JP2009205053A - Electrooptical apparatus, its manufacturing method, and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce a lateral electric field without incurring reduction of luminance, for example, in a reflection type liquid crystal device. <P>SOLUTION: A projecting part (90) is formed along the periphery of each aperture region (72a) in each of a plurality of pixel regions (72g) which constitute an image display region (10a) on a TFT array substrate (10) and extended along directions X and Y in the figure in a lattice shape. End parts (19) of a plurality of pixel electrodes (9a) are formed so as to run aground to the projecting part (90). Since each end part (19) is closer to a counter electrode (21) among pixel electrodes (9a) than a part formed so as not to run aground to the projecting part (90), that is, a part extended to be parallel to the substrate surface of the TFT array substrate (10), the lateral electric field generated between pixel electrodes (9a) adjacent to each other is reduced by voltage generated between the end part (19) and the counter electrode (21), or a longitudinal electric field acting along a vertical direction in the figure. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a technical field of, for example, an electro-optical device such as a reflective liquid crystal device and an electronic apparatus such as a projector including the electro-optical device.

  A reflective liquid crystal device, which is an example of this type of electro-optical device, can display an image by reflecting light incident from a display surface on a substrate with a reflective film and modulating the reflected light with liquid crystal. It is configured as follows.

  In such a liquid crystal device, there is a case where an inversion driving method is used in which different potentials are supplied to adjacent pixel electrodes, and the alignment of the liquid crystal is controlled by a voltage generated between each pixel electrode and the counter electrode. In the case of adopting the inversion driving method, a liquid crystal device provided with a taper base protruding from the periphery below the end of the pixel electrode for the purpose of reducing a lateral electric field generated between the pixel electrodes adjacent to each other. It has been proposed (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 10-62797

  However, the end of the pixel electrode that is also used as a reflective electrode that reflects light is on the taper base and is inclined with respect to the portion that is not on the taper base. Therefore, the light reflected by the end portion is reflected obliquely with respect to the display surface.

  The amount of light emitted from the display surface out of the light reflected obliquely in this way is compared to the amount of light reflected from the flat surface extending along the substrate surface of the pixel electrode from the display surface. Lower. Therefore, the amount of reflected light emitted from the pixel region is relatively low, and it is difficult to increase the luminance when the liquid crystal device displays an image. The pixel region can be effectively used by using the entire area of the pixel electrode. There arises a problem that it becomes difficult to expand the opening area of the. In particular, when the pixel pitch is reduced in response to a request for higher definition of the image, the proportion of the pixel electrode that is obliquely inclined with respect to the flat portion is increased, and thus the luminance reduction is more remarkable. Become.

  Therefore, the present invention has been made in view of the above problems and the like. For example, an electro-optical device capable of reducing a lateral electric field without causing a decrease in luminance in a reflective liquid crystal device, a manufacturing method thereof, and its It is an object to provide an electronic apparatus including such an electro-optical device.

  In order to solve the above problems, an electro-optical device according to the present invention includes a first substrate, a second substrate disposed so as to face the first substrate, and a plurality of display regions on the first substrate. A plurality of pixel electrodes made of a transparent conductive material, each having a convex portion formed around an opening region in each of the pixel regions, and a plurality of pixel electrodes each having an end portion running on the convex portion. A counter electrode made of the transparent conductive material, formed on one surface of the second substrate facing the first substrate, so as to face the plurality of pixel electrodes, and the first substrate, The electro-optic material sandwiched between the second substrates, and formed on the lower layer side of the pixel electrode on the first substrate and electrically connected to the pixel electrode, as viewed from the first substrate The image from the second substrate side. And a conductive reflective film which reflects light incident on the region on the side of the second substrate.

  According to the electro-optical device of the invention, the first substrate is a substrate on which a circuit unit including a semiconductor element such as a pixel switching TFT and various wirings are formed.

  The second substrate is made of, for example, a transparent glass substrate, and is disposed so as to face the first substrate. Such a second substrate transmits light to an electro-optical material described later and transmits light reflected by a conductive reflective film described later.

