JP2009172705A - Workpiece supporting tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To support workpiece provided with an irregular surface without deforming the workpiece, even when the form of the workpiece and a magnet chuck are changed, and to minimize preparing time when machining the workpiece. <P>SOLUTION: A workpiece supporting tool 1 has a base material 3 provided with magnetic force generation portions 11 and 13 for generating magnetic force by magnetic force generated by the magnetic chuck TB, and a supporting member 5 which is engaged to the magnetic force generation portions 11 and 13 of the base material 3 to be movable in relation to the base material 3 and is sucked to the magnetic force generation portions 11 and 13 to directly or indirectly support the workpiece W integrally with the base material 3 when the magnetic chuck TB generates magnetic force. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a workpiece support, and in particular, a workpiece support that is installed between a surface on which a magnetic chuck generates a magnetic force and a workpiece (workpiece) and supports the workpiece (for example, for grinding). Work support used).

  FIG. 14 is a diagram showing a conventional grinding process.

  Grinding of the workpiece W is performed by rotating the grindstone GR and moving the grindstone GR relative to the workpiece W in the direction of the arrow.

  FIG. 15 is a plan view showing a support form of the workpiece W when the grinding is performed, and FIG. 16 is a side view showing a support form of the workpiece W when the grinding is performed. Note that the surface of the workpiece W appearing in FIG. 15 (the surface above the workpiece W in FIG. 16) is a surface that is ground by the grindstone GR.

  It is necessary to support the workpiece W when grinding. This support is performed using a plurality of jack bolts (small jacks) JB while supporting the workpiece W at three locations using the base member B and the workpiece support RP.

  The work support RP is composed of a member whose height does not change (the vertical dimension in FIG. 16), and the jack bolt JB can be adjusted in height.

  The reason for using the jack bolt JB is that the surface of the workpiece W is not a perfect plane, but a slight irregular surface, and if it is not supported by the jack bolt JB, the workpiece W will vibrate when it is ground. This is because there is a risk of occurrence. Note that the movement of the workpiece W in the lateral direction (left and right vertical direction in FIG. 15; the horizontal direction in FIG. 16 and the direction perpendicular to the paper surface in FIG. 16) is regulated by a stopper member (not shown), and the workpiece W is being ground during grinding. It is designed not to slip.

  By the way, when the jack bolt JB is used, it is necessary to adjust the height of the jack bolt JB every time the workpiece W is processed, and much time is required for setup. Further, in the middle of the work W, it is difficult to adjust the height by installing the jack bolt JB because it is difficult for the hand to enter.

Therefore, a configuration in which a magnet is used instead of the jack bolt to support the workpiece W is employed. For example, Patent Document 1 can be cited as a patent document relating to a technique using the conventional magnet.
JP-A-2-269533

  By the way, in a conventional work support using a magnet, the magnet chuck and the component that directly supports the work by contacting the work are integrated, so there is no versatility and the shape of the work changes or the magnet chuck In the case of changing, it is necessary to remanufacture component parts that directly support the workpiece, or to disassemble and reassemble them, which requires a lot of time for setup.

  The present invention has been made in view of the above problems, and can support a workpiece having an irregular surface without deforming it even when the shape of the workpiece or the magnet chuck is changed. An object of the present invention is to provide a work support that can reduce the setup time during processing as much as possible.

  According to the first aspect of the present invention, there is provided a base material provided with a magnetic force generation part that generates a magnetic force by the magnetic force generated by the magnet chuck, and is movable with respect to the base material by engaging with the magnetic force generation part of the base material. And a work support tool having a support member that is attracted to the magnetic force generation portion of the base material and supports the work directly or indirectly by being integrated with the base material when the magnetic chuck generates a magnetic force. It is.

  According to a second aspect of the present invention, an N-pole magnetic force generating surface that generates an N-pole magnetic force by the N-pole magnetic force generated by the magnet chuck and an S-pole magnetic force by the S-pole magnetic force generated by the magnet chuck are generated. An outer support member that includes a base having an S-polar magnetic force generating surface and a workpiece contact portion that contacts the workpiece, and is movable in a predetermined direction with respect to the base by engaging with the base And the outer support member in a direction in which the work contact portion of the outer support member is separated from the base material in contact with the outer support member. A contact portion for pushing, and in contact with each polar magnetic force generation surface of the base material and engaging with the outer support member, the predetermined direction with respect to the base material Each of the base materials. When the force generation surface generates a magnetic force, the intermediate support member that is attracted to the base material and integrated with the base material, and the workpiece contact portion of the outer support member moves in a direction away from the base material, A work support having biasing means for biasing the intermediate support member.

  According to a third aspect of the present invention, an N-pole magnetic force generating surface that generates an N-pole magnetic force by the N-pole magnetic force generated by the magnet chuck and an S-pole magnetic force by the S-pole magnetic force generated by the magnet chuck are generated. A base member provided with an S-polar magnetic force generating surface, a guide member provided integrally with the base member, and movable in a direction approaching and moving away from the base member by engaging with the guide member. An intermediate support member that is provided between the guide support member and each magnetic force generation surface of the base material and is movable with respect to the base material in the same direction as the work support member. A biasing means for biasing the intermediate support member so that a portion of the intermediate support member that is located on the workpiece support member side is separated from the base material; and a portion of the intermediate support member The workpiece support member A work support and a transmission mechanism for transmitting to the workpiece support member portion is positioned is increased forces when moving in a direction away from the substrate to.

  According to a fourth aspect of the present invention, in the workpiece support according to the second or third aspect, when each magnetic force generating surface of the base material generates a magnetic force, the N pole magnetic force generating surface of the base material is used. The workpiece support is configured such that the emitted magnetic flux passes through the inside of the intermediate support member and enters the S-pole magnetic force generation surface of the base material, and the intermediate support member is integrated with the base material.

