JP2009170591A - Substrate storage container and fitting method for seal gasket therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate storage container capable of suppressing variation in engagement state of a seal gasket by suppressing a decrease in holding force of the seal gasket to eliminate a risk that a portion thereof falls together with a cover body, and a fitting method for the seal gasket therefor. <P>SOLUTION: The substrate storage container comprises a container main body 1 which stores a substrate, the cover body 10 fitted onto an opening of the container main body 1, a fitting-in groove 20 formed on a top of the opening, and the seal gasket 30 fitted in the fitting-in groove 20 to seal the container main body 1 and cover body 10 together, the seal gasket 30 having an engagement projection portion formed to be disposed in parallel to the direction of engagement of the cover body 10 with the opening top of the container main body 1. The seal gasket 30 comprises a frame body 31 fitted in the fitting-in groove 20 and a seal formation portion 32 extending from the frame body 31 to come into contact with the cover body 10. The engagement projection portion comprises a plurality of first engagement projection portions formed at a linear part of the frame body 31 and a second engagement projection portion formed at a corner part of the frame body 31. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a substrate storage container for storing a substrate made of a semiconductor wafer or the like and a method for attaching a seal gasket thereof.

  Although the conventional substrate storage container is not shown, a container body for storing a plurality of substrates, a lid fitted to the upper opening of the container body, and a seal between the upper opening of the container body and the lid (Refer to patent documents 1 and 2). A flat frame-shaped insertion groove is formed in the periphery of the upper opening of the container body, and a seal gasket is inserted into the insertion groove.

Although not shown, the seal gasket includes a frame body that is inserted into the insertion groove of the container body, and a seal forming portion that extends from the outer peripheral portion of the frame body and contacts the lid body, and is a predetermined thermoplastic elastomer or rubber. Is molded using. A fitting portion having a substantially U-shaped cross section that is deformed and closely fitted into the fitting groove of the container main body is formed in the frame of the seal gasket, and the container main body is obtained from the elastic repulsive force accompanying the deformation of the fitting portion. The seal gasket is held in the insertion groove. Thus, since the seal gasket is molded using a thermoplastic elastomer or rubber, the seal gasket is excellent in flexibility and elasticity, but has a feature that it is easily deformed and the perimeter is easily changed.
Japanese Utility Model Publication No. 62-51058 JP-A-10-154750

  In the conventional substrate storage container, the seal gasket is simply held in the insertion groove of the container body only by the elastic repulsive force accompanying the deformation of the fitting portion as described above. The corner portion of the seal gasket is loosened to cause a decrease in holding force, and there is a problem that when the lid is removed from the container body, a part of the seal gasket is detached together with the lid. Moreover, since the operation | work which inserts a seal gasket in the insertion groove | channel of a container main body is performed manually by the operator, there also exists a problem that variation in the insertion condition of a seal gasket generate | occur | produces by the operator's skill.

  The present invention has been made in view of the above, and suppresses a decrease in the holding power of the seal gasket, eliminates the possibility that a part of the seal gasket is detached together with the lid, and causes variations in the fitting condition of the seal gasket. It is an object of the present invention to provide a substrate storage container that can be prevented and a method for attaching the seal gasket.

In the present invention, in order to solve the above-mentioned problem, a container main body for storing a substrate, a lid fitted into the opening of the container main body, and a fitting groove formed in one of the opening and the lid of the container main body And an elastic seal gasket that is fitted in the fitting groove and seals between the opening of the container body and the lid, and the lid for the opening of the container body is provided in either the fitting groove or the sealing gasket. Forming a fitting projection located substantially parallel to the fitting direction of
The seal gasket includes a hollow frame body that is fitted into the insertion groove, and a seal forming portion that extends from the frame body and contacts either the container body or the lid body,
A plurality of fitting protrusions are formed on either the straight part of the fitting groove or the straight part of the frame body, and the first fitting projection part is formed on either the fitting groove or the corner part of the frame body. And a second fitting projection.

The frame of the seal gasket is formed from a hollow frame and a fitting portion formed in the frame and fitted into the fitting groove. A fitting protrusion is formed on the straight portion of the fitting portion. A plurality of first fitting protrusions can be formed at intervals, and a second fitting protrusion of the fitting protrusion can be formed at the corner of the fitting.
Moreover, the rib which controls the inclination of a fitting part can be formed in the outer periphery of the fitting part of a frame so that it may become substantially parallel to the fitting direction of the cover body with respect to the opening part of a container main body.

