plate shape so as to cover the upper surface which is the mounting surface 46 of the two sliders 4.

  As shown in FIGS. 3 to 6, the armature assembly 5 includes a coil substrate 11 in which a number of flat armature coils 7 are arranged in parallel along the sliding direction of the table 1 that is the longitudinal direction. The gap 45 between the magnets 6 is disposed with a slight gap without contacting the field magnet 6, and extends from the gap 45 to the side of the coil substrate 11 protruding toward the opening side of one side. The stay portion 29 is formed as a protruding portion, and the stay portion 29 is fixed to the side surface 47 of the table 1 with a mounting bolt, and the coil substrate 11 generates a magnetic flux generated by the field magnet 6 and a current flowing through the armature coil 7. It is configured to be movable along the longitudinal direction of the gap 45 by electromagnetic interaction and to drive the table 1 slidably.

  In order to reduce the cross-sectional height of the slide device, this slide device is constructed by integrating the bed 2 and the magnet yoke 16 as shown in FIGS. 3, 9 and 10. 2 is made of a magnetic material that becomes the magnet yoke 16, and is formed in a square hook shape when viewed in a cross section orthogonal to the longitudinal direction. The bed 2 is configured as a magnet yoke 16, and is used by fixing the slide device 30 to the base 42 or the like, so that the mounting surface 18 is formed on the lower surface and the substrate portion 20 is formed into a long rectangular plate shape in the longitudinal direction. An upper plate portion 21 which is disposed in parallel with the portion 20 with a predetermined interval and is a rectangular plate having a width smaller than that of the substrate portion 20 and the same length, and the substrate portion 20 and the upper plate portion 21 are connected to each other. It is comprised from the side wall part 22 which is integral with the side edge part which is the side part of this. In particular, the bed 2 is formed such that the inner surface where the upper plate portion 21 and the substrate portion 20 face each other is formed on the facing surface 39 of the magnet yoke 16, and the other side portion 44 of the substrate portion 20 extending from the facing surface 39 on the inner surface is formed. The linear motion guide unit 10 is formed on a mounting surface 40 serving as a space in which the linear motion guide unit 10 is disposed, and the linear motion guide unit 10 and the armature assembly 5 are arranged side by side. A mounting surface 41 of the linear scale 9 is formed on the side portion 44 of the bed 2 adjacent to the mounting surface 40 on the facing surface 39 side.

  This slide device is formed in an integral structure corresponding to a square hook portion formed on one side of the bed 2 and the bed 2 in which the cross section perpendicular to the longitudinal direction is a rectangular hook shape and is a long and rectangular flat shape. Further, it is configured as a moving coil type linear motor composed of the magnet yoke 16 and the table 1 which is positioned and driven via the linear motion guide unit 10 on the other side portion 44 on the bed 2. This slide device is formed with a small cross-sectional height and a small width, so that the cross-sectional dimension is the most compact, and the length of the bed 2 and thus the length of the track rail 3 are variously set according to the intended use. As a result, various stroke lengths can be obtained for the slider 4 and thus the table 1, which is easy to use. For example, the slide device can be formed in various structures such as a cross-sectional dimension of 16 mm in height × 45 mm in width, and a stroke length of the table 1 such as 120 mm, 180 mm, 240 mm, and 300 mm.

  The slide device is provided with a linear encoder 8 for detecting the position of the table 1 relative to the bed 2 as shown in FIGS. The linear encoder 8 is provided on the bed 2 with the linear scale 9 disposed on the mounting surface 41 closer to the center than the mounting surface 41 of the track rail 1, that is, along the longitudinal direction on the inner side, and the table 1 facing the linear scale 9. The sensor 15 is disposed between the sliders 4 on the lower surface of the sensor. A cover 23 is disposed on the upper surface of the slide device 30 in order to prevent foreign matter from entering the gap 45 between the field magnets 6 and the linear encoder 8. The cover 23 is formed in a rectangular plate shape that is rust-proofed by stainless steel or the like, and is fixed to the upper surface of the upper plate portion 21 of the magnet yoke 16 by mounting bolts, and extends almost from the entire upper plate portion 21 to the upper surface of the table 1. The upper surface of the bed 2 is covered. Similarly, end blocks 12 made of a resin molded product are fixed to both ends of the bed 2 which is both ends of the slide device 30 in order to prevent the intrusion of foreign matter. The inner end surface of the end block 12 functions as a stopper 13 that stops the slider 4. The table 1 is formed in a projecting portion 48 that extends from the upper surface facing the cover 23 having a slight gap without contacting the cover 23 to the upper portion on the outer side of the cover 23 side and slightly protrudes from the upper surface of the cover 23. The upper surface of the protrusion 48 is formed on the mounting surface 19 for mounting a workpiece or the like, and the mounting surface 19 is provided with mounting screw holes 24. Also, attachment holes 25 and 26 for attachment to the base 42 and the like are formed on the bed 2 side. Further, a connector stay 14, which is a relay box for connecting a wire such as a signal line from the sensor 15 and a power line of the armature coil 7, is fixed to the outer side surface of the table 1. A cord 17 extending from the connector stay 14 is a collection of the above-described wires, and extends to a predetermined location such as a driver device.

