JP2009202083A - Rotor element structure and dry air supply apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a rotor element structure and a dry air supply apparatus, wherein the large force is not applied to a honeycombed rotor element, a large effective treatment region in the rotor element is maintained, and the weight is suppressed. <P>SOLUTION: This invention relates to the rotor element structure formed in a two-stage series, wherein each of the rotors is provided with the honeycombed rotor element 1 having non-penetration grooves 12a, 12b provided on both end faces toward the axial center side and a center hole 13 provided at the center in the diametric direction, respectively; outer peripheral rings 32a, 32b covering the outer periphery of the rotor element 1; cylindrical boss parts 4a, 4b to be fitted to the center hole 13; first and second frames 2a, 2b connecting the outer peripheral rings 32a, 32b to the boss parts 4a, 4b and consisting of plate-like ribs 31a to be fitted to the non-penetration hole of the honeycombed rotor element 1; and outer peripheral panels 2c connecting the first frame 2a to the second frame 2b. An inner end part of the boss part 4a of the first frame 2a is fitted to an inner end part of the boss part 4b of the second frame 2b. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a two-stage series rotor element structure and a dry air supply apparatus including the same.

  The basic structure of the rotary dry air supply device includes a honeycomb-shaped rotor element structure, a casing attached so that the rotor element structure can freely rotate, and processing zones on both sides in the axial direction of the rotor element. It consists of a fixed plate that forms a regeneration zone. Various types of rotor element structures are known for use in these rotary gas processing apparatuses.

  Japanese Patent Application Laid-Open No. 2004-113844 relates to a honeycomb-like adsorption rotor, in which a central boss and an outer peripheral plate are fixed with plate-like spokes, and the fixing is fixed with bolts, and a large force is applied to the honeycomb body. I do not take it. In addition, the honeycomb body is disclosed in the shape of eight fans mounted between the spokes.

  Japanese Patent Laid-Open No. 2001-276552 discloses a cylindrical shape in which a rotor is formed by an arc-shaped sector composed of a gas adsorbing element having a honeycomb structure having a large number of small through holes partitioned in a circular arc shape by radially extending spokes. 2 are respectively arranged in the rim of each of these, and are integrated with a caulking material such as silicone between the joint surfaces of the respective sectors and the spokes and the rim, and contact the axial end surface of the spoke with the end surface and both sides of the end surface. There is disclosed a rotor for a rotary adsorber provided with a heat-shielding seal made of a non-combustible material plate covering a joint portion of the two arcuate sectors.

  Further, the suction rotor described in Japanese Patent Application Laid-Open No. 2003-126641 includes a basic frame and a plurality of blocks. The basic frame includes an inner peripheral frame (boss) and a plurality of radial extensions extending from the inner peripheral frame. Fins and an outer peripheral frame.

  As described above, the conventional rotor element structure (adsorption rotor) has a plate-like spoke having a central boss and a cylindrical outer peripheral plate (rim) so that a large force does not act on the honeycomb-like rotor element. The honeycomb body having a fan-shaped cross section is mounted on eight fan-shaped small through holes formed between the outer peripheral plate and the spokes.

Japanese Patent Application Laid-Open No. 2004-321964 discloses a dry air supply device having a two-stage rotor that carries an adsorbent and is connected in series and supported rotatably. In this dry air supply device, the rotor is sealed between the rotors, and a partition member that divides the rotation area of the rotor into an adsorption zone, a regeneration zone, and a cooling zone is installed, thereby omitting pipes that connect the rotors. It has a simple structure.
JP 2004-113844 A (Claim 1, paragraph numbers 0014 to 0016) JP 2001-276552 A (Claim 1, FIG. 1, FIG. 10) Japanese Unexamined Patent Publication No. 2003-126641 (Claims, FIGS. 3 to 5) JP 2004-321964 A (claim, paragraph number 0016, FIG. 1)

  However, since the conventional rotor element structure has eight plate-like spokes attached to the apparent cylindrical honeycomb-shaped rotor element in the axial direction, the rotor element area that can be effectively used is reduced, There is a problem that processing efficiency is poor. Further, since the plate-like ribs are provided over the entire axial length of the apparent cylindrical honeycomb-shaped rotor element, there is a problem that the rotor element structure becomes heavy and power consumption required for rotation is high. Japanese Patent Application Laid-Open No. 2004-321964 discloses a plate-like spoke composed of a metal cylindrical body having both ends opened and a honeycomb structure mounted in the cylindrical body and carrying an adsorbent on a base material. However, since such a rotor element structure is rotated by supporting the outer peripheral portion with a rotor or the like, a large force acts on the honeycomb-shaped rotor element, and the rotor is damaged. Problems such as inability to rotate smoothly.