In addition, the difference Δ1 between the height of the first fitting protrusion and the width of the fitting groove into which the first fitting protrusion is fitted is set to the height of the second fitting protrusion and the second fitting protrusion. The difference Δ2 or more from the width of the fitting groove into which the fitting protrusion is fitted can be set.
It is also possible to arrange the plurality of first fitting protrusions so as to sandwich the second fitting protrusion.

  Also, the first fitting protrusion is formed in a substantially flat plate so as to be in close contact with the fitting groove, and the second fitting protrusion is formed in a substantially mountain shape or substantially step shape continuous in the circumferential direction to form the fitting groove. It is also possible to make it close.

Further, in the present invention, in order to solve the above-mentioned problem, the container body is formed in any one of a container body for storing a substrate, a lid body fitted into the opening of the container body, and the opening and lid body of the container body. An insertion groove and an elastic seal gasket that seals between the opening of the container body and the lid, and the fitting direction of the lid with respect to the opening of the container body is substantially the same as either the insertion groove or the seal gasket. It is a mounting method of a seal gasket that forms fitting protrusions positioned in parallel and fits the seal gasket into the fitting groove with a pressing jig,
The seal gasket includes a hollow frame that is fitted into the fitting groove, and a seal forming portion that extends from the outer periphery of the frame and contacts either the container body or the lid,
A plurality of fitting protrusions are formed on either the straight part of the fitting groove or the straight part of the frame body, and the first fitting projection part is formed on either the fitting groove or the corner part of the frame body. Two fitting protrusions,
The pressing jig is formed on the main body frame into which the seal gasket is inserted into the insertion groove by applying pressure, and the opposed surface of the main body frame facing the seal gasket, and is pressed against the frame body of the seal gasket (contacts in a pressure applied state). And a pressure-welded flat surface.

  The pressing jig preferably includes a grip portion formed on the outer periphery of the main body frame.

  Here, the substrate in the claims is not particularly limited to a semiconductor wafer (diameter 200, 300, 450 mm, etc.), a glass substrate, or a plurality of substrates. Further, the container body is not particularly required to be transparent, opaque, or translucent, and may be a type that stores 2 to 5 substrates in addition to a type that stores 25 or 26 substrates. The container main body may be a type that directly stores the substrate or a type that indirectly stores the substrate.

  The seal forming portion of the seal gasket is mainly formed in a tapered triangular section, a trapezoidal shape, an abbreviated shape, a substantially semicircular arc shape, or the like, and a bulging portion having a circular cross section is selectively formed at the tip. Further, the gripping portion of the pressing jig may be recessed on the outer periphery of the pair of opposing portions of the main body frame, or may be formed on the entire outer periphery of the main body frame.

  According to the present invention, if the frame body of the elastic seal gasket is fitted into the fitting groove formed in either the container body or the lid, the first and second fitting protrusions of the fitting groove and the fitting protrusion portion The parts are in close contact with each other, and the seal gasket is properly fitted into the fitting groove without variation.

  Further, according to the present invention, when the sealing gasket is inserted into the insertion groove by the pressing jig, first, the elastic sealing gasket frame is inserted into the insertion groove formed in either the container body or the lid. Then, press the flat surface of the pressing jig against the flat surface of the frame so that it does not come into contact with the seal forming part, and press the pressing jig strongly to fit the frame of the seal gasket into the fitting groove. The first and second fitting projections of the projections are in close contact with each other, and the seal gasket is properly fitted into the fitting groove without variation.

According to the present invention, it is possible to suppress a decrease in the holding power of the seal gasket and eliminate the possibility that a part of the seal gasket comes off together with the lid. Further, there is an effect that it is possible to effectively prevent the occurrence of variation in the fitting condition of the seal gasket.
Further, if a rib for restricting the inclination of the fitting portion is formed on the outer periphery of the fitting portion of the frame body so as to be substantially parallel to the fitting direction of the lid body with respect to the opening of the container body, the seal in a predetermined direction is performed. It becomes possible to prevent the gasket from falling down. Further, the rib reduces the contact area between the fitting groove and the seal gasket, and allows the seal gasket to be smoothly attached while maintaining a constant force.