  The convex portion is formed around the opening region in each of the plurality of pixel regions constituting the display region on the first substrate. Such a convex part protrudes with respect to the plane along the substrate surface of the first substrate, and is constituted by an insulating film formed in a predetermined pattern on the first substrate. The opening area is an area that can substantially reflect light contributing to image display in the pixel area. More specifically, for example, the pixel region is a region overlapping with a conductive reflective film described later.

  The plurality of pixel electrodes are formed in the plurality of pixel regions such that end portions run over the convex portions, and are made of a transparent conductive material such as ITO. The electro-optic material in each pixel region is driven according to such a pixel electrode and a voltage generated between counter electrodes described later. The electro-optical device according to the present invention employs a so-called inversion driving method in which different potentials are supplied to pixel electrodes adjacent to each other among a plurality of pixel electrodes. Therefore, the end portion that has risen over the convex portion is closer to the counter electrode, which will be described later, than the portion of the pixel electrode that does not run over the convex portion. It is reduced by the voltage generated between the counter electrodes.

  The counter electrode is formed on one surface of the second substrate facing the first substrate so as to face the plurality of pixel electrodes, and is made of a transparent conductive material such as ITO, for example. Yes. The potential of the counter electrode is maintained at a fixed potential that is constant with respect to the potential of the pixel electrode, for example, during operation of the electro-optical device.

  The electro-optical material is, for example, liquid crystal, and is sandwiched between the first substrate and the second substrate, and is driven by a voltage generated between the pixel electrode and the counter electrode.

  The conductive reflective film is formed on a lower layer side of the pixel electrode on the first substrate and is electrically connected to the pixel electrode, and the conductive reflection film is viewed from the second substrate side when viewed from the first substrate. Light incident on the pixel region is reflected toward the second substrate. Since such a conductive reflective film is not inclined with respect to the substrate surface of the first substrate like the edge of the pixel electrode, the light incident on the conductive reflective film from the second substrate is directed in the incident direction. That is, it reflects directly toward the second substrate. Therefore, according to the conductive reflective film, the opening region of the pixel region is not narrowed according to the shape of the pixel electrode, and even when the end of the pixel electrode is inclined for the purpose of reducing the lateral electric field, A decrease in luminance in the pixel region can be suppressed.

  Therefore, according to the electro-optical device according to the present invention, it is possible to suppress a decrease in display performance due to the horizontal electric field while maintaining the luminance in the pixel region, and to display a high-quality image.

  In one aspect of the electro-optical device according to the aspect of the invention, the convex portion extends along a boundary between adjacent pixel regions among the plurality of pixel regions, and the end portion extends along the boundary. It may extend.

  According to this aspect, since the convex portion extends along the boundary between the pixel regions adjacent to each other, the end portion of the pixel electrode can be formed so as to run on the convex portion. Therefore, it is possible to reduce the lateral electric field generated between the ends of the pixel electrodes adjacent to each other between the ends facing each other along the boundary.

  In order to solve the above-described problem, the electro-optical device manufacturing method according to the present invention includes a plurality of regions each serving as an opening region in each of a plurality of pixel regions that constitute a display region on the first substrate. A first step of forming a conductive reflective film; a second step of forming a resist film across the plurality of conductive reflective films; and the conductive reflective film is not formed on both surfaces of the first substrate. A third step of irradiating the resist film with light from the back surface, which is a side surface, and curing a portion of the resist film that overlaps a region to be a non-opening region of the pixel region; and a third step of the resist film And a fourth step of removing a portion that has not been cured by the step.

  According to the method for manufacturing an electro-optical device according to the invention, in the first step, a plurality of regions each serving as an opening region in each of a plurality of pixel regions that constitute a display region on the first substrate are provided. A conductive reflective film is formed. Here, the opening area is synonymous with the opening area in the electro-optical device described above. The plurality of conductive reflective films are formed, for example, by forming a uniform conductive film on the first substrate and then separating the conductive film for each pixel region using a general-purpose patterning method.

  In the second step, a resist film is formed over the plurality of conductive reflective films. Such a resist film is made of, for example, a photocurable resin.

  In the third step, the resist film is irradiated with light from the back surface, which is the surface of the first substrate on which the conductive reflective film is not formed, and the pixel region of the resist film is not opened. The part which overlaps the area | region which should become an area | region is hardened. Accordingly, the plurality of conductive reflection films function as a mask, and light such as ultraviolet rays is irradiated to a portion of the resist film that extends to a region that does not overlap with the conductive reflection film. Thereby, the part which overlaps with a conductive reflective film among resist films is maintained in the uncured state.