  Accordingly, an object of the present invention is to provide a two-stage series rotor element structure and dry air supply device in which a large force does not act on the honeycomb-shaped rotor element, a large effective processing area in the rotor element can be taken, and the weight is suppressed. Is to provide.

  That is, the present invention solves the above-described conventional problems, and includes a first rotor and a second rotor that carry an adsorbent and are connected in series and supported rotatably, and outermost ends of these rotors. And a fixed plate that is disposed between the rotors and divides the rotation region of the rotor into an adsorption zone, a regeneration zone, and a cooling zone, and the first rotor and the second rotor are respectively axially centered on both end faces. A honeycomb-shaped rotor element provided with a non-penetrating groove and a central hole penetrating in the axial direction at the center in the radial direction, an outer ring covering the outer periphery of the rotor element, and a cylinder fitted in the central hole The boss portion is connected to the outer ring and the boss portion, and the first frame is formed of a plate-like rib that fits into one non-through hole of the honeycomb-like rotor element, and covers the outer circumference of the rotor element. With outer ring A cylindrical boss portion that fits into the center hole, a second frame that connects the outer peripheral ring and the boss portion, and includes a plate-like rib that fits into the other non-through hole of the honeycomb-like rotor element; And an outer peripheral panel that connects the first frame and the second frame, and a front end portion inside the boss portion of the first frame and a front end portion inside the boss portion of the second frame are fitted to each other. The present invention provides a rotor element structure.

  The present invention also provides the rotor element structure, drive means for rotationally driving the first rotor and the second rotor, a supply path for supplying dry air by passing the air to be treated through the adsorption zone, The present invention provides a dry gas supply device provided with an exhaust passage through which regeneration air is passed through the cooling zone and then heated to pass through the regeneration zone, and a rotary gas processing device including the rotor element structure.

  According to the rotor element structure and the dry air supply device of the present invention, each of the first rotor and the second rotor arranged in series in two stages includes an outer cylinder frame covering the rotor element, the first frame, the second frame, and the outer periphery. Since it is composed of three members of the panel and plate-like ribs are attached only to the first frame and the second frame, the rotor element is maintained while maintaining a structure in which a large force does not act on the honeycomb-like rotor element as in the prior art. A large effective processing area can be taken and the weight can be reduced.

  Next, a rotor element structure according to an embodiment of the present invention will be described with reference to FIGS. 1 is an exploded perspective view of the rotor element structure of the present example, FIG. 2 is a perspective view of a first rotor used in the rotor element structure of the present example, and FIG. 3 is an exploded perspective view of the first rotor.

  The rotor element structure 20 of this example includes an adsorbent and a first rotor 10 and a second rotor 10a that are connected in series and supported rotatably, and three locations between the outermost end of the rotor and the rotor. And the fixed plate 6a, 6b, 6c that divides the rotation area of the rotor into an adsorption zone 65, a regeneration zone 63, and a cooling zone 64. Reference numeral 6c denotes an intermediate fixing plate. The rotors 10 and 10a and the fixed plates 6a, 6b, and 6c are connected by a connecting rod (not shown) that is passed through these central holes. Since the first rotor 10 and the second rotor 10a have the same shape and structure except that the lengths in the axial direction are different, only the first rotor 10 will be described.