Further, if the first fitting protrusion of the fitting protrusion is formed to be higher than the height of the second fitting protrusion, the fitting protrusion is brought into strong contact with the fitting groove. Can be appropriately held only at the corner portion.
Furthermore, if the pressing jig includes a gripping part that is recessed on the outer periphery of the main body frame, it can be handled safely and easily without dropping the main body frame of the pressing jig by hooking a finger or the like on the gripping part. There is an effect that can be.

  Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 8, a substrate storage container in this embodiment includes a container main body 1 for storing a substrate, and the container main body 1. The lid body 10 fitted to the upper opening of the container body, the insertion groove 20 formed to be recessed in the upper opening part of the container main body 1, and the upper opening part of the container main body 1 inserted into the insertion groove 20 by a dedicated pressing jig 50 And an elastic seal gasket 30 for sealing between the lid body 10 and a fitting projection 40 positioned parallel to the fitting direction of the lid body 10 with respect to the upper opening of the container body 1. Try to form.

  Although not shown, the substrate is made of, for example, a thinly sliced semiconductor wafer having a diameter of 200 mm, the front and back surfaces are each mirror-finished, and a notch for positioning is cut out in a substantially semicircular shape at the peripheral edge.

  The container body 1 and the lid 10 use a molding material containing a predetermined resin, for example, a thermoplastic resin made of polycarbonate, cycloolefin polymer, polyetherimide, polyethersulfone, polyetheretherketone, polypropylene, polybutylene terephthalate, or the like. And then molded. The molding material is selectively added with a conductive material made of conductive carbon, conductive fiber, metal fiber, conductive polymer, an antistatic agent, an ultraviolet absorber, or the like.

  As shown in FIG. 1, FIG. 3, FIG. 7, and FIG. 8, the container body 1 is formed into an opaque or translucent top open box type having an open top using, for example, a molding material. It functions to arrange and store through a separate cassette 3. The container main body 1 is formed in a size and shape that can accommodate a detachable cassette 3, and the peripheral edge of the opened upper part is folded outward, and a lid is formed on the upper outer peripheral surface of the opposite side walls. The locking mechanism 2 for 10 is integrally provided.

  As shown in FIG. 1, the cassette 3 is formed into a substantially rectangular tube shape having upper and lower openings using, for example, the same molding material as the container body 1 and the lid body 10. A plurality of alignment support grooves 4 each having a substantially square shape in section extending in the longitudinal direction are arranged in the front-rear direction, and a plurality of substrates are inserted into the plurality of alignment support grooves 4 from above to be aligned and supported so as not to fall off. Is done.

  As shown in FIGS. 1 and 2, the lid 10 is formed into a substantially dish-shaped opaque or semi-transparent cross section using a molding material, for example, and is detachably fitted to the upper opening of the container body 1 or the cassette 3. It functions so as to hold the upper peripheral edge of the stored substrate elastically through the body 13. The lid body 10 is formed in a substantially rectangular plane, and the peripheral wall is bent with a step, and the inner surface of the step portion of the peripheral wall forms a seal surface 11 for the seal gasket 30 (see FIG. 3). On both side walls of the lid 10, flexible locking pieces 12 that are detachably fitted and locked to the locking mechanism 2 of the container body 1 are integrally disposed.

  As shown in FIG. 1, the holding body 13 includes a holding frame 14 that is detachably attached to the inner ceiling of the lid body 10. A plurality of elastic pieces 15 are formed so as to protrude in the front-rear direction, and a holding block for individually holding the upper peripheral edge of the substrate is integrally formed at the tip of each elastic piece 15.

  As shown in FIG. 3, the insertion groove 20 is partitioned and formed in the upper part of the opening of the container main body 1 in a substantially U-shaped cross section, has a planar frame shape, and holds an endless seal gasket 30 inserted from above. To do.

  As shown in FIGS. 1 to 6, the seal gasket 30 includes a hollow frame 31 that is inserted into the insertion groove 20 of the container body 1, and an outer peripheral portion of the frame 31 that extends from the outer periphery of the frame 31. And a flat frame-shaped seal forming portion 32 that comes into contact with the opposing seal surface 11, and is formed opaque using a predetermined molding material. Examples of the molding material for the seal gasket 30 include polyester-based, polyolefin-based, fluorine-based, and urethane-based elastomers, fluorine rubber, EPDM, and silicone rubber.