  In the invention according to claim 5, the magnetic member formed into a rectangular plate shape with a magnetic material and the nonmagnetic member formed into a rectangular plate shape with a nonmagnetic material are alternately laminated in the thickness direction. Thus, each side surface, the magnetic member, and the nonmagnetic member are formed in a quadrangular prism shape with a lower surface and an upper surface alternately appearing, and two of the side surfaces that are parallel to each other, The magnetic member and the non-magnetic member are alternately formed on a base material, and are made of a magnetic material. A cross section formed by a plane perpendicular to the longitudinal direction is formed in an L shape, and the length is the magnetic member and the non-magnetic member. Formed in a direction slightly shorter than the thickness of the base material, which is the dimension of the base material in the direction in which the members are laminated, and the longitudinal direction coincides with the laminating direction of the magnetic member and the nonmagnetic member, One plane is one side surface of the base material and the magnetic member and the front The non-magnetic member is provided on the base material so as to come into surface contact with the side surfaces alternately appearing to form a corner against sliding, and the other inner plane faces the top surface of the base material. A first intermediate support member; first biasing means for biasing the other one plane inside the first intermediate support member away from the substrate; and the first intermediate member using a magnetic material. The magnetic member is formed in the same shape as the support member, the longitudinal direction thereof coincides with the stacking direction of the magnetic member and the nonmagnetic member, and one inner plane is the other side surface of the substrate. And the non-magnetic member are provided on the base material in such a manner that they come into surface contact with each other on the side surfaces alternately appearing to form a sliding corner, and another inner plane faces the top surface of the base material. The second intermediate support member and another one plane inside the second intermediate support member is the base material. A second biasing means for biasing away from the base, and a base end side portion formed in a rectangular plate shape with a predetermined thickness and a tip end side portion formed in a short columnar shape are substantially plate-like The two side surfaces in which the magnetic member and the non-magnetic member appear alternately in the distance between the base member formed in the inner surface and the two inner planes formed in a rectangular cylindrical shape and parallel to each other Which is slightly larger than the distance between the other two side surfaces of the substrate different from that between the other two planes different from the inner two planes parallel to each other. The distance is an outer dimension of each intermediate support member installed on the base material, and is slightly slightly larger than the outer dimension in the direction perpendicular to the side surface where the magnetic member and the nonmagnetic member appear alternately. One end of the central axis in the extending direction is aligned with the base end side portion of the base member. And a cover member that is physically provided and extends in a direction away from the base member, and is formed in a rectangular bowl shape, and a flat surface of the base end side portion of the base member is installed on the base material. In contact with each intermediate support member, and two planes inside the cover member are in surface contact with the other two side surfaces of the substrate to form a sliding corner, and other planes inside the cover member Two flat surfaces are provided on the base material and the intermediate support members so as to make a corner against sliding by making surface contact with the outer surface of the intermediate support members provided on the base material. A work support having an outer support member.

  According to the sixth aspect of the present invention, a magnetic member formed into a rectangular plate shape with a magnetic material and a nonmagnetic member formed into a rectangular plate shape with a nonmagnetic material are alternately stacked in the thickness direction. Thus, each side surface, the magnetic member, and the nonmagnetic member are formed in a quadrangular prism shape with a lower surface and an upper surface alternately appearing, and two of the side surfaces that are parallel to each other, A base material in which magnetic members and non-magnetic members appear alternately, a lid member formed in a rectangular plate shape and having a circular through-hole in the center, and a rectangular tube shape, the thickness of the lid member A cylindrical member provided integrally with the lid member so as to extend from one surface in the vertical direction, and formed into a rectangular bowl shape, the lid member being separated from the upper surface of the base material Parallel to each other, and the base end side of the cylindrical member surrounds the side surface of the substrate. The guide member is integrally formed with the magnetic member, and a cross section formed by a plane orthogonal to the longitudinal direction is formed in an L shape, and the length is laminated on the magnetic member and the nonmagnetic member. Formed in a direction slightly shorter than the thickness of the base material, which is the dimension of the base material in the direction, the longitudinal direction coincides with the lamination direction of the magnetic member and the non-magnetic member, and one inner plane is the base One side surface of the material, in which the magnetic member and the non-magnetic member alternately appear, come into surface contact with each other to form a corner against sliding, and one outer surface forms the sliding treatment. A plane parallel to one inner plane is movable in a direction orthogonal to the upper surface of the base material by forming a sliding pair with one inner plane of the cylindrical member, and The other inner plane is parallel to the top surface of the substrate An intermediate support member provided between the base member and the cylindrical member, and an urging means for urging the other one plane inside the intermediate support member away from the base member. A cylindrical guide part and a work support part formed integrally with the guide part on one end side in the longitudinal direction of the guide part and formed in a short cylindrical shape with an outer diameter larger than the outer diameter of the guide part The guide part is formed in a shape having a lever contact part provided integrally with the guide part on the other end side in the longitudinal direction, and the guide part is engaged with the through hole of the lid member. The base member is movable in the same direction as the intermediate support member, and the lever contact portion is between the upper surface of the base member and the lid member of the guide member. Located on the lid member side, the work support site is the lid member A support member provided on the lid member, and a fulcrum constituting member in which a portion on one end side in the longitudinal direction is provided integrally with the base material on the upper surface of the base material The urging force by the urging means is such that the intermediate portion in the longitudinal direction abuts on the lever abutting portion and the portion on the other end in the longitudinal direction abuts on the intermediate support member. And a lever constituting member transmitted by the workpiece supporting member.

  According to the present invention, even when the shape of the workpiece or the magnet chuck is changed, the workpiece having an irregular surface can be supported without being deformed, and the setup time for machining the workpiece is minimized. There exists an effect that the workpiece support which can be provided is provided.

[First embodiment]
FIG. 1 is a perspective view showing a schematic configuration of a workpiece support 1 according to the first embodiment of the present invention, FIG. 2 is a view taken in the direction of arrow II in FIG. 1, and FIG. 3 is III in FIG. 4 is a view taken along an arrow IV in FIG. 1, and FIG. 5 is a cross-sectional view taken along line VV in FIG. 4.

  Instead of the conventional jack bolt JB, the workpiece support 1 is mounted on the magnet chuck TB and installed between the magnet chuck TB and the workpiece W. The support member 5, the intermediate support member 7, and the biasing means 9 are provided.

  The base 3 is provided with an N-pole magnetic force generation surface (for example, a plane) 11 that generates N-pole magnetic force by the N-pole magnetic force generated by the magnet chuck TB, and a magnet chuck that is provided apart from the N-pole magnetic force generation surface 11. An S-pole magnetic force generation surface (for example, a plane) 13 that generates the S-pole magnetic force by the S-pole magnetic force generated by TB is provided. The S-pole magnetic force generation surface 13 is present on the same plane as the N-pole magnetic force generation surface 11. However, the S-pole magnetic force generation surface 13 is not necessarily present in the same plane. 11 may be a plane parallel to 11.

  The magnet chuck TB has a movable permanent magnet inside, and generates a magnetic force or does not generate a magnetic force by swinging a handle (not shown) provided outside the magnet chuck TB. Can be switched. An electromagnetic magnet chuck may be adopted as the magnet chuck TB. The magnet chuck TB is provided with a separator sp made of a nonmagnetic material such as aluminum.