  In the slide device incorporating the moving coil type linear motor, as shown in FIGS. 4 to 8, the armature assembly 5 is disposed on the magnet yoke 16 so as to be fixed to the side surface 47 of the table 1 with mounting bolts. A coil stay 33 having a stay portion 29 that protrudes outside the field magnet 8, and a small gap 45 between the pair of field magnets 6 so as to form a small sectional height following the stay portion 29. The coil substrate 11 is formed in a rectangular flat plate shape that can be disposed in the coil substrate 11. The coil substrate 11 slides the table 1 on the upper surface of the printed board 35 in which a large number of flat armature coils 7 are formed in a rectangular flat plate shape. It is configured to be fixed in parallel in the direction. Further, each armature coil 7 is configured as a so-called cored armature coil 7 in which a core portion 27 made of a magnetic core member is fitted inside the winding wire in order to exhibit high thrust. In the armature assembly 5, in particular, since the magnetic core 27 is attracted and attracted to the field magnet 6 individually, the core 27 must be firmly supported at a predetermined position, and In order to reduce the cross-sectional height, as shown in FIG. 8, the individual core portions 27 are formed integrally with one stay portion 29, and each core portion 27, stay portion 29, The coil stay 33 is configured as a coil stay 33, and the core stays 27 are arranged with a predetermined interval in the sliding direction, and one side of each core part 27 is connected to the stay part 29. Since they are connected, they are formed in a comb shape as a whole.

  As shown in FIG. 8, the armature coil 7 is formed in a flat and oval-shaped winding wire, and generates a thrust force by electromagnetic interaction, and a pair of parallel arm portions 37 and ends of the arm portions 37, respectively. The arm portion 37 is arranged in a direction orthogonal to the sliding direction and fixed in parallel in the sliding direction on the printed circuit board 35, and matches the inside of the shoreline. An elongated oblong block-shaped core portion 27 is fixed. As shown in FIG. 8B, the armature assembly 5 is formed on the coil substrate 11 having twelve coreless armature coils 7 fixed on the upper surface of the printed circuit board 35, as shown in FIG. As shown in FIG. 8, a coil stay 33, in which twelve core portions 27 and one stay portion 29 are integrated, is fitted so that each core portion 27 matches the inside of each winding wire. As shown in c), each core portion 27 is fixed to each armature coil 7 with an adhesive, and the coil substrate 11 and the coil stay 33 are combined, and as shown in FIG. 11 is covered with a surface protection sheet 38, terminals 50 to which power lines of the armature coil 7 are connected are arranged on both ends of the printed circuit board 35, and both ends are filled with an adhesive or the like. Covered with an object 28 and attached to the mounting hole 34 of the stay 29 Insert the belt is fixed to the side surface of the table 1.

  In the armature assembly 5, the stay portion 29 and the core portion 27 are integrally formed, so that the coil substrate 11 of the armature assembly 5 is formed thin and the coil substrate 11 is formed by the stay portion 29 into the field magnet. 6 is supported at a predetermined position with a slight gap in the gap 45. Here, the predetermined position means that the armature coil 7 is arranged at the center position between the field magnets 6, that is, at the position where the cogging with the core portion 27 becomes small. The position setting is ensured by the stay portion 29 having the structure. Therefore, the slide device 30 has a small cross-sectional height and is formed in the most compact cross-sectional dimension so that it can exert a high thrust, enabling smooth sliding and corresponding to high speed and high response. ing.