  The first rotor 10 includes a honeycomb-shaped rotor element 1 on which an adsorbent having a columnar appearance is supported, and an outer cylinder frame 2 that covers the circumferential portion of the rotor element 1. The honeycomb-like rotor element 1 is provided with a non-penetrating groove on both end faces toward the axial center and a central hole penetrating in the axial direction at the center in the radial direction. That is, the honeycomb-shaped rotor element 1 has a non-through groove that is divided into three sectors in the circumferential direction at a predetermined depth from one end face 11a (right side in FIG. 3) of the cylindrical object toward the center in the axial direction. 12a and a non-penetrating groove 12b that is divided into three sectors in the circumferential direction at a predetermined depth from the other end face 11b (left side in FIG. 3) of the cylindrical object toward the axial center. A central hole 13 through which the boss portions 4a and 4b of the first frame and the second frame are inserted at the center of the direction is provided. The plate-like rib 3 of the first frame 2a is fitted into the non-penetrating groove 12a, and the plate-like rib 3 of the second frame 2b is fitted into the non-penetrating groove 12b.

  The non-penetrating grooves 12a and 12b are not limited to three and may be four or more. Further, the number of installations in the non-penetrating grooves 12a and 12b may be the same or different from each other, but the same is preferable in that the production efficiency is improved. If there are two non-penetrating grooves 12a and 12b, the cylindrical shapes of the first frame 2a and the second frame 2b cannot be maintained and are easily decentered, and if they are too many, the effective processing area in the honeycomb is reduced. become. In the present specification, when both the first frame and the second frame are described, “first” and “second” may be omitted.

  The depths (axial lengths) of the non-penetrating grooves 12a and 12b are determined in consideration of the strength of the rotor element 1, the processing area of the rotor element 1, the mounting stability of the frame, and the like. The depth of the non-penetrating groove 12b is about 1/10 to 1/3 of the entire length of the rotor element 1, respectively. If the depth of the non-penetrating groove 12a or the non-penetrating groove 12b is too shallow, the mounting stability of the frame is lowered, and if too deep, the processing area of the rotor element 1 is lowered and the strength is lowered. In this example, the depth of the non-penetrating grooves 12a and 12b is set so that when the frames 2a and 2b are attached to the rotor element 1, the front end portion (first fitting portion) in the axial direction of the boss portion 4a of the first frame 2a. ) 42a and the tip end (second fitting) 42b on the inner side in the axial direction of the boss 4b of the second frame 2b are fitted to each other, and the tips 31a and 31b on the outer side of the plate-like rib 3 and the end face of the rotor element 1 11a and 11b are dimensions that are flush with each other. The three-divided area formed by the non-penetrating grooves 12a and 12b has nothing to do with the zone-divided areas of the processing zone and the reproduction zone.

  The center hole 13 is a hole formed in the radial center of the cylindrical rotor element 1 and penetrating in the axial direction, and is substantially the same as the outer diameter of the boss portions 4a and 4b of the first frame 2a and the second frame 2b. Has an inner diameter.

  The first frame 2a is fitted to one end face side (the right side in FIGS. 2 and 3) of the rotor element 1, and is located at the center in the radial direction and is fitted to the inner end in the axial direction. A boss portion 4a having a predetermined length having a portion 42a and three plate-like ribs 31a that extend radially from the boss portion 4a and fit into the non-penetrating groove 12a connected to the cylindrical outer ring 32a. The number of plate-like ribs 31a is the same as the number of non-through grooves 12a formed in the rotor element 1. If there are three plate-like ribs 31a, the outer peripheral ring 32a will not be decentered, and the processing area of the rotor element 1 will not be reduced.

  Further, the width dimension (length in the axial direction) of the plate-like rib 31a is the same as the depth of the non-penetrating groove 12a, and is the same as the width dimension of the outer peripheral ring 32a. That is, the outer end surface 33a in the axial direction of the outer peripheral ring 32a and the outer end surface 31a of the plate-like rib 31a are the same surface. As a result, in the case of a rotary gas processing apparatus, the structure of a fixed plate having a zone forming function for forming a processing zone and a regeneration zone and a sealing function for an inter-zone seal and an outer seal for sealing the zone and the outside air is simplified. It can be. In this example, the first fitting portion 42a of the first frame 2a is a cylindrical female portion having a fitting hole 42a having an inner diameter substantially the same as the outer diameter of the cylindrical male portion of the second fitting portion 42b of the second frame 2b. It is.