  The substrate 3 is separate from the magnet chuck TB and is detachable from the magnet chuck TB. The substrate 3 includes a first surface (for example, a flat surface) 15 that communicates with the N-pole magnetic force generation surface 11 and the magnetic flux, and a second plane (for example, a flat surface) 17 that communicates with the S-pole magnetic force generation surface 13 and the magnetic flux. ing. The first surface 15 is in surface contact with a surface (for example, a plane) TBN that generates the N pole of the magnet chuck TB, and the second surface 17 is a surface (for example, a plane) that generates the S pole of the magnet chuck TB. The magnet chuck TB is installed so as to be in surface contact with the TBS. When the magnet chuck TB generates a magnetic force in the state of being installed as described above, the magnetic force generation surfaces 11 and 13 of the substrate 3 generate a magnetic force.

  The outer support member 5 includes a workpiece contact portion 19 that contacts the workpiece W. The work contact portion 19 is, for example, a plane orthogonal to the magnetic force generation surfaces 11 and 13. Further, the outer support member 5 is movable in a predetermined direction (for example, a direction orthogonal to the plane of the workpiece contact portion 19; the up and down direction in FIG. 5) with respect to the base material 3 by engaging with the base material 3. It has become.

  More specifically, for example, the work contact of the outer support member 5 is made on a flat surface 21 other than the magnetic force generation surfaces 11 and 13 and perpendicular to the magnetic force generation surfaces 11 and 13 and the work contact surface 19. The outer support member 5 is movable with respect to the base material 3 by engaging a portion (for example, a flat surface) 23 different from the portion 19 (for example, by making contact with the surface and making a corner against sliding). . In addition, each magnetic force generation surface 11 and 13 of the base material 3, the workpiece | work contact part (work contact surface) 19 of the outer side support member 5, and the surface 23 of the outer side support member 5 engaged with the base material 3 are mutually orthogonal, for example is doing.

  The intermediate support member 7 is made of a magnetic material such as iron or steel, and is provided between the surface 31 of the outer support member 5 and the magnetic force generation surfaces 11 and 13 of the substrate 3. Further, the intermediate support member 7 abuts against the outer support member 5 and pushes the outer support member 5 in a direction in which the work contact portion 19 of the outer support member 5 moves away from the base material 3 (upward direction in FIG. 5). The unit 25 is provided. Further, the intermediate support member 7 engages with the magnetic force generation surfaces 11 and 13 of the base member 3 in surface contact with each other (the flat surface 27 engages in a sliding pair) and engages with the flat surface 31 of the outer support member 5. By joining (for example, by making the flat surface 29 come into surface contact with each other and make a corner against sliding), the base 3 and the outer support member 5 are in the predetermined direction (the same direction as the outer support member 5). It is free to move.

  When the base member 3 is appropriately installed on the magnet chuck TB and the magnetic chuck TB generates a magnetic force, the magnetic force generating surfaces 11 and 13 of the base member 3 generate a magnetic force. So as to be integrated with the base material 3 and fixed to the base material 3.

  As described above, the outer support member 5 includes the plane 31 parallel to the magnetic force generation surfaces 11 and 13 of the base material 3, and the parallel plane 31 and the magnetic force generation surfaces 11 and 13 of the base material 3. The intermediate support member 7 is provided between the magnetic force generation surfaces 11 and 13 of the base member 3 and the intermediate support member 7 in surface contact with the magnetic force generation surfaces 11 and 13 in such a state. There is a slight gap between one surface 27. There is also a slight gap between the flat surface 31 of the outer support member 5 and the other surface (a flat surface parallel to the surface 27) 29 of the intermediate support member 7 in surface contact with the flat surface 31. Further, the planar contact portion 25 of the intermediate support member 7 is in surface contact with the outer support member 5. The intermediate support member 7 can move smoothly and linearly in the predetermined direction with respect to the base material 3 and the outer support member 5.

  The biasing means 9 biases the intermediate support member 7 so that the workpiece contact portion 19 of the base material 3 moves in a direction away from the base material 3 (upward direction in FIG. 5). By biasing by the biasing means 9, the base material 3 is biased via the intermediate support member 7 (contact portion 25), and the workpiece contact portion 19 of the base material 3 is biased in a direction away from the base material 3. It is like that.

  By the way, in the workpiece support 1, when the magnetic force generation surfaces 11 and 13 of the base material 3 generate magnetic force, the magnetic flux emitted from the N-pole magnetic force generation surface 11 of the base material 3 passes through the inside of the intermediate support member 7. (The magnetic flux passes through only the inside of the intermediate support member 7 without passing through the outer support member 5 and the workpiece W) and enters the S-polar magnetic force generation surface 13 of the base material 3, so that the intermediate support member 7 is in the base material 3. It is comprised so that it may be integrally supported by.

  The workpiece support 1 will be described in more detail.

  The base material 3 includes a magnetic member 33 formed of a magnetic material in a rectangular plate shape and a nonmagnetic member 35 formed of a nonmagnetic material and formed in a rectangular plate shape thinner than the magnetic member 33 in the thickness direction. By alternately laminating, a planar lower surface 37, a planar upper surface 39, and planar planar side surfaces 21 and 41 are provided to form a quadrangular prism shape. In a state where the magnetic member 33 and the nonmagnetic member 35 are stacked, the magnetic member 33 and the nonmagnetic member 35 are in surface contact with each other.

  On the lower surface 37, the magnetic members 33 and the nonmagnetic members 35 appear alternately. The upper surface 39 is parallel to the lower surface 37, and similarly to the lower surface 37, the magnetic members 33 and the nonmagnetic members 35 appear alternately. On the two side surfaces 21 parallel to each other, only the magnetic member 33 appears. On the side surfaces 41 parallel to each other, the magnetic members 33 and the nonmagnetic members 35 appear alternately, and the magnetic force generation surfaces 11 and 13 are displayed. Is configured.

  The lamination of the plurality of magnetic members 33 and the plurality of nonmagnetic members 35 is, for example, in the order of the magnetic member 33, the nonmagnetic member 35, the magnetic member 33, the nonmagnetic member 35, and the magnetic member 33. Both ends of the stack are magnetic members 33. Further, for example, the longitudinal direction of the rectangular lower surface 37 and the upper surface 39 coincides with the stacking direction (thickness direction) of the magnetic member 33 and the nonmagnetic member 35. Accordingly, two of the four side surfaces 21 and 41 that are parallel to each other (the side surfaces located at both ends in the longitudinal direction of the upper surface 39 and the lower surface 37 of the base material 3; the magnetic member 33 and the nonmagnetic member 35). In the two side surfaces (21) which are orthogonal to the two side surfaces 41 parallel to each other, only the magnetic member 33 appears.