  Carbon fiber, metal fiber, metal oxide, and various antistatic agents are selectively added to the molding material in order to impart conductivity and antistatic properties to the seal gasket 30. In addition, in order to impart surface stickiness to the seal gasket 30, a filler such as carbon, glass fiber, mica, talc, silica, calcium carbonate, polyethylene, polyamide, polyacetal, fluorine-based resin, silicone resin, or the like is selected. Added.

  As shown in FIG. 3, the frame 31 includes a hollow frame body portion 33 having a substantially flat cross section that is partially exposed from the inside of the insertion groove 20 and locked to the partition wall 21, and a back surface of the frame body portion 33. And a fitting portion 34 having a substantially U-shaped cross section that is projected from above and fitted into the fitting groove 20 from above, and a tapered seal forming portion 32 extends vertically upward from the flat outer peripheral portion of the frame body portion 33. Is done. In this frame body 31, an overhanging portion that protrudes in a horizontal direction from a part of the frame body 31 is formed over the entire circumference.

  A plurality of ribs 35 that regulate the inclination of the fitting portion 34 are formed on the outer peripheral surface of the fitting portion 34 so as to be parallel to the fitting direction of the lid 10 with respect to the upper opening portion of the container body 1. As shown in FIG. 2, the plurality of ribs 35 are arranged at intervals, and each rib 35 is formed in a bar shape elongated in the vertical direction.

  As shown in FIGS. 2, 4 to 6, a plurality of fitting protrusions 40 are formed at intervals on a linear portion of the inner peripheral surface of the fitting portion 34 in the frame 31 of the seal gasket 30. And a plurality of second fitting protrusions 42 respectively formed on the inner peripheral surfaces of the four corners which are corner parts of the fitting part 34 of the frame 31, A parallel relationship with the insertion direction is formed.

  The plurality of first and second fitting projections 41 and 42 are formed of the insertion groove 20 in which the first fitting projection 41 and the height of the first fitting projection 41 of the fitting projection 40 are fitted. The difference Δ1 from the width is equal to or greater than the difference Δ2 between the height of the second fitting projection 42 and the width of the fitting groove 20 into which the second fitting projection 42 is fitted (for example, about 0.05 mm). The first fitting protrusion 41 is displaced in the direction of the corner from the center line of the straight line portion, and the first fitting protrusion 41 has the second fitting protrusion 42. It is arrange | positioned so that it may pinch | interpose.

  Δ1 is set to be equal to or greater than Δ2 because the second fitting protrusion 42 is formed higher than the first fitting protrusion 41 when the width of the fitting groove 20 is equal over the entire circumference. As a result, Δ2 becomes large, and the first fitting protrusion 41 does not come into strong pressure contact with the fitting groove 20 of the straight part that is easily deformed, and there is a possibility that the holding of the fitting part 34 may be hindered only at the four corners. Because. Each first fitting protrusion 41 bulges and forms a horizontally long flat plate in the circumferential direction, closely contacts the partition wall 21 of the fitting groove 20 and adjusts the holding force of the seal gasket 30 according to the height. Each of the second fitting protrusions 42 is formed in a mountain shape or a step shape that is continuous in the circumferential direction, and is in close contact with the partition wall 21 of the fitting groove 20.

  As shown in FIG. 4, the relationship between the frame 31 of the seal gasket 30 and the fitting protrusion 40 is such that the first fitting protrusion 41 has 5.55 to 5.5 at the positions A to H of the frame 31. The second fitting protrusions 42 are respectively formed at the positions I to L of the frame 31 to a thickness of 5.50 to 5.60 mm. Since the width of the insertion groove 20 is uniformly formed as 5.2 mm over the entire circumference, the protrusion height of the first fitting protrusion 41 and the width of the insertion groove 20 are 0.35 to 0.45 mm. The projection height of the second fitting projection 42 and the width of the fitting groove 20 are 0.3 to 0.4 mm.