  As shown in FIG. 3 and FIG. 4, the field magnet 6 has a magnetic pole formed in a rectangular plate shape, and has a rectangular plate shape on the opposing surface inside the magnet yoke 16 over substantially the entire length in the longitudinal direction of the bed 2. The magnetic poles are arranged in such a manner that magnetic poles having different polarities alternately in the direction perpendicular to the longitudinal direction are closely arranged in parallel and a large number of magnetic poles having opposite polarities opposite to each other are arranged. . The armature assembly 5 includes twelve flat cored armature coils 7 in the gap 45 formed between the field magnets 6 supported by the table 1 in the direction perpendicular to the longitudinal direction of the arm portion 37 and the core. The portion 27 is configured to be closely arranged in parallel along the longitudinal direction in a direction facing the magnetic pole of the field magnet 6. The armature coil 7 is configured as a set of three winding coils to which current of each phase is supplied in a three-phase energization system of U, V, and W phases, and corresponds to the four magnetic poles of the field magnet 6. Yes. When the coil pitch is Pc and the magnetic pole pitch is Pm, the relationship Pc = (4/3) Pm is set.

  Since the slide device incorporating the moving coil type linear motor is configured as described above, first, the magnet yoke 16 and the bed 2 are integrally formed in the shape of a square hook so that the cross section height is increased. Is formed with a small width, a small width, a compact cross-sectional dimension, and various stroke lengths can be obtained for the table 1 by variously setting the length of the bed 2 according to the intended use. Secondly, the stay portion 29 and the core portion 27 of the armature assembly 5 are integrally formed so that the armature assembly 5 can be easily used. The coil substrate 11 is formed thin, and the coil substrate 11 can be supported at a predetermined position by the stay portion 29 with a slight gap in the gap 45 between the field magnets 6. Sliding device itself is small section height, it has become those formed in most compact cross-sectional dimensions, can and exhibit high thrust.

  Next, an XYθ positioning device incorporating a slide device incorporating this moving coil linear motor will be described with reference to FIG. This XYθ positioning apparatus guides and guides an article (not shown) such as a workpiece placed on the θ table 1K in a predetermined X direction, Y direction, and θ direction which is an angular direction. The apparatus, the assembling apparatus, and the measuring apparatus are configured in various apparatuses that require positioning. The XYθ positioning device 43 is provided with a pair of X-axis slide devices 30X which are long and parallel to each other at predetermined intervals on both sides of the base 42, and straddle the slide device 30X. A pair of Y-axis slide devices 30Y are disposed under the placed X table 1X, and a θ slide device 30K having a θ table 1K on the Y table 1Y placed across the slide device 30Y. Is arranged. The X table 1X is formed in a frame shape, is disposed on the base 42 so as to straddle between the pair of slide devices 30X, and is driven to be positioned in the X direction. Further, the pair of Y-axis slide devices 30Y are arranged in the gap between the X-axis slide devices 30X in parallel to each other with a predetermined interval on both sides of the lower surface of the X table 1X. The pair of Y-axis slide devices 30Y are configured to drive the Y table 1Y positioned on the lower surface of the X table 1X and straddling the slide device 30Y in the Y direction. Further, the θ table 1K is positioned and driven in the θ direction. As described above, the XYθ positioning device 43 positions an article such as a workpiece in each direction of XYθ by positioning the Y table 1Y below the X table 1X and positioning the θ table 1K on the Y table 1Y. Can do. Therefore, this XYθ positioning device is compact and has a small cross-sectional height of the entire device by incorporating a plurality of slide devices incorporating the moving coil type linear motor according to the present invention, thereby positioning an article such as a workpiece over a long distance. The device can be configured.

  The slide device incorporating the moving coil type linear motor according to the present invention is preferably used by being incorporated in various devices such as a semiconductor manufacturing device, an assembly device, a measurement / inspection device, a test device, a positioning table, and a slide table.