  As described above, the first intermediate support member 7A (7) is made of a magnetic material, and a cross section formed by a plane orthogonal to the longitudinal direction (thickness direction) of the base material 3 is formed in an L shape. (See FIG. 5). The length of the first intermediate support member 7A is slightly shorter than the thickness of the base material 3 which is the length dimension of the base material 3 in the direction in which the magnetic member 33 and the nonmagnetic member 35 are laminated. ing. Further, the longitudinal direction of the first intermediate support member 7A coincides with the lamination direction of the magnetic member 33 and the nonmagnetic member 35, and one flat surface 27 inside the first intermediate support member 7A is one of the base material 3. A side surface 41 in which the magnetic member 33 and the nonmagnetic member 35 alternately appear is in surface contact with the side surface 41 to form a sliding corner, and another one flat surface 43 inside the first intermediate support member 7A is a base. Further, the base material 3 is arranged so as to face the upper surface 39 of the material (so as to be separated from each other in parallel), and in the stacking direction of the magnetic member 33 and the nonmagnetic member 35 (direction perpendicular to the paper surface of FIG. 5). The first intermediate support member 7 </ b> A is provided on the base material 3 so as to enter the inside.

  The first biasing means 9 </ b> A biases the other one flat surface 43 inside the first intermediate support member 7 </ b> A away from the upper surface 39 of the base material 3. Specifically, a cylindrical blind hole 45 is provided on the upper surface 39 of the substrate 3. A compression coil spring 47 having a free length that is larger than the depth of the hole 45 is inserted into the hole 45. The end of the compression coil spring 47 protruding from the blind hole 45 is in contact with the other one flat surface 43 inside the first intermediate support member 7A. The first intermediate support member 7 </ b> A is biased by the compression coil spring 47.

  The second intermediate support member 7B and the second urging means 9B are provided symmetrically with the first intermediate support member 7A and the first urging means 9A with respect to the center of the base material 3. The intermediate support member 7B is biased in the same manner as the first intermediate support member 7A.

  The outer support member 5 includes a base member 49 and a cover member 51 and is formed in a rectangular bowl shape. The base member 49 is made of a magnetic material or a non-magnetic material, and is substantially composed of a base end portion 53 formed in a rectangular plate shape with a predetermined thickness and a tip end portion 55 formed in a short columnar shape. It is formed in a plate shape. The central axis of the base end portion 53 and the central axis of the tip end portion 55 coincide with each other, and the end surface of the tip end portion 55 forms the workpiece contact portion 19.

  The cover member 51 is a non-magnetic body and is formed in a rectangular cylinder, and the distance between the two inner planes 23 and 23 that are parallel to each other is determined by the two side surfaces (magnetic member) of the substrate 3. 33 and the non-magnetic member 35 are slightly larger than the distance between the side surfaces 21 and 21 (the width dimension of the base material 3).

  Further, the distance between the inner planes 31 of the cover member 51 (two other planes different from the inner two planes 23, 23) 31, 31 is set to each intermediate support member 7 </ b> A installed on the base material 3. 7B is slightly larger than the outer dimension (the outer dimension in the left-right direction in FIG. 5 which is a direction orthogonal to the side surface 41 on which the magnetic members 33 and the nonmagnetic members 35 appear alternately).

  One end portion of the cover member 51 in the extending direction of the central axis is provided integrally with the base end side portion 53 of the base member 49, and the tip end side portion 55 is interposed between the base end portion side portion 53. Is the opposite side, and the cover member 51 extends away from the base member 49.

  A plane of the base end portion 53 of the base member 49 (a plane located on the side opposite to the tip end portion 55; the lower surface of the base member 49 in FIG. 5) is installed on the base 3. Surface contact with each intermediate support member 7A, 7B (surface contact with the outer flat surface 25 of each intermediate support member 7A, 7B), and the two flat surfaces 23, 23 inside the cover member 51 The other two planes 31 inside the cover member 51 are in surface contact with the two side surfaces 21 and the other two planes 31 inside the cover member 51 are the outer surfaces 29 of the intermediate support members 7A and 7B provided on the base member 3, respectively. The outer support member 5 is provided on the base material 3 and the intermediate support members 7A and 7B so as to make surface contact with 29 and form a corner against the slip.

  By providing the outer support member 5 in this way, the outer support member 5 and the intermediate support member 7 are movable in a direction perpendicular to the upper surface 39 of the base material 3. Further, not only each intermediate support member 7A, 7B but also the outer support member 5 is urged by each urging means 9A, 9B in the direction in which the base member 49 is separated from the base material 3 (upward direction in FIG. 5). Yes. Further, a side surface 41 located on the bottom surface (lower surface) 37 side of the base material 3 is provided with a rectangular (quadrangular columnar) concave portion 57, and the front end portion (base) of the cover member 51 of the outer support member 5. On the opposite side of the member 49, a convex portion 59 that protrudes inside the cover member 51 is provided. When the convex portion 59 enters the concave portion 57, the movement stroke of the outer support member 5 and the intermediate support members 7A and 7B is restricted, and the outer support member 5 and the intermediate support members 7A and 7B are separated from the base material 3. It is supposed not to.

  As described above, the base material 3 is configured by laminating the magnetic member 33 and the nonmagnetic member 35. However, the magnetic member 33 and the nonmagnetic member 35 are joined by laminating bolts or positioning pins. It is made by penetrating in the direction. The thicknesses of the magnetic member 33 and the nonmagnetic member 35 are appropriately determined according to the pitch of the separators sp existing on the magnetic force generating surface of the magnet chuck TB.

  That is, when the workpiece support 1 is used, the stacking direction of the magnetic member 33 and the nonmagnetic member 35 in the base material 3 (the thickness direction of the magnetic member 33 or the nonmagnetic member 35) and the separator sp of the magnet chuck TB are set. And the thickness direction of the nonmagnetic member 35 of the base material 3 and the thickness center of the separator sp of the magnet chuck TB are substantially matched with each other, The work support 1 is placed on the magnet chuck TB by bringing the lower surface 37 of the substrate 3 into surface contact with the upper surface of the magnet chuck TB (see FIGS. 1, 2, and 4). At this time, only one magnetic member 33 of the base material 3 comes into surface contact with one N-pole magnetic force generation surface TBN of the magnet chuck TB, and the base material 3 contacts with one S-pole magnetic force generation surface TBS of the magnet chuck TB. The thickness of the magnetic member 33 and the nonmagnetic member 35 of the base material 3 is determined so that only the other one magnetic member 33 is in surface contact.