  In the fourth step, a portion of the resist film that has not been cured by the third step is removed. Therefore, a portion of the resist film cured by the third step, in other words, a portion extending between the plurality of conductive reflective films remains on the first substrate as it is, and becomes a convex portion protruding from the periphery. Thereafter, the pixel electrode is formed in the pixel region so that the end portion runs over the convex portion, thereby forming the component to be formed on the first substrate side in the electro-optical device described above.

Therefore, according to the method for manufacturing an electro-optical device according to the present invention, an electro-optical device such as a reflective liquid crystal device capable of displaying a high-quality image can be manufactured by a simple method.

  In order to solve the above problems, an electronic apparatus according to the present invention includes the above-described electro-optical device of the present invention.

  According to the electronic apparatus according to the present invention, since the electro-optical device according to the present invention described above is provided, a projection display device such as a front projector or a rear projector capable of high-quality display, a mobile phone, an electronic device, and the like. Various electronic devices such as a notebook, a word processor, a viewfinder type or a monitor direct-view type display device, or a video tape recorder, a workstation, a videophone, a POS terminal, and a touch panel can be realized. In addition, as an electronic apparatus according to the present invention, for example, an electrophoretic device such as electronic paper can be realized.

  Such an operation and other advantages of the present invention will become apparent from the embodiments described below.

  Hereinafter, embodiments of an electro-optical device, a manufacturing method thereof, and an electronic apparatus according to the present invention will be described with reference to the drawings.

<1: Electro-optical device>
First, an overall configuration of a liquid crystal device 1 that is an embodiment of an electro-optical device according to the present invention will be described with reference to FIGS. 1 and 2. FIG. 1 shows a TFT array substrate 10 as an example of the “first substrate” of the present invention, together with the components formed thereon, as viewed from the counter substrate side as an example of the “second substrate” of the present invention. 2 is a plan view of the liquid crystal device 1. FIG. 2 is a cross-sectional view taken along the line II-II ′ of FIG. The liquid crystal device 1 according to the present embodiment is a reflective liquid crystal device that is driven by a TFT active matrix driving method with a built-in driving circuit.

  1 and 2, in the liquid crystal device 1, a TFT array substrate 10 and a counter substrate 20 are arranged to face each other. A liquid crystal layer 50 made of liquid crystal, which is an example of the “electro-optical material” of the present invention, is sealed between the TFT array substrate 10 and the counter substrate 20. The TFT array substrate 10 and the counter substrate 20 are formed by a sealing material 52 provided in a sealing region that is formed by a plurality of pixel regions and is located around an image display region 10a that is a typical example of the “display region” of the present invention. They are glued together.

  The sealing material 52 is made of, for example, an ultraviolet curable resin, a thermosetting resin, or the like for bonding the two substrates, and is applied on the TFT array substrate 10 in the manufacturing process and then cured by ultraviolet irradiation, heating, or the like. It is. In the sealing material 52, a gap material such as glass fiber or glass beads for dispersing the distance (inter-substrate gap) between the TFT array substrate 10 and the counter substrate 20 to a predetermined value is dispersed.

  A light-shielding frame light-shielding film 53 that defines the frame area of the image display area 10a is provided on the counter substrate 20 side in parallel with the inside of the seal area where the sealing material 52 is disposed. However, part or all of the frame light shielding film 53 may be provided as a built-in light shielding film on the TFT array substrate 10 side. There is a peripheral area located around the image display area 10a. In other words, particularly in the present embodiment, when viewed from the center of the TFT array substrate 10, the distance from the frame light shielding film 53 is defined as the peripheral region.

  The liquid crystal device 1 includes a data line driving circuit 101 and a scanning line driving circuit 104. In the peripheral region, the data line driving circuit 101 and the external circuit connection terminal 102 are provided along one side of the TFT array substrate 10 in a region located outside the sealing region where the sealing material 52 is disposed. The scanning line driving circuit 104 is provided along two sides adjacent to the one side so as to be covered with the frame light shielding film 53. The scanning line driving circuit 104 is electrically connected to each other by a plurality of wirings 105 formed so as to be covered with the frame light shielding film 53.