  The difference between the maximum dimension in the thickness direction of the frame 31 of the seal gasket 30 including the fitting protrusion 40 and the maximum dimension of the opening of the fitting groove 20 is preferably about 0.2 to 1.0 mm. If this is within the range of 0.2 to 1.0 mm, the pulling force for pulling out the seal gasket 30 from the fitting groove 20 is within the range of 1.0 to 3.9 N, preferably 1.5 to 3.4 N. This is because it can be set. In addition, when it is less than 0.2 mm, the holding force of the fitting portion 34 is not sufficient, and the seal gasket 30 is easily displaced. On the other hand, when the thickness exceeds 1.0 mm, it is difficult to attach the seal gasket 30.

  As shown in FIGS. 3, 7, and 8, the pressing jig 50 includes a body frame 51 that fits the seal gasket 30 into the fitting groove 20 of the container body 1 by applying pressure, and a seal gasket for the body frame 51. A gripping portion for gripping operation formed on the lower surface facing 30 and recessed in the circumferential direction of the outer peripheral surface of a pair of opposing facing portions of the main body frame 51 and a pressure-contact flat surface 52 that press-contacts the frame 31 53.

  The main body frame 51 is formed smaller than the outer dimension of the upper opening of the container main body 1 and smaller than the inner dimension. The pressure contact flat surface 52 is in pressure contact with the flat surface of the frame body portion 33 excluding the seal forming portion 32. In addition, the grip portion 53 is formed to have a predetermined width and depth having a substantially semicircular cross section so that a finger can be inserted and the pressing jig 50 can be securely gripped.

  In the above configuration, when the seal gasket 30 is inserted into the insertion groove 20 by the pressing jig 50, first, the fitting portion 34 of the seal gasket 30 is inserted into the insertion groove 20 of the container body 1 (see FIG. 7). The entire flat surface of the frame body 33 is brought into contact with the peripheral edge portion of the pressure contact flat surface 52 of the pressing jig 50, and the pressing jig 50 is pressed down strongly to fit the fitting portion of the seal gasket 30 into the insertion groove 20 of the container body 1. 34 are press-fitted in parallel (see FIG. 8).

  Then, the first and second fitting protrusions 41 and 42 are in close contact with the partition wall 21 of the fitting groove 20, and the seal gasket 30 is fitted into the fitting groove 20 with high accuracy and appropriateness without any variation (FIG. 3). The seal forming portion 32 of the seal gasket 30 is in uniform contact with the seal surface 11 of the peripheral wall of the lid 10.

  According to the above configuration, since the plurality of fitting protrusions 40 that are press-contacted in the fitting groove 20 are newly formed on the seal gasket 30, the holding force of the seal gasket 30 is not lowered and the position is not displaced. Therefore, when removing the lid 10 from the container body 1, a part of the seal gasket 30 is not removed together with the lid 10.

  Further, the pressing jig 50 brought into contact with the entire seal gasket 30 is strongly squeezed at once to press-fit the fitting portion 34 of the seal gasket 30 into the fitting groove 20 of the container body 1 in parallel. Due to the presence / absence and the skill of the operator, there is no variation in how the seal gasket 30 is inserted, and an appropriate mounting state of the seal gasket 30 can be easily obtained.

  In addition, a plurality of ribs 35 that contribute to the verticality of the fitting portion 34 are formed on the outer peripheral surface of the fitting portion 34 so as to be parallel to the fitting direction of the lid 10 with respect to the upper opening portion of the container body 1. It becomes possible to prevent the seal gasket 30 from falling in the direction. Furthermore, the plurality of ribs 35 can reduce the contact area between the insertion groove 20 and the seal gasket 30, and can smoothly attach the seal gasket 30 while maintaining a constant fitting force.

  Next, FIG. 9 and FIG. 10 show a second embodiment of the present invention. In this case, the substrate storage container is configured in a front open box structure having a front opening, and the lid is not the container body 1A. An endless insertion groove 20A is formed in the peripheral surface of the body 10A, and an elastic seal gasket 30 is inserted into the insertion groove 20A by a dedicated pressing jig 50.

  The container body 1A is formed in a front open box structure having an opening on the front so that a plurality of substrates made of round semiconductor wafers having a diameter of 300 mm can be aligned and stored, and the front surface of the opening is formed to bulge outward. A plurality of teeth 5 for horizontally supporting the substrate are arranged on the inner surface of the substrate at intervals.