  Here, the workpiece support RP shown in FIGS. 15 and 16 will be described with reference to FIG.

  The workpiece support RP is configured by laminating a magnetic member RPA, a nonmagnetic member RPB, and a magnetic member RPC, and a short columnar workpiece contact portion RP5 is provided on the upper portion. Notches RP1 and RP2 are provided below the magnetic members RPA and RPC. Each part RP3 of the magnetic member RPA is in contact with the N-pole magnetic force generation surface TBN of the magnet chuck TB, and each part RP4 of the magnetic member RPC is in contact with the S-pole magnetic force generation surface TBS of the magnet chuck TB. Are appropriately mounted. When the magnet chuck TB generates a magnetic force, the magnetic flux MF passes through the workpiece W placed on the workpiece support RP and supports the workpiece W. The height PRH of the work support RP is constant.

  Next, a method for using the workpiece support 1 will be described.

  First, as an initial state, when the magnet chuck TB is not generating a magnetic force, as shown in FIG. 15, work support tools RP are arranged at appropriate three locations on the upper surface of the magnet chuck TB, and the magnet chuck TB The workpiece support 1 is disposed at an appropriate location on the upper surface. The height of the workpiece support 1 at this time is “h”, which is the maximum height, as shown in FIG. 5, and is larger than the height PRH of the workpiece support RP. The stroke of the outer support member 5 in the work support 1 is “st”, and the value of “h-st” is smaller than the height PRH of the work support RP.

  When the workpiece W is placed on the workpiece support RP and the workpiece support 1 in a state where the workpiece support RP and the workpiece support 1 are arranged in this manner, each workpiece support 1 of each workpiece 1 is caused by the weight of the workpiece W. The outer support member 5 (intermediate support member 7) appropriately moves to the base material 3 side (magnet chuck TB side; lower side in FIG. 5).

  Subsequently, when the magnet chuck TB generates a magnetic force, the magnetic flux generated by the magnet chuck TB passes through the inside of the intermediate support member 7, and the intermediate support member 7 is integrally fixed to the base material 3, and the outer support member 5. Accordingly, the workpiece support RP and the workpiece support 1 can support the workpiece W having an irregular surface.

  In this way, grinding as shown in FIG. 14 can be performed with the workpiece W supported. When grinding is performed, the workpiece W is prevented from moving in the vertical and horizontal directions in FIG. 15 by a stopper (not shown) as in the prior art.

  If the generation of the magnetic force from the magnet chuck TB is stopped after the completion of grinding or the like and the workpiece W is removed from the workpiece support RP and the workpiece support 1, the above-described initial state is obtained.

  According to the workpiece support 1, since the workpiece support 1 is configured separately from the magnet chuck TB, the workpiece having an irregular surface even when the shape of the workpiece W or the magnet chuck TB is changed. W can be supported without being deformed, and the intermediate support member 7 (outer support member 5) is fixed to the base material 3 using magnetic force to support the work W. Therefore, the work can be compared with a case where a jack bolt is used. Setup time when processing W can be reduced.

  In addition, according to the work support 1, the intermediate support member 7 is provided between the outer support member 5 and the magnetic force generation surfaces 11 and 13 of the base 3 and moves. That is, since the intermediate support member 7 moves, a very small gap is formed between the intermediate support member 7 and the outer support member 5 or between the intermediate support member 7 and the magnetic force generation surfaces 11 and 13 of the base material 3. The intermediate support member 7 moves smoothly with respect to the base material 3 and the outer support member 5. Therefore, even if the workpiece W is lightweight, the intermediate support member 7 and the outer support member 5 can move smoothly and the workpiece W can be easily set up.

  Further, according to the work support 1, the magnetic flux MF emitted from the N-pole magnetic force generation surface 11 of the base material 3 passes through the intermediate support member 7 and enters the S-pole magnetic force generation surface 13 of the base material 3. Since the support member 7 is configured to be integrally supported by the base material 3, the magnetic flux MF hardly leaks to the work W, and there is almost no possibility that the work W is deformed by the magnetic force, and the deformation of the work W is suppressed as much as possible. The workpiece W can be supported in the state.

[Second Embodiment]
6 is a perspective view showing a schematic configuration of a workpiece support 101 according to the second embodiment of the present invention, FIG. 7 is a view taken along arrow VII in FIG. 6, and FIG. 8 is VIII in FIG. FIG. 9 is a cross-sectional view taken along the line IX-IX in FIG. 6, and FIG. 10 is a cross-sectional view taken along the line XX in FIG. 6.

  The workpiece support 101 according to the second embodiment of the present invention is related to the first embodiment of the present invention in that a part of the magnetic flux (magnetic flux MFO; see FIG. 7) passes through the inside of the workpiece W. Different from the workpiece support 1.

  More specifically, the work support 101 includes a base material 103 (corresponding to the base material 3) and a work support member 105 (corresponding to the outer support member 5).

  The base material 103 is configured by laminating a magnetic member 107 and a nonmagnetic member 109. Further, the nonmagnetic member 109 is provided with a notch 111, and the lower end portion of the work support member 105 is engaged with the inside of the notch 111 so as to form a sliding corner. A lid member 113 is integrally provided on the upper portion of the base material 103. The lid member 113 is provided with a through hole 116, and the columnar intermediate portion of the work support member 105 is engaged with the through hole 116 in a slipping corner. The workpiece support member 105 is movable with respect to the base material 103.

  A compression coil spring 117, which is an example of an urging means, is provided inside the notch 111 and urges the work support member 105 upward (in a direction in which the work support member 105 protrudes from the base material 103). . A seal member 115 is provided to prevent foreign matter such as water and sludge from entering the notch 111 from between the through hole 116 and the part of the work support member 105 engaged therewith. .

  Next, a method for using the workpiece support 101 will be described.

  First, as an initial state, when the magnet chuck TB is not generating a magnetic force, as shown in FIG. 15, work support tools RP are arranged at appropriate three locations on the upper surface of the magnet chuck TB, and the magnet chuck TB The workpiece support 101 is disposed at an appropriate location on the upper surface. The height of the workpiece support 1 at this time is “h” as shown in FIG. 10, which is larger than the height PRH of the workpiece support RP. Note that the stroke of the workpiece support member 105 in the workpiece support 101 is “st”, and the value of “h−st” is smaller than the height PRH of the workpiece support RP.

  As described above, when the workpiece W is placed on the workpiece support RP and the workpiece support 101 in a state where the workpiece support RP and the workpiece support 101 are arranged, the weight of each workpiece support 101 depends on the weight of the workpiece W. Each work support member 105 appropriately moves to the base material 103 side (magnet chuck TB side; lower side in FIG. 10).