  Vertical conductive members 106 functioning as vertical conductive terminals between the TFT array substrate 10 and the counter substrate 20 are disposed at the four corners of the counter substrate 20. On the other hand, the TFT array substrate 10 is provided with vertical conduction terminals in a region facing these corner portions. Thus, electrical conduction can be established between the TFT array substrate 10 and the counter substrate 20.

  In FIG. 2, an alignment film 16 (see FIG. 6) is formed on the TFT array substrate 10 on a plurality of pixel electrodes 9a after formation of pixel switching TFTs, scanning lines, data lines, and the like. Has been. On the other hand, on the counter substrate 20, in addition to the counter electrode 21, a lattice-shaped or striped light-shielding film 23 and an alignment film are formed on the uppermost layer portion. The liquid crystal layer 50 is made of, for example, a liquid crystal in which one or several types of nematic liquid crystals are mixed, and takes a predetermined alignment state between the pair of alignment films.

  During the operation, the liquid crystal device 1 reflects incident light incident on the liquid crystal layer 50 from the counter substrate 20 side, which is the upper side in the drawing, toward the counter substrate 20 side by a conductive reflective film 19 (see FIG. 6) described later. , Display an image.

  In addition to the data line drive circuit 101, the scanning line drive circuit 104 and the like, the image signal on the image signal line is sampled on the TFT array substrate 10 shown in FIGS. Sampling circuit that supplies lines, precharge circuit that supplies pre-charge signals of a predetermined voltage level to multiple data lines in advance of image signals, inspection of quality, defects, etc. of the electro-optical device during production or shipment An inspection circuit or the like may be formed.

  Next, a circuit configuration in the image display area 10a will be described with reference to FIG. FIG. 3 is a circuit diagram showing a circuit configuration in the image display area 10a of the liquid crystal device 1 according to the present embodiment.

  In FIG. 3, each of a plurality of pixel portions 72 formed in a matrix that forms the image display area 10a of the liquid crystal device 1 includes a pixel electrode 9a, a TFT 30, and a liquid crystal element 50a. The TFT 30 is electrically connected to the pixel electrode 9a, performs switching control of the pixel electrode 9a during operation of the liquid crystal device 1, and drives the liquid crystal element 50a according to the control. The data line 6a to which the image signal is supplied is electrically connected to the source of the TFT 30. The image signals S1, S2,..., Sn to be written to the data lines 6a may be supplied line-sequentially in this order, or may be supplied for each group to a plurality of adjacent data lines 6a. May be.

  The scanning line 3a is electrically connected to the gate of the TFT 30, and the liquid crystal device 1 sequentially applies the scanning signals G1, G2,..., Gm to the scanning line 3a in a pulse sequence in this order at a predetermined timing. It is comprised so that it may apply. The pixel electrode 9a is electrically connected to the drain of the TFT 30, and the image signal S1, S2,... Supplied from the data line 6a is closed by closing the switch of the TFT 30 serving as a switching element for a certain period. Sn is written at a predetermined timing. Image signals S1, S2,..., Sn written to the liquid crystal via the pixel electrode 9a are held for a certain period with the counter electrode formed on the counter substrate.

  The liquid crystal contained in the liquid crystal layer 50 modulates light and enables gradation display by changing the orientation and order of the molecular assembly depending on the applied voltage level. In the normally white mode, the transmittance for incident light and reflected light is reduced according to the voltage applied in units of each pixel unit. In the normally black mode, the transmittance is applied in units of each pixel unit. The transmittance for incident light and reflected light is increased according to the voltage, and light having a contrast corresponding to the image signal is emitted from the liquid crystal device 1 as a whole. The storage capacitor 70 is added in parallel with the liquid crystal element 50 a formed between the pixel electrode 9 a and the counter electrode 21 in order to prevent the image signal from leaking.

  Next, an example of a method for driving the liquid crystal device 1 will be described with reference to FIG. FIG. 4 is a schematic plan view schematically showing the potential of each pixel electrode 9a when the liquid crystal device 1 according to this embodiment is driven.