It is a top view which shows one Example of the slide apparatus incorporating the moving coil type | mold linear motor by this invention. It is a front view of the slide apparatus of FIG. It is sectional drawing which shows the AA cross section of the slide apparatus of FIG. It is a fragmentary sectional view which shows the BB cross section of the slide apparatus of FIG. It is a front view which shows the movable side containing the armature assembly in the slide apparatus of FIG. FIG. 6 is a plan view showing the armature assembly of FIG. 5. FIG. 6 is a bottom view showing the armature assembly of FIG. 5. FIG. 4 is an explanatory view shown in a perspective view for explaining the structure by disassembling the armature assembly of FIG. 3, wherein (a) is a perspective view of a coil stay, (b) is a perspective view of a coil substrate, and (c) is a perspective view. FIG. 4 is a perspective view of the armature assembly in a state where the coil stay and the coil substrate are fitted, and FIG. 4D is a perspective view showing the armature assembly in a completed state. It is a top view which shows the bed in the slide apparatus of FIG. It is a side view which shows the bed of FIG. 1 is a perspective view showing an XYθ positioning device in which a plurality of slide devices according to the present invention are incorporated. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Table 2 Bed 3 Track rail 4 Slider 5 Armature assembly 6 Field magnet 7 Armature coil 10 Linear motion guide unit 11 Coil board 16 Magnet yoke 20 Board part (bed)
21 Upper plate (bed)
22 Side wall (bed)
27 Core (armature assembly)
DESCRIPTION OF SYMBOLS 29 Stay part 30 Slide apparatus 31 Rolling element 33 Coil stay 35 Printed circuit board 36 Arc part (armature coil)
37 Arm (armature coil)
39 Opposite surface 40 Mounting surface (for track rail provided on bed)
43 XYθ positioning device 45 Air gap (bed)

Claims (6)

A long bed constituting a magnet yoke, a table that can be reciprocated through a linear motion guide unit in the longitudinal direction of the bed, and magnetic poles having different polarities alternately in the longitudinal direction of the bed are opposed to the inside of the magnet yoke. A pair of field magnets arranged in parallel on the surface and opposed to each other, the armature coils being supported by the table and positioned in the gap between the field magnets. A slide having a built-in movable coil type linear motor that moves the table relative to the bed by electromagnetic interaction between magnetic flux generated in the field magnet and current flowing in the armature coil. In the device,
The bed is configured integrally with the magnet yoke and is formed in a rectangular hook shape when viewed in a cross section orthogonal to the longitudinal direction, and is a rectangular plate that is long in the longitudinal direction. And an upper plate portion formed in a rectangular plate shape having a width smaller than that of the substrate portion, and side walls constituting one side portion of the substrate portion and the upper plate portion in an integrated structure The inner surface of the magnet yoke is opposed to the opposing surface of the magnet yoke, and the linear motion is applied to the other side of the substrate portion extending from the opposing surface. A slide device having a built-in moving coil type linear motor, wherein a mounting surface on which a guide unit is disposed is formed. The linear motion guide unit has a long track rail fixed to the mounting surface along the longitudinal direction of the bed, and a plurality of slidable members via a rolling element straddling the track rail. The movable coil type linear motor according to claim 1, wherein the table includes a slider, and the table is fixed to a plurality of the sliders, and a stay portion of the armature assembly is fixed to a side surface. Slide device. The armature assembly includes a flat printed board located in the gap between the field magnets and a plurality of flat armature coils fixedly arranged in parallel along the longitudinal direction on the printed board. From the coil stay in which the stay part fixed to the substrate and the table and positioned outside the gap and the core part of the magnetic body fitted inside the winding of each armature coil are formed in an integral structure 3. The slide device with a built-in moving coil type linear motor according to claim 1, wherein the slide substrate is configured to be supported by the table by the coil stay. The armature coil is formed by a winding wire that is wound in an oval shape, and a pair of parallel arms that generate thrust by the electromagnetic interaction, and an arc connecting each end of the arms in an arc shape The slide device incorporating the moving coil linear motor according to any one of claims 1 to 3, wherein the slide device includes a moving part. In the coil stay in which the core part and the stay have the integral structure, the core parts are arranged at a predetermined interval along the longitudinal direction, and one side of each core part is connected to the stay part. 5. The slide device incorporating the moving coil type linear motor according to claim 3, wherein the slide device has a comb shape. 6. The XYθ positioning device according to claim 1, wherein a plurality of slide devices that movably support the table on the bed arranged in a pair are used. Slide device with a built-in moving coil type linear motor.

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