  Subsequently, when the magnet chuck TB generates a magnetic force, the magnetic flux generated by the magnet chuck TB passes through the inside of the work support member 205, and the work support member 205 is integrally fixed to the base material 203. Accordingly, the workpiece support RP and the workpiece support 201 can support the workpiece W having an irregular surface. In this way, grinding as shown in FIG. 14 can be performed with the workpiece W supported.

  By the way, when the magnet chuck TB generates a magnetic force, each magnetic member 107 is magnetized to N or S as shown in FIG. Then, a part of the magnetic flux MF passes only inside the work support member 105 and the work support member (work support member at the center in FIG. 7) 105 is integrally supported by the base material 103. The magnetic flux MFO of the part passes through the work W, and the work support members (work support members at the left and right ends in FIG. 7) 105 are integrally supported by the base material 103.

[Third Embodiment]
FIG. 11 is a cross-sectional view illustrating a schematic configuration of a workpiece support 201 according to the third embodiment of the present invention, and corresponds to FIG. FIG. 12 is an enlarged view of a portion XII in FIG.

  The work support 201 according to the third embodiment of the present invention transmits force between the intermediate support member 207 (corresponding to the intermediate support member 7) and the work support member 205 (corresponding to the outer support member 5). Unlike the workpiece support 1 according to the first embodiment in that the transmission mechanism 209 is provided, the other points are configured in substantially the same manner as the workpiece support 1 and are used in substantially the same manner.

  More specifically, the work support 201 includes a base material 203, a guide member 211, a work support member 205, an intermediate support member 207, an urging means 213, and a transmission mechanism 209.

  The substrate 203 is provided with an N-pole magnetic force generating surface 215 that generates N-pole magnetic force by the N-pole magnetic force generated by the magnet chuck TB, and an S that is provided away from the N-pole magnetic force generating surface 215 and that is generated by the magnet chuck TB. And an S-pole magnetic force generation surface 217 that generates an S-pole magnetic force by the polar magnetic force.

  The guide member 211 is made of, for example, a nonmagnetic material, and is provided integrally with the base material 203 with a portion 219 facing the upper surface of the base material 203. A circular through hole 221 is provided at the center of the plate-like portion 219 facing the upper surface of the substrate 203.

  The work support member 205 is made of a magnetic material or a non-magnetic material, and engages with the guide member 211 (the circular through hole 221 of the portion 219) to approach or separate from the base material 203 (see FIG. 11 in the vertical direction).

  The intermediate support member 207 is made of a magnetic material, and is provided between the guide member 211 and the magnetic force generation surfaces 215 and 217 of the base material 203, and is attached to the base material 203 in the same direction as the work support member 205. On the other hand, it is free to move.

  The biasing means 213 is a part of the intermediate support member 207 so that the part 223 located on the workpiece support member 205 side is separated from the base material 203 (so that the intermediate support member 207 moves upward in FIG. 11). ), And biases the intermediate support member 207.

  The transmission mechanism 209 is provided between the work support member 205 and the intermediate support member 7, and a direction in which a part 223 located on the work support member 205 side of the intermediate support member 207 is separated from the base material 203. This is a mechanism for increasing the force when moving to the workpiece supporting member 205 by using, for example, a lever (a lever component member) 257 and transmitting it to the workpiece support member 205.

  Since the urging means 213 urges the intermediate support member 207 in the vicinity of the portion 223 of the intermediate support member 207, the transmission mechanism 209 increases the urging force of the intermediate support member 207 by the urging means 213. It can also be considered as an urging force transmission means that transmits to the support member 205 and urges the workpiece support member 205 in the same direction as the intermediate support member 207 (upward direction in FIG. 11).

  The workpiece support 201 will be described in more detail.

  As in the case of the workpiece support 1, the base member 203 includes a magnetic member 225 made of a magnetic material and a rectangular plate shape, and a non-magnetic material made of a rectangular plate shape thinner than the magnetic member 225. Magnetic members 227 are alternately stacked in the thickness direction (stacked in a direction perpendicular to the paper surface of FIG. 11) to form a quadrangular prism. Then, the planar lower surface 229 in which the magnetic member 225 and the nonmagnetic member 227 appear alternately, and the magnetic member 225 and the nonmagnetic member 227 appear alternately in the same manner as the lower surface 229 that is parallel to the lower surface 229. A planar upper surface 231 and planar planar side surfaces orthogonal to the lower surface 229 and the upper surface 231.

  Note that the magnetic members 225 and the nonmagnetic members 227 appear alternately on the two side surfaces 233 and 235 that are parallel to each other.

  The guide member 211 includes a lid member 219 and a cylindrical member 237 and is formed in a rectangular bowl shape. The lid member (part) 219 is made of a magnetic material or a non-magnetic material and is formed in a rectangular plate shape, and is formed in a rectangular plate shape having a circular through hole 221 in the center. The cylindrical member 237 is formed of a non-magnetic material in a rectangular cylindrical shape, and is integrated with the lid member 219 so as to extend from one surface (the lower surface in FIG. 11) of the lid member 219 in the thickness direction. Is provided.

  In the guide member 211, the lid member 219 is separated from the upper surface 231 of the base material 203 and becomes parallel, and the distal end side (the lower side in FIG. 11) of the guide member 211 (tubular member 237) is the base material 203. These are integrally provided on the base material 203 so as to surround each side surface.

  The intermediate support member 207 is made of a magnetic material, and has a L-shaped cross section formed by a plane orthogonal to the longitudinal direction. The length of the intermediate support member 207 (the dimension in the direction orthogonal to the paper surface of FIG. 11) is slightly larger than the thickness of the substrate 203 which is the dimension of the substrate 203 in the direction in which the magnetic member 225 and the nonmagnetic member 227 are stacked. It is formed short.

  The longitudinal direction of the intermediate support member 207 coincides with the stacking direction of the magnetic member 225 and the nonmagnetic member 227, and one inner plane 239 is one side surface of the base material 203, and the magnetic member 225 and the nonmagnetic member. The flat surface 241 that is in contact with the side surfaces 233 alternately appearing on the side surface 227 to form a sliding opposite corner and that is parallel to the outer one plane and the inner one plane 239 that performs the sliding treatment is provided as a guide. By making a sliding pair with one flat surface 243 inside the member 211, the intermediate support member 207 is perpendicular to the upper surface 231 and the lower surface 229 of the base material 203 (up and down in FIG. 11). Direction).