  As shown in FIG. 4, since the 1H inversion driving method is adopted as the driving method of the liquid crystal device 1 in this embodiment, a horizontal electric field is generated between the pixel electrodes 9a adjacent to each other. That is, during the image display period of the nth field (where n is a natural number) or a frame, a voltage having a polarity different from the reference voltage is applied to each row of the pixel electrodes 9a arranged in parallel in the Y-axis direction. Thus, the liquid crystal in the pixel region is driven in a state where a drive voltage having a reverse polarity is applied to each row. This is shown in FIG. In the subsequent n + 1th field or frame image display period, as shown in FIG. 4B, the polarity of the drive voltage is reversed. After the n + 2nd field or frame, the states shown in FIGS. 4A and 4B are periodically repeated. When the polarity of the voltage applied to the liquid crystal layer 50 is periodically reversed in this way, application of a DC voltage to the liquid crystal is prevented, and deterioration of the liquid crystal is suppressed. Further, since the polarity of the applied voltage is reversed for each row of the pixel electrodes 9a, crosstalk and flicker are reduced.

  With this method, the pixel electrodes 9a adjacent to each other in the Y-axis direction (that is, belonging to different rows) are driven with potentials having opposite polarities with respect to the reference voltage. An electric field having a component parallel to the substrate surface of the TFT array substrate 10 is generated. Such a lateral electric field causes a malfunction of the liquid crystal. As a result, in the region where the liquid crystal is affected by the lateral electric field, more specifically, in the region C1, a modulation defect such as light leakage occurs and the contrast ratio decreases. In the liquid crystal device 1, it is possible to reduce display defects due to a lateral electric field by the convex portion 90 as will be described in detail later.

  Next, a specific configuration of the pixel portion of the liquid crystal device 1 according to the present embodiment will be described with reference to FIGS. 5 and 6. 5 is an enlarged plan view showing a part of the image display area 10a of the liquid crystal device 1, and FIG. 6 is a sectional view taken along line VI-VI ′ of FIG. FIG. 5 shows four pixel portions adjacent to each other among a plurality of pixel portions arranged in a matrix so as to constitute the image display region 10a.

  5 and 6, the liquid crystal device 1 includes a plurality of pixel electrodes 9 a, convex portions 90, and a conductive reflective film 91.

  The convex portions 90 are formed along the periphery of the opening region 72a in each of the plurality of pixel regions 72g constituting the image display region 10a on the TFT array substrate 10, and are latticed along the X direction and the Y direction in the drawing. It extends in a shape. The opening region 72a is a region that can substantially reflect light contributing to image display in the pixel region 72g, and is a region that overlaps the conductive reflective film 91 in the pixel region 72g. Therefore, the convex portion 90 is formed in the non-opening region 72b that does not contribute to image display in the pixel region 72g. Such a convex part 90 protrudes with respect to the plane along the substrate surface of the TFT array substrate 10, and is constituted by an insulating film formed in a predetermined pattern on the TFT array substrate 10.

  The plurality of pixel electrodes 9a are made of a transparent conductive material such as ITO, and are formed so that the end portions 19 run over the convex portions 90 in each of the plurality of pixel regions 72g. The plurality of pixel electrodes 9 a are separated from each other by an insulating film 93 formed in the same layer as the conductive reflective film 91 on the TFT array substrate 10. The end portion 19 is closer to the counter electrode 21 than the portion of the pixel electrode 9a that does not run over the convex portion 90, that is, the portion that extends in parallel with the substrate surface of the TFT array substrate 10, and therefore, between the adjacent pixel electrodes 9a. Is reduced by a voltage generated between the end portion 19 and the counter electrode 21, in other words, a vertical electric field acting along the vertical direction in FIG.

  Therefore, according to the liquid crystal device 1, when the inversion driving method is adopted as the driving method, display defects caused by the transverse electric field can be reduced, and a high-quality image can be displayed.

  In addition, in the present embodiment, the convex portion 90 extends along the boundary 73 of the pixel regions 72g adjacent to each other among the plurality of pixel regions 72g, and the end portion 19 extends along the boundary 73. .

  Therefore, according to the liquid crystal device 1, it is possible to reduce the lateral electric field generated between the end portions 19 of the pixel electrodes 9 a adjacent to each other along the boundary 73. It is possible to further reduce the alignment disorder of the liquid crystal near the boundary 73 as compared with the case where the pixel electrode 9a is formed so that the end portion 19 rides on the convex portion.