  The lid 10 </ b> A includes a substantially dish-shaped casing 16 that fits into the front opening of the container body 1 </ b> A and a surface plate 17 that covers the front opening of the casing 16. The frame-shaped insertion groove 20 </ b> A is recessed. A locking mechanism that locks the lid 10A fitted to the container body 1A is built in between the housing 16 and the surface plate 17 of the lid 10A. A retainer 18 that elastically holds the front edge of the aligned and stored substrates is detachably attached to the center of the rear surface of the housing 16.

  The seal gasket 30 is extended from the outer peripheral portion of the frame 31 to the inner periphery of the opening front portion of the container body 1A, that is, the seal forming portion 32A elastically contacting the seal surface 11 curved in a substantially semicircular cross section. The frame body 31 of the seal gasket 30 is integrally formed with a hollow frame body portion 33 exposed from the insertion groove 20A, and a fitting portion 34A having a substantially rectangular cross section inserted into the insertion groove 20A.

  The fitting projection 40 includes a plurality of first fitting projections 41 formed on the linear portion of the inner peripheral surface of the fitting portion 34 in the frame 31 of the seal gasket 30 at intervals, and the fitting of the frame 31. The second fitting protrusions 42 are formed on the inner peripheral surfaces of the four corners which are the corners of the joint portion 34.

  The pressing jig 50 is formed on a main body frame 51 into which the seal gasket 30 is inserted into the insertion groove 20A of the lid body 10A by applying pressure, and an inner peripheral surface of the main body frame 51 facing the seal gasket 30. The pressure contact flat surface 52 that is in pressure contact with the body 31 and the gripping portion 53 for gripping operation that is formed in a recessed manner on the outer peripheral surfaces of a pair of opposing portions of the main body frame 51 that are opposed to each other.

  In the above configuration, when the sealing gasket 30 is inserted into the insertion groove 20A by the pressing jig 50, first, the fitting portion 34A of the sealing gasket 30 is inserted into the insertion groove 20A of the lid body 10A and pressed against the lid body 10A. The jig 50 is fitted through a gap, and the pressure flat surface 52 of the pressing jig 50 is brought into contact with the substantially flat entire surface protruding in a horizontal direction from a part of the frame body portion 33, so that the pressing jig 50 is strongly pressed down. Then, the fitting portion 34A of the seal gasket 30 is press-fitted into the fitting groove 20A.

  Then, the seal gasket 30 is inserted into the insertion groove 20A with high accuracy and appropriately without variation, and the seal forming portion 32A of the seal gasket 30 comes into uniform contact with the seal surface 11 of the container body 1A. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In this embodiment, the same effects as those of the above embodiment can be expected. Moreover, not only the top open box structure substrate storage container but also the front open box structure substrate storage container is reduced in holding force and misalignment of the seal gasket 30. Obviously, it is possible to suppress and prevent the above.

  The first and second fitting protrusions 41 and 42 in the above embodiment are not on the inner circumferential surface of the fitting portion 34 in the frame 31 but on the outer circumferential surface as long as the same effect can be expected. A plurality of each may be formed. In addition, the difference between the first and second fitting protrusions 41 and 42 and the fitting groove 20 is the second when the rigidity of the straight portion can be secured by the rigid material insert or rib structure to the frame member. It is also possible to enlarge the fitting protrusion 42 side and to strongly fit the corner portion. Moreover, in the said embodiment, although the fitting projection part 40 located in parallel with the fitting direction of 10 A of lids with respect to the opening part of the container main body 1 was formed in the seal gasket 30, it is not limited to this at all.

  For example, a fitting protrusion 40 that is positioned in parallel with the fitting direction of the lid 10 with respect to the opening of the container body 1 may be formed in the fitting groove 20. In this case, the fitting protrusions 40 are respectively formed at first fitting protrusions 41 that are formed at intervals with respect to the straight part of the insertion groove 20 and at the four corners that are corner parts of the insertion groove 20. The second fitting protrusion 42 is formed. Further, the grip portion 53 provided on the outer periphery of the pressing jig 50 may be a single or a plurality of protrusions that can be gripped, a handle that is installed, and the like. These installation positions can be the side wall or the upper surface of the pressing jig 50.