  Further, the intermediate support member 207 is provided between the base member 203 and the guide member 211 (cylindrical member 237) so that the other one flat surface 245 inside this intermediate support member 207 is parallel to the upper surface 231 of the base member 203. ing. The other one surface 247 outside the intermediate support member 207 is not a flat surface but has a convex arc shape.

  The biasing means 213 biases the intermediate support member 207 using, for example, a compression coil spring 249 so that the other one flat surface 245 inside the intermediate support member 207 is separated from the base material 203.

  The work support member 205 is made of a magnetic material or a non-magnetic material, and is formed in a shape including a columnar guide part 251, a work support part 253, and a lever contact part 255. The workpiece support portion 253 is formed in a short columnar shape with an outer diameter larger than the outer diameter of the guide portion 251, and is integrated with the guide portion 251 on one end side in the longitudinal direction of the guide portion 251 (upper side in FIG. 11). Is provided. The lever contact part 255 is provided integrally with the guide part 251 on the other end part (lower side in FIG. 11) in the longitudinal direction of the guide part 251.

  Then, when the guide part 251 engages with the through hole 221 of the lid member 219, the workpiece support member 205 is in the same direction as the intermediate support member 207 with respect to the guide member 211 (base material 203) (up and down in FIG. 11). Direction). Further, the lever contact portion 255 is positioned on the lid member 219 side between the upper surface 231 of the base material 203 and the lid member 219 of the guide member 211, and the workpiece support portion 253 is located outside the lid member 219 on the upper side in FIG. The work supporting member 205 is provided on the lid member 219 so as to protrude to the front.

  The lever constituent member 257 is configured in a flat plate shape, for example, and is provided between the upper surface 231 of the base material 203 and the lid member 219 of the guide member 211. The lever component 257 is integrally provided on the base material 203 on the upper surface 231 of the base material 203 at a point P1 shown in FIG. 11 is in contact with the lever contact portion 255 at the point P3 shown in FIG. 11, and is located on the other end side in the longitudinal direction (see FIG. 11). 11 is in contact with the other surface 247 outside the intermediate support member 207 at the point P2 shown in FIG. 11, and the urging force by the urging means 213 is increased ((L1 + L2) / It is transmitted to the work support member 205 (increased by L1 times).

  Each point P1, P2, P3 is actually a straight line extending in a direction orthogonal to the paper surface of FIG. Therefore, the lever component member 257 is in line contact with the fulcrum member 259, the lever contact portion 255, and the surface 247 of the intermediate support member 207. Further, a seal member 261 is provided in the same manner as the workpiece support 101.

  According to the workpiece support 201, the transmission mechanism 209 increases the force of the intermediate support member 207 and transmits it to the workpiece support member 205. Therefore, the work support member 205 can support the work W with a force larger than the holding force of the intermediate support member 207 on the magnetic force generation surfaces 215 and 217.

  In the work support 201 as well, as in the case of the work support 1, the magnetic flux emitted from the N-pole magnetic force generation surface 215 passes only inside the intermediate support member 207 and enters the S-pole magnetic force generation surface 217. Thus, the intermediate support member 207 is integrally supported by the base material 203.

  The workpiece support according to each of the above-described embodiments is provided with an N-pole magnetic force generation site that generates an N-pole magnetic force by an N-pole magnetic force generated by a magnet chuck, and is provided apart from the N-pole magnetic force generation site. A base material provided with an S pole magnetic force generation site that generates the magnetic force of the S pole by the magnetic force of the S pole generated by the magnet chuck, and moves relative to the base material by engaging with each magnetic force generation site of the base material. A workpiece having a supporting member that is freely supported and that is attracted to each magnetic force generation portion of the base material and supports the workpiece directly or indirectly by being integrated with the base material when the magnetic chuck generates a magnetic force. It is an example of a support tool.

It is a perspective view showing a schematic structure of work support 1 concerning a 1st embodiment of the present invention. It is II arrow directional view in FIG. It is a III arrow directional view in FIG. It is IV arrow line view in FIG. It is VV sectional drawing in FIG. It is a perspective view which shows schematic structure of the workpiece support tool 101 which concerns on the 2nd Embodiment of this invention. It is a VII arrow line view in FIG. It is a VIII arrow line view in FIG. It is IX-IX sectional drawing in FIG. It is XX sectional drawing in FIG. It is sectional drawing which shows schematic structure of the workpiece support 201 which concerns on the 3rd Embodiment of this invention, and is a figure equivalent to FIG. It is an enlarged view of the XII part in FIG. It is a perspective view which shows schematic structure of the workpiece support RP. It is a figure which shows the grinding process made conventionally. It is a top view which shows the support form of the workpiece | work W at the time of grinding. It is a side view which shows the support form of the workpiece | work W at the time of grinding.

Explanation of symbols

1, 101, 201 Work support 3, 103, 203 Base material 5 Outer support member 7, 207 Intermediate support member 9, 213 Energizing means 11, 215 N-pole magnetic force generation surface 13, 217 S-pole magnetic force generation surface 33, 107 225 Magnetic member 35, 109, 227 Non-magnetic member 51 Cover member 105, 205 Work support member 209 Transmission mechanism 211 Guide member 255 Lever contact portion 257 Lever component member 259 Support point component member

Claims (6)