  The conductive reflective film 91 is formed on the lower layer side of the pixel electrode 9a on the TFT array substrate 10 and is electrically connected to the pixel electrode 9a. The conductive reflective film 91 is electrically connected to the drain of the TFT 30 via a contact portion or wiring portion (not shown), and relays an image signal supplied to the pixel electrode 9 a via the TFT 30. The conductive reflective film 91 reflects incident light incident on the pixel region 72 g from the counter substrate 20 side when viewed from the TFT array substrate 10 toward the counter substrate 20 when the liquid crystal device 1 is operated.

  Since the conductive reflective film 91 is not inclined with respect to the substrate surface of the TFT array substrate 10 like the end portion 19 of the pixel electrode 9a, incident light that has entered the conductive reflective film 91 from the counter substrate 20 side is received. Reflected toward the incident direction, that is, toward the counter substrate 20. Therefore, according to the conductive reflective film 91, the opening region 72a of the pixel region 72g is not narrowed according to the shape of the pixel electrode 9a, and the end 91 of the pixel electrode 9a is formed for the purpose of reducing the lateral electric field. Even when it is inclined, it is possible to suppress a decrease in luminance in the pixel region 72g.

  As described above, according to the liquid crystal device 1, it is possible to suppress a decrease in display performance due to a horizontal electric field while maintaining the luminance in the pixel region 72g and display a high-quality image.

<2: Manufacturing method of electro-optical device>
Next, a method for manufacturing the electro-optical device according to the present embodiment will be described with reference to FIGS. 7 and 8 are process cross-sectional views sequentially showing main manufacturing steps of the method for manufacturing the electro-optical device according to the present embodiment. The method for manufacturing the electro-optical device according to the present embodiment is a method for manufacturing a liquid crystal device for manufacturing the liquid crystal device 1 described above.

  As shown in FIG. 7A, each of the plurality of regions 172a to be the opening regions 72a in the region 172g corresponding to each of the plurality of pixel regions 72g to form the image display region 10a on the TFT array substrate 10. A plurality of conductive reflective films 91 are formed on the substrate (first step). The conductive reflective film 91 is formed by forming a uniform conductive film on the TFT array substrate 10 and then separating the conductive film into regions to be the pixel regions 72g using a general-purpose patterning method. The An insulating film 93 is formed between the plurality of patterned conductive reflective films 91.

  Next, as shown in FIG. 7B, a resist film 92 is formed across the plurality of conductive reflective films 91 (second step). For example, the resist film 92 is formed by applying a photocurable resin so as to cover the plurality of conductive reflective films 91.

  Next, as shown in FIG. 8C, a resist film is formed from the back surface, more specifically, the lower surface of the TFT array substrate 10 on the side where the conductive reflective film 91 is not formed. The portion of the resist film 92 that overlaps the region 172b to be the non-opening region 72b of the pixel region 72g is cured (third step). At this time, the plurality of conductive reflection films 91 function as a mask, and light is irradiated to a region of the resist film 92 that does not overlap with the conductive reflection film 91, more specifically, a portion extending to the region 172b. Therefore, by using the conductive reflective film 91 as a mask, the portion of the resist film 92 that overlaps the conductive reflective film 91 can be easily uncured as compared with the case where a mask is separately provided and light is irradiated. Can be maintained.

  Next, as shown in FIG. 8D, a portion of the resist film 92 that has not been cured by the above-described light irradiation is removed (fourth step). Therefore, a portion of the resist film 92 that has been cured by the above-described light irradiation, in other words, a portion that extends to a region that overlaps between the plurality of conductive reflective films 91 remains on the TFT array substrate 10 as it is, and protrudes from the periphery thereof. It becomes the convex part 90 which became. After that, the pixel electrode 9a is formed in the region 172g so that the end portion runs on the convex portion 90, and the alignment film 16 is formed thereon, so that it should be formed on the TFT array substrate 10 side in the liquid crystal device 1 described above. A component will be formed.

  Therefore, according to the method for manufacturing the electro-optical device according to the present embodiment, the liquid crystal device 1 capable of displaying a high-quality image can be manufactured by a simple method.