  Four engaging members (engaging portions) 5 are attached to the outer peripheral portion of the first frame 2a at a predetermined pitch in the circumferential direction. When this engaging member 5 is a rotary gas processing device, it improves the engagement with an endless belt wound around this portion. Therefore, the same rubber material as the endless belt can be used.

  The second frame 2b is fitted to the other end face side (the left side in FIGS. 2 and 3) of the rotor element 1, and is located at the radial center and second fitted to the inner end in the axial direction. A boss portion 4b having a predetermined length having a portion 42b and three plate-like ribs 31b that extend radially from the boss portion 4b and fit into the non-penetrating groove 12b connected to the cylindrical outer ring 32b. The number of plate-like ribs 31b is the same as the number of non-through grooves 12b of the rotor element 1 formed. Further, the width dimension (length in the axial direction) of the plate-like rib 31b is the same as the depth of the non-penetrating groove 12b, and is the same as the width dimension of the outer peripheral ring 32b. That is, the outer end surface 33b in the axial direction of the outer peripheral ring 32b and the outer end surface 31b of the plate-like rib 31b are the same surface. The second fitting part 42b of the second frame 2b is a cylindrical male part having a boss hole 41b and an outer diameter smaller than the outer diameter of the boss part main body 411 in this example.

  Bearings (not shown) are inserted into the boss portions 4a and 4b of the first frame 2a and the first frame 2b. Thereby, rotation of the rotor element structure 10 becomes smooth.

  The outer peripheral panel 2c connects the first frame 2a and the second frame 2b, and is attached to the outer periphery of the central portion of the cylindrical rotor element 1 in the axial direction. In addition, the outer peripheral panel 2c of the present example is formed in a cylindrical shape by abutting the flange portions 24 that project the side ends of the half cylindrical members 25a and 25b outward.

  To form the first rotor 10, the plate-like ribs 31a of the first frame 2a and the plate-like ribs 31b of the second frame 2b are fitted into the non-through grooves 12a and 12b of the rotor element 1, respectively. The second fitting part 42b of the boss part 4b of the second frame 2b is inserted into the first fitting object 42a of the boss part 4a, and the rotor element 1 and the frames 2a and 2b are integrated. An adhesive may be used when the rotor element 1 and the frames 2a and 2b are fitted. Next, the semi-cylindrical members 25a and 25b are put on the outer periphery of the central portion of the rotor element 1, and the flange portions 24 are brought into contact with each other to be screwed. The screw holes 21 formed at a predetermined pitch in the circumferential direction of the edge in the width direction (axial direction) of the semi-cylindrical members 25a and 25b and the screw holes of the first frame 2a are replaced with the screw holes 21 and the second frame. Screw the 2b screw holes together. At this time, the outer peripheral surface of the rotor element 1 and the inner peripheral surfaces of the half-cylindrical members 25a and 25b may be joined with an adhesive. The first rotor 10 assembled in this way can maintain a structure in which a large force does not act on the honeycomb-like rotor element 1 as in the prior art, and can take a large effective processing area in the rotor element 1 and is lightweight. Can be. The first rotor 10 is particularly effective when the axial length of the rotor element 1 is long.

  The 1st rotor 10 is not limited to the said form, For example, the 1st fitting part of the 1st frame 2a can be used as a cylindrical male part, and the 2nd fitting part of the 2nd frame 2b can be used as a cylindrical female part. . Further, the engaging member 5 may be installed on the outer ring 32b of the second frame 2b, or may be installed on both the outer ring 32a of the first frame 2a and the outer ring 32b of the second frame 2b. Further, the joining between the outer peripheral panel 2c and the first frame 2a and the joining between the outer peripheral panel 2c and the second frame 2b may be joining by welding or joining by an adhesive. Further, the outer peripheral panel 2c may be a cylindrical member from the beginning. When the outer peripheral panel 2c is a cylindrical member, the outer peripheral panel 2c is first assembled to the rotor element 1, and then the first frame 2a and the second frame 2b are assembled. Further, the engaging member 5 may be formed over the entire peripheral surface of the outer peripheral ring 32a of the first frame 2a.