A base material provided with a magnetic force generating portion that generates magnetic force by the magnetic force generated by the magnet chuck;
Engage with the magnetic force generation site of the base material and move relative to the base material, and when the magnet chuck generates magnetic force, it is attracted to the magnetic force generation site of the base material and integrated with the base material A support member that directly or indirectly supports the workpiece;
A workpiece support characterized by comprising: An N-pole magnetic force generation surface that generates an N-pole magnetic force by an N-pole magnetic force generated by the magnet chuck, and an S-pole magnetic force generation surface that generates an S-pole magnetic force by the S-pole magnetic force generated by the magnet chuck. A base material;
An outer support member that includes a workpiece contact portion that contacts the workpiece and is movable in a predetermined direction with respect to the substrate by engaging with the substrate;
Provided between the outer support member and each magnetic force generation surface of the base material, abuts against the outer support member and pushes the outer support member in a direction in which the work contact portion of the outer support member separates from the base material For contact with each of the polar magnetic force generation surfaces of the base material and engaging with the outer support member to move in the predetermined direction with respect to the base material. An intermediate support member that is free and that is attracted to the base material and integrated with the base material when each magnetic force generating surface of the base material generates a magnetic force;
Urging means for urging the intermediate support member so that the work contact portion of the outer support member moves away from the base material;
A workpiece support characterized by comprising: An N-pole magnetic force generation surface that generates an N-pole magnetic force by an N-pole magnetic force generated by the magnet chuck, and an S-pole magnetic force generation surface that generates an S-pole magnetic force by the S-pole magnetic force generated by the magnet chuck. A base material;
A guide member integrally provided on the substrate;
A workpiece support member that engages with the guide member and is movable in a direction approaching or moving away from the substrate;
An intermediate support member provided between the guide member and each magnetic force generation surface of the base material and movable relative to the base material in the same direction as the work support member;
Biasing means for biasing the intermediate support member such that a portion of the intermediate support member that is located on the workpiece support member side is separated from the base material;
A transmission mechanism that increases a force when a portion of the intermediate support member located on the workpiece support member side moves in a direction away from the base material and transmits the force to the workpiece support member;
A workpiece support characterized by comprising: In the workpiece support according to claim 2 or 3,
When each magnetic force generation surface of the base material generates a magnetic force, the magnetic flux emitted from the N-pole magnetic force generation surface of the base material passes through the inside of the intermediate support member, and the S polar magnetic force generation surface of the base material. And the intermediate support member is integrated with the base material. A magnetic member formed in a rectangular plate shape with a magnetic material and a nonmagnetic member formed in a rectangular plate shape with a non-magnetic material are alternately laminated in the thickness direction so that each side surface and the magnetic member are stacked. And the nonmagnetic member are formed in a quadrangular prism shape with lower and upper surfaces alternately appearing, and on the two side surfaces parallel to each other, the magnetic member and the nonmagnetic member are Alternating base materials;
A cross-section formed of a magnetic body and having a plane perpendicular to the longitudinal direction is formed in an L shape, and the length is a dimension of the base material in a direction in which the magnetic member and the nonmagnetic member are laminated. The magnetic member is formed slightly shorter than the thickness of the substrate, the longitudinal direction coincides with the lamination direction of the magnetic member and the nonmagnetic member, and one inner plane is one side surface of the substrate. And the non-magnetic member are provided on the base material in such a manner that they come into surface contact with each other on the side surfaces alternately appearing to form a sliding corner, and another inner plane faces the top surface of the base material. A first intermediate support member;
First urging means for urging the other one plane inside the first intermediate support member away from the substrate;
The magnetic body is formed in the same shape as the first intermediate support member, the longitudinal direction coincides with the lamination direction of the magnetic member and the nonmagnetic member, and one inner plane is the other one of the base material One side surface of the magnetic member and the non-magnetic member is alternately brought into surface contact with each other so as to form a sliding corner, and the other inner plane faces the upper surface of the substrate. A second intermediate support member provided on the substrate;
Second biasing means for biasing the other one plane inside the second intermediate support member away from the base material;
A base member formed in a substantially plate shape with a base end side portion formed in a rectangular plate shape with a predetermined thickness and a tip end side portion formed in a short columnar shape, and formed in a rectangular cylinder shape The distance between the inner two planes parallel to each other is different from the two side surfaces where the magnetic member and the non-magnetic member appear alternately between the other two side surfaces of the substrate. Each intermediate support member installed on the substrate has a distance between the other two planes that is slightly larger than the distance and different from the two inner planes that are parallel to each other. The outer dimension is slightly larger than the outer dimension in the direction orthogonal to the side surface where the magnetic member and the non-magnetic member appear alternately, and one end portion in the extending direction of the central axis is the base member Direction integrally provided at the base end side portion of the base plate and away from the base member A cover member extending in the shape of a rectangular bowl, and the plane of the base end side portion of the base member is in surface contact with each intermediate support member installed on the base material, and the cover Two planes on the inside of the member are in surface contact with the other two side surfaces of the substrate to form a sliding corner, and the other two planes on the inside of the cover member are provided on the substrate. An outer support member provided on the base material and each of the intermediate support members so as to come into surface contact with the outer surface of each intermediate support member to form a corner against sliding;
A workpiece support characterized by comprising: A magnetic member formed in a rectangular plate shape with a magnetic material and a nonmagnetic member formed in a rectangular plate shape with a non-magnetic material are alternately laminated in the thickness direction so that each side surface and the magnetic member are stacked. And the nonmagnetic member are formed in a quadrangular prism shape with lower and upper surfaces alternately appearing, and on the two side surfaces parallel to each other, the magnetic member and the nonmagnetic member are Alternating base materials;
A lid member formed in the shape of a rectangular plate and provided with a circular through-hole in the center, and a rectangular cylindrical shape formed integrally with the lid member so as to extend from one surface in the thickness direction of the lid member And the cylindrical member is formed in a rectangular bowl shape, the lid member is separated from the upper surface of the base material in parallel, and the tip side of the cylindrical member is A guide member integrally provided on the substrate so as to surround a side surface;
A cross-section formed of a magnetic body and having a plane perpendicular to the longitudinal direction is formed in an L shape, and the length is a dimension of the base material in a direction in which the magnetic member and the nonmagnetic member are laminated. The magnetic member is formed slightly shorter than the thickness of the substrate, the longitudinal direction coincides with the lamination direction of the magnetic member and the nonmagnetic member, and one inner plane is one side surface of the substrate. And the non-magnetic member alternately come into surface contact with each other to form a sliding corner, and one outer plane that is parallel to the inner one plane that performs the sliding treatment, By making a sliding pair with one inner plane of the cylindrical member, it is movable in a direction orthogonal to the upper surface of the base material, and the other inner flat surface is the base material. Between the base member and the cylindrical member so as to be parallel to the upper surface of An intermediate support member is provided;
Urging means for urging the other one plane inside the intermediate support member away from the substrate;
A columnar guide part, a work support part formed integrally with the guide part on one end side in the longitudinal direction of the guide part and formed in a short cylindrical shape with an outer diameter larger than the outer diameter of the guide part; The guide part is formed in a shape having a lever contact part provided integrally with the guide part on the other end side in the longitudinal direction, and the guide part engages with the through hole of the lid member. The base member is movable in the same direction as the intermediate support member, and the lever contact portion is located between the upper surface of the base member and the lid member of the guide member. A workpiece support member that is located on the member side and is provided on the lid member such that the workpiece support portion protrudes outside the lid member;
A portion on one end side in the longitudinal direction is in contact with a fulcrum constituent member provided integrally with the base material on the upper surface of the base material, and a middle portion in the longitudinal direction is in contact with the lever contact portion. A lever constituting member that transmits the urging force of the urging means to the work supporting member so that a portion on the other end side in the direction is in contact with the intermediate supporting member;
A workpiece support characterized by comprising:

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