<3: Electronic equipment>
Next, a reflection type projector using the above-described liquid crystal device as a light valve will be described with reference to FIG. FIG. 9 is a diagram illustrating a configuration of a reflective projector that is an example of the electronic apparatus according to the present embodiment.

  In FIG. 9, in the projector 400, light (substantially white light) emitted from the light source lamp 200 is split into blue light B, red light R, and green light G by a color separation mirror 201 formed of a cross dichroic mirror. Each light is incident on a polarization beam splitter (PBS) 203 via a mirror 202, and S-polarized light is incident on the reflective liquid crystal light valves 100B, 100R, and 100G for color light modulation by the PBS 203. The incident color light is modulated by each light valve and then emitted from each light valve. In the PBS 203, the S polarization component returned from the reflective liquid crystal light valves 100B, 100R, and 100G is reflected and the P polarization component is transmitted. Accordingly, each PBS 203 transmits color light having a light amount corresponding to the degree of rotation of the polarization axis of the light emitted from the liquid crystal light valves 100B, 100R, and 100G. This amount of light corresponds to the amount of light (transmittance) corresponding to the gradation level assigned to each color light. The color light transmitted through each PBS 203 is reflected by blue light B and red light R by the wavelength selective reflection layer of blue light reflection / red light reflection formed in an X shape in the color synthesis prism 204, and green light G is reflected. After being transmitted, the color light is synthesized and emitted. An image is projected onto the screen 206 by the projection lens 205 with this color light. Since the projector 400 according to this embodiment includes the above-described liquid crystal device, the projector 400 has high display performance.

1 is a plan view illustrating an overall configuration of an electro-optical device according to an embodiment. It is II-II 'sectional drawing of FIG. FIG. 3 is a circuit diagram illustrating a circuit configuration in an image display region of the electro-optical device according to the embodiment. FIG. 6 is a schematic plan view for explaining an operation state when the electro-optical device according to the embodiment is driven by the 1H inversion driving method. FIG. 3 is an enlarged plan view showing a part of the electro-optical device according to the embodiment. It is VI-VI 'sectional drawing of FIG. FIG. 6 is a process cross-sectional view (part 1) illustrating the main manufacturing process of the electro-optical device manufacturing method according to the embodiment in order. FIG. 10 is a process cross-sectional view (part 2) illustrating the main manufacturing process of the method for manufacturing the electro-optical device according to the embodiment in order. It is the figure which showed the structure of the electronic device which concerns on this embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Liquid crystal device, 10 ... TFT array substrate, 19 ... End part, 20 ... Counter substrate, 9a ... Pixel electrode, 50 ... Liquid crystal layer, 90 ... Convex part, 91 ... conductive reflective film, 400 ... projector

Claims (4)

A first substrate;
A second substrate disposed to face the first substrate;
A convex portion formed around the opening region in each of the plurality of pixel regions constituting the display region on the first substrate;
A plurality of pixel electrodes made of a transparent conductive material, each of the plurality of pixel regions being formed so that end portions thereof run over the convex portions;
A counter electrode made of the transparent conductive material, formed on one surface of the second substrate facing the first substrate so as to face the plurality of pixel electrodes;
An electro-optic material sandwiched between the first substrate and the second substrate;
Light that is formed on a lower layer side of the pixel electrode on the first substrate and is electrically connected to the pixel electrode, and is incident on the pixel region from the second substrate side when viewed from the first substrate. An electro-optic device comprising: a conductive reflective film that reflects the light toward the second substrate. The said convex part is extended along the boundary of the mutually adjacent pixel area | region among these pixel areas, and the said edge part is extended along the said boundary. Electro-optic device. A first step of forming a plurality of conductive reflective films in each of a plurality of regions to be an opening region in each of a plurality of pixel regions to constitute a display region on the first substrate;
A second step of forming a resist film over the plurality of conductive reflective films;
A region to be the non-opening region of the pixel region in the resist film by irradiating the resist film with light from the back surface, which is the surface of the first substrate on which the conductive reflective film is not formed. A third step of curing the portion overlapping with
And a fourth step of removing a portion of the resist film that has not been cured in the third step. An electronic apparatus comprising the electro-optical device according to claim 1.

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