JP2009182174A - Rolled piezoelectric conversion element, and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a rolled piezoelectric conversion element for which workability can be improved, and to provide a method of manufacturing the same. <P>SOLUTION: Disclosed is the rolled piezoelectric conversion element constituted by rolling a sheet-like piezoelectric element 10 with electrodes, made of a ceramic-based piezoelectric material and having a first electrode 22 formed on a top surface 11 of the sheet-like piezoelectric element 10 to have a first non-electrode region 23 where the electrode is not formed at one end 13 of the sheet-like piezoelectric element 10 and also having a second electrode 22 formed on the reverse surface 12 to have a second non-electrode region 23 where the electrode is not formed at the other end 14 of the sheet-like piezoelectric element 10, in a state wherein the ends 13 and 14 of the sheet-like piezoelectric element 10 are folded back shifting from each other, with the folded-back portions as the inside center so that the first non-electrode region 23, first electrode portion 22, second non-electrode region 23, and second electrode portion 22 are exposed to the outside, the first and second electrode portions 22 or first and second non-electrode regions 23 have a surface shape including a uniquely-shaped portion 22. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a roll-type piezoelectric conversion element formed by winding a sheet-like piezoelectric material and a method for manufacturing the same.

  Conventionally, an actuator using a piezoelectric transducer as a small actuator has been provided. Such an actuator has high conversion efficiency for converting supplied electric energy into driving force, large driving power that is generated in spite of its small size, and its driving force control is easy, so an imaging lens for a camera-equipped mobile phone, a small projector Attention has been paid to the use as a driving lens and a positioning member of a coupling lens for coupling the light source light to an optical transmission member such as a fiber, a measuring instrument and other precision machines. An example of an actuator using such a piezoelectric conversion element is shown in FIG.

  This actuator has a configuration in which a conductive drive shaft 2 is fixed to one end of the piezoelectric conversion element 1 and a metallic member is fixed to the other end as a support member. A driven member 3 is attached to the drive shaft 2, and the driven member 3 fits the drive shaft 2 into the V-shaped groove 4 and presses the carbon shaft against the upper portion of the V-shaped groove 4 by the pressing spring 5. Thus, the drive shaft 2 and the driven member 3 are frictionally coupled. The driven member is driven by utilizing the shape displacement of the piezoelectric transducer that is generated by applying a voltage between the electrodes of the piezoelectric transducer.

  As such a piezoelectric conversion element, as shown in Patent Documents 1 and 2 below, a roll type piezoelectric element in which a sheet-like ceramic piezoelectric material is wound is known. In such a piezoelectric element, the displacement in the radial direction when the piezoelectric transducer is deformed by an electric field generated by the voltage applied between the electrodes is performed using polarization, or the height of the cylindrical shape perpendicular to the winding direction is used. Displacement is used.

  The shape of the piezoelectric transducer of Patent Document 1 is shown in FIG. As shown in FIG. 12, electrode portions are provided on the entire surface and the entire back surface of a sheet-like piezoelectric element made of a ceramic piezoelectric material, and the piezoelectric element provided with the electrode portion is bent in two. At this time, by providing a predetermined amount of difference E between the sheet lengths of the upper and lower sheets, and winding up the folded portion around the inner center, the stacked columnar bodies are exposed so that the electrode portions are exposed on the outermost peripheral surface. Form. Thereafter, this columnar body is fired under a predetermined temperature condition, cut to a length of several millimeters, and a predetermined high voltage is applied between two electrode portions to polarize the roll type piezoelectric transducer. Is disclosed.

  Thus, by winding up the upper and lower sheets while shifting the length by a predetermined amount, there is an advantage that both electrodes are exposed and arranged on the outermost peripheral surface of the completed piezoelectric conversion element, and the subsequent lead wire attaching operation is easy.

  Further, in the roll-type piezoelectric conversion element of Patent Document 2, as shown in FIG. 13, the first electrode 7 and the second electrode 8 provided on the front and back surfaces of the sheet-like ceramic piezoelectric element 6 are end portions of the piezoelectric element 6. Between the first electrode 7 and the end of the first electrode 7 and between the end of the piezoelectric element 6 and the second electrode 8, so that a non-electrode region where no electrode is provided is formed. 14 discloses a piezoelectric transducer in which an electrode portion, a non-electrode region, an electrode portion, and a non-electrode region are exposed in that order on the side surface of a cylindrical piezoelectric transducer as shown in FIG.

JP 2002-185055 A JP 2005-302975 A

  However, in the piezoelectric conversion element described in Patent Document 1, since the two electrode portions are adjacent to each other, soldering may be performed across the two electrode portions, causing a short circuit. There was a problem.

  In particular, the sheet-like piezoelectric element before firing is sufficiently large and easy to handle, with a length and width of several tens of millimeters square. On the other hand, the piezoelectric element after firing is contracted to about 2/3, and the length of the piezoelectric conversion element after cutting is short. Because it is a very small element with a diameter of several millimeters and a diameter of 1 mm unit, it is difficult to perform the short inspection process and the lead wire attaching process after polarization at the stage where the piezoelectric transducer element after the reduced firing is obtained. There is a problem that the above-mentioned mistake is likely to occur.

  In this respect, in the piezoelectric transducer described in Patent Document 2, the electrode portion, the non-electrode region, the electrode portion, and the non-electrode region are exposed in this order on the outer peripheral surface of the columnar body, and the two electrode portions are Since they are not adjacent to each other, the above errors can be reduced. However, the difficulty of the above-described process work due to shrinkage after firing is not sufficient with such a configuration alone. Also, in the piezoelectric conversion element, the electrode portion and the non-electrode region usually have similar textures and colors, so that the person who performs the inspection work or the person who performs the work of attaching the lead wire has the electrode portion and the non-electrode region. It is difficult to discriminate, and it takes time for each work, and there is a problem that workability is lowered.

  In addition, since the cross section of the piezoelectric conversion element is substantially circular, when a person who performs inspection work or a person who performs work of attaching a lead wire brings the instrument into contact with the columnar body, the columnar body is moved from a predetermined position. Since it rolls or slides, it is difficult to stabilize the columnar body at a predetermined position. Also from this point, there is a problem that each work takes time and workability is lowered.

  The present invention solves the above-described problems, and an object of the present invention is to provide a roll-type piezoelectric transducer that can improve workability and a method for manufacturing the roll-type piezoelectric transducer.