It is an exploded perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the seal gasket in the embodiment of the substrate storage container concerning the present invention. It is principal part sectional explanatory drawing which shows typically embodiment of the substrate storage container which concerns on this invention. It is a plane explanatory view showing typically the seal gasket in the embodiment of the substrate storage container concerning the present invention. It is a partial perspective explanatory view showing typically a straight part of a seal gasket in an embodiment of a substrate storage container concerning the present invention. It is a partial perspective explanatory view showing typically the corner of the seal gasket in the embodiment of the substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the embodiment of the substrate storage container concerning the present invention, and the attachment method of the seal gasket. FIG. 8 is a perspective explanatory view schematically showing a state in which the seal gasket of FIG. 7 is fitted in the fitting groove of the container body. It is a disassembled perspective explanatory drawing which shows typically 2nd Embodiment of the substrate storage container which concerns on this invention. It is principal part cross-sectional explanatory drawing which shows typically 2nd Embodiment of the attachment method of the substrate storage container which concerns on this invention, and its seal gasket.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container main body 1A Container main body 3 Cassette 10 Lid 10A Lid 11 Seal formation surface 20 Insertion groove 20A Insertion groove 21 Partition wall 30 Seal gasket 31 Frame body 32 Seal formation part 32A Seal formation part 33 Frame part 34 Fitting part 34A Fitting part 35 Rib 40 Fitting protrusion part 41 First fitting protrusion part 42 Second fitting protrusion part 50 Pressing jig 51 Main body frame 52 Pressing flat surface 53 Gripping part

Claims (6)

A container main body for storing a substrate, a lid fitted into the opening of the container main body, a fitting groove formed in one of the opening of the container main body and the lid, and a container fitted into the fitting groove An elastic seal gasket that seals between the opening of the main body and the lid, and is fitted into either the fitting groove or the seal gasket and is positioned substantially parallel to the fitting direction of the lid with respect to the opening of the container main body. A substrate storage container having a mating protrusion,
The seal gasket includes a hollow frame body that is fitted into the insertion groove, and a seal forming portion that extends from the frame body and contacts either the container body or the lid body,
A plurality of fitting protrusions are formed on either the straight part of the fitting groove or the straight part of the frame body, and the first fitting projection part is formed on either the fitting groove or the corner part of the frame body. A substrate storage container comprising a second fitting protrusion.   A frame of the seal gasket is formed from a hollow frame and a fitting portion formed in the frame and fitted into the fitting groove. 2. The substrate storage container according to claim 1, wherein a plurality of first fitting projections are formed at intervals, and a second fitting projection of the fitting projection is formed at a corner portion of the fitting.   The substrate storage container according to claim 2, wherein a rib for regulating the inclination of the fitting portion is formed on the outer periphery of the fitting portion of the frame body so as to be substantially parallel to the fitting direction of the lid body with respect to the opening of the container body.   The difference Δ1 between the height of the first fitting projection of the fitting projection and the width of the fitting groove into which the first fitting projection is fitted is defined as the height of the second fitting projection and the second fitting. The substrate storage container according to claim 1, 2, or 3, wherein the difference Δ2 or more from the width of the insertion groove into which the protrusion fits is equal to or greater than Δ2. A container main body for storing the substrate, a lid fitted to the opening of the container main body, an insertion groove formed in one of the opening of the container main body and the lid, an opening of the container main body and the lid, An elastic sealing gasket that seals the gap between the fitting groove and the sealing gasket, and a fitting projection that is positioned substantially parallel to the fitting direction of the lid with respect to the opening of the container body is formed. A method for attaching a sealing gasket of a substrate storage container in which a sealing gasket is fitted into a groove by a pressing jig,
The seal gasket includes a hollow frame that is fitted into the fitting groove, and a seal forming portion that extends from the outer periphery of the frame and contacts either the container body or the lid,
A plurality of fitting protrusions are formed on either the straight part of the fitting groove or the straight part of the frame body, and the first fitting projection part is formed on either the fitting groove or the corner part of the frame body. Two fitting protrusions,
The pressing jig includes a main body frame in which a seal gasket is fitted into the insertion groove by applying pressure, and a press-contact flat surface formed on an opposing surface of the main body frame facing the seal gasket and press-contacting the seal gasket frame body. A method for attaching a seal gasket of a substrate storage container, comprising:   6. The method for attaching a seal gasket for a substrate storage container according to claim 5, wherein the pressing jig includes a grip portion formed on the outer periphery of the main body frame.

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