  The fixed plates 6a and 6b define end faces 11a and 11b of the rotor element 1 at least in a processing zone and a regeneration zone, and are provided with sealing means. Since the fixed plates 6a and 6b are symmetrical members having the same shape, only one fixed plate 6a will be described. The fixed plate 6a is normally fixed to the casing of the dry air supply device, and defines the end face of the rotor element 1 into a processing zone 65, a regeneration zone 63, and a cooling zone 64, and is arranged in the axial direction of the outer peripheral ring 32a. An annular seal portion 61 having a flat surface that is in sliding contact with the outer end 33a and a sliding contact with the end surface 11a of the rotor element 1, and the same surface as the annular seal portion 61 that defines the end surface of the rotor element 1 for each zone. A zone seal 62 is provided. A shaft hole 66 through which the connecting rod passes is formed at the center. The annular seal portion 61 and the zone seal portion 62 may be simply referred to as “seal portion”.

  The ring shape of the annular seal portion 61 may be the same as the ring shape of the outer end 33a of the outer peripheral ring 32a of the frame 2a and a width larger than the end face width of the outer end 33a. Thereby, the outer side end 33a can be covered with the annular seal part 61, and it can seal completely.

  The zone seal portion 62 has a partition function and a seal function that define the end face of the rotor element 1 for each zone. That is, the seal portion formed of the annular seal portion 61 and the zone seal portion 62 has a shape of a large ring shape portion having a predetermined width and a small return shape portion having a predetermined width coaxial with the large return shape as viewed from the side, that is, in the rotation axis direction. And a rectangular portion that connects the large ring shape portion and the small return shape portion and partitions the zones.

Width _{w 1} of zone seal portions 62, can not be unconditionally determined by the size of the rotor element 1, is generally 10 to 30 mm. If w ₁ is in this range, even if there are large and small irregularities in the rotor element, the inter-zone sealing can be performed reliably. zone between the seal when w ₁ is too small is insufficient, the effective processing area narrowed too large zone is reduced.

Further, the width _{w 2} of the annular seal portion 61 is approximately 10 to 30 mm. When w ₂ is too large effective processing area of the rotor element are reduced.

  For example, the fixed plate 6a has a seal portion formed on one surface of a metal plate 601 such as SUS in which a shaft hole 66 through which a connecting rod (not shown) passes in the center. As the seal part, foam metal such as Fluoroflex (registered trademark), silicone foam, etc. are attached to the metal plate 601 side (inner layer part), and a heat-resistant sheet is attached to the sliding contact part side above it. (Sliding contact portion). Fluoroflex is a closed-cell sheet foam made by foaming fluoro rubber, has excellent heat resistance and compression recovery characteristics, has little degassing component during heating, and is in a space where equipment that requires a clean environment is operating. It is suitable when supplying dry air.

  The heat-resistant sheet has heat resistance that can withstand a temperature of 200 ° C. or higher, and examples thereof include a PTFE resin sheet. If a heat-resistant sheet is used for the sliding contact portion of the annular seal portion 61 and the zone seal portion 62, smooth sliding can be realized at the seal portion even when high-temperature desorption air of 300 ° C or higher flows in the regeneration zone. Particles that are sometimes generated can be reduced.

  The intermediate fixing plate 6 c disposed between the first rotor 10 and the second rotor 10 a is provided with an annular seal portion 61 and a zone seal portion 62 on the other side of the metal plate 601. That is, the intermediate fixing plate 6 c is the same as the fixing plates 6 a and 6 b except that the annular seal portion 61 and the zone seal portion 62 are symmetrically installed on both sides of the metal plate 601.

  The rotor element structure 20 is an assembly of the first rotor 10, the second rotor 10a, and the fixed plates 6a, 6b, 6c. That is, in the rotor element structure 20, first, the stationary plates 6a and 6b are disposed at the outermost ends of the first rotor 10 and the second rotor 10a, and the stationary plate 6c is disposed between the first rotor 10 and the second rotor 10a. The boss hole 4 and the shaft holes of the fixing plates 6a and 6b are fitted so as to coincide with each other, and a connecting rod is passed through the central shaft hole 66 and both ends are tightened with bolts. The rotor element structure 10 and the outermost fixing plates 6a and 6b are tightened so that the compressive load is 0.01 to 0.2 MPa. Thereby, smooth rotation and reliable sealing of the two-stage rotor element structure 20 can be expressed.

  The rotor element structure 20 is an integral structure in which the first rotor 10 and the second rotor 10a are connected via an intermediate fixing plate 6c, and an annular seal portion 61 and a zone seal portion 62 are provided on both surfaces of the intermediate fixing plate 6c. Since they are arranged, the end surfaces of the first rotor 10 and the second rotor 10a can be partitioned into an adsorption zone 65, a regeneration zone 63, and a cooling zone 64, and air can be prevented from entering and leaking into adjacent zones. Further, since a heat-resistant resin sheet having wear resistance is used for the portion of the intermediate fixing plate 6c that slides with the end face of the rotor element, generation of particles can be prevented.

  The dry air supply apparatus of the present invention includes a driving means for rotationally driving the first rotor and the second rotor, a supply path for supplying the dry air by passing the air to be treated through the adsorption zone, and the cooling of the regeneration air And an exhaust path that is heated and passed through the regeneration zone after passing through the zone. The dry air supply apparatus of this example is demonstrated with reference to FIG.4 and FIG.5. FIG. 4 is a schematic cross-sectional view of the dry air supply apparatus of this example, and FIG. 5 is a view for explaining the gas flow direction with respect to the rotor element.

  In the dry air supply device 30, when the second rotor 10a is disposed on the adsorption upstream side and the desorption downstream side and the first rotor 10 is disposed on the adsorption downstream side and the desorption upstream side, the second rotor 10a is carried by the rotor element of the second rotor 10a. As the adsorbent, zeolite that can be regenerated at low temperature is suitable, and as the adsorbent supported on the rotor element of the first rotor 10, general-purpose zeolite that removes moisture from low-humidity air is suitable. Examples of zeolite that can be regenerated at low temperature include mordenite or Y-type zeolite having a silica / alumina ratio of 3 to 30 and a pore diameter of 6 to 8%. Moreover, as a general purpose zeolite, 3A, 4A, 5A, and 13X type zeolite are mentioned.

  In the dry air supply apparatus, as a driving means for rotationally driving the first rotor 10 and the second rotor 10a, a geared motor (not shown) and a pulley having one end attached to a rotating shaft of the motor and an engaging member on the other end And an endless belt hung on 5. Moreover, the 1st rotor 10 and the 2nd rotor 10a can rotate independently, respectively. In other words, the first rotor 10 and the second rotor 10a can have different motor speed pulley diameters, or can have different speeds by controlling the motor speed. The rotation speeds of the first rotor 10 and the second rotor 10a are appropriately determined within a range of 0.1 to 30 rph.

As shown in FIGS. 4 and 5, the dry air supply device 30 sequentially passes the air to be treated through the adsorption zone 65 of the second rotor 10 a and the adsorption zone 65 of the first rotor 10. Supply passages X ₁ and X ₂ for supplying dry air from which organic substances have been removed, and regeneration air are sequentially passed through the cooling zone 64 of the second rotor 10 a and the cooling zone 64 of the first rotor 10, and then heated by the heater 40. And exhaust passages Y _{1 to} Y ₄ that sequentially pass through the regeneration zone 63 of the first rotor 10 and the regeneration zone 63 of the second rotor 10a. The inlet side of the supply path is made up of a chemical filter, a processing blower, and a to-be-processed air supply pipe, and the outlet side is made up of a dry air outflow pipe and a ULPA filter. The inlet side of the exhaust path is composed of a chemical filter and a regeneration air supply pipe, and the outlet side of the second rotor 10a is composed of a regeneration fan and an exhaust outlet pipe. The fixed frames 6a to 6c are fixed to a casing (not shown). As the regeneration air, either air to be treated or dry air can be used. Examples of the space to which the dry air is supplied include a space for performing a process that is required to suppress the growth of a natural oxide film on a wafer in semiconductor device manufacturing.

An example of device specifications and operating conditions of the dry air supply device 30 is shown below. A known method is applied to the operation method of the dry air supply device 30.
(Equipment specifications and operating conditions)
Second rotor: diameter 500 mm, thickness (width); 200 mm, rotation speed: 5 to 20 rph
First rotor: diameter 500 mm, thickness (width); 400 mm, rotation speed: 3 to 10 rph
Zone ratio {(desorption zone area) / ((adsorption zone area) + (desorption zone area))}; 0.25
・ Regenerative air ratio (adsorption air volume) / (desorption air volume); 3
・ Air to be treated; flow rate 10m ³ / min, temperature 25 ℃, absolute humidity 45% RH
・ Outlet dew point: -85 ℃ DP or less ・ Outlet temperature: 53 ℃
・ Regenerative air; flow rate 7m ³ / min, temperature 25 ℃, absolute humidity 45% RH
・ Heating temperature: 200 ℃
・ Exhaust temperature: 80 ℃

  According to the rotor element structure of the present invention, each of the first rotor and the second rotor arranged in two stages in series includes an outer cylinder frame that covers the rotor element, the first frame, the second frame, and the outer peripheral panel 3. Since the plate-shaped rib is provided only on the first frame and the second frame, the effective processing area in the rotor element can be increased while maintaining a structure in which a large force does not act on the honeycomb-shaped rotor element. In addition, the weight can be reduced. Further, according to the dry air supply device of the present invention, the power consumption required for the rotation of the rotor element structure can be suppressed and the inter-zone seal and the outer seal can be stably performed. Can be prevented.

It is a disassembled perspective view of the rotor element structure of this example. It is a perspective view of the 1st rotor used with the rotor element structure of FIG. It is a disassembled perspective view of a 1st rotor. It is a schematic sectional drawing of the dry air supply apparatus of this example. It is a figure explaining the flow direction of the gas with respect to a rotor element.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Honeycomb-shaped rotor element 2 Outer cylinder frame 2a 1st frame 2b 2nd frame 2c Outer peripheral panel 3 Plate-shaped rim 5 Engagement member 6a, 6b Fixed frame 10 1st rotor 10a 2nd rotor 12a, 12b Non-through-groove 20 2 Stage serial rotor element structure 30 Dry air supply device 63 Regeneration zone 64 Cooling zone 65 Processing zone

Claims (6)

A first rotor and a second rotor, which support the adsorbent and are connected in series and supported rotatably, are arranged between the outermost end of the rotor and the rotor, and the rotation area of the rotor is divided into an adsorption zone, a regeneration zone, A fixed plate that divides into cooling zones,
The first rotor and the second rotor are respectively
A honeycomb-like rotor element provided with a non-penetrating groove on both end faces toward the axial center, and a central hole penetrating in the axial direction at the radial center;
An outer peripheral ring that covers the outer periphery of the rotor element, a cylindrical boss portion that fits into the center hole, and connects the outer peripheral ring and the boss portion, and fits into one non-through hole of the honeycomb rotor element. A first frame composed of plate-shaped ribs to be joined;
An outer peripheral ring that covers the outer periphery of the rotor element, a cylindrical boss portion that fits into the central hole, and connects the outer peripheral ring and the boss portion and fits into the other non-through hole of the honeycomb-shaped rotor element. A second frame composed of plate-like ribs to be joined;
An outer peripheral panel connecting the first frame and the second frame, and a front end portion inside the boss portion of the first frame and a front end portion inside the boss portion of the second frame are fitted together; A rotor element structure characterized by the above.   2. The rotor element structure according to claim 1, wherein sealing surfaces that are in sliding contact with end faces of the respective rotors are provided on both surfaces of the fixed plate disposed between the first rotor and the second rotor.   The rotor element structure according to claim 2, wherein a heat-resistant resin sheet is provided on a contact surface of a sealing material that is in sliding contact with an end surface of the rotor.   The rotor element structure according to any one of claims 1 to 3, wherein an end face of the honeycomb-like rotor element and an end face of each of the first frame and the second frame are the same plane. The rotor element structure according to any one of claims 1 to 4,
Drive means for rotationally driving the first rotor and the second rotor;
A supply path for passing dry air through the adsorption zone and supplying dry air;
A dry air supply device comprising: an exhaust path that passes the regeneration air through the cooling zone and then heats the regeneration air to pass through the regeneration zone.   6. The dry air supply device according to claim 5, wherein the first rotor and the second rotor are independently rotatable.

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