In the first embodiment of the present invention, a first electrode is formed on the surface of a sheet-like piezoelectric element made of a ceramic piezoelectric material, and a first non-electrode region where no electrode is formed at one end of the sheet-like piezoelectric element is formed. The sheet-like piezoelectric element with an electrode formed so as to have the second electrode on the back surface and the second non-electrode region where no electrode is formed on the other end of the sheet-like piezoelectric element, the first non-electrode region, Roll so that the folded portion is centered on the inner side with the end portions of the sheet-like piezoelectric elements being folded back so that the one electrode portion, the second non-electrode region, and the second electrode portion are exposed to the outside. A roll-type piezoelectric transducer configured by winding up into a shape,
One of the first and second electrode portions or the first and second non-electrode regions has a surface shape including a singular portion.
According to a second aspect of the present invention, there are provided first and second sheet-like piezoelectric elements made of a ceramic piezoelectric material, and the first electrode is provided on the surface of the first sheet-like piezoelectric element. Formed to have a first non-electrode region where no electrode is formed at the end of the piezoelectric element, a second electrode is formed on the surface of the second sheet-like piezoelectric element, and an electrode is formed at the end of the sheet-like piezoelectric element The first sheet-like piezoelectric element is formed so as to have a second non-electrode area that is not formed, and the back surface of the first sheet-like piezoelectric element and the surface of the second sheet-like piezoelectric element are connected to the first non-electrode area of the first sheet-like piezoelectric element. A laminated sheet-like piezoelectric element with an electrode laminated in a state where a side end portion and a second non-electrode region side end portion of the second sheet-like piezoelectric element are shifted from each other, the first non-electrode region, 1 electrode part, 2nd non-electrode area, 2nd electrode part respectively As exposed to parts, a roll-type piezoelectric transducer constituted by rolled up,
One of the first and second electrode portions or the first and second non-electrode regions has a surface shape including a singular portion.
According to a third aspect of the present invention, there is provided the roll-type piezoelectric transducer according to the first or second aspect, wherein the unique portion is a flat surface.
According to a fourth aspect of the present invention, there is provided a roll-type piezoelectric transducer according to any one of the first to third aspects, wherein the first and second electrode parts including the singular part or the first One of the surfaces of the second non-electrode region is a flat surface.
According to a fifth aspect of the present invention, there is provided a roll-type piezoelectric transducer according to any one of the first to third aspects, wherein the singular part includes first and second electrodes including the singular part. Or any one surface of the first and second non-electrode regions, which is concave with respect to the other portion.
According to a sixth aspect of the present invention, there is provided a roll-type piezoelectric transducer according to the fourth aspect, wherein the flat surface is formed on the first and second electrode portions.
According to a seventh aspect of the present invention, there is provided the roll-type piezoelectric transducer according to the fourth aspect, wherein the flat surface is formed in the first and second non-electrode regions.
According to an eighth aspect of the present invention, there is provided a first electrode on the surface of a sheet-like piezoelectric element made of a ceramic piezoelectric material, and a first non-electrode region where no electrode is formed on one end of the sheet-like piezoelectric element. A sheet-like piezoelectric element with an electrode formed so as to have a second non-electrode region on which the second electrode is formed on the back surface and no electrode is formed on the other end of the sheet-like piezoelectric element. The folded portion is centered on the inner side when the end portions of the sheet-like piezoelectric element are folded back so that the first electrode portion, the second non-electrode region, and the second electrode portion are exposed to the outside. A roll-type piezoelectric transducer configured by winding it into a roll,
The roll type piezoelectric transducer has an elliptical cross section, and has a shape in which the curvature radii of the surfaces of the first and second electrode portions are different from the curvature radii of the surfaces of the first and second non-electrode regions. It is a roll type piezoelectric conversion element characterized by having.
According to a ninth aspect of the present invention, there are provided first and second sheet-like piezoelectric elements made of a ceramic piezoelectric material, and the first electrode is provided on the surface of the first sheet-like piezoelectric element. Formed to have a first non-electrode region where no electrode is formed at the end of the piezoelectric element, a second electrode is formed on the surface of the second sheet-like piezoelectric element, and an electrode is formed at the end of the sheet-like piezoelectric element The first sheet-like piezoelectric element is formed so as to have a second non-electrode area that is not formed, and the back surface of the first sheet-like piezoelectric element and the surface of the second sheet-like piezoelectric element are connected to the first non-electrode area of the first sheet-like piezoelectric element. A laminated sheet-like piezoelectric element with an electrode laminated in a state where a side end portion and a second non-electrode region side end portion of the second sheet-like piezoelectric element are shifted from each other, the first non-electrode region, 1 electrode part, 2nd non-electrode area, 2nd electrode part respectively As exposed to parts, a roll-type piezoelectric transducer constituted by rolled up,
The roll type piezoelectric transducer has an elliptical cross section, and has a shape in which the curvature radii of the surfaces of the first and second electrode portions are different from the curvature radii of the surfaces of the first and second non-electrode regions. It is a roll type piezoelectric conversion element characterized by having.
The tenth aspect of the present invention is a method for manufacturing a roll-type piezoelectric transducer,
A first electrode is formed on the surface of a sheet-like piezoelectric element made of a ceramic piezoelectric material so as to have a first non-electrode region where no electrode is formed at one end of the sheet-like piezoelectric element, and the back surface of the sheet-like piezoelectric element Forming the second electrode so as to have a second non-electrode region where no electrode is formed at the other end of the sheet-like piezoelectric element;
The sheet-like piezoelectric element in which the first electrode portion, the second electrode portion, the first non-electrode region, and the second non-electrode region are formed is the first electrode portion, the second electrode portion, the first non-electrode region, and the second. A step of forming a columnar body by winding up in a roll shape so that the folded portion is the inner center, with the end portions of the sheet-like piezoelectric elements being shifted and folded with each other so that the non-electrode region is exposed to the outside;
A firing step of firing the columnar body,
Embossing that deforms the surface shape of one of the first and second electrode portions or the first and second non-electrode regions of the columnar body to a surface shape including a singular portion before the firing step. It is a manufacturing method of the roll type piezoelectric conversion element characterized by including a process.
An eleventh aspect of the present invention is a method for manufacturing a roll-type piezoelectric transducer according to the tenth aspect, wherein the embossing step includes embossing so that the singular part forms a flat surface. It is characterized by.
A twelfth aspect of the present invention is a method for manufacturing a roll-type piezoelectric transducer according to the tenth aspect, wherein the embossing step includes the first and second electrode parts including the singular part or the first One of the first and second non-electrode regions is embossed so as to form a flat surface.
A thirteenth aspect of the present invention is a method for manufacturing a roll-type piezoelectric transducer according to the tenth aspect, wherein the embossing step includes the first and second electrode parts including the singular part or the first It is characterized by embossing so that a recessed part may be formed with respect to the other part of either one surface of a 1st and 2nd non-electrode area | region.
Further, a fourteenth aspect of the present invention is a method for manufacturing a roll-type piezoelectric transducer according to the eleventh aspect or the twelfth aspect, wherein the embossing step is configured so that the flat surface is the first and second. It is formed in an electrode part.
A fifteenth aspect of the present invention is a method for manufacturing a roll-type piezoelectric transducer according to the eleventh aspect or the twelfth aspect, wherein the embossing step uses the flat surface as the first and second. It is formed in a non-electrode region.
According to a sixteenth aspect of the present invention, there is provided a method for manufacturing a roll-type piezoelectric transducer according to any one of the tenth to fifteenth aspects, wherein the method for manufacturing the roll-type piezoelectric transducer includes the firing. After the step, it includes a cutting step of cutting the columnar body into a predetermined length.
A seventeenth aspect of the present invention is a method for manufacturing a roll-type piezoelectric transducer,
First and second sheet-like piezoelectric elements made of a ceramic piezoelectric material are provided, the first electrode is formed on the surface of the first sheet-like piezoelectric element, and no electrode is formed at the end of the sheet-like piezoelectric element. Formed so as to have one non-electrode region, a second electrode is formed on the surface of the second sheet-like piezoelectric element, and a second non-electrode region is formed so that no electrode is formed at the end of the sheet-like piezoelectric element. An electrode forming step,
The back surface of the first sheet-like piezoelectric element and the front surface of the second sheet-like piezoelectric element are connected to the end of the first sheet-like piezoelectric element on the first non-electrode region side and the second sheet-like piezoelectric element. A laminated sheet-like piezoelectric element with electrodes laminated in a state where the second non-electrode region side end is shifted from each other, the first non-electrode region, the first electrode portion, the second non-electrode region, the second A step of forming a columnar body by winding up into a roll shape so that each electrode part is exposed to the outside;
A firing step of firing the columnar body,
Including a stamping step of deforming the surface shape of one of the first and second electrode portions or the first and second non-electrode regions to a surface shape including a singular portion before the firing step. A method for manufacturing a roll-type piezoelectric transducer characterized by the above.
An eighteenth aspect of the present invention is a method for manufacturing a roll-type piezoelectric transducer according to the seventeenth aspect, wherein the embossing step embosses so that the singular part forms a flat surface. It is characterized by.
According to a nineteenth aspect of the present invention, there is provided a method for manufacturing a roll-type piezoelectric transducer according to the seventeenth aspect, wherein the embossing step includes the first and second electrode parts including the singular part or the first Embossing is performed so that either one of the first and second non-electrode regions forms a flat surface.
A twentieth aspect of the present invention is a method for manufacturing a roll-type piezoelectric transducer according to a seventeenth aspect, wherein the embossing step includes the first and second electrode parts including the singular part or the first The embossing is performed so as to form a recess with respect to the other part of either one of the first and second non-electrode regions.
According to a twenty-first aspect of the present invention, there is provided a method for manufacturing a roll-type piezoelectric transducer according to the eighteenth or nineteenth aspect, wherein the embossing step forms the flat surface with the first and second flat surfaces. It is formed in an electrode part.
According to a twenty-second aspect of the present invention, there is provided a method for manufacturing a roll-type piezoelectric transducer according to the eighteenth or nineteenth aspect, wherein the embossing step forms the flat surface with the first and second surfaces. It is formed in a non-electrode region.
According to a twenty-third aspect of the present invention, there is provided a method for manufacturing a roll-type piezoelectric transducer according to any one of the seventeenth to twenty-second embodiments, wherein the method for manufacturing the roll-type piezoelectric transducer includes the firing. After the step, it includes a cutting step of cutting the columnar body into a predetermined length.
The “singular part” as used herein refers to a part whose shape is different from that of the other part of the side surface part of the roll-type piezoelectric transducer, and the shape of the part is not particularly limited. In addition to the surface, it may be a concave portion, a convex portion, or a portion having a locally small curvature different from the other portions.

  According to the present invention, since the difference between the electrode portion exposed on the outermost side surface of the roll-type piezoelectric transducer and the non-electrode region is determined, it is possible to perform inspection work even with a very small piezoelectric transducer of several millimeters. Also in the lead wire attaching work, the operator can easily find the electrode portion, and each workability can be improved.

  In addition, in the manufacturing process of the piezoelectric conversion element, since the process of forming the shape that can distinguish the electrode portion and the non-electrode region at the stage of the relatively large columnar body before firing by embossing, it is easy to work, As a result, mistakes in the process can be reduced. Further, even when the columnar body is deformed to some extent, it is not cracked and generation of defective products can be prevented.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS.

[First Embodiment]
The outline of the manufacturing method of the piezoelectric transducer of the first embodiment will be described with reference to FIGS. FIG. 1 is an explanatory diagram of a columnar body formed by rolling up electrode portions on the front and back surfaces of a sheet-like piezoelectric element, FIG. 2 is an explanatory diagram of a stamped columnar body, and FIG. 3 is a piezoelectric conversion It is a flowchart which shows the manufacturing process of an element.

  In the piezoelectric conversion element, first, electrode portions 22 are provided on the front surface 11 and the back surface 12 of one sheet-like piezoelectric element 10 made of a ceramic piezoelectric material. The piezoelectric element 10 is folded in two at the substantially central portion 15 and overlapped, and the piezoelectric elements 10 are wound around the substantially central portion 15 so as to be stacked to form the columnar body 20 (step of FIG. 3). S101 to S103). Thereafter, an embossing process, a firing process, a cutting process, a polarization process, and an inspection process are performed. Furthermore, a roll type piezoelectric transducer is completed through the process of attaching the lead wire 40 to the outer peripheral surface 21 of the columnar body 20 (steps S104 to S109 in FIG. 3).

  The polarization step and the inspection step may be performed after the lead wire 40 attachment step. Further, for convenience of explanation, the surface 11 of the piezoelectric element 10 is a surface that can be seen from above the paper surface of FIG. 1, and the back surface 12 of the piezoelectric element 10 is the surface that can be seen from below the paper surface of FIG. Actually, the front surface 11 of the piezoelectric element 10 corresponds to one surface of both the front and back surfaces of the piezoelectric element 10, and the back surface 12 corresponds to the other surface of the front and back surfaces of the piezoelectric element 10.

  Next, details of the piezoelectric transducer in the first embodiment will be described with reference to FIGS. 1 to 3 again.

First, the formation process of the piezoelectric element 10 (step S101 in FIG. 3) will be described. As a material of the piezoelectric element 10, a piezoelectric ceramic whose main component is PZT (PbZrO ₃ · PbTiO ₃ ) is used. This ceramic powder is mixed with a solvent, a dispersant, a binder, a plasticizer, and the like, formed into a uniform plane using a blade or the like, and stretched to a constant thickness of 45 μm. When the solvent is evaporated and dried, a flexible sheet-like piezoelectric element can be obtained. The ceramic piezoelectric material is not limited to this. For example, a material as disclosed in JP-A-2004-289078 [0053] may be used.

Next, a material obtained by pasting a platinum (Pt) -based electrode material with an appropriate resin binder on the front surface 11 and the rear surface 12 of the piezoelectric element 10 by a screen printing method has a predetermined thickness of about 7 to 10 μm. The electrode portion 22 is formed by printing to a thickness.
In this embodiment, the electrode portion is formed by the screen printing method. However, the present invention is not limited to this, and other methods, for example, a doctor blade method as shown in [0025] of JP-A-2004-289078 are used. There may be.

  The front surface 11 of the one end portion 13 of the piezoelectric element 10 that does not form the electrode portion 22 and the back surface 12 of the other end portion 14 of the piezoelectric element 10 become the non-electrode region 23. Further, the front surface 11 and the back surface 12 of the substantially central portion 15 of the piezoelectric element 10 also become non-electrode regions 23. FIG. 1A shows the piezoelectric element 10 in which the electrode portion 22 is formed on the front surface 11 and the back surface 12.

  Next, the superposition process (step S102 in FIG. 3) of the piezoelectric elements 10 will be described. The piezoelectric element 10 is folded back at the substantially central portion 15 so that the one end 13 and the other end 14 of the piezoelectric element 10 are displaced from each other, and the surfaces 11 are overlapped. Thereby, in the one end part 13 and the other end part 14 of the piezoelectric element 10, the non-electrode region 23 provided on the surface 11 of the one end part 13 of the piezoelectric element 10, the electrode part 22 on the surface 11, and the other end of the piezoelectric element 10. The non-electrode region 23 provided on the back surface 12 of the portion 14 and the electrode portion 22 of the back surface 12 are arranged in that order.

  A piezoelectric element 10 in which the surfaces 11 are superposed is shown in FIG. Here, the length to the non-electrode region 23, the electrode part 22, the non-electrode region 23, and the electrode part 22 corresponds to the circumferential length of the outer peripheral surface 21 of the columnar body 20.

Next, the step of forming the columnar body 20 (step S103 in FIG. 3) will be described.
The stacked piezoelectric elements 10 are wound in a substantially spiral shape from a substantially central portion 15 to form a columnar body 20 having a length of 100 mm. On the outer peripheral surface 21 of the side surface of the columnar body 20, the non-electrode region 23, the electrode portion 22, the non-electrode region 23, and the electrode portion 22 are exposed in that order along the circumferential direction of the columnar body 20. A columnar body 20 in which the piezoelectric element 10 is wound in a substantially spiral shape is shown in FIGS. The outer diameter of the columnar body 20 is 1.5 mm. The length and outer diameter of the columnar body are not limited to this.

  Next, the die pressing step (step S104 in FIG. 3) will be described with reference to FIG.

  In the first embodiment, the electrode portion 22 itself is a flat specific portion 30, and the entire surface of the electrode portion 22 exposed to the outside is a flat surface. FIG. 2A shows a columnar body in which the flat electrode portion 22 is exposed on the outer peripheral surface 21 thereof.

  In FIG. 2B, a pair of molds 100 are opposed to each other with the columnar body 20 in between. In FIG. 2B, the columnar body 20 is disposed so that the electrode portion 22 of the columnar body 20 faces the flat surface portion 101 of the mold 100.

  When the columnar body 20 is pressed by the pair of molds 100, the flat portion 101 of the mold 100 pushes the electrode portion 22 of the columnar body 20 toward the central axis of the columnar body 20. Thereby, the surface shape of the electrode part 22 of the columnar body 20 becomes a planar shape. FIG. 2C shows the columnar body 20 in which the mold 100 and the electrode portion 22 have a planar shape.

  In this embodiment, the entire surface of the exposed electrode part 22 is formed as the singular part 30, but a part of the surface shape of the electrode part 22 may be used as the singular part 30. Also, the whole or part of the surface shape of the non-electrode region 23 may be the singular part 30.

  Next, the firing process (steps S105 to S107 in FIG. 3) will be described. First, in the firing step, the columnar body 20 is fired under a predetermined temperature condition. The temperature condition for firing is, for example, gradually increasing the temperature to 500 ° C. over about 5 hours, firing for a certain time at 500 ° C., and then gradually increasing the temperature to 1200 ° C. after 9 hours from the beginning. Furthermore, after baking at 1200 ° C. for about 0.3 hours, it is cooled to room temperature over 6 hours. The columnar body shrinks by the firing step, the sheet length after firing is 70 mm, the outer diameter is 1 mm, and shrinks by about 30%.

  Next, in the cutting step, the cutter in which the cemented carbide powder is bonded to the outer peripheral surface of the rotating disk is rotated at high speed to cut both end portions of the columnar body 20 in the axial direction. The columnar body 20 is cut into a desired length, for example, 3 mm. Note that the length of the columnar body 20 is not limited to this, but the roll-type piezoelectric transducer used in the present invention is very small in the range of 1 mm to 5 mm.

  Next, in the polarization step, a high DC voltage is applied between the electrode portions 22 of the columnar body 20 to cause polarization. The direction of polarization is the thickness direction of the piezoelectric element 10. For example, in an environment of 60 ° C., a voltage of 1.5 kV / mm is applied between the electrode portions 22 for 20 minutes for polarization. By polarizing, it is possible to generate an axial displacement of the columnar body 20.

  Next, the inspection process (step S108 in FIG. 3) will be described with reference to FIG. An inspection table 300 and an inspector 301 are provided. The inspection table 300 has a mounting surface which is an upper surface thereof made of a conductive material. The inspector 301 is also formed of a conductive material.

  In the inspection step, it is inspected whether the columnar body 20 is short-circuited. First, the operator discriminates between the electrode portion 22 and the non-electrode region 23 of the columnar body 20. Since the surface shape of the electrode portion 22 is a planar shape, the operator can easily find the electrode portion 22. One of the found electrode portions 22 is placed on the inspection table 300 with the electrode portion 22 facing down. The other electrode portion 22 is on the top. The inspector 301 is brought into contact with the upper electrode part 22. Next, a predetermined voltage is applied to both electrode portions 22.

  Since one electrode portion 22 is formed on a flat surface and the flat electrode portion 22 is placed on a flat placement surface, the columnar body 20 can be stabilized on the inspection table 300. If the test piece 301 is lowered from above the columnar body 20, it can be brought into contact with the other electrode portion 22. Since the columnar body 20 is stably mounted at a predetermined position on the mounting surface of the inspection table 300, the columnar body 20 is inspected when the inspector 301 is brought into contact with the electrode portion 22 of the columnar body 20. There is no useless work to place the columnar body 20 in a predetermined position without rolling or sliding from the table 300, and the inspection work can be performed efficiently.

  In addition, an inspection line on which one or a plurality of columnar bodies 20 move is provided, one or more inspection tables 300 are provided on the inspection line, and an inspector 301 is provided above the inspection line corresponding to the inspection table 300. By moving the inspection table 300 and the inspector 301 at the same speed as the flow speed of the columnar body 20, the inspection can be performed while moving the columnar body 20. Thereby, the inspection work of the columnar body 20 can be automated, and the inspection work can be performed more efficiently.

  Next, the process of attaching the lead wire 40 (step S107 in FIG. 3) will be described with reference to FIG. A support base 400 and a pair of holding members 401 are provided. The support base 400 has a flat support surface. The holding member 401 is opposed to the columnar body 20 therebetween. Each holding member 401 has a holding surface 402 having the same surface shape as the surface shape of the non-electrode region 23 facing the holding member 401.

  In the attaching process of the lead wire 40, first, an operator discriminates between the electrode portion 22 and the non-electrode region 23 of the columnar body 20. Since the surface shape of the electrode part 22 is a flat surface, the operator can easily find the electrode part 22. Next, the columnar body 20 is placed on the support base 400 with the planar electrode portion 22 facing down. The columnar body 20 stably placed on the flat support surface of the support base 400 is shown in FIG.

  Next, the columnar body 20 is sandwiched from both sides by the pair of holding members 401. The non-electrode region 23 of the columnar body 20 is relatively fitted to the holding surface 402 of the holding member 401. The columnar body 20 held by the pair of holding members 401 is shown in FIG.

  Next, the support base 400 is retracted downward. When the support base 400 is retracted, the columnar body 20 is held by a pair of holding members 401. FIG. 5C shows the retracted support base 400 and the pair of holding members 401 that hold the columnar body 20.

  Next, the lead wire 40 and the soldering tool are brought close to the columnar body 20 and contacted with the upper electrode portion 22 from above or obliquely from above. Since the columnar body 20 is held, the columnar body 20 does not move even if a lead wire or the like is brought into contact, the columnar body 20 is stable during the mounting operation, and the mounting workability of the lead wire 40 is improved. good.

  After the lead wire 40 is soldered to the upper electrode portion 22, the pair of holding members 401 are rotated 180 degrees clockwise or counterclockwise. Thereby, the lower electrode part 22 becomes an upper side. The lead wire 40 is soldered to the electrode portion 22 on the upper side.

  In addition, the attachment process of the lead wire 40 is not restricted to the process shown in FIG. There may be only a step of placing the columnar body 20 on the support base 400 with the electrode portion 22 facing down and a step of attaching the lead wire 40 to the electrode portion 22 of the columnar body 20 on the support base 400. In this case, in attaching the lead wire 40, even if a soldering tool or the like is brought into contact with the columnar body 20, the columnar body 20 is stable, does not roll from a predetermined position, and does not slide from the predetermined position. It is not necessary to correct the position of the columnar body, the work can be performed in a short time, and the workability of attaching the lead wire 40 can be improved.

  In addition, since the electrode portion itself is a flat surface, it is easy to solder and the lead wire is easy to fix, so that there is an advantage that mistakes such as mistakenly soldering the non-electrode region are reduced.

  In the first embodiment, the surface shape of the electrode portion 22 is a flat surface, but the surface shape of the non-electrode region 23 may be a planar shape. In particular, when soldering a lead wire, the non-electrode portion is preferably a flat surface because it is more efficient to expose both electrode portions. In any case, it is easy to discriminate between the electrode portion 22 and the non-electrode region 23, and the inspection work and the mounting work of the lead wire 40 can be performed in a short time, and the workability can be improved.

  In the first embodiment, the electrode portion 22 is the singular portion 30 and the surface shape of the electrode portion 22 is a flat portion. However, as described above, the shape of the singular portion itself is not limited to this. For example, it may be a small hemispherical concave or convex portion. Furthermore, a small hemispherical concave portion may be provided in the planar electrode portion 22.

Furthermore, in the first embodiment, one piezoelectric element 10 is superposed, but the present invention is not limited to this. Here, an example of a roll type piezoelectric transducer obtained by laminating two piezoelectric elements will be described.
Each surface 11 of the two piezoelectric elements 10 is provided with an electrode portion 22 except at least one end portion 13 of the piezoelectric element 10, and the one end portion 13 serves as a non-electrode region 23, and one end portion of the first piezoelectric element 10. The back surface 12 of the first piezoelectric element 10 and the front surface 11 of the second piezoelectric element 10 are laminated so that 13 and the one end 13 of the second piezoelectric element 10 are displaced from each other.

  Accordingly, the non-electrode region 23 provided on the surface 11 of the one end portion 13 of the second piezoelectric element 10, the electrode portion 22 provided on the surface 11 of the second piezoelectric element 10, and the first piezoelectric element. A non-electrode region 23 provided on the surface 11 of the one end 13 of the electrode 10 and an electrode portion 22 provided on the surface 11 of the first piezoelectric element 10 are arranged in that order. Two piezoelectric elements 10 laminated in this way are shown in FIG. The lengths of the non-electrode region 23, the electrode portion 22, the non-electrode region 23, and the electrode portion 22 correspond to the circumferential length of the outer peripheral surface 21 of the columnar body 20.

  The two stacked piezoelectric elements 10 are wound in a substantially spiral shape from the other end 14 of the piezoelectric element 10 to form the columnar body 20, whereby the circumferential direction of the columnar body 20 is formed on the outer peripheral surface 21 of the columnar body 20. The non-electrode region 23, the electrode portion 22, the non-electrode region 23, and the electrode portion 22 may be exposed in that order.

[Second Embodiment]
Next explained is the second embodiment of the invention. Hereinafter, regarding the piezoelectric transducer according to the second embodiment, a configuration different from the piezoelectric transducer according to the first embodiment will be described, and the description of the same configuration will be omitted. In the second embodiment, the columnar body 20 is formed in the step of forming the columnar body 20 by winding the piezoelectric element 10 around the rod-shaped core 200 to form the columnar body 20. . Moreover, the point which embosses the columnar body 20 wound around the core 200 differs from the embossing process of 1st Embodiment.

  The formation process of the columnar body 20 will be described with reference to FIGS. FIG. 7 is an explanatory diagram showing the core 200 and the piezoelectric element 10 wound around the core 200, and FIG. 8 is an explanatory diagram showing the embossing process of the columnar body 20.

  A deformed portion 202 having a surface shape different from the surrounding surface shape is formed in at least one place on the outer peripheral surface 201 of the core 200. The deformed portion 202 is formed in a planar shape.

  First, in the step of forming the columnar body 20, the stacked piezoelectric elements 10 are wound around the core 200 as in the first embodiment. FIG. 7A shows the superposed piezoelectric element 10 and the core 200 disposed under the substantially central portion 15 of the piezoelectric element 10. FIG. 7B shows the piezoelectric element 10 that has begun to be wound around the core 200 from its substantially central portion 15.

  Thus, the stacked piezoelectric elements 10 are wound in a substantially spiral shape from the substantially central portion 15 of the piezoelectric element 10 to the core 200 to form the columnar body 20. On the outer peripheral surface 21 of the columnar body 20, the non-electrode region 23, the electrode part 22, the non-electrode region 23, and the electrode part 22 are exposed in that order along the circumferential direction of the columnar body 20. In addition, the columnar body 20 is formed by winding the piezoelectric element 10 in a substantially spiral shape so that the electrode section 22 corresponds to the planar deformed section 202 of the core 200.

  Next, in the embossing process of the columnar body 20, the shape of the mold 100 is made to correspond to the shape of the outer peripheral surface 201 of the core 200, and the columnar body 20 is embossed. FIG. 8A shows a core 200 having a planar shape deformed portion 202 and a mold 100 having a planar portion 101 corresponding to the deformed portion 202.

  Further, the holding block 500 in which the deformed portion 202 of the core 200 is fitted in the recessed portion 501 is indicated by an phantom line in FIG. 8A. Thereby, the core 200 is positioned by the holding block 500, and the columnar body 20 can be embossed in a state where the flat portion 101 of the die 100 corresponds to the shape of the deformed portion 202 of the core 200. In FIG. 8A, the planar portion 101 of the mold 100 and the deformed portion 202 of the planar shape of the core 200 face each other with the electrode portion 22 therebetween.

  When the columnar body 20 is pressed by the pair of molds 100, the flat portion 101 of the mold 100 pushes the electrode portion 22 of the columnar body 20 toward the central axis of the columnar body 20. Thereby, the surface shape of the electrode part 22 of the columnar body 20 becomes a planar shape. FIG. 8B shows the columnar body 20 in which the mold 100 and the electrode portion 22 have a planar shape.

  FIG. 8C shows a pair of molds 100 opened after the mold pressing. After the embossing, the columnar body 20 and the core 200 are taken out. The core 200 is pulled out from the columnar body 20. It should be noted that the core 200 may be eliminated in a firing step which is a subsequent step.

  In the second embodiment, the electrode portion 22 is the singular portion 30 and the surface shape of the electrode portion 22 is a planar shape, but the non-electrode region 23 may be the singular portion 30. In this case, the piezoelectric element 0 is wound in a substantially spiral shape so that the non-electrode region 23 corresponds to the deformed portion 202 of the core 200 to form the columnar body 20, and the plane of the mold 100 is sandwiched between the non-electrode regions 23. What is necessary is just to oppose the part 101 and the deformed part 202 of the planar shape of the core 200. FIG.

  According to the second embodiment, when the embossing is performed, the core 200 prevents the columnar body 20 from being deformed toward the center of the cylinder. It becomes possible to shape the non-electrode region 23 more accurately. Thereby, the electrode part 22 becomes clear and the discrimination between the electrode part 22 and the non-electrode region 23 becomes easy.

  Further, when the core 200 is aligned with the locating member, if the shape of the deformed portion 202 of the core 200 corresponds to the flat surface portion 101 of the mold 100, the pressing operation of the columnar body 20 becomes easy. When positioning the lead 200, for example, the deformed portion 202 of the lead 200 may be fitted to the locating member.

[Third Embodiment]
Next, a piezoelectric transducer according to a third embodiment of the present invention will be described with reference to FIG. FIG. 9A is a perspective view of the columnar body 20. In the third embodiment, the outer peripheral shape of the columnar body 20 is an elliptical shape.

  In the third embodiment, the radius of curvature of the surface shape of the electrode portion 22 is larger than the radius of curvature of the surface shape of the non-electrode region 23. In the step of forming the columnar body 20, the piezoelectric element 10 is wound in a substantially spiral shape, and the non-electrode region 23, the electrode portion 22, the non-electrode region 23, and the electrode portion 22 are exposed in that order on the outer peripheral surface 21. 20 is shown in FIG.

  Next, the embossing process of the columnar body 20 will be described with reference to FIGS. 9B and 9C. A mold 100 having a curved portion 102 is used. The curvature radius of the curved surface of the curved portion 102 is larger than the radius of the columnar body 20. When the curvature radius of the curved surface of the curved portion 102 is increased as much as possible, the flat portion 101 of the mold 100 according to the first embodiment is obtained.

  In FIG. 9B, a pair of molds 100 face each other with the columnar body 20 in between. As shown in FIG. 9C, when the columnar body 20 is pressed by the pair of molds 100, the curved portion 102 of the mold 100 pushes the electrode portion 22 of the columnar body 20 toward the central axis of the columnar body 20. Thereby, the electrode part 22 is formed in the surface shape of the curvature radius of the same magnitude | size as the curvature radius of the curved part 102. FIG. Further, the non-electrode region 23 is formed in a surface shape having a curvature radius smaller than the radius of the columnar body 20.

  According to the columnar body 20 embossed as described above, the columnar body 20 is stabilized with the electrode portion 22 having a large curvature radius facing downward. Even when the inspection tool or the soldering tool is brought into contact with the columnar body 20 in the inspection operation or the lead wire 40 mounting operation, the columnar body 20 is stable, does not roll or slide, and the columnar body 20 is fixed to a predetermined shape. There is no need to return it to the position. Thereby, work such as inspection can be performed in a short time.

  In the third embodiment, the radius of curvature of the surface shape of the electrode portion 22 is configured to be larger than the radius of curvature of the surface shape of the non-electrode region 23. The radius of curvature of the surface shape of 22 may be larger.

[Fourth Embodiment]
Next, a piezoelectric transducer according to a fourth embodiment of the present invention will be described with reference to FIG. FIG. 10A is a perspective view of a columnar body.

  In the fourth embodiment, the electrode part 22 is the singular part 30. The surface shape of the electrode portion 22 is a groove shape that is recessed toward the central axis of the columnar body 20. FIG. 10B shows the columnar body 20 in which the electrode portion 22 and the non-electrode region 23 are exposed on the outer peripheral surface 21. Since the size of the electrode portion 22 corresponds to the size of the groove shape, it is smaller than the size of the electrode portion 22 shown in FIGS. 2B and 9B. The size of the electrode portion 22 is the size of the electrode portion 22 when the non-electrode region 23, the electrode portion 22, the non-electrode region 23, and the electrode portion 22 are arranged in that order by overlapping the piezoelectric elements 10. Equivalent to.

  Next, the embossing process of the columnar body 20 is demonstrated with reference to FIG.10 (b) and (c). In FIG. 10B, a pair of molds 100 face each other with the columnar body 20 in between. As shown in FIG. 10C, when the columnar body 20 is embossed by the pair of molds 100, the convex surface portion 103 of the mold 100 pushes the electrode portion 22 of the columnar body 20 toward the central axis of the columnar body 20. The portion 22 is formed into a groove shape recessed toward the central axis.

  According to the columnar body 120 according to the fourth embodiment, since the surface shape of the electrode portion 22 is a groove shape, an inspection tool, for example, a test piece 301 is fitted into the groove-shaped electrode portion 22 in an inspection operation. Thus, the inspector 301 can be brought into contact with the electrode portion 22. Thereby, if a pair of test | inspection element 301 is engage | inserted in the groove-shaped electrode part 22, and a voltage is applied, test | inspection work can be performed efficiently.

  Further, in the mounting operation of the lead wire 40, the tip end portion of the lead wire 40 can be easily positioned by fitting the tip end portion of the lead wire 40 into the groove-shaped electrode portion 22. Further, it is only necessary to fit a soldering device into the groove-shaped electrode portion 22, and soldering can be easily performed. Thereby, the attachment work of the lead wire 40 can be performed efficiently.

  In order to efficiently perform inspection work and lead wire 40 attachment work, the groove width and groove depth of the groove-shaped electrode portion 22 are the instruments used in the inspection process and lead wire 40 attachment process, for example, inspection. This corresponds to the shape and size of the child 301, the lead wire 40, and the soldering instrument.

  In the fourth embodiment, the size of the electrode portion 22 is smaller than the size of the electrode portion 22 shown in FIG. 2B or FIG. 9B. May be the same as the size shown in FIG. 2B or FIG. 9B. In this case, the groove-shaped singular part 30 may be formed in the center of the electrode part 22.

It is explanatory drawing of the columnar body formed by providing an electrode part in the surface and back surface of a sheet-like piezoelectric element, and winding up this. It is explanatory drawing of the columnar body by which the embossing was carried out. It is a flowchart which shows the manufacturing process of a piezoelectric conversion element. It is explanatory drawing which shows an inspection process. It is explanatory drawing which shows the attachment operation | work of a lead wire. FIG. 3 is a perspective view of two superimposed piezoelectric elements. It is explanatory drawing which showed the piezoelectric element wound around the core which concerns on 2nd Embodiment, and a core. It is explanatory drawing which shows the stamping process of a columnar body. (A) is explanatory drawing of the columnar body which concerns on 3rd Embodiment, (b) and (c) are explanatory drawings of the stamping process of a columnar body. (A) is a perspective view of the columnar body which concerns on 4th Embodiment, (b) And (c) is explanatory drawing of the stamping process of a columnar body. It is a figure which shows the structure of the SIDM actuator using the conventional piezoelectric transducer. It is a figure which shows the process of winding up the conventional piezoelectric conversion element. It is a perspective view explaining the electrode structure of the surface of a piezoelectric element before winding up the conventional piezoelectric conversion element, and a back surface. It is sectional drawing of the conventional piezoelectric conversion element of the state wound up to the cylindrical body.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Piezoelectric element, 11 ... Front surface, 12 ... Back surface, 13 ... One end part, 14 ... Other end part, 15 ... Center part, 20 ... Columnar body, 21 ... Outer peripheral surface, 22 ... Electrode part, 23 ... Non-electrode area | region, 30 ... Singular part, 40 ... Lead wire, 100 ... Mold, 101 ... Flat part, 102 ... Curved part, 103 ... Convex part, 200 ... Core, 201 ... Outer peripheral surface, 202 ... Deformed part, 300 ... Examination table, 301 ... Inspector, 400 ... support base, 401 ... holding member, 402 ... holding surface, 500 ... holding block, 501 ... concave

Claims (23)

A first electrode is formed on the surface of a sheet-like piezoelectric element made of a ceramic-based piezoelectric material, a first non-electrode region where no electrode is formed at one end of the sheet-like piezoelectric element, and a second electrode is formed on the back surface. An electrode-attached sheet-like piezoelectric element formed so as to have a second non-electrode region where no electrode is formed at the other end of the sheet-like piezoelectric element, the first non-electrode region, the first electrode portion, and the second non-electrode region The roll-type piezoelectric element is formed by winding up the sheet-like piezoelectric element so that the second electrode portions are exposed to the outside, and wound up in a roll shape so that the folded portion is centered on the inner side. A conversion element,
One of the first and second electrode portions or the first and second non-electrode regions has a surface shape including a singular portion. First and second sheet-like piezoelectric elements made of a ceramic piezoelectric material are provided, the first electrode is formed on the surface of the first sheet-like piezoelectric element, and no electrode is formed at the end of the sheet-like piezoelectric element. Formed so as to have one non-electrode region, a second electrode is formed on the surface of the second sheet-like piezoelectric element, and a second non-electrode region is formed so that no electrode is formed at the end of the sheet-like piezoelectric element. In addition, the back surface of the first sheet-like piezoelectric element and the surface of the second sheet-like piezoelectric element are connected to the first non-electrode region side end of the first sheet-like piezoelectric element and the second sheet-like piezoelectric element. A laminated sheet-like piezoelectric element with an electrode laminated and laminated in a state in which the second non-electrode region side end of the element is shifted from each other, the first non-electrode region, the first electrode portion, the second non-electrode region, Wound in a roll so that the two electrode parts are exposed to the outside. A roll-type piezoelectric transducer constituted by raised,
One of the first and second electrode portions or the first and second non-electrode regions has a surface shape including a singular portion.   The roll-type piezoelectric transducer according to claim 1 or 2, wherein the unique portion is a flat surface.   Either one of the first and second electrode portions including the singular portion or the first and second non-electrode regions is a flat surface. The roll-type piezoelectric conversion element as described.   The singular part is configured to be concave with respect to another part of either one of the first and second electrode parts including the singular part or the first and second non-electrode regions. The roll-type piezoelectric transducer according to claim 1.   The roll-type piezoelectric transducer according to claim 4, wherein the flat surface is formed on the first and second electrode portions.   The roll-type piezoelectric transducer according to claim 4, wherein the flat surface is formed in the first and second non-electrode regions. A first electrode is formed on the surface of a sheet-like piezoelectric element made of a ceramic-based piezoelectric material, a first non-electrode region where no electrode is formed at one end of the sheet-like piezoelectric element, and a second electrode is formed on the back surface. An electrode-attached sheet-like piezoelectric element formed so as to have a second non-electrode region where no electrode is formed at the other end of the sheet-like piezoelectric element, the first non-electrode region, the first electrode portion, and the second non-electrode region The roll-type piezoelectric element is formed by winding up the sheet-like piezoelectric element so that the second electrode portions are exposed to the outside, and wound up in a roll shape so that the folded portion is centered on the inner side. A conversion element,
The roll type piezoelectric transducer has an elliptical cross section, and has a shape in which the curvature radii of the surfaces of the first and second electrode portions are different from the curvature radii of the surfaces of the first and second non-electrode regions. A roll-type piezoelectric conversion element characterized by comprising: First and second sheet-like piezoelectric elements made of a ceramic piezoelectric material are provided, the first electrode is formed on the surface of the first sheet-like piezoelectric element, and no electrode is formed at the end of the sheet-like piezoelectric element. Formed so as to have one non-electrode region, a second electrode is formed on the surface of the second sheet-like piezoelectric element, and a second non-electrode region is formed so that no electrode is formed at the end of the sheet-like piezoelectric element. In addition, the back surface of the first sheet-like piezoelectric element and the surface of the second sheet-like piezoelectric element are connected to the first non-electrode region side end of the first sheet-like piezoelectric element and the second sheet-like piezoelectric element. A laminated sheet-like piezoelectric element with an electrode laminated and laminated in a state in which the second non-electrode region side end of the element is shifted from each other, the first non-electrode region, the first electrode portion, the second non-electrode region, Wound in a roll so that the two electrode parts are exposed to the outside. A roll-type piezoelectric transducer constituted by raised,
The roll type piezoelectric transducer has an elliptical cross section, and has a shape in which the curvature radii of the surfaces of the first and second electrode portions are different from the curvature radii of the surfaces of the first and second non-electrode regions. A roll-type piezoelectric conversion element characterized by comprising: A method for manufacturing a roll-type piezoelectric transducer,
A first electrode is formed on the surface of a sheet-like piezoelectric element made of a ceramic piezoelectric material so as to have a first non-electrode region where no electrode is formed at one end of the sheet-like piezoelectric element, and the back surface of the sheet-like piezoelectric element Forming the second electrode so as to have a second non-electrode region where no electrode is formed at the other end of the sheet-like piezoelectric element;
The sheet-like piezoelectric element in which the first electrode portion, the second electrode portion, the first non-electrode region, and the second non-electrode region are formed is the first electrode portion, the second electrode portion, the first non-electrode region, and the second. A step of forming a columnar body by winding up in a roll shape so that the folded portion is the inner center, with the end portions of the sheet-like piezoelectric elements being shifted and folded with each other so that the non-electrode region is exposed to the outside;
A firing step of firing the columnar body,
Embossing that deforms the surface shape of one of the first and second electrode portions or the first and second non-electrode regions of the columnar body to a surface shape including a singular portion before the firing step. The manufacturing method of the roll type piezoelectric conversion element characterized by including a process.   The method for manufacturing a roll-type piezoelectric transducer according to claim 10, wherein the embossing step performs embossing so that the singular part forms a flat surface.   The embossing step includes embossing so that either one of the first and second electrode portions including the singular portion or the first and second non-electrode regions forms a flat surface. The method for producing a roll-type piezoelectric transducer according to claim 10.   In the embossing step, the embossing is performed so as to form a recess with respect to the other part of either one of the first and second electrode parts including the singular part or the first and second non-electrode regions. The method for producing a roll-type piezoelectric transducer according to claim 10.   The method for manufacturing a roll-type piezoelectric transducer according to claim 11 or 12, wherein in the embossing step, the flat surfaces are formed on the first and second electrode portions.   13. The method of manufacturing a roll-type piezoelectric transducer according to claim 11, wherein the embossing step forms the flat surface in the first and second non-electrode regions.   The roll die according to any one of claims 10 to 15, wherein the method for manufacturing the roll-type piezoelectric transducer includes a cutting step of cutting the columnar body into a predetermined length after the firing step. A method for manufacturing a piezoelectric transducer. A method for manufacturing a roll-type piezoelectric transducer,
First and second sheet-like piezoelectric elements made of a ceramic piezoelectric material are provided, the first electrode is formed on the surface of the first sheet-like piezoelectric element, and no electrode is formed at the end of the sheet-like piezoelectric element. Formed so as to have one non-electrode region, a second electrode is formed on the surface of the second sheet-like piezoelectric element, and a second non-electrode region is formed so that no electrode is formed at the end of the sheet-like piezoelectric element. An electrode forming step,
The back surface of the first sheet-like piezoelectric element and the front surface of the second sheet-like piezoelectric element are connected to the end of the first sheet-like piezoelectric element on the first non-electrode region side and the second sheet-like piezoelectric element. A laminated sheet-like piezoelectric element with electrodes laminated in a state where the second non-electrode region side end is shifted from each other, the first non-electrode region, the first electrode portion, the second non-electrode region, the second A step of forming a columnar body by winding up into a roll shape so that each electrode part is exposed to the outside;
A firing step of firing the columnar body,
Including a stamping step of deforming the surface shape of one of the first and second electrode portions or the first and second non-electrode regions to a surface shape including a singular portion before the firing step. A method for manufacturing a roll-type piezoelectric transducer characterized by the above.   18. The method of manufacturing a roll-type piezoelectric transducer according to claim 17, wherein the embossing step includes embossing so that the singular part forms a flat surface.   The embossing step includes embossing so that either one of the first and second electrode portions including the singular portion or the first and second non-electrode regions forms a flat surface. A method for manufacturing a roll-type piezoelectric transducer according to claim 17.   In the embossing step, the embossing is performed so as to form a recess with respect to the other part of either one of the first and second electrode parts including the singular part or the first and second non-electrode regions. The method for manufacturing a roll-type piezoelectric transducer according to claim 17.   20. The method for manufacturing a roll-type piezoelectric transducer according to claim 18, wherein the embossing step forms the flat surfaces on the first and second electrode portions.   20. The method for manufacturing a roll-type piezoelectric transducer according to claim 18, wherein the embossing step forms the flat surface in the first and second non-electrode regions.   The roll mold according to any one of claims 17 to 22, wherein the method for manufacturing the roll-type piezoelectric transducer includes a cutting step of cutting the columnar body into a predetermined length after the firing step. A method for manufacturing a piezoelectric transducer